Wafer surface cleaning equipment and method for driving brush to clean wafer

Abstract

The invention belongs to the wafer cleaning equipment technology, and particularly relates to wafer surface cleaning equipment and a method for driving a brush to clean a wafer. The wafer surface cleaning equipment comprises a platform, a swing arm rotating shaft, a protective cover, a bearing seat, a rotating rod and a brush; the driving mechanism is arranged at the lower end of the platform; the cooling mechanism is arranged in the protective cover; the tensioning mechanism is arranged in the protective cover; wherein the cooling mechanism comprises a refrigeration box, the refrigeration box is fixedly installed on the bottom face of the protective cover, cooling transmission parts are fixedly installed at the two ends of the protective cover, liquid conveying parts are arranged between the refrigeration box and the cooling transmission parts, and an air cooling part is arranged at the lower end of the protective cover. The transmission stability is enhanced by optimizing the motor layout, an automatic tensioning and warning mechanism is arranged, the precision, stability and reliability of the wafer cleaning process are remarkably improved, and meanwhile the maintenance difficulty and cost are reduced.

Description

Technical Field

[0001] The invention belongs to the technology of wafer cleaning equipment, and in particular relates to a wafer surface cleaning equipment and a method for driving a brush to clean a wafer. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits. Its raw material is silicon. High-purity polysilicon is dissolved and doped with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing and slicing, the silicon crystal rod is formed into a silicon wafer, that is, a wafer. In the field of semiconductor manufacturing, wafer surface cleaning is a crucial process and plays an irreplaceable role in ensuring product quality and performance.

[0003] However, the brush cleaning structure currently used by most manufacturers generally has the motor that drives the brush placed above the swing arm. During the cleaning process, the increased weight of the swing arm will aggravate the shaking of the swing arm, which will have a significant impact on the cleaning effect and will also affect the strength of the swing arm structure. In addition, traditional transmission structures such as belts and chains often lack effective anti-deviation measures, and the tension decreases due to wear and tear after long-term operation. These factors will affect the stability and accuracy of the transmission, and thus affect the cleaning effect. In addition, the transmission parts will generate a lot of heat during long-term operation. If they are not effectively cooled, the aging of the parts will be accelerated and the life of the equipment will be shortened. Summary of the invention

[0004] The purpose of the present invention is to provide a wafer surface cleaning device and a method for driving a brush to clean a wafer, which can enhance the transmission stability by optimizing the motor layout and is equipped with an automatic tensioning and warning mechanism, thereby significantly improving the accuracy, stability and reliability of the wafer cleaning process, while reducing the maintenance difficulty and cost.

[0005] The technical solution adopted by the present invention is as follows: A wafer surface cleaning device comprises a platform, a circular protective shell is arranged on the top surface of the platform, a swing arm shaft is rotatably arranged on the platform, a protective cover is fixedly connected to the upper end of the swing arm shaft, and a sealing cover is arranged on the upper end of the protective cover; A driving mechanism, which is arranged at the lower end of the platform and is operated by a driving device; A bearing seat, the bearing seat is mounted on the bottom surface of the protective cover, a rotating rod is rotatably connected to the bearing seat, and the upper end of the rotating rod extends into the protective cover and is rotatably connected to the protective cover, and a brush is installed at the lower end of the rotating rod; A cooling mechanism, which is disposed in the protective cover and is used to cool the transmission assembly; A tensioning mechanism, the tensioning mechanism is arranged in the protective cover and is used for tensioning the transmission component; Wherein, the cooling mechanism includes a refrigeration box, which is fixedly installed on the bottom surface of the protective cover, cooling transmission parts are fixedly installed on both ends of the protective cover, an infusion part is arranged between the refrigeration box and the cooling transmission part, and an air cooling part is arranged at the lower end of the protective cover.

[0006] In a preferred embodiment, the driving mechanism includes a swing arm motor and a brush motor, both of which are installed on the bottom surface of the platform, a first driving gear is fixedly installed on the upper end of the output shaft of the swing arm motor, and a second driving gear is fixedly installed on the lower end of the output shaft of the brush motor, the internal rotation of the swing arm shaft is connected to a driving rod, and the upper end of the driving rod extends into a protective cover and is rotationally connected to the protective cover, a first driven gear is fixedly installed on the outer wall of the lower end of the swing arm shaft, and a second driven gear is fixedly installed on the lower end of the driving rod.

[0007] In a preferred embodiment, the cooling transmission part includes a linkage shaft, and the two linkage shafts are respectively connected to the upper ends of the rotating rod and the driving rod, and the upper ends of the linkage shafts are inserted with a limiting plate, and the bottom surface of the limiting plate is rotatably connected with a rotating ring, and the upper end of the linkage shaft is threadedly connected with a fastening bolt, and the middle end of the linkage shaft is equipped with a first transmission gear, and the lower end of the linkage shaft is rotatably connected with a limiting seat, and the bottom surface of the limiting seat is fixedly connected to the bottom surface of the inner cavity of the protective cover by a support rod, and a cooling shell is rotatably connected in the limiting seat, and a water inlet pipe and a water outlet pipe are connected to the limiting seat.

