Lifting device and ingot loading and unloading processing system

Abstract

The present application provides a lifting device and an ingot loading and unloading processing system, belonging to the technical field of ingot conveying, and solves the problem that the tightness of the ingot conveyor belt cannot be detected in time in the prior art. The lifting device of the present application includes a substrate, a conveying mechanism and a first sensor. Among them, the conveying mechanism includes conveying wheels and a driving member. There are multiple conveying wheels which are respectively arranged on the substrate. The conveying wheels are used for conveying the conveyor belt. The conveying wheels have a moving degree of freedom in the radial direction. The conveying wheels can move radially under the pressing action of the conveyor belt. The driving member acts on the conveying wheels to drive the conveying wheels to rotate and convey the conveyor belt. The first sensor is a distance sensor. The distance sensor has a detection end, and the detection end is arranged on the conveying wheels or the moving path of the conveying wheels to detect the moving distance of the conveying wheels. The present application uses the distance sensor to detect the position change of the conveying wheels, and the moving distance of the conveying wheels can be calculated, so that the tightness of the conveyor belt can be monitored in real time and with high precision.

Description

Technical Field

[0001] This application belongs to the technical field of ingot transportation. Specifically, it relates to a lifting device and an ingot loading and unloading processing system. Background Art

[0002] The transportation of ingot carriers is a conventional step in the semiconductor processing industry. Generally, an automated material handling system is selected. The overhead crane is the core part of this handling system and is used for the direct handling of ingot carriers from process machine to process machine, from process machine to buffer area, and from buffer area to process machine, and even for cross-area handling. The overhead crane is deployed on an aerial track, and the process machines are installed on the ground. Therefore, the overhead crane needs to descend to grab the ingot carrier of the process machine and then rise into the interior of the overhead crane for transportation. Therefore, the lifting device is an important component of the overhead crane, and generally drives the lifting of the ingot carrier through multiple conveyor belts.

[0003] However, after the existing lifting device is used for a period of time, its conveyor belts are prone to looseness, and the tightness of each conveyor belt is inconsistent, thereby reducing the synchronization rate of conveying and lifting, and easily resulting in the failure of the ingot carrier to dock with the ingot due to reduced accuracy. Currently, for the tightness of the conveyor belts, it is generally judged by the operator observing the inclination of the ingot carrier with the naked eye, with low detection accuracy, prone to misjudgment, and not easy to stop and adjust in time. In addition, when the ingot carrier shakes or tilts during the lifting process when encountering an obstacle, the overhead crane lacks perception and affects the smooth transportation of the ingot.

[0004] Based on the above content, the technical problem of this application is: the detection accuracy of the tightness of the conveyor belts of the existing lifting device is low. Summary of the Invention

[0005] The purpose of this application is to address the above problems existing in the prior art, and proposes a lifting device and an ingot loading and unloading processing system, which solve the problem of low detection accuracy of the tightness of the conveyor belts of the existing lifting device and improve the detection accuracy of the tightness of the conveyor belts of the lifting device.

[0006] The purpose of this application can be achieved by the following technical solutions: A lifting device includes: a base plate; a conveying mechanism, the conveying mechanism includes: conveying wheels, there are multiple conveying wheels and they are respectively arranged on the base plate, the conveying wheels are used for conveying conveyor belts, the conveying wheels have a moving degree of freedom of radial movement, and the conveying wheels can move radially under the pressure of the conveyor belts; a driving member, the driving member acts on the conveying wheels to drive the conveying wheels to rotate and convey the conveyor belts; and a first sensor, the first sensor is a distance sensor, the distance sensor has a detection end, and the detection end is arranged on the conveying wheels or the moving path of the conveying wheels to detect the moving distance of the conveying wheels.

[0007] In the above-mentioned lifting device, a mounting seat is provided on the substrate. The mounting seat is provided with a guiding hole. A rotating shaft is connected to the rotation center of the conveying wheel. At least a part of the rotating shaft is located in the guiding hole, and the rotating shaft has a freedom of movement for radial movement in the guiding hole; the detection end acts on the rotating shaft to detect the moving distance of the rotating shaft.

[0008] In the above-mentioned lifting device, the inner wall of the guiding hole includes an upper hole wall, a lower hole wall, and two side hole walls. The gap between the two side hole walls is greater than the outer diameter of the rotating shaft. The upper hole wall and the lower hole wall are at least coupled with the outer ring part of the rotating shaft to limit the vertical upward movement of the rotating shaft.

[0009] In the above-mentioned lifting device, the rotating shaft includes: a first shaft body, which is fixedly connected to the conveying wheel; a second shaft body, which is axially connected to the first shaft body. The second shaft body has a freedom of relative rotation with the first shaft body. The upper surface of the outer ring of the second shaft body is coupled with the upper hole wall, and the lower surface of the outer ring of the second shaft body is coupled with the lower hole wall.

[0010] In the above-mentioned lifting device, an elastic resetting member is further included. The elastic resetting member is arranged on the mounting seat, and the elastic resetting member is connected to the second shaft body in the radial direction so that the second shaft body always has a tendency to move in the radial direction.

[0011] In the above-mentioned lifting device, the conveying mechanism further includes a rotating wheel. The rotating wheel includes: a first wheel body, which is arranged on the substrate. A first cavity is provided inside the first wheel body for storing a conveyor belt; a second wheel body, which is coaxially connected to the first wheel body, and a second cavity is provided inside the second wheel body for storing a conveyor belt; wherein, two of the conveying wheels are provided on the side of the first wheel body facing away from the second wheel body to change the conveying direction of the conveyor belt, and one of the conveying wheels is provided on the side of the second wheel body facing away from the first wheel body. The first wheel body and the second wheel body can be respectively connected to different conveying wheels through conveyor belts.

