Ion implanter and use method thereof

Abstract

The invention discloses an ion implanter, and relates to the technical field of semiconductor manufacturing, and the ion implanter comprises a machine table, an alignment table is provided with a photosensitive device, the alignment table is provided with an auxiliary positioning device, and the auxiliary positioning device comprises a first positioning part; a second positioning part; the fixing device comprises a fixing hole in the alignment table and a fixing piece used for fixing the auxiliary positioning device on the alignment table; a software adjustment module; by arranging the auxiliary positioning device, when the positioning point of the sample wafer rotates to the first positioning part on the auxiliary positioning device and is positioned in the sensing range of the software adjusting module, the photosensitive device transmits a signal to the machine table, the machine table takes away the sample wafer, and the photosensitive device cannot sense the existence of the auxiliary positioning device due to the existence of the second positioning part; reciprocating production can be achieved, the problem that the ion implanter cannot position the transparent sheet is solved, and the ion implanter can position the transparent sheet.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to an ion implanter. Background Art

[0002] As a semiconductor material with excellent performance, silicon carbide (SiC) transparent sheets have gained wide attention in power electronic devices, high-frequency communications, and new energy vehicles due to their high heat resistance, high hardness, wide bandgap, and excellent chemical stability. Transparent sheets are particularly suitable for equipment operating in harsh environments, such as high-power inverters and radar systems. However, the manufacturing process of silicon carbide transparent sheets has extremely high requirements on precision and adaptability. In semiconductor manufacturing, ion implantation is a key process used to adjust the electrical properties of materials. Existing ion implantation machines are mainly designed for silicon wafer materials, and their process flow and hardware configuration usually assume that the workpiece has geometric features that are easy to detect.

[0003] At present, the ion implantation machines on the market, such as Nissin 2300AH, are used for the ion implantation process of 12-inch and 6-inch silicon wafers. This type of equipment realizes the transmission and rotation positioning of the sheet by sensing the notch of the workpiece. However, due to their optical properties and design features, transparent sheets (such as silicon carbide transparent sheets) lack the detectable notch characteristics of traditional silicon wafers, which makes the equipment unable to complete the positioning operation.

[0004] Therefore, we need an ion implanter to solve the problem that the ion implanter cannot position the transparent sheet, so that the ion implanter can position the transparent sheet. Summary of the invention

[0005] The purpose of the present application is to solve the problem that the ion implanter cannot position the transparent sheet. In order to solve the above problem, the present application provides an ion implanter that can position the transparent sheet.

[0006] To achieve the above-mentioned purpose, the embodiment of the present application adopts the following technical solutions: a machine, an alignment table is provided on the machine, a photosensitive device is provided on the alignment table, and it is characterized in that an auxiliary positioning device is provided on the alignment table, and the auxiliary positioning device includes: a first positioning part, the first positioning part is a notch of a standard size arranged on the edge of the auxiliary positioning device, and the first positioning part matches the preset positioning of the sample; a second positioning part, the second positioning part is arranged on the edge of the auxiliary positioning device, and the second positioning part is used to avoid interference with the photosensitive device; a fixing device, the fixing device includes a fixing hole on the alignment table and a fixing part for fixing the auxiliary positioning device on the alignment table; a software adjustment module, the software adjustment module is used to set the initial range parameters within the sensing range of the auxiliary positioning device; when the positioning point of the sample rotates to the first positioning part on the auxiliary positioning device and is positioned within the sensing range of the software adjustment module, the machine takes the sample away.

[0007] In the above technical scheme, the embodiment of the present application is achieved by: setting an auxiliary positioning device, when the positioning point of the sample is rotated to the first positioning part on the auxiliary positioning device and is positioned within the sensing range of the software adjustment module, the photosensitive device transmits a signal to the machine, and the machine takes the sample away. Due to the existence of the second positioning part, the photosensitive device will not sense the existence of the auxiliary positioning device, and reciprocating production can be carried out, thereby solving the problem that the ion implanter cannot position the transparent sheet, and the ion implanter can position the transparent sheet.

