Rotatable and liftable substrate processing apparatus

Abstract

The invention provides a substrate processing device capable of rotating and lifting, which comprises a driver, a transmission assembly, a second transmission wheel, a lifting mechanism, a lifting switching mechanism, a driven rod and a rotating switching mechanism, and is characterized in that the transmission assembly and the second transmission wheel are respectively arranged at two ends of the driver, and the lifting switching mechanism can switch positions to connect or disconnect the transmission assembly; the rotation switching mechanism can switch positions to connect or disconnect the second transmission wheel, the driver drives the transmission assembly and the lifting mechanism through the lifting switching mechanism to control the driven rod to ascend and descend, and the driver controls the driven rod to rotate through the rotation switching mechanism by means of the second transmission wheel. Therefore, the positions of the lifting switching mechanism and the rotating switching mechanism are switched respectively, so that the single driver can enable the driven rod to only rotate, only lift or simultaneously rotate and lift, and the driven rod can be switched independently without mutual interference.

Description

Technical Field

[0001] The invention relates to a substrate processing device capable of rotating and lifting, and in particular to a substrate processing device capable of rotating and lifting independently and switching without interfering with each other. Background Art

[0002] In automated or semi-automated equipment, motors or cylinders must be used to perform transfer, lifting, and rotation to achieve the required functions of the equipment. In semiconductor manufacturing, it is often necessary to use a nozzle to spray chemicals, and the nozzle is driven by a motor or cylinder to lift or rotate, thereby increasing the range and density of the nozzle spraying chemicals.

[0003] However, when lifting and rotating are required, they are usually driven by different drivers independently, such as a motor with a reducer to drive the rotation, and a cylinder to drive lifting. This not only requires the use of multiple drivers, which increases costs, but also affects the actuation efficiency due to the backlash between the reducer and the motor. In addition, the cylinder is not easy to adjust the buffer when lifting, which often causes troubles during assembly and adjustment.

[0004] In view of this, the present invention aims at the above-mentioned deficiencies of the prior art, and particularly concentrates on research and cooperates with the application of theories to try its best to solve the above-mentioned problems, which becomes the improvement goal of the present invention. Summary of the invention

[0005] The main purpose of the present invention is to enable the driven rod to only rotate, only rise and fall, or rotate and rise and fall at the same time through a single driver, and to switch independently without causing mutual interference.

[0006] In order to achieve the above-mentioned purpose, the present invention provides a substrate processing device that can be rotatably lifted and lowered, including a driver, a transmission assembly, a second transmission wheel, a lifting mechanism, a lifting switching mechanism, a driven rod and a rotation switching mechanism, wherein the driver has a rotating shaft, and the rotating shaft has a first end and a second end protruding from both ends of the driver, the transmission assembly includes a blocking ring and a first transmission wheel, the blocking ring is fixed to the driver and rotatably accommodates the first end, the first transmission wheel is rotatably sleeved on the blocking ring, the second transmission wheel is fixed to the second end and surrounds the rotating shaft, the lifting mechanism is arranged on one side of the driver, the lifting mechanism includes a driven wheel and a linkage assembly, the driven wheel is dynamically connected to the first transmission wheel, one end of the linkage assembly is fixed to the driven wheel, the lifting switching mechanism is connected to the first end and includes a first movable part, the first movable part can be switched between a lifting separation position and a lifting connection position, the driven rod is rotatably connected to the rotating shaft, and one end of the driven rod protrudes from the lifting switching mechanism, The other end of the driven rod is rotatably connected to the other end of the linkage assembly, and the rotation switching mechanism includes a second movable part, which is sleeved on the driven rod and can switch between a rotation separation position and a rotation connection position; when the first movable part is located at the lifting and lowering separation position and the rotating shaft rotates, there is a gap between the first movable part and the first transmission wheel, so that the first movable part is idle; when the first movable part is located at the lifting and lowering connection position and the rotating shaft rotates, the first movable part is connected to the first transmission wheel, and the first end drives the first transmission wheel to rotate via the first movable part, so that the driven wheel drives the linkage assembly to actuate so that the driven rod is lifted and lowered relative to the driver; when the second movable part is located at the rotation separation position and the rotating shaft rotates, there is a gap between the second movable part and the second transmission wheel, so that the second transmission wheel is idle; when the second movable part is located at the rotation connection position and the rotating shaft rotates, the second movable part is connected to the second transmission wheel, and the second end drives the second movable part to rotate via the second transmission wheel so that the driven rod is rotated relative to the driver.

