Raman spectrum measurement equipment, method and equipment and storage medium

Abstract

The invention provides Raman spectrum measurement equipment, a Raman spectrum measurement method, Raman spectrum measurement equipment and a storage medium, and relates to the technical field of optical measurement, the device comprises a Raman scattering light generation assembly, a conjugate imaging assembly, a Raman scattering light filtering assembly and a single-grating spectrometer, the Raman scattering light generation assembly is connected with the conjugate imaging assembly, and the conjugate imaging assembly is connected with the single-grating spectrometer; the conjugate imaging assembly is connected with the Raman scattering light filtering assembly, and the Raman scattering light filtering assembly is connected with the single-grating spectrometer; according to the invention, the Raman scattering light generation assembly, the conjugate imaging assembly, the Raman scattering light filtering assembly and the single grating spectrometer are combined to obtain the portable spectrum device to measure the ultra-low wave number Raman spectrum, and the portable device is also suitable for ultra-low wave number Raman spectrum measurement under extreme conditions.

Description

Technical Field

[0001] The present invention relates to the field of optical measurement technology, and in particular to a Raman spectrum measurement device, method, device and storage medium. Background Art

[0002] Layered materials such as graphene, transition metal chalcogenides, and van der Waals heterojunctions have unique interlayer vibration modes in the low-frequency region, which can be used to accurately identify the number of layers. Currently, the measurement of ultra-low wavenumber Raman spectral signals is mainly achieved through commercial Raman spectrometer systems.

[0003] However, due to the high cost and large size of commercial Raman spectrometer systems, it is not easy to move to extreme conditions (such as extremely low temperature, strong magnetic field, and extremely high pressure). Measuring ultra-low wavenumber Raman spectral signals under extreme conditions makes it impossible to have an in-depth understanding of the physical properties of materials under extreme conditions. Therefore, it is of great significance to design a flexible device that can measure ultra-low wavenumber Raman spectral signals. Summary of the invention

[0004] The present invention provides a Raman spectrum measurement device, method, device and storage medium, which are used to solve the defect in the prior art that the commercial Raman spectrometer system is not easy to move to the area near the extreme conditions (such as the top), resulting in an in-depth understanding of the material properties under extreme conditions. The present invention achieves ultra-low wavenumber Raman spectrum measurement by obtaining a flexible spectrum device by combining a Raman scattered light generating component, a conjugate imaging component, a Raman scattered light filtering component and a single grating spectrometer. At the same time, the flexible device is also suitable for ultra-low wavenumber Raman spectrum measurement under extreme conditions.

[0005] The present invention provides a Raman spectrum measuring device, comprising: Raman scattered light generating component 110, conjugate imaging component 120, Raman scattered light filtering component 130 and single grating spectrometer 140, wherein: The Raman scattered light generating component 110 is connected to the conjugate imaging component 120, the conjugate imaging component 120 is connected to the Raman scattered light filtering component 130, and the Raman scattered light filtering component 130 is connected to the single grating spectrometer 140; The Raman scattered light generating component 110 is used to generate first Raman scattered light; The conjugate imaging component 120 is used to perform conjugate imaging on the laser spot on the sample corresponding to the first Raman scattered light, and perform spatial filtering on the first Raman scattered light to obtain second Raman scattered light; The Raman scattered light filter assembly 130 is used to remove the Rayleigh signal in the second Raman scattered light to obtain the third Raman scattered light; The single grating spectrometer 140 is used to measure the spectral signal of the third Raman scattered light.

[0006] According to a Raman spectrum measurement device provided by the present invention, the conjugate imaging component 120 includes: a first lens 121, a confocal hole 122 and a second lens 123, wherein: the first lens 121 is respectively connected to the Raman scattered light generating component 110 and the confocal hole 122, and the confocal hole 122 is connected to the second lens 123; the first lens 121 is used to converge the first Raman scattered light and transmit the first Raman scattered light to the confocal hole 122; the confocal hole 122 is used to filter out stray light in the first Raman scattered light based on the small hole in the confocal hole 122 to obtain second Raman scattered light; the second lens 123 is used to collimate the second Raman scattered light.

[0007] According to a Raman spectrum measurement device provided by the present invention, the focal position of the first lens 121 coincides with the focal position of the second lens 123, the confocal hole 122 is placed at the focal position, and the first lens 121, the confocal hole 122, the second lens 123 and the Raman scattered light filter assembly 130 are coaxial.

