Tapered carbon fiber hard felt and preparation method thereof

Abstract

The invention provides a tapered carbon fiber hard felt and a preparation method thereof, the tapered carbon fiber hard felt comprises at least two carbon fiber layers in the thickness direction, and the two adjacent carbon fiber layers have different carbon fiber arrangement modes and / or different carbon fiber types. According to the carbon fiber hard felt, the thermal insulation performance and the service life of the carbon fiber hard felt are improved through the arrangement mode and / or type change of all the layers of the carbon fiber hard felt; the device can be used for a semiconductor crystal growth furnace, and realizes the effects of homogenizing a thermal field, reducing electromagnetic loss and reducing self power consumption when the semiconductor crystal growth furnace is heated; a good heat preservation effect is achieved in the cooling process of the semiconductor crystal growth furnace, the cooling rate in the cooling process of the semiconductor crystal growth furnace is reduced, manual low-power heating for reducing the cooling rate is avoided, and power consumption is further reduced; and various application scenes of different semiconductor crystal growth furnace types under different process conditions can be met.

Description

Technical Field

[0001] The invention relates to the technical field of carbon fiber rigid felt, and in particular to a gradient carbon fiber rigid felt and a preparation method thereof. Background Art

[0002] Semiconductor crystal growth furnace is a high-temperature, high-tech, high-energy consumption equipment used for crystal growth. The performance of the carbon fiber felt used in the semiconductor crystal growth furnace directly affects the crystal growth rate and quality, and also has a great impact on energy consumption. Currently, the commonly used carbon fiber felts are mostly made of carbon fibers produced from the same raw materials and the carbon fibers are made using the same fiber arrangement method. The carbon fiber felt produced in this way can only solve the problem of excessive heating of the carbon fiber felt itself, or can only solve the problem of thermal insulation performance of the carbon fiber felt. It cannot solve the problem of excessive heating itself while having the required thermal insulation performance.

[0003] The Chinese invention patent with application number 202311108584.X discloses a carbon fiber thermal insulation hard felt with multiple densities and a processing technology, wherein the carbon fiber thermal insulation hard felt comprises a hard felt body; the hard felt body is provided with several layers of carbon fiber layers with different densities along its thickness direction or / and several layers of carbon fiber layers with different densities along a direction perpendicular to its thickness; multiple carbon fiber layers are connected to form the hard felt body. The carbon fiber thermal insulation hard felt of the invention is composed of carbon fiber layers with different densities, which can achieve different heat radiation resistance and wear resistance in different parts, thereby helping to improve the overall service life of the carbon fiber thermal insulation hard felt.

[0004] The Chinese invention patent application number 202010243101.7 discloses a method for preparing a carbon fiber hard felt with a density gradient. According to the requirements of different densities of each layer in the carbon fiber hard felt, the material and weight of the carbon fiber soft felt are selected, and then the soft felt is impregnated with resin, dried, each layer is sprayed with a special binder, hot pressed and cured, coated with a special surface treatment agent, and sintered at a high temperature in vacuum. Finally, multiple layers with different densities in the thickness direction can be obtained, and the density ranges from 0.12g / cm 3 -0.3g / cm 3 Density gradient, graphitized carbon fiber felt; this application has made structural improvements to the carbon fiber felt, and the carbon fiber felt layers of different densities are adapted to the temperature gradient of the thermal field in the furnace, and have good thermal insulation properties in the high temperature area, medium temperature area and low temperature area of ​​the thermal field.

[0005] The above existing technologies all improve the thermal insulation performance of the carbon fiber felt by making different parts of the carbon fiber felt have different densities, without considering the influence of the arrangement of the carbon fibers and the type of carbon fiber raw materials on the thermal insulation performance. Summary of the invention

[0006] In order to solve at least one of the above technical problems, the present invention provides a gradient carbon fiber hard felt and a preparation method thereof.

[0007] A first aspect of the present invention provides a gradient carbon fiber rigid felt, comprising at least two carbon fiber layers in a thickness direction, wherein two adjacent carbon fiber layers have different carbon fiber arrangements and / or different types of carbon fiber.

[0008] Preferably, the gradient carbon fiber hard felt comprises two adjacent carbon fiber layers, namely a first carbon fiber layer and a second carbon fiber layer, in a thickness direction.

