Precursor cartridge

Abstract

The application relates to the technical field of process equipment, in particular to a precursor box. The precursor box comprises a shell, a steel cylinder assembly and an evaporator assembly arranged in the shell, the shell is provided with a first hole group and a second hole group, the first hole group comprises a plurality of first gas holes and at least one first liquid hole, and the second hole group comprises a plurality of second gas holes and at least one second liquid hole; the first pipeline group in the steel cylinder assembly comprises at least one first liquid pipe and a plurality of first gas pipes, the number of the first gas pipes is less than or equal to the number of the first gas holes and the second gas holes, and the number of the first liquid pipe is less than or equal to the number of the first liquid hole and the second liquid hole; the second pipeline group in the evaporator assembly comprises at least one second liquid pipe and a plurality of second gas pipes, the number of the second gas pipes is less than or equal to the number of the second gas holes and the first gas holes, and the number of the second liquid pipe is less than or equal to the number of the second liquid hole and the first liquid hole. The precursor box in the application can be suitable for the use requirements of different types of precursors.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of process equipment, and particularly relates to a precursor box. BACKGROUND

[0002] The precursor is a kind of substance carrying target elements, gaseous or volatile liquid, with chemical thermal stability, and also with corresponding reaction activity or material performance, and the precursor is a core manufacturing material of thin film deposition process. The precursor is usually fixed or liquid at room temperature, and before use, it needs to be effectively vaporized in the precursor box through carrier gas, heating pipeline and the like, and then the thin film deposition process can be carried out.

[0003] However, in the prior art, different types of precursors need different types of precursor boxes for transmission, and multiple precursor boxes need to be designed to meet the use needs. SUMMARY

[0004] The present application provides a precursor box which can be suitable for the use needs of different types of precursors.

[0005] The application provides a precursor box, which comprises a shell, a steel bottle assembly and an evaporator assembly. The shell has a containing space, the steel bottle assembly and the evaporator assembly are arranged in the containing space, and the steel bottle assembly and the evaporator assembly are arranged at intervals along a first direction. The shell is provided with a first hole group and a second hole group. The first hole group comprises a plurality of first gas holes and at least one first liquid hole, and the second hole group comprises a plurality of second gas holes and at least one second liquid hole. The steel bottle assembly comprises a steel bottle and a first pipeline group connected with the steel bottle. The first pipeline group comprises at least one first liquid pipeline and a plurality of first gas pipelines. The plurality of first gas pipelines are connected with the plurality of first gas holes or the plurality of second gas holes, and the number of the first gas pipelines is less than or equal to the number of the first gas holes and the second gas holes. At least one first liquid pipeline is used to be connected with at least one first liquid hole or at least one second liquid hole, and the number of the first liquid pipeline is less than or equal to the number of the first liquid hole and the second liquid hole. The evaporator assembly comprises an evaporator and a second pipeline group connected with the evaporator. The second pipeline group comprises at least one second liquid pipeline and a plurality of second gas pipelines. The plurality of second gas pipelines are used to be connected with the plurality of second gas holes or the plurality of first gas holes, and the number of the second gas pipelines is less than or equal to the number of the second gas holes and the first gas holes. At least one second liquid pipeline is used to be connected with at least one second liquid hole or at least one first liquid hole, and the number of the second liquid pipeline is less than or equal to the number of the second liquid hole and the first liquid hole. When the precursor needs to be adjusted, because the number of the first gas holes and the second gas holes on the precursor box is greater than or equal to the number of the first gas pipelines and the second gas pipelines, and the number of the first liquid holes and the second liquid holes is greater than the number of the first liquid pipelines and the second liquid pipelines, the type of the steel bottle in the steel bottle assembly or the type of the evaporator in the evaporator assembly can be directly adjusted, so that the precursor box can be suitable for different precursors. In addition, the number of the first gas pipelines in the steel bottle assembly is less than or equal to the number of the first gas holes and the second gas holes, the number of the first liquid pipelines is less than or equal to the number of the first liquid holes and the second liquid holes, the number of the second gas pipelines in the evaporator assembly is less than or equal to the number of the second gas holes and the first gas holes, and the number of the second liquid pipelines is less than or equal to the number of the second liquid holes and the first liquid holes. The positions of the steel bottle assembly and the evaporator assembly in the containing space can be interchanged, so as to improve the convenience of installing the steel bottle assembly and the evaporator assembly on the shell.

