Device for changing light transmittance of semiconductor quartz ring and processing method

By designing a processing device for quartz rings, and using a conveyor pipe to recover the filtered silicon carbide fine powder into the storage box, the problems of waste of resources and high production costs in the prior art are solved, and efficient utilization of resources and reduction of production costs are achieved.

CN119871696APending Publication Date: 2025-04-25FERROTEC (JIANGSU) QUARTZ TECH CO LTD

Patent Information

Application Number
CN202411976996.X
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-30
Publication Date
2025-04-25

AI Technical Summary

Technical Problem

In the prior art, the transmittance changing device of the quartz ring is not provided with a silicon carbide micropowder recovery mechanism, resulting in a high resource waste rate and an increase in production costs.

Method used

A device including the fuselage and the storage box is designed, the storage box is installed by screw positioning, and a feed pipe and a spray head are provided on the top and bottom of the storage box. The filtered and screened silicon carbide fine powder is transported back to the storage box by using the first conveying pipe, the second conveying pipe and the third conveying pipe, and recycled use is achieved.

Benefits of technology

By recycling and reuse of silicon carbide powder, the resource waste rate is reduced, production costs are reduced, and the practicality of the processing process is improved.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention discloses a device for changing the light transmittance of a semiconductor quartz ring and a machining method, and belongs to the technical field of quartz ring light transmittance machining, the device comprises a machine body and a storage box, the storage box is positioned and installed on the outer side of the top of the machine body through screws, and the device further comprises a first conveying pipe installed on the left side of the machine body; and a second conveying pipe penetrates through the right side of the bottom of the first conveying pipe in a slotted and sealed manner. According to the device for changing the light transmittance of the semiconductor quartz ring and the processing method, a second conveying pipe is arranged, a groove is formed in the left side of the bottom of a machine body to penetrate through the second conveying pipe, and then the left end of the second conveying pipe penetrates through the machine body to extend to the inner side of the bottom of a first conveying pipe; at the moment, the recycled and filtered silicon carbide micro powder can be rotationally conveyed by rotating the first auger rod, and then the recycled silicon carbide micro powder can be conveyed into the material storage box again through the feeding pipe through an inclined third conveying pipe.
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Description

Technical Field

[0001] The invention relates to the technical field of quartz ring transmittance processing, in particular to a device and a processing method for changing the transmittance of a semiconductor quartz ring. Background Art

[0002] Quartz is the most widely distributed mineral in the quartz family. Its main component is SiO2, which is colorless and transparent. It often contains a small amount of impurities and becomes translucent or opaque crystals with a hard texture. Quartz ring refers to the product processed with quartz as raw material.

[0003] Because quartz rings have the advantages of good mechanical stability, strong chemical stability, extremely low thermal expansion coefficient and high-quality optical properties, they are widely used in the semiconductor industry, optical industry, chemical industry, metallurgical industry, power industry and petroleum industry.

[0004] At present, the market usually adopts the method of doping other elements in quartz or coating sintering to change the transmittance. The method of doping other elements in quartz is not suitable for raw material processing and is inflexible. There is also the problem of deformation of the quartz ring caused by fire polishing, which reduces the practicality of the device.

[0005] In order to overcome the above defects, prior art 1 (application number CN202223524158.8, Chinese patent with application date of 2022-12-28) is a polishing device for a quartz glass tube, which realizes the automation of the polishing device through the automatic operation of the rotating part and the sliding part, saves manpower, improves work efficiency, and improves the working environment of the operators; the overall device realizes automation, improves work efficiency, and adapts to large-scale operations;

[0006] There is also prior art 2 (application number CN202223028775.9, Chinese patent application date 2022-11-15) in a high-transmittance quartz tube preparation device, through the cooperation of the rotating plate, the first threaded frame, the connecting device, the connecting rod and the cleaning cotton, the first threaded frame is rotated to move the transmission disk, and as the transmission disk moves, the cleaning cotton is in close contact with the inner wall of the quartz tube, and the cleaning cotton rotates with the rotation of the rotating plate, thereby completing the cleaning of the inner wall of the quartz tube;

[0007] And prior art 3 (Chinese patent with application number CN202022551713.0 and application date 2020-11-07) is a high-efficiency processing device for a quartz ring, in which a grinding motor drives a grinding disc to drive a grinding wheel to rotate, and then a lifting cylinder is used to drive the grinding wheel to the inner circle of the quartz ring, so as to achieve effective grinding of the inner circle surface of the quartz ring;