[0009] Preferably, in any of the above schemes, the carbon fibers of the first carbon fiber layer are arranged in an orderly manner, the carbon fibers of the second carbon fiber layer are arranged in a disordered manner, and the carbon fibers of the first carbon fiber layer and the carbon fibers of the second carbon fiber layer are of the same type or different types.

[0010] Preferably, in any of the above schemes, the carbon fibers of the first carbon fiber layer are arranged in a disordered manner, the carbon fibers of the second carbon fiber layer are arranged in an ordered manner, and the carbon fibers of the first carbon fiber layer and the carbon fibers of the second carbon fiber layer are of the same type or different types.

[0011] Preferably, in any of the above schemes, the carbon fibers of the first carbon fiber layer are arranged in an orderly manner, the carbon fibers of the second carbon fiber layer are arranged in an orderly manner, and the carbon fibers of the first carbon fiber layer and the carbon fibers of the second carbon fiber layer are different types of carbon fibers.

[0012] Preferably, in any of the above schemes, the carbon fibers of the first carbon fiber layer are arranged in a disordered manner, the carbon fibers of the second carbon fiber layer are arranged in a disordered manner, and the carbon fibers of the first carbon fiber layer and the carbon fibers of the second carbon fiber layer are different types of carbon fibers.

[0013] Preferably, in any of the above schemes, the gradient carbon fiber hard felt also includes a third carbon fiber layer adjacent only to the second carbon fiber layer in the thickness direction, the third carbon fiber layer adopts an arrangement different from that of the second carbon fiber layer, and the carbon fibers of the third carbon fiber layer and the carbon fibers of the second carbon fiber layer adopt the same type or different types of carbon fibers.

[0014] Preferably, in any of the above schemes, the gradient carbon fiber hard felt also includes a third carbon fiber layer adjacent only to the second carbon fiber layer in the thickness direction, the third carbon fiber layer adopts the same arrangement as the second carbon fiber layer, and the carbon fibers of the third carbon fiber layer and the carbon fibers of the second carbon fiber layer adopt different types of carbon fibers.

[0015] In any of the above schemes, preferably, the density of the gradient carbon fiber hard felt is between 0.13 and 0.24 g / cm 3 within the range.

[0016] Preferably, in any of the above schemes, the same type of carbon fibers refer to fibers carbonized from the same raw material, including fibers cut into short fibers of various lengths; and the different types of carbon fibers refer to fibers carbonized from different raw materials, including fibers cut into short fibers of various lengths.

[0017] Preferably, in any of the above schemes, the raw material includes at least one of polyacrylonitrile, asphalt and viscose.

[0018] A second aspect of the present invention provides a method for preparing a gradient carbon fiber hard felt, which is used to prepare the gradient carbon fiber hard felt, comprising:

[0019] Step 1: Dispersing the carbon fibers used in the first carbon fiber layer according to the arrangement requirements and then adding them to the first layer of the mold to obtain the first carbon fiber layer;

[0020] Step 2: remove the outer mold of the first layer of the mold, roughen the outer layer of the first carbon fiber layer, disperse the carbon fibers used in the second carbon fiber layer according to the requirements of their arrangement, and then add them to the second layer of the mold to obtain the second carbon fiber layer; or disperse the carbon fibers used in the second carbon fiber layer according to the requirements of their arrangement, and then add them to the second layer of the mold to obtain the second carbon fiber layer;

[0021] Step 3: Remove the mold, pressurize and fix it according to the density requirements of the gradient carbon fiber hard felt, and then perform heat treatment.

[0022] Preferably, the preparation method also includes step 4: removing the outer mold of the second layer of the mold, roughening the outer layer of the second carbon fiber layer, dispersing the carbon fiber used in the third carbon fiber layer according to the requirements of its arrangement, and then adding it to the third layer of the mold to obtain the third carbon fiber layer; or, dispersing the carbon fiber used in the third carbon fiber layer according to the requirements of its arrangement, and then adding it to the third layer of the mold to obtain the third carbon fiber layer.

[0023] The gradient carbon fiber hard felt and the preparation method thereof of the present invention have the following beneficial effects:

[0024] 1. The thermal insulation performance of the carbon fiber felt is improved by changing the arrangement and / or type of each layer of the carbon fiber felt.

