Laser spot dynamic detection rapid adjusting device and adjusting method thereof

Abstract

The invention discloses a laser spot dynamic detection rapid adjusting device, the adjusting device comprises a substrate and a detection adjusting mechanism arranged on the surface of the substrate, and the adjusting method comprises the following steps: S01, generating a first test light path and a second test light path of an incident laser beam, and blocking the second test light path through a light blocking device, according to the invention, through the arrangement of the positive lens and the prism, the astigmatism and the roundness can be corrected, that is, the roundness is corrected firstly and then the astigmatism is corrected, so that when the laser is used for a long time, the light spot roundness and the astigmatism can be close to an ideal state. According to the invention, real-time dynamic light path correction is realized through the first adjusting reflector and the second adjusting reflector, and the monitoring process does not affect the actual processing process.

Description

Technical Field

[0001] The invention relates to the technical field of laser processing, and in particular to a laser spot dynamic detection and rapid adjustment device and an adjustment method thereof. Background Art

[0002] Laser and ultrasound have become hot topics in the research of online methods for metal additive manufacturing due to their non-contact, wide bandwidth and high efficiency. Especially in the field of micromachining, laser processing has advantages that traditional mechanical processing cannot match.

[0003] This is because the laser spot can be easily focused to um size, but mechanical processing is difficult to achieve at this scale.

[0004] And from the characteristics of laser, we can know that the performance of laser focused spot is determined by the laser spot before focusing. The roundness, astigmatism and beam quality M of the original spot 2 In the field of fine processing, it is obviously hoped that the laser spot has a circularity close to 100% and an astigmatism close to 0.

[0005] But on the other hand, when the laser is used for a long time, due to the aging of the lens and crystal, and the disappearance of stress, the resonant cavity (the function of the optical resonant cavity is to select light with a certain frequency and consistent direction for the highest priority amplification, and suppress light of other frequencies and directions. All photons that do not move along the axis of the resonant cavity will quickly escape from the cavity and no longer contact the working medium. The generation of laser is realized in the optical resonant cavity. Specifically: the photons moving along the axis will continue to move forward in the cavity, and will continue to run back and forth through the reflection of the two mirrors to produce oscillations. During the operation, they will continuously encounter excited particles to produce stimulated radiation. The photons running along the axis will continue to proliferate, forming a strong light beam with the same propagation direction, frequency and phase in the cavity. This is the laser) will inevitably change (for example, temperature changes may cause thermal expansion of the material, causing displacement or deformation of optical elements (such as mirrors)). Even if it has a near-perfect spot when it leaves the factory, the spot will still change after a period of use (that is, the roundness of the laser spot decreases, for example, to below 100%, and the astigmatism value is generated at the same time). This leads to irreversible changes in the processed morphology as the use time increases.

[0006] Therefore, solving the problem raised by the above-mentioned prior art of how to ensure that the spot roundness and astigmatism can be close to the ideal state when the laser is used for a long time becomes the subject to be studied and solved by the present invention. Summary of the invention

[0007] The present invention provides a laser spot dynamic detection fast adjustment device and an adjustment method thereof, aiming to solve the technical problems raised in the above-mentioned background technology.

[0008] To achieve the above-mentioned purpose, the technical solution adopted by the present invention is: a laser spot dynamic detection fast adjustment device, the adjustment device includes a substrate and a detection adjustment mechanism arranged on the surface of the substrate, the detection adjustment mechanism includes a negative lens, a positive lens rotation mechanism installed with a positive lens, a prism rotation mechanism installed with a prism, a first adjustment reflector, a second adjustment reflector, a first beam splitter, a second beam splitter, a first folding mirror, a second folding mirror, a focusing mirror, a first parallel plate, a second parallel plate, a CCD sensor, a signal processing box and a light blocker; Along the irradiation direction of the laser beam, the negative lens, the positive lens rotation mechanism, the prism rotation mechanism, the first adjustment reflector, the second adjustment reflector, the first beam splitter and the second beam splitter are arranged in sequence; When the laser beam is irradiated onto the first beam splitter, part of the light passes through the first beam splitter to form a first outgoing light, and another part of the light is reflected on the surface of the first beam splitter to form a first test light path; When the first outgoing light passing through the first beam splitter is irradiated onto the second beam splitter, part of the first outgoing light passes through the second beam splitter to form an outgoing light path, and another part of the first outgoing light is reflected on the surface of the second beam splitter to form a second test light path; The light blocker is arranged on the first test light path and the second test light path, and is used to block the first test light path or the second test light path; The focusing mirror, the first parallel plate, the second parallel plate and the CCD sensor are sequentially arranged along a straight line direction and constitute the rear section of the test light path; the first parallel plate and the second parallel plate are movably arranged relative to the substrate, and the first parallel plate and the second parallel plate can respectively enter the rear section of the test light path or avoid it; The first folding mirror is arranged correspondingly to the first beam splitter, and reflects the first test light path toward the focusing mirror; the second folding mirror is arranged correspondingly to the second beam splitter, and reflects the second test light path toward the focusing mirror, i.e., the rear section of the test light path; CCD sensors are used to measure the roundness and astigmatism of laser beams; The signal processing box is used to transmit the data measured by the CCD sensor to the computer and receive the instructions transmitted by the computer.

[0009] The relevant contents of the above plan are explained as follows: In the above solution, the base plate is mainly used to fix or place the detection and adjustment mechanism, and is not limited to a plate.

[0010] In the above scheme, "light path" is an optical term, which refers to the path that light takes from a light source, through an optical system (such as a lens, mirror, etc.) to reach a specific point.

[0011] The laser beam will be split into four strands when passing through the first beam splitter and the second beam splitter. The first strand, the second strand, the third strand and the outgoing strand are referred to as follows: After passing through the positive lens rotating mechanism, the prism rotating mechanism, the first adjusting reflector and the second adjusting reflector, the laser beam will be irradiated onto the first beam splitter. At this time, one beam will be divided into two beams, namely the first beam and the second beam (i.e. the first outgoing light) will be generated. The first beam will be reflected by the first beam splitter and transmitted to the first folding mirror, and then transmitted to the CCD sensor after passing through the focusing mirror, the first parallel plate and the second parallel plate, thus forming the first test light path.

[0012] The second beam (i.e. the first outgoing light) is irradiated onto the second beam splitter. At this time, the second beam will be split into two beams, namely the third beam and the outgoing beam.

[0013] At this time, the outgoing strand passes through the second beam splitter to form an outgoing light path; The third beam is reflected by the second beam splitter and transmitted to the second folding mirror, and then passes through the first folding mirror, the focusing mirror, the first parallel plate and the second parallel plate, and is transmitted to the CCD sensor to form a second test light path.

[0014] Testing the first test optical path and the second test optical path means that the CCD sensor detects the laser light beams transmitted along the first test optical path and the second test optical path.

[0015] In a further technical solution, the first beam splitter and the second beam splitter are both coated with an anti-reflection film of the required wavelength, and the transmittance is 99.5%; The first folding mirror and the second folding mirror are both coated with a reflective film of a required wavelength, and the reflectivity is greater than 99.9%.

