Wafer manipulator lifting actuator

Abstract

The invention discloses a wafer manipulator lifting actuator, and belongs to the technical field of manipulator driving. The device comprises a second cylinder and a first cylinder, a base plate is installed at one port of the second cylinder, a top plate is installed at the other port of the second cylinder, and a through hole is formed in the top plate; a ball screw lifter and a stabilizer are mounted on the base plate, the ball screw lifter is provided with a screw nut, a first supporting plate is mounted on the screw nut, and the first supporting plate is connected with a first barrel; the stabilizer comprises a second vertical plate, a guide plate is arranged on the second vertical plate, a sliding block is arranged on the guide plate in a matched mode, a second supporting plate is installed on the sliding block, and the second supporting plate is connected with the first cylinder. And an in-place sensor is arranged on the second vertical plate. The first barrel is stably driven through the ball screw, so that material taking and discharging are more stable.

Description

Technical Field

[0001] The invention belongs to the technical field of robot drive, and in particular relates to a wafer robot lifting actuator. Background Art

[0002] At present, there is a strong demand for semiconductor production in the domestic market. In the processes of silicon wafer sorting and transfer, there is a need for equipment to lift manipulators. In response to the needs of lifting to different heights, a wafer manipulator lifting actuator is specially invented to solve the stability of the wafer manipulator during lifting operation, and is used to lift large-load manipulators. Summary of the invention

[0003] The purpose of the present invention is to provide a wafer robot lifting actuator.

[0004] The present invention is achieved through the following technical solutions:

[0005] The present invention is a wafer robot lifting actuator, comprising a second cylinder and a first cylinder, wherein a base plate is installed at one end of the second cylinder, and a top plate is installed at the other end, and a through hole is opened on the top plate:

[0006] The first cylinder is slidably matched with the through hole;

[0007] A ball screw lifter and a stabilizer are installed on the base plate, the ball screw lifter has a screw nut, a first support plate is installed on the screw nut, and the first support plate is connected to the first cylinder;

[0008] The stabilizer comprises a second vertical plate, a guide plate is arranged on the second vertical plate, a slider is matched on the guide plate, a second support plate is mounted on the slider, and the second support plate is connected to the first cylinder;

[0009] The second vertical plate is provided with an in-position sensor.

[0010] Furthermore, the sliding block is a "U"-shaped plate, convex strips are arranged on both sides of the guide plate, and sliding grooves corresponding to the convex strips are opened on the inner wall of the "U"-shaped plate.

[0011] Furthermore, a row of waist holes is provided on the side of the second vertical plate, and the in-position sensors are installed at the waist holes by means of bolts.

[0012] Furthermore, at least two in-position sensors are installed on a second vertical plate.

[0013] Furthermore, the top end of the second vertical plate is connected to the top plate by bolts, and corresponding limiting plates are provided on the second supporting plate and the top plate.

[0014] Furthermore, it also includes a first vertical plate, both ends of which are installed with right-angle plates, and the base plate and the top plate are respectively connected to the right-angle plate by bolts.

[0015] Furthermore, the ball screw lifter also includes a base, a screw and a connecting plate. The connecting plate has a central hole. The two ends of the screw are smooth rod sections. Bearings are installed on the base and the connecting plate. The two smooth rod sections are respectively matched with the inner rings of the bearings. The connecting plate is connected to the top plate by bolts, and the base is installed on the base plate.

[0016] Furthermore, the motor is mounted on the base plate via a motor seat, a driven wheel is provided at the end of the screw rod, a driving wheel is mounted on the output shaft of the motor, and the driving wheel and the driven wheel are connected via a belt.

[0017] Furthermore, a flange ring is provided on the screw nut, the first support plate has a central hole, a circle of screw holes is formed on the first support plate, and the first support plate is connected to the flange ring by bolts.

[0018] Furthermore, two stabilizers are provided on the base plate, and the ball screw lifter and the two stabilizers are arranged in a triangle on the base plate.

[0019] The present invention has the following beneficial effects:

[0020] The ball screw mechanism of the present invention is controlled by a motor driven by a belt, and the lifting position can be controlled programmably; the lifting is controllable, and the range within the effective lifting stroke can be accurately reached, and the lifting speed acceleration and deceleration can be controlled. An in-position sensor and a limit plate driving stroke feedback are provided to ensure the stability and accuracy of the manipulator when taking and placing materials.

