Complex free-form surface laser jet assisted conformal micromachining device and method

Abstract

The invention provides a laser jet assisted conformal micro-machining device and method for a complex free-form surface, and belongs to the technical field of laser machining, the laser jet assisted conformal micro-machining device mainly comprises a marble platform, a gantry support, an X sliding table, a Y sliding table, a Z sliding table, three groups of variable row reflectors, a laser machining unit, a water jet unit and a bus control system; the jet flow is used for assisting the conformal spray head, accurate positioning and non-directional water flow scouring are carried out on a workpiece subjected to laser machining, and the problems that heat is directionally gathered, and slag is accumulated in a single direction are solved.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision special processing, and in particular relates to a device and method for laser jet-assisted conformal micro-processing of a complex free-form surface. Background Art

[0002] In the field of mechanical processing, although ultrashort pulse laser processing technology has high precision and low thermal damage, it has problems such as low processing efficiency and poor parallelism of the cutting seam. Water jet-assisted laser technology can make up for these defects. By uniformly conducting laser energy in the water jet, the cutting cone angle can be reduced, the processing accuracy can be improved, the heat-affected zone can be reduced, and cracks and residues can be reduced. However, at present, this process is mainly used for small flat workpieces and is rarely used in the processing of complex free-form surface workpieces.

[0003] The prior art closest to the present invention is application number 201810325364.5, and the name of the invention is a laser water jet composite processing system. The existing water jet assisted laser processing device utilizes the high energy of the laser and the cooling and cleaning effects of the water jet, and has certain advantages in improving processing accuracy and efficiency. Its advantage is that it can effectively integrate the laser and the water jet to achieve a more efficient processing process. However, the water jet nozzle currently used limits the scope of application of this technology. First, due to the complex and changeable shapes of complex free-form surfaces, the geometric features such as the curvature of each point are significantly different, resulting in the process. It is difficult to ensure that the laser beam and the water jet can work together at the best angle and parameters at each processing position during the processing. Secondly, a large amount of heat will be generated during the laser processing process, and the current nozzle is difficult to achieve uniform cooling of the workpiece, thereby affecting the processing quality. In addition, the current nozzle has limited cleaning effect on the surface of the workpiece after processing. Impurities such as residual waste slag may not be completely removed.

[0004] In summary, existing laser processing devices have obvious deficiencies in complex free-form surfaces and other aspects, and there is an urgent need for a complex free-form surface laser jet-assisted conformal micromachining device and method to solve these problems. Summary of the invention

[0005] In order to solve the problems existing in the prior art, the present invention provides a complex free-form surface laser jet-assisted conformal micromachining device and method, which utilizes a jet-assisted conformal nozzle to accurately position the workpiece after laser processing and flush it with non-directional water flow, thereby solving the problems of directional heat accumulation and slag accumulation in a single direction.

[0006] The technical solution of the present invention is: A complex free-form surface laser jet-assisted conformal micromachining device, comprising a marble platform, a gantry bracket is fixedly arranged on the marble platform, an X-slide is fixedly arranged on the gantry bracket, a slider of the X-slide is fixedly connected to a breadboard through an X-slide adapter plate, and a laser processing unit and a water jet unit are arranged on the breadboard; A Y slide is also fixedly arranged on the marble platform below the X slide, the slider of the Y slide is fixedly connected to the Z slide via the Y slide adapter plate, and the slider of the Z slide is fixedly connected to the protective cover via the Z slide adapter plate; A loading platform is fixedly arranged in the protective cover, and a workpiece fixture for fixing the workpiece to be processed is fixedly arranged on the loading platform; The laser processing unit comprises a laser, a first deformable reflector, a second deformable reflector, a third deformable reflector and a focusing mirror, wherein the focusing mirror is fixedly connected below the third deformable reflector, and a light guide is arranged between the laser and the first deformable reflector, between the first deformable reflector and the second deformable reflector, and between the second deformable reflector and the third deformable reflector; The water jet unit includes a nozzle fixing mechanism and a jet-assisted conformal nozzle mechanism, wherein the nozzle fixing mechanism includes a nozzle manual slide and a nozzle bidirectional manual slide, one end of the nozzle manual slide is bolted to the breadboard, and the other end is fixedly connected to the top of the nozzle bidirectional manual slide through a connecting plate, and the bottom of the nozzle bidirectional manual slide is bolted to the jet-assisted conformal nozzle mechanism through a manual slide adapter plate, and the position of the jet-assisted conformal nozzle mechanism can be adjusted in three mutually perpendicular directions through the nozzle manual slide and the nozzle bidirectional manual slide; It also includes a bus control system, which is communicatively connected with the first deformable reflector, the second deformable reflector, the third deformable reflector, the X slide, the Y slide, the Z slide, and the jet-assisted conformal nozzle mechanism.