[0016] In the above scheme, the anti-reflection film of the required wavelength refers to the anti-reflection film selected according to the wavelength of the laser beam to increase the transmittance; The reflective film of the required wavelength refers to selecting the reflective film according to the wavelength of the laser beam; increasing the reflectivity.

[0017] The present invention also provides an adjustment method of a fast adjustment device based on dynamic detection of laser spot, comprising the following steps: S01, generating a first test light path and a second test light path for an incident laser light beam, and shielding the second test light path by a light blocker, so that the CCD sensor can only measure the laser light beam irradiated along the first test light path; S02, switching the positions of the first parallel plate and the second parallel plate to obtain three sets of measurement data, which are not passed through the two, passed through one of the two, and passed through both, and obtaining the initial roundness and initial astigmatism of the laser beam reflected on the CCD sensor according to the three sets of measurement data; S03, according to the obtained initial roundness, start the positive lens rotation mechanism, and adjust the roundness by adjusting the inclination of the positive lens, while the CCD sensor measures in real time until the measured roundness meets the set requirements, and then close the positive lens rotation mechanism; S04, starting the prism rotation mechanism according to the obtained initial astigmatism, and adjusting the astigmatism by adjusting the inclination of the prism, while the CCD sensor measures in real time until the measured astigmatism meets the set requirements, and then closing the prism rotation mechanism; S05, continue to block the second test light path by the light blocker, and define a coordinate axis on the light beam irradiation plane used by the CCD sensor for detection, where the X-axis and the Y-axis represent the horizontal direction and the vertical direction respectively, and then measure the position of the first light path focus spot formed by the laser beam reflected by the first folding mirror by the CCD sensor, and at the same time adjust the first adjustment reflector according to the center point of the first light path focus spot and the center point of the coordinate axis until the center point of the first light path focus spot coincides with the center point of the coordinate axis; S06, adjusting the position of the light blocker to block the first test light path, and then measuring the position of the second light path focus spot formed by the laser beam reflected by the second folding mirror by the CCD sensor, and adjusting the second adjustment reflector according to the center point of the second light path focus spot and the center point of the coordinate axis until the center point of the second light path focus spot coincides with the center point of the coordinate axis; S07. After the center point of the focused light spot on the first optical path and the center point of the focused light spot on the second optical path coincide with the center point of the coordinate axis, the first test optical path and the second test optical path are output in a coaxial manner.

[0018] The relevant explanations for the above contents are as follows: In the above solution, the first test optical path and the second test optical path are output in a coaxial manner, which means that the laser light beams transmitted along the first test optical path and the second test optical path are output in a coaxial manner.

[0019] In the above scheme, the first optical path focused spot and the second optical path focused spot refer to the spot shape and size formed on the measuring plane on the CCD sensor by the laser beam transmitted along the first test optical path and the second test optical path.

[0020] According to a further technical solution, step S02 includes: S021, guiding the positions of the first parallel plate and the second parallel plate to avoid the first test light path, and the CCD sensor directly detects the first test light path to measure a first set of data, namely, the spot circularity and astigmatism value behind the laser beam waist; In step S021, the two parallel plates avoid the optical path (i.e., they are not in the optical path), and the CCD sensor directly receives the laser beam and records the initial state of the laser beam (i.e., the light spot characteristics after the laser beam waist). This set of data will be used as a benchmark for subsequent comparisons; the measured light spot roundness and astigmatism values ​​will reflect the quality of the laser beam before passing through any optical elements.

[0021] S022, guiding one of the first parallel plate and the second parallel plate into a first test optical path, so that the laser beam passes through the first parallel plate or the second parallel plate and reaches a CCD sensor, so as to measure a second set of data, namely, a spot circularity and an astigmatism value of the laser beam waist; In step S022, one of the parallel plates is placed in the optical path, and when the laser beam passes through the plate and reaches the CCD sensor, the characteristics of the light spot are recorded. This will provide numerical values ​​of the roundness and astigmatism of the laser beam after passing through a parallel plate.

[0022] S023, guiding the first parallel plate and the second parallel plate to be in a first test optical path, so that the laser beam passes through the first parallel plate and the second parallel plate and reaches the CCD sensor, so as to measure a third set of data, namely, the spot circularity and astigmatism value before the laser beam waist; In step S023, the two parallel plates are in the optical path. After the laser beam passes through the two plates, it reaches the CCD sensor, and the recorded light spot characteristics will reflect the state of the beam after passing through the two parallel plates.

[0023] S024. Use the three sets of data obtained and apply the theory of Gaussian optics to obtain a detailed description of the laser beam, including the beam waist radius, circularity and astigmatism.

[0024] S024 is the stage of data analysis and result extraction. By summarizing the previous three sets of data and applying Gaussian optics theory (which is suitable for describing the propagation characteristics of laser beams), the detailed parameters of the laser beam can be analyzed: Beam Waist Radius: The width of the beam at its minimum diameter.

[0025] Roundness: The symmetry of the shape of a beam spot, usually expressed as the aspect ratio of the spot.

[0026] Astigmatism: The difference in focusing ability of a light beam in different directions, reflecting the quality of the light beam.

[0027] A further technical solution is that in step S03, according to the obtained initial roundness, the positive lens rotation mechanism is started, and the roundness is adjusted by adjusting the inclination of the positive lens, and the CCD sensor is measured in real time until the measured roundness meets the set requirements, and the specific operation steps of closing the positive lens rotation mechanism are: S031, establishing a functional relationship between the incident angle of the positive lens when the laser beam passes through and the circularity of the laser spot; The purpose of this step is to determine the effect of the positive lens incident angle on the laser spot circularity. This is achieved by establishing a mathematical model or experimental data relationship.

[0028] Method: The spot circularity data at different incident angles can be obtained experimentally. The tilt angle of the lens is gradually changed, and the CCD sensor is used to record the circularity of the spot at each angle. Then, these data are used to draw a graph or perform curve fitting to find a clear relationship between the incident angle and the spot circularity.

[0029] Importance: This functional relationship is the basis for subsequent adjustments and helps determine how to adjust the lens to achieve the desired spot circularity at a specific angle of incidence.

[0030] S032. Taking the roundness of the laser beam before incident as a reference and combining the functional relationship between the incident angle of the positive lens and the roundness of the laser spot, adjust the tilt angle of the positive lens until the CCD sensor detects that the roundness of the laser spot meets the requirements, and stop adjusting.

[0031] Benchmark setting: First, record the roundness of the laser beam before it is incident as a reference standard. This standard is the benchmark point during the optimization process.

[0032] Combined with the functional relationship: According to the functional relationship between the incident angle and the spot circularity established in step S031, the tilt angle of the positive lens is adjusted. This process may be iterative: after each adjustment of the tilt angle, the circularity of the spot is measured in real time by the CCD sensor.

[0033] Real-time feedback: Using the real-time measurement of the CCD sensor, observe whether the spot circularity is close to the set target value. This real-time feedback mechanism makes the adjustment process dynamic and efficient.