[0006] In some implementations, the shell includes a main frame, a first end plate and a second end plate, the main frame includes a top plate, a first side plate, a bottom plate and a second side plate connected in sequence, the main frame has a cavity with two open ends, the first end plate and the second end plate are arranged at the two open ends of the cavity to form the containing space; the plurality of first gas holes and the plurality of second gas holes are located on the first end plate or the second end plate, the plurality of first gas holes and the plurality of second gas holes extend along a first direction, and on a projection of the bottom plate, the plurality of first gas holes and the plurality of second gas holes do not overlap, wherein the first direction is the arrangement direction of the first side plate and the second side plate; the at least one first liquid hole and the at least one second liquid hole are arranged on the first side plate or the second side plate. In this arrangement, the arrangement of the plurality of first gas holes and the plurality of second gas holes facilitates the position exchange of the cylinder assembly and the evaporator assembly.

[0007] In some implementations, the at least one first liquid pipe includes a first liquid inlet pipe, the plurality of first gas pipes include a first gas outlet pipe, a second gas outlet pipe and a first gas inlet pipe, the first pipe group further includes a first main pipe and a second main pipe; the first ends of the first main pipe and the second main pipe are in communication with the cylinder, the second end of the first main pipe is in communication with the first liquid inlet pipe and the second gas outlet pipe respectively, the second end of the second main pipe is in communication with the first gas outlet pipe and the second gas outlet pipe respectively, and the first gas inlet pipe is in communication with the first main pipe and the second main pipe respectively.

[0008] In some implementations, in the direction from the first end of the first main pipe to the second end of the first main pipe, the first main pipe is sequentially provided with a first stop valve, a first electromagnetic valve, a first three-way valve and a second three-way valve; the first end of the first three-way valve is in communication with the first electromagnetic valve, the second end of the first three-way valve is in communication with the first end of the second three-way valve, the third end of the first three-way valve is in communication with the first gas inlet pipe, the second end of the second three-way valve is in communication with the first liquid inlet pipe, and the third end of the second three-way valve is in communication with the second gas outlet pipe. In this way, the opening and closing of the first main pipe can be controlled, and the opening and closing of the first main pipe with the first liquid inlet pipe, the second gas outlet pipe and the first gas inlet pipe can also be controlled.

[0009] In some implementations, in order to control the opening and closing of the second main pipe, and the opening and closing of the second main pipe with the first gas inlet pipe, the first gas outlet pipe and the second gas outlet pipe, in the direction from the first end of the second main pipe to the second end of the second main pipe, the second main pipe is sequentially provided with a second stop valve, a second electromagnetic valve, a third three-way valve and a fourth three-way valve; one end of the third three-way valve is in communication with the second electromagnetic valve, the second end of the third three-way valve is in communication with the first end of the fourth three-way valve, the third end of the third three-way valve is in communication with the first gas inlet pipe, the second end of the fourth three-way valve is in communication with the first gas outlet pipe, and the third end of the fourth three-way valve is in communication with the second gas outlet pipe.

[0010] In some implementations, in order to control the opening and closing of the first liquid inlet pipe, the first gas inlet pipe and the first gas outlet pipe, a third electromagnetic valve is arranged on the first liquid inlet pipe, a fourth electromagnetic valve is arranged on the first gas inlet pipe, and a fifth electromagnetic valve is arranged on the first gas outlet pipe.

[0011] In some implementations, the at least one second liquid pipe includes a second liquid inlet pipe, the plurality of second gas pipes includes a third gas outlet pipe, a fourth gas outlet pipe and a second gas inlet pipe, and the second pipe group further includes a third main pipe; the second gas inlet pipe and the second liquid inlet pipe are in communication with the evaporator, a first end of the third main pipe is in communication with the evaporator, and a second end of the third main pipe is in communication with the third gas outlet pipe and the fourth gas outlet pipe, respectively.