[0025] 2. It can be used in semiconductor crystal growth furnaces to achieve the effect of homogenizing the thermal field during heating of semiconductor crystal growth furnaces, reducing electromagnetic losses, and reducing its own power consumption.

[0026] 3. It can provide good heat preservation during the cooling process of the semiconductor crystal growth furnace, reduce the cooling rate during the cooling process of the semiconductor crystal growth furnace, avoid artificial low-power heating to reduce the cooling rate, and further reduce power consumption.

[0027] 4. The service life of the carbon fiber felt can be improved by changing the arrangement and / or type of each layer of the carbon fiber felt.

[0028] 5. It can meet various application scenarios of different semiconductor crystal growth furnace types under different process conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a schematic structural diagram of a preferred embodiment of the gradient carbon fiber rigid felt according to the present invention.

[0030] Figure 2 For the gradual change carbon fiber hard felt according to the present invention Figure 1 A schematic flow chart of the preparation method of the illustrated embodiment.

[0031] Figure 3 For the gradual change carbon fiber hard felt according to the present invention Figure 1 A schematic diagram of the mold structure used in the preparation method of the illustrated embodiment.

[0032] Figure 4 It is a schematic structural diagram of another embodiment of the gradient carbon fiber rigid felt according to the present invention.

[0033] Figure 5 For the gradual change carbon fiber hard felt according to the present invention Figure 4 A schematic flow chart of the preparation method of the illustrated embodiment.

[0034] Figure 6 For the gradual change carbon fiber hard felt according to the present invention Figure 4 A schematic diagram of the mold structure used in the preparation method of the illustrated embodiment.

[0035] Figure 7 The figure is a schematic flow chart of a method for preparing a gradient carbon fiber rigid felt according to another embodiment of the present invention.

[0036] Figure 8 It is a schematic flow chart of a preparation method of a fourth embodiment of the gradient carbon fiber rigid felt according to the present invention. DETAILED DESCRIPTION

[0037] In order to better understand the present invention, the present invention is described in detail below in conjunction with specific embodiments.

[0038] Example 1

[0039] A gradient carbon fiber hard felt comprises at least two carbon fiber layers in the thickness direction, wherein two adjacent carbon fiber layers have different carbon fiber arrangement modes and / or different types of carbon fiber.

[0040] In this embodiment, it is preferred that Figure 1 As shown, the gradient carbon fiber hard felt includes two adjacent carbon fiber layers in the thickness direction, a first carbon fiber layer 11 and a second carbon fiber layer 12. The carbon fibers of the first carbon fiber layer 11 are arranged in an orderly manner, and the carbon fibers of the second carbon fiber layer 12 are arranged in a disordered manner. The carbon fibers of the first carbon fiber layer 11 and the carbon fibers of the second carbon fiber layer 12 are of the same type.

[0041] It should be noted that the same type of carbon fiber refers to fibers carbonized from the same raw material, including fibers cut into short fibers of various lengths. In this embodiment, the carbon fibers of the first carbon fiber layer 11 and the carbon fibers of the second carbon fiber layer 12 are fibers carbonized from polyacrylonitrile. The density of the gradient carbon fiber felt is between 0.13 and 0.24 g / cm 3 within the range.

[0042] like Figure 2 As shown, a method for preparing a gradient carbon fiber hard felt, which is used to prepare the gradient carbon fiber hard felt described in this embodiment, comprises:

[0043] Step 1: The carbon fibers used in the first carbon fiber layer 11 are dispersed according to their arrangement, i.e., orderly arrangement requirements, and then added to the first layer of the mold to obtain the first carbon fiber layer 11;

[0044] Step 2: Remove the outer mold of the first layer of the mold, that is Figure 3 The outer mold 102 of the first layer of the mold shown in FIG. 1 is for the outer layer (ie, away from the outer layer) of the first carbon fiber layer 11. Figure 3 The inner core 101 of the mold is roughened, and the carbon fibers used in the second carbon fiber layer 12 are dispersed according to the arrangement mode, that is, the disordered arrangement mode, and then added to the second layer of the mold to obtain the second carbon fiber layer 12;

[0045] Step 3: Remove the mold, that is, remove Figure 3 The inner core 101 of the mold and the outer mold 103 of the second layer of the mold are made according to the density requirements of the gradient carbon fiber hard felt (0.13-0.24 g / cm 3 ), pressurized and fixed, and then heat treated.

