Transportation device

Abstract

The invention relates to a transportation device. The transportation device comprises a vehicle; a housing connected to the vehicle and forming an internal space having an open bottom; a hand unit which is provided so as to be movable in the vertical direction in the housing, and which grips and loosens a transport object; and a sliding unit separated from the hand unit in the housing and moving horizontally in a direction in which the hand unit is disposed, in which the sliding unit includes: a bottom plate disposed in the internal space of the housing; the sliding plate slides from the bottom plate in the direction in which the hand unit is arranged and accommodates the transportation object; and a driving module provided on the base plate and sliding the sliding plate such that the sliding plate protrudes from the base plate.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims the priority of Korean Patent Application No. 10-2023-0144820 filed on October 26, 2023 in the Korean Intellectual Property Office, and all rights and interests therein under 35 U.S.C. 119, the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present disclosure relates to a transportation device. Background Art

[0004] The semiconductor device manufacturing process can be continuously performed in semiconductor manufacturing equipment and can be divided into a front-end process and a back-end process. The semiconductor manufacturing equipment can be installed in a space defined as a FAB to manufacture semiconductor devices.

[0005] The front-end process refers to forming a circuit pattern on a substrate (e.g., a wafer) to complete a chip. The front-end process may include: a deposition process for forming a thin film on a substrate; a photolithography process for transferring a photoresist onto a thin film using a photomask; an etching process for selectively removing unnecessary portions using chemicals or reactive gases to form a desired circuit pattern on a substrate; an ashing process for removing the remaining photoresist after etching; an ion implantation process for implanting ions into portions connected to the circuit pattern to impart characteristics to electronic devices; and a cleaning process for removing contaminants from a substrate.

[0006] The back-end process refers to evaluating the performance of the product completed through the front-end process. The back-end process may include: a substrate inspection process for inspecting the chips on the substrate to sort good products from bad products; a packaging process for cutting and separating the chips to form the shape of the product through dicing, chip bonding, wire bonding, molding, marking, etc.; and a final inspection process for finally inspecting the characteristics and reliability of the product through electrical characteristics inspection, burn-in inspection, etc. Summary of the invention

[0007] Aspects of the present disclosure provide a transport device capable of simultaneously transporting a plurality of storage magazines using an overhead hoist transport (OHT).

[0008] However, the aspects of the present disclosure are not limited to the statements herein. The above and other aspects of the present disclosure will become more apparent to those skilled in the art to which the present disclosure belongs by referring to the detailed description of the present disclosure given below.

[0009] According to one aspect of the present disclosure, a transport apparatus includes: a vehicle; a shell connected to the vehicle and forming an internal space with an open bottom; a hand unit configured to move in an up-down direction in the shell and to clamp and release a transport object; and a sliding unit separated from the hand unit in the shell and moving horizontally in a direction in which the hand unit is set, wherein the sliding unit includes: a bottom plate configured in the internal space of the shell; a sliding plate that slides from the bottom plate in a direction in which the hand unit is set and seats the transport object; and a driving module that is configured to slide the sliding plate so that the sliding plate protrudes from the bottom plate.