[0008] In a preferred embodiment, the infusion part includes a water pump, which is installed on the front of the refrigeration box, and the water pumping end of the water pump is connected to the refrigeration box, and the water discharge end of the water pump is connected to a water pipe, one end of the water pipe extends into the protective cover and is connected to two groups of diversion pipes, and the other ends of the two groups of diversion pipes are respectively connected to two water inlet pipes, and two return pipes are connected to the back of the refrigeration box, and the other end of the return pipe is connected to the water outlet pipe.

[0009] In a preferred embodiment, the air cooling part includes a driving motor, which is installed on the bottom surface of the protective cover, and a second transmission gear is fixedly installed on the output shaft of the driving motor. A ventilation groove is opened on the bottom surface of the protective cover, and a bracket is fixedly connected to the inner wall of the ventilation groove, and a round rod is rotatably connected to the center of the bracket, a fan blade is fixedly installed on the upper end of the round rod, a filter plate is fixedly connected to the lower end of the ventilation groove, and the filter plate is rotatably connected to the round rod, a third transmission gear is fixedly installed on the lower end of the round rod, and a brush plate is also installed on the lower end of the round rod.

[0010] In a preferred embodiment, the tensioning mechanism includes a support seat, which is connected to the bottom surface of the inner cavity of the protective cover, the top surface of the support seat is fixedly connected with a vertical plate, the side surface of the vertical plate is fixedly connected with a spring, the other end of the spring is fixedly connected with a U-shaped seat, the U-shaped seat is rotatably connected with a tensioning wheel, the side surface of the vertical plate is also connected with a guide rod, the guide rod is slidably connected with a guide block, and the guide block is fixedly connected to the U-shaped seat, the top surface of the support seat is also installed with a contact switch, and the bottom surface of the U-shaped seat is fixedly connected with a resistance block.

[0011] In a preferred solution, the swing arm shaft is made of SUS material, and a Teflon coating is sprayed on the outside of the swing arm shaft.

[0012] In a preferred embodiment, a warning light is installed on the front of the protective cover, and the warning light is electrically connected to the contact switch.

[0013] A method for cleaning a wafer using a driven brush for cleaning the wafer surface is applied to the above-mentioned wafer surface cleaning device, comprising the following steps: Step 1: Start the swing arm motor to drive the first drive gear to rotate, and drive the swing arm shaft to rotate through gear meshing transmission, start the brush motor to drive the second drive gear to rotate, and drive the drive rod to rotate through gear meshing transmission; Step 2: The rotation of the driving rod drives the linkage shaft to rotate, and the first transmission gears on the two linkage shafts rotate synchronously through the toothed belt; Step 3: The rotation of the left linkage shaft drives the rotating rod to rotate, and the rotation of the rotating rod drives the brush to rotate to start cleaning the wafer; Step 4: Place the swing arm motor and brush motor on the bottom of the platform to optimize the center of gravity of the swing arm and reduce vibration during operation; Step 5: Set a limit plate and a limit seat on the toothed belt to prevent the toothed belt from running off the track and improve the running stability. When installing the toothed belt, fix the limit plate with the fastening bolt to ensure that the toothed belt is effectively limited; Step 6: Use the refrigeration box to cool the coolant. The coolant is pumped out by a water pump and enters the limit seat through the water pipe, the shunt pipe and the water inlet pipe. The coolant enters the cooling shell to cool the first transmission gear and the toothed belt. Then, the coolant flows into the upper end of the limit seat along the outer ring slot of the cooling shell, is discharged into the return pipe through the outlet pipe, and finally flows back to the refrigeration box for circulation cooling. Step 7: The driving motor drives the fan blades to rotate, blowing cold air into the protective cover to further reduce the temperature of the first transmission gear and the toothed belt. The rotation of the round rod also drives the brush plate to rotate, clean the filter plate, prevent blockage, and ensure the air circulation speed; Step 8: The two tension wheels ensure that the toothed belt fits tightly against the first transmission gear to prevent slipping or loosening. When the toothed belt is severely loose, the warning light will be triggered to light up, prompting the staff to perform maintenance or repair in time.