[0034] Stop adjustment condition: Once the measured spot roundness meets the preset requirements, stop adjusting the tilt angle of the lens. At this point, the spot quality of the laser system has reached the optimal state.

[0035] Through the above steps, the quality of the laser beam can be systematically optimized. Step S031 established a theoretical basis for the adjustment process in step S032. The whole process emphasizes the combination of experiment and theory, as well as the importance of real-time feedback in laser system adjustment. Such operation steps help ensure that the laser system can provide high-quality beam output under different working conditions.

[0036] As a further technical solution, the specific process of establishing the functional relationship between the incident angle of the positive lens and the roundness of the laser spot when the laser beam passes through step S031 is as follows: S311, selecting a positive lens of fixed design, and obtaining the curvature radius of the positive lens; S312, obtaining the meridian plane transmission matrix and the sagittal plane transmission matrix in the light transmission matrix of the positive lens, wherein the meridian plane transmission matrix is: , The sagittal plane transfer matrix is: ; S313, applying the meridian plane transfer matrix and the sagittal plane transfer matrix to perform calculations to obtain the meridian plane waist size and the sagittal plane waist size of the laser beam after the tilt lens transformation; wherein the transformed meridian plane waist size and the sagittal plane waist size of the laser beam are functions of the positive lens incident angle θ1; In step S313, the transmission matrix is ​​used to describe the changes of a light beam passing through an optical element (such as a lens) in optics. The meridian plane and the sagittal plane refer to two perpendicular planes passing through the optical axis.

[0037] Calculate the meridional and sagittal beam waist size: By using the transfer matrices of the meridional and sagittal planes, the beam waist size of the laser beam on these two planes after passing through the positive lens can be calculated. These calculations usually depend on the positive lens incident angle θ1, the curvature radius R1 and R2 of the positive lens, and the wavelength and refractive index n of the beam.

[0038] S314, according to the measured roundness of the laser spot before incident, the tilt angle of the positive lens can be adjusted, that is, the incident angle θ1 of the positive lens is adjusted; Influence of roundness: The roundness of the laser spot before incident measured in S031 can be used to determine the quality of the beam and determine how to adjust the incident angle θ1 of the positive lens. The roundness of the spot is an important parameter affecting the quality of the beam, so it is necessary to ensure that the roundness of the spot after passing through the lens meets the requirements by adjusting the tilt angle.

[0039] Adjustment mechanism: Based on the previous calculation results, the positive lens incident angle θ1 is adjusted to achieve the desired beam characteristics.

[0040] S315, after the laser beam is transformed by the positive lens, the laser beam waist is consistent in the meridian plane and the sagittal plane, and the adjustment of the laser roundness is stopped; Consistency requirement: In this step, the goal is to ensure that the laser beam waist after passing through the positive lens remains consistent in the meridian and sagittal planes. That is, after passing through the lens, the shape of the laser spot in both planes should be the same, which generally means that the laser beam has better quality and focusing ability.

[0041] Stop condition: Once the beam waist sizes in the meridian and sagittal planes are consistent, indicating that the beam quality has reached the optimized state, the adjustment of the positive lens can be stopped. This is the ultimate goal of the entire adjustment process.

[0042] Where θ1 is the incident angle of the positive lens; n is the relative refractive index of the laser beam of known wavelength passing through the current material; R1 is the radius of curvature of the first surface of the positive lens, that is, the radius of curvature of the surface incident on the positive lens; R2 is the radius of curvature of the second surface of the positive lens, that is, the radius of curvature of the surface exiting the positive lens.

[0043] In the above scheme, a fixed-design positive lens is selected, and a thin positive lens should be selected. In this case, h is approximately 0. If it is not a thin positive lens, the thickness of the lens needs to be considered, that is, the data before tilting needs to consider more external factors.

[0044] In the above scheme, n is the relative refractive index of a laser beam of known wavelength passing through the current material; here it refers to the relative refractive index of a laser beam of known wavelength passing through a positive lens.

[0045] A further technical solution, step S04, starts the prism rotation mechanism according to the obtained initial astigmatism, and adjusts the astigmatism by adjusting the inclination of the prism, and at the same time the CCD sensor measures in real time until the measured astigmatism meets the set requirements, and then closes the prism rotation mechanism, and the specific operation steps are: S041, obtaining a prism processed into a wedge shape, and guiding a light beam to pass through the prism processed into the wedge shape; S042, obtaining a meridional plane transmission matrix and a sagittal plane transmission matrix in the light transmission matrix of the wedge-shaped prism, wherein the meridional plane transmission matrix is: , The sagittal plane transfer matrix is: ; S043, after guiding the laser light through the prism and positive lens, the equivalent transformation meridian plane transmission matrix is ​​AT= , The sagittal plane transfer matrix is ; S044, obtaining the astigmatism value compensated by the tilted prism and the tilted positive lens as DS=S3S-S3T; S045, according to the laser, Transfer Matrix Theory , convert the astigmatism value DS=S3S-S3T into the functional relationship between the astigmatism value DS and the positive lens incident angle θ1 and the prism incident angle θ2; S046. Obtain the value of the prism incident angle θ2 according to the positive lens incident angle θ1 determined in step S314 and the desired astigmatism.

[0046] in, , is the incident angle of the wedge prism, θ2' is the exit angle of the wedge prism, β is the wedge angle of the wedge prism, d is the optical path in the prism, and l is the distance from the incident point to the vertex of the wedge prism; S1 is the distance from the incident beam waist to the tilt lens, S2 is the distance from the tilt lens to the prism, S3T is the distance from the equivalent beam waist of the transformed meridional plane to the tilt lens, and S3S is the distance from the equivalent beam waist of the transformed sagittal plane to the tilt lens; Z1 is the incident light confocal parameter, and Z2 is the outgoing light confocal parameter; n is the relative refractive index of the laser beam of known wavelength passing through the current material; α is the refraction angle of the laser beam entering the prism; α' is the incident angle of the laser beam from the inside of the prism to the other surface.

[0047] In the above scheme, n is the relative refractive index of a laser beam of known wavelength passing through the current material; here it refers to the relative refractive index of a laser beam of known wavelength passing through a prism.

[0048] A prism is a prism that is processed into a wedge shape.

[0049] Through the above steps, the astigmatism of the laser beam can be accurately compensated. The astigmatism value calculation in S044 provides the necessary basis for subsequent analysis, the functional relationship establishment in S045 provides theoretical support for angle adjustment, and S046 achieves the target astigmatism through specific numerical calculation. The whole process emphasizes the interaction between different elements in the optical system and the importance of optimizing the beam quality by reasonably adjusting the configuration of optical elements.

[0050] In a further technical solution, the setting requires that the astigmatism to be achieved is approximately equal to 0 (ie, the astigmatism close to 0 described in the background technology).

[0051] According to a further technical solution, the value of the prism incident angle θ2 is the prism tilt angle.

[0052] That is, the angle of laser beam irradiation is difficult to adjust, so the angle of laser beam irradiation is adjusted by adjusting the incident angle of the prism.

