Manipulator end effector and mechanical arm

Abstract

The manipulator end effector comprises a finger part which comprises a finger body extending in the length direction of the finger part and is provided with a near end and a far end; the first clamping piece is fixedly connected to the far end of the finger body, a first limiting clamping groove is formed in the first clamping piece, and the first clamping piece comprises an inclined transition face and a first restraining face continuously extending with the inclined transition face; the second clamping piece is arranged at the near end of the finger body in a translation mode, a second limiting clamping groove is formed in the second clamping piece, the second limiting clamping groove comprises a guide slope surface and a second restraining surface continuously extending with the guide slope surface, and a dynamic clamping space is formed by the first restraining surface and the second restraining surface and used for restraining the edge of the wafer; and the linear driving piece is provided with an output end capable of linearly displacing, and the output end is connected with the second clamping piece. By adopting the scheme, the wafer levelness is synchronously adjusted in the wafer clamping process, and meanwhile, the damage to the edge of the wafer is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor wafer conveying equipment, and in particular to a robot end effector and a robot arm. Background Art

[0002] In the field of semiconductor manufacturing, the application of robotic arms in semiconductor manufacturing needs to meet many requirements. On the one hand, the robotic arm needs to transfer wafers at high speed and high precision in an ultra-clean environment. Its design and implementation involve a high degree of coordination in multiple fields such as machinery, materials, control, and clean environment compatibility, and the technical difficulty is extremely high. On the other hand, the structural design of the robotic arm needs to consider factors such as lightweight, multi-degree-of-freedom configuration, and the selection of the end effector to achieve high-precision positioning, anti-pollution control, and efficient production.

[0003] As the core component of wafer transmission, the clamping accuracy of the end effector of the robot arm directly affects the wafer processing yield. Traditional end effectors mostly use a rigid clamping structure to grasp the wafer through a fixed claw or a vacuum suction cup. However, this type of structure can only provide a single-direction constraint force during the clamping process. When the wafer is tilted at the micron level due to residual stress in the previous process or the inertia of the robot arm movement, the clamping force will be concentrated on the local area of ​​the wafer edge, resulting in stress concentration. Especially for wafers with extremely thin thickness, the edge brittle area is very likely to produce microcracks under non-uniform stress conditions, causing irreversible lattice damage. In response to the above problems, the existing technology attempts to improve the clamping uniformity by adding an elastic buffer layer or using a multi-degree-of-freedom floating mechanism. However, this type of solution has significant defects: elastic materials are prone to creep after long-term and high-frequency use, resulting in attenuation of the clamping force; and although the floating mechanism can passively adapt to the wafer posture, it cannot actively correct the wafer flatness deviation.

[0004] Therefore, it is necessary to provide a robot end effector and a robot arm to solve the above problems existing in the prior art. Summary of the invention

[0005] The object of the present invention is to provide a robot end effector and a robot arm, which are used to synchronously adjust the wafer level during the wafer clamping process and reduce the damage to the edge of the wafer.

[0006] To achieve the above object, the technical solution of the present invention is as follows: In a first aspect, a manipulator end effector comprises: The finger portion includes a finger body extending along its length direction and having a proximal end and a distal end; A first clamping member is fixedly connected to the distal end of the finger body, and a first limit slot is formed on a side wall of the first clamping member toward the center of the finger body, wherein the first limit slot includes an inclined transition surface and a first constraint surface extending continuously therewith; A second clamping member is translationally arranged at the proximal end of the finger body, a side wall of the second clamping member is provided with a second limit slot opposite to the first limit slot toward the center direction of the finger body, the second limit slot includes a guide slope and a second constraint surface extending continuously therewith, the first constraint surface and the second constraint surface are opposite to each other in a horizontal direction and form a dynamic clamping space, and the clamping space is used to constrain the edge of the wafer; A linear driving member having an output end capable of linear displacement, wherein the output end is connected to the second clamping member; When the output end of the linear drive member drives the second clamping member to linearly displace toward the first clamping member and changes the range of the clamping space, the inclined transition surface and the guide slope surface approach each other and correct the horizontality of the wafer in the clamping space.

