Silicon carbide slurry defoaming device

Abstract

The invention relates to the technical field of slurry defoaming, and particularly provides a silicon carbide slurry defoaming device which comprises a box body, a slurry barrel, a vacuumizing mechanism, a sealing and locking mechanism and a stirring auxiliary defoaming mechanism. The silicon carbide slurry is subjected to defoaming treatment in a mode that the vacuumizing mechanism is matched with the stirring auxiliary defoaming mechanism, so that the effects that large bubbles are broken through stirring in the vacuumizing defoaming process and are dispersed into small bubbles, and the small bubbles expand in a decompression environment and float upwards to the liquid level to be broken are achieved; meanwhile, uniform distribution of slurry components is ensured, the phenomenon that high-concentration bubbles or particles are agglomerated in a local area is avoided, and the stirring auxiliary bubble removing mechanism is further provided with a puncturing assembly for puncturing the bubbles floating on the upper surface of the slurry, so that the bubbles in the silicon carbide slurry are more effectively removed, and the uniformity of the silicon carbide slurry is improved. The defoaming effect and efficiency of the silicon carbide slurry are improved.

Description

Technical Field

[0001] The invention relates to the technical field of slurry defoaming, and specifically proposes a silicon carbide slurry defoaming device. Background Art

[0002] Silicon carbide slurry is a mixture of silicon carbide particles, dispersion medium and corresponding additives, which is widely used in semiconductor manufacturing, advanced ceramics, grinding and polishing, etc. The mixed silicon carbide slurry needs to be defoamed to avoid the bubbles affecting the quality and performance of the final product.

[0003] The most commonly used degassing technology at present is vacuum degassing, which is achieved by placing a container containing silicon carbide slurry in a vacuum environment, reducing the ambient pressure to allow the gas dissolved in the slurry to expand and form bubbles, which then rise to the surface and burst, thereby achieving the degassing effect.

[0004] However, when degassing silicon carbide slurry under vacuum, bubbles may expand rapidly but fail to burst in time due to improper vacuum pumping, and large bubbles may find it difficult to float to the upper surface of the silicon carbide slurry. At the same time, during the degassing process, high concentrations of bubbles or particle agglomeration may occur in local areas, making it difficult to quickly remove bubbles in the silicon carbide slurry. Secondly, the sealing of the silicon carbide slurry during vacuum degassing needs to be improved, and insufficient sealing will also affect the degassing effect of the silicon carbide slurry. Summary of the invention

[0005] In view of the above problems, an embodiment of the present invention provides a silicon carbide slurry defoaming device to solve the technical problems in the related art.

[0006] In order to achieve the above-mentioned purpose, the embodiment of the present invention provides the following technical solutions: a silicon carbide slurry defoaming device, comprising: a box body, a slurry barrel and a vacuum pumping mechanism, the outer wall of the box body is installed with a box cover through a lifting and locking group, the box cover and the top of the box body are locked and sealed through a sealing locking mechanism, the vacuum pumping mechanism is connected to the box body through a pipeline to vacuum the inside of the box body, and the top of the box cover is also provided with an observation window and an air pressure detector. The vacuum pumping mechanism is an existing vacuum pump, the air suction port of the vacuum pump is connected to the box body through a pipeline, and an exhaust valve is also installed on the outer wall of the box body. The slurry barrel is placed in the box body, and a matching plug-in limit group is installed between the inner wall of the box body and the outer wall of the slurry barrel; a stirring auxiliary defoaming mechanism is installed in the middle of the lower end surface of the box cover.

[0007] In one possible implementation, two lifting handles are hinged on the inner wall of the slurry barrel near the upper end, and two supporting blocks symmetrically arranged along its circumference are installed on the inner wall of the slurry barrel, and the supporting blocks are used to support the lifting handles in a horizontal state.

[0008] In a possible implementation manner, the plugging and limiting group includes U-shaped clamping plates installed on the inner wall of the box body and evenly arranged along its circumferential direction, and T-shaped inserts installed on the outer wall of the slurry barrel and evenly arranged along its circumferential direction.

