Measurement system, measurement method, and test method

Abstract

The invention discloses a measuring system, a measuring method and a testing method. The measuring system comprises a first cavity, a sound sensing device, a sound source and a top cover. The first cavity exists in the first cavity, the sound sensing device is used for sensing sound in the first cavity, the sound source is used for generating sound waves propagating towards the first cavity, and the top cover is arranged on the first cavity. The measuring system is used for measuring the opening degree of a ventilation opening formed by the ventilation device. The ventilation device is arranged between the first cavity and the top cover, the ventilation device is connected to the first cavity of the first cavity to measure the opening degree, the first cavity of the first cavity is arranged between the ventilation device and the sound sensing device, and the opening degree is obtained according to a result generated by the sound sensing device.

Description

Technical Field

[0001] The present invention relates to a measuring system, a measuring method and a testing method, and in particular to a measuring system capable of measuring the degree of opening of a vent formed by a ventilating device, and a related measuring method and testing method. Background Art

[0002] In today's society, acoustic devices can be widely used in various electronic devices. In order to improve the performance of the acoustic device, a venting device is provided in the acoustic device. For example, the venting device can be used to suppress the occlusion effect during the operation of the acoustic device.

[0003] The opening of the vent formed by the ventilator is related to the suppression effect of the locking effect. However, there is currently no device or system that can measure the opening of the vent of the vent well. Therefore, there is an urgent need for a device or system that can measure the opening of the vent of the vent. Summary of the invention

[0004] Therefore, the main purpose of the present invention is to provide a measuring system, which can measure the opening of the vent formed by the ventilating device by using a sound sensing device. In addition, the present invention also provides related measuring methods and testing methods.

[0005] One embodiment of the present invention provides a measurement system, which includes a first cavity, a sound sensing device, a sound source, and a top cover. The first cavity exists in the first cavity, the sound sensing device is used to sense the sound in the first cavity, the sound source is used to generate sound waves propagating toward the first cavity, and the top cover is arranged on the first cavity. The measurement system is used to measure the opening of the vent formed by the ventilation device. The ventilation device is arranged between the first cavity and the top cover, the ventilation device is connected to the first cavity of the first cavity to measure the opening, the first cavity of the first cavity is between the ventilation device and the sound sensing device, and the opening is obtained according to the result generated by the sound sensing device.

[0006] Another embodiment of the present invention provides a measurement method, which includes: providing a measurement system; and performing a first measurement process on a ventilation device. The measurement system includes a first cavity, a sound source, and a top cover, wherein the first cavity exists in the first cavity, the sound source is used to generate a sound wave propagating toward the first cavity, and the top cover is arranged on the first cavity. The first measurement process includes: arranging the ventilation device between the first cavity and the top cover; and when the sound source generates a sound wave, sensing a first sound in the first cavity of the first cavity, wherein a first opening of the vent formed by the ventilation device is obtained according to a first result related to the first sound.

[0007] Another embodiment of the present invention provides a test method for testing a ventilation device, comprising: obtaining a reference result; obtaining a first result corresponding to a first mode of the ventilation device and a second result corresponding to a second mode of the ventilation device; obtaining a first gap between the first result and the reference result and a second gap between the second result and the reference result; when the first gap is less than a first value, determining that the ventilation device is normal in the first mode; and when the second gap is greater than a second value, determining that the ventilation device is normal in the second mode. The ventilation device is driven to operate in the first mode or the second mode. The second value is greater than the first value.

[0008] After reading the following detailed description of the embodiments illustrated with various figures, the purpose of the present invention should be clear to those skilled in the art. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 FIG. 1 is a schematic diagram of a measuring system according to a first embodiment of the present invention.

[0010] Figure 2 and Figure 3 FIG. 1 is a schematic cross-sectional view showing an exemplary example of a measuring system according to a first embodiment of the present invention.

[0011] Figure 4 FIG. 1 is a schematic diagram of a ventilation device according to an embodiment of the present invention.

[0012] Figure 5 FIG. 1 is a cross-sectional schematic diagram of a ventilation device according to an embodiment of the present invention in a first mode.

[0013] Figure 6 FIG. 1 is a cross-sectional schematic diagram of a ventilation device according to an embodiment of the present invention in a second mode.

[0014] Figure 7 FIG. 1 is a cross-sectional schematic diagram of a ventilation device according to an embodiment of the present invention in a third mode.

[0015] Figure 8 FIG. 4 is a schematic diagram of a reference device according to an embodiment of the present invention.

[0016] Fig. 9 FIG. 4 is a flow chart of a measuring method according to an embodiment of the present invention.

[0017] Fig.10 FIG. 1 is a schematic diagram of a measuring system according to a second embodiment of the present invention.

[0018] Fig.11 FIG. 4 is a schematic diagram of a measuring system according to a third embodiment of the present invention.

[0019] Fig.12 FIG. 4 is a schematic diagram of a measuring system according to a fourth embodiment of the present invention.

[0020] The reference numerals are described as follows:

[0021] 100,200,300,400: Measurement system

[0022] 110: First cavity

[0023] 110a: First cavity

[0024] 112a: First connection opening

[0025] 112b: Second connection opening

[0026] 120: Sound source

[0027] 122: Second cavity

[0028] 122a: Second cavity

[0029] 130: Sound sensing device

[0030] 140: Signal processing device

[0031] 150: Top cover

[0032] 152: Conductive structure

[0033] 154: Air channel

[0034] AL: Adhesive material

[0035] AP1: First actuator

[0036] AP2: Second actuator

[0037] AS,AS': Anchor structure

[0038] ATR: Actuator

[0039] BP: Conductive pad

[0040] BS: Block structure

[0041] DV1, DV2: Actuation signal

[0042] FP1, FP1': first petal

[0043] FP2, FP2': Second flap

[0044] MB, MB': Diaphragm

[0045] OPb: Open bottom

[0046] OPt, OPt': top opening

[0047] RC: Reference Component

[0048] RCS: Reference Covering Structure

[0049] RD: Reference Device

[0050] RSB: Reference Baseboard

[0051] SD: Sound Generating Device

[0052] SL, SL': Slit

[0053] ST1, ST2, ST3, ST4: Steps

[0054] VC: Ventilation element

[0055] VCS: Covering Structure

[0056] VD: Ventilation Device

[0057] VSB: Base Plate

[0058] VT: Vent

[0059] X, Y, Z: direction. DETAILED DESCRIPTION

[0060] In order to enable those of ordinary skill in the art to further understand the present invention, the preferred embodiments of the present invention, typical materials or parameter ranges of key components listed below will be described in detail, and the components of the present invention and the desired effects to be achieved will be illustrated with the aid of the marked drawings. It should be noted that the drawings are simplified schematic diagrams, and the materials and parameter ranges of key components are described based on the current technology. Therefore, only the components and combination relationships related to the present invention are shown to provide a clearer description of the basic architecture, implementation method or operation of the present invention. The actual components and layout may be more complex, and the materials or parameter ranges used may change with the development of future technology. In addition, for the convenience of explanation, the components shown in the drawings of the present invention may not be drawn in proportion to the actual number, shape, and size, and the details may be adjusted according to the design requirements.