[0010] According to another aspect of the present disclosure, the transport device includes: a vehicle; a shell connected to the vehicle and forming an internal space with an open bottom; a hand unit, which is configured to be able to move in the shell in an up-down direction and to clamp and release a transport object, the transport object being configured to be a storage box for accommodating chips; a lifting unit, the lifting unit including a belt with an adjustable length for lifting and lowering the hand unit; and a pair of sliding units, which are configured to face each other in the internal space of the shell and move horizontally in the direction in which the hand units are set, the hand units being between the sliding units, wherein the sliding units include: a bottom plate, which is configured in the internal space of the shell, is formed with a first cutting hole and is provided with a second A transport object anti-separation unit, one side of the transport object is inserted into the first cutting hole, the first transport object anti-separation unit forms a belt-shaped member surrounding the transport object; a sliding plate, the sliding plate includes a first plate and a second plate, the first plate covers the lower part of the first cutting hole to accommodate the transport object, the second plate is arranged between the bottom plate and the first plate, is formed with a second cutting hole corresponding to the first cutting hole and slides from the bottom plate along the direction set by the hand unit; a driving module, the driving module includes a moving block, a ball screw and a first motor, the moving block is fixed to the sliding plate, the ball screw passes through the moving block, the first motor is arranged on the bottom plate to rotate the ball screw, and the driving module causes the moving block to rotate due to the rotation of the ball screw driven by the first motor The sliding plate slides and protrudes from the bottom plate when moving; a reflector, which is arranged at a position where the transport object is accommodated on the upper surface of the sliding plate; a first sensor, which is arranged at the first transport object anti-separation unit to detect the reflector; a contact sensor, which is arranged on the sliding plate to detect the transport object; a first anti-separation block, which is arranged on the upper surface of the sliding plate, contacts one side of the transport object and is formed with an inclined surface, which guides the following path - a path for accommodating the transport object from top to bottom; a second anti-separation block, which is arranged on the upper surface of the sliding plate, opposite to the first anti-separation block and contacts the other side of the transport object; and a pair of anti-drop components, the anti-drop components The falling parts are arranged on both sides of the transport object on the sliding plate, and each of the anti-falling parts includes: an upper roller having a length in the longitudinal direction of the transport object; a lower roller, which is arranged below the upper roller; and a rotating body, which allows the upper roller and the lower roller to rotate, is arranged to pivot on the sliding plate, and has a "V" shape that rotates when the transport object contacts the lower roller to allow the upper roller to contact the transport object, and the hand unit also includes: a clamp module, which clamps the transport object, includes a clamp and a chip anti-detachment strip, the clamp slides to be installed on the top of the storage box or separated from the top of the storage box, and the chip anti-detachment strip extends across the front and rear of the storage box to prevent the chip contained in the storage box from detaching;and a rotating module, the rotating module comprising a fixed body, a rotating disk and a second motor, the belt being fixed to the fixed body, the rotating disk rotating relative to the fixed body, the rotating angle of the rotating disk ranging from 0° to 270°, the second motor being arranged on the fixed body to rotate the rotating disk. ;

[0011] It should be noted that the effects of the present disclosure are not limited to the contents described above, and other effects of the present disclosure will become apparent from the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The above and other aspects and features of the present disclosure will become more apparent through the detailed description of exemplary embodiments of the present disclosure with reference to the accompanying drawings, in which:

[0013] Figure 1 A transport device according to some embodiments of the present disclosure is shown.

[0014] Figure 2 shows a hand unit and a slide unit of a transport device according to some embodiments of the present disclosure;

[0015] Figure 3 is a perspective view of a hand unit and a slide unit of a transport device according to a first embodiment of the present disclosure, and

[0016] Figure 4 is a perspective view of a sliding unit of a transportation device according to a first embodiment of the present disclosure. DETAILED DESCRIPTION

[0017] Below, preferred embodiments of the present disclosure will be provided with reference to the accompanying drawings in detail. The advantages and features of the present disclosure, as well as the methods for achieving them, will become apparent with reference to the following detailed description of the embodiments in conjunction with the accompanying drawings. However, the present disclosure is not limited to the embodiments disclosed herein, and may be implemented in various forms. The embodiments provided are intended to fully disclose the present invention and convey the full scope of the present invention to those skilled in the art. The present invention is limited only by the scope of the claims. Throughout the specification, the same reference numerals represent the same elements.

[0018] The terms used in this specification are intended to describe embodiments and are not intended to limit the present invention. In this specification, unless otherwise specified, the singular includes the plural. The terms "comprises" and / or "comprising" used in this article do not exclude the presence or addition of one or more other elements, steps, operations and / or features.

[0019] Figure 1 A transport device according to some embodiments of the present disclosure is shown.

[0020] Reference Figure 1 , the transport device 100 can transport the transport object 50 to a target location within a semiconductor manufacturing plant. The transport object 50 can be a container such as a front opening unified pod (FOUP) that accommodates multiple base plates or a magazine that accommodates chips, but the present disclosure is not limited thereto. For example, the transport object 50 will be described as a magazine hereinafter.

[0021] For example, the target location may be a place of a back-end process for evaluating the performance of a product completed by a front-end process, but the present disclosure is not limited thereto. More than one target location may be set within the transport device. In a semiconductor manufacturing plant, a transport path may be set to pass through the target location.

[0022] The conveying path may be set by a traveling track 70 connected to a ceiling. A loading and unloading area for transporting the object 50 may be installed below the traveling track 70. The traveling track 70 may include a straight section and a curved section.

