Power synthesis device and radio frequency power supply system

Abstract

The invention provides a power synthesis device and a radio frequency power supply system. The power synthesis device is used for processing the initial radio frequency signal to obtain target radio frequency electric energy, the power synthesis device comprises N radio frequency power amplifier units, N first phase shift circuits and a power synthesis unit, and N is greater than or equal to 2. And the N radio frequency power amplifier units are connected with the N first phase shift circuits in a one-to-one correspondence manner, and each radio frequency power amplifier unit is used for receiving the initial radio frequency signal and performing power amplification on the initial radio frequency signal to obtain sub radio frequency electric energy. The N first phase shift circuits are connected with the power synthesis unit, each first phase shift circuit is used for moving the phase angle of the corresponding sub radio frequency electric energy by a corresponding angle to obtain phase shift radio frequency electric energy, and the phase angles of the phase shift radio frequency electric energy are the same. And the power synthesis unit is used for performing power synthesis on each phase shift radio frequency electric energy to obtain target radio frequency electric energy. According to the invention, synthesis of multiple sub radio frequency electric energy can be realized.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a power synthesis device and a radio frequency power supply system. Background Art

[0002] At present, with the rapid development of RF power technology, the requirements for RF power systems that provide power for loads such as plasma loads are becoming more and more stringent, especially RF power systems often need to provide high-power RF power supply. In the current research on power synthesis, due to the different degrees of phase shift of the initial RF signal when it is power amplified separately, it is impossible to synthesize the required high-power RF power. Therefore, how to achieve power synthesis of multiple sub-RF power to obtain the high-power RF power required by the load has become a problem that needs to be considered. Summary of the invention

[0003] The present application provides a power synthesis device and a radio frequency power supply system, which can realize power synthesis of multiple sub-radio frequency electric energies to obtain high-power target radio frequency electric energy required by a load.

[0004] In a first aspect, a power synthesis device is provided, wherein the power synthesis device is used to process an initial RF signal to obtain target RF power energy, and the power synthesis device includes N RF power amplifier units, N first phase shift circuits, and a power synthesis unit, wherein N≥2. The N RF power amplifier units are connected to the N first phase shift circuits in a one-to-one correspondence, and each RF power amplifier unit is used to receive the initial RF signal and amplify the power of the initial RF signal to obtain sub-RF power energy. The N first phase shift circuits are connected to the power synthesis unit, and each first phase shift circuit is used to shift the phase angle of the corresponding sub-RF power energy by a corresponding angle to obtain phase-shifted RF power, wherein the phase angle of each phase-shifted RF power is the same. The power synthesis unit is used to perform power synthesis on each phase-shifted RF power to obtain the target RF power.

[0005] In a possible implementation, each first phase shift circuit includes a first cable, each first cable includes an opposite first end, a second end, and a third end located between the first end and the second end, the first end is connected to a corresponding radio frequency power amplifier unit, the third end is a connection point between the first cable and a power synthesis unit, and the second end is open. The moving angle of each first phase shift circuit changes according to the position change of the third end of the first cable corresponding to the first phase shift circuit.

[0006] In a possible implementation, the power synthesis device further includes a phase difference acquisition unit and a control unit, wherein the phase difference acquisition unit is connected to the N RF power amplifier units and the control unit. The phase difference acquisition unit is used to acquire N first phase differences, each of which is the phase difference between the phase angle of the initial RF signal and the phase angle of the corresponding sub-RF electric energy. The control unit is used to control the third end of the corresponding first cable to be in a corresponding position at least according to each first phase difference, so as to move the phase angle of the corresponding sub-RF electric energy by a corresponding angle, so that the phase angles of the N phase-shifted RF electric energies obtained by the N first phase shift circuits are the same.

[0007] In a possible implementation manner, the power synthesis device further includes an adjustment unit, the adjustment unit is connected to both the third end and the control unit, and the adjustment unit is used to adjust the position of the third end so that the third end changes between the first end and the second end. The control unit is used to control the adjustment unit to adjust the position of the third end according to the relationship between each first phase difference, the length of the corresponding first cable, and the wavelength of the corresponding sub-RF power transmitted in the first cable, so that the third end is in a corresponding position.

[0008] In a possible implementation manner, the third end of each first cable is in a variable position, and the frequency of each sub-RF power is between 300 MHz and 300 GHz. The length of each first cable is equal to the wavelength of the corresponding sub-RF power transmitted in the first cable, and when the position of the third end changes from the first end to the second end, the angle of movement of each first cable changes from zero to 2π accordingly.

[0009] In a possible implementation, the third end of each first cable is in a fixed position, and the frequency of each sub-RF power is between 300kHz and 300MHz. The third end of each first cable overlaps with the second end, and the corresponding length of each first cable shifts the phase angle of the corresponding sub-RF power by a corresponding angle to obtain phase-shifted RF power.

[0010] In a possible implementation, the control unit is also used to control and adjust the phase angle of the corresponding initial RF signal to change according to the change of the first phase difference when any first phase difference changes, so that the phase angles of the N phase-shifted RF electric energies obtained by the N first phase shift circuits are the same.