[0061] In the following description and claims, words such as "include", "contain", "have" and the like are open-ended words, and therefore should be interpreted as "including but not limited to..." Therefore, when the terms "include", "contain" and / or "have" are used in the description of the present invention, they specify the existence of corresponding features, regions, steps, operations and / or components, but do not exclude the existence of one or more corresponding features, regions, steps, operations and / or components.

[0062] In the following specification and claims, when a component or a film layer is referred to as being "connected to" another component or film layer, it may be directly connected to the other component or film layer, or there may be an intervening component or film layer between the two. Conversely, when a component is referred to as being "directly connected to" another component or film layer, there may be no intervening component or film layer between the two.

[0063] In the following description and claims, when "A1 component is formed by B1", B1 exists in the formation of A1 component or B1 is used in the formation of A1 component, and the formation of A1 component does not exclude the existence and use of one or more other features, regions, steps, operations and / or components.

[0064] In the following description and claims, the term "cavity" refers to an object with an empty space inside, and the term "cavity" refers to the empty space inside the cavity. In other words, the cavity of the cavity is the empty space existing in the cavity, and the cavity is the shell of the cavity.

[0065] In the following specification and claims, the term "substantially" means that a slight deviation may or may not exist. For example, the terms "substantially parallel" and "substantially along" mean that the angle between the two components may be less than or equal to a preset angle threshold, such as 10 degrees, 5 degrees, 3 degrees or 1 degree. For example, the term "substantially aligned" means that the deviation between the two components may be less than or equal to a preset difference threshold, such as 2 micrometers (μm) or 1 micrometer. For example, the term "substantially the same" means that the deviation is within a given value or a given range, such as within 10%, 5%, 3%, 2%, 1% or 0.5%.

[0066] In the following description and claims, the term "horizontal direction" refers to a direction parallel to a horizontal plane, the term "horizontal plane" refers to a plane parallel to the direction X and the direction Y in the drawings (that is, the direction X and the direction Y of the present invention can be regarded as horizontal directions), and the terms "vertical direction" and "top view direction" refer to directions parallel to the direction Z and perpendicular to the horizontal direction in the drawings, wherein the directions X, Y, and Z are perpendicular to each other. In the following description and claims, the term "top view" refers to the viewing result along the vertical direction. In the following description and claims, the term "section" refers to the viewing result of a structure cut along the vertical direction and viewed from the horizontal direction.

[0067] The ordinal numbers used in the specification and claims, such as "first", "second", etc., are used to modify the elements. They do not imply or represent any previous ordinal numbers of the element (or elements), nor do they represent the order of one element and another element, or the order of the manufacturing method. The use of these ordinal numbers is only used to make the element with a certain name clearly distinguishable from another element with the same name. The same words may not be used in the claims and the specification. Accordingly, the first component in the specification may be the second component in the claims.

[0068] It should be noted that the following embodiments can replace, reorganize, or mix features in several different embodiments to complete other embodiments without departing from the spirit of the present invention. The features between the embodiments can be mixed and matched as long as they do not violate the spirit of the invention or conflict with each other.

[0069] In the present invention, the measuring system is used to measure the ventilation device to measure the opening of the vent formed by the ventilation device (i.e., the measuring system is also referred to as a vent measuring system). In some embodiments, the vent of the ventilation device can be controlled by an electrical signal. In some embodiments, the ventilation device can be disposed in an acoustic device to improve the performance of the acoustic device.

[0070] For example, the venting device may be provided in an acoustic device (e.g., an in-ear headphone (or earbud-type headphone), an on-ear earphone, or an over-ear earphone, etc.) for generating acoustic waves, and the venting device may be used to suppress the acoustic waves during operation of the acoustic device, thereby improving the user experience of the acoustic device. The occlusion effect is due to the sealed volume of the ear canal to cause a greater perceptible sound pressure to the user (i.e., the listener). In some cases, when the user performs certain movements (e.g., walking, running, talking, chewing, touching an acoustic transducer, etc.) while using an acoustic device inserted into the ear canal to generate bone-conducted sound, the occlusion effect occurs, and the occlusion effect causes the user to hear occlusion noise, thereby reducing the user's listening quality. Therefore, based on the existence of the ventilation device, when the ventilation port of the ventilation device is opened, the volume in the ear canal is not sealed to suppress the occlusion effect, thereby improving the performance of the acoustic device and the user's experience of using the acoustic device.

[0071] Please refer to Figures 1 to 3 , Figure 1 FIG. 1 is a schematic diagram of a measuring system according to a first embodiment of the present invention. Figure 2 and Figure 3 FIG. 1 is a schematic cross-sectional view showing an exemplary example of a measuring system according to a first embodiment of the present invention. Figure 1 The structure shown is the first basic architecture of the measurement system of the present invention, and the measurement system 100 of the first embodiment of the present invention belonging to the first basic architecture can be implemented in any suitable manner. It should be noted that Figure 2 and Figure 3 The illustrated structure is an illustrative example of the measurement system 100 of the first embodiment.

[0072] like Figures 1 to 3 As shown, the measurement system 100 includes a first cavity 110, and a first cavity 110a exists in the first cavity 110 (the first cavity 110a is an empty space in the first cavity 110). The first cavity 110 can be designed according to requirements. Figures 1 to 3 In the embodiment, the first cavity 110 may be a tubular structure extending in the direction Z, but is not limited thereto. For example, the first cavity 110 may have one or more cross-sectional shapes, and the first cavity 110 may have one or more cross-sectional dimensions (e.g., Figure 2 and Figure 3 In the example shown, the first cavity 110 has a variety of cross-sectional dimensions).

[0073] exist Figure 2 and Figure 3 In the illustrated exemplary embodiment, the measurement system 100 may include a block structure BS, wherein the first cavity 110 may belong to the block structure BS, such that the empty space in the block structure BS is the first cavity 110 a of the first cavity 110 , but the present invention is not limited thereto.

[0074] exist Figures 1 to 3 In the embodiment, the first cavity 110 may have at least one connection opening for connecting the first cavity 110a of the first cavity 110 with other elements. The number and position of the connection openings may be designed according to requirements. Figures 1 to 3 As shown, the first cavity 110 has at least a first connection opening 112a, and the first connection opening 112a is used to connect between the first cavity 110a of the first cavity 110 and a device under test (eg, a ventilation device VD). Figures 1 to 3 In the embodiment, the first connecting opening 112 a may be located at one end of the first cavity 110 .

[0075] like Figures 1 to 3 As shown, the measurement system 100 includes a sound source 120 for generating sound waves propagating toward the first cavity 110a of the first cavity 110, wherein the sound source 120 can be designed according to requirements. For example, the sound source 120 can be a speaker, but is not limited thereto. In the present invention, the sound source 120 can be disposed at any suitable location. In some embodiments (such as Figure 1As shown in FIG. 1 , the sound source 120 may be disposed in the first cavity 110a of the first cavity 110, but is not limited thereto. Figures 1 to 3 In the embodiment, the sound source 120 may be fixed on the side wall of the first cavity 110 (e.g., Figure 2 and Figure 3 In the exemplary example shown, the sound source 120 may be disposed in the block structure BS, and a portion of the sound source 120 may be disposed in the first cavity 110a and fixed to the side wall of the first cavity 110), but the present invention is not limited thereto. In some embodiments (not shown), the sound source 120 may be disposed outside the first cavity 110, and one of the connection openings of the first cavity 110 may be connected to the sound source 120, so that the sound source 120 may pass through the connection opening to propagate the generated sound waves toward the first cavity 110a, but the present invention is not limited thereto.

