Mask structure net stretching device and mask structure net stretching method

Abstract

The application relates to a mask structure netting device and a mask structure netting method. The mask structure comprises a mask frame, a plurality of support pieces and a plurality of mask units. The netting device comprises: a netting machine sub-device, which is used for fixedly mounting the plurality of support pieces and the plurality of mask units on the mask frame, the mask units are located on one side of the plurality of support pieces, the plurality of support pieces comprise a plurality of first support pieces which are arranged at intervals along a first direction, and a plurality of second support pieces which are arranged at intervals along a second direction; an auxiliary sub-device, which is used for adsorbing at least two of the mask units, the first support pieces and the second support pieces, and making the at least two of the mask units, the first support pieces and the second support pieces contact each other; and a welding sub-device, which is used for welding the at least two of the mask units, the first support pieces and the second support pieces which contact each other. The application can improve the performance of the mask structure.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of display, in particular to a mask structure netting device and a mask structure netting method. BACKGROUND

[0002] With the continuous development of display technology, organic light-emitting diode (OLED) display devices have been widely used in flat panel display, flexible display, vehicle display and solid state lighting and other fields due to their wide color gamut, high contrast, energy saving, foldability and other advantages. The organic light-emitting diode display panel includes a light-emitting device, and the manufacture of the light-emitting device needs to use a precision metal mask (FMM), which includes a mask frame (Frame), a support (Support, howling and / or Cover) and a mask unit (Sheet).

[0003] However, the mask structure in the prior art has various deficiencies, and the performance of the mask structure needs to be improved. SUMMARY

[0004] Therefore, it is necessary to provide a mask structure netting device and a mask structure netting method, aiming to solve the problems of various deficiencies of the mask structure in the prior art, and to improve the performance of the mask structure.

[0005] In a first aspect, an embodiment of the present application provides a mask structure netting device, the mask structure including a mask frame, a plurality of support members and a plurality of mask units, the netting device comprising:

[0006] a netting machine sub-device for fixedly installing the plurality of support members and the plurality of mask units on the mask frame, the mask units being located on one side of the plurality of support members, the plurality of support members including a plurality of first support members arranged at intervals along a first direction, and a plurality of second support members arranged at intervals along a second direction;

[0007] an auxiliary sub-device for adsorbing at least two of the mask units, the first support members and the second support members, and contacting the at least two of the mask units, the first support members and the second support members;

[0008] a welding sub-device for welding the at least two of the mask units, the first support members and the second support members in contact.

[0009] In a second aspect, based on the same application concept, an embodiment of the present application provides a mask structure netting method, comprising:

[0010] A mask frame, a plurality of support members, and a plurality of mask units are provided.

[0011] A netting machine sub-device is provided.

[0012] An auxiliary sub-device is provided.

[0013] A welding sub-device is provided.

[0014] A plurality of support members are fixedly installed on the mask frame by the netting machine sub-device, and the plurality of support members include a plurality of first support members arranged at intervals along a first direction and a plurality of second support members arranged at intervals along a second direction.

[0015] A plurality of mask units are fixedly installed on the mask frame by the netting machine sub-device, and the mask units are located on one side of the plurality of support members.

[0016] At least two of the mask units, the first support members, and the second support members are adsorbed by the auxiliary sub-device, and at least two of the mask units, the first support members, and the second support members are in contact.

[0017] At least two of the mask units, the first support members, and the second support members in contact are welded by the welding sub-device.

[0018] In the embodiments of the present application, the auxiliary sub-device is used to adsorb at least two of the mask unit, the first support and the second support, and make the at least two of the mask unit, the first support and the second support contact, and then the welding sub-device is used to weld the at least two of the mask unit, the first support and the second support in contact, and the implementation and beneficial effects include: 1) in some embodiments, the mask unit and the second support in contact are welded to eliminate the gap between the second support and the mask unit, thereby avoiding the evaporated organic material from being evaporated to the area outside the preset area through the first gap, improving the film layer stacking accuracy of the luminescent material, improving the precision and accuracy of the evaporation process, and improving or avoiding the problem of color mixing of the display panel; 2) in some embodiments, the second support is located on the side of the first support away from the mask unit, and the mask unit and the first support in contact are welded, which can eliminate the gap between the first support and the mask unit, and also can avoid the evaporated organic material from being evaporated to the area outside the preset area through the gap, thereby improving or avoiding the problem of color mixing of the display panel; 3) in some embodiments, the first support and the second support in contact are welded, which improves the support and shielding effect of the first support and the second support on the mask unit, for example, reduces or avoids the first gap, thereby improving the precision and accuracy of the evaporation process; 4) in some embodiments, the first support and the second support in contact are welded, and part of the support is cut and removed, thereby forming evaporation areas of different sizes, so that one mask structure can be suitable for the manufacture of display panels of different sizes, one mask structure can be modified to be suitable for the evaporation of display panel products of different sizes, thereby reducing the manufacturing cost of display panels of different sizes; 5) in some embodiments, the mask unit and the first support in contact are welded, and the first support and the second support in contact are welded, which can simultaneously play the role of removing the gap and improving the supportability of the support on the mask unit. Based on at least one of the above five aspects, the embodiments of the present application can greatly improve the performance of the mask structure. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative effort.

