A mechanical arm calibration device and a manipulator

Abstract

The present invention discloses a robotic arm calibration device and a robotic hand, including: a calibration base platform, which is coaxially arranged with the joint axis, and a plurality of arc-shaped guiding channels are circumferentially arrayed on the surface; a base, on whose bearing surface a plurality of fixed areas opposite to the arc-shaped guiding channels are circumferentially distributed, and at least two fixing holes are arranged in each fixed area; a constraint assembly, including a constraint ring body and a locking member, the constraint ring body is rotatably arranged on the calibration base platform, and a plurality of through holes vertically corresponding to the arc-shaped guiding channels are evenly arranged on the constraint ring body; select the through holes, the arc-shaped guiding channels and the fixing holes to form a through constraint path, and the locking member applies an axial pressing force along the constraint path to form a continuous circumferential constraint on the calibration base platform, the constraint ring body and the base. By adopting the above scheme, it is used to improve the calibration adjustment range and adjustment accuracy of the robotic arm, and increase the stability of the calibration device.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor wafer transfer equipment, and in particular to a robot arm calibration device and a robot arm. Background Art

[0002] In semiconductor processing, dual SCARA (selective compliance articulated robot arm) arm robots can be used to transfer wafers to and from semiconductor processing modules. Dual SCARA arm robots generally allow for rapid exchange of substrates to and from processing modules, where rapid exchange can be referred to as removing one substrate from a processing module and immediately placing another different substrate into the same processing module. The rapid wafer exchange capability of dual SCARA arm robots has become the key to improving production line efficiency. Such robots need to complete precise wafer placement within milliseconds, which places strict requirements on the symmetry calibration accuracy and dynamic stability of the dual arms. Although the current mainstream dual SCARA system can achieve high-speed transfer of substrates, in high-frequency operation scenarios, the robotic arm needs to be calibrated in order to have the ability to maintain long-term posture. In addition, the two robotic arms of the dual SCARA arm robot also need to be calibrated to make them symmetrical.

[0003] Traditional dual-arm calibration has significant limitations: First, the existing technology relies on disassembly calibration, which requires frequent disassembly and assembly of the forearm and upper arm components, which not only prolongs the equipment downtime, but also the repeated disassembly and assembly can easily cause wear of the connecting parts and introduce secondary installation errors; Second, in the existing technology, the calibration of the forearm and the upper arm is achieved through multiple threaded holes preset at the connection: when adjusting, it is necessary to select a combination of different threaded holes to change the relative position, but because the hole spacing is fixed, only discrete step-by-step adjustment can be achieved, resulting in a limited calibration range and accuracy that is difficult to meet sub-micron requirements; At the same time, the discontinuous constraint formed by the point-by-point bolt fixing makes the connection interface weak in rigidity due to insufficient contact area, which can easily cause micro-displacement accumulation due to stress concentration during high-speed movement.

[0004] Therefore, it is necessary to provide a robot arm calibration device and a robot arm to solve the above problems existing in the prior art. Summary of the invention

[0005] The object of the present invention is to provide a robot arm calibration device and a robot arm, so as to improve the calibration adjustment range and adjustment accuracy of the robot arm and increase the stability of the calibration device.

[0006] To achieve the above object, the technical solution of the present invention is as follows:

[0007] A first aspect: A robot arm calibration device is applied to a joint of a robot arm, where the joint has a joint axis, comprising:

[0008] The calibration base is coaxially arranged with the joint axis, and a plurality of arc-shaped guiding channels are circumferentially arrayed on its surface;

[0009] The base, on whose bearing surface there are a plurality of fixed areas arranged opposite to the arc-shaped guiding channels in a circumferential distribution, and at least two fixing holes are opened in each of the fixed areas;

[0010] The constraint assembly includes a constraint ring body and a locking member. The constraint ring body is rotatably arranged on the calibration base with the joint axis as the rotation center. A plurality of through holes vertically corresponding to the arc-shaped guiding channels are evenly opened on the constraint ring body. Selecting the through holes, the arc-shaped guiding channels and the fixing holes forms a through constraint path, and the locking member applies an axial pressing force along the constraint path to form a continuous circumferential constraint on the calibration base, the constraint ring body and the base;

[0011] Wherein, when the constraint ring body rotates relative to the calibration base, the projection of at least one fixing hole in each fixed area along the vertical direction always forms a dynamic overlapping area with one of the plurality of arc-shaped guiding channels. When the calibration base rotates relative to the base, at least one fixing hole in each fixed area is always vertically corresponding to one of the plurality of arc-shaped guiding channels.

