Auxiliary loading method and device for automatic stock arrangement system of machine, storage medium and terminal

Abstract

The invention discloses an auxiliary loading method and device for an automatic stock arrangement system of a machine, a storage medium and a terminal. The method comprises the following steps: reading wafer information of all batches of wafers and machine information of all machines; obtaining a machine platform goods information setting table set by a user, wherein the machine platform goods information setting table comprises at least one piece of machine platform goods setting information; each piece of machine table matching information is matched with the machine table information of all machine tables to determine a corresponding auxiliary loading machine table, and the matched auxiliary loading machine table is set based on setting information corresponding to the machine table matching information to obtain auxiliary loading execution information of the auxiliary loading machine table; and taking the auxiliary loading execution information as a screening condition, and carrying out auxiliary loading setting on all batches of wafers on the auxiliary loading machine table corresponding to the auxiliary loading execution information based on the corresponding wafer information. The RTD development efficiency is improved, the situation that small goods running behaviors need to be upgraded and changed every day is avoided, and the expandability and the anti-risk capacity of the system are improved.

Description

Technical Field

[0001] The present application belongs to the field of semiconductor processing technology, and relates to a method for assisting loading goods in an automatic cargo arrangement system of a machine, and in particular to a method and device for assisting loading goods in an automatic cargo arrangement system of a machine, a storage medium and a terminal. Background Art

[0002] Most current semiconductor factories (FABs) have introduced RTD to realize automated dispatching of machines. RTD (Real Time Dispatching) is the decision-maker of the entire semiconductor factory manufacturing. Through RTD, resources within the semiconductor factory can be integrated and dispatched. By coordinating with multiple systems such as MES / SDR / APC / Report, various production conditions such as production capacity, machine conditions, Qtime, and machine characteristics can be referred to to adjust the priority and dispatch work of products and non-products, so as to improve the production efficiency of semiconductor factories and achieve the goal of highly automated semiconductor factories.

[0003] However, RTD is just a system after all, and all dispatching rules need to be manually formulated. The delivery situation of semiconductor factories is different every day, and RTD developers need to modify the corresponding RTD logic every day according to the delivery needs of the production line. Its disadvantages are that it is not conducive to system version control, and too many versions are difficult to manage; at the same time, frequent upgrades increase the waiting time of developers and testers; modifying the logic every day will lead to frequent RTD upgrades, and once a development error occurs, it is easy to have a bad impact on the production line.

[0004] Therefore, there is an urgent need for an auxiliary tool that can avoid frequent upgrades of RTD and assist RTD in integrating and scheduling resources within a semiconductor factory. Summary of the invention

[0005] In view of the shortcomings of the prior art mentioned above, the purpose of the present invention is to provide a method and device for auxiliary loading of an automatic cargo arrangement system of a machine, a storage medium and a terminal, so as to solve the problem that the existing RTD is frequently upgraded during use, which is not conducive to system version control, increases the waiting time of developers and testers, and easily has a negative impact on the production line.

[0006] To achieve the above-mentioned and other related purposes, the present invention provides a method for assisting loading of goods in an automatic goods placement system of a machine, comprising:

[0007] Read wafer information of all wafer batches and machine information of all machines from the manufacturing execution system database;

[0008] Acquire a machine loading information setting table set by a user, wherein the machine loading information setting table includes at least one piece of machine loading setting information, and the machine loading setting information includes machine matching information and corresponding setting information of a machine;

[0009] Matching each piece of the machine matching information with the machine information of all the machines to determine the corresponding auxiliary loading machine, and setting the matched auxiliary loading machine based on the setting information corresponding to the machine matching information to obtain the auxiliary loading execution information of the auxiliary loading machine;

[0010] The auxiliary loading execution information is used as a screening condition, and based on the corresponding wafer information, auxiliary loading settings are performed on all batches of wafers on the auxiliary loading machines corresponding to the auxiliary loading execution information.