[0012] In the above-mentioned lifting device, there are multiple groups of the conveying mechanisms. The rotating wheels of adjacent conveying mechanisms are coaxially connected by a rotating shaft, and the driving member acts on the rotating shaft to drive the adjacent conveying mechanisms to convey the conveyor belt synchronously.

[0013] In the above-mentioned lifting device, there are multiple first sensors, which respectively act on multiple conveying wheels. The first sensors are electrically connected or communicatively connected to the driving member.

[0014] Another object of the present application is to provide an ingot loading and unloading processing system, including: an overhead rail; a crane, a plurality of the cranes are respectively arranged on the overhead rail, and the crane includes: the lifting device as described above, the lifting device is slidably arranged on the overhead rail; a clamping device, the clamping device is connected to the lifting device through a conveyor belt, and the clamping device is used for clamping an ingot; an ingot loading and unloading device, the ingot loading and unloading device is arranged below the overhead rail, and the ingot loading and unloading device includes: a storage device, the storage device is used for storing a plurality of ingots; a transfer device, the transfer device is used for docking with the crane for loading and unloading; a manipulator, the manipulator is arranged between the storage device and the transfer device, and the manipulator is used for transferring the ingot from the storage device to the transfer device; and an ingot processing device, the ingot processing device is arranged below the overhead rail, and the ingot processing device conveys the ingot through the crane.

[0015] In the above ingot loading and unloading processing system, the clamping device includes: a jaw, the jaw is connected to the lifting device through a conveyor belt; a second sensor, the second sensor acts on the jaw to detect whether the ingot enters the clamping range of the jaw, and the second sensor is also electrically connected or communicatively connected to the lifting device.

[0016] In the above ingot loading and unloading processing system, the storage device includes: a plurality of limiting areas, each of the limiting areas is used for accommodating an ingot; a third sensor, the third sensor acts on the limiting area to detect whether an ingot is accommodated, and the third sensor is also electrically connected or communicatively connected to the manipulator.

[0017] In the above ingot loading and unloading processing system, the transfer device includes a docking mechanism, and the docking mechanism includes: a lifting plate, the lifting plate has a vertical degree of freedom of movement, and the lifting plate is used for placing an ingot; a plurality of limiting blocks, the limiting blocks are arranged around the lifting plate to limit the ingot; and a lifting member, the lifting member acts on the lifting plate to drive the lifting plate to protrude from the limiting blocks.

[0018] In the above ingot loading and unloading processing system, the docking mechanism further includes a fourth sensor, the fourth sensor is arranged on the limiting block, and the fourth sensor faces upward above the lifting plate to detect the position of the clamping device, and the fourth sensor is communicatively connected to the clamping device.

[0019] In the above ingot loading and unloading processing system, the transfer device further includes a blanking mechanism, and the blanking mechanism includes: a limiting plate, the limiting plate is used for placing an ingot; a fifth sensor, the fifth sensor faces the limiting plate to detect whether there is an ingot, and the fifth sensor is communicatively connected to the lifting device and the clamping device.

[0020] In the above ingot loading and unloading processing system, the manipulator includes: an X-axis horizontal module, a Z-axis vertical module, a Y-axis telescopic module, and a Z-axis rotation module; wherein, a clamping arm is provided on the Z-axis rotation module, the clamping arm is used for clamping the ingot, and a sixth sensor is further provided on the clamping arm, the sixth sensor acts on the clamping arm to detect whether the ingot enters the clamping range of the clamping arm, and the sixth sensor is electrically connected or communicatively connected to the clamping arm.

[0021] Compared with the prior art, the present application has the following beneficial effects:

[0022] 1. The lifting device of the present application uses a distance sensor to detect the position change of the conveying wheel, and the moving distance of the conveying wheel can be calculated, so that the tightness of the conveyor belt can be calculated in real time, improving the detection efficiency and having high detection accuracy at the same time. If the conveyor belt on one or some of the conveying wheels is not tightened, the operator can further repair the lifting device or adjust the conveyor belt to ensure that all conveyor belts are in the best working state and the tightness of each conveyor belt is consistent, effectively improving the conveying synchronization rate;

[0023] 2. The lifting device of the present application sets a guiding hole for the rotating shaft of the conveying wheel. When the conveying wheel is affected by the pressure of the conveyor belt, its rotating shaft can move along the inner wall of the guiding hole, so as to convert the detection of the tightness of the conveyor belt into the detection of the distance in the set moving direction of the rotating shaft, simplifying the detection difficulty and improving the detection accuracy at the same time;

[0024] 3. The lifting device of the present application divides the rotating shaft into a first shaft body and a second shaft body, so that the first shaft body rotates synchronously with the conveying wheel, and the second shaft body is inserted into the guiding hole and is limited by the upper hole wall and the lower hole wall and does not rotate. By using the relative rotation of the first shaft body and the second shaft body, it is ensured that the rotation of the conveying wheel will not be interfered, so as to realize the radial movement of the conveying wheel while still maintaining high conveying accuracy and conveying efficiency;

[0025] 4. The lifting device of the present application is connected with the second shaft body by setting an elastic resetting member. When the conveying wheel is affected by the pressure of the tightened conveyor belt, the second shaft body of the conveying wheel presses the elastic resetting member to make it contract, and moves radially against the elastic force of the elastic resetting member. When the conveyor belt is loose, the pressure on the conveying wheel decreases, so that the elastic force of the elastic resetting member is sufficient to push the second shaft body to reset, so as to automatically reset the conveying wheel to the initial state for detection;

[0026] 5. The lifting device of the present application uses multiple distance sensors to detect multiple conveying wheels respectively, so as to obtain the tightness of different conveyor belts and the height difference between each conveyor belt, and then feedback this information to the driving member through electrical signals or communication signals. The driving member can perform operations such as stopping or reducing speed, which is convenient for the operator to maintain and adjust the lifting device;