[0011] In a possible implementation, the N RF power amplifier units include a reference RF power amplifier unit and N-1 phase-shifted RF power amplifier units. The control unit is further configured to determine the reference RF power amplifier unit based on the N first phase differences, wherein the first phase shift circuit corresponding to the reference RF power amplifier unit shifts the phase angle of the RF power to zero.

[0012] In a possible implementation manner, the phase deviation value of the reference RF power amplifier unit is less than or equal to the phase deviation value of any phase-shifted RF power amplifier unit, wherein the phase deviation value is the absolute value of the difference between the corresponding first phase difference and the average value of the N first phase differences.

[0013] In the second aspect, a radio frequency power supply system is also provided, and the radio frequency power supply system includes a power synthesis device. The power synthesis device is used to process the initial radio frequency signal to obtain the target radio frequency electric energy, and the power synthesis device includes N radio frequency power amplifier units, N first phase shift circuits and a power synthesis unit, wherein N≥2. The N radio frequency power amplifier units are connected to the N first phase shift circuits in a one-to-one correspondence, and each radio frequency power amplifier unit is used to receive the initial radio frequency signal and amplify the power of the initial radio frequency signal to obtain sub-radio frequency electric energy. The N first phase shift circuits are connected to the power synthesis unit, and each first phase shift circuit is used to move the phase angle of the corresponding sub-radio frequency electric energy by a corresponding angle to obtain phase-shifted radio frequency electric energy, wherein the phase angle of each phase-shifted radio frequency electric energy is the same. The power synthesis unit is used to perform power synthesis on each phase-shifted radio frequency electric energy to obtain the target radio frequency electric energy.

[0014] The power synthesis device and RF power supply system of the present application respectively shift the phase angle of the corresponding sub-RF electric energy by the corresponding angle by setting N first phase shift circuits to obtain phase-shifted RF electric energy, so that the phase angle of each phase-shifted RF electric energy is the same, and the power synthesis of multiple sub-RF electric energies can be achieved to obtain the high-power target RF electric energy required by the load. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1 It is a block diagram of a power synthesis device in some embodiments of the present application.

[0017] Figure 2 Another block diagram of a power synthesis device in some embodiments of the present application.

[0018] Figure 3 It is another block diagram of a power synthesis device in some embodiments of the present application.

[0019] Figure 4 is a block diagram of a second phase shift circuit in some embodiments of the present application.

[0020] Figure 5 FIG. 4 is a circuit diagram of a second phase shift circuit in an embodiment of the present application.

[0021] Figure 6 FIG. 4 is a circuit diagram of a second phase shift circuit in another embodiment of the present application.

[0022] Figure 7 It is a block diagram of a radio frequency power supply system in some embodiments of the present application.

[0023] Explanation of the accompanying drawings: 1000, RF power supply system, RF1, initial RF signal, 10, power synthesis device, PA, RF power amplifier unit, PA1, reference RF power amplifier unit, PA2, phase-shifted RF power amplifier unit, RF2, sub-RF power, 100, first phase shift circuit, 110, first cable, d1, first end, d2, second end, d3, third end, RF3, phase-shifted RF power, 200, power synthesis unit, RF4, target RF power, 300, phase difference acquisition unit, A1, first phase difference, 400, control unit, 410, adjustment unit, 500, second phase shift circuit, 510, first phase shift unit, R1, first resistor, C1, first capacitor, S1, first switch, S3, third switch, S4, fourth switch, RFm, intermediate RF signal, 520, second phase shift unit, R2, second resistor, C2, second capacitor, S2, second switch, GND, ground, RF2, target RF signal. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0025] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0026] In the following, the terms "first", "second", "third", and "fourth" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", "third", and "fourth" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "multiple" means two or more.

[0027] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.

[0028] See also Figure 1 , Figure 1 FIG. 1 is a block diagram of a power synthesis device in some embodiments of the present application. Figure 1 As shown, the present application provides a power synthesis device 10, which is used to process the initial RF signal RF1 to obtain the target RF power RF4. The power synthesis device 10 includes N RF power amplifier units PA, N first phase shift circuits 100 and a power synthesis unit 200, wherein N≥2. The N RF power amplifier units PA are connected to the N first phase shift circuits 100 in a one-to-one correspondence, and each RF power amplifier unit PA is used to receive the initial RF signal RF1 and amplify the power of the initial RF signal RF1 to obtain sub-RF power RF2. The N first phase shift circuits 100 are connected to the power synthesis unit 200, and each first phase shift circuit 100 is used to shift the phase angle of the corresponding sub-RF power RF2 by a corresponding angle to obtain phase-shifted RF power RF3, wherein the phase angle of each phase-shifted RF power RF3 is the same. The power synthesis unit 200 is used to perform power synthesis on each phase-shifted RF power RF3 to obtain the target RF power RF4.

[0029] Therefore, the above-mentioned power synthesis device 10 in the present application, by setting N first phase shift circuits 100, respectively moves the phase angle of the corresponding sub-RF power RF2 by the corresponding angle to obtain the phase-shifted RF power RF3, so that the phase angle of each phase-shifted RF power RF3 is the same, and the power synthesis of multiple sub-RF power RF2 can be realized to obtain the high-power target RF power RF4 required by the load.

