Oil diffusion pump cold trap device of vacuum coating machine

Abstract

The invention relates to the technical field of cold traps, in particular to an oil diffusion pump cold trap device of a vacuum coating machine, which comprises a box body, and further comprises a condensation assembly, a heat exchange assembly and an oil diffusion pump, and the condensation assembly comprises a cold trap shell, a cooling tank and a liquid storage container; the cold trap shell is arranged in the box body, a containing cavity is formed in the cold trap shell, an air inlet pipe is arranged on the upper portion of the cold trap shell, and an air inlet of the air inlet pipe is communicated with the steam inlet; the cooling tank is installed on the upper portion of the containing cavity, a cooling cavity is formed in the cooling tank, the upper portion of the cooling cavity communicates with a lower air outlet of the air inlet pipe through a guide pipe, and a liquid outlet is formed in the lower portion of the cooling cavity. A coil pipe type condensation pipe is arranged on the outer wall of the cooling tank; the spraying assembly is used for atomizing the cooling water and then spraying the cooling water into the cooling cavity, so that the atomized cooling water is in full contact with the steam; the liquid storage container is used for receiving condensate; the water cooling assembly is arranged in the box body, connected with the coiled pipe type condensation pipe and used for providing cooling water. According to the invention, efficient condensation and recovery of steam are realized.

Description

Technical Field

[0001] The invention relates to the technical field of cold traps, and in particular to an oil diffusion pump cold trap device of a vacuum coating machine. Background Art

[0002] The main structure of the oil diffusion pump of the vacuum coating machine is composed of a pump housing, a pump core, silicone oil, and an electric furnace. The principle is to use an electric furnace to heat the bottom of the pump to 270°C to make the silicone oil boil, generate oil vapor and spray upward. It is sprayed through the first, second, and third-pole nozzles to form a high-speed spray oil film. At this time, the air molecules are adsorbed on the surface of the oil film by the principle of aerodynamics and then extracted by a mechanical vacuum pump after three-pole compression. The cold trap is a device installed between the vacuum container and the vacuum pump. By cooling the gas, the steam condenses and is captured. The cold trap is very important for the oil diffusion pump. It can capture organic matter and water vapor, prevent other substances and water vapor from entering the oil pump, and reduce the service life and vacuum degree of the oil pump. It is more important for the use of the oil pump.

[0003] In the related art, the oil diffusion pump generates a large amount of steam during operation, which contains organic matter and water vapor. If these steam are not handled in time, they will have adverse effects on the coating quality and equipment performance. When existing cold trap devices condense these oil vapors, they often have problems such as low condensation efficiency and inconvenient collection of condensate. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the purpose of the present invention is to provide an oil diffusion pump cold trap device for a vacuum coating machine, which realizes efficient condensation and recovery of steam by optimizing the design of a condensation component and a spray component.

[0005] The first aspect of the present invention provides an oil diffusion pump cold trap device for a vacuum coating machine, comprising a box body with an openable front end surface for accommodating and protecting internal components; a steam inlet is provided on the top of the box body, and a steam outlet is provided on the side wall of the box body; and further comprising:

[0006] A condensation component, the condensation component comprising a cold trap shell, a cooling tank, and a liquid storage container;

[0007] The cold trap housing is arranged in the box body, a receiving cavity is formed inside the cold trap housing, an air inlet pipe is arranged at the upper part of the cold trap housing, an air inlet of the air inlet pipe is communicated with the steam inlet, and is used to receive and cool the steam from the oil diffusion pump;

[0008] The cooling tank is installed at the upper part of the accommodating cavity, and a cooling cavity is formed inside the cooling tank. The upper part of the cooling cavity is connected with the lower air outlet of the air inlet pipe through a guide pipe, and a liquid discharge port is formed at the lower part of the cooling cavity. A coil-type condenser is arranged on the outer wall of the cooling tank, and the coil-type condenser is in contact with the outer wall of the cooling tank.

[0009] A spray assembly, the spray assembly is installed in the cooling chamber, the water inlet of the spray assembly is connected to the water outlet of the coil-type condenser, and the spray assembly is used to atomize the cooling water and spray it into the cooling chamber, so that the atomized cooling water is fully in contact with the steam;

[0010] The liquid storage container is arranged in the accommodating cavity and is located below the liquid discharge port, and the liquid storage container is used to receive the condensed liquid;

[0011] A water cooling component is arranged in the box and connected to the coil-type condenser to provide cooling water.

[0012] In the first aspect of the present invention, as a preferred embodiment, the coil-type condenser includes a plurality of ring tubes and a plurality of vertical transmission pipes, and the plurality of ring tubes are evenly spaced along the height direction on the outer wall of the cooling tank, and any two adjacent ring tubes are connected by a plurality of vertical transmission pipes, the ring tube located at the top is connected to the water outlet end of the water cooling component, and the ring tube located at the bottom is connected to the water inlet end of the water cooling component.