[0027] 6. The ingot loading and unloading processing system of the present application uses the high-synchronization conveyor belt of the lifting device to lift, which can ensure that the clamping device holds the ingot horizontally, has a high docking accuracy, and is not easy to clamp off or clamp off to damage the ingot. Description of the Drawings

[0028] Figure 1 is a three-dimensional structural schematic diagram of the lifting device of the present application;

[0029] Figure 2 is a front structural schematic diagram of the lifting device of the present application;

[0030] Figure 3 is a structural schematic diagram of one of the mounting seats of the present application;

[0031] Figure 4 is a structural schematic diagram of the lifting device of the present application when part of the conveyor wheels are pressed; Figure 1 ;

[0032] Figure 5 is Figure 4 a structural schematic diagram of the hidden mounting seat of the structure shown;

[0033] Figure 6 is a structural schematic diagram of the lifting device of the present application when part of the conveyor wheels are pressed; Figure 2 ;

[0034] Figure 7 is Figure 6 a structural schematic diagram of the hidden mounting seat of the structure shown;

[0035] Figure 8 is a structural schematic diagram of the first perspective of the rotating wheel of the present application;

[0036] Figure 9 is a structural schematic diagram of the second perspective of the rotating wheel of the present application;

[0037] Figure 10 is a structural schematic diagram of the ingot loading and unloading processing system of the present application;

[0038] Figure 11 is a structural schematic diagram of the ingot loading and unloading equipment of the present application;

[0039] Figure 12 is a structural schematic diagram of the overhead crane of the present application;

[0040] Figure 13 is a structural schematic diagram of the clamping device of the present application;

[0041] Figure 14 is a structural schematic diagram of the storage device of the present application;

[0042] Figure 15It is a schematic structural diagram of the transfer device in this application;

[0043] Figure 16 It is a schematic structural diagram of the manipulator in this application;

[0044] In the figure, 1000 is the ingot loading and unloading processing system; 1100 is the overhead rail; 1200 is the overhead crane; 100 is the lifting device; 110 is the substrate; 120 is the conveying mechanism; 121 is the conveying wheel; 122 is the driving part; 123 is the rotating shaft; 1231 is the first shaft body; 1232 is the second shaft body; 124 is the rotating wheel; 1241 is the first wheel body; 12411 is the first through hole; 12412 is the first cavity; 1242 is the second wheel body; 12421 is the second through hole; 12422 is the second cavity; S is the conveyor belt; 125 is the rotating shaft; 130 is the first sensor; 131 is the detection end; 140 is the mounting seat; 141 is the guiding hole; 1411 is the upper hole wall; 1412 is the lower hole wall; 1413 is the side hole wall; 142 is the elastic reset part; 200 is the clamping device; 210 is the clamping jaw; 220 is the second sensor; 1300 is the ingot loading and unloading equipment; 300 is the storage device; 310 is the limiting area; 320 is the third sensor; 400 is the transfer device; 410 is the docking mechanism; 411 is the jacking plate; 412 is the limiting block; 413 is the jacking part; 414 is the fourth sensor; 420 is the blanking mechanism; 421 is the limiting plate; 422 is the fifth sensor; 500 is the manipulator; 510 is the X-axis horizontal module; 520 is the Z-axis vertical module; 530 is the Y-axis telescopic module; 540 is the Z-axis rotating module; 550 is the clamping arm; 560 is the sixth sensor; 1400 is the ingot processing equipment; J is the ingot. Detailed implementation manners

[0045] To make the above objects, features, and advantages of this application more obvious and understandable, the following will describe in detail the specific embodiments of this application with reference to the accompanying drawings. Many specific details are set forth in the following description to fully understand this application. However, this application can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of this application. Therefore, this application is not limited by the specific embodiments disclosed below.

[0046] In the description of the present application, it should be understood that the orientation or positional relationship indicated by terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application.

[0047] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present application, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0048] In the present application, unless otherwise clearly specified and limited, terms such as "mounted", "connected", "connected to", "fixed" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0049] In the present application, unless otherwise clearly specified and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0050] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are only for illustrative purposes and do not represent the only embodiments.

[0051] Please refer to the Figure 1 and Figure 2 of the accompanying drawings of the specification. The lifting device 100 of the present application includes a substrate 110, a conveying mechanism 120 and a first sensor 130. Among them, the conveying mechanism 120 includes conveying wheels 121 and a driving member 122. There are multiple conveying wheels 121 which are respectively disposed on the substrate 110. The conveying wheels 121 are used to convey a conveyor belt S. The conveying wheels 121 have a moving degree of freedom in the radial direction. The conveying wheels 121 can move radially under the pressing action of the conveyor belt S. The driving member 122 acts on the conveying wheels 121 to drive the conveying wheels 121 to rotate and convey the conveyor belt S. The first sensor 130 is a distance sensor. The first sensor 130 has a detection end 131. The detection end 131 is disposed on the conveying wheels 121 or on the moving path of the conveying wheels 121 to detect the moving distance of the conveying wheels 121. It can be understood that by providing multiple conveying wheels 121, multiple conveyor belts S can be conveyed simultaneously. The conveyor belt S can be used to connect a load. The conveyor belt S can move in the vertical direction as the conveying wheels 121 rotate clockwise or counterclockwise, thereby realizing the lifting of the load. Regarding the detection principle and efficacy of the first sensor 130: Since the conveying wheels 121 are configured to be able to move radially, preferably having a moving degree of freedom in the horizontal direction, and the radial moving distance of the conveying wheels 121 is associated with the tightness or looseness of the conveyor belt S. When the conveyor belt S bears a heavy load, it will press the conveying wheels 121 to move radially. By using the first sensor 130 to detect the position change of the conveying wheels 121, the moving distance of the conveying wheels 121 can be calculated, so that the tightness of the conveyor belt S can be calculated in real time, improving the detection efficiency and having a high detection accuracy at the same time. If the conveyor belt S on one or some of the conveying wheels 121 is not tightened, the operator can further repair the lifting device 100 or adjust the conveyor belt S, so as to ensure that all conveyor belts S are in the best working state, the tightness of each conveyor belt S is consistent, and the conveying synchronization rate is effectively improved.