[0012] The beneficial effect of a manipulator shoulder joint provided by the present invention lies in that: by circumferentially opening a plurality of arc-shaped guiding channels on the installation shell, replacing the traditional step-by-step threaded hole design, the relative angle adjustment between the forearm and the upper arm assembly breaks through the discrete pitch limit. The continuous guiding characteristic of the arc-shaped guiding channels allows the robotic arm to be adjusted steplessly in the circumferential direction, and the calibration step size is reduced from the fixed hole pitch to continuously adjustable, thereby improving the calibration accuracy and calibration range. In addition, when the constraint ring body forms an axial pressing force through the through holes, the arc-shaped guiding channels and the fixing holes of the base, the overlapping areas of the plurality of through holes distributed in a ring shape and the arc-shaped guiding channels together constitute a ring-shaped fastening belt. Compared with the traditional single-bolt point fixing, this ring-shaped contact surface disperses the local stress into a uniformly distributed load, increases the effective contact area of the connection interface, and improves the connection stability after calibration.

[0013] Optionally, the installation shell includes a calibration base, the calibration base is located inside the installation shell and is fixedly connected to the inner wall of the installation shell, and the arc-shaped guiding channels are opened on the calibration base.

[0014] By adopting the above technical solution, the calibration base is located inside the installation housing, and an arc-shaped guiding channel is formed thereon, providing an installation foundation for the restraint ring body. This not only improves the calibration accuracy and range of the robotic arm, breaks through the discrete spacing limitation of the traditional fixing method, and realizes stepless adjustment in the circumferential direction, but also forms an annular fastening belt through the cooperation of the restraint ring body with the arc-shaped guiding channel and the fixing holes of the base, dispersing local stress and effectively increasing the stability of the connection after calibration.

[0015] Optionally, a rotating connector is arranged inside the installation housing. The rotating connector is used to connect two adjacent joints of the robotic arm. The restraint ring body is annular, and the inner side of the restraint ring body has a pressing area, and the pressing area abuts against the outer side of the rotating connector.

[0016] By adopting the above technical solution, the rotating connector can flexibly connect adjacent joints of the robotic arm, making the movement of the robotic arm more stable, which helps to accurately control the movement trajectory of the robotic arm. The contact between the inner pressing area of the annular restraint ring body and the rotating connector can distribute the pressure more evenly, ensuring the stable fixation of the rotating connector, thereby improving the calibration accuracy and reliability and reducing the error of the robotic arm during movement.

[0017] Optionally, a plurality of the arc-shaped guiding channels surround to form a calibration area. The calibration base is provided with a countersunk head mounting groove extending downward along the edge of the calibration area, and the countersunk head mounting groove communicates with the arc-shaped guiding channel. The restraint ring body is arranged in the countersunk head mounting groove.

[0018] By adopting the above technical solution, the countersunk head mounting groove is opened downward along the edge of the calibration area and communicates with the arc-shaped guiding channel, providing a special placement space for the restraint ring body, enabling the restraint ring body to be stably accommodated in the groove, effectively preventing its displacement during installation or use, thereby improving the stability and calibration accuracy of the entire robotic arm calibration device. At the same time, this design also helps to optimize the spatial layout inside the installation housing, making the cooperation between components more compact and coordinated, and further improving the overall performance of the robotic arm calibration device.

[0019] Optionally, the number of the fixing holes is at least twice that of the arc-shaped guiding channels, and the projection part of each arc-shaped guiding channel can at least cover two of the fixing holes.

[0020] Optionally, the locking member includes a bolt, and at least one of the fixing hole and the through hole is a threaded hole, and the bolt is threadedly connected with the fixing hole and / or the through hole.

[0021] Optionally, the calibration base horizontally extends along one side of the inner wall of the installation housing and is integrally formed.

[0022] Optionally, when the head of the constraint ring body forms a rigid abutment with the bottom wall of the countersunk mounting groove, the top surface of the constraint ring body is coplanar with the reference plane of the calibration base to form a flush assembly surface without step difference.

[0023] Optionally, the rotating connecting member includes a roller bearing, the roller bearing has an inner ring and an outer ring, and the projection of the inner edge of the constraint ring body in the vertical direction is located on the outer ring.