[0023] The transport device 100 may be configured as an overhead transporter (OHT). The transport device 100 may travel along the travel track 70 to transport the transport object 50 to a target location. For example, the transport device 100 may include a vehicle 110, a housing 130, a transfer module 150, and a sliding unit 170.

[0024] The vehicle 110 may be provided with traveling wheels 111 on both sides that are rotated by a motor 113 to travel along the traveling rail 70. The vehicle 110 may travel while the traveling wheels 111 rotate in contact with the traveling rail 70. A steering wheel (not shown) may be provided on an upper surface of the vehicle 110. The steering wheel may be configured to move in a front-rear direction 20 perpendicular to the traveling direction 10 of the vehicle 110. For example, the steering wheel may selectively contact a linear steering rail (not shown) that guides linear travel and a branch steering rail (not shown) that guides branch travel.

[0025] The housing 130 may be connected to the vehicle 110 below the travel track 70. The housing 130 may have an internal space 130S. The housing 130 may have a structure in which its bottom and one or both sides are open for vertical and horizontal movement (e.g., travel direction 10 and front-rear direction 20) of the transport object 50. Here, both sides may refer to the travel direction 10 and the front-rear direction 20 of the transport device 100.

[0026] The transfer module 150 may transfer the transport object 50 from the loading and unloading area to the internal space 130S or from the internal space 130S to the loading and unloading area through the open bottom of the housing 130 .

[0027] The conveying module 150 may be disposed in the housing 130. The conveying module 150 may load and unload the transport object 50. The conveying module 150 may include a horizontal moving unit 151, a lifting unit 153, and a hand unit 155.

[0028] The horizontal moving unit 151 may be disposed on an inner upper surface of the housing 130. The horizontal moving unit 151 may be horizontally moved through an open side of the housing 130. Although not shown, for example, the horizontal moving unit 151 may include a guide rail and a moving block, or may be equipped with a plurality of sliding plates.

[0029] The lifting unit 153 may be disposed below the horizontal moving unit 151 and may be horizontally moved by the horizontal moving unit 151. The lifting unit 153 may lift and lower the hand unit 155. The lifting unit 153 may include a driver (not shown) such as a motor and a belt 155B. The belt 155B may move the hand unit 155 in the up-down direction 30 by the driving force of the driver. For example, the driver may generate a driving force to wind or unwind the belt 155B (i.e., adjust the length of the belt 155B) to move the hand unit 155 in the up-down direction 30 and adjust the height of the hand unit 155.

[0030] The hand unit 155 can move in the up-down direction 30 in the housing 130 through the lifting unit 153, and can clamp or release the transport object 50. For example, the hand unit 155 can be fixed to the end of the belt 155B and connected to the lifting unit 153 through the belt 155B. Figure 2 and Figure 3 As explained, the hand unit 155 can rotate.

[0031] Hereinafter, the hand unit 155 and the slide unit 170 will be described with reference to the accompanying drawings.

[0032] Figure 2 shows a hand unit and a sliding unit of a transport device according to some embodiments of the present disclosure, Figure 3 is a perspective view of a hand unit and a slide unit of a transport device according to a first embodiment of the present disclosure, and Figure 4 is a perspective view of a sliding unit of a transportation device according to a first embodiment of the present disclosure.

[0033] First, refer to Figure 2 and 3 As shown, the hand unit 155 may include a clamp module 1551 and a rotation module 1552 .

[0034] The clamp module 1551 may clamp the transport object 50. The clamp module 1551 may include a clamper 1551G and a chip separation prevention bar 1551B.

[0035] The clamp 1551G can be set in an "L" shape and can slide to be installed on or separated from the top of the storage box as the transport object 50. Although not shown in the drawings, the clamp 1551G can be moved by a motor along the longitudinal direction (i.e., the front-rear direction 20) of the transport object 50 to clamp or release the transport object 50.

[0036] The chip anti-detachment bar 1551B may be adjacent to the clamper 1551G and may extend across the front and rear of the storage box as the transport object 50 to prevent the chips stored in the transport object 50 from detaching. For example, the chip anti-detachment bar 1551B may be provided as a bar or rod extending in the up-down direction 30.

[0037] In addition, the clamp module 1551 may be provided with a sensor (not shown) to detect whether the transport object 50 is correctly accommodated.

[0038] The rotating module 1552 may rotate the clamp module 1551 .

