Flexible neural probe

Abstract

A flexible nerve probe (100) comprises a flexible probe body and a monitoring electrode mechanism, the flexible probe body comprises a gas pressure control layer (200) and an electrode integrated layer (300) arranged in a stack, at least one gas chamber (400) is formed in the gas pressure control layer (200), the flexible probe body has a tip, the monitoring electrode mechanism is arranged on the electrode integrated layer (300), and the monitoring electrode mechanism comprises at least one electrode (700), the electrode (700) is located at the tip of the flexible probe body, and the gas pressure in the gas chamber (400) is adjustable, so that the flexible probe body is deformed and the monitoring position of the electrode (700) is changed.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of medical devices, for example to a flexible neural probe. BACKGROUND

[0002] A neural probe is a special-shaped chip that monitors neuron electrical signals or chemical signals by using a tip implantable electrode. Compared with a traditional silicon-based probe, a neural probe based on a flexible polymer material can not only reduce the size of a wound to alleviate the pain of an experimental animal or a patient, but also avoid the aggregation of star-shaped glial cells caused by implantation, so that the signal quality obtained by monitoring is more reliable. Therefore, the neural probe is widely used in many fields such as the treatment of neurological diseases and brain-computer interaction.

[0003] However, a neural probe can only monitor neuron signals of one area in one implantation process. If neuron signals of another area are to be monitored, the neural probe needs to be pulled out from the original monitoring area and then implanted in the new monitoring area again. This not only complicates the operation and increases the pain of the experimental animal or the patient, but also affects the service life of the probe itself. SUMMARY

[0004] The present application provides a flexible neural probe, the monitoring position of which in a biological tissue can be changed, thereby improving the use experience of a recipient using the flexible neural probe and prolonging the service life of the flexible neural probe.

[0005] The present application provides a flexible neural probe, comprising: a flexible probe body, the flexible probe body comprising a gas pressure control layer and an electrode integrated layer arranged in layers, at least one gas chamber being formed in the gas pressure control layer, the flexible probe body having a tip; a monitoring electrode mechanism, the monitoring electrode mechanism being arranged on the electrode integrated layer, and the monitoring electrode mechanism comprising at least one electrode, the electrode being located at the tip of the flexible probe body; wherein the gas pressure in the gas chamber is adjustable to cause the flexible probe body to deform and change the monitoring position of the electrode.

[0006] In an implementation manner, the number of the gas chambers is multiple, and the multiple gas chambers are arranged at intervals in the length direction of the flexible probe body.

[0007] In an implementation manner, the gas pressure control layer further forms a gas injection cavity and at least one micro flow channel, the gas injection cavity being in communication with the gas chambers through the micro flow channel, gas being able to be injected into all the gas chambers through the gas injection cavity and the micro flow channel, and the gas in the gas chambers being able to be discharged through the micro flow channel and the gas injection cavity.

[0008] In an implementation, the monitoring electrode mechanism further comprises a packaging structure and a lead wire, the packaging structure being electrically connected to the electrode through the lead wire.

[0009] In an implementation, the number of electrodes is multiple, each of the multiple electrodes being arranged at the tip of the flexible probe body and being connected to the packaging structure through one of the lead wires.

[0010] In an implementation, the length a of the flexible probe body is 1mm-100mm; and / or, the width b of the flexible probe body is 200um-2000um; and / or, the tip of the flexible probe body comprises two waist edges c of equal length and at an included angle, the ratio of the length of the waist edge c to the width of the flexible probe body being 0.6-1.5.

[0011] In an implementation, the thickness of the gas pressure control layer is greater than the thickness of the electrode integration layer.

[0012] In an implementation, the thickness of the gas pressure control layer is 40um-200um; and / or, the thickness of the electrode integration layer is 10um-200um.

[0013] In an implementation, the cross-sectional shape of the gas chamber is polygonal.

[0014] In an implementation, the cross-sectional shape of the gas chamber is elliptical.

[0015] In an implementation, the gas chamber comprises a major axis parallel to the width direction of the flexible probe body and a minor axis parallel to the length direction of the flexible probe body; the difference between the width of the flexible probe body and the length of the major axis is greater than or equal to 100um; the length of the minor axis is less than the length of the flexible probe body, and the ratio of the length of the minor axis to the width of the flexible probe body is less than or equal to 3; the thickness of the gas chamber is less than or equal to half of the thickness of the gas pressure control layer.