[0007] In one embodiment of the present invention, the lifting and switching mechanism also includes a fixed ring, a first substrate and a first cylinder. The fixed ring is fixed to the first end portion. The first movable portion is slidably mounted on the fixed ring. The first movable portion is rotatably accommodated in the first substrate. The first cylinder is connected to the first substrate and can drive the first substrate and the first movable portion to switch between a lifting and separating position and a lifting and connecting position.

[0008] In one embodiment of the present invention, the rotation switching mechanism also includes a second substrate and a second cylinder. The second movable part is rotatably accommodated in the second substrate. The second cylinder is connected to the second substrate and can drive the second substrate and the second movable part to switch between a lifting separation position and a lifting connection position.

[0009] In one embodiment of the present invention, the linkage assembly includes a groove cam, a cam follower, an extension rod and a connecting plate. The groove cam is coaxially fixed to the driven wheel. The groove cam has a lifting track. One end of the cam follower is accommodated in the lifting track. The other end of the cam follower is fixed to one end of the extension rod. The extension rod is parallel to the follower rod. The connecting plate connects the other end of the extension rod and the follower rod. When the driven wheel drives the groove cam to rotate, the cam follower slides along the lifting track to drive the extension rod to rise and fall.

[0010] In one embodiment of the present invention, the lifting mechanism also includes a shell, the groove cam is rotatably accommodated in the shell and passes through the shell to be connected to the driven wheel, the shell has a notch, when the groove cam rotates, the cam follower slides along the lifting track and rises and falls in the notch.

[0011] In one embodiment of the present invention, the first movable part and the second movable part respectively have a first connection structure, the first transmission wheel and the second transmission wheel respectively have a second connection structure, the first connection structure of the first movable part can be connected and fixed corresponding to the second connection structure of the first transmission wheel, and the first connection structure of the second movable part can be connected and fixed corresponding to the second connection structure of the second transmission wheel.

[0012] In one embodiment of the present invention, the first connection structure is one of the magnetic attraction member and the adsorption member, and the second connection structure is the other of the magnetic attraction member and the adsorption member.

[0013] In one embodiment of the present invention, the first connection structure is one of the protrusion and the groove, and the second connection structure is the other of the protrusion and the groove.

[0014] In one embodiment of the present invention, the first transmission wheel and the driven wheel are gears, sprockets or pulleys that cooperate with each other.

[0015] In one embodiment of the present invention, the first transmission wheel and the driven wheel are pulleys that cooperate with each other, and the transmission assembly further includes a belt that is sleeved on the first transmission wheel and the driven wheel.

[0016] The rotatable and elevating substrate processing device of the present invention can independently switch the first movable part of the lifting and lowering switching mechanism to connect or disconnect the first transmission wheel, so that the first movable part can drive the first transmission wheel to rotate or the first movable part can idle, and can independently switch the second movable part of the rotation switching mechanism to connect or disconnect the second transmission wheel, so that the second transmission wheel can drive the second movable part to rotate or the second transmission wheel can idle, so that a single driver can make the driven rod only rotate, only lift, or rotate and lift at the same time, and switch separately without causing mutual interference.

[0017] In order to further understand the technologies, means and effects adopted by the present application to achieve the intended purpose, please refer to the following detailed description and drawings of the present application. It is believed that the purpose, characteristics and features of the present application can be deeply and specifically understood thereby. However, the drawings are only provided for reference and illustration and are not intended to limit the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a cross-sectional side view of the present invention;

[0019] Figure 2 for Figure 1 A top view of

[0020] Figure 3 for Figure 1 3-3 sectional view;

[0021] Figure 4 for Figure 1 4-4 sectional view;

[0022] Figure 5 for Figure 1 5-5 sectional view;

[0023] Figure 6 This is a diagram showing the use state of the driven rod of the present invention when it is only rotating;

[0024] Figure 7 This is a diagram of the use state of the driven rod of the present invention before it rises;

[0025] Figure 8 This is a diagram showing the use state of the present invention when the driven rod is only rising;

[0026] Fig. 9 This is a diagram of the use state of the driven rod of the present invention before it rotates and rises simultaneously;

[0027] Fig.10 This is a diagram showing the use state of the driven rod of the present invention when it rotates and rises simultaneously;

[0028] Wherein, the reference numerals are:

