Method for splitting glass substrate through mechanical arm

Abstract

The invention provides a method for splitting a glass substrate through a mechanical arm, relates to the technical field of mechanical arm control, and is used for improving the splitting efficiency of the glass substrate. The method mainly comprises the following steps: acquiring corner position coordinates of the glass substrate placed on the glass substrate placing platform; an adsorption pad is tightly attached to the bottom of the glass substrate; determining a motion path of a wedge-shaped stripping head at the tail end of the six-axis main mechanical arm according to the angular point position coordinates, wherein an end point in the motion path is the position where the angular point position coordinates are located; when the six-axis main mechanical arm is controlled to run to the angular point position coordinates according to the motion path, a wedge-shaped stripping head arranged at the tail end of the six-axis main mechanical arm is controlled to be inserted between the glass substrate and the adsorption pad; and the six-axis main mechanical arm is controlled to split the glass substrate and the adsorption pad through the obtained data of the six-dimensional force sensor.

Description

Technical Field

[0001] The present application relates to the field of robot arm control technology, and in particular to a method for splitting a glass substrate by using a robot arm. Background Art

[0002] Glass substrate is one of the most important basic materials for electronic product displays, and its thinning process is an important step to make the glass substrate thinner and smoother. Glass substrate polishing machine is an engineering equipment that achieves glass thinning through chemical mechanical polishing process. During the polishing process, the glass substrate is between the upper and lower fixed plates, and the two plates perform relative rotation and translation motion, and interact with the chemical polishing liquid that covers the circulation, so as to achieve the process goal.

[0003] This process has very high requirements for the clamping of the glass substrate to prevent scratches, cracks and other damage to the glass substrate during the polishing process. At present, a polyurethane foam pad (called an adsorption pad) with a thickness of about 1 mm is generally used for vacuum adsorption. The adsorption pad is attached to a rigid workbench, and the glass substrate is placed flat on the adsorption pad. The air in the micropores of the adsorption pad is discharged through external force compaction, so that the glass substrate and the adsorption pad fit tightly. After thinning, the glass substrate needs to be separated from the adsorption pad to realize the splitting operation of the glass substrate.

[0004] At present, the splitting of glass substrates is still mainly done manually, relying on the human fingers to "pick" the glass upwards. The manual splitting method not only has low production efficiency, but also easily causes the glass substrate to break during the operation. Summary of the invention

[0005] The embodiment of the present application provides a method for splitting a glass substrate by using a robot arm, which is used to improve the efficiency of splitting the glass substrate.

[0006] An embodiment of the present invention provides a method for splitting a glass substrate by a robot arm. The method is applied to a robot arm control system. The robot arm control system includes: a robot arm controller, a six-axis main robot arm, a six-axis auxiliary robot arm, and a glass substrate placement platform; a wedge-shaped stripping head is provided at the end of the six-axis main robot arm, a vibrator is provided inside the wedge-shaped stripping head, and a nitrogen exhaust port is provided at the end of the six-axis auxiliary robot arm; the robot arm controller is connected to the six-axis main robot arm and the six-axis auxiliary robot arm, respectively, and the robot arm controller is used to execute the following method: Acquiring the coordinates of the corner points of the glass substrate placed on the glass substrate placement platform; an adsorption pad is tightly attached to the bottom of the glass substrate; Determine the motion path of the wedge-shaped peeling head at the end of the six-axis main robot arm according to the corner point position coordinates, wherein the end point in the motion path is the position where the corner point position coordinates are located; When the six-axis main robot arm is controlled to move to the corner point position coordinate according to the motion path, a wedge-shaped stripping head provided at the end of the six-axis main robot arm is controlled to be inserted between the glass substrate and the adsorption pad; The six-axis main robot arm is controlled by the acquired six-dimensional force sensor data to separate the glass substrate and the adsorption pad.

[0007] An embodiment of the present invention provides a robotic arm controller, which is applied to a robotic arm control system. The robotic arm controller includes: An acquisition module is used to acquire the coordinates of the corner points of the glass substrate placed on the glass substrate placement platform; an adsorption pad is tightly attached to the bottom of the glass substrate; A determination module, used to determine the motion path of the wedge-shaped peeling head at the end of the six-axis main robot arm according to the corner point position coordinates, wherein the end point in the motion path is the position where the corner point position coordinates are located; A control module, configured to control the six-axis main robot arm to move to the corner point position coordinate according to the motion path, and control the wedge-shaped stripping head provided at the end of the six-axis main robot arm to be inserted between the glass substrate and the adsorption pad; The splitting module is used to control the six-axis main robot arm to split the glass substrate and the adsorption pad through the acquired six-dimensional force sensor data.