[0008] According to a Raman spectrum measurement device provided by the present invention, the Raman scattered light filtering component 130 includes: at least one volume Bragg grating 131 and a third lens 132, wherein the volume Bragg grating 131 is connected to the conjugate imaging component 120 and the third lens 132 respectively, and the third lens 132 is connected to the single grating spectrometer 140; each volume Bragg grating 131, the third lens 132 and the conjugate imaging component 120 are coaxial; the volume Bragg grating 131 is used to remove the Rayleigh signal in the Raman scattered light image to obtain the third Raman scattered light; the third lens 132 is used to converge the third Raman scattered light.

[0009] According to a Raman spectrum measurement device provided by the present invention, the Raman scattered light generating component 110 includes: a laser generating component 111 and a sample component 112 to be measured, wherein: the laser generating component 111 is connected to the sample component 112 to be measured, and the sample component 112 to be measured is connected to the conjugate imaging component 120; the laser generating component 111 is used to generate a target laser; the sample component 112 to be measured is used to generate the first Raman scattered light based on the target laser and the sample to be measured.

[0010] According to a Raman spectrum measurement device provided by the present invention, the laser generating component 111 includes: a laser 1111, a beam expander 1112 and a filter 1113, wherein: the laser 1111 is connected to the beam expander 1112, the beam expander 1112 is connected to the filter 1113, and the filter 1113 is connected to the sample component 112 to be measured; the laser 1111 is used to generate an initial laser; the beam expander 1112 is used to expand the initial laser to obtain a second laser; the filter 1113 is used to filter the second laser to obtain the target laser.

[0011] According to a Raman spectrum measurement device provided by the present invention, the sample component 112 to be measured includes: a beam splitter 1121, a microlens 1122, a sample stage 1123 to be measured, and a reflector 1124, wherein: the beam splitter 1121 is connected to the laser generating component 111, the microlens 1122 and the reflector 1124 respectively, and the reflector 1124 is connected to the conjugate imaging component 120, wherein: the beam splitter 1121 is used to introduce the target laser into the direction of the sample to be measured; the sample stage 1123 is used to place the sample to be measured; the microlens 1122 is used to focus the target laser onto the sample to be measured to generate the first Raman scattered light and collect the first Raman scattered light; the beam splitter 1121 is also used to introduce the first Raman scattered light into the direction of the reflector 1124; the reflector 1124 is used to change the optical path of the first Raman scattered light so that the first Raman scattered light reaches the conjugate imaging component 120.

[0012] The present invention also provides a Raman spectrum measurement method, which is applied to any of the above Raman spectrum measurement devices, comprising: Generate first Raman scattered light by the Raman scattered light generating component 110; Performing conjugate imaging on the laser spot on the sample corresponding to the first Raman scattered light by a conjugate imaging component 120, and performing spatial filtering on the first Raman scattered light to obtain second Raman scattered light; The third Raman scattered light is obtained by removing the Rayleigh signal in the second Raman scattered light through the Raman scattered light filter component 130; The single grating spectrometer 140 measures the spectral signal of the third Raman scattered light.

[0013] The present invention also provides an electronic device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein when the processor executes the computer program, any one of the above-mentioned Raman spectroscopy measurement methods is implemented.

[0014] The present invention also provides a non-transitory computer-readable storage medium on which a computer program is stored. When the computer program is executed by a processor, the Raman spectroscopy measurement method described above is implemented.

[0015] The present invention also provides a computer program product, comprising a computer program, wherein when the computer program is executed by a processor, the Raman spectrum measurement method described above is implemented.

[0016] The present invention provides a Raman spectrum measurement device, method, device and storage medium, which uses a Raman scattered light generating component 110 to generate a first Raman scattered light, uses a conjugate imaging component 120 to perform conjugate imaging on a laser spot on a sample corresponding to the first Raman scattered light, performs spatial filtering on the first Raman scattered light to obtain a second Raman scattered light, uses a Raman scattered light filtering component 130 to remove the Rayleigh signal in the second Raman scattered light to obtain a third Raman scattered light, and uses a single grating spectrometer 140 to measure the spectral signal of the third Raman scattered light. In this way, the Raman scattered light generating component 110, the conjugate imaging component 120, and the Raman scattered light filtering component 130 are combined. A flexible Raman spectroscopy measurement device can be obtained by combining the single grating spectrometer 140, and the conjugate imaging component 120 can filter out stray light to improve the resolution and signal-to-noise ratio of the image. The Raman scattered light filtering component 130 can suppress the background signal in the laser Rayleigh scattering region and reduce the minimum cutoff frequency of the Raman spectroscopy measurement, thereby realizing ultra-low wavenumber Raman spectroscopy measurement based on the single grating spectrometer 140. At the same time, the flexible Raman spectroscopy measurement device is suitable for ultra-low wavenumber Raman spectroscopy measurement under extreme conditions such as extremely low temperature, strong magnetic field, and extremely high pressure, providing a platform for studying the physical properties and novel physical states of two-dimensional quantum materials, and has important application value in the fields of material science, spectroscopy, and optical research. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 This is one of the structural schematic diagrams of the Raman spectrum measurement device provided by the present invention.