[0052] Continue to refer to Figure 1 and Figure 2, in some embodiments, a mounting seat 140 is provided on the substrate 110. The mounting seat 140 is provided with a guiding hole 141. A rotating shaft 123 is connected to the rotation center of the conveying wheel 121. The rotating shaft 123 is at least partially located in the guiding hole 141, and the rotating shaft 123 has a freedom of movement for radial movement in the guiding hole 141; the detection end 131 acts on the rotating shaft 123 to detect the moving distance of the rotating shaft 123. It can be understood that the guiding hole 141 can guide the movement of the rotating shaft 123. When the conveying wheel 121 is subjected to the pressure of the conveyor belt S, the rotating shaft 123 of the conveying wheel 121 can move along the inner wall of the guiding hole 141. The guiding direction of the guiding hole 141 for the rotating shaft 123 is preferably the horizontal direction, ensuring that the rotating shaft 123 can move easily to the left or right.

[0053] See Figure 3 , in some embodiments, the inner wall of the guiding hole 141 includes an upper hole wall 1411, a lower hole wall 1412, and two side hole walls 1413. The gap between the two side hole walls 1413 is greater than the outer diameter of the rotating shaft 123. The upper hole wall 1411 and the lower hole wall 1412 are at least coupled with the outer ring part of the rotating shaft 123 to limit the upward and downward movement of the rotating shaft 123. Exemplarily, the upper hole wall 1411 and the lower hole wall 1412 can be planes, and there is a clearance fit between the upper hole wall 1411, the lower hole wall 1412 and the outer ring of the rotating shaft 123, and the rotating shaft 123 is allowed to move along the upper hole wall 1411 and the lower hole wall 1412. The gap between the two side hole walls 1413 is configured to be greater than the outer diameter of the rotating shaft 123, so as to allow the rotating shaft 123 to have a space for movement. Preferably, the two side hole walls 1413 can be configured to be arc-shaped, and the cross-section of the entire guiding hole 141 is waist-shaped, so as to prevent the rotating shaft 123 from being damaged by moving under force and contacting the side hole walls 1413.

[0054] In some embodiments, reference may be made to Figure 5 or Figure 7 , the rotating shaft 123 includes a first shaft body 1231 and a second shaft body 1232. The first shaft body 1231 is fixedly connected to the conveying wheel 121. The second shaft body 1232 is axially connected to the first shaft body 1231. The second shaft body 1232 has a freedom of relative rotation with the first shaft body 1231. Reference may be made to Figure 4 or Figure 6, the upper surface of the outer ring of the second shaft body 1232 is coupled to the upper hole wall 1411, and the lower surface of the outer ring of the second shaft body 1232 is coupled to the lower hole wall 1412. It can be understood that by dividing the rotating shaft 123 into the first shaft body 1231 and the second shaft body 1232, the first shaft body 1231 rotates synchronously with the conveying wheel 121, and the second shaft body 1232 is inserted into the guiding hole 141 and is limited by the upper hole wall 1411 and the lower hole wall 1412 and does not rotate. Through the relative rotation of the first shaft body 1231 and the second shaft body 1232, it is ensured that the rotation of the conveying wheel 121 will not be interfered, so as to realize the radial movement of the conveying wheel 121 while still maintaining a high conveying accuracy and conveying efficiency.

[0055] In some embodiments, an elastic reset member 142 is further included. The elastic reset member 142 is disposed on the mounting seat 140, and the elastic reset member 142 is connected to the second shaft body 1232 in the radial direction, so that the second shaft body 1232 always has a tendency to move in the radial direction. It can be understood that by setting the elastic reset member 142 to be connected to the second shaft body 1232, when the conveying wheel 121 is subjected to the pressure of the tightened conveyor belt S, the second shaft body 1232 of the conveying wheel 121 squeezes the elastic reset member 142 to make it contract, and radially moves against the elastic force of the elastic reset member 142. When the conveyor belt S is loose, the pressure on the conveying wheel 121 is reduced, so that the elastic force of the elastic reset member 142 is sufficient to push the second shaft body 1232 to reset. Exemplarily, the elastic reset member 142 is a spring. Specifically, a reset hole (not shown in the figure) is further provided on the mounting seat 140, and the elastic reset member 142 is disposed in the reset hole, so as to assist the elastic reset member 142 to expand and contract along the reset hole for guiding.

[0056] See Figure 8 and Figure 9In some embodiments, the conveying mechanism 120 also includes a rotating wheel 124, and the rotating wheel 124 includes a first wheel body 1241 and a second wheel body 1242. The first wheel body 1241 is arranged on the substrate 110, and a first cavity 12412 is provided in the first wheel body 1241, and the first cavity 12412 is used to store the conveyor belt S. The second wheel body 1242 is coaxially connected to the first wheel body 1241, and a second cavity 12422 is provided in the second wheel body 1242, and the second cavity 12422 is used to store the conveyor belt S; wherein, two conveying wheels 121 are provided on the side of the first wheel body 1241 away from the second wheel body 1242 to convert the conveying direction of the conveyor belt S, and a conveying wheel 121 is provided on the side of the second wheel body 1242 away from the first wheel body 1241, and the first wheel body 1241 and the second wheel body 1242 can be respectively connected to different conveying wheels 121 through the conveyor belt S. Specifically, the first wheel body 1241 is provided with a first through hole 12411, which is communicated with the first cavity 12412 to input or output the conveyor belt S, and the second wheel body 1242 is provided with a second through hole 12421, which is communicated with the second cavity 12422 to input or output the conveyor belt S, and the second through hole 12421 and the first through hole 12411 are symmetrically arranged with respect to the central axis of the rotating wheel 124, so that the conveyor belt S transported by the two is transmitted counterclockwise and clockwise respectively. It can be understood that by dividing the rotating wheel 124 into two parts, namely the first wheel body 1241 and the second wheel body 1242, when the rotating wheel 124 is driven to rotate, the first wheel body 1241 and the second wheel body 1242 transport the conveyor belt S in different rotation directions, so that the lifting heights of the conveyor belts S of the two are kept aligned, rather than one side is higher and the other side is lower.

