Semi-automatic discharging mechanism of large-size mask production line

Abstract

The invention relates to the technical field of mask feeding and discharging, and discloses a semi-automatic discharging mechanism of a large-size mask production line, the semi-automatic discharging mechanism comprises a discharging robot and a discharging clamping jaw arranged at the movable end of the discharging robot, and a CCD camera recognition assembly is arranged on the discharging clamping jaw and used for recognizing and positioning the position of a mask Box. An observation table is arranged on one side of the discharging robot, a vertical plate clamping assembly is arranged on the observation table, the vertical plate clamping assembly is used for vertically positioning and clamping a mask plate, a boxing mechanism is further arranged on one side of the discharging robot, and a mask plate Box is limited and clamped on the boxing mechanism through a limiting assembly. Linkage is formed by all the units, the repeating precision of all the mechanisms is high, the plate placing precision is greatly improved, workers are far away from the plates, the ash falling risk is very low, the shipment quality is guaranteed, meanwhile, the Box is overturned through the boxing mechanism, the burden of the workers is relieved, and the production efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of mask loading and unloading, and in particular to a semi-automatic unloading mechanism for a large-size mask production line. Background Art

[0003] During the production process of photomasks, the requirements for precision are extremely high, and any slight deviation may lead to product quality problems. The existing photomask unloading mechanism is manual unloading, which requires personnel to use a jig of the corresponding size of the photomask to move the photomask into the box. The precision control is poor, there is a risk of bumping, and the personnel are close to the mask, which has the risk of dust falling. Therefore, it is necessary to develop a new semi-automatic unloading mechanism. Summary of the invention

[0004] 1. Technical issues to be resolved

[0005] In view of the shortcomings of the prior art, the present invention provides a semi-automatic unloading mechanism for a large-size mask production line, which solves the problems in the prior art of mask production, which mainly relies on manual unloading and boxing by personnel, resulting in low transportation efficiency, poor precision control, and the possibility of bumps and contamination of the mask.

[0006] (II) Technical solution

[0007] To achieve the above objectives, the present invention is implemented through the following technical solutions:

[0008] A semi-automatic unloading mechanism for a large-size mask production line comprises a unloading robot and an unloading clamp arranged at the movable end of the unloading robot, a CCD camera recognition component is arranged on the unloading clamp to identify and locate the position of a mask box, an observation platform is arranged on one side of the unloading robot, a vertical clamping component is arranged on the observation platform, the vertical clamping component is used to vertically position and clamp the mask, a box loading mechanism is also arranged on one side of the unloading robot, the box loading mechanism clamps the mask box through a limiting component, the box loading mechanism is used to switch the mask box thereon between vertical and horizontal states; the limiting component comprises a width-direction limiting clamp and a length-direction limiting component, the width-direction limiting component clamps and limits the two side surfaces of the mask box in the width direction, and the length-direction limiting component is used to limit and support one end face of the mask box.

[0009] Preferably, the unloading clamp includes a first linear module and two sliding blocks driven by the first linear module, the CCD camera recognition component is arranged on one side of the sliding block, and the clamp assemblies are symmetrically arranged on the upper and lower sliding blocks, and the clamp assemblies are used to clamp and fix the upper and lower edges of the mask plate.

[0010] Preferably, the vertical clamping assembly includes a second linear module and a pair of movable bases driven by the second linear module, two of the movable bases are relatively fixedly connected with vertical beams, and a plurality of V-shaped clamping blocks are evenly fixedly installed on opposite sides of the vertical beams. When the mask needs to be observed, the mask is clamped and fixed between the V-shaped clamping blocks on the two relatively arranged vertical beams.

[0011] Preferably, the box loading mechanism includes a support base and a driving cylinder rotatably connected to the support base, the piston end of the driving cylinder is rotatably connected to the support frame, and the side of the support frame away from the driving cylinder is rotatably connected to the support base through a connecting shaft and a rotating base. When the piston end of the driving cylinder is extended, the inclination angle of the support frame is driven to change, and the support frame is respectively driven and connected to two width-direction limit clamps through a third linear module. When unloading, the mask Box is limit-clamped and fixed between the two width-direction limit clamps, and the support frame is movably connected to a limit plate through a linear driving module, and the limit plate is used to support one end of the mask.

[0012] Preferably, the movable ends of the third linear modules are fixedly connected to connecting plates, on which the width-direction limiting clamps are detachably mounted, and the width-direction limiting clamps are penetrated by U-shaped grooves, and the distance between the width-direction limiting clamps and the horizontal plane on the support frame is adjusted by adjusting the installation position of the U-shaped grooves on the connecting plates.