[0046] Example 2

[0047] This embodiment is similar to the aforementioned embodiment 1, except that, in this embodiment, preferably, the carbon fibers of the first carbon fiber layer 11 and the carbon fibers of the second carbon fiber layer 12 are different types of carbon fibers.

[0048] It should be noted that the different types of carbon fibers refer to fibers carbonized from different raw materials, including fibers cut into short fibers of various lengths. In this embodiment, the carbon fibers of the first carbon fiber layer 11 and the carbon fibers of the second carbon fiber layer 12 are respectively made of polyacrylonitrile and asphalt carbonized fibers. The density of the gradient carbon fiber felt is between 0.13 and 0.24 g / cm 3 within the range.

[0049] Example 3

[0050] A gradient carbon fiber hard felt comprises at least two carbon fiber layers in the thickness direction, wherein two adjacent carbon fiber layers have different carbon fiber arrangement modes and / or different types of carbon fiber.

[0051] In this embodiment, it is preferred that the gradient carbon fiber hard felt comprises two adjacent carbon fiber layers in the thickness direction, namely a first carbon fiber layer 11 and a second carbon fiber layer 12. The carbon fibers of the first carbon fiber layer 11 are arranged in a disordered manner, and the carbon fibers of the second carbon fiber layer 12 are arranged in an ordered manner, and the carbon fibers of the first carbon fiber layer 11 and the carbon fibers of the second carbon fiber layer 12 are different types of carbon fibers.

[0052] In this embodiment, the carbon fibers of the first carbon fiber layer 11 and the carbon fibers of the second carbon fiber layer 12 are respectively made of viscose and asphalt carbonized fibers. The density of the gradient carbon fiber hard felt is between 0.13 and 0.24 g / cm 3 Within the enclosure.

[0053] A method for preparing a gradient carbon fiber hard felt, used to prepare the gradient carbon fiber hard felt described in this embodiment, comprising:

[0054] Step 1: The carbon fibers used in the first carbon fiber layer 11 are dispersed according to their arrangement, i.e., the disordered arrangement, and then added to the first layer of the mold to obtain the first carbon fiber layer 11;

[0055] Step 2: Remove the outer mold of the first layer of the mold, that is Figure 3 The outer mold 102 of the first layer of the mold shown in FIG. 1 is for the outer layer (ie, away from the outer layer) of the first carbon fiber layer 11. Figure 3 The inner core 101 of the mold is roughened, and the carbon fibers used in the second carbon fiber layer 12 are dispersed according to their arrangement, that is, the orderly arrangement, and then added to the second layer of the mold to obtain the second carbon fiber layer 12;

[0056] Step 3: Remove the mold, that is, remove Figure 3 The inner core 101 of the mold and the outer mold 103 of the second layer of the mold are made according to the density requirements of the gradient carbon fiber hard felt (0.13-0.24 g / cm 3 ), pressurized and fixed, and then heat treated.

[0057] Example 4

[0058] This embodiment is similar to the aforementioned embodiment 3, except that, in this embodiment, preferably, the carbon fibers of the first carbon fiber layer 11 are arranged in a disordered manner, the carbon fibers of the second carbon fiber layer 12 are arranged in an ordered manner, and the carbon fibers of the first carbon fiber layer 11 and the carbon fibers of the second carbon fiber layer 12 are of the same type.

[0059] In this embodiment, the carbon fibers of the first carbon fiber layer 11 and the carbon fibers of the second carbon fiber layer 12 are carbonized fibers of viscose. The density of the gradient carbon fiber hard felt is between 0.13 and 0.24 g / cm 3 Within the enclosure.

[0060] Example 5

[0061] A gradient carbon fiber hard felt comprises at least two carbon fiber layers in the thickness direction, wherein two adjacent carbon fiber layers have different carbon fiber arrangement modes and / or different types of carbon fiber.

[0062] In this embodiment, it is preferred that the gradient carbon fiber hard felt comprises two adjacent carbon fiber layers in the thickness direction, namely a first carbon fiber layer 11 and a second carbon fiber layer 12. The carbon fibers of the first carbon fiber layer 11 are arranged in an orderly manner, the carbon fibers of the second carbon fiber layer 12 are arranged in an orderly manner, and the carbon fibers of the first carbon fiber layer 11 and the carbon fibers of the second carbon fiber layer 12 are different types of carbon fibers.

