Integrated three-degree-of-freedom macro-micro motion positioning platform and control method thereof

Abstract

The invention discloses an integrated three-degree-of-freedom macro-micro motion positioning platform and a control method thereof. The integrated three-degree-of-freedom macro-micro motion positioning platform comprises an X-axis macro-motion platform, the Z-axis macro-motion platform is vertically arranged on the first composite voice coil motor stator and slides in the Z-axis direction; the X-axis macro-motion platform is arranged on the first composite voice coil motor stator and slides in the X-axis direction. The Y-axis macro-motion platform is arranged on the X-axis macro-motion platform and slides in the Y-axis direction, the XY micro-motion platform is connected with the Y-axis macro-motion platform through a flexible hinge, and an X-axis piezoelectric actuator and a Y-axis piezoelectric actuator are arranged on the XY micro-motion platform; the second composite voice coil motor stator is used for driving the X-axis macro-motion platform to move on the lifting carrier plate in the X-axis direction and driving the Y-axis macro-motion platform to move on the X-axis macro-motion platform in the Y-axis direction; the macro-motion position detection device is arranged on the transverse and vertical installation platform and used for detecting tail end displacement of the X-axis macro-motion platform, the Y-axis macro-motion platform and the Z-axis macro-motion platform. The size of the space occupied by the macro-micro motion platform can be reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of positioning platforms, in particular to an integrated three-degree-of-freedom macro-micro motion positioning platform and a control method thereof. Background Art

[0002] The macro-micro motion platform plays an important role in the fields of semiconductor processing, lithography, atomic force microscope, micro-electromechanical system, biomedical engineering and microelectronics industry, and is of great significance to its rapid development and productivity improvement, especially in the fields of microelectronics manufacturing such as wire bonding and lithography. In order to achieve the effect of high-speed and ultra-precision positioning of the macro-micro motion platform, the macro-micro motion platform is usually driven by a large-volume macro motor, and in order to achieve the effect of long stroke and fast positioning of the macro-micro motion platform in two-dimensional space, two large-volume macro motors are usually connected in series. Although the two macro motors in series solve the problem of long stroke and fast positioning of the macro-micro motion platform, the structure of the two macro motors in series will further increase the volume of the macro-micro motion platform, resulting in a large occupied space, which affects the space planning and expenditure cost of the macro-micro motion platform. Summary of the invention

[0003] The present invention aims to provide an integrated three-degree-of-freedom macro-micro motion positioning platform and a control method thereof, which can reduce the volume of space occupied by the macro-micro motion platform.

[0004] In order to solve the above technical problems, the specific solution adopted by the present invention is an integrated three-degree-of-freedom macro-micro motion positioning platform, including a horizontal and vertical installation platform, a Z-axis macro motion platform, an X-axis macro motion platform, a Y-axis macro motion platform, an XY micro motion platform, a first composite voice coil motor stator, a second composite voice coil motor stator and a macro motion position detection device;

[0005] The stator of the first composite voice coil motor is arranged on the horizontal and vertical mounting platform, and a lifting carrier plate is arranged on the stator of the first composite voice coil motor. The Z-axis macro-motion platform is arranged vertically on the lifting carrier plate and can slide with the horizontal and vertical mounting platform, thereby sliding along the Z-axis direction; the X-axis macro-motion platform is arranged on the lifting carrier plate and can slide with the lifting carrier plate, thereby sliding along the X-axis direction; the Y-axis macro-motion platform is arranged on the X-axis macro-motion platform and can slide with the X-axis macro-motion platform, thereby sliding along the Y-axis direction, and the XY micro-motion platform is arranged on the Y-axis macro-motion platform through a flexible hinge, and the XY micro-motion platform is provided with an X-axis piezoelectric driver and a Y-axis piezoelectric driver;

[0006] A floating platform is arranged on one side of the first composite voice coil motor stator on the horizontal and vertical mounting platform, and a second composite voice coil motor stator is arranged on the floating platform for driving the X-axis macro motion platform to move along the X-axis direction on the lifting carrier plate and for driving the Y-axis macro motion platform to move along the Y-axis direction on the X-axis macro motion platform;

[0007] The macro motion position detection device is arranged on the horizontal and vertical installation platform to detect the end displacement of the X-axis macro motion platform, the Y-axis macro motion platform and the Z-axis macro motion platform.