[0011] In one embodiment of the present invention, the wafer information includes the wafer number and wafer priority of the corresponding batch of wafers, and the machine information includes the machine name and the corresponding product name, process site name and process recipe;

[0012] The machine matching information includes a set machine name and a corresponding set product name, a set process site name and a set process recipe, and the setting information includes enabling information and a wafer number that is not controlled by the card or a wafer priority that is not controlled by the card.

[0013] In one embodiment of the present invention, matching the machine matching information with the machine information of the machine includes:

[0014] Determine whether the set machine name and the corresponding set product name, set process site name and set process formula in the machine matching information are the same as the machine name and the corresponding product name, process site name and process formula in the machine information. If so, it means that the machine matching information matches the machine information, and the corresponding machine is the auxiliary loading machine matched by the machine matching information. Otherwise, it means that the machine matching information does not match the machine information.

[0015] In one embodiment of the present invention, using the auxiliary loading execution information as a screening condition, performing auxiliary loading settings for a single batch of wafers on the auxiliary loading machine corresponding to the auxiliary loading execution information based on the corresponding wafer information includes:

[0016] If the enabling information in the auxiliary loading execution information is "yes", then determine whether the wafer code in the wafer information of the batch of wafers is the same as the wafer number not subject to card control in the auxiliary loading execution information. If so, set the batch of wafers to be loaded on the auxiliary loading machine corresponding to the auxiliary loading execution information. Otherwise, determine whether the wafer priority in the wafer information of the batch of wafers is the same as the wafer priority not subject to card control in the auxiliary loading execution information. If so, set the batch of wafers to be loaded on the auxiliary loading machine corresponding to the auxiliary loading execution information. Otherwise, set the batch of wafers not to be loaded on the auxiliary loading machine corresponding to the auxiliary loading execution information.

[0017] If the enabling information in the auxiliary loading execution information is "no", then the batch of wafers is set to be loaded on the auxiliary loading machine corresponding to the auxiliary loading execution information.

[0018] In one embodiment of the present invention, the method for assisting loading of goods by the automatic goods placement system of a machine further includes:

[0019] Obtaining wafer numbers of all batches of wafers to be loaded on a target machine, where the wafers to be loaded on the target machine are wafers set on the target machine for loading;

[0020] Acquire a special wafer table of the target machine set by a user, wherein the special wafer table includes wafer numbers and set scores of at least one batch of special wafers;

[0021] Based on the set scores corresponding to the wafer numbers in the special wafer table, scores are set for the wafers to be loaded corresponding to the same wafer numbers of the target machine to obtain all the wafers to be loaded after the scores are set;

[0022] All the wafers to be loaded are sorted from high to low according to the scores, so that the target machine loads all the wafers to be loaded in sequence according to the sorting;

[0023] The target machine is any one of all the machines, and the wafers to be loaded on the target machine are wafers that are subject to card control or wafers that are not subject to card control.

[0024] In one embodiment of the present invention, the machine loading information setting table set by the user and the special wafer table of the target machine set by the user are both obtained through the auxiliary UI interface.

[0025] In one embodiment of the present invention, the auxiliary UI interface implements the setting of the machine loading information setting table or the special wafer table in the form of Table, Excel or CSV.

[0026] To achieve the above-mentioned purpose and other related purposes, the present invention also provides an auxiliary loading device for a machine automatic cargo arrangement system, comprising an information reading module, a setting information acquisition module, a matching module and a loading setting module;

[0027] The information reading module is used to read the wafer information of all batches of wafers and the machine information of all machines from the manufacturing execution system database;

[0028] The setting information acquisition module is used to acquire a machine loading information setting table set by a user, wherein the machine loading information setting table includes at least one piece of machine loading setting information, and the machine loading setting information includes machine matching information and corresponding setting information of a machine;

[0029] The matching module is used to match each piece of the machine matching information with the machine information of all the machines to determine the corresponding auxiliary loading machine, and to set the matched auxiliary loading machine based on the setting information corresponding to the machine matching information to obtain the auxiliary loading execution information of the auxiliary loading machine;

[0030] The loading setting module is used to use the auxiliary loading execution information as a screening condition, and based on the corresponding wafer information, perform auxiliary loading settings on all batches of wafers on the auxiliary loading machine corresponding to the auxiliary loading execution information.