[0063] In this embodiment, the carbon fibers of the first carbon fiber layer 11 and the carbon fibers of the second carbon fiber layer 12 are carbonized fibers of viscose and polyacrylonitrile, respectively. The density of the gradient carbon fiber hard felt is between 0.13 and 0.24 g / cm 3 within the range.

[0064] A method for preparing a gradient carbon fiber hard felt, used to prepare the gradient carbon fiber hard felt described in this embodiment, comprising:

[0065] Step 1: The carbon fibers used in the first carbon fiber layer 11 are dispersed according to the arrangement requirements and then added to the first layer of the mold to obtain the first carbon fiber layer 11;

[0066] Step 2: Dispersing the carbon fibers used in the second carbon fiber layer 12 according to the arrangement requirements and then adding them to the second layer of the mold to obtain the second carbon fiber layer 12;

[0067] Step 3: Remove the mold, that is, remove the Figure 3 The inner core 101 of the mold, the outer mold 102 of the first layer of the mold and the outer mold 103 of the second layer of the mold are pressurized and fixed according to the density requirements of the gradient carbon fiber hard felt, and then heat treated.

[0068] Example 6

[0069] This embodiment is similar to the aforementioned embodiment 5, except that, in this embodiment, preferably, the carbon fibers of the first carbon fiber layer 11 are arranged in a disordered manner, the carbon fibers of the second carbon fiber layer 12 are arranged in a disordered manner, and the carbon fibers of the first carbon fiber layer 11 and the carbon fibers of the second carbon fiber layer 12 are different types of carbon fibers.

[0070] In this embodiment, the carbon fibers of the first carbon fiber layer 11 and the carbon fibers of the second carbon fiber layer 12 are carbonized fibers of asphalt and polyacrylonitrile, respectively. The density of the gradient carbon fiber hard felt is between 0.13 and 0.24 g / cm 3 within the range.

[0071] Example 7

[0072] This embodiment is similar to the above-mentioned embodiment 1 and embodiment 2, except that, in this embodiment, it is preferred that Figure 4 As shown, the gradient carbon fiber hard felt also includes a third carbon fiber layer 13 adjacent only to the second carbon fiber layer 12 in the thickness direction, the third carbon fiber layer 13 is arranged in an orderly manner, and the carbon fibers of the third carbon fiber layer 13 and the carbon fibers of the second carbon fiber layer 13 are of the same type or different types.

[0073] like Figure 5 As shown, a method for preparing a gradient carbon fiber hard felt, which is used to prepare the gradient carbon fiber hard felt described in this embodiment, comprises:

[0074] Step 1: The carbon fibers used in the first carbon fiber layer 11 are dispersed according to the requirements of their arrangement, that is, in an orderly arrangement, and then added to the first layer of the mold to obtain the first carbon fiber layer 11;

[0075] Step 2: Remove the outer mold of the first layer of the mold, that is Figure 6 The outer mold 102 of the first layer of the mold shown in FIG. 1 is for the outer layer (ie, away from the outer layer) of the first carbon fiber layer 11. Figure 6The inner core 101 of the mold is roughened, and the carbon fibers used in the second carbon fiber layer 12 are dispersed according to the arrangement mode, that is, the disordered arrangement mode, and then added to the second layer of the mold to obtain the second carbon fiber layer 12;

[0076] Step 4: Remove the outer mold of the second layer of the mold, that is Figure 6 The outer mold 103 of the second layer of the mold shown in FIG. 1 is for the outer layer (ie, away from the outer layer) of the second carbon fiber layer 12. Figure 6 The inner core 101 of the mold is roughened, and the carbon fibers used in the third carbon fiber layer 13 are dispersed according to their arrangement, that is, the orderly arrangement, and then added to the third layer of the mold to obtain the third carbon fiber layer 13;

[0077] Step 3: Remove the mold, that is, remove Figure 6 The inner core 101 of the mold and the outer mold 104 of the third layer of the mold are pressurized and fixed according to the density requirements of the gradient carbon fiber hard felt, and then heat treated.

