Control circuit of electromagnetic gate valve, control circuit of vacuum pump and vacuum system

Abstract

The invention relates to the field of electronic circuits, and provides a control circuit of an electromagnetic gate valve, a control circuit of a vacuum pump and a vacuum system. A control circuit of an electromagnetic gate valve is connected with the electromagnetic gate valve, the electromagnetic gate valve is used for being matched with a vacuum pump to adjust the vacuum degree of a closed space, and the control circuit of the electromagnetic gate valve comprises a control unit, a driving unit and a switch unit. A control signal and a target clock signal are output by a control unit, the control signal output by the control unit is changed from a first state to a second state under the conditions of abnormal restart, abnormal reset and the like, the target clock signal is not output, and at the moment, a driving unit can continuously output a first switch control signal; the latch operation of the output first switch control signal is realized; therefore, the electromagnetic gate valve is continuously controlled to execute the first operation, the electromagnetic gate valve is prevented from being influenced by abnormal conditions of a control system, and a new scheme with higher stability and reliability is provided for maintaining a vacuum environment.

Description

Technical Field

[0001] The present application belongs to the technical field of electronic circuits, and in particular relates to a control circuit of an electromagnetic gate valve, a control circuit of a vacuum pump, and a vacuum system. Background Art

[0002] The vacuum environment has the characteristics of being substance-free, low-pressure, highly conductive and stable, and is widely used in aerospace, electronics, scientific research, vacuum metallurgy and other fields. In order to achieve a vacuum environment, the relevant technical solution uses a vacuum pump to evacuate the confined space, and can also be used with an electromagnetic gate valve to control the airflow, isolation, exhaust and pressure relief of the confined space.

[0003] However, the solenoid gate valve is controlled by the control system of the vacuum pump. If the control system has an abnormality, such as abnormal restart or abnormal reset, the corresponding drive circuit controlling the solenoid gate valve will also be reset, causing the solenoid gate valve to perform an abnormal reset operation, thereby affecting the vacuum state of the confined space and causing losses to industrial production. Summary of the invention

[0004] The purpose of the present application is to provide a control circuit for an electromagnetic gate valve, a control circuit for a vacuum pump and a vacuum system, which can prevent the electromagnetic gate valve from being affected by abnormal conditions in the control system and provide a new solution with higher stability and reliability for maintaining a vacuum environment.

[0005] A first aspect of an embodiment of the present application provides a control circuit of an electromagnetic gate valve, which is connected to the electromagnetic gate valve. The electromagnetic gate valve is used to cooperate with a vacuum pump to adjust the vacuum degree of a confined space. The control circuit of the electromagnetic gate valve includes:

[0006] A control unit, configured to output a control signal and a target clock signal, wherein the control signal includes a first state and a second state;

[0007] a driving unit connected to the control unit, the driving unit being used to receive a control signal and a target clock signal, output a first switch control signal according to the first state and the target clock signal when the received control signal is in a first state, and continuously output the first switch control signal when the received control signal changes from the first state to the second state and the target clock signal is not received;

[0008] A switch unit connected to the electromagnetic gate valve, the switch unit is used to control the electromagnetic gate valve to perform an opening operation or a closing operation according to a first switch control signal;

[0009] The driving unit is further configured to output a second switch control signal when the received control signal changes from the first state to the second state and receives a target clock signal;

[0010] The switch unit is also used to control the electromagnetic gate valve to perform an opening operation or a closing operation according to the second switch control signal; wherein the operations corresponding to the first switch control signal and the second switch control signal are different.

[0011] The control circuit of a solenoid gate valve provided in an embodiment of the present application is connected to the solenoid gate valve, and the solenoid gate valve is used to cooperate with a vacuum pump to adjust the vacuum degree of a confined space. The control circuit of the solenoid gate valve includes: a control unit, a drive unit and a switch unit. Among them, the control unit is connected to the drive unit, the drive unit is connected to the switch unit, and the switch unit is connected to the solenoid gate valve. The control unit outputs a control signal and a target clock signal. Since the control signal includes a first state and a second state, the control signal and the target clock signal can be received by the drive unit, and when the received control signal is in the first state, the first switch control signal is output to the switch unit according to the first state and the target clock signal. The switch unit can control the solenoid gate valve to perform an opening operation or a closing operation according to the first switch control signal. Because the drive unit can also continue to output the first switch control signal when the received control signal changes from the first state to the second state and the target clock signal is not received, in the case of abnormal restart, abnormal reset, etc., the control signal output by the control unit changes from the first state to the second state, and the target clock signal is not output. At this time, the drive unit can continue to output the first switch control signal, that is, to realize the latch operation of the output first switch control signal. When the control signal received by the driving unit changes from the first state to the second state and receives the target clock signal, the second switch control signal is output, so that the switch unit can control the electromagnetic gate valve to perform an opening operation or a closing operation according to the second switch control signal. Here, the operations corresponding to the first switch control signal and the second control signal are different. Based on this, it is possible to ensure flexible control of different operations of the electromagnetic gate valve, and to implement the latching operation of the output first switch control signal in the event of abnormal restart, abnormal reset, etc., thereby avoiding the electromagnetic gate valve from being reset or switching the switch state in the event of abnormal restart, abnormal reset, etc., that is, avoiding the electromagnetic gate valve from being affected by abnormal conditions of the control system, and providing a new solution with higher stability and reliability for maintaining a vacuum environment.

[0012] A second aspect of an embodiment of the present application provides a control circuit of a vacuum pump, which is used to control the vacuum pump. The control circuit of the vacuum pump includes a voltage conversion unit and a control circuit of the electromagnetic gate valve provided by the first aspect above.

[0013] The input end of the voltage conversion unit is connected to the second preset power supply, and the output end of the voltage conversion unit serves as the output end of the first preset power supply. The voltage conversion unit is used to convert the voltage of the second preset power supply to power the control circuit of the electromagnetic gate valve.

[0014] A third aspect of the embodiments of the present application provides a vacuum system, comprising:

[0015] A confined space that has been evacuated;

[0016] A vacuum pump is connected to the enclosed space through an exhaust pipe and is used to evacuate the enclosed space;

[0017] An electromagnetic gate valve is arranged in the air extraction pipeline;

[0018] The vacuum system also includes the control circuit of the vacuum pump provided in the second aspect above.