[0020] Figure 1 A cross-sectional view of a mask structure in the prior art.

[0021] Figure 2A side view schematic diagram of an auxiliary sub-device in a mask structure netting device according to an embodiment of the present application.

[0022] Figure 3 A top view schematic diagram of an auxiliary sub-device in a mask structure netting device according to an embodiment of the present application.

[0023] Figure 4 A flow chart of a mask structure netting method according to an embodiment of the present application.

[0024] Figure 5 A top view schematic diagram of a partial structure of a first mask structure according to an embodiment of the present application.

[0025] Figure 6 A top view schematic diagram of a first mask structure according to an embodiment of the present application.

[0026] Figure 7 A first intermediate process schematic diagram of a mask structure netting method of a first mask structure according to an embodiment of the present application.

[0027] Figure 8 A second intermediate process schematic diagram of a mask structure netting method of a first mask structure according to an embodiment of the present application.

[0028] Figure 9 A cross-sectional structure schematic diagram of a mask structure after a mask structure netting method of a first mask structure according to an embodiment of the present application.

[0029] Figure 10 A first intermediate process schematic diagram of a mask structure netting method of a second mask structure according to an embodiment of the present application.

[0030] Figure 11 A second intermediate process schematic diagram of a mask structure netting method of a second mask structure according to an embodiment of the present application.

[0031] Figure 12 A top view schematic diagram of a partial structure of a mask structure after a mask structure netting method of a second mask structure according to an embodiment of the present application. DETAILED DESCRIPTION

[0032] In order to facilitate the understanding of the present application, the present application will be described more fully below with reference to the accompanying drawings. In the drawings, preferred embodiments of the present application are shown. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of the present application can be more thoroughly and completely understood.

[0033] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description herein is for describing particular embodiments only and is not intended to be limiting of the application. As used in the description herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0034] In describing a position relationship, unless otherwise defined, when an element such as a layer, film or substrate is referred to as being "on" another element, it can be directly on the other element or intervening elements can also be present. In addition, when a layer is referred to as being "under" or "beneath" another layer, it can be directly under the other layer, or one or more intervening layers can also be present. It will also be understood that when a layer is referred to as being "between" two layers, it can be the only layer between the two layers, or one or more intervening layers can also be present.

[0035] In the case of using "include", "have", and "contain" described herein, unless an explicit limiting term is used, such as "only", "consisting of", and the like, another component can be added. Unless otherwise mentioned, the singular form of the term can include the plural form, and it cannot be understood as the number of one.

[0036] It should be understood that although the terms "first", "second", etc. can be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element without departing from the scope of the present application.

[0037] It should also be understood that, in interpreting the elements, although not explicitly described, the elements are interpreted to include an error range that should be within an acceptable deviation range of a specific value determined by a person skilled in the art. For example, "about", "approximately", or "substantially" can mean within one or more standard deviations, without limitation.

[0038] Further, in the specification, the phrase "plan view schematic diagram" refers to a drawing when the target portion is viewed from above, and the phrase "cross-sectional view schematic diagram" refers to a drawing when a section is taken by vertically cutting the target portion and viewed from the side.

[0039] Further, the drawings are not drawn to a 1:1 scale, and the relative sizes of the elements are only drawn by way of example in the drawings, and are not necessarily drawn to true scale.

[0040] Various modifications and variations can be made to this application without departing from its spirit or scope, which will be apparent to those skilled in the art. Therefore, this application is intended to cover modifications and variations falling within the scope of the corresponding claims (the claimed technical solutions) and their equivalents. It should be noted that the implementation methods provided in the embodiments of this application can be combined with each other without contradiction.