[0029] 10: Driver

[0030] 11: Rotating shaft

[0031] 111: first end

[0032] 112: Second end

[0033] 20: Transmission components

[0034] 21: Barrier ring

[0035] 22: First transmission wheel

[0036] 23: Belt

[0037] 30: Second transmission wheel

[0038] 40: Lifting mechanism

[0039] 41: Driven wheel

[0040] 42: Linkage components

[0041] 421: Groove Cam

[0042] 4211:Fixed shaft

[0043] 4212: Lifting track

[0044] 422: Cam follower

[0045] 423: Extension rod

[0046] 424: Connecting plate

[0047] 43: Shell

[0048] 431: Gap

[0049] 50: Lifting and switching mechanism

[0050] 501: Lifting and separation position

[0051] 502: Lifting connection position

[0052] 51: First Activity Department

[0053] 52: Fixed ring

[0054] 53: First substrate

[0055] 54: First cylinder

[0056] 60: follower rod

[0057] 61: Limiting section

[0058] 70: Rotary switching mechanism

[0059] 701: Rotation separation position

[0060] 702: Rotation connection position

[0061] 71: Second Activity Department

[0062] 72: Second substrate

[0063] 73: Second cylinder

[0064] 80: first connection structure

[0065] 90: Second connection structure. DETAILED DESCRIPTION

[0066] The technical content and detailed description of this application are described below with reference to the accompanying drawings:

[0067] The present invention provides a substrate processing device that can be rotated and lifted. Figures 1 to 5 As shown, it includes a driver 10 , a transmission assembly 20 , a second transmission wheel 30 , a lifting mechanism 40 , a lifting switching mechanism 50 , a driven rod 60 and a rotation switching mechanism 70 .

[0068] The driver 10 has a hollow shaft 11. The shaft 11 has a first end 111 and a second end 112 protruding from both ends of the driver 10. Specifically, the first end 111 of the shaft 11 protrudes from the top of the driver 10, and the second end 112 of the shaft 11 protrudes from the bottom of the driver 10. In this embodiment, the driver 10 is a dual-shaft motor, but the present invention is not limited thereto.

[0069] The transmission assembly 20 mainly includes a blocking ring 21 and a first transmission wheel 22. The blocking ring 21 is fixed to the top of the driver 10, and the first end 111 is rotatably accommodated therein. The first transmission wheel 22 is rotatably sleeved on the outer edge of the blocking ring 21. Specifically, the blocking ring 21 and the first transmission wheel 22 are both roughly annular, so that the first end 111 of the rotating shaft 11 can pass through the blocking ring 21, and the first transmission wheel 22 is sleeved on the blocking ring 21. In other words, the blocking ring 21 is fixed to the top of the driver 10 and blocked between the rotating shaft 11 and the first transmission wheel 22, and the rotating shaft 11 and the first transmission wheel 22 can rotate coaxially relative to the blocking ring 21.

[0070] The second transmission wheel 30 is fixed to the second end 112 and surrounds the rotating shaft 11. In the present embodiment, the second transmission wheel 30 is sleeved and fixed on the outer edge of the second end 112, but the present invention is not limited thereto. For example, the second transmission wheel 30 can also be fixed on a side surface of the second end 112 away from the first end 111 (i.e., the end surface / bottom surface of the second end 112). Specifically, the second transmission wheel 30 can be fixed to the second end 112 by clamping, clamping, bonding or locking, and the present invention does not impose any restrictions on this. Accordingly, when the driver 10 drives the rotating shaft 11 to rotate, the second end 112 can drive the second transmission wheel 30 to rotate.

[0071] The lifting mechanism 40 is arranged on one side of the driver 10. In this embodiment, the lifting mechanism 40 is arranged on the left side of the driver 10, but the present invention is not limited thereto. The lifting mechanism 40 mainly includes a driven wheel 41 and a linkage assembly 42. The driven wheel 41 is connected to the first transmission wheel 22 by power, so that the driven wheel 41 can be driven to rotate by the first transmission wheel 22. In this embodiment, the first transmission wheel 22 and the driven wheel 41 are pulleys that cooperate with each other, and the transmission assembly 20 also includes a belt 23, which is sleeved on the first transmission wheel 22 and the driven wheel 41 so that the two can rotate in a linked manner, but the present invention is not limited thereto. For example, the first transmission wheel 22 and the driven wheel 41 can also be gears or sprockets that cooperate with each other, as long as the two can achieve power connection and can rotate in a linked manner. One end of the linkage assembly 42 is fixedly connected to the driven wheel 41, so that the driven wheel 41 can drive the linkage assembly 42 to operate when rotating. The specific structure and operation mode of the linkage assembly 42 will be described later, so they will not be described here in detail.