[0019] It can be understood that the beneficial effects of the second and third aspects mentioned above can be found in the relevant description of the first aspect mentioned above, and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic diagram of the structure of a control circuit of an electromagnetic gate valve in a vacuum pump provided in an embodiment of the present application;

[0021] Figure 2 A schematic diagram of a specific structure of a control circuit of an electromagnetic gate valve provided in an embodiment of the present application;

[0022] Figure 3 A schematic diagram of a specific structure of a control circuit of an electromagnetic gate valve provided in another embodiment of the present application;

[0023] Figure 4 A specific circuit diagram of a control circuit of an electromagnetic gate valve in this application;

[0024] Figure 5 A schematic diagram of a specific structure of a control circuit of an electromagnetic gate valve provided in yet another embodiment of the present application;

[0025] Figure 6 This is a specific circuit diagram of the electromagnetic gate valve state feedback unit in the embodiment of the present application;

[0026] Figure 7 A schematic diagram of the structure of a control circuit of a vacuum pump provided in an embodiment of the present application;

[0027] Figure 8 A schematic diagram of the structure of a vacuum system provided in an embodiment of the present application. DETAILED DESCRIPTION

[0028] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0029] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0030] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0031] See also Figure 1 , Figure 1 The following is a schematic diagram of a control circuit of an electromagnetic gate valve provided in an embodiment of the present application. For ease of explanation, only the parts related to the present embodiment are shown, which are described in detail as follows:

[0032] exist Figure 1 In the embodiment, a control circuit 100 of an electromagnetic gate valve is connected to an electromagnetic gate valve 110, and the electromagnetic gate valve 110 is used to cooperate with a vacuum pump 120 to adjust the vacuum degree of a closed space. The control circuit 100 of the electromagnetic gate valve includes: a control unit 10, a drive unit 20 and a switch unit 30. Specifically:

[0033] The control unit 10 is used to output a control signal and a target clock signal, wherein the control signal includes a first state and a second state. The driving unit 20 is connected to the control unit 10. The driving unit 20 is used to receive the control signal and the target clock signal, and when the received control signal is in the first state, the driving unit 20 outputs a first switch control signal according to the first state and the target clock signal, and when the received control signal changes from the first state to the second state and the target clock signal is not received, the first switch control signal is continuously output. The switch unit 30 is connected to the electromagnetic gate valve 110. The switch unit 30 is used to control the electromagnetic gate valve 110 to perform an opening operation or a closing operation according to the first switch control signal. The driving unit 20 is also used to output a second switch control signal when the received control signal changes from the first state to the second state and the target clock signal is received. The switch unit 30 is also used to control the electromagnetic gate valve 110 to perform an opening operation or a closing operation according to the second switch control signal; wherein the operations corresponding to the first switch control signal and the second control signal are different.

[0034] It can be understood that in any scenario where a vacuum pump 120 is used to evacuate a confined space, the solenoid gate valve 110 can be set on a pipe connected to the air inlet and / or air outlet of the confined space. By controlling the opening and closing of the solenoid gate valve 110, the switching state of the air inlet and / or air outlet of the confined space can be controlled, and the vacuum degree of the confined space can be adjusted in cooperation with the vacuum pump 120.

[0035] For example, Figure 1 As shown, when the electromagnetic gate valve 110 is set in the air extraction pipeline 121 of the closed space connected to the vacuum pump 120, that is, when the electromagnetic gate valve 110 is set in the air extraction pipeline 121 connected to the air inlet of the vacuum pump 120, if the electromagnetic gate valve 110 is abnormally reset, the air extraction pipeline 121 connected to the air inlet of the vacuum pump 120 may be closed, resulting in the vacuum pump 120 being unable to evacuate the closed space, thereby affecting the vacuum degree of the closed space. Similarly, when the electromagnetic gate valve 110 is set in the air intake pipeline and / or the pressure relief pipeline 122 of the closed space, if the electromagnetic gate valve 110 is abnormally reset, the air intake pipeline and / or the pressure relief pipeline 122 of the closed space may be opened, thereby affecting the vacuum degree of the closed space. Based on this, in actual implementation, the solenoid gate valve 110 is used in conjunction with the vacuum pump 120 to adjust the vacuum degree of the enclosed space. Specifically, the solenoid gate valve 110 can be set in at least one of the exhaust pipe connecting the vacuum pump 120 to the enclosed space, the air intake pipe of the enclosed space, and the pressure relief pipe. There is no limitation here.

[0036] In this embodiment, the control unit 10 can provide a control signal and a target clock signal to the driving unit 20 by connecting to the driving unit 20. Here, the target clock signal refers to a valid clock signal to which the driving unit 20 responds to the control signal. The control signal includes a first state and a second state, and the driving unit 20 outputs different switch control signals in response to different control signals.

[0037] Exemplarily, taking the rising edge electrical signal of the clock signal output by the control unit 10 as the target clock signal, when the control unit 10 outputs a control signal to the drive unit 20, if the drive unit 20 receives the rising edge electrical signal provided by the control unit 10, that is, the target clock signal, the drive unit 20 responds to the control signal and outputs a corresponding switch control signal. When the control unit 10 outputs a control signal to the drive unit 20, if the drive unit 20 does not receive the rising edge electrical signal provided by the control unit 10, that is, does not receive the target clock signal, the drive unit 20 does not respond to the control signal, and the switch control signal output at this time is the switch control signal output when the control signal was last responded to.

[0038] It should be noted that, since the switch unit 30 is connected to the electromagnetic gate valve 110, the switch unit 30 can control the electromagnetic gate valve 110 to perform a corresponding operation according to the switch control signal. In this embodiment, the operation performed by the switch unit 30 according to the first switch control signal to control the electromagnetic gate valve 110 is different from the operation performed by the switch unit 30 according to the second switch control signal to control the electromagnetic gate valve 110. For example, the switch unit 30 controls the electromagnetic gate valve 110 to perform an opening operation according to the first switch control signal, and accordingly, the switch unit 30 controls the electromagnetic gate valve 110 to perform a closing operation according to the second switch control signal. For another example, the switch unit 30 controls the electromagnetic gate valve 110 to perform a closing operation according to the first switch control signal, and accordingly, the switch unit 30 controls the electromagnetic gate valve 110 to perform an opening operation according to the second switch control signal.

[0039] For example, in a specific implementation, the electromagnetic gate valve 110 can be synchronously controlled according to the actual working requirements or working state of the vacuum pump 120. For example, the control circuit 100 of the electromagnetic gate valve provided in this embodiment can be controlled by the control circuit of the vacuum pump (not shown in the figure). When the control circuit of the vacuum pump controls the vacuum pump 120 to work, the control circuit 100 of the electromagnetic gate valve can be instructed to control the electromagnetic gate valve 110 to perform a corresponding operation. As for whether the control circuit 100 of the electromagnetic gate valve is instructed to control the electromagnetic gate valve 110 to perform an opening operation or a closing operation, it can be related to the channel position or channel function of the electromagnetic gate valve 110.

[0040] In one example, the electromagnetic gate valve 110 is set in the exhaust pipe 121 of the vacuum pump 120 connected to the enclosed space, and the original state or reset state of the electromagnetic gate valve 110 is the closed state. While the control circuit of the vacuum pump controls the vacuum pump 120 to work, the control unit 10 in the control circuit 100 of the electromagnetic gate valve can be instructed to provide a control signal and a target clock signal to the drive unit 20, and then the corresponding first switch control signal is output to the switch unit 30 through the drive unit 20, so that the switch unit 30 controls the electromagnetic gate valve 110 to perform an opening operation when responding to the first switch control signal, that is, the electromagnetic gate valve 110 is turned from a closed state to an open state. At this time, since the electromagnetic gate valve 110 is in an open state, the vacuum pump 120 is connected to the exhaust pipe 121 connected to the enclosed space, so the vacuum pump 120 can perform a vacuum operation on the enclosed space, and then the vacuum state of the enclosed space can be maintained.