[0008] Although the prior art can realize the polishing and grinding of the quartz ring so that the later detection component can detect the light transmittance of the quartz ring, which is more practical, compared with the traditional processing device, the purpose of changing the light transmittance can be achieved by flushing the surface of the quartz ring with silicon carbide micropowder, but the traditional processing device does not have a silicon carbide micropowder recovery mechanism to recycle and reuse the processed silicon carbide micropowder, which will increase the waste rate of resources and increase production costs;

[0009] Therefore, we propose a device and a processing method for changing the light transmittance of a semiconductor quartz ring in order to solve the above-mentioned problems. Summary of the invention

[0010] The purpose of the present invention is to provide a device and a processing method for changing the transmittance of a semiconductor quartz ring, so as to solve the problem raised in the above background technology that the traditional processing devices on the market currently do not have a silicon carbide micropowder recovery mechanism to recycle and reuse the processed silicon carbide micropowder, thereby increasing the waste rate of resources and increasing production costs.

[0011] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a device and processing method for changing the light transmittance of a semiconductor quartz ring, comprising a body and a material storage box, wherein the material storage box is fixedly mounted on the top outer side of the body by screws, and a feed pipe is installed through a slotted seal on the left side of the top of the material storage box, and a nozzle is connected to the bottom of the material storage box through a pipeline seal, and the nozzle is arranged on the top inner side of the body;

[0012] It also includes: a first delivery pipe is installed on the left side of the fuselage, and a second delivery pipe is installed through the right side slot of the bottom of the first delivery pipe, and the right end of the second delivery pipe is sealed and extended to the inner side of the bottom of the fuselage;

[0013] The third delivery pipe is installed in a sealing manner through a slot on the left side of the top of the first delivery pipe, and the third delivery pipe is in an inclined shape, and a feed pipe is correspondingly arranged at the bottom end of the third delivery pipe, a filter plate is installed through a slotted screw on the inner side of the bottom of the fuselage, and a nozzle is correspondingly arranged on the top of the filter plate, and the inner side of the bottom of the fuselage is in an inclined shape;

[0014] Detection components are positioned and installed at both ends of the fuselage, and the two detection components are symmetrically arranged about the vertical center line of the fuselage, and the two detection components are connected to an external centralized control system through a central processing module.

[0015] Preferably, a servo motor is positioned and installed on the right side of the bottom of the fuselage, and the output end of the servo motor is connected to a second rotating shaft. The second rotating shaft passes through the rotating mounting seat on the inner side of the bottom of the fuselage, and the left end of the second rotating shaft extends to the outer side of the left end of the fuselage.

[0016] Preferably, the left end of the second rotating shaft is meshedly connected to the first auger rod via a bevel gear set, and the first auger rod is rotatably installed inside the first conveying pipe.

[0017] Preferably, a second rotating rod is rotatably installed on the inner side of the bottom of the fuselage, and beating blocks are installed through both ends of the second rotating rod, and the top ends of the two beating blocks correspond to the two sides of the bottom of the filter plate. At the same time, the structures of the two filter plates are the same, and the outer side of the left end of the second rotating rod is connected to the second rotating shaft through the second transmission assembly.

[0018] Preferably, a rotating gear is installed through the left end of the second rotating rod, and the bottom of the rotating gear is meshedly connected with a driving gear, while the output end of the driving gear is connected through the second auger rod, and the second auger rod is rotatably installed inside the second conveying pipe.

[0019] Preferably, a first positioning clamp is rotatably installed inside the left side of the fuselage, and a second positioning clamp is correspondingly provided on the right side of the first positioning clamp, wherein the right end of the second positioning clamp is positioned and connected with a first rotating shaft, wherein the first positioning clamp and the second positioning clamp have the same structure.

[0020] Preferably, the first rotating shaft is rotatably installed inside the right side of the fuselage, and the right end of the first rotating shaft is connected to the output end of the servo motor through the first transmission assembly.

[0021] Preferably, an eccentric wheel is installed through the outer end of the first rotating shaft, and a lifting rod is closely connected to the top of the eccentric wheel, and the lifting rod is slidably installed on the right side of the fuselage through a return spring, and the top of the lifting rod is in an inverted "L" shape.

