Inkjet printing apparatus

Abstract

The present application relates to an inkjet printing apparatus including: a stage on which a substrate including a first alignment mark and a second alignment mark is mounted; an inkjet head section that discharges ink; a mark measuring section measuring a first coordinate of each of the first alignment mark and the second alignment mark during a first compensation period, the mark measuring section measuring a second coordinate of the first alignment mark during a second compensation period after the first compensation period; and a substrate fixing portion holding the substrate. The substrate fixing portion performs a first operation to move the substrate during a first compensation period such that first coordinates of the first alignment mark and the second alignment mark in a first direction are aligned with each other. And performing a second operation to move the substrate according to a result obtained by comparing the second coordinate of the first alignment mark with the reference coordinate of the first alignment mark during the second compensation period.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to and the benefit of Korean Patent Application No. 10-2023-0148178 filed in the Korean Intellectual Property Office on October 31, 2023, the entire contents of which are incorporated herein by reference. Technical Field

[0003] Embodiments relate to an inkjet printing apparatus and an inkjet printing method using the inkjet printing apparatus, and more particularly, to an inkjet printing apparatus for manufacturing a display device and an inkjet printing method using the inkjet printing apparatus. Background Art

[0004] Recently, as interest in information display increases, research and development of display devices have been continuously conducted. Summary of the invention

[0005] An embodiment provides an inkjet printing apparatus for aligning a substrate using an alignment mark.

[0006] Embodiments also provide an inkjet printing method using the inkjet printing apparatus.

[0007] However, the embodiments are not limited to the embodiments set forth herein. The above and other embodiments will become more apparent to those of ordinary skill in the art to which the present disclosure pertains by referring to the detailed description of the present disclosure given below.

[0008] According to aspects of the present disclosure, there is provided an inkjet printing device, comprising: a stage on which a substrate including a first alignment mark and a second alignment mark is mounted; an inkjet head portion that discharges ink; a mark measuring portion that measures a first coordinate of each of the first alignment mark and the second alignment mark during a first compensation period, the mark measuring portion measuring a second coordinate of the first alignment mark during a second compensation period after the first compensation period; and a substrate fixing portion that holds the substrate, wherein the substrate fixing portion performs a first operation to move the substrate during the first compensation period so that a first coordinate of the first alignment mark in a first direction and a first coordinate of the second alignment mark in the first direction are consistent with (or aligned with) each other, and performs a second operation to move the substrate during the second compensation period according to a result obtained by comparing the second coordinate of the first alignment mark with a reference coordinate of the first alignment mark.

[0009] The substrate fixing portion may move the substrate in a case where a difference between a second coordinate of the first alignment mark in the first direction and a reference coordinate of the first alignment mark in the first direction is longer than a reference length.

[0010] The substrate fixing part may perform the first operation during the first compensation period in a case where a difference between a second coordinate of the first alignment mark in the first direction and a reference coordinate of the first alignment mark in the first direction is longer than a reference length.

[0011] The substrate fixing portion may include a first substrate moving portion and a second substrate moving portion that are spaced apart from each other and move the substrate.

[0012] The first substrate moving part and the second substrate moving part may rotate the substrate by moving the substrate in different directions.

[0013] The reference coordinates may be determined based on a compensation value according to an angle between a virtual line passing through the first coordinates of the first alignment mark and the first coordinates of the second alignment mark and a second direction perpendicular to the first direction.

[0014] The reference coordinates may be coordinates to which the first coordinates of the first alignment mark are adjusted if the substrate is moved by the compensation value.

[0015] The substrate fixing portion may include a first substrate moving portion and a second substrate moving portion that are spaced apart from each other and move the substrate. The reference coordinate is a coordinate to which the first coordinate of the first alignment mark is adjusted when the first substrate moving portion moves the substrate by half of the compensation value in one direction and the second substrate moving portion moves the substrate by half of the compensation value in a direction opposite to the one direction.

[0016] The compensation value may be determined using a sampling substrate including a first sampling alignment mark corresponding to the first alignment mark and a second sampling alignment mark corresponding to the second alignment mark.

[0017] The compensation value may be determined based on a first compensation value according to an angle between a virtual line passing through first coordinates of the first sampling alignment mark and first coordinates of the second sampling alignment mark during a first sampling compensation period and a second compensation value according to second coordinates of the first sampling alignment mark and second coordinates of the second sampling alignment mark during a second sampling compensation period after the first sampling compensation period.

[0018] The substrate fixing portion may include a first substrate moving portion and a second substrate moving portion that are spaced apart from each other and move the sampling substrate. The first compensation value may be determined using C1=tan(RA)*RD. Here, C1 may be the first compensation value, RA may be the angle between a virtual line passing through the first coordinates of the first sampling alignment mark and the first coordinates of the second sampling alignment mark and the second direction, and RD may be the distance between the first substrate moving portion and the second substrate moving portion.