[0041] In another example, taking the electromagnetic gate valve 110 being set in the air intake duct and / or the pressure relief duct 122 of the enclosed space as an example, the original state or reset state of the electromagnetic gate valve 110 is the open state. While the control circuit of the vacuum pump 120 controls the vacuum pump 120 to work, the control unit 10 in the control circuit 100 of the electromagnetic gate valve can be instructed to provide a control signal and a target clock signal to the drive unit 20, and then the drive unit 20 outputs a corresponding first switch control signal to the switch unit 30, so that the switch unit 30 controls the electromagnetic gate valve 110 to perform a closing operation in response to the first switch control signal, that is, the electromagnetic gate valve 110 is turned from the open state to the closed state. At this time, since the electromagnetic gate valve 110 is in the closed state, the air intake duct / pressure relief duct 122 is closed, so that the enclosed space cannot be inlet or depressurized, and at the same time, the vacuum pump 120 can perform a vacuum operation on the enclosed space through the exhaust duct 121 connected to the enclosed space, so as to maintain the vacuum state of the enclosed space.

[0042] In combination with the above example, the control circuit 100 of the electromagnetic gate valve can be controlled by the control circuit of the vacuum pump (not shown in the figure). When the control circuit 100 of the electromagnetic gate valve is used to control the electromagnetic gate valve 110 and cooperate with the vacuum pump 120 to adjust the vacuum degree of the enclosed space, the control unit 10 may be subject to electromagnetic interference or abnormal interference of the control circuit of the vacuum pump, thereby causing abnormal restart, abnormal reset, etc. It should be noted that in the case of abnormal restart, abnormal reset, etc., the control unit 10 executes the program to perform a reset operation. At this time, the control signal output by the control unit 10 to the drive unit 20 can be changed from the first state to the second state, but since the control unit 10 will not immediately output the target clock signal to the drive unit 20 after executing the program to reset, the drive unit 20 will not respond to the second state, so it continues to output the first switch control signal to achieve latching of the first switch control signal.

[0043] For example, when the control circuit 100 of the electromagnetic gate valve is used to control the electromagnetic gate valve 110 and the vacuum pump 120 is used to adjust the vacuum degree of the enclosed space, the control unit 10 outputs the first state and the target clock signal to the driving unit 20. According to the first state and the target clock signal, the driving unit 20 outputs the first switch control signal to the switch unit 30, so that the switch unit 30 can control the electromagnetic gate valve to perform an opening operation or a closing operation according to the first switch control signal. When the control unit 10 is subjected to electromagnetic interference or abnormal interference of the control circuit of the vacuum pump, abnormal restart, abnormal reset, etc. occur, the control unit 10 restarts and performs the corresponding reset operation. At this time, the control signal output by the control unit 10 to the driving unit 20 changes from the original first state to the second state. Since the control unit 10 will not output the target clock signal to the driving unit 20 at this time, the driving unit 20 will not respond to the second state, so the first switch control signal is continuously output to achieve the latching of the first switch control signal. Based on this, the switch unit 30 can still control the electromagnetic gate valve to perform an opening operation or a closing operation according to the first switch control signal.

[0044] In the above scheme, the control unit 10 is used to output the control signal and the target clock signal. Since the control signal includes the first state and the second state, the control signal and the target clock signal can be received by the driving unit 20, and when the received control signal is in the first state, the first switch control signal is output to the switch unit 30 according to the first state and the target clock signal. The switch unit 30 can control the electromagnetic gate valve 110 to perform the first operation according to the first switch control signal. In addition, because the driving unit 20 can also continue to output the first switch control signal when the received control signal changes from the first state to the second state and the target clock signal is not received, in the case of abnormal restart, abnormal reset, etc., when the control signal output by the control unit 10 changes from the first state to the second state and the target clock signal is not output, the driving unit 20 does not respond to the second state and continues to output the first switch control signal, thereby realizing the latching of the output first switch control signal. That is, the switch unit 30 can continuously control the electromagnetic gate valve 110 to perform the first operation according to the first switch control signal, avoiding the electromagnetic gate valve 110 from resetting or switching the operating state in the event of abnormal restart or abnormal reset, thereby improving the stability and reliability of maintaining the vacuum environment.

[0045] It is understandable that, assuming that no abnormal restart or abnormal reset occurs, the control signal output by the control unit 10 changes from the first state to the second state, and also outputs the target clock signal, the driving unit 20 responds to the second state.

[0046] In this embodiment, the drive unit 20 is also used to output a second switch control signal when the received control signal changes from the first state to the second state and when the target clock signal is received. The switch unit 30 is also used to control the electromagnetic gate valve 110 to perform an opening operation or a closing operation according to the second switch control signal. Here, the operations corresponding to the first switch control signal and the second control signal are different. That is, the operation performed by the switch unit 30 to control the electromagnetic gate valve 110 according to the first switch control signal is different from the operation performed by the switch unit 30 to control the electromagnetic gate valve 110 according to the second switch control signal.

[0047] For example, the switch unit 30 controls the electromagnetic gate valve 110 to be in an open state according to the first switch control signal, and the switch unit 30 controls the electromagnetic gate valve 110 to be in a closed state according to the second switch control signal.

[0048] For another example, the switch unit 30 controls the electromagnetic gate valve 110 to execute the closed state according to the first switch control signal, and the switch unit 30 controls the electromagnetic gate valve 110 to execute the closed state according to the second switch control signal.

[0049] In some embodiments, the control unit 10 provides a control signal and a target clock signal to the driving unit 20 , and specifically may output the control signal and the target clock signal simultaneously.

[0050] It is easy to understand that in other embodiments, the target clock signal can also be a signal output by the control unit 10 to the drive unit 20 when responding to the instruction to control the electromagnetic gate valve 110. Based on this, in order to ensure that the drive unit 20 can accurately respond to the control signal, the control signal can be output to the drive unit 20 first, and then the target clock signal can be output to the drive unit 20.

[0051] As an embodiment, the control unit 10 is specifically configured to output a target clock signal when the duration of outputting the first state satisfies a preset duration.

[0052] In this embodiment, the preset duration is used to indicate the timing of determining to output the target clock signal when the first state has been output.

[0053] In a specific implementation, when the control unit 10 outputs the first state and performs timing at the same time, when the duration of outputting the first state is not less than the preset duration, the control unit 10 outputs a target clock signal to the driving unit 20. At this time, the driving unit 20 responds to the first data number under the action of the target clock signal, and then outputs a corresponding first switch control signal.

[0054] As an embodiment, the driving unit 20 is further used to output a power-on reset signal when powered on. The switch unit 30 is further used to control the electromagnetic gate valve 110 to perform a reset operation according to the power-on reset signal.

[0055] In this embodiment, power-on refers to the state when the control circuit 100 of the electromagnetic gate valve is just powered on, and can also be understood as when power is supplied to the control circuit 100 of the electromagnetic gate valve. Here, in order to ensure that the control circuit 100 of the electromagnetic gate valve does not cause confusion in the control of the electromagnetic gate valve 110, the drive unit 20 outputs a power-on reset signal when powered on, and can instruct the switch unit 30 to control the electromagnetic gate valve 110 to perform a reset operation according to the power-on reset signal.