[0008] Further, according to an embodiment of the present application, the diameter of the auxiliary positioning device is 1 mm larger than the diameter of the sample.

[0009] Further, according to an embodiment of the present application, the second positioning portion is a gap with a width greater than 20 mm and a length greater than 30 mm.

[0010] Further, according to an embodiment of the present application, the first positioning portion is arranged on an opposite side of the second positioning portion.

[0011] Further, according to an embodiment of the present application, the fixing device fixes the auxiliary positioning device by means of screws.

[0012] Further, according to an embodiment of the present application, the initial setting angle of the software adjustment module is 135 degrees.

[0013] Furthermore, according to an embodiment of the present application, the auxiliary positioning device is made of metal.

[0014] Further, according to an embodiment of the present application, a receiving portion is provided in the middle of the auxiliary positioning device.

[0015] Further, according to an embodiment of the present application, the receiving portion is a protrusion for carrying the sample.

[0016] Further, according to an embodiment of the present application, the auxiliary positioning device is fixed on the alignment table of the machine table to ensure that the first positioning portion and the second positioning portion are located at a preset position;

[0017] The initial range parameters within the sensing range of the auxiliary positioning device are set through the software adjustment module, and the angle of the initial position is set to 135 degrees;

[0018] Rotate the sample piece so that its positioning point is close to the first positioning part of the auxiliary positioning device;

[0019] When the sample piece is rotated to the first positioning portion of the auxiliary positioning device, ensure that the standard size notch of the first positioning portion matches the preset positioning point of the sample piece;

[0020] After confirming that the sample is positioned, the machine takes the sample away according to the feedback signal from the photosensitive device and enters the subsequent processing steps.

[0021] Compared with the prior art, the present application has the following beneficial effects: the present application sets up an auxiliary positioning device, and when the positioning point of the sample is rotated to the first positioning part on the auxiliary positioning device and is positioned within the sensing range of the software adjustment module, the photosensitive device transmits a signal to the machine, and the machine takes the sample away. Due to the existence of the second positioning part, the photosensitive device will not sense the existence of the auxiliary positioning device, and reciprocating production can be carried out, thereby solving the problem that the ion implanter cannot position the transparent sheet, and the ion implanter can position the transparent sheet. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The present application is further described below in conjunction with the accompanying drawings and embodiments.

[0023] Figure 1 An axonometric view of an ion implanter without a sample.

[0024] Figure 2 An axonometric view of an ion implanter with a sample.

[0025] Figure 3 It is an axonometric view of the auxiliary positioning device.

[0026] Figure 4 It is a top view of the auxiliary positioning device.

[0027] Figure 5 It is an alignment table with auxiliary positioning devices.

[0028] Figure 6 It is an alignment table without auxiliary positioning devices.

[0029] In the attached figure

[0030] 1. Machine 2. Alignment table 21. Photosensitive device

[0031] 22. Auxiliary positioning device 221. First positioning portion 222. Second positioning portion

[0032] 223. Fixing device 224. Software adjustment module 225. Undertaking unit

[0033] 3. Samples DETAILED DESCRIPTION

[0034] In order to make the purpose and technical solution of the present invention clearly and completely described, and the advantages more clearly understood, the embodiments of the present invention are further described in detail with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are part of the embodiments of the present invention, rather than all of the embodiments, and are only used to explain the embodiments of the present invention, and are not used to limit the embodiments of the present invention. All other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] In the description of the present invention, it should be noted that the terms "center", "middle", "upper", "lower", "left", "right", "inner", "outer", "top", "bottom", "side", "vertical", "horizontal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "one", "first", "second", "third", "fourth", "fifth", "sixth" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0036] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] For the purpose of simplicity and illustration, the principles of the embodiments are described primarily by reference to examples. In the following description, many specific details are presented to provide a thorough understanding of the embodiments. However, it is apparent that, for those of ordinary skill in the art, these embodiments may not be limited to these specific details in practice. In some instances, known methods and apparatus are not described in detail to avoid making these embodiments unnecessarily difficult to understand. In addition, all embodiments may be used in combination with each other.