[0019] The substrate fixing portion may include a first substrate moving portion and a second substrate moving portion that are spaced apart from each other and move the sampling substrate. The second compensation value may be determined using C2=DFF*(RD / (Y'0-Y'1)). Here, C2 may be the second compensation value, DFF may be the difference between the second coordinate of the first sampling alignment mark in the first direction and the coordinate to which the first coordinate of the first sampling alignment mark in the first direction is adjusted when the sampling substrate is moved by the first compensation value, RD may be the distance between the first substrate moving portion and the second substrate moving portion, Y'0 may be the second coordinate of the first sampling alignment mark in the second direction intersecting the first direction, and Y'1 may be the second coordinate of the second sampling alignment mark in the second direction.

[0020] The first alignment mark and the second alignment mark may be adjacent to the substrate fixing portion.

[0021] According to aspects of the present disclosure, there is provided an inkjet printing method for discharging ink onto a substrate using an inkjet printing device, the inkjet printing method comprising: measuring a first coordinate of each of a first alignment mark and a second alignment mark of the substrate during a first compensation period; moving the substrate so that a first coordinate of the first alignment mark in a first direction and a first coordinate of the second alignment mark in the first direction are aligned with each other during the first compensation period; measuring a second coordinate of the first alignment mark during a second compensation period after the substrate is moved during the first compensation period; comparing the second coordinate of the first alignment mark with a reference coordinate of the first alignment mark during the second compensation period; and moving the substrate according to the comparison result.

[0022] Moving the substrate according to the comparison result may include moving the substrate if a difference between a second coordinate of the first alignment mark in the first direction and a reference coordinate of the first alignment mark in the first direction is longer than a reference length.

[0023] In a case where a difference between a second coordinate of the first alignment mark in the first direction and a reference coordinate of the first alignment mark in the first direction is longer than a reference length, moving the substrate according to the comparison result may be performed.

[0024] The reference coordinates may be determined based on a compensation value according to an angle between a virtual line passing through the first coordinates of the first alignment mark and the first coordinates of the second alignment mark and a second direction perpendicular to the first direction.

[0025] The reference coordinates may be coordinates to which the first coordinates of the first alignment mark are adjusted if the substrate is moved by the compensation value.

[0026] The compensation value may be determined using a sampling substrate including a first sampling alignment mark corresponding to the first alignment mark and a second sampling alignment mark corresponding to the second alignment mark.

[0027] The compensation value may be determined based on a first compensation value according to an angle between a virtual line passing through first coordinates of the first sampling alignment mark and first coordinates of the second sampling alignment mark during a first sampling compensation period and a second compensation value according to second coordinates of the first sampling alignment mark and second coordinates of the second sampling alignment mark during a second sampling compensation period after the first sampling compensation period. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Exemplary embodiments will now be described more fully below with reference to the accompanying drawings; however, they may be implemented in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the exemplary embodiments to those skilled in the art.

[0029] In the accompanying drawings, dimensions may be exaggerated for clarity of illustration. It will be understood that when an element is referred to as being "between" two elements, it can be the only element between the two elements, or one or more intervening elements may also be present. Like reference numerals always refer to like elements.

[0030] Figure 1 is a schematic diagram illustrating an inkjet printing apparatus according to an embodiment.

[0031] Figure 2 It is shown Figure 1 A schematic plan view of an inkjet printing apparatus shown in FIG.

[0032] Figure 3 It is shown Figure 1 Schematic diagram of an example of a case in which the inkjet printing apparatus shown in FIG. 1 moves the substrate during a first compensation period.

[0033] Figure 4 It is shown Figure 1 Schematic diagram of an example of a case where the inkjet printing apparatus shown in FIG. 1 does not move the substrate during the second compensation period.

[0034] Figure 5 It shows that Figure 1 Schematic diagram of an example in which the inkjet printing apparatus shown in FIG. 1 moves a substrate during a second compensation period.

[0035] Figure 6 is a diagram illustrating an example in which a first compensation value is determined during a first sampling compensation period.

[0036] Figure 7 is a diagram illustrating an example in which a second compensation value is determined during a second sampling compensation period.

[0037] Figure 8is a flowchart illustrating an inkjet printing method according to an embodiment. DETAILED DESCRIPTION

[0038] In the following description, for the purpose of illustration, many specific details are set forth in order to provide a thorough understanding of various embodiments or implementations of the present invention. As used herein, "embodiment" and "implementation" are interchangeable words, which are non-limiting examples of the devices or methods disclosed herein. However, it is apparent that various embodiments may be practiced without these specific details or with one or more equivalent arrangements. Here, various embodiments do not have to be exclusive and do not limit the present disclosure. For example, the specific shape, configuration, and characteristics of an embodiment may be used or implemented in another embodiment.

[0039] Unless otherwise specified, the illustrated embodiments should be understood to provide features of the present invention. Therefore, unless otherwise specified, the features, components, modules, layers, films, panels, regions and / or aspects, etc. (hereinafter, individually or collectively referred to as "elements") of the various embodiments may be combined, separated, interchanged and / or rearranged in other ways without departing from the scope of the present invention.