[0007] The beneficial effect of a manipulator end effector provided by the present invention is that through the above-mentioned structural design, high-precision clamping and leveling of the wafer is achieved. The first clamping member and the second clamping member of the finger part are respectively provided with a first limit slot and a second limit slot relative to each other, forming a variable clamping space. The linear drive member drives the second clamping member to move, changing the size of the clamping space, so that the horizontality of the wafer can be actively adjusted when clamping the wafer, thereby achieving the leveling of the wafer. This active leveling mechanism effectively solves the problem of wafer edge damage caused by concentrated clamping force of traditional end effectors, is particularly suitable for the transmission of ultra-thin wafers, reduces the risk of microcracks caused by non-uniform force on the wafer, and significantly improves the yield of wafer processing.

[0008] Furthermore, the first clamping member includes at least two clamping blocks fixedly connected to the finger body, and the second clamping member includes at least two top blocks fixedly connected to the linear drive member, and the clamping blocks and the top blocks enclose the clamping space.

[0009] Furthermore, the widths of the first limiting slot and the second limiting slot gradually increase as they move away from the bottom of the slot.

[0010] Furthermore, the clamping block includes an integrally formed supporting body and a shielding body, the first limiting slot is provided on the shielding body, the supporting body has an adjustment plane adjacent to the first constraint surface, and the inclined transition surface, the first constraint surface and the adjustment plane form the first limiting slot.

[0011] Furthermore, the top block includes an arc-shaped portion and an inserting portion which are integrally formed, the second position-limiting slot is provided along an outer contour of the arc-shaped portion, and the outer contour of the arc-shaped portion is semi-elliptical.

[0012] Furthermore, the guide slope surface gradually extends outward from the edge of the second constraint surface, and the guide slope surfaces are symmetrically distributed on both sides of the second constraint surface.

[0013] Furthermore, it also includes a wrist part and a connecting part connected to the wrist part, the connecting part includes a connecting shell, the connecting shell includes a push rod body, a widened clamping body and an adapter part, the push rod body is fixedly connected to the linear drive member, the widened clamping body is fixedly connected to the push rod body, the adapter part is located at both ends of the widened clamping body, the plug-in part is provided with a sinking groove, the adapter part is clamped in the sinking groove and fixedly connected to the plug-in part, and the width of the widened clamping body is not less than the distance between adjacent clamping blocks.

[0014] Furthermore, the wrist includes an installation shell, a first pulley and a second pulley arranged in the wrist shell, a flip shaft, a servo motor and a synchronous belt, the flip shaft is fixedly connected to the connecting part, the first pulley and the second pulley are connected through the synchronous belt transmission, the first pulley is coaxially fixedly connected to the flip shaft, and the second pulley is coaxially fixedly connected to the servo motor.

[0015] Furthermore, a first bearing and a second bearing are also provided in the mounting shell, a bearing seat is fixedly connected to the mounting shell, the first bearing and the second bearing are sleeved on the flip shaft, the inner rings of the first bearing and the second bearing are abutted against the flip shaft, the outer rings of the first bearing and the second bearing are abutted against the mounting shell, and the flip shaft includes an annular protrusion, which is clamped between the first bearing and the second bearing.

[0016] Further, the wrist also includes a tension adjustment component, and the tension adjustment component includes: A motor seat, fixedly connected to the mounting housing; An adjusting block is arranged on the motor seat and has threaded holes along the length direction of the synchronous belt; An adjusting screw, threadably matched with the threaded hole, with an end portion thereof extending to the outside through the side wall of the mounting housing; The motor seat is provided with a strip hole, and the mounting shell is provided with a fixing hole at a corresponding position, and the vertical projection of the fixing hole is located within the range of the strip hole; wherein the adjusting screw adjusts the tension of the synchronous belt by screwing into the depth of the threaded hole.

[0017] In the second aspect, a robotic arm includes the above-mentioned robotic end effector, having a shoulder joint axis, an elbow joint axis and a wrist joint axis, and also includes: an upper arm rotatable around the shoulder joint axis, a forearm rotatably connected to the upper arm around the elbow joint axis, and the end effector is connected to the forearm around the wrist joint axis. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is an overall cross-sectional view of a manipulator end effector according to an embodiment of the present invention; Figure 2 This is a schematic structural diagram of a finger portion and a connecting portion according to an embodiment of the present invention; Figure 3 It is a schematic diagram of the structure of the wrist part of an embodiment of the present invention; Figure 4 This is a schematic diagram of the structure of a motor base according to an embodiment of the present invention; Figure 5 It is a cross-sectional view of the overall structure of the wrist part of an embodiment of the present invention; Figure 6 This is a schematic diagram of a wafer being clamped according to an embodiment of the present invention; Figure 7 This is a schematic diagram of the structure of the housing installed in an embodiment of the present invention; Figure 8 This is a schematic diagram of the top block structure of an embodiment of the present invention; Fig. 9 It is a schematic structural diagram of a clamping block according to an embodiment of the present invention; Fig.10 It is a schematic diagram of the overall structure of the robotic arm of the present invention.

