Conveying device for vacuum coating machine

Abstract

The utility model discloses a transmission device for a vacuum coating machine, which belongs to the field of magnetron sputtering coating equipment, and comprises a transmission carrier plate, two parallel support plates arranged in a vacuum cavity, a plurality of parallel driven transmission shafts erected between the two support plates, a groove transmission wheel sleeved at one end of each driven transmission shaft, and a plurality of driven transmission shafts sleeved at the other end of each driven transmission shaft. The auxiliary transmission shafts are sequentially connected through chain transmission components, the auxiliary transmission shaft at one end is connected to the driving motor through the main transmission shaft, the transmission carrier plate is arranged on the groove transmission wheel and the plane transmission wheel, and a protruding strip is arranged at the bottom of one side of the transmission carrier plate and matched with a groove of the groove transmission wheel. Two-side friction transmission is adopted, one side is plane friction transmission, the other side is friction transmission through cooperation of the grooves and the protruding strips, the grooves can conduct linear transmission limiting during transmission of the transmission carrier plate, the plane friction transmission can adapt to thermal expansion and lengthening of the transmission carrier plate in the high-temperature environment, and the transmission clamping stagnation problem is prevented.

Description

Technical Field

[0001] The utility model belongs to the technical field of magnetron sputtering coating equipment, in particular to a transmission device for a vacuum coating machine. Background Art

[0002] Vacuum coating technology is a thin film preparation technology that deposits materials on the surface of a substrate through physical or chemical methods under a vacuum environment. The vacuum coating continuous production line is composed of multiple vacuum chamber modules. During production, the substrate needs to be loaded into the substrate rack first. The substrate rack must be transferred from the first vacuum chamber to the exit vacuum chamber through a transmission device after completing all the coating processes. The transmission device needs to withstand high temperature environments and must stop accurately and stably without shaking when stopping at each process module. The traditional high-temperature transmission device in the vacuum chamber is driven by plane friction, which is prone to transmission jamming. The transmission accuracy of the substrate rack is not well controlled, and the transmission device is prone to shaking when it stops in the vacuum chamber, affecting the processing quality of the substrate. Utility Model Content

[0003] The purpose of the present invention is to provide a transmission device for a vacuum coating machine to solve the problems raised in the above background technology.

[0004] The utility model provides a transmission device for a vacuum coating machine, comprising a transmission carrier plate and two parallel support plates arranged in a vacuum chamber, a plurality of parallel slave transmission shafts are mounted between the two support plates, one end of the slave transmission shaft is sleeved with a groove transmission wheel, and the other end is sleeved with a plane transmission wheel, the slave transmission shafts are connected in sequence through chain transmission components, one end of the slave transmission shaft is connected to a drive motor through a main transmission shaft, the transmission carrier plate is placed on the groove transmission wheel and the plane transmission wheel, and a convex strip is provided on the bottom of one side of the transmission carrier plate to cooperate with the groove of the groove transmission wheel.

[0005] A further solution is that the bottom surface of the convex strip in contact with the groove transmission wheel is arc-shaped, and the shape of the groove of the groove transmission wheel is adapted to the arc-shaped contact surface of the convex strip.

[0006] A further solution: a cooling water pipe is provided on the support plate.

[0007] A further solution: a positioning block is provided on the side of the transmission carrier away from the chain transmission component, a positioning hole is opened on the positioning block, and a positioning component cooperating with the positioning hole is provided on the side wall of the vacuum chamber.

[0008] A further solution: the positioning hole is provided with a bell mouth.

[0009] A further solution: the positioning assembly includes a driving cylinder arranged on the side wall of the vacuum chamber, the end of the telescopic rod of the driving cylinder is connected to a latch guide frame, the latch guide frame is provided with a baffle, and the baffle is provided with a latch.

[0010] A further solution: the driving cylinder is a double-stroke cylinder.

[0011] A further solution: the chain transmission component includes a chain and a double sprocket mounted on one end of the transmission shaft. The support plate is also provided with several auxiliary wheels, the auxiliary wheels are located between adjacent double sprockets, and the chain is respectively engaged with the two adjacent double sprockets and the auxiliary wheels.

[0012] A further solution: the main transmission shaft passes through the side wall of the vacuum cavity and is connected to the drive motor outside the vacuum cavity. The part where the main transmission shaft passes through the vacuum cavity is equipped with a magnetic fluid shaft, which is located on the inner and outer sides of the side wall of the vacuum cavity.

[0013] A further solution: both side walls of the vacuum cavity are provided with opposing photoelectric sensors, and the two opposing photoelectric sensors are symmetrically arranged.