[0053] The terms “first”, “second”, etc. used in this document do not specifically refer to an order or sequence, nor are they used to limit the present case. They are only used to distinguish components or operations described with the same technical terms.

[0054] As used herein, “connected” or “positioned” may refer to two or more components or devices being in direct physical contact with each other, or being in indirect physical contact with each other, or may refer to two or more components or devices operating or moving with each other.

[0055] The terms “include,” “including,” “have,” etc. used in this document are open-ended terms, meaning including but not limited to.

[0056] The terms used in this document generally have the ordinary meaning of each term used in this field, in the context of the case and in the specific context, unless otherwise noted. Certain terms used to describe the present invention will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the present invention.

[0057] The terms "front", "back", "up", "down", "left", "right", etc. used in this article are all directional terms. In this case, they are only used to illustrate the positional relationship between the various structures, and are not used to limit the protection plan of this case and the specific direction during actual implementation.

[0058] The working principle and advantages of the present invention are as follows: In the present invention, by setting the positive lens and the prism, the astigmatism and the circularity can be corrected, that is, the circularity is corrected first and then the astigmatism is corrected, so as to ensure that the circularity and the astigmatism of the light spot can be close to the ideal state when the laser is used for a long time.

[0059] In the present invention, the real-time dynamic optical path correction is performed by using the first adjusting reflector and the second adjusting reflector, and the monitoring process does not affect the actual processing process.

[0060] In the present invention, the light beam quality can be quickly analyzed by the cooperation of the light interceptor and the CCD sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0061] Attached Figure 1 Schematic diagram of the structure of the detection and adjustment mechanism in an embodiment of the present invention; Attached Figure 2 It is a three-dimensional diagram of the detection and adjustment mechanism in an embodiment of the present invention; Attached Figure 3 is a schematic structural diagram of a laser beam passing through a positive lens in an embodiment of the present invention; Attached Figure 4 is a schematic diagram of the structure of a laser beam passing through a prism in an embodiment of the present invention; Attached Figure 5 It is a schematic diagram of the structure when obtaining data after the laser beam waist, the laser beam waist, and before the laser beam waist in an embodiment of the present invention; Attached Figure 6 is a flow chart of the adjustment method in an embodiment of the present invention; Attached Figure 7The diagram is a schematic diagram of a formula for deriving that the outgoing light beam is offset toward the opposite side of the acute angle of the prism compared with the incident light beam after the light beam passes through the prism in an embodiment of the present invention.

[0062] In the above figures: 1. negative lens; 2. positive lens rotation mechanism; 3. prism rotation mechanism; 4. first adjustment reflector; 5. second adjustment reflector; 6. first beam splitter; 7. second beam splitter; 8. second folding mirror; 9. first folding mirror; 10. focusing mirror; 11. first parallel plate; 12. second parallel plate; 13. CCD sensor; 14. signal processing box; 15. first test light path; 16. second test light path; 17. light blocker. DETAILED DESCRIPTION

[0063] The present invention will be further described below in conjunction with the accompanying drawings and embodiments: Embodiment: The present invention will be clearly described below with diagrams and detailed descriptions. After understanding the embodiments of the present invention, any person skilled in the art can make changes and modifications based on the techniques taught by the present invention without departing from the spirit and scope of the present invention.

[0064] The terms used herein are only for describing specific embodiments and are not intended to be limiting of the present invention. Singular forms such as "a", "this", "here", "this" and "the" as used herein also include plural forms.

[0065] See attached Figure 1-Figure 2 As shown, a laser spot dynamic detection fast adjustment device, the adjustment device includes a substrate and a detection adjustment mechanism arranged on the surface of the substrate, the detection adjustment mechanism includes a negative lens 1, a positive lens rotation mechanism 2 installed with a positive lens, a prism rotation mechanism 3 installed with a prism, a first adjustment reflector 4, a second adjustment reflector 5, a first beam splitter 6, a second beam splitter 7, a first folding mirror 9, a second folding mirror 8, a focusing mirror 10, a first parallel plate 11, a second parallel plate 12, a CCD sensor 13, a signal processing box 14 and a light blocker 17; Along the irradiation direction of the laser beam, the negative lens 1, the positive lens rotating mechanism 2, the prism rotating mechanism 3, the first adjusting reflector 4, the second adjusting reflector 5, the first beam splitter 6 and the second beam splitter 7 are arranged in sequence; When the laser beam is irradiated onto the first beam splitter 6, part of the light passes through the first beam splitter 6 to form a first outgoing light, and another part of the light is reflected on the surface of the first beam splitter 6 to form a first test light path 15; When the first outgoing light passing through the first beam splitter 6 is irradiated onto the second beam splitter 7, part of the first outgoing light passes through the second beam splitter 7 to form an outgoing light path, and another part of the first outgoing light is reflected on the surface of the second beam splitter 7 to form a second test light path 16; The light blocker 17 is disposed on the first test light path 15 and the second test light path 16, and is used to block the first test light path 15 or the second test light path 16; The focusing lens 10, the first parallel plate 11, the second parallel plate 12 and the CCD sensor 13 are sequentially arranged along a straight line and constitute the rear section of the test light path; the first parallel plate 11 and the second parallel plate 12 are movably arranged relative to the substrate, and the first parallel plate 11 and the second parallel plate 12 can respectively enter the rear section of the test light path or avoid it; The first folding mirror 9 is arranged correspondingly to the first beam splitter 6, and reflects the first test light path 15 to the focusing mirror 10; the second folding mirror 8 is arranged correspondingly to the second beam splitter 7, and reflects the second test light path 16 to the focusing mirror 10, i.e., the rear section of the test light path; The CCD sensor 13 is used to measure the roundness and astigmatism of the laser beam; The signal processing box 14 is used to transmit the data measured by the CCD sensor 13 to the computer and receive instructions transmitted by the computer.

[0066] In this embodiment, the base plate is mainly used to fix or place the detection and adjustment mechanism, and is not limited to a plate.

[0067] In this embodiment, "light path" is an optical term, which refers to the path that light takes from a light source, through an optical system (such as a lens, a mirror, etc.) to a specific point.

[0068] The laser beam is divided into four strands when passing through the first beam splitter 6 and the second beam splitter 7, which are referred to as the first strand, the second strand, the third strand and the passing strand in the following description: The laser beam passes through the positive lens rotating mechanism 2, the prism rotating mechanism 3, the first adjusting reflector 4, and the second adjusting reflector 5 and then irradiates the first beam splitter 6. At this time, the laser beam is split into two beams.

[0069] That is, the first beam and the second beam are generated, the first beam is reflected by the first beam splitter 6, transmitted to the first folding mirror 9, and then transmitted to the CCD sensor 13 after passing through the focusing mirror 10, the first parallel plate 11, and the second parallel plate 12, thereby forming a first test optical path 15.

[0070] The second strand will pass through the first beam splitter 6 and illuminate the second beam splitter 7. At this time, the second strand will be divided into two strands, namely the third strand and the passing strand.