[0009] In a possible implementation manner, the lifting and locking group includes a guide rod rotatably connected to the outer wall of the box body. A lifting rod that slides up and down is sleeved on the guide rod. The lifting rod is Z-shaped. The horizontal section on the upper side of the lifting rod is slidably connected to the side wall of the box cover. A plugging component is installed on the lifting rod and is plugged and locked with the guide rod when the lifting rod moves to the upper end of the guide rod.

[0010] In a possible implementation manner, the plugging component includes a jack opened at the upper end of the guide rod. One end of the lifting rod sleeved on the guide rod is provided with a spring groove. A plug rod is slidably connected in the spring groove. A return spring sleeved on the plug rod is installed between the plug rod and the inner wall of the spring groove.

[0011] The sealing and locking mechanism includes an annular protrusion installed on the top of the box body. An annular groove matching the annular protrusion is opened at the bottom of the box cover. A rubber sealing ring is installed on the annular groove. A fixing ring with a vertical cross-section in an L shape is installed near the edge of the lower end face of the box cover. Card slots are opened on the fixing ring and are evenly arranged along its circumferential direction. A pressing-down group for driving the fixing ring to move downward to tightly pull and seal the box cover and the top of the box body is installed on the outer wall of the box body.

[0012] A pressing group for pressing down and tightly pressing the slurry barrel is also installed at the bottom of the box cover. When the pressing-down group and the fixing ring cooperate to drive the box cover to move downward to seal between the box body and the box cover, the pressing group integrally presses and locks the slurry barrel.

[0013] In a possible implementation manner, the pressing-down group includes a rotating ring sleeved on the outer wall of the box body. The rotating ring is connected to the outer wall of the box body in a threaded cooperation manner. Installation grooves are opened on the outer wall of the box body and are evenly arranged along its circumferential direction. Swing plates are hinged in the installation grooves through torsion spring rods. The swing plates correspond to the card slots one by one. The upper end of the rotating ring is rotatably connected with a lifting ring. Clamping blocks corresponding to the installation grooves one by one are installed on the inner wall of the lifting ring. The clamping blocks are slidably connected up and down with the installation grooves. A top-pushing column for pushing the end of the swing plate located in the installation groove upward is installed on the top of the clamping block.

[0014] In a possible implementation manner, the pressing group includes a pressing ring. The top of the pressing ring is connected to the box cover through connecting rods evenly arranged along its circumferential direction. The inner diameter of the pressing ring is larger than the outer diameter of the slurry barrel.

[0015] The stirring and auxiliary defoaming mechanism includes a stirring shaft and a stirring component. A puncturing component for puncturing the bubbles on the top of the silicon carbide slurry in the slurry barrel is also installed on the stirring shaft. A driving motor for driving the stirring shaft is installed at the bottom of the box cover.

[0016] In a possible implementation, the stirring assembly includes a plurality of V-shaped frames, both ends of the V-shaped frames are mounted on the stirring shaft, and the plurality of V-shaped frames are arranged axially along the stirring shaft and staggeredly arranged circumferentially along the stirring shaft.

[0017] In one possible implementation, the puncturing assembly includes a floating ring connected to the stirring shaft by spline fitting and sliding up and down, a poke plate is installed on the outer ring surface of the floating ring, and evenly arranged puncturing needles are installed on the poke plate. A supplementary puncturing piece is installed on the end of the poke plate away from the floating ring.

[0018] In a possible implementation, the supplementary puncturing member includes a rotating plate hinged to the end of the dial plate through a torsion spring rod, and a puncturing needle is also installed on the rotating plate.

[0019] The above one or more technical solutions in the embodiments of the present invention have at least one of the following beneficial effects: 1. The present invention degasses silicon carbide slurry by cooperating a vacuum pumping mechanism with a stirring-assisted degassing mechanism, thereby achieving the effect of breaking large bubbles into smaller bubbles by stirring during the vacuum degassing process, and the small bubbles expand and float to the liquid surface and burst under a reduced pressure environment, while ensuring that the slurry components are evenly distributed to avoid high-concentration bubbles or particle agglomeration in local areas, and the stirring-assisted degassing mechanism is also provided with a puncturing component for puncturing bubbles floating on the upper surface of the slurry, thereby more effectively removing bubbles in the silicon carbide slurry and improving the effect and efficiency of degassing the silicon carbide slurry.

