Miniature driving device and electronic equipment

Abstract

The invention belongs to the field of driving devices, and provides a micro driving device, which comprises a magnetic source component, at least one driving component, a driving component and a driving component, and is characterized in that the magnetic source component is provided with at least one accommodating cavity communicated with the outside; the micro-motion component is arranged at a communication port between the containing cavity and the outside, the micro-motion component comprises an energizable conductor located at the communication port, the energizable conductor and the magnetic source component generate interaction force during energization so as to drive the micro-motion component to deform, and deformation of the micro-motion component is used for driving the volume in the containing cavity to change. The invention further provides the electronic equipment. According to the invention, when gas or liquid is accommodated in the accommodating cavity, the output quantity of the gas or liquid can be controlled by controlling the magnitude or direction of the current connected to the conductor capable of being electrified, and the change control of the volume of the accommodating cavity can be simply, effectively, accurately and controllably realized through a simple structure and principle, so that the precision requirement is met; both the magnetic source component and the conductor capable of being electrified are easy to manufacture to be small in size and relatively low in cost, and can be applied to more precise and miniaturized use.

Description

Technical Field

[0001] The present invention belongs to the technical field of drive devices, and in particular relates to a micro drive device and an electronic device. Background Art

[0002] The driving device is an electronic device commonly seen in various fields, used to drive mechanical operation or drive the flow of media. Commonly seen driving devices include motor devices, piston devices, etc. If the driving devices such as motor devices and piston devices are produced smaller, the production cost will be high due to the limitations of production technology and cost, and the quality itself is relatively difficult to control. Moreover, if you want to achieve precise control of the driven material by the above-mentioned driving device, you need to make a more sophisticated design and manufacture of the driving device, which also requires higher costs.

[0003] At present, how to provide a driving device with a simpler structure, a smaller volume, a lower cost, and the ability to achieve simpler and more precise control is a technical problem that needs to be solved urgently in this field. Summary of the invention

[0004] The embodiment of the present invention provides a micro-driving device, aiming to solve the technical problem of how to provide a driving device with a simpler structure, a smaller volume, a lower cost and the ability to achieve simpler and more precise control.

[0005] The micro-driving device according to the embodiment of the present invention comprises:

[0006] A magnetic source component, wherein the magnetic source component is provided with at least one accommodating cavity communicating with the outside; and

[0007] A micro-motion component is arranged at a connecting port between the accommodating cavity and the outside world. The micro-motion component includes a conductor that can pass electricity and is located at the connecting port. When energized, the conductor can interact with the magnetic source component to drive the micro-motion component to deform. The deformation of the micro-motion component is used to drive the volume in the accommodating cavity to change.

[0008] Furthermore, the conductor capable of passing electricity is a conductive coil, and the micro-motion component further comprises:

[0009] A flexible film layer, wherein the flexible film layer covers the connecting port between the accommodating cavity and the outside world, the conductive coil is arranged on the flexible film layer, and the projection of the conductive coil on the flexible film layer at least partially overlaps with the projection of the connecting port on the flexible film layer. When the conductive coil is energized, an interaction force is generated between the conductive coil and the magnetic source component, thereby driving the flexible film layer to deform.

[0010] Furthermore, the conductive coil is located on a side of the flexible film layer opposite to the accommodating cavity or on a side opposite to the accommodating cavity.

[0011] Furthermore, at least one of the accommodating cavities in the magnetic source component has two opposite connecting ports, the micro-motion component includes at least two, and the two micro-motion components are respectively arranged at the two connecting ports. The electrically conductive conductors on the two micro-motion components generate an interaction force with the magnetic source component when energized, thereby driving the two micro-motion components to deform.

[0012] Furthermore, a pad is provided on the conductor capable of conducting electricity, and the pad is used for connecting to an external power source.

[0013] Furthermore, the micro-motion component further comprises:

[0014] A supporting substrate, the flexible film layer is arranged on the supporting substrate, the magnetic source component and the supporting substrate are respectively arranged on two opposite sides of the flexible film layer, the supporting substrate has a groove, and the projection of the conductive coil on the flexible film layer at least partially overlaps with the projection of the groove on the flexible film layer.

[0015] Furthermore, the support substrate is provided with a through hole passing through the support substrate, and the through hole is filled with a conductive connector. The support substrate includes a first surface and a second surface, the electrically conductive conductor is located on the first surface, and the second surface has a soldering pad. One end of the conductive connector is connected to the electrically conductive conductor, and the other end is connected to the soldering pad.

[0016] Furthermore, the magnetic source component comprises:

[0017] A carrier plate, the accommodating cavity is disposed on the carrier plate, and the micro-motion member is disposed at a communication port between the accommodating cavity and the outside; and

[0018] A magnetic induction body is arranged on a side of the carrier plate different from the micro-motion component.

[0019] Furthermore, the carrier plate is arranged in parallel with the supporting substrate, and there is an overlapping portion between the accommodating cavity and the groove.

[0020] Furthermore, the magnetic source component includes a magnet, and the magnet is used to generate a magnetic field to interact with the magnetic field generated by the conductor that can pass current, thereby driving the micro-motion component to deform.

[0021] Furthermore, the magnet is a U-shaped magnet or a ring-shaped magnet.

[0022] A micro-driving device according to another embodiment of the present invention comprises:

[0023] A first micro-motion component, the first micro-motion component comprises a first support and a first conductor capable of conducting electricity, the first support is provided with at least one first groove communicating with the outside, and the first conductor capable of conducting electricity is provided at a communication opening between the first groove and the outside;

[0024] a second micro-motion member, the second micro-motion member comprising a second support member and a second conductor capable of passing electricity, the second support member being provided with at least one second groove communicating with the outside, the second conductor capable of passing electricity being provided at a communication opening between the second groove and the outside; and

[0025] The isolating member is disposed between the first micro-motion member and the second micro-motion member, wherein the first electrically conductive conductor is disposed opposite to the second electrically conductive conductor, and the first electrically conductive conductor, the second electrically conductive conductor and the isolating member form a cavity.

[0026] A micro-driving device according to another embodiment of the present invention comprises:

[0027] a magnetic source member; and

[0028] The micro-motion component comprises a conductor that can be energized. When energized, the conductor generates an interaction force with the magnetic source component, thereby driving the micro-motion component to deform.

[0029] Furthermore, the magnetic source component and the micro-motion component together enclose at least a portion of a closed cavity, and the micro-motion component is deformed to change the volume of the closed cavity.