[0071] At this time, the outgoing strand passes through the second beam splitter 7 to form an outgoing light path; The third beam is reflected by the second beam splitter 7 and transmitted to the second folding mirror 8 , and then passes through the first folding mirror 9 , the focusing mirror 10 , the first parallel plate 11 , and the second parallel plate 12 before being transmitted to the CCD sensor 13 to form a second test light path 16 .

[0072] Testing the first test optical path 15 and the second test optical path 16 means that the CCD sensor 13 detects the laser beams transmitted along the first test optical path and the second test optical path.

[0073] In some specific embodiments, the first beam splitter 6 and the second beam splitter 7 are both coated with an anti-reflection film of a desired wavelength, and the transmittance is 99.5%; The first fold mirror 9 and the second fold mirror 8 are both coated with a reflective film of a required wavelength, and the reflectivity is greater than 99.9%.

[0074] In the above scheme, the anti-reflection film of the required wavelength refers to the anti-reflection film selected according to the wavelength of the laser beam to increase the transmittance; The reflective film of the required wavelength refers to selecting the reflective film according to the wavelength of the laser beam; increasing the reflectivity.

[0075] See attached Figure 3-Figure 7 As shown, a method for adjusting a fast adjustment device based on dynamic detection of laser spot comprises the following steps: S01, generating a first test optical path 15 and a second test optical path 16 for an incident laser beam, and shielding the second test optical path 16 by a light blocker 17, so that the CCD sensor 13 can only measure the laser beam irradiated along the first test optical path 15; S02, switching the positions of the first parallel plate 11 and the second parallel plate 12 to obtain three sets of measurement data, which are not passed through the two, passed through one of the two, and passed through both, and obtaining the initial roundness and initial astigmatism of the laser beam reflected on the CCD sensor 13 according to the three sets of measurement data; S03, according to the obtained initial roundness, the positive lens rotation mechanism 2 is started, and the roundness is adjusted by adjusting the inclination of the positive lens, and the CCD sensor 13 is measured in real time until the measured roundness meets the set requirements, and then the positive lens rotation mechanism 2 is closed; S04, according to the obtained initial astigmatism, the prism rotating mechanism 3 is started, and the astigmatism is adjusted by adjusting the inclination of the prism, and the CCD sensor 13 is measured in real time until the measured astigmatism meets the set requirements, and then the prism rotating mechanism 3 is closed; S05, continue to block the second test light path 16 by the light blocker 17, and define a coordinate axis on the light beam irradiation plane used by the CCD sensor 13 for detection, the X axis and the Y axis represent the horizontal direction and the vertical direction respectively, and then measure the position of the first light path focus spot formed by the laser beam reflected by the first folding mirror 9 by the CCD sensor 13, and at the same time adjust the first adjustment reflector 4 according to the center point of the first light path focus spot and the center point of the coordinate axis until the center point of the first light path focus spot coincides with the center point of the coordinate axis; S06, adjusting the position of the light blocker 17 to block the first test light path 15, and then measuring the position of the second light path focus spot formed by the laser beam reflected by the second folding mirror 8 by the CCD sensor 13, and adjusting the second adjustment reflector 5 according to the center point of the second light path focus spot and the center point of the coordinate axis, until the center point of the second light path focus spot coincides with the center point of the coordinate axis; S07. After the center point of the focused light spot on the first optical path and the center point of the focused light spot on the second optical path coincide with the center point of the coordinate axis, the first test optical path 15 and the second test optical path 16 are output in a coaxial manner.

[0076] In this embodiment, the first test optical path 15 and the second test optical path 16 are output in a coaxial manner, which means that the laser beams transmitted along the first test optical path 15 and the second test optical path 16 are output in a coaxial manner.

[0077] In this embodiment, the first optical path focused spot and the second optical path focused spot refer to the spot shape and size formed by the laser beam transmitted along the first test optical path 15 and the second test optical path 16 on the measurement plane on the CCD sensor (that is, the irradiation plane of the coordinate axis defined above).

[0078] In this embodiment, the first fold mirror 9 and the second fold mirror 8 have different corresponding optical paths, and the final optical path alignment can be determined by the two optical paths. Specifically, the first fold mirror 9 can be a semi-transparent semi-reflective mirror, and the second fold mirror 8 can be a conventional fold mirror.

[0079] The focusing mirror 10 is used to accurately fit the laser beam quality, including astigmatism and roundness. At least three points are required. Adding a focusing mirror can increase the focus. Selecting the light spot before, after and above the focus is more conducive to fitting the laser beam distribution.

[0080] The refractive index of the two parallel plates is generally 1.5, and the optical path from the focusing lens to the CCD sensor 13 is equivalently changed by adding the parallel plates, without moving the CCD sensor 13.

[0081] In general, two test light paths are set because the principle is similar to that of two points determining a straight line. The two light paths correspond to the points where the first beam splitter 6 and the second beam splitter 7 illuminate the CCD sensor 13. Once the light spots at these two points are consistent, the beam is collimated.

[0082] The first beam splitter 6 and the second beam splitter 7 are only configured to split about 0.25% of the laser beam for measurement, and the unsplit beam is the pass-through strand.

[0083] Because the light beam needs to pass through the first adjustment reflector 4 and then the second adjustment reflector 5; After adjusting the first adjusting reflector 4 so that the center point of the focused light spot of the first light path coincides with the center point of the coordinate axis; If the second adjustment reflector 5 is adjusted again, the position of the focused light spot of the first optical path should change along with the second adjustment reflector 5, so multiple adjustments are required to make the points of the two optical paths centered. The purpose of making the points of the two optical paths centered is to adjust the collimation of the light beam so that the light beam always emits in a fixed spatial reverse direction, so that the divergence angle of the collimated light beam is small, the energy is concentrated, and the directionality is good, which is conducive to improving the performance of the optical system. At the same time, the fixed spatial reverse emission ensures the stability of the light beam path and direction, reduces environmental interference, and improves system reliability.

[0084] The beam irradiation plane is generally perpendicular to the incoming laser beam.

[0085] In some specific implementations, step S02 includes: S021, guiding the first parallel plate 11 and the second parallel plate 12 to avoid the first test light path 15, and the CCD sensor 13 directly detects the first test light path 15 to measure a first set of data, namely, the spot roundness and astigmatism value behind the laser beam waist; S022, guiding one of the first parallel plate 11 and the second parallel plate 12 into the first test optical path 15, so that the laser beam passes through the first parallel plate 11 or the second parallel plate 12 and reaches the CCD sensor 13, so as to measure a second set of data, namely, the spot roundness and astigmatism value of the laser beam waist; S023, guiding the first parallel plate 11 and the second parallel plate 12 to be in the first test optical path 15, so that the laser beam passes through the first parallel plate 11 and the second parallel plate 12 and reaches the CCD sensor 13, so as to measure a third set of data, namely, the spot circularity and astigmatism value before the laser beam waist; S024. Use the three sets of data obtained and apply the theory of Gaussian optics to obtain a detailed description of the laser beam, including the beam waist radius, circularity and astigmatism.