[0019] Figure 2 This is the second structural schematic diagram of the Raman spectrum measurement device provided by the present invention.

[0020] Figure 3 It is a schematic diagram of the ultra-low wavenumber Raman spectrum of tungsten diselenide provided by the present invention.

[0021] Figure 4 It is a schematic diagram of the ultra-low wavenumber Raman spectrum of molybdenum antimonide provided by the present invention.

[0022] Figure 5 It is a schematic flow chart of the Raman spectroscopy measurement method provided by the present invention.

[0023] Figure 6 It is a structural schematic diagram of the electronic device provided by the present invention.

[0024] Reference numerals: 100: Raman spectrum measurement equipment; 110: Raman scattered light generating component; 120: conjugate imaging component; 130: Raman scattered light filtering component; 140: single grating spectrometer; 121: first lens; 122: confocal hole; 123: second lens; 131: volume Bragg grating; 132: third lens; 111: laser generating component; 112: sample component to be measured; 1111: laser; 1112: beam expander; 1113: filter; 1121: beam splitter; 1122: microlens; 1123: sample stage to be measured; 1124: reflector. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] The layered material family represented by graphene, transition metal chalcogenides, two-dimensional magnetic materials, etc. has become a frontier hotspot in the research field in recent years due to its unique physical properties and novel physical states in the fields of micro-nanoelectronics, photonics, optoelectronics and nanomechanics. In particular, many properties of this type of layered material strongly depend on the specific number of layers (i.e. thickness). For example, from double layers to bulk molybdenum disulfide, it is an indirect bandgap semiconductor, and once the number of layers is reduced to a single layer, molybdenum disulfide becomes a direct bandgap semiconductor, thus producing important research progress in field effect transistors, photodetectors, lasers and other research directions. Therefore, the number of layers provides a very effective degree of freedom for modulating and optimizing the physical properties of layered materials, and accurately characterizing the number of layers will undoubtedly lay the foundation for the widespread application of layered materials in the field of micro-nano devices.

[0027] Compared with atomic force microscopy, ultra-low wavenumber Raman spectroscopy can be used to directly detect the unique interlayer vibration phonons of layered materials. These phonons originate from the relative vibration between layers, and as the number of layers increases, the eigenfrequency of the phonons will produce significant dispersion. Therefore, it provides an accurate and non-destructive method for characterizing the number of layers in layered material systems, and has been widely used in graphene, transition metal chalcogenides, van der Waals heterojunctions, etc. However, early ultra-low wavenumber Raman spectroscopy was mainly developed based on commercial Raman spectrometer systems. Since commercial Raman spectrometer systems have optimized the entire machine, especially the confocal characteristics of the system, this technical solution cannot be effectively transplanted to a single grating spectrometer.

[0028] With the development of extreme conditions such as extremely low temperatures, strong magnetic fields, and extremely high pressures, a new development trend has emerged in the field of microscopic spectroscopy, namely, microscopic spectroscopy technology under extreme conditions. By measuring various spectra under extreme conditions, people will obtain more basic information about electronic structure, dynamics, and the interaction between light and matter, which has important scientific value for in-depth understanding of the physical properties of materials in extreme environments. However, the implementation and maintenance of extreme conditions require extremely complex devices, which will significantly increase the technical difficulty of combining with spectral testing systems. Commercial Raman spectrometer systems are expensive and bulky, and are not easy to move to extreme conditions (such as extremely low temperatures, strong magnetic fields, and extremely high pressures). Measuring ultra-low wavenumber Raman spectral signals under extreme conditions makes it impossible to deeply understand the physical properties of materials under extreme conditions. Therefore, it is of great significance to design a flexible device that can measure ultra-low wavenumber Raman spectral signals.

[0029] Based on the above problems, the present invention provides a Raman spectrum measurement device. A flexible Raman spectrum measurement device can be obtained by combining a Raman scattered light generating component 110, a conjugate imaging component 120, a Raman scattered light filtering component 130 and a single grating spectrometer 140. In addition, the conjugate imaging component 120 can filter out stray light to improve the resolution and signal-to-noise ratio of the image, and the Raman scattered light filtering component 130 can suppress the background signal in the laser Rayleigh scattering region and reduce the minimum cutoff frequency of the Raman spectrum measurement, thereby realizing ultra-low wavenumber Raman spectrum measurement based on the single grating spectrometer 140. At the same time, the flexible Raman spectrum measurement device is suitable for ultra-low wavenumber Raman spectrum measurement under extreme conditions such as extremely low temperature, strong magnetic field, and extremely high pressure, providing a platform for studying the physical properties and novel physical states of two-dimensional quantum materials, and has important application value in the fields of material science, spectroscopy, and optical research.