[0020] 2. The present invention uses a sealing and locking mechanism to efficiently seal and lock the box body and the box cover, and at the same time uses a pressing group to integrally press and lock the slurry barrel, thereby improving the overall sealing of the device and preventing the slurry barrel from moving when the stirring auxiliary defoaming mechanism stirs the slurry, thereby further improving the defoaming effect of the silicon carbide slurry.

[0021] 3. The present invention further presses the rubber sealing ring on the box cover against the annular protrusion through a sealing locking mechanism, thereby improving the sealing effect between the box body and the box cover, and avoiding leakage when vacuuming the box body to degas the slurry, thereby preventing the degassing effect of the slurry from being affected. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0023] Figure 1 It is a schematic diagram of the overall three-dimensional structure of the present invention.

[0024] Figure 2 It is a schematic three-dimensional structure diagram of the slurry bucket and the insertion limit group of the present invention.

[0025] Figure 3 It is a right-side cross-sectional view of the present invention.

[0026] Figure 4 It is Figure 3 A partial enlarged schematic view of part A of

[0027] Figure 5 It is Figure 3 A partial enlarged schematic view of part B of

[0028] Figure 6 It is Figure 3 A partial enlarged schematic view of part C of

[0029] Figure 7 It is a top cross-sectional view of the slurry bucket, T-shaped insert, C-shaped clamping plate and box body of the present invention.

[0030] Reference numerals: 1, box body; 2, slurry bucket; 20, insertion limit group; 201, C-shaped clamping plate; 202, T-shaped insert; 21, lifting handle; 22, supporting block; 3, vacuum pumping mechanism; 4, lifting and locking group; 40, guide rod; 41, lifting rod; 42, insertion component; 420, insertion hole; 421, spring groove; 422, insertion rod; 423, return spring; 5, box cover; 6, sealing and locking mechanism; 60, annular protrusion; 62, rubber sealing ring; 63, fixing ring; 64, card entrance; 65, pressing group; 650, rotating ring; 651, installation groove; 652, swing plate; 653, lifting ring; 654, clamping block; 655, pushing column; 66, pressing group; 660, pressing ring; 661, connecting rod; 7, observation window; 8, air pressure detector; 9, stirring and auxiliary defoaming mechanism; 90, stirring shaft; 91, stirring component; 910, V-shaped frame; 92, puncturing component; 920, floating ring; 921, dialing plate; 922, puncturing needle; 923, rotating plate; 93, driving motor. Detailed implementation manners

[0031] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0032] In order to enable those in the technical field to better understand the solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0033] Refer to Figure 1 And Figure 2 , a defoaming device for silicon carbide slurry, comprising: a box body 1, a slurry bucket 2 and a vacuum pumping mechanism 3. The outer wall of the box body 1 is provided with a box cover 5 through a lifting and locking group 4. The box cover 5 and the top of the box body 1 are tightly locked and sealed through a sealing and locking mechanism 6. The vacuum pumping mechanism 3 is communicated with the box body 1 through a pipeline to evacuate the inside of the box body 1. The top of the box cover 5 is also provided with an observation window 7 and a barometric pressure detector 8.

[0034] It should be noted that the vacuum pumping mechanism 3 is an existing vacuum pump. The air extraction port of the vacuum pump is connected to the box body 1 through a pipeline, and an exhaust valve (not shown in the figure) is also installed on the outer wall of the box body 1.

[0035] Refer to Figure 1 、 Figure 2 And Figure 3 , the slurry bucket 2 is placed inside the box body 1, and a matching plug-in limiting group 20 is installed between the inner wall of the box body 1 and the outer wall of the slurry bucket 2; a stirring auxiliary defoaming mechanism 9 is installed in the middle of the lower end face of the box cover 5. The plug-in limiting group 20 is used to limit the circumferential movement of the placed slurry bucket 2 to prevent the slurry bucket 2 from moving when the stirring auxiliary defoaming mechanism 9 stirs the slurry.

[0036] Refer to Figure 2 , two lifting handles 21 are hinged near the upper end of the inner wall of the slurry bucket 2. Two supporting blocks 22 are symmetrically arranged along the circumference of the inner wall of the slurry bucket 2. The supporting blocks 22 are used to support the lifting handles 21 in a horizontal state, and the built-in lifting handles 21 are for facilitating the limitation of the slurry bucket 2 from the outside of the slurry bucket 2.