[0007] Furthermore, the jet-assisted conformal nozzle mechanism includes a bearing end cover, a rolling bearing, a bushing, a connecting key, a turntable, a bearing, a nozzle fixture, a rotating shaft, a motor base, a rotating shaft coupling, a rotating shaft motor, a turntable motor, a turntable coupling, a motor connecting plate, a nozzle connecting rod and a nozzle. The motor shaft of the turntable motor is connected to the turntable drive shaft through the turntable coupling, the turntable motor is fixed to the motor connecting plate, the turntable and the motor connecting plate are connected to the manual slide adapter plate through mounting holes and bolts, the bearing is fixedly connected to the output shaft of the turntable, and the bearing end cover is connected to the bearing through a thread. The nozzle clamp is connected to the rotating shaft through a connecting key and can rotate with the rotating shaft. The shaft sleeve and the shaft shoulder of the rotating shaft jointly limit the nozzle clamp. The nozzle and the nozzle connecting rod are connected together by a nut. The nozzle connecting rod is fixed on the nozzle clamp. The motor base is connected to the bearing member through bolts. The rotating shaft motor is connected to the motor base through a long screw. The motor shaft of the rotating shaft motor is connected to the rotating shaft through a rotating shaft coupling, and the rotating shaft motor and the turntable motor are both communicatively connected to the bus control system.

[0008] A method for laser jet-assisted conformal micromachining of a complex free-form surface, using the aforementioned laser jet-assisted conformal micromachining device for a complex free-form surface, comprises the following steps: S1. Scan the workpiece with complex curved surface on the PC side through the three-dimensional coordinate measuring machine to determine the coordinates of each processing point on the processing path. For each processing point, the tangent slope of the surface at the processing point is calculated by the difference method. The laser incident angle at each processing point is calculated by the method of the laser being perpendicular to the tangent. , and the laser incident angle The data is sent to the bus control system; The bus control system over-simulates the incident angle of the incident flow to determine; The simulation steps include: (1) Determination of core variables: including laser incident angle , jet incident angle , the pressure of the water jet , the flow rate of the water jet , the power of the laser , material hardness, thermal conductivity, absorptivity, surface curvature radius, and normal vector change rate; (2) Construct a multi-physics simulation model. According to the parameters of the water jet, build a water jet impact distribution model based on the Navier-Stoke equation to simulate the water jet impact force distribution and jet incident angle. Impact on slag removal efficiency; (3) Construct the laser-material thermal-mechanical coupling model and material removal rate based on the parameters of the laser and the material Empirical model, analyzing the energy absorption when the laser is incident, and calculating the cooling effect and thermal stress distribution of the water jet at different angles; (4) Select the jet incident angle , water jet pressure , water jet velocity , laser power is a variable, set to 3~5 levels, generate a simulation matrix, and output the surface roughness , material removal rate , Heat affected zone width , based on the multi-physics simulation model and multivariate linear regression method, the jet incident angle is established Functional relationship: ; Establishing the jet incidence angle The quadratic regression equation is: ; In the formula All are regression coefficients. The significant items were screened by ANOVA analysis and retained. Model; in, It is the coefficient of determination, which is used to measure the degree of fit of the regression model to the observed data. Its value is between 0 and 1. The closer it is to 1, the better the model fits the data. Optimize and determine the initial jet incident angle through genetic algorithm , taking a processing point on the free-form surface workpiece as the origin O, establish a local rectangular coordinate system O-xyz; wherein the axis coincides with the surface normal of the workpiece at the processing point, and the direction points to the side away from the workpiece; determine the mutually perpendicular x-axis and y-axis on the workpiece surface to form a right-handed coordinate system; Laser incident angle is the angle between the laser beam propagation direction and the positive axis direction, and the range is ; Jet incident angle is the angle between the jet center axis and the positive direction of the axis, and the range is ; The angle between the laser and the jet is ; Laser incident angle By adjusting the first deformable reflector, the second deformable reflector and the third deformable reflector to be perpendicular to the tangent line, that is, always coinciding with the normal vector of the tangent plane in the coordinate system, the laser incident angle is always zero, that is, ; The three angles are related by the cosine theorem of a spherical triangle, namely ,in is the angle between the projection of the laser and the jet on the xy plane; because ,but ; Finally you can get ; because , , in this range the cosine function is monotonic, so the jet incident angle is ; When the initial jet incident angle After being determined as a constant through simulation, the angle between the laser and the jet It is always a constant value, that is, when the jet incident angle is adjusted for the first time The best coordination with the laser beam has been achieved. During the processing, it is sufficient to maintain the dynamic coordination between the laser beam and the water jet, that is, the position change angle of the laser beam relative to the previous state is equal to the position change angle of the water jet relative to the previous state. S2, stably clamping the workpiece to be processed on the stage by a workpiece fixture to ensure that it will not have displacement deviation in the subsequent processing process, and then turning on the laser, the laser beam passes through the first deformable reflector, the second deformable reflector and the third deformable reflector, and then is focused by the focusing mirror to form a laser light path and irradiate the workpiece surface; S3, after preliminarily adjusting the position of the nozzle to the area irradiated by the laser spot using the nozzle manual slide and the nozzle bidirectional manual slide, start the jet-assisted conformal nozzle mechanism; S4, turn on the bus control system at the same time, and use the bus control system to precisely control the X slide, Y slide, Z slide, the first deformable mirror, the second deformable mirror, the third deformable mirror, the shaft motor and the turntable motor. According to the simulation results of step 1, the laser is incident on The angle is adjusted to the initial angle, and the jet incident angle Also adjust the initial angle and start processing, bus control to ensure the laser incident angle The angle of position change relative to the last processing position is equal to the jet incidence angle The changed angle relative to the last processing position makes the laser processing unit and the water jet unit in the best coordinated state.