[0057] In some embodiments, the conveying mechanism 120 has multiple groups, and the rotating wheels 124 of adjacent conveying mechanisms 120 are coaxially connected through a rotating shaft 125, and the driving member 122 acts on the rotating shaft 125 to drive the adjacent conveying mechanisms 120 to synchronously convey the conveyor belt S. It can be understood that by coaxially driving the rotating wheels 124, the corresponding conveying wheels 121 are indirectly driven to rotate at the same time, thereby ensuring that the conveyor belts S on multiple conveying wheels 121 can be synchronously conveyed, thereby improving the synchronization rate.

[0058] In some embodiments, there are multiple first sensors 130, and they act on multiple conveying wheels 121 respectively. The first sensors 130 are electrically connected or communicatively connected to the driving member 122. It can be understood that multiple first sensors 130 are used to detect multiple conveying wheels 121 respectively, so as to obtain different tightness of the conveyor belts S and the height difference of each conveyor belt S, and then this information is fed back to the driving member 122 through electrical signals or communication signals. The driving member 122 can perform operations such as stopping or slowing down, which is convenient for operators to maintain and adjust the lifting device 100.

[0059] The working principle of the lifting device 100 of the present application:

[0060] The driving member 122 drives the rotating shaft 125 to rotate clockwise or counterclockwise. The rotating shaft 125 drives each rotating wheel 124 coaxially connected thereto to rotate synchronously. The rotating wheels rotate to convey the conveyor belt S to the conveying wheel 121. The conveying wheel 121 is a driven wheel. The conveying wheel 121 rotates to convey the conveyor belt S upward or downward. The end of the conveyor belt S can be connected to a wafer carrier, such as the clamping device 200. After clamping the wafer J, the wafer J is conveyed by the lifting of the conveyor belt S. During the conveying process, since the conveyor belt S presses against the conveying wheel 121, the first sensor 130 is used to detect the moving distance of the rotating shaft 123 of the conveying wheel 121 in real time. According to the detection result, the tightness of the conveyor belt S is calculated. When the conveyor belt S is loose, the elastic reset member 142 can drive the rotating shaft 123 to reset. When the conveyor belt S is tightened, the rotating shaft 123 can move under the pressure of the conveyor belt S to overcome the elastic action of the elastic reset member 142.

[0061] See Figure 10 , the wafer loading and unloading processing system 1000 of the present application includes: an overhead rail 1100, an overhead crane 1200, a wafer loading and unloading device 1300, and a wafer processing device 1400. See Figure 11 , the wafer loading and unloading device 1300 is arranged below the overhead rail 1100. The wafer loading and unloading device 1300 includes a storage device 300, a transfer device 400, and a manipulator 500. The storage device 300 is used to store a plurality of wafers J. The transfer device 400 is used to dock with the overhead crane 1200 for loading and unloading. The manipulator 500 is arranged between the storage device 300 and the transfer device 400. The manipulator 500 is used to transfer the wafer J from the storage device 300 to the transfer device 400. Among them, there are multiple overhead cranes 1200 which are respectively arranged on the overhead rail 1100. See Figure 12 , the overhead crane 1200 includes a lifting device 100 and a clamping device 200. The lifting device 100 is slidably arranged on the overhead rail 1100. The clamping device 200 is connected to the lifting device 100 through a conveyor belt S. The clamping device 200 is used to clamp the wafer J. The wafer processing device 1400 is arranged below the overhead rail 1100. The wafer processing device 1400 conveys the wafer J through the overhead crane 1200.

[0062] Exemplarily, the storage device 300 can be used as a warehouse to centrally store multiple ingots J. When loading materials for processing, a manipulator 500 can be used to transport the ingots J in the storage device 300 to the transfer device 400. The transfer device 400 can supply the overhead crane 1200 to pick up materials and can also receive the materials unloaded by the overhead crane 1200. The transfer device 400 can be divided into two areas. One area can be used as the loading docking point for raw materials, and the other area can be used as the temporary storage point for the unloaded defective materials after processing. Subsequently, the defective materials can be transported to the processing station by manual or robotic means for processing. The ingot processing equipment 1400 can process the ingots J, including multiple processes such as polishing, grinding, thinning, cutting, etc. In each ingot J processing process, the overhead crane 1200 slides on the overhead rail 1100 for transportation. It can be understood that by using the high-synchronization conveyor belt S of the lifting device 100 of the present application to lift, it can be ensured that the clamping device 200 clamps the ingot J horizontally, with high docking accuracy, and is not prone to clamping deviation or detachment, thus avoiding damaging the ingot J.

[0063] See Figure 13 , in some embodiments, the clamping device 200 includes a clamping jaw 210 and a second sensor 220. The clamping jaw 210 is connected to the lifting device 100 through the conveyor belt S. The second sensor 220 acts on the clamping jaw 210 to detect whether the ingot J is in place. The second sensor 220 is also electrically connected or communicatively connected to the lifting device 100. Exemplarily, the second sensor 220 is a photoelectric sensor. The photoelectric sensor is embedded in the clamping jaw 210, and the position of the ingot J is detected by the photoelectric sensor, so as to clamp or release in time. During clamping, the lifting device 100 performs lifting and conveying. In some embodiments, the second sensor 220 further includes a force feedback sensor (not shown in the figure). The force feedback sensor feeds back whether the clamping jaw 210 clamps the ingot J tightly, so as to prevent the ingot J from falling off and being damaged during lifting.