[0024] Optionally, it further includes a first pulley and a second pulley. The first pulley is arranged on the joint axis and fixedly connected to the bottom of the base. The base is fixedly connected to the mounting shell. The second pulley is coaxial with the first pulley and rotatably connected to the inner ring of the roller bearing. The second pulley is fixedly connected to the power output shaft of the driving source for transmitting the power of the driving source.

[0025] Second aspect: A robotic arm includes the above-mentioned robotic arm calibration device, and further includes: a body, a left arm and a right arm pivotally connected to the body. The left arm and the right arm both include an upper arm rotatable around a shoulder axis, a forearm rotatably connected to the upper arm around an elbow axis, and an end effector rotatably connected to the forearm around a wrist axis. The end effector is used for clamping a wafer. Description of the Drawings

[0026] Figure 1 It is a partial cross-sectional view of the robotic arm calibration device according to the embodiment of the present invention;

[0027] Figure 2 It is a partial exploded view of the robotic arm calibration device according to the embodiment of the present invention;

[0028] Figure 3 It is a schematic top view of the structure of the base according to the embodiment of the present invention;

[0029] Figure 4 It is a schematic diagram of the structure of the constraint ring body according to the embodiment of the present invention;

[0030] Figure 5 It is a partial schematic view of the robotic arm calibration device according to the embodiment of the present invention;

[0031] Figure 6 It is an overall structure diagram of the robot hand according to the embodiment of the present invention.

[0032] Reference numerals: 1, mounting housing; 11, arc-shaped guiding channel; 12, calibration base; 13, rotating connecting member; 14, calibration area; 15, countersunk mounting groove; 2, restraint assembly; 21, restraint ring body; 211, through hole; 212, pressing area; 22, locking member; 3, base; 31, fixing hole; 32, fixing area; 4, first pulley; 5, second pulley; 6, body; 7, left arm; 71, upper arm; 72, forearm; 73, end effector; 8, right arm; 9, wafer. Detailed implementation manners

[0033] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein shall have the ordinary meanings understood by those of ordinary skill in the art in the field to which the present invention pertains. The words such as "including" used herein are intended to mean that the elements or items appearing before this word cover the elements or items listed after this word and their equivalents, without excluding other elements or items.

[0034] The following will Figure 1 - with reference to the Figure 6 drawings, a further detailed description of the specific implementation manners of the present invention will be given.

[0035] In a first aspect, with reference to Figure 1 - Figure 2 FIGs., in some embodiments of the present invention, a mechanical arm calibration device includes a mounting housing 1, a restraint assembly 2, and a base 3. The mounting housing 1 has a joint axis. Herein, the joint axis refers to the shoulder joint axis, elbow joint axis, or wrist joint axis inside the mechanical arm.

[0036] The restraint assembly 2 includes a restraint ring body 21 and a locking member 22. The mounting housing 1 is provided with a plurality of arc-shaped guiding channels 11 in a circumferential array with the joint axis as the center. The arc-shaped guiding channels 11 penetrate through the mounting housing 1 and are used to connect to the base 3 below. A plurality of through holes 211 are uniformly formed on the restraint ring body 21. By adjusting the position of the restraint ring body 21, the through holes 211 can be connected to or blocked from the arc-shaped guiding channels 11. In some specific embodiments of the present invention, the restraint ring body 21 is a ring-shaped gasket, the through holes 211 are formed through the ring-shaped gasket, and the arc-shaped guiding channels 11 are concave toward the center of the gasket.

[0037] In some embodiments of the present invention, the base 3 has a plurality of fixing regions 32 uniformly distributed on the circumference of the upper surface of the base 3, and at least one fixing hole 31 is provided in each fixing region 32. Among them, the base 3 and the mounting housing 1 are fixedly connected through the constraint assembly 2. And the base 3 is coaxial with the joint axis, and the relative position of the base 3 and the mounting housing 1 can be adjusted, and then installed and fixed through the constraint assembly 2, so as to realize the calibration of the base 3 and the mounting housing 1.