[0009] Furthermore, the liquid medium sprayed by the jet-assisted conformal nozzle mechanism is water, the water is placed in a water storage tank, and the jet velocity is adjusted by a high-pressure argon tank connected to the water storage tank.

[0010] The beneficial effects of the present invention are: 1. Compared with fixed nozzles that can only promote heat conduction in a specific direction, jet-assisted conformal nozzles can drive heat to diffuse in multiple directions, effectively avoiding excessive accumulation of heat in a certain local area, thereby preventing the occurrence of thermal stress concentration and improving processing quality. This is of great significance for complex free-form surface processing of heat-sensitive materials such as titanium alloys and aluminum alloys, and can effectively avoid material deformation and performance degradation caused by thermal effects; 2. When faced with materials of different shapes, structures and physical properties, the jet-assisted conformal nozzle can easily adjust the water flow angle to ensure that the processing conditions are adapted to the material properties. For complex free-form surfaces, the water jet is precisely controlled to work with the laser at the optimal angle and parameters at each processing point. From the perspective of mechanical motion control, the accuracy of the processing process is guaranteed, and errors caused by processing angle deviations are effectively avoided. In terms of processing accuracy, the incision taper angle is significantly reduced, the parallelism of the cut is greatly improved, and the dimensional accuracy is accurately guaranteed, fully meeting the stringent precision requirements for complex curved surface parts in high-end manufacturing fields such as aerospace and high-end mold manufacturing; 3. Compared with the current nozzles, the jet-assisted conformal nozzle can spray water from multiple directions to impact the slag produced after processing, effectively avoiding the situation where the slag accumulates in only one direction. And through regulation, it can ensure that the laser irradiation area falls into the overlapping area formed by multiple water jet impacts, thereby achieving complete removal of the slag and ensuring the subsequent process processing of the workpiece; 4. The device is easy to operate and the nozzle has a high degree of automation, which can avoid errors caused by manual adjustment of the nozzle and greatly reduce the cost of use. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a structural schematic diagram of the device of the present invention;

[0012] Figure 2 for Figure 1 The enlarged view of point A in the middle;