[0016] In an implementation, the length of the major axis is 100um-1900um; and / or, the length of the minor axis is 20um-5000um; and / or, the thickness of the gas chamber is 20um-100um.

[0017] In an implementation, the number of gas chambers is multiple, and the ratio of the distance between the geometric centers of two adjacent gas chambers to the length of the minor axis is greater than or equal to 1.5.

[0018] In an implementation, the width of the micro flow channel is 10um-40um; and / or, the height of the micro flow channel is equal to the height of the gas injection cavity.

[0019] In an implementation, the air pressure control layer is a sheet structure made of a flexible polymer material, and the flexible polymer material is one of polydimethylsiloxane, polyimide, polycarbonate and parylene.

[0020] In an implementation, the electrode integration layer is a sheet structure made of a flexible polymer material, and the flexible polymer material is one of polyimide, parylene, polycarbonate and polymethyl methacrylate.

[0021] In an implementation, the air pressure control layer and the electrode integration layer are bonded; or, the air pressure control layer and the electrode integration layer are connected by a hot-press bonding method; or, the air pressure control layer and the electrode integration layer are connected by an ultrasonic bonding method; or, the air pressure control layer and the electrode integration layer are connected by a laser bonding method. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is a schematic diagram of a flexible neural probe provided by an embodiment of the present application;

[0023] Figure 2 is a sectional view of a flexible neural probe provided by an embodiment of the present application;

[0024] Figure 3 is a schematic diagram of an air pressure control layer of a flexible neural probe provided by an embodiment of the present application;

[0025] Figure 4 is a schematic diagram of an air pressure control layer of another flexible neural probe provided by an embodiment of the present application;

[0026] Figure 5 is a schematic diagram of an electrode integration layer of a flexible neural probe provided by an embodiment of the present application;

[0027] Figure 6 is a schematic diagram of an air pressure control layer of a flexible neural probe provided by an embodiment of the present application;

[0028] Figure 7 is a schematic diagram of an air pressure control layer of another flexible neural probe provided by an embodiment of the present application;

[0029] Figure 8 is a schematic diagram of an air pressure control layer of another flexible neural probe provided by an embodiment of the present application;

[0030] Figure 9 is a manufacturing process diagram of a flexible neural probe provided by an embodiment of the present application.

[0031] In the drawings:

[0032] 100、flexible neural probe;

[0033] 200、pneumatic control layer;

[0034] 300、electrode integration layer;

[0035] 400、air chamber;

[0036] 500、gas injection cavity;

[0037] 600、microfluidic channel;

[0038] 700、electrode;

[0039] 800、lead wire;

[0040] 900、package structure. DETAILED DESCRIPTION

[0041] The technical solutions of the present application will be described below in conjunction with the accompanying drawings, and the described embodiments are part of the embodiments of the present application.

[0042] In the description of the present application, the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", are only for the purpose of description, and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0043] In the description of the present application, unless otherwise specified and limited, the terms "mounting", "connecting", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the meaning of the above terms in the present application can be understood according to the situation.

[0044] As shown in Figure 1 The present application discloses a flexible neural probe 100, which can be applied in a living body (such as an experimental animal or a patient) to monitor the neuron electrical signal or chemical signal in the living body.

[0045] The flexible neural probe 100 comprises a flexible probe body and a monitoring electrode mechanism. The flexible probe body is a multi-layer sheet structure made of flexible material, which is generally arrow-shaped. The flexible probe body has a tip and a connecting end. The connecting end of the flexible probe body is configured to be connected to an external mechanism, which can be a gas charging and discharging mechanism. The tip of the flexible probe body is configured to pierce biological tissue and enter the body. As shown in Figures 2 to 5 The flexible probe body comprises a gas pressure control layer 200 and an electrode integrated layer 300 arranged in layers. In some embodiments, the shapes of the gas pressure control layer 200 and the electrode integrated layer 300 are the same. The gas pressure control layer 200 has at least one gas chamber 400 formed therein, and the gas pressure in the gas chamber 400 is adjustable. The monitoring electrode mechanism is arranged on the electrode integrated layer 300 and comprises at least one electrode 700 located at the tip of the flexible probe body.