[0013] In the first aspect of the present invention, as a preferred embodiment, the spray assemblies are in multiple groups, and they are evenly spaced and distributed in the cooling chamber along the height direction.

[0014] In the first aspect of the present invention, as a preferred embodiment, each group of spray assemblies includes a mounting frame, a diverter straight pipe, a first diverter circular pipe, a second diverter circular pipe and a plurality of atomizing nozzles;

[0015] The mounting frame is mounted on the inner wall of the cooling cavity;

[0016] The water inlet end of the diversion straight pipe passes through the cooling tank and is connected to a corresponding one of the ring pipes;

[0017] The first flow-dividing annular tube and the second flow-dividing annular tube are respectively installed on the mounting frame, and the water inlet ends of the first flow-dividing annular tube and the second flow-dividing annular tube are respectively connected to the flow-dividing straight tube;

[0018] A plurality of evenly distributed atomizing nozzles are disposed on the bottom surfaces of the first flow-dividing annular tube and the second flow-dividing annular tube.

[0019] In the first aspect of the present invention, as a preferred embodiment, the condensation assembly also includes a plurality of layers of condensation baffles, which are stacked and detachably installed in the accommodating cavity and located directly below the drain port, and the surface of each condensation baffle is provided with a plurality of inclined grooves passing through the upper and lower surfaces thereof, and the inclined grooves of the plurality of condensation baffles are connected one by one from top to bottom to form a plurality of curved channels.

[0020] In the first aspect of the present invention, as a preferred embodiment, the condensation assembly also includes a filter element, which is arranged in the accommodating cavity and located below the lowest condensation baffle, the upper end surface of the filter element is connected to the bottom surface of the lowest condensation baffle, and the lower end surface is connected to the top opening of the liquid storage container, and the filter element is used to receive the condensate from the condensation baffle and filter the organic matter in the condensate.

[0021] In the first aspect of the present invention, as a preferred embodiment, the water cooling assembly includes a circulating water tank and a refrigeration tank;

[0022] The circulating water tank is arranged in the box body, and a cooling water circulating coil is arranged inside the circulating water tank;

[0023] The refrigeration box is arranged on the top of the circulating water tank; a plurality of refrigeration fins are arranged on the refrigeration box;

[0024] The water inlet end of the cooling water circulation coil is connected to the ring pipe located at the bottom through a pipeline, and the water outlet end of the cooling water circulation coil is connected to the inner cavity of the circulating water tank, and the inner cavity of the circulating water tank is also connected to the water inlet end of the refrigeration box through a cooling water return pipe;

[0025] The water outlet of the refrigeration box is connected to the uppermost ring pipe through a cooling water delivery pipe;

[0026] The cooling water return pipe is provided with a first water pump, and the cooling water delivery pipe is provided with a second water pump.

[0027] In the first aspect of the present invention, as a preferred embodiment, a condensing inner box is also provided in the inner cavity of the circulating water tank, and also includes a steam transmission pipe, one end of the steam transmission pipe is connected to the lower part of the cooling cavity, and the other end thereof is connected to the inner cavity of the condensing inner box, and the cooling water circulation coil is in contact with the outer wall of the condensing inner box, so that the cooling water circulation coil can re-condense the steam entering the inner cavity of the condensing inner box; an exhaust pipe connected to the inner cavity of the condensing inner box is also provided on the side wall of the circulating water tank, and the exhaust pipe is connected to the steam outlet.

[0028] In the first aspect of the present invention, as a preferred embodiment, it also includes a regulating water tank, which is arranged on the top of the circulating water tank and is connected to the circulating water tank through a water supply pipe. A third water pump is arranged on the water supply pipe. When the water level of the circulating water tank is too low, the circulating water tank is replenished with water through the regulating water tank.

[0029] In the first aspect of the present invention, as a preferred embodiment, a drain outlet is provided on the outer wall of the liquid storage container, and the drain outlet is connected to an external water pumping device through a pipeline.

[0030] Compared with the prior art, the present invention has the following beneficial effects:

[0031] 1. The cold trap device of the present invention is used to be installed at or near the air inlet of the oil diffusion pump; when the oil diffusion pump starts working, it will generate a strong negative pressure environment to attract and discharge gas molecules in the vacuum system. When these gas molecules pass through the air inlet of the oil diffusion pump, they enter the cold trap device by diffusion and first enter the cooling chamber through the air inlet pipe. In the cooling chamber, the steam exchanges heat with the cooling water in the coil-type condenser tube, and begins to cool down and condense. At the same time, the spray component atomizes the cooling water and sprays it into the cooling chamber, which fully contacts and exchanges heat with the steam, further accelerating the condensation process of the steam. The condensed liquid flows into the liquid storage container through the drain port for collection and treatment. The water cooling component is responsible for providing continuous cooling water for the coil-type condenser tube to ensure the continuation of the condensation process. In this way, the overall solution of the present invention achieves efficient condensation and recovery of steam by optimizing the design of the condensation component and the spray component.