[0013] Figure 3 It is a structural schematic diagram of the nozzle fixing mechanism of the device of the present invention;

[0014] Figure 4 It is a schematic structural diagram of the jet-assisted conformal nozzle mechanism of the device of the present invention;

[0015] Figure 5 A cross-sectional view of a jet-assisted conformal nozzle mechanism of the device of the present invention;

[0016] Figure 6 A schematic diagram of the connection relationship between the spray bar and the nozzle fixture of the device of the present invention;

[0017] Figure 7 It is a schematic diagram of the structure of the nozzle fixture of the device of the present invention;

[0018] Figure 8 It is a structural schematic diagram of the motor connecting plate of the device of the present invention;

[0019] Fig. 9 It is a structural schematic diagram of the motor base of the device of the present invention;

[0020] Fig.10 Schematic diagram of the processing principle of the method of the present invention.

[0021] In the figure, 1-gantry bracket, 2-X slide, 3-X slide adapter plate, 4-laser, 5-Z slide adapter plate, 6-Z slide, 7-Y slide adapter plate, 8-Y slide, 9-marble platform, 10-breadboard, 11-first deformable reflector, 12-second deformable reflector, 13-third deformable reflector, 14-focusing mirror, 15-workpiece fixture, 16-protective cover, 17-stage, 18-workpiece to be processed, 19-nozzle hand Moving slide, 20-connecting plate, 21-nozzle bidirectional manual slide, 22-manual slide adapter plate, 23-bearing end cover, 24-rolling bearing, 25-sleeve, 26-connecting key, 27-turntable, 28-bearing member, 29-nozzle fixture, 30-rotating shaft, 31-motor base, 32-rotating shaft coupling, 33-rotating shaft motor, 34-turntable motor, 35-turntable coupling, 36-motor connecting plate, 37-nozzle connecting rod, 38-nozzle. DETAILED DESCRIPTION

[0022] A complex free-form surface laser jet-assisted conformal micromachining device, comprising a marble platform 9, a gantry bracket 1 is fixedly arranged on the marble platform 9, an X-slide 2 is fixedly arranged on the gantry bracket 1, a slider of the X-slide 2 is fixedly connected to a breadboard 10 through an X-slide adapter plate 3, a laser processing unit and a water jet unit are arranged on the breadboard 10, and the X-slide 2 can control the lateral position of the laser processing unit and the water jet unit; A Y slide 8 is also fixedly arranged on the marble platform 9 below the X slide 2, and the slider of the Y slide 8 is fixedly connected to the Z slide 6 through the Y slide adapter plate 7, and the slider of the Z slide 6 is fixedly connected to the protective cover 16 through the Z slide adapter plate 5; a stage 17 is fixedly arranged in the protective cover 16, and a workpiece fixture 15 for fixing the workpiece 18 to be processed is fixedly arranged on the stage 17, and the Z slide 6 and the Y slide 8 can control the position of the workpiece 18 to be processed on the horizontal plane; The laser processing unit includes a laser 4, a first deformable reflector 11, a second deformable reflector 12, a third deformable reflector 13 and a focusing mirror 14, wherein the focusing mirror 14 is fixedly connected below the third deformable reflector 13, and light guides are arranged between the laser 4 and the first deformable reflector 11, between the first deformable reflector 11 and the second deformable reflector 12, and between the