Heating table lifting device and semiconductor equipment

Abstract

The utility model discloses a heating table lifting device and semiconductor equipment, the heating table lifting device is used for driving a heating table to lift, the heating table is fixedly arranged on a lifting base, and the heating table lifting device comprises a driving mechanism used for driving the lifting base to move up and down; the guide rail mechanism comprises guide rail units vertically and symmetrically arranged on the two sides of the lifting base; and the coaxiality adjusting mechanism is connected with the lifting base and comprises an X-axis adjusting assembly and a Y-axis adjusting assembly, the X-axis adjusting assembly is used for adjusting the lifting base in the X-axis direction, and the Y-axis adjusting assembly is used for adjusting the lifting base in the Y-axis direction. Deformation of the driving mechanism caused by difference of atmosphere and vacuum states can be avoided through the symmetrically distributed guide rail units, deflection of the heating table is avoided, the X-axis direction and the Y-axis direction of the lifting base are respectively adjusted through the coaxiality adjusting mechanism, the problem of coordinate system synthesis is avoided, the effect of enhancing lifting control of the heating table is achieved, and the service life of the heating table is prolonged. And the processing performance of thin film processing equipment is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a heating table lifting device and semiconductor equipment. Background Technology

[0002] In thin-film processing equipment, the height control of the heating stage and the positional accuracy between the heating stage and the spray plate play a crucial role in the process effect. Currently, most equipment relies on motor-driven lifting devices to precisely adjust the height of the heating stage, while ensuring its coaxiality and flatness with the spray plate to guarantee uniform airflow. However, existing heating stage lifting devices have significant drawbacks: First, the single-slider linear module offset drive method causes uneven force due to pressure differences during transitions between atmospheric and vacuum conditions, leading to coaxiality deviations in a vacuum environment. Second, existing heating stage lifting devices typically use three set screws for adjustment. When using three set screws, there is a problem of coordinate system interference; for example, two set screws in the 120-degree direction can simultaneously affect the adjustment results in both the X and Y directions, significantly increasing the operational difficulty. Utility Model Content

[0003] This utility model provides a heating stage lifting device and semiconductor equipment, which aims to enhance the lifting control effect of the heating stage and thus improve the processing performance of thin film processing equipment.

[0004] This utility model embodiment provides a heating table lifting device for driving the heating table to rise and fall. The heating table is fixedly installed on the lifting base. The device includes:

[0005] A drive mechanism, connected to the lifting base, is used to drive the lifting base to move up and down;

[0006] The guide rail mechanism includes guide rail units vertically and symmetrically arranged on both sides of the lifting base, and the lifting base can slide up and down on the guide rail units;

[0007] A coaxiality adjustment mechanism is connected to the lifting base. The coaxiality adjustment mechanism includes an X-axis adjustment component and a Y-axis adjustment component. The X-axis adjustment component is used to adjust the lifting base in the X-axis direction, and the Y-axis adjustment component is used to adjust the lifting base in the Y-axis direction.

[0008] Furthermore, it also includes a mounting base, which has a guide rail groove adapted to the guide rail unit, and the guide rail unit is installed in the guide rail groove.

[0009] Furthermore, the guide rail unit is a V-shaped needle roller guide rail, and the lifting base has sliders on both sides that are adapted to the V-shaped needle roller guide rail.

[0010] Furthermore, the X-axis adjustment assembly includes a first drive assembly and a first push assembly. The first drive assembly can drive the first push assembly to move in the X-axis direction, and the first push assembly is in rigid contact with the lifting base.

[0011] Furthermore, the first drive assembly includes a first drive bolt and a second drive bolt respectively disposed on the left and right sides of the lifting base, and the first push assembly includes a first wedge block and a second wedge block respectively disposed on the left and right sides of the lifting base.

[0012] The first driving bolt is used to drive the first wedge block to move along the positive X-axis direction, and the first driving bolt is used to drive the first wedge block to move along the negative X-axis direction.

[0013] Furthermore, the Y-axis adjustment assembly includes a second drive assembly, which can drive the lifting base to move in the Y-axis direction.

[0014] Furthermore, the second drive assembly includes a third drive bolt and a fourth drive bolt distributed along the Y-axis direction. The third drive bolt is used to push the lifting base to move along the positive Y-axis direction, and the fourth drive bolt is used to pull the lifting base to move along the negative Y-axis direction.

[0015] Furthermore, a second pushing component is provided between the third driving bolt and the lifting base.

