Rotary adjusting mechanism for accurately positioning mask plate

Abstract

The invention relates to the technical field of mask plate positioning, in particular to a rotary adjusting mechanism for accurately positioning a mask plate, which comprises a table top, a mounting groove formed in the upper side of the table top, a Teflon coating coated on the surface of the inner wall of the mounting groove, an outer-layer groove plate arranged in the mounting groove, and a rotary center piece arranged between the table top and the outer-layer groove plate and located at a corner, the mounting frame is arranged at the corner of the table top, the mounting frame and the rotating center piece are arranged in a diagonal structure, the guide groove is formed in one side of the mounting frame, the electric micro-motion platform is arranged on one side of the mounting frame, the adjusting stress center piece is arranged on one side of the electric micro-motion platform, and the adjusting stress center piece and the rotating center piece are arranged in a center collinear structure. The center of the rotating center piece and the center of the stress adjusting center piece are collinear, so that when the position of the mask plate is adjusted, stress is more uniform and direct, the rotating angle of the outer-layer groove plate can be accurately controlled, and high-precision positioning of the mask plate is achieved.

Description

Technical Field

[0001] The invention relates to the technical field of mask plate positioning, and in particular to a rotation adjustment mechanism for accurate positioning of a mask plate. Background Art

[0002] Masks play a vital role in many high-tech fields such as semiconductor manufacturing, flat panel displays, and optical devices. For example, in the semiconductor manufacturing process, masks are used to define the pattern of integrated circuits, and their accuracy directly affects the performance and quality of the chip. In the field of flat panel displays, masks determine the pixel layout and color performance of the display. Therefore, accurate positioning of the mask is a key link in achieving high-quality product manufacturing.

[0003] In the existing technology, the positioning accuracy is limited: the traditional mask positioning mechanism is often difficult to achieve high-precision positioning adjustment. Due to the limitations of the structural design, problems such as uneven force and angle deviation are prone to occur during rotation adjustment, resulting in low positioning accuracy and unable to meet the requirements of modern high-tech industries for high-precision manufacturing.

[0004] Complex operation: Some existing positioning mechanisms are cumbersome to operate and require a lot of manual adjustment and calibration work. This not only increases the workload of operators, but also easily introduces human errors, reducing production efficiency and product quality.

[0005] Poor adaptability: Masks of different specifications and sizes require different positioning mechanisms, and the existing technology lacks a positioning device that is highly versatile and can adapt to a variety of mask sizes. This increases the equipment investment cost of the enterprise and is not conducive to the flexibility and diversity of production.

[0006] Large friction loss: During the positioning and adjustment of the mask plate, the friction between the components can easily lead to wear and energy loss. This will not only reduce the service life of the mechanism, but may also affect the accuracy and stability of positioning.

[0007] To this end, we proposed a rotation adjustment mechanism for precise positioning of the mask. Summary of the invention

[0008] The purpose of the present invention is to solve the shortcomings in the prior art and to propose a rotation adjustment mechanism for accurate positioning of a mask plate.

[0009] In order to achieve the above object, the present invention adopts the following technical solutions:

[0010] A rotation adjustment mechanism for precise positioning of a mask plate comprises a table, a mounting groove, an outer groove plate, a rotating center piece, a mounting frame, a guide groove, an electric micro-motion platform and an adjustment force center piece, wherein the mounting groove is arranged on the upper side of the table, the inner wall surface of the mounting groove is coated with a Teflon coating, the friction coefficient of the Teflon coating is 0.05, the outer groove plate is arranged in the mounting groove, the rotating center piece is arranged between the table and the outer groove plate and is located at the corner, the mounting frame is arranged at the corner of the table and is arranged diagonally with the rotating center piece, the guide groove is arranged on one side of the mounting frame, the electric micro-motion platform is arranged on one side of the mounting frame, the adjustment force center piece is arranged on one side of the electric micro-motion platform, and the adjustment force center piece and the rotating center piece are arranged in a center colinear structure.

[0011] Preferably, an inner slot plate is arranged on one side of the outer slot plate, a plurality of stepped slots are arranged on one side of the inner slot plate, and a mask plate is arranged in the stepped slots.

[0012] Preferably, support members are provided at the lower corners of the table top.

[0013] Preferably, the rotating center piece includes a screw sleeve and a stud, the screw sleeve is arranged at a corner inside the installation groove, the stud is arranged at a corner of the outer groove plate, and the stud and the screw sleeve are rotatably connected.