[0032] 2. The coil-type condenser of the present invention includes a plurality of ring tubes and a plurality of vertical transmission pipes. The cooling water flows out from the water outlet of the water cooling component and enters the uppermost ring tube. Under the action of the water pump, the cooling water flows downward along the vertical transmission pipe and passes through each ring tube in turn. In each ring tube, the cooling water exchanges heat with the outer wall of the cooling tank, absorbs heat and cools down. The cooled cooling water continues to flow downward along the vertical transmission pipe until it reaches the lowermost ring tube. Finally, the cooling water flows back from the lowermost ring tube to the water inlet end of the water cooling component for recooling and circulation. This design ensures that the cooling water can efficiently flow through the entire condenser and fully exchange heat with the outer wall of the cooling chamber, thereby achieving an efficient cooling effect. At the same time, through the circulation of the water cooling component, cooling water can be continuously provided to the condenser to maintain its cooling capacity.

[0033] 3. The spray assembly of the present invention is divided into multiple groups, which are evenly spaced in the cooling chamber along the height direction. When the steam or high-temperature gas in the cooling chamber passes through, multiple groups of equally spaced spray assemblies will spray water mist at the same time. These water mists will fully exchange heat with the steam or high-temperature gas, thereby effectively reducing their temperature. Since the spray assemblies are evenly spaced, each area in the cooling chamber can obtain a uniform cooling effect. The simultaneous operation of multiple groups of spray assemblies can greatly increase the cooling area and cooling speed in the cooling chamber. Each group of spray assemblies includes a mounting frame, a shunt straight pipe, a first shunt annular pipe, a second shunt annular pipe and a plurality of atomizing nozzles; when the cooling water flows through each annular pipe through the coil-type condenser, part of the cooling water enters the first shunt annular pipe and the second shunt annular pipe through the shunt straight pipe. Then, the cooling water is atomized into fine water droplets or water mist through the atomizing nozzle, and these water droplets or water mist drift inside the cooling chamber and exchange heat with hot air or hot surfaces. In this way, the spray assembly can effectively reduce the temperature inside the cooling chamber and achieve an efficient cooling effect. In summary, the design of this spray assembly has the advantages of compact structure, reasonable layout, and efficient cooling effect.

[0034] 4. The present invention uses a multi-layer condensation baffle design to enable steam to contact the baffle surface multiple times when passing through, increasing the chance of condensation. The inclined grooves on each layer of the baffle cleverly guide the flow of steam, allowing it to form vortices when passing through, further enhancing the condensation effect. The formation of a curved channel allows steam to exchange heat along a longer path during the condensation process, thereby improving the condensation efficiency. This design ensures that the steam can contact the cooling surface more fully, achieving rapid and efficient condensation. The condensation baffle is designed to be detachable, which greatly facilitates the cleaning and maintenance of the equipment. When it is necessary to clean up impurities generated by condensation or to perform equipment maintenance, the baffle can be simply removed without the need for complex disassembly of the entire condensation assembly. The condensation baffle design located directly below the drain port ensures that the condensate can flow smoothly into the liquid storage container, avoiding the accumulation of condensate inside the equipment and possible contamination problems.

[0035] 5. The inner cavity of the circulating water tank of the present invention is also provided with a condensing inner box, and also includes a steam transmission pipe, one end of which is connected to the lower part of the cooling cavity, and the other end of which is connected to the inner cavity of the condensing inner box, and the cooling water circulation coil is in contact with the outer wall of the condensing inner box, so that the cooling water circulation coil can re-condense the steam entering the inner cavity of the condensing inner box; the side wall of the circulating water tank is also provided with an exhaust pipe connected to the inner cavity of the condensing inner box, and the exhaust pipe is connected to the steam outlet. The oil diffusion pump generates steam during operation, and the steam is introduced into the cooling cavity of the cold trap device through the air inlet pipe. In the cooling cavity, the steam exchanges heat with the cooling water in the coil-type condensing tube. The cooling water circulates in the condensing tube, absorbs the heat of the steam, and starts to cool down and gradually condenses. In the cooling cavity, not all steam will condense immediately. Some uncondensed steam will be transported to the condensing inner box through the steam transmission pipe. The steam entering the condensing inner box will further exchange heat with the cooling water circulation coil on the outer wall of the condensing inner box. Due to the continuous circulation and low temperature of the cooling water, the steam will be condensed into liquid again in the condensing inner box, and the remaining steam will be discharged through the steam outlet. In this way, the present invention realizes efficient condensation of steam through the dual condensation design of the cooling chamber and the condensing inner box, and the recycling of cooling water. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It is a structural schematic diagram of the oil diffusion pump cold trap device of the vacuum coating machine of the present invention;

[0037] Figure 2 It is a structural schematic diagram of the oil diffusion pump cold trap device of the present invention without the box body;

[0038] Figure 3 It is a structural schematic diagram from another angle of the oil diffusion pump cold trap device of the present invention without the box body;

[0039] Figure 4 It is a structural schematic diagram of the condensation assembly of the present invention without the cold trap shell;

[0040] Figure 5 It is a schematic diagram of the split structure of the condensation component without the cold trap shell of the present invention;

[0041] Figure 6 It is a partial cross-sectional view of the cold trap housing of the present invention;

[0042] Figure 7 It is a schematic diagram of the structure of the coil-type condenser and the spray assembly of the present invention;

[0043] Figure 8 It is a structural schematic diagram of the circulating water tank of the present invention;

[0044] Fig. 9It is a schematic diagram of the structure of the cooling water circulation coil of the present invention.