[0008] A computer program product, comprising a computer program, wherein when the computer program is executed by a processor, the method for splitting a glass substrate by a robotic arm is implemented.

[0009] The present invention provides a method for splitting a glass substrate by a robotic arm. The method is applied to a robotic arm control system. The robotic arm control system comprises: a robotic arm controller, a six-axis main robotic arm, a six-axis auxiliary robotic arm, and a glass substrate placement platform. Among them, a wedge-shaped stripping head is arranged at the end of the six-axis main robot arm, a vibrator is arranged inside the wedge-shaped stripping head, and a nitrogen exhaust port is arranged at the end of the six-axis auxiliary robot arm; a robot arm controller is connected to the six-axis main robot arm and the six-axis auxiliary robot arm respectively, and the robot arm controller is used to execute the following method: first, the corner point position coordinates of the glass substrate placed on the glass substrate placement platform are obtained; the bottom of the glass substrate is tightly attached with an adsorption pad; then, according to the corner point position coordinates, the movement path of the wedge-shaped stripping head arranged at the end of the six-axis main robot arm is determined, and the end point in the movement path is the position where the corner point position coordinates are located; then, when the six-axis main robot arm is controlled to move to the corner point position coordinates according to the movement path, the wedge-shaped stripping head arranged at the end of the six-axis main robot arm is controlled to be inserted between the glass substrate and the adsorption pad; finally, the six-axis main robot arm is controlled to separate the glass substrate and the adsorption pad through the acquired six-dimensional force sensor data. Compared with the existing glass substrate splitting which is still mainly done manually, the present application first inserts the wedge-shaped stripping head provided at the end of the six-axis main robot arm between the glass substrate and the adsorption pad, and then controls the six-axis auxiliary robot arm according to the six-dimensional force sensor data to autonomously split the glass substrate and the adsorption pad, thereby improving the splitting efficiency of the glass substrate through the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 A flow chart of a method for splitting a glass substrate by a robotic arm provided in this application; Figure 2 A flowchart of a six-axis main robot arm splitting a glass substrate provided in this application; Figure 3 A schematic diagram of the structure of a robotic arm controller provided in this application; Figure 4 A schematic diagram of a computer device provided in this application. DETAILED DESCRIPTION

[0011] In order to better understand the above-mentioned technical scheme, the technical scheme of the embodiments of the present application is described in detail below through the accompanying drawings and specific embodiments. It should be understood that the embodiments of the present application and the specific features in the embodiments are detailed descriptions of the technical scheme of the embodiments of the present application, rather than limitations on the technical scheme of the present application. In the absence of conflict, the embodiments of the present application and the technical features in the embodiments may be combined with each other.

[0012] A method for splitting a glass substrate by a robot arm is provided in an embodiment of the present invention. The method is applied to a robot arm control system, and the robot arm control system includes: a robot arm controller, a six-axis main robot arm, a six-axis auxiliary robot arm, a glass substrate placement platform, and a laser displacement sensor. Among them, the glass substrate placement platform is used to place the glass substrate to be split, and the laser displacement sensor is used to detect the distance between the glass substrate and the adsorption pad in real time. The end of the six-axis main robot arm is provided with a wedge-shaped peeling head and equipped with a vacuum suction cup clamp, and the separation force is monitored in real time by a force feedback sensor. A vibrator is provided inside the wedge-shaped peeling head, and a nitrogen exhaust port is provided at the end of the six-axis auxiliary robot arm, through which nitrogen can be discharged.

[0013] See also Figure 1 This embodiment provides a method for splitting a glass substrate by a robot arm, wherein the robot arm controller is connected to the six-axis main robot arm and the six-axis auxiliary robot arm respectively, and the robot arm controller is used to perform the following method: S101, obtaining the coordinates of the corner points of the glass substrate placed on the glass substrate placement platform.

[0014] The bottom of the glass substrate is tightly attached with an adsorption pad, and the corner point position coordinates may be the position coordinates of the four right-angle points of the glass substrate, or the position coordinates of any corner point specified by the user.

[0015] S102, determining a motion path of a wedge-shaped peeling head at the end of the six-axis main robot arm according to the corner point position coordinates, wherein an end point in the motion path is a position where the corner point position coordinates are located.