[0030] Furthermore, the micro-motion component includes a flexible film layer and a conductive circuit formed on the flexible film layer, the conductive circuit constitutes the conductor that can be energized, the flexible film layer is surrounded in a cylindrical shape, and the conductive circuit is surrounded in a spiral shape;

[0031] The magnetic source component includes a cylindrical magnet, and the cylindrical magnet is sleeved outside the cylindrical flexible film layer.

[0032] Furthermore, an elastic material is filled between the flexible film layer and the cylindrical magnet.

[0033] Furthermore, the closed cavity is used to contain gas or liquid.

[0034] An electronic device according to an embodiment of the present invention includes: a micro-driving device according to any one of the above items.

[0035] In the micro-drive device of the embodiment of the present invention, the energized conductor can generate electromagnetic induction with the magnetic source component when it is energized. In this way, the deformation amplitude or deformation direction of the micro-motion component can be controlled by controlling the current size or current direction of the energized conductor, thereby controlling the volume change in the accommodating chamber. When gas or liquid is placed in the accommodating chamber, the output of the gas or liquid can be controlled by controlling the current size or current direction of the energized conductor. This solution can simply, effectively, accurately and controllably realize the change control of the volume of the accommodating chamber through a simple structure and principle, thereby meeting the precision requirements of the micro-drive device. Moreover, both the magnetic source component and the energized conductor are easy to manufacture into a smaller volume and the cost is relatively low, so that the volume of the micro-drive device can be designed to be smaller, thereby being able to be used in more precise and miniaturized applications and meeting higher precision and controllable requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 is a cross-sectional schematic diagram of a micro-driving device according to an embodiment of the present invention;

[0037] Figure 2 is another cross-sectional schematic diagram of the micro-driving device according to an embodiment of the present invention;

[0038] Figure 3 is a cross-sectional schematic diagram of a micro-motion component according to an embodiment of the present invention;

[0039] Figure 4 is a schematic structural diagram of an energizable conductor according to an embodiment of the present invention;

[0040] Figure 5 is another cross-sectional schematic diagram of the micro-driving device according to an embodiment of the present invention;

[0041] Figure 6 is another cross-sectional schematic diagram of the micro-driving device according to an embodiment of the present invention;

[0042] Figure 7 is another cross-sectional schematic diagram of the micro-motion component according to an embodiment of the present invention;

[0043] Figure 8 is yet another cross-sectional schematic diagram of the micro-driving device according to an embodiment of the present invention;

[0044] Fig. 9 is a cross-sectional schematic diagram of a micro-driving device according to another embodiment of the present invention;

[0045] Fig.10 is a structural schematic diagram of a micro-motion component according to another embodiment of the present invention;

[0046] Fig.11 is a three-dimensional schematic diagram of a micro-motion component according to another embodiment of the present invention;

[0047] Fig.12 FIG. 4 is a three-dimensional schematic diagram of a micro-driving device according to another embodiment of the present invention.

[0048] Description of main component symbols:

[0049] Magnetic source component-10; accommodating cavity-11; cavity-11a; closed cavity-11b; carrier-12; magnetic induction body-13; micro-motion component-20; conductor-21 that can pass electricity; flexible film layer-22; pad-23; supporting substrate-24; groove-241; conductive connector-25; flexible sealing layer-26; first micro-motion component-30; first support member-31; first groove-311; first conductor-32 that can pass electricity; first flexible film layer-33; first flexible sealing layer-34; first conductive connector 35; first pad 36; second micro-motion component-40; second support member-41; second groove-411; second conductor-42 that can pass electricity; second flexible film layer-43; second flexible sealing layer-44; second conductive connector 45; second pad 46; isolation member-50; micro-drive device-100. DETAILED DESCRIPTION

[0050] In order to make the purpose, technical scheme and advantages of the present invention clearer, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention. In addition, it should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0051] In the description of the present invention, it is necessary to understand that the orientation or positional relationship indicated in the description of the direction and positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0052] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0053] The disclosure below provides many different embodiments or examples to realize different structures of the present invention. In order to simplify the disclosure of the present invention, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present invention. In addition, the present invention can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed. In addition, the examples of various specific processes and materials provided by the present invention, but those of ordinary skill in the art can be aware of the application of other processes and / or the use of other materials.

[0054] See also Figures 1 to 4 The micro-driving device 100 of the embodiment of the present invention comprises:

[0055] A magnetic source component 10, wherein the magnetic source component 10 is provided with at least one accommodating cavity 11 communicating with the outside; and

[0056] The micro-motion component 20 is arranged at the connecting port between the accommodating chamber 11 and the outside world. The micro-motion component 20 includes a conductor 21 that can pass electricity and is located at the connecting port. When energized, the conductor 21 interacts with the magnetic source component 10 to drive the micro-motion component 20 to deform. The deformation of the micro-motion component 20 is used to drive the volume in the accommodating chamber 11 to change.

[0057] In the micro-drive device 100 of the embodiment of the present invention, when the energized conductor 21 is energized, electromagnetic induction can be generated with the magnetic source component 10. In this way, the deformation amplitude or deformation direction of the micro-motion component 20 can be controlled by controlling the current magnitude or current direction of the energized conductor 21, thereby controlling the volume change in the accommodating chamber 11. When gas or liquid is contained in the accommodating chamber 11, the output amount of the gas or liquid can be controlled by controlling the current magnitude or current direction connected to the energized conductor 21.

[0058] This solution can simply, effectively, accurately and controllably realize the change control of the volume of the accommodating chamber 11 through a simple structure and principle, meeting the precision requirements of the micro-drive device 100. Moreover, both the magnetic source component 10 and the current-carrying conductor 21 are easy to manufacture into a smaller volume and the cost is relatively low, so that the volume of the micro-drive device 100 can be designed to be smaller, and can be applied in more precise and miniaturized use, and meet the requirements of higher precision and controllability.

[0059] The micro-drive device 100 of the embodiment of the present invention can be applied to equipment with high requirements on precision and volume, and can be used to accommodate gaseous media or liquid media, or to connect gas circuits or liquid circuits. For example, when the liquid circuit is connected, the micro-drive device 100 can be used for CPU chips (such as controllers of mobile phones, tablets, portable / smart wearable devices, etc.), computers, LED water-cooled radiators, liquid coolers, insulin delivery, spray equipment, etc., and can achieve heat dissipation, precise drug delivery, infusion spray, etc.; the micro-drive device 100 can be combined with a sensing device to form a dryer, automatic soap dispenser, etc.; when the gas circuit is connected, the micro-drive device 100 can also be used for a micro sphygmomanometer, etc.