[0045] In the figure:

[0046] 10. Box body; 11. Steam inlet;

[0047] 20. Condensation assembly; 21. Cold trap shell; 211. Air inlet pipe; 22. Cooling tank; 221. Cooling chamber; 222. Guide pipe; 223. Coil condenser; 2231. Ring pipe; 2232. Vertical transmission pipe; 23. Liquid storage container; 24. Condensation baffle; 241. Inclined groove; 242. Curved channel; 25. Filter element;

[0048] 30. Spray assembly; 31. Mounting frame; 32. Diverter straight pipe; 33. First diverter circular ring pipe; 34. Second diverter circular ring pipe; 35. Multiple atomizing nozzles;

[0049] 40. Water cooling assembly; 41. Circulating water tank; 411. Cooling water circulating coil; 412. Condensing inner box; 42. Refrigerating box; 421. Refrigerating plate; 43. Cooling water return pipe; 44. Cooling water delivery pipe; 45. First water pump; 46. Second water pump; 47. Steam transmission pipe;

[0050] 50. Adjusting water tank; 51. Water supply pipe; 52. The third water pump. DETAILED DESCRIPTION

[0051] Below, in conjunction with the accompanying drawings and specific embodiments, the invention is further described. It should be noted that, under the premise of no conflict, the various embodiments described below or the various technical features can be arbitrarily combined to form a new embodiment. Except as otherwise specified, the materials and equipment used in this embodiment can be purchased from the market. Examples of the embodiments are shown in the accompanying drawings, in which the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0052] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "back", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present application. In the description of the present application, "plurality" means two or more, unless otherwise precisely and specifically specified.

[0053] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, or it can be connected through an intermediary medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0054] The terms "first", "second", etc. in the specification and claims of this application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0055] Please refer to Figure 1-9 As shown, this embodiment provides an oil diffusion pump cold trap device for a vacuum coating machine, comprising a box 10 with an openable front end surface for accommodating and protecting internal components; a steam inlet 11 is provided on the top of the box 10, and a steam outlet is provided on the side wall of the box 10; and further comprising: a condensation component 20, a spray component 30 and a water cooling component 40;

[0056] Specifically, the condensation assembly 20 includes a cold trap housing 21, a cooling tank 22 and a liquid storage container 23;

[0057] The cold trap housing 21 is disposed in the box body 10, and a receiving cavity is formed inside the cold trap housing 21. An air inlet pipe 211 is disposed at the upper portion of the cold trap housing 21, and an air inlet of the air inlet pipe 211 is communicated with the steam inlet 11 for receiving and cooling the steam from the oil diffusion pump.

[0058] The cooling tank 22 is installed at the upper part of the accommodating cavity, and a cooling cavity 221 is formed inside the cooling tank 22. The upper part of the cooling cavity 221 is connected to the lower air outlet of the air inlet pipe 211 through the guide pipe 222, and the lower part of the cooling cavity 221 forms a drain port. A coil-type condenser 223 is arranged on the outer wall of the cooling tank 22, and the coil-type condenser 223 is in contact with the outer wall of the cooling tank 22.

[0059] Specifically, the spray assembly 30 is installed in the cooling chamber 221, and the water inlet of the spray assembly 30 is connected to the water outlet of the coil-type condenser 223. The spray assembly 30 is used to atomize the cooling water and spray it into the cooling chamber 221, so that the atomized cooling water is fully in contact with the steam;

[0060] The liquid storage container 23 is disposed in the accommodating cavity and is located below the liquid discharge port. The liquid storage container 23 is used to receive the condensed liquid.

[0061] Specifically, the water cooling assembly 40 is disposed in the housing 10 and connected to the coil-type condenser 223 for providing cooling water.