[0056] In a specific implementation, the power supply end of the drive unit 20 can be connected to the first preset power supply. When the first preset power supply supplies power to the drive unit 20, the drive unit 20 is in a power-on state, and at this time, a corresponding power-on reset signal is output to the switch unit 30. The switch unit 30 controls the electromagnetic gate valve 110 to perform a reset operation according to the power-on reset signal. It is easy to understand that, unlike the switch control signal, the power-on reset signal is used to instruct the switch unit 30 to control the electromagnetic gate valve 110 to reset, that is, to control the electromagnetic gate valve 110 to return to the default state.

[0057] For example, the default state of the electromagnetic gate valve 110 is the open state. The drive unit 20 outputs a power-on reset signal when powered on. The switch unit 30 controls the electromagnetic gate valve 110 to perform a reset operation according to the power-on reset signal, that is, to switch from the closed state to the open state, or to maintain the open state.

[0058] For another example, the default state of the electromagnetic gate valve 110 is the closed state. The drive unit 20 outputs a power-on reset signal when powered on. The switch unit 30 controls the electromagnetic gate valve 110 to perform a reset operation according to the power-on reset signal, that is, to switch from the open state to the closed state, or to maintain the closed state.

[0059] In the above scheme, the drive unit 20 outputs a power-on reset signal when powered on, and the switch unit 30 controls the solenoid gate valve 110 to perform a reset operation according to the power-on reset signal, so that the solenoid gate valve 110 can return to a default state, thereby ensuring the stability of the subsequent control of the solenoid gate valve 110 by the solenoid gate valve control circuit 100 and improving the reliability of the use of the solenoid gate valve 110.

[0060] Figure 2 FIG. 1 shows a schematic diagram of a specific structure of a control circuit of an electromagnetic gate valve provided in an embodiment of the present application. Figure 2 As shown, as an embodiment, the driving unit 20 includes: a driving circuit 21.

[0061] The driving circuit 21 includes a power supply terminal 211, a reset terminal 212, a first input terminal 213, a second input terminal 214 and an output terminal 215. The power supply terminal 211 and the reset terminal 212 are connected to a first preset power supply VCC1, the first input terminal 213 and the second input terminal 214 are connected to the control unit 10 respectively, and the output terminal 215 is connected to the switch unit 30.

[0062] In this embodiment, the power supply terminal 211 and the reset terminal 212 of the drive circuit 21 are connected to the first preset power supply VCC1. When the first preset power supply VCC1 supplies power to the drive circuit 21, the power supply terminal 211 and the reset terminal 212 of the drive circuit 21 are powered on at the same time. Here, the power supply terminal 211 of the drive circuit 21 enters the working state after being powered on. At this time, due to the electric energy provided by the first preset power supply VCC1, the reset terminal 212 enters the reset working state, and then outputs a power-on reset signal to the switch unit 30 through the output terminal 215, so that the switch unit 30 can control the electromagnetic gate valve 110 to perform a reset operation according to the power-on reset signal.

[0063] like Figure 2 As shown, the first input terminal 213 and the second input terminal 214 of the driving circuit 21 are respectively connected to the control unit 10, and the control unit 10 can output the target clock signal and the control signal to the driving circuit 21 through the first input terminal 213 and the second input terminal 214. After the driving circuit 21 outputs the power-on reset signal, the corresponding switch control signal can be output to the switch unit 30 according to the received control signal and the target clock signal.

[0064] In the above scheme, by connecting the power supply terminal 211 and the reset terminal 212 of the drive circuit 21 to the first preset power supply VCC1, the reset terminal 212 can make the drive circuit 21 enter the reset working state under the action of the electric energy provided by the first preset power supply VCC1 while the first preset power supply VCC1 supplies power to the drive circuit 21, and then output a power-on reset signal to the switch unit 30 through the output terminal 215, so that the switch unit 30 can control the electromagnetic gate valve 110 to perform a reset operation according to the power-on reset signal. It is achieved that the drive circuit 21 immediately enters the reset working state when the drive circuit 21 is powered on, ensuring that the electromagnetic gate valve 110 can be controlled to perform a reset operation when powered on.

[0065] Figure 3 FIG. 2 shows a schematic diagram of a control circuit of an electromagnetic gate valve provided by another embodiment of the present application. Figure 3 As shown, as an embodiment, the driving unit 20 further includes: an RC circuit 22 .

[0066] exist Figure 3In the embodiment, the first end of the RC circuit 22 is connected to the first preset power source VCC1, and the second end of the RC circuit 22 is connected to the reset end 212 of the driving circuit 21. The RC circuit 22 is used to output a reset electrical signal to the reset end 212 of the driving circuit 21 when the voltage value of the first preset power source VCC1 is less than the preset voltage value, and to stop outputting the reset electrical signal to the reset end 212 of the driving circuit 21 when the voltage value of the first preset power source VCC1 is not less than the preset voltage value. The driving circuit 21 is also used to output a power-on reset signal to the switch unit 30 when receiving the reset electrical signal, and to stop outputting the power-on reset signal to the switch unit 30 when not receiving the reset electrical signal.

[0067] In this embodiment, since the reset terminal 212 of the driving circuit 21 is connected to the second terminal of the RC circuit 22 , the electric energy of the first preset power source VCC1 acts on the reset terminal 212 of the driving circuit 21 after passing through the RC circuit 22 .

[0068] In a specific implementation, the first preset power supply VCC1 can be obtained by voltage conversion of the input power supply. It is easy to understand that when the power supply is just connected and the first preset power supply VCC1 is output, that is, when the power is just turned on, it takes a certain time for the voltage to be converted to a stable output voltage, that is, when the first preset power supply VCC1 is used for power supply at the beginning, the voltage of the first preset power supply VCC1 is unstable. That is, at this time, the voltage value of the first preset power supply VCC1 is less than the preset voltage value, so the RC circuit 22 can be used to suppress the jump voltage of the first preset power supply VCC1, so that the voltage of the first preset power supply VCC1 acting on the reset terminal 212 of the drive circuit 21 through the RC circuit 22 is in a slowly rising state, and the slowly rising voltage can be used as a reset electrical signal. Under the action that the voltage value of the first preset power supply VCC1 is less than the preset voltage value, the RC circuit 22 outputs a reset electrical signal to the reset terminal 212 of the drive circuit 21. After the voltage of the first preset power source VCC1 is stabilized within a certain range, that is, when the voltage of the first preset power source VCC1 is not less than the preset voltage value, the voltage of the first preset power source VCC1 acting on the reset terminal 212 of the driving circuit 21 through the RC circuit 22 no longer rises slowly. At this time, the RC circuit 22 stops outputting the reset electrical signal to the reset terminal 212 of the driving circuit 21 under the action that the voltage value of the first preset power source VCC1 is not less than the preset voltage value. Here, the preset voltage value refers to the stable voltage value of the first preset power source VCC1.