[0008] As another optimization scheme of the above-mentioned integrated three-degree-of-freedom macro-micro motion positioning platform: the macro motion position detection device includes a Z-axis grating ruler arranged on both sides of the Z-axis macro motion platform distributed along the Z-axis direction, an X-axis grating ruler arranged on both sides of the X-axis macro motion platform distributed along the X-axis direction, and a Y-axis grating ruler arranged on both sides of the X-axis macro motion platform distributed along the Y-axis direction. The position where the X-axis grating ruler is arranged is correspondingly provided with an X-grating ruler reader, the position where the Y-axis grating ruler is arranged is correspondingly provided with a Y-grating ruler reader, and the position where the Z-axis grating ruler is arranged is correspondingly provided with a Z-grating ruler reader.

[0009] As another optimization scheme of the above-mentioned integrated three-degree-of-freedom macro-micro motion positioning platform: the second composite voice coil motor stator includes a housing and a composite rotary motor rotor, the composite rotary motor rotor is fixed in the housing by a sliding bearing, and a driving gear is arranged on the composite rotary motor rotor; a driven rack for meshing with the driving gear is arranged on one side of the Y-axis macro motion platform facing the composite rotary motor rotor.

[0010] As another optimization solution for the above-mentioned integrated three-degree-of-freedom macro-micro motion positioning platform: a connecting frame is fixed on one side of the Y-axis macro-motion platform, the connecting frame is located above the driving gear, and the driven rack is arranged on the connecting frame.

[0011] As another optimization scheme of the above-mentioned integrated three-degree-of-freedom macro-micro motion positioning platform: the second composite voice coil motor stator also includes a composite voice coil motor rotor arranged in the composite voice coil motor rotor, and the composite voice coil motor rotor is connected with the composite voice coil motor rotor through magnetic field coupling; a slider is installed on one side of the X-axis macro motion platform facing the second composite voice coil motor stator in a sliding manner, and the composite voice coil motor rotor is fixedly connected to the slider.

[0012] As another optimization scheme of the above-mentioned integrated three-DOF macro-micro motion positioning platform: four sliding pillars are arranged on the horizontal and vertical mounting platforms at positions corresponding to the floating platforms, and the floating platform slides with the corresponding sliding pillars through four legs arranged at the four corners of its lower side.

[0013] As another optimization solution of the above-mentioned integrated three-DOF macro-micro motion positioning platform: a slide groove is arranged on the lifting carrier plate along the X-axis direction, and a rail for slidingly cooperating with the slide groove is arranged on the bottom surface of the X-axis macro motion platform.

[0014] As another optimization scheme of the above-mentioned integrated three-DOF macro-micro motion positioning platform: two strip guide grooves are arranged on the upper side of the X-axis macro motion platform along the Y-axis direction, and a guide block is arranged on the lower side of the Y-axis macro motion platform for sliding cooperation with the strip guide groove.

[0015] As another optimization scheme of the above-mentioned integrated three-DOF macro-micro motion positioning platform: a groove is provided on the Z-axis macro motion platform along the Z-axis direction, and corresponding sliding columns for penetrating into the groove and slidingly cooperating are provided on the horizontal and vertical mounting platforms.