[0012] In some implementations, in order to control the opening and closing of the second gas inlet pipe, a sixth electromagnetic valve, a seventh electromagnetic valve and an eighth electromagnetic valve are arranged on the second gas inlet pipe in sequence, and the eighth electromagnetic valve is in communication with the evaporator; in order to control the opening and closing of the second liquid inlet pipe and the evaporator, and the opening and closing of the second liquid inlet pipe and the second gas inlet pipe, a ninth electromagnetic valve, a fifth three-way valve and a tenth electromagnetic valve are arranged on the second liquid inlet pipe in sequence, the tenth electromagnetic valve is in communication with the evaporator, a first end of the fifth three-way valve is in communication with the ninth electromagnetic valve, a second end of the fifth electromagnetic valve is in communication with the tenth electromagnetic valve, and a third end of the fifth electromagnetic valve is connected between the seventh electromagnetic valve and the eighth electromagnetic valve; in order to control the opening and closing of the third main pipe and the evaporator, and the opening and closing of the third main pipe and the third gas outlet pipe and the fourth gas outlet pipe, an eleventh electromagnetic valve and a sixth three-way valve are arranged on the third main pipe, a first end of the sixth three-way valve is connected to the second end of the third main pipe, a second end of the sixth three-way valve is in communication with the third gas outlet pipe, and a third end of the sixth three-way valve is in communication with the fourth gas outlet pipe.

[0013] In some implementations, in order to detect the liquid level in the steel cylinder and the liquid level in the evaporator, the precursor box further includes a first liquid level sensor and a second liquid level sensor, the first liquid level sensor and the second liquid level sensor are arranged on the top plate of the shell, the first liquid level sensor is used to detect the liquid level in the steel cylinder, and the second liquid level sensor is used to detect the liquid level in the evaporator.

[0014] In some implementations, in order to ensure the smoothness of the gas in the shell, the shell further includes an air inlet plate, the air inlet plate is arranged on the second side plate or the first side plate, the air inlet plate is provided with a plurality of air inlets, and the second side plate or the first side plate is provided with openings corresponding to the plurality of air inlets. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1A structural schematic diagram of a precursor box provided for an embodiment of the present application;

[0016] Figure 2 A front view of a precursor box provided for an embodiment of the present application;

[0017] Figure 3 A structural schematic diagram of a steel bottle assembly provided for an embodiment of the present application;

[0018] Figure 4 A structural schematic diagram of an evaporator assembly provided for an embodiment of the present application.

[0019] Reference signs:

[0020] 10 - shell; 11 - first gas hole; 110 - first gas inlet; 111 - first gas outlet; 112 - second gas outlet; 12 - second gas hole; 120 - second gas inlet; 121 - third gas outlet; 122 - fourth gas outlet; 13 - bottom plate; 14 - top plate; 15 - first side plate; 16 - second side plate; 17 - first end plate; 18 - gas inlet plate; 20 - steel bottle; 30 - first pipeline group; 31 - first liquid inlet pipe; 310 - third electromagnetic valve; 32 - first gas outlet pipe; 320 - fifth electromagnetic valve; 33 - second gas outlet pipe; 34 - first gas inlet pipe; 340 - fourth electromagnetic valve; 35 - first main pipe; 350 - first stop valve; 351 - first electromagnetic valve; 352 - first three-way valve; 353 - second three-way valve; 36 - second main pipe; 360 - second stop valve; 361 - second electromagnetic valve; 362 - third three-way valve; 363 - fourth three-way valve; 37 - first flow meter; 40 - evaporator; 41 - second liquid inlet pipe; 410 - ninth electromagnetic valve; 411 - fifth three-way valve; 412 - tenth electromagnetic valve; 413 - second flow meter; 42 - third gas outlet pipe; 43 - fourth gas outlet pipe; 44 - second gas inlet pipe; 440 - sixth electromagnetic valve; 441 - seventh electromagnetic valve; 442 - eighth electromagnetic valve; 45 - third main pipe; 450 - eleventh electromagnetic valve; 451 - sixth three-way valve; 452 - third flow meter; 46 - seventh three-way valve; 50 - first liquid level sensor; 60 - second liquid level sensor; 70 - valve island. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical scheme and advantages of the present application more clear, the present application will be further described in detail below with reference to the drawings.

[0022] The precursor is a kind of substance with target elements, gaseous or volatile liquid, chemical thermal stability, and corresponding reaction activity or physical property, the precursor is mainly applied to material vapor deposition, chemical vapor deposition and atomic vapor deposition, to form various thin films meeting the requirements, in the process of use, the precursor needs to be effectively vaporized in the precursor box by carrier gas, heating pipeline and the like and then used.

[0023] However, in the prior art, different types of precursors need different types of precursor boxes for transmission, and multiple precursor boxes need to be designed to meet the use needs.