[0078] Example 8

[0079] This embodiment is similar to the aforementioned embodiment 1 and embodiment 2, except that, in this embodiment, preferably, the gradient carbon fiber hard felt also includes a third carbon fiber layer 13 adjacent only to the second carbon fiber layer 12 in the thickness direction, the third carbon fiber layer 13 is arranged in a disordered manner, and the carbon fibers of the third carbon fiber layer 13 and the carbon fibers of the second carbon fiber layer 13 are different types of carbon fibers.

[0080] The preparation method of the gradient carbon fiber hard felt in this embodiment can adopt the preparation method of the gradient carbon fiber hard felt in Example 7, and only adaptive adjustments need to be made.

[0081] Example 9

[0082] This embodiment is similar to the aforementioned embodiment 3 and embodiment 4, except that, in this embodiment, preferably, the gradient carbon fiber hard felt also includes a third carbon fiber layer 13 adjacent only to the second carbon fiber layer 12 in the thickness direction, and the third carbon fiber layer 13 is arranged in a disordered manner, and the carbon fibers of the third carbon fiber layer 13 and the carbon fibers of the second carbon fiber layer 13 are of the same type or different types.

[0083] like Figure 7 As shown, a method for preparing a gradient carbon fiber hard felt, which is used to prepare the gradient carbon fiber hard felt described in this embodiment, comprises:

[0084] Step 1: The carbon fibers used in the first carbon fiber layer 11 are dispersed according to the requirements of their arrangement, that is, in an orderly arrangement, and then added to the first layer of the mold to obtain the first carbon fiber layer 11;

[0085] Step 2: Dispersing the carbon fibers used in the second carbon fiber layer 12 according to the arrangement requirements and then adding them to the second layer of the mold to obtain the second carbon fiber layer 12;

[0086] Step 4: Dispersing the carbon fibers used in the third carbon fiber layer 13 according to the arrangement requirements and then adding them to the third layer of the mold to obtain the third carbon fiber layer 13;

[0087] Step 3: Remove the mold, that is, remove Figure 6 The inner core 101 of the mold, the outer mold 102 of the first layer of the mold, the outer mold 103 of the second layer of the mold and the outer mold 104 of the third layer of the mold are pressurized and fixed according to the density requirements of the gradient carbon fiber hard felt, and then heat treated.

[0088] Example 10

[0089] This embodiment is similar to the aforementioned embodiment 3 and embodiment 4, except that, in this embodiment, preferably, the gradient carbon fiber hard felt also includes a third carbon fiber layer 13 adjacent only to the second carbon fiber layer 12 in the thickness direction, and the third carbon fiber layer 13 is arranged in an orderly manner, and the carbon fibers of the third carbon fiber layer 13 and the carbon fibers of the second carbon fiber layer 13 are different types of carbon fibers.

[0090] like Figure 8 As shown, a method for preparing a gradient carbon fiber hard felt, which is used to prepare the gradient carbon fiber hard felt described in this embodiment, comprises:

[0091] Step 1: The carbon fibers used in the first carbon fiber layer 11 are dispersed according to the requirements of their arrangement, that is, in an orderly arrangement, and then added to the first layer of the mold to obtain the first carbon fiber layer 11;

[0092] Step 2: Remove the outer mold of the first layer of the mold, that is Figure 6 The outer mold 102 of the first layer of the mold shown in FIG. 1 is for the outer layer (ie, away from the outer layer) of the first carbon fiber layer 11. Figure 6 The inner core 101 of the mold is roughened, and the carbon fibers used in the second carbon fiber layer 12 are dispersed according to the arrangement mode, that is, the disordered arrangement mode, and then added to the second layer of the mold to obtain the second carbon fiber layer 12;

[0093] Step 4: Dispersing the carbon fibers used in the third carbon fiber layer 13 according to the arrangement requirements and then adding them to the third layer of the mold to obtain the third carbon fiber layer 13;

[0094] Step 3: Remove the mold, that is, remove Figure 6 The inner core 101 of the mold, the outer mold 103 of the second layer of the mold and the outer mold 104 of the third layer of the mold are pressurized and fixed according to the density requirements of the gradient carbon fiber hard felt, and then heat treated.