[0086] In step S021, neither of the two parallel plates is in the optical path. The CCD sensor directly receives the laser beam and records the initial state of the laser beam (i.e., the characteristics of the spot after the laser beam waist). This set of data will be used as a benchmark for subsequent comparisons. The measured spot circularity and astigmatism values ​​will reflect the quality of the laser beam before it passes through any optical element.

[0087] In step S022, one of the parallel plates is placed in the optical path. When the laser beam passes through this plate and reaches the CCD sensor, the characteristics of the light spot are recorded. This will provide numerical values ​​for the roundness and astigmatism of the laser beam after passing through a parallel plate.

[0088] In step S023, the two parallel plates are in the optical path. After the laser beam passes through the two plates, it reaches the CCD sensor, and the recorded light spot characteristics will reflect the state of the beam after passing through the two parallel plates.

[0089] S024 is the stage of data analysis and result extraction. By summarizing the previous three sets of data and applying Gaussian optics theory (which is suitable for describing the propagation characteristics of laser beams), the detailed parameters of the laser beam can be analyzed: Beam Waist Radius: The width of the beam at its minimum diameter.

[0090] Roundness: The symmetry of the shape of a beam spot, usually expressed as the aspect ratio of the spot.

[0091] Astigmatism: The difference in focusing ability of a light beam in different directions, reflecting the quality of the light beam.

[0092] refer to Figure 3 In order to make the structure compact, the thickness of the positive lens is relatively thin, so the positive lens can be treated as a thin positive lens.

[0093] The thickness of a thin positive lens can be equivalent to h = 0. The incident angle of the positive lens is equal to the tilt angle θ1.

[0094] In some specific implementations, step S03 includes: S031, establishing a functional relationship between the incident angle of the positive lens when the laser beam passes through and the circularity of the laser spot; The purpose of this step is to determine the effect of the positive lens incident angle θ1 on the laser spot circularity. This is achieved by establishing a mathematical model or experimental data relationship.

[0095] Method: The spot circularity data at different incident angles can be obtained experimentally. The tilt angle of the lens is gradually changed, and the CCD sensor is used to record the circularity of the spot at each angle. Then, these data are used to draw a graph or perform curve fitting to find a clear relationship between the incident angle and the spot circularity.

[0096] Importance: This functional relationship is the basis for subsequent adjustments and helps determine how to adjust the lens to achieve the desired spot circularity at a specific angle of incidence.

[0097] S032, taking the roundness of the laser beam before incident as a reference and combining the functional relationship between the incident angle of the positive lens and the roundness of the laser spot, adjusting the tilt angle of the positive lens until the CCD sensor 13 detects that the roundness of the laser spot meets the requirements and stops adjusting.

[0098] Benchmark setting: First, record the roundness of the laser beam before it is incident as a reference standard. This standard is the benchmark point during the optimization process.

[0099] Combined functional relationship: According to the functional relationship between the incident angle and the spot circularity established in step S031, the tilt angle of the positive lens is adjusted. This process may be iterative: after each adjustment of the tilt angle, the circularity of the spot is measured in real time by the CCD sensor.

[0100] Real-time feedback: Using the real-time measurement of the CCD sensor, observe whether the spot circularity is close to the set target value. This real-time feedback mechanism makes the adjustment process dynamic and efficient.

[0101] Stop adjustment condition: Once the measured spot roundness meets the preset requirements, stop adjusting the tilt angle of the lens. At this point, the spot quality of the laser system has reached the optimal state.

[0102] Through the above steps, the quality of the laser beam can be systematically optimized. Step S031 established a theoretical basis for the adjustment process in step S032. The whole process emphasizes the combination of experiment and theory, as well as the importance of real-time feedback in laser system adjustment. Such operation steps help ensure that the laser system can provide high-quality beam output under different working conditions.

[0103] In some specific implementations, the specific process of establishing the functional relationship between the incident angle of the positive lens and the circularity of the laser spot when the laser beam passes through step S031 is as follows: S311, selecting a positive lens of fixed design, and obtaining the curvature radius of the positive lens; S312, obtaining the meridian plane transmission matrix and the sagittal plane transmission matrix in the light transmission matrix of the positive lens, wherein the meridian plane transmission matrix is: , The sagittal plane transfer matrix is: ; S313, applying the meridian plane transfer matrix and the sagittal plane transfer matrix to perform calculations to obtain the meridian plane waist size and the sagittal plane waist size of the laser beam after the tilt lens transformation; wherein the transformed meridian plane waist size and the sagittal plane waist size of the laser beam are functions of the positive lens incident angle θ1; S314, according to the measured roundness of the laser spot before incident, the tilt angle of the positive lens can be adjusted, that is, the incident angle θ1 of the positive lens is adjusted; S315, after the laser beam is transformed by the positive lens, the laser beam waist is consistent in the meridian plane and the sagittal plane, and the adjustment of the laser roundness is stopped; Where θ1 is the incident angle of the positive lens; n is the relative refractive index of the laser beam of known wavelength passing through the current material; R1 is the radius of curvature of the first surface of the positive lens, that is, the radius of curvature of the surface incident on the positive lens; R2 is the radius of curvature of the second surface of the positive lens, that is, the radius of curvature of the surface exiting the positive lens.

[0104] In step S313, the transmission matrix is ​​used to describe the changes of a light beam passing through an optical element (such as a lens) in optics. The meridian plane and the sagittal plane refer to two perpendicular planes passing through the optical axis.

[0105] Calculate the beam waist size in the meridional and sagittal planes: By using the transmission matrices of the meridional and sagittal planes, the beam waist size of the laser beam in these two planes after passing through the positive lens can be calculated.

[0106] Functional relationship: There is a certain functional relationship between the calculated meridian and sagittal plane waist sizes and the incident angle θ1, that is, the transformed meridian plane waist size and sagittal plane waist size of the laser beam are functions of the positive lens incident angle θ1.

[0107] Influence of roundness in step S314: The roundness of the laser spot before incident measured in S031 can be used to determine the quality of the beam and determine how to adjust the incident angle θ1 of the positive lens. The roundness of the spot is an important parameter affecting the quality of the beam, so it is necessary to ensure that the roundness of the spot after passing through the positive lens meets the requirements by adjusting the tilt angle.

[0108] Adjustment mechanism: Based on the previous calculation results, the incident angle θ1 is adjusted to achieve the desired beam characteristics.

[0109] In step S315, consistency requirement: In this step, the goal is to ensure that the laser beam waist after passing through the positive lens remains consistent in the meridian plane and the sagittal plane. That is, after passing through the lens, the shape of the laser spot on the two planes should be the same, which usually means that the laser beam has better quality and focusing ability.

[0110] Stop condition: Once the beam waist sizes in the meridian and sagittal planes are consistent, indicating that the beam quality has reached the optimized state, the adjustment of the positive lens can be stopped. This is the ultimate goal of the entire adjustment process.

[0111] It should be noted that in the above scheme, when a positive lens with a fixed design is selected, a thin positive lens should be selected. In this case, h is approximately 0. In the case of a non-thin positive lens, the thickness of the lens needs to be considered, that is, the data before tilting needs to consider more external factors.