[0046] After the flexible neural probe 100 is implanted in the body, the electrode 700 at the tip can monitor the neuron electrical signals or chemical signals at the location. When the monitoring position needs to be adjusted, the gas pressure in the gas chamber 400 can be changed by gas charging, so that the tip of the flexible probe body bends. When the tip of the flexible probe body bends, the position of the electrode 700 at the tip changes correspondingly to reach a new monitoring position and monitor the neuron electrical signals or chemical signals at the position. Compared with the related art, which requires the neural probe to be removed from the body and then implanted into the body at a new monitoring position, the flexible neural probe 100 provided by the present application does not need to be removed and implanted into the body again, but can be directly moved to a new monitoring position in the body. This not only avoids the pain caused by removing and implanting the neural probe into the body, improves the user experience of the body, but also avoids damage to the neural probe caused by removing and implanting the neural probe, which helps to prolong the service life of the flexible neural probe 100.

[0047] By changing the gas pressure in the gas chamber 400, the bending force of the tip can be changed. According to experiments, the bending force of the tip is approximately linearly positively correlated with the gas pressure. When the flexible neural probe 100 is implanted in the body, the gas pressure needs to be increased to reduce the damage to the biological tissue caused by the implantation action and avoid signal noise caused by the production of astrocytes. After the implantation is completed, the gas pressure can be reduced.

[0048] In some embodiments, the air pressure control layer 200 and the electrode integrated layer 300 are both in sheet structure made of flexible materials, which can be the same or different. In some embodiments, the air pressure control layer 200 is made of one of polydimethylsiloxane (PDMS), polyimide (PI), polycarbonate (PC) and parylene; and the electrode integrated layer 300 is made of one of PI, parylene, PC and polymethyl methacrylate (PMMA). In addition to these materials, the air pressure control layer 200 and the electrode integrated layer 300 can also be made of other flexible materials according to requirements. That is, the flexible neural probe 100 has almost no limit to the selection of flexible materials, and any flexible polymer material can be used as the structural material of the flexible neural probe 100. Moreover, the flexible neural probe 100 has simple and easy-to-operate manufacturing process, and has the potential for large-scale production.

[0049] The air pressure control layer 200 and the electrode integrated layer 300 are connected together after being manufactured respectively. In some embodiments, the air pressure control layer 200 and the electrode integrated layer 300 are connected by bonding. In addition to bonding, the air pressure control layer 200 and the electrode integrated layer 300 can also be directly connected by heat pressing, ultrasonic bonding or laser bonding. In some other embodiments, the air pressure control layer 200 and the electrode integrated layer 300 can also be bonded by an intermediate layer, and the material of the intermediate layer is not limited here.

[0050] In some embodiments, the length a of the flexible probe body is 1 mm-100 mm. The width b of the flexible probe body is 200 um-2000 um. The tip of the flexible probe body includes two waist edges c with equal length and an included angle. The ratio of the length of the waist edge c to the width of the flexible probe body is 0.6-1.5. If the length of the flexible probe body is too long, the structural stress will cause the flexible neural probe 100 to be unable to be vertically implanted. If the width of the flexible probe body is too wide, it will cause the implantation wound to be too large.

[0051] In some embodiments, the thickness of the air pressure control layer 200 is greater than the thickness of the electrode integrated layer 300. In some embodiments, the thickness of the air pressure control layer 200 is 40 um-200 um; and the thickness of the electrode integrated layer 300 is 10 um-200 um. No matter the air pressure control layer 200 or the electrode integrated layer 300, too small thickness will result in low structural strength and thus unable to ensure the probe process forming, and too large thickness will result in too large implantation wound.

[0052] In some embodiments, the cross-sectional shape of the air chamber 400 is polygonal, such as rectangular (as shown in Figure 4 FIG. 1), triangular, diamond, or other polygonal shapes. In addition to regular shapes, the cross-section of the air chamber 400 can also be irregular.

[0053] In some parallel embodiments, as shown in Figure 3 FIG. 2, the cross-sectional shape of the air chamber 400 is elliptical, and the elliptical air chamber 400 has a major axis parallel to the width direction of the flexible probe body and a minor axis parallel to the length direction of the flexible probe body. In some embodiments, the difference between the width of the flexible probe body and the length of the major axis is greater than or equal to 100 um, for example, the length of the major axis is 100 um-1900 um; the length of the minor axis is less than the length of the flexible probe body, and the ratio of the length of the minor axis to the width of the flexible probe body is less than or equal to 3, for example, the length of the minor axis is 20 um-5000 um; the thickness of the air chamber 400 is less than or equal to half the thickness of the air pressure control layer 200, for example, the thickness of the air chamber 400 is 20 um-100 um.