[0072] The lifting switching mechanism 50 is connected to the first end portion 111, and the lifting switching mechanism 50 mainly includes a first movable portion 51. The first movable portion 51 can switch between a lifting separation position 501 and a lifting connection position 502. The specific structure and actuation method of the lifting switching mechanism 50 will be described later, so it will not be repeated here.

[0073] In this embodiment, the driven rod 60 is a hollow rod body to reduce weight, but the present invention is not limited thereto. The driven rod 60 is rotatably connected to the rotating shaft 11. One end of the driven rod 60 protrudes from the lifting and lowering switching mechanism 50, and can be connected to a work object (not shown). For example, the work object can be a tool such as a nozzle or a stirrer, so that when the driven rod 60 is rotated, lifted, or rotated and lifted at the same time under different requirements, the work object can be rotated, lifted, or rotated and lifted at the same time to enhance its use effect. The other end of the driven rod 60 is rotatably connected to the other end of the linkage component 42, so that the linkage component 42 can drive the driven rod 60 to rise or fall together when it is actuated, and the driven member will not drive the linkage component 42 to rotate when it rotates.

[0074] The rotation switching mechanism 70 mainly includes a second movable portion 71. The second movable portion 71 can be slidably mounted on the outer edge of the driven rod 60, and can be switched between a rotationally separated position 701 and a rotationally connected position 702. Specifically, the second movable portion 71 is mounted between the second end portion 112 and one end of the driven rod 60 connected to the linkage assembly 42. In this embodiment, the driven rod 60 has a limit section 61, which is located adjacent to the end of the driven rod 60 connected to the linkage assembly 42 and is provided for the second movable portion 71 to be slidably mounted up and down, and the outer shape of the limit section 61 is non-circular so that the second movable portion 71 can drive the limit section 61 to rotate. More specifically, the length of the limit section 61 is greater than or equal to the maximum length that the driven rod 60 can rise or fall. The specific structure and actuation method of the rotation switching mechanism 70 will be described later, so it will not be repeated here.

[0075] See also Figure 6 As shown, when the first movable part 51 is located at the lifting and separating position 501 and the driver 10 drives the rotating shaft 11 to rotate, there is a gap between the first movable part 51 and the first transmission wheel 22 so that the first movable part 51 rotates automatically, that is, the first movable part 51 does not drive the first transmission wheel 22 to rotate.

[0076] Please read next Figure 7 and Figure 8 As shown, when the first movable portion 51 is located at the lifting connection position 502 and the driver 10 drives the rotating shaft 11 to rotate, the first movable portion 51 is connected to the first transmission wheel 22, and the first end portion 111 of the rotating shaft 11 drives the first transmission wheel 22 to rotate via the first movable portion 51, and drives the driven wheel 41 to rotate via the first transmission wheel 22, so that the driven wheel 41 drives the linkage assembly 42 to operate, thereby causing the driven rod 60 to rise or fall relative to the driver 10.

[0077] Further reading Figure 7 As shown, when the second movable portion 71 is located at the rotation separation position 701 and the driver 10 drives the rotating shaft 11 to rotate, there is a gap between the second movable portion 71 and the second transmission wheel 30 so that the second transmission wheel 30 rotates automatically, that is, the second transmission wheel 30 does not drive the second movable portion 71 to rotate.

[0078] Further reading Figure 6 As shown, when the second movable portion 71 is located at the rotation connection position 702 and the driver 10 drives the rotating shaft 11 to rotate, the second movable portion 71 is connected to the second transmission wheel 30, and the second end 112 of the rotating shaft 11 drives the second movable portion 71 to rotate via the second transmission wheel 30, so that the second movable portion 71 drives the limiting segment 61 of the driven rod 60 to rotate, so that the entire driven rod 60 rotates relative to the driver 10.