[0024] Therefore, a new type of precursor box is needed to be suitable for different types of precursors.

[0025] The terms used in the following embodiments are only for the purpose of describing the specific embodiments, and are not intended to be limiting to the present application. As used in the specification and the appended claims of the present application, the singular forms "a," "an," and "the" are intended to include both the singular and plural forms, unless the context clearly indicates otherwise.

[0026] In the present specification, the phrase "one embodiment" or "some embodiments" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the application. Thus, the appearances of the phrase "in one embodiment," "in some embodiments," "in other embodiments," "in additional embodiments," and so on, in various places throughout the specification are not necessarily all referring to the same embodiment, unless otherwise specifically noted. The terms "including," "containing," "comprising," and similar terms are meant to be open-ended, unless otherwise specifically noted, so as to encompass the various embodiments of the application.

[0027] Figure 1 A structural schematic diagram of the precursor box provided by the embodiments of the present application, Figure 2 is Figure 1 the front view. Referring to Figure 1 and Figure 2The precursor cartridge comprises a shell 10, a cylinder assembly and a vaporizer assembly. The shell 10 has a receiving space, and the cylinder assembly and the vaporizer assembly are arranged in the receiving space and are spaced apart along a first direction. The shell 10 is provided with a first hole group and a second hole group. The first hole group comprises a plurality of first gas holes 11 and at least one first liquid hole, and the second hole group comprises a plurality of second gas holes 12 and at least one second liquid hole. The cylinder assembly comprises a cylinder 20 and a first pipeline group connected with the cylinder 20. The first pipeline group comprises at least one first liquid pipe and a plurality of first gas pipes A. The plurality of first gas pipes A are connected with the plurality of first gas holes 11 or the plurality of second gas holes 12, and the number of the first gas pipes is less than or equal to the number of the first gas holes 11 and the second gas holes 12. The at least one first liquid pipe is used to connect with the at least one first liquid hole or the at least one second liquid hole, and the number of the first liquid pipe is less than or equal to the number of the first liquid hole and the second liquid hole. The vaporizer assembly comprises a vaporizer 40 and a second pipeline group connected with the vaporizer 40. The second pipeline group comprises at least one second liquid pipe and a plurality of second gas pipes B. The plurality of second gas pipes B are used to connect with the plurality of second gas holes 12 or the plurality of first gas holes 11, and the number of the second gas pipes B is less than or equal to the number of the second gas holes 12 and the first gas holes 11. The at least one second liquid pipe is used to connect with the at least one second liquid hole or the at least one first liquid hole, and the number of the second liquid pipe is less than or equal to the number of the second liquid hole and the first liquid hole. When the precursor needs to be adjusted, because the number of the first gas holes 11 and the second gas holes 12 on the precursor cartridge is greater than or equal to the number of the first gas pipes A and the second gas pipes B, and the number of the first liquid hole and the second liquid hole is greater than the number of the first liquid pipe and the second liquid pipe, the type of the cylinder assembly or the type of the vaporizer assembly can be directly replaced, so that the precursor cartridge can be suitable for different precursors. In addition, the number of the first gas pipes A in the cylinder assembly is less than or equal to the number of the first gas holes and the second gas holes, the number of the first liquid pipe is less than or equal to the number of the first liquid hole and the second liquid hole, the number of the second gas pipes B in the vaporizer assembly is less than or equal to the number of the second gas holes 12 and the first gas holes 11, and the number of the second liquid pipe is less than or equal to the number of the second liquid hole and the first liquid hole. The positions of the cylinder assembly and the vaporizer assembly in the receiving space can be interchanged, so as to improve the convenience of installing the cylinder assembly and the vaporizer assembly in the shell.

[0028] With reference to Figure 1 and Figure 2The shell 10 comprises a main frame body, a first end plate 17 and a second end plate. The main frame body comprises a top plate 14, a first side plate 15, a bottom plate 13 and a second side plate 16 connected in sequence, and has a cavity with two open ends. The first end plate 17 and the second end plate are arranged at the two open ends respectively, forming the above-mentioned accommodating space. A plurality of first gas holes 11 and a plurality of second gas holes 12 are arranged on the first end plate 17 or the second end plate. The plurality of first gas holes 11 and the plurality of second gas holes 12 are arranged along a first direction and do not overlap in the projection of the bottom plate 13, wherein the first direction is the arrangement direction of the first side plate 15 and the second side plate 16. At least one first liquid hole and at least one second liquid hole are arranged on the first side plate 15 or the second side plate 16. Specifically, the connection line of the centers of the plurality of first gas holes 11 and the connection line of the centers of the plurality of second gas holes 12 can coincide, so as to facilitate the installation of the cylinder assembly and the evaporator assembly, or the position exchange of the cylinder assembly and the evaporator assembly.