[0040] The use of cross hatching and / or shading in the drawings is generally provided to clarify the boundaries between adjacent elements. Therefore, unless specified, the presence or absence of cross hatching or shading does not convey or indicate any preference or requirement for a particular material, material property, size, ratio, commonality between the elements shown and / or any other characteristics, attributes, properties, etc. of the elements. In addition, in the drawings, the size and relative size of the elements may be exaggerated for the purpose of clarity and / or description. When the embodiment can be implemented differently, a specific process sequence can be performed differently from the described sequence. For example, two processes described in succession can be performed substantially simultaneously, or in an order opposite to the described sequence. In addition, similar reference numerals represent similar elements.

[0041] When an element or layer is referred to as being "on" another element or layer, "connected to" or "coupled to" another element or layer, it may be directly on, directly connected to or directly coupled to another element or layer, or there may be an intervening element or layer. However, when an element or layer is referred to as being "directly on" another element or layer, "directly connected to" or "directly coupled to" another element or layer, there is no intervening element or layer. For this reason, the term "connection" may refer to a physical connection, electrical connection, and / or fluid connection with or without an intervening element. For the purposes of this disclosure, "at least one of A and B" may be understood to mean only A, only B, or any combination of A and B. In addition, "at least one of X, Y, and Z" and "at least one selected from the group consisting of X, Y, and Z" may be interpreted as any combination of only X, only Y, only Z, or two or more of X, Y, and Z. As used herein, the term "and / or" includes any and all combinations of one or more of the relevant listed items.

[0042] Although the terms "first", "second", etc. may be used herein to describe various types of elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another element. Therefore, without departing from the teachings of the present disclosure, the first element discussed below may be referred to as the second element.

[0043] For descriptive purposes, spatially relative terms such as "below," "below," "under," "down," "above," "up," "above," "higher," "side" (e.g., as in "sidewall"), etc. may be used herein and thereby describe the relationship of one element to another element(s) as shown in the accompanying drawings. In addition to the orientations depicted in the accompanying drawings, spatially relative terms are intended to encompass different orientations of the device in use, operation, and / or manufacture. For example, if the device in the accompanying drawings is flipped, an element described as being "below" or "below" other elements or features will then be oriented "above" the other elements or features. Thus, the term "below" may encompass both above and below orientations. Additionally, the device may be oriented in other ways (e.g., rotated 90 degrees or in other orientations), and therefore, the spatially relative descriptors used herein should be interpreted accordingly.

[0044] The terms used herein are used to describe the purpose of a particular embodiment and are not intended to be limiting. As used herein, the singular forms "a", "an" and "the" are intended to also include plural forms unless the context clearly indicates otherwise. In addition, when used in this specification, the terms "comprise", "comprises", "includes" and / or "includes" specify the existence of stated features, integral bodies, steps, operations, elements, components and / or groups thereof, but do not exclude the existence or addition of one or more other features, integral bodies, steps, operations, elements, components and / or groups thereof. It should also be noted that, as used herein, the terms "substantially", "about" and other similar terms are used as approximate terms and are not used as degree terms, and therefore, are used to explain the inherent deviations in the measured values, calculated values ​​and / or provided values ​​that will be recognized by those of ordinary skill in the art.

[0045] Various embodiments are described herein with reference to cross-sectional views and / or exploded views as schematic diagrams of embodiments and / or intermediate structures. Therefore, variations in the illustrated shapes, for example due to manufacturing techniques and / or tolerances, should be expected. Therefore, the embodiments disclosed herein should not necessarily be interpreted as being limited to the specific illustrated shapes of the regions, but should include deviations in shapes caused by, for example, manufacturing. In this way, the regions shown in the drawings may be schematic in nature, and the shapes of these regions may not reflect the actual shapes of the regions of the device, and therefore, are not necessarily intended to be limiting.

[0046] As is customary in the art, some embodiments are described and shown in the accompanying drawings for functional blocks, units and / or modules. It will be understood by those skilled in the art that these blocks, units and / or modules are physically implemented by electrical circuits (or optical circuits) such as logic circuits, discrete components, microprocessors, hard-wired circuits, memory elements, wiring connectors, etc., which can be formed using semiconductor-based manufacturing techniques or other manufacturing techniques. In the case where blocks, units and / or modules are implemented by microprocessors or other similar hardware, they can be programmed and controlled using software (e.g., microcode) to perform the various functions discussed herein, and they can be selectively driven by firmware and / or software. It is also conceivable that each block, unit and / or module can be implemented by dedicated hardware, or can be implemented as a combination of dedicated hardware for performing some functions and processors (e.g., one or more programmed microprocessors and associated circuits) for performing other functions. In addition, without departing from the scope of the present invention, each block, unit and / or module of some embodiments can be physically separated into two or more interactive and discrete blocks, units and / or modules. Furthermore, the blocks, units and / or modules of some embodiments may be physically combined into more complex blocks, units and / or modules without departing from the scope of the invention.

[0047] For example, embodiments of the present disclosure are described herein with reference to schematic diagrams of embodiments (and intermediate structures), and variations in the shapes shown due to, for example, manufacturing techniques and / or tolerances are anticipated. Thus, embodiments should not be limited to the particular shapes of the regions shown herein, but rather include deviations in shapes due to, for example, manufacturing techniques. The regions shown in the drawings are schematic in nature, and their shapes do not represent the actual shape of a region of a device and do not limit the scope of the present disclosure.