[0030] Combine the following Figure 1-Figure 4 The Raman spectroscopy measurement device of the present invention is described. The Raman spectroscopy measurement provided by the present invention is applicable to the Raman spectroscopy measurement of any layered material, including but not limited to two-dimensional quantum materials, graphene, transition metal chalcogenides, etc.

[0031] Figure 1 is one of the structural schematic diagrams of the Raman spectroscopy measurement device provided by the present invention, such as Figure 1 As shown, the Raman spectroscopy measurement device 100 includes: Raman scattered light generating component 110, conjugate imaging component 120, Raman scattered light filtering component 130 and single grating spectrometer 140, wherein: The Raman scattered light generating component 110 is connected to the conjugate imaging component 120, the conjugate imaging component 120 is connected to the Raman scattered light filtering component 130, and the Raman scattered light filtering component 130 is connected to the single grating spectrometer 140; The Raman scattered light generating component 110 is used to generate first Raman scattered light; The conjugate imaging component 120 is used to perform conjugate imaging on the laser spot on the sample corresponding to the first Raman scattered light, and perform spatial filtering on the first Raman scattered light to obtain second Raman scattered light; The Raman scattered light filter assembly 130 is used to remove the Rayleigh signal in the second Raman scattered light to obtain the third Raman scattered light; The single grating spectrometer 140 is used to measure the spectral signal of the third Raman scattered light.

[0032] The principle of the Raman scattered light generating component 110 generating the first Raman scattered light is that laser irradiation to the sample will cause scattering, and Raman scattered light can be generated when the energy of the scattered light is different from that of the incident light. Among them, the smaller the energy difference is, the lower the wave number of the Raman scattered light is, and the more difficult it is to be measured; conversely, the greater the energy difference is, the higher the wave number of the Raman scattered light is, and the easier it is to be measured.

[0033] The Rayleigh signal is the Rayleigh scattered light, that is, the background signal or noise in the Raman scattered light.

[0034] It should be noted that conjugate imaging can remove stray light, eliminate chromatic aberration and spherical aberration, and improve image resolution.

[0035] Here, the single grating spectrometer 140 may be a single grating spectrometer 140 of different specifications or models produced by any manufacturer.

[0036] In an embodiment of the present invention, a first Raman scattered light is generated by using a Raman scattered light generating component 110, a conjugate imaging component 120 is used to perform conjugate imaging on a laser spot on a sample corresponding to the first Raman scattered light, the first Raman scattered light is spatially filtered to obtain a second Raman scattered light, a Raman scattered light filtering component 130 is used to remove the Rayleigh signal in the second Raman scattered light to obtain a third Raman scattered light, and a single grating spectrometer 140 is used to measure a spectral signal of the third Raman scattered light. In this way, the Raman scattered light generating component 110, the conjugate imaging component 120, the Raman scattered light filtering component 130 and the single grating spectrometer 140 are combined to form a Raman scattered light generating component 110, a conjugate imaging component 120, a Raman scattered light filtering component 130 and a single grating spectrometer 140. 0, a flexible Raman spectroscopy measurement device can be obtained, and the conjugate imaging component 120 can filter out stray light to improve the resolution and signal-to-noise ratio of the image, and the Raman scattered light filtering component 130 can suppress the background signal in the laser Rayleigh scattering region and reduce the minimum cutoff frequency of the Raman spectroscopy measurement, thereby realizing ultra-low wavenumber Raman spectroscopy measurement based on the single grating spectrometer 140. At the same time, the flexible Raman spectroscopy measurement device is suitable for ultra-low wavenumber Raman spectroscopy measurement under extreme conditions such as extremely low temperature, strong magnetic field, and extremely high pressure, providing a platform for studying the physical properties and novel physical states of two-dimensional quantum materials, and has important application value in the fields of material science, spectroscopy, and optical research.

[0037] For example, Figure 2 FIG. 2 is a second structural diagram of the Raman spectroscopy measurement device provided by the present invention. Figure 2 As shown, the conjugate imaging assembly 120 includes: a first lens 121, a confocal hole 122 and a second lens 123, wherein: The first lens 121 is connected to the Raman scattered light generating assembly 110 and the confocal hole 122 respectively, and the confocal hole 122 is connected to the second lens 123; The first lens 121 is used to converge the first Raman scattered light and transmit the first Raman scattered light to the confocal hole 122; The confocal hole 122 is used to filter out stray light in the first Raman scattered light based on a small hole in the confocal hole 122 to obtain second Raman scattered light; The second lens 123 is used to collimate the second Raman scattered light.

