Rotary opening and closing structure for mounting wafer loading system

Abstract

The invention discloses a rotary opening and closing structure for mounting a wafer loading system, and relates to the technical field of wafer production. The rotary opening and closing structure for mounting the wafer loading system comprises an equipment frame and an opening and closing door frame, the opening and closing door frame is provided with a feeding port, and the rotary opening and closing structure further comprises two sets of rotating mechanisms which are arranged on the side wall of the equipment frame and used for rotating the opening and closing door frame. According to the rotary opening and closing structure for mounting the wafer loading system, the wafer box can be conveniently mounted and fixed on the side wall of the opening and closing door frame; when the rotating speed of the opening and closing door frame is high, speed limiting processing can be carried out on the opening and closing door frame, the opening and closing door frame is more stable and reliable, meanwhile, a good buffering effect can be achieved on the wafer box, and violent impact and shaking of wafers in the wafer box are avoided; after the opening and closing door frame is closed, the position of the opening and closing door frame can be automatically detected, the situation that the opening and closing door frame deviates or is not closed in place is avoided, the wafer box is prevented from deviating, and the wafer loading and feeding effect is guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of wafer production, in particular to a rotary opening and closing structure for installing a wafer loading system. Background Art

[0002] The wafer box is part of the wafer loading system and is a loading tool specifically used to store and transport semiconductor wafers. It ensures that the wafers are not contaminated or damaged during storage and transportation. During wafer production, the wafer box containing the wafers needs to be transported to the feed port of the semiconductor chip processing equipment for feeding the wafers. In order to ensure stability during feeding, the wafer box usually needs to be clamped and fixed on the equipment frame of the semiconductor chip processing equipment. In order to facilitate maintenance and inspection of the interior of the equipment, an opening and closing door frame is usually set on one side of the equipment frame, and the wafer box is clamped and fixed on the opening and closing door frame.

[0003] However, the existing rotating opening and closing structure for installing the wafer loading system is not convenient for quick installation and fixation of the wafer box when in use, and is not convenient and quick to use. At the same time, when the opening and closing door frame rotates and opens and closes at a fast speed, it is easy to cause a large impact on the wafers in the wafer box, causing them to shake and collide, affecting the loading effect. Moreover, after long-term use, the opening and closing door frame is prone to shifting after closing due to its own weight and impact, thereby causing the wafer box to shift, thereby affecting the loading and feeding effect of the wafer. Summary of the invention

[0004] The object of the present invention is to provide a rotating opening and closing structure for installing a wafer loading system to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned object, the present invention provides the following technical solution: a rotating opening and closing structure for installing a wafer loading system, comprising an equipment frame and an opening and closing door frame, wherein a feeding port is provided on the opening and closing door frame, and further comprising:

[0006] Two sets of rotating mechanisms are arranged on the side walls of the equipment frame and are used to rotate the opening and closing door frame;

[0007] An installation mechanism, arranged on the side wall of the opening and closing door frame and close to the feeding port, for installing the wafer box;

[0008] A detection mechanism, arranged on the side wall of the equipment frame and located below the opening and closing door frame, for detecting the closing state of the opening and closing door frame;

[0009] The mounting mechanism comprises:

[0010] A bearing plate, fixed to the side wall of the door frame and located outside the feed port;

[0011] A plurality of strip-shaped openings are arranged on the top of the carrying plate and are arranged through the top of the carrying plate;

[0012] Two stoppers, fixed to the top of the carrying plate;

[0013] A plurality of first reset mechanisms are arranged at the bottom of the carrier plate, and each first reset mechanism is connected to a first movable plate for guiding and resetting the movement of the first movable plate, the first movable plate is inserted into the strip opening, and a slanted plate is fixedly connected to the top of the first movable plate;

[0014] The buffer mechanism is arranged below the first movable plate and fixed to the side wall of the door frame, and is used for buffering the movement of the first movable plate.

[0015] Preferably, the buffer mechanism comprises:

[0016] A hollow arc cover is fixed to the bottom of the bearing plate through a plurality of fixing rods, and the arc cover is filled with hydraulic oil;

[0017] An arc plate, slidably connected in the arc cover;

[0018] A plurality of first moving blocks are arranged above the arc-shaped cover and fixed to the top of the arc-shaped plate through rectangular rods;

[0019] A first V-shaped block is slidably connected to the top of each first moving block via a guide rail;

[0020] A first pushing block, inserted into the first V-shaped block and fixed to the side wall of the first moving plate through a first connecting rod;

[0021] A fixed cylinder, fixed to the side wall of the door frame and connected to the arc cover through a connecting pipe, a counterweight plate is inserted in the fixed cylinder;

[0022] The limiting mechanism is arranged above each of the first moving blocks and is used to limit the first V-shaped block.

[0023] Preferably, each group of the rotating mechanisms comprises:

[0024] Two fixed blocks are fixed to the side walls of the equipment frame, and the side walls opposite to the two fixed blocks are rotatably connected with a rotating shaft;

[0025] A rotating block, fixedly sleeved on the side wall of the rotating shaft and fixed to the side wall of the opening and closing door frame;

[0026] A speed limiting mechanism, arranged on the side wall of the rotating shaft, for limiting the speed of the rotation of the rotating shaft;

[0027] The speed limiting mechanism comprises:

[0028] A friction disc, fixed to the lower end of the rotating shaft;

[0029] The first moving mechanism is arranged on the side wall of the equipment frame, and a friction block is arranged on the first moving mechanism so that the friction block abuts against the side wall of the friction disk.

[0030] Preferably, the detection mechanism comprises:

[0031] A plurality of detection blocks are fixed to the side wall of the door frame, and a conical hole is formed at the bottom of each detection block;

[0032] A plurality of L-shaped plates, disposed below the detection block and fixed to the bottom of the equipment frame;

[0033] A second moving mechanism is disposed above the L-shaped plate, and a tapered rod is connected to the second moving mechanism so that the tapered rod can be inserted into the tapered hole;

[0034] The detection component is arranged on the side wall of the L-shaped plate and is used for detecting the insertion state of the tapered rod.