[0076] like Figure 1 As shown, the second cavity 122 may also be included in the measurement system 100 to improve the effectiveness of the sound source 120 (e.g., to improve the sound pressure level (SPL)) of the sound wave, wherein the second cavity 122a exists in the second cavity 122 (the second cavity 122a is an empty space in the second cavity 122). Figure 1 In the embodiment, the sound source 120 may be disposed and connected between the second cavity 122a of the second cavity 122 and the first cavity 110a of the first cavity 110. In some embodiments, the sound source 120 and the second cavity 122 may be combined into a sound generating device SD, but the present invention is not limited thereto.

[0077] like Figures 1 to 3 As shown, the measurement system 100 includes a sound sensing device 130 for sensing the sound in the first cavity 110a of the first cavity 110 and generating a sensing signal accordingly, wherein the sound sensed by the sound sensing device 130 is caused by the sound source 120. For example, the sound sensing device 130 can sense the sound pressure level of the sound in the first cavity 110a, but is not limited thereto.

[0078] exist Figures 1 to 3 In some embodiments, the first cavity 110 may further include a second connection opening 112b, and the sound sensing device 130 may be connected to the first cavity 110a of the first cavity 110 through the second connection opening 112b. Figures 1 to 3 As shown in FIG. 1 , the second connection opening 112b may be located at one end of the first cavity 110 and opposite to the first connection opening 112a, so that the first cavity 110a of the first cavity 110 is between the device under test (eg, the ventilation device VD) and the sound sensing device 130. For example, in Figures 1 to 3 In the embodiment, the sound sensing device 130 may face the device under test (eg, the ventilation device VD), but is not limited thereto. Figures 1 to 3 In the embodiment, the sound source 120 may be disposed between the device under test (eg, the ventilation device VD) and the sound sensing device 130, but is not limited thereto.

[0079] In the present invention, the measuring system 100 may further include a signal processing device 140 electrically connected to the sound sensing device 130, wherein the signal processing device 140 is used to receive and analyze the sensing signal generated by the sound sensing device 130. Figure 1 In the embodiment, the signal processing device 140 may also be electrically connected to the sound source 120 to provide a sound signal to the sound source 120 to control the sound waves generated by the sound source 120. Therefore, the signal processing device 140 may simultaneously control the sound waves generated by the sound source 120 and analyze the sensing signals generated by the sound sensing device 130. In some embodiments, the signal processing device 140 may include an amplifier to increase the signal strength.

[0080] like Figure 2 and Figure 3 As shown, the measuring system 100 includes a top cover 150, which is disposed on the first cavity 110 to fix the device under test (eg, the ventilation device VD). Figure 2 and Figure 3 In the embodiment, the top cover 150 is disposed on the device under test (eg, the ventilation device VD), so that the device under test (eg, the ventilation device VD) is disposed between the first cavity 110 and the top cover 150. It should be noted that, Figure 1 The top cover 150 is not shown.

[0081] The top cover 150 can be designed according to the requirements, and the top cover 150 can include any suitable material. Figure 2 and Figure 3 In the embodiment, the top cover 150 may include a conductive structure 152 for electrically connecting to a device under test (eg, a ventilation device VD).

[0082] like Figure 2 and Figure 3 As shown, the top cover 150 may have an air passage 154, so that air and / or sound can pass through the top cover 150 through the air passage 154, wherein the air passage 154 may be designed according to requirements. For example, the air passage 154 may be a perforation, but is not limited thereto. Figure 2 and Figure 3 As shown in the figure, the air channel 154 can be connected to the external space of the measurement system 100, and the air channel 154 can be connected to the first cavity 110a of the first cavity 110 through the device under test (e.g., the ventilation device VD), so that the first cavity 110a of the first cavity 110 can be connected to the external space of the measurement system 100 through the air channel 154 and the device under test (e.g., the ventilation device VD).

[0083] In the present invention, the measuring system 100 may further include a position modulation structure for moving the first cavity 110 and / or the top cover 150, so that the position modulation structure can move the first cavity 110 and the top cover 150 closer to each other or farther away from each other. Figure 2 In the embodiment, the first cavity 110 (ie, the block structure BS) and the top cover 150 are far away from each other and are not connected to each other, so that the device under test (eg, the ventilation device VD) can be placed between the first cavity 110 (ie, the block structure BS) and the top cover 150. Figure 3 In the embodiment, the first cavity 110 (ie, the block structure BS) and the top cover 150 are close to and connected to each other, so that the device under test (eg, the ventilation device VD) is fixed by the top cover 150 .

[0084] like Figures 1 to 3 As shown, the ventilation device VD as the device under test is disposed between the first cavity 110 and the top cover 150, and the ventilation device VD is connected to the first cavity 110a of the first cavity 110 through the first connecting opening 112a. Figure 1 As shown in FIG. 1 , the ventilation device VD may be a packaging structure that encapsulates a ventilation element VC, wherein the ventilation element VC may be designed according to requirements. For example, the ventilation element VC may be a micro electro mechanical system (MEMS) element, but is not limited thereto.

[0085] The ventilation device VD is described in detail below, with additional reference to Figures 4 to 7 . Figure 4 FIG. 1 is a schematic diagram of a ventilation device VD according to an embodiment of the present invention. Figure 5 FIG. 2 is a cross-sectional schematic diagram of a ventilation device VD according to an embodiment of the present invention in a first mode. Figure 6 FIG. 2 is a cross-sectional schematic diagram of a ventilation device VD according to an embodiment of the present invention in a second mode. Figure 7 FIG. 1 is a cross-sectional schematic diagram of a ventilation device VD according to an embodiment of the present invention in a third mode.

[0086] like Figure 1 and Figure 4 As shown, the ventilation device VD further comprises a substrate VSB and a covering structure VCS disposed on the substrate VSB, wherein the ventilation element VC is disposed between the substrate VSB and the covering structure VCS. Figure 1 and Figure 4 In the embodiment, the ventilation element VC and the covering structure VCS can be arranged on the first side of the substrate VSB, and the first cavity 110 is located on the second side of the substrate VSB, and the first side is opposite to the second side in the direction Z (that is, the substrate VSB is between the first cavity 110 and the ventilation element VC), but is not limited to this.

[0087] like Figure 1 and Figure 4 As shown, the cover structure VCS has a top opening OPt, and the substrate VSB has a bottom opening OPb. Figure 1 and Figure 4 As shown, the top opening OPt of the cover structure VCS, the bottom opening OPb of the substrate VSB, and the first connection opening 112 a of the first cavity 110 may correspond to each other in the direction Z.