[0014] Preferably, the adjusting force-bearing center piece includes a screw, two bearings and a spacer sleeve, the screw is arranged in a guide groove, the two bearings are sleeved on the outside of the screw, and the spacer sleeve is arranged between the two bearings.

[0015] Preferably, an adjustment gap is provided between the outer trough plate and the table top.

[0016] In summary, the present invention, through the collinear structure of the rotating center piece and the adjusting force center piece, makes the force more uniform and direct when adjusting the position of the mask plate, and can accurately control the rotation angle of the outer slot plate, thereby achieving high-precision positioning of the mask plate. For example, in fields with extremely high precision requirements such as semiconductor manufacturing, this mechanism can control the positioning error of the mask plate within a very small range, thereby improving the quality and performance of the product.

[0017] The electric micro-motion platform can provide small and precise displacement, further improving the positioning accuracy. It can be finely adjusted according to actual needs to meet the requirements of mask positioning accuracy in different application scenarios.

[0018] In the present invention, the Teflon coating applied on the inner wall surface of the installation groove has an extremely low friction coefficient, which can greatly reduce the friction between the outer groove plate and the installation groove. When performing rotation adjustment, the friction loss is reduced and the service life of the mechanism is extended.

[0019] The design of the two bearings and the spacer sleeve in the adjustment force center piece makes the movement of the screw in the guide groove smoother, reduces the friction resistance, and improves the accuracy and efficiency of the adjustment.

[0020] In the present invention, the inner slot plate and the stepped slots arranged on one side of the outer slot plate can adapt to mask plates of different sizes and shapes. Whether it is a small mask plate or a large mask plate, it can be stably positioned and adjusted in the mechanism, thereby improving the versatility and adaptability of the mechanism.

[0021] The support at the lower corner of the table ensures the stability of the entire mechanism, allowing it to operate normally in different working environments. Whether in the laboratory or in the industrial production site, it can provide reliable support for the positioning of the mask.

[0022] The present invention can realize automatic positioning adjustment through the control of the electric micro-motion platform, reducing the complexity and error of manual operation. The operator only needs to input corresponding parameters in the control system to realize accurate adjustment of the mask plate, greatly improving work efficiency.

[0023] The rotating center piece adopts the rotating connection method of stud and screw sleeve, which makes the rotation operation of the outer slot plate smoother and more convenient. When the mask plate angle needs to be adjusted, the operation can be performed quickly and accurately, saving adjustment time. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the exploded structure of the present invention;

[0025] Figure 2 It is a structural schematic diagram of the front axial side of the present invention;

[0026] Figure 3 A schematic diagram of the structure of adjusting the force-bearing center member of the present invention;

[0027] Figure 4 It is a schematic structural diagram of the rotating center piece of the present invention.

[0028] In the figure: 1. table; 2. mounting groove; 3. outer slot plate; 4. rotating center piece; 41. screw sleeve; 42. stud; 5. mounting frame; 6. guide groove; 7. electric micro-motion platform; 8. adjusting force center piece; 81. screw; 82. bearing; 83. spacer; 9. inner slot plate; 10. step groove; 11. mask plate; 12. support piece. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0030] Embodiment 1: Assembly and use of a rotation adjustment mechanism for accurate positioning of a mask plate

[0031] Reference Figure 1-Figure 4 Assembly process: First, the installation groove 2 is processed on the upper side of the table 1, and the Teflon coating is evenly applied on the inner wall surface of the installation groove 2 to reduce friction. The screw sleeve 41 of the rotating center piece 4 is installed at the corner of the installation groove 2, and the outer layer slot plate 3 is placed in the installation groove 2, ensuring that the stud 42 at the corner of the outer layer slot plate 3 corresponds to the screw sleeve 41 and realizes the rotation connection. At this time, an adjustment gap is formed between the outer layer slot plate 3 and the table 1, which is convenient for subsequent adjustment operations. The mounting frame 5 is installed at the corner of the table 1 so that it is arranged in a diagonal structure with the rotating center piece 4. A guide groove 6 is machined on one side of the mounting frame 5, and the electric micro-motion platform 7 is installed on one side of the mounting frame 5. The two bearings 82 of the adjustment force center piece 8 are sleeved on the outside of the screw 81, and the spacer 83 is placed between the two bearings 82. Finally, the screw 81 is installed in the guide groove 6, and the adjustment force center piece 8 and the rotating center piece 4 are arranged in a center-colinear structure. The support member 12 is installed at the lower corner of the table top 1 to ensure the stability of the entire mechanism.