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] 1. The utility model adopts bilateral friction transmission, one side is flat friction transmission, and the other side friction transmission adopts grooves and convex strips. The grooves can be used as linear transmission limits when the transmission carrier is transmitted. The flat friction transmission can adapt to the thermal expansion of the transmission carrier in a high temperature environment to prevent transmission jams.

[0016] 2. The surface of the support plate of the utility model is provided with a cooling water pipe to prevent the support plate of the transmission shaft from being overheated and deformed, and to avoid transmission jamming caused by the transmission shaft being overheated due to the influence of the heater.

[0017] 3. The utility model is provided with a through-beam photoelectric sensor and a positioning component to jointly ensure transmission accuracy, thereby improving positioning accuracy and the stability of the transmission carrier plate's stopped state. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to facilitate understanding by those skilled in the art, the present invention will be further described below with reference to the accompanying drawings.

[0019] Figure 1 This is a schematic structural diagram of an embodiment of the present utility model;

[0020] Figure 2 for Figure 1 A top view of

[0021] Figure 3 for Figure 1 Side view of;

[0022] Figure 4 It is a schematic structural diagram of the chain transmission component of an embodiment of the utility model.

[0023] In the figure: 1-vacuum chamber; 2-transmission carrier plate; 21-convex strip; 22-positioning block; 221-positioning hole; 3-chain transmission component; 31-double sprocket; 32-chain; 33-auxiliary wheel; 4-cooling water pipe; 5-through-beam photoelectric sensor; 6-positioning assembly; 61-latch; 62-baffle; 63-drive cylinder; 64-latch guide frame; 7-drive motor; 8-main transmission shaft; 9-slave transmission shaft; 10-groove transmission wheel; 11-flat transmission wheel; 12-support plate; 13-magnetic fluid axis. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for the purpose of explaining the present invention and are not intended to limit the present invention. That is, the embodiments described herein are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and illustrated in the drawings herein can be arranged and designed in a variety of different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative work are within the scope of protection of the present invention.

[0026] See also Figure 1As shown, this embodiment provides a transmission device for a vacuum coating machine, which is installed on a magnetron sputtering coating production line and is specifically installed at the center of the bottom of each process chamber module. It is mainly used for the precise flow and transmission of substrate racks (carrying substrates to be coated) in various process stages in a vacuum and high-temperature environment in the production line. It should be noted that the vacuum chamber 1 is a closed structure. In order to illustrate the structure of the transmission device inside the vacuum chamber 1, the vacuum chamber 1 in the accompanying drawings does not show the complete structure. The specific structure of the vacuum chamber 1 can be selected from the existing technology. The transmission device includes a transmission carrier plate 2 and two parallel support plates 12 arranged in the vacuum chamber 1. Several parallel slave transmission shafts 9 are arranged between the two support plates 12. The slave transmission shaft 9 is arranged perpendicular to the support plate 12. Both ends of the slave transmission shaft 9 are respectively installed on the two support plates 12. The corresponding support plate 12 extending from one end of the transmission shaft 9 is provided with a groove transmission wheel 10, and the corresponding support plate 12 extending from the other end is provided with a plane transmission wheel 11. The slave transmission shafts 9 are connected in sequence through chain transmission components 3, and the slave transmission shaft 9 at one end is connected to the drive motor 7 through the main transmission shaft 8. The transmission carrier plate 2 is placed on the groove transmission wheel 10 and the plane transmission wheel 11. A convex strip 21 is provided at the bottom of one side of the transmission carrier plate 2 to cooperate with the groove of the groove transmission wheel 10, and the other side is a flat surface in contact with the plane transmission wheel 11.

[0027] The drive motor 7 drives the main transmission shaft 8, and a slave transmission shaft 9 connected to the main transmission shaft 8 rotates synchronously, and drives the other slave transmission shafts 9 to rotate through the chain transmission component 3, thereby driving all the groove transmission wheels 10 and the flat transmission wheels 11. The transmission carrier 2 placed on the groove transmission wheels 10 and the flat transmission wheels 11 undergoes translational motion under the action of friction. The substrate is mounted on the transmission carrier 2 through the substrate holder, thereby realizing the transmission of the substrate. The utility model adopts a bilateral friction transmission. On one side, the bottom plane of the transmission carrier 2 and the flat transmission wheel 11 are used for planar friction transmission. On the other side, the friction transmission adopts the groove of the groove transmission wheel 10 and the ridge 21. The groove 21 can be used as a linear transmission limit when the transmission carrier 2 is transmitted. The flat friction transmission can adapt to the thermal expansion of the transmission carrier 2 in a high temperature environment to prevent transmission jamming problems.