[0088] The substrate VSB can be designed according to the requirements. The substrate VSB can be hard or flexible, wherein the substrate VSB may include silicon, germanium, glass, plastic, quartz, sapphire, metal, polymer (e.g., polyimide (PI), polyethylene terephthalate (PET)), any suitable material or a combination thereof. In one example, the substrate VSB may be a circuit board including a laminate (e.g., a copper clad laminate (CCL)), a land grid array board (LGA board), or any other suitable board containing a conductive material, but is not limited thereto. Figure 1 and Figure 4 In the embodiment, the normal direction of the substrate VSB may be parallel to the direction Z.

[0089] like Figure 4 As shown, the substrate VSB has at least one substrate conductive structure. For example, the substrate VSB has a plurality of conductive pads BP for electrically connecting to the ventilation element VC, but the present invention is not limited thereto. Figure 4 In the embodiment, the conductive pad BP, the covering structure VCS and the ventilation element VC may be disposed on the same side of the substrate VSB, but is not limited thereto.

[0090] The covering structure VCS can be designed according to the requirements. In the present invention, the covering structure VCS can be an integrally formed structure (such as Figure 4 The cover structure VCS may include any suitable material, such as metal, glass, silicon, germanium, plastic, polymer or a combination thereof, but is not limited thereto.

[0091] like Figure 1 , Figures 4 to 7 As shown, the ventilation element VC includes an anchoring structure AS, a diaphragm MB and an actuator ATR, wherein the diaphragm MB is anchored on the anchoring structure AS, and the actuator ATR is used to actuate the diaphragm MB. In some embodiments, the anchoring structure AS may be disposed outside the diaphragm MB, and the actuator ATR is disposed on the diaphragm MB.

[0092] The diaphragm MB and the anchoring structure AS may include any suitable material. In some embodiments, the diaphragm MB and the anchoring structure AS may each include silicon (e.g., monocrystalline silicon or polycrystalline silicon), silicon compounds (e.g., silicon carbide, silicon oxide), germanium, germanium compounds, gallium, gallium compounds (e.g., gallium nitride, gallium arsenide), stainless steel, other suitable materials or combinations thereof, but are not limited thereto. In some embodiments, the diaphragm MB and the anchoring structure AS may have the same material.

[0093] During operation of the vent element VC, the diaphragm MB can be actuated to move, and the anchoring structure AS can be stationary. In other words, during operation of the vent element VC, the anchoring structure AS can be a fixed end (or fixed edge) relative to the diaphragm MB. In some embodiments, the diaphragm MB can be actuated to move upward or downward, wherein the terms "upward movement" and "downward movement" mean that the diaphragm MB moves substantially along the normal direction of the substrate VSB (e.g., in the direction of the substrate VSB). Figure 1 , Figures 4 to 7 , the diaphragm MB essentially moves along direction Z).

[0094] exist Figures 4 to 7 In the embodiment, the diaphragm MB includes a plurality of petals separated by at least one slit SL, and the vent VT is formed by the slit SL, wherein the petals can be actuated to move in the direction Z to change the size (i.e., the opening) of the vent VT. Figures 4 to 7 In the embodiment, the diaphragm MB may include a first flap FP1 and a second flap FP2, and the first flap FP1 and the second flap FP2 may be separated by a slit SL, but the present invention is not limited thereto. It should be noted that the slit SL has a sufficiently small width to be a narrow slit.

[0095] like Figures 5 to 7 As shown, the actuator ATR may include a plurality of actuator portions, which are arranged on the petals of the diaphragm MB. Figures 5 to 7 As shown), since the diaphragm MB includes a first flap FP1 and a second flap FP2, the actuator ATR includes a first actuating portion AP1 arranged on the first flap FP1 and a second actuating portion AP2 arranged on the second flap FP2.

[0096] The actuator ATR has a monotonic electromechanical conversion function for the movement of the diaphragm MB in the direction Z. In some embodiments, the actuator ATR may include a piezoelectric actuator, an electrostatic actuator, a nanoscopic-electrostatic-drive (NED) actuator, an electromagnetic actuator, or any other suitable actuator. For example, in one embodiment, the actuator ATR may include a piezoelectric actuator, and the piezoelectric actuator may include, for example, two electrodes and a piezoelectric material layer (e.g., lead zirconate titanate (PZT)) disposed between the two electrodes, wherein the piezoelectric material layer may actuate the diaphragm MB according to a driving signal received by the electrode (e.g., a driving voltage and / or a driving voltage difference between the two electrodes), but is not limited thereto. For example, in another embodiment, the actuator ATR may include an electromagnetic actuator (e.g., a planar coil), wherein the electromagnetic actuator may actuate the diaphragm MB according to the received drive signal (e.g., drive current) and magnetic field (i.e., the diaphragm MB may be actuated by an electromagnetic force), but the invention is not limited thereto. For example, in another embodiment, the actuator ATR may include an electrostatic actuator (e.g., a conductive plate) or a NED actuator, wherein the electrostatic actuator or the NED actuator may actuate the diaphragm MB according to the received drive signal (e.g., drive voltage) and electric field (i.e., the diaphragm MB may be actuated by an electrostatic force), but the invention is not limited thereto. In the following, the actuator ATR may be exemplified as a piezoelectric actuator.

[0097] In some embodiments, the ventilation device VD may have multiple modes according to the positions of the petals of the diaphragm MB of the ventilation element VC. The vent VT has different sizes (ie, different openings) in different modes.

[0098] exist Figure 5 In the first mode, when the ventilation device VD is in the first mode, the first flap FP1 and the second flap FP2 can be actuated and maintained in the first position so that the vent VT has a first size (i.e., a first opening). In some embodiments, the first position can be parallel to the substrate VSB so that the vent VT is closed, but is not limited thereto. In the first mode, since the slit SL is a narrow slit and has a sufficiently small width, the airflow through the slit SL (or the closed vent VT) can be highly damped due to the viscous forces / resistance of the walls along the airflow path (which can be referred to as the in-field boundary layer effect of fluid mechanics). Therefore, in the first mode, the airflow flowing through the slit SL (or the closed vent VT) is small enough and can be ignored. In other words, when the ventilation device VD is in the first mode, the vent VT is closed or even sealed.

[0099] exist Figure 6 In the first type of the second mode (e.g., the second opening degree), the first flap FP1 and the second flap FP2 can be actuated to move in opposite directions so that the vent VT is opened to have a second size (i.e., a second opening degree). Figure 6 In the second type of the second mode (not shown), in the direction Z, the first flap FP1 is higher than the first position, and the second flap FP2 is lower than the first position. In the second type of the second mode (not shown), in the direction Z, the first flap FP1 is lower than the first position, and the second flap FP2 is higher than the first position. In the present invention, the first size of the vent VT in the first mode is different from the second size of the vent VT in the second mode. Figure 5 and Figure 6 In the embodiment, a first size of the vent VT in the first mode is smaller than a second size of the vent VT in the second mode.