[0039] The rotating module 1552 may include a fixing body 1552A, a rotating disk 1552B, and a second motor 1552M.

[0040] The fixed body 1552A may fix the belt 155B, and may accommodate the second motor 1552M. For example, the second motor 1552M may be mounted on the upper surface of the fixed body 1552A, and the shaft of the second motor 1552M may pass through the fixed body 1552A and may be connected to the turntable 1552B. The second motor 1552M mounted on the fixed body 1552A may have its shaft connected to the turntable 1552B, and may thus rotate the turntable 1552B.

[0041] The turntable 1552B may be provided with a box-shaped body 1552B1 and may be rotated relative to the fixed body 1552A, with the rotation angle range being 0° to 270°. This prevents excessive rotation (e.g., 360° rotation) of the turntable 1552B, which may cause twisting or breaking of power supply wires to components requiring power (e.g., a motor for operating the clamp module 1551).

[0042] In other words, turntable 1552B can be provided with a wire wrapped around it to avoid the need for a separate space for the wire and prevent the wire from twisting, ensuring safe storage by rotating within a range of 0° to 270° rather than a complete 360° rotation.

[0043] In addition, even if the turntable 1552B does not complete the 360° rotation, it can return to the 0° position and reach the 360° position. Therefore, the turntable 1552B can rotate to correspond to all positions of the transport object 50, such as the 0 o'clock position (or 12 o'clock position), the 3 o'clock position, the 6 o'clock position, and the 9 o'clock position.

[0044] Reference Figures 2 to 4 , the sliding unit 170 can be horizontally moved in the housing 130 along the direction 10 in which the hand unit 155 is positioned. A pair of sliding units 170 can be provided in the internal space 130S of the housing 130, the sliding units facing each other, the hand unit 155 being located between the sliding units, and the pair of sliding units 170 can be provided separately from the hand unit 155. That is, the horizontal moving unit 151 can slide to allow the hand unit 155 to move horizontally, and the sliding unit 170 can slide to separate from or approach the hand unit 155, so that the transport object 50 can be accommodated.

[0045] The sliding unit 170 may have a slidable structure on which the transport object 50 gripped by the hand unit 155 may be accommodated.

[0046] For example, each of the sliding units 170 may include a base plate 171, a sliding plate 172, a driving module 173, a reflector 174A, a first sensor 174B, a contact sensor 175, an anti-drop component 176, a first anti-detachment block 177A, and a second anti-detachment block 177B.

[0047] The bottom plate 171 may be fixed in the inner space of the housing 130. The bottom plate 171 may have a first cut hole 171H formed on one side, into which the transport object 50 may be inserted. That is, the bottom plate 171 may have a structure of an open side formed by the first cut hole 171H to allow the transport object 50 to slide and enter, and when the sliding plate 172 accommodating the transport object 50 is returned, the structure of the open side surrounds the longitudinal direction (i.e., the front-rear direction 20) of the transport object 50.

[0048] The bottom plate 171 may include a first transport object anti-detachment unit 1711. The first transport object anti-detachment unit 1711 may form a belt-shaped member around the transport object 50 along the front-rear direction 20 perpendicular to the moving direction of the sliding plate 172 (i.e., the traveling direction 10) without interfering with the movement of the sliding plate 172. For example, a storage box as the transport object 50 may have an opening along the front-rear direction 20 perpendicular to the moving direction of the sliding plate 172, thereby exposing the chip. If the storage box shakes or loses balance, the chip may fall off, so in order to prevent this, the first transport object anti-detachment unit 1711 may be provided.

[0049] The slide plate 172 may slide from the bottom plate 171 in the traveling direction 10 where the hand unit 155 is disposed, and the transport object 50 may be accommodated on the slide plate 172. For example, the slide plate 172 may include a first plate 172A and a second plate 172B.

[0050] The first plate 172A may cover the lower portion of the first cutting hole 171H, and may accommodate the transport object 50. The first plate 172A may be equipped with a reflector 174A, a contact sensor 175, and a drop prevention member 176.

[0051] The second plate 172B may be disposed between the bottom plate 171 and the first plate 172A, and may have a second cutting hole 172H corresponding to the first cutting hole 171H. The second plate 172B may slide together with the first plate 172A to extend the protruding length of the first plate 172A.