[0038] Embodiment 1: Figure 1-6 As shown, an ion implanter comprises:

[0039] The machine 1 is provided with an alignment table 2, the alignment table 2 is provided with a photosensitive device 21, and an auxiliary positioning device 22 is installed on the alignment table 2. The auxiliary positioning device 22 is installed through a fixing device 223, and the fixing device 223 includes a fixing hole and a fixing member on the alignment table 2. The fixing member firmly fixes the auxiliary positioning device 22 on the alignment table 2 through screws. Through the connection of the fixing device 223, the auxiliary positioning device 22 can be fixedly installed on the alignment table 2, ensuring the stability and positioning accuracy of the machine 1 during operation.

[0040] A first positioning portion 221 is provided on the edge of the auxiliary positioning device 22. The first positioning portion 221 is a notch of standard size, which matches the preset positioning point of the sample 3 and is used to accurately position the transparent sheet. By setting the notch of the first positioning portion 221 with the standard size, the transparent sheet can be accurately positioned, thereby solving the problem that the traditional ion implanter cannot position the transparent sheet.

[0041] A second positioning portion 222 is provided on the edge of the auxiliary positioning device 22. The second positioning portion 222 is located on the opposite side of the first positioning portion 221. The width of the second positioning portion 222 is greater than 20 mm and the length is greater than 30 mm. It is used to avoid interference with the photosensitive device 21. The notch design of the second positioning portion 222 avoids interference of the auxiliary positioning device 22 with the photosensitive device 21, thereby ensuring the stability of the positioning signal during the operation of the equipment and allowing reciprocating production.

[0042] The diameter of the auxiliary positioning device 22 is 1 mm larger than the diameter of the sample 3 and is made of metal material. A raised receiving portion 225 is provided in the middle for carrying the transparent sheet. The diameter of the auxiliary positioning device 22 is slightly larger than the sample 3 to help stably place and position the sample 3. The metal material enhances the durability of the device, and the receiving portion 225 lifts the sample 3 to ensure stable transmission of the sample 3.

[0043] The software adjustment module 224 is used to set the initial parameters of the sensing range of the auxiliary positioning device 22. The initial setting angle is 135 degrees. After positioning at 135 degrees, the robot arm of the machine 1 will take away the product. The photosensitive part at this position is facing the gap of the tool with a width of 30mm and a depth of 20mm, so it cannot sense the existence of the tool and can carry out production reciprocatingly.

[0044] By setting up the auxiliary positioning device 22, when the positioning point of the sample 3 rotates to the first positioning part 221 on the auxiliary positioning device 22 and is positioned within the sensing range of the software adjustment module 224, the photosensitive device 21 transmits a signal to the machine 1, and the machine 1 takes away the sample 3. Due to the existence of the second positioning part 222, the photosensitive device 21 will not sense the existence of the auxiliary positioning device 22, and reciprocating production can be carried out, thereby solving the problem that the ion implanter cannot position the transparent sheet, and the ion implanter can position the transparent sheet.

[0045] Embodiment 2: Figure 1-6 As shown, based on embodiments 1-3, this embodiment further provides a method for using an ion implanter, including:

[0046] An auxiliary positioning device 22 is installed on the machine platform 1 of the ion implanter, and the auxiliary positioning device 22 is fixed in a fixing hole on the alignment platform 2 by screws to ensure its stability.

[0047] The transparent sheet is placed on the middle receiving portion 225 of the auxiliary positioning device 22. The protrusion of the receiving portion 225 ensures that the sample sheet 3 can be placed stably and avoids displacement caused by equipment vibration or rotation, and is also convenient for grasping.

[0048] After the machine 1 is started, the initial angle of the software adjustment module 224 is set to 135 degrees. At this time, the notch of the second positioning portion 222 of the auxiliary positioning device 22 faces the photosensitive device 21 to ensure that the photosensitive device 21 does not mistakenly sense the existence of the auxiliary positioning device 22 .

