Single crystal furnace crucible weighing mechanism

Abstract

The application belongs to the technical field of single crystal furnace devices, in particular to a single crystal furnace crucible weighing mechanism, which comprises a receiving seat, a crucible is arranged on the top surface of the receiving seat, a limiting cylinder is arranged on the side surface of the receiving seat, a supporting frame is arranged on the outer side of the limiting cylinder close to the bottom position, a limiting assembly is arranged between the limiting cylinder and the supporting frame, a plurality of rotating grooves are arranged on the surface of the limiting cylinder, a rotating column is rotatably connected in the rotating groove, a roller is rotatably connected to one side of the rotating column close to the crucible, the roller is in contact with the outer surface of the crucible, a secondary tooth is fixed to one end of the rotating column outside the limiting cylinder, the limiting cylinder and the roller can limit the crucible, avoid the shaking of the crucible in the rotating process, and improve the measurement accuracy of the weighing sensor, and the rotation of the roller can also reduce the friction between the roller and the crucible, so that the replacement and rotation of the crucible are more smooth.

Description

Technical Field

[0001] The invention belongs to the technical field of single crystal furnace devices, in particular to a single crystal furnace crucible weighing mechanism. Background Art

[0002] Single crystal silicon is an important semiconductor material, widely used in the manufacture of electronic devices, especially playing a key role in the integrated circuit industry. The production of single crystal silicon is generally carried out through a single crystal furnace and the Czochralski method.

[0003] In the process of preparing single crystal silicon in the existing single crystal furnace, the weight of the crystal is an important parameter to measure the growth progress and quality. The monitoring of crystal quality is generally carried out by weighing the crystal in real time through a weighing device to ensure that the crystal growth process is carried out according to the predetermined parameters.

[0004] However, during the crystal growth process, since the crucible needs to rotate, the weighing sensor not only bears vertical downward pressure, but is also affected by the vibration of the crucible axis due to rotation, which in turn affects its measurement accuracy and causes errors in the measured value.

[0005] To this end, the present invention provides a single crystal furnace crucible weighing mechanism. Summary of the Invention

[0006] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0007] The technical solution adopted by the present invention to solve its technical problem is as follows: a single crystal furnace crucible weighing mechanism of the present invention comprises a receiving seat; a crucible is provided on the top surface of the receiving seat; a limiting cylinder is sleeved on the side surface of the receiving seat; a support frame is installed on the outer side of the limiting cylinder near the bottom position; a limiting assembly is installed between the limiting cylinder and the support frame; the limiting assembly is used to lock the relative position between the limiting cylinder and the receiving seat; a plurality of evenly arranged rotating grooves are opened on the surface of the limiting cylinder; a rotating column is rotatably connected in the rotating groove; a roller is rotatably connected to the side of the rotating column close to the crucible, and the roller contacts the outer surface of the crucible; a sub-gear is fixedly connected to one end of the rotating column outside the limiting cylinder; a crown gear is rotatably connected to the top surface of the limiting cylinder; the crown gear is meshed with the sub-gear; a supporting rod is fixedly connected to the bottom surface of the receiving seat; a weighing sensor is installed at the bottom of the supporting rod; a rotating seat is installed at the bottom of the weighing sensor; a servo motor is installed inside the rotating seat to drive the weighing sensor, and the rotating seat is driven to rise and fall by an external hydraulic cylinder. During operation, when single crystal silicon is being prepared by the Czochralski method, in order to monitor quality changes, an embodiment of the present invention can be used. Before the crucible is placed on the top surface of the receiving seat, the user needs to first rotate the crown gear, which drives the sub-gear to rotate, and then the sub-gear drives the rotating column in the rotating groove to rotate, so that the roller on the end face of the rotating column is set in a vertical state. At this time, the crucible can be placed on the top surface of the receiving seat. Since the roller is set vertically, it can guide the crucible while reducing the friction of the crucible when it moves by its own rolling. force, and when the crucible is placed on the top surface of the receiving seat, the crown gear is rotated again to drive the rotating column to rotate, so that the roller rotates to a horizontal state, and then the rotating seat drives the support rod and the receiving seat to rotate, thereby driving the crucible to rotate, so as to complete the subsequent Czochralski method to prepare single crystal silicon rods. During the rotation of the crucible, the limit cylinder and the roller will limit the crucible to prevent the crucible from shaking during the rotation, thereby improving the measurement accuracy of the weighing sensor, and the rotation of the roller can also reduce the friction between it and the crucible, making the replacement and rotation of the crucible smoother.

[0008] Preferably, the bottom surface of the crucible is provided with a plurality of evenly arranged grooves; the top surface of the receiving seat is installed with a plurality of evenly arranged protrusions; the grooves correspond to the protrusions one by one, and the grooves and the protrusions are adapted to each other; during operation, when the crucible needs to be placed on the top surface of the receiving seat, the grooves on the bottom surface of the crucible need to be aligned with the protrusions on the top surface of the receiving seat, so that the protrusions can be inserted into the grooves on the bottom surface of the crucible. At this time, when the receiving seat drives the crucible to rotate, slipping between the lower crucible and the receiving seat can be avoided.