[0035] Preferably, the first moving mechanism comprises:

[0036] Two guide rods are inserted into the side wall of the friction block, and one end of the guide rod away from the friction block is fixed to the side wall of the equipment frame through an L-shaped frame;

[0037] A second moving block, sleeved on the side walls of the two guide rods and fixed to the side wall of the friction block through a first elastic member;

[0038] The pushing mechanism is arranged on the side wall of the equipment frame and is used for pushing the second moving block to move.

[0039] Preferably, the pushing mechanism comprises:

[0040] A support frame, disposed below the L-shaped frame and fixed to a side wall of the equipment frame;

[0041] The L-shaped rotating plate is rotated on the side wall of the support frame through a rotating pin, and a sliding groove is provided on the side wall of the rotating plate;

[0042] A push pin, inserted into the slide slot and fixed to the bottom of the second moving block through a connecting frame;

[0043] Two mounting plates are fixed to the top of the counterweight plate through a U-shaped frame, and a conical plate is fixedly connected to the top of each mounting plate so that the lower end of the rotating plate can slide on the side wall of the conical plate.

[0044] Preferably, the limiting mechanism comprises:

[0045] A plurality of through holes are provided on the top of each of the first moving blocks and are arranged at equal intervals;

[0046] A third moving mechanism is disposed below the carrying plate, and a plurality of third moving blocks are connected to the third moving mechanism for moving the third moving blocks;

[0047] A limiting rod is fixed to the bottom of the third moving block so that the limiting rod can be inserted into the through hole;

[0048] Two first T-shaped guide rods, fixed to the top of the third moving block;

[0049] The connecting block is sleeved on the side walls of the two first T-shaped guide rods and fixed on the side wall of the first V-shaped block.

[0050] Preferably, the second moving mechanism comprises:

[0051] A moving rod, fixed to the lower end of the tapered rod and passing through the bottom of the L-shaped plate;

[0052] The fixing ring is fixedly sleeved on the side wall of the moving rod and fixed to the top of the L-shaped plate through the second elastic member.

[0053] Preferably, the detection component comprises:

[0054] a second V-shaped block, fixed to the lower end of the moving rod;

[0055] A mounting block is fixed to the side wall of the L-shaped plate through an L-shaped block, and a distance sensor is fixedly inserted into the side wall of the mounting block;

[0056] Two second T-shaped guide rods are inserted into the side wall of the mounting block, and one end of the two second T-shaped guide rods close to the second V-shaped block is fixedly connected to the second movable plate, so that the second movable plate can slide on the side wall of the second V-shaped block;

[0057] Two third elastic members are sleeved on the side walls of the two second T-shaped guide rods, and two ends of the third elastic members are respectively fixed to the mounting block and the side wall of the second movable plate.

[0058] Preferably, the third moving mechanism comprises:

[0059] A second reset mechanism is disposed below the load-bearing plate, and a T-shaped plate is connected to the second reset mechanism for resetting the T-shaped plate;

[0060] A plurality of first connecting plates are fixed to the bottom of the T-shaped plate, and the side walls of the first connecting plates are fixedly connected with the second pushing block and the third pushing block;

[0061] A plurality of second connecting plates, inserted between the second pushing block and the third pushing block, and fixed to the side wall of the third moving block;

[0062] The push rod is fixed on the top of the T-shaped plate and penetrates the top of the bearing plate.

[0063] Preferably, each of the first reset mechanisms comprises:

[0064] A fixing plate, fixed to the bottom of the carrying plate;

[0065] Two third T-shaped guide rods, fixed to the side wall of the first movable plate and penetrating through the side wall of the fixed plate;

[0066] The two fourth elastic members are sleeved on the side walls of the two third T-shaped guide rods, and two ends of the fourth elastic members are respectively fixed to the fixed plate and the side wall of the first movable plate.

[0067] Preferably, the second reset mechanism comprises:

[0068] Two fourth T-shaped guide rods are fixed to the bottom of the bearing plate and are arranged through the T-shaped plate;

[0069] The two fifth elastic members are sleeved on the side walls of the two fourth T-shaped guide rods, and the two ends of the fifth elastic members are respectively fixed to the bottom of the T-shaped plate and the bottom of the fourth T-shaped guide rod.

[0070] Compared with the prior art, the present invention has the following beneficial effects:

[0071] (1) The rotating opening and closing structure for installing the wafer loading system is provided with an installation mechanism and a buffer mechanism, etc. When the wafer box needs to be installed, the wafer box is slid downward along the side wall of the inclined plate, and at the same time, the plurality of first movable plates are pushed to move in a direction close to the fixed plate, and the fourth elastic member is compressed. When the wafer box slides to the side wall of the first movable plate and contacts the top of the carrier plate, the fourth elastic member enables the two opposite first movable plates to abut against the two sides of the wafer box, and the other first movable plate can push the side wall of the wafer box and the stopper. The first movable plate is pressed against the first V-shaped block, thereby facilitating the clamping and fixing of the wafer box, realizing the rapid installation of the wafer box, and being more convenient and quick to use. At the same time, when the first movable plate moves, the first connecting rod and the first pushing block can be used to push the first V-shaped block to slide on the guide rail, and when the bottom of the wafer box is pressed against the top of the pushing rod, the T-shaped plate can be pushed to slide downward along the side wall of the fourth T-shaped guide rod. At the same time, the fifth elastic member is compressed, and when the T-shaped plate moves downward, the second pushing block and the third pushing block are driven to move downward through the first connecting plate. When the second pushing block abuts against the top of the second connecting plate, it can drive the third moving block and the limit rod to move downward, and insert the limit rod into the through hole for limiting. When the opening and closing door frame is rotated to open and close, when the rotation speed is faster, the wafer box will abut against the side wall of the first moving plate, and can push the first moving plate to continue to move in the direction close to the fixed plate. At the same time, the fourth elastic member is further compressed and drives the first pushing block to continue to move through the first connecting rod, so that the first pushing block abuts against the side wall of the first V-shaped block, thereby pushing the first V-shaped block to move downward, and driving the arc plate to move downward through the first moving block and the rectangular rod. At this time, the hydraulic oil in the arc cover can be squeezed, and the counterweight plate can be pushed to move upward along the fixed cylinder, which can play a good buffering effect, avoiding severe impact and shaking of the wafers inside the wafer box, and ensuring the loading effect of the wafers. After the impact is completed, the arc plate can move upward and reset under the action of the counterweight plate. At the same time, the first moving plate can move in the direction away from the fixed plate under the action of the fourth elastic member and abut against the side wall of the wafer box again to achieve clamping and fixing.