[0048] Hereinafter, the present disclosure will be described in more detail with reference to the accompanying drawings.

[0049] Figure 1 is a schematic diagram illustrating an inkjet printing apparatus 1000 according to an embodiment. Figure 2 It is shown Figure 1 A schematic plan view of an inkjet printing apparatus 1000 is shown in FIG.

[0050] exist Figure 2 In the figure, for the convenience of description, station 100 is omitted.

[0051] refer to Figure 1 and Figure 2 , the inkjet printing apparatus 1000 may discharge (or inject) ink onto the substrate SUB. The ink may include at least one light emitting element, and the light emitting element may be formed on the substrate SUB.

[0052] The inkjet printing apparatus 1000 may include a stage 100, a substrate fixing part 200, a first unit supporting part 300, an inkjet head part IHD, a second unit supporting part 400, and a mark measuring part CM.

[0053] The stage 100 may include an area in which a substrate SUB is disposed. The substrate SUB may be loaded onto or unloaded from the stage 100 .

[0054] In an embodiment, the stage 100 may move along a track. In an embodiment, a probe may be disposed on the stage 100. The probe may generate an electric field on the substrate SUB.

[0055] The substrate fixing portion 200 may fix (or hold) the substrate SUB. For example, the substrate fixing portion 200 may fix (or hold) the substrate SUB so as not to move during inkjet printing.

[0056] The substrate fixing part 200 may align the substrate SUB. The substrate fixing part 200 may include a first substrate moving part 210 and a second substrate moving part 220 which are spaced apart from each other and move the substrate SUB. For example, each of the first substrate moving part 210 and the second substrate moving part 220 may be an actuator.

[0057] In an embodiment, the first substrate moving part 210 and the second substrate moving part 220 may rotate the substrate SUB by moving the substrate SUB in different directions. For example, in a case where the first substrate moving part 210 pulls the substrate SUB and the second substrate moving part 220 pushes the substrate SUB, the substrate SUB may rotate in a clockwise direction. For example, in a case where the first substrate moving part 210 pushes the substrate SUB and the second substrate moving part 220 pulls the substrate SUB, the substrate SUB may rotate in a counterclockwise direction.

[0058] The first unit supporting portion 300 may be connected (or coupled) to the substrate fixing portion 200. In an implementation, the substrate fixing portion 200 may be moved along the first unit supporting portion 300.

[0059] The second unit supporting portion 400 may be connected (or coupled) to the inkjet head portion IHD. The inkjet head portion IHD may move along the second unit supporting portion 400. The inkjet head portion IHD may discharge (or inject) ink including the light emitting element onto the substrate SUB.

[0060] The inkjet head portion IHD may include a head base HB and an inkjet head IH. The head base HB may be connected to the second unit support portion 400 to form an area in which the inkjet head IH is disposed. The head base HB may extend in one direction to be spaced apart from the stage 100. In an embodiment, the head base HB may move the inkjet head IH.

[0061] The inkjet head IH may be disposed on the surface of the head base HB. For example, the inkjet head IH may be disposed in plural to be spaced apart from each other on the bottom surface (or lower surface) of the head base HB. The number of the inkjet heads IH is not limited to a specific example.

[0062] The inkjet head IH may supply ink onto the substrate SUB. For example, the inkjet head IH may include a nozzle portion through which the ink is discharged (or injected), thereby discharging the ink to the outside.

[0063] The mark measuring part CM may measure the coordinates of the alignment marks AM1, AM2, AM3, and AM4. For example, the mark measuring part CM may be a camera. However, the embodiment is not limited thereto, as long as the mark measuring part CM is any one capable of generating image data by photographing the alignment marks AM1, AM2, AM3, and AM4. In addition, the embodiment is not limited to the number, shape, and position of the alignment marks AM1, AM2, AM3, and AM4.

[0064] In an embodiment, the mark measurement portion CM may be connected (or coupled) to the inkjet head portion IHD. For example, the coordinate may be configured with an X-axis coordinate and a Y-axis coordinate, and the X-axis and the Y-axis may be set relative to the inkjet head portion IHD. For example, the X-axis may be a direction parallel to the inkjet head portion IHD, and the Y-axis may be a direction perpendicular to the inkjet head portion IHD. Since the ink is discharged (or injected) from the inkjet head portion IHD, the X-axis and the Y-axis are set relative to the inkjet head portion IHD, so that the alignment accuracy of the substrate SUB may be improved. However, the mark measurement portion CM may not be connected to the inkjet head portion IHD.

[0065] Hereinafter, for convenience of description, the X-axis direction is designated as the first direction X, the Y-axis direction is designated as the second direction Y, the X-axis coordinate is designated as the coordinate of the first direction X, and the Y-axis coordinate is designated as the coordinate of the second direction Y.

[0066] In an embodiment, the inkjet printing apparatus 1000 may include a control part. For example, the control part may receive image data including coordinates of the alignment marks AM1, AM2, AM3, and AM4 from the mark measuring part CM and control the substrate fixing part 200, the first unit supporting part 300, and the second unit supporting part 400.