[0054] The number of air chambers 400 can be one or more according to requirements. Through the design and number of air chambers 400, combined with simulation data, different multi-site testing requirements can be met. According to the simulation data, after the flexible neural probe 100 is implanted into the organism, under the same air pressure, the more the number of air chambers 400, the greater the degree of probe bending.

[0055] Continuing to refer to Figure 3 and Figure 4 , the number of air chambers 400 is multiple, and the multiple air chambers 400 are arranged at intervals in the length direction of the flexible probe body. When the shape of the air chamber 400 is elliptical, and the number of air chambers 400 is multiple, the ratio of the distance between the geometric centers of the two adjacent air chambers 400 to the length of the minor axis is greater than or equal to 1.5.

[0056] Continuing to refer to Figure 3 , in order to adjust the air pressure in the air chamber 400, the air pressure control layer 200 is further formed with a gas injection cavity 500 and a micro flow channel 600. The gas injection cavity 500 is in communication with the air chamber 400 through the micro flow channel 600, and the gas injection cavity 500 can be connected with a gas charging and discharging mechanism. Through the gas injection cavity 500 and the micro flow channel 600, gas can be injected into all air chambers 400, and the gas in the air chamber 400 can be discharged through the micro flow channel 600 and the gas injection cavity 500, so as to realize the increase or decrease of the air pressure in the air chamber 400.

[0057] The number of microchannels 600 can be set to one or more as needed. In some embodiments, the width of the microchannel 600 is 10um-40um; the height of the microchannel 600 is equal to the height of the gas injection chamber 500.

[0058] Continue to refer to Figure 5 As shown, the monitoring electrode mechanism also includes an encapsulation structure 900 and a lead 800. The encapsulation structure 900 is electrically connected to the electrode 700 via the lead 800. The electrode 700 can both acquire signals and apply electrical stimulation to the implanted tissue site. In some embodiments, there are multiple electrodes 700, all disposed at the tip of the flexible probe body, and each electrode 700 is connected to the encapsulation structure 900 via a lead 800. The multiple electrodes 700 are arranged at the tip of the flexible probe body to form an electrode area array. This array arrangement includes, but is not limited to, a circular array arrangement, a rectangular array arrangement, and a horizontal array arrangement.

[0059] In some embodiments, the electrode 700, lead 800, and package structure 900 are made of conductive materials commonly used in semiconductor processes, such as metals, conductive glass indium tin oxide (ITO), and polymers of (3,4-ethylenedioxythiophene) (Poly(3,4-ethylenedioxythiophene), PEDOT).

[0060] The flexible neural probe 100 has the following advantages:

[0061] 1. Compared to silicon-based probes and ordinary flexible probes, this flexible neural probe 100 can dynamically adjust the tip implantation bending force through air pressure, thereby reducing tissue damage caused by implantation and avoiding signal noise caused by the generation of astrocytes; 2. After implantation, this flexible neural probe 100 can control the test position of the probe tip electrode 700 by adjusting the air pressure, achieving the effect of multiple site testing in one implantation; 3. This flexible neural probe 100 can meet different multi-site testing needs by adjusting the shape and number of air chambers 400 in the air pressure control layer 200, combined with simulation data; 4. This flexible neural probe 100 has almost no restrictions on manufacturing materials. Any flexible polymer material can be used as the structural material of the probe, and the manufacturing process is simple and easy to operate, with the potential for large-scale mass production.

[0062] Example 1:

[0063] The following is for reference. Figure 6 The structure of a flexible neural probe 100 according to one embodiment of this application is described.

[0064] like Figure 6As shown, the flexible neural probe 100 provided in this embodiment includes an electrode integration layer 300 and a pressure control layer 200. The electrode integration layer 300 is made of PI, and the pressure control layer 200 is made of PDMS. The structural thickness of both the electrode integration layer 300 and the pressure control layer 200 is 100 μm. The length of the flexible neural probe 100 is 10 mm and the width is 1 mm. The thickness of the air chambers 400 inside all probes is 20 μm.

[0065] The flexible neural probe 100 has only one air chamber 400 at its tip. The cross-sectional shape of the air chamber 400 is elliptical, and the minor axis of the air chamber 400 is 0.5 mm and the major axis is 0.8 mm.