[0009] Preferably, the top surface of the receiving seat is provided with a receiving groove at a position corresponding to the protrusion, and the receiving groove is adapted to the protrusion; the bottom of the receiving groove is fixedly connected with a through hole, and the diameter of the through hole is smaller than the diameter of the receiving groove; the surface of the supporting rod is slidably connected to a tray; the top surface of the tray is fixedly connected with a push rod at a position corresponding to the through hole, and the push rod is adapted to the through hole; during operation, when it is necessary to introduce raw materials into the crucible in the single crystal furnace, the supporting rod will gradually descend under the drive of the external hydraulic cylinder, so that the tray will rest against the bottom surface of the single crystal furnace. At this time, the push rod on the top surface of the tray will be pushed into the receiving groove through the through hole, thereby lifting the protrusion in the receiving groove, and then the crucible will be pushed away from the receiving seat through the protrusion. At this time, when the material is poured into the crucible, it will not continuously impact the weighing sensor through the crucible, thereby ensuring the service life of the weighing sensor.

[0010] Preferably, the inner side of the crown gear is fixedly connected to an outer ring; the inner side of the outer ring is rotatably connected to the inner ring; the surface of the inner ring is provided with a plurality of evenly arranged mounting grooves; the width of one end of the mounting groove is greater than the width of the other side; a limiting roller is rollingly connected in the mounting groove; the diameters of both ends of the limiting roller are greater than the diameter of the middle; the diameter of the middle of the limiting roller is smaller than the end with the larger width of the mounting groove but larger than the end with the smaller width of the mounting groove; the side of the inner ring away from the outer ring is rotatably connected to a plurality of evenly arranged clamping plates; the crucible A docking groove is provided on the top surface at the corresponding position of the clamping plate, and the docking groove is adapted to the clamping plate; during operation, when the user needs to replace the crucible, the roller needs to be in a vertical state, and the user can drive the support rod to rotate clockwise through the rotating seat, thereby driving the crucible to rotate clockwise, and the crucible will drive the clamping plate to rotate clockwise through the docking groove, and finally the clamping plate will drive the inner ring to rotate clockwise, and the clockwise rotating inner ring will drive the limiting roller in the installation groove to move toward the narrower side of the installation groove, and due to the straight The diameter is larger than the narrower side of the installation groove, which will cause the outer ring and the inner ring to be clamped together through the limiting roller. At this time, the inner ring can drive the outer ring and the crown gear fixed to the outer ring to rotate together, and then through the engagement of the crown gear and the sub-gear, the rotating column drives the roller to rotate to a vertical state. At this time, when the user lifts the crucible again, the roller in this vertical state can reduce friction, so that the crucible can be taken out smoothly. After re-placing the new crucible on the top surface of the receiving seat, the user needs to put the clamping plate on the inner ring back To the docking groove, and then rotate the crown gear to make the roller return to the horizontal state. During the process of producing single crystal silicon by the direct pulling method, the rotating seat will drive the receiving seat and the crucible to rotate counterclockwise through the support rod. At this time, the inner ring will also rotate counterclockwise, and the limiting roller in the mounting groove will also move to the wider side of the mounting groove, so that the inner ring and the outer ring will not be stuck together. As a result, the inner ring will rotate normally without rotating the outer ring, thereby keeping the roller in a horizontal state, so that it can normally limit the crucible and reduce friction.

[0011] Preferably, the inner surface of the crown gear is fixedly connected to the limit plate; the limit plate extends to the inner surface of the limit cylinder; the inner wall of the limit cylinder is fixedly connected to the limit blocks on both sides of the limit plate; during operation, when the crown gear rotates, the rotation amplitude of the crown gear will be limited by the limit plate on its surface and the limit blocks on both sides of the limit plate, so that the crown gear can drive the sub-gear to rotate at an angle of exactly 90 degrees. Therefore, when the user rotates the crown gear and makes the limit plates of the crown gear respectively abut against the surfaces of the two limit blocks, the roller will be exactly in a horizontal or vertical state, avoiding the deviation of the angle piece of the roller, and failing to achieve the purpose of reducing friction.

[0012] Preferably, the limit assembly includes a connecting ring; the connecting ring is fixedly connected to the inner side of the support frame; the surface of the limiting cylinder is fixedly connected to a pair of symmetrically arranged connecting rods; the surfaces of the connecting rods are rotatably connected to sleeves; the surface of the connecting ring is provided with a pair of symmetrically arranged drop openings, and the drop openings are adapted to the sleeve; the bottom surface of the connecting ring is fixedly connected to a guide plate at the corresponding position of the drop opening; the guide plate is provided with a guide groove on one side close to the limiting cylinder, and the guide groove is connected to the drop opening; during work, when the user replaces the crucible, in order to facilitate the lifting of the crucible, the user needs to lower the limiting cylinder. To this end, the crown gear can be first rotated to make the roller rotate to a vertical state, and then the limiting cylinder can be rotated to make the sleeve on the surface of the connecting rod roll along the connecting ring, so that the sleeve can enter the guide groove on the surface of the guide plate from the drop opening, so that the sleeve can be lowered along the guide groove, and then the sleeve can also be lowered. At this time, there is no obstruction around the crucible, which makes it convenient for the user to lift and replace the crucible.

[0013] Preferably, the top surface of the connecting ring is fixedly connected to a pair of symmetrically arranged fixing seats; the two fixing seats are slidably connected to a pressure plate on one side close to the sleeve; a spring is fixedly connected between the pressure plate and the connecting ring; a card slot is provided on the bottom surface of the pressure plate, and the card slot is adapted to the sleeve; during operation, in order to prevent the limit cylinder from rotating freely on the connecting ring, the user needs to rotate the sleeve on the surface of the connecting rod to the bottom of the pressure plate at the fixing seat, and make the sleeve just stuck in the card slot. At this time, the spring is in a stretched state, so that the sleeve can be clamped by the pressure plate and the connecting ring, and then the limit cylinder is fixed by the sleeve and the connecting rod, thereby preventing the limit cylinder from moving freely on the connecting ring.