[0014] The technical effects achieved by the present invention are: The present invention effectively places the center of gravity of the swing arm near the axis of the swing arm's rotating shaft by placing the motor that drives the brush to rotate below the overall structure of the cleaning swing arm. This design reduces the weight at the end of the swing arm, thereby significantly reducing the inertia of the swing arm based on the rotating shaft during operation. This means that the jitter and setbacks of the swing arm during operation are significantly reduced, thereby improving the accuracy and stability of the cleaning process. This is especially important for wafers that require high-precision cleaning, as it ensures consistency in cleaning quality and effect; at the same time, the design of placing the motor below the swing arm also helps protect the motor from contamination, reduces maintenance difficulty, and ensures the safety of maintenance personnel; The present invention not only ensures the stable operation of the toothed belt, but also effectively prevents the toothed belt from running off during operation by arranging a limit plate above the toothed belt and a limit seat below the toothed belt. In addition, by using a cooling system to cool the transmission components, the high temperature problem caused by long-term transmission can be effectively avoided, thereby reducing equipment wear and enhancing the stability and durability of the system. The automatic tensioning mechanism of the present invention can ensure that the transmission belt is always in a properly tensioned state. Even if the belt becomes loose due to wear or elongation, the tension wheel can automatically adjust the tension to maintain a normal tension level. This can not only reduce vibration and noise, but also improve transmission efficiency and extend the service life of transmission components. When the belt becomes loose to a certain extent, the warning system will promptly remind the staff to perform necessary maintenance or replacement, further ensuring the reliability and work efficiency of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the installation of the platform and the driving structure of the present invention; Figure 3 The present invention Figure 2 Bottom view of Figure 4 It is a schematic structural diagram of the protective cover of the present invention; Figure 5 The present invention Figure 4 Schematic diagram of disassembly of the middle sealing cover; Figure 6 The present invention Figure 5 Rear view of Figure 7 It is a schematic diagram of the connection of two cooling transmission parts of the present invention; Figure 8 is a cross-sectional view of the cooling transmission part of the present invention; Fig. 9 is an exploded view of the cooling transmission part of the present invention; Fig.10 The present invention Fig. 9 Bottom view of Fig.11 is a cross-sectional view of a cooling shell of the present invention; Fig.12 is a cross-sectional view of the protective cover 3 of the present invention; Fig.13 The present invention Fig.12 An enlarged schematic diagram of part A shown in FIG. Fig.14 It is a structural schematic diagram of the tensioning mechanism of the present invention; Fig.15 The present invention Fig.14 Front view of .

[0016] In the accompanying drawings, the components represented by the reference numerals are listed as follows: 1. Platform; 2. Swing arm shaft; 3. Protective cover; 31. Sealing cover; 4. Driving mechanism; 5. Bearing seat; 6. Rotating rod; 7. Brush; 8. Cooling mechanism; 9. Tensioning mechanism; 10. Warning light; 401, swing arm motor; 402, first driving gear; 403, brush motor; 404, second driving gear; 405, driving rod; 406, first driven gear; 407, second driven gear; 81. Refrigeration box; 82. Cooling transmission unit; 83. Infusion unit; 84. Air cooling unit; 821, linkage shaft; 822, limit plate; 823, rotating ring; 824, fastening bolt; 825, first transmission gear; 826, limit seat; 827, cooling shell; 828, water inlet pipe; 829, water outlet pipe; 831, water pump; 832, water pipe; 833, diversion pipe; 834, return pipe; 841, driving motor; 842, second transmission gear; 843, ventilation slot; 844, round rod; 845, fan blade; 846, filter plate; 847, third transmission gear; 848, brush plate; 901, support seat; 902, vertical plate; 903, spring; 904, U-shaped seat; 905, guide rod; 906, guide block; 907, tension wheel; 908, contact switch; 909, resistance block. DETAILED DESCRIPTION

[0017] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below in conjunction with the accompanying drawings.

[0018] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0019] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure or characteristic that may be included in at least one implementation of the present invention. The phrase "in a preferred embodiment" that appears in different places in this specification does not refer to the same embodiment, nor is it a separate or selective embodiment that is mutually exclusive with other embodiments.

[0020] Secondly, the present invention is described in detail with reference to the schematic diagram. When describing the embodiments of the present invention in detail, for the sake of convenience, the cross-sectional diagrams showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0021] Please see attached Figures 1 to 15 As shown, this embodiment provides a wafer surface cleaning device, including a platform 1, a circular protective shell is arranged on the top surface of the platform 1, a swing arm shaft 2 is rotatably arranged on the platform 1, a protective cover 3 is fixedly connected to the upper end of the swing arm shaft 2, and a sealing cover 31 is arranged on the upper end of the protective cover 3; The driving mechanism 4 is arranged at the lower end of the platform 1 and is operated by a driving device; The bearing seat 5 is mounted on the bottom surface of the protective cover 3. A rotating rod 6 is rotatably connected to the bearing seat 5. The upper end of the rotating rod 6 extends into the protective cover 3 and is rotatably connected to the protective cover 3. A brush 7 is installed at the lower end of the rotating rod 6. A cooling mechanism 8, which is disposed in the protective cover 3 and is used to cool the transmission assembly; A tensioning mechanism 9, which is disposed in the protective cover 3 and is used for tensioning the transmission assembly; Among them, the cooling mechanism 8 includes a refrigeration box 81, which is fixedly installed on the bottom surface of the protective cover 3. Cooling transmission parts 82 are fixedly installed at both ends of the protective cover 3. An infusion part 83 is arranged between the refrigeration box 81 and the cooling transmission part 82, and an air cooling part 84 is arranged at the lower end of the protective cover 3.

[0022] Next, please refer to Figure 2 and Figure 3The driving mechanism 4 includes a swing arm motor 401 and a brush motor 403, both of which are installed on the bottom surface of the platform 1, a first driving gear 402 is fixedly installed on the upper end of the output shaft of the swing arm motor 401, and a second driving gear 404 is fixedly installed on the lower end of the output shaft of the brush motor 403, a driving rod 405 is rotatably connected inside the swing arm shaft 2, and the upper end of the driving rod 405 extends into the protective cover 3 and is rotatably connected to the protective cover 3, a first driven gear 406 is fixedly installed on the outer wall of the lower end of the swing arm shaft 2, and a second driven gear 407 is fixedly installed on the lower end of the driving rod 405.