[0060] Specifically, the magnetic source component 10 is a component of a magnetic field source compared to the micro-motion component 20, that is, the magnetic source component is a component that generates a magnetic field, and the micro-motion component 20 is placed in the magnetic field and can be subjected to the Ampere force to make corresponding movements. The magnetic source component 10 can be a component that has a magnetic field (magnetism) or can generate a magnetic field (magnetism) under certain circumstances (such as when powered on), for example, a permanent magnet, an electromagnet, a conductive coil or a superconducting magnet made of a magnetic material.

[0061] When the magnetic source component 10 is a whole magnetic part, such as a magnet, the accommodating cavity 11 is a cavity of the magnet itself; the magnetic source component 10 can also be a magnetic object that generates a magnetic field and other objects (non-magnetic objects) combined to form the magnetic source component 10. In this case, the accommodating cavity 11 can be a cavity on the other object, or it can be a cavity formed by the other object and the magnetic object together.

[0062] Since it is relatively difficult to set up the accommodating cavity 11 in the electromagnet or other magnetic source component 10 , or considering the cost, production difficulty and other issues, it is generally better to use a magnet as the magnetic source component 10 .

[0063] Based on the above description, the accommodating cavity 11 can be a spatial cavity that the magnetic source component 10 itself has, or it can be additionally opened in the magnetic source component 10 according to actual needs. Its shape can be relatively regular shapes such as cylinder, cube, rectangle, hemisphere or other regular polygons, and it has a relatively regular and sufficiently large connecting opening with the outside world, which is not easy to hinder the deformation and swing of the micro-motion component 20 relative to the accommodating cavity 11, and it is easier to change the volume of the accommodating cavity 11.

[0064] In the embodiment of the present invention, the micro-motion component 20 has a certain surface area and a certain softness, such as a sheet-like structure made of soft rubber or other materials, which not only has a sufficient area for driving the medium to flow, but also facilitates deformation.

[0065] The micro-motion component 20 is arranged on the magnetic source component 10 and shields the connection port between the accommodating cavity 11 and the outside world. The current-carrying conductor 21 generates a magnetic field when energized, which can form cross interference with the magnetic field of the magnetic source component 10 itself. The magnetic source component 10 itself will not deform, but the current-carrying conductor 21 deforms under the influence of the magnetic field, thereby driving the micro-motion component 20 to deform, so that the micro-motion component 20 can shake up and down, swing, etc. relative to the connection port, thereby affecting the volume change in the accommodating cavity 11. When the accommodating cavity 11 contains a medium, or when the accommodating cavity 11 is connected to a medium pipeline, the volume of the medium can be changed, thereby controlling the flow of the medium.

[0066] The magnetic source component 10 and the micro-motion component 20 both have planes. The micro-motion component 20 can be directly adhered to the magnetic source component 10, or fixed to the magnetic source component 10 by fasteners, or welded to the magnetic source component 10 by ultrasonic welding.

[0067] There is no specific limitation on the manner of disposing the fine-motion member 20 on the magnetic source member 10 , as long as the stability of the fine-motion member 20 can be ensured.

[0068] In one embodiment, the projection of the electrically conductive conductor 21 toward the magnetic source component 10 is slightly smaller than or equal to the connecting port between the accommodating cavity 11 and the outside, that is, the electrically conductive conductor 21 is not provided at the connection between the micro-motion component 20 and the magnetic source component 10. In this way, it can be ensured that the electrically conductive conductor 21 fully drives the micro-motion component 20 at the connecting port, and it can also be avoided that when the electrically conductive conductor 21 is provided at the connection between the micro-motion component 20 and the magnetic source component 10, the micro-motion component 20 may be split and detached from the magnetic source component 10 due to the deformation of the electrically conductive conductor 21.

[0069] In one embodiment, the current-carrying conductor 21 may only correspond to the connecting port, that is, the current-carrying conductor 21 has a relatively small driving amplitude on the micro-motion component 20, and then has a relatively small driving interference on the medium in the accommodating cavity 11, meeting the demand for less medium flow output.

[0070] In the embodiment of the present invention, there is at least one accommodating cavity 11. When there are multiple accommodating cavities 11, the multiple accommodating cavities 11 can be evenly distributed in the magnetic induction device, and the micro-motion member 20 can cover the range of the multiple accommodating cavities 11 to shield the multiple communication ports between the multiple accommodating cavities 11 and the outside world, and the volume changes of the multiple accommodating cavities 11 can be controlled simultaneously by a single micro-motion member 20. Alternatively, when there are multiple accommodating cavities 11, a micro-motion member 20 can be set corresponding to each accommodating cavity 11 for individual control, so as to enable the micro-drive device 100 to achieve more precise control specific to the individual.

[0071] In addition, for the case where there are multiple accommodating chambers 11: multiple accommodating chambers 11 can accommodate the same medium or be connected to the same type of pipeline, such as liquid or gas, to achieve multiple output controls of a single medium; or, multiple accommodating chambers 11 can also accommodate different media or be connected to different types of pipelines, and different accommodating chambers 11 drive different systems, such as a part of the accommodating chamber 11 can accommodate gas, and a part can accommodate liquid, etc., or they can be connected to gas circuits, liquid circuits, etc., respectively, so that the micro-drive device 100 can achieve control of different medium systems to meet different usage requirements.

[0072] It can be understood that since the magnitude of the magnetic field is positively correlated with the magnitude of the current, the greater the current connected to the current-carrying conductor 21, the greater the magnetic field generated by the current-carrying conductor 21, and the greater the electromagnetic induction between it and the magnetic source component 10, then the greater the deformation degree of the current-carrying conductor 21, the greater the deformation amplitude of the micro-motion component 20, and the greater the degree of driving the medium; the smaller the current connected to the current-carrying conductor 21, the smaller the magnetic field generated by the current-carrying conductor 21, and the smaller the electromagnetic induction between it and the magnetic source component 10, then the smaller the deformation degree of the current-carrying conductor 21, the smaller the deformation amplitude of the micro-motion component 20, and the smaller the degree of driving the medium.

[0073] Moreover, since the magnitude of the force applied to the micro-motion component 20 is related to the magnitude of the current, the direction of the current, the intensity of the magnetic field generated and the length (or coverage area) of the conductor 21, and the magnitude and direction of the current connected to the conductor 21 are accurately controllable, the conductor length of the conductor 21 is also controllable, and thus the intensity of the magnetic field generated by the conductor 21 is also controllable, and finally the deformation and swing of the micro-motion component 20 after being subjected to force is also controllable, and the impact on the volume of the accommodating cavity 11 is also accurately controllable, that is, the micro-driving device 100 of the embodiment of the present invention is accurately controllable in driving the medium, and can meet the control requirements of higher precision.