[0064] See Figure 14 , in some embodiments, the storage device 300 includes a limiting area 310 and a third sensor 320. There are multiple limiting areas 310, which are respectively used to accommodate the ingots J. The third sensor 320 acts on the limiting area 310 to detect whether there is an ingot J accommodated. The third sensor 320 is also electrically connected or communicatively connected to the manipulator 500. Exemplarily, the ingot J is limited by the limiting area 310, which is convenient for the subsequent manipulator 500 to transport. And by setting the third sensor 320 to detect whether there is an ingot J in the limiting area 310, it is ensured that the manipulator 500 effectively performs the material taking operation. Among them, the third sensor 320 is a photoelectric sensor, and the photoelectric sensor faces the limiting area 310, so as to detect the storage state of the limiting area 310 in real time.

[0065] See Figure 15, in some embodiments, the transfer device 400 includes a docking mechanism 410. The docking mechanism 410 includes a lifting plate 411, a limiting block 412, and a lifting member 413. The lifting plate 411 has a vertical degree of freedom of movement and is used to place the ingot J. There are multiple limiting blocks 412 arranged around the lifting plate 411 to limit the ingot J. The lifting member 413 acts on the lifting plate 411 to drive the lifting plate 411 to protrude above the limiting block 412. It can be understood that the lifting member 413 can be a cylinder or an electric cylinder. The lifting plate 411 has a docking state and a static state. In the static state, the upper surface of the lifting plate 411 is lower than each limiting block 412, and the limiting block 412 limits the ingot J on the lifting plate 411. In the docking state, the lifting member 413 drives the lifting plate 411 to rise, so that the ingot J at least partially protrudes from the limiting plate 421, facilitating the gripper 210 to grasp the ingot J.

[0066] In some embodiments, the docking mechanism 410 further includes a fourth sensor 414. The fourth sensor 414 is disposed on the limiting block 412 and faces upward above the lifting plate 411 to detect whether the clamping device 200 is in place. The fourth sensor 414 is communicatively connected to the clamping device 200. Exemplarily, the fourth sensor 414 is a photoelectric sensor, which is used to detect whether the position of the clamping device 200 reaches the set position and then feeds back to the clamping device 200 for timely clamping.

[0067] Continue to refer to Figure 15 , in some embodiments, the transfer device 400 further includes a blanking mechanism 420. The blanking mechanism 420 includes a limiting plate 421 and a fifth sensor 422. The limiting plate 421 is used to place the ingot J. The fifth sensor 422 faces the limiting plate 421 to detect whether there is an ingot J. The fifth sensor 422 is communicatively connected to the lifting device 100 and the clamping device 200. It can be understood that the ingot J is limited by the limiting plate 421. The fifth sensor 422 is a photoelectric sensor, which is used to detect whether an ingot J is placed on the limiting plate 421. If the detection result is no, the lifting device 100 can be used to transport the ingot J with processing defects to the limiting plate 421, release the gripper 210 of the clamping device 200 to place the ingot J, and after the ingot J is placed on the limiting plate 421, it can be transported and blanked manually or by a robot.

[0068] See Figure 16, in some embodiments, the manipulator 500 includes an X-axis horizontal module 510, a Z-axis vertical module 520, a Y-axis telescopic module 530, and a Z-axis rotation module 540; wherein, a clamping arm 550 is provided on the Z-axis rotation module 540, and the clamping arm 550 is used to clamp the ingot J. Further, a sixth sensor 560 is provided on the clamping arm 550, and the sixth sensor 560 acts on the clamping arm 550 to detect whether the ingot J enters the clamping range of the clamping arm 550. The sixth sensor 560 is electrically connected or communicatively connected to the clamping arm 550. It can be understood that the manipulator 500 of the present application has four-axis movement degrees of freedom. The sixth sensor 560 is a photoelectric sensor, and the photoelectric sensor is used to detect whether the ingot J is in place, so as to facilitate the clamping arm 550 to clamp in time. The manipulator 500 can quickly and accurately transport the ingot J.

[0069] The working principle of the ingot loading and unloading processing system 1000 of the present application:

[0070] Multiple ingots J are transported manually or by a robot and placed into the storage device 300 of the ingot loading and unloading device 1300 at one time. The limiting area 310 of the storage device 300 restricts the position of the ingot J, and the third sensor 320 can detect the signal that the ingot J is placed. When there is no ingot J on the lifting plate 411 of the docking mechanism 410 of the transfer device 400, the manipulator 500 will transport the ingot J from the storage device 300 to the lifting plate 411 through four-axis movement according to the first-in, first-out principle. The overhead crane 1200 runs on the overhead rail 1100 and interacts with the ingot loading and unloading device 1300 and the ingot processing device 1400 in real time. When any ingot processing device 1400 requests feeding, the overhead crane 1200 receives the instruction, interacts with the ingot loading and unloading device 1300, and the overhead crane 1200 runs to directly above the specified lifting plate 411. The lifting member 413 lifts the ingot J above the limiting block 412 to facilitate the clamping of the ingot J. At the same time, the lifting device 100 of the overhead crane 1200 transports the clamping device 200 downwards to a set height. The fourth sensor 414 detects that the clamping device 200 is in place, and the clamping jaws 210 close to clamp the ingot J. The conveying device drives the clamping device 200 to rise to the top. The overhead crane 1200 moves to directly above the ingot processing device 1400, and then lowers the clamping device 200 to the set height, and the clamping jaws 210 are loosened to release the ingot J. After the ingot processing device 1400 obtains the ingot J, it starts processing. When a defective ingot J appears during the processing of the ingot processing device 1400, the ingot processing device 1400 retreats the ingot J to the device docking port, and the ingot processing device 1400 calls the overhead crane 1200 to transport it. After the overhead crane 1200 obtains the information, it runs to the device docking port and stops. The overhead crane 1200 releases the clamping device 200, and the clamping jaws 210 close to clamp the defective ingot J, and the clamping device 200 rises to the top. The overhead crane 1200 interacts with the ingot loading and unloading device 1300, and the fifth sensor 422 obtains the information of the idle limiting plate 421. The overhead crane 1200 moves to directly above the idle limiting plate 421 and releases the ingot J to the limiting plate 421. Workers or robots regularly come to the ingot loading and unloading device 1300 to take away the defective ingot J and replenish the raw material ingot J.