[0079] Please read next Fig. 9 and Fig.10 As shown, when the first movable portion 51 is located at the lifting connection position 502, the second movable portion 71 is located at the rotation connection position 702 and the driver 10 drives the rotating shaft 11 to rotate, the first movable portion 51 is connected to the first transmission wheel 22, the second movable portion 71 is connected to the second transmission wheel 30, and the first end 111 of the rotating shaft 11 drives the first transmission wheel 22 to rotate via the first movable portion 51 to drive the driven wheel 41 to drive the linkage component 42 to operate, and the second end 112 of the rotating shaft 11 drives the second movable portion 71 to rotate via the second transmission wheel 30 to drive the limiting section 61 of the driven rod 60 to rotate, thereby allowing the driven rod 60 to be lifted and rotated relative to the driver 10 at the same time.

[0080] Thus, the first movable portion 51 of the lifting switching mechanism 50 can be switched independently between the lifting connection position 502 and the lifting separation position 501, so as to connect or separate the first transmission wheel 22, so that the first movable portion 51 can drive the first transmission wheel 22 to rotate together or only the first movable portion 51 can idle on its own, and the second movable portion 71 of the rotation switching mechanism 70 can be switched independently between the rotation connection position 702 and the rotation separation position 701, so as to connect or separate the second transmission wheel 30, so that the second transmission wheel 30 can drive the second movable portion 71 to rotate together or only the second transmission wheel 30 can idle on its own, so that a single driver 10 can allow the driven rod 60 to achieve the functions of only rotating, only lifting, or rotating and lifting at the same time, and perform separate switching without causing mutual interference.

[0081] For further explanation, see Figure 1 As shown, the lifting and switching mechanism 50 also includes a fixing ring 52, a first substrate 53 and a first cylinder 54. The fixing ring 52 is fixed on a side of the first end 111 away from the second end 112 (i.e., the end face / top face of the first end 111). Specifically, the fixing ring 52 can be fixed to the first end 111 by clamping, clamping, bonding or locking, etc., and the present invention does not impose any restrictions on this. The first movable part 51 can be slidably mounted on the fixing ring 52 up and down, so as to switch between the lifting connection position 502 and the lifting separation position 501. The shape of the fixing ring 52 is non-circular so that the fixing ring 52 can drive the first movable part 51 to rotate. The first movable part 51 is rotatably accommodated in the first substrate 53, so as to avoid the first movable part 51 rotating and driving the entire lifting and switching mechanism 50 to rotate. The push rod of the first cylinder 54 is connected to the first substrate 53. The first cylinder 54 can drive the first base plate 53 to drive the first movable part 51 through its push rod, so that the first base plate 53 and the first movable part 51 can slide up and down relative to the fixing ring 52 and switch between the lifting separation position 501 and the lifting connection position 502 .

[0082] Please continue reading Figure 1As shown, the rotation switching mechanism 70 further includes a second base plate 72 and a second cylinder 73. The second movable portion 71 is rotatably accommodated in the second base plate 72, so as to prevent the second movable portion 71 from driving the entire rotation switching mechanism 70 to rotate when the second movable portion 71 rotates. The push rod of the second cylinder 73 is connected to the second base plate 72. The second cylinder 73 can drive the second base plate 72 to drive the second movable portion 71 through its push rod, so that the second base plate 72 and the second movable portion 71 are lifted and lowered to switch between the rotation separation position 701 and the rotation connection position 702.

[0083] Further reading Figure 1 As shown, the linkage assembly 42 in this embodiment includes a groove cam 421, a cam follower 422, an extension rod 423 and a connecting plate 424, but the present invention is not limited thereto, and other linkage structures can also be used to make the driven wheel 41 link the driven rod 60 to move up and down. The groove cam 421 is cylindrical and coaxially fixed to the driven wheel 41. The groove cam 421 in this embodiment extends a fixed shaft 4211 from its end surface to penetrate and fix to the center of the driven wheel 41. On the outer edge of the groove cam 421, there is a lifting track 4212 spirally arranged around its axis. One end of the cam follower 422 is accommodated in the lifting track 4212, and the other end of the cam follower 422 is fixed to the top of the extension rod 423. The extension rod 423 is parallel to the driven rod 60 and extends in a direction away from the driven wheel 41. The connecting plate 424 is vertically connected to the other end of the extension rod 423 and is rotatably connected to the bottom end of the driven rod 60. As a result, when the driven wheel 41 drives the fixed shaft 4211 of the groove cam 421 to rotate, the cam follower 422 is driven by the groove cam 421 to slide up and down along the lifting track 4212, and then drives the driven rod 60 to rise and fall through the extension rods 423423 and the connecting plate 424.