[0019] Figure numerals: 1, wrist; 11, mounting housing; 12, first pulley; 13, second pulley; 14, flip shaft; 141, annular protrusion; 15, servo motor; 16, synchronous belt; 17, first bearing; 18, second bearing; 19, bearing seat; 101, motor seat; 1011, strip hole; 102, adjustment block; 103, adjustment screw; 2, connecting part; 21, connecting housing; 22, widening clamping body; 23, adapter; 24, top block; 241, second limit slot; 242, Arc-shaped portion; 2421, guide slope; 2422, second constraint surface; 243, plug-in portion; 2431, sinking groove; 2432, trapezoidal groove; 25, linear drive member; 251, guide rail; 252, slider; 253, power source; 3, finger portion; 31, clamping block; 311, first limit slot; 312, carrier; 313, shielding body; 3131, inclined transition surface; 3132, first constraint surface; 32, finger body; 33, stopper; 4, upper arm; 5, forearm; 6, wafer. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the present invention belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0021] The following is combined with Figure 1 - Attachment Fig.10 , the specific implementation modes of the present invention are further described in detail.

[0022] Reference Figure 1-Figure 9 In the first aspect, in some embodiments of the present invention, a manipulator end effector includes a wrist 1 connected to a manipulator arm, a connecting portion 2 connected to the wrist 1 , and a finger portion 3 provided on the connecting portion 2 .

[0023] Reference Figure 2 The finger portion 3 includes a finger body 32 fixedly connected to the connecting portion 2 and a first clamping member fixed to the front end of the finger body 32. The finger body 32 extends along its own length direction and has a proximal end and a distal end. The first clamping member is fixedly connected to the distal end of the finger body 32, and the side wall of the first clamping member is provided with a first limiting groove 311 toward the center direction of the finger body 32. The first limiting groove 311 includes an inclined transition surface 3131 and a first constraint surface 3132 extending continuously therewith. Among them, the first constraint surface 3132 is a vertical surface and is perpendicular to the surface of the wafer 6.

[0024] The connecting part 2 includes a connecting shell 21, a linear drive member 25 arranged on the connecting shell 21, and a second clamping member. The second clamping member is controllably and translationally arranged at the proximal end of the finger body 32. The side wall of the second clamping member is provided with a second limit slot 241 opposite to the first limit slot 311 toward the center direction of the finger body 32. The second limit slot 241 includes a guide slope 2421 and a second constraint surface 2422 extending continuously therewith, wherein the second constraint surface 2422 is a vertical surface and is perpendicular to the surface of the wafer 6. The first constraint surface 3132 and the second constraint surface 2422 are opposite to each other in the horizontal direction and form a dynamic clamping space, and the clamping space is used to constrain the edge of the wafer 6. The linear drive member 25 has an output end that can be linearly displaced, and the output end is connected to the second clamping member. When the linear drive member 25 is used to drive the second clamping member to move linearly in a direction close to the first clamping member to change the clamping space, the first clamping member and the second clamping member can level the wafer 6 in the clamping space (combined with Figure 6 ).

[0025] Specifically, when the output end of the linear drive member 25 drives the second clamping member to linearly displace in the direction close to the first clamping member and changes the clamping space range, the inclined transition surface 3131 and the guide slope surface 2421 approach each other at the same time. At this time, the inclined transition surface 3131 and the guide slope surface 2421 can decompose the linear driving force of the linear drive member 25 on the wafer 6 during the movement into a normal clamping force for limiting the radial displacement of the wafer 6, and a tangential leveling force for correcting the horizontality of the wafer 6.