[0022] Preferably, the outer end of the lifting rod is slidably connected with an arc groove, and the arc groove is opened on the outside of the first rotating rod, and a row of stirring rods is arranged at the bottom of the first rotating rod, and a row of stirring rods is arranged inside the storage box.

[0023] Also disclosed is a method for processing the device:

[0024] Step 1: flushing: flushing the surface of the quartz ring with silicon carbide micropowder to change the transmittance;

[0025] Step 2, filtering and screening, filtering and screening impurities in the silicon carbide micropowder through a filter plate;

[0026] Step 3: Recycling and reusing: the filtered and screened silicon carbide powder is transported to the inside of the storage box again through the first conveying pipe, the second conveying pipe and the third conveying pipe for recycling;

[0027] Step 4, rotating the quartz ring, and driving the quartz ring clamped by the first positioning clamp and the second positioning clamp to flip by rotating the first rotating shaft, thereby expanding the flushing range of the quartz ring;

[0028] Step 5, stirring, the reciprocating lifting of the lifting rod drives a row of stirring rods arranged at the bottom end of the first rotating rod to stir the silicon carbide micropowder stored in the storage box in both directions.

[0029] Compared with the prior art, the present invention has the following beneficial effects:

[0030] (1) A second conveying pipe is provided, and the second conveying pipe is installed through the slot on the left side of the bottom of the fuselage, and then the left end of the second conveying pipe is extended through the fuselage to the bottom inner side of the first conveying pipe. At this time, the first auger rod is rotated to rotate and convey the recovered filtered silicon carbide micropowder, and then the recovered silicon carbide micropowder can be conveyed to the inside of the storage box through the feed pipe through the inclined third conveying pipe for later recycling and processing, thereby reducing the later production cost and having better practicality;

[0031] (2) Furthermore, a second rotating shaft is connected to the output end of the servo motor, and then the first auger rod is driven by a bevel gear set on the outer side of the left end of the second rotating shaft to rotate and transport materials. The second transmission component can also simultaneously drive the beating blocks installed at both ends of the second rotating rod to reciprocately beat the two ends of the bottom of the filter plate, thereby preventing impurities processed by the quartz ring from sticking to the surface of the filter plate and affecting the normal filtering and screening of the silicon carbide micropowder in the later stage, thereby improving the recovery and filtering effect of the silicon carbide micropowder and making the operation more time-saving and labor-saving;

[0032] (3) Furthermore, a rotating gear is installed through the outer side of the left end of the second rotating rod, and then a driving gear is meshed and connected at the bottom of the rotating gear. The driving gear meshed at the bottom of the rotating gear can be driven to rotate while the second rotating rod rotates, and then the rotating driving gear will also drive the second auger rod to rotate at the same time. The silicon carbide micropowder after filtering and screening can be stirred and transported by the second auger rod, so that the silicon carbide micropowder is prevented from accumulating at the bottom of the fuselage and affecting the subsequent filtering and screening, which is more practical.

[0033] (4) A first rotating shaft is provided, and the first rotating shaft is rotatably installed by penetrating a slot in the right side of the fuselage, and then a second positioning clamp is connected to the inner end of the first rotating shaft, and at the same time, a first positioning clamp is rotatably installed in the left side of the fuselage. After the first positioning clamp and the second positioning clamp clamp the quartz ring, the servo motor is started to drive the first rotating shaft to rotate through the first transmission component. At this time, the first rotating shaft can drive the first positioning clamp and the second positioning clamp to rotate simultaneously, thereby expanding the processing range of the quartz ring and improving the detection accuracy of the transmittance in the later stage;

[0034] (5) A lifting rod is provided. An eccentric wheel is installed through the outer end of the first rotating shaft, and then a lifting rod is connected to the top of the eccentric wheel. The eccentric wheel can be driven to squeeze the lifting rod to move back and forth through a reset spring while the first rotating shaft rotates. At this time, the lifting rod that moves back and forth will drive a row of stirring rods set at the bottom end of the first rotating rod to rotate back and forth through the arc groove, so as to better mix and stir the silicon carbide micropowder stored in the storage box, avoid the silicon carbide micropowder from agglomerating inside the storage box and affect the stable processing in the later stage, and the practicality is better. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0036] Figure 2 It is a schematic diagram of the main cross-section structure of the fuselage and the material storage box of the present invention;