[0013] Preferably, a mounting frame is fixedly mounted on the support frame, a linear drive module is fixedly connected to the mounting frame, a limit plate is fixedly mounted on the movable end of the linear drive module, and the limit plate and the mounting frame are slidably connected via a slider cooperating with a slide rail.

[0014] (III) Beneficial effects

[0015] The present invention has the following beneficial effects:

[0016] The semi-automatic unloading mechanism of the large-size mask production line uses an observation platform and unloading clamps to move the upstream mask to the vertical clamping assembly through the unloading robot and clamp it. The personnel can observe the film surface and mirror surface of the mask on both sides to confirm whether there is any abnormality in the appearance of the mask. Then the unloading robot takes the mask off the observation platform, rotates it according to the shipping requirements, and then moves it above the box loading mechanism; through the box loading mechanism, the personnel pushes the box onto the box loading mechanism, and the box loading mechanism flips the box from a vertical state to a horizontal state, and then the personnel removes the box cover; at this time, the CCD camera recognition component on the unloading clamp performs CCD photography and recognition on the corners of the mask box on the box loading mechanism to confirm the box position, and the unloading robot accurately places the mask into the box, and then the unloading robot moves away, and after the personnel covers the box cover, the box loading mechanism flips the box to a vertical state, and the personnel pushes the box down for subsequent packaging and shipment. The units of the present invention are linked, and the repetition accuracy of each mechanism reaches 0.06mm, which greatly improves the plate placement accuracy. In addition, the personnel are far away from the plate, and the risk of dust falling is very low, which greatly improves the shipment quality. At the same time, the box is turned over by the box loading mechanism, which reduces the burden on personnel and improves production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0018] Figure 2 It is a schematic diagram of the layout structure of the blanking clamping jaws and the vertical clamping plate assembly of the present invention;

[0019] Figure 3 This is a schematic diagram of the layout structure of the blanking clamping jaws of the present invention;

[0020] Figure 4 It is a schematic diagram of the overall structure of the box loading mechanism of the present invention;

[0021] Figure 5 This is a schematic diagram of the layout structure of the length direction limit assembly of the present invention;

[0022] Figure 6 It is a schematic diagram of the disassembled structure of the box loading mechanism of the present invention.

[0023] In the figure: 1. unloading robot; 2. unloading clamp; 21. first linear module; 22. sliding block; 23. clamp assembly; 3. CCD camera recognition assembly; 4. mask; 5. observation platform; 6. vertical clamp assembly; 61. second linear module; 62. moving base; 63. vertical beam; 64. V-shaped clamping block; 7. box loading mechanism; 71. supporting base; 72. driving cylinder; 73. supporting frame; 74. third linear module; 741. connecting plate; 742. width direction limiting clamp; 75. connecting shaft; 76. rotating base; 77. length direction limiting assembly; 771. mounting frame; 772. linear driving module; 773. limiting plate. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] See also Figure 1 The present invention provides a technical solution: a semi-automatic unloading mechanism for a large-size mask plate 4 production line, comprising an unloading robot 1 and an unloading clamp 2 arranged at the movable end of the unloading robot 1, a CCD camera recognition component 3 is arranged on the unloading clamp 2, for identifying and positioning the position of the mask plate Box, an observation platform 5 is arranged on one side of the unloading robot 1, a vertical clamping component 6 is arranged on the observation platform 5, the vertical clamping component 6 is used to vertically position and clamp the mask plate 4, a box loading mechanism 7 is also arranged on one side of the unloading robot 1, the box loading mechanism 7 clamps the mask plate Box through a limiting component, and the box loading mechanism 7 is used to switch the mask plate Box thereon between vertical and horizontal states; the limiting component comprises a width direction limiting clamp 742 and a length direction limiting component 77, the width direction limiting component clamps and limits the two side surfaces of the mask plate Box from the width direction, and the length direction limiting component 77 is used to limit and support one end face of the mask plate Box.