[0084] In addition, the lifting mechanism 40 in this embodiment further includes a housing 43 for accommodating the groove cam 421 without being exposed, but this is not a necessary limitation of the present invention. The groove cam 421 is rotatably accommodated in the housing 43, and the fixed shaft 4211 of the groove cam 421 passes through the top of the housing 43 and is connected to the driven wheel 41. The side of the housing 43 has a notch 431 for the cam follower 422 to pass through and accommodate. Thereby, when the groove cam 421 rotates and drives the cam follower 422, the cam follower 422 slides up and down along the lifting track 4212 and rises and falls in the notch 431.

[0085] Further reading Figure 1As shown, the first movable part 51 and the second movable part 71 respectively have at least one first connection structure 80, and the first transmission wheel 22 and the second transmission wheel 30 respectively have at least one second connection structure 90. Specifically, the first connection structure 80 is respectively arranged on a side surface of the first movable part 51 facing the first transmission wheel 22 and a side surface of the second movable part 71 facing the second ship driving wheel, and the second connection structure 90 is respectively arranged on a side surface of the first transmission wheel 22 facing the first movable part 51 and a side surface of the second transmission wheel 30 facing the second movable part 71. The first connection structure 80 of the first movable part 51 can be connected and fixed corresponding to the second connection structure 90 of the first transmission wheel 22, and the first connection structure 80 of the second movable part 71 can be connected and fixed corresponding to the second connection structure 90 of the second transmission wheel 30, so that the first movable part 51 can drive the first transmission wheel 22 to rotate, and the second transmission wheel 30 can drive the second movable part 71 to rotate.

[0086] In the present embodiment, the first connection structure 80 is one of the magnetic attraction member and the adsorption member, and the second connection structure 90 is the other of the magnetic attraction member and the adsorption member, but the present invention is not limited thereto. For example, the first connection structure 80 may also be one of a protrusion (such as a positioning pin or a key) and a groove (such as a positioning hole or a keyway), and the second connection structure 90 is the other of the protrusion and the groove. Specifically, the magnetic attraction member is a magnetic member such as a magnet, and the adsorption member is another magnetic member with opposite polarity, or a magnetic material member such as an iron member that can be magnetically attracted to the magnet. In this way, the first movable part 51 can be temporarily connected to the first transmission wheel 22 or the second movable part 71 can be temporarily connected to the second transmission wheel 30 by magnetic adsorption, and the first movable part 51 or the second movable part 71 can be pushed away to the lifting separation position 501 or the rotational separation position 701 by the first cylinder 54 or the second cylinder 73 to disconnect.

[0087] The substrate processing device capable of rotation and lifting of the present invention can connect or disconnect the first transmission wheel 22 by enabling the first movable portion 51 of the lifting switching mechanism 50 to switch between the lifting connection position 502 and the lifting separation position 501 independently, so as to make the first transmission wheel 22 rotate with the first movable portion 51 or only the first movable portion 51 rotates idly by itself, and can connect or disconnect the second transmission wheel 30 by enabling the second movable portion 71 of the rotation switching mechanism 70 to switch between the rotation connection position 702 and the rotation separation position 701 independently, so as to make the second transmission wheel 30 rotate with the second movable portion 71 or only the second transmission wheel 30 rotate idly by itself, so that the driven rod 60 can achieve the functions of only rotating, only lifting or rotating and lifting at the same time with a single driver 10, and can be switched separately without causing mutual interference.

[0088] The above is only a preferred embodiment of the present application, and should not limit the scope of implementation of the present application. That is, all equivalent changes and modifications made according to the present application should still fall within the scope of the patent coverage of the present application. The present application may also have other embodiments. Without departing from the spirit and essence of the present application, technicians familiar with the field can make various corresponding changes and deformations according to the present application, but these corresponding changes and deformations should fall within the scope of protection of the claims attached to the present application.