[0072] (2) The rotating opening and closing structure for installing the wafer loading system is provided with a speed limiting mechanism, etc., so that when the door frame is rotated and opened, the friction disk is driven to rotate synchronously by the rotating block and the rotating shaft. Under the action of the first elastic member, the friction block is abutted against the side wall of the friction disk to provide resistance, thereby limiting the rotation speed of the rotating shaft, and further limiting the rotation speed of the door frame, which is more stable and reliable. Moreover, when the door frame rotates at a faster speed, the counterweight plate moves upward, which can drive the mounting plate and the conical plate through the U-shaped frame. When the cam is in a state of being moved upward, the lower end of the rotating plate can slide downward along the side wall of the conical disk and rotate clockwise along the rotating pin. At this time, the pushing pin slides in the slide groove, thereby driving the second moving block to move through the connecting frame, so that the first elastic member continues to be compressed, thereby making the extrusion force between the friction block and the friction disk greater, making the resistance to the rotating shaft greater, making the speed limiting effect better, and making the opening and closing door frame more stable and reliable when rotating and opening and closing, avoiding severe impact and shaking of the wafers in the wafer box, and ensuring the loading effect of the wafers.

[0073] (3) The wafer loading system is installed with a rotating opening and closing structure, by setting a detection mechanism, etc., when the opening and closing door frame is rotated to close, when the bottom of the opening and closing door frame abuts against the side wall of the conical rod, it can push the movable rod to move downward, and at the same time, the second elastic member is compressed, and the top of the conical rod can slide along the bottom of the opening and closing door frame to the bottom of the detection block. After the opening and closing door frame is closed in place, the conical rod is aligned with the conical hole. At this time, under the action of the second elastic member, the conical rod is inserted into the conical hole. At this time, the second movable plate is in the middle position of the second V-shaped block, which can support the opening and closing door frame, reduce its deformation and tilting under the action of its own weight, and be more stable and reliable. When the door frame is offset or not closed in place, the conical rod will be offset from the conical hole, causing the conical rod to be unable to be fully inserted into the conical hole. At this time, the moving rod and the second V-block will move downward relative to the second moving plate, causing the second moving plate to slide on the side wall of the second V-block, thereby pushing the second moving plate to move toward the mounting block. The third elastic member is compressed and the distance change of the second moving plate is detected by the distance sensor, so that after the door frame is closed, its position can be automatically detected, and the operator can be reminded to perform timely maintenance to avoid the door frame from being offset, which in turn causes the wafer box to be offset, thereby ensuring the effect of wafer loading and feeding. BRIEF DESCRIPTION OF THE DRAWINGS

[0074] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0075] Figure 2 It is a partial cross-sectional structural schematic diagram of the fixed cylinder in the present invention;

[0076] Figure 3 It is a schematic diagram of the position of the detection mechanism in the present invention;

[0077] Figure 4 It is a structural schematic diagram of the second reset mechanism in the present invention;

[0078] Figure 5 for Figure 1 A schematic diagram of the enlarged structure at A in the middle;

[0079] Figure 6 for Figure 1 A schematic diagram of the enlarged structure at B in the middle;

[0080] Figure 7 for Figure 2 Schematic diagram of the enlarged structure at C in the middle;

[0081] Figure 8 for Figure 3 Schematic diagram of the enlarged structure at D in the middle;

[0082] Fig. 9 for Figure 4 Schematic diagram of the enlarged structure at E in the middle;

[0083] Fig.10 for Figure 6 The enlarged structural diagram at F in the middle;

[0084] Fig.11 for Figure 7 Schematic diagram of the enlarged structure at G in the middle;

[0085] Fig.12 for Fig.11 Schematic diagram of the enlarged structure at H in the middle;

[0086] Fig.13 for Figure 8 A schematic diagram of the enlarged structure at I in the middle;

[0087] Fig.14 for Fig.13 Schematic diagram of the enlarged structure at J in the middle.

[0088] In the figure: 101, equipment frame; 102, door frame; 103, feed port; 201, fixed rod; 202, arc cover; 203, rectangular rod; 204, first moving block; 205, guide rail; 206, first V-shaped block; 207, first connecting rod; 208, first push block; 209, arc plate; 210, fixed cylinder; 211, counterweight plate; 212, connecting pipe; 301, friction plate; 302, friction block; 401, L-shaped frame ; 402, guide rod; 403, second moving block; 404, first elastic member; 501, through hole; 502, connecting block; 503, first T-shaped guide rod; 504, third moving block; 505, limit rod; 601, second connecting plate; 602, T-shaped plate; 603, first connecting plate; 604, second push block; 605, third push block; 701, fourth T-shaped guide rod; 702, fifth elastic member; 703, push rod; 801, second elastic member 802, moving rod; 803, fixing ring; 901, second V-shaped block; 902, L-shaped block; 903, mounting block; 904, second T-shaped guide rod; 905, second moving plate; 906, third elastic member; 907, distance sensor; 1001, fixing plate; 1002, third T-shaped guide rod; 1003, fourth elastic member; 11, wafer box; 1201, carrier plate; 1202, strip opening; 1203, first moving plate; 1 204, inclined plate; 1205, stopper; 1301, fixed block; 1302, rotating shaft; 1303, rotating block; 1401, U-shaped frame; 1402, mounting plate; 1403, conical disk; 1404, supporting frame; 1405, rotating pin; 1406, rotating plate; 1407, slide groove; 1408, connecting frame; 1409, pushing pin; 1501, detection block; 1502, conical hole; 1503, L-shaped plate; 1504, conical rod. DETAILED DESCRIPTION

[0089] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0090] See also Figure 1-Figure 14 The present invention provides a rotating opening and closing structure for installing a wafer loading system, comprising an equipment frame 101 and an opening and closing door frame 102, wherein a feeding port 103 is provided on the opening and closing door frame 102, and further comprising:

[0091] Two sets of rotating mechanisms are arranged on the side walls of the equipment frame 101 and are used to rotate the opening and closing door frame 102 .