[0100] Optionally, the ventilation device VD may have a third mode. Figure 7 In the third mode, when the ventilation device VD is in the third mode, the first flap FP1 and the second flap FP2 can be actuated to be lower than the first position in the direction Z so that the vent VT has a third size (i.e., a third opening). In some embodiments, the first flap FP1 and the second flap FP2 are close to the base plate VSB. In the present invention, the third size of the vent VT in the third mode is different from the first size of the vent VT in the first mode and the second size of the vent VT in the second mode. Figures 5 to 7 In the first mode, the first size of the vent VT is smaller than the third size of the vent VT in the third mode, and the third size of the vent VT in the third mode is smaller than the second size of the vent VT in the second mode. For example, when the ventilation device VD is in the third mode, the vent VT is almost closed, but not limited thereto.

[0101] The mode of the ventilation device VD can be controlled by an actuation signal (i.e., an electrical signal) applied to the actuator ATR. In some embodiments, the actuation signal can be applied to the actuator ATR via the conductive pad BP of the substrate VSB (e.g., the actuation signal can be applied to the actuator ATR via an electrical path formed by the conductive structure 152 of the top cover 150 and the conductive pad BP of the substrate VSB). For example, Figure 5 As shown, in the first mode, the actuation signals DV1 and DV2 for actuating the first flap FP1 and the second flap FP2 respectively may be 15V, but are not limited thereto. For example, in the first type of the second mode (eg Figure 6In the second mode (not shown), the actuation signal DV1 for actuating the first flap FP1 may be 30V, and the actuation signal DV2 for actuating the second flap FP2 may be 0V; in the second type of the second mode (not shown), the actuation signal DV1 for actuating the first flap FP1 may be 0V, and the actuation signal DV2 for actuating the second flap FP2 may be 30V, but not limited thereto. For example, Figure 7 As shown, in the third mode, the actuation signals DV1 and DV2 for respectively actuating the first flap FP1 and the second flap FP2 may be 0V, but the present invention is not limited thereto.

[0102] In the present invention, the measurement system 100 may further include a mode modulation device for controlling the mode of the ventilation device VD (e.g., the actuation signals DV1 and DV2 applied to the actuator ATR may be provided by the mode modulation device). In some embodiments, the mode modulation device may be electrically connected to the ventilation device VD through the conductive structure 152 of the top cover 150 and the conductive pad BP of the substrate VSB, but the present invention is not limited thereto. In some embodiments, the mode modulation device may be integrated into the signal processing device 140, but the present invention is not limited thereto.

[0103] In the present invention, the measuring system 100 is used to measure the opening of the vent VT formed by the ventilation device VD. In this embodiment, since the ventilation device VD has three modes, the measuring system 100 measures the first opening of the vent VT in the first mode, the second opening in the second mode, and the third opening in the third mode.

[0104] exist Figures 1 to 3 In the measurement system 100 shown, the top cover 150 has an air passage 154 connected to the external space of the measurement system 100, so that the first cavity 110a of the first cavity 110 is connected to the external space of the measurement system 100 through the air passage 154 and the ventilation device VD. Figures 1 to 3 In the design of the measurement system 100 shown, since the sound source 120 generates sound waves in the first cavity 110a and between the ventilation device VD and the sound sensing device 130, the amount of air leakage and / or leakage volume between the first cavity 110a and the external space of the measurement system 100 will change due to the opening of the vent VT formed by the ventilation device VD (i.e., the size of the vent VT) (i.e., the amount of air leakage and the amount of leakage will increase with the increase of the opening of the vent VT), so that the performance of the sound in the first cavity 110a will change accordingly. Therefore, the sound sensing device 130 of the measurement system 100 is used to sense the sound in the first cavity 110a to measure the opening of the vent VT formed by the ventilation device VD.

[0105] Accordingly, when the ventilator VD operates in the first mode, the sound sensing device 130 senses the first sound in the first cavity 110a of the first cavity 110 to obtain a first result (e.g., a first sensing signal) related to the first sound, so that the first opening of the vent VT formed by the ventilator VD in the first mode is obtained according to the first result. When the ventilator VD operates in the second mode, the sound sensing device 130 senses the second sound in the first cavity 110a of the first cavity 110 to obtain a second result (e.g., a second sensing signal) related to the second sound, so that the second opening of the vent VT formed by the ventilator VD in the second mode is obtained according to the second result. When the ventilator VD operates in the third mode, the sound sensing device 130 senses the third sound in the first cavity 110a of the first cavity 110 to obtain a third result (e.g., a third sensing signal) related to the third sound, so that the third opening of the vent VT formed by the ventilator VD in the third mode is obtained according to the third result.

[0106] In some embodiments, the sound pressure level of the sound in the first cavity 110a may change due to air leakage and / or sound leakage, and the degree of influence on the sound pressure level of the sound in the first cavity 110a may increase as the opening of the vent VT increases. Therefore, the sound sensing device 130 may sense the sound pressure level of the sound in the first cavity 110a to measure the opening of the vent VT formed by the vent device VD.

[0107] For example, the sound source 120 can generate sound waves of multiple frequencies, and the sound sensing device 130 can sense the sound in the first cavity 110a to obtain the frequency response of the measurement system 100 (i.e., the first result, the second result, and the third result are frequency responses in different modes), wherein the frequency response is the relationship between the sound pressure level and the frequency. In the frequency response of the measurement system 100, low frequency roll-off (LFRO) occurs due to air leakage and / or sound leakage caused by the vent VT, and the degree of LFRO increases as the opening of the vent VT increases. Therefore, the opening of the vent VT can be known by measuring the degree of LFRO. In this case, the degree of LFRO in the first result is less than the degree of LFRO in the third result, and the degree of LFRO in the third result is less than the degree of LFRO in the second result.

[0108] For example, the sound source 120 may generate a sound wave having an appropriate frequency, and the sound sensing device 130 may sense the sound pressure level of the sound in the first cavity 110a (i.e., the first result, the second result, and the third result are sound pressure levels in different modes). Based on air leakage and / or sound leakage, the degree of change in the sound pressure level of the sound will increase as the opening of the vent VT increases (e.g., the sound pressure level of the sound will decrease as the opening of the vent VT increases). Therefore, the opening of the vent VT can be known by measuring the sound pressure level of the sound in the first cavity 110. In this case, the sound pressure level sensed in the first result is greater than the sound pressure level sensed in the third result, and the sound pressure level sensed in the third result is greater than the sound pressure level sensed in the second result. For example, when the sound source 120 generates a sound wave having an appropriate frequency, LFRO occurs, so that the sensed sound pressure level decreases as the opening of the vent VT increases, but is not limited thereto. For example, the frequency of the sound wave may be approximately 100 Hz, but is not limited thereto.

[0109] According to the above-mentioned measurements, in order to accurately measure the opening of the vent VT formed by the ventilation device VD, a reference device is provided, wherein the measurement system 100 measures the opening of the reference device to obtain a reference result (e.g., a reference sensing signal) generated by the sound sensing device 130, and the reference result is used as a baseline for comparison with the measurement result of the ventilation device VD.