[0016] Furthermore, the drive mechanism includes an electric lead screw connected to the lifting base and a drive motor connected to the electric lead screw.

[0017] This utility model embodiment also provides a semiconductor device, including a heating stage lifting device as described in any of the preceding claims.

[0018] This utility model provides a heating platform lifting device for driving the heating platform to rise and fall. The heating platform is fixedly installed on a lifting base. The device includes: a driving mechanism connected to the lifting base for driving the lifting base to move up and down; a guide rail mechanism including guide rail units vertically symmetrically arranged on both sides of the lifting base, the lifting base being able to slide up and down on the guide rail units; and a coaxiality adjustment mechanism connected to the lifting base, the coaxiality adjustment mechanism including an X-axis adjustment component and a Y-axis adjustment component, wherein the X-axis adjustment component is used to adjust the lifting base in the X-axis direction, and the Y-axis adjustment component is used to adjust the lifting base in the Y-axis direction. This utility model embodiment uses a drive mechanism to drive the lifting base to move up and down, thereby realizing the lifting operation of the heating table. Because the guide rail units in the guide rail mechanism are symmetrically distributed, deformation of the drive mechanism due to differences in atmospheric and vacuum conditions can be avoided, thus preventing the center of the heating table from tilting and ensuring the uniformity of airflow and extraction during the process. Simultaneously, a coaxiality adjustment mechanism is used to adjust the X-axis and Y-axis directions of the lifting base separately, that is, to adjust the X-axis and Y-axis directions of the heating table separately. This avoids the problem of coordinate system synthesis caused by using a single set screw for adjustment in existing technologies, thereby enhancing the lifting control effect of the heating table and improving the processing performance of the thin film processing equipment. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 A schematic diagram of a heating table lifting device provided for an embodiment of this utility model;

[0021] Figure 2 This is a structural schematic diagram of a heating table lifting device from another perspective, provided as an embodiment of the present utility model.

[0022] Figure 3 This is a structural schematic diagram of a heating table lifting device from another perspective, provided as an embodiment of the present utility model.

[0023] Figure 4 A schematic diagram of the structure of the lifting base in a heating table lifting device provided in an embodiment of this utility model;

[0024] Figure 5 This is a schematic diagram of the guide rail unit in a heating table lifting device provided in an embodiment of the present invention.

[0025] Markings in the image:

[0026] 1. Lifting base; 11. Corrugated pipe; 12. Sliding block;

[0027] 2. Drive mechanism; 21. Electric lead screw; 22. Drive motor;

[0028] 3. Guide rail mechanism; 31. Guide rail unit;

[0029] 4. Coaxiality adjustment mechanism; 41. X-axis adjustment assembly; 411. First drive bolt; 412. Second drive bolt; 413. First wedge block; 414. Second wedge block; 42. Y-axis adjustment assembly; 421. Third drive bolt; 422. Fourth drive bolt; 423. Rectangular block;

[0030] 5. Mounting base; 51. Guide rail groove. Detailed Implementation

[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0032] It should be understood that, when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, integrals, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or collections thereof.

[0033] It should also be understood that the terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. As used in this specification and the appended claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise.

[0034] It should also be further understood that the term "and / or" as used in this specification and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0035] Please see below. Figures 1-3 This utility model provides a heating table lifting device for driving the heating table to rise and fall. The heating table is fixedly installed on the lifting base 1. The device includes:

[0036] Drive mechanism 2 is connected to the lifting base 1 and is used to drive the lifting base 1 to move up and down;

[0037] The guide rail mechanism 3 includes guide rail units 31 arranged vertically and symmetrically on both sides of the lifting base 1, and the lifting base 1 can slide up and down on the guide rail units 31;

[0038] The coaxiality adjustment mechanism 4 is connected to the lifting base 1, and in combination Figure 4 The coaxiality adjustment mechanism 4 includes an X-axis adjustment component 41 and a Y-axis adjustment component 42. The X-axis adjustment component 41 is used to adjust the lifting base 1 in the X-axis direction, and the Y-axis adjustment component 42 is used to adjust the lifting base 1 in the Y-axis direction.

[0039] In this embodiment, the heating platform lifting device includes a drive mechanism 2 and a coaxiality adjustment mechanism 4. The drive mechanism 2 includes an electric lead screw 21 and a drive motor 22, which are used to drive the lifting base 1 and the heating platform to move up and down together. The coaxiality adjustment mechanism 4 includes an X-axis adjustment component 41 and a Y-axis adjustment component 42, which are used to adjust the X-axis direction and Y-axis direction of the lifting base 1 respectively.