[0016] The motion path is the trajectory path from the initial position of the wedge-shaped stripping head at the end of the six-axis main robot arm to the corner point position coordinates.

[0017] S103, when the six-axis main robot is controlled to move to the corner point position coordinate according to the motion path, a wedge-shaped peeling head provided at the end of the six-axis main robot is controlled to be inserted between the glass substrate and the adsorption pad.

[0018] In this embodiment, the control of inserting the wedge-shaped stripping head provided at the end of the six-axis main robot arm between the glass substrate and the adsorption pad includes: controlling the lower surface of the wedge-shaped stripping head to fit the adsorption pad, and inserting the wedge-shaped stripping head provided at the end of the six-axis main robot arm between the glass substrate and the adsorption pad at a preset speed, so that the area of ​​the lower surface of the wedge-shaped stripping head between the glass substrate and the adsorption pad is greater than a preset ratio. The preset ratio is the ratio of the area of ​​the lower surface of the wedge-shaped stripping head between the glass substrate and the adsorption pad to the total area of ​​the lower surface of the wedge-shaped stripping head, and the ratio can be set according to demand, such as three quarters, five sixths, etc., which is not limited in this embodiment.

[0019] Specifically, in this embodiment, the wedge-shaped stripping head at the end of the six-axis main robot arm can be controlled to be inserted between the glass substrate and the adsorption pad through a progressive spiral trajectory. The progressive spiral trajectory is a progressive spiral trajectory along which the wedge-shaped stripping head at the end of the six-axis main robot arm needs to follow the corner point position coordinates. The progressive spiral trajectory can be determined by the following formula: , in, is the spiral radius expansion rate , is the spiral angular velocity , is the vertical separation displacement, is the initial height, =0.1mm / s, t time variable (unit: second).

[0020] It should be noted that this embodiment controls the wedge-shaped stripping head at the end of the six-axis main robot arm to be inserted between the glass substrate and the adsorption pad. In addition to the progressive spiral trajectory, it is also necessary to determine the robot arm joint angle vector, joint torque vector, and end force command corresponding to each time node in the progressive spiral trajectory, and then control the wedge-shaped stripping head set at the end of the six-axis main robot arm to be inserted between the glass substrate and the adsorption pad according to the progressive spiral trajectory, the robot arm joint angle vector, the joint torque vector, and the end force command.

[0021] in, The joint angle vector of the robot arm is calculated by the formula: is the robot joint angle vector, is the end effector pose matrix (4×4 homogeneous transformation matrix), Solve the inverse kinematics function (based on the DH parameter model).

[0022] Calculate by formula Joint torque vector, , is a 6×6 mass matrix (unit: kg·m²), is the Coriolis force / centripetal force term (unit: N·m), is the gravity term (unit: N·m); Mapping the end external force to the joint space , unit: N·m). is the six-dimensional force sensor data, is the force along the sensor's X-axis direction, is the force along the Y axis of the sensor, is the force along the Z-axis of the sensor, is the moment around the sensor's X axis, is the moment around the sensor Y axis, is the moment about the sensor's Z axis.

[0023] Calculated by impedance control equation Calculate the end force command, is the end force command (unit: N), K is the stiffness matrix (unit: N·m), D is the damping matrix (unit: N·s / m), is the expected position, is the desired velocity, x is the actual position, is the actual speed.

[0024] S104, controlling the six-axis main robot arm to separate the glass substrate and the adsorption pad by using the acquired six-dimensional force sensor data.

[0025] In this embodiment, when controlling the wedge-shaped stripping head disposed at the end of the six-axis main robot to insert between the glass substrate and the adsorption pad, the six-dimensional force sensor data is first acquired according to the force feedback sensor per unit time, and then the six-axis main robot is dynamically controlled based on the acquired six-dimensional force sensor data to separate the glass substrate and the adsorption pad. For example, if the force along the Z-axis direction of the sensor is detected, , then reduce the vertical speed by 20%; if tangential force is detected , then reduce the spiral angular velocity by 30%.

[0026] like Figure 2 As shown, in an optional embodiment provided in the present application, the six-axis main robot is controlled by the acquired six-dimensional force sensor data to separate the glass substrate and the adsorption pad, including: S1041, inputting the n groups of six-dimensional force sensor data measured most recently into the six-dimensional force prediction model to obtain the six-dimensional force sensor prediction data at the next time point.