[0062] On the basis of the above structure, the working principle of the present invention is mainly based on the combined effect of condensation and spray cooling. When the oil diffusion pump starts working, it will generate a strong negative pressure environment to attract and discharge gas molecules in the vacuum system. When these gas molecules pass through the air inlet of the oil diffusion pump, these gas molecules enter the cold trap device through diffusion, and first enter the cooling chamber 221 through the air inlet pipe 211. In the cooling chamber 221, the steam exchanges heat with the cooling water in the coil-type condenser 223, and begins to cool down and condense. At the same time, the spray component 30 atomizes the cooling water and sprays it in the cooling chamber 221, which fully contacts and exchanges heat with the steam, further accelerating the condensation process of the steam. The condensed liquid flows into the liquid storage container 23 through the drain port for collection and treatment. The water cooling component 40 is responsible for providing continuous cooling water for the coil-type condenser 223 to ensure the continuation of the condensation process. In this way, the overall solution of the present invention achieves efficient condensation and recovery of steam by optimizing the design of the condensation component 20 and the spray component 30.

[0063] In a preferred embodiment of the present invention, the coil-type condenser 223 includes a plurality of ring tubes 2231 and a plurality of vertical transmission tubes 2232. The plurality of ring tubes 2231 are evenly spaced along the height direction on the outer wall of the cooling tank 22. Any two adjacent ring tubes 2231 are connected by a plurality of vertical transmission tubes 2232. The ring tube 2231 located at the top is connected to the water outlet end of the water cooling component 40, and the ring tube 2231 located at the bottom is connected to the water inlet end of the water cooling component 40.

[0064] On the basis of the above structure, cooling water flows out from the water outlet of the water cooling assembly 40 and enters the topmost ring tube 2231. Under the action of the water pump, the cooling water flows downward along the vertical transmission pipe 2232 and passes through each ring tube 2231 in turn. In each ring tube 2231, the cooling water exchanges heat with the outer wall of the cooling tank 22, absorbs heat and cools down. The cooled cooling water continues to flow downward along the vertical transmission pipe 2232 until it reaches the bottommost ring tube 2231. Finally, the cooling water flows back from the bottommost ring tube 2231 to the water inlet end of the water cooling assembly 40 for re-cooling and circulation. This design ensures that the cooling water can efficiently flow through the entire condenser tube and fully exchange heat with the outer wall of the cooling chamber 221, thereby achieving an efficient cooling effect. At the same time, through the circulation of the water cooling assembly 40, cooling water can be continuously provided to the condenser tube to maintain its cooling capacity.

[0065] In a preferred embodiment of the present invention, the spray assemblies 30 are multiple groups, which are evenly spaced and distributed in the cooling cavity 221 along the height direction.

[0066] When the steam or high-temperature gas in the cooling chamber 221 passes through, multiple groups of spray assemblies 30 distributed at equal intervals will spray water mist at the same time. The water mist will fully exchange heat with the steam or high-temperature gas, thereby effectively reducing its temperature. Since the spray assemblies 30 are distributed at equal intervals, each area in the cooling chamber 221 can obtain a uniform cooling effect. The simultaneous operation of multiple groups of spray assemblies 30 can greatly increase the cooling area and cooling speed in the cooling chamber 221.

[0067] In the first aspect of the present invention, as a preferred embodiment, each group of spray assemblies 30 includes a mounting frame 31, a diverter straight pipe 32, a first diverter circular pipe 33, a second diverter circular pipe 34 and a plurality of atomizing nozzles 35;

[0068] The mounting frame 31 is mounted on the inner wall of the cooling chamber 221;

[0069] The water inlet end of the diversion straight pipe 32 passes through the cooling tank 22 and is connected to a corresponding ring pipe 2231;

[0070] The first flow-dividing annular pipe 33 and the second flow-dividing annular pipe 34 are respectively installed on the mounting frame 31, and the water inlet ends of the first flow-dividing annular pipe 33 and the second flow-dividing annular pipe 34 are respectively connected to the flow-dividing straight pipe 32;

[0071] A plurality of evenly distributed atomizing nozzles are disposed on the bottom surfaces of the first flow-dividing annular tube 33 and the second flow-dividing annular tube 34 .

[0072] On the basis of the above structure, when the cooling water flows through each annular tube 2231 through the coil-type condenser 223, part of the cooling water enters the first diversion annular tube 33 and the second diversion annular tube 34 through the diversion straight tube 32. Then, the cooling water is atomized into fine water droplets or water mist through the atomizing nozzle, and these water droplets or water mist float inside the cooling chamber 221 and exchange heat with hot air or hot surfaces. In this way, the spray assembly 30 can effectively reduce the temperature inside the cooling chamber 221 and achieve an efficient cooling effect. In summary, the design of this spray assembly 30 has the advantages of compact structure, reasonable layout, and efficient cooling effect.

[0073] In a preferred embodiment of the present invention, the condensation assembly 20 also includes a plurality of layers of condensation baffles 24, which are stacked and detachably installed in the accommodating cavity and located directly below the drain port. The surface of each condensation baffle 24 is provided with a plurality of inclined grooves 241 that pass through the upper and lower surfaces thereof. The inclined grooves 241 of the plurality of condensation baffles 24 are connected one by one from top to bottom to form a plurality of curved channels 242.