[0052] The driving module 173 may be disposed on the bottom plate 171 and may slide the sliding plate 172 so that the sliding plate 172 may protrude from the bottom plate 171. Figure 2 The driving module 173 may include a moving block 173C, a ball screw 173B and a first motor 173A.

[0053] The moving block 173C may be penetrated by the ball screw 173B, and may be fixed to the slide plate 172. The moving block 173C may move in conjunction with the rotation of the ball screw 173B, and the slide plate 172 may slide in conjunction with the movement of the moving block 173C.

[0054] The ball screw 173B may be provided in the form of a rod having a thread formed on an outer surface thereof, and may convert the rotational force generated by the first motor 173A into a linear motion, thereby moving the moving block 173C in the travel direction 10 in which the hand unit 155 is provided. To achieve this, the ball screw 173B may be connected to the shaft of the first motor 173A, and may penetrate the moving block 173C.

[0055] The first motor 173A may be provided with a shaft and may rotate the ball screw 173B connected to the shaft. When the first motor 173A is driven, the moving block 173C may move due to the rotation of the ball screw 173B driven by the first motor 173A, and the sliding plate 172 may slide.

[0056] During this time, the first motor 173A is shown as being arranged on the lower surface of the bottom plate 171, but the present disclosure is not limited thereto. For example, the first motor 173A may be provided on the upper surface of the bottom plate 171, and a driving pulley (not shown) and a driving belt (not shown) may be further provided in the first motor 173A, and the ball screw 173B may have a structure capable of being rotated by the driving belt and / or the driving pulley.

[0057] Furthermore, although not shown, various modifications may be made, such as providing a linear motor (LM) guide on the bottom plate 171 , the first plate 172A, and / or the second plate 172B to support the sliding motion of each of the sliding units 170 .

[0058] The reflector 174A may be provided at a position where the transport object 50 is accommodated on the upper surface of the slide plate 172 , and may be provided, for example, as a sticker coated with a reflective material to reflect the laser light emitted by the first sensor 174B.

[0059] The first sensor 174B may be located at the first transport object anti-separation unit 1711 to detect the reflector 174A. Here, since the reflector 174A is provided at the position where the transport object 50 is accommodated, when the transport object 50 is accommodated on the sliding plate 172, the first sensor 174B may detect the accommodation of the transport object 50 because no laser is reflected from the reflector 174A.

[0060] The contact sensor 175 may be provided on the slide plate 172, and may detect the transport object 50. For example, the contact sensor 175 may be a thrust sensor that is pressed when the transport object 50 is accommodated.

[0061] A pair of anti-dropping members 176 may be provided on both sides of the transport object 50 on the sliding plate 172 to restrict both sides of the transport object 50 .

[0062] For example, each of the falling-off preventing members 176 may include an upper roller 176A, a lower roller 176B, and a rotating body 176C.

[0063] The upper roller 176A may have a length in the longitudinal direction (i.e., the front-rear direction 20) of the transport object 50. The lower roller 176B may be disposed below the upper roller 176A, and a pair of the lower rollers 176B may be disposed. The rotating body 176C may be disposed to rotate the upper roller 176A and the lower roller 176B, and may be disposed to pivot on the slide plate 172, have a rotation when the transport object 50 contacts the lower roller 176B to allow the upper roller 176A to contact the transport object 50 (refer to FIG. 1 ). Figure 4The rotating body 176C may be provided with a spring (not shown) so that when the transport object 50 is not accommodated, the upper roller 176A returns to a position where it does not contact the transport object 50, which is elastically supported away from the position where it contacts the transport object 50.

[0064] The first anti-detachment block 177A may be provided on the upper surface of the sliding plate 172 and may contact the other side of the transport object 50. For example, when viewed from above, the first anti-detachment block 177A may have an "L" shape with an angle contacting the other side of the transport object 50, but the present disclosure is not limited thereto. In addition, the first anti-detachment block 177A may have an inclined surface 177AS that guides the following path—a path for accommodating the transport object 50 from top to bottom. The inclined surface 177AS may be provided as a surface that gradually inclines downward in the direction in which the transport object 50 is accommodated.

[0065] The second anti-separation block 177B may be disposed on the upper surface of the sliding plate 172 , opposite to the first anti-separation block 177A, and may contact one side of the transport object 50 , thereby constraining both sides of the transport object 50 together with the first anti-separation block 177A.