[0074] Furthermore, a pad 23 is provided on the current-carrying conductor 21, and the pad 23 is used to connect to an external power source. In this way, the external power source can be directly connected to the pad 23 and electrically connected, so that the power supply to the micro-drive device 100 can be realized.

[0075] Please continue reading Figures 1 to 7 Furthermore, the conductor 21 that can pass electricity is a conductive coil, and the micro-motion component 20 also includes:

[0076] The flexible film layer 22 covers the connecting port between the accommodating cavity 11 and the outside world. The conductive coil is arranged on the flexible film layer 22. The projection of the conductive coil on the flexible film layer 22 at least partially overlaps with the projection of the connecting port on the flexible film layer 22. When the conductive coil is energized, it interacts with the magnetic source component 10 to cause the flexible film layer 22 to deform.

[0077] Specifically, the conductive coil, as a conductive structure of metal material, is easy to manufacture into a desired shape, can cover the range of the connection port between the accommodating cavity 11 and the outside world, is also easy to deform, and has a certain structural strength, and can withstand multiple deformation and reset changes.

[0078] The conductive coil may be located on the side of the flexible film layer 22 opposite to the accommodating cavity 11 or on the side opposite to the accommodating cavity 11, that is, the conductive coil is not disposed in the flexible film layer 22 to ensure the structural integrity of the flexible film layer 22. Preferably, the conductive coil is located on the side of the flexible film layer 22 opposite to the accommodating cavity 11 to avoid being corroded and damaged by the medium in the accommodating cavity 11.

[0079] The flexible membrane layer 22 is the basic structural carrier of the micro-motion component 20. It can be a soft membrane made of soft rubber or other materials. It can not only carry the conductive coil, but also has good deformation ability, so as to effectively control the change of the volume of the accommodating cavity 11, and is not easily torn and damaged due to deformation.

[0080] The projection of the conductive coil on the flexible film layer 22 at least partially overlaps with the projection of the connecting port on the flexible film layer 22, that is, the conductive coil is at least partially located in the space corresponding to the connecting port, thereby driving the flexible film layer 22 there to deform when deformed, thereby controlling and intervening in the volume of the accommodating cavity 11.

[0081] In an embodiment of the present invention, in order to ensure the structural stability between the conductive coil and the flexible film layer 22, the conductive coil can be manufactured on the surface of the flexible film layer 22, so that the combination of the conductive coil and the flexible film layer 22 is tighter and more stable. There is no need to transfer and install the manufactured conductive coil to the surface of the flexible film layer 22, which also saves the manufacturing process of the micro-drive device 100.

[0082] In some embodiments, the conductive coil may be in the shape of a racetrack, a U-shaped or a spiral (eg Figure 4 As shown), it has a certain coverage area that can correspond to the connecting port, and its own deformation is relatively uniform, so the deformation driven by the micro-motion component 20 and the drive of the medium are also more uniform.

[0083] Exemplarily, the magnetic source component 10 can be a ring magnet, and the flexible film layer 22 is a soft rubber film. The ring magnet has S / N poles, and the current-carrying conductor 21 will also generate a magnetic field around it when it is energized. Based on the principle that like charges repel and opposite charges attract, the supporting flexible film layer 22 is flexible and can swing up and down under the action of the magnetic field, thereby encouraging the surrounding liquid or gas (i.e., medium) to flow.

[0084] Taking liquid as an example, the liquid can be used as a machine coolant. Through the micro-driving device 100, the coolant can flow continuously, thereby rapidly reducing the temperature of the covered area.

[0085] Furthermore, the micro-motion component 20 may also include a flexible sealing layer 26 that covers the conductive coil on the flexible film layer 22. The flexible sealing layer 26 can be directly attached to the flexible film layer 22, which can not only isolate the conductive coil from the outside world and ensure that it is not affected by water vapor corrosion, but also enhance the overall strength of the micro-motion component 20, reduce the bending wear of the conductive coil caused by deformation, and improve the service life of the micro-motion component 20.

[0086] At this time, a through hole can be opened on the flexible sealing layer 26 to the surface of the conductive coil, and a pad 23 can be made in the through hole to be used for electrical connection between the conductive coil and an external power source.

[0087] In one embodiment, the flexible sealing layer 26 can be made of PI (polyimide) material. As a high-performance engineering plastic, PI material can achieve better sealing and reinforcement effects, enhance the sealing protection effect of the conductor 21 that can carry electricity and the structural strength of the micro-motion component 20.

[0088] See also Figure 2 and Figure 6 Furthermore, at least one accommodating cavity 11 in the magnetic source component 10 has two opposite connecting ports, and the micro-motion components 20 include at least two, and the two micro-motion components 20 are respectively arranged at the two connecting ports. The conductors 21 that can pass electricity on the two micro-motion components 20 interact with the magnetic source component 10 when electricity is supplied, thereby driving the two micro-motion components 20 to deform.

[0089] Exemplarily, the accommodating cavity 11 may penetrate the magnetic source component 10 in the vertical direction of the magnetic source component 10, thereby having two connecting ports connected to the outside world, and the two connecting ports are arranged opposite to each other. In this way, when the two micro-motion components 20 are respectively arranged at the two connecting ports and the corresponding energized conductors 21 are energized, the two energized conductors 21 will both produce electromagnetic induction with the magnetic source component 10 and deform, and at the same time drive the two micro-motion components 20 to deform, thereby enhancing the stirring force of the accommodating cavity 11 and improving the driving force of the micro-drive device 100.

[0090] Taking the magnetic source component 10 as an annular magnet as an example, the accommodating cavity 11 is the through space of the annular magnet, and the two connecting ports are the openings at the S pole and N pole of the annular magnet respectively. At this time, the micro-motion component 20 can be directly attached to the upper and lower surfaces of the annular magnet to shield the two connecting ports.

[0091] See also Figure 8 Furthermore, the micro-motion component 20 further includes:

[0092] A supporting substrate 24, a flexible film layer 22 is arranged on the supporting substrate 24, the magnetic source component 10 and the supporting substrate 24 are respectively arranged on two opposite sides of the flexible film layer 22, and a groove 241 is provided on the supporting substrate 24, and the projection of the conductive coil on the flexible film layer 22 at least partially overlaps with the projection of the groove 241 on the flexible film layer 22.

[0093] In the embodiment of the present invention, the support substrate 24 can be a relatively thin and hard substrate. For example, the support substrate 24 can be a glass substrate with a relatively flat surface, which is convenient for setting the flexible film layer 22, making the structure of the micro-drive device 100 thinner and more regular.