[0014] Preferably, a through groove is provided on the top surface of the receiving seat; the through groove passes through the receiving seat and the support rod; the support rod is made of thermal insulation material; a pressure rod is provided in the through groove; the bottom surface of the pressure rod is connected to the weighing sensor; the bottom surface of the support rod is rotatably connected to a thermal insulation pad, and the thermal insulation pad is fixedly connected to the outer shell of the weighing sensor; during operation, when the crucible is placed on the top surface of the receiving seat, the bottom of the crucible will transfer pressure to the weighing sensor outside the single crystal furnace through the pressure rod. Since the pressure rod is made of thermal insulation material, the thermal insulation pad also avoids direct contact between the support rod and the weighing sensor, thereby protecting the weighing sensor and preventing the weighing sensor from being in a high temperature environment for a long time, which affects the service life of the weighing sensor.

[0015] Preferably, a connecting tube is fixedly connected to the top surface of the contact point of the weighing sensor, and the connecting tube is located in the through groove; a bearing is fixedly connected to the inner wall of the connecting tube, and the bearing is located at the top position of the connecting tube; the pressure rod is fixedly connected to the inner wall of the bearing; during operation, when the rotating seat drives the support rod and the receiving seat to rotate, due to the friction between the pressure rod and the crucible, the pressure rod will also rotate, and the weighing sensor will not rotate, so the connecting tube fixed to the weighing sensor contact will not rotate either. At this time, the pressure rod will rotate relative to the connecting tube through the bearing, avoiding the pressure rod from rotating directly at the contact point, thereby causing wear on the contact point. At the same time, the weighing sensor does not rotate, which can also facilitate the connection of the weighing sensor to the outside world and avoid cable entanglement.

[0016] Preferably, a plurality of evenly arranged strip grooves are provided on the surface of the limiting cylinder; the strip grooves pass through the limiting cylinder and are evenly distributed at the bottom of the rotating groove; during operation, when the graphite heater in the single crystal furnace is heated, the heat can pass through the strip grooves to heat the crucible, thereby avoiding the limiting cylinder blocking the transfer of heat, thereby reducing the heating efficiency of the crucible.

[0017] The beneficial effects of the present invention are as follows:

[0018] 1. The single crystal furnace crucible weighing mechanism described in the present invention can limit the crucible through the limiting cylinder and the roller to prevent the crucible from shaking during rotation, thereby improving the measurement accuracy of the weighing sensor. The rotation of the roller can also reduce the friction between it and the crucible, making the replacement and rotation of the crucible smoother.

[0019] 2. The single crystal furnace crucible weighing mechanism described in the present invention is pushed into the receiving groove through the through hole, thereby pushing up the protrusion in the receiving groove, and then pushing the crucible away from the receiving seat through the protrusion. At this time, when the material is poured into the crucible, it will not continuously impact the weighing sensor through the crucible, thereby ensuring the service life of the weighing sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The present invention will be further described below with reference to the accompanying drawings.

[0021] Figure 1 is a perspective view of the present invention;

[0022] Figure 2 It is a structural schematic diagram of the crucible in the present invention;

[0023] Figure 3 It is a structural schematic diagram of the receiving seat in the present invention;

[0024] Figure 4 It is a structural schematic diagram of the crown gear in the present invention;

[0025] Figure 5 It is a structural schematic diagram of the sleeve in the present invention;

[0026] Figure 6 It is a structural schematic diagram of the limiting roller in the present invention;

[0027] Figure 7 It is a structural schematic diagram of the pressure plate of the present invention;

[0028] Figure 8 It is a partial cross-sectional view of the support rod in the present invention;

[0029] Figure: 1, receiving seat; 2, crucible; 3, limiting cylinder; 4, support frame; 5, rotating groove; 6, rotating column; 7, roller; 8, sub-gear; 9, crown gear; 10, supporting rod; 11, weighing sensor; 12, rotating seat; 13, groove; 14, protrusion; 15, receiving groove; 16, through hole; 17, tray; 18, ejector rod; 19, outer ring; 20, inner ring; 21, mounting groove; 22, limiting Positioning roller; 23. Clamping plate; 24. Docking groove; 25. Limiting plate; 26. Limiting block; 27. Connecting ring; 28. Connecting rod; 29. ​​Sleeve; 30. Dropping port; 31. Guide plate; 32. Guide groove; 33. Fixed seat; 34. Pressing plate; 35. Spring; 36. Clamping groove; 37. Through groove; 38. Pressing rod; 39. Insulation pad; 40. Connecting pipe; 41. Bearing; 42. Strip groove. DETAILED DESCRIPTION

[0030] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific implementation methods.