[0041] As described in the background section, mask structures in the prior art have various shortcomings, and their performance needs to be improved. Figure 1 This is a cross-sectional schematic diagram of a mask structure in the prior art. The mask structure 100 includes a mask frame 10, a plurality of support members 20, and a plurality of mask units 30. The plurality of support members 20 and the plurality of mask units 30 are fixedly mounted on the mask frame 10. The mask units 30 are located on one side of the plurality of support members 20. The plurality of support members 20 includes a plurality of first support members 21 spaced apart along a first direction and a plurality of second support members 22 spaced apart along a second direction. The inventors have found that the shortcomings of the mask structure in the prior art include: 1) there is a gap between the mask unit 30 and the support member 20 ( Figure 1 1) The first gap JX1 in the evaporation process prevents the mask structure 100 from tightly adhering to the substrate to be evaporated. The evaporated organic material can pass through the first gap JX1 and be deposited outside the preset area, reducing the precision of the luminescent material film stacking and the accuracy of the evaporation process, leading to color mixing issues in the display panel. 2) The gap between the first support member 21 and the second support member 22 reduces their supporting and shielding effects on the mask unit 30, also lowering the accuracy of the evaporation process. 3) Currently, a single mask structure is only suitable for manufacturing display panels of one size and cannot be modified to be suitable for evaporation of display panel products of different sizes. Therefore, the performance of the mask structure needs improvement.

[0042] Based on the above-mentioned technical problems, the inventors discovered that by adding an auxiliary sub-device to the mesh-stretching device of the mask structure, after the mesh-stretching machine sub-device has fixedly installed at least two of the mask unit, the first support member, and the second support member onto the mask frame, the auxiliary sub-device is used to adsorb at least two of the mask unit, the first support member, and the second support member, and to make at least two of the mask unit, the first support member, and the second support member contact each other. Then, by welding the contacted mask unit, the first support member, and the second support member, at least two of the second support members are welded together by a welding sub-device, which can solve at least one of the above-mentioned technical problems.

[0043] Please see Figures 2 to 12 . Figure 2 This is a side view schematic diagram of an auxiliary sub-device in a mesh tensioning device with a mask structure provided in an embodiment of this application.Figure 3 This is a top view schematic diagram of an auxiliary sub-device in a mesh tensioning device for a mask structure provided in an embodiment of this application.

[0044] Figure 4 This is a schematic diagram of the process steps of a mesh-stretching method for a mask structure provided in an embodiment of this application.

[0045] Figure 5 This is a top view schematic diagram of a portion of the first mask structure provided in the embodiments of this application. Figure 6 This is a top view schematic diagram of the first mask structure provided in the embodiments of this application. Figure 5 A schematic diagram showing the mask unit before it is fixedly mounted on the mask frame. Figure 6 A schematic diagram showing the mask unit after it has been fixedly mounted on the mask frame.

[0046] Figure 7 This is a schematic diagram of the first intermediate process of the mesh-stretching method for the first mask structure provided in the embodiments of this application. Figure 8 This is a schematic diagram of the second intermediate process of the mesh-stretching method for the first mask structure provided in the embodiments of this application. Figure 9 This is a schematic diagram of the cross-sectional structure of the mask structure after the mesh-stretching method of the first mask structure provided in the embodiments of this application is completed. Figure 7 and Figure 8 The process of setting up the mesh using the first type of mask structure is illustrated. Figure 6 The cross section at the dashed line C2-C2 in the diagram. Figure 9 The diagram illustrates the mesh-stretching method for the first type of mask structure after completion. Figure 6 The cross section at the dashed line C2-C2 in the diagram.

[0047] Figure 10 This is a schematic diagram of the first intermediate process of the mesh-stretching method for the second mask structure provided in the embodiments of this application. Figure 11 This is a schematic diagram of the second intermediate process of the mesh-stretching method for the second mask structure provided in the embodiments of this application. Figure 12 This is a top view of a portion of the mask structure after the mesh-stretching method for the second mask structure provided in this embodiment of the application has been completed. Figure 12 The middle mask structure is in Figure 5 It is obtained through further processing based on the medium mask structure. Figure 10 and Figure 11 The process of setting up the mesh using the second type of mask structure is illustrated. Figure 5 The cross section at the dashed line C1-C1 in the diagram. Figure 12 The mask unit in the mask structure is not shown in the figure.