[0069] The above scheme utilizes the unstable voltage of the first preset power source VCC1 when power is just turned on, and cooperates with the effect of the RC circuit on the unstable voltage, so that the voltage acting on the reset terminal 212 of the drive circuit 21 has the characteristic of slowly rising, and can be used as a reset electrical signal output to the reset terminal 212 of the drive circuit 21. After the voltage of the first preset power source VCC1 is stable, that is, when the voltage of the reset terminal 212 of the drive circuit 21 is not less than the preset voltage value, it can be regarded as the timing to stop outputting the reset electrical signal to the reset terminal 212 of the drive circuit 21. Based on this, in cooperation with the drive circuit 21, the power-on reset signal can be output to the switch unit 30 and the power-on reset signal can be stopped in the process from the unstable voltage of the first preset power source VCC1 to the stable voltage, so as to realize the immediate reset at the same time as the power is turned on, and ensure that the electromagnetic gate valve 110 can be controlled to perform the reset operation at the time of power-on.

[0070] Figure 4 A specific circuit diagram of a control circuit of an electromagnetic gate valve provided in an embodiment of the present application is shown.

[0071] like Figure 4 As shown, as an embodiment, the RC circuit 22 includes: a first resistor R1 and a first capacitor C1. The first end of the first resistor R1 serves as the first end of the RC circuit 22, the second end of the first resistor R1 is connected to the first end of the first capacitor C1 to form a first node P1, the first node P1 serves as the second end of the RC circuit 22, and the second end of the first capacitor C1 is grounded.

[0072] Combination Figure 3 and Figure 4 In this embodiment, the RC circuit 22 is connected to the first preset power supply VCC1 through the first resistor R1. When the voltage value of the first preset power supply VCC1 is less than the preset voltage value, under the action of the first resistor R1 and the first capacitor C1, the voltage of the first node P1 rises slowly. At this time, it is equivalent to outputting a reset electrical signal to the reset terminal 212 of the drive circuit 21. When the voltage value of the first preset power supply VCC1 is not less than the preset voltage value, that is, after the voltage of the first preset power supply VCC1 is stable, the voltage of the first node P1 remains stable, that is, the reset electrical signal is stopped from being output to the reset terminal 212 of the drive circuit 21.

[0073] like Figure 4 As shown, as an embodiment, the driving circuit 21 includes: a first chip U1, a second capacitor C2, a second resistor R2, a third resistor R3, a fourth resistor R4, a fifth resistor R5 and a sixth resistor R6.

[0074] In this embodiment, the power supply terminal VCC of the first chip U1 and the first terminal of the second capacitor C2 are connected to the first preset power supply VCC1, the second terminal of the second capacitor C2 is grounded, and the power-on reset terminal of the first chip U1 is As the reset terminal 212 of the driving circuit 21. The first end of the second resistor R2 serves as the first input terminal 213 of the driving circuit 21, and the second end of the second resistor R2 and the first end of the third resistor R3 are connected to the clock signal input terminal CLK of the first chip U1. The second end of the third resistor R3 is grounded. The first end of the fourth resistor R4 serves as the second input terminal 214 of the driving circuit 21, and the second end of the fourth resistor R4 is connected to the control signal input terminal D of the first chip U1. The first end of the fifth resistor R5 and the first end of the sixth resistor R6 are connected to form a second node P2, and the second node P2 serves as the output terminal of the driving circuit 21. The second end of the fifth resistor R5 is connected to the output terminal Q of the first chip U1, and the second end of the sixth resistor R6 is grounded.

[0075] exist Figure 4 In the example, since the power supply terminal VCC of the first chip U1 and the first terminal of the second capacitor C2 are connected to the first preset power supply VCC1, and the second terminal of the second capacitor C2 is grounded, the second capacitor C2 is equivalent to being connected between the power supply terminal VCC of the first chip U1 and the ground, and can play a role in filtering the electric energy provided by the first preset power supply VCC1. Similar to the role of the second capacitor C2, Figure 4 The first capacitor C1 in the embodiment can also be regarded as being connected between the first node P1 and the ground, that is, the first capacitor C1 can also play a role in filtering the electric energy provided by the first preset power source VCC1.

[0076] like Figure 4 As shown, as an embodiment, the switch unit 30 includes a switch tube Q1 and a diode D1. The controlled end of the switch tube Q1 is connected to the output end (i.e., the second node P2) of the drive circuit 21, the ground end of the switch tube Q1 is grounded, the power end of the switch tube Q1 is connected to the anode end of the diode D1 to form a third node P3, and the third node P3 is used to connect the electromagnetic gate valve 110, and the cathode end of the diode D1 is connected to the second preset power supply VCC2.

[0077] In all embodiments of the present application, the switch unit 30 is connected to the electromagnetic gate valve 110, and specifically can be connected to the electromagnetic coil of the electromagnetic gate valve 110. Here, the electromagnetic gate valve 110 is grounded through the switch unit 30, and the on-off control of the circuit where the electromagnetic gate valve 110 is located can be achieved by controlling the on-off of the switch unit 30.

[0078] Exemplarily, when the circuit where the electromagnetic gate valve 110 is located is turned on, that is, when the electromagnetic coil of the electromagnetic gate valve 110 is energized, the electromagnetic coil of the electromagnetic gate valve 110 generates electromagnetic force to lift the closing member in the electromagnetic gate valve 110 from the valve seat, and the valve of the electromagnetic gate valve 110 is opened, and the electromagnetic gate valve 110 is opened. When the electromagnetic coil of the electromagnetic gate valve 110 is de-energized, the electromagnetic force generated by the electromagnetic coil of the electromagnetic gate valve 110 disappears, the closing member in the electromagnetic gate valve 110 is closed to the valve seat, and the valve of the electromagnetic gate valve 110 is closed, and the electromagnetic gate valve 110 is closed.

[0079] In this embodiment, one end of the electromagnetic coil of the electromagnetic gate valve 110 is connected to the second preset power supply VCC2 in this embodiment, and the other end of the electromagnetic coil of the electromagnetic gate valve 110 is connected to the third node P3. By controlling the on and off of the switch tube Q1, the electromagnetic coil of the electromagnetic gate valve 110 is energized.

[0080] It is easy to understand that, in a specific implementation, the switch tube Q1 can be any one of an N-type transistor, a P-type transistor, a triode, and an IGBT tube with a built-in diode.

[0081] For example, in combination Figure 3 and Figure 4 ,by Figure 4 Taking the switch tube Q1 as an example, the control unit 10 can output the control signal and the target clock signal to the drive circuit 21 through the first input terminal 213 and the second input terminal 214. At this time, the control signal is limited by the fourth resistor R4 and acts on the control signal input terminal D of the first chip U1. The target clock signal acts on the clock signal input terminal CLK of the first chip U1 through the current limiting voltage divider branch composed of the second resistor R2 and the third resistor R3.

[0082] In an example, when the control signal is in the first state, the first chip U1 outputs the first switch control signal through the output terminal Q of the first chip U1 under the action of the first state and the target clock signal.

[0083] In another example, when an abnormal restart or abnormal reset occurs, the control signal output by the control unit 10 changes from the first state to the second state. At the same time, because the control unit 10 abnormally restarts or resets, the control unit 10 does not output the target clock signal. Accordingly, the clock signal input terminal CLK of the first chip U1 does not receive the target clock signal, and the control signal input by the control signal input terminal D of the first chip U1 changes from the first state to the second state. Since the response of the first chip U1 to the control signal depends on the target clock signal, when the clock signal input terminal CLK of the first chip U1 does not receive the target clock signal, the first chip U1 does not respond to the second state and continues to output the first switch control signal, thereby latching the output first switch control signal.