[0074] On the basis of the above structure, when the steam generated by the oil diffusion pump enters the cold trap device, it first enters the cooling chamber 221 through the air inlet pipe 211. In the cooling chamber 221, the steam first performs a preliminary heat exchange with the cooling water in the coil-type condenser 223, starts to cool down and partially condenses. Subsequently, the steam enters the curved channel 242 formed by the multi-layer condensation baffle 24, where the steam contacts the inclined grooves 241 on the surface of the condensation baffle 24 for many times, forming a vortex and further enhancing the condensation effect. The condensed liquid flows smoothly into the liquid storage container 23 below the liquid discharge port along the curved channel 242. At the same time, the spray assembly 30 atomizes the cooling water and sprays it into the cooling chamber 221, which fully contacts and exchanges heat with the steam, further accelerating the condensation process of the steam. In this way, the present invention, through the design of the multi-layer condensation baffle 24, enables the steam to contact the baffle surface many times when passing through, increasing the chance of condensation. The inclined grooves 241 on each layer of the baffle cleverly guide the flow of steam, so that it can form a vortex when passing through, further enhancing the condensation effect. The formation of the curved channel 242 enables the steam to exchange heat along a longer path during the condensation process, thereby improving the condensation efficiency. This design ensures that the steam can more fully contact the cooling surface, achieving fast and efficient condensation. The condensation baffle 24 is designed to be detachable, which greatly facilitates the cleaning and maintenance of the equipment. When it is necessary to clean the impurities generated by the condensation or to perform equipment maintenance, the baffle can be simply removed without the need for complicated disassembly of the entire condensation assembly 20. The design of the condensation baffle 24 located directly below the drain port ensures that the condensate can flow smoothly into the liquid storage container 23, avoiding the accumulation of condensate inside the equipment and possible contamination problems.

[0075] In a preferred embodiment of the present invention, the condensation assembly 20 also includes a filter element 25, which is disposed in the accommodating cavity and is located below the bottom condensation baffle 24. The upper end surface of the filter element 25 is connected to the bottom surface of the bottom condensation baffle 24, and the lower end surface is connected to the top opening of the liquid storage container 23. The filter element 25 is used to receive the condensate from the condensation baffle 24 and filter the organic matter in the condensate.

[0076] Based on the above structure, the condensed liquid flows smoothly along the curved channel 242 and drips onto the filter 25 below the lowest condensation baffle 24. The filter 25 filters the condensate to block organic matter and impurities therein, and then the pure condensate flows into the liquid storage container 23 through the lower end surface of the filter 25. The present invention introduces the filter 25 design and optimizes its connection with the condensation baffle 24 and the liquid storage container 23, and the cold trap device of the present invention realizes efficient condensation of steam and effective filtration of condensate.

[0077] In a preferred embodiment of the present invention, the water cooling assembly 40 includes a circulating water tank 41 and a refrigeration tank 42;

[0078] The circulating water tank 41 is disposed in the housing 10, and a cooling water circulating coil 411 is disposed inside the circulating water tank 41;

[0079] The refrigeration box 42 is arranged on the top of the circulating water tank 41; a plurality of refrigeration fins 421 are arranged on the refrigeration box 42;

[0080] The water inlet of the cooling water circulation coil 411 is connected to the ring pipe 2231 located at the bottom through a pipeline, and the water outlet of the cooling water circulation coil 411 is connected to the inner cavity of the circulation water tank 41. The inner cavity of the circulation water tank 41 is also connected to the water inlet of the refrigeration box 42 through the cooling water return pipe 43.

[0081] The water outlet of the refrigeration box 42 is connected to the uppermost ring pipe 2231 through the cooling water delivery pipe 44;

[0082] A first water pump 45 is provided on the cooling water return pipe 43 , and a second water pump 46 is provided on the cooling water delivery pipe 44 .

[0083] On the basis of the above structure, the cooling water flows out from the bottom ring pipe 2231 of the condenser tube, enters the cooling water circulation coil 411 of the circulating water tank 41, and then enters the circulating water tank 41. The first water pump 45 is started to pump the hot water in the circulating water tank 41 to the refrigeration box 42 through the cooling water return pipe 43. In the refrigeration box 42, the cooling plate 421 works to reduce the temperature of the cooling water. Cooling water recirculation: The second water pump 46 is started to pump the cooled cooling water in the refrigeration box 42 to the top ring pipe 2231 of the condenser tube through the cooling water delivery pipe 44 to achieve the recycling of cooling water. The cooling plate 421 on the refrigeration box 42 can quickly and effectively reduce the temperature of the cooling water and improve the refrigeration efficiency. Through the recycling of cooling water, the waste of water resources is reduced. The reasonable configuration of the first water pump 45 and the second water pump 46, as well as the careful design of the cooling water circulation coil 411, the cooling water return pipe 43 and the cooling water delivery pipe 44, ensure the stable operation and cooling effect of the system.