[0048] The application provides a mask structure stretching device. The mask structure stretching device comprises a stretching machine sub-device, an auxiliary sub-device 200, and a welding sub-device. The mask structure 100 comprises a mask frame 10, a plurality of support members 20, and a plurality of mask units 30. The stretching machine sub-device is used to fixedly mount the plurality of support members 20 and the plurality of mask units 30 on the mask frame 10. The mask units 30 are located on one side of the plurality of support members 20. The plurality of support members 20 comprise a plurality of first support members 21 arranged at intervals along a first direction X and a plurality of second support members 22 arranged at intervals along a second direction Y. The auxiliary sub-device 200 is used to adsorb at least two of the mask units 30, the first support members 21, and the second support members 22 and make the at least two of the mask units 30, the first support members 21, and the second support members 22 contact each other. The welding sub-device is used to weld the at least two of the mask units 30, the first support members 21, and the second support members 22 in contact with each other.

[0049] For example, the stretching machine sub-device can be any stretching machine sub-device or stretching machine in the prior art, and thus the drawings are not shown. The stretching machine sub-device can fixedly mount the plurality of support members 20 on the mask frame 10. The stretching machine sub-device can fixedly mount the plurality of mask units 30 on the mask frame 10 after stretching.

[0050] For example, the stretching machine sub-device can comprise a base, a workpiece table, a measurement and welding integrated system, a motion system, and a mask pre-alignment system. The base is used to support the mask frame 10. The workpiece table is used to place the mask frame 10. The measurement and welding system is used to measure the position and attitude of the mask units 30 and weld the mask units 30 on the mask frame 10. The motion system is used to mount and move the measurement and welding system. The mask pre-alignment system is used to compensate for the offset of the mask units 30 in a preset direction before the mask units 30 enter the stretching process. The structure of the stretching machine sub-device is limited to this.

[0051] For example, the welding sub-device can be any welding sub-device or welding equipment for precise metal mask plates in the prior art, and thus the drawings are not shown. For example, the welding sub-device can be a laser welding machine or an ultrasonic welding device.

[0052] For example, the mask structure provided by the embodiments of the application can be used to manufacture a mask structure 100, which can be a precise metal mask plate (FMM).

[0053] For example, as shown in Figure 5 and Figure 6 The plurality of first support members 21 and the plurality of second support members 22 define a plurality of evaporation areas 20a. One evaporation area 20a corresponds to one display panel, but is not limited thereto.

[0054] For example, as shown in Figure 5As shown, the mask unit 30 includes one integral grid area 30a or multiple spaced grid areas 30a, and the grid area 30a includes multiple grid openings. One grid opening can correspond to one sub-pixel of the display panel, but is not limited thereto.

[0055] For example, in the evaporation process, the evaporated material passes through the evaporation area 20a and the grid openings to reach the preset area on the substrate to be evaporated.

[0056] For example, the first direction X and the second direction Y can be perpendicular to each other, but are not limited thereto.

[0057] In the embodiments of the present application, the auxiliary sub-device 200 is used to adsorb at least two of the mask unit 30, the first support 21 and the second support 22, and make at least two of the mask unit 30, the first support 21 and the second support 22 contact, and then the welding sub-device is used to weld at least two of the mask unit 30, the first support 21 and the second support 22 which are in contact, and the implementation and advantages include: 1) as shown, Figures 7 to 9 As shown, the mask unit 30 and the second support 22 which are in contact are welded to eliminate the gap between the second support 22 and the mask unit 30, thereby avoiding the evaporated organic material from evaporating to the area outside the preset area through the first gap JX1, improving the film layer stacking accuracy of the luminescent material, improving the precision and accuracy of the evaporation process, and improving or avoiding the problem of color mixing of the display panel; 2) in some embodiments, the second support 22 is located on the side of the first support 21 away from the mask unit 30 (different from Figures 7 to 9 As shown, the mask unit 30 and the second support 22 which are in contact are welded to eliminate the gap between the second support 22 and the mask unit 30, thereby avoiding the evaporated organic material from evaporating to the area outside the preset area through the first gap JX1, improving the film layer stacking accuracy of the luminescent material, improving the precision and accuracy of the evaporation process, and improving or avoiding the problem of color mixing of the display panel; 2) in some embodiments, the second support 22 is located on the side of the first support 21 away from the mask unit 30 (different from Figures 10 to 12 As shown, the mask unit 30 and the second support 22 which are in contact are welded to eliminate the gap between the second support 22 and the mask unit 30, thereby avoiding the evaporated organic material from evaporating to the area outside the preset area through the first gap JX1, improving the film layer stacking accuracy of the luminescent material, improving the precision and accuracy of the evaporation process, and improving or avoiding the problem of color mixing of the display panel; 2) in some embodiments, the second support 22 is located on the side of the first support 21 away from the mask unit 30 (different from Figure 12As shown), this allows a mask structure to be applied to the manufacture of display panels of different sizes, and a single mask structure can be modified to be used for vapor deposition of display panel products of different sizes, thereby reducing the manufacturing cost of display panels of different sizes; 5) In some embodiments, welding the mask unit 30 and the first support member 21 that are in contact with each other, and welding the first support member 21 and the second support member 22 that are in contact with each other, can simultaneously remove gaps and improve the support of the support member 20 for the mask unit 30. Based on at least one of the above five aspects, the embodiments of this application can greatly improve the performance of the mask structure.