[0084] In another example, when the control signal output by the control unit 10 changes from the first state to the second state, if the control unit 10 still outputs the target clock signal, at this time, the clock signal input terminal CLK of the first chip U1 receives the target clock signal, and the control signal input by the control signal input terminal D of the first chip U1 changes from the first state to the second state. Since the response of the first chip U1 to the control signal depends on the target clock signal, when the clock signal input terminal CLK of the first chip U1 receives the target clock signal, the first chip U1 responds to the second state, and then outputs the second switch control signal to the switch unit 30.

[0085] It is easy to understand that the first switch control signal can be a high level signal, and correspondingly, the second switch control signal can be a low level signal. Alternatively, the first switch control signal can be a low level signal, and correspondingly, the second switch control signal can be a high level signal.

[0086] Combining the above examples, Figure 4In the embodiment, one end of the electromagnetic coil of the electromagnetic gate valve 110 is connected to the second preset power supply VCC2 in this embodiment, and the other end of the electromagnetic coil of the electromagnetic gate valve 110 is connected to the third node P3. In one example, when the first chip U1 receives the reset electrical signal, a power-on reset signal can be output to the switch tube Q1 through the second node P2. If the power-on reset signal is a low-level signal, the switch tube Q1 is turned on, and at this time, the third node P3 can form a loop with the ground through the switch tube Q1, and the electromagnetic gate valve 110 is in a power-on state, that is, the reset state of the electromagnetic gate valve 110 is an open state. In this example, after the electromagnetic gate valve 110 is reset, when the control unit 10 provides the first state and the target clock signal to the first chip U1, the first switch control signal output by the first chip U1 according to the first state and the target clock signal can be a high-level signal. At this time, the switch tube Q1 is turned off, and at this time, the third node P3 cannot form a loop with the ground through the switch tube Q1, and the electromagnetic gate valve 110 is in a non-powered state, that is, the electromagnetic gate valve 110 is in a closed state. When the control signal input to the first chip U1 changes from the first state to the second state and the target clock signal is not received, the first chip U1 continues to output the first switch control signal, and the first switch control signal is a high-level signal. At this time, the switch tube Q1 remains off, and the electromagnetic gate valve 110 remains in a non-powered state, that is, the electromagnetic gate valve 110 remains in a closed state. When the control signal input to the first chip U1 changes from the first state to the second state and the target clock signal is received, the first chip U1 changes from outputting the first switch control signal to outputting the second switch control signal, and the second switch control signal is a low-level signal. At this time, the switch tube Q1 is turned on, and the electromagnetic gate valve 110 is powered on, that is, the electromagnetic gate valve 110 changes from a closed state to an open state.

[0087] In another example, when the first chip U1 receives a reset electrical signal, a power-on reset signal can be output to the switch tube Q1 through the second node P2. If the power-on reset signal is a high-level signal, the switch tube Q1 is turned off, and the third node P3 cannot form a loop with the ground through the switch tube Q1. At this time, the electromagnetic gate valve 110 is in a non-powered state, that is, the reset state of the electromagnetic gate valve 110 is a closed state. In this example, after the electromagnetic gate valve 110 is reset, when the control unit 10 provides the first chip U1 with a first state and a target clock signal, the first switch control signal output by the first chip U1 according to the first state and the target clock signal can be a low-level signal. At this time, the switch tube Q1 is turned on, and the third node P3 can form a loop with the ground through the switch tube Q1, and the electromagnetic gate valve 110 is in a powered state, that is, the electromagnetic gate valve 110 is in an open state. When the control signal input by the first chip U1 changes from the first state to the second state and the target clock signal is not received, the first chip U1 continues to output the first switch control signal, and the first switch control signal is a low-level signal. At this time, the switch tube Q1 remains open, and the electromagnetic gate valve 110 remains in the energized state, that is, the electromagnetic gate valve 110 remains in the open state. Until the control signal input by the first chip U1 changes from the first state to the second state and the target clock signal is received, the first chip U1 changes from outputting the first switch control signal to outputting the second switch control signal, and the second switch control signal is a high-level signal. At this time, the switch tube Q1 is turned off, and the electromagnetic gate valve 110 is no longer energized, that is, the electromagnetic gate valve 110 changes from the open state to the closed state.

[0088] In a specific implementation, the control unit 10 may include a second chip (not shown in the figure), that is, the second chip may drive the first input terminal 213 and the second input terminal 214 of the circuit 21, and output the target clock signal and the control signal to the driving circuit 21. The first chip U1 may be a latch, which inputs the first switch control signal by inputting the control signal and the target clock signal, and latches the first switch control signal outputted by the latch when the input control signal changes and the corresponding target clock signal is not received.

[0089] In the above scheme, in the switch unit 30, the power supply end of the switch tube Q1 is connected to the anode end of the diode D1 to form a third node P3, and the electromagnetic gate valve 110 is connected through the third node P3, and the cathode end of the diode D1 is connected to the second preset power supply VCC2, thereby connecting the switch tube Q1 to the circuit between the electromagnetic gate valve 110 and the ground. Thus, while ensuring that the latching operation of the output first switch control signal can be realized in the case of abnormal restart, abnormal reset, etc., the on-off control of the grounding circuit of the electromagnetic gate valve 110 can be realized by controlling the on-off of the switch tube Q1, thereby improving the rationality of the control of the electromagnetic gate valve 110.

[0090] Figure 5 FIG. 2 shows a schematic diagram of a control circuit of an electromagnetic gate valve provided by another embodiment of the present application. Figure 5 As shown, the control circuit 100 of the electromagnetic gate valve further includes: an electromagnetic gate valve state feedback unit 40 .

[0091] In this embodiment, the electromagnetic gate valve state feedback unit 40 is connected to the control unit 10. The electromagnetic gate valve state feedback unit 40 is used to detect the current state information of the electromagnetic gate valve 110 and send the current state information to the control unit 10, and the current state information is used to indicate the open state or closed state of the electromagnetic gate valve 110.

[0092] In this embodiment, the electromagnetic gate valve state feedback unit 40 may be disposed in the electromagnetic gate valve 110 , and may be disposed around the closing member of the electromagnetic gate valve 110 , or within the action range of the closing member of the electromagnetic gate valve 110 .

[0093] In a specific implementation, the solenoid gate valve state feedback unit 40 can be a sensor. When controlling the action of the solenoid gate valve 110, the sensor can detect that the closing member of the solenoid gate valve 110 is closed to the valve seat, or detect that the closing member of the solenoid gate valve 110 is lifted from the valve seat, and then output the current state information to the control unit 10, which is used to indicate the open state or closed state of the solenoid gate valve 110.

[0094] like Figure 5 As shown, in this embodiment, the electromagnetic gate valve state feedback unit 40 may include a first feedback terminal 401 and a second feedback terminal 402. Here, the first feedback terminal 401 and the second feedback terminal 402 are connected to the control unit 10 respectively.

[0095] In some embodiments, the electromagnetic gate valve state feedback unit 40 may specifically include two sensors, wherein the first sensor is used to detect the open state of the closing member of the electromagnetic gate valve 110 , and the second sensor is used to detect the closed state of the closing member of the electromagnetic gate valve 110 .