[0030] In some embodiments, each RF power amplifier unit PA may include a Class D RF power amplifier, a Class E RF power amplifier, or other types of RF power amplifiers, but the present application is not limited thereto.

[0031] In particular, even if each RF power amplifier unit PA has the same circuit structure, it may have different phase shift degrees, that is, the phase angles of the signals obtained by each RF power amplifier unit PA for power amplifying the signals with the same phase angle may be different from each other. And the phase shift degree of each RF power amplifier unit PA may also change to a certain extent during operation.

[0032] In some embodiments, the power synthesis unit 200 may include a power synthesis circuit composed of passive components such as inductors and capacitors, or may include a power synthesis circuit composed of other passive components, but the present application is not limited thereto.

[0033] It should be noted that the sub-RF power RF2, the phase-shifted RF power RF3 and the target RF power RF4 can also be regarded as RF signals with target power values. However, compared with the initial RF signal RF1, the power values ​​of the sub-RF power RF2, the phase-shifted RF power RF3 and the target RF power RF4 are larger. Therefore, the phase angle of the phase-shifted RF power RF3 is also the phase angle of the RF signal with the target power value.

[0034] In particular, when the phase angle of any phase-shifted RF power RF3 is different from the phase angles of other phase-shifted RF power RF3, the target RF power RF4 obtained by power synthesis of N phase-shifted RF power RF3 will not be able to reach the expected power value, and the target RF power RF4 will also contain noise, thereby failing to meet the load requirements.

[0035] Please also read Figure 2 , Figure 2 FIG. 1 is another block diagram of a power synthesis device in some embodiments of the present application. Figure 1 , Figure 2 As shown, each first phase shift circuit 100 includes a first cable 110, each first cable 110 includes a first end d1, a second end d2 and a third end d3 located between the first end d1 and the second end d2. The first end d1 is connected to the corresponding RF power amplifier unit PA, the third end d3 is the connection point between the first cable 110 and the power synthesis unit 200, and the second end d2 is open. The moving angle of each first phase shift circuit 100 changes according to the position change of the third end d3 of the first cable 110 corresponding to the first phase shift circuit 100.

[0036] Therefore, the power synthesis device 10 in the present application, by setting N first cables 110, can output the sub-RF power RF2 received by the first cable 110 after performing a corresponding phase shift, so that the phase angle of the sub-RF power RF2 moves by a corresponding angle.

[0037] The frequencies of the N sub-radio power energies RF2 are the same, so the wavelengths of the N sub-radio power energies RF2 transmitted in the first cable 110 are the same.

[0038] See also Figure 3 , Figure 3 FIG. 1 is another block diagram of a power synthesis device in some embodiments of the present application. Figure 3 As shown, the power synthesis device 10 also includes a phase difference acquisition unit 300 and a control unit 400, and the phase difference acquisition unit 300 is connected to N RF power amplifier units PA and the control unit 400. The phase difference acquisition unit 300 is used to obtain N first phase differences A1, and each first phase difference A1 is the phase difference between the phase angle of the initial RF signal RF1 and the phase angle of the corresponding sub-RF power RF2. The control unit 400 is used to control the third end d3 of the corresponding first cable 110 to be in a corresponding position at least according to each first phase difference A1, so as to move the phase angle of the corresponding sub-RF power RF2 by a corresponding angle, so that the phase angles of the N phase-shifted RF power RF3 obtained by the N first phase shift circuits 100 are the same.

[0039] Therefore, in the above-mentioned power synthesis device 10 in the present application, the angle of phase angle movement of each first cable 110 for the corresponding received sub-RF power RF2 is related to the position of the third end d3, that is, according to the relationship between the angle of movement of the first phase shift circuit 100, the length of the first cable 110 and the wavelength of the corresponding sub-RF power RF2 transmitted in the first cable 110, it is possible to determine that the position of the third end d3 corresponds to the angle of movement of the first phase shift circuit 100, so that the third end d3 is in a corresponding position, and the phase angle of the corresponding sub-RF power RF2 can be controlled to move to a corresponding angle, so that the phase angles of the N phase-shifted RF power RF3 obtained by the N first phase shift circuits 100 are all the same.

[0040] In one or more embodiments, each first cable 110 may be a coaxial cable.

[0041] like Figure 1 , Figure 2 As shown, the power synthesis device 10 further includes an adjustment unit 410, which is connected to both the third end d3 and the control unit 400, and is used to adjust the position of the third end d3 so that the third end d3 changes between the first end d1 and the second end d2. The control unit 400 is used to control the adjustment unit 410 to adjust the position of the third end d3 according to the relationship between each first phase difference A1, the length of the corresponding first cable 110, and the wavelength of the corresponding sub-RF power RF2 transmitted in the first cable 110, so that the third end d3 is at a corresponding position.

[0042] Therefore, the power synthesis device 10 in the present application adjusts the position of the third end d3 by providing the adjustment unit 410, so that the third end d3 is at a corresponding position.