second deformable reflector 12 and the third deformable reflector 13; The first deformable reflector 11, the second deformable reflector 12 and the third deformable reflector 13 have their own driving mechanisms, which can adjust the angle between the incident laser and the mirror surface; The water jet unit includes a nozzle fixing mechanism and a jet-assisted conformal nozzle mechanism, wherein the nozzle fixing mechanism includes a nozzle manual slide 19 and a nozzle bidirectional manual slide 21, one end of the nozzle manual slide 19 is bolted to the breadboard 10, and the other end is fixedly connected to the top of the nozzle bidirectional manual slide 21 through a connecting plate 20, and the bottom of the nozzle bidirectional manual slide 21 is bolted to the jet-assisted conformal nozzle mechanism through a manual slide adapter plate 22, and the position of the jet-assisted conformal nozzle mechanism can be adjusted in three mutually perpendicular directions through the nozzle manual slide 19 and the nozzle bidirectional manual slide 21; It also includes a bus control system, which is in communication connection with the first deformable reflector 11, the second deformable reflector 12, the third deformable reflector 13, the X slide 2, the Y slide 8, the Z slide 6 and the jet-assisted conformal nozzle mechanism, and the bus control system can adjust the angles of the first deformable reflector 11, the second deformable reflector 12 and the third deformable reflector 13, and can also adjust the displacements of the X slide 2, the Y slide 8 and the Z slide 6; Furthermore, the jet-assisted conformal nozzle mechanism includes a bearing end cover 23, a rolling bearing 24, a sleeve 25, a connecting key 26, a turntable 27, a bearing 28, a nozzle fixture 29, a rotating shaft 30, a motor base 31, a rotating shaft coupling 32, a rotating shaft motor 33, a turntable motor 34, a turntable coupling 35, a motor connecting plate 36, a nozzle connecting rod 37 and a nozzle 38. The motor shaft of the turntable motor 34 is connected to the turntable drive shaft through the turntable coupling 35, the turntable motor 34 is fixed on the motor connecting plate 36, the turntable 27 and the motor connecting plate 36 are connected to the manual slide adapter plate 22 through mounting holes and bolts, the bearing 28 is fixedly connected to the output shaft of the turntable 27, and the bearing end cover 23 is connected to the turntable 27 through threads. The bearing member 28 is used to limit the movement of the rolling bearing 24, and the rolling bearing 24 is used to reduce the friction and wear of the rotating shaft 30. The nozzle clamp 29 is connected to the rotating shaft 30 through the connecting key 26 and can rotate with the rotating shaft 30. The shaft sleeve 25 and the shoulder of the rotating shaft 30 jointly limit the nozzle clamp 29. The nozzle 38 and the nozzle connecting rod 37 are connected together by a nut, and the nozzle connecting rod 37 is fixed on the nozzle clamp 29. The motor base 31 is connected to the bearing member 28 by bolts, and the rotating shaft motor 33 is connected to the motor base 31 by a long screw. The motor shaft of the rotating shaft motor 33 is connected to the rotating shaft 30 through a rotating shaft coupling 32, and the rotating shaft motor 33 and the turntable motor 34 are both connected to the bus control system for communication.