[0040] In this embodiment, the lifting base 1 is driven up and down by the drive motor 22 in the drive mechanism 2, thereby realizing the lifting operation of the heating table. Because the guide rail units 31 in the guide rail mechanism 3 are symmetrically distributed, deformation of the drive mechanism 2 due to differences in atmospheric and vacuum conditions can be avoided, thus preventing the center of the heating table from tilting and ensuring the uniformity of gas flow and extraction during the process. Simultaneously, the X-axis and Y-axis directions of the lifting base 1 are adjusted separately by the coaxiality adjustment mechanism 4, that is, the X-axis and Y-axis directions of the heating table are adjusted separately. This avoids the coordinate system synthesis problem caused by the use of three set screws for adjustment in existing technologies, thereby enhancing the lifting control effect of the heating table and improving the processing performance of the thin film processing equipment. In practical applications, the heating table lifting device can be adaptively adjusted to facilitate the operation of the coaxiality adjustment mechanism 4 to adjust the heating table.

[0041] In practical applications, the heating platform can be fixed to the lifting base 1 via a corrugated pipe 11. This ensures the stability of the heating platform during lifting and lowering, preventing displacement due to temperature changes or other factors, thereby further guaranteeing the processing accuracy and stability of the thin film processing equipment. Simultaneously, the corrugated pipe 11 is designed with a certain degree of elasticity, absorbing some vibration and impact, protecting the heating platform and lifting device from damage. Furthermore, the drive mechanism 2 includes an electric lead screw 21 connected to the lifting base 1 and a drive motor 22 connected to the electric lead screw 21. The drive motor 22 drives the electric lead screw 21 to rotate, thereby driving the lifting base 1 to move up and down along the axis of the electric lead screw, realizing the lifting and lowering operation of the heating platform. Additionally, the coaxiality adjustment mechanism 4 can be specifically installed below the lifting base 1 for easy operation and adjustment. Moreover, a positioning device can be installed on the top of the guide rail mechanism 3, for example, using a fine-tuning nut to achieve precise positioning of the lifting base 1, ensuring smooth vertical lifting and lowering of the heating platform. An automatic lubrication function can also be designed for the guide rail mechanism 3 to reduce wear and extend the service life of the equipment.

[0042] In some optional embodiments, the heating platform lifting device in this embodiment may further include sensors and a control system. The sensors can be used to monitor parameters such as the position and speed of the lifting base 1 and the heating platform in real time, and feed these parameters back to the control system. The control system can then precisely control the drive motor 22 based on the sensor feedback signals to achieve precise lifting and adjustment of the heating platform. This design can further improve the automation level and processing accuracy of the heating platform lifting device, providing a more reliable guarantee for high-quality film production.

[0043] In one embodiment, the heating table lifting device further includes a mounting base 5, the mounting base 5 having a guide rail groove 51 adapted to the guide rail unit 31, and the guide rail unit 31 being installed in the guide rail groove 51.

[0044] Based on the drive mechanism 2, this embodiment includes two guide rail units 31 and corresponding mounting bases 5 with guide rail grooves 51. This ensures that the heating table lifting device experiences balanced forces on both sides during operation, avoiding structural distortion caused by unilateral force. This design not only improves the stability and durability of the device but also enhances the overall processing efficiency and precision of the thin film processing equipment, resulting in more reliable product quality.

[0045] Specifically, such as Figure 5 As shown, the guide rail unit 31 is a V-shaped needle roller guide rail, and the lifting base 1 has sliders 12 on both sides that are adapted to the V-shaped needle roller guide rail.

[0046] The design of the V-shaped needle roller guide rail in conjunction with the slider 12 ensures smooth operation during the lifting and lowering of the heating table, reducing friction and noise, thereby improving the working efficiency and service life of the heating table lifting slide. Furthermore, the precise fit between the V-shaped needle roller guide rail and the slider 12 effectively prevents foreign objects from entering, ensuring the cleanliness and precision of the entire device, and providing a strong guarantee for high-quality film production.