[0110] The reference device can be designed according to the requirements. In some embodiments, the reference device is a completely sealed device, so that the reference device has a minimum opening. Figure 8 , Figure 8 FIG. 4 is a schematic diagram of a reference device according to an embodiment of the present invention. Figure 8 As shown, the reference device RD is very similar to the vent device VD, except that the slit SL' (i.e., the vent VT) is sealed by the adhesive material AL. In other words, the reference device RD includes a reference substrate RSB, a reference cover structure RCS, and a reference element RC, wherein the reference cover structure RCS is disposed on the reference substrate RSB, and the reference element RC is disposed between the reference substrate RSB and the reference cover structure RCS. The reference substrate RSB has a bottom opening and is the same as the substrate VSB of the vent device VD. The reference cover structure RCS has a top opening OPt' and is the same as the cover structure VCS of the vent device VD. The reference element RC is very similar to the ventilation element VC. The reference element RC includes an anchoring structure AS', a diaphragm MB' and an actuator. The diaphragm MB' is anchored on the anchoring structure AS', and the actuator is arranged on the diaphragm MB', wherein the diaphragm MB' has a plurality of petals (e.g., a first petal FP1' and a second petal FP2') and a slit SL'. The slit SL' separates the petals, but the slit SL' (i.e., the ventilation port of the reference device RD) is sealed by an adhesive material AL.

[0111] Since the reference device RD is a completely sealed device, the reference device RD will hardly leak air or sound. Therefore, the difference between the result of measuring the ventilation device VD and the reference result of measuring the reference device RD will decrease as the difference between the opening of the vent VT formed by the ventilation device VD and the opening of the reference device RD decreases. In other words, if the vent VT of the ventilation device VD is closed, the ventilation device VD is designed so that the difference between the result of measuring the ventilation device VD and the reference result of measuring the reference device RD is extremely small (e.g., the difference is less than a set small value); if the vent VT of the ventilation device VD is open, the ventilation device VD is designed so that the difference between the result of measuring the ventilation device VD and the reference result of measuring the reference device RD is large (e.g., the difference is greater than a set large value).

[0112] In some embodiments, when the sound source 120 generates a sound wave having an appropriate frequency (e.g., 100 Hz), a first difference between the sound pressure level sensed in the first result (i.e., the first mode) and the sound pressure level sensed in the reference result may be less than or equal to a first value. For example, the first value may be 1 decibel (dB), so that the first difference may be 0 dB to 1 dB, but is not limited thereto. For example, when the ventilation device VD is in the first mode and the first difference is less than or equal to the first value, it is determined that the ventilation device VD is normal in the first mode.

[0113] In some embodiments, when the sound source 120 generates a sound wave having an appropriate frequency (e.g., 100 Hz), the second gap may be between the sound pressure level sensed in the second result (i.e., the second mode) and the sound pressure level sensed in the reference result, or may be between the sound pressure level sensed in the second result (i.e., the second mode) and the sound pressure level sensed in the first result (i.e., the first mode), and the second gap may be greater than or equal to a second value, wherein the second value is greater than the first value. For example, the second value may be 20 dB (e.g., the second gap may be 23 dB to 27 dB), but is not limited thereto. For example, when the ventilation device VD is in the second mode and the second gap is greater than or equal to the second value, it is determined that the ventilation device VD is normal in the second mode.

[0114] In some embodiments, when the sound source 120 generates a sound wave having an appropriate frequency (e.g., 100 Hz), the third difference between the sound pressure level sensed in the third result (i.e., the third mode) and the sound pressure level sensed in the reference result may be approximately a third value or within a range with the third value as an average value, wherein the third value is between the first value and the second value (i.e., the third value is greater than the first value and less than the second value), and the difference between the third value and the first value is less than the difference between the third value and the second value. In another embodiment, when the ventilation device VD is in the third mode and the third difference is less than or equal to the third value, it is determined that the ventilation device VD is normal in the third mode. For example, the third value may be 5 dB (e.g., the third difference may be 3 dB to 7 dB), but is not limited thereto.

[0115] In addition, the degree of LFRO in the case of measuring the reference device RD is lower than the degree of LFRO in the case of measuring each mode of the ventilation device VD, and the sound pressure level sensed in the case of measuring the reference device RD is greater than the sound pressure level sensed in the case of measuring each mode of the ventilation device VD.

[0116] In the following, the details of the measuring method will be exemplarily described. It should be noted that the measuring method of the present invention is also called a vent measuring method.

[0117] Please refer to Fig. 9 , Fig. 9 FIG. 1 is a flow chart of a measurement method according to an embodiment of the present invention. It should be understood that Fig. 9 The flowchart shown is only an illustrative example. In some embodiments, some steps may be performed simultaneously or in different Fig. 9 In some embodiments, any other suitable steps may be added to Fig. 9 Before or after a prior step in the measurement method shown. For the following content, the measurement method will refer to Fig. 9 Description is made, however, the measuring method is not limited to the embodiment described below.

[0118] exist Fig. 9 In step ST1 shown, a measurement system 100 is provided, wherein the measurement system 100 is as described above and will not be repeated here.

[0119] exist Fig. 9 In step ST2 shown, a reference measurement process is performed on the reference device RD. The reference device RD is as described above and will not be repeated here.

[0120] During the reference measurement process, the reference device RD is disposed between the first cavity 110 and the top cover 150. For example, Figure 2 and Figure 3In the measurement system 100 shown, after the reference device RD is disposed between the first cavity 110 and the top cover 150, the first cavity 110 and the top cover 150 are close to each other. Then, when the sound source 120 generates a sound wave, the reference sound in the first cavity 110a of the first cavity 110 is sensed by the sound sensing device 130 to obtain a reference result generated by the sound sensing device 130 and related to the reference sound.

[0121] In addition, a calibration process is performed on the sound source 120 so that the sound source 120 provides sound waves that meet the requirements and have an appropriate frequency. For example, the calibration process and the reference measurement process can be performed simultaneously, but not limited thereto. For example, the calibration process is performed before the reference measurement process is performed, but not limited thereto.

[0122] exist Fig. 9 In step ST3, at least one measurement process is performed on the ventilation device VD. The ventilation device VD is as described above and will not be repeated here. Since the ventilation device VD has a first mode, a second mode and a third mode, the first measurement process is performed on the ventilation device VD in the first mode, the second measurement process is performed on the ventilation device VD in the second mode, and the third measurement process is performed on the ventilation device VD in the third mode.

[0123] In the first measurement process, the ventilation device VD in the first mode is arranged between the first cavity 110 and the top cover 150. For example, Figure 2 and Figure 3 In the measurement system 100 shown, after the ventilation device VD is disposed between the first cavity 110 and the top cover 150, the first cavity 110 and the top cover 150 are close to each other. Then, when the sound source 120 generates a sound wave, the first sound in the first cavity 110a of the first cavity 110 is sensed by the sound sensing device 130 to obtain a first result generated by the sound sensing device 130 and related to the first sound.

[0124] In the second measurement process, the ventilation device VD in the second mode is disposed between the first cavity 110 and the top cover 150. Then, when the sound source 120 generates sound waves, the second sound in the first cavity 110a of the first cavity 110 is sensed by the sound sensing device 130 to obtain a second result related to the second sound generated by the sound sensing device 130. In this embodiment, the second measurement process can measure the first type of ventilation device VD in the second mode and the second type of ventilation device VD in the second mode to obtain two second results.