[0038] Referring to Figure 3 and Figure 4 , in some embodiments of the present invention, one or more of the rotation constraint ring body 21, the calibration base 12, and the base 3 undergo relative displacement, so that the through hole 211 on the constraint ring body 21, the arc-shaped guiding channel 11, and the fixing hole 31 form a penetrable constraint path, and the locking member 22 applies an axial pressing force along the constraint path to form a continuous circumferential constraint on the calibration base 12, the constraint ring body 21, and the base 3; wherein, when the constraint ring body 21 rotates relative to the calibration base 12, the projection of at least one fixing hole 31 in each fixing region 32 in the vertical direction always forms a dynamic overlapping region with one of the plurality of arc-shaped guiding channels 11, and when the calibration base 12 rotates relative to the base 3, at least one fixing hole 31 in each fixing region 32 is always vertically corresponding to one of the plurality of arc-shaped guiding channels. By providing a plurality of arc-shaped guiding channels 11 circumferentially on the mounting housing 1, replacing the traditional step-by-step threaded hole design, the relative angle adjustment of the forearm 72 and the upper arm 71 assembly breaks through the discrete pitch limit. The continuous guiding characteristic of the arc-shaped guiding channel 11 allows the robotic arm to be adjusted steplessly in the circumferential direction, and the calibration step size is reduced from the fixing hole 31 pitch to continuously adjustable, thereby improving the calibration accuracy. In addition, when the constraint ring body 21 forms an axial pressing force with the fixing hole 31 of the base 3 through the through hole 211 and the arc-shaped guiding channel 11, the overlapping regions of its multiple through holes 211 distributed in a ring shape and the arc-shaped guiding channel 11 together constitute a ring-shaped fastening belt. Compared with the traditional single-bolt point fixing, this ring-shaped contact surface disperses the local stress into a uniform load, increases the effective contact area of the connection interface, and improves the connection stability after calibration.

[0039] In some embodiments of the present invention, the mounting housing 1 includes a calibration base 12. The calibration base 12 is located inside the mounting housing 1 and fixedly connected to the inner wall of the mounting housing 1. An arc-shaped guiding channel 11 is formed on the calibration base 12. In some specific embodiments of the present invention, the calibration base 12 extends horizontally along one side of the inner wall of the mounting housing 1 and is integrally formed. The integral forming process of the calibration base 12 eliminates the assembly gap between the traditional split calibration base 12 and the housing, reduces the coaxiality error formed between the opening reference of the arc-shaped guiding channel 11 and the joint axis, and ensures the circumferential geometric consistency during angle adjustment. Additionally, the horizontally extending base structure forms a ring-shaped stiffening rib effect on the inner wall of the mounting housing 1, and its sectional moment of inertia is greatly improved compared to an independent base, which can suppress the radial deformation caused by centrifugal force, thereby ensuring the pose stability after calibration.

[0040] In some embodiments of the present invention, a rotating connector 13 is provided inside the mounting housing 1. The rotating connector 13 is used to connect two adjacent joints of the robotic arm. The inner side of the restraining ring body 21 has a pressing area 212, and the pressing area 212 is at least partially in contact with the rotating connector 13. The rotating connector 13 can flexibly connect the adjacent joints of the robotic arm, making the movement of the robotic arm more stable, and helping to precisely control the movement trajectory of the robotic arm. The contact between the pressing area 212 of the ring-shaped restraining ring body 21 and the rotating connector 13 can distribute the pressure more evenly, ensure the stable fixation of the rotating connector 13, thereby improving the accuracy and reliability of calibration, and reducing the error of the robotic arm during movement.

[0041] In some specific embodiments of the present invention, the rotating connector 13 includes a roller bearing. The roller bearing has an inner ring and an outer ring. The projection of the inner edge of the restraining ring body 21 in the vertical direction is located above the outer ring, and the fastening area on the inner side of the ring-shaped restraining ring body 21 can also press and fix the roller bearing.

[0042] In some embodiments of the present invention, a plurality of arc-shaped guiding channels 11 surround to form a calibration area 14. A countersunk mounting groove 15 is formed downward along the edge of the calibration area 14 on the calibration base 12. The countersunk mounting groove 15 communicates with the arc-shaped guiding channels 11, and a restraint ring body 21 is arranged in the countersunk mounting groove 15. When the head of the restraint ring body 21 forms a rigid abutment with the bottom wall of the countersunk mounting groove 15, the top surface of the restraint ring body 21 is arranged coplanar with the reference plane of the calibration base 12, forming a flush assembly surface without step difference. The countersunk mounting groove 15 has multiple effects: on the one hand, the restraint ring body 21 forms an annular fastening surface in the countersunk mounting groove 15, and the contact with the countersunk mounting groove 15 expands the contact area with the mounting shell 1. Compared with the point fixing of traditional fixing bolts, this surface contact greatly improves the fastening effect and makes the connection more firm and reliable; on the other hand, the countersunk mounting groove 15 optimizes the installation layout of the restraint ring body 21, saves the installation space, makes the internal structure of the calibration device more compact and reasonable, and helps to improve the overall accuracy and stability of the robotic arm.