[0027] Among them, the six-dimensional force prediction model is a time prediction model trained according to sample data. The six-dimensional force sensor prediction data at the next time point can be obtained through the trained six-dimensional force prediction model, so that in the subsequent steps, the six-axis main robot arm can be controlled according to the six-dimensional force sensor prediction data to separate the glass substrate and the adsorption pad.

[0028] S1042, determining the joint torque vector of the end of the six-axis main robot arm at the next time point through the six-dimensional force sensor prediction data at the next time point.

[0029] In this embodiment, after obtaining the six-dimensional force sensor prediction data at the next time point, it is first necessary to determine whether the six-dimensional force sensor prediction data at the next time point is within a safe range. If it is not within the safe range, the six-dimensional force sensor prediction data needs to be modified to obtain the six-dimensional force sensor prediction data within the safe range, and then the joint torque vector of the end of the six-axis main robot arm at the next time point is determined based on the six-dimensional force sensor prediction data within the safe range. Specifically, Determine the joint torque vector.

[0030] It should be noted that the allowable stress of the glass substrate It is determined based on the fracture strength of the glass substrate and the stress area of ​​the glass substrate (the contact area between the wedge-shaped stripping head of the six-axis main robot and the glass substrate). For example, for 0.5 mm thick soda-lime glass (σ fracture = 50 MPa, safety factor of 2, contact area of ​​10 mm²): =50 / 2×10=250N. To determine whether the predicted data of the six-dimensional force sensor is within the safe range, we can determine whether the predicted data of the six-dimensional force sensor is within the safe range. Is it less than or equal to . If the vertical separation force is controlled, it is usually limited , to prevent crushing the glass substrate.

[0031] Then, this embodiment can also determine the local stress concentration factor k (usually k=2-3) through finite element simulation or experimental data to dynamically adjust the safety threshold , then the formula Determine the separation speed, is the safety threshold, is the initial separation speed (such as 0.1 mm / s), when near When the separation speed is reduced, the stress is reduced. =10N, =8N, then =0.1*(1−8 / 10)=0.02mm / s.

[0032] S1043, controlling the wedge-shaped peeling head at the end of the six-axis auxiliary robot arm through the joint torque vector of the six-axis main robot arm at the next time point, and acquiring the six-dimensional force sensor data at the current time point.

[0033] In this embodiment, after obtaining the six-dimensional force sensor data at the current time point, jump to step S1041 to continue executing and input the n groups of six-dimensional force sensor data most recently into the six-dimensional force prediction model to obtain the six-dimensional force sensor prediction data for the next time point and continue executing until the six-axis auxiliary robot arm completes the separation of the glass substrate and the adsorption pad.

[0034] Furthermore, before controlling the operation of the wedge-shaped stripping head at the end of the six-axis auxiliary robot arm through the joint torque vector of the six-axis main robot arm at the next time point, the method also includes: calculating the vibration parameters of the vibrator at the next time point through the six-dimensional force sensor prediction data at the next time point, and calculating the nitrogen pressure of the nitrogen exhaust port at the next time point through the separation gap between the glass substrate and the adsorption pad at the current time point; accordingly, while controlling the wedge-shaped stripping head at the end of the six-axis auxiliary robot arm through the joint torque vector of the six-axis main robot arm at the next time point, the vibration of the vibrator is controlled according to the vibration parameters, and the nitrogen discharge from the nitrogen exhaust port is controlled according to the nitrogen pressure.

[0035] Specifically, the step of calculating the vibration parameters of the vibrator at the next time point by using the six-dimensional force sensor prediction data at the next time point in this embodiment includes: By formula calculating the frequency of the vibrator at a next time point; By formula Calculating the amplitude of the vibrator at a next time point; in, is the base value of vibration frequency, is the base amplitude value, is the amplitude-torque coefficient, is the force along the Z-axis direction of the sensor in the six-dimensional force sensor, is the torque around the Z axis of the six-dimensional force sensor, is a constant coefficient.