[0031] In order to achieve the above-mentioned purpose and other related purposes, the present invention also provides a storage medium on which a computer program is stored, and when the program is executed by a processor, the auxiliary loading method of the automatic cargo arrangement system of the machine is implemented.

[0032] To achieve the above objectives and other related objectives, the present invention also provides a terminal, including: a processor and a memory;

[0033] The memory is used to store computer programs, and the processor is used to execute the computer programs stored in the memory, so that the terminal executes the auxiliary loading method of the machine automatic cargo arrangement system.

[0034] Compared with the prior art, one or more embodiments of the above scheme may have the following advantages or beneficial effects:

[0035] The auxiliary loading method of the machine automatic cargo arrangement system provided by the embodiment of the present invention is applied. By setting an auxiliary UI interface, the machine loading information setting table set by the user and the special wafer table of the target machine set by the user are obtained, thereby realizing the control of card control, loading and sorting of RTD, increasing the scalability of the system. By adding an external auxiliary system, RTD can adjust the sorting and card control rules at any time according to the different running conditions of the semiconductor factory. Increase the risk resistance of the system. When there is a problem with the developed function, the card control can be set through the auxiliary UI interface to close each function at any time to avoid the continuous impact on the production line due to system abnormalities; improve the RTD development efficiency, avoid the changes of small running behaviors every day, and frequently upgrade and revise the RTD logic; at the same time, the present invention sets a friendly and visual interface, which is very friendly to non-developers. Users only need to make simple settings to realize the loading, sorting and card control of the RTD function.

[0036] Other features and advantages of the present invention will be described in the following description, and partly become apparent from the description, or understood by practicing the present invention. The purpose and other advantages of the present invention can be realized and obtained by the structures particularly pointed out in the description, claims and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0038] Figure 1 Shown is a flow chart of the auxiliary loading method of the machine automatic cargo arrangement system described in an embodiment of the present application.

[0039] Figure 2 Shown is a schematic diagram of the linkage process between the automatic cargo arrangement system and the auxiliary UI interface in the auxiliary cargo loading method of the machine automatic cargo arrangement system described in an embodiment of the present application.

[0040] Figure 3 Shown is a schematic diagram of the auxiliary UI interface settings in the auxiliary loading method of the machine automatic cargo arrangement system described in an embodiment of the present application.

[0041] Figure 4 Shown is a schematic diagram of the structure of the auxiliary loading device of the automatic cargo arrangement system of the machine described in an embodiment of the present application.

[0042] Figure 5 Shown is a schematic diagram of the structure of the terminal described in an embodiment of the present application. DETAILED DESCRIPTION

[0043] The following describes the embodiments of the present invention by specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0044] It should be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present invention, and thus the drawings only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0045] The following embodiments of the present application provide a method and device for assisting loading goods in an automatic cargo arrangement system of a machine, a storage medium and a terminal, so as to solve the problem that frequent upgrades during the use of existing RTDs are not conducive to system version control, increase the waiting time for developers and testers, and easily cause adverse effects on the production line.

[0046] The following will describe in detail the principles and implementation methods of a method and device for assisting loading cargoes in an automatic cargo arrangement system for a machine, a storage medium, and a terminal of this embodiment in conjunction with the accompanying drawings, so that those skilled in the art can understand the method and device for assisting loading cargoes in an automatic cargo arrangement system for a machine, a storage medium, and a terminal of this embodiment without the need for creative work.

[0047] References Figure 1 As shown, an embodiment of the present invention provides an auxiliary loading method for an automatic cargo arrangement system of a machine, comprising the following steps.

[0048] Step S101 , reading wafer information of all wafer batches and machine information of all machines from a manufacturing execution system database.

[0049] The machine automatic dispatching system (RTD) usually reads wafer information, machine information, dispatch information and other information from the manufacturing execution system database to implement data reading and synchronization. The machine automatic dispatching system database then implements the setting of all dispatching rules based on modules such as information module, card control module, sorting module and special logic processing module.