[0037] Refer to Figure 2 、 Figure 3 And Figure 7 , the plug-in limiting group 20 includes U-shaped clamping plates 201 evenly arranged along the circumference of the inner wall of the box body 1, and T-shaped insertion strips 202 evenly arranged along the circumference of the outer wall of the slurry bucket 2. When the slurry bucket 2 is placed in the box body 1, the vertical section of the T-shaped insertion strip 202 is inserted into the corresponding U-shaped clamping plate 201.

[0038] Refer to Figure 1 And Figure 3 , the lifting and locking group 4 includes a guide rod 40 rotatably connected to the outer wall of the box body 1. A lifting rod 41 that slides up and down is sleeved on the guide rod 40. The lifting rod 41 is Z-shaped. The horizontal section on the upper side of the lifting rod 41 is slidably connected to the side wall of the box cover 5. A plug-in component 42 that is inserted and locked with the guide rod 40 when the lifting rod 41 moves to the upper end of the guide rod 40 is installed on the lifting rod 41.

[0039] Refer to Figure 1 、 Figure 3 And Figure 6The plug-in assembly 42 includes a socket 420 formed at the upper end of the guide rod 40, a spring groove 421 formed at one end of the lifting rod 41 sleeved on the guide rod 40, an insertion rod 422 slidably connected in the spring groove 421, and a return spring 423 sleeved on the insertion rod 422 is installed between the insertion rod 422 and the inner wall of the spring groove 421.

[0040] When the box body 1 is in an open state, the lifting rod 41 moves to the upper end of the guide rod 40, the insertion rod 422 is inserted into the insertion hole 420, and then the guide rod 40 is manually driven to rotate 90 degrees, thereby driving the box cover 5 and the stirring auxiliary defoaming mechanism 9 to move from the top of the box body 1 to prevent the stirring auxiliary defoaming mechanism 9 from hindering the taking and placing of the slurry barrel 2.

[0041] When the box body 1 needs to be closed, the guide rod 40 is rotated to move the box cover 5 and the stirring auxiliary defoaming mechanism 9 to the top of the box body 1, and then the insertion rod 422 is pulled to remove the insertion rod 422 from the insertion hole 420. At this time, the return spring 423 is in a compressed state, and then the lifting rod 41 is moved downward to cover the box cover 5 on the box body 1.

[0042] See also Figure 1 , Figure 3 and Figure 4 The sealing locking mechanism 6 includes an annular protrusion 60 installed on the top of the box body 1, an annular groove matching the annular protrusion 60 is provided at the bottom of the box cover 5, a rubber sealing ring 62 is installed on the annular groove, and a fixing ring 63 with an L-shaped vertical cross-section is installed near the edge of the lower end surface of the box cover 5. The fixing ring 63 is coaxial with the box cover 5 and is located outside the box body 1. The fixing ring 63 is provided with card inlets 64 evenly arranged along its circumference. The outer wall of the box body 1 is installed with a pressing group 65 that drives the fixing ring 63 to move downward to tighten and seal the box cover 5 and the top of the box body 1.

[0043] When the box cover 5 moves downward, the annular protrusion 60 enters the annular groove and contacts the rubber sealing ring 62, and then drives the box cover 5 to move downward through the cooperation of the downward pressure group 65 and the fixing ring 63, so that the rubber sealing ring 62 on the annular groove contacts the annular protrusion 60 tightly, thereby improving the sealing effect between the box body 1 and the box cover 5, avoiding leakage when the box body 1 is vacuumed to degas the slurry, thereby affecting the degassing effect of the slurry.

[0044] See also Figure 1 , Figure 3 and Figure 4 A pressing group 66 is also installed at the bottom of the box cover 5 to press down the slurry barrel 2. When the pressing group 65 cooperates with the fixing ring 63 to drive the box cover 5 to move downward to seal between the box body 1 and the box cover 5, the pressing group 66 presses and locks the slurry barrel 2 as a whole.