[0058] In some embodiments, the auxiliary sub-device 200 includes a contact member 51, a magnetic chuck 53, and a magnetic generator 54. The contact member 51 is used to contact the support member 20 or the mask unit 30; the magnetic chuck 53 is disposed on one side of the contact member 51 and is used to magnetically attract at least two of the mask unit 30, the first support member 21, and the second support member 22; the magnetic generator 54 is disposed on the side of the magnetic chuck 53 away from the contact member 51 and is used to control the magnitude of the magnetic force in the magnetic chuck 53.

[0059] For example, such as Figure 7 and Figure 8 As shown, the contact member 51 is used to contact the support member 20 or the mask unit 30. In the mesh stretching process of the mask structure, the magnetic suction plate 53 and the magnetic generator 54 are located on the side of the contact member 51 away from the support member 20 or the mask unit 30, but are not limited thereto.

[0060] For example, the material of the contact component 51 includes non-metallic materials, including but not limited to glass, quartz, etc.

[0061] For example, the magnetic chuck 53 may include an electromagnet, and the magnetic strength and / or magnetic polarity of the magnetic chuck 53 can be adjusted by controlling the magnitude and direction of the energizing current.

[0062] For example, the magnetic generator 54 may include a magnetic control unit. The magnetic generator 54 is electrically connected to the magnetic chuck 53 to control the magnitude and / or direction of the current flowing through the magnetic chuck 53, thereby controlling the magnetic strength and / or polarity of the magnetic chuck 53. The magnetic generator 54 may be disposed adjacent to or in contact with the magnetic chuck 53, or it may not be disposed adjacent to or in contact with the magnetic chuck 53. The placement of the magnetic generator 54 is not limited here.

[0063] In some embodiments, the auxiliary sub-device 200 further comprises a moving component 57, a lifting component 55, and a distance sensor 52. The moving component 57 is arranged on one side of the contact component 51, and is used to control the movement of the auxiliary sub-device 200 in a direction parallel to the plane on which the mask unit 30 is located; the lifting component 55 is arranged on one side of the contact component 51, and is used to control the movement of the auxiliary sub-device 200 in a direction perpendicular to the plane on which the mask unit 30 is located; and the distance sensor 52 is arranged on one side of the contact component 51, and is used to detect and determine the relative positional relationship between the auxiliary sub-device 200 and at least two of the mask unit 30, the first support 21, and the second support 22.

[0064] For example, the distance sensor 52 is used to detect and determine the relative positional relationship between the auxiliary sub-device 200 and at least two of the mask unit 30, the first support 21, and the second support 22. For example, the distance sensor 52 can detect and determine the positional relationship between the auxiliary sub-device 200 and the first support 21; for example, the distance sensor 52 can detect and determine whether the auxiliary sub-device 200 is in contact with the first support 21. The distance sensor 52 can be a light detector, and the specific type of the detector is not limited as long as it can achieve distance detection.

[0065] For example, as shown in Figure 2 and Figure 3 , a plurality of distance sensors 52 can be arranged on the auxiliary sub-device 200, and the plurality of distance sensors 52 can be arranged on the plurality of sides or at the plurality of corner positions of the auxiliary sub-device 200, so that the detection and collection of the relative positional relationship between the auxiliary sub-device 200 and at least two of the mask unit 30, the first support 21, and the second support 22 are more comprehensive and accurate.