[0016] A control method for an integrated three-degree-of-freedom macro-micro motion positioning platform comprises the following steps: controlling a first composite voice coil motor stator to drive a Z-axis macro motion platform to move up and down, and then controlling a second composite voice coil motor stator to move axially to drive an X-axis macro motion platform to reciprocate or rotate circumferentially along the X-axis to drive a Y-axis macro motion platform to move along the Y-axis; detecting the end displacements of the X-axis macro motion platform, the Y-axis macro motion platform and the Z-axis macro motion platform by a macro motion position detection device, comparing the end displacement result with a preset displacement to obtain the required macro motion displacement amount and micro motion compensation amount, and controlling the movement of the macro motion platform and the micro motion platform.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] In the present invention, the Z-axis macro-motion platform vertically arranged on the lifting carrier is slidably matched with the horizontal and vertical installation platform, and can move up and down along the Z-axis direction under the drive of the first composite voice coil motor; the X-axis macro-motion platform is slidably arranged on the lifting carrier, and can move along the X-axis under the drive of the stator of the second composite voice coil motor; the Y-axis macro-motion platform is slidably arranged on the X-axis macro-motion platform, and can move along the Y-axis direction under the drive of the second composite voice coil motor. In addition, the displacement of the end of the above-mentioned macro-motion platform is obtained by the detection result of the macro-motion position detection device. The XY micro-motion platform is arranged on the Y-axis macro-motion platform through a flexible hinge, and the X-axis piezoelectric driver and the Y-axis piezoelectric driver arranged on the XY micro-motion platform can drive the flexible hinge for error compensation to ensure the precise positioning of the X-axis macro-motion platform and the Y-axis macro-motion platform. The X-axis macro-motion platform, the Y-axis macro-motion platform and the XY micro-motion platform in the present invention adopt a parallel configuration. Compared with the existing structure with two linear motors in series with a larger volume, while ensuring the accurate positioning of the three degrees of freedom of X, Y, and Z, the structure volume of the macro-micro motion platform is small and the space occupied is small. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of the present invention;

[0020] Figure 2 It is a structural schematic diagram of the horizontal and vertical installation platform;

[0021] Figure 3A schematic diagram of the structure of a slideway provided on a lifting carrier;

[0022] Figure 4 It is a structural diagram of the X-axis macro motion platform;

[0023] Figure 5 It is a schematic diagram of the structure of setting a driven rack on the connecting frame of the Y-axis macro-motion platform;

[0024] Figure 6 It is a schematic diagram of the structure of the combination of the composite rotating motor rotor and the composite voice coil motor rotor;

[0025] Figure numerals: 1, horizontal and vertical installation platform, 101, floating platform, 1011, support leg, 102, sliding pillar, 2, first composite voice coil motor stator, 201, lifting carrier plate, 2011, slide groove, 3, X-axis macro-motion platform, 301, strip guide groove, 302, slide rail, 303, slider, 4, macro-motion position detection device, 401, X-axis grating ruler, 402, Y-axis grating ruler, 403, Z-axis grating ruler reader, 4031, ruler frame, 4032, fixed plate, 404, Z-axis grating ruler, 5 , Z-axis macro-motion platform, 501, sliding column, 6, Y-axis macro-motion platform, 7, XY micro-motion platform, 701, Y-axis piezoelectric driver, 702, X-axis piezoelectric driver, 703, flexible hinge, 704, connecting frame, 705, driven rack, 8, second composite voice coil motor stator, 801, composite rotating motor rotor, 802, sliding bearing, 8021, outer ring, 8022, inner ring, 8023, rivet, 8024, retaining frame, 803, driving gear, 804, composite voice coil motor rotor. DETAILED DESCRIPTION

[0026] The technical solution of the present invention is further elaborated in detail below in conjunction with specific embodiments. The parts not described in detail in the following embodiments of the present invention, such as the first composite voice coil motor stator, the second composite voice coil motor stator, the grating scale detection position and the structure of the flexible hinge, should be immediately known to or should be known to those skilled in the art.

[0027] like Figure 1-6 As shown, an integrated three-degree-of-freedom macro-micro motion positioning platform and a control method thereof include a horizontal and vertical installation platform 1, an X-axis macro motion platform 3, a Y-axis macro motion platform 6, a Z-axis macro motion platform 5, an XY micro motion platform 7, a first composite voice coil motor stator 2, a second composite voice coil motor stator 8 and a macro motion position detection device 4.

[0028] The cross-sectional shape of the horizontal and vertical mounting platform 1 is L-shaped. The horizontal and vertical mounting platform 1 includes a horizontal plate and a vertical plate. The vertical plate is arranged on the wide side of the left side of the horizontal plate, and a triangular inclined plate for maintaining stable connection is arranged between the vertical plate and the horizontal plate. The first composite voice coil motor stator 2 is vertically fixed on the horizontal plate, and a lifting carrier plate 201 is fixed on the upper end of the first composite voice coil motor stator 2. The first composite voice coil motor stator 2 can drive the lifting carrier plate 201 to rise or fall vertically.