[0071] Beneficial effects:

[0072] The lifting device 100 of the present application can detect the position change of the conveying wheel 121 by using a distance sensor, calculate the moving distance of the conveying wheel 121, and thus can calculate the tightness of the conveyor belt S in real time, improving the detection efficiency and having high detection accuracy at the same time. If the conveyor belt S on one or some of the conveying wheels 121 is not tightened, the operator can further repair the lifting device 100 or adjust the conveyor belt S to ensure that all conveyor belts S are in the best working state and the tightness of each conveyor belt S is consistent, effectively improving the conveying synchronization rate; by providing a guiding hole 141 for the rotating shaft 123 of the conveying wheel 121, when the conveying wheel 121 is affected by the pressure of the conveyor belt S, its rotating shaft 123 can move along the inner wall of the guiding hole 141, thus converting the detection of the tightness of the conveyor belt S into the detection of the distance in the set moving direction of the rotating shaft 123, simplifying the detection difficulty and improving the detection accuracy at the same time; by dividing the rotating shaft 123 into a first shaft body 1231 and a second shaft body 1232, the first shaft body 1231 rotates synchronously with the conveying wheel 121, and the second shaft body 1232 is inserted into the guiding hole 141 and is limited by the upper hole wall 1411 and the lower hole wall 1412 and does not rotate. By using the relative rotation of the first shaft body 1231 and the second shaft body 1232, it is ensured that the rotation of the conveying wheel 121 will not be interfered, so as to achieve a high conveying accuracy and conveying efficiency while the conveying wheel 121 moves radially; by providing an elastic reset member 142 connected to the second shaft body 1232, when the conveying wheel 121 is affected by the pressure of the tightened conveyor belt S, the second shaft body 1232 of the conveying wheel 121 squeezes the elastic reset member 142 to make it contract, and moves radially against the elastic force of the elastic reset member 142. When the conveyor belt S is loose, the pressure on the conveying wheel 121 decreases, so that the elastic force of the elastic reset member 142 is sufficient to push the second shaft body 1232 to reset, thereby automatically resetting the conveying wheel 121 to the initial state for detection; by using multiple distance sensors to detect multiple conveying wheels 121 respectively, the tightness degrees of different conveyor belts S and the height differences of each conveyor belt S are obtained, and then this information is fed back to the driving member 122 through electrical signals or communication signals, and the driving member 122 can perform operations such as stopping the machine or reducing the speed, which is convenient for the operator to maintain and adjust the lifting device 100;

[0073] The ingot loading and unloading processing system 1000 of the present application can use the high-synchronization conveyor belt S of the lifting device 100 to lift, which can ensure that the clamping device 200 clamps the ingot J horizontally, has high docking accuracy, and is not easy to clamp off or clamp off and damage the ingot J.

[0074] The specific embodiments described herein are merely illustrative of the spirit of the present application. Those skilled in the art to which the present application pertains can make various modifications or supplements to the described specific embodiments or use similar ways to replace them, but will not deviate from the spirit of the present application or exceed the scope defined by the appended claims.

Claims

1. A lifting device (100), characterized in that: include: A base plate (110), wherein a mounting seat (140) is provided on the base plate (110), wherein the mounting seat (140) is provided with a guide hole (141), wherein an inner wall of the guide hole (141) comprises an upper hole wall (1411), a lower hole wall (1412) and two side hole walls (1413); A conveying mechanism (120), wherein the conveying mechanism (120) comprises: A conveying wheel (121), wherein the conveying wheel (121) is multiple and respectively arranged on the substrate (110), the conveying wheel (121) is used to convey the conveyor belt (S), the conveying wheel (121) has a radial movement freedom, and the conveying wheel (121) can move radially due to the pressure of the conveyor belt (S); A driving member (122), the driving member (122) acting on the conveying wheel (121) to drive the conveying wheel (121) to rotate and convey the conveyor belt (S); A rotating shaft (123), the rotating shaft (123) being connected to the rotation center of the conveying wheel (121), the rotating shaft (123) being at least partially located in the guide hole (141), and the rotating shaft (123) having a degree of freedom of movement radially in the guide hole (141), the rotating shaft (123) comprising: A first shaft (1231), wherein the first shaft (1231) and the conveying wheel (121) are fixedly connected; a second shaft body (1232), the second shaft body (1232) and the first shaft body (1231) are axially connected, the second shaft body (1232) and the first shaft body (1231) have a rotational freedom of relative rotation, the upper surface of the outer ring of the second shaft body (1232) is coupled to the upper hole wall (1411), and the lower surface of the outer ring of the second shaft body (1232) is coupled to the lower hole wall (1412); and A first sensor (130), wherein the first sensor (130) is a distance sensor, and the distance sensor has a detection end (131), and the detection end (131) acts on the rotating shaft (123) to detect the moving distance of the rotating shaft (123); The gap between the two side hole walls (1413) is larger than the outer diameter of the rotating shaft (123), and the upper hole wall (1411) and the lower hole wall (1412) are coupled with at least the outer ring portion of the rotating shaft (123) to limit the vertical movement of the rotating shaft (123).

2. The lifting device (100) according to claim 1, characterized in that: It also includes an elastic reset member (142), which is arranged on the mounting seat (140), and the elastic reset member (142) is connected to the second shaft body (1232) in a radial direction, so that the second shaft body (1232) always has a tendency to move in the radial direction.