[0050] The embodiment of the present invention first needs to obtain the wafer information of all batches of wafers and the machine information of all machines from the manufacturing execution system database. The wafer information includes the wafer number (lot id) and wafer priority (PRIORITY) of the corresponding batch of wafers, and the machine information includes the machine name (eqp id) and the corresponding product name (prod id), process site name (stage) and process recipe (recipe). Since one machine can run goods for different products, different process sites and different process recipes, the wafer corresponding to the machine can be determined in detail based on the machine information in this embodiment.

[0051] Step S102, obtaining a machine loading information setting table set by a user.

[0052] Specifically, based on the auxiliary loading and card control requirements of the machine automatic arrangement system, the user can set the machine loading information setting table (EQP constraint) through the developed auxiliary UI interface. Figure 2 and Figure 3 As shown. The machine loading information setting table includes at least one machine loading setting information. Each machine loading setting information includes machine matching information and corresponding setting information of a machine. The user can determine the machine to be assisted by setting the machine matching information in the machine loading setting information, and implement auxiliary restrictions such as loading or card control on the wafers corresponding to the corresponding machine based on the setting of the setting information.

[0053] Further, the machine matching information specifically includes setting the machine name (EQUIP_ID) and the corresponding setting product name (PRODUCT), setting the process site name (STAGE) and setting the process recipe (RECIPE); the setting information includes enabling information (ENABLE) and the wafer number (RISK_LOT) that is not subject to card control or the wafer priority (BPASS_PRIORITY) that is not subject to card control. The enabling information indicates whether the machine is to accept the corresponding auxiliary limitation under the corresponding circumstances. The wafer number that is not subject to card control is the wafer number that is not subject to card control by the machine automatic delivery system (ie, RTD) defined by the user through the auxiliary UI interface. Preferably, the wafer number that is not subject to card control can be set to multiple according to demand. The wafer priority that is not subject to card control is that the user limits a certain type or multiple types of wafers through the auxiliary UI interface to limit a certain type or multiple types of wafers that are not subject to card control by the machine automatic delivery system (ie, RTD). Preferably, the wafer priority that is not subject to card control can also be set to multiple according to demand.

[0054] Step S103, matching each machine matching information with the machine information of all machines to determine the corresponding auxiliary loading machine, and setting the matched auxiliary loading machine based on the setting information corresponding to the machine matching information to obtain the auxiliary loading execution information of the auxiliary loading machine.

[0055] Specifically, the machine information table formed by the machine information of all machines is associated with the machine loading information setting table set by the user to achieve the matching of all machine matching information with the machine information of all machines. Its internal logic is to match each machine matching information in the machine loading information setting table with the machine information of all machines respectively, so as to find the machine information corresponding to each machine matching information in the machine information of all machines. Then, the machine corresponding to the machine information matched with the machine matching information is used as the auxiliary loading machine of the machine matching information.

[0056] The process of matching the machine matching information with the machine information of the machine specifically includes: specifically judging whether the set machine name and the corresponding set product name, set process site name and set process formula in the machine matching information correspond to the machine name and the corresponding product name, process site name and process formula in the machine information, that is, whether the set machine name = machine name, set product name = product name, set process site name = process site name, set process formula = process formula in the machine matching information and the machine information of the machine are all established, if so, it means that the machine matching information matches the machine information, and the corresponding machine is the auxiliary loading machine matched by the machine matching information, otherwise it means that the machine matching information does not match the machine information. The machine information of the machine to be replaced is matched with it until the machine matching information in each loading setting information in the machine loading information setting table finds a matching machine information, that is, the machine matching information in each loading setting information in the machine loading information setting table finds a matching auxiliary loading machine.

[0057] Then, for each auxiliary loading machine, the matched auxiliary loading machine is set based on the setting information corresponding to the machine matching information, so that each machine used as an auxiliary loading machine can obtain its corresponding auxiliary loading execution information, thereby further achieving the purpose of setting the corresponding machine for auxiliary loading through the information in the machine loading information setting table.