[0066] In the transport device 100 , the vehicle 110 may move to a loading and unloading area where the transport object 50 is located, and may face the transport object 50 in the up-down direction 30 .

[0067] At this time, the direction of the transport object 50 may be random, such as the 12 o'clock direction or the 3 o'clock direction, so the clamp module 1551 of the hand unit 155 needs to be rotated to a direction that can clamp the transport object 50. To achieve this purpose, the rotation module 1552 of the hand unit 155 may rotate. Simultaneously or sequentially, the hand unit 155 may descend within the internal space 130S of the housing 130.

[0068] Subsequently, the clamp module 1551 may clamp the transport object 50, and the hand unit 155 may rise again to be positioned within the internal space 130S of the housing 130. Then, the rotation module 1552 may rotate corresponding to the sliding plate 172 so that the transport object 50 may be accommodated on the sliding unit 170 that does not accommodate the transport object 50. That is, the rotation module 1552 may rotate so that the transport object 50 clamped by the clamp module 1551 may be accommodated on the sliding plate 172. Then, the sliding plate 172 of the sliding unit 170 may slide so that the transport object 50 may be accommodated on the sliding plate 172. Once the transport object 50 is accommodated on the sliding plate 172, the sliding plate 172 may return to its original position, and the vehicle 110 may move to its destination position.

[0069] Although the embodiments of the present disclosure have been described with reference to the accompanying drawings, it will be appreciated by those skilled in the art that various modifications may be made without departing from the technical ideas or essential features of the present invention. Therefore, the embodiments described above should be considered in all aspects to be illustrative rather than restrictive.

Claims

1. A transport device, comprising: vehicle; a housing connected to the vehicle and forming an interior space having an open bottom; A hand unit, the hand unit is configured to be movable in the housing in an up-down direction and to clamp and release a transport object; as well as a sliding unit, the sliding unit being separated from the hand unit in the housing and being moved horizontally along a direction in which the hand unit is arranged, The sliding unit includes: a base plate, which is arranged in the internal space of the shell; a sliding plate, which slides from the base plate along the direction in which the hand unit is set and accommodates the transport object; and a driving module, which is arranged on the base plate and causes the sliding plate to slide so that the sliding plate protrudes from the base plate.

2. The transport device according to claim 1, wherein: A pair of sliding units are disposed in the inner space of the housing, the sliding units face each other, and the hand unit is located between the sliding units.

3. The transport device according to claim 1, wherein: The bottom plate is formed with a first cutting hole into which one side of the transport object is inserted, and The sliding plate includes a first plate covering a lower portion of the first cutting hole to accommodate the transport object.

4. The transport device according to claim 3, wherein: The sliding plate further includes a second plate disposed between the bottom plate and the first plate and formed with a second cutting hole corresponding to the first cutting hole.

5. The transport device according to claim 3, wherein: The bottom plate includes a first transport object anti-separation unit that forms a belt around the transport object in a direction perpendicular to a moving direction of the sliding plate without interfering with the movement of the sliding plate.

6. The transport device according to claim 5, wherein: The sliding unit further includes: a reflector provided at a position where the transport object is accommodated on an upper surface of the sliding plate; and a first sensor located at the first transport object anti-separation unit for detecting the reflector.

7. The transport device according to claim 5, wherein: The sliding unit further includes a contact sensor disposed on the sliding plate to detect the transport object.

8. The transport device according to claim 1, wherein: The driving module includes: a moving block fixed to the sliding plate; a ball screw penetrating the moving block; and a first motor rotating the ball screw, and The slide plate slides when the moving block moves due to the rotation of the ball screw driven by the first motor.

9. The transport device according to claim 1, wherein: The sliding unit includes a pair of anti-dropping parts, which are provided on both sides of the transport object on the sliding plate, and Each of the anti-drop components includes: an upper roller having a length along the longitudinal direction of the transport object; a lower roller, which is arranged below the upper roller; and a rotating body, which allows the upper roller and the lower roller to rotate, is arranged to pivot on the sliding plate, and has a "V" shape, and the "V" shape rotates when the transport object contacts the lower roller to allow the upper roller to contact the transport object.

10. The transport device according to claim 1, wherein: The sliding unit further includes a first anti-separation block that is disposed on an upper surface of the sliding plate and contacts one side of the transport object.