[0045] See also Figure 1 , Figure 3 and Figure 4 The pressing group 65 includes a rotating ring 650 sleeved on the outer wall of the box body 1, the rotating ring 650 is connected to the outer wall of the box body 1 by means of threaded cooperation, the outer wall of the box body 1 is provided with mounting grooves 651 evenly arranged along its circumference, a swing plate 652 is hinged in the mounting groove 651 through a torsion spring rod, the swing plate 652 corresponds to the card entrance 64 one by one, the upper end of the rotating ring 650 is rotatably connected with a lifting ring 653, the inner wall of the lifting ring 653 is installed with a card block 654 corresponding to the mounting groove 651 one by one, the card block 654 is connected to the mounting groove 651 for sliding up and down, and a push column 655 is installed on the top of the card block 654 for pushing one end of the swing plate 652 located in the mounting groove 651 to move upward.

[0046] When the box cover 5 moves downward, the card entrance 64 and the swing plate 652 are aligned vertically, so that the box cover 5 can cover the top of the box body 1. Then the box cover 5 is rotated at a certain angle, so that the end of the swing plate 652 outside the installation groove 651 enters between the vertical section and the horizontal section of the fixed ring 63, and then the rotating ring 650 is manually rotated. The rotating ring 650 rotates along the outer wall of the box body 1 and moves upward at the same time through the threaded engagement between the rotating ring 650 and the outer wall of the box body 1. The rotating ring 650 drives the lifting ring 653, the block 654 and the push column 655 to move upward, and the push column 655 is pushed upward. The column 655 pushes one end of the swing plate 652 located in the installation groove 651 to move upward, and the swing plate 652 rotates along its hinge point, and then the end of the swing plate 652 located outside the installation groove 651 moves downward and presses down the horizontal section of the fixing ring 63, so that the fixing ring 63 drives the box cover 5 to move downward until the rubber sealing ring 62 on the box cover 5 is further pressed against the annular protrusion 60, thereby improving the sealing effect between the box body 1 and the box cover 5, avoiding leakage when the box body 1 is vacuumed to degas the slurry, thereby affecting the degassing effect of the slurry.

[0047] See also Figure 1 and Figure 3 The pressing group 66 includes a pressing ring 660, the top of which is connected to the box cover 5 through connecting rods 661 evenly arranged along the circumference thereof, the inner diameter of the pressing ring 660 is larger than the outer diameter of the slurry barrel 2, and the pressing ring 660 moves downward with the box cover 5 to press against the top of the T-shaped insert 202. That is, the pressing ring 660 cooperates with the plug-in limiting group 20 to limit the slurry barrel 2 in the circumferential direction and in the vertical direction, so as to prevent the slurry barrel 2 from moving when the stirring auxiliary defoaming mechanism 9 stirs the slurry in the slurry barrel 2, thereby affecting the defoaming effect of the slurry.

[0048] See also Figure 3 and Figure 5The stirring auxiliary defoaming mechanism 9 includes a stirring shaft 90 and a stirring component 91. The stirring shaft 90 is also equipped with a puncturing component 92 for puncturing bubbles on the top of the silicon carbide slurry in the slurry barrel 2. The puncturing component 92 is located above the stirring component 91. A driving motor 93 for driving the stirring shaft 90 is installed at the bottom of the box cover 5, and the output shaft of the driving motor 93 is connected to the upper end of the stirring shaft 90.

[0049] When the stirring shaft 90 drives the stirring component 91 to rotate, the stirring component 91 stirs the slurry to help break large bubbles and disperse them into smaller bubbles, making it easier for these small bubbles to expand and float to the liquid surface and burst under a reduced pressure environment, further improving the defoaming efficiency of the slurry.

[0050] See also Figure 3 The stirring assembly 91 includes a plurality of V-shaped frames 910, both ends of which are mounted on the stirring shaft 90, and the plurality of V-shaped frames 910 are arranged axially along the stirring shaft 90 and staggered circumferentially along the stirring shaft 90. When the stirring shaft 90 drives the stirring assembly 91 to rotate, the V-shaped frames 910 stir the slurry, which can help break large bubbles and disperse them into smaller bubbles, making it easier for these small bubbles to expand and float to the liquid surface and rupture under the reduced pressure environment, further improving the defoaming efficiency of the slurry, and the stirring helps to ensure that the slurry components are evenly distributed, avoiding the occurrence of high-concentration bubbles or particle agglomeration in local areas.