[0026] According to the present invention, through the observation platform 5 and the unloading clamping claw 2, the upstream mask 4 is moved to the vertical clamping assembly 6 by the unloading transport robot and clamped and fixed. The personnel can observe the film surface and the mirror surface of the mask 4 on both sides thereof respectively to confirm whether there is any abnormality in the appearance of the mask 4. Then the unloading robot 1 takes the mask 4 from the observation platform 5, rotates it according to the shipping demand, and then moves it above the box loading mechanism 7; through the box loading mechanism 7, the personnel pushes the Box onto the box loading mechanism 7, and the box loading mechanism 7 flips the Box from a vertical state to a horizontal state, and then the personnel takes off the box cover; at this time, the CCD camera recognition component 3 on the unloading clamping claw 2 performs CCD photography and recognition on the corners of the mask Box on the box loading mechanism 7 to confirm the Box position, and the unloading robot 1 realizes the accurate placement of the mask 4 into the Box, and then the unloading robot 1 moves away, and after the personnel covers the box cover, the box loading mechanism 7 flips the Box to a vertical state, and the personnel pushes the Box down for subsequent packaging and shipping. The units of the present invention are linked, and the repetition accuracy of each mechanism reaches 0.06mm, which greatly improves the plate placement accuracy. In addition, the personnel are far away from the plate, and the risk of dust falling is very low, which greatly improves the shipment quality. At the same time, the box loading mechanism 7 flips the box to reduce the burden on personnel and improve production efficiency.

[0027] Reference Figure 2 and 3 As shown, in this embodiment, the blanking clamp 2 includes a first linear module 21 and two sliding blocks 22 driven by the first linear module 21, the CCD camera recognition component 3 is arranged on one side of the sliding block 22, and the upper and lower sliding blocks 22 are symmetrically arranged with clamping jaw components 23, which are used to clamp and fix the upper and lower edges of the mask 4. By setting the first linear module 21 and the clamping jaw component 23, it is possible to adapt to the clamping operation of the mask 4 of different lengths and thicknesses, ensure stable and accurate clamping, avoid clamping errors caused by size differences, and further improve the accuracy and safety of the clamping of the mask 4.

[0028] Reference Figure 2As shown, in this embodiment, the vertical clamping assembly 6 includes a second linear module 61 and a pair of mobile bases 62 driven by the second linear module 61, and the two mobile bases 62 are relatively fixedly connected with vertical beams 63, and a plurality of V-shaped clamping blocks 64 are evenly fixedly installed on the opposite side of the vertical beam 63. When the mask 4 needs to be observed, the mask 4 is clamped and fixed between the V-shaped clamping blocks 64 on the two vertical beams 63 arranged relatively. By setting the second linear module 61 and the V-shaped clamping block 64, it is ensured that the mask 4 is stably fixed in a vertical state, which is convenient for personnel to observe the mask 4 in all directions on the observation platform 5, reduce the observation error caused by movement, and improve the observation efficiency of the mask 4. At the same time, the design of the V-shaped clamping block 64 can effectively disperse the pressure on the mask 4, avoid damage, and ensure its integrity during observation and handling. The whole system has a high degree of automation, reduces human intervention, further improves the stability and reliability of the production line, and realizes an efficient and accurate mask 4 processing process.

[0029] Reference Figure 5 and 6 As shown, in this embodiment, the box loading mechanism 7 includes a support base 71 and a driving cylinder 72 rotatably connected to the support base 71, the piston end of the driving cylinder 72 is rotatably connected to the support frame 73, and the side of the support frame 73 away from the driving cylinder 72 is rotatably connected to the support base 71 through a connecting shaft 75 in cooperation with a rotating base 76. When the piston end of the driving cylinder 72 is extended, the inclination angle of the support frame 73 is driven to change. The support frame 73 is driven and connected to two width-direction limit clamps 742 respectively through a third linear module 74. When unloading, the mask Box is limitedly clamped and fixed between the two width-direction limit clamps 742. The support frame 73 is movably connected to a limit plate 773 through a linear drive module 772. The limit plate 773 is used to support one end of the mask 4. In the initial state, the entire support frame 73 is in a vertical state. After the personnel pushes the mask box onto the limit plate 773, the third linear module 74 drives the width-direction limit clamp 742 to clamp and fix the two sides of the mask box. At this time, the drive cylinder 72 is started to flip the entire support frame 73, and the mask box is flipped from a vertical state to a horizontal state. Then the personnel removes the box cover; the CCD camera recognition component 3 on the unloading robot 1 performs CCD photography recognition on the corners of the mask box on the box loading mechanism 7 to confirm the box position and accurately place the mask into the box. After that, the Robot moves away, and the personnel cover the box. The drive cylinder 72 drives the support frame 73 again to flip the box to a vertical state, and the personnel push the box down for subsequent packaging and shipment. The box loading mechanism 7 flips the box to reduce the burden on personnel and improve production efficiency.