[0084] In a preferred embodiment of the present invention, a condensing inner box 412 is also provided in the inner cavity of the circulating water tank 41, and also includes a steam transmission pipe 47, one end of the steam transmission pipe 47 is connected to the lower part of the cooling cavity 221, and the other end thereof is connected to the inner cavity of the condensing inner box 412, and the cooling water circulation coil 411 is in contact with the outer wall of the condensing inner box 412, so that the cooling water circulation coil 411 can re-condense the steam entering the inner cavity of the condensing inner box 412; an exhaust pipe connected to the inner cavity of the condensing inner box 412 is also provided on the side wall of the circulating water tank 41, and the exhaust pipe is connected to the steam outlet.

[0085] On the basis of the above structure, the oil diffusion pump generates steam during operation, and the steam is introduced into the cooling chamber 221 of the cold trap device through the air inlet pipe 211. In the cooling chamber 221, the steam exchanges heat with the cooling water in the coil-type condenser 223. The cooling water circulates in the condenser, absorbs the heat of the steam, and causes it to start cooling and gradually condense. In the cooling chamber 221, not all steam will condense immediately. Some uncondensed steam will be transported to the condensing inner box 412 through the steam transmission pipe 47. The steam entering the condensing inner box 412 will further exchange heat with the cooling water circulation coil 411 on the outer wall of the condensing inner box 412. Due to the continuous circulation and low temperature state of the cooling water, the steam will be condensed into liquid again in the condensing inner box 412, and the remaining steam will be discharged through the steam outlet. In this way, the present invention realizes efficient condensation of steam through the dual condensation design of the cooling chamber 221 and the condensing inner box 412, and the recycling of cooling water.

[0086] In a preferred embodiment of the present invention, it also includes a regulating water tank 50, which is arranged on the top of the circulating water tank 41 and is connected to the circulating water tank 41 through a water supply pipe 51. A third water pump 52 is arranged on the water supply pipe 51; when the water tank of the circulating water tank 41 is too low, the circulating water tank 41 is replenished with water through the regulating water tank 50.

[0087] The amount of water in the circulating water tank 41 is monitored by a water level sensor. When the amount of water in the circulating water tank 41 is lower than a preset value, the water replenishment mechanism is triggered. The third water pump 52 is started and begins to pump the water in the regulating water tank 50 to the circulating water tank 41 through the water replenishment pipe 51. The water replenishment process ends until the amount of water in the circulating water tank 41 reaches the preset value. After the water in the regulating water tank 50 is exhausted, water can be added to the regulating water tank 50 through an external water pump. By adding the regulating water tank 50 and the third water pump 52, the automatic water replenishment function of the circulating water tank 41 is realized without manual intervention. It ensures that the amount of water in the circulating water tank 41 is always kept within an appropriate range, thereby ensuring the stable operation of the water cooling component 40.

[0088] In a preferred embodiment of the present invention, a drain port is provided on the outer wall of the liquid storage container 23, and the drain port is connected to an external water pumping device through a pipeline.

[0089] On the basis of the above structure, when the liquid droplets in the liquid storage container 23 accumulate to a certain amount, the pumping device will automatically start to pump out the liquid droplets through the drain port. The pumping device can quickly pump out the liquid droplets from the liquid storage container 23, avoiding the long-term accumulation of the liquid droplets in the box, thereby improving the processing efficiency.

[0090] Although only certain components and embodiments of the present application have been illustrated and described, many modifications and changes may be conceived by those skilled in the art without actually departing from the scope and spirit of the claims, such as changes in the size, dimensions, structure, shape and proportion of the various elements, mounting arrangements, material usage, color, orientation, etc.

[0091] The above-mentioned embodiments are only preferred embodiments of the present invention and cannot be used to limit the scope of protection of the present invention. Any non-substantial changes and substitutions made by technicians in this field on the basis of the present invention shall fall within the scope of protection required by the present invention.

Claims

1. An oil diffusion pump cold trap device for a vacuum coating machine, comprising a box with an openable front end surface for accommodating and protecting internal components; a steam inlet is provided on the top of the box, and a steam outlet is provided on the side wall of the box; characterized in that: Also includes: A condensation component, the condensation component comprising a cold trap shell, a cooling tank, and a liquid storage container; The cold trap housing is arranged in the box body, a receiving cavity is formed inside the cold trap housing, an air inlet pipe is arranged at the upper part of the cold trap housing, an air inlet of the air inlet pipe is communicated with the steam inlet, and is used to receive and cool the steam from the oil diffusion pump; The cooling tank is installed at the upper part of the accommodating cavity, and a cooling cavity is formed inside the cooling tank. The upper part of the cooling cavity is connected with the lower air outlet of the air inlet pipe through a guide pipe, and a liquid discharge port is formed at the lower part of the cooling cavity. A coil-type condenser is arranged on the outer wall of the cooling tank, and the coil-type condenser is in contact with the outer wall of the cooling tank. A spray assembly, the spray assembly is installed in the cooling chamber, the water inlet of the spray assembly is connected to the water outlet of the coil-type condenser, and the spray assembly is used to atomize the cooling water and spray it into the cooling chamber, so that the atomized cooling water is fully in contact with the steam; The liquid storage container is arranged in the accommodating cavity and is located below the liquid discharge port, and the liquid storage container is used to receive the condensed liquid; A water cooling component is arranged in the box and connected to the coil-type condenser to provide cooling water.