[0023] A method for laser jet-assisted conformal micromachining of a complex free-form surface, using the aforementioned laser jet-assisted conformal micromachining device for a complex free-form surface, the method comprising the following steps: S1. Scan the workpiece 18 with a complex curved surface on the PC side by using a three-dimensional coordinate measuring machine to determine the coordinates of each processing point on the processing path. For each processing point, the tangent slope of the curved surface at the processing point is calculated by using the differential method. The laser incident angle at each processing point is calculated by using the method of the laser being perpendicular to the tangent. , and the laser incident angle The data is sent to the bus control system; The bus control system over-simulates the incident angle of the incident flow to determine; The simulation steps include: (1) Determination of core variables: including laser incident angle , jet incident angle , the pressure of the water jet , the flow rate of the water jet , the power of the laser , material hardness, thermal conductivity, absorptivity, surface curvature radius, and normal vector change rate; (2) Construct a multi-physics simulation model. According to the parameters of the water jet, build a water jet impact distribution model based on the Navier-Stoke equation to simulate the water jet impact force distribution and jet incident angle. Impact on slag removal efficiency; (3) Construct the laser-material thermal-mechanical coupling model and material removal rate based on the parameters of the laser and the material Empirical model, analyzing the energy absorption when the laser is incident, and calculating the cooling effect and thermal stress distribution of the water jet at different angles; (4) Select the jet incident angle , water jet pressure , water jet velocity , laser power is a variable, set to 3~5 levels, generate a simulation matrix, and output the surface roughness , material removal rate , Heat affected zone width , based on the multi-physics simulation model and multivariate linear regression method, the jet incident angle is established Functional relationship: ; Establishing the jet incidence angle The quadratic regression equation is: ; In the formula All are regression coefficients. The significant items were screened by ANOVA analysis and retained. Model; in, It is the coefficient of determination, which is used to measure the degree of fit of the regression model to the observed data. Its value is between 0 and 1. The closer it is to 1, the better the model fits the data. Optimize and determine the initial jet incident angle through genetic algorithm , taking a processing point on the free-form surface workpiece as the origin O, establish a local rectangular coordinate system O-xyz; wherein the axis coincides with the surface normal of the workpiece at the processing point, and the direction points to the side away from the workpiece; determine the mutually perpendicular x-axis and y-axis on the workpiece surface to form a right-handed coordinate system; Laser incident angle is the angle between the laser beam propagation direction and the positive axis direction, and the range is ; Jet incident angle is the angle between the jet center axis and the positive direction of the axis, and the range is ; The angle between the laser and the jet is ; Laser incident angle By adjusting the first deformable reflector 11, the second deformable reflector 12 and the third deformable reflector 13 to be perpendicular to the tangent line, that is, always coinciding with the normal vector of the tangent plane in the coordinate system, the laser incident angle is always zero, that is, ; The three angles are related by the cosine theorem of a spherical triangle, namely ,in is the angle between the projection of the laser and the jet on the xy plane; because ,but ; Finally you can get ; because , , in this range the cosine function is monotonic, so the jet incident angle is ; When the initial jet incident angle After being determined as a constant through simulation, the angle between the laser and the jet It is always a constant value, that is, when the jet incident angle is adjusted for the first time The best coordination with the laser beam has been achieved. During the processing, it is sufficient to maintain the dynamic coordination between the laser beam and the water jet, that is, the position change angle of the laser beam relative to the previous state is equal to the position change angle of the water jet relative to the previous state. S2, stably clamp the workpiece 18 to be processed on the stage 17 through the workpiece fixture 15 to ensure that there will be no displacement deviation in the subsequent processing process, and then turn on the laser 4, the laser beam passes through the first deformable reflector 11, the second deformable reflector 12 and the third deformable reflector 13, and is focused by the focusing mirror 14 to form a laser light path and irradiate the workpiece surface; S3, after preliminarily adjusting the position of the nozzle to the area irradiated by the laser spot using the nozzle manual slide 19 and the nozzle bidirectional manual slide 21, the jet-assisted conformal nozzle mechanism is turned on; S4, simultaneously turn on the bus control system, and use the bus control system to precisely control the X slide 2, the Y slide 8, the Z slide 6, the first deformable mirror 11, the second deformable mirror 12, the third deformable mirror 13, the shaft motor 33 and the turntable motor 34. According to the simulation results of step 1, the laser is incident on The angle is adjusted to the initial angle, and the jet incident angle Also adjust the initial angle and start processing, bus control to ensure the laser incident angle The angle of position change relative to the last processing position is equal to the jet incidence angle The changed angle relative to the last processing position makes the laser processing unit and the water jet unit in the best coordinated state.