[0029] Hereinafter, the plurality of first gas holes 11 comprise a first gas inlet 110, a first gas outlet 111 and a second gas outlet 112 arranged along the first direction, the plurality of first liquid holes comprise a first liquid inlet, the plurality of second gas holes 12 comprise a second gas inlet 120, a third gas outlet 121 and a fourth gas outlet 122 arranged along the first direction, and the plurality of second liquid holes comprise a second liquid inlet.

[0030] Figure 3 The structure schematic diagram of the cylinder assembly provided by the embodiment of the present application is shown in the following. Figure 1 Figure 2 and Figure 3 The at least one first liquid pipe comprises a first liquid inlet pipe 31, the plurality of first gas pipes A comprise a first gas outlet pipe 32, a second gas outlet pipe 33 and a first gas inlet pipe 34, the first pipe group 30 further comprises a first main pipe 35 and a second main pipe 36, wherein one end of the first liquid inlet pipe 31 is arranged in the first liquid hole, one end of the first gas outlet pipe 32 is arranged in the first gas outlet 111, one end of the second gas outlet pipe 33 is arranged in the second gas outlet 112, and one end of the first gas inlet pipe 34 is arranged in the first gas inlet 110. The first end of the first main pipe 35 and the first end of the second main pipe 36 are in communication with the cylinder 20, the second end of the first main pipe 35 is in communication with the first liquid inlet pipe 31 and the second gas outlet pipe 33 respectively, the second end of the second main pipe 36 is in communication with the first gas outlet pipe 32 and the second gas outlet pipe 33 respectively, and the first gas inlet pipe 34 is in communication with the first main pipe 35 and the second main pipe 36 respectively.

[0031] ​In the process of implementation, in order to facilitate the control of the on-off of each pipeline, and the on-off between each pipeline. In the direction from the first end of the first main pipe 35 to the second end of the first main pipe 35, the first main pipe 35 is sequentially provided with a first stop valve 350, a first electromagnetic valve 351, a first three-way valve 352 and a second three-way valve 353, wherein the first stop valve 350 can adjust the size of the flow of fluid on the first main pipe 35, the first electromagnetic valve 351 can control the on-off between the steel cylinder 20 and the first end a1 of the first three-way valve 352, the second end a2 of the first three-way valve 352 and the first end b1 of the second three-way valve 353 are communicated, the second end b2 of the second three-way valve 353 and the first liquid inlet pipe 31 are communicated, and the third end b3 of the second three-way valve 353 and the second gas outlet pipe 33 are communicated. The second main pipe 36 is provided with a second stop valve 360, a second electromagnetic valve 361, a third three-way valve 362, a first flow meter 37 and a fourth three-way valve 363, one end of the second stop valve 360 is communicated with the steel cylinder 20, the other end of the second stop valve 360 is communicated with the second electromagnetic valve 361, the other end of the second electromagnetic valve 361 is communicated with the first end c1 of the third three-way valve 362, the second end c2 of the third three-way valve 362 is communicated with one end of the first flow meter 37, the third end c3 of the third three-way valve 362 is communicated with the first gas inlet pipe 34, the other end of the first flow meter 37 is communicated with the first end d1 of the fourth three-way valve 363, the second end d2 of the fourth three-way valve 363 is communicated with the first gas outlet pipe 32, and the third end d3 of the fourth three-way valve 363 is communicated with the second three-way valve 353. Specifically, the second stop valve 360 can adjust the size of the flow of fluid on the second main pipe 36, the second electromagnetic valve 361 can control the on-off between the steel cylinder 20 and the first end c1 of the third three-way valve 362, and the first flow meter 37 can monitor the flow between the second end c2 of the third three-way valve 362 and the first end d1 of the fourth three-way valve 363.