[0036] It should be noted that there can be multiple six-axis auxiliary robotic arms in this embodiment, and each six-axis auxiliary robotic arm is provided with a corresponding nitrogen exhaust port. Preferably, two six-axis auxiliary robotic arms are provided in this embodiment. When the glass substrate and the adsorption pad are separated by the six-axis main robotic arm, the two six-axis auxiliary robotic arms can cooperate to discharge nitrogen, so as to realize the zoned control of nitrogen pressure, gradually expand the separation gap, and reduce the mechanical contact stress. In this embodiment, the adsorption pad is divided into a central area (Zone 1) and a peripheral area (Zone 2), and an independent air circuit control valve is provided in each area. When the laser ranging sensor detects the separation gap When the gap expands to , turn off the vacuum in the peripheral area and turn on the nitrogen injection of the six-axis auxiliary robot arm corresponding to this area.

[0037] Specifically, the method of calculating the nitrogen pressure of the nitrogen discharge port at a next time point by using the separation gap between the glass substrate and the adsorption pad at a current time point in this embodiment includes: The nitrogen pressure at the nitrogen discharge port at the next time point is calculated by the following formula: , in, is the separation gap between the adsorption pads at the current time point, is the minimum nitrogen pressure, is the maximum nitrogen pressure, is the pressure-gap response coefficient, is the gap value corresponding to the midpoint of pressure change.

[0038] In this embodiment, the monitoring torque in the data can also be predicted by the six-dimensional force sensor at the next time point. Dynamically adjust the nitrogen pressure distribution to suppress the warping of the glass substrate. (the right side of the substrate is warped), the pressure of the nitrogen nozzle on the right side is increased by 10%; if (The left side of the substrate is warped), the pressure of the nitrogen nozzle on the left side is increased by 10%.

[0039] After controlling the operation of the wedge-shaped peeling head at the end of the six-axis auxiliary robot arm through the joint torque vector of the six-axis main robot arm at the next time point, the method also includes: determining whether a sudden adhesion force change occurs based on the vibration of the six-dimensional force sensor and the vibrator measured at the current time point; if the sudden adhesion force change occurs, generating an obstacle avoidance path.

[0040] This embodiment provides a method for splitting a glass substrate by a robotic arm. The method is applied to a robotic arm control system. The robotic arm control system includes: a robotic arm controller, a six-axis main robotic arm, a six-axis auxiliary robotic arm, and a glass substrate placement platform. Among them, a wedge-shaped stripping head is arranged at the end of the six-axis main robot arm, a vibrator is arranged inside the wedge-shaped stripping head, and a nitrogen exhaust port is arranged at the end of the six-axis auxiliary robot arm; a robot arm controller is connected to the six-axis main robot arm and the six-axis auxiliary robot arm respectively, and the robot arm controller is used to execute the following method: first, the corner point position coordinates of the glass substrate placed on the glass substrate placement platform are obtained; the bottom of the glass substrate is tightly attached to an adsorption pad; then, according to the corner point position coordinates, the movement path of the wedge-shaped stripping head at the end of the six-axis main robot arm is determined, and the end point in the movement path is the position where the corner point position coordinates are located; then, when the six-axis main robot arm is controlled to move to the corner point position coordinates according to the movement path, the wedge-shaped stripping head arranged at the end of the six-axis main robot arm is controlled to be inserted between the glass substrate and the adsorption pad; finally, the six-axis main robot arm is controlled to separate the glass substrate and the adsorption pad through the acquired six-dimensional force sensor data. Compared with the existing glass substrate splitting which is still mainly done manually, the present application first inserts the wedge-shaped stripping head provided at the end of the six-axis main robot arm between the glass substrate and the adsorption pad, and then controls the six-axis auxiliary robot arm according to the six-dimensional force sensor data to autonomously split the glass substrate and the adsorption pad, thereby improving the splitting efficiency of the glass substrate through the present application.

[0041] It should be understood that the order of execution of the steps in the above embodiment does not necessarily mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiment of the present invention.

[0042] In one embodiment, a robot arm controller is provided, and the robot arm controller corresponds to the method for splitting a glass substrate by a robot arm in the above embodiment. Figure 3 As shown, the functional modules of the robotic arm controller are described in detail as follows: The acquisition module 31 is used to acquire the coordinates of the corner points of the glass substrate placed on the glass substrate placement platform; the bottom of the glass substrate is tightly attached with an adsorption pad; A determination module 32, for determining a motion path of the wedge-shaped peeling head at the end of the six-axis main robot arm according to the corner point position coordinates, wherein the end point in the motion path is the position where the corner point position coordinates are located; A control module 33, configured to control the six-axis main robot arm to move to the corner point position coordinate according to the motion path, and control the wedge-shaped stripping head provided at the end of the six-axis main robot arm to be inserted between the glass substrate and the adsorption pad; The separation module 34 is used to control the six-axis main robot arm to separate the glass substrate and the adsorption pad through the acquired six-dimensional force sensor data.