[0031] like Figures 1 to 4As shown, a single crystal furnace crucible weighing mechanism according to an embodiment of the present invention comprises a receiving seat 1; a crucible 2 is provided on the top surface of the receiving seat 1; a limiting cylinder 3 is sleeved on the side surface of the receiving seat 1; a support frame 4 is installed on the outer side of the limiting cylinder 3 near the bottom position; a limiting component is installed between the limiting cylinder 3 and the support frame 4; the limiting component is used to lock the relative position between the limiting cylinder 3 and the receiving seat 1; a plurality of evenly arranged rotating grooves 5 are opened on the surface of the limiting cylinder 3; a rotating column 6 is rotatably connected in the rotating groove 5; a rotating column 6 is close to one side of the crucible 2 The side is rotatably connected to a roller 7, and the roller 7 is in contact with the outer surface of the crucible 2; the rotating column 6 is fixedly connected to a sub-gear 8 at one end outside the limiting cylinder 3; the top surface of the limiting cylinder 3 is rotatably connected to a crown gear 9; the crown gear 9 is meshed with the sub-gear 8; the bottom surface of the receiving seat 1 is fixedly connected to a supporting rod 10; a weighing sensor 11 is installed at the bottom of the supporting rod 10; a rotating seat 12 is installed at the bottom of the weighing sensor 11; a servo motor is installed inside the rotating seat 12 for driving the weighing sensor 11, and the rotating seat 12 is driven up and down by an external hydraulic cylinder; working When single crystal silicon is being prepared by the Czochralski method, in order to monitor quality changes, the embodiment of the present invention can be used. Before the crucible 2 is placed on the top surface of the receiving seat 1, the user needs to first rotate the crown gear 9, which drives the sub-gear 8 to rotate, and then the sub-gear 8 drives the rotating column 6 in the rotating groove 5 to rotate, so that the roller 7 on the end face of the rotating column 6 is set in a vertical state. At this time, the crucible 2 can be placed on the top surface of the receiving seat 1. Since the roller 7 is set vertically, it can reduce the friction of the crucible 2 when it moves by rolling while guiding the crucible 2. After the crucible 2 is placed on the top surface of the receiving seat 1, the crown gear 9 is rotated again to drive the rotating column 6 to rotate, so that the roller 7 rotates to a horizontal state, and then the rotating seat 12 drives the support rod 10 and the receiving seat 1 to rotate, thereby driving the crucible 2 to rotate, so as to complete the subsequent Czochralski method for preparing single crystal silicon rods. During the rotation of the crucible 2, the limiting cylinder 3 and the roller 7 will limit the crucible 2 to prevent the crucible 2 from shaking during the rotation, thereby improving the measurement accuracy of the weighing sensor 11, and the rotation of the roller 7 can also reduce its friction with the crucible 2, making the replacement and rotation of the crucible 2 smoother.

[0032] like Figures 1 to 3 As shown, the bottom surface of the crucible 2 is provided with a plurality of evenly arranged grooves 13; the top surface of the receiving seat 1 is installed with a plurality of evenly arranged protrusions 14; the grooves 13 correspond to the protrusions 14 one by one, and the grooves 13 and the protrusions 14 are adapted to each other; during operation, when the crucible 2 needs to be placed on the top surface of the receiving seat 1, the grooves 13 on the bottom surface of the crucible 2 need to be aligned with the protrusions 14 on the top surface of the receiving seat 1, so that the protrusions 14 can be inserted into the grooves 13 on the bottom surface of the crucible 2. At this time, when the receiving seat 1 drives the crucible 2 to rotate, slipping between the lower crucible 2 and the receiving seat 1 can be avoided.

[0033] like Figure 3 As shown, the top surface of the receiving seat 1 is provided with a receiving groove 15 at a position corresponding to the protrusion 14, and the receiving groove 15 is adapted to the protrusion 14; the bottom of the receiving groove 15 is fixedly connected with a through hole 16, and the diameter of the through hole 16 is smaller than the diameter of the receiving groove 15; the surface of the supporting rod 10 is slidably connected with a tray 17; the top surface of the tray 17 is fixedly connected with a push rod 18 at a position corresponding to the through hole 16, and the push rod 18 is adapted to the through hole 16; when working, when it is necessary to introduce the crucible 2 in the single crystal furnace When the raw materials are added, the support rod 10 will gradually descend driven by the external hydraulic cylinder, so that the tray 17 will rest against the bottom surface of the interior of the single crystal furnace. At this time, the push rod 18 on the top surface of the tray 17 will be pushed into the receiving groove 15 through the through hole 16, thereby lifting the protrusion 14 in the receiving groove 15, and then the crucible 2 will be pushed away from the receiving seat 1 through the protrusion 14. At this time, when the material is poured into the crucible 2, it will not continuously impact the weighing sensor 11 through the crucible 2, thereby ensuring the service life of the weighing sensor 11.