[0067] Figure 3 It shows that Figure 1 Schematic diagram of an example in which the inkjet printing apparatus 1000 moves a substrate during a first compensation period.

[0068] refer to Figures 1 to 3 , the substrate SUB may include a first alignment mark AM1, a second alignment mark AM2, a third alignment mark AM3, and a fourth alignment mark AM4. In an embodiment, the alignment of the substrate SUB may be performed by the first alignment mark AM1 and the second alignment mark AM2. For example, the first alignment mark AM1 and the second alignment mark AM2 may be alignment marks close to the substrate fixing part 200. The substrate fixing part 200 may align the substrate SUB by the alignment marks close to the substrate fixing part 200, so that the alignment accuracy of the substrate SUB may be improved. However, the embodiment is not limited to the number and type of alignment marks used herein.

[0069] The mark measurement part CM may measure the first coordinates of each of the first alignment mark AM1 and the second alignment mark AM2 during the first compensation period. The first coordinates may be coordinates before the substrate SUB moves during the first compensation period, the first coordinates of the first alignment mark AM1 may be (X0, Y0), and the first coordinates of the second alignment mark AM2 may be (X1, Y1). For example, after the substrate SUB moves during the first compensation period, the coordinates of the first alignment mark AM1 may be (X'0, Y'0), and the coordinates of the second alignment mark AM2 may be (X'1, Y'1).

[0070] The inkjet printing apparatus 1000 may control (or adjust) the first coordinates of the first alignment mark AM1 and the second alignment mark AM2 in the first direction X to be consistent with (or aligned with) each other, so that the substrate SUB may be accurately aligned. The substrate fixing part 200 may move the substrate SUB so that the first coordinates of the first alignment mark AM1 in the first direction X and the first coordinates of the second alignment mark AM2 in the first direction X are consistent with (or aligned with) each other during the first compensation period (for example, in the second direction Y).

[0071] For example, the coordinates of the first alignment mark AM1 may be changed from (X0, Y0) to (X'0, Y'0). For example, the coordinates of the second alignment mark AM2 may be changed from (X1, Y1) to (X'1, Y'1).

[0072] However, due to the driving errors of the first substrate moving part 210 and the second substrate moving part 220 and the measurement errors of the mark measuring part CM, the coordinates of the first alignment mark AM1 in the first direction X and the coordinates of the second alignment mark AM2 in the first direction X may not be accurately consistent (or aligned) with each other (e.g., in the second direction Y). Therefore, the inkjet printing apparatus 1000 may check whether the coordinates shifted during the second compensation period are within an allowable (or acceptable) range.

[0073] Figure 4 It is shown Figure 1 000 is a schematic diagram of an example of a case where the inkjet printing apparatus 1000 does not move the substrate SUB during the second compensation period. Figure 5 It is shown Figure 1 000 is a schematic diagram of an example of a case in which the inkjet printing apparatus 1000 moves the substrate SUB during the second compensation period.

[0074] refer to Figure 1 , Figure 2 , Figure 4 and Figure 5, the mark measurement part CM may measure the second coordinate of the first alignment mark AM1 during the second compensation period after the first compensation period. The second coordinate may be the coordinate before the substrate SUB moves during the second compensation period, and may be the coordinate after the substrate SUB moves during the first compensation period. The second coordinate of the first alignment mark AM1 may be (X'0, Y'0). For example, the reference coordinate of the first alignment mark AM1 may be (X_1, Y_1).

[0075] However, the alignment mark used during the second compensation period may not be the first alignment mark AM1.

[0076] The inkjet printing apparatus 1000 may determine whether the substrate SUB has moved by comparing the second coordinate of the first alignment mark AM1 with the reference coordinate of the first alignment mark AM1. The substrate fixing portion 200 may move the substrate SUB during the second compensation period according to a result obtained by comparing the second coordinate of the first alignment mark AM1 with the reference coordinate of the first alignment mark AM1.

[0077] In an embodiment, the substrate fixing part 200 may move the substrate SUB in the case where the difference between the second coordinate of the first alignment mark AM1 in the first direction X and the reference coordinate of the first alignment mark AM1 in the first direction X is longer than the reference length. Figure 4 As shown in , when the reference length is about 1.5 μm and the difference is less than about 1.5 μm, the inkjet printing device 1000 can discharge (or inject) ink without moving the substrate SUB. Figure 5 As shown in , in the case where the reference length is about 1.5 μm and the difference is greater than about 1.5 μm, the inkjet printing apparatus 1000 may move the substrate SUB and then discharge (or inject) ink.

[0078] In an embodiment, the substrate fixing part 200 may perform an operation during the first compensation period in the case where the difference between the second coordinate of the first alignment mark AM1 in the first direction X and the reference coordinate of the first alignment mark AM1 in the first direction X is longer than the reference length. For example, the inkjet printing apparatus 1000 may re-measure the coordinates of the first alignment mark AM1 and the second alignment mark AM2 and re-move the substrate SUB.