[0047] The V-shaped needle roller guide specifically includes a V-shaped guide frame and needle rollers distributed on both sides of the V-shaped guide frame. The V-shaped needle roller guide is installed between the mounting base 5 and the lifting base 1. The guide rail is guided and bears the load through the rolling contact between the needle rollers and the V-shaped cross section between the mounting base 5 and the lifting base 1. This design greatly improves the load-bearing capacity and bending strength of the hot table lifting device, and ensures the stable operation of the equipment under high temperature and heavy load conditions.

[0048] To achieve better performance, the V-shaped needle roller guide can be manufactured using high-quality materials, such as high-precision alloy steel with excellent wear resistance, corrosion resistance, and high-temperature stability, and undergoes precision machining to reduce wear. Furthermore, regular maintenance and lubrication can further extend the service life of the guide and slider 12, ensuring the long-term stable operation of the heating table lifting device.

[0049] In one embodiment, the X-axis adjustment component 41 includes a first drive component and a first push component. The first drive component can drive the first push component to move in the X-axis direction, and the first push component is in rigid contact with the lifting base 1.

[0050] Furthermore, the first drive assembly includes a first drive bolt 411 and a second drive bolt 412 respectively disposed on the left and right sides of the lifting base 1, and the first push assembly includes a first wedge block 413 and a second wedge block 414 respectively disposed on the left and right sides of the lifting base 1.

[0051] The first driving bolt 411 is used to drive the first wedge block 413 to move along the positive X-axis direction, and the first driving bolt 411 is used to drive the first wedge block 413 to move along the negative X-axis direction.

[0052] In this embodiment, the coaxiality adjustment mechanism 4 is divided into an X-axis adjustment component 41 and a Y-axis adjustment component 42. The X-axis adjustment component 41 includes a first drive component and a first push component. The first drive component drives the first push component to move in the X-axis direction, thereby causing the push component to push the lifting base 1 to move along the X-axis direction, thus achieving the effect of adjusting the heating platform in the X-axis direction. Specifically, to further improve the adjustment accuracy, the first drive component is further subdivided into a first drive bolt 411 and a second drive bolt 412, and the first push component is further subdivided into a first wedge block 413 and a second wedge block 414. This allows adjustment in the positive X-axis direction via the first drive bolt 411 and the first wedge block 413, and adjustment in the negative X-axis direction via the second drive bolt 412 and the second wedge block 414.

[0053] In practical applications, the inclined surfaces of the first wedge block 413 and the second wedge block 414 are each connected to the lifting base 1. Thus, when the driving bolt rotates, the interaction of the inclined surfaces converts the rotational motion into linear motion, thereby driving the lifting base 1 to move in the X-axis direction. Furthermore, the design of double driving bolts and double wedge blocks makes the movement of the lifting base 1 in the X-axis direction smoother, avoiding the skew problems that may occur with a single driving point, further improving the accuracy and stability of the adjustment. Preferably, to ensure that the first driving bolt 411 and the second driving bolt 412 can accurately drive the first wedge block 413 and the second wedge block 414, a precision transmission mechanism, such as gear transmission or belt transmission, can be provided between the driving bolt and the wedge blocks. These transmission mechanisms ensure that the rotational motion of the driving bolt is accurately transmitted to the wedge blocks, thereby achieving precise adjustment of the lifting base 1.

[0054] In one embodiment, the Y-axis adjustment component 42 includes a second drive component that can drive the lifting base 1 to move in the Y-axis direction.

[0055] Specifically, the second drive assembly includes a third drive bolt 421 and a fourth drive bolt 422 distributed along the Y-axis. The third drive bolt 421 is used to push the lifting base 1 to move along the positive Y-axis direction, and the fourth drive bolt 422 is used to pull the lifting base 1 to move along the negative Y-axis direction.

[0056] In this embodiment, the Y-axis adjustment component 42 is used to adjust the Y-axis direction of the lifting base 1, thereby achieving the effect of adjusting the heating platform in the Y-axis direction. The Y-axis adjustment component 42 includes a third drive bolt 421 for adjustment in the positive Y-axis direction and a fourth drive bolt 422 for adjustment in the negative Y-axis direction. When the third drive bolt 421 is adjusted, it pushes the lifting base 1 upwards in a "push" manner to achieve movement in the positive Y-axis direction. When the fourth drive bolt 422 is adjusted, it pulls the lifting base 1 downwards in a "pull" manner to achieve movement in the negative Y-axis direction.