[0028] In some embodiments, see Figure 1 、 Figure 3 As shown, the bottom surface of the convex strip 21 in contact with the groove transmission wheel 10 is arc-shaped, and the groove shape of the groove transmission wheel 10 is adapted to the arc-shaped contact surface of the convex strip 21. The use of an arc-shaped contact surface can increase the actual contact area between the two contact surfaces, help to disperse the contact pressure, reduce local wear, and improve the stability and durability of the transmission.

[0029] In some embodiments, see Figure 1As shown, the support plate 12 is provided with a cooling water pipe 4, which is made of a metal pipe and arranged in a circuitous manner and attached to the side walls of the two support plates 12. The cooling water pipe 4 can be arranged in a serpentine manner around the support plate 12 according to the actual size, thereby increasing the length of the cooling water pipe 4 and facilitating a better cooling effect. The cooling water pipe 4 is provided with an inlet pipe joint and an outlet pipe joint at both ends. The inlet pipe joint and the outlet pipe joint are both connected to the external water pipe through the vacuum chamber 1. The seal between the inlet pipe joint, the outlet pipe joint and the vacuum chamber 1 adopts a high-temperature resistant rubber sealing ring. The cooling water pipe 4 is arranged on the surface of the support plate 12 of the utility model to prevent the support plate 12 on which the transmission shaft 9 is mounted from being overheated and deformed, and to avoid transmission jamming caused by the transmission shaft 9 being overheated due to the influence of the heater.

[0030] In some embodiments, see Figure 1-Figure 3 As shown, a positioning block 22 is provided on the side of the transmission carrier 2 away from the chain transmission component 3. The positioning block 22 has a positioning hole 221 with a bell mouth. A positioning assembly 6 is provided on the sidewall of the vacuum chamber 1 to cooperate with the positioning hole 221. When the transmission carrier 2 is parked in the vacuum chamber 1 for substrate processing, the positioning assembly 6 cooperates with the positioning hole 221 to keep the transmission carrier 2 in a stable parked state.

[0031] In some embodiments, see Figure 1-Figure 3 As shown, the positioning assembly 6 includes a driving cylinder 63 arranged on the side wall of the vacuum chamber 1. Specifically, a mounting bracket is provided on the outer side wall of the vacuum chamber 1, and the driving cylinder 63 is fixedly installed on the mounting bracket. The driving cylinder 63 is a double-stroke cylinder. The telescopic rod of the driving cylinder 63 passes through the side wall of the vacuum chamber 1. A pin guide frame 64 is connected to the end of the telescopic rod of the driving cylinder 63. A baffle 62 is provided on the pin guide frame 64, and a pin 61 is provided on the baffle 62.

[0032] When the transmission carrier 2 reaches the appropriate position in the vacuum chamber 1 and the drive motor 7 is shut down, the position where the transmission carrier 2 stops may have a slight deviation, but the deviation is within the correction range of the guide hole. The drive cylinder 63 drives the latch 61 through the bell mouth and inserts it into the positioning hole 221. The gap between the outer diameter of the latch 61 and the positioning hole 221 is small, thereby achieving the purpose of precise positioning. At this time, the baffle 62 is tightly attached to the side wall of the transmission carrier 2, and a certain pre-tightening control force is formed between the baffle 62 and the groove transmission wheel 10, so that the transmission carrier 2 remains relatively stable in the working position. The telescopic rod of the drive cylinder 63 passes through the side wall of the vacuum chamber 1. The seal between the side wall of the vacuum chamber 1 and the telescopic rod of the drive cylinder 63 adopts a multi-channel vacuum-resistant high-temperature fluororubber oil seal. When the telescopic rod of the drive cylinder 63 passes through the side wall of the vacuum chamber 1 and reciprocates, it ensures that the vacuum seal of the vacuum chamber 1 will not leak.

[0033] In some embodiments, see Figure 2 、 Figure 4 As shown, the chain transmission component 3 includes a chain 32 and a double sprocket 31 mounted on one end of a slave transmission shaft 9. The support plate 12 is also provided with several auxiliary wheels 33, positioned between adjacent double sprockets 31. The chain 32 engages with two adjacent double sprockets 31 and the auxiliary wheels 33, thereby transmitting the rotational motion of the main transmission shaft 8 to each slave transmission shaft 9 in sequence. This causes the grooved transmission wheel 10 and the flat transmission wheel 11 mounted on the slave transmission shafts 9 to rotate with the slave transmission shafts 9, thereby causing the transmission carrier plate 2 to translate. The auxiliary wheels 33 play a key role in power transmission and speed conversion, while also ensuring the stability and reliability of the transmission system.