[0058] Step S104 , using the auxiliary loading execution information as a screening condition, and performing auxiliary loading settings on all batches of wafers on the auxiliary loading machines corresponding to the auxiliary loading execution information based on the corresponding wafer information.

[0059] Finally, the machine automatic delivery system (i.e., RTD) implements loading card control settings for the batch of wafers corresponding to the corresponding machine based on the auxiliary loading execution information corresponding to each machine. Further, taking the auxiliary loading execution information as the screening condition, the auxiliary loading setting for a single batch of wafers on the auxiliary loading machine corresponding to the auxiliary loading execution information based on the corresponding wafer information includes: if the enabling information in the auxiliary loading execution information of the machine is "yes", then it is determined whether the wafer code in the wafer information of the batch of wafers is the same as the wafer number that is not subject to card control in the auxiliary loading execution information. If so, the batch of wafers is set to be loaded on the auxiliary loading machine corresponding to the auxiliary loading execution information, otherwise it is determined whether the wafer priority in the wafer information of the batch of wafers is the same as the wafer priority that is not subject to card control in the auxiliary loading execution information. If so, the batch of wafers is set to be loaded on the auxiliary loading machine corresponding to the auxiliary loading execution information, otherwise it is set that the batch of wafers is not loaded on the auxiliary loading machine corresponding to the auxiliary loading execution information. If the enabling information in the auxiliary loading execution information is "No", it means that no card control will be performed on this batch of wafers. Therefore, this batch of wafers can be set to be loaded on the auxiliary loading machine corresponding to the auxiliary loading execution information.

[0060] For example, for a batch of wafers, when ENABLE = 'Y', and the wafer number of the batch of wafers does not meet the setting of RISK_Lot, and the wafer priority of the batch of wafers does not meet the setting of BYPASS_PRIORITY, then the automatic delivery system (RTD) of the machine on the current machine will return "F", and the detection perception system (i.e. SDR, used to coordinate with RTD for dispatching) will not add queue to the batch of wafers on the current machine when seeing this information.

[0061] When ENABLE = 'Y', and the wafer number of the wafer batch meets the setting of RISK_Lot, or the wafer priority of the wafer batch meets the setting of BYPASS_PRIORITY, the automatic delivery system (RTD) on the current machine returns "", and the detection and perception system (SDR) sees this information and adds queue to the current machine for this lot;

[0062] When ENABLE = 'N', regardless of whether the wafer number of the wafer batch meets the setting of RISK_Lot, and whether the wafer priority of the wafer batch meets the setting of BYPASS_PRIORITY, the automatic delivery system (RTD) on the current machine will return "". When the detection perception system (SDR) sees this information, it will add queue to the current machine for this lot.

[0063] Through the above settings, it is possible to implement auxiliary loading settings for all batches of wafers on the auxiliary loading machines corresponding to the auxiliary loading execution information based on the corresponding wafer information.

[0064] Step S105 , sorting and setting all batches of wafers corresponding to the machine for loading.

[0065] Specifically, since the sorting and setting process for all batches of wafers corresponding to all machines for loading and setting is the same, the present embodiment is described using the sorting process for all batches of wafers corresponding to a single machine for loading and setting.

[0066] A machine is randomly set as the target machine, and all batches of wafers corresponding to the loading setting of the target machine are used as the wafers to be loaded on the target machine. It should be noted that all batches of wafers to be loaded on the target machine can be obtained through the machine name of the target machine, that is, all batches of wafers corresponding to the loading setting are obtained through the machine name. And the wafers to be loaded on the target machine are wafers that are controlled by the card (that is, ENABLE = 'Y', and the wafer number of the wafer batch meets the setting of RISK_Lot, or the wafer priority of the wafer batch meets the setting of BYPASS_PRIORITY) or wafers that are not controlled by the card (that is, ENABLE = 'N').