[0057] In some optional embodiments, a second pushing component is provided between the third driving bolt 421 and the lifting base 1. By providing a pushing component between the third driving bolt 421 and the lifting base 1, direct contact between the third driving bolt 421 and the lifting base 1 can be avoided, thus preventing wear on the lifting base 1 during adjustment. The second pushing component can specifically be a rectangular block 423 or other regular objects, which can avoid problems such as jamming, wear, and adjustment accuracy issues that may occur due to irregular shapes during adjustment.

[0058] In practical applications, both the wedge block in the X-axis adjustment assembly 41 and the second push assembly can be made of stainless steel. This material has good hardness and wear resistance, effectively resisting wear during long-term operation and ensuring adjustment accuracy and the service life of the device. In addition, stainless steel also has good corrosion resistance, maintaining stable performance in various harsh environments, further improving the reliability and durability of the heating table lifting device.

[0059] Of course, in some embodiments, a single drive component can be used to achieve adjustment in the positive and negative X-axis or Y-axis directions. However, the accuracy and stability of this method may not be as good as using a dual-drive component. Using a dual-drive component, such as the first drive bolt 411 and the second drive bolt 412, as well as the third drive bolt 421 and the fourth drive bolt 422 in this embodiment, allows the lifting base 1 to move more smoothly and precisely in the X and Y axes. This is because a dual-drive component can provide a more balanced driving force, avoiding the skew problems that may be caused by a single drive point. At the same time, a dual-drive component can also achieve finer adjustments, meeting the requirements of high-precision thin-film processes.

[0060] This utility model embodiment also provides a semiconductor device, including a heating stage lifting device as described in any of the preceding claims.

[0061] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the systems disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the descriptions are relatively simple; relevant parts can be referred to in the method section. It should be noted that those skilled in the art can make various improvements and modifications to this application without departing from the principles of this application, and these improvements and modifications also fall within the protection scope of the claims of this application.

[0062] It should also be noted that, in this specification, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

Claims

1. A heating table lifting device for driving the heating table to rise and fall, wherein the heating table is fixedly installed on a lifting base, characterized in that, The device includes: A drive mechanism, connected to the lifting base, is used to drive the lifting base to move up and down; The guide rail mechanism includes guide rail units vertically and symmetrically arranged on both sides of the lifting base, and the lifting base can slide up and down on the guide rail units; A coaxiality adjustment mechanism is connected to the lifting base. The coaxiality adjustment mechanism includes an X-axis adjustment component and a Y-axis adjustment component. The X-axis adjustment component is used to adjust the lifting base in the X-axis direction, and the Y-axis adjustment component is used to adjust the lifting base in the Y-axis direction.

2. The heating table lifting device according to claim 1, characterized in that, It also includes a mounting base, which has a guide rail groove adapted to the guide rail unit, and the guide rail unit is installed in the guide rail groove.

3. The heating table lifting device according to claim 2, characterized in that, The guide rail unit is a V-shaped needle roller guide rail, and the lifting base has sliders on both sides that are adapted to the V-shaped needle roller guide rail.

4. The heating table lifting device according to claim 1, characterized in that, The X-axis adjustment assembly includes a first drive assembly and a first push assembly. The first drive assembly can drive the first push assembly to move in the X-axis direction, and the first push assembly is in rigid contact with the lifting base.

5. The heating table lifting device according to claim 4, characterized in that, The first drive assembly includes a first drive bolt and a second drive bolt respectively disposed on the left and right sides of the lifting base, and the first push assembly includes a first wedge block and a second wedge block respectively disposed on the left and right sides of the lifting base; The first driving bolt is used to drive the first wedge block to move along the positive X-axis direction, and the first driving bolt is used to drive the first wedge block to move along the negative X-axis direction.

6. The heating table lifting device according to claim 1, characterized in that, The Y-axis adjustment assembly includes a second drive assembly, which can drive the lifting base to move in the Y-axis direction.

7. The heating table lifting device according to claim 6, characterized in that, The second drive assembly includes a third drive bolt and a fourth drive bolt distributed along the Y-axis direction. The third drive bolt is used to push the lifting base to move along the positive Y-axis direction, and the fourth drive bolt is used to pull the lifting base to move along the negative Y-axis direction.

8. The heating table lifting device according to claim 7, characterized in that, A second pushing component is provided between the third driving bolt and the lifting base.

9. The heating table lifting device according to claim 1, characterized in that, The drive mechanism includes an electric lead screw connected to the lifting base and a drive motor connected to the electric lead screw.

10. A semiconductor device, characterized in that, Includes the heating table lifting device as described in any one of claims 1-9.

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