[0021] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for describing the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0023] Figure 1 It is the structural diagram of the actuator;

[0024] Figure 2 Schematic diagram of the internal structure of the actuator;

[0025] Figure 3 The structural distribution diagram of the ball screw lifter, the first vertical plate and the stabilizer in the actuator;

[0026] Figure 4 is a schematic diagram of the structure of the first vertical plate and the stabilizer;

[0027] Figure 5 It is a structural schematic diagram of a ball screw lifter;

[0028] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0029] 1. First cylinder; 2. Second cylinder; 3. Top plate; 4. Base plate; 5. Ball screw lifter; 6. Motor; 7. First vertical plate; 8. Stabilizer; 501. Connecting plate; 502. First support plate; 503. Base; 504. Driven wheel; 505. Bearing; 506. Belt; 507. Screw; 508. Screw nut; 601. Motor seat; 701. Right-angle plate; 801. In-position sensor; 802. Waist hole; 803. Slider; 804. Guide plate; 805. Limit plate; 806. Second support plate; 807. Second vertical plate. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] In the description of the present invention, it should be understood that the terms "opening", "upper", "lower", "thickness", "top", "middle", "length", "inside", "all around" and the like indicating orientation or positional relationship are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0032] See also Figure 1-5 As shown, the present invention is a wafer manipulator lifting actuator, which is used as an actuator of the manipulator. It is mainly used to lift the product off the jig table and lower the product to the jig table when the manipulator takes and places materials. It is mainly used in semiconductor clean room silicon wafer sorting and packaging box transfer equipment.

[0033] A base plate 4 is installed at one end of the second cylinder 2, and a top plate 3 is installed at the other end. Specifically, the second cylinder 2, the base plate 4 and the top plate 3 are connected by bolts to form a barrel with an open top. The opening is matched with the first cylinder 1, and the first cylinder 1 telescopes at the barrel under the action of the lifter.

[0034] Specifically, a first vertical plate 7 is also installed on the base plate 4, and right-angle plates 701 are installed at both ends of the first vertical plate 7. The base plate 4 and the top plate 3 are respectively connected to the right-angle plates 701 by bolts. The base plate 4 and the top plate 3 are supported by the first vertical plate 7 to enhance the stability of the second cylinder 2, the base plate 4 and the top plate 3.

[0035] A stabilizer 8 and a ball screw lifter 5 are further provided in the second cylinder 2 , wherein two stabilizers 8 are provided, and the ball screw lifters 5 and the two stabilizers 8 are arranged in a triangle on the base plate 4 .

[0036] Specifically, the ball screw lifter 5 also includes a base 503, which includes a plate and four L-shaped legs. A hole is opened in the middle of the plate, and a bearing 505 is installed in the hole. The four L-shaped legs are fixed to the base plate 4 by bolts.

[0037] The ball screw lifter 5 also includes a screw 507 and a screw nut 508. The two ends of the screw 507 are smooth rod sections. The smooth rod at one end is fitted on the bearing 505 of the base 503, and a driven wheel 504 is installed on the end extending into the base 503. The other end of the screw 507 is provided with a connecting plate 501 connected to the top plate 3. Specifically, the connecting plate 501 has a central hole, in which a bearing 505 is installed. The connecting plate 501 has screw holes and is fixed to the lower surface of the top plate 3 by bolts.

[0038] In addition, a flange ring is provided on the screw nut 508, the first support plate 502 has a central hole, the screw 507 is located in the central hole, a circle of screw holes is opened on the first support plate 502, the first support plate 502 is connected to the flange ring by bolts, the first support plate 502 is installed on the screw nut 508, the first support plate 502 is connected to the first cylinder 1, the motor 6 is installed on the base plate 4 through the motor seat 601, a driven wheel 504 is provided at the end of the screw 507, a driving wheel is installed on the output shaft of the motor 6, and the driving wheel and the driven wheel 504 are connected by a belt 506.

[0039] Preferably, the first support plate 502 is provided with an arc-shaped step, a screw hole is opened on the step surface, and a positioning pin is provided on the step surface. Correspondingly, the first cylinder 1 is provided with a corresponding screw hole and a pin hole on the end surface. The motor 6 drives the screw 507 to rotate and drive the screw nut 508, so that the first support plate 502 lifts the first cylinder 1.

[0040] In addition, the lifting of the first cylinder 1 is limited and monitored by the stabilizer 8 .

[0041] Specifically, the stabilizer 8 includes a second vertical plate 807, a row of waist holes 802 are provided on the side of the second vertical plate 807, and the in-place sensor 801 is installed at the waist hole 802 by bolts. At least two in-place sensors 801 are installed on the second vertical plate 807, and the position of the in-place sensor 801 on the row of waist holes 802 can be adjusted according to actual needs.

[0042] Preferably, two in-position sensors 801 are installed on the second vertical plate 807 to monitor the working positions of the first cylinder 1 when it reaches the top and resets, that is, to monitor the positions of both ends of a working stroke of the first cylinder 1.