[0032] In order to control the on-off of the first liquid inlet pipe 31, a third electromagnetic valve 310 can be provided on the first liquid inlet pipe 31. A fourth electromagnetic valve 340 is provided on the first gas inlet pipe 34 for controlling the on-off of the first gas inlet pipe 34, and a fifth electromagnetic valve 320 is provided on the first gas outlet pipe 32 for controlling the on-off of the first gas outlet pipe 32.

[0033] Figure 4 The structure diagram of the evaporator assembly provided by the embodiment of the present application is shown. Referring to Figure 1 , Figure 2 and Figure 4The second liquid pipe includes a second liquid inlet pipe 41, the second gas pipe B includes a third gas outlet pipe 42, a fourth gas outlet pipe 43 and a second gas inlet pipe 44, and the second pipeline group further includes a third main pipe 45. The second liquid inlet pipe 41 is arranged at the second liquid hole, the third gas outlet pipe 42 is arranged at the third gas outlet 121, the fourth gas outlet pipe 43 is arranged at the fourth gas outlet 122, and the second gas inlet pipe 44 is arranged at the second gas inlet 120. The second gas inlet pipe 44 and the second liquid inlet pipe 41 are in communication with the evaporator 40, the first end of the third main pipe 45 is in communication with the evaporator 40, and the second end of the third main pipe 45 is in communication with the third gas outlet pipe 42 and the fourth gas outlet pipe 43 respectively.

[0034] In order to control the opening and closing of each pipe and the opening and closing between each pipe, the sixth electromagnetic valve 440, the seventh electromagnetic valve 441 and the eighth electromagnetic valve 442 are arranged on the second gas inlet pipe 44. The one end of the sixth electromagnetic valve 440 is in communication with the one end of the seventh electromagnetic valve 441, the other end of the seventh electromagnetic valve 441 is in communication with the eighth electromagnetic valve 442, the other end of the eighth electromagnetic valve 442 is in communication with the evaporator 40, and any one of the sixth electromagnetic valve 440, the seventh electromagnetic valve 441 and the eighth electromagnetic valve 442 can control the opening and closing between the second gas inlet pipe 44 and the evaporator 40. The ninth electromagnetic valve 410, the second flow meter 413, the fifth three-way valve 411 and the tenth electromagnetic valve 412 are arranged on the second liquid inlet pipe 41. The one end of the tenth electromagnetic valve 412 is in communication with the evaporator 40, the other end of the tenth electromagnetic valve 412 is in communication with the second flow meter 413, the other end of the second flow meter 413 is in communication with the second end e2 of the fifth three-way valve 411, the tenth electromagnetic valve 412 is used to control the opening and closing between the second end e2 of the fifth three-way valve 411 and the evaporator 40, the second flow meter 413 is used to detect the flow between the second end e2 of the fifth three-way valve 411 and the evaporator, the first end e1 of the fifth three-way valve 411 is in communication with the ninth electromagnetic valve 410, and the ninth electromagnetic valve 410 is used to control the opening and closing between the first end e1 of the fifth three-way valve 411 and the inlet of the second liquid inlet pipe 41. The eleventh electromagnetic valve 450, the third flow meter 452 and the sixth electromagnetic valve 440 are arranged on the third main pipe 45. The one end of the eleventh electromagnetic valve 450 is in communication with the evaporator 40, the other end of the eleventh electromagnetic valve 450 is in communication with the third flow meter 452, the other end of the third flow meter 452 is in communication with the first end f1 of the sixth three-way valve 451, the eleventh electromagnetic valve 450 is used to control the opening and closing between the first end f1 of the sixth three-way valve 451 and the evaporator 40, and the third flow meter 452 is used to detect the flow between the first end f1 of the sixth three-way valve 451 and the evaporator 40. The second end f2 of the sixth three-way valve 451 is in communication with the third gas outlet pipe 42, and the third end f3 of the sixth three-way valve 451 is in communication with the fourth gas outlet pipe 43.

[0035] In some embodiments, the third gas outlet pipe 42 can further be provided with a seventh three-way valve 46, a first end g1 of the seventh three-way valve 46 being in communication with the second end f2 of the sixth three-way valve 451, a second end g2 of the seventh three-way valve 46 being in communication with the gas outlet of the third gas outlet pipe 42, a third end g3 of the seventh three-way valve 46 being in communication with the gas inlet of the second gas inlet pipe 44, and an electromagnetic valve can be further provided between the third end g3 of the seventh three-way valve 46 and the gas inlet of the second gas inlet pipe 44.