[0043] In an optional embodiment, the control module 33 is specifically configured to: The lower surface of the wedge-shaped stripping head is controlled to fit the adsorption pad, and the wedge-shaped stripping head at the end of the six-axis main robot arm is inserted between the glass substrate and the adsorption pad at a preset speed, so that the area of ​​the lower surface of the wedge-shaped stripping head between the glass substrate and the adsorption pad is larger than the preset ratio.

[0044] In an optional embodiment, the splitting module 34 is specifically used to: Inputting the n groups of six-dimensional force sensor data measured most recently into the six-dimensional force prediction model to obtain the six-dimensional force sensor prediction data at the next time point; Determine the joint torque vector of the six-axis main robot arm at the next time point by using the six-dimensional force sensor prediction data at the next time point; The operation of the wedge-shaped peeling head at the end of the six-axis auxiliary robot is controlled by the joint torque vector of the six-axis main robot at the next time point, and the six-dimensional force sensor data at the current time point is obtained, and the step is jumped to input the n groups of six-dimensional force sensor data most recently into the six-dimensional force prediction model to obtain the six-dimensional force sensor prediction data at the next time point and continue to execute until the six-axis auxiliary robot completes the separation of the glass substrate and the adsorption pad.

[0045] In an optional embodiment, the determination module 32 is further configured to calculate the vibration parameters of the vibrator at the next time point through the six-dimensional force sensor prediction data at the next time point, and calculate the nitrogen pressure of the nitrogen exhaust port at the next time point through the separation gap between the glass substrate and the adsorption pad at the current time point; The control module 33 is also used to control the operation of the wedge-shaped stripping head at the end of the six-axis auxiliary robot arm through the joint torque vector of the six-axis main robot arm at the next time point, control the vibration of the vibrator according to the vibration parameters, and control the nitrogen discharge from the nitrogen discharge port according to the nitrogen pressure.

[0046] In an optional embodiment, the determination module 32 is specifically configured to: By formula calculating the frequency of the vibrator at a next time point; By formula Calculating the amplitude of the vibrator at a next time point; in, is the base value of vibration frequency, is the base amplitude value, is the amplitude-torque coefficient, is the force along the Z-axis direction of the sensor in the six-dimensional force sensor, is the torque around the Z axis of the six-dimensional force sensor, is a constant coefficient.

[0047] In an optional embodiment, the determination module 32 is specifically configured to: The nitrogen pressure at the nitrogen discharge port at the next time point is calculated by the following formula: , in, is the separation gap between the adsorption pads at the current time point, is the minimum nitrogen pressure, is the maximum nitrogen pressure, is the pressure-gap response coefficient, is the gap value corresponding to the midpoint of pressure change.

[0048] In an optional embodiment, the determination module 32 is further configured to: Determine whether a sudden change in adhesion occurs based on the vibration of the six-dimensional force sensor and vibrator measured at the current time point; If the adhesion force mutation phenomenon occurs, an obstacle avoidance path is generated.

[0049] For the specific definition of the robot controller, please refer to the definition of the method for splitting a glass substrate by a robot above, which will not be repeated here. Each module in the above device can be implemented in whole or in part by software, hardware and a combination thereof. Each of the above modules can be embedded in or independent of the processor in the computer device in the form of hardware, or can be stored in the memory of the computer device in the form of software, so that the processor can call and execute the operations corresponding to each of the above modules.

[0050] In one embodiment, a computer device is provided. The computer device may be a server, and its internal structure diagram may be as follows: Figure 4 As shown. The computer device includes a processor, a memory, a network interface and a database connected through a system bus. Among them, the processor of the computer device is used to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system, a computer program and a database. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The network interface of the computer device is used to communicate with an external terminal through a network connection. When the computer program is executed by the processor, a method for splitting a glass substrate by a robotic arm is implemented.

[0051] In one embodiment, a computer device is provided, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor implements the following steps when executing the computer program: Acquiring the coordinates of the corner points of the glass substrate placed on the glass substrate placement platform; an adsorption pad is tightly attached to the bottom of the glass substrate; Determine the motion path of the wedge-shaped peeling head at the end of the six-axis main robot arm according to the corner point position coordinates, wherein the end point in the motion path is the position where the corner point position coordinates are located; When the six-axis main robot arm is controlled to move to the corner point position coordinate according to the motion path, a wedge-shaped stripping head provided at the end of the six-axis main robot arm is controlled to be inserted between the glass substrate and the adsorption pad; The six-axis main robot arm is controlled by the acquired six-dimensional force sensor data to separate the glass substrate and the adsorption pad.