[0067] The further sorting setting process of all batches of wafers to be loaded on the target machine is as follows: the wafer numbers of all batches of wafers to be loaded on the target machine are obtained from the manufacturing execution system database (i.e., MES database); and then the user implements the setting of the special wafer table of the target machine through the developed auxiliary UI interface based on the sorting requirements. The special wafer table includes the wafer numbers and set scores of at least one batch of special wafers. That is, the scores of all or part of the wafers to be loaded can be set through the special wafer table of the target machine. Then, the wafer numbers in the special wafer table are matched with the wafer numbers of the wafers to be loaded, so as to obtain the same set score as the wafer number of the wafer to be loaded in the special wafer table, and then the scores of the matched corresponding wafers to be loaded are set based on the corresponding set scores to obtain all the wafers to be loaded after the scores are set. It should be noted that the scores set for each wafer to be loaded are different, so all the wafers to be loaded under the target machine have their respective corresponding scores. Finally, the automatic scheduling system of the machine sorts all the wafers to be loaded based on the ranking method from high to low, so that the target machine can load all the wafers to be loaded in sequence according to the ranking.

[0068] It should be noted that in order to enable users to set up the machine loading information setting table and special wafer table more conveniently. The auxiliary UI interface of this embodiment mainly realizes the synchronization of setting data to the machine automatic loading system (RTD) in the form of Table, Excel or CSV. Further permission management can be carried out on the auxiliary UI interface to further realize the setting and viewing of specific groups of people in some auxiliary UI interfaces. For example, the permission levels can be set from high to low as space administrator permissions> UI interface permissions> setting interface permissions.

[0069] The auxiliary UI interface can also realize the function of creating an interface, so that new tables and tables can be created at any time for use by the machine automatic delivery system (RTD). When creating a new table, the field must support character format selection, and the field types include but are not limited to string type, integer type, floating point type, date type, Boolean type, etc. And the new field supports primary key setting to avoid duplication of data settings. When the field information is updated or modified, the work number and modification content of the person who modified it can also be recorded to facilitate the subsequent tracing of personnel changes and query of abnormalities.

[0070] The auxiliary loading method of the machine automatic cargo arrangement system provided by the embodiment of the present invention realizes the acquisition of the machine loading information setting table set by the user and the special wafer table of the target machine set by the user by setting the auxiliary UI interface, thereby realizing the control of RTD, loading and sorting, etc., increasing the scalability of the system, and realizing RTD to adjust the sorting and card control rules at any time according to the different running conditions of the semiconductor factory by adding external auxiliary systems. Increase the risk resistance of the system. When there is a problem with the developed function, the card control can be set through the auxiliary UI interface to close each function at any time to avoid the continuous impact on the production line due to system abnormalities; improve the RTD development efficiency, avoid the changes of small running behaviors every day, and frequently upgrade and revise the RTD logic; at the same time, the present invention sets a friendly and visual interface, which is very friendly to non-developers. Users only need to make simple settings to realize the loading, sorting and card control of the RTD function.

[0071] like Figure 4 As shown, an embodiment of the present application provides an auxiliary loading device for an automatic cargo arrangement system of a machine, including an information reading module, a setting information acquisition module, a matching module and a loading setting module.

[0072] The information reading module is used to read the wafer information of all batches of wafers and the machine information of all machines from the manufacturing execution system database.

[0073] The setting information acquisition module is used to obtain a machine loading information setting table set by a user, wherein the machine loading information setting table includes at least one piece of machine loading setting information, and the machine loading setting information includes machine matching information of a machine and corresponding setting information.

[0074] The matching module is used to match each machine matching information with the machine information of all machines to determine the corresponding auxiliary loading machine, and to set the matched auxiliary loading machine based on the setting information corresponding to the machine matching information to obtain the auxiliary loading execution information of the auxiliary loading machine.

[0075] The loading setting module is used to use the auxiliary loading execution information as a screening condition, and based on the corresponding wafer information, perform auxiliary loading settings for all batches of wafers on the auxiliary loading machines corresponding to the auxiliary loading execution information.