[0043] In some embodiments, the third end d3 of each first cable 110 is at a variable position, and the frequency of each sub-RF power RF2 is between 300 MHz and 300 GHz. The length of each first cable 110 is equal to the wavelength of the corresponding sub-RF power RF2 transmitted in the first cable 110. When the position of the third end d3 changes from the first end d1 to the second end d2, the angle of movement of each first cable 110 changes from zero to 2π.

[0044] Thus, in the above-mentioned power synthesis device 10 in the present application, the wavelength of each sub-RF power RF2 transmitted in the corresponding first cable 110 is related to the frequency of each sub-RF power RF2. When the frequency of each sub-RF power RF2 is between 300 MHz and 300 GHz, that is, when the frequency of each sub-RF power RF2 is a microwave frequency, the wavelength is shorter, and the length of the corresponding first cable 110 is also shorter, which saves space and facilitates the movement of the third end d3 of the first cable 110. By configuring the third end d3 of each first cable 110 to be variable, and the length of each first cable 110 is equal to the wavelength of the corresponding sub-RF power RF2 transmitted in the first cable 110, all required angles of movement of the first cable 110 can be obtained.

[0045] Specifically, the moving angle of each first cable 110 may be e -jβl , where β=2π / λ, e is a natural constant, j is an imaginary unit, π is the circumference of a circle, β is the phase velocity of the corresponding sub-RF power RF2 transmitted in the first cable 110, λ is the wavelength of the corresponding sub-RF power RF2 transmitted in the first cable 110, and l is the length from the first end d1 to the third end d3 of the first cable 110. If the length of the first cable 110 is λ, during the process of the position of the third end d3 changing from the first end d1 to the second end d2, the angle of movement of each first cable 110 changes from zero to 2π. For example, when l=4 / λ, the angle of movement of each first cable 110 may be 2 / π; when l=2 / λ, the angle of movement of each first cable 110 may be π.

[0046] In particular, the first end d1 and the third end d3 of each first cable 110 can be electrically connected to the corresponding RF power amplifier unit PA and the power synthesis unit 200 through conductors, so that the first end d1 of each first cable 110 is connected to the corresponding RF power amplifier unit PA, and the third end d3 is connected to the power synthesis unit 200.

[0047] Furthermore, the conductor may be a flexible conductor. Since each first cable 110, each RF power amplifier unit PA and the power synthesis unit 200 are generally arranged at a fixed position, it is not convenient to adjust the position. In order to make the third end d3 of each first cable 110 adjustable, the conductor is set as a flexible conductor, so that the electrical connection between the conductor and the third end d3 of each first cable 110 can be adjusted, so that the adjustment unit 410 can adjust the position of the third end d3 of each first cable 110.

[0048] Furthermore, the adjusting unit 410 may include at least one adjusting motor.

[0049] In some embodiments, the third end d3 of each first cable 110 is in a fixed position, and the frequency of each sub-RF power RF2 is between 300kHz and 300MHz. The third end d3 of each first cable 110 overlaps with the second end d2, and each first cable 110 has a corresponding length to shift the phase angle of the corresponding sub-RF power RF2 by a corresponding angle to obtain phase-shifted RF power RF3.

[0050] Therefore, the above-mentioned power synthesis device 10 in the present application, when the frequency of each sub-RF power RF2 is between 300kHz and 300MHz, that is, when the frequency of each sub-RF power RF2 is the RF frequency, the wavelength is longer, and the corresponding length of the first cable 110 is also longer. After determining the length of each first cable 110, it is not convenient to adjust the position of the third end d3. Therefore, by configuring the third end d3 of each first cable 110 to coincide with the second end d2, the corresponding length of each first cable 110 moves the phase angle of the corresponding sub-RF power RF2 by a corresponding angle to obtain the phase-shifted RF power RF3. There is no need to move the angle subsequently, so that the phase angle of each phase-shifted RF power RF3 can be made the same.

[0051] In some embodiments, the number of the initial radio frequency signal RF1 may be one or more.

[0052] Furthermore, when the number of initial RF signals RF1 is multiple, the control unit 400 can also be used to control and adjust the phase angle of the corresponding initial RF signal RF1 according to the change of the first phase difference A1 when any first phase difference A1 changes, so that the phase angles of the N phase-shifted RF electric energies RF3 obtained by the N first phase shift circuits 100 are the same.

[0053] Therefore, the above-mentioned power synthesis device 10 in the present application, by configuring any first phase difference A1 to change, controls and adjusts the phase angle of the corresponding initial RF signal RF1 to change according to the change of the first phase difference A1, thereby eliminating the need to adjust the position of the third end d3 and also allowing the phase angle of each phase-shifted RF power RF3 to be the same.

[0054] like Figure 3 As shown, the N RF power amplifier units PA include a reference RF power amplifier unit PA1PA and N-1 phase-shifted RF power amplifier units PA2PA. The control unit 400 is also used to determine the reference RF power amplifier unit PA1PA according to the N first phase differences A1, wherein the first phase shift circuit 100 corresponding to the reference RF power amplifier unit PA1PA shifts the phase angle of the RF power to zero.