[0030] Reference Figure 4As shown, in this embodiment, the movable ends of the third linear modules 74 are fixedly connected to the connecting plates 741, and the connecting plates 741 are detachably mounted with the width-direction limiting clamps 742, and the width-direction limiting clamps 742 are penetrated with U-shaped grooves, and the distance between the width-direction limiting clamps 742 and the horizontal plane on the support frame 73 is adjusted by adjusting the installation position of the U-shaped groove on the connecting plates 741. By setting the width-direction limiting clamps 742 with adjustable installation height, the limiting clamping of mask boxes of different heights can be adapted, thereby improving the blanking requirements of the entire production line for mask plates 4 of different sizes.

[0031] Reference Figure 5 and 6 As shown, in this embodiment, a mounting frame 771 is fixedly mounted on the support frame 73, a linear drive module 772 is fixedly connected to the mounting frame 771, a limit plate 773 is fixedly mounted on the movable end of the linear drive module 772, and the limit plate 773 is slidably connected to the mounting frame 771 through a slider and a slide rail. The linear drive module 772 is set to drive the limit plate 773 to move, and then after the limit plate 773 clamps and fixes the mask box in the width direction, the position of the limit plate 773 is adjusted so that the limit plate 773 stably presses against the end face of the mask box, ensuring the stability of the mask box during the flipping process, thereby improving the accuracy of the subsequent unloading robot 1 placing the mask 4 into the mask box.

[0032] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions. The sentence "includes an element defined by ... does not exclude the existence of other identical elements in the process, method, article or device including the element".

[0033] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A semi-automatic unloading mechanism for a large-size mask production line, characterized in that: It includes a feeding robot and a feeding clamp arranged at the movable end of the feeding robot, the feeding clamp is provided with a CCD camera recognition component for identifying and positioning the position of the mask box, an observation platform is provided on one side of the feeding robot, a vertical clamping component is provided on the observation platform, the vertical clamping component is used for vertically positioning and clamping the mask, and a box loading mechanism is also arranged on one side of the feeding robot, the box loading mechanism clamps the mask box through a limiting component, and the box loading mechanism is used to switch the mask box thereon between vertical and horizontal states; the limiting component includes a width-direction limiting clamp and a length-direction limiting component, the width-direction limiting component clamps and limits the two side surfaces of the mask box in the width direction, and the length-direction limiting component is used to limit and support one end face of the mask box.

2. The semi-automatic unloading mechanism for a large-size mask production line according to claim 1, characterized in that: The unloading clamp includes a first linear module and two sliding blocks driven by the first linear module. The CCD camera recognition component is arranged on one side of the sliding block. Clamp assemblies are symmetrically arranged on the upper and lower sliding blocks. The clamp assemblies are used to clamp and fix the upper and lower edges of the mask.

3. The semi-automatic unloading mechanism for a large-size mask production line according to claim 2, characterized in that: The vertical clamping assembly includes a second linear module and a pair of movable bases driven by the second linear module. Vertical beams are relatively fixedly connected to the two movable bases. A plurality of V-shaped clamping blocks are evenly fixedly installed on opposite sides of the vertical beams. When the mask needs to be observed, the mask is clamped and fixed between the V-shaped clamping blocks on the two relatively arranged vertical beams.

4. The semi-automatic unloading mechanism for a large-size mask production line according to claim 1 or 3, characterized in that: The box loading mechanism includes a support base and a driving cylinder rotatably connected to the support base, the piston end of the driving cylinder is rotatably connected to the support frame, and the side of the support frame away from the driving cylinder is rotatably connected to the support base through a connecting shaft and a rotating base. When the piston end of the driving cylinder is extended, the inclination angle of the support frame is driven to change. The support frame is respectively driven and connected to two width-direction limit clamps through a third linear module. When unloading, the mask Box is limit-clamped and fixed between the two width-direction limit clamps. The support frame is movably connected to a limit plate through a linear driving module, and the limit plate is used to support one end of the mask.

5. The semi-automatic unloading mechanism for a large-size mask production line according to claim 4, characterized in that: The movable ends of the third linear modules are fixedly connected to connecting plates, on which the width-direction limiting clamps are detachably mounted, and the width-direction limiting clamps are penetrated by U-shaped grooves, and the distance between the width-direction limiting clamps and the upper horizontal plane of the support frame is adjusted by adjusting the installation position of the U-shaped grooves on the connecting plates.

6. The semi-automatic unloading mechanism for a large-size mask production line according to claim 5, characterized in that: A mounting frame is fixedly mounted on the support frame, a linear drive module is fixedly connected to the mounting frame, a limit plate is fixedly mounted on the movable end of the linear drive module, and the limit plate and the mounting frame are slidably connected via a slider and a slide rail.

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