[0092] The mounting mechanism is disposed on the side wall of the door frame 102 and close to the feed port 103 , and is used to mount the wafer box 11 .

[0093] The detection mechanism is arranged on the side wall of the equipment frame 101 and is located below the opening and closing door frame 102 , and is used to detect the closing state of the opening and closing door frame 102 .

[0094] The installation mechanism includes:

[0095] The supporting plate 1201 is fixed to the side wall of the door frame 102 and is located outside the feeding port 103 .

[0096] A plurality of strip-shaped openings 1202 are disposed on the top of the carrier plate 1201 and penetrate through the carrier plate 1201 .

[0097] Two stoppers 1205 are fixed on the top of the carrying plate 1201 .

[0098] Multiple first reset mechanisms are arranged at the bottom of the supporting plate 1201, and each first reset mechanism is connected to a first movable plate 1203 for guiding and resetting the movement of the first movable plate 1203. The first movable plate 1203 is inserted into the strip opening 1202, and the top of the first movable plate 1203 is fixedly connected to an inclined plate 1204.

[0099] The buffer mechanism is arranged below the first movable plate 1203 and fixed to the side wall of the opening and closing door frame 102, and is used to buffer the movement of the first movable plate 1203, so as to facilitate the installation and fixing of the wafer box 11 on the side wall of the opening and closing door frame 102, and is more convenient and quick to use. When the opening and closing door frame 102 is rotated to open and close, when the rotation speed is fast, the speed limit can be processed to make the opening and closing door frame 102 more stable and reliable when rotating and opening and closing. At the same time, it can play a good buffering effect on the wafer box 11, avoiding the severe impact and shaking of the wafer inside the wafer box 11. After the opening and closing door frame 102 is closed, its position can be automatically detected, and the operator can be reminded to perform timely maintenance to avoid the opening and closing door frame 102 from being offset or not closed in place, and avoid the wafer box 11 from being offset, so as to ensure the effect of wafer loading and feeding.

[0100] See also Figure 1 , Figure 2 , Figure 5 , Figure 7 and Fig.11 , the buffer mechanism includes:

[0101] The hollow arc cover 202 is fixed to the bottom of the supporting plate 1201 through a plurality of fixing rods 201 , and the arc cover 202 is filled with hydraulic oil.

[0102] The arc plate 209 is slidably connected inside the arc cover 202 .

[0103] A plurality of first moving blocks 204 are disposed above the arc-shaped cover 202 and fixed to the top of the arc-shaped plate 209 via rectangular rods 203 .

[0104] The first V-shaped block 206 is slidably connected to the top of each first moving block 204 via the guide rail 205 .

[0105] The first pushing block 208 is inserted into the first V-shaped block 206 and fixed to the side wall of the first moving plate 1203 through the first connecting rod 207 .

[0106] The fixed cylinder 210 is fixed to the side wall of the door frame 102 and communicated with the arc cover 202 through the connecting pipe 212 . A counterweight plate 211 is inserted into the fixed cylinder 210 .

[0107] The limiting mechanism is arranged above each first moving block 204 and is used to limit the first V-shaped block 206. When the rotation speed is fast, the wafer box 11 will abut against the side wall of the first moving plate 1203, which can push the first moving plate 1203 to continue to move, and drive the first pushing block 208 to continue to move through the first connecting rod 207, so that the first pushing block 208 abuts against the side wall of the first V-shaped block 206, thereby pushing the first V-shaped block 206 to move downward, and drive the arc plate 209 to move upward through the first moving block 204 and the rectangular rod 203. When the wafer box 11 is moved downward, the hydraulic oil in the arc cover 202 can be squeezed and the counterweight plate 211 can be pushed to move upward along the fixed cylinder 210, which can play a good buffering effect and avoid causing severe impact and shaking of the wafers inside the wafer box 11, thereby ensuring the loading effect of the wafers. After the impact is completed, the arc plate 209 can move upward and reset under the action of the counterweight plate 211. At the same time, the first movable plate 1203 can move in the direction away from the fixed plate 1001 under the action of the first reset mechanism and abut against the side wall of the wafer box 11 again to achieve clamping and fixation.

[0108] See also Figure 1 , Figure 6 and Fig.10 , each set of rotating mechanisms includes:

[0109] The two fixing blocks 1301 are fixed to the side walls of the equipment frame 101 , and the opposite side walls of the two fixing blocks 1301 are rotatably connected with a rotating shaft 1302 .

[0110] The rotating block 1303 is fixedly sleeved on the side wall of the rotating shaft 1302 and fixed to the side wall of the opening and closing door frame 102 .

[0111] The speed limiting mechanism is disposed on the side wall of the rotating shaft 1302 and is used to limit the speed of the rotation of the rotating shaft 1302 .

[0112] Speed ​​limiting agencies include:

[0113] The friction plate 301 is fixed to the lower end of the rotating shaft 1302 .

[0114] The first moving mechanism is arranged on the side wall of the equipment frame 101, and the friction block 302 is arranged on the first moving mechanism, so that the friction block 302 is against the side wall of the friction disk 301. When the opening and closing door frame 102 is rotated to open and close, the friction disk 301 is driven to rotate synchronously by the rotating block 1303 and the rotating shaft 1302. Under the action of the first moving mechanism, the friction block 302 is against the side wall of the friction disk 301 to provide resistance, so that the rotation speed of the rotating shaft 1302 can be limited, and then the rotation speed of the opening and closing door frame 102 can be limited, which is more stable and reliable.

[0115] See also Figure 8 and Fig.13 , the testing agencies include:

[0116] A plurality of detection blocks 1501 are fixed to the side wall of the door frame 102 , and a conical hole 1502 is formed at the bottom of each detection block 1501 .

[0117] A plurality of L-shaped plates 1503 are disposed below the detection block 1501 and fixed to the bottom of the device frame 101 .

[0118] The second moving mechanism is disposed above the L-shaped plate 1503 , and a tapered rod 1504 is connected to the second moving mechanism so that the tapered rod 1504 can be inserted into the tapered hole 1502 .