[0055] Therefore, the power synthesis device 10 in the present application determines the reference RF power amplifier unit PA1PA according to the N first phase differences A1, so that the first phase shift circuit 100 corresponding to the N-1 phase shift RF power amplifier units PA2PA can move at a smaller angle.

[0056] In some embodiments, the phase deviation value of the reference RF power amplifier unit PA1PA is less than or equal to the phase deviation value of any phase-shifted RF power amplifier unit PA2PA, wherein the phase deviation value is the absolute value of the difference between the corresponding first phase difference A1 and the average value of N first phase differences A1.

[0057] Please also read Figure 4 , Figure 4 FIG. 1 is a block diagram of a second phase shift circuit in some embodiments of the present application. Figure 3 , Figure 4 As shown, the power synthesis device 10 may further include N second phase shift circuits 500, each of which receives the initial RF signal RF1 and is connected to the corresponding RF power amplifier unit PA. Each second phase shift circuit 500 includes a first phase shift unit 510 and a second phase shift unit 520, and the first phase shift unit 510 and the second phase shift unit 520 are sequentially connected to the corresponding RF power amplifier unit PA. The first phase shift unit 510 is used to selectively move or not move the phase angle of the initial RF signal RF1 to obtain an intermediate RF signal RFm. The second phase shift unit 520 is used to selectively move or not move the phase angle of the intermediate RF signal RFm to obtain a target RF signal RF2 with a target phase angle, and output it to the corresponding RF power amplifier unit PA.

[0058] Thus, when the phase shift degree of each RF power amplifier unit PA can change during operation, the position of the third end d3 of the first cable 110 is adjusted from time to time, so that by setting N second phase shift circuits 500, the change in the phase shift degree of each RF power amplifier unit PA can be adaptively compensated.

[0059] In some embodiments, the first phase shift unit 510 is used to selectively be in the first connection state or the second connection state, so as to correspondingly move or not move the phase angle of the initial radio frequency signal RF1. The second phase shift unit 520 is used to selectively be in the third connection state or the fourth connection state, so as to correspondingly move or not move the phase angle of the intermediate radio frequency signal RFm. The control unit 400 is used to control the corresponding first phase shift unit 510 to be in the first connection state or the second connection state according to each first phase difference A1, and control the corresponding second phase shift unit 520 to be in the third connection state or the fourth connection state.

[0060] In some embodiments, when the first phase shift unit 510 is in the first connection state, the first phase shift unit 510 moves the phase angle of the initial RF signal RF1 in a first direction. When the second phase shift unit 520 is in the third connection state, the second phase shift unit 520 moves the phase angle of the intermediate RF signal RFm in a second direction. The first direction and the second direction are opposite.

[0061] In one or more embodiments, the first direction may be a direction that causes the phase angle of the initial RF signal RF1 to advance, and correspondingly, the second direction is a direction that causes the phase angle of the initial RF signal RF1 to lag. The first direction may also be a direction that causes the phase angle of the initial RF signal RF1 to lag, and correspondingly, the second direction is a direction that causes the phase angle of the initial RF signal RF1 to advance.

[0062] Further, when the first phase shift unit 510 is in the second connection state, the first phase shift unit 510 does not shift the phase angle of the initial RF signal RF1. When the second phase shift unit 520 is in the fourth connection state, the second phase shift unit 520 does not shift the phase angle of the intermediate RF signal RFm.

[0063] It should be noted that when the first phase shift unit 510 does not move the phase angle of the initial RF signal RF1, the phase angle of the intermediate RF signal RFm obtained is the same as the phase angle of the initial RF signal RF1. When the second phase shift unit 520 does not move the phase angle of the intermediate RF signal RFm, the phase angle of the target RF signal RF2 obtained is the same as the phase angle of the intermediate RF signal RFm.

[0064] Thus, each RF power amplifier unit PA is used to receive the initial RF signal RF1 and amplify the initial RF signal RF1 to obtain sub-RF power RF2, that is, each RF power amplifier unit PA is used to amplify the initial RF signal RF1 to obtain sub-RF power RF2, that is, each RF power amplifier unit PA is used to receive the target RF signal RF2 and amplify the target RF signal RF2 to obtain sub-RF power RF2. Therefore, the initial RF signal RF1, the intermediate RF signal RFm and the target RF signal RF2 are only different in name, and the three signals are only different in phase angle, while other waveform parameters such as frequency and amplitude are the same, that is, the target RF signal RF2 is also the initial RF signal RF1 modulated by the second phase shift circuit 500.

[0065] In one or more embodiments, the control unit 400 is used to control the corresponding first phase shift unit 510 to be in the first connection state and the corresponding second phase shift unit 520 to be in the fourth connection state when any first phase difference A1 is not equal to zero, or to control the corresponding first phase shift unit 510 to be in the second connection state and the corresponding second phase shift unit 520 to be in the third connection state; when any first phase difference A1 is equal to zero, the corresponding first phase shift unit 510 is controlled to be in the second connection state and the corresponding second phase shift unit 520 is controlled to be in the fourth connection state.