11. The transport device according to claim 10, wherein: The first anti-separation block is formed with an inclined surface which guides a path for accommodating the transport object in a direction from top to bottom.

12. The transport device according to claim 10, wherein: The sliding unit further includes a second anti-separation block disposed on an upper surface of the sliding plate, opposite to the first anti-separation block, and contacting the other side of the transport object.

13. The transport device according to claim 1, wherein: The hand unit includes: a clamp module that clamps the transport object; and a rotation module that rotates the clamp module.

14. The transport device according to claim 13, wherein: The transport object is configured as a storage box for accommodating chips, and The clamp module includes a clamper that slides to be mounted on or detached from the top of the storage box.

15. The transport device according to claim 14, wherein: The clamp module further includes a chip anti-detachment bar extending adjacent to the clamper across the front and rear of the storage box to prevent the chip accommodated in the storage box from detaching.

16. The transport device according to claim 13, further comprising: A lifting unit includes a belt having an adjustable length to lift and lower the hand unit.

17. The transport device according to claim 16, wherein: The rotating module includes: a fixed body to which the belt is fixed; a turntable that rotates relative to the fixed body, and a rotation angle range of the turntable is 0° to 270°; and a second motor that is disposed on the fixed body to rotate the turntable.

18. A transport device, comprising: vehicle; a housing connected to the vehicle and forming an interior space having an open bottom; A hand unit, the hand unit is configured to be movable in the housing in an up-down direction and to clamp and release a transport object, the transport object being configured to be a storage box for accommodating chips; a lifting unit, the lifting unit comprising a belt having an adjustable length to lift and lower the hand unit; as well as a pair of sliding units, the sliding units being arranged to face each other in the inner space of the housing and to move horizontally in the direction in which the hand unit is arranged, the hand unit being located between the sliding units, in The sliding unit includes: a bottom plate, which is arranged in the internal space of the shell, is formed with a first cutting hole and is provided with a first transport object anti-separation unit, one side of the transport object is inserted into the first cutting hole, and the first transport object anti-separation unit forms a belt-shaped member surrounding the transport object; a sliding plate, the sliding plate includes a first plate and a second plate, the first plate covers the lower part of the first cutting hole and accommodates the transport object, the second plate is arranged between the bottom plate and the first plate, is formed with a second cutting hole corresponding to the first cutting hole and slides from the bottom plate along the direction set by the hand unit; a driving module, the driving module includes a moving block, a ball screw and a first motor, the moving block is fixed to the sliding plate, the ball screw passes through the moving block, the first motor is arranged on the bottom plate to rotate the ball screw, and the driving module causes the moving block to rotate due to The sliding plate slides and protrudes from the bottom plate when the ball screw driven by the first motor rotates and moves; a reflector, wherein the reflector is arranged at a position on the upper surface of the sliding plate where the transport object is accommodated; a first sensor, wherein the first sensor is located at the first transport object anti-separation unit to detect the reflector; a contact sensor, wherein the contact sensor is arranged on the sliding plate to detect the transport object; a first anti-separation block, wherein the first anti-separation block is arranged on the upper surface of the sliding plate, contacts one side of the transport object and is formed with an inclined surface, wherein the inclined surface guides the path for accommodating the transport object from top to bottom; a second anti-separation block, wherein the second anti-separation block is arranged on the upper surface of the sliding plate, opposite to the first anti-separation block and contacts the other side of the transport object; and a pair of anti-drop components, wherein the anti-drop components are arranged on both sides of the transport object on the first plate, Each of the anti-drop components includes: an upper roller having a length in the longitudinal direction of the transport object; a lower roller disposed below the upper roller; and a rotating body configured to allow the upper roller and the lower roller to rotate, configured to pivot on the sliding plate, and having a "V" shape that rotates when the transport object contacts the lower roller to allow the upper roller to contact the transport object, and The hand unit also includes: a clamp module, which clamps the transport object and includes a clamp and a chip anti-detachment strip, the clamp slides to be installed on the top of the storage box or separated from the top of the storage box, and the chip anti-detachment strip extends across the front and rear of the storage box to prevent the chip contained in the storage box from detaching; and a rotating module, the rotating module includes a fixed body, a turntable and a second motor, the belt is fixed to the fixed body, the turntable rotates relative to the fixed body, the rotation angle range of the turntable is 0° to 270°, and the second motor is arranged on the fixed body to rotate the turntable.

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