Claims

1. A substrate processing device capable of rotating and lifting, characterized in that: include: A driver having a rotating shaft, wherein the rotating shaft has a first end and a second end protruding from two ends of the driver; A transmission assembly, comprising a blocking ring and a first transmission wheel, wherein the blocking ring is fixed to the driver and rotatably accommodates the first end portion, and the first transmission wheel is rotatably sleeved on the blocking ring; a second transmission wheel, fixed to the second end portion and surrounding the rotating shaft; a lifting mechanism, disposed on one side of the driver, the lifting mechanism comprising a driven wheel and a linkage assembly, the driven wheel is connected to the first transmission wheel by power, and one end of the linkage assembly is fixedly connected to the driven wheel; a lifting switching mechanism connected to the first end and comprising a first movable portion, wherein the first movable portion can be switched between a lifting separation position and a lifting connection position; a driven rod rotatably connected to the rotating shaft, one end of the driven rod protruding from the lifting and lowering switching mechanism, and the other end of the driven rod rotatably connected to the other end of the linkage assembly; and A rotation switching mechanism, comprising a second movable portion, the second movable portion is sleeved on the driven rod and can be switched between a rotationally separated position and a rotationally connected position; When the first movable part is located at the lifting and separating position and the rotating shaft rotates, there is a gap between the first movable part and the first transmission wheel so that the first movable part rotates idly; When the first movable part is located at the lifting connection position and the rotating shaft rotates, the first movable part is connected to the first transmission wheel, and the first end drives the first transmission wheel to rotate via the first movable part, so that the driven wheel drives the linkage assembly to move so that the driven rod can be lifted or lowered relative to the driver; When the second movable part is located at the rotation separation position and the rotating shaft rotates, there is a gap between the second movable part and the second transmission wheel so that the second transmission wheel rotates idly; When the second movable part is located at the rotational connection position and the rotating shaft rotates, the second movable part is connected to the second transmission wheel, and the second end drives the second movable part to rotate via the second transmission wheel to make the driven rod rotate relative to the driver.

2. The rotatable and elevating substrate processing device according to claim 1, characterized in that: The lifting and switching mechanism also includes a fixed ring, a first substrate and a first cylinder. The fixed ring is fixed to the first end portion. The first movable part can be slidably mounted on the fixed ring. The first movable part can be rotatably accommodated in the first substrate. The first cylinder is connected to the first substrate and can drive the first substrate and the first movable part to switch between the lifting separation position and the lifting connection position.

3. The rotatable and elevating substrate processing device according to claim 1, characterized in that: The rotation switching mechanism also includes a second substrate and a second cylinder. The second movable part is rotatably accommodated in the second substrate. The second cylinder is connected to the second substrate and can drive the second substrate and the second movable part to switch between the lifting separation position and the lifting connection position.

4. The rotatable and elevating substrate processing device according to claim 1, characterized in that: The linkage assembly includes a groove cam, a cam follower, an extension rod and a connecting plate, wherein the groove cam is coaxially fixed to the driven wheel, the groove cam has a lifting track, one end of the cam follower is accommodated in the lifting track, the other end of the cam follower is fixed to one end of the extension rod, the extension rod is parallel to the follower rod, and the connecting plate connects the other end of the extension rod and the follower rod, wherein when the driven wheel drives the groove cam to rotate, the cam follower slides along the lifting track to drive the extension rod to rise and fall.

5. The rotatable and elevating substrate processing device according to claim 4, characterized in that: The lifting mechanism also includes a shell, the groove cam is rotatably accommodated in the shell and passes through the shell to be connected with the driven wheel, the shell has a notch, when the groove cam rotates, the cam follower slides along the lifting track and rises and falls in the notch.

6. The rotatable and elevating substrate processing device according to claim 1, characterized in that: The first movable part and the second movable part respectively have a first connecting structure, the first transmission wheel and the second transmission wheel respectively have a second connecting structure, the first connecting structure of the first movable part can be connected and fixed corresponding to the second connecting structure of the first transmission wheel, and the first connecting structure of the second movable part can be connected and fixed corresponding to the second connecting structure of the second transmission wheel.

7. The rotatable and elevating substrate processing device according to claim 6, characterized in that: The first connection structure is one of the magnetic attraction component and the adsorption component, and the second connection structure is the other of the magnetic attraction component and the adsorption component.

8. The rotatable and elevating substrate processing device according to claim 6, characterized in that: The first connection structure is one of the protrusion and the groove, and the second connection structure is the other of the protrusion and the groove.

9. The rotatable and elevating substrate processing device according to claim 1, characterized in that: The first transmission wheel and the driven wheel are gears, sprockets or pulleys that cooperate with each other.

10. The rotatable and elevating substrate processing device according to claim 1, wherein: The first transmission wheel and the driven wheel are pulleys that cooperate with each other, and the transmission assembly also includes a belt, which is sleeved on the first transmission wheel and the driven wheel.

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