[0038] Here, the first lens 121, the confocal hole 122, and the second lens 123 can be respectively installed in an XYZ adjustable mounting seat, and the relative spatial positions between the first lens 121, the confocal hole 122, and the second lens 123 can be adjusted through their XYZ adjustable mounting seats.

[0039] In one embodiment, the focal position of the first lens 121 coincides with the focal position of the second lens 123, and the confocal hole 122 needs to be placed at the focal position. The first lens 121, the confocal hole 122, the second lens 123 and the Raman scattering light filter assembly 130 are coaxial to achieve effective focusing of the scattered laser.

[0040] In the embodiment of the present invention, the first lens 121, the confocal hole 122, and the second lens 123 are introduced into the dispersion light path to improve the confocal characteristics of the entire spectrum testing system.

[0041] In one embodiment, if Figure 2 As shown, the Raman scattered light filter assembly 130 includes: at least one volume Bragg grating 131 and a third lens 132, wherein: The volume Bragg grating 131 is connected to the conjugate imaging component 120 and the third lens 132 respectively, and the third lens 132 is connected to the single grating spectrometer 140; each of the volume Bragg grating 131, the third lens 132 and the conjugate imaging component 120 is coaxial; The volume Bragg grating 131 is used to remove the Rayleigh signal in the Raman scattered light image to obtain the third Raman scattered light; The third lens 132 is used to converge the third Raman scattered light.

[0042] Here, the number of the volume Bragg gratings 131 can be any appropriate number, such as three. The three volume Bragg gratings 131 are connected in sequence, the first volume Bragg grating 131 is connected to the conjugate imaging component 120, and the third volume Bragg grating 131 is connected to the third lens 132.

[0043] In the embodiment of the present invention, a volume Bragg grating group 131 and a third lens 132 are introduced into the scattered light path to further filter out stray light in the laser Rayleigh scattering region and suppress background signals in the laser Rayleigh scattering region, thereby ensuring effective collection of ultra-low wavenumber Raman spectral signals.

[0044] In one embodiment, if Figure 2 As shown, the Raman scattered light generating component 110 includes: a laser generating component 111 and a sample component 112 to be tested, wherein: The laser generating component 111 is connected to the sample component 112 to be tested, and the sample component 112 to be tested is connected to the conjugate imaging component 120; The laser generating component 111 is used to generate target laser; The sample component 112 is used to generate the first Raman scattered light based on the target laser and the sample.

[0045] Here, the target laser may be the original laser generated by the laser 1111, or may be the laser after the original laser is processed, and the present invention is not limited to this.

[0046] Here, the sample to be tested can be any sample, such as tungsten diselenide, molybdenum antimonide, etc.

[0047] In one embodiment, if Figure 2 As shown, the laser generating assembly 111 includes: a laser 1111, a beam expander 1112 and a filter 1113, wherein: The laser 1111 is connected to the beam expander 1112, the beam expander 1112 is connected to the filter 1113, and the filter 1113 is connected to the sample assembly 112; The laser 1111 is used to generate initial laser; The beam expander 1112 is used to expand the initial laser to obtain a second laser; The filter 1113 is used to filter the second laser to obtain the target laser.

[0048] It should be noted that for incident light paths with longer optical paths (for example, greater than 1.5 meters), it is necessary to expand the beam.

[0049] It should be noted that the filter 1113 can filter out stray light in the laser Rayleigh scattering area.

[0050] In the embodiment of the present invention, a filter 1113 is introduced into the incident light path to purify the incident laser, filter out stray light in the laser Rayleigh scattering region, ensure the purity of the incident laser, and prevent other stray light from affecting Raman spectrum measurement.

[0051] In one embodiment, if Figure 2 As shown, the sample assembly 112 includes: a beam splitter 1121, a microlens 1122, a sample stage 1123, and a reflector 1124, wherein: The beam splitter 1121 is connected to the laser generating assembly 111, the microlens 1122 and the reflector 1124 respectively, and the reflector 1124 is connected to the conjugate imaging assembly 120, wherein: The beam splitter 1121 is used to direct the target laser into the direction of the sample to be tested; The sample stage 1123 is used to place the sample to be tested; The microlens 1122 is used to focus the target laser onto the sample to be tested to generate the first Raman scattered light and collect the first Raman scattered light; The beam splitter 1121 is further used to guide the first Raman scattered light into the direction of the reflector 1124; The reflector 1124 is used to change the optical path of the first Raman scattered light so that the first Raman scattered light reaches the conjugate imaging component 120 .