[0026] In some embodiments of the present invention, the first clamping member includes at least two clamping blocks 31 fixedly connected to the finger body 32, and the second clamping member includes at least two top blocks 24 fixedly connected to the linear drive member 25. By providing at least two clamping blocks 31, at least two clamping blocks 31 and at least two top blocks 24 enclose a clamping space and realize uniform distribution of clamping force at multiple clamping points, which significantly improves the clamping stability, effectively prevents the wafer from sliding due to uneven force, and increases the contact area of ​​the clamping, reduces local stress concentration, and reduces the risk of wafer edge damage. In addition, at least two clamping blocks 31 also enhance the adaptability to wafers of different sizes and shapes, and improve the clamping flexibility.

[0027] In some specific embodiments of the present invention, the finger body 32 has a U-shaped structure, and two blocks 33 are provided at the tail end of the finger body 32. The first clamping member includes two clamping blocks 31 that are oppositely arranged and fixedly connected to the front end of the finger body 32. A pre-clamping area for the wafer 6 is formed between the first clamping member and the block 33.

[0028] Reference Figure 7In some embodiments of the present invention, the second clamping member includes two top blocks 24 fixedly connected to the linear drive member 25. The widths of the first limit slot 311 and the second limit slot 241 gradually increase as they move away from the bottom of the slot. The guiding slope formed by the slot wall forms a wedge-shaped fit with the edge of the wafer, automatically guiding the wafer into a predetermined position during the clamping process, and at the same time decomposing the clamping force into a horizontal restraining force and a vertical leveling force, effectively correcting the tilt of the wafer; the gradually expanding structure increases the contact area, reduces the local pressure, and avoids stress concentration at the edge of the wafer; in addition, the flaring design is compatible with the wafer size tolerance and the positioning error of the robot arm, improves the clamping fault tolerance, and ensures stable clamping under different working conditions.

[0029] Reference Fig. 9 In some embodiments of the present invention, the clamping block 31 includes a carrier 312 and a shielding body 313 that are fixedly connected, a first limit slot 311 is provided on the shielding body 313, the carrier 312 has an adjustment plane adjacent to the first constraint surface 3132, and the inclined transition surface 3131, the first constraint surface 3132 and the adjustment plane form the first limit slot 311. The inclined transition surface 3131 of the shielding body 313 guides the edge of the wafer to slide during the clamping process, and gradually corrects the inclined wafer to the adjustment plane of the carrier 312; the adjustment plane forms a large-area contact support with the wafer to disperse local stress. At the same time, the wafer 6 is prevented from falling off during the flipping and transmission process.

[0030] Reference Figure 7 and Figure 8 In some embodiments of the present invention, the top block 24 includes an arc portion 242 and a plug-in portion 243 that are fixedly connected, and the second limit slot 241 is opened along the outer contour of the arc portion 242, and the outer contour of the arc portion 242 is semi-elliptical. The curvature design of the arc portion 242 of the top block 24 enables it to automatically adapt to the change of wafer diameter through continuous tangent point contact between the arc surface and the edge of the wafer when contacting wafers of different sizes, reducing dependence on specific sizes; when the top block 24 is clamped horizontally, the direction of the normal force at the contact point tends to be consistent with the arc tangent, and the clamping force is mainly converted into a horizontal constraint component, effectively reducing the vertical force component, avoiding the wafer from generating vertical displacement or overturning moment during the clamping process, thereby ensuring clamping stability and wafer positioning accuracy. In some specific embodiments of the present invention, the plug-in portion 243 is provided with a trapezoidal groove 2432, and the shape of the plug-in portion 243 is adapted to the trapezoidal groove 2432 for easy plugging.

[0031] In some embodiments of the present invention, the guide slope surface 2421 gradually extends outward from the edge of the second constraint surface 2422 , and the guide slope surfaces 2421 are symmetrically distributed on both sides of the second constraint surface 2422 .