[0096] For example, when the first sensor triggers a corresponding electrical signal, the electromagnetic gate valve state feedback unit 40 can send current state information indicating that the electromagnetic gate valve 110 is in an open state to the control unit 10 through the first feedback terminal 401. When the second sensor triggers a corresponding electrical signal, the electromagnetic gate valve state feedback unit 40 can send current state information indicating that the electromagnetic gate valve 110 is in a closed state to the control unit 10 through the second feedback terminal 402.

[0097] For another example, when the first sensor triggers a corresponding electrical signal, the electromagnetic gate valve state feedback unit 40 can send current state information indicating that the electromagnetic gate valve 110 is in a closed state to the control unit 10 through the first feedback terminal 401. When the second sensor triggers a corresponding electrical signal, the electromagnetic gate valve state feedback unit 40 can send current state information indicating that the electromagnetic gate valve 110 is in an open state to the control unit 10 through the second feedback terminal 402.

[0098] As an embodiment, the control unit 10 is further used to respond to a system reset instruction, obtain a reset type, and when the reset type is non-power-on reset, use the last stored current state information to regulate the electromagnetic gate valve 110.

[0099] In this embodiment, the system reset instruction refers to an instruction for controlling the electromagnetic gate valve 110 to perform a reset operation. Here, when the control circuit 100 of the electromagnetic gate valve is powered on, a power-on reset signal can be automatically triggered, that is, the power-on reset instruction performs a power-on reset operation on the electromagnetic gate valve 110. Of course, the system reset instruction can also be triggered in an abnormal state. For example, the control circuit 100 of the electromagnetic gate valve is triggered by electromagnetic interference and the like.

[0100] It is easy to understand that when the control unit 10 responds to the system reset instruction, the reset type can be learned based on whether the driving unit 20 responds to the system reset instruction or outputs a power-on reset signal corresponding to the system reset instruction.

[0101] Combination Figure 5 For example, when the control circuit 100 of the electromagnetic gate valve is just connected to the power supply, the driving unit 20 can output a power-on reset signal to control the electromagnetic gate valve 110 to perform a reset operation. At this time, the control unit 10 can learn that the power-on reset signal is output by the driving unit 20, and then determine that the reset type is a power-on reset.

[0102] As an example, when an abnormality occurs in the control circuit of the vacuum pump connected to the control circuit 100 of the electromagnetic gate valve, it may trigger the program in the control unit 10 to restart, that is, send a system reset instruction to the control unit 10. When the control unit 10 receives the system reset instruction, it can determine that the corresponding reset type is non-power-on reset.

[0103] In another embodiment, the control unit 10 may also obtain the reset type according to the input signal and the output signal of the driving unit 20. For example, when the control signal output by the driving unit 20 changes from the first state to the second state, the control unit 10 does not output the target clock signal to the driving unit 20, and the corresponding reset type can be determined to be a non-power-on reset. At this time, since the driving unit 20 does not respond to the second state, the control unit 10 may also determine that the corresponding reset type is a non-power-on reset according to the change of the output control signal and / or whether the driving unit 20 responds to the changed control signal.

[0104] In the above scheme, when the control unit 10 responds to the system reset instruction and obtains the reset type to determine that the reset type is not a power-on reset, it can be determined that the solenoid gate valve 110 is not controlled by the drive unit 20 and the switch unit 30 to perform a reset operation. Based on this, the solenoid gate valve 110 can be regulated using the current state information stored last time, that is, the state information of the solenoid gate valve stored in the current program of the control unit 10 is the same as the actual state of the solenoid gate valve 110. The solenoid gate valve 110 is regulated using the current state information stored last time, which can ensure the accuracy and stability of the solenoid gate valve 110 regulated by the control circuit 100 of the solenoid gate valve.

[0105] See also Figure 6 , Figure 6 FIG. 2 shows a specific circuit diagram of the electromagnetic gate valve state feedback unit in the embodiment of the present application. Figure 6 As shown, as an embodiment, the electromagnetic gate valve state feedback unit 40 may specifically include two electromagnetic gate valve state detection circuits 41 with the same structure.

[0106] Combination Figure 5 and Figure 6 In this embodiment, the electromagnetic gate valve state feedback unit 40 may specifically include two electromagnetic gate valve state detection circuits 41 with the same structure, and the feedback ends / output ends of the two electromagnetic gate valve state detection circuits 41 may respectively correspond to the first feedback end 401 and the second feedback end 402 of the electromagnetic gate valve state feedback unit 40.

[0107] exist Figure 6In the embodiment, two electromagnetic gate valve state detection circuits 41 may correspond to two sensing devices K, two optocouplers U2, two seventh resistors R7, two eighth resistors R8 and two ninth resistors R9. Here, a device group consisting of an optocoupler U2, an sensing device K, a seventh resistor R7, an eighth resistor R8 and a ninth resistor R9 is taken as an example, and the first end of the optocoupler U2 is connected to the second preset power supply VCC2 through the seventh resistor R7. One end of the sensing device K is grounded, and the other end is connected to the second end of the optocoupler U2. The first end of the eighth resistor R8 and the first end of the ninth resistor R9 are connected to the third end of the optocoupler U2, and the second end of the eighth resistor R8 is grounded. The second end of one of the ninth resistors R9 serves as the first feedback end 401 of the electromagnetic gate valve state feedback unit 40, and the corresponding second end of the other ninth resistor R9 serves as the second feedback end 402 of the electromagnetic gate valve state feedback unit 40. The fourth end of the optocoupler U2 is connected to the first preset unit VCC1.

[0108] In this embodiment, when the electromagnetic gate valve 110 is opened or closed, the closing member (not shown in the figure) of the electromagnetic gate valve 110 is actuated, thereby closing the induction member K, thereby conducting the power circuit between the light-emitting device in the optical coupler U2, such as the light-emitting diode, and the ground. At this time, the optical coupler U2 outputs a corresponding electrical signal through the second end of the ninth resistor R9 under the action of the light-emitting device. The electrical signal can be used as current state information indicating whether the electromagnetic gate valve 110 is in an open state or a closed state.

[0109] In a specific implementation, the two sensing devices K in the two electromagnetic gate valve state detection circuits 41 can be respectively arranged at the two ends of the movement direction of the closing member of the electromagnetic gate valve 110. In this way, when the electromagnetic gate valve 110 is opened or closed, only one electromagnetic gate valve state detection circuit 41 can feedback an electrical signal through the first feedback terminal 401 or the second feedback terminal 402, that is, within a moment, the control unit 10 will only receive one current state information.

[0110] See also Figure 7 , Figure 7 FIG. 1 is a schematic diagram showing a control circuit of a vacuum pump provided in an embodiment of the present application. Figure 7 As shown, as an embodiment, a control circuit 200 of a vacuum pump includes: a voltage conversion unit 210, and the control circuit 100 of the electromagnetic gate valve provided in the above embodiment.

[0111] In this embodiment, the input end of the voltage conversion unit 210 is connected to the second preset power supply VCC2, and the output end of the voltage conversion unit 210 serves as the output end of the first preset power supply VCC1. The voltage conversion unit 210 is used to convert the voltage of the second preset power supply VCC2 to power the control circuit 100 of the electromagnetic gate valve.