[0029] The side edge of the Z-axis macro motion platform 5 is vertically fixed on the upper side of the lifting carrier 201 close to the vertical plate. The Z-axis macro motion platform 5 is arranged parallel to the vertical plate. Two grooves (not shown in the figure) are opened on the Z-axis macro motion platform 5 on the side facing the vertical plate. The two grooves are arranged at intervals and are distributed along the direction of the Z axis.

[0030] Two slide columns 501 are arranged on one side of the vertical plate facing the Z-axis macro-motion platform 5. The two slide columns 501 are arranged at intervals. The two slide columns 501 are fixedly connected to the vertical plate through their side walls. The slide columns 501 can penetrate into the corresponding side grooves and slide along the grooves, so that the Z-axis macro-motion platform 5 can move up and down along the Z-axis direction through the sliding cooperation of the slide columns 501 in the grooves. Under the drive of the first composite voice coil motor stator 2, the Z-axis macro-motion platform 5 can rise or fall with the lifting carrier 201.

[0031] The macro-motion position detection device 4 includes a Z-axis grating ruler 404 arranged on the left and right sides of the Z-axis macro-motion platform 5 distributed along the Z-axis direction, and a Z-grating ruler reader 403 is respectively arranged on the left and right sides of the vertical plate corresponding to the outer side of the Z-axis grating ruler 404, and a fixed plate 4032 fixed by bolts is arranged on the vertical plate, and the fixed plate 4032 is connected to the corresponding Z-grating ruler reader 403 through a ruler frame 4031, so that the Z-grating ruler reader 403 is stably fixed on the outer side of the Z-axis grating ruler 404. The Z-grating ruler reader 403 can measure the up and down displacement of the Z-axis macro-motion platform 5, so as to obtain the end displacement of the Z-axis macro-motion platform 5 through the cooperation of the Z-grating ruler reader 403 and the Z-axis grating ruler 404.

[0032] The X-axis macro-motion platform 3 is slidably disposed on the lifting plate 201 on the right side of the Z-axis macro-motion platform 5. Two rails (not shown in the figure) are disposed on the bottom surface of the X-axis macro-motion platform 3. The two rails are disposed at intervals along the direction of the X-axis. Two slide grooves 2011 are provided on the upper side surface of the lifting plate 201 along the direction of the X-axis. The rails on the X-axis macro-motion platform 3 are respectively inserted into the corresponding slide grooves 2011 and can move along the X-axis direction.

[0033] The macro-motion position detection device 4 also includes an X-axis grating ruler 401 arranged on the front and rear sides of the X-axis macro-motion platform 3 distributed along the X-axis direction, and an X-axis grating ruler reader is correspondingly arranged on the lifting carrier 201 located near the position of the X-axis grating ruler 401 on the front side of the X-axis macro-motion platform 3. The X-axis grating ruler reader can measure the front and rear displacement of the X-axis macro-motion platform 3, thereby obtaining the end displacement of the X-axis macro-motion platform 3 through the cooperation of the X-axis grating ruler reader and the X-axis grating ruler 401.

[0034] The Y-axis macro-motion platform 6 is slidably disposed on the X-axis macro-motion platform 3. Two strip guide grooves 301 are disposed on the upper side of the X-axis macro-motion platform 3. The two strip guide grooves 301 are disposed at intervals along the Y-axis direction. Correspondingly, two guide blocks (not shown in the figure) are disposed on the lower side of the Y-axis macro-motion platform 6. The guide blocks can be respectively inserted into the corresponding strip guide grooves 301 and can slide along the strip guide grooves 301, so that the Y-axis macro-motion platform 6 can move along the Y-axis direction through the sliding cooperation between the guide blocks and the strip guide grooves 301.