[0034] In some embodiments, see Figure 2-Figure 3 As shown, the main transmission shaft 8 passes through the side wall of the vacuum chamber 1 and is connected to the drive motor 7 located outside the vacuum chamber 1. The part where the main transmission shaft 8 passes through the vacuum chamber 1 is equipped with a magnetic fluid shaft 13. The magnetic fluid shaft 13 is located on the inner and outer sides of the side wall of the vacuum chamber 1, ensuring the sealing of the vacuum chamber 1.

[0035] In some embodiments, see Figure 2-Figure 3 As shown, the two side walls of the vacuum chamber 1 are each equipped with a through-beam photoelectric sensor 5, symmetrically arranged on the outside of the two side walls of the vacuum chamber 1. The through-beam photoelectric sensor 5 is located at the forward end of the transmission motion. When the front edge of the transmission carrier 2 is transmitted to a point where it blocks the light spot of the through-beam photoelectric sensor 5, indicating that the transmission carrier 2 has been transferred to the appropriate position in the vacuum chamber 1, the drive motor 7 stops transmission.

[0036] The utility model is provided with a through-beam photoelectric sensor 5 and a positioning component 6 to jointly ensure transmission accuracy, thereby improving positioning accuracy and the stability of the stopped state of the transmission carrier plate.

[0037] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0038] The above content is merely an example and explanation of the structure of the present utility model. Technicians in this technical field may make various modifications or additions to the specific embodiments described or replace them in a similar manner. As long as they do not deviate from the structure of the utility model or exceed the scope defined by the claims, they should all fall within the scope of protection of the present utility model.

Claims

1. A transmission device for a vacuum coating machine, characterized in that: It includes a transmission carrier plate and two parallel support plates arranged in a vacuum chamber. Several parallel slave transmission shafts are arranged between the two support plates. One end of the slave transmission shaft is provided with a groove transmission wheel, and the other end is provided with a plane transmission wheel. The slave transmission shafts are connected in sequence through chain transmission components. One end of the slave transmission shaft is connected to the drive motor through the main transmission shaft. The transmission carrier plate is placed on the groove transmission wheel and the plane transmission wheel. A convex strip is provided on the bottom of one side of the transmission carrier plate to cooperate with the groove of the groove transmission wheel.

2. The transmission device for a vacuum coating machine according to claim 1, characterized in that: The bottom surface of the convex strip in contact with the groove transmission wheel is arc-shaped, and the shape of the groove of the groove transmission wheel is adapted to the arc-shaped contact surface of the convex strip.

3. The transmission device for a vacuum coating machine according to claim 1, characterized in that: A cooling water pipe is provided on the support plate.

4. The transmission device for a vacuum coating machine according to claim 1, characterized in that: A positioning block is provided on the side of the transmission carrier away from the chain transmission component. A positioning hole is provided on the positioning block. A positioning component is provided on the side wall of the vacuum chamber to match the positioning hole.

5. The transmission device for a vacuum coating machine according to claim 4, characterized in that: The positioning hole is provided with a bell mouth.

6. The transmission device for a vacuum coating machine according to claim 4, characterized in that: The positioning assembly includes a driving cylinder arranged on the side wall of the vacuum chamber, the end of the telescopic rod of the driving cylinder is connected to a latch guide frame, a baffle is provided on the latch guide frame, and a latch is provided on the baffle.

7. The transmission device for a vacuum coating machine according to claim 6, characterized in that: The driving cylinder is a double-stroke cylinder.

8. The transmission device for a vacuum coating machine according to claim 1, characterized in that: The chain transmission component includes a chain and a double sprocket sleeved on one end of the transmission shaft. The support plate is also provided with a plurality of auxiliary wheels, which are located between adjacent double sprockets. The chain is respectively engaged with two adjacent double sprockets and the auxiliary wheels.

9. The transmission device for a vacuum coating machine according to claim 1, characterized in that: The main transmission shaft passes through the side wall of the vacuum cavity and is connected to the drive motor outside the vacuum cavity. The portion where the main transmission shaft passes through the vacuum cavity is provided with a magnetic fluid shaft, which is located on both the inner and outer sides of the side wall of the vacuum cavity.

10. The transmission device for a vacuum coating machine according to claim 1, characterized in that: Both side walls of the vacuum cavity are provided with opposing photoelectric sensors, and the two opposing photoelectric sensors are symmetrically arranged.

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