[0052] Here, the splitting ratio of the beam splitter 1121 generally does not exceed 50%.

[0053] Here, the numerical aperture of the microlens 1122 can be any appropriate value, which is generally greater than or equal to 0.65.

[0054] In an embodiment of the present invention, the incident laser is introduced into the sample area to be measured through the beam splitter 1121, and the scattered light is introduced into the spectrum collection optical path; the incident laser is focused onto the sample surface through a microscope objective with a high numerical aperture to achieve a higher spatial resolution and ensure the confocality of the entire spectral system.

[0055] It should be noted that the Raman spectroscopy measurement equipment provided by the present invention can be completely built on an optical breadboard, so it is easy to be used with extreme conditions such as extremely low temperature, strong magnetic field, and extremely high pressure, further enhancing the application of ultra-low wavenumber Raman spectroscopy technology in studying material properties and discovering novel physical states.

[0056] The following are application scenarios of the Raman spectroscopy measurement device provided by the present invention for ultra-low wavenumber Raman spectroscopy measurement of layered materials.

[0057] In this application scenario, two representative transition metal chalcogenides, tungsten diselenide and molybdenum disintegrant, were selected as research objects.

[0058] (1) Sample preparation: A few layers (the number of layers is unknown) of samples were obtained from bulk materials of tungsten diselenide and molybdenum antimonide by mechanical exfoliation, and transferred to a silicon substrate (SiO2 / Si) covered with 285 nm silicon dioxide. The target samples were then positioned using an optical microscope.

[0059] (2) Ultra-low wavenumber Raman spectroscopy measurement: The few layers of tungsten diselenide and molybdenum antimonide prepared on SiO2 / Si are placed successively on the sample stage 1123 to be tested in the Raman spectroscopy measurement equipment. The tungsten diselenide and molybdenum antimonide regions are positioned by the microlens 1122. The debugged Raman spectroscopy measurement equipment is used to measure different sample regions to obtain ultra-low wavenumber Raman spectra of tungsten diselenide and molybdenum antimonide.

[0060] Figure 3 Schematic diagram of the ultra-low wavenumber Raman spectrum of tungsten diselenide provided by the present invention, such as Figure 3As shown, the horizontal axis represents the Raman frequency shift (wave number), and the vertical axis represents the Raman intensity. Tungsten diselenide includes 1, 2, 3, 5, and 6 layers of spectral signals, and the 2nd layer has an interlayer shear mode and an interlayer breathing mode.

[0061] Figure 4 Schematic diagram of the ultra-low wavenumber Raman spectrum of molybdenum antimonide provided by the present invention, such as Figure 4 As shown, the horizontal axis represents the Raman frequency shift (wave number), and the vertical axis represents the Raman intensity. MoSb2 includes 2, 3, 4, 5, and 6 layers of spectral signals, and the 2nd layer has interlayer shear mode and interlayer breathing mode.

[0062] (3) Accurate characterization of the number of layers: Based on the developed single-atom linear chain model, the dispersion relations of the interlayer shear mode and interlayer breathing mode of tungsten diselenide and molybdenum disinhibinide are calculated as the number of layers increases. Specifically, for single-layer tungsten diselenide and molybdenum disinhibinide, interlayer vibration is not supported, so no Raman scattering signal can be detected in the low wavenumber region; for double-layer tungsten diselenide and molybdenum disinhibinide, there is one shear mode and one breathing mode in the low wavenumber region, respectively; and for samples with more than 2 layers, it is necessary to make a comprehensive judgment based on the position and number of shear modes and breathing modes to characterize the number of layers.

[0063] In the embodiment of the present invention, it is difficult to realize the combination with extreme condition devices such as extremely low temperature, strong magnetic field, and extremely high pressure due to the sample space of the commercial Raman spectrometer. Obviously, the extreme condition device can be spatially coupled with the commercial Raman spectrometer by adopting an ultra-long optical path, but the ultra-long optical path increases the technical difficulty of observing and positioning micron-level samples, and seriously reduces the efficiency of spectral acquisition, especially for ultra-low wavenumber Raman spectra with extremely weak intrinsic signals. On the other hand, the single grating spectrometer is very suitable for joint development with other test systems or environments due to its flexible and compact structure, but the structural characteristics of the single grating spectrometer (i.e., the use of slits) will significantly reduce the confocal characteristics of the three-dimensional space of the microscopic spectrum test system, resulting in it being difficult to effectively remove its influence even after the background signal suppression for the laser Rayleigh scattering area is implemented. Therefore, the development of ultra-low wavenumber Raman spectrum test system based on the single grating spectrometer faces major technical difficulties.