[0119] The detection component is arranged on the side wall of the L-shaped plate 1503, and is used to detect the insertion status of the tapered rod 1504. When the opening and closing door frame 102 is rotated to close, when the bottom of the opening and closing door frame 102 is against the side wall of the tapered rod 1504, the movable rod 802 can be pushed to move downward, and the top of the tapered rod 1504 can slide along the bottom of the opening and closing door frame 102 to the bottom of the detection block 1501. After the opening and closing door frame 102 is closed in place, the tapered rod 1504 is aligned with the tapered hole 1502. At this time, under the action of the second moving mechanism, the tapered rod 1504 is inserted into the tapered hole 1502, which can support the opening and closing door frame 102, reduce its deformation and tilt under the action of its own weight, and be more stable and reliable. The position of the opening and closing door frame 102 after closing is automatically detected through the detection component.

[0120] See also Figure 6 and Fig.10 , the first moving mechanism comprises:

[0121] Two guide rods 402 are inserted into the side wall of the friction block 302 , and one end of the guide rod 402 away from the friction block 302 is fixed to the side wall of the equipment frame 101 through an L-shaped frame 401 .

[0122] The second moving block 403 is sleeved on the side walls of the two guide rods 402 and fixed to the side wall of the friction block 302 through the first elastic member 404. The first elastic member 404 can be a spring or the like.

[0123] The pushing mechanism is arranged on the side wall of the equipment frame 101 , and is used to push the second moving block 403 to move, guide and reset the movement of the friction block 302 , and make the friction block 302 abut against the side wall of the friction disk 301 .

[0124] See also Figure 2 , Figure 6 , Figure 7 and Fig.10 , the driving agencies include:

[0125] The support frame 1404 is disposed below the L-shaped frame 401 and fixed to the side wall of the equipment frame 101 .

[0126] The L-shaped rotating plate 1406 is rotated on the side wall of the support frame 1404 through the rotating pin 1405, and a sliding groove 1407 is opened on the side wall of the rotating plate 1406.

[0127] The push pin 1409 is inserted into the slide slot 1407 and fixed to the bottom of the second moving block 403 through the connecting frame 1408 .

[0128] The two mounting plates 1402 are fixed to the top of the counterweight plate 211 through the U-shaped frame 1401, and the top of each mounting plate 1402 is fixedly connected with a conical plate 1403, so that the lower end of the rotating plate 1406 can slide on the side wall of the conical plate 1403. When the rotation speed of the door frame 102 is fast, when the counterweight plate 211 moves upward, the mounting plates 1402 and the conical plate 1403 can be driven to move upward through the U-shaped frame 1401, so that the rotating plate 1406 The lower end of the cone disk 1403 can slide downward along the side wall of the cone disk 1403 and rotate clockwise along the rotating pin 1405. At this time, the push pin 1409 slides in the slide groove 1407, so that the second moving block 403 can be moved through the connecting frame 1408, so that the first elastic member 404 continues to be compressed, thereby making the extrusion force between the friction block 302 and the friction disk 301 greater, making the rotating shaft 1302 subject to greater resistance, and making the speed limiting effect better.

[0129] See also Fig.12 , the limiting mechanism includes:

[0130] A plurality of through holes 501 are disposed on the top of each first moving block 204 and are arranged at equal intervals.

[0131] The third moving mechanism is disposed below the carrying plate 1201 , and a plurality of third moving blocks 504 are connected to the third moving mechanism for moving the third moving blocks 504 .

[0132] The limiting rod 505 is fixed to the bottom of the third moving block 504 so that the limiting rod 505 can be inserted into the through hole 501 .

[0133] The two first T-shaped guide rods 503 are fixed on the top of the third moving block 504 .

[0134] The connecting block 502 is sleeved on the side walls of the two first T-shaped guide rods 503 and fixed on the side walls of the first V-shaped block 206. When the wafer box 11 contacts the top of the carrier plate 1201, the third moving block 504 and the limiting rod 505 can be driven to move downward through the third moving mechanism, and the limiting rod 505 can be inserted into the through hole 501 for limiting.

[0135] See also Fig.13 and Fig.14 , the second moving mechanism comprises:

[0136] The moving rod 802 is fixed to the lower end of the tapered rod 1504 and passes through the bottom of the L-shaped plate 1503 .

[0137] The fixing ring 803 is fixedly mounted on the side wall of the moving rod 802 and fixed to the top of the L-shaped plate 1503 through the second elastic member 801. The second elastic member 801 can be a spring, etc., which guides and resets the movement of the tapered rod 1504.

[0138] See also Fig.13 and Fig.14 , the detection components include:

[0139] The second V-shaped block 901 is fixed to the lower end of the moving rod 802 .

[0140] The mounting block 903 is fixed to the side wall of the L-shaped plate 1503 through the L-shaped block 902, and a distance sensor 907 is fixedly inserted into the side wall of the mounting block 903, and the distance sensor 907 is electrically connected to an external alarm.

[0141] Two second T-shaped guide rods 904 are inserted into the side wall of the mounting block 903 , and one end of the two second T-shaped guide rods 904 close to the second V-shaped block 901 is fixedly connected to the second movable plate 905 , so that the second movable plate 905 can slide on the side wall of the second V-shaped block 901 .

[0142] Two third elastic members 906 are sleeved on the side walls of the two second T-shaped guide rods 904. The third elastic members 906 can be springs, etc., and the two ends of the third elastic members 906 are respectively fixed to the side walls of the mounting block 903 and the second movable plate 905. When the door frame 102 is rotated to close, when the bottom of the door frame 102 abuts against the side wall of the tapered rod 1504, the movable rod 802 can be pushed to move downward. At the same time, the second elastic member 801 is compressed, and the top of the tapered rod 1504 can slide along the bottom of the door frame 102 to the bottom of the detection block 1501. After the door frame 102 is closed in place, the tapered rod 1504 is aligned with the tapered hole 1502. At this time, under the action of the second elastic member 801, the tapered rod 1504 is inserted into the tapered hole 1502. At this time, the second movable plate 905 is in the second V-block 901. In the middle position, if the opening and closing door frame 102 is offset or not closed in place, the conical rod 1504 will be offset from the conical hole 1502, causing the conical rod 1504 to be unable to be fully inserted into the conical hole 1502. At this time, the movable rod 802 and the second V-block 901 will move downward relative to the second movable plate 905, so that the second movable plate 905 slides on the side wall of the second V-block 901, thereby pushing the second movable plate 905 to move toward the mounting block 903. The third elastic member 906 is compressed and the distance change of the second movable plate 905 is detected by the distance sensor 907, so that after the opening and closing door frame 102 is closed, its position can be automatically detected, and the operator can be reminded to perform timely maintenance to avoid the opening and closing door frame 102 from being offset, which in turn causes the wafer box 11 to be offset, thereby ensuring the effect of wafer loading and feeding.