[0023] In this embodiment, after the swing arm motor 401 is started, it will drive the first drive gear 402 to start rotating. This rotation is transmitted through the meshing between the first drive gear 402 and the first driven gear 406, and finally the swing arm shaft 2 is rotated. Similarly, after the brush motor 403 is started, it will drive the second drive gear 404 to start rotating. This rotation is transmitted through the meshing between the second drive gear 404 and the second driven gear 407, and finally the drive rod 405 is rotated. Both processes are achieved by starting the motor, which enables the meshing transmission between the gears to be carried out, thereby realizing the rotation of the swing arm shaft 2 and the drive rod 405. This series of actions are all for realizing the function of the device. By accurately controlling the start and stop of the motor, the rotation of the swing arm shaft 2 and the drive rod 405 can be accurately controlled, thereby achieving the desired effect.

[0024] In addition, the swing arm motor 401 and the brush 7 motor are both arranged on the bottom surface of the platform 1, so that the center of gravity of the swing arm can be placed near the axis of the swing arm's rotating shaft. The weight at the end of the swing arm is greatly reduced, and the inertia of the swing arm based on the rotating shaft can be reduced during operation, which can reduce the shaking and jerking of the swing arm during operation. Placing the motor under the entire swing arm makes maintenance more convenient, avoids contamination caused by opening the process chamber, and avoids personal injury.

[0025] Secondly, please also refer to Figures 4 to 11 The cooling transmission part 82 includes a linkage shaft 821, and the two linkage shafts 821 are respectively connected to the upper ends of the rotating rod 6 and the driving rod 405. The upper end of the linkage shaft 821 is inserted with a limit plate 822, and the bottom surface of the limit plate 822 is rotatably connected with a rotating ring 823. The upper end of the linkage shaft 821 is threadedly connected with a fastening bolt 824, and the middle end of the linkage shaft 821 is installed with a first transmission gear 825. The lower end of the linkage shaft 821 is rotatably connected to a limit seat 826, and the bottom surface of the limit seat 826 is fixedly connected to the bottom surface of the inner cavity of the protective cover 3 by a support rod. A cooling shell 827 is rotatably connected in the limit seat 826, and an inlet pipe 828 and an outlet pipe 829 are connected to the limit seat 826.

[0026] In this embodiment, the driving rod 405 is used to drive the linkage shaft 821 fixedly connected to its upper end to rotate. The two linkage shafts 821 are mounted with first transmission gears 825, which are transmitted through a toothed belt, thereby realizing the synchronous rotation of the two linkage shafts 821. When the left linkage shaft 821 rotates, it drives the rotating rod 6 to rotate, thereby driving the brush 7 to rotate.

[0027] In order to ensure the stability of the toothed belt and prevent it from deflecting, a limit plate 822 is provided above the toothed belt, and a limit seat 826 is provided below the toothed belt. The limit plate 822 and the limit seat 826 limit the toothed belt, which can improve the stability of the toothed belt. The specific installation steps are as follows: First, the sealing cover 31 needs to be opened, and then the toothed belt is sleeved on the two first transmission gears 825. Next, the limit plate 822 is sleeved on the linkage shaft 821, and then the fastening bolt 824 is threadedly connected to the upper end of the linkage shaft 821 and tightened. The limit plate 822 can be pressed down by the fastening bolt 824 to limit the toothed belt.

[0028] In addition, the bottom surface of the limit plate 822 is rotatably connected to a rotating ring 823, and the rotating ring 823 slightly protrudes from a portion of the bottom surface of the limit plate 822, so the limit plate 822 will not contact the first transmission gear 825 and the toothed belt. Similarly, the cooling shell 827 rotatably connected to the limit seat 826 below the first transmission gear 825 also slightly protrudes from a portion of the top surface of the limit seat 826, so the limit seat 826 will not contact the first transmission gear 825 and the toothed belt. By rotating the rotating ring 823 and the cooling shell 827 in contact with the first transmission gear 825, such a design can reduce the friction generated by the toothed belt during operation and reduce the transmission resistance.

[0029] Next, please refer to Figures 4 to 7 The infusion part 83 includes a water pump 831, which is installed on the front of the refrigeration box 81, and the water pumping end of the water pump 831 is connected to the refrigeration box 81, and the drainage end of the water pump 831 is connected to a water pipe 832, one end of the water pipe 832 extends into the protective cover 3 and is connected to two groups of distribution pipes 833, and the other ends of the two groups of distribution pipes 833 are respectively connected to two water inlet pipes 828, and two return pipes 834 are connected to the back of the refrigeration box 81, and the other end of the return pipe 834 is connected to the water outlet pipe 829.