[0043] A guide plate 804 is provided on the second vertical plate 807, and a slider 803 is matched on the guide plate 804. A second support plate 806 is installed on the slider 803, and the second support plate 806 is connected to the first cylinder 1. Preferably, both sides of the guide plate 804 are provided with limiting convex strips, and the slider 803 is a "U"-shaped plate, and the inner sides of the two arms of the "U"-shaped plate are provided with notches corresponding to the limiting convex strips;

[0044] Furthermore, the sliding block 803 is a "U"-shaped plate, convex strips are provided on both sides of the guide plate 804, and sliding grooves corresponding to the convex strips are opened on the inner wall of the "U"-shaped plate.

[0045] Furthermore, the top of the second vertical plate 807 is connected to the top plate 3 by bolts, and corresponding limit plates 805 are provided on the second support plate 806 and the top plate 3. When the first cylinder 1 reaches the maximum stroke point of the design, the two limit plates 805 offset each other to control the working stroke of the manipulator.

[0046] Preferably, a right-angle plate 701 for connecting to the top plate 3 is provided at the end of the second vertical plate 807 .

[0047] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0048] The preferred embodiments of the present invention disclosed above are only used to help illustrate the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A wafer robot lifting actuator, characterized in that: include: A second cylinder (2), wherein a base plate (4) is installed at one end of the second cylinder (2), and a top plate (3) is installed at the other end, wherein a through hole is opened on the top plate (3): A first cylinder (1), the first cylinder (1) being slidably fitted in the through hole; A ball screw lifter (5) and a stabilizer (8) are mounted on the base plate (4); the ball screw lifter (5) has a screw nut (508); a first support plate (502) is mounted on the screw nut (508); and the first support plate (502) is connected to the first cylinder (1); The stabilizer (8) comprises a second vertical plate (807), a guide plate (804) is provided on the second vertical plate (807), a slider (803) is matched on the guide plate (804), a second support plate (806) is installed on the slider (803), and the second support plate (806) is connected to the first cylinder (1); The second vertical plate (807) is provided with an in-position sensor (801).

2. A wafer robot lifting actuator according to claim 1, characterized in that: The sliding block (803) is a "U"-shaped plate, and convex strips are arranged on both sides of the guide plate (804), and a sliding groove corresponding to the convex strips is opened on the inner wall of the "U"-shaped plate.

3. The wafer robot lifting actuator according to claim 1, characterized in that: A row of waist holes (802) are provided on the side of the second vertical plate (807), and the in-position sensor (801) is installed at the waist hole (802) by means of bolts.

4. The wafer robot lifting actuator according to claim 2, characterized in that: At least two in-position sensors (801) are installed on the second vertical plate (807).

5. A wafer robot lifting actuator according to any one of claims 1 to 4, characterized in that: The top end of the second vertical plate (807) is connected to the top plate (3) via bolts, and corresponding limit plates (805) are provided on the second supporting plate (806) and the top plate (3).

6. The wafer robot lifting actuator according to claim 5, characterized in that: It also comprises a first vertical plate (7), both ends of which are provided with right-angle plates (701), and the base plate (4) and the top plate (3) are respectively connected to the right-angle plates (701) by bolts.

7. The wafer robot lifting actuator according to claim 1, characterized in that: The ball screw lifter (5) also includes a base (503), a screw rod (507) and a connecting plate (501), wherein the connecting plate (501) has a central hole, and both ends of the screw rod (507) are bare rod sections. Bearings (505) are installed on the base (503) and the connecting plate (501), and the two bare rod sections are respectively matched with the inner rings of the bearings (505). The connecting plate (501) is connected to the top plate (3) by bolts, and the base (503) is installed on the base plate (4).

8. The wafer robot lifting actuator according to claim 7, characterized in that: It also includes a motor (6), which is mounted on the base plate (4) via a motor seat (601), a driven wheel (504) is provided at the end of the screw rod (507), a driving wheel is installed on the output shaft of the motor (6), and the driving wheel and the driven wheel (504) are connected via a belt (506).

9. A wafer robot lifting actuator according to claim 7 or 8, characterized in that: The screw nut (508) is provided with a flange ring, the first support plate (502) has a central hole, a circle of screw holes is opened on the first support plate (502), and the first support plate (502) is connected to the flange ring by bolts.

10. The wafer robot lifting actuator according to claim 1, characterized in that: Two stabilizers (8) are provided on the base plate (4), and the ball screw lifter (5) and the two stabilizers (8) are arranged in a triangle on the base plate (4).

Images