[0051] See also Figure 2 , Figure 3 and Figure 5 The piercing assembly 92 includes a floating ring 920 connected to the stirring shaft 90 by spline fitting, and a poke plate 921 is installed on the outer ring surface of the floating ring 920. The poke plate 921 is installed with evenly arranged piercing needles 922. The end of the poke plate 921 away from the floating ring 920 is installed with a supplementary piercing member. The supplementary piercing member includes a rotating plate 923 hinged to the end of the poke plate 921 through a torsion spring rod, and the rotating plate 923 is also installed with a piercing needle 922.

[0052] When the stirring shaft 90 is inserted into the slurry and the rotating plate 923 contacts the lifting handle 21, the rotating plate 923 rotates along its hinge to facilitate the rotating plate 923 to enter the slurry barrel 2. When the floating ring 920 contacts the top of the slurry, the floating ring 920, the prying plate 921, the puncturing needle 922 and the rotating plate 923 are light in weight as a whole. The whole will move upward relative to the stirring shaft 90 due to the upward resistance given by the slurry. When the prying plate 921 and the rotating plate 923 rotate with the stirring shaft 90, the puncturing needle 922 will puncture the bubbles floating on the top of the slurry, thereby further improving the defoaming efficiency of the slurry.

[0053] See also Figure 1-Figure 7During the specific operation, the slurry barrel 2 is first placed in the box body 1, and a matching plug-in limit group 20 is installed between the inner wall of the box body 1 and the outer wall of the slurry barrel 2. The plug-in limit group 20 is used to limit the circumferential movement of the placed slurry barrel 2.

[0054] Next, the box cover 5 is driven to move downward by the lifting and locking group 4, and the box cover 5 drives the stirring auxiliary defoaming mechanism 9 to be inserted into the slurry barrel 2. When the puncturing component 92 contacts the top of the slurry, it is located at the top of the slurry under the upward resistance given by the slurry, until the annular protrusion 60 enters the annular groove and contacts the rubber sealing ring 62.

[0055] Then, the box cover 5 is driven downward by cooperating with the fixing ring 63 to seal between the box body 1 and the box cover 5, so that the rubber sealing ring 62 on the annular groove is further pressed against the annular protrusion 60, thereby improving the sealing effect between the box body 1 and the box cover 5. At the same time, the pressing group 66 at the bottom of the box cover 5 presses and locks the slurry barrel 2 as a whole.

[0056] Finally, the vacuuming mechanism 3 vacuums and removes bubbles from the slurry in the box 1, and the stirring auxiliary debubbling mechanism 9 stirs the slurry to help break large bubbles and disperse them into smaller bubbles, making it easier for these small bubbles to expand and float to the liquid surface and burst under a reduced pressure environment, thereby further improving the debubbling efficiency and effect of the slurry. The puncturing component 92 also punctures the small bubbles floating on the top of the slurry, thereby further improving the debubbling efficiency of the slurry.

[0057] In the description of the present invention, it is necessary to understand that the terms "length", "width", "up", "down", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0058] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "connect", "install", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0059] The embodiments of this specific implementation method are all preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention. Therefore, all equivalent changes made according to the structure, shape, and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A silicon carbide slurry defoaming device, characterized in that: Including: A box body, a slurry bucket and a vacuum pumping mechanism. The outer wall of the box body is provided with a box cover through a lifting and locking group. The box cover and the top of the box body are locked and sealed through a sealing and locking mechanism. The vacuum pumping mechanism is communicated with the box body through a pipeline to pump vacuum inside the box body; The slurry bucket is placed inside the box body, and a matching plugging and limiting group is installed between the inner wall of the box body and the outer wall of the slurry bucket; A stirring and auxiliary defoaming mechanism is installed in the middle of the lower end face of the box cover; The sealing and locking mechanism includes a ring-shaped protrusion installed on the top of the box body. A ring-shaped groove matching with the ring-shaped protrusion is opened at the bottom of the box cover. A rubber sealing ring is installed on the ring-shaped groove. A fixing ring with an L-shaped vertical cross-section is installed near the edge of the lower end face of the box cover. Card entrances are arranged on the fixing ring at equal intervals along its circumference. A pressing group for driving the fixing ring to move downward to tighten and seal the box cover and the top of the box body is installed on the outer wall of the box body; A pressing group for pressing and tightening the slurry bucket is also installed at the bottom of the box cover. When the pressing group and the fixing ring cooperate to drive the box cover to move downward to seal between the box body and the box cover, the pressing group integrally presses and locks the slurry bucket; The stirring and auxiliary defoaming mechanism includes a stirring shaft and a stirring component. A puncturing component for puncturing the bubbles at the top of the silicon carbide slurry in the slurry bucket is also installed on the stirring shaft. A driving motor for driving the stirring shaft is installed at the bottom of the box cover.