[0052] In one embodiment, a computer readable storage medium is provided, on which a computer program is stored, and when the computer program is executed by a processor, the following steps are implemented: Acquiring the coordinates of the corner points of the glass substrate placed on the glass substrate placement platform; an adsorption pad is tightly attached to the bottom of the glass substrate; Determine the motion path of the wedge-shaped peeling head at the end of the six-axis main robot arm according to the corner point position coordinates, wherein the end point in the motion path is the position where the corner point position coordinates are located; When the six-axis main robot arm is controlled to move to the corner point position coordinate according to the motion path, a wedge-shaped stripping head provided at the end of the six-axis main robot arm is controlled to be inserted between the glass substrate and the adsorption pad; The six-axis main robot arm is controlled by the acquired six-dimensional force sensor data to separate the glass substrate and the adsorption pad.

[0053] In one embodiment, a computer program product is provided, the computer program product comprising a computer program, the computer program being executed by a processor to implement the following steps: Acquiring the coordinates of the corner points of the glass substrate placed on the glass substrate placement platform; an adsorption pad is tightly attached to the bottom of the glass substrate; Determine the motion path of the wedge-shaped peeling head at the end of the six-axis main robot arm according to the corner point position coordinates, wherein the end point in the motion path is the position where the corner point position coordinates are located; When the six-axis main robot arm is controlled to move to the corner point position coordinate according to the motion path, a wedge-shaped stripping head provided at the end of the six-axis main robot arm is controlled to be inserted between the glass substrate and the adsorption pad; The six-axis main robot arm is controlled by the acquired six-dimensional force sensor data to separate the glass substrate and the adsorption pad.

[0054] Those of ordinary skill in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be implemented by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, storage, database or other media used in the embodiments provided in this application may include non-volatile and / or volatile memory. Non-volatile memory may include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM) or flash memory. Volatile memory may include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in many forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link (Synchlink) DRAM (SLDRAM), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM), etc.

[0055] Those skilled in the art can clearly understand that for the convenience and simplicity of description, only the division of the above-mentioned functional units and modules is used as an example. In actual applications, the above-mentioned functions can be distributed and completed by different functional units and modules as needed, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above.

[0056] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. Such modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention, and should be included in the protection scope of the present invention.

Claims

1. A method for splitting a glass substrate by a robotic arm, characterized in that: The method is applied to a robot control system, which includes: a robot controller, a six-axis main robot, a six-axis auxiliary robot, and a glass substrate placement platform; a wedge-shaped stripping head is provided at the end of the six-axis main robot, a vibrator is provided inside the wedge-shaped stripping head, and a nitrogen exhaust port is provided at the end of the six-axis auxiliary robot; the robot controller is connected to the six-axis main robot and the six-axis auxiliary robot, respectively, and is used to execute the following method: Acquiring the coordinates of the corner points of the glass substrate placed on the glass substrate placement platform; an adsorption pad is tightly attached to the bottom of the glass substrate; Determine the motion path of the wedge-shaped peeling head at the end of the six-axis main robot arm according to the corner point position coordinates, wherein the end point in the motion path is the position where the corner point position coordinates are located; When the six-axis main robot arm is controlled to move to the corner point position coordinate according to the motion path, a wedge-shaped stripping head provided at the end of the six-axis main robot arm is controlled to be inserted between the glass substrate and the adsorption pad; The six-axis main robot arm is controlled by the acquired six-dimensional force sensor data to separate the glass substrate and the adsorption pad.

2. The method according to claim 1, characterized in that Controlling the wedge-shaped stripping head provided at the end of the six-axis main robot arm to be inserted between the glass substrate and the adsorption pad comprises: The lower surface of the wedge-shaped stripping head is controlled to fit the adsorption pad, and the wedge-shaped stripping head arranged at the end of the six-axis main robot arm is inserted between the glass substrate and the adsorption pad at a preset speed, so that the area of ​​the lower surface of the wedge-shaped stripping head between the glass substrate and the adsorption pad is larger than the preset proportion.