[0037] Figure 3 It is a schematic diagram of the partial main cross-section structure of the fuselage of the present invention;

[0038] Figure 4 It is a schematic diagram of the three-dimensional structure of the first rotating shaft, the second rotating shaft and the lifting rod of the present invention;

[0039] Figure 5 For the present invention Figure 4 The enlarged structural diagram at A in the middle;

[0040] Figure 6 It is a schematic diagram of the three-dimensional structure of the fuselage and the lifting rod of the present invention from a side view;

[0041] Figure 7 For the present invention Figure 6 The enlarged structural diagram at B in the middle;

[0042] Figure 8 It is a schematic diagram of a partial three-dimensional structure of the first rotating rod and the lifting rod of the present invention;

[0043] Fig. 9 It is a schematic diagram of the partial three-dimensional structure after the first positioning clamp and the second positioning clamp of the present invention are turned over.

[0044] In the figure: 1. body; 2. storage box; 3. feed pipe; 4. nozzle; 5. first positioning clamp; 6. second positioning clamp; 7. first rotating shaft; 8. filter plate; 9. servo motor; 10. second rotating shaft; 11. bevel gear set; 12. first auger rod; 13. first conveying pipe; 14. second conveying pipe; 15. third conveying pipe; 16. first rotating rod; 17. lifting rod; 18. first transmission assembly; 19. eccentric wheel; 20. second transmission assembly; 21. second rotating rod; 22. beating block; 23. rotating gear; 24. driving gear; 25. second auger rod; 26. detection assembly; 27. reset spring; 28. arc groove; 29. ​​stirring rod. DETAILED DESCRIPTION

[0045] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0046] The present invention provides the following technical solutions:

[0047] Embodiment 1, in order to solve the problem that the conventional processing devices in the existing market are not provided with a silicon carbide powder recovery mechanism to recover and reuse the processed silicon carbide powder, thereby increasing the waste rate of resources and increasing production costs, discloses:

[0048] The fuselage 1 and the material storage box 2, wherein the material storage box 2 is fixedly mounted on the top outer side of the fuselage 1 by screws, and a feed pipe 3 is installed through the slotted seal on the left side of the top of the material storage box 2, and a nozzle 4 is connected to the bottom of the material storage box 2 through a pipeline seal, and the nozzle 4 is arranged on the top inner side of the fuselage 1;

[0049] The first delivery pipe 13 is installed on the left side of the fuselage 1, and a second delivery pipe 14 is installed through the right side slot at the bottom of the first delivery pipe 13, and the right end of the second delivery pipe 14 is sealed and extends to the inner side of the bottom of the fuselage 1;

[0050] The third delivery pipe 15 is installed in a slotted and sealed manner on the left side of the top of the first delivery pipe 13, and the third delivery pipe 15 is in an inclined shape, and the bottom end of the third delivery pipe 15 corresponds to the feed pipe 3, and the filter plate 8 is installed in the inner side of the bottom of the fuselage 1 by the slotted screws, and the top of the filter plate 8 corresponds to the nozzle 4, and the inner side of the bottom of the fuselage 1 is in an inclined shape;

[0051] Detection components 26 are positioned and installed at both ends of the fuselage 1, and the two detection components 26 are symmetrically arranged about the vertical center line of the fuselage 1, and the two detection components 26 are connected to an external centralized control system through a central processing module.

[0052] A servo motor 9 is positioned and installed on the right side of the bottom of the fuselage 1, and the output end of the servo motor 9 is connected to a second rotating shaft 10. The second rotating shaft 10 passes through the rotating mounting seat on the inner side of the bottom of the fuselage 1, and the left end of the second rotating shaft 10 extends to the outer side of the left end of the fuselage 1.

[0053] The left end of the second rotating shaft 10 is meshedly connected with a first auger rod 12 via a bevel gear set 11 , and the first auger rod 12 is rotatably mounted inside the first conveying pipe 13 .

[0054] A second rotating rod 21 is rotatably installed on the inner side of the bottom of the fuselage 1, and beating blocks 22 are installed through both ends of the second rotating rod 21, and the top ends of the two beating blocks 22 correspond to the two sides of the bottom of the filter plate 8. At the same time, the two filter plates 8 have the same structure, and the outer side of the left end of the second rotating rod 21 is connected to the second rotating shaft 10 through the second transmission assembly 20.