[0125] In the third measurement process, the ventilation device VD in the third mode is disposed between the first cavity 110 and the top cover 150. Then, when the sound source 120 generates sound waves, the third sound in the first cavity 110a of the first cavity 110 is sensed by the sound sensing device 130 to obtain a third result generated by the sound sensing device 130 and related to the third sound.

[0126] It should be noted that, in the measuring method, the mode of the ventilation device VD is controlled by the mode modulation device.

[0127] exist Fig. 9 In step ST4 shown, the result generated by the sound sensing device 130 is analyzed to obtain the opening of the vent VT formed by the ventilation device VD. The first opening of the vent VT formed by the ventilation device VD in the first mode is obtained based on the first result related to the first sound and the reference result related to the reference sound. The second opening of the vent VT formed by the ventilation device VD in the second mode is obtained based on the second result related to the second sound and the reference result related to the reference sound, or based on the second result related to the second sound and the first result related to the first sound. The third opening of the vent VT formed by the ventilation device VD in the third mode is obtained based on the third result related to the third sound and the reference result related to the reference sound.

[0128] In some embodiments, the first opening of the vent VT in the first mode can be obtained based on the gap between the first result and the reference result, the second opening of the vent VT in the second mode can be obtained based on the gap between the second result and the reference result or based on the gap between the second result and the first result, and the third opening of the vent VT in the third mode can be obtained based on the gap between the third result and the reference result, but is not limited to this.

[0129] For example, according to the above, if the ventilation device VD has a vent VT that is well opened and well closed, then when the sound source 120 generates a sound wave with a suitable frequency (e.g., 100 Hz), the first gap (related to the first result and the reference result), the second gap (related to the second result and the reference result or related to the second result and the first result) and the third gap (related to the third result and the reference result) of the sensed sound pressure levels will respectively meet the above ranges.

[0130] Therefore, the user can use the measuring system 100 and the measuring method of the present invention to test the ventilation device VD to determine whether the ventilation device VD is in good condition.

[0131] The measurement system and the measurement method of the present invention are not limited to the above-mentioned embodiments. Other embodiments will be disclosed below. However, in order to simplify the description and highlight the differences between each embodiment and the above-mentioned embodiments, the same reference numerals are used below to mark the same elements, and the repeated parts will not be repeated.

[0132] Please refer to Fig.10 , Fig.10 FIG. 1 is a schematic diagram of a measurement system according to a second embodiment of the present invention. Compared with the first embodiment, Fig.10 In the measurement system 200 shown, the ventilation element VC is placed upside down. Fig.10 In the embodiment, the ventilation device VD is inverted, but not limited to this. Fig.10 In the illustrated embodiment, in order to electrically connect (eg, directly contact) the conductive pad BP of the substrate VSB to the conductive structure 152 of the top cover 150 , the conductive pad BP may be disposed on a side of the substrate VSB opposite to the cover structure VCS and the venting element VC.

[0133] In another embodiment (not shown), the ventilation element VC may be disposed in the ventilation device VD by flip chip technology, so that the ventilation element VC is inverted, but the present invention is not limited thereto.

[0134] Please refer to Fig.11 , Fig.11 FIG. 1 is a schematic diagram of a measurement system according to a third embodiment of the present invention, wherein Fig.11 The structure shown is the second basic architecture of the measurement system of the present invention, and the measurement system 300 of the third embodiment of the present invention belonging to the second basic architecture can be implemented in any suitable manner. Fig.11 In the measurement system 300 shown, the position of the sound generating device SD (the sound source 120 and the second cavity 122) is changed. Fig.11 In the present invention, the sound generating device SD is arranged on the device under test (e.g., the ventilation device VD), so that the device under test (e.g., the ventilation device VD) is arranged between the first cavity 110 and the sound source 120, the sound source 120 is arranged between the ventilation device VD and the second cavity 122, and the sound source 120 and the device under test (e.g., the ventilation device VD) are connected to the first cavity 110a of the first cavity 110 and the second cavity 122a of the second cavity 122.

[0135] In the measurement system 300 belonging to the second basic structure, the relationship between the top cover 150 and the sound generating device SD can be designed according to the requirements, wherein the top cover 150 is not shown in FIG. Fig.10In some embodiments, the sound source 120 and the second cavity 122 may be disposed on the top cover 150, and the sound source 120 may be connected to the air channel 154 of the top cover 150, so that the top cover 150 may be disposed between the sound source 120 and the device under test (e.g., the ventilation device VD), and the first cavity 110a of the first cavity 110 may be connected to the sound source 120 through the air channel 154 and the ventilation device VD, but is not limited thereto.

[0136] In some embodiments, the sound source 120 and the second cavity 122 may be disposed in the top cover 150, and the aforementioned air channel 154 may be removed from the top cover 150, but the present invention is not limited thereto. In some embodiments, the sound source 120, the second cavity 122 and the top cover 150 may be combined into one structure, but the present invention is not limited thereto.

[0137] exist Fig.11 In the measurement system 300 shown, the device under test (e.g., the ventilation device VD) is disposed between the sound source 120 and the sound sensing device 130, so that the sound waves generated by the sound source 120 need to pass through the device under test in order to propagate to the first cavity 110a of the first cavity 110. Therefore, based on air leakage and / or sound leakage, the opening of the device under test is related to the sound (e.g., the sound pressure level of the sound) in the first cavity 110a of the first cavity 110. For example, the sound pressure level of the sound in the first cavity 110a of the first cavity 110 increases as the opening of the device under test increases.

[0138] For example, the sound source 120 can generate a sound wave with an appropriate frequency, and the sound sensing device 130 can sense the sound pressure level of the sound in the first cavity 110a, so that the opening of the device under test can be known by measuring the sound pressure level of the sound in the first cavity 110a. For example, the frequency of the sound wave can be about 100 Hz, but is not limited thereto.

[0139] Since the reference device RD is a completely sealed device, the reference device RD has almost no air and sound leakage. Therefore, the sound pressure level sensed in the reference result of the reference measurement process for measuring the reference device RD is lower than the sound pressure level sensed under the condition of measuring the ventilation device VD in each mode. According to the opening of the vent VT formed by the ventilation device VD in each mode, the sound pressure level sensed in the first result of the first measurement process for measuring the ventilation device VD in the first mode is lower than the sound pressure level sensed in the third result of the third measurement process for measuring the ventilation device VD in the third mode, and the sound pressure level sensed in the third result is lower than the sound pressure level sensed in the second result of the second measurement process for measuring the ventilation device VD in the second mode.

[0140] The difference between the result of measuring the ventilation device VD and the reference result of measuring the reference device RD will decrease as the difference between the opening of the vent VT formed by the ventilation device VD and the opening of the reference device RD decreases. In other words, if the vent VT of the ventilation device VD is closed, the ventilation device VD is designed so that the difference between the result of measuring the ventilation device VD and the reference result of measuring the reference device RD is extremely small (e.g., the difference is less than a set small value); if the vent VT of the ventilation device VD is open, the ventilation device VD is designed so that the difference between the result of measuring the ventilation device VD and the reference result of measuring the reference device RD is large (e.g., the difference is greater than a set large value).