[0032] Reference Figure 3-Figure 5In some embodiments of the present invention, the housing of the connecting part 2 includes a push rod body, a widened clamping body 22 and an adaptor 23. The push rod body is fixedly connected to the linear drive member 25, the widened clamping body 22 is fixedly connected to the push rod body, and the adaptor 23 is located at the widened clamping body. The width of the widened clamping body 22 is not less than the distance between adjacent clamping blocks 31, and the widened clamping body 22 is convenient for adapting to the clamping of larger wafers. 22, the plug-in part 243 is provided with a sinking groove 2431, and the adaptor 23 is clamped in the sinking groove 2431 and fixedly connected to the plug-in part 243. Specifically, the push rod body, the widened clamping body 22 and the adaptor 23 are integrally formed. Specifically, the plug-in part 243 is provided with a fixing screw hole, and the adaptor 23 is fixed by screws after being clamped with the plug-in part 243. The widened clamping body 22 is Y-shaped, which is used to increase the size range and stability of the clamped wafer. The wrist 1 includes an installation shell 11, a first pulley 12 and a second pulley 13 arranged in the shell of the wrist 1, a flip shaft 14, a servo motor 15 and a synchronous belt 16. The flip shaft 14 is fixedly connected to the right end of the connecting part 2, the first pulley 12 and the second pulley 13 are connected through the synchronous belt 16, the first pulley 12 is coaxially fixedly connected to the flip shaft 14, and the second pulley 13 is coaxially fixedly connected with the servo motor 15.

[0033] Specifically, the flipping principle of the wafer 6 is as follows: the output shaft of the servo motor 15 is rigidly connected to the second pulley 13 through a coupling, driving the second pulley 13 to rotate; the second pulley 13 transmits power to the first pulley 12 through the synchronous belt 16; the first pulley 12 and the flip shaft 14 use keyway cooperation to achieve coaxial transmission, and transmit the rotational motion to the flip shaft 14; both ends of the flip shaft 14 form a rotating pair with the mounting shell 11 through bearings; when the flip shaft 14 rotates, it drives the connecting part 2 and the finger part 3 rigidly connected thereto to perform a flipping motion around the axis of the flip shaft 14, thereby realizing active adjustment of the wafer clamping posture.

[0034] The mounting housing 11 is also provided with a first bearing 17 and a second bearing 18, each of which has an inner ring and an outer ring. The first bearing 17 and the second bearing 18 are sleeved on the flip shaft 14, the inner rings of the first bearing 17 and the second bearing 18 abut against the flip shaft 14, the outer rings of the first bearing 17 and the second bearing 18 abut against the mounting housing 11, and the annular protrusion 141 is clamped between the inner rings of the first bearing 17 and the second bearing 18. The annular protrusion 141 is clamped between the inner rings of the two bearings by axial clamping, forming a mechanical limit constraint, which not only limits the axial movement of the flip shaft 14, but also generates a preload force through the interference fit between the protrusion and the end face of the inner ring, so that the inner ring of the bearing fits tightly with the flip shaft 14, and prevents the inner ring and the shaft from sliding relative to each other when the shaft rotates; at the same time, the double bearings are symmetrically distributed on both sides of the protrusion, and the flip torque is evenly distributed to the two bearings, avoiding excessive load on one side, and improving the structural rigidity and motion stability.

[0035] In some embodiments of the present invention, the tension adjustment assembly includes a motor base 101, an adjustment block 102 and an adjustment screw 103. The motor base 101 is fixedly connected to the mounting shell 11 by bolts. The adjustment block 102 is arranged on the upper surface of the motor base 101, and a threaded hole is provided along the length direction of the synchronous belt 16. The adjustment screw 103 forms a threaded fit with the threaded hole, and its end extends to the outside through the reserved through hole on the side wall of the mounting shell 11. The motor base 101 is provided with a strip hole 1011 along the adjustment direction, and the mounting shell 11 is provided with a fixing hole at a corresponding position, and the vertical projection of the fixing hole is located within the range of the strip hole 1011. The final positioning of the motor base 101 is achieved by bolts passing through the strip hole 1011 and the fixing hole. Specifically, the adjustment block 102 is fixed to the upper surface of the motor base 101 by a countersunk screw, and the axis of its threaded hole is consistent with the tensioning direction of the synchronous belt 16; the adjustment screw 103 is screwed into the threaded hole of the adjustment block 102, and its end is against the inner surface of the side wall of the mounting shell 11; the specific adjustment screw 103 is a hexagon socket head screw. In the initial state of the motor base 101 and the mounting shell 11, the bolt passes through the strip hole 1011 of the motor base 101 and is pre-tightened with the fixing hole of the mounting shell 11, and the axial adjustment margin is reserved; when the adjustment screw 103 is rotated, the end of the screw pushes the side wall of the mounting shell 11, forcing the motor base 101 to move slightly along the limiting direction of the strip hole 1011, changing the pulley spacing to adjust the tension of the synchronous belt 16, and after the adjustment is completed, the bolt is tightened to fix the position of the motor base 101.