[0076] The auxiliary loading device of the machine automatic cargo arrangement system provided by the embodiment of the present invention can realize the acquisition of the machine loading information setting table set by the user and the special wafer table of the target machine set by the user by setting the auxiliary UI interface, thereby realizing the control of RTD, loading and sorting, etc., increasing the scalability of the system, and realizing RTD to adjust the sorting and card control rules at any time according to the different cargo running conditions of the semiconductor factory by adding external auxiliary systems. Increase the risk resistance of the system. When there is a problem with the developed function, the card control can be set through the auxiliary UI interface to close various functions at any time to avoid the continuous impact on the production line due to system abnormalities; improve the RTD development efficiency, avoid the changes of small cargo running behaviors every day, and frequently upgrade and revise the RTD logic; at the same time, the present invention sets a friendly and visual interface, which is very friendly to non-developers. Users only need to make simple settings to realize the loading, sorting and card control of RTD functions.

[0077] The present application embodiment also provides a storage medium. A person of ordinary skill in the art can understand that all or part of the steps in the method for implementing the above embodiment can be completed by instructing the processor through a program, and the program can be stored in a computer-readable storage medium, and the storage medium is a non-transitory medium, such as a random access memory, a read-only memory, a flash memory, a hard disk, a solid-state hard disk, a magnetic tape, a floppy disk, an optical disc, and any combination thereof. The above storage medium can be any available medium that can be accessed by a computer or a data storage device such as a server or a data center that includes one or more available media integrated. The available medium can be a magnetic medium (e.g., a floppy disk, a hard disk, a tape), an optical medium (e.g., a digital video disc (DVD)), or a semiconductor medium (e.g., a solid-state disk (SSD)), etc.

[0078] like Figure 5 As shown, an embodiment of the present application provides a terminal.

[0079] The terminal of this embodiment includes a processor and a memory connected to each other; the memory is used to store computer programs, and the processor is used to execute the computer programs stored in the memory, so that all or part of the steps in the method of the above embodiment can be implemented when the terminal executes.

[0080] The beneficial effects obtained by the terminal provided by the embodiment of the present invention are the same as the methods of implementing the above embodiments, and will not be described in detail here.

[0081] It should be noted that the memory may include random access memory (RAM) and may also include non-volatile memory, such as at least one disk storage. Similarly, the processor may also be a general-purpose processor, including a central processing unit (CPU), a network processor (NP), etc.; it may also be a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components.

[0082] Although the embodiments disclosed in the present invention are as above, the contents described are only embodiments adopted for facilitating the understanding of the present invention and are not intended to limit the present invention. Any technician in the technical field to which the present invention belongs can make any modifications and changes in the form and details of the implementation without departing from the spirit and scope disclosed in the present invention, but the protection scope of the present invention shall still be subject to the scope defined in the attached claims.

Claims

1. A method for assisting loading of goods in an automatic goods placement system of a machine, comprising: Read wafer information of all wafer batches and machine information of all machines from the manufacturing execution system database; Acquire a machine loading information setting table set by a user, wherein the machine loading information setting table includes at least one piece of machine loading setting information, and the machine loading setting information includes machine matching information and corresponding setting information of a machine; Matching each piece of the machine matching information with the machine information of all the machines to determine the corresponding auxiliary loading machine, and setting the matched auxiliary loading machine based on the setting information corresponding to the machine matching information to obtain the auxiliary loading execution information of the auxiliary loading machine; The auxiliary loading execution information is used as a screening condition, and based on the corresponding wafer information, auxiliary loading settings are performed on all batches of wafers on the auxiliary loading machines corresponding to the auxiliary loading execution information.

2. The method for loading goods according to claim 1, characterized in that: The wafer information includes the wafer number and wafer priority of the corresponding batch of wafers, and the machine information includes the machine name and the corresponding product name, process site name and process recipe; The machine matching information includes a set machine name and a corresponding set product name, a set process site name and a set process recipe, and the setting information includes enabling information and a wafer number that is not controlled by the card or a wafer priority that is not controlled by the card.