[0094] The flexible film layer 22 can be directly attached to the supporting substrate 24 and cover the groove 241 on the supporting substrate 24. The projection of the wire coil on the flexible film layer 22 and the projection of the groove 241 on the flexible film layer 22 at least partially overlap, that is, the groove 241 can serve as an avoidance space for the deformation of the flexible film layer 22, so that the flexible film layer 22 can deform and swing normally.

[0095] In some embodiments, the cross-section of the groove 241 in the XZ axis direction may be in the shape of a triangle, a square, a rectangle, a semicircle, etc., as long as the connection between the groove 241 and the flexible film layer 22 does not affect the deformation and swing of the flexible film layer 22 .

[0096] Figure 8 Taking an isosceles trapezoid as an example, the trapezoid fits the trajectory of the flexible film layer 22 moving under the action of the magnetic field better and is less likely to hinder and affect the deformation of the flexible film layer 22 .

[0097] Please continue reading Figure 8 Furthermore, a through hole penetrating the support substrate 24 is provided on the support substrate 24, and a conductive connector 25 is filled in the through hole. The support substrate 24 includes a first surface and a second surface. The conductor 21 that can conduct electricity is located on the first surface, and the second surface has a pad 23. One end of the conductive connector 25 is connected to the conductor 21, and the other end is connected to the pad 23.

[0098] Specifically, after a through hole is opened on the support substrate 24 and penetrates the first surface and the second surface of the support substrate 24, Ti material can be first deposited on the hole wall of the through hole (for example, PVD (Physical Vapor Deposition) method can be used) to form a seed layer (not shown in the figure), and then a conductive metal material, such as Cu material, can be filled in the seed layer to produce a conductive connector 25. Afterwards, a pad 23 electrically connected to the conductive connector 25 is set at one end of the conductive connector 25 on the side of the second surface to ensure that the conductive connector 25 can be normally connected to electricity later.

[0099] The power connection part of the energized conductor 21 is aligned with and electrically connected to one end of the conductive connector 25 on one side of the first surface, so that the energized conductor 21 can be supplied with power from an external power source. When the energized conductor 21 is covered by the flexible sealing layer 26, an opening corresponding to the power connection part of the energized conductor 21 is firstly opened on the flexible sealing layer 26, and the opening is electrically connected to the conductive connector 25 accordingly.

[0100] Please continue reading Figure 8 , further, the magnetic source component 10 comprises:

[0101] A carrier plate 12, the accommodating cavity 11 is disposed on the carrier plate 12, and the micro-motion component 20 is disposed at a communication port between the accommodating cavity 11 and the outside; and

[0102] The magnetic induction body 13 is disposed on a side of the carrier plate 12 different from the fine-motion component 20 .

[0103] In the embodiment of the present invention, the carrier 12 is used to set the accommodating cavity 11 and carry and install the magnetic induction body 13. The communication port between the accommodating cavity 11 and the outside is facing the supporting substrate 24, or facing the micro-motion component 20, so that the accommodating cavity 11 can correspond to the micro-motion component 20. The micro-motion component 20 is sandwiched between the carrier 12 and the supporting substrate 24, and the structure is more stable. The carrier 12 can have a flat installation surface, and the magnetic induction body 13 can be a sheet-shaped magnetic component, such as a magnetic sheet, so that it can be directly attached to the above-mentioned installation surface and separated from the micro-motion component 20 by the carrier 12, ensuring the stable installation of the magnetic induction body 13.

[0104] In one embodiment, the carrier board 12 may also be a glass substrate, so that the overall micro-driving device 100 can be more compact and thinner.

[0105] See also Figure 8 Furthermore, the carrier plate 12 is arranged in parallel with the supporting substrate 24 , and there is an overlapping portion between the accommodating cavity 11 and the groove 241 .

[0106] It can be understood that the parallel arrangement of the carrier 12 and the supporting substrate 24 can make the overall structure of the micro-drive device 100 more regular and compact, which is conducive to the miniaturization of the micro-drive device 100. There is an overlapping portion between the accommodating cavity 11 and the groove 241, that is, in the absence of the micro-motion component 20, there is a communicating portion between the accommodating cavity 11 and the groove 241, which ensures that the micro-motion component 20 can deform and swing normally without being completely clamped by the carrier 12 and the supporting substrate 24.

[0107] In addition, the groove 241 can also serve as a part of the accommodating cavity 11 to increase the volume of the accommodating cavity 11 .

[0108] Preferably, the accommodating cavity 11 and the groove 241 are symmetrically arranged, and the two can enclose a regular polyhedron structure, and the cross section of the space enclosed by the accommodating cavity 11 and the groove 241 on the XZ axis plane can be a regular polygon. On the basis of selecting a glass substrate for the supporting substrate 24 and the carrier 12, the regular polygon structure is easier to open on the glass substrate, the structure is more stable, and the volume is also large enough.

[0109] Figure 8 The example in which the accommodating cavity 11 and the groove 241 form a regular hexahedron is taken as an example, that is, the cross-sections of the accommodating cavity 11 and the groove 241 on the XZ axis plane are both isosceles trapezoidal.

[0110] In actual production, two glass substrates may be provided first, and then the glass substrates may be cleaned to ensure that the surfaces of the glass substrates are clean, and then a groove 241 and a through hole may be formed on one of the glass substrates, and the glass substrate with the groove 241 and the through hole may be used as the support substrate 24, and a receiving cavity 11 may be formed on the other glass substrate, and the glass substrate with the receiving cavity 11 may be used as the carrier 12. A conductive connector 25 may be made in the through hole of the support substrate 24, and then a pad 23 electrically connected to the conductive connector 25 may be provided outside the through hole.

[0111] Afterwards, a soft film is provided as the flexible film layer 22, and a conductive coil is made on the surface of the flexible film layer 22 as the conductor 21 that can be electrically connected. The area of ​​the conductor 21 that can be electrically connected is similar to the area of ​​the opening of the groove 241. A flexible sealing layer 26 that shields the conductor 21 is covered on the flexible film layer 22, and an opening is opened on the flexible sealing layer 26 to expose the power-connecting part of the conductor 21 that can be electrically connected. At this time, the overall structure of the micro-motion component 20 is obtained.

[0112] The micro-motion component 20 is transferred to the surface of the supporting substrate 24, so that the conductor 21 that can pass electricity corresponds to the groove 241, and the power-connected part of the conductor 21 in the opening is electrically connected to the conductive connector 25, which serves as a connection line for the subsequent external power input. The carrier 12 is transferred to the top of the supporting substrate 24, and after the receiving groove corresponds to the groove 241, the carrier 12 is attached downwardly to the supporting substrate 24. At this time, the micro-motion component 20 is sandwiched between the two, and the conductor 21 that can pass electricity is located on the side away from the carrier 12. Then, a magnetic sheet is attached to the surface of the carrier 12 that is away from the supporting substrate 24 as a magnetic induction body 13, and the magnetic source component 10 is obtained, and a complete micro-drive device 100 is also formed.