[0036] The specific working principle is that when the exposed adjustment screw 103 is rotated, the screw is fed axially along the threaded hole, and its end pushes the side wall of the mounting shell 11. The reaction force drives the motor seat 101 to carry the second pulley 13 to move along the direction defined by the strip hole 1011, thereby increasing or decreasing the center distance between the two pulleys; the synchronous belt 16 is fixed in length, and the tension is adjusted as the center distance changes. The matching design of the strip hole 1011 and the fixed hole allows the motor seat 101 to translate within a certain range to achieve fine tension adjustment. The stepless adjustment of the tension of the synchronous belt 16 is achieved through a purely mechanical structure, avoiding the elastic attenuation problem of traditional spring tensioners. And after the adjustment is completed, it is rigidly locked by the bolt to eliminate tension fluctuations caused by vibration during operation. In addition, the limit of the strip hole 1011 ensures that the adjustment direction is strictly consistent with the tensioning direction of the synchronous belt 16, preventing the belt from running off due to the deviation of the pulley.

[0037] The core effect of a manipulator end effector provided by the present invention is that the clamping block 31 and the top block 24 form a wedge-shaped guiding structure, which constrains the edge of the wafer to the bottom of the first limit slot 311 and the second limit slot 241 during the clamping process; at the same time, the arc contact surface matches the curvature of the wafer, so that the normal clamping force acts along the tangent direction, significantly reducing the vertical force component. In addition, the shielding part can also prevent the wafer from escaping from the clamping space due to inertia when the wafer is flipped at high speed through the dual effects of surface contact friction and axial constraint when the wafer is flipped at high speed. Thereby completely eliminating the problem of wafer 6 falling off during high-speed flipping or due to vibration or inertia. In addition, through the guiding slope surface, adjustment plane and inclined transition surface of the clamping block 31 and the top block 24, the clamping process is changed into a gradual process, in which the wafer can be gradually clamped and tightened, and the wafer 6 can be gradually leveled to avoid the edge of the wafer 6 from cracking. In summary, the solution of the present invention can achieve integrated control of clamping, leveling, damage prevention and anti-slippage of the wafer 6.

[0038] Second, refer to Fig.10 A robotic arm includes the above-mentioned robotic end effector, having a shoulder joint axis, an elbow joint axis and a wrist joint axis, and also includes: an upper arm 4 rotatable around the shoulder joint axis, a forearm 5 rotatably connected to the upper arm 4 around the elbow joint axis, and the end effector is connected to the forearm 5 around the wrist 1 joint axis.

[0039] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A manipulator end effector, characterized in that: include: The finger portion (3) comprises a finger body (32) extending along its length direction and having a proximal end and a distal end; A first clamping member, fixedly connected to the distal end of the finger body (32), a first limiting slot (311) being formed on a side wall of the first clamping member in a direction toward the center of the finger body (32), the first limiting slot (311) comprising an inclined transition surface (3131) and a first restraining surface (3132) extending continuously therefrom; A second clamping member is translationally arranged at the proximal end of the finger body (32), the side wall of the second clamping member is provided with a second limiting slot (241) opposite to the first limiting slot (311) towards the center direction of the finger body (32), the second limiting slot (241) comprising a guide slope surface (2421) and a second constraint surface (2422) extending continuously therefrom, the first constraint surface (3132) and the second constraint surface (2422) being opposite to each other in a horizontal direction and forming a dynamic clamping space, the clamping space being used to constrain the edge of the wafer (6); A linear drive member (25) having an output end capable of linear displacement, the output end being connected to the second clamping member; When the output end of the linear drive member (25) drives the second clamping member to linearly displace in a direction close to the first clamping member and changes the range of the clamping space, the inclined transition surface (3131) and the guide slope surface (2421) approach each other and correct the horizontality of the wafer (6) located in the clamping space.

2. A robot end effector according to claim 1, characterized in that: The first clamping member comprises at least two clamping blocks (31) fixedly connected to the finger body (32), and the second clamping member comprises at least two top blocks (24) fixedly connected to the linear drive member (25), and the clamping blocks (31) and the top blocks (24) enclose the clamping space.