[0043] In some embodiments of the present invention, the number of fixing holes 31 is at least twice that of the arc-shaped guiding channels 11, and the projection part of each arc-shaped guiding channel 11 can at least cover two fixing holes 31. This design enables each arc-shaped guiding channel 11 to form a fixing area 32 with two fixing holes 31. When the arc-shaped guiding channel 11 and the fixing area 32 at least partially overlap, the calibration and fixation can be completed, thus significantly expanding the calibration range. On the one hand, by increasing the number of fixing holes 31 and optimizing their cooperation with the arc-shaped guiding channels 11, the robotic arm can achieve higher precision and flexibility during the calibration process, reduce the errors caused by the displacement of the fixing holes 31, and ensure accurate calibration of the robotic arm at different positions. On the other hand, this design also enhances the connection strength. Multiple fixing points jointly bear the load, improving the overall stability and reliability of the calibration device and reducing the errors and looseness of the robotic arm during movement. In addition, each arc-shaped guiding channel 11 can cooperate with two fixing holes 31, increasing the number of connection points, thereby improving the overall connection strength and stability of the calibration device.

[0044] Refer to Figure 5 , in some specific embodiments of the present invention, the length of the arc-shaped guiding channel 11 is set according to the distribution of the fixing holes 31 on the base 3. The fixing holes 31 on the base 3 are evenly arranged on the circumferential surface of the base 3, and each arc-shaped guiding channel 11 can at least cover two fixing holes 31.

[0045] In some specific embodiments of the present invention, there are four arc-shaped through holes and through holes 211, and eight fixing holes 31. The locking member 22 includes a bolt, and at least one of the fixing holes 31 and the through holes 211 is a threaded hole, and the bolt is threadedly connected to the fixing holes 31 and the through holes 211. The arc-shaped through holes, through holes 211 and fixing holes 31 form a symmetric and dense distribution of fixing points. This layout enables the robotic arm to achieve higher precision and stability during the calibration process. By increasing the number of fixing holes 31, each arc-shaped guiding channel 11 can cooperate with two fixing holes 31, thereby expanding the calibration range and improving the connection strength. The locking member 22 uses a bolt, and at least one of the fixing holes 31 and the through holes 211 is a threaded hole. The cooperation between the bolt and the threaded hole not only provides a strong axial pressing force but also allows for fine adjustment during installation to achieve precise alignment.

[0046] In some specific embodiments of the present invention, the robotic arm calibration device further includes a first pulley 4 and a second pulley 5. The first pulley 4 is disposed on the joint axis and fixedly connected to the bottom of the base 3. The base 3 is fixedly connected to the mounting housing 1. The second pulley 5 is coaxial with the first pulley 4 and rotatably connected to the inner ring of the roller bearing.

[0047] The beneficial effects of the present invention are multifaceted: First, the calibration and fixation can be completed as long as the arc-shaped guiding channel 11 at least partially overlaps with the fixing area, significantly expanding the calibration range, enhancing the flexibility of calibration, and reducing the error caused by the displacement of the fixing holes 31; Second, the annular constraint ring body 21 forms an annular fastening surface, and the contact area with the mounting housing 1 is greatly increased compared to the point fixation of traditional fixing bolts. This surface contact not only improves the fastening effect but also makes the connection more firm and reliable, enhancing the overall stability of the calibration device and reducing the error of the robotic arm during movement; Finally, the fastening area on the inner side of the annular constraint ring body 21 can also press and fix the roller bearing, further ensuring the stability of the rotating connector 13 and the movement accuracy of the robotic arm, and enhancing the reliability of the entire calibration device.

[0048] Second, referring to Figure 6 , a robotic arm includes the above-mentioned robotic arm calibration device, and further includes: a body 6, a left arm 7 and a right arm 8 pivotally connected to the body 6. The left arm 7 and the right arm 8 each include an upper arm 71 that can rotate around the shoulder axis, a forearm 72 rotatably connected to the upper arm 71 around the elbow axis, and an end effector 73 rotatably connected to the forearm 72 around the wrist axis. The end effector 73 is used to clamp a wafer 9.

[0049] Although the embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are all within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein can have other embodiments and can be implemented or realized in various ways.