[0143] See also Figure 4 , Fig. 9 , Fig.11 and Fig.12 , the third moving mechanism includes:

[0144] The second reset mechanism is disposed below the carrier plate 1201 , and the T-shaped plate 602 is connected to the second reset mechanism for resetting the T-shaped plate 602 .

[0145] A plurality of first connecting plates 603 are fixed to the bottom of the T-shaped plate 602 , and the side walls of the first connecting plates 603 are fixedly connected with the second pushing block 604 and the third pushing block 605 .

[0146] The plurality of second connecting plates 601 are inserted between the second pushing block 604 and the third pushing block 605 , and fixed to the side wall of the third moving block 504 .

[0147] The pushing rod 703 is fixed on the top of the T-shaped plate 602 and is arranged to pass through the top of the supporting plate 1201. When the bottom of the wafer box 11 abuts against the top of the pushing rod 703, it can push the T-shaped plate 602 to move downward. Moreover, when the T-shaped plate 602 moves downward, the second pushing block 604 and the third pushing block 605 are driven downward through the first connecting plate 603. When the second pushing block 604 abuts against the top of the second connecting plate 601, it can drive the third moving block 504 and the limiting rod 505 to move downward.

[0148] See also Figure 4 , Figure 5 , Fig. 9 and Fig.11 , each first reset mechanism comprises:

[0149] The fixing plate 1001 is fixed to the bottom of the carrying plate 1201 .

[0150] Two third T-shaped guide rods 1002 are fixed to the side wall of the first movable plate 1203 and penetrate through the side wall of the fixed plate 1001 .

[0151] Two fourth elastic members 1003, which may be springs, are sleeved on the side walls of the two third T-shaped guide rods 1002, and both ends of the fourth elastic member 1003 are respectively fixed to the fixed plate 1001 and the side walls of the first movable plate 1203, to guide and reset the movement of the first movable plate 1203.

[0152] See also Figure 4 , the second reset mechanism comprises:

[0153] Two fourth T-shaped guide rods 701 are fixed to the bottom of the carrying plate 1201 and penetrate the T-shaped plate 602 .

[0154] Two fifth elastic members 702, which may be springs, are sleeved on the side walls of the two fourth T-shaped guide rods 701, and the two ends of the fifth elastic member 702 are respectively fixed to the bottom of the T-shaped plate 602 and the bottom of the fourth T-shaped guide rod 701, to guide and reset the movement of the T-shaped plate 602.

[0155] Working principle: During use, when the wafer box 11 needs to be installed, the wafer box 11 is slid downward along the side wall of the inclined plate 1204, and at the same time, multiple first movable plates 1203 are pushed to move in the direction close to the fixed plate 1001, and the fourth elastic member 1003 is compressed. When the wafer box 11 slides to the side wall of the first movable plate 1203 and contacts the top of the carrier plate 1201, under the action of the fourth elastic member 1003, the two opposite first movable plates 1203 can be pressed against the two sides of the wafer box 11, and the other first movable plate 1203 can push the wafer box 11 against the side wall of the stopper 1205, thereby facilitating the clamping and fixing of the wafer box 11, realizing the rapid installation of the wafer box 11, and making it more convenient and quicker to use. When the first movable plate 1203 moves, the first V-shaped block 206 can be pushed to slide on the guide rail 205 through the first connecting rod 207 and the first pushing block 208, and when the bottom of the wafer box 11 is against the top of the pushing rod 703, the T-shaped plate 602 can be pushed to slide downward along the side wall of the fourth T-shaped guide rod 701. At the same time, the fifth elastic member 702 is compressed, and when the T-shaped plate 602 moves downward, the second pushing block 604 and the third pushing block 605 are driven downward through the first connecting plate 603. When the second pushing block 604 is against the top of the second connecting plate 601, the third movable block 504 and the limiting rod 505 can be driven to move downward, and the limiting rod 505 is inserted into the through hole 501 for limiting.

[0156] When the door frame 102 is rotated to open and close, the friction disk 301 is driven to rotate synchronously by the rotating block 1303 and the rotating shaft 1302. Under the action of the first elastic member 404, the friction block 302 is abutted against the side wall of the friction disk 301 to provide resistance, thereby limiting the rotation speed of the rotating shaft 1302, and then limiting the rotation speed of the door frame 102, which is more stable and reliable.

[0157] At the same time, when the opening and closing door frame 102 is rotated to open and close, when the rotation speed is faster, the wafer box 11 will be against the side wall of the first movable plate 1203, and can push the first movable plate 1203 to continue to move in the direction close to the fixed plate 1001. At the same time, the fourth elastic member 1003 is continued to be compressed, and the first connecting rod 207 drives the first pushing block 208 to continue to move, so that the first pushing block 208 is against the side wall of the first V-shaped block 206, thereby pushing the first V-shaped block 206 to move downward, and driving the arc plate 209 to move downward through the first moving block 204 and the rectangular rod 203. At this time, the hydraulic oil in the arc cover 202 can be squeezed, and the counterweight plate 211 can be pushed to move upward along the fixed cylinder 210, which can have a good buffering effect, avoid causing severe impact and shaking of the wafers inside the wafer box 11, and ensure the loading effect of the wafers.