[0036] In the above embodiments, continuing to refer to Figure 1 and Figure 2 , in order to detect the liquid level in the steel cylinder 20 and the liquid level in the evaporator 40, the precursor box further comprises a first liquid level sensor 50 and a second liquid level sensor 60, the first liquid level sensor 50 and the second liquid level sensor 60 being provided on the top plate 14 of the shell 10, the first liquid level sensor 50 being used to detect the liquid level in the steel cylinder 20, and the second liquid level sensor 60 being used to detect the liquid level in the evaporator 40.

[0037] In order to ensure the smoothness of the gas in the shell, the shell 10 further comprises an air inlet plate 18, the air inlet plate 18 being provided on the second side plate 16 or the first side plate 15, the air inlet plate 18 being provided with a plurality of air inlets, and the second side plate 16 or the first side plate 15 being provided with openings corresponding to the plurality of air inlets. Specifically, in order to prevent external liquid from entering the interior of the shell, an air inlet baffle can be provided at each air inlet of the air inlet plate 18, the air inlet baffle being provided in the accommodation space, one end of the air inlet baffle being connected to the air inlet plate, and the other end of the air inlet baffle extending to one side of the bottom plate 13.

[0038] The precursor box further comprises a valve island 70 for controlling the opening and closing of each valve in the steel cylinder assembly and the evaporator assembly. The steel cylinder assembly further comprises a plurality of first heating jackets and a plurality of second heating jackets, one of the plurality of first heating jackets being sleeved on the steel cylinder, two of the plurality of first heating jackets being respectively sleeved on the first gas outlet pipe and the second gas outlet pipe. One of the plurality of second heating jackets is sleeved on the evaporator, and two of the plurality of second heating jackets are respectively sleeved on the third gas outlet pipe and the fourth gas outlet pipe. In addition, the type of the steel cylinder in the above-mentioned steel cylinder assembly can be adjusted according to actual needs.

[0039] The above merely describes specific embodiments of the present application, but the protection scope of the present application is not limited thereto, any person skilled in the art can easily think of changes or replacements within the technical scope disclosed by the present application, which shall be encompassed in the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A precursor cartridge, characterized by, The application relates to a gas cylinder device, which comprises the following parts: a shell having a containing space, wherein a first hole group and a second hole group are arranged on the shell, the first hole group comprises a plurality of first gas holes and at least one first liquid hole, and the second hole group comprises a plurality of second gas holes and at least one second liquid hole; a steel cylinder assembly arranged in the containing space, wherein the steel cylinder assembly comprises a steel cylinder and a first pipeline group connected with the steel cylinder, the first pipeline group comprises at least one first liquid pipe and a plurality of first gas pipes, the plurality of first gas pipes are used for being connected with the plurality of first gas holes or the plurality of second gas holes, the number of the first gas pipes is less than or equal to the number of the first gas holes and the second gas holes, the first liquid pipe is used for being connected with the at least one first liquid hole or the at least one second liquid hole, and the number of the first liquid pipe is less than or equal to the number of the first liquid hole and the second liquid hole; the at least one first liquid pipe comprises a first liquid inlet pipe, the plurality of first gas pipes comprise a first gas outlet pipe, a second gas outlet pipe and a first gas inlet pipe, and the first pipeline group further comprises a first main pipe and a second main pipe; the first end of the first main pipe and the second main pipe are communicated with the steel cylinder, the second end of the first main pipe is communicated with the first liquid inlet pipe and the second gas outlet pipe respectively, the second end of the second main pipe is communicated with the first gas outlet pipe and the second gas outlet pipe respectively, and the first gas inlet pipe is communicated with the first main pipe and the second main pipe respectively; an evaporator assembly arranged in the containing space, wherein the evaporator assembly and the steel cylinder assembly are arranged along a first direction, the evaporator assembly comprises an evaporator and a second pipeline group connected with the evaporator, the second pipeline group comprises at least one second liquid pipe and a plurality of second gas pipes, the plurality of second gas pipes are used for being connected with the plurality of second gas holes or the plurality of first gas holes, the number of the second gas pipes is less than or equal to the number of the second gas holes and the first gas holes, the at least one second liquid pipe is used for being connected with the at least one second liquid hole or the at least one first liquid hole, and the number of the second liquid pipe is less than or equal to the number of the second liquid hole and the first liquid hole.