[0066] For example, the moving component 57 is used to control the movement of the auxiliary sub-device 200 in a direction parallel to the plane on which the mask unit 30 is located. The moving component 57 can comprise a guide rail, a driving motor, a sliding block, and / or a roller, and the guide rail can be a groove or a ridge. The structure of the moving component 57 is not limited as long as it can achieve the movement of the auxiliary sub-device 200 in a direction parallel to the plane on which the mask unit 30 is located.

[0067] For example, the lifting component 55 is used to control the movement of the auxiliary sub-device 200 in a direction perpendicular to the plane on which the mask unit 30 is located. The lifting component 55 can comprise a guide rail, a lifting cylinder, a base, a lifting arm arranged on the base, and / or a driving motor. The structure of the lifting component 55 is not limited as long as it can achieve the movement of the auxiliary sub-device 200 in a direction perpendicular to the plane on which the mask unit 30 is located.

[0068] For example, in some embodiments, the moving component 57 and the lifting component 55 are independent structural components. In other embodiments, the moving component 57 and the lifting component 55 are the same structural component, for example, a moving and lifting component that has the functions of both the moving component 57 and the lifting component 55.

[0069] For example, after the netting process is completed, the auxiliary sub-device 200 can also be removed by the moving component 57 and the lifting component 55.

[0070] For example, in some embodiments, the auxiliary sub-device 200 further comprises a connecting component 56 that is connected to a control component by wired or wireless means to achieve the control of the auxiliary sub-device 200 in a preset manner (for example, to control the movement or motion of the auxiliary sub-device 200), and the control component can include the operation component in the subsequent embodiments. For example, in some embodiments, the connecting component 56 is connected to the netting machine sub-device by wired or wireless means to disperse the entire netting process and regenerate a new netting method.

[0071] For example, Figure 2 And Figure 3 The auxiliary sub-device 200 is shown to have some or all of the components arranged as follows: the magnetic attraction plate 53 is arranged on one side of the contact component 51, the magnetic force generator 54 is arranged on the side of the magnetic attraction plate 53 away from the contact component 51, the lifting component 55 is arranged on the side of the magnetic force generator 54 away from the contact component 51, the connecting component 56 is arranged on the side of the lifting component 55 away from the contact component 51, the moving component 57 is arranged on the side of the connecting component 56 away from the contact component 51, and the distance sensor 52 is arranged around the contact component 51. However, the structure of the auxiliary sub-device 200 is not limited to Figure 2 And Figure 3 For example, the connecting component 56 is arranged outside the structure shown in Figure 2 And Figure 3 For example, the moving component 57 and the lifting component 55 are adjacent or connected structures, for example, the moving component 57 and the lifting component 55 are the same structural component.

[0072] In some embodiments, the auxiliary sub-device 200 further comprises an operation component for determining the coordinates of the welding position of at least two of the mask unit 30, the first support 21, and the second support 22 according to the size and the preset relative position relationship of the at least two of the mask unit 30, the first support 21, and the second support 22.

[0073] For example, the operation component can be a computer and / or computer software, etc., and thus is not shown in the figure, as long as it can determine the coordinates of the welding positions of at least two of the mask unit 30, the first support 21, and the second support 22 according to the sizes and the preset relative position relationship of the at least two of the mask unit 30, the first support 21, and the second support 22. For example, after the mask unit 30, the first support 21, and the second support 22 are fixedly installed on the mask frame 10, the coordinates of the welding positions of the second support 22 and the mask unit 30 are determined according to the relative position relationship of the second support 22 and the mask unit 30, so as to eliminate the first gap JX1.

[0074] Based on the same application concept, the application further provides a mask structure stretching method, which can be applied to any one of the mask structures 100 described above, and can use the mask structure stretching device or the auxiliary sub-device 200 of any one of the embodiments described above. The mask structure stretching method comprises Figures 7 to 9 the first example mask structure stretching method and Figures 10 to 12 the second example mask structure stretching method. As Figure 4 shown, the mask structure stretching method comprises steps S100, S200, S300, S400, S500, S600, S700, and S800.

[0075] In step S100, a mask frame, a plurality of supports, and a plurality of mask units are provided.