[0030] In this embodiment, first, the refrigeration box 81 cools the coolant inside it to ensure that its temperature is appropriate. Next, the water pump 831 is started to extract the coolant. After starting the water pump 831, the coolant will be guided to flow along the water pipe 832, then enter the shunt pipe 833, and finally enter the bottom of the limit seat 826 through the water inlet pipe 828. As the coolant inside the limit seat 826 continues to increase, the liquid level of the coolant will gradually rise. The purpose of this process is to ensure that the coolant can fully contact the components that need to be cooled.

[0031] After the liquid level rises, the coolant will flow into the cooling shell 827 along the annular groove opened at the lower end of the cooling shell 827. The first transmission gear 825 and the toothed belt are effectively cooled by heat exchange. This is to avoid damage to the transmission components due to excessive temperature caused by the heat generated by friction during long-term transmission.

[0032] After cooling the first transmission gear 825 and the toothed belt, the coolant flows into the upper end of the stop seat 826 along the slots provided on the outer ring of the cooling shell 827. Then, the coolant is discharged into the return pipe 834 through the outlet pipe 829. This step is to guide the coolant back to the refrigeration box 81 for a new round of cooling process.

[0033] Such a cycle process can continuously cool the first transmission gear 825 and the toothed belt, effectively avoiding the problem of equipment wear caused by excessive temperature. This cooling mechanism not only improves the cooling efficiency of the equipment, but also extends the service life of the equipment and improves the stability of the equipment.

[0034] It should be noted that the function of the refrigeration box 81 is to cool the internal coolant, and it adopts products currently available on the market. When selecting the model, it should be selected as much as possible to meet the requirements of this application under the premise of suitable specifications and usage scenarios. The specific model specifications are not limited here.

[0035] Please refer again Fig.12 and Fig.13 The air cooling part 84 includes a driving motor 841, which is installed on the bottom surface of the protective cover 3. A second transmission gear 842 is fixedly installed on the output shaft of the driving motor 841. A ventilation groove 843 is opened on the bottom surface of the protective cover 3. A bracket is fixedly connected to the inner wall of the ventilation groove 843, and a round rod 844 is rotatably connected to the center of the bracket. A fan blade 845 is fixedly installed on the upper end of the round rod 844, and a filter plate 846 is fixedly connected to the lower end of the ventilation groove 843, and the filter plate 846 is rotatably connected to the round rod 844. A third transmission gear 847 is fixedly installed on the lower end of the round rod 844, and a brush plate 848 is also installed on the lower end of the round rod 844.

[0036] In this embodiment, a drive motor 841 that can be started during the cooling stage is designed, and the motor will drive the second transmission gear 842 to rotate. Then, the second transmission gear 842 and the third transmission gear 847 drive the round rod 844 to rotate through meshing transmission, so that the fan blade 845 can rotate, thereby generating wind and sending air to the inside of the protective cover 3. It is worth noting that in the process of air flow, it will first pass through the shunt pipe 833. This design allows the air to be effectively cooled and turned into cold wind. This cold wind can dissipate the heat inside the protective cover 3 as a whole, which greatly reduces the operating temperature of the first transmission gear 825 and the toothed belt. This not only ensures the stability of the drive system, but also greatly extends their service life and reduces their aging rate.

[0037] In addition, we design a filter plate 846 on the bottom surface of the ventilation slot 843, which can effectively block particulate impurities in the air and prevent these impurities from entering the protective cover 3. At the same time, during the rotation of the round rod 844, it will drive the brush plate 848 to rotate to clean the filter plate 846. Such a cleaning mechanism effectively prevents the filter plate 846 from being blocked, thereby ensuring the speed of air circulation and ensuring the stable operation of the entire system.

[0038] It should be supplemented that a temperature sensor may be installed in the protective cover 3 to detect the temperature inside the protective cover 3 in real time so as to select whether the air cooling part 84 is started or closed.

[0039] Please refer again Fig.14 and Fig.15 The tensioning mechanism 9 includes a support seat 901, which is connected to the bottom surface of the inner cavity of the protective cover 3. A vertical plate 902 is fixedly connected to the top surface of the support seat 901, and a spring 903 is fixedly connected to the side of the vertical plate 902. The other end of the spring 903 is fixedly connected to a U-shaped seat 904, and a tensioning wheel 907 is rotatably connected to the U-shaped seat 904. A guide rod 905 is also connected to the side of the vertical plate 902, and a guide block 906 is slidably connected to the guide rod 905, and the guide block 906 is fixedly connected to the U-shaped seat 904. A contact switch 908 is also installed on the top surface of the support seat 901, and a resistance block 909 is fixedly connected to the bottom surface of the U-shaped seat 904, wherein a warning light 10 is installed on the front of the protective cover 3, and the warning light 10 is electrically connected to the contact switch 908.