2. A silicon carbide slurry defoaming device according to claim 1, characterized in that: The pressing group includes a rotating ring sleeved on the outer wall of the box body. The rotating ring is connected with the outer wall of the box body in a threaded cooperation manner. Installation grooves are arranged on the outer wall of the box body at equal intervals along its circumference. Swing plates are hinged in the installation grooves through torsion spring rods. The swing plates correspond to the card entrances one by one. A lifting ring is rotatably connected to the upper end of the rotating ring. Clamping blocks corresponding to the installation grooves one by one are installed on the inner wall of the lifting ring. The clamping blocks are slidably connected with the installation grooves up and down. A top push column for pushing the end of the swing plate located in the installation groove upward is installed at the top of the clamping block.

3. The silicon carbide slurry defoaming device according to claim 1, characterized in that: The lifting and locking group includes a guide rod rotatably connected to the outer wall of the box body. A lifting rod that slides up and down is sleeved on the guide rod. The lifting rod is Z-shaped. The horizontal section on the upper side of the lifting rod is slidably connected with the side wall of the box cover. A plugging component for plugging and locking with the guide rod when the lifting rod moves to the upper end of the guide rod is installed on the lifting rod.

4. The silicon carbide slurry defoaming device according to claim 1, characterized in that: The plugging and limiting group includes U-shaped clamping plates arranged on the inner wall of the box body at equal intervals along its circumference. T-shaped insertion strips arranged on the outer wall of the slurry bucket at equal intervals along its circumference are installed on the outer wall of the slurry bucket.

5. The silicon carbide slurry defoaming device according to claim 1, characterized in that: The pressing group includes a pressing ring. The top of the pressing ring is connected with the box cover through connecting rods arranged on the pressing ring at equal intervals along its circumference. The inner diameter of the pressing ring is larger than the outer diameter of the slurry bucket.

6. The silicon carbide slurry defoaming device according to claim 1, characterized in that: The stirring component includes a plurality of V-shaped frames. The two ends of the V-shaped frames are installed on the stirring shaft. The plurality of V-shaped frames are arranged axially along the stirring shaft and staggered along the circumference of the stirring shaft.

7. The silicon carbide slurry defoaming device according to claim 1, characterized in that: Two lifting handles are hinged near the upper end of the inner wall of the slurry bucket. Two supporting blocks arranged symmetrically along the circumference of the inner wall of the slurry bucket are installed on the inner wall of the slurry bucket. The supporting blocks are used for supporting the lifting handles in a horizontal state.

8. The silicon carbide slurry defoaming device according to claim 1, characterized in that: The puncturing component includes a floating ring slidably connected to the stirring shaft through a spline fit. A dial plate is installed on the outer ring surface of the floating ring. Puncturing needles are arranged on the dial plate at equal intervals. A supplementary puncturing part is installed at the end of the dial plate far away from the floating ring.

9. The silicon carbide slurry defoaming device according to claim 3, characterized in that: The plug-in assembly includes a jack opened at the upper end of the guide rod, a spring groove opened at one end of the lifting rod sleeved on the guide rod, a plug rod slidably connected in the spring groove, and a reset spring sleeved on the plug rod is installed between the plug rod and the inner wall of the spring groove.

10. The silicon carbide slurry defoaming device according to claim 8, characterized in that: The supplementary piercing member comprises a rotating plate hinged to the end of the dial plate through a torsion spring rod, and a piercing needle is also installed on the rotating plate.

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