3. The robot end effector according to claim 1, characterized in that: The widths of the first limiting slot (311) and the second limiting slot (241) gradually increase as they move away from the bottom of the slot.

4. The robot end effector according to claim 2, characterized in that: The clamping block (31) comprises an integrally formed supporting body (312) and a shielding body (313); the first limiting slot (311) is provided on the shielding body (313); the supporting body (312) has an adjustment plane adjacent to the first constraint surface (3132); the inclined transition surface (3131), the first constraint surface (3132) and the adjustment plane enclose the first limiting slot (311).

5. The robot end effector according to claim 2, characterized in that: The top block (24) comprises an integrally formed arc-shaped portion (242) and an inserting portion (243); the second limit slot (241) is formed along the outer contour of the arc-shaped portion (242); and the outer contour of the arc-shaped portion (242) is semi-elliptical.

6. A robot end effector according to claim 5, characterized in that: The guide slope surface (2421) gradually extends outward from the edge of the second constraint surface (2422), and the guide slope surfaces (2421) are symmetrically distributed on both sides of the second constraint surface (2422).

7. The robot end effector according to claim 5, characterized in that: The invention also comprises a wrist portion (1), a connecting portion (2) connected to the wrist portion (1), the connecting portion (2) comprising a connecting shell (21), the connecting shell (21) comprising a push rod body, a widened clamping body (22) and an adaptor (23), the push rod body being fixedly connected to the linear drive member (25), the widened clamping body (22) being fixedly connected to the push rod body, the adaptor (23) being located at both ends of the widened clamping body (22), the plug-in portion (243) being provided with a sinking groove (2431), the adaptor (23) being clamped in the sinking groove (2431) and fixedly connected to the plug-in portion (243), and the width of the widened clamping body (22) being no less than the distance between adjacent clamping blocks (31).

8. The robot end effector according to claim 7, characterized in that: The wrist (1) comprises a mounting housing (11), a first pulley (12) and a second pulley (13) arranged in the housing of the wrist (1), a tilting shaft (14), a servo motor (15) and a synchronous belt (16); the tilting shaft (14) is fixedly connected to the connecting portion (2); the first pulley (12) and the second pulley (13) are connected in transmission via the synchronous belt (16); the first pulley (12) and the tilting shaft (14) are coaxially fixedly connected; and the second pulley (13) is coaxially fixedly connected to the servo motor (15).

9. The robot end effector according to claim 8, characterized in that: A first bearing (17) and a second bearing (18) are also arranged in the installation shell (11); a bearing seat (19) is fixedly connected to the installation shell (11); the first bearing (17) and the second bearing (18) are sleeved on the flip shaft (14); the inner rings of the first bearing (17) and the second bearing (18) are in contact with the flip shaft (14); the outer rings of the first bearing (17) and the second bearing (18) are in contact with the installation shell (11); the flip shaft (14) comprises an annular protrusion (141); and the annular protrusion (141) is clamped between the first bearing (17) and the second bearing (18).

10. The robot end effector according to claim 8, characterized in that: The wrist (1) further comprises a tension adjustment component, wherein the tension adjustment component comprises: A motor base (101) fixedly connected to the mounting housing (11); An adjustment block (102) is arranged on the motor seat (101) and is provided with threaded holes along the length direction of the synchronous belt (16); An adjusting screw (103) threadably engaged with the threaded hole, an end portion of which passes through a side wall of the mounting housing (11) and extends to the outside; The motor seat (101) is provided with a strip hole (1011), and a fixing hole is provided at a corresponding position of the mounting housing (11), and a vertical projection of the fixing hole is located within the range of the strip hole (1011); wherein the adjusting screw (103) adjusts the tension of the synchronous belt (16) by screwing into the depth of the threaded hole.

11. A robotic arm, comprising a robotic end effector as claimed in any one of claims 1 to 10, having a shoulder joint axis, an elbow joint axis and a wrist joint axis, characterized in that: It also includes: an upper arm (4) rotatable around the shoulder joint axis, a forearm (5) rotatably connected to the upper arm (4) around the elbow joint axis, and the end effector is connected to the forearm (5) around the wrist joint axis.

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