[0040] In this embodiment, the two tensioning wheels 907 tightly contact the toothed belt to ensure that the transmission toothed belt is closely attached to the first transmission gear 825 during the transmission process to prevent sliding or loosening. This helps to reduce vibration and noise and improve transmission efficiency and reliability. When the transmission toothed belt is loose due to wear or elongation, the two tensioning wheels 907 can move away from each other under the action of the reset force of the spring 903, thereby automatically adjusting the position of the tensioning wheel 907 and increasing the tension to maintain a proper tensioning state; and a guide block 906 is provided on the U-shaped frame on which the tensioning wheel 907 is installed, and the guide block 906 and the guide rod 905 form a sliding structure, so that the tensioning wheel 907 can be guided and limited during the movement process to ensure stability during operation; in addition, when the transmission toothed belt is seriously loose and the two U-shaped seats 904 move to the maximum range, the contact block 909 will contact the contact switch 908, and the warning light 10 will light up at this time, prompting the staff to perform maintenance or repair in time.

[0041] Please refer again Figure 1 The swing arm shaft 2 is made of SUS304 material, and Teflon coating is sprayed on the outside of the swing arm shaft 2. The swing arm shaft 2 is made of SUS304 material to ensure the bending resistance of the swing arm shaft 2. At the same time, the swing arm shaft 2 is sprayed with Teflon coating on the outside, which can further improve the corrosion resistance of the swing arm shaft.

[0042] A method for cleaning a wafer using a driven brush for cleaning the wafer surface is applied to the above-mentioned wafer surface cleaning device, comprising the following steps: Step 1: Start the swing arm motor 401 to drive the first driving gear 402 to rotate, and drive the swing arm shaft 2 to rotate through gear meshing transmission, start the brush motor 403 to drive the second driving gear 404 to rotate, and drive the driving rod 405 to rotate through gear meshing transmission; Step 2: The rotation of the driving rod 405 drives the linkage shaft 821 to rotate, and the first transmission gears 825 on the two linkage shafts 821 rotate synchronously through the toothed belt; Step 3: The rotation of the left linkage shaft 821 drives the rotating rod 6 to rotate, and the rotation of the rotating rod 6 drives the brush 7 to rotate to start cleaning the wafer; Step 4: The swing arm motor 401 and the brush motor 403 are both placed on the bottom surface of the platform 1 to optimize the center of gravity of the swing arm and reduce vibration during operation; Step 5: Set a limit plate 822 and a limit seat 826 on the toothed belt to prevent the toothed belt from deviating and improve the running stability. When installing the toothed belt, fix the limit plate 822 by fastening bolts 824 to ensure that the toothed belt is effectively limited; Step 6: Cool the coolant using the refrigeration box 81, extract the coolant through the water pump 831, pass through the water pipe 832, the shunt pipe 833 and the water inlet pipe 828 to enter the limit seat 826, and then enter the cooling shell 827 to cool the first transmission gear 825 and the toothed belt, and then flow into the upper end of the limit seat 826 along the outer ring slot of the cooling shell 827, and be discharged into the return pipe 834 through the outlet pipe 829, and finally flow back to the refrigeration box 81 for circulation cooling; Step 7: The driving motor 841 drives the fan blade 845 to rotate, blowing cold air into the protective cover 3, further reducing the temperature of the first transmission gear 825 and the toothed belt. The rotation of the round rod 844 also drives the brush plate 848 to rotate, cleaning the filter plate 846 to prevent blockage and ensure the air circulation speed; Step 8: The two tension wheels 907 ensure that the toothed belt fits tightly to the first transmission gear 825 to prevent slipping or loosening. When the toothed belt is severely loose, the trigger warning light 10 lights up to remind the staff to perform maintenance or repair in time.

[0043] The working principle of the present invention is: The swing arm motor 401 is started to drive the first driving gear 402 to rotate, and the gear drives the first driven gear 406 through meshing transmission, thereby rotating the swing arm shaft 2. The brush motor 403 is started to drive the second driving gear 404 to rotate, and the second driven gear 407 is driven through meshing transmission, thereby driving the driving rod 405 to rotate. The rotation of the driving rod 405 drives the linkage shaft 821 fixedly connected to its upper end to rotate, and the first transmission gears 825 on the two linkage shafts 821 are driven by toothed belts to achieve synchronous rotation. The rotation of the left linkage shaft 821 drives the rotating rod 6 to rotate, thereby driving the brush 7 to rotate.

[0044] In order to ensure the stable operation of the toothed belt and prevent it from running off the track, a limit plate 822 is provided above the toothed belt and a limit seat 826 is provided below the toothed belt, and the two together limit the toothed belt, thereby improving the stability of the operation. The bottom surface of the limit plate 822 is rotatably connected with a rotating ring 823, and the rotating ring 823 slightly protrudes from the bottom surface of the limit plate 822 to prevent the limit plate 822 from contacting the first transmission gear 825 and the toothed belt. At the same time, the cooling shell 827 rotatably connected to the limit seat 826 below the first transmission gear 825 also slightly protrudes from the top surface of the limit seat 826 to prevent the limit seat 826 from contacting the first transmission gear 825 and the toothed belt, thereby reducing friction and transmission resistance.

[0045] The cooling liquid is cooled by controlling the refrigeration box 81, and the cooling liquid is extracted by the water pump 831 and enters the bottom of the limit seat 826 along the water pipe 832, the shunt pipe 833 and the water inlet pipe 828. As the cooling liquid increases, the liquid level gradually rises and enters the cooling shell 827, and cools the first transmission gear 825 and the toothed belt by heat exchange. Then the cooling liquid flows into the upper end of the limit seat 826 along the outer ring slot of the cooling shell 827, and is discharged into the return pipe 834 through the outlet pipe 829, and finally flows back to the refrigeration box 81 for circulation cooling.