[0066] Further, the control unit 400 is used to control the corresponding first phase shift unit 510 to be in the first connection state, and control the corresponding second phase shift unit 520 to be in the fourth connection state when any first phase difference A1 is greater than zero, and control the corresponding first phase shift unit 510 to be in the second connection state, and control the corresponding second phase shift unit 520 to be in the third connection state when any first phase difference A1 is less than zero. Alternatively, the control unit 400 is used to control the corresponding first phase shift unit 510 to be in the first connection state, and control the corresponding second phase shift unit 520 to be in the fourth connection state when any first phase difference A1 is less than zero, and control the corresponding first phase shift unit 510 to be in the second connection state, and control the corresponding second phase shift unit 520 to be in the third connection state when any first phase difference A1 is greater than zero.

[0067] In some embodiments, the first phase shift unit 510 further has a variable first phase shift parameter. When the first phase shift unit 510 is in the first connection state, the shift angle of the phase angle of the initial RF signal RF1 by the first phase shift unit 510 changes according to the change of the first phase shift parameter. The second phase shift unit 520 further has a variable second phase shift parameter. When the second phase shift unit 520 is in the third connection state, the shift angle of the phase angle of the intermediate RF signal RFm by the second phase shift unit 520 changes according to the change of the second phase shift parameter. The control unit 400 is also used to adjust the first phase shift parameter of the corresponding first phase shift unit 510 according to the non-zero first phase difference A1 when any first phase difference A1 is not equal to zero, or adjust the second phase shift parameter of the corresponding second phase shift unit 520.

[0068] The phase shift accuracy of each first phase shift unit 510 is the minimum change amount of the first phase shift parameter, and the phase shift accuracy of each second phase shift unit 520 is the minimum change amount of the second phase shift parameter.

[0069] Furthermore, the control unit 400 may also be configured to adjust the first phase shift parameter of the corresponding first phase shift unit 510 and the second phase shift parameter of the corresponding second phase shift unit 520 according to the non-zero first phase difference A1 when any first phase difference A1 is not equal to zero.

[0070] In one or more embodiments, the phase shift accuracy of each first phase shift unit 510110 is different from the phase shift accuracy of the corresponding second phase shift unit 520120. The control unit 400400 can be used to control the corresponding first phase shift unit 510110 to be in the first connection state, and control the corresponding second phase shift unit 520120 to be in the third connection state when any first phase difference A1 is not equal to zero.

[0071] Please also read Figure 5 , Figure 5 FIG. 1 is a circuit diagram of a second phase shift circuit in an embodiment of the present application. Figure 3 , Figure 4 , Figure 5 As shown, each first phase shift unit 510 includes a first resistor R1, a first capacitor C1 and a first switch S1, the first resistor R1 and the first capacitor C1 are connected to the ground GND in sequence, the connection point between the first resistor R1 and the first capacitor C1 is connected to the corresponding second phase shift unit 520, and the two ends of the first switch S1 are correspondingly connected to the two ends of the first resistor R1. Among them, the first switch S1 is used to be selectively in an on or off state, so as to correspondingly make the first phase shift unit 510 selectively in the second connection state or the first connection state.

[0072] Specifically, the phase difference between the phase angle of the intermediate RF signal RFm and the phase angle of the initial RF signal RF1 satisfies a first preset relationship, and the first preset relationship may be -tan -1 (R1×C1×ω), that is, the phase difference between the phase angle of the initial RF signal RF1 and the phase angle of the intermediate RF signal RFm is related to the resistance value of the first resistor R1, the capacitance value of the first capacitor C1 and the angular frequency of the initial RF signal RF1, that is, the shift angle of the phase angle of the initial RF signal RF1 by each first phase shift unit 510 is -tan -1 (R1×C1×ω), the first phase shift parameter of each first phase shift unit 510 is related to the resistance value of the first resistor R1, the capacitance value of the first capacitor C1, and the angular frequency of the initial RF signal RF1.

[0073] Further, the first resistor R1 has an adjustable resistance value and / or the first capacitor C1 has an adjustable capacitance value, and the first phase shift parameter of the corresponding first phase shift unit 510 is changed by adjusting the resistance value of the first resistor R1 and / or the capacitance value of the first capacitor C1. Figure 5 As shown, the first capacitor C1 may be an adjustable capacitor to have an adjustable capacitance value.

[0074] Please also read Figure 6 , Figure 6 FIG. 1 is a circuit diagram of a second phase shift circuit in another embodiment of the present application. Figure 3 , Figure 4 , Figure 6 As shown, each first phase shift unit 510 may also include a first resistor R1, a first capacitor C1, a third switch S3 and a fourth switch S4, the first resistor R1, the first capacitor C1 and the fourth switch S4 are connected to the ground GND in sequence, the connection point between the first resistor R1 and the first capacitor C1 is connected to the corresponding second phase shift unit 520, and the two ends of the third switch S3 are correspondingly connected to the two ends of the first capacitor C1. Among them, the third switch S3 and the fourth switch S4 are used to selectively be in the on or off state at the same time, so as to make the first phase shift unit 510 selectively in the second connection state or the first connection state. That is, when the third switch S3 and the fourth switch S4 are both in the on state, the corresponding first phase shift unit 510 is selectively in the second connection state, and when the third switch S3 and the fourth switch S4 are both in the off state, the corresponding first phase shift unit 510 is selectively in the first connection state.