[0024] In the process of adjusting the nozzle 38 as the laser incident angle changes, the left and right swing of the nozzle 38 will increase the width of the jet area, and the up and down swing of the nozzle 38 will increase the length of the jet area, thereby forming a larger water jet area. In this process, the position of the laser spot is always in the overlapping area of ​​each water jet injection. These water flows generate multi-directional impact forces in the processing area. The main purpose is to completely remove the slag generated during the processing from the surface of the workpiece, ensure that the processing area is always kept clean, and ultimately achieve high-quality processing results. Finally, the waste liquid in the processing process will be discharged to the container for storing the waste liquid through the drain pipe.

[0025] Furthermore, the liquid medium sprayed by the jet-assisted conformal nozzle mechanism is water, the water is placed in a water storage tank, and the jet velocity is adjusted by a high-pressure argon tank connected to the water storage tank.

[0026] The above description is only a preferred specific implementation mode of the present invention and is not a limitation of the present invention. Any equivalent substitutions and modifications made by any technician in this field without departing from the guidance of the present invention are deemed to fall within the protection scope of the present invention.

Claims

1. A complex free-form surface laser jet-assisted conformal micromachining device, characterized in that: It comprises a marble platform (9), a gantry bracket (1) is fixedly arranged on the marble platform (9), an X-slide table (2) is fixedly arranged on the gantry bracket (1), a slider of the X-slide table (2) is fixedly connected to a breadboard (10) via an X-slide table adapter plate (3), and a laser processing unit and a water jet unit are arranged on the breadboard (10); A Y slide (8) is also fixedly arranged on the marble platform (9) below the X slide (2); the slider of the Y slide (8) is fixedly connected to the Z slide (6) via the Y slide adapter plate (7); and the slider of the Z slide (6) is fixedly connected to the protective cover (16) via the Z slide adapter plate (5); A loading platform (17) is fixedly disposed in the protective cover (16), and a workpiece fixture (15) for fixing a workpiece to be processed (18) is fixedly disposed on the loading platform (17); The laser processing unit comprises a laser (4), a first deformable reflector (11), a second deformable reflector (12), a third deformable reflector (13) and a focusing mirror (14), wherein the focusing mirror (14) is fixedly connected below the third deformable reflector (13), and light guides are provided between the laser (4) and the first deformable reflector (11), between the first deformable reflector (11) and the second deformable reflector (12), and between the second deformable reflector (12) and the third deformable reflector (13); The water jet unit comprises a nozzle fixing mechanism and a jet-assisted conformal nozzle mechanism, wherein the nozzle fixing mechanism comprises a nozzle manual slide (19) and a nozzle bidirectional manual slide (21), one end of the nozzle manual slide (19) is bolted to the breadboard (10), and the other end is fixedly connected to the top of the nozzle bidirectional manual slide (21) via a connecting plate (20), the bottom of the nozzle bidirectional manual slide (21) is bolted to the jet-assisted conformal nozzle mechanism via a manual slide adapter plate (22), and the position of the jet-assisted conformal nozzle mechanism can be adjusted in three mutually perpendicular directions via the nozzle manual slide (19) and the nozzle bidirectional manual slide (21); It also includes a bus control system, which is communicatively connected to the first deformable reflector (11), the second deformable reflector (12), the third deformable reflector (13), the X slide (2), the Y slide (8), the Z slide (6), and the jet-assisted conformal nozzle mechanism.

2. The complex free-form surface laser jet-assisted conformal micromachining device according to claim 1, characterized in that: The jet-assisted conformal nozzle mechanism comprises a bearing end cover (23), a rolling bearing (24), a sleeve (25), a connecting key (26), a turntable (27), a bearing member (28), a nozzle fixture (29), a rotating shaft (30), a motor base (31), a rotating shaft coupling (32), a rotating shaft motor (33), a turntable motor (34), a turntable coupling (35), a motor connecting plate (36), a nozzle connecting rod (37) and a nozzle (38), wherein the motor shaft of the turntable motor (34) is connected to the turntable drive shaft via the turntable coupling (35), the turntable motor (34) is fixed on the motor connecting plate (36), the turntable (27) and the motor connecting plate (36) are connected to the manual slide adapter plate (22) via mounting holes and bolts, the bearing member (28) is fixedly connected to the output rotating shaft of the turntable (27), and the bearing end cover (23) is connected to the turntable via threads. The nozzle clamp (29) is connected to the rotating shaft (30) through a connecting key (26) and can rotate with the rotating shaft (30). The shaft sleeve (25) and the shaft shoulder of the rotating shaft (30) jointly limit the nozzle clamp (29). The nozzle (38) and the nozzle connecting rod (37) are connected together through a nut. The nozzle connecting rod (37) is fixed on the nozzle clamp (29). The motor base (31) is connected to the bearing member (28) through bolts. The rotating shaft motor (33) is connected to the motor base (31) through a long screw. The motor shaft of the rotating shaft motor (33) is connected to the rotating shaft (30) through a rotating shaft coupling (32). The rotating shaft motor (33) and the turntable motor (34) are both connected to the bus control system for communication.