[0079] The reference coordinates of the first alignment mark AM1 may be coordinates at which the first alignment mark AM1 is accurately located during the first compensation period. In an embodiment, the reference coordinates may be based on an angle between a virtual line passing through the first coordinates of the first alignment mark AM1 and the first coordinates of the second alignment mark AM2 and the second direction Y (e.g., Figure 6The angle RA may indicate the degree to which the substrate SUB is offset relative to the first direction X. When the first direction X is set relative to the inkjet head portion IHD, the angle RA may indicate the degree to which the substrate SUB is offset relative to the inkjet head portion IHD.

[0080] The reference coordinates may be coordinates at which the first coordinate of the first alignment mark AM1 moves when the substrate SUB moves by the compensation value. For example, the reference coordinates may be coordinates at which the first coordinate of the first alignment mark AM1 moves precisely. For example, the reference coordinates may be coordinates at which the first coordinate of the first alignment mark AM1 moves when the first substrate moving part 210 moves the substrate SUB by half of the compensation value in one direction and the second substrate moving part 220 moves the substrate SUB by half of the compensation value in a direction opposite to the direction. For example, assuming a case where the compensation value is about 1 μm. The reference coordinates may be coordinates at which the first coordinate of the first alignment mark AM1 moves when the first substrate moving part 210 pulls the substrate SUB by about 0.5 μm and the second substrate moving part 220 pushes the substrate SUB by about 0.5 μm. The reference coordinates may be coordinates mathematically calculated by the inkjet printing apparatus 1000, by a computer device, or the like.

[0081] The compensation value will be described in detail later.

[0082] For example, the inkjet printing apparatus 1000 may use one alignment mark (eg, a single alignment mark) instead of two alignment marks during the second compensation period as in the first compensation period. Thus, the tact time (or manufacturing time) of the display device including the substrate SUB may be reduced.

[0083] Figure 6 is a diagram illustrating an example in which a first compensation value is determined during a first sampling compensation period. Figure 7 is a diagram illustrating an example in which a second compensation value is determined during a second sampling compensation period.

[0084] refer to Figure 1 , Figure 2 , Figure 6 and Figure 7 , the compensation value may be determined using a sampling substrate including a first sampling alignment mark SAM1 corresponding to the first alignment mark AM1 and a second sampling alignment mark SAM2 corresponding to the second alignment mark AM2.

[0085] The inkjet printing device 1000 may align the substrate SUB based on the compensation value determined using the sampling substrate. The sampling substrate may be a substrate for determining the compensation value, and may have the same structure as the substrate SUB. However, the sampling substrate and the substrate SUB are not different from each other. For example, a single sampling substrate may not be used to determine the compensation value. Multiple sampling substrates (or one sampling substrate) may be used to determine multiple compensation values, and a compensation value (e.g., an average value) for aligning the substrate SUB may be determined based on the compensation values.

[0086] The compensation value may be determined based on a first compensation value according to an angle RA between a virtual line passing through the first coordinate of the first sampling alignment mark SAM1 and the first coordinate of the second sampling alignment mark SAM2 during the first sampling compensation period and the second compensation value according to the second coordinate of the first sampling alignment mark SAM1 and the second coordinate of the second sampling alignment mark SAM2 during the second sampling compensation period after the first sampling compensation period. For example, in the case where the compensation directions of the first sampling compensation period and the second sampling compensation period are the same, the compensation value may be the sum of the first compensation value and the second compensation value. For example, in the case where both the first coordinate and the second coordinate of the first sampling alignment mark SAM1 are to be moved in the first direction X, the compensation directions of the first sampling compensation period and the second sampling compensation period may be the same. For example, in the case where the compensation directions of the first sampling compensation period and the second sampling compensation period are different from each other, the compensation value may be the difference between the first compensation value and the second compensation value. For example, in the case where the first coordinate of the first sampling alignment mark SAM1 is to be moved in the first direction X and the second coordinate of the first sampling alignment mark SAM1 is to be moved in the direction opposite to the first direction X, the compensation directions of the first sampling compensation period and the second sampling compensation period may be different from each other.

[0087] The mark measuring part CM may measure a first coordinate of each of the first sampling alignment mark SAM1 and the second sampling alignment mark SAM2 during the first sampling compensation period. The first coordinate may be a coordinate before the sampling substrate is moved during the first sampling compensation period, the first coordinate of the first sampling alignment mark SAM1 may be (X0, Y0), and the first coordinate of the second sampling alignment mark SAM2 may be (X1, Y1).

[0088] The first compensation value may be a compensation value for adjusting the first coordinate of the first sampling alignment mark SAM1 in the first direction X and the first coordinate of the second sampling alignment mark SAM2 in the first direction X to be consistent (or aligned) with each other. For example, the first compensation value may be determined according to the angle RA (e.g., the degree to which the sampling substrate is offset relative to the first direction X).

[0089] For example, Equation 1 may be used to determine the first compensation value.