[0046] In addition, it is also equipped with a ventilation and heat dissipation structure. The driving motor 841 drives the second transmission gear 842 to rotate, drives the round rod 844 to rotate through meshing transmission, and then drives the fan blade 845 to rotate to blow air into the protective cover 3. During the flow process, the air is first cooled into cold air through the shunt pipe 833, and the interior of the protective cover 3 is dissipated as a whole, further reducing the temperature of the first transmission gear 825 and the toothed belt. The filter plate 846 arranged on the bottom surface of the ventilation groove 843 can block particulate impurities in the air and prevent impurities from entering the protective cover 3. The rotation of the round rod 844 also drives the brush plate 848 to rotate, clean the filter plate 846, prevent blockage, and ensure the air circulation speed.

[0047] The two tensioning wheels 907 tightly contact the toothed belt to ensure that the toothed belt fits tightly against the first transmission gear 825 during transmission to prevent sliding or loosening. When the toothed belt loosens due to wear or elongation, the tensioning wheels 907 move away from each other under the action of the reset force of the spring 903 and automatically adjust the tensioning state. The guide block 906 and the guide rod 905 set on the U-shaped seat 904 form a sliding structure to provide guidance and limit for the movement of the tensioning wheel 907. When the toothed belt is seriously loose, the contact block 909 will contact the contact switch 908, triggering the warning light 10 to light up, prompting the staff to perform maintenance or inspection in time.

[0048] The above is only a preferred embodiment of the present invention. It should be noted that, for those skilled in the art, several improvements and modifications can be made without departing from the principles of the present invention, and these improvements and modifications should also be considered as the protection scope of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to the conventional means in the art unless otherwise specified and limited.

Claims

1. A wafer surface cleaning device, characterized in that: The invention comprises a platform (1), wherein a circular protective shell is arranged on the top surface of the platform (1), a swing arm shaft (2) is rotatably arranged on the platform (1), a protective cover (3) is fixedly connected to the upper end of the swing arm shaft (2), and a sealing cover (31) is arranged on the upper end of the protective cover (3); A driving mechanism (4), wherein the driving mechanism (4) is arranged at the lower end of the platform (1) and is operated by a driving device; A bearing seat (5), the bearing seat (5) being mounted on the bottom surface of the protective cover (3), a rotating rod (6) being rotatably connected to the bearing seat (5), the upper end of the rotating rod (6) extending into the protective cover (3) and being rotatably connected to the protective cover (3), and a brush (7) being mounted on the lower end of the rotating rod (6); A cooling mechanism (8), wherein the cooling mechanism (8) is arranged in the protective cover (3) and is used to cool the transmission component; A tensioning mechanism (9), the tensioning mechanism (9) being arranged in the protective cover (3) and being used for tensioning the transmission component; The cooling mechanism (8) comprises a refrigeration box (81), the refrigeration box (81) being fixedly mounted on the bottom surface of the protective cover (3), cooling transmission parts (82) being fixedly mounted on both ends of the protective cover (3), an infusion part (83) being arranged between the refrigeration box (81) and the cooling transmission part (82), and an air cooling part (84) being arranged at the lower end of the protective cover (3).

2. The wafer surface cleaning device according to claim 1, characterized in that: The driving mechanism (4) comprises a swing arm motor (401) and a brush motor (403), wherein the swing arm motor (401) and the brush motor (403) are both mounted on the bottom surface of the platform (1), a first driving gear (402) is fixedly mounted on the upper end of the output shaft of the swing arm motor (401), and a second driving gear (404) is fixedly mounted on the lower end of the output shaft of the brush motor (403), a driving rod (405) is rotatably connected inside the swing arm rotating shaft (2), and the upper end of the driving rod (405) extends into the protective cover (3) and is rotatably connected to the protective cover (3), a first driven gear (406) is fixedly mounted on the outer wall of the lower end of the swing arm rotating shaft (2), and a second driven gear (407) is fixedly mounted on the lower end of the driving rod (405).

3. The wafer surface cleaning device according to claim 2, characterized in that: The cooling transmission part (82) comprises a linkage shaft (821), wherein the two linkage shafts (821) are respectively connected to the upper ends of the rotating rod (6) and the driving rod (405), the upper ends of the linkage shafts (821) are plugged with a limit plate (822), the bottom surface of the limit plate (822) is rotatably connected to a rotating ring (823), the upper end of the linkage shaft (821) is threadedly connected to a fastening bolt (824), the middle end of the linkage shaft (821) is installed with a first transmission gear (825), the lower end of the linkage shaft (821) is rotatably connected to a limit seat (826), and the bottom surface of the limit seat (826) is fixedly connected to the bottom surface of the inner cavity of the protective cover (3) by means of a support rod, a cooling shell (827) is rotatably connected inside the limit seat (826), and a water inlet pipe (828) and a water outlet pipe (829) are connected to the limit seat (826).