3. The lifting device (100) according to claim 1, characterized in that: The conveying mechanism (120) further includes a rotating wheel (124), and the rotating wheel (124) includes: A first wheel body (1241), wherein the first wheel body (1241) is disposed on the base plate (110), wherein a first cavity (12412) is disposed in the first wheel body (1241), and the first cavity (12412) is used for storing a conveyor belt (S); A second wheel body (1242), wherein the second wheel body (1242) is coaxially connected to the first wheel body (1241), and a second cavity (12422) is provided in the second wheel body (1242), and the second cavity (12422) is used for storing the conveyor belt (S); Wherein, two conveying wheels (121) are provided on the side of the first wheel body (1241) facing away from the second wheel body (1242) to convert the conveying direction of the conveyor belt (S); one conveying wheel (121) is provided on the side of the second wheel body (1242) facing away from the first wheel body (1241); and the first wheel body (1241) and the second wheel body (1242) can be connected to different conveying wheels (121) via the conveyor belt (S), respectively.

4. The lifting device (100) according to claim 3, characterized in that: The conveying mechanism (120) has multiple groups, and the rotating wheels (124) of adjacent conveying mechanisms (120) are coaxially connected through a rotating shaft (125). The driving member (122) acts on the rotating shaft (125) to drive the adjacent conveying mechanisms (120) to synchronously convey the conveyor belts (S).

5. The lifting device (100) according to claim 1, characterized in that: There are a plurality of first sensors (130), which act on a plurality of conveying wheels (121) respectively. The first sensors (130) are electrically connected or communicatively connected to the driving member (122).

6. A crystal ingot loading and unloading processing system (1000), characterized in that: include: Skytrack (1100); A crane (1200), wherein the crane (1200) is multiple and is respectively arranged on the overhead rail (1100), and the crane (1200) comprises: The lifting device (100) according to any one of claims 1 to 5, wherein the lifting device (100) is slidably arranged on the ceiling rail (1100); A clamping device (200), the clamping device (200) being connected to the lifting device (100) via a conveyor belt (S), and the clamping device (200) being used for clamping a crystal ingot (J); A crystal ingot (J) loading and unloading device (1300), wherein the crystal ingot (J) loading and unloading device (1300) is arranged below the ceiling rail (1100), and the crystal ingot (J) loading and unloading device (1300) comprises: A storage device (300), the storage device (300) being used to store a plurality of crystal ingots (J); A transfer device (400), the transfer device (400) is used to dock with the overhead traveling crane (1200) to load and unload materials; and a robot (500), the robot (500) being disposed between the storage device (300) and the transfer device (400), the robot (500) being used to transfer the crystal ingot (J) from the storage device (300) to the transfer device (400); and A crystal ingot processing device (1400) is disposed below the overhead rail (1100), and the crystal ingot processing device (1400) transports the crystal ingot (J) via the overhead crane (1200).

7. The ingot loading and unloading processing system (1000) according to claim 6, characterized in that: The clamping device (200) comprises: A clamping claw (210), wherein the clamping claw (210) is connected to the lifting device (100) via a conveyor belt (S); A second sensor (220), the second sensor (220) acts on the clamp (210) to detect whether the ingot (J) enters the clamping range of the clamp (210), and the second sensor (220) is also electrically connected or communicatively connected to the lifting device (100).

8. The ingot loading and unloading processing system (1000) according to claim 6, characterized in that: The material storage device (300) comprises: A plurality of limiting areas (310) each for accommodating a crystal ingot (J); A third sensor (320), the third sensor (320) acts on the limiting area (310) to detect whether a crystal ingot (J) is accommodated, and the third sensor (320) is also electrically connected or communicatively connected to the robot (500).

9. The ingot loading and unloading processing system (1000) according to claim 6, characterized in that: The transfer device (400) comprises a docking mechanism (410), and the docking mechanism (410) comprises: A lifting plate (411), the lifting plate (411) having a vertical degree of freedom of movement, the lifting plate (411) being used to place a crystal ingot (J); a limiting block (412), the limiting blocks (412) being multiple and arranged around the lifting plate (411) to limit the position of the crystal ingot (J); and A lifting member (413), wherein the lifting member (413) acts on the lifting plate (411) to drive the lifting plate (411) to protrude from the limiting block (412).

10. The ingot loading and unloading processing system (1000) according to claim 9, characterized in that: The docking mechanism (410) further comprises a fourth sensor (414), wherein the fourth sensor (414) is arranged on the limit block (412), and the fourth sensor (414) faces above the lifting plate (411) to detect the position of the clamping device (200), and the fourth sensor (414) is communicatively connected with the clamping device (200).

11. The ingot loading and unloading processing system (1000) according to claim 6, characterized in that: The transfer device (400) further includes a material unloading mechanism (420), and the material unloading mechanism (420) includes: A limiting plate (421), wherein the limiting plate (421) is used to place the crystal ingot (J); A fifth sensor (422), the fifth sensor (422) faces the limiting plate (421) to detect whether there is a crystal ingot (J) on the limiting plate (421), and the fifth sensor (422) is communicatively connected with the lifting device (100) and the clamping device (200).

12. The ingot loading and unloading processing system (1000) according to claim 6, characterized in that: The robot (500) comprises: an X-axis horizontal module (510), a Z-axis vertical module (520), a Y-axis telescopic module (530) and a Z-axis rotation module (540); In which, the Z-axis rotation module (540) is provided with a clamping arm (550), and the clamping arm (550) is used to clamp the crystal ingot (J), and the clamping arm (550) is also provided with a sixth sensor (560), and the sixth sensor (560) acts on the clamping arm (550) to detect whether the crystal ingot (J) enters the clamping range of the clamping arm (550), and the sixth sensor (560) is electrically connected or communicatively connected to the clamping arm (550).

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