[0090] Equation 1

[0091] C1=tan(RA)*RD

[0092] Here, C1 may be a first compensation value, RA may be an angle between a virtual line passing through the first coordinates of the first sampling alignment mark SAM1 and the first coordinates of the second sampling alignment mark SAM2 and the second direction Y, and RD may be a distance between the first substrate moving part 210 and the second substrate moving part 220. Since the sampling substrate and the substrate SUB are moved by the first substrate moving part 210 and the second substrate moving part 220 according to the first compensation value, the first compensation value may be calculated from the distance RD between the first substrate moving part 210 and the second substrate moving part 220.

[0093] In an embodiment, the angle RA may be determined using Equation 2.

[0094] Equation 2

[0095] arctan(|X0-X1| / AD)

[0096] Here, X0 may be a first coordinate of the first sampling alignment mark SAM1 in the first direction X, X1 may be a first coordinate of the second sampling alignment mark SAM2 in the first direction X, and AD may be a distance between the first sampling alignment mark SAM1 and the second sampling alignment mark SAM2. Since the angle between the first coordinate of the first sampling alignment mark SAM1 and the first coordinate of the second sampling alignment mark SAM2 is small, and the distance between the first sampling alignment mark SAM1 and the second sampling alignment mark SAM2 and the difference between the first coordinate of the first sampling alignment mark SAM1 in the second direction Y and the first coordinate of the second sampling alignment mark SAM2 in the second direction Y may be substantially similar to each other, an "inverse tangent" trigonometric function may be used to calculate the angle RA. However, the embodiment is not limited thereto, and an "inverse sine" trigonometric function may be used.

[0097] The substrate fixing part 200 may move the sampling substrate so that first coordinates of the first sampling alignment mark SAM1 and the second sampling alignment mark SAM2 in the first direction X coincide with (or are aligned with) each other during the first sampling compensation period.

[0098] The mark measuring part CM may measure the second coordinate of the first sampling alignment mark SAM1 and measure the second coordinate of the second sampling alignment mark SAM2 during the second sampling compensation period. The second coordinate may be the coordinate of the sampling substrate before it moves during the second sampling compensation period, and may be the coordinate of the sampling substrate after it moves during the first sampling compensation period. The second coordinate of the first sampling alignment mark SAM1 may be (X'0, Y'0), and the second coordinate of the second sampling alignment mark SAM2 is (X'1, Y'1).

[0099] For example, the coordinates of the first sampling alignment mark SAM1 may be changed from (X0, Y0) to (X'0, Y'0). For example, the coordinates of the second sampling alignment mark SAM2 may be changed from (X1, Y1) to (X'1, Y'1).

[0100] However, due to the driving error of the first substrate moving part 210 and the second substrate moving part 220 and the measurement error of the mark measuring part CM, the first coordinate of the first sampling alignment mark SAM1 in the first direction X and the first coordinate of the second sampling alignment mark SAM2 in the first direction X may not be accurately consistent (or aligned) with each other. For example, the compensation performed by the inkjet printing device 1000 during the first sampling compensation period and the first compensation period may be offset within a range with a constant tendency. Therefore, the compensation value may be determined based on the second compensation value determined according to the degree to which the sampling substrate is offset due to movement during the first sampling compensation period, so that the inkjet printing device 1000 can perform compensation using an alignment mark (e.g., a single mark) during the second compensation period.

[0101] The second compensation value may be a compensation value for adjusting the second coordinate of the first sampling alignment mark SAM1 in the first direction X and the second coordinate of the second sampling alignment mark SAM2 in the first direction X to be consistent (or aligned) with each other during the second sampling compensation period. The second compensation value may be determined according to the difference between the precise second coordinate of the first sampling alignment mark SAM1 in the first direction X shifted by the first compensation value and the measured second coordinate of the first sampling alignment mark SAM1 in the first direction X.

[0102] For example, Equation 3 may be used to determine the second compensation value.

[0103] Equation 3

[0104] C2=DFF*(RD / (Y'0-Y'1))

[0105] Here, C2 may be a second compensation value, DFF may be a difference between a second coordinate of the first sampling alignment mark SAM1 in the first direction X and a coordinate to which the first coordinate of the first sampling alignment mark SAM1 in the first direction X is moved (or adjusted) when the sampling substrate is moved by the first compensation value, RD may be a distance between the first substrate moving part 210 and the second substrate moving part 220, Y'0 may be a second coordinate of the first sampling alignment mark SAM1 in the second direction Y, and Y'1 may be a second coordinate of the second sampling alignment mark SAM2 in the second direction Y.

[0106] In the case where the sampling substrate is moved by the first compensation value, the coordinates to which the first coordinate of the first sampling alignment mark SAM1 in the first direction X is moved (or adjusted) may be coordinates mathematically calculated by the inkjet printing apparatus 1000, by a computer device, etc. For example, since the sampling substrate and the substrate SUB are moved by the first substrate moving part 210 and the second substrate moving part 220 according to the second compensation value, the second compensation value may be calculated from the distance between the first substrate moving part 210 and the second substrate moving part 220.

[0107] For example, the inkjet printing apparatus 1000 may determine a reference coordinate (e.g., a precisely moved coordinate) moved when the substrate SUB is offset at a specific angle by sampling the substrate, and determine whether the substrate SUB has been aligned by comparing the second coordinate of the first alignment mark AM1 with the reference coordinate.