[0112] In the above scheme, n is the relative refractive index of a laser beam of known wavelength passing through the current material; here it refers to the relative refractive index of a laser beam of known wavelength passing through a positive lens.

[0113] In some specific implementations, step S04, based on the obtained initial astigmatism, the prism rotation mechanism 3 is started, and the astigmatism is adjusted by adjusting the inclination of the prism, and the CCD sensor 13 is measured in real time until the measured astigmatism meets the set requirements, and then the prism rotation mechanism 3 is closed. The specific operation steps are: S041, obtaining a prism processed into a wedge shape, and guiding a light beam to pass through the prism processed into the wedge shape; S042, obtaining a meridional plane transmission matrix and a sagittal plane transmission matrix in the light transmission matrix of the wedge-shaped prism, wherein the meridional plane transmission matrix is: , The sagittal plane transfer matrix is: ; S043, after guiding the laser light through the prism and positive lens, the equivalent transformation meridian plane transmission matrix is ​​AT= , The sagittal plane transfer matrix is ; S044, obtaining the astigmatism value compensated by the tilted prism and the tilted positive lens as DS=S3S-S3T; S045, according to laser Transfer Matrix Theory , convert the astigmatism value DS=S3S-S3T into the functional relationship between the astigmatism value DS and the positive lens incident angle θ1 and the prism incident angle θ2; S046. Obtain the value of the prism incident angle θ2 according to the positive lens incident angle θ1 determined in step S314 and the desired astigmatism.

[0114] in, , is the incident angle of the wedge prism, θ2' is the exit angle of the wedge prism, β is the wedge angle of the wedge prism, d is the optical path in the prism, and l is the distance from the incident point to the vertex of the wedge prism; S1 is the distance from the incident beam waist to the tilt lens, S2 is the distance from the tilt lens to the prism, S3T is the distance from the equivalent beam waist of the transformed meridional plane to the tilt lens, and S3S is the distance from the equivalent beam waist of the transformed sagittal plane to the tilt lens; Z1 is the incident light confocal parameter, and Z2 is the outgoing light confocal parameter; n is the relative refractive index of the laser beam of known wavelength passing through the current material; α is the refraction angle of the laser beam entering the prism; α' is the incident angle of the laser beam from the inside of the prism to the other surface.

[0115] In the above scheme, since n is the relative refractive index of a laser beam of known wavelength passing through the current material, this refers to the relative refractive index of a laser beam of known wavelength passing through the prism.

[0116] A prism is a prism that is processed into a wedge shape.

[0117] Through the above steps, the astigmatism of the laser beam can be accurately compensated. The astigmatism value calculation in S044 provides the necessary basis for subsequent analysis, the functional relationship establishment in S045 provides theoretical support for angle adjustment, and S046 achieves the target astigmatism through specific numerical calculation. The whole process emphasizes the interaction between different elements in the optical system and the importance of optimizing the beam quality by reasonably adjusting the configuration of optical elements.

[0118] In some specific embodiments, Figure 4 and Figure 7 As shown, referring to step S05 and step S06, when the astigmatism and the roundness are adjusted, if there is no first adjustment reflector 4 and second adjustment reflector 5, the first test light path and the second test light path cannot be output in a coaxial manner, and when adjusting the first adjustment reflector 4 and the second adjustment reflector 5, the angle of the laser beam irradiated to the first adjustment reflector 4 can be quickly adjusted (the angle is the angle after the prism is deflected, that is, the angle at which the outgoing light beam after the light beam passes through the prism is offset toward the opposite side of the acute angle of the prism compared with the incident light beam), and the angle is described below: When there is a fixed wedge angle β and a distance l from the incident point to the vertex of the wedge prism (that is, a prism processed into a wedge shape is obtained, and the various parameters of this prism are known), refer to Figure 4 and Figure 7 , create a new auxiliary line N, which is parallel to the original side M; angle B is parallel to both sides of angle C, then angle B is equal to angle C, B=90-θ2=C; angle A=β; D=90-A=90-β; E=CD=β-θ; so the output deflection angle is equal to θ2'-β+θ2.

[0119] In some specific implementations, the setting requires that the astigmatism to be achieved is approximately equal to zero.

[0120] In some specific embodiments, the value of the prism incident angle θ2 is the prism tilt angle, that is, the angle of the laser beam irradiation is difficult to adjust, so the angle of the laser beam irradiation is adjusted by adjusting the prism incident angle.

[0121] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with the technology to understand the content of the present invention and implement it accordingly, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A laser spot dynamic detection and rapid adjustment device, characterized in that: The invention comprises a substrate and a detection and adjustment mechanism arranged on the substrate, wherein the detection and adjustment mechanism comprises a negative lens, a positive lens rotation mechanism equipped with a positive lens, a prism rotation mechanism equipped with a prism, a first adjustment reflector, a second adjustment reflector, a first beam splitter, a second beam splitter, a light blocker, a first folding mirror, a second folding mirror, a focusing mirror, a first parallel plate, a second parallel plate, a CCD sensor and a signal processing box; Along the irradiation direction of the laser beam, the negative lens, the positive lens rotation mechanism, the prism rotation mechanism, the first adjustment reflector, the second adjustment reflector, the first beam splitter and the second beam splitter are arranged in sequence; When the laser beam is irradiated onto the first beam splitter, part of the light passes through the first beam splitter to form a first outgoing light, and another part of the light is reflected on the surface of the first beam splitter to form a first test light path; when the first outgoing light is irradiated onto the second beam splitter, part of the first outgoing light passes through the second beam splitter to form an outgoing light path, and another part of the first outgoing light is reflected on the surface of the second beam splitter to form a second test light path; The light blocker is arranged on the first test light path and the second test light path, and is used to block the first test light path or the second test light path; The focusing mirror, the first parallel plate, the second parallel plate and the CCD sensor are sequentially arranged along a straight line to form the rear section of the test light path; the first parallel plate and the second parallel plate are movably arranged relative to the substrate so that they can enter the rear section of the test light path or avoid it; The first folding mirror is arranged correspondingly to the first beam splitter, and reflects the first test light path toward the focusing mirror; the second folding mirror is arranged correspondingly to the second beam splitter, and reflects the second test light path toward the focusing mirror; CCD sensors are used to measure the roundness and astigmatism of laser beams; The signal processing box is used to transmit the data measured by the CCD sensor to the computer and receive the instructions transmitted by the computer.

2. The laser spot dynamic detection and rapid adjustment device according to claim 1 is characterized in that: The first beam splitter and the second beam splitter are both coated with an anti-reflection film of the required wavelength, and the transmittance is 99.5%; The first folding mirror and the second folding mirror are both coated with a reflective film of a required wavelength, and the reflectivity is greater than 99.9%.