[0075] like Figure 3 , Figure 4 , Figure 5 , Figure 6As shown, each second phase shift unit 520 includes a second resistor R2, a second capacitor C2 and a second switch S2, the second capacitor C2 and the second resistor R2 are sequentially connected between the corresponding first phase shift unit 510 and the ground GND, the connection point between the second capacitor C2 and the second resistor R2 is connected to the corresponding RF power amplifier unit PA, and the two ends of the second switch S2 are correspondingly connected to the two ends of the second capacitor C2. Among them, the second switch S2 is used to be selectively in an on or off state, so as to correspondingly make the second phase shift unit 520 selectively in the fourth connection state or the third connection state.

[0076] Specifically, the phase difference between the phase angle of the target RF signal RF2 and the phase angle of the intermediate RF signal RFm satisfies a second preset relationship, and the second preset relationship may be tan -1 (1 / R2×C2×ω), that is, the phase difference between the phase angle of the target RF signal RF2 and the phase angle of the intermediate RF signal RFm is related to the resistance value of the second resistor R2, the capacitance value of the second capacitor C2 and the angular frequency of the intermediate RF signal RFm, that is, the shift angle of the phase angle of the intermediate RF signal RFm by each second phase shift unit 520 is tan -1 (1 / R2×C2×ω), the second phase shift parameter of each second phase shift unit 520 is related to the resistance value of the second resistor R2, the capacitance value of the second capacitor C2, and the angular frequency of the intermediate RF signal RFm.

[0077] Further, the second resistor R2 has an adjustable resistance value and / or the second capacitor C2 has an adjustable capacitance value, and the second phase shift parameter of the corresponding second phase shift unit 520 is changed by adjusting the resistance value of the second resistor R2 and / or the capacitance value of the second capacitor C2. Figure 6 As shown, the second capacitor C2 may be an adjustable capacitor to have an adjustable capacitance value.

[0078] In some embodiments, Figure 3 The control unit 400 shown in FIG. Figure 5 , Figure 6 One or more of the first switch S1, the second switch S2, the third switch S3 and the fourth switch S4 shown are turned on or off to control the corresponding first phase shift unit 510 to be in the first connection state or the second connection state, and to control the corresponding second phase shift unit 520 to be in the third connection state or the fourth connection state.

[0079] In some embodiments, Figure 3 The control unit 400 shown in the figure adjusts the following respectively by controlling the adjustment unit 410: Figure 5 , Figure 6The capacitance value of the first capacitor C1 and / or the capacitance value of the second capacitor C2 are shown to correspondingly adjust the first phase shift parameter of the first phase shift unit 510 and / or the second phase shift parameter of the second phase shift unit 520 .

[0080] In some embodiments, the phase difference acquisition unit 300 may include N+1 voltage sensors, N+1 operational amplifiers, and N logic devices such as XOR gates to obtain N first phase differences A1. Each voltage sensor is used to obtain the initial RF signal RF1 and each sub-RF power RF2, each operational amplifier is used to convert the initial RF signal RF1 and each sub-RF power RF2 into square waves, and each logic device such as XOR gates performs logic operations on the square wave initial RF signal RF1 and each sub-RF power RF2 to obtain N first phase differences A1.

[0081] In some embodiments, the control unit 400 can be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).

[0082] In some embodiments, the power values ​​of the sub-RF power RF2 obtained by each RF power amplifier unit PA are equal.

[0083] In some embodiments, the load can be a plasma load.

[0084] The power synthesis device 10 of the present application, through the above-mentioned structure, can effectively solve the phase shift problem of the initial RF signal RF1 during the power amplification process according to actual needs, and can better perform subsequent power synthesis, thereby realizing the power synthesis of multiple sub-RF power RF2, so as to obtain the high-power target RF power RF4 required by the load, and thus better provide RF power to loads such as plasma loads.

[0085] See also Figure 7 , Figure 7 FIG. 1 is a block diagram of a radio frequency power supply system in some embodiments of the present application. Figure 7As shown, the present application further provides a radio frequency power supply system 1000, and the radio frequency power supply system 1000 includes the power synthesis device 10 in any of the aforementioned embodiments.

[0086] Please refer again Figure 1 .like Figure 1 As shown, the power synthesis device 10 is used to process the initial RF signal RF1 to obtain the target RF power RF4. The power synthesis device 10 includes N RF power amplifier units PA, N first phase shift circuits 100 and a power synthesis unit 200, wherein N≥2. The N RF power amplifier units PA are connected to the N first phase shift circuits 100 in a one-to-one correspondence, and each RF power amplifier unit PA is used to receive the initial RF signal RF1 and amplify the power of the initial RF signal RF1 to obtain sub-RF power RF2. The N first phase shift circuits 100 are connected to the power synthesis unit 200, and each first phase shift circuit 100 is used to shift the phase angle of the corresponding sub-RF power RF2 by a corresponding angle to obtain phase-shifted RF power RF3, wherein the phase angle of each phase-shifted RF power RF3 is the same. The power synthesis unit 200 is used to perform power synthesis on each phase-shifted RF power RF3 to obtain the target RF power RF4.