[0108] Figure 8 is a flowchart illustrating an inkjet printing method according to an embodiment.

[0109] refer to Figure 8 In the inkjet printing method, a first coordinate of each of a first alignment mark AM1 and a second alignment mark AM2 of a substrate SUB may be measured during a first compensation period (S100), the substrate SUB may be moved so that a first coordinate of the first alignment mark AM1 in a first direction X and a first coordinate of the second alignment mark AM2 in the first direction X may coincide with (or be aligned with) each other during the first compensation period (S200), a second coordinate of the first alignment mark AM1 may be measured during a second compensation period (S300), the second coordinate of the first alignment mark AM1 may be compared with a reference coordinate of the first alignment mark AM1 during the second compensation period (S400), the substrate SUB may be moved according to a comparison result (S500), and ink may be discharged (or injected) onto the substrate SUB (S600).

[0110] In an embodiment, in the inkjet printing method, when a difference between the second coordinate of the first alignment mark AM1 in the first direction X and the reference coordinate of the first alignment mark AM1 in the first direction X is longer than a reference length, the substrate SUB may be moved. In an embodiment, in the inkjet printing method, when a difference between the second coordinate of the first alignment mark AM1 in the first direction X and the reference coordinate of the first alignment mark AM1 in the first direction X is longer than a reference length, an operation of the first compensation period may be performed.

[0111] In the inkjet printing apparatus 1000 according to the embodiment, since the substrate SUB is aligned multiple times, the substrate SUB can be accurately aligned.

[0112] In the inkjet printing apparatus 1000 according to the embodiment, one alignment mark (eg, a single alignment mark) may be used during the second compensation period, so that the takt time of the display device may be reduced.

[0113] At the end of the detailed description, those skilled in the art will appreciate that many changes and modifications may be made to the embodiments without departing substantially from the principles, spirit and scope of the present disclosure. Therefore, the disclosed embodiments are used in a general and descriptive sense only and not for the purpose of limitation.

Claims

1. An inkjet printing device, comprising: a stage on which a substrate including a first alignment mark and a second alignment mark is mounted; The inkjet head part discharges ink; a mark measuring section that measures a first coordinate of each of the first alignment mark and the second alignment mark during a first compensation period, the mark measuring section measuring a second coordinate of the first alignment mark during a second compensation period after the first compensation period; as well as a substrate holding portion, holding the substrate, wherein the substrate fixing part performs a first operation to move the substrate during the first compensation period so that the first coordinate of the first alignment mark in the first direction and the first coordinate of the second alignment mark in the first direction are aligned with each other, and performs a second operation to move the substrate during the second compensation period based on a result obtained by comparing the second coordinate of the first alignment mark with a reference coordinate of the first alignment mark.

2. The inkjet printing device according to claim 1, wherein: The substrate fixing portion performs the second operation to move the substrate in a case where a difference between the second coordinate of the first alignment mark in the first direction and the reference coordinate of the first alignment mark in the first direction is longer than a reference length.

3. The inkjet printing device according to claim 1, wherein: The substrate fixing part performs the first operation during the first compensation period in a case where a difference between the second coordinate of the first alignment mark in the first direction and the reference coordinate of the first alignment mark in the first direction is longer than a reference length.

4. The inkjet printing device according to claim 1, wherein: The substrate fixing portion includes a first substrate moving portion and a second substrate moving portion which are spaced apart from each other and move the substrate.

5. The inkjet printing device according to claim 4, wherein: The first substrate moving portion and the second substrate moving portion rotate the substrate by moving the substrate in different directions.

6. The inkjet printing device according to claim 1, wherein: The reference coordinates are determined based on a compensation value according to an angle between a virtual line passing through the first coordinates of the first alignment mark and the first coordinates of the second alignment mark and a second direction perpendicular to the first direction.

7. The inkjet printing device according to claim 6, wherein: The reference coordinates are coordinates to which the first coordinates of the first alignment mark are adjusted if the substrate is moved by the compensation value.

8. The inkjet printing device according to claim 7, wherein: The substrate fixing portion includes a first substrate moving portion and a second substrate moving portion which are spaced apart from each other and move the substrate, and The reference coordinates are coordinates to which the first coordinates of the first alignment mark are adjusted when the first substrate moving portion moves the substrate by half the compensation value in one direction and the second substrate moving portion moves the substrate by half the compensation value in a direction opposite to the one direction.

9. The inkjet printing device according to claim 6, wherein: The compensation value is determined using a sampling substrate including a first sampling alignment mark corresponding to the first alignment mark and a second sampling alignment mark corresponding to the second alignment mark, and The compensation value is determined based on a first compensation value according to an angle between a virtual line passing through first coordinates of the first sampling alignment mark and first coordinates of the second sampling alignment mark during a first sampling compensation period and the second direction, and a second compensation value according to second coordinates of the first sampling alignment mark and second coordinates of the second sampling alignment mark during a second sampling compensation period after the first sampling compensation period.

10. The inkjet printing device according to claim 1, wherein: The first alignment mark and the second alignment mark are adjacent to the substrate fixing portion.

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