3. The method according to claim 2, characterized in that The method of controlling the six-axis main robot arm to separate the glass substrate and the adsorption pad by acquiring the six-dimensional force sensor data includes: Inputting the n groups of six-dimensional force sensor data measured most recently into the six-dimensional force prediction model to obtain the six-dimensional force sensor prediction data at the next time point; Determine the joint torque vector of the six-axis main robot arm at the next time point by using the six-dimensional force sensor prediction data at the next time point; The operation of the wedge-shaped peeling head at the end of the six-axis auxiliary robot is controlled by the joint torque vector of the six-axis main robot at the next time point, and the six-dimensional force sensor data at the current time point is obtained, and the step is jumped to input the n groups of six-dimensional force sensor data most recently into the six-dimensional force prediction model to obtain the six-dimensional force sensor prediction data at the next time point and continue to execute until the six-axis auxiliary robot completes the separation of the glass substrate and the adsorption pad.

4. The method according to claim 3, characterized in that Before controlling the operation of the wedge-shaped stripping head at the end of the six-axis auxiliary robot arm through the joint torque vector of the six-axis main robot arm at the next time point, the method further includes: Calculating the vibration parameters of the vibrator at the next time point by using the six-dimensional force sensor prediction data at the next time point, and calculating the nitrogen pressure of the nitrogen exhaust port at the next time point by using the separation gap between the glass substrate and the adsorption pad at the current time point; The operation of the wedge-shaped stripping head at the end of the six-axis auxiliary robot arm is controlled by the joint torque vector of the six-axis main robot arm at the next time point, the vibration of the vibrator is controlled according to the vibration parameters, and the nitrogen discharge from the nitrogen discharge port is controlled according to the nitrogen pressure.

5. The method according to claim 4, characterized in that The calculating the vibration parameters of the vibrator at the next time point by using the six-dimensional force sensor prediction data at the next time point comprises: By formula calculating the frequency of the vibrator at a next time point; By formula Calculating the amplitude of the vibrator at a next time point; in, is the base value of vibration frequency, is the base amplitude value, is the amplitude-torque coefficient, is the force along the Z-axis direction of the sensor in the six-dimensional force sensor, is the torque around the Z axis of the sensor in the six-dimensional force sensor, is a constant coefficient.

6. The method according to claim 4, characterized in that The calculating the nitrogen pressure of the nitrogen discharge port at a next time point by the separation gap between the glass substrate and the adsorption pad at a current time point comprises: The nitrogen pressure at the nitrogen discharge port at the next time point is calculated by the following formula: ， in, is the separation gap between the adsorption pads at the current time point, is the minimum nitrogen pressure, is the maximum nitrogen pressure, is the pressure-gap response coefficient, is the gap value corresponding to the midpoint of pressure change.

7. The method according to any one of claims 3 to 6, characterized in that: After controlling the operation of the wedge-shaped peeling head at the end of the six-axis auxiliary robot arm through the joint torque vector of the six-axis main robot arm at the next time point, the method further includes: Determine whether a sudden change in adhesion occurs based on the vibration of the six-dimensional force sensor and vibrator measured at the current time point; If the adhesion force mutation phenomenon occurs, an obstacle avoidance path is generated.

8. A robotic arm controller, characterized in that: The robot arm controller is used to perform the method for splitting a glass substrate by a robot arm according to any one of claims 1 to 7, and the robot arm controller includes: An acquisition module is used to acquire the coordinates of the corner points of the glass substrate placed on the glass substrate placement platform; an adsorption pad is tightly attached to the bottom of the glass substrate; A determination module, used to determine the motion path of the wedge-shaped peeling head at the end of the six-axis main robot arm according to the corner point position coordinates, wherein the end point in the motion path is the position where the corner point position coordinates are located; A control module, configured to control the six-axis main robot arm to move to the corner point position coordinate according to the motion path, and control the wedge-shaped stripping head provided at the end of the six-axis main robot arm to be inserted between the glass substrate and the adsorption pad; The splitting module is used to control the six-axis main robot arm to split the glass substrate and the adsorption pad through the acquired six-dimensional force sensor data.

9. A computer device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that: When the processor executes the computer program, the method for splitting a glass substrate by a robot arm is implemented as described in any one of claims 1 to 7.

10. A computer-readable storage medium storing a computer program, characterized in that: When the computer program is executed by a processor, the method for splitting a glass substrate by a robot arm is implemented as claimed in any one of claims 1 to 7.

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