[0032] Instructions for use: Install the inner slot plate 9 on one side of the outer slot plate 3, and machine a plurality of stepped grooves 10 on one side of the inner slot plate 9, place the mask 11 in the stepped grooves 10, and when the mask 11 needs to be precisely positioned and adjusted, start the electric micro-motion platform 7, and the electric micro-motion platform 7 pushes the screw 81 of the adjustment force center piece 8 to move in the guide groove 6. Since the adjustment force center piece 8 and the rotation center piece 4 are arranged in a central colinear structure, the movement of the screw 81 will transmit force to the outer slot plate 3 through the adjustment gap between the outer slot plate 3 and the table 1. Under the action of the force, the outer slot plate 3 is rotated and adjusted with the stud 42 and the screw sleeve 41 of the rotation center piece 4 as the rotation center. By precisely controlling the moving distance of the electric micro-motion platform 7, the precise positioning adjustment of the mask 11 can be achieved.

[0033] Embodiment 2: Positioning and adjustment of masks of different sizes

[0034] Preparation:

[0035] According to the different sizes of the mask plate 11, select the inner slot plate 9 and the outer slot plate 3 of appropriate sizes to ensure that the stepped groove 10 can stably accommodate the mask plate 11, adjust the size of the mounting groove 2 to adapt to the size change of the outer slot plate 3, and at the same time, ensure that the positions of the rotating center piece 4, the mounting frame 5, the guide groove 6, the electric micro-motion platform 7 and the adjustment force center piece 8 can match the new outer slot plate 3.

[0036] Adjustment process:

[0037] According to the assembly method in the first embodiment, assemble the various components.

[0038] Masks 11 of different sizes are placed in the stepped groove 10 .

[0039] The electric micro-motion platform 7 is started, and the outer slot plate 3 is rotated and adjusted by adjusting the force center piece 8 and the rotation center piece 4, so as to achieve precise positioning adjustment of the mask plates 11 of different sizes. During the adjustment process, the Teflon coating on the inner wall of the mounting groove 2 can reduce the friction between the outer slot plate 3 and the mounting groove 2, making the adjustment smoother.

[0040] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A rotation adjustment mechanism for accurate positioning of a mask plate, characterized in that: Including table top (1), A mounting groove (2), the mounting groove (2) being arranged on the upper side of the table top (1), and the inner wall surface of the mounting groove (2) being coated with a Teflon coating; An outer slot plate (3), wherein the outer slot plate (3) is arranged in the mounting slot (2); A rotating center piece (4), the rotating center piece (4) being arranged between the table top (1) and the outer groove plate (3) and located at a corner; A mounting frame (5), wherein the mounting frame (5) is arranged at a corner of the table top (1) and is arranged in a diagonal structure with the rotating center piece (4); A guide groove (6), wherein the guide groove (6) is arranged on one side of the mounting frame (5); An electric micro-motion platform (7), wherein the electric micro-motion platform (7) is arranged on one side of the mounting frame (5); The force-bearing center piece (8) is adjusted, and the force-bearing center piece (8) is arranged on one side of the electric micro-motion platform (7). The force-bearing center piece (8) and the rotating center piece (4) are arranged in a center-colinear structure.

2. A rotation adjustment mechanism for accurate positioning of a mask plate according to claim 1, characterized in that: An inner slot plate (9) is arranged on one side of the outer slot plate (3), a plurality of stepped slots (10) are arranged on one side of the inner slot plate (9), and a mask plate (11) is arranged in the stepped slots (10).

3. The rotation adjustment mechanism for accurate positioning of a mask plate according to claim 1, characterized in that: Support members (12) are provided at the lower corners of the table top (1).

4. The rotation adjustment mechanism for accurate positioning of a mask plate according to claim 1, characterized in that: The rotating center piece (4) comprises a screw sleeve (41) and a stud (42), wherein the screw sleeve (41) is arranged at an inner corner of the mounting groove (2), and the stud (42) is arranged at a corner of the outer groove plate (3), and the stud (42) and the screw sleeve (41) are rotatably connected.

5. The rotation adjustment mechanism for accurate positioning of a mask plate according to claim 1, characterized in that: The adjusting force-bearing center piece (8) comprises a screw (81), two bearings (82) and a spacer sleeve (83), wherein the screw (81) is arranged in the guide groove (6), the two bearings (82) are sleeved on the outer side of the screw (81), and the spacer sleeve (83) is arranged between the two bearings (82).

6. The rotation adjustment mechanism for accurate positioning of a mask plate according to claim 1, characterized in that: An adjustment gap is provided between the outer layer slot plate (3) and the table top (1).

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