3. A method for laser jet-assisted conformal micromachining of a complex free-form surface, using the laser jet-assisted conformal micromachining device for a complex free-form surface as claimed in claim 2, characterized in that: The steps include: S1. Scanning a workpiece (18) with a complex curved surface on a PC by means of a three-dimensional coordinate measuring machine to determine the coordinates of each processing point on the processing path. For each processing point, the tangent slope of the curved surface at the processing point is calculated by using a differential method. The laser incident angle at each processing point is calculated by using a method in which the laser is perpendicular to the tangent. , and the laser incident angle The data is sent to the bus control system; The bus control system over-simulates the incident angle of the incident flow to determine; The simulation steps include: (1) Determination of core variables: including laser incident angle , jet incident angle , the pressure of the water jet , the flow rate of the water jet , the power of the laser , material hardness, thermal conductivity, absorptivity, surface curvature radius, and normal vector change rate; (2) Construct a multi-physics simulation model. According to the parameters of the water jet, build a water jet impact distribution model based on the Navier-Stoke equation to simulate the water jet impact force distribution and jet incident angle. Impact on slag removal efficiency; (3) Construct the laser-material thermal-mechanical coupling model and material removal rate based on the parameters of the laser and the material Empirical model, analyzing the energy absorption when the laser is incident, and calculating the cooling effect and thermal stress distribution of the water jet at different angles; (4) Select the jet incident angle , water jet pressure , water jet velocity , laser power is a variable, set to 3~5 levels, generate a simulation matrix, and output the surface roughness , material removal rate , Heat affected zone width , based on the multi-physics simulation model and multivariate linear regression method, the jet incident angle is established Functional relationship: ； Establishing the jet incidence angle The quadratic regression equation is: ； In the formula All are regression coefficients. The significant items were screened by ANOVA analysis and retained. Model; in, It is the coefficient of determination, which is used to measure the degree of fit of the regression model to the observed data. Its value is between 0 and 1. The closer it is to 1, the better the model fits the data. Optimize and determine the initial jet incident angle through genetic algorithm , taking a processing point on the free-form surface workpiece as the origin O, establish a local rectangular coordinate system O-xyz; wherein the axis coincides with the surface normal of the workpiece at the processing point, and the direction points to the side away from the workpiece; determine the mutually perpendicular x-axis and y-axis on the workpiece surface to form a right-handed coordinate system; Laser incident angle is the angle between the laser beam propagation direction and the positive axis direction, and the range is ; Jet incident angle is the angle between the jet center axis and the positive direction of the axis, and the range is ; The angle between the laser and the jet is ; Laser incident angle By regulating the first deformable reflector (11), the second deformable reflector (12) and the third deformable reflector (13) so that they are perpendicular to the tangent line, that is, they always coincide with the normal vector of the tangent plane in the coordinate system, the laser incident angle is always zero, that is, ; The three angles are related by the cosine theorem of a spherical triangle, namely ,in is the angle between the projection of the laser and the jet on the xy plane; because ,but ; Finally you can get ; because , , in this range the cosine function is monotonic, so the jet incident angle is ; When the initial jet incident angle After being determined as a constant through simulation, the angle between the laser and the jet It is always a constant value, that is, when the jet incident angle is adjusted for the first time The best coordination with the laser beam has been achieved. During the processing, it is sufficient to maintain the dynamic coordination between the laser beam and the water jet, that is, the position change angle of the laser beam relative to the previous state is equal to the position change angle of the water jet relative to the previous state. S2, stably clamping the workpiece (18) to be processed on the stage (17) by means of a workpiece clamp (15) to ensure that there will be no displacement deviation during the subsequent processing, then turning on the laser (4), and the laser beam passes through the first deformable reflector (11), the second deformable reflector (12) and the third deformable reflector (13), and then is focused by the focusing mirror (14) to form a laser light path and irradiate the workpiece surface; S3, using the nozzle manual slide (19) and the nozzle bidirectional manual slide (21) to preliminarily adjust the position of the nozzle to the area irradiated by the laser spot, and then start the jet-assisted conformal nozzle mechanism; S4, simultaneously turning on the bus control system, and using the bus control system to precisely control the X slide (2), the Y slide (8), the Z slide (6), the first deformable reflector (11), the second deformable reflector (12), the third deformable reflector (13), the shaft motor (33) and the turntable motor (34), and according to the simulation results of step 1, the laser is incident on The angle is adjusted to the initial angle, and the jet incident angle Also adjust the initial angle and start processing, bus control to ensure the laser incident angle The angle of position change relative to the last processing position is equal to the jet incidence angle The changed angle relative to the last processing position makes the laser processing unit and the water jet unit in the best coordinated state.

4. The method for complex free-form surface laser jet-assisted conformal micromachining according to claim 3, characterized in that: The liquid medium sprayed by the jet-assisted conformal nozzle mechanism is water, the water is placed in a water storage tank, and the jet speed is adjusted by a high-pressure argon tank connected to the water storage tank.

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