[0055] A rotating gear 23 is installed through the left end of the second rotating rod 21, and the bottom of the rotating gear 23 is meshedly connected with a driving gear 24. At the same time, a second auger rod 25 is connected through the output end of the driving gear 24, and the second auger rod 25 is rotatably installed inside the second conveying pipe 14.

[0056] like Figure 1-Figure 6 As shown, when the quartz ring needs to be processed, only the two ends of the quartz ring need to be clamped and positioned by the first positioning clamp 5 and the second positioning clamp 6 respectively. At this time, the transmittance of the clamped and positioned quartz ring is detected by two detection components 26, and the detection data is returned to the centralized control system. Then, the silicon carbide micropowder is transported from the storage box 2 to the nozzle 4 by compressed air, and the silicon carbide micropowder is sprayed out from the nozzle 4, which can reach 0.1-10Mpa. The processed silicon carbide micropowder can be filtered and screened on the filter plate 8, and the silicon carbide micropowder can be separated. The impurities are filtered on the surface of the filter plate 8, and then transported to the inside of the first conveying pipe 13 through the second conveying pipe 14 arranged on the left side of the bottom of the fuselage 1, and then the servo motor 9 is started to drive the second rotating shaft 10 to rotate, and then the first auger rod 12 meshingly connected to the bevel gear set 11 at the left end of the second rotating shaft 10 will rotate inside the first conveying pipe 13. At this time, the silicon carbide micropowder transported in can be transported again to the inside of the storage box 2 through the inclined third conveying pipe 15 and the feeding pipe 3 for reuse, saving production costs.

[0057] While the second rotating shaft 10 is rotating, the second transmission assembly 20 connected to its outside will simultaneously drive the beating blocks 22 installed at both ends of the second rotating rod 21 to perform reciprocating beating and vibration on the two ends of the bottom of the filter plate 8, so as to prevent impurities from sticking to the surface of the filter plate 8 and affecting the subsequent filtering and screening use, which is more practical. At the same time, the rotating gear 23 installed at the left end of the second rotating rod 21 will also simultaneously drive the second auger rod 25 connected to the output end of the driving gear 24 to rotate, so as to better transport the silicon carbide micropowder collected at the bottom of the fuselage 1 to the bottom inner side of the first conveying pipe 13 through the second conveying pipe 14, so as to prevent the silicon carbide micropowder from accumulating at the bottom of the fuselage 1 and affecting the subsequent filtering and screening, which is more practical.

[0058] After completing an operation, the centralized control system calls the two transmittance detection components 26 again to re-detect the transmittance of the quartz ring, and the detection data is returned to the centralized control system. Then the centralized control system will transport compressed air from the silicon carbide micropowder from the storage box 2 to the nozzle 4 to operate again, and repeat the cycle until the transmittance requirement is met.

[0059] Embodiment 2 is different from Embodiment 1 in that the first positioning clamp 5 and the second positioning clamp 6 can be driven to turn the quartz ring when the servo motor 9 is started, thereby expanding the processing range of the quartz ring and improving the detection accuracy of the later light transmittance.

[0060] A first positioning clamp 5 is rotatably installed inside the left side of the fuselage 1, and a second positioning clamp 6 is correspondingly installed on the right side of the first positioning clamp 5, wherein the right end of the second positioning clamp 6 is positioned and connected with a first rotating shaft 7, wherein the first positioning clamp 5 and the second positioning clamp 6 have the same structure.

[0061] The first rotating shaft 7 is rotatably installed inside the right side of the fuselage 1 , and the right end of the first rotating shaft 7 is connected to the output end of the servo motor 9 through the first transmission assembly 18 .

[0062] like Figure 1-Figure 9 As shown, when the servo motor 9 is started to rotate, the first transmission assembly 18 connected to the output end of the servo motor 9 will simultaneously drive the first rotating shaft 7 to rotate. At this time, the quartz ring clamped and positioned by the first positioning clamp 5 and the second positioning clamp 6 will also rotate simultaneously with the first rotating shaft 7, thereby expanding the processing range of the quartz ring and improving the detection accuracy of the later light transmittance.