[0076] For example, the mask frame 10, the plurality of supports 20, and the plurality of mask units 30 are provided.

[0077] In step S200, a stretching machine sub-device is provided.

[0078] In step S300, an auxiliary sub-device is provided.

[0079] For example, an auxiliary sub-device is provided, which can be any one of the auxiliary sub-devices 200 described above.

[0080] In step S400, a welding sub-device is provided.

[0081] For example, a welding sub-device is provided.

[0082] In step S500, the plurality of supports are fixedly installed on the mask frame by the stretching machine sub-device, and the plurality of supports comprise a plurality of first supports arranged at intervals along a first direction and a plurality of second supports arranged at intervals along a second direction.

[0083] For example, a plurality of support members 20 are fixedly installed on the mask frame 10 by the screen stretching machine sub-device, and the plurality of support members 20 include a plurality of first support members 21 arranged at intervals along the first direction X and a plurality of second support members 22 arranged at intervals along the second direction Y.

[0084] At step S600, a plurality of mask units are fixedly installed on the mask frame by the screen stretching machine sub-device, and the mask units are located on one side of the plurality of support members.

[0085] For example, a plurality of mask units 30 are fixedly installed on the mask frame 10 by the screen stretching machine sub-device, and the mask units 30 are located on one side of the plurality of support members 20.

[0086] At step S700, at least two of the mask units, the first support members, and the second support members are adsorbed by the auxiliary sub-device, and the at least two of the mask units, the first support members, and the second support members are contactingly arranged.

[0087] For example, at least two of the mask units 30, the first support members 21, and the second support members 22 are adsorbed by the auxiliary sub-device 200, and the at least two of the mask units 30, the first support members 21, and the second support members 22 are contactingly arranged.

[0088] At step S800, at least two of the mask units, the first support members, and the second support members that are contactingly arranged are welded by the welding sub-device.

[0089] For example, at least two of the mask units 30, the first support members 21, and the second support members 22 that are contactingly arranged are welded by the welding sub-device.

[0090] In some embodiments, before at least two of the mask units 30, the first support members 21, and the second support members 22 are adsorbed by the auxiliary sub-device 200 (step S700), as shown in Figure 7 and Figure 8 or as shown in Figure 10 and Figure 11 the method further includes steps S671, S672, and S673.

[0091] At step S671, the coordinates of the welding positions of the at least two of the mask units 30, the first support members 21, and the second support members 22 are determined by an operation component in the auxiliary sub-device 200 according to the sizes and the preset relative positional relationship of the at least two of the mask units 30, the first support members 21, and the second support members 22.

[0092] At step S672, as shown in Figure 7 or as shown in Figure 10As shown, the auxiliary sub-device 200 is controlled to move in a direction parallel to the plane of the mask unit 30 by the moving part 57 in the auxiliary sub-device 200, so that the auxiliary sub-device 200 moves to the side of the welding position.

[0093] Step S673, as follows Figure 7 , or as Figure 10 and Figure 11 As shown, the auxiliary sub-device 200 is controlled to move in a direction perpendicular to the plane of the mask unit 30 by the lifting component 55 in the auxiliary sub-device 200, so that the contact component 51 in the auxiliary sub-device 200 reaches the preset position corresponding to the welding position.

[0094] In some embodiments, before controlling the movement of the auxiliary sub-device 200 by the moving member 57 and the lifting member 55 (steps S672 and S673), the magnetic force in the magnetic suction plate 53 in the auxiliary sub-device 200 is turned off by the magnetic force generator 54 in the auxiliary sub-device 200.

[0095] In some embodiments, the auxiliary sub-device 200 adsorbs at least two of the mask unit 30, the first support member 21, and the second support member 22 (step S700), including: the magnetic force in the magnetic suction plate 53 opened by the magnetic force generator 54 adsorbs at least two of the mask unit 30, the first support member 21, and the second support member 22, and makes at least two of the mask unit 30, the first support member 21, and the second support member 22 contact each other.

[0096] For example, before step S700, the magnetic force in the magnetic suction plate 53 in the auxiliary sub-device 200 is turned off by the magnetic force generator 54 in the auxiliary sub-device 200. Then, the auxiliary sub-device 200 is moved by the moving component 57 and the lifting component 55 so that the auxiliary sub-device 200 reaches the preset position. This avoids the magnetic force generated by the magnetic suction plate 53 from affecting the position of the mask unit 30, the first support member 21 and the second support member 22. For example, it avoids the magnetic force generated by the magnetic suction plate 53 from causing unwanted deformation of the mask unit 30, the first support member 21 and the second support member 22.