3. A method for adjusting the laser spot dynamic detection fast adjustment device according to any one of claims 1 to 2, characterized in that: The steps include: S01, generating a first test optical path and a second test optical path for an incident laser beam, and shielding the second test optical path by a light blocker, so that the CCD sensor can only measure the laser beam irradiated along the first test optical path; S02, switching the positions of the first parallel plate and the second parallel plate to obtain three sets of measurement data, which are not passed through the two, passed through one of the two, and passed through the two, and obtaining the initial roundness and initial astigmatism of the laser beam reflected on the CCD sensor according to the three sets of measurement data; S03, according to the obtained initial roundness, start the positive lens rotation mechanism, and adjust the roundness by adjusting the inclination of the positive lens, while the CCD sensor measures in real time until the measured roundness meets the set requirements, and then close the positive lens rotation mechanism; S04, starting the prism rotation mechanism according to the obtained initial astigmatism, and adjusting the astigmatism by adjusting the inclination of the prism, while the CCD sensor measures in real time until the measured astigmatism meets the set requirements, and then closing the prism rotation mechanism; S05, continue to block the second test light path by the light blocker, and define a coordinate axis on the light beam irradiation plane used by the CCD sensor for detection, where the X-axis and the Y-axis represent the horizontal direction and the vertical direction respectively, and then measure the position of the first light path focus spot formed by the laser beam reflected by the first folding mirror by the CCD sensor, and at the same time adjust the first adjustment reflector according to the center point of the first light path focus spot and the center point of the coordinate axis until the center point of the first light path focus spot coincides with the center point of the coordinate axis; S06, adjusting the position of the light blocker to block the first test light path, and then measuring the position of the second light path focus spot formed by the laser beam reflected by the second folding mirror by the CCD sensor, and adjusting the second adjustment reflector according to the center point of the second light path focus spot and the center point of the coordinate axis until the center point of the second light path focus spot coincides with the center point of the coordinate axis; S07. After the center point of the focused light spot on the first optical path and the center point of the focused light spot on the second optical path coincide with the center point of the coordinate axis, the first test optical path and the second test optical path are output in a coaxial manner.

4. The adjustment method of the laser spot dynamic detection fast adjustment device according to claim 3 is characterized in that: Step S02 includes: S021, guiding the first parallel plate and the second parallel plate to avoid the first test light path, and the CCD sensor directly detects the first test light path to measure a first set of data, namely, the spot circularity and astigmatism value behind the laser beam waist; S022, guiding one of the first parallel plate and the second parallel plate into a first test optical path, so that the laser beam passes through the first parallel plate or the second parallel plate and reaches a CCD sensor, so as to measure a second set of data, namely, a spot circularity and an astigmatism value of the laser beam waist; S023, guiding the first parallel plate and the second parallel plate to enter the first test optical path, so that the laser beam passes through the first parallel plate and the second parallel plate and reaches the CCD sensor, so as to measure a third set of data, namely, the spot circularity and astigmatism value before the laser beam waist; S024. Using the three sets of data obtained and applying the theory of Gaussian optics, a detailed description of the laser beam is obtained; A detailed description of the laser beam includes the beam waist radius, circularity, and astigmatism.

5. The adjustment method of the laser spot dynamic detection fast adjustment device according to claim 3, characterized in that: Step S03 includes: S031. Establishing a functional relationship between the incident angle of the positive lens and the circularity of the laser spot when the laser beam passes through; S032. Taking the roundness of the laser beam before incident as a reference and combining the functional relationship between the incident angle of the positive lens and the roundness of the laser spot, adjust the tilt angle of the positive lens until the CCD sensor detects that the roundness of the laser spot meets the requirements, and stop adjusting.

6. The adjustment method of the laser spot dynamic detection fast adjustment device according to claim 5, characterized in that: Step S031 includes: S311, selecting a positive lens of fixed design, and obtaining the curvature radius of the positive lens; S312, obtaining the meridian plane transmission matrix and the sagittal plane transmission matrix in the light transmission matrix of the positive lens, wherein the meridian plane transmission matrix is: , The sagittal plane transfer matrix is: ; S313, using the meridian plane transfer matrix and the sagittal plane transfer matrix to perform calculations to obtain the meridian plane waist size and the sagittal plane waist size of the laser beam after the tilt lens transformation; wherein the transformed meridian plane waist size and the sagittal plane waist size of the laser beam are functions of the positive lens incident angle θ1; S314, according to the measured roundness of the laser spot before incident, the tilt angle of the positive lens can be adjusted, that is, the incident angle θ1 of the positive lens is adjusted; S315, after the laser beam is transformed by the positive lens, the laser beam waist is consistent in the meridian plane and the sagittal plane, and the adjustment of the laser roundness is stopped; Where θ1 is the incident angle of the positive lens; n is the relative refractive index of the laser beam of known wavelength passing through the current material; R1 is the radius of curvature of the first surface of the positive lens, that is, the radius of curvature of the surface incident on the positive lens; R2 is the radius of curvature of the second surface of the positive lens, that is, the radius of curvature of the surface exiting the positive lens.

7. The adjustment method of the laser spot dynamic detection fast adjustment device according to claim 3, characterized in that: Step S04 includes: S041, obtaining a prism processed into a wedge shape, and guiding a light beam to pass through the prism processed into the wedge shape; S042, obtaining a meridian plane transmission matrix and a sagittal plane transmission matrix in the light transmission matrix of the wedge-shaped prism, wherein the meridian plane transmission matrix is: , the sagittal plane transfer matrix is: ; S043, after guiding the laser light through the prism and positive lens, the equivalent transformation meridian plane transmission matrix is ​​AT= , the sagittal plane transfer matrix is ; S044, obtaining the astigmatism value compensated by the tilted prism and the tilted positive lens as DS=S3S-S3T; S045, according to laser Transfer Matrix Theory, Convert the astigmatism value DS=S3S-S3T into the functional relationship between the astigmatism value DS and the incident angle θ1 of the positive lens and the incident angle θ2 of the prism; S046, according to the positive lens incident angle θ1 determined in step S314, and setting the required astigmatism to obtain the value of the prism incident angle θ2, wherein, ; is the incident angle of the wedge prism, θ2' is the exit angle of the wedge prism, β is the wedge angle of the wedge prism, d is the optical path in the prism, and l is the distance from the incident point to the vertex of the wedge prism; S1 is the distance from the incident beam waist to the tilt lens, S2 is the distance from the tilt lens to the prism, S3T is the distance from the equivalent beam waist of the transformed meridional plane to the tilt lens, and S3S is the distance from the equivalent beam waist of the transformed sagittal plane to the tilt lens; Z1 is the incident light confocal parameter, and Z2 is the outgoing light confocal parameter; n is the relative refractive index of the laser beam of known wavelength passing through the current material; α is the refraction angle of the laser beam entering the prism; α' is the incident angle of the laser beam from the inside of the prism to the other surface.

8. The adjustment method of the laser spot dynamic detection fast adjustment device according to claim 7, characterized in that: The setting requires that the astigmatism to be achieved is approximately equal to zero.

9. The adjustment method of the laser spot dynamic detection fast adjustment device according to claim 7, characterized in that: The value of the prism incident angle θ2 is the prism tilt angle.

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