[0158] Furthermore, when the counterweight plate 211 moves upward, the U-shaped frame 1401 can drive the mounting plate 1402 and the conical plate 1403 to move upward, so that the lower end of the rotating plate 1406 can slide downward along the side wall of the conical plate 1403 and rotate clockwise along the rotating pin 1405. At this time, the pushing pin 1409 slides in the sliding groove 1407, so that the second moving block 403 can be driven to move through the connecting frame 1408, so that the first elastic member 404 is continuously compressed, thereby causing the friction block 302 and the friction plate 301 to be squeezed. The greater pressure causes the rotating shaft 1302 to encounter greater resistance, resulting in a better speed limiting effect, and can make the opening and closing door frame 102 more stable and reliable when rotating and opening, avoiding severe impact and shaking of the wafers in the wafer box 11, and ensuring the loading effect of the wafers. After the impact is completed, the arc plate 209 can move upward and reset under the action of the counterweight plate 211. At the same time, the first movable plate 1203 can move away from the fixed plate 1001 under the action of the fourth elastic member 1003 and resist the side wall of the wafer box 11 again to achieve clamping and fixation.

[0159] When the opening and closing door frame 102 is rotated to close, when the bottom of the opening and closing door frame 102 is against the side wall of the tapered rod 1504, the movable rod 802 can be pushed to move downward. At the same time, the second elastic member 801 is compressed, and the top of the tapered rod 1504 can slide along the bottom of the opening and closing door frame 102 to the bottom of the detection block 1501. After the opening and closing door frame 102 is closed, the tapered rod 1504 is aligned with the tapered hole 1502. At this time, under the action of the second elastic member 801, the tapered rod 1504 is inserted into the tapered hole 1502. At this time, the second movable plate 905 is in the middle position of the second V-shaped block 901, which can support the opening and closing door frame 102, reduce its deformation and tilt under the action of its own weight, and make it more stable and reliable.

[0160] If the opening and closing door frame 102 is offset or not closed in place, the conical rod 1504 will be offset from the conical hole 1502, causing the conical rod 1504 to be unable to be fully inserted into the conical hole 1502. At this time, the movable rod 802 and the second V-block 901 will move downward relative to the second movable plate 905, so that the second movable plate 905 slides on the side wall of the second V-block 901, thereby pushing the second movable plate 905 to move toward the mounting block 903. The third elastic member 906 is compressed and the distance change of the second movable plate 905 is detected by the distance sensor 907, so that after the opening and closing door frame 102 is closed, its position can be automatically detected, and the operator can be reminded to perform timely maintenance to avoid the opening and closing door frame 102 from being offset, which in turn causes the wafer box 11 to be offset, thereby ensuring the effect of wafer loading and feeding.

[0161] When the wafer box 11 is removed from the top of the carrier plate 1201, the T-shaped plate 602 can move upward and reset under the action of the fifth elastic member 702. At the same time, the second push block 604 and the third push block 605 are driven upward through the first connecting plate 603, and the third push block 605 is abutted against the top of the second connecting plate 601, thereby pushing the third moving block 504 and the limiting rod 505 to move upward. At this time, the limiting rod 505 can be pushed out from the through hole 501, and the first V-shaped block 206 is no longer limited, so that multiple first moving plates 1203 can be moved and reset under the action of the fourth elastic member 1003.

Claims

1. A rotating opening and closing structure for installing a wafer loading system, comprising an equipment frame (101) and an opening and closing door frame (102), wherein a feeding port (103) is provided on the opening and closing door frame (102), characterized in that: Also includes: Two sets of rotating mechanisms are arranged on the side walls of the equipment frame (101) and are used to rotate the opening and closing door frame (102); An installation mechanism, arranged on a side wall of the opening and closing door frame (102) and close to the material supply port (103), and used for installing the wafer box (11); A detection mechanism, arranged on a side wall of the equipment frame (101) and located below the opening and closing door frame (102), and used for detecting the closed state of the opening and closing door frame (102); The mounting mechanism comprises: A carrying plate (1201) is fixed to the side wall of the opening and closing door frame (102) and is located outside the feeding port (103); A plurality of strip-shaped openings (1202) are provided on the top of the carrying plate (1201); Two stoppers (1205) are fixed on the top of the carrying plate (1201); A plurality of first reset mechanisms are arranged at the bottom of the carrier plate (1201), and each first reset mechanism is connected to a first movable plate (1203) for guiding and resetting the movement of the first movable plate (1203), the first movable plate (1203) being inserted into the strip opening (1202), and the top of the first movable plate (1203) is fixedly connected to an inclined plate (1204); The buffer mechanism is arranged below the first movable plate (1203) and fixed to the side wall of the door frame (102), and is used to buffer the movement of the first movable plate (1203).

2. The rotating opening and closing structure for installing a wafer loading system according to claim 1, characterized in that: The buffer mechanism comprises: A hollow arc-shaped cover (202) is fixed to the bottom of the bearing plate (1201) via a plurality of fixing rods (201), and the arc-shaped cover (202) is filled with hydraulic oil; An arc-shaped plate (209) is slidably connected inside the arc-shaped cover (202); A plurality of first moving blocks (204) are arranged above the arc-shaped cover (202) and fixed to the top of the arc-shaped plate (209) via rectangular rods (203); A first V-shaped block (206) is slidably connected to the top of each first moving block (204) via a guide rail (205); A first pushing block (208) is inserted into the first V-shaped block (206) and fixed to the side wall of the first moving plate (1203) via a first connecting rod (207); A fixed cylinder (210) is fixed to the side wall of the opening and closing door frame (102) and is connected to the arc-shaped cover (202) through a connecting pipe (212); a counterweight plate (211) is inserted into the fixed cylinder (210); The limiting mechanism is arranged above each of the first moving blocks (204) and is used to limit the first V-shaped block (206).

3. The rotating opening and closing structure for installing a wafer loading system according to claim 1, characterized in that: Each set of the rotating mechanism comprises: Two fixed blocks (1301) are fixed to the side walls of the equipment frame (101), and the opposite side walls of the two fixed blocks (1301) are rotatably connected with a rotating shaft (1302); A rotating block (1303) is fixedly sleeved on the side wall of the rotating shaft (1302) and fixed to the side wall of the opening and closing door frame (102); A speed limiting mechanism, arranged on a side wall of the rotating shaft (1302), and used for limiting the speed of rotation of the rotating shaft (1302); The speed limiting mechanism comprises: A friction disc (301) is fixed to the lower end of the rotating shaft (1302); The first moving mechanism is arranged on the side wall of the equipment frame (101), and a friction block (302) is arranged on the first moving mechanism so that the friction block (302) abuts against the side wall of the friction disk (301).