[0034] like Figure 1 、 Figure 4 and Figure 6As shown, the inner side of the crown gear 9 is fixedly connected with an outer ring 19; the inner side of the outer ring 19 is rotatably connected with an inner ring 20; the surface of the inner ring 20 is provided with a plurality of evenly arranged mounting grooves 21; the width of one end of the mounting groove 21 is greater than the width of the other side; a limiting roller 22 is rollingly connected in the mounting groove 21; the diameters of both ends of the limiting roller 22 are greater than the diameter of the middle; the diameter of the middle of the limiting roller 22 is smaller than the end with the larger width of the mounting groove 21 but larger than the end with the smaller width of the mounting groove 21; the side of the inner ring 20 away from the outer ring 19 is rotatably connected with a plurality of evenly arranged clamping plates 23; the crucible 2 The top surface of the device is provided with a docking groove 24 at the corresponding position of the clamping plate 23, and the docking groove 24 is adapted to the clamping plate 23; during operation, when the user needs to replace the crucible 2, it is necessary to make the roller 7 vertical, and the user can drive the support rod 10 to rotate clockwise by the rotating seat 12, thereby driving the crucible 2 to rotate clockwise, and the crucible 2 will drive the clamping plate 23 to rotate clockwise through the docking groove 24, and finally the clamping plate 23 drives the inner ring 20 to rotate clockwise, and the clockwise rotating inner ring 20 will drive the limiting roller 22 in the installation groove 21 to move toward the narrower side of the installation groove 21, and because the limiting roller 22 The diameter of the middle part is larger than the narrower side of the mounting groove 21, which causes the outer ring 19 and the inner ring 20 to be clamped together by the limiting roller 22. At this time, the inner ring 20 can drive the outer ring 19 and the crown gear 9 fixed to the outer ring 19 to rotate together, and then through the engagement of the crown gear 9 with the sub-gear 8, the rotating column 6 drives the roller 7 to rotate to a vertical state. At this time, when the user lifts the crucible 2 again, the roller 7 in this vertical state can reduce friction, so that the crucible 2 can be taken out smoothly. After the new crucible 2 is placed on the top surface of the receiving seat 1, the user needs to move the clamping plate 23 at the inner ring 20. Put it back into the docking groove 24, and then rotate the crown gear 9 to make the roller 7 return to the horizontal state. During the process of producing single crystal silicon by the direct pulling method, the rotating seat 12 will drive the receiving seat 1 and the crucible 2 to rotate counterclockwise through the support rod 10. At this time, the inner ring 20 will also rotate counterclockwise, and the limiting roller 22 in the installation groove 21 will also move to the wider side of the installation groove 21, so that the inner ring 20 and the outer ring 19 will not be stuck together. As a result, the inner ring 20 will rotate normally without rotating the outer ring 19, thereby keeping the roller 7 in a horizontal state, so that it can normally limit the crucible 2 and reduce friction.

[0035] like Figure 1 and Figure 4As shown, the inner surface of the crown gear 9 is fixedly connected to the limit plate 25; the limit plate 25 extends to the inner surface of the limit cylinder 3; the inner wall of the limit cylinder 3 is fixedly connected to the limit blocks 26 on both sides of the limit plate 25; during operation, when the crown gear 9 rotates, the rotation amplitude of the crown gear 9 will be limited by the limit plate 25 on its surface and the limit blocks 26 on both sides of the limit plate 25, so that the crown gear 9 can drive the sub-gear 8 to rotate at an angle of exactly 90 degrees. Therefore, when the user rotates the crown gear 9 and makes the limit plates 25 of the crown gear 9 respectively abut against the surfaces of the two limit blocks 26, the roller 7 will be exactly in a horizontal or vertical state, avoiding the angle piece of the roller 7 from being offset, and failing to achieve the purpose of reducing friction.

[0036] like Figure 1 and Figure 5 As shown, the limiting assembly includes a connecting ring 27; the connecting ring 27 is fixedly connected to the inner side of the support frame 4; a pair of symmetrically arranged connecting rods 28 are fixedly connected to the surface of the limiting cylinder 3; the surfaces of the connecting rods 28 are rotatably connected to sleeves 29; a pair of symmetrically arranged drop openings 30 are opened on the surface of the connecting ring 27, and the drop openings 30 are adapted to the sleeves 29; a guide plate 31 is fixedly connected to the bottom surface of the connecting ring 27 at the corresponding position of the drop opening 30; a guide groove 32 is opened on the side of the guide plate 31 close to the limiting cylinder 3, and the guide groove 32 is connected to the drop opening 30; working When the user replaces the crucible 2, in order to facilitate the lifting of the crucible 2, the user needs to lower the limiting cylinder 3. To this end, the crown gear 9 can be rotated first to rotate the roller 7 to a vertical state, and then the limiting cylinder 3 is rotated to make the sleeve 29 on the surface of the connecting rod 28 roll along the connecting ring 27, so that the sleeve 29 can enter the guide groove 32 on the surface of the guide plate 31 from the drop port 30, so that the sleeve 29 can descend along the guide groove 32, and then the sleeve 29 can also follow the decline. At this time, the crucible 2 is not blocked around, which makes it convenient for the user to lift and replace the crucible 2.

[0037] like Figures 1 to 7 As shown, the top surface of the connecting ring 27 is fixedly connected to a pair of symmetrically arranged fixing seats 33; the two fixing seats 33 are slidably connected to a pressure plate 34 on one side close to the sleeve 29; a spring 35 is fixedly connected between the pressure plate 34 and the connecting ring 27; the bottom surface of the pressure plate 34 is provided with a card slot 36, and the card slot 36 is adapted to the sleeve 29; during operation, in order to prevent the limit cylinder 3 from rotating freely on the connecting ring 27, the user needs to rotate the sleeve 29 on the surface of the connecting rod 28 to the bottom of the pressure plate 34 at the fixing seat 33, and make the sleeve 29 just stuck in the card slot 36. At this time, the spring 35 is in a stretched state, so that the sleeve 29 can be clamped by the pressure plate 34 and the connecting ring 27, and then the limit cylinder 3 is fixed by the sleeve 29 and the connecting rod 28, thereby preventing the limit cylinder 3 from moving freely on the connecting ring 27.