[0035] The macro-motion position detection device 4 also includes a Y-axis grating ruler 402 arranged on the upper edges of the left and right sides of the X-axis macro-motion platform 3 distributed along the Y-axis direction, and a Y-grating ruler reader is correspondingly arranged on the lifting carrier 201 located near the position of the Y-axis grating ruler 402 on the left side of the X-axis macro-motion platform 3. The Y-grating ruler reader can measure the left and right displacement of the Y-axis macro-motion platform 6, thereby obtaining the end displacement of the Y-axis macro-motion platform 6 through the cooperation of the Y-grating ruler reader and the Y-axis grating ruler 402.

[0036] The XY fine-motion platform 7 is arranged on the Y-axis macro-motion platform 6, and the XY fine-motion platform 7 is connected to the Y-axis macro-motion platform 6 through a flexible hinge 703. A Y-axis piezoelectric driver 701 is arranged on one side of the XY fine-motion platform 7 distributed along the Y-axis direction, and an X-axis piezoelectric driver 702 is arranged on one side of the XY fine-motion platform 7 distributed along the X-axis direction. The X-axis piezoelectric driver 702 and the Y-axis piezoelectric driver 701 arranged on the XY fine-motion platform 7 can drive the flexible hinge 703 to perform error compensation when the X-axis macro-motion platform 3 and the Y-axis macro-motion platform 6 move, thereby ensuring the precise positioning of the X-axis macro-motion platform 3 and the Y-axis macro-motion platform 6.

[0037] According to the micron and nanometer reading errors, the X-axis piezoelectric driver 702 drives the XY fine-motion platform 7 to perform error compensation in the X-axis direction and perform nanometer-level precision positioning. According to the micron and nanometer reading errors, the Y-axis piezoelectric driver 701 drives the XY fine-motion platform 7 to perform error compensation in the Y-axis direction and perform nanometer-level precision positioning, thereby achieving fast and accurate positioning of the XY fine-motion platform 7.

[0038] The end displacements of the X-axis macro-motion platform 3, the Y-axis macro-motion platform 6 and the Z-axis macro-motion platform 5 are detected by the macro-motion position detection device 4, and the end displacement results are compared with the preset displacements to obtain the required macro-motion displacement and micro-motion compensation amounts, thereby controlling the movements of the X-axis macro-motion platform 3, the Y-axis macro-motion platform 6, the Z-axis macro-motion platform 5 and the XY micro-motion platform 7. While ensuring ultra-high altitude, the precise positioning of the XYZ three-degree-of-freedom macro-motion platform and the XY micro-motion platform 7 can also be guaranteed.

[0039] A floating platform 101 is arranged on the horizontal and vertical installation platform 1 at the right side of the first composite voice coil motor stator 2. The four corners of the lower side of the floating platform 101 are respectively provided with vertically distributed legs 1011. The middle of the inner wall of the legs 1011 is provided with rectangular grooves along the length direction. Correspondingly, four sliding pillars 102 are arranged at the position corresponding to the floating platform 101 on the horizontal and vertical installation platform 1. The four sliding pillars 102 can slide with the corresponding legs 1011. Then, a strip distributed along the height direction is arranged on the outer wall of any sliding pillar 102. The sliding pillar 102 slides with the rectangular groove to enable the floating platform 101 to float vertically up or down.

[0040] The second composite voice coil motor stator 8 is fixedly mounted on the floating platform 101 via a mounting frame. The second composite voice coil motor stator 8 can be vertically raised or lowered via the floating platform 101, so that the second composite voice coil motor stator 8 can maintain connection with the lower X-axis macro motion platform 3 and the Y-axis macro motion platform 6 at any time as the Z-axis macro motion platform 5 moves up or down.

[0041] The second composite voice coil motor stator 8 is used to drive the X-axis macro motion platform 3 to move along the X-axis direction and the Y-axis macro motion platform 6 to move along the Y-axis direction. The second composite voice coil motor stator 8 includes a shell, a composite rotary motor rotor 801 rotatably disposed in the shell, and a composite voice coil motor rotor 804 disposed in the composite rotary motor rotor 801. The composite rotary motor rotor 801 and the composite voice coil motor rotor 804 are both disposed along the X-axis direction.