[0095] Embodiment 11

[0096] This embodiment is similar to the aforementioned embodiment 5, except that, in this embodiment, the gradient carbon fiber hard felt further includes a third carbon fiber layer 13 adjacent only to the second carbon fiber layer 12 in the thickness direction, the third carbon fiber layer 13 is arranged in an orderly manner, and the carbon fibers of the third carbon fiber layer 13 and the carbon fibers of the second carbon fiber layer 13 are of different types. Alternatively, the third carbon fiber layer 13 is arranged in a disordered manner, and the carbon fibers of the third carbon fiber layer 13 and the carbon fibers of the second carbon fiber layer 13 are of the same or different types.

[0097] In this embodiment, the preparation method of the gradient carbon fiber hard felt includes:

[0098] Step 1: The carbon fibers used in the first carbon fiber layer 11 are dispersed according to the requirements of their arrangement, that is, in an orderly arrangement, and then added to the first layer of the mold to obtain the first carbon fiber layer 11;

[0099] Step 2: Dispersing the carbon fibers used in the second carbon fiber layer 12 according to the arrangement requirements and then adding them to the second layer of the mold to obtain the second carbon fiber layer 12;

[0100] Step 4: Remove the outer mold of the second layer of the mold, that is Figure 6 The outer mold 103 of the second layer of the mold shown in FIG. 1 is for the outer layer (ie, away from the outer layer) of the second carbon fiber layer 12. Figure 6 The inner core 101 of the mold is roughened, and the carbon fibers used in the third carbon fiber layer 13 are dispersed according to their arrangement, that is, the orderly arrangement, and then added to the third layer of the mold to obtain the third carbon fiber layer 13;

[0101] Step 3: Remove the mold, that is, remove Figure 6 The inner core 101 of the mold, the outer mold 102 of the first layer of the mold and the outer mold 104 of the third layer of the mold are pressurized and fixed according to the density requirements of the gradient carbon fiber hard felt, and then heat treated.

[0102] Example 12

[0103] This embodiment is similar to the aforementioned embodiment 6, except that, in this embodiment, the gradient carbon fiber hard felt further includes a third carbon fiber layer 13 adjacent only to the second carbon fiber layer 12 in the thickness direction, the third carbon fiber layer 13 is arranged in a disordered manner, and the carbon fibers of the third carbon fiber layer 13 and the carbon fibers of the second carbon fiber layer 13 are of different types. Alternatively, the third carbon fiber layer 13 is arranged in an ordered manner, and the carbon fibers of the third carbon fiber layer 13 and the carbon fibers of the second carbon fiber layer 13 are of the same or different types.

[0104] Example 13

[0105] The gradient carbon fiber hard felt in Example 1 and the ordinary carbon fiber hard felt were respectively applied to an inductive semiconductor crystal growth furnace for a comparative experiment, and the electric power consumption of the inductive semiconductor crystal growth furnace was measured as shown in Table 1. It can be determined from Table 1 that the electric power consumption of the inductive semiconductor crystal growth furnace using the gradient carbon fiber hard felt in Example 1 is significantly reduced.

[0106] Table 1 Power consumption of inductive crystal growth furnace

[0107] Test 1 Test 2 Test 3 average Ordinary carbon fiber hard felt 29.2kw·h 29.6kw·h 28.8kw·h 29.2kw·h Gradient carbon fiber hard felt 24.7kw·h 24.4kw·h 24.1kw·h 24.4kw·h

[0108] The gradient carbon fiber hard felt in Example 7 and the ordinary carbon fiber hard felt were respectively applied to a resistive semiconductor crystal growth furnace for a comparative experiment. The electric power consumption of the resistive semiconductor crystal growth furnace was measured as shown in Table 2. It can be determined from Table 2 that the electric power consumption of the resistive semiconductor crystal growth furnace using the gradient carbon fiber hard felt in Example 7 is significantly reduced.

[0109] Table 2 Power consumption of resistance crystal growth furnace

[0110] Test 1 Test 2 Test 3 average Ordinary carbon fiber hard felt 29.6kw·h 29.2kw·h 29.4kw·h 29.4kw·h Gradient carbon fiber hard felt 26.0kw·h 25.6kw·h 26.1kw·h 25.9kw·h

[0111] The gradient carbon fiber hard felt in other embodiments is applied to an inductive / resistive semiconductor crystal growth furnace. Experimental verification shows that the power consumption of the inductive / resistive semiconductor crystal growth furnace using the gradient carbon fiber hard felt is significantly reduced.