[0064] The Raman spectrum measurement method provided by the present invention is described below. The Raman spectrum measurement method described below and the Raman spectrum measurement device described above can be referred to each other.

[0065] Figure 5 is a flow chart of the Raman spectroscopy measurement method provided by the present invention, which is applied to any of the above-mentioned Raman spectroscopy measurement devices, such as Figure 5 As shown, including: Step 501, generating first Raman scattered light by a Raman scattered light generating component; Step 502, performing conjugate imaging on the laser spot on the sample corresponding to the first Raman scattered light through a conjugate imaging component, and performing spatial filtering on the first Raman scattered light to obtain second Raman scattered light; Step 503, removing the Rayleigh signal in the second Raman scattered light by a Raman scattered light filter component to obtain the third Raman scattered light; Step 504: measure the spectral signal of the third Raman scattered light by using a single grating spectrometer.

[0066] Figure 6 is a schematic diagram of the structure of the electronic device provided by the present invention, such as Figure 6 As shown, the electronic device may include: a processor 610, a communication interface 620, a memory 630 and a communication bus 640, wherein the processor 610, the communication interface 620 and the memory 630 communicate with each other through the communication bus 640. The processor 610 may call the logic instructions in the memory 630 to execute the Raman spectrum measurement method, which includes: generating a first Raman scattered light through a Raman scattered light generating component 110; performing conjugate imaging on the laser spot on the sample corresponding to the first Raman scattered light through a conjugate imaging component 120, and performing spatial filtering on the first Raman scattered light to obtain a second Raman scattered light; removing the Rayleigh signal in the second Raman scattered light through a Raman scattered light filtering component 130 to obtain the third Raman scattered light; and measuring the spectral signal of the third Raman scattered light through a single grating spectrometer 140.

[0067] In addition, the logic instructions in the above-mentioned memory 630 can be implemented in the form of a software functional unit and can be stored in a computer-readable storage medium when it is sold or used as an independent product. Based on such an understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art or the part of the technical solution, can be embodied in the form of a software product, and the computer software product is stored in a storage medium, including a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), disk or optical disk, etc. Various media that can store program codes.

[0068] On the other hand, the present invention also provides a computer program product, which includes a computer program. The computer program can be stored on a non-transitory computer-readable storage medium. When the computer program is executed by a processor, the computer can execute the Raman spectrum measurement method provided by the above methods, which includes: generating a first Raman scattered light through a Raman scattered light generating component 110; performing conjugate imaging on the laser spot on the sample corresponding to the first Raman scattered light through a conjugate imaging component 120, and performing spatial filtering on the first Raman scattered light to obtain a second Raman scattered light; removing the Rayleigh signal in the second Raman scattered light through a Raman scattered light filtering component 130 to obtain the third Raman scattered light; and measuring the spectral signal of the third Raman scattered light through a single grating spectrometer 140.

[0069] On the other hand, the present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which is implemented when the processor executes the Raman spectrum measurement method provided by the above-mentioned methods, and the method includes: generating a first Raman scattered light by a Raman scattered light generating component 110; performing conjugate imaging on the laser spot on the sample corresponding to the first Raman scattered light by a conjugate imaging component 120, and performing spatial filtering on the first Raman scattered light to obtain a second Raman scattered light; removing the Rayleigh signal in the second Raman scattered light by a Raman scattered light filtering component 130 to obtain the third Raman scattered light; and measuring the spectral signal of the third Raman scattered light by a single grating spectrometer 140.

[0070] The device embodiments described above are merely illustrative, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of this embodiment. Ordinary technicians in this field can understand and implement it without paying creative labor.

[0071] Through the description of the above implementation methods, those skilled in the art can clearly understand that each implementation method can be implemented by means of software plus a necessary general hardware platform, and of course, can also be implemented by hardware. Based on this understanding, the above technical solution is essentially or the part that contributes to the prior art can be embodied in the form of a software product, and the computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, a disk, an optical disk, etc., including a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in each embodiment or some parts of the embodiments.

[0072] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A Raman spectroscopy measuring device, characterized in that: include: Raman scattered light generating component 110, conjugate imaging component 120, Raman scattered light filtering component 130 and single grating spectrometer 140, wherein: The Raman scattered light generating component 110 is connected to the conjugate imaging component 120, the conjugate imaging component 120 is connected to the Raman scattered light filtering component 130, and the Raman scattered light filtering component 130 is connected to the single grating spectrometer 140; The Raman scattered light generating component 110 is used to generate a first Raman scattered light; The conjugate imaging component 120 is used to perform conjugate imaging on the laser spot on the sample corresponding to the first Raman scattered light, and perform spatial filtering on the first Raman scattered light to obtain second Raman scattered light; The Raman scattered light filtering component 130 is used to remove the Rayleigh signal in the second Raman scattered light to obtain the third Raman scattered light; The single grating spectrometer 140 is used to measure the spectral signal of the third Raman scattered light.