[0066] Example 2:

[0067] The following is for reference. Figure 7 The structure of a flexible neural probe 100 according to one embodiment of this application is described.

[0068] like Figure 7 As shown, the flexible neural probe 100 provided in this embodiment includes an electrode integration layer 300 and a pressure control layer 200. The electrode integration layer 300 is made of PI, and the pressure control layer 200 is made of PDMS. The structural thickness of both the electrode integration layer 300 and the pressure control layer 200 is 100 μm. The length of the flexible neural probe 100 is 10 mm and the width is 1 mm. The thickness of the air chambers 400 inside all probes is 20 μm.

[0069] The flexible neural probe 100 is provided with 10 air chambers 400, each air chamber 400 has an elliptical cross-sectional shape, and each air chamber 400 has a minor axis of 0.5 mm and a major axis of 0.8 mm.

[0070] Example 3:

[0071] The following is for reference. Figure 8 The structure of a flexible neural probe 100 according to one embodiment of this application is described.

[0072] like Figure 8 As shown, the flexible neural probe 100 provided in this embodiment includes an electrode integration layer 300 and a pressure control layer 200. The electrode integration layer 300 is made of PI, and the pressure control layer 200 is made of PDMS. The structural thickness of both the electrode integration layer 300 and the pressure control layer 200 is 100 μm. The length of the flexible neural probe 100 is 10 mm and the width is 1 mm. The thickness of the air chambers 400 inside all probes is 20 μm.

[0073] The flexible nerve probe 100 is provided with 50 air chambers 400, each of which has an elliptical cross-sectional shape, and each of which has a short axis of 0.1 mm and a long axis of 0.8 mm.

[0074] The flexible nerve probe 100 provided by the embodiment is made by using a standard micro-nano processing technology, as shown in the following process flow: Figure 9

[0075] First step: first, spin-coat a negative photoresist SU8 on the surface of a silicon wafer, the thickness of the photoresist layer is 20 um, then form a micro-channel 600 template through a standard photoetching process (pre-baking-mask photoetching-post-baking-development-high temperature curing), and finally, after removing the residual glue by using oxygen plasma, a layer of silane is self-assembled on the surface of the template to make the surface of the template super-hydrophobic, thereby forming a micro-channel template with surface silanization as shown in C1 in the figure. Figure 9

[0076] Second step: first, mix the base and hardener of PDMS in a ratio of 10:1, stir well, and then perform vacuum degassing to obtain a PDMS mixed solution; then, spin-coat the PDMS mixed solution on the micro-channel 600 template, the thickness of the PDMS is 60 um; then, bake at 80℃ for 5 hours to fully cure the PDMS, and then cool to room temperature; finally, evenly paste a 100 um thick PI tape on the PDMS, trim the excess edges and corners to form a structure as shown in C2 in the figure, which includes a micro-channel template and a micro-channel structure formed on the micro-channel template. Figure 9

[0077] Third step: first, spin-coat 40 um thick PDMS on a rectangular quartz glass, and also use the parameters of baking at 80℃ for 5 hours for curing; then, peel off the micro-channel structure formed in the second step from the micro-channel template, the micro-channel structure contains the entire probe pattern; finally, use oxygen plasma to perform hydrophilic treatment on the micro-channel structure and the PDMS layer on the quartz glass, and then hot-press bond to form a structure as shown in C3 in the figure. Figure 9

[0078] Fourth step: use excimer laser to cut out the structure of the probe, and then peel off the entire probe from the quartz glass, as shown in C4 in the figure. Figure 9

[0079] ​​​​​The flexible nerve probe provided by the application comprises a flexible probe body and a monitoring electrode mechanism, the flexible probe body comprises a gas pressure control layer and an electrode integrated layer which are arranged in layers, at least one air chamber is formed in the gas pressure control layer, the flexible probe body has a tip, the monitoring electrode mechanism is arranged on the electrode integrated layer, and the monitoring electrode mechanism comprises at least one electrode, and the electrode is located at the tip of the flexible probe body. By adjusting the air pressure in the air chamber of the flexible nerve probe, the flexible probe body can be deformed, when the flexible probe body is deformed, the tip of the flexible probe body is bent, so that the monitoring position of the electrode located at the tip is moved. The process of replacing the monitoring position of the flexible nerve probe does not need to be removed from the patient or experimental animal and inserted again, which can effectively reduce the pain of the patient or experimental animal and improve the service life of the flexible nerve probe.