[0038] like Figure 1 and Figure 7 As shown, a through groove 37 is provided on the top surface of the receiving seat 1; the through groove 37 passes through the receiving seat 1 and the support rod 10; the support rod 10 is made of heat-insulating material; a pressure rod 38 is provided in the through groove 37; the bottom surface of the pressure rod 38 is connected to the weighing sensor 11; the bottom surface of the supporting rod 10 is rotatably connected to a heat-insulating pad 39, and the heat-insulating pad 39 is fixedly connected to the outer shell of the weighing sensor 11; during operation, when the crucible 2 is placed on the top surface of the receiving seat 1, the bottom of the crucible 2 will transfer pressure to the weighing sensor 11 outside the single crystal furnace through the pressure rod 38. Since the pressure rod 38 is made of heat-insulating material, the heat-insulating pad 39 also avoids direct contact between the supporting rod 10 and the weighing sensor 11, thereby protecting the weighing sensor and preventing the weighing sensor 11 from being in a high-temperature environment for a long time, which affects the service life of the weighing sensor 11.

[0039] like Figure 1 and Figure 8 As shown, the top surface of the contact point of the weighing sensor 11 is fixedly connected with a connecting tube 40, and the connecting tube 40 is located in the through groove 37; the inner wall of the connecting tube 40 is fixedly connected with a bearing 41, and the bearing 41 is located at the top position of the connecting tube 40; the pressure rod 38 is fixedly connected to the inner wall of the bearing 41; during operation, when the rotating seat 12 drives the support rod 10 and the receiving seat 1 to rotate, due to the friction between the pressure rod 38 and the crucible 2, the pressure rod 38 will also rotate accordingly, and the weighing sensor 11 will not rotate, so the connecting tube 40 fixedly connected to the contact point of the weighing sensor 11 will not rotate either. At this time, the pressure rod 38 will rotate relative to the connecting tube 40 through the bearing 41, avoiding the pressure rod 38 from rotating directly at the contact point, thereby causing wear on the contact point. At the same time, the weighing sensor 11 does not rotate, which can also facilitate the connection of the weighing sensor 11 to the outside world and avoid cable entanglement.

[0040] like Figure 1 and Figure 4 As shown, a plurality of evenly arranged strip grooves 42 are provided on the surface of the limiting cylinder 3; the strip grooves 42 pass through the limiting cylinder 3 and are evenly distributed at the bottom of the rotating groove 5; during operation, when the graphite heater in the single crystal furnace is heated, the heat can pass through the strip grooves 42 to heat the crucible 2, thereby avoiding the limiting cylinder 3 blocking the transfer of heat, thereby reducing the heating efficiency of the crucible 2.

[0041] During operation, when single crystal silicon is being prepared by the Czochralski method, in order to monitor quality changes, the embodiment of the present invention can be used. Before the crucible 2 is placed on the top surface of the receiving seat 1, the user needs to first rotate the crown gear 9, which drives the sub-gear 8 to rotate, and then the sub-gear 8 drives the rotating column 6 in the rotating groove 5 to rotate, so that the roller 7 on the end face of the rotating column 6 is set in a vertical state. At this time, the crucible 2 can be placed on the top surface of the receiving seat 1. Since the roller 7 is set vertically, it can guide the crucible 2 while reducing the friction of the crucible 2 when it moves by its own rolling. When After the crucible 2 is placed on the top surface of the receiving seat 1, the crown gear 9 is rotated again to drive the rotating column 6 to rotate, so that the roller 7 rotates to a horizontal state, and then the rotating seat 12 drives the support rod 10 and the receiving seat 1 to rotate, thereby driving the crucible 2 to rotate, so as to complete the subsequent Czochralski method for preparing single crystal silicon rods. During the rotation of the crucible 2, the limiting cylinder 3 and the roller 7 will limit the crucible 2 to prevent the crucible 2 from shaking during the rotation, thereby improving the measurement accuracy of the weighing sensor 11, and the rotation of the roller 7 can also reduce its friction with the crucible 2, making the replacement and rotation of the crucible 2 smoother.

[0042] When the crucible 2 needs to be placed on the top surface of the receiving seat 1, the groove 13 on the bottom surface of the crucible 2 needs to be aligned with the protrusion 14 on the top surface of the receiving seat 1, so that the protrusion 14 can be inserted into the groove 13 on the bottom surface of the crucible 2. At this time, when the receiving seat 1 drives the crucible 2 to rotate, slipping between the lower crucible 2 and the receiving seat 1 can be avoided.

[0043] When it is necessary to introduce raw materials into the crucible 2 in the single crystal furnace, the support rod 10 will gradually descend under the drive of the external hydraulic cylinder, so that the tray 17 will rest against the bottom surface of the single crystal furnace. At this time, the push rod 18 on the top surface of the tray 17 will be pushed into the receiving groove 15 through the through hole 16, thereby lifting the protrusion 14 in the receiving groove 15, and then pushing the crucible 2 away from the receiving seat 1 through the protrusion 14. At this time, when the material is poured into the crucible 2, it will not continuously impact the weighing sensor 11 through the crucible 2, thereby ensuring the service life of the weighing sensor 11.