[0113] Furthermore, the magnetic source component 10 includes a magnet, which is used to generate a magnetic field that interacts with the magnetic field generated by the conductor 21 that can carry electricity, thereby driving the micro-motion component 20 to deform.

[0114] Specifically, the magnet can be a U-shaped magnet or a ring magnet. The U-shaped magnet or the ring magnet itself has a certain space, and this space can be directly used as the accommodating cavity 11. It is only necessary to set the micro-motion component 20 on the magnet and correspond to the internal space of the magnet. There is no need to open another space on the magnetic source component 10, which can control the manufacturing difficulty and production cost, and can also simplify the structure of the micro-drive device 100.

[0115] See also Fig. 9 , a micro-driving device 100 according to another embodiment of the present invention comprises:

[0116] A first micro-motion member 30, the first micro-motion member 30 comprises a first support member 31 and a first conductor 32 capable of conducting electricity, the first support member 31 is provided with at least one first groove 311 communicating with the outside, and the first conductor 32 capable of conducting electricity is provided at a communication opening between the first groove 311 and the outside;

[0117] A second micro-motion member 40, comprising a second support member 41 and a second conductor 42, wherein the second support member 41 is provided with at least one second groove 411 communicating with the outside, and the second conductor 42 is provided at a communication opening between the second groove 411 and the outside; and

[0118] The isolating member 50 is disposed between the first micro-motion member 30 and the second micro-motion member 40 , wherein the first electrically conductive conductor 32 is disposed opposite to the second electrically conductive conductor 42 , and the first electrically conductive conductor 32 , the second electrically conductive conductor 42 and the isolating member 50 form a cavity 11 a .

[0119] In the micro-driving device 100 of the embodiment of the present invention, when the first energizable conductor 32 and the second energizable conductor 42 are both energized, electromagnetic induction can be generated between them. Thus, the deformation amplitude or deformation direction of the first micro-motion member 30 and the second micro-motion member 40 can be controlled by controlling the current magnitude or current direction of the first energizable conductor 32 and the second energizable conductor 42, thereby controlling the volume change of the first groove 311 and the second groove 411. When gas or liquid is contained in the first groove 311 and the second groove 411, the output amount of the gas or liquid can be controlled by controlling the current magnitude or current direction of the first energizable conductor 32 and the second energizable conductor 42.

[0120] This solution can simply, effectively, accurately and controllably realize the change control of the volume of the groove 241 through a simple structure and principle, and meet the precision requirements of the micro-drive device 100. Moreover, the first micro-motion member 30 and the second micro-motion member 40 are easy to manufacture into a smaller volume and the cost is relatively low, so that the volume of the micro-drive device 100 can be designed to be smaller, and can be applied in more precise and miniaturized use, and meet higher precision and control requirements.

[0121] Specifically, the first support member 31 and the second support member 41 are used to carry the first energizable conductor 32 and the second energizable conductor 42 respectively, and the first support member 31 and the second support member 41 can be made of a glass substrate. A first flexible film layer 33 and a second flexible film layer 43 with soft texture can be provided to carry the first energizable conductor 32 and the second energizable conductor 42 respectively. The first flexible film layer 33 and the second flexible film layer 43 are like the flexible film layer 22 mentioned above, which can not only carry the first energizable conductor 32 and the second energizable conductor 42, but also can be easily driven by the first energizable conductor 32 and the second energizable conductor 42, and are easy to deform and swing.

[0122] In addition, the depth of the first groove 311 and the second groove 411 is designed to be greater than the swing height of the first flexible membrane layer 33 and the second flexible membrane layer 43, so that the first groove 311 and the second groove 411 can provide an avoidance space for the deformation swing of the first flexible membrane layer 33 and the second flexible membrane layer 43, thereby preventing the first flexible membrane layer 33 and the second flexible membrane layer 43 from colliding with the inner walls of the first groove 311 and the second groove 411.

[0123] In addition, the height of the isolation member 50 is also greater than the swing height of the first flexible membrane layer 33 and the second flexible membrane layer 43, so that the first flexible membrane layer 33 and the second flexible membrane layer 43 are spaced far enough apart to avoid mutual interference during the swinging process.

[0124] Since the first electrically conductive conductor 32 and the second electrically conductive conductor 42 will generate a magnetic field when energized, and currents of different directions and magnitudes are connected to the first electrically conductive conductor 32 and the second electrically conductive conductor 42, magnetic fields of different directions and magnitudes will be generated around the first electrically conductive conductor 32 and the second electrically conductive conductor 42. Based on the principle that like charges repel and opposite charges attract, the first electrically conductive conductor 32 and the second electrically conductive conductor 42 on the same Y-axis will deform and swing up and down, thereby affecting the volume of the cavity 11a surrounded by the first electrically conductive conductor 32, the second electrically conductive conductor 42 and the isolation member 50. When a medium such as gas or liquid is accommodated in the cavity 11a, or the cavity 11a is connected to a pipeline such as an air path or a liquid path, drive control of the gas or liquid of different sizes and directions can be achieved.

[0125] In addition, the structures of the first fine-motion member 30 and the second fine-motion member 40 in this embodiment may be substantially the same as the structure including the support substrate 24 and the conductive connecting member 25 in the above-mentioned embodiment. The first fine-motion member 30 and the second fine-motion member 40 are symmetrically arranged with the isolation member 50. Specifically:

[0126] The first support member 31 and the second support member 41 in the first micro-motion member 30 and the second micro-motion member 40 can be a support substrate 24; the first support member 31 and the second support member 41 are respectively provided with a first conductive connecting member 35 and a second conductive connecting member 45 which are the same as the conductive connecting member 25; the ends of the first conductive connecting member 25 and the second conductive connecting member 25 are respectively provided with a first soldering pad 36 and a second soldering pad 46 which are the same as the soldering pad 23; the first groove 311 and the second groove 411 are the groove 241 on the support substrate 24; the first electrically conductive conductor 32 and the second electrically conductive conductor 42 are also conductive coil structures; the first electrically conductive conductor 32 and the second electrically conductive conductor 42 are respectively electrically connected to the first conductive connecting member 35 and the second conductive connecting member 45.