[0087] The more specific structure of the power synthesis device 10 can refer to the relevant content of the power synthesis device 10 in any of the above embodiments, which will not be repeated here.

[0088] Specifically, the initial RF signal RF1 can be output by a signal source, which can be a crystal oscillator source, so that the waveform of the output initial RF signal RF1 is a sine wave, and the waveform of the sub-RF power RF2 obtained according to the initial RF signal RF1 and the waveform of the target RF power RF4 obtained by power synthesis are also sine waves.

[0089] The power synthesis device 10 and the RF power supply system 1000 of the present application, through the above-mentioned structure, effectively solve the phase shift problem of the initial RF signal RF1 during the power amplification process, and can better perform subsequent power synthesis, thereby realizing the power synthesis of multiple sub-RF power RF2, so as to obtain the high-power target RF power RF4 required by the load, and thus better provide RF power to loads such as plasma loads.

[0090] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A power synthesis device, characterized in that: The power synthesis device is used to process the initial radio frequency signal to obtain target radio frequency electric energy, and the power synthesis device includes N radio frequency power amplifier units, N first phase shift circuits and a power synthesis unit, wherein N≥2; The N RF power amplifier units are connected to the N first phase shift circuits in a one-to-one correspondence, and each RF power amplifier unit is used to receive the initial RF signal and amplify the power of the initial RF signal to obtain sub-RF power; The N first phase shift circuits are connected to the power synthesis unit, and each first phase shift circuit is used to shift the phase angle of the corresponding sub-RF power by a corresponding angle to obtain phase-shifted RF power, wherein the phase angle of each phase-shifted RF power is the same; The power synthesis unit is used for synthesizing the power of each phase-shifted radio frequency electric energy to obtain the target radio frequency electric energy.

2. The power synthesis device according to claim 1, characterized in that: Each first phase shift circuit includes a first cable, each first cable includes an opposite first end, a second end, and a third end located between the first end and the second end, the first end is connected to the corresponding radio frequency power amplifier unit, the third end is a connection point between the first cable and the power synthesis unit, and the second end is open; The moving angle of each first phase shift circuit changes according to the position of the third end of the first cable corresponding to the first phase shift circuit.

3. The power synthesis device according to claim 2, characterized in that: The power synthesis device further includes a phase difference acquisition unit and a control unit, wherein the phase difference acquisition unit is connected to the N RF power amplifier units and the control unit; The phase difference acquisition unit is used to acquire N first phase differences, each of which is a phase difference between a phase angle of an initial RF signal and a phase angle of a corresponding sub-RF electric energy; The control unit is used to control the third end of the corresponding first cable to be in a corresponding position at least according to each first phase difference, so as to move the phase angle of the corresponding sub-RF power energy by a corresponding angle, so that the phase angles of the N phase-shifted RF power energies obtained by the N first phase shift circuits are the same.

4. The power synthesis device according to claim 3, characterized in that: The power synthesis device further includes an adjustment unit, the adjustment unit is connected to both the third end and the control unit, and the adjustment unit is used to adjust the position of the third end so that the third end changes between the first end and the second end; The control unit is used to control the adjustment unit to adjust the position of the third end according to the relationship between each first phase difference, the length of the corresponding first cable and the wavelength of the corresponding sub-RF power transmitted in the first cable, so that the third end is in a corresponding position.

5. The power synthesis device according to claim 3, characterized in that: The third end of each first cable is at a variable position, and the frequency of each sub-RF power is between 300 MHz and 300 GHz; The length of each first cable is equal to the wavelength of the corresponding sub-RF power transmitted in the first cable, and when the position of the third end changes from the first end to the second end, the moving angle of each first cable changes from zero to 2π accordingly.

6. The power synthesis device according to claim 3, characterized in that: The third end of each first cable is in a fixed position, and the frequency of each sub-RF power is between 300kHz and 300MHz; The third end of each first cable overlaps with the second end, and the corresponding length of each first cable shifts the phase angle of the corresponding sub-RF power by a corresponding angle to obtain phase-shifted RF power.

7. The power synthesis device according to claim 6, characterized in that: The control unit is also used to control and adjust the phase angle of the corresponding initial RF signal to change according to the change of the first phase difference when any first phase difference changes, so that the phase angles of the N phase-shifted RF electric energies obtained by the N first phase shift circuits are the same.

8. The power synthesis device according to claim 3, characterized in that: The N radio frequency power amplifier units include a reference radio frequency power amplifier unit and N-1 phase-shift radio frequency power amplifier units; The control unit is further configured to determine the reference RF power amplifier unit according to the N first phase differences, wherein the first phase shift circuit corresponding to the reference RF power amplifier unit shifts the phase angle of the RF power energy to zero.

9. The power synthesis device according to claim 8, characterized in that: The phase deviation value of the reference radio frequency power amplifier unit is less than or equal to the phase deviation value of any phase-shift radio frequency power amplifier unit; The phase deviation value is the absolute value of the difference between the corresponding first phase difference and the average value of the N first phase differences.

10. A radio frequency power supply system, characterized in that: It comprises a power synthesis device as described in any one of claims 1 to 9.

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