4. The rotating opening and closing structure for installing a wafer loading system according to claim 1, characterized in that: The detection mechanism includes: A plurality of detection blocks (1501) are fixed to the side wall of the opening and closing door frame (102), and a conical hole (1502) is formed at the bottom of each detection block (1501); A plurality of L-shaped plates (1503), arranged below the detection block (1501) and fixed to the bottom of the device frame (101); A second moving mechanism is disposed above the L-shaped plate (1503), and a tapered rod (1504) is connected to the second moving mechanism so that the tapered rod (1504) can be inserted into the tapered hole (1502); A detection component is arranged on the side wall of the L-shaped plate (1503) and is used to detect the insertion status of the tapered rod (1504).

5. The rotating opening and closing structure for installing a wafer loading system according to claim 3, characterized in that: The first moving mechanism comprises: Two guide rods (402) are inserted into the side wall of the friction block (302), and one end of the guide rod (402) away from the friction block (302) is fixed to the side wall of the equipment frame (101) through an L-shaped frame (401); A second moving block (403) is sleeved on the side walls of the two guide rods (402) and fixed to the side wall of the friction block (302) through a first elastic member (404); The pushing mechanism is arranged on the side wall of the equipment frame (101) and is used to push the second moving block (403) to move.

6. The rotating opening and closing structure for installing a wafer loading system according to claim 5, characterized in that: The driving mechanism comprises: A support frame (1404), disposed below the L-shaped frame (401) and fixed to a side wall of the equipment frame (101); An L-shaped rotating plate (1406) is rotated on the side wall of the support frame (1404) through a rotating pin (1405), and a sliding groove (1407) is provided on the side wall of the rotating plate (1406); A push pin (1409) is inserted into the slide groove (1407) and fixed to the bottom of the second moving block (403) through a connecting frame (1408); Two mounting plates (1402) are fixed to the top of the counterweight plate (211) via a U-shaped frame (1401), and a conical plate (1403) is fixedly connected to the top of each mounting plate (1402), so that the lower end of the rotating plate (1406) can slide on the side wall of the conical plate (1403).

7. The rotating opening and closing structure for installing a wafer loading system according to claim 2, characterized in that: The limiting mechanism comprises: A plurality of through holes (501) are provided on the top of each of the first moving blocks (204) and are arranged at equal intervals; A third moving mechanism is arranged below the carrying plate (1201), and a plurality of third moving blocks (504) are connected to the third moving mechanism, and is used to move the third moving blocks (504); A limiting rod (505) is fixed to the bottom of the third moving block (504) so ​​that the limiting rod (505) can be inserted into the through hole (501); Two first T-shaped guide rods (503) are fixed on the top of the third moving block (504); The connecting block (502) is sleeved on the side walls of the two first T-shaped guide rods (503) and fixed to the side wall of the first V-shaped block (206).

8. The rotating opening and closing structure for installing a wafer loading system according to claim 4, characterized in that: The second moving mechanism comprises: A movable rod (802) fixed to the lower end of the tapered rod (1504) and passing through the bottom of the L-shaped plate (1503); The fixing ring (803) is fixedly sleeved on the side wall of the moving rod (802) and fixed to the top of the L-shaped plate (1503) through the second elastic member (801).

9. The rotating opening and closing structure for installing a wafer loading system according to claim 8, characterized in that: The detection component comprises: A second V-shaped block (901) is fixed to the lower end of the moving rod (802); A mounting block (903) is fixed to the side wall of the L-shaped plate (1503) through an L-shaped block (902), and a distance sensor (907) is fixedly inserted into the side wall of the mounting block (903); Two second T-shaped guide rods (904) are inserted into the side wall of the mounting block (903), and one end of the two second T-shaped guide rods (904) close to the second V-shaped block (901) is fixedly connected to a second movable plate (905), so that the second movable plate (905) can slide on the side wall of the second V-shaped block (901); The two third elastic members (906) are sleeved on the side walls of the two second T-shaped guide rods (904), and the third elastic members (906) are located between the mounting block (903) and the second movable plate (905).

10. The rotating opening and closing structure for installing a wafer loading system according to claim 7, characterized in that: The third moving mechanism comprises: A second reset mechanism is arranged below the carrying plate (1201), and a T-shaped plate (602) is connected to the second reset mechanism for resetting the T-shaped plate (602); A plurality of first connecting plates (603) are fixed to the bottom of the T-shaped plate (602), and the side walls of the first connecting plates (603) are fixedly connected with a second pushing block (604) and a third pushing block (605); A plurality of second connecting plates (601) are inserted between the second pushing block (604) and the third pushing block (605), and are fixed to the side wall of the third moving block (504); The push rod (703) is fixed to the top of the T-shaped plate (602) and is arranged to penetrate the top of the supporting plate (1201).

11. The rotating opening and closing structure for installing a wafer loading system according to claim 1, characterized in that: Each of the first reset mechanisms comprises: A fixing plate (1001), fixed to the bottom of the carrying plate (1201); Two third T-shaped guide rods (1002), fixed to the side wall of the first movable plate (1203) and penetrating the side wall of the fixed plate (1001); The two fourth elastic members (1003) are sleeved on the side walls of the two third T-shaped guide rods (1002), and the fourth elastic members (1003) are located between the fixed plate (1001) and the first movable plate (1203).

12. The rotating opening and closing structure for installing a wafer loading system according to claim 10, characterized in that: The second reset mechanism comprises: Two fourth T-shaped guide rods (701), fixed to the bottom of the bearing plate (1201) and penetrating the T-shaped plate (602); The two fifth elastic members (702) are sleeved on the side walls of the two fourth T-shaped guide rods (701), and the fifth elastic members (702) are located between the T-shaped plate (602) and the bottom of the fourth T-shaped guide rod (701).

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