[0127] For other technical contents in this embodiment, such as the shapes of the first groove 311 and the second groove 411, the shapes of the first electrically conductive conductor 32 and the second electrically conductive conductor 42, the settings of the first flexible sealing layer 34 and the second flexible sealing layer 44, etc., please refer to the description in the above embodiment of this part of the supporting substrate 24 and the corresponding descriptions of other similar structures, which will not be fully described here.

[0128] It should be noted that the difference between this embodiment and the embodiment of the support substrate 24 is that the micro-drive device 100 of this embodiment generates electromagnetic induction by connecting the first electrically conductive conductor 32 and the second electrically conductive conductor 42, without providing a magnetic induction body 13 to provide a magnetic field. The current size and current direction connected to the first electrically conductive conductor 32 and the second electrically conductive conductor 42 are controllable, so that the deformation degree of the first electrically conductive conductor 32 and the second electrically conductive conductor 42 are controllable, so that the driving of the medium by the entire micro-drive device 100 is more diversified and the driving force can also be improved.

[0129] See also Figures 10 to 12 A micro-driving device 100 according to another embodiment of the present invention comprises:

[0130] a magnetic source member 10; and

[0131] The micro-motion component 20 includes a conductor 21 that can be energized. When energized, the conductor 21 generates an interaction force with the magnetic source component 10, thereby driving the micro-motion component 20 to deform.

[0132] In the micro-drive device 100 of the embodiment of the present invention, the energized conductor 21 can generate electromagnetic induction with the magnetic source component 10 when it is energized. In this way, the deformation amplitude of the micro-motion component 20 can be controlled by controlling the current magnitude or current direction of the energized conductor 21, thereby controlling the volume change in the accommodating chamber 11. When gas or liquid is contained in the accommodating chamber 11, the output of the gas or liquid can be controlled by controlling the current magnitude or current direction of the energized conductor 21. This solution can simply, effectively, accurately and controllably realize the volume change control of the accommodating chamber 11 through a simple structure and principle, thereby meeting the precision requirements of the micro-drive device 100. Moreover, both the magnetic source component 10 and the energized conductor 21 are easy to manufacture into a smaller volume and the cost is relatively low, so that the volume of the micro-drive device 100 can be designed to be smaller, thereby being able to be applied in more precise and miniaturized uses and meeting higher precision and control requirements.

[0133] In this embodiment of the invention, the differences between the magnetic source component 10 and the micro-motion component 20 and the magnetic source component 10 and the micro-motion component 20 in the other embodiments mentioned above will be described in detail. Other basic descriptions can refer to the corresponding descriptions of the magnetic source component 10 and the micro-motion component 20 in the other embodiments mentioned above, and will not be repeated here.

[0134] See also Fig.11 and Fig.12 Furthermore, the magnetic source component 10 and the micro-motion component 20 together enclose at least a portion of a closed cavity 11b, and the micro-motion component 20 is deformed to change the volume of the closed cavity 11b.

[0135] Specifically, the closed cavity 11b can be used to accommodate gas or liquid. When the current-carrying conductor 21 is energized, a magnetic field is generated, which interferes with the magnetic field of the magnetic source component 10. Under the action of the magnetic field, the current-carrying conductor 21 is deformed, thereby driving the micro-motion component 20 to deform, and further affecting the volume of the closed cavity 11b. When gas or liquid is contained in the closed cavity 11b, the change in the volume of the closed cavity 11b causes the change in the gas or liquid therein, thereby realizing the drive control of the gas or liquid.

[0136] See also Figures 10 to 12 Furthermore, the micro-motion component 20 includes a flexible film layer 22 and a conductive circuit formed on the flexible film layer 22, the conductive circuit constitutes a conductor 21 that can pass electricity, the flexible film layer 22 is cylindrical, and the conductive circuit is spiral; the magnetic source component 10 includes a cylindrical magnet, and the cylindrical magnet is sleeved outside the cylindrical flexible film layer 22.

[0137] With such arrangement, the middle space of the micro-motion component 20 and the closed cavity 11b between the flexible film layer 22 and the cylindrical magnet can be used as a space for accommodating a medium. When the conductive circuit is energized to generate a magnetic field, it interferes with the magnetic field of the magnetic source component 10 around it. Under the action of the magnetic field, the conductive circuit deforms and swings in the vertical direction, and drives the flexible film layer 22 to deform and swing in the vertical direction, thereby changing the volume of the middle space of the micro-motion component 20 and the closed cavity 11b.

[0138] like Figures 10 to 12 In the embodiment shown, after the conductive circuit is energized, the flexible membrane layer 22 can be driven to contract or expand under the magnetic field of the magnetic source component 10, and can achieve contraction and expansion functions similar to those of blood vessels. Therefore, the micro-drive device 100 in this embodiment can be used as an artificial blood vessel to achieve blood flow, relaxation and circulation, etc., and can be used as a future application in the field of medical equipment.

[0139] Furthermore, the micro-motion component 20 may also include a flexible sealing layer 26 that covers the conductive circuit on the flexible film layer 22 and a pad 23 that is electrically connected to the conductive circuit. The technical contents of the flexible sealing layer 26 and the pad 23 can be referred to the description of the flexible sealing layer 26 and the pad 23 above, and will not be repeated here.

[0140] Furthermore, an elastic material is filled between the flexible film layer 22 and the cylindrical magnet.

[0141] Specifically, the elastic material can be latex or micro springs, etc., so that the connection between the flexible film layer 22 and the cylindrical magnet can be increased, and the elastic material can be used as a connecting structure between the flexible film layer 22 and the cylindrical magnet, so that the flexible film layer 22 is more stable in the cylindrical magnet, and a certain elastic force can be provided for the deformation and reset of the flexible film layer 22, thereby promoting the driving control of the medium in the closed cavity 11b.

[0142] The electronic device according to the embodiment of the present invention comprises: the micro-driving device 100 according to any one of the above embodiments.

[0143] In the electronic device of the embodiment of the present invention, the current-carrying conductor 21 can generate electromagnetic induction with the magnetic source component 10 when it is energized. In this way, the deformation amplitude or deformation direction of the micro-motion component 20 can be controlled by controlling the current magnitude or current direction of the current-carrying conductor 21, thereby controlling the volume change in the accommodating cavity 11. When gas or liquid is contained in the accommodating cavity 11, the output amount of the gas or liquid can be controlled by controlling the current magnitude or current direction connected to the current-carrying conductor 21.