[0044] When the user needs to replace the crucible 2, it is necessary to make the roller 7 vertical. The user can drive the supporting rod 10 to rotate clockwise by the rotating seat 12, thereby driving the crucible 2 to rotate clockwise, and the crucible 2 will drive the clamping plate 23 to rotate clockwise through the docking groove 24, and finally the clamping plate 23 drives the inner ring 20 to rotate clockwise, and the clockwise rotating inner ring 20 will drive the limiting roller 22 in the mounting groove 21 to move toward the narrower side of the mounting groove 21. Since the diameter of the middle part of the limiting roller 22 is larger than the narrower side of the mounting groove 21, the outer ring 19 and the inner ring 20 will be stuck together through the limiting roller 22. At this time, the inner ring 20 can drive the outer ring 19 and the crown gear 9 fixed to the outer ring 19 to rotate together, and then through the meshing of the crown gear 9 and the sub-gear 8, the rotating column 6 drives the roller 7 to rotate to the vertical state. At this time, the user can raise the When pulling the crucible 2, the roller 7 in this vertical state can reduce friction, so that the crucible 2 can be taken out smoothly. After the new crucible 2 is placed on the top surface of the receiving seat 1, the user needs to put the clamping plate 23 at the inner ring 20 back into the docking groove 24, and then rotate the crown gear 9 to make the roller 7 return to the horizontal state. During the process of producing single crystal silicon by the direct pulling method, the rotating seat 12 will drive the receiving seat 1 and the crucible 2 to rotate counterclockwise through the support rod 10. At this time, the inner ring 20 will also rotate counterclockwise, and the limiting roller 22 in the mounting groove 21 will also move to the wider side of the mounting groove 21, so that the inner ring 20 and the outer ring 19 will not be stuck together. As a result, the inner ring 20 will rotate normally without rotating the outer ring 19, thereby keeping the roller 7 in a horizontal state, so that it can normally limit the crucible 2 and reduce friction.

[0045] When the crown gear 9 rotates, the rotation range of the crown gear 9 will be limited by the limit plate 25 on its surface and the limit blocks 26 on both sides of the limit plate 25, so that the crown gear 9 can drive the sub-gear 8 to rotate at an angle of exactly 90 degrees. Therefore, when the user rotates the crown gear 9 and makes the limit plates 25 of the crown gear 9 respectively abut against the surfaces of the two limit blocks 26, the roller 7 will be exactly in a horizontal or vertical state, avoiding angular deviation of the roller 7, which fails to achieve the purpose of reducing friction.

[0046] When the user replaces the crucible 2 again, in order to facilitate the lifting of the crucible 2, the user needs to lower the limiting cylinder 3. To this end, the crown gear 9 can be rotated first to rotate the roller 7 to a vertical state, and then the limiting cylinder 3 is rotated to make the sleeve 29 on the surface of the connecting rod 28 roll along the connecting ring 27, so that the sleeve 29 can enter the guide groove 32 on the surface of the guide plate 31 from the drop port 30, so that the sleeve 29 can descend along the guide groove 32, and then the sleeve 29 can also follow the decline. At this time, the crucible 2 is not blocked around, which makes it convenient for the user to lift and replace the crucible 2.

[0047] In order to prevent the limiting cylinder 3 from rotating freely on the connecting ring 27, the user needs to rotate the sleeve 29 on the surface of the connecting rod 28 to the bottom of the pressure plate 34 at the fixing seat 33, and make the sleeve 29 just stuck in the slot 36. At this time, the spring 35 is in a stretched state, so that the sleeve 29 can be clamped by the pressure plate 34 and the connecting ring 27, and then the limiting cylinder 3 is fixed by the sleeve 29 and the connecting rod 28, thereby preventing the limiting cylinder 3 from moving freely on the connecting ring 27.

[0048] When the crucible 2 is placed on the top surface of the receiving seat 1, the bottom of the crucible 2 will transfer pressure to the weighing sensor 11 outside the single crystal furnace through the pressure rod 38. Since the pressure rod 38 is made of thermal insulation material, the thermal insulation pad 39 also avoids direct contact between the support rod 10 and the weighing sensor 11, thereby protecting the weighing sensor and preventing the weighing sensor 11 from being in a high temperature environment for a long time, which will affect the service life of the weighing sensor 11.

[0049] When the rotating seat 12 drives the supporting rod 10 and the receiving seat 1 to rotate, the pressure rod 38 will also rotate due to the friction between the pressure rod 38 and the crucible 2, but the weighing sensor 11 will not rotate, so the connecting tube 40 fixedly connected to the contact of the weighing sensor 11 will not rotate either. At this time, the pressure rod 38 will rotate relative to the connecting tube 40 through the bearing 41, avoiding the pressure rod 38 from rotating directly at the contact point, thereby causing wear on the contact point. At the same time, the weighing sensor 11 does not rotate, which can also facilitate the connection of the weighing sensor 11 to the outside world and avoid cable entanglement.

[0050] When the graphite heater in the single crystal furnace is heating, the heat can heat the crucible 2 through the strip groove 42, thereby preventing the limiting cylinder 3 from blocking the heat transfer and reducing the heating efficiency of the crucible 2.