Claims

1. A flexible neural probe, comprising: A flexible probe body includes a pressure control layer (200) and an electrode integration layer (300) stacked together. A plurality of air chambers (400) are formed in the pressure control layer (200), and the plurality of air chambers (400) are spaced apart in the length direction of the flexible probe body. The flexible probe body has a tip. A monitoring electrode mechanism is disposed on the electrode integration layer (300), and the monitoring electrode mechanism includes at least one electrode (700) located at the tip of the flexible probe body; The air pressure in the air chamber (400) is adjustable to allow the tip of the flexible probe body to bend and the monitoring position of the electrode (700) to change.

2. The flexible neural probe according to claim 1, wherein, The pressure control layer (200) also has a gas injection chamber (500) and at least one microchannel (600). The gas injection chamber (500) is connected to the gas chamber (400) through the microchannel (600). The gas injection chamber (500) and the microchannel (600) are configured to inject gas into all the gas chambers (400). The gas in the gas chambers (400) can be discharged through the microchannel (600) and the gas injection chamber (500).

3. The flexible neural probe according to claim 1, wherein, The monitoring electrode mechanism further includes a packaging structure (900) and a lead wire (800), wherein the packaging structure (900) is electrically connected to the electrode (700) via the lead wire (800).

4. The flexible neural probe according to claim 3, wherein, There are multiple electrodes (700), all of which are disposed at the tip of the flexible probe body, and each electrode (700) is connected to the encapsulation structure (900) via a lead (800).

5. The flexible neural probe according to claim 1, satisfying at least one of the following: The length 'a' of the flexible probe body is 1mm-100mm; The width b of the flexible probe body is 200um-2000um; The tip of the flexible probe body includes two waist edges c of equal length and at an angle, and the ratio of the length of the waist edge c to the width b of the flexible probe body is 0.6-1.

5.

6. The flexible neural probe according to claim 1, wherein, The thickness of the pressure control layer (200) is greater than the thickness of the electrode integration layer (300).

7. The flexible neural probe according to claim 6, satisfying at least one of the following: The thickness of the pressure control layer (200) is 40um-200um; The thickness of the electrode integrated layer (300) is 10um-200um.

8. The flexible neural probe according to claim 1, wherein, The cross-sectional shape of the air chamber (400) is polygonal.

9. The flexible neural probe according to claim 1, wherein, The cross-sectional shape of the air chamber (400) is elliptical.

10. The flexible neural probe according to claim 8, wherein, The air chamber (400) includes a long axis and a short axis, the long axis being parallel to the width direction of the flexible probe body, and the short axis being parallel to the length direction of the flexible probe body; The difference between the width of the flexible probe body and the length of the major axis is greater than or equal to 100 μm; The length of the short axis is less than the length of the flexible probe body, and the ratio of the length of the short axis to the width of the flexible probe body is less than or equal to 3. The thickness of the air chamber (400) is less than or equal to half the thickness of the air pressure control layer (200).

11. The flexible neural probe according to claim 10, satisfying at least one of the following: The length of the major axis is 100um-1900um; The length of the short axis is 20um-5000um; The thickness of the air chamber (400) is 20um-100um.

12. The flexible neural probe according to claim 10, wherein, There are multiple air chambers (400), and the ratio of the distance between the geometric centers of two adjacent air chambers (400) to the length of the minor axis is greater than or equal to 1.

5.

13. The flexible neural probe according to claim 2, satisfying at least one of the following: The width of the microchannel (600) is 10um-40um; The height of the microchannel (600) is equal to the height of the gas injection chamber (500).

14. The flexible neural probe according to any one of claims 1-13, wherein, The pressure control layer (200) is a sheet structure made of a flexible polymer material, which is one of polydimethylsiloxane, polyimide, polycarbonate and parylene.

15. The flexible neural probe according to any one of claims 1-13, wherein, The electrode integrated layer (300) is a sheet structure made of a flexible polymer material, which is one of polyimide, parylene, polycarbonate and polymethyl methacrylate.

16. The flexible neural probe according to any one of claims 1-13, satisfying at least one of the following: The pressure control layer (200) and the electrode integration layer (300) are bonded together; The pressure control layer (200) and the electrode integration layer (300) are connected by thermo-press bonding; The pressure control layer (200) and the electrode integration layer (300) are connected by ultrasonic bonding; The pressure control layer (200) and the electrode integration layer (300) are connected by laser bonding.

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