[0063] Embodiment 3 is different from Embodiment 2 in that the lifting rod 17 can be driven to move reciprocatingly while the first rotating shaft 7 rotates, thereby driving a row of stirring rods 29 arranged at the bottom end of the first rotating rod 16 to mix and stir the silicon carbide micropowder stored in the storage box 2 to avoid the silicon carbide micropowder from agglomerating inside the storage box 2. The invention discloses:

[0064] An eccentric wheel 19 is installed through the outer end of the first rotating shaft 7, and a lifting rod 17 is closely connected to the top of the eccentric wheel 19. The lifting rod 17 is installed on the right side of the fuselage 1 through a return spring 27, and the top of the lifting rod 17 is in an inverted "L" shape.

[0065] The outer end of the lifting rod 17 is slidably connected with an arc groove 28, and the arc groove 28 is opened on the outside of the first rotating rod 16, and a row of stirring rods 29 is arranged at the bottom of the first rotating rod 16, and a row of stirring rods 29 is arranged inside the storage box 2.

[0066] like Figure 1-Figure 8 As shown, when the first rotating shaft 7 rotates, the eccentric wheel 19 installed through its outer end will also rotate at the same time, that is, the rotating eccentric wheel 19 can be used to drive the lifting rod 17 to make reciprocating lifting and lowering movements on the outside of the fuselage 1 through the return spring 27. Because the outer end of the lifting rod 17 is slidably connected with the first rotating rod 16 through the arc groove 28, a row of stirring rods 29 arranged at the bottom end of the first rotating rod 16 can be driven to perform forward stirring while the lifting rod 17 moves upward, and a row of stirring rods 29 arranged at the bottom end of the first rotating rod 16 can be driven to perform reverse stirring while the lifting rod 17 moves downward, so that the operation is more time-saving and labor-saving, and the silicon carbide micropowder can be prevented from agglomerating inside the storage box 2 and affecting the subsequent processing and use, thereby completing a series of tasks.

[0067] Also disclosed is a method for processing the device:

[0068] Step 1: flushing: flushing the surface of the quartz ring with silicon carbide micropowder to change the transmittance;

[0069] Step 2, filtering and screening, filtering and screening the impurities in the silicon carbide powder through the filter plate 8;

[0070] Step 3: Recycling and reusing: the filtered and screened silicon carbide powder is transported to the inside of the storage box 2 again through the first conveying pipe 13, the second conveying pipe 14 and the third conveying pipe 15 for recycling;

[0071] Step 4, rotating the quartz ring, and turning the first rotating shaft 7 to drive the quartz ring clamped by the first positioning clamp 5 and the second positioning clamp 6 to expand the flushing range of the quartz ring;

[0072] Step 5, stirring, the reciprocating lifting of the lifting rod 17 drives a row of stirring rods 29 arranged at the bottom end of the first rotating rod 16 to stir the silicon carbide powder stored in the storage box 2 in both directions.

[0073] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A device for changing the light transmittance of a semiconductor quartz ring, comprising a body (1) and a material storage box (2), wherein the material storage box (2) is fixedly mounted on the top outer side of the body (1) by means of screws, and a feed pipe (3) is installed through a slotted seal on the left side of the top of the material storage box (2), and a nozzle (4) is connected to the bottom of the material storage box (2) through a pipeline seal, and the nozzle (4) is arranged on the top inner side of the body (1); It is characterized in that Also includes: A first delivery pipe (13) is installed on the left side of the fuselage (1), and a second delivery pipe (14) is installed through a groove on the right side of the bottom of the first delivery pipe (13) and is sealed and penetrated, and the right end of the second delivery pipe (14) is sealed and penetrated to extend to the inner side of the bottom of the fuselage (1); A third conveying pipe (15) is sealed and installed in a groove on the left side of the top of the first conveying pipe (13), and the third conveying pipe (15) is in an inclined shape, and a feed pipe (3) corresponds to the bottom end of the third conveying pipe (15); A filter plate (8) is installed by slotted screws on the inner side of the bottom of the body (1), and a nozzle (4) is correspondingly provided on the top of the filter plate (8), and the inner side of the bottom of the body (1) is in an inclined shape; Detection components (26) are positioned and installed at both ends of the interior of the fuselage (1), and the two detection components (26) are symmetrically arranged about the vertical center line of the fuselage (1), and the two detection components (26) are connected to an external centralized control system through a central processing module.