4. The wafer surface cleaning device according to claim 3, characterized in that: The infusion section (83) comprises a water pump (831), the water pump (831) being installed on the front of the refrigeration box (81), and the water pumping end of the water pump (831) being in communication with the refrigeration box (81), the water discharge end of the water pump (831) being connected to a water delivery pipe (832), one end of the water delivery pipe (832) extending into the protective cover (3) and being connected to two groups of shunt pipes (833), and the other ends of the two groups of shunt pipes (833) being respectively connected to two water inlet pipes (828), and the back of the refrigeration box (81) being connected to two return pipes (834), and the other ends of the return pipes (834) being connected to a water outlet pipe (829).

5. The wafer surface cleaning device according to claim 1, characterized in that: The air cooling part (84) comprises a driving motor (841), the driving motor (841) being mounted on the bottom surface of the protective cover (3), a second transmission gear (842) being fixedly mounted on the output shaft of the driving motor (841), a ventilation slot (843) being provided on the bottom surface of the protective cover (3), a bracket being fixedly connected to the inner wall of the ventilation slot (843), and a round rod (844) being rotatably connected to the center of the bracket, a fan blade (845) being fixedly mounted on the upper end of the round rod (844), a filter plate (846) being fixedly connected to the lower end of the ventilation slot (843), and the filter plate (846) being rotatably connected to the round rod (844), a third transmission gear (847) being fixedly mounted on the lower end of the round rod (844), and a brush plate (848) being further mounted on the lower end of the round rod (844).

6. The wafer surface cleaning device according to claim 1, characterized in that: The tensioning mechanism (9) comprises a support seat (901), wherein the support seat (901) is connected to the bottom surface of the inner cavity of the protective cover (3), the top surface of the support seat (901) is fixedly connected to a vertical plate (902), the side surface of the vertical plate (902) is fixedly connected to a spring (903), the other end of the spring (903) is fixedly connected to a U-shaped seat (904), a tensioning wheel (907) is rotatably connected to the U-shaped seat (904), the side surface of the vertical plate (902) is also connected to a guide rod (905), the guide rod (905) is slidably connected to a guide block (906), and the guide block (906) is fixedly connected to the U-shaped seat (904), the top surface of the support seat (901) is also mounted with a contact switch (908), and the bottom surface of the U-shaped seat (904) is fixedly connected to a resistance block (909).

7. The wafer surface cleaning device according to claim 1, characterized in that: The swing arm rotating shaft (2) is made of SUS304 material, and a Teflon coating is sprayed on the outside of the swing arm rotating shaft (2).

8. The wafer surface cleaning device according to claim 1, characterized in that: A warning light (10) is installed on the front of the protective cover (3), and the warning light (10) is electrically connected to the contact switch (908).

9. A method for cleaning a wafer surface by using a driven brush, characterized in that: A wafer surface cleaning device as claimed in any one of claims 1 to 8, comprising the following steps: Step 1: starting the swing arm motor (401) to drive the first drive gear (402) to rotate, and driving the swing arm shaft (2) to rotate through gear meshing transmission, starting the brush motor (403) to drive the second drive gear (404) to rotate, and driving the drive rod (405) to rotate through gear meshing transmission; Step 2: The rotation of the driving rod (405) drives the linkage shaft (821) to rotate, and the first transmission gears (825) on the two linkage shafts (821) rotate synchronously through the toothed belt; Step 3: The rotation of the left linkage shaft (821) drives the rotating rod (6) to rotate, and the rotation of the rotating rod (6) drives the brush (7) to rotate, and the wafer cleaning begins; Step 4: The swing arm motor (401) and the brush motor (403) are both placed on the bottom surface of the platform (1) to optimize the center of gravity position of the swing arm and reduce vibration during operation; Step 5: A limit plate (822) and a limit seat (826) are arranged on the toothed belt to prevent the toothed belt from deviating. When installing the toothed belt, the limit plate (822) is fixed by a fastening bolt (824) to ensure that the toothed belt is effectively limited; Step 6: Cool the coolant using the refrigeration box (81), extract the coolant through the water pump (831), pass through the water pipe (832), the shunt pipe (833) and the water inlet pipe (828) to enter the limit seat (826), and then enter the cooling shell (827) to cool the first transmission gear (825) and the toothed belt, and then flow into the upper end of the limit seat (826) along the outer ring groove of the cooling shell (827), and be discharged into the return pipe (834) through the outlet pipe (829), and finally flow back to the refrigeration box (81) for circulation cooling; Step 7: The driving motor (841) drives the fan blades (845) to rotate, blowing cold air into the protective cover (3), further reducing the temperature of the first transmission gear (825) and the toothed belt. The rotation of the round rod (844) also drives the brush plate (848) to rotate, cleaning the filter plate (846) to prevent blockage and ensure air circulation speed. Step 8: The two tension wheels (907) ensure that the toothed belt fits tightly against the first transmission gear (825) to prevent slippage or loosening. When the toothed belt is severely loose, the trigger warning light (10) lights up, prompting the staff to perform maintenance or repair in time.

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