2. The Raman spectroscopy measuring device according to claim 1, characterized in that: The conjugate imaging assembly 120 includes: a first lens 121, a confocal hole 122 and a second lens 123, wherein: The first lens 121 is connected to the Raman scattered light generating assembly 110 and the confocal hole 122 respectively, and the confocal hole 122 is connected to the second lens 123; The first lens 121 is used to converge the first Raman scattered light and transmit the first Raman scattered light to the confocal hole 122; The confocal hole 122 is used to filter out stray light in the first Raman scattered light based on a small hole in the confocal hole 122 to obtain second Raman scattered light; The second lens 123 is used to collimate the second Raman scattered light.

3. The Raman spectroscopy measuring device according to claim 2, characterized in that: The focal position of the first lens 121 coincides with the focal position of the second lens 123 , the confocal hole 122 is located at the focal position, and the first lens 121 , the confocal hole 122 , the second lens 123 and the Raman scattering light filter assembly 130 are coaxial.

4. The Raman spectroscopy measuring device according to any one of claims 1 to 3, characterized in that: The Raman scattered light filter assembly 130 includes: at least one volume Bragg grating 131 and a third lens 132, wherein: The volume Bragg grating 131 is connected to the conjugate imaging component 120 and the third lens 132 respectively, and the third lens 132 is connected to the single grating spectrometer 140; each of the volume Bragg grating 131, the third lens 132 and the conjugate imaging component 120 is coaxial; The volume Bragg grating 131 is used to remove the Rayleigh signal in the Raman scattered light image to obtain the third Raman scattered light; The third lens 132 is used to converge the third Raman scattered light.

5. The Raman spectroscopy measuring device according to any one of claims 1 to 3, characterized in that: The Raman scattered light generating component 110 includes: a laser generating component 111 and a sample component 112, wherein: The laser generating component 111 is connected to the sample component 112 to be tested, and the sample component 112 to be tested is connected to the conjugate imaging component 120; The laser generating component 111 is used to generate target laser; The sample component 112 is used to generate the first Raman scattered light based on the target laser and the sample.

6. The Raman spectroscopy measuring device according to claim 5, characterized in that: The laser generating assembly 111 includes: a laser 1111, a beam expander 1112 and a filter 1113, wherein: The laser 1111 is connected to the beam expander 1112, the beam expander 1112 is connected to the filter 1113, and the filter 1113 is connected to the sample assembly 112; The laser 1111 is used to generate initial laser; The beam expander 1112 is used to expand the initial laser to obtain a second laser; The filter 1113 is used to filter the second laser to obtain the target laser.

7. The Raman spectroscopy measuring device according to claim 5, characterized in that: The sample assembly 112 includes a beam splitter 1121, a microlens 1122, a sample stage 1123, and a reflector 1124, wherein: The beam splitter 1121 is connected to the laser generating assembly 111, the microlens 1122 and the reflector 1124 respectively, and the reflector 1124 is connected to the conjugate imaging assembly 120, wherein: The beam splitter 1121 is used to direct the target laser into the direction of the sample to be tested; The sample stage 1123 is used to place the sample to be tested; The microlens 1122 is used to focus the target laser onto the sample to be tested to generate the first Raman scattered light and collect the first Raman scattered light; The beam splitter 1121 is further used to guide the first Raman scattered light into the direction of the reflector 1124; The reflector 1124 is used to change the optical path of the first Raman scattered light so that the first Raman scattered light reaches the conjugate imaging component 120 .

8. A Raman spectrum measurement method, applied to the Raman spectrum measurement device according to any one of claims 1 to 7, characterized in that: include: Generate first Raman scattered light by the Raman scattered light generating component 110; Performing conjugate imaging on the laser spot on the sample corresponding to the first Raman scattered light by a conjugate imaging component 120, and performing spatial filtering on the first Raman scattered light to obtain second Raman scattered light; The third Raman scattered light is obtained by removing the Rayleigh signal in the second Raman scattered light through the Raman scattered light filter component 130; The single grating spectrometer 140 measures the spectral signal of the third Raman scattered light.

9. An electronic device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein: When the processor executes the computer program, the Raman spectroscopy measurement method according to claim 8 is implemented.

10. A non-transitory computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the Raman spectroscopy measurement method according to claim 7 is implemented.

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