2. The precursor cartridge of claim 1, wherein, The shell comprises a main frame, a first end plate and a second end plate, the main frame comprises a top plate, a first side plate, a bottom plate and a second side plate which are sequentially connected, the main frame has a containing cavity with two open ends, and the first end plate and the second end plate are arranged at the two open ends of the containing cavity to form the containing space; the plurality of first gas holes and the plurality of second gas holes are arranged on the first end plate or the second end plate, the plurality of first gas holes and the plurality of second gas holes extend along a first direction, and the plurality of first gas holes and the plurality of second gas holes do not overlap on the projection of the bottom plate, wherein the first direction is the arrangement direction of the first side plate and the second side plate; the at least one first liquid hole and the at least one second liquid hole are arranged on the first side plate or the second side plate.

3. The precursor cartridge of claim 1, wherein, In the direction from the first end of the first main pipe to the second end of the first main pipe, the first main pipe is sequentially provided with a first stop valve, a first electromagnetic valve, a first three-way valve and a second three-way valve. The first end of the first three-way valve is communicated with the first electromagnetic valve, the second end of the first three-way valve is communicated with the first end of the second three-way valve, the third end of the first three-way valve is communicated with the first gas inlet pipe, the second end of the second three-way valve is communicated with the first liquid inlet pipe, and the third end of the second three-way valve is communicated with the second gas outlet pipe.

4. The precursor cartridge of claim 1, wherein, The second main pipe is sequentially provided with a second stop valve, a second electromagnetic valve, a third three-way valve and a fourth three-way valve from the first end of the second main pipe to the second end of the second main pipe. The first end of the third three-way valve is communicated with the second electromagnetic valve, the second end of the third three-way valve is communicated with the first end of the fourth three-way valve, the third end of the third three-way valve is communicated with the first gas inlet pipe, the second end of the fourth three-way valve is communicated with the first gas outlet pipe, and the third end of the fourth three-way valve is communicated with the second gas outlet pipe.

5. The precursor cartridge of claim 3 or 4, wherein, The first liquid inlet pipe is provided with a third electromagnetic valve, the first gas inlet pipe is provided with a fourth electromagnetic valve, and the first gas outlet pipe is provided with a fifth electromagnetic valve.

6. The precursor cartridge of claim 5, wherein, The at least one second liquid pipe includes a second liquid inlet pipe, the plurality of second gas pipes include a third gas outlet pipe, a fourth gas outlet pipe and a second gas inlet pipe, and the second pipeline group further includes a third main pipe. The second gas inlet pipe and the second liquid inlet pipe are communicated with the evaporator, the first end of the third main pipe is communicated with the evaporator, and the second end of the third main pipe is respectively communicated with the third gas outlet pipe and the fourth gas outlet pipe.

7. The precursor cartridge of claim 6, wherein, The second gas inlet pipe is sequentially provided with a sixth electromagnetic valve, a seventh electromagnetic valve and an eighth electromagnetic valve, and the eighth electromagnetic valve is communicated with the evaporator. The second liquid inlet pipe is sequentially provided with a ninth electromagnetic valve, a fifth three-way valve and a tenth electromagnetic valve, the tenth electromagnetic valve is communicated with the evaporator, the first end of the fifth three-way valve is communicated with the ninth electromagnetic valve, the second end of the fifth three-way valve is communicated with the tenth electromagnetic valve, the third end of the fifth three-way valve is connected between the seventh electromagnetic valve and the eighth electromagnetic valve, the third main pipe is provided with an eleventh electromagnetic valve and a sixth three-way valve, the first end of the sixth three-way valve is connected to the second end of the third main pipe, the second end of the sixth three-way valve is communicated with the third gas outlet pipe, and the third end of the sixth three-way valve is communicated with the fourth gas outlet pipe.

8. The precursor cartridge of claim 3 or 4, wherein, The precursor box further includes a first liquid level sensor and a second liquid level sensor, the first liquid level sensor and the second liquid level sensor are arranged on the top plate of the shell, the first liquid level sensor is used for detecting the liquid level in the steel cylinder, and the second liquid level sensor is used for detecting the liquid level in the evaporator.

9. The precursor cartridge of claim 2, wherein, The shell further includes an air inlet plate arranged on the second side plate or the first side plate, the air inlet plate is provided with a plurality of air inlets, and the second side plate or the first side plate is provided with openings corresponding to the plurality of air inlets.

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