[0144] This solution can simply, effectively, accurately and controllably realize the change control of the volume of the accommodating chamber 11 through a simple structure and principle, meeting the precision requirements of the micro-drive device 100. Moreover, both the magnetic source component 10 and the current-carrying conductor 21 are easy to manufacture into a smaller volume and the cost is relatively low, so that the volume of the micro-drive device 100 can be designed to be smaller, and can be applied in more precise and miniaturized use, and meet the requirements of higher precision and controllability.

[0145] The electronic device of the embodiment of the present invention may be provided with a pipeline such as a gas circuit or a liquid circuit, which can be used to transport a gas medium or a liquid medium, or may be connected to an external gas circuit or a liquid circuit. For example:

[0146] When a liquid circuit is provided in an electronic device, the electronic device can be a water-cooled radiator, a liquid cooler, a drug delivery device for medical devices (such as an insulin delivery device), a liquid sprayer, a gas flow meter, etc., which can achieve heat dissipation, precise drug delivery, liquid infusion spraying and gas flow control, etc. It can also be a dryer, an automatic soap dispenser, etc. When a gas circuit is provided in an electronic device, it can also be a micro sphygmomanometer, etc. Realize the practical application of electronic devices in the fields of medical equipment, mechanical equipment, etc.

[0147] In the description of this specification, the description with reference to the terms "Example 1", "Example 2", etc. means that the specific features, structures, materials or characteristics described in conjunction with the implementation or example are included in at least one implementation or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same implementation or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more implementations or examples in a suitable manner.

[0148] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A micro drive device, characterized in that: include: A magnetic source component, wherein the magnetic source component is provided with at least one accommodating cavity communicating with the outside; as well as A micro-motion component is arranged at a connecting port between the accommodating cavity and the outside world. The micro-motion component includes a conductor that can pass electricity and is located at the connecting port. When energized, the conductor can interact with the magnetic source component to drive the micro-motion component to deform. The deformation of the micro-motion component is used to drive the volume in the accommodating cavity to change.

2. The micro-drive device according to claim 1, characterized in that: The conductor capable of passing electricity is a conductive coil, and the micro-motion component further comprises: A flexible film layer, wherein the flexible film layer covers the connecting port between the accommodating cavity and the outside world, the conductive coil is arranged on the flexible film layer, and the projection of the conductive coil on the flexible film layer at least partially overlaps with the projection of the connecting port on the flexible film layer. When the conductive coil is energized, an interaction force is generated between the conductive coil and the magnetic source component, thereby driving the flexible film layer to deform.

3. The micro-drive device according to claim 2, characterized in that: The conductive coil is located on a side of the flexible film layer opposite to the accommodating cavity or on a side opposite to the accommodating cavity.

4. The micro-drive device according to claim 1, characterized in that: At least one of the accommodating cavities in the magnetic source component has two opposite communicating ports, the micro-motion components include at least two, and the two micro-motion components are respectively arranged at the two communicating ports. The electrically conductive conductors on the two micro-motion components interact with the magnetic source component when energized, thereby driving the two micro-motion components to deform.

5. The micro-drive device according to claim 1, characterized in that: The conductor capable of conducting electricity is provided with a pad, and the pad is used for connecting to an external power source.

6. The micro-drive device according to claim 2, characterized in that: The micro-motion component also includes: A supporting substrate, the flexible film layer is arranged on the supporting substrate, the magnetic source component and the supporting substrate are respectively arranged on two opposite sides of the flexible film layer, the supporting substrate has a groove, and the projection of the conductive coil on the flexible film layer at least partially overlaps with the projection of the groove on the flexible film layer.

7. The micro-drive device according to claim 6, characterized in that: The support substrate is provided with a through hole penetrating the support substrate, and the through hole is filled with a conductive connector. The support substrate includes a first surface and a second surface. The conductor that can conduct electricity is located on the first surface, and the second surface has a pad. One end of the conductive connector is connected to the conductor that can conduct electricity, and the other end is connected to the pad.

8. The micro-drive device according to claim 6, characterized in that: The magnetic source component comprises: A carrier plate, the accommodating cavity is disposed on the carrier plate, and the micro-motion member is disposed at a communication port between the accommodating cavity and the outside; and A magnetic induction body is arranged on a side of the carrier plate different from the micro-motion component.

9. The micro-drive device according to claim 8, characterized in that: The carrier plate is arranged in parallel with the supporting substrate, and an overlapping portion exists between the accommodating cavity and the groove.

10. The micro-drive device according to claim 1, characterized in that: The magnetic source component includes a magnet, and the magnet is used to generate a magnetic field to interact with the magnetic field generated by the conductor that can pass electricity, thereby driving the micro-motion component to deform.

11. The micro-drive device according to claim 10, characterized in that: The magnet is a U-shaped magnet or a ring-shaped magnet.

12. A micro drive device, characterized in that: include: A first micro-motion component, the first micro-motion component comprises a first support and a first conductor capable of conducting electricity, the first support is provided with at least one first groove communicating with the outside, and the first conductor capable of conducting electricity is provided at a communication opening between the first groove and the outside; a second micro-motion member, the second micro-motion member comprising a second support member and a second conductor capable of passing electricity, the second support member being provided with at least one second groove communicating with the outside, the second conductor capable of passing electricity being provided at a communication opening between the second groove and the outside; and The isolating member is disposed between the first micro-motion member and the second micro-motion member, wherein the first electrically conductive conductor is disposed opposite to the second electrically conductive conductor, and the first electrically conductive conductor, the second electrically conductive conductor and the isolating member form a cavity.

13. A micro drive device, characterized in that: include: A magnetic source component; as well as The micro-motion component comprises a conductor that can be energized. When energized, the conductor generates an interaction force with the magnetic source component, thereby driving the micro-motion component to deform.

14. The micro-drive device according to claim 13, characterized in that: The magnetic source component and the micro-motion component together enclose at least a portion of a closed cavity, and the micro-motion component is deformed to change the volume of the closed cavity.

15. The micro-drive device according to claim 13, characterized in that: The micro-motion component includes a flexible film layer and a conductive circuit formed on the flexible film layer, the conductive circuit constitutes the conductor that can be energized, the flexible film layer is surrounded in a cylindrical shape, and the conductive circuit is surrounded in a spiral shape; The magnetic source component includes a cylindrical magnet, and the cylindrical magnet is sleeved outside the cylindrical flexible film layer.

16. The micro-drive device according to claim 15, characterized in that: An elastic material is filled between the flexible film layer and the cylindrical magnet.

17. The micro-drive device according to claim 14, characterized in that: The closed cavity is used to contain gas or liquid.

18. An electronic device, characterized in that: include: The micro drive device according to any one of claims 1 to 11; or The micro-drive device according to claim 12; or A micro drive device according to any one of claims 13 to 17.

Images