3. The method for loading goods according to claim 2, characterized in that: Matching the machine matching information with the machine information of the machine includes: Determine whether the set machine name and the corresponding set product name, set process site name and set process formula in the machine matching information are the same as the machine name and the corresponding product name, process site name and process formula in the machine information. If so, it means that the machine matching information matches the machine information, and the corresponding machine is the auxiliary loading machine matched by the machine matching information. Otherwise, it means that the machine matching information does not match the machine information.

4. The method for loading goods according to claim 2, characterized in that: Taking the auxiliary loading execution information as a screening condition, performing auxiliary loading setting for a single batch of wafers on the auxiliary loading machine corresponding to the auxiliary loading execution information based on the corresponding wafer information includes: If the enabling information in the auxiliary loading execution information is "yes", then determine whether the wafer code in the wafer information of the batch of wafers is the same as the wafer number that is not subject to card control in the auxiliary loading execution information. If so, set the batch of wafers to be loaded on the auxiliary loading machine corresponding to the auxiliary loading execution information. Otherwise, determine whether the wafer priority in the wafer information of the batch of wafers is the same as the wafer priority that is not subject to card control in the auxiliary loading execution information. If so, set the batch of wafers to be loaded on the auxiliary loading machine corresponding to the auxiliary loading execution information. Otherwise, set the batch of wafers not to be loaded on the auxiliary loading machine corresponding to the auxiliary loading execution information. If the enabling information in the auxiliary loading execution information is "no", the batch of wafers is set to be loaded on the auxiliary loading machine corresponding to the auxiliary loading execution information.

5. The method for loading goods according to claim 1, characterized in that: Also includes: Obtaining wafer numbers of all batches of wafers to be loaded on a target machine, where the wafers to be loaded on the target machine are wafers set on the target machine for loading; Acquire a special wafer table of the target machine set by a user, wherein the special wafer table includes wafer numbers and set scores of at least one batch of special wafers; Based on the set scores corresponding to the wafer numbers in the special wafer table, scores are set for the wafers to be loaded corresponding to the same wafer numbers of the target machine to obtain all the wafers to be loaded after the scores are set; All the wafers to be loaded are sorted from high to low according to the scores, so that the target machine loads all the wafers to be loaded in sequence according to the sorting; The target machine is any one of all the machines, and the wafers to be loaded on the target machine are wafers that are subject to card control or wafers that are not subject to card control.

6. The method for loading goods according to claim 5, characterized in that: The machine loading information setting table set by the user and the special wafer table of the target machine set by the user are both obtained through the auxiliary UI interface.

7. The method for loading goods according to claim 6, characterized in that: The auxiliary UI interface implements the setting of the machine loading information setting table or the special wafer table in the form of Table, Excel or CSV.

8. An auxiliary loading device for an automatic cargo discharging system of a machine, characterized in that: It includes an information reading module, a setting information acquisition module, a matching module and a loading setting module; The information reading module is used to read the wafer information of all batches of wafers and the machine information of all machines from the manufacturing execution system database; The setting information acquisition module is used to acquire a machine loading information setting table set by a user, wherein the machine loading information setting table includes at least one piece of machine loading setting information, and the machine loading setting information includes machine matching information and corresponding setting information of a machine; The matching module is used to match each piece of the machine matching information with the machine information of all the machines to determine the corresponding auxiliary loading machine, and to set the matched auxiliary loading machine based on the setting information corresponding to the machine matching information to obtain the auxiliary loading execution information of the auxiliary loading machine; The loading setting module is used to use the auxiliary loading execution information as a screening condition, and based on the corresponding wafer information, perform auxiliary loading settings on all batches of wafers on the auxiliary loading machine corresponding to the auxiliary loading execution information.

9. A storage medium having a computer program stored thereon, characterized in that: When the program is executed by a processor, the auxiliary loading method of the machine automatic cargo arrangement system described in any one of claims 1 to 7 is implemented.

10. A terminal, characterized in that: include: Processor and memory; The memory is used to store computer programs, and the processor is used to execute the computer programs stored in the memory, so that the terminal executes the auxiliary loading method of the machine automatic cargo arrangement system as described in any one of claims 1 to 7.

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