[0112] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the above embodiments describe the present invention in detail, those skilled in the art should understand that they may modify the technical solutions recorded in the above embodiments, or replace some or all of the technical features therein with equivalents, and these replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the present invention.

Claims

1. A gradient carbon fiber hard felt, comprising at least two carbon fiber layers in the thickness direction, characterized in that: Two adjacent carbon fiber layers have different carbon fiber arrangements and / or different types of carbon fiber.

2. The gradient carbon fiber hard felt according to claim 1, characterized in that: The gradient carbon fiber hard felt comprises two adjacent carbon fiber layers, a first carbon fiber layer and a second carbon fiber layer, in a thickness direction.

3. The gradient carbon fiber hard felt according to claim 2, characterized in that: The carbon fibers of the first carbon fiber layer are arranged in an orderly manner, and the carbon fibers of the second carbon fiber layer are arranged in a disordered manner. The carbon fibers of the first carbon fiber layer and the carbon fibers of the second carbon fiber layer are of the same type or different types.

4. The gradient carbon fiber hard felt according to claim 2, characterized in that: The carbon fibers of the first carbon fiber layer are arranged in a disordered manner, and the carbon fibers of the second carbon fiber layer are arranged in an ordered manner. The carbon fibers of the first carbon fiber layer and the carbon fibers of the second carbon fiber layer are of the same type or different types.

5. The gradient carbon fiber hard felt according to claim 2, characterized in that: The carbon fibers of the first carbon fiber layer are arranged in an orderly manner, the carbon fibers of the second carbon fiber layer are arranged in an orderly manner, and the carbon fibers of the first carbon fiber layer and the carbon fibers of the second carbon fiber layer are different types of carbon fibers.

6. The gradient carbon fiber hard felt according to claim 2, characterized in that: The carbon fibers of the first carbon fiber layer are arranged in a disordered manner, the carbon fibers of the second carbon fiber layer are arranged in a disordered manner, and the carbon fibers of the first carbon fiber layer and the carbon fibers of the second carbon fiber layer are different types of carbon fibers.

7. The gradient carbon fiber hard felt as described in claims 3-6, characterized in that: The gradient carbon fiber hard felt also includes a third carbon fiber layer adjacent only to the second carbon fiber layer in the thickness direction. The third carbon fiber layer adopts an arrangement different from that of the second carbon fiber layer. The carbon fibers of the third carbon fiber layer and the carbon fibers of the second carbon fiber layer adopt the same type or different types of carbon fibers.

8. The gradient carbon fiber hard felt as described in claims 3-6, characterized in that: The gradient carbon fiber hard felt also includes a third carbon fiber layer adjacent only to the second carbon fiber layer in the thickness direction. The third carbon fiber layer adopts the same arrangement as the second carbon fiber layer, and the carbon fibers of the third carbon fiber layer and the carbon fibers of the second carbon fiber layer adopt different types of carbon fibers.

9. A method for preparing a gradient carbon fiber hard felt, characterized in that: Used to prepare the gradient carbon fiber hard felt according to any one of claims 1 to 8, comprising: Step 1: Dispersing the carbon fibers used in the first carbon fiber layer according to the arrangement requirements and then adding them to the first layer of the mold to obtain the first carbon fiber layer; Step 2: remove the outer mold of the first layer of the mold, roughen the outer layer of the first carbon fiber layer, disperse the carbon fibers used in the second carbon fiber layer according to the requirements of their arrangement, and then add them to the second layer of the mold to obtain the second carbon fiber layer; or disperse the carbon fibers used in the second carbon fiber layer according to the requirements of their arrangement, and then add them to the second layer of the mold to obtain the second carbon fiber layer; Step 3: Remove the mold, pressurize and fix it according to the density requirements of the gradient carbon fiber hard felt, and then perform heat treatment.

10. The method for preparing the gradient carbon fiber hard felt according to claim 9, characterized in that: The method also includes step 4: removing the outer mold of the second layer of the mold, roughening the outer layer of the second carbon fiber layer, dispersing the carbon fibers used in the third carbon fiber layer according to the requirements of their arrangement, and then adding them to the third layer of the mold to obtain the third carbon fiber layer; or, dispersing the carbon fibers used in the third carbon fiber layer according to the requirements of their arrangement, and then adding them to the third layer of the mold to obtain the third carbon fiber layer.

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