[0042] The composite voice coil motor rotor 804 is connected to the composite rotary motor rotor 801 through magnetic field coupling, so that the composite voice coil motor rotor 804 can move along the X-axis direction. Two sliding bearings 802 are arranged on the composite rotary motor rotor 801 along its axial direction, and the composite rotary motor rotor 801 can rotate in the circumferential direction through the sliding bearings 802. The sliding bearing 802 includes an inner ring 8022 fixed on the composite rotary motor rotor 801 and an outer ring 8021 fixed on the inner wall of the housing, and the inner ring 8022 and the outer ring 8021 are connected by a retaining frame 8024, and the retaining frame 8024 is provided with rivets 8023 that can play a role in reinforcement and strengthening.

[0043] A slide rail 302 distributed along the Y-axis direction is arranged on the right side of the X-axis macro-motion platform 3 facing the stator 8 of the second compound voice coil motor, and a slider 303 is slidably mounted on the slide rail 302. The slider 303 is connected to the rotor 804 of the compound voice coil motor, so that when the rotor 804 of the compound voice coil motor moves along the X-axis direction, the slider 303 drives the X-axis macro-motion platform 3 to move back and forth synchronously along the X-axis direction.

[0044] A driving gear 803 is provided on the compound rotating motor rotor 801 near its end, and a connecting frame 704 is fixed to the right side of the Y-axis macro-motion platform 6 facing the second compound voice coil motor stator 8. The cross-sectional shape of the connecting frame 704 is L-shaped, and one side plate of the connecting frame 704 is fixed to the right side of the Y-axis macro-motion platform 6, and the other side plate of the connecting frame 704 is located directly above the driving gear 803, and a driven rack 705 is fixed to the other side plate of the connecting frame 704 along the Y-axis direction. The driven rack 705 can mesh with the driving gear 803, so that the circumferentially rotating compound rotating motor rotor 801 can drive the Y-axis macro-motion platform 6 to move along the Y-axis direction through the meshing cooperation between the driving gear 803 and the driven rack 705.

Claims

1. An integrated three-degree-of-freedom macro-micro motion positioning platform, characterized in that: It comprises a horizontal and vertical installation platform (1), a Z-axis macro-motion platform (5), an X-axis macro-motion platform (3), a Y-axis macro-motion platform (6), an XY micro-motion platform (7), a first composite voice coil motor stator (2), a second composite voice coil motor stator (8) and a macro-motion position detection device (4); The first composite voice coil motor stator (2) is arranged on a horizontal and vertical mounting platform (1), a lifting carrier plate (201) is arranged on the first composite voice coil motor stator (2), and a Z-axis macro motion platform (5) is arranged vertically on the lifting carrier plate (201) and can be slidably matched with the horizontal and vertical mounting platform (1), thereby sliding along the Z-axis direction; The X-axis macro-motion platform (3) is installed on the lifting plate (201) and can be slidably matched with the lifting plate (201), thereby sliding along the X-axis direction; the Y-axis macro-motion platform (6) is arranged on the X-axis macro-motion platform (3) and can be slidably matched with the X-axis macro-motion platform (3), thereby sliding along the Y-axis direction; the XY micro-motion platform (7) is arranged on the Y-axis macro-motion platform (6) through a flexible hinge (703); and the XY micro-motion platform (7) is provided with an X-axis piezoelectric driver (702) and a Y-axis piezoelectric driver (701); A floating platform (101) is arranged on one side of the first composite voice coil motor stator (2) on the horizontal and vertical installation platform (1), and a second composite voice coil motor stator (8) is arranged on the floating platform (101) for driving the X-axis macro-motion platform (3) to move along the X-axis direction on the lifting carrier (201) and for driving the Y-axis macro-motion platform (6) to move along the Y-axis direction on the X-axis macro-motion platform (3); The macro motion position detection device (4) is arranged on the horizontal and vertical installation platform (1) and is used to detect the end displacements of the X-axis macro motion platform (3), the Y-axis macro motion platform (6) and the Z-axis macro motion platform (5).