2. The oil diffusion pump cold trap device of the vacuum coating machine according to claim 1, characterized in that: The coil-type condenser includes multiple ring tubes and multiple vertical transmission pipes. The multiple ring tubes are evenly spaced along the height direction on the outer wall of the cooling tank. Any two adjacent ring tubes are connected by multiple vertical transmission pipes. The ring tube located at the top is connected to the water outlet end of the water cooling component, and the ring tube located at the bottom is connected to the water inlet end of the water cooling component.

3. The oil diffusion pump cold trap device of the vacuum coating machine as claimed in claim 2, characterized in that: The spray components are divided into multiple groups, which are evenly distributed in the cooling cavity along the height direction.

4. The oil diffusion pump cold trap device of the vacuum coating machine as claimed in claim 3, characterized in that: Each group of spray components includes a mounting frame, a diversion straight pipe, a first diversion circular ring pipe, a second diversion circular ring pipe and a plurality of atomizing nozzles; The mounting frame is mounted on the inner wall of the cooling cavity; The water inlet end of the diversion straight pipe passes through the cooling tank and is connected to a corresponding one of the ring pipes; The first flow-dividing annular tube and the second flow-dividing annular tube are respectively installed on the mounting frame, and the water inlet ends of the first flow-dividing annular tube and the second flow-dividing annular tube are respectively connected to the flow-dividing straight tube; A plurality of evenly distributed atomizing nozzles are disposed on the bottom surfaces of the first flow-dividing annular tube and the second flow-dividing annular tube.

5. The oil diffusion pump cold trap device of the vacuum coating machine as claimed in claim 2, characterized in that: The condensation assembly also includes a plurality of layers of condensation baffles, which are stacked and detachably installed in the accommodating cavity and located directly below the drain port. The surface of each condensation baffle is provided with a plurality of inclined grooves running through the upper and lower surfaces thereof, and the inclined grooves of the plurality of condensation baffles are connected one by one from top to bottom to form a plurality of curved channels.

6. The oil diffusion pump cold trap device of the vacuum coating machine according to claim 5, characterized in that: The condensation assembly also includes a filter element, which is arranged in the accommodating cavity and located below the lowest condensation baffle. The upper end surface of the filter element is connected to the bottom surface of the lowest condensation baffle, and the lower end surface is connected to the top opening of the liquid storage container. The filter element is used to receive the condensate from the condensation baffle and filter the organic matter in the condensate.

7. The oil diffusion pump cold trap device of the vacuum coating machine according to claim 6, characterized in that: The water cooling assembly includes a circulating water tank and a refrigeration tank; The circulating water tank is arranged in the box body, and a cooling water circulating coil is arranged inside the circulating water tank; The refrigeration box is arranged on the top of the circulating water tank; a plurality of refrigeration fins are arranged on the refrigeration box; The water inlet end of the cooling water circulation coil is connected to the ring pipe located at the bottom through a pipeline, and the water outlet end of the cooling water circulation coil is connected to the inner cavity of the circulating water tank, and the inner cavity of the circulating water tank is also connected to the water inlet end of the refrigeration box through a cooling water return pipe; The water outlet of the refrigeration box is connected to the uppermost ring pipe through a cooling water delivery pipe; The cooling water return pipe is provided with a first water pump, and the cooling water delivery pipe is provided with a second water pump.

8. The oil diffusion pump cold trap device of the vacuum coating machine according to claim 7, characterized in that: A condensing inner box is also arranged in the inner cavity of the circulating water tank, which also includes a steam transmission pipe, one end of which is connected to the lower part of the cooling cavity, and the other end of which is connected to the inner cavity of the condensing inner box. The cooling water circulation coil is in contact with the outer wall of the condensing inner box, so that the cooling water circulation coil can re-condense the steam entering the inner cavity of the condensing inner box; an exhaust pipe connected to the inner cavity of the condensing inner box is also arranged on the side wall of the circulating water tank, and the exhaust pipe is connected to the steam outlet.

9. The oil diffusion pump cold trap device of the vacuum coating machine according to claim 8, characterized in that: It also includes a regulating water tank, which is arranged on the top of the circulating water tank and is connected to the circulating water tank through a water supply pipe. A third water pump is arranged on the water supply pipe. When the water level in the circulating water tank is too low, the circulating water tank is replenished with water through the regulating water tank.

10. The oil diffusion pump cold trap device of the vacuum coating machine according to claim 1, characterized in that: A drain port is arranged on the outer wall of the liquid storage container, and the drain port is connected to an external water pumping device through a pipeline.

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