[0141] The first difference between the sound pressure level sensed in the first result (ie, the first mode) and the sound pressure level sensed in the reference result may be less than or equal to a first value. For example, the first value may be 1 dB, so that the first difference may be 0 dB to 1 dB, but is not limited thereto.

[0142] The second gap may be between the sound pressure level sensed in the second result (i.e., the second mode) and the sound pressure level sensed in the reference result, or between the sound pressure level sensed in the second result (i.e., the second mode) and the sound pressure level sensed in the first result (i.e., the first mode), and the second gap may be greater than or equal to a second value, wherein the second value is greater than the first value. For example, the second value may be 20 dB (e.g., the second gap may be 23 dB to 27 dB), but is not limited thereto.

[0143] The third difference between the sound pressure level sensed in the third result (i.e., the third mode) and the sound pressure level sensed in the reference result may be approximately a third value or within a range with the third value as an average value, wherein the third value is between the first value and the second value, and the difference between the third value and the first value is less than the difference between the third value and the second value. In another embodiment, when the ventilation device VD is in the third mode and the third difference is less than or equal to the third value, it is determined that the ventilation device VD is normal in the third mode. For example, the third value may be 5 dB (e.g., the third difference may be 3 dB to 7 dB), but is not limited thereto.

[0144] Please refer to Fig.12 , Fig.12 FIG. 4 is a schematic diagram of a measurement system according to a fourth embodiment of the present invention. Compared with the third embodiment, Fig.12 In the measurement system 400 shown, the ventilation element VC is placed upside down. Fig.12In the embodiment, the ventilation device VD is upside down, and the conductive pad BP can be arranged on the side of the substrate VSB opposite to the cover structure VCS and the ventilation element VC, but the invention is not limited thereto. For example (not shown), the ventilation element VC can be arranged in the ventilation device VD by flip chip technology, so that the ventilation element VC is upside down, but the invention is not limited thereto.

[0145] In summary, the user can use the measuring system and the measuring method of the present invention to test the ventilation device to determine whether the ventilation device is in good condition.

[0146] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A measurement system, characterized in that: include: a first cavity, wherein a first cavity exists in the first cavity; a sound sensing device for sensing the sound in the first cavity; an acoustic source for generating an acoustic wave propagating toward the first cavity; as well as a top cover, disposed on the first cavity; The measuring system is used to measure an opening of a vent formed by a ventilating device; The ventilation device is arranged between the first cavity and the top cover, the ventilation device is connected to the first cavity of the first cavity to measure the opening, the first cavity of the first cavity is between the ventilation device and the sound sensing device, and the opening is obtained according to the result generated by the sound sensing device.

2. The measuring system according to claim 1, characterized in that The vent device has a first mode and a second mode. The vent of the vent device has a first size in the first mode and a second size in the second mode. The first size is different from the second size.

3. The measuring system according to claim 1, characterized in that The sound sensing device faces the ventilation device.

4. The measuring system according to claim 1, characterized in that The sound source is disposed between the ventilation device and the sound sensing device.

5. The measuring system according to claim 1, characterized in that The ventilation device is arranged between the first cavity and the sound source.

6. The measuring system according to claim 5, characterized in that The measurement system further comprises a second cavity, wherein a second hollow space exists in the second cavity, the sound source is arranged between the ventilation device and the second cavity, and the sound source is connected to the second hollow space of the second cavity.

7. The measuring system according to claim 1, characterized in that The top cover has an air passage, and the air passage is connected to the first cavity of the first cavity through the ventilation device.

8. The measuring system according to claim 7, characterized in that The first cavity of the first cavity body is connected to the external space of the measurement system through the air channel and the ventilation device.

9. The measuring system according to claim 1, characterized in that The top cover includes a conductive structure electrically connected to the ventilation device.

10. The measuring system according to claim 1, characterized in that The measuring system further includes a position modulation structure, and the position modulation structure is used to make the first cavity and the top cover close to each other.

11. The measuring system according to claim 1, characterized in that The measurement system further comprises a mode modulation device, wherein the mode modulation device is used to control the mode of the ventilation device.

12. The measuring system according to claim 1, characterized in that The measurement system further includes a signal processing device, which is electrically connected to the sound sensing device and is used for receiving and analyzing a sensing signal generated by the sound sensing device.

13. The measuring system according to claim 1, characterized in that The first cavity is a tubular structure.

14. A measurement method, characterized in that: include: A measurement system is provided, wherein the measurement system comprises: a first cavity, wherein a first cavity exists in the first cavity; an acoustic source for generating an acoustic wave propagating toward the first cavity; and a top cover, disposed on the first cavity; and A first measurement process is performed on a ventilation device, wherein the first measurement process comprises: Disposing the ventilator between the first cavity and the top cover; and When the sound source generates the sound wave, a first sound in the first cavity of the first cavity is sensed, wherein a first opening of a vent formed by the vent device is obtained according to a first result related to the first sound.

15. The measuring method according to claim 14, characterized in that: The measuring method further comprises: A reference measurement process is performed on a reference device, wherein the reference measurement process comprises: placing the reference device between the first cavity and the top cover; and When the sound source generates the sound wave, a reference sound is sensed in the first cavity of the first cavity, wherein the first opening of the vent formed by the ventilation device is obtained based on the first result related to the first sound and a reference result related to the reference sound.

16. The measuring method according to claim 15, characterized in that: The reference device is a completely sealed device.

17. The measuring method according to claim 14, characterized in that: The first measurement process is performed when the ventilation device is in a first mode, and the measurement method further comprises: Performing a second measurement process on the ventilation device in a second mode, wherein the second measurement process comprises: disposing the venting device in the second mode between the first cavity and the top cover; and When the sound source generates the sound wave, a second sound is sensed in the first cavity of the first cavity, wherein a second opening of the vent formed by the vent device in the second mode is obtained according to a second result related to the second sound.

18. The measuring method according to claim 17, characterized in that: The vent of the vent device has a first size in the first mode, and the vent of the vent device has a second size in the second mode, the first size being different from the second size.

19. The measuring method according to claim 14, characterized in that: The measurement system further includes a sound sensing device, which is used to sense the first sound.

20. A method for testing a ventilation device, characterized in that: include: obtaining a reference result; Obtaining a first result corresponding to a first mode of the ventilation device and a second result corresponding to a second mode of the ventilation device; Obtaining a first difference between the first result and the reference result and a second difference between the second result and the reference result; When the first difference is less than a first value, it is determined that the ventilation device is normal in the first mode; as well as When the second difference is greater than a second value, it is determined that the ventilation device is normal in the second mode; wherein the ventilation device is driven to operate in the first mode or the second mode; The second value is greater than the first value.

21. The testing method according to claim 20, characterized in that: The test method also includes: Obtaining a third result corresponding to a third mode of the ventilation device; Obtaining a third difference between the third result and the reference result; and When the third difference is less than a third value, it is determined that the ventilation device is normal in the third mode; The third value is greater than the first value.

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