2. The integrated three-DOF macro-micro motion positioning platform according to claim 1, characterized in that: The macro-motion position detection device (4) comprises a Z-axis grating ruler (404) arranged on both sides of the Z-axis macro-motion platform (5) distributed along the Z-axis direction, an X-axis grating ruler (401) arranged on both sides of the X-axis macro-motion platform (3) distributed along the X-axis direction, and a Y-axis grating ruler (402) arranged on both sides of the X-axis macro-motion platform (3) distributed along the Y-axis direction, wherein an X-grating ruler reader is arranged correspondingly to the position where the X-axis grating ruler (401) is arranged, a Y-grating ruler reader is arranged correspondingly to the position where the Y-axis grating ruler (402) is arranged, and a Z-grating ruler reader (403) is arranged correspondingly to the position where the Z-axis grating ruler (404) is arranged.

3. The integrated three-DOF macro-micro motion positioning platform according to claim 1, characterized in that: The second composite voice coil motor stator (8) comprises a housing and a composite rotary motor rotor (801), wherein the composite rotary motor rotor (801) is fixed in the housing via a sliding bearing (802), and a driving gear (803) is arranged on the composite rotary motor rotor (801); and a driven rack (705) for meshing with the driving gear (803) is arranged on one side of the Y-axis macro-motion platform (6) facing the composite rotary motor rotor (801).

4. The integrated three-DOF macro-micro motion positioning platform according to claim 3, characterized in that: A connecting frame (704) is fixed on one side of the Y-axis macro-motion platform (6), the connecting frame (704) is located above the driving gear (803), and the driven rack (705) is arranged on the connecting frame (704).

5. The integrated three-DOF macro-micro motion positioning platform according to claim 3, characterized in that: The second composite voice coil motor stator (8) further comprises a composite voice coil motor rotor (804) arranged in the composite voice coil motor rotor (804), and the composite voice coil motor rotor (804) is connected with the composite voice coil motor rotor (804) through magnetic field coupling; a slider (303) is slidably mounted on one side of the X-axis macro motion platform (3) facing the second composite voice coil motor stator (8), and the composite voice coil motor rotor (804) is fixedly connected with the slider (303).

6. The integrated three-DOF macro-micro motion positioning platform according to claim 1, characterized in that: Four sliding pillars (102) are arranged on the horizontal and vertical installation platform (1) at positions corresponding to the floating platform (101), and the floating platform (101) slides with the corresponding sliding pillars (102) through four legs (1011) arranged at four corners of the lower side surface thereof.

7. The integrated three-DOF macro-micro motion positioning platform according to claim 1, characterized in that: A slide groove (2011) is arranged on the lifting carrier plate (201) along the direction of the X-axis, and a rail for slidingly cooperating with the slide groove (2011) is arranged on the bottom surface of the X-axis macro-motion platform (3).

8. The integrated three-DOF macro-micro motion positioning platform according to claim 1, characterized in that: The upper side of the X-axis macro-motion platform (3) is provided with two strip guide grooves (301) along the Y-axis direction, and the lower side of the Y-axis macro-motion platform (6) is provided with a guide block for slidingly cooperating with the strip guide grooves (301).

9. The integrated three-DOF macro-micro motion positioning platform according to claim 1, characterized in that: A strip groove is provided on the Z-axis macro-motion platform (5) along the Z-axis direction, and a sliding column (501) for penetrating into the strip groove and slidingly engaging with the sliding column (501) is correspondingly provided on the horizontal and vertical installation platforms (1).

10. A control method for an integrated three-degree-of-freedom macro-micro motion positioning platform, characterized in that: The method comprises the following steps: controlling a first composite voice coil motor stator (2) to drive a Z-axis macro motion platform (5) to move up and down, and then controlling a second composite voice coil motor stator (8) to move axially to drive an X-axis macro motion platform (3) to move along an X-axis direction. The axis reciprocates or rotates in a circumferential direction to drive the Y-axis macro-motion platform (6) to move along the Y-axis; the end displacements of the X-axis macro-motion platform (3), the Y-axis macro-motion platform (6) and the Z-axis macro-motion platform (5) are detected by a macro-motion position detection device (4); the end displacement results are compared with the preset displacements to obtain the required macro-motion displacement amount and micro-motion compensation amount, and the movement of the macro-motion platform and the micro-motion platform are controlled.

Images