[0051] The basic principles, main features, and advantages of the present invention are shown and described above. Those skilled in the art should understand that the present invention is not limited to the foregoing embodiments. The foregoing embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and modifications are intended to fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. A single crystal furnace crucible weighing mechanism, characterized in that: The invention comprises a receiving seat (1); a crucible (2) is provided on the top surface of the receiving seat (1); a limiting cylinder (3) is sleeved on the side surface of the receiving seat (1); a support frame (4) is installed on the outer side of the limiting cylinder (3) near the bottom; a limiting component is installed between the limiting cylinder (3) and the support frame (4); the limiting component is used to lock the relative position between the limiting cylinder (3) and the receiving seat (1); a plurality of uniformly arranged rotating grooves (5) are opened on the surface of the limiting cylinder (3); a rotating column (6) is rotatably connected in the rotating groove (5); a roller (7) is rotatably connected on the side of the rotating column (6) close to the crucible (2), The roller (7) is in contact with the outer surface of the crucible (2); the rotating column (6) is fixedly connected to a sub-gear (8) at one end outside the limiting cylinder (3); the top surface of the limiting cylinder (3) is rotatably connected to a crown gear (9); the crown gear (9) is meshedly connected to the sub-gear (8); the bottom surface of the receiving seat (1) is fixedly connected to a supporting rod (10); a weighing sensor (11) is installed at the bottom of the supporting rod (10); a rotating seat (12) is installed at the bottom of the weighing sensor (11); a servo motor is installed inside the rotating seat (12) for driving the supporting rod (10) to rotate, and the rotating seat (12) is driven to rise and fall by an external hydraulic cylinder; The inner side of the crown gear (9) is fixedly connected to an outer ring (19); the inner side of the outer ring (19) is rotatably connected to an inner ring (20); a plurality of evenly arranged mounting grooves (21) are provided on the surface of the inner ring (20); the width of one end of the mounting groove (21) is greater than that of the other side; a limiting roller (22) is rollingly connected in the mounting groove (21); the diameters of both ends of the limiting roller (22) are greater than the diameter of the middle part; the diameter of the middle part of the limiting roller (22) is smaller than the end with the larger width of the mounting groove (21) but larger than the end with the smaller width of the mounting groove (21); a plurality of evenly arranged clamping plates (23) are rotatably connected to the side of the inner ring (20) away from the outer ring (19); a docking groove (24) is provided on the top surface of the crucible (2) at a position corresponding to the clamping plate (23), and the docking groove (24) is adapted to the clamping plate (23).

2. A single crystal furnace crucible weighing mechanism according to claim 1, characterized in that: The bottom surface of the crucible (2) is provided with a plurality of evenly arranged grooves (13); the top surface of the receiving seat (1) is provided with a plurality of evenly arranged protrusions (14); the grooves (13) correspond to the protrusions (14) one by one, and the grooves (13) and the protrusions (14) are adapted to each other.

3. A single crystal furnace crucible weighing mechanism according to claim 2, characterized in that: The top surface of the receiving seat (1) is provided with a receiving groove (15) at a position corresponding to the protrusion (14), and the receiving groove (15) is adapted to the protrusion (14); the bottom of the receiving groove (15) is fixedly connected with a through hole (16), and the diameter of the through hole (16) is smaller than the diameter of the receiving groove (15); the surface of the supporting rod (10) is slidably connected with a tray (17); the top surface of the tray (17) is fixedly connected with a push rod (18) at a position corresponding to the through hole (16), and the push rod (18) is adapted to the through hole (16).

4. The single crystal furnace crucible weighing mechanism according to claim 1, characterized in that: The inner surface of the crown gear (9) is fixedly connected to a limit plate (25); the limit plate (25) extends to the inner surface of the limit cylinder (3); and the inner wall of the limit cylinder (3) is fixedly connected to limit blocks (26) on both sides of the limit plate (25).

5. The single crystal furnace crucible weighing mechanism according to claim 4, characterized in that: The limiting assembly includes a connecting ring (27); the connecting ring (27) is fixedly connected to the inner side of the support frame (4); a pair of symmetrically arranged connecting rods (28) are fixedly connected to the surface of the limiting cylinder (3); the surfaces of the connecting rods (28) are rotatably connected to sleeves (29); a pair of symmetrically arranged drop openings (30) are opened on the surface of the connecting ring (27), and the drop openings (30) are adapted to the sleeves (29); a guide plate (31) is fixedly connected to the bottom surface of the connecting ring (27) at a position corresponding to the drop openings (30); a guide groove (32) is opened on a side of the guide plate (31) close to the limiting cylinder (3), and the guide groove (32) is communicated with the drop opening (30).

6. The single crystal furnace crucible weighing mechanism according to claim 5, characterized in that: A pair of symmetrically arranged fixing seats (33) are fixedly connected to the top surface of the connecting ring (27); a pressure plate (34) is slidably connected to one side of the two fixing seats (33) close to the sleeve (29); a spring (35) is fixedly connected between the pressure plate (34) and the connecting ring (27); a card slot (36) is provided on the bottom surface of the pressure plate (34), and the card slot (36) is adapted to the sleeve (29).

7. The single crystal furnace crucible weighing mechanism according to claim 6, characterized in that: The top surface of the receiving seat (1) is provided with a through groove (37); the through groove (37) passes through the receiving seat (1) and the supporting rod (10); the supporting rod (10) is made of a heat-insulating material; a pressure rod (38) is provided in the through groove (37); the bottom surface of the pressure rod (38) is connected to the weighing sensor (11); the bottom surface of the supporting rod (10) is rotatably connected to a heat-insulating pad (39), and the heat-insulating pad (39) is fixedly connected to the housing of the weighing sensor (11).

8. The single crystal furnace crucible weighing mechanism according to claim 7, characterized in that: The top surface of the contact point of the weighing sensor (11) is fixedly connected to a connecting tube (40), and the connecting tube (40) is located in the through groove (37); the inner wall of the connecting tube (40) is fixedly connected to a bearing (41), and the bearing (41) is located at the top position of the connecting tube (40); the pressure rod (38) is fixedly connected to the inner wall of the bearing (41).

9. The single crystal furnace crucible weighing mechanism according to claim 1, characterized in that: The surface of the limiting cylinder (3) is provided with a plurality of evenly arranged strip grooves (42); the strip grooves (42) pass through the limiting cylinder (3) and are evenly distributed at the bottom of the rotating groove (5).

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