2. The device for changing the light transmittance of a semiconductor quartz ring according to claim 1, characterized in that: A servo motor (9) is positioned and installed on the right side of the bottom of the fuselage (1), and the output end of the servo motor (9) is connected to a second rotating shaft (10). The second rotating shaft (10) passes through the rotating mounting seat on the inner side of the bottom of the fuselage (1), and the left end of the second rotating shaft (10) passes through and extends to the outer side of the left end of the fuselage (1).

3. The device for changing the light transmittance of a semiconductor quartz ring according to claim 2, characterized in that: The left end of the second rotating shaft (10) is meshedly connected to the first auger rod (12) via a bevel gear set (11), and the first auger rod (12) is rotatably mounted inside the first conveying pipe (13).

4. The device for changing the light transmittance of a semiconductor quartz ring according to claim 2, characterized in that: A second rotating rod (21) is rotatably mounted on the inner side of the bottom of the body (1), and beating blocks (22) are installed through both ends of the second rotating rod (21), and the top ends of the two beating blocks (22) correspond to the two sides of the bottom of the filter plate (8), and the two filter plates (8) have the same structure. The outer side of the left end of the second rotating rod (21) is connected to the second rotating shaft (10) through a second transmission assembly (20).

5. The device for changing the light transmittance of a semiconductor quartz ring according to claim 4, characterized in that: A rotating gear (23) is installed through the left end of the second rotating rod (21), and the bottom of the rotating gear (23) is meshedly connected with a driving gear (24), while the output end of the driving gear (24) is connected through the second auger rod (25), and the second auger rod (25) is rotatably installed inside the second conveying pipe (14).

6. The device for changing the light transmittance of a semiconductor quartz ring according to claim 1, characterized in that: A first positioning clamp (5) is rotatably mounted inside the left side of the fuselage (1), and a second positioning clamp (6) is correspondingly disposed on the right side of the first positioning clamp (5), wherein the right end of the second positioning clamp (6) is positioned and connected to a first rotating shaft (7), wherein the first positioning clamp (5) and the second positioning clamp (6) have the same structure.

7. The device for changing the light transmittance of a semiconductor quartz ring according to claim 6, characterized in that: The first rotating shaft (7) is rotatably mounted inside the right side of the fuselage (1), and the right end of the first rotating shaft (7) is connected to the output end of the servo motor (9) through a first transmission assembly (18).

8. The device for changing the light transmittance of a semiconductor quartz ring according to claim 7, characterized in that: An eccentric wheel (19) is installed through the outer end of the first rotating shaft (7), and a lifting rod (17) is closely connected to the top of the eccentric wheel (19), and the lifting rod (17) is installed on the right side of the fuselage (1) through a return spring (27) and is slidably installed, and the top of the lifting rod (17) is in an inverted "L" shape.

9. The device for changing the light transmittance of a semiconductor quartz ring according to claim 8, characterized in that: The outer end of the lifting rod (17) is slidably connected with an arc groove (28), and the arc groove (28) is opened on the outside of the first rotating rod (16), and a row of stirring rods (29) is arranged at the bottom of the first rotating rod (16), and the row of stirring rods (29) is arranged inside the storage box (2).

10. The device for changing the light transmittance of a semiconductor quartz ring according to claim 1, characterized in that: Also disclosed is a method for processing the device: Step 1: flushing: flushing the surface of the quartz ring with silicon carbide micropowder to change the transmittance; Step 2, filtering and screening, filtering and screening the impurities in the silicon carbide micropowder through a filter plate (8); Step 3: recycling and reusing, the filtered and screened silicon carbide powder is transported to the interior of the storage box (2) again through the first conveying pipe (13), the second conveying pipe (14) and the third conveying pipe (15) for recycling; Step 4, rotating the quartz ring, and driving the quartz ring clamped by the first positioning clamp (5) and the second positioning clamp (6) to flip by rotating the first rotating shaft (7), thereby expanding the flushing range of the quartz ring; Step 5, stirring, by reciprocating the lifting and lowering of the lifting rod (17), a row of stirring rods (29) arranged at the bottom end of the first rotating rod (16) are driven to stir the silicon carbide micropowder stored in the storage box (2) in both positive and negative directions.

Citation Information

Patent Citations

  • Efficient processing device for quartz ring

    CN213998851U

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    CN218486781U

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