Claims

1. A robotic arm calibration device is applied at the joint of the robotic arm. The joint has a joint axis, and it is characterized in that Comprising: A calibration base (12), which is coaxially arranged with the joint axis, and a plurality of arc-shaped guiding channels (11) are circumferentially arrayed on its surface; A base (3), on whose bearing surface there are a plurality of fixing areas (32) arranged opposite to the arc-shaped guiding channels (11) in a circumferential distribution, and at least two fixing holes (31) are opened in each fixing area (32); A constraint assembly (2), including a constraint ring body (21) and a locking member (22), the constraint ring body (21) is rotatably arranged on the calibration base (12) with the joint axis as the rotation center, and a plurality of through holes (211) vertically corresponding to the arc-shaped guiding channels (11) are uniformly opened on the constraint ring body (21); Selecting the through holes (211), the arc-shaped guiding channels (11) and the fixing holes (31) to form a through constraint path, the locking member (22) applies an axial pressing force along the constraint path to form a continuous circumferential constraint on the calibration base (12), the constraint ring body (21) and the base (3); Wherein, when the constraint ring body (21) rotates relative to the calibration base (12), the vertical projection of at least one fixing hole (31) in each fixing area (32) always forms a dynamic overlapping area with one of the plurality of arc-shaped guiding channels (11), and when the calibration base (12) rotates relative to the base (3), at least one fixing hole (31) in each fixing area (32) is always vertically corresponding to one of the plurality of arc-shaped guiding channels; It further includes an installation housing (1), the calibration base (12) is located inside the installation housing (1) and is integrally formed with the inner wall of the installation housing (1); A rotating connecting member (13) is arranged inside the installation housing (1), and the rotating connecting member (13) is used to connect two adjacent joints of the robotic arm.

2. The robotic arm calibration device according to claim 1, characterized in that, The constraint ring body (21) is annular, and the inner side of the constraint ring body (21) has a pressing area (212), and the pressing area (212) abuts against the outer side of the rotating connecting member (13).

3. A robotic arm calibration device according to claim 1, characterized in that, The plurality of arc-shaped guiding channels (11) surround to form a calibration area (14), the calibration base (12) is provided with a countersunk head mounting groove (15) extending downward along the edge of the calibration area (14), the countersunk head mounting groove (15) is communicated with the arc-shaped guiding channel (11), and the constraint ring body (21) is rotatably embedded in the countersunk head mounting groove (15).

4. A robotic arm calibration device according to claim 1, characterized in that, The number of the fixing holes (31) is at least twice that of the arc-shaped guiding channels (11), and the projection part of each arc-shaped guiding channel (11) can at least cover two of the fixing holes (31).

5. A robotic arm calibration device according to claim 1, characterized in that, The locking member (22) includes a bolt, and at least one of the fixing hole (31) and the through hole (211) is a threaded hole, and the bolt is threadedly connected with the fixing hole (31) and / or the through hole (211).

6. A robotic arm calibration device according to claim 1, characterized in that, The calibration base (12) horizontally extends along one side of the inner wall of the installation housing (1) and is integrally formed.

7. A robotic arm calibration device according to claim 3, characterized in that, When the head of the constraint ring body (21) forms a rigid abutment with the bottom wall of the countersunk mounting groove (15), the top surface of the constraint ring body (21) is coplanar with the reference plane of the calibration base (12), forming a flush assembly surface without a step difference.

8. A robotic arm calibration device according to claim 2, characterized in that, The rotating connecting member (13) includes a roller bearing having an inner ring and an outer ring, and the projection of the inner edge of the constraint ring body (21) in the vertical direction is located on the outer ring.

9. A robotic arm calibration device according to claim 8, characterized in that, It further includes a first pulley (4) and a second pulley (5). The first pulley (4) is disposed on the joint axis and fixedly connected to the bottom of the base (3). The base (3) is fixedly connected to the mounting housing (1) through the constraint assembly (2). The second pulley (5) is coaxial with the first pulley (4) and rotatably connected to the inner ring of the roller bearing.

10. A manipulator, comprising the robotic arm calibration device according to any one of claims 1-9, characterized in that, It further includes: a body (6), a left arm (7) and a right arm (8) pivotally connected to the body (6). Both the left arm (7) and the right arm (8) include an upper arm (71) rotatable about a shoulder axis, a forearm (72) rotatably connected to the upper arm (71) about an elbow axis, and an end effector (73) rotatably connected to the forearm (72) about a wrist axis. The end effector (73) is used for clamping a wafer (9).

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