[0112] See also Figure 8 , Figure 8 FIG. 1 shows a schematic diagram of the structure of a vacuum system provided in an embodiment of the present application. Figure 8 As shown, as an embodiment, a vacuum system 1000 includes: a vacuumed enclosed space. A vacuum pump 120 is connected to the enclosed space through an exhaust pipe 121, and is used to evacuate the enclosed space. An electromagnetic gate valve 110 is arranged in the exhaust pipe. The vacuum system 1000 also includes the control circuit 200 of the vacuum pump provided in the above embodiment.

[0113] It can be understood that the control circuit 200 of a vacuum pump and the vacuum system 1000 provided in this embodiment, the improvements and specific implementation methods related to the present application have been Figures 1 to 6 The corresponding electromagnetic gate valve control circuit 100 is described in detail in the embodiment, so please refer to Figures 1 to 6 ,as well as Figures 1 to 6 The relevant descriptions in the corresponding embodiments are not repeated here.

[0114] Those skilled in the art can clearly understand that for the convenience and simplicity of description, only the division of the above-mentioned functional units and modules is used as an example. In actual applications, the above-mentioned functions can be assigned to different functional units and modules as needed, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above. The functional units and modules in the embodiments can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The above-mentioned integrated unit can be implemented in the form of hardware or in the form of software functional units.

[0115] The embodiments described above are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, a person skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. Such modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. A control circuit of an electromagnetic gate valve, connected to the electromagnetic gate valve, characterized in that: The electromagnetic gate valve is used to cooperate with the vacuum pump to adjust the vacuum degree of the enclosed space. The control circuit of the electromagnetic gate valve includes: A control unit, configured to output a control signal and a target clock signal, wherein the control signal includes a first state and a second state; a driving unit connected to the control unit, the driving unit being configured to receive the control signal and the target clock signal, output a first switch control signal according to the first state and the target clock signal when the received control signal is in the first state, and continuously output the first switch control signal when the received control signal changes from the first state to the second state and the target clock signal is not received; a switch unit connected to the electromagnetic gate valve, the switch unit being used to control the electromagnetic gate valve to perform an opening operation or a closing operation according to a first switch control signal; The driving unit is further configured to output a second switch control signal when the received control signal changes from the first state to the second state and the target clock signal is received; The switch unit is further used to control the electromagnetic gate valve to perform an opening operation or a closing operation according to the second switch control signal; wherein the operations corresponding to the first switch control signal and the second switch control signal are different.

2. The control circuit of the electromagnetic gate valve according to claim 1, characterized in that: The control unit is specifically configured to output the target clock signal when a duration of outputting the first state satisfies a preset duration.

3. The control circuit of the electromagnetic gate valve according to claim 1, characterized in that: The driving unit is also used to output a power-on reset signal when power is turned on; The switch unit is further used to control the electromagnetic gate valve to perform a reset operation according to the power-on reset signal.

4. The control circuit of the electromagnetic gate valve according to claim 3, characterized in that: The driving unit comprises: a driving circuit; The driving circuit includes a power supply end, a reset end, a first input end, a second input end and an output end. The power supply end and the reset end are connected to a first preset power supply. The first input end and the second input end are respectively connected to the control unit. The output end is connected to the switch unit.

5. The control circuit of the electromagnetic gate valve according to claim 4, characterized in that: The driving unit further includes: an RC circuit; A first end of the RC circuit is connected to the first preset power supply, and a second end of the RC circuit is connected to a reset end of the driving circuit; The RC circuit is used to output a reset electrical signal to the reset end of the drive circuit when the voltage value of the first preset power supply is less than the preset voltage value, and stop outputting the reset electrical signal to the reset end of the drive circuit when the voltage value of the first preset power supply is not less than the preset voltage value; The driving circuit is further configured to output the power-on reset signal to the switch unit when the reset electrical signal is received, and stop outputting the power-on reset signal to the switch unit when the reset electrical signal is not received.

6. The control circuit of the electromagnetic gate valve according to claim 5, characterized in that: The RC circuit includes: a first resistor and a first capacitor; The first end of the first resistor serves as the first end of the RC circuit, the second end of the first resistor is connected to the first end of the first capacitor to form a first node, the first node serves as the second end of the RC circuit, and the second end of the first capacitor is grounded.

7. The control circuit of the electromagnetic gate valve according to claim 4, characterized in that: The driving circuit comprises: a first chip, a second capacitor, a second resistor, a third resistor, a fourth resistor, a fifth resistor and a sixth resistor; The power supply terminal of the first chip and the first end of the second capacitor are connected to the first preset power supply, the second end of the second capacitor is grounded, the power-on reset terminal of the first chip serves as the reset terminal of the drive circuit, the first end of the second resistor serves as the first input terminal of the drive circuit, the second end of the second resistor and the first end of the third resistor are connected to the clock signal input terminal of the first chip, the second end of the third resistor is grounded, the first end of the fourth resistor serves as the second input terminal of the drive circuit, the second end of the fourth resistor is connected to the control signal input terminal of the first chip, the first end of the fifth resistor and the first end of the sixth resistor are connected to form a second node, the second node serves as the output terminal of the drive circuit, the second end of the fifth resistor is connected to the output terminal of the first chip, and the second end of the sixth resistor is grounded.

8. The control circuit of the electromagnetic gate valve according to claim 4, characterized in that: The switch unit includes a switch tube and a diode; The controlled end of the switch tube is connected to the output end of the drive circuit, the ground end of the switch tube is grounded, the power end of the switch tube is connected to the anode end of the diode to form a third node, the third node is used to connect the electromagnetic gate valve, and the cathode end of the diode is connected to a second preset power supply.

9. The control circuit of the electromagnetic gate valve according to any one of claims 1 to 8, characterized in that: Also includes: The electromagnetic gate valve state feedback unit is connected to the control unit, and is used to detect the current state information of the electromagnetic gate valve and send the current state information to the control unit. The current state information is used to indicate the open state or closed state of the electromagnetic gate valve.

10. The control circuit of the electromagnetic gate valve according to claim 9, characterized in that: The control unit is further used to respond to a system reset instruction, obtain a reset type, and when the reset type is non-power-on reset, use the current state information stored for the last time to control the electromagnetic gate valve.

11. A control circuit for a vacuum pump, used for controlling a vacuum pump, characterized in that: The control circuit of the vacuum pump comprises a voltage conversion unit, and a control circuit of the electromagnetic gate valve according to any one of claims 1 to 10 above; The input end of the voltage conversion unit is connected to the second preset power supply, and the output end of the voltage conversion unit serves as the output end of the first preset power supply. The voltage conversion unit is used to convert the voltage of the second preset power supply to power the control circuit of the electromagnetic gate valve.

12. A vacuum system, characterized in that: include: A confined space that has been evacuated; A vacuum pump, connected to the enclosed space through an exhaust pipe, for performing a vacuum operation on the enclosed space; An electromagnetic gate valve is arranged in the air extraction pipeline; The vacuum system further comprises a control circuit for the vacuum pump according to claim 11.

Images