[0049] During the rotation of the sample 3 , the standard size gap of the first positioning part 221 is gradually aligned with the positioning point of the sample 3 . After the software adjustment module 224 senses the signal that the positioning point of the sample 3 matches the first positioning part 221 , the machine 1 locks the current position of the sample 3 .

[0050] After the positioning is completed, the machine 1 takes away the positioned sample 3 according to the signal of the photosensitive device 21 and enters the subsequent ion implantation processing link.

[0051] By setting up the auxiliary positioning device 22, when the positioning point of the sample 3 rotates to the first positioning part 221 on the auxiliary positioning device 22 and is positioned within the sensing range of the software adjustment module 224, the photosensitive device 21 transmits a signal to the machine 1, and the machine 1 takes away the sample 3. Due to the existence of the second positioning part 222, the photosensitive device 21 will not sense the existence of the auxiliary positioning device 22, and reciprocating production can be carried out, thereby solving the problem that the ion implanter cannot position the transparent sheet, and the ion implanter can position the transparent sheet.

[0052] Although the above describes the illustrative specific implementation methods of the present application so that technicians in this technical field can understand the present application, the present application is not limited to the scope of the specific implementation methods. For ordinary technicians in this technical field, as long as various changes are within the spirit and scope of the present application defined and determined by the attached claims, all application creations using the concept of the present application are protected.

Claims

1. An ion implanter, comprising: The machine platform is provided with an alignment platform, and the alignment platform is provided with a photosensitive device, wherein an auxiliary positioning device is provided on the alignment platform, and the auxiliary positioning device comprises: A first positioning portion, wherein the first positioning portion is a notch of a standard size arranged on the edge of the auxiliary positioning device, and the first positioning portion matches the preset positioning of the sample piece; A second positioning portion, the second positioning portion is arranged at an edge of the auxiliary positioning device, and the second positioning portion is used to avoid interference with the photosensitive device; A fixing device, the fixing device comprising a fixing hole on the alignment stage and a fixing piece for fixing the auxiliary positioning device on the alignment stage; A software adjustment module, the software adjustment module is used to set the initial range parameters within the sensing range of the auxiliary positioning device; When the positioning point of the sample is rotated to the first positioning portion on the auxiliary positioning device and is positioned within the sensing range of the software adjustment module, the machine takes away the sample.

2. An ion implanter according to claim 1, characterized in that: The diameter of the auxiliary positioning device is 1 mm larger than the diameter of the sample.

3. An ion implanter according to claim 1, characterized in that: The second positioning portion is a gap with a width greater than 20 mm and a length greater than 30 mm.

4. An ion implanter according to claim 1, characterized in that: The first positioning portion is disposed on an opposite side of the second positioning portion.

5. An ion implanter according to claim 1, characterized in that: The fixing device fixes the auxiliary positioning device by means of screws.

6. An ion implanter according to claim 1, characterized in that: The initial setting angle of the software adjustment module is 135 degrees.

7. An ion implanter according to claim 1, characterized in that: The auxiliary positioning device is made of metal.

8. An ion implanter according to claim 1, characterized in that: A receiving portion is arranged in the middle of the auxiliary positioning device.

9. An ion implanter according to claim 8, characterized in that: The receiving portion is a protrusion for carrying the sample.

10. A method for using an ion implanter, characterized in that: An ion implanter as claimed in any one of claims 1 to 9, comprising the following steps: Fixing the auxiliary positioning device on the alignment platform of the machine platform to ensure that the first positioning portion and the second positioning portion are located at preset positions; Setting the initial range parameters within the sensing range of the auxiliary positioning device through the software adjustment module, and setting the angle of the initial position to 135 degrees; Rotate the sample piece so that its positioning point is close to the first positioning part of the auxiliary positioning device; When the sample piece is rotated to the first positioning portion of the auxiliary positioning device, it is ensured that the standard size notch of the first positioning portion matches the preset positioning point of the sample piece; After confirming that the sample is positioned, the machine takes the sample away according to the feedback signal of the photosensitive device and enters the subsequent processing steps.

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