[0097] For example, in step S700, the magnetic force in the magnetic suction plate 53 opened by the magnetic force generator 54 attracts at least two of the mask unit 30, the first support member 21 and the second support member 22, and makes the mask unit 30, the first support member 21 and the second support member 22 contact each other, in preparation for subsequent process steps.

[0098] In some embodiments, in the mesh-stretching method of the first mask structure, such as Figure 7 and Figure 8As shown, the step of adsorbing at least two of the mask unit 30, the first support 21 and the second support 22 by the auxiliary sub-device 200 (step S700) comprises: adsorbing the second support 22 and the mask unit 30, and arranging the second support 22 and the mask unit 30 in a stacked and contacting manner, the second support 22 being located on the side of the first support 21 close to the mask unit 30. As shown in Figure 9 As shown, the step of welding at least two of the mask unit 30, the first support 21 and the second support 22 arranged in contact by the welding sub-device (step S800) comprises: welding the second support 22 and the mask unit 30 arranged in a stacked and contacting manner.

[0099] For example, in the first mask structure stretching method, as shown in Figures 7 to 9 As shown, Figure 9 As shown, the step of welding at least two of the mask unit 30, the first support 21 and the second support 22 arranged in contact by the welding sub-device (step S800) comprises: welding the second support 22 and the mask unit 30 arranged in a stacked and contacting manner. Figure 9 In the embodiment shown in In the embodiment shown in

[0100] It should be noted that, in the first mask structure stretching method, in some other embodiments, the second support 22 is located on the side of the first support 21 away from the mask unit 30 (different from Figures 7 to 9 In this case, the step of welding at least two of the mask unit 30 and the first support 21 arranged in contact can eliminate the gap between the first support 21 and the mask unit 30, and can also avoid the evaporated organic material from evaporating to the area outside the preset area through the gap, thereby improving or avoiding the problem of color mixing of the display panel.

[0101] In some embodiments, in the second mask structure stretching method, as shown in Figure 10 and Figure 11 As shown, the step of adsorbing at least two of the mask unit 30, the first support 21 and the second support 22 by the auxiliary sub-device 200 (step S700) comprises: adsorbing the first support 21 and the second support 22, and arranging the first support 21 and the second support 22 in a stacked and contacting manner. The step of welding at least two of the mask unit 30, the first support 21 and the second support 22 arranged in contact by the welding sub-device (step S800) comprises: welding the first support 21 and the second support 22 arranged in a stacked and contacting manner.

[0102] For example, in some embodiments, in the second mask structure stretching method, the first support 21 and the second support 22 in the contact arrangement are welded, which improves the support and shielding effect of the first support 21 and the second support 22 on the mask unit 30, for example, reduces or avoids the first gap JX1, thereby improving the precision and accuracy of the evaporation process.

[0103] For example, in some other embodiments, in the second mask structure stretching method, as shown in FIG. 6, after the first support 21 and the second support 22 in the contact arrangement are welded, the method further includes: cutting and removing part of at least one of the first support 21 and the second support 22. Figures 10 to 12 For example, in some other embodiments, in the second mask structure stretching method, as shown in FIG. 6, after the first support 21 and the second support 22 in the contact arrangement are welded, the method further includes: cutting and removing part of at least one of the first support 21 and the second support 22. Figure 11 For example, in some other embodiments, in the second mask structure stretching method, as shown in FIG. 6, after the first support 21 and the second support 22 in the contact arrangement are welded, the method further includes: cutting and removing part of at least one of the first support 21 and the second support 22. Figure 12 For example, in some other embodiments, in the second mask structure stretching method, as shown in FIG. 6, after the first support 21 and the second support 22 in the contact arrangement are welded, the method further includes: cutting and removing part of at least one of the first support 21 and the second support 22.

[0104] For example, in some embodiments, the first support 21 and the second support 22 are fixedly installed on one side of the mask frame 10, the mask unit 30 is fixedly installed on the side of the first support 21 and the second support 22 away from the mask frame 10, and the auxiliary sub-device 200 adsorbs at least two of the mask unit 30, the first support 21 and the second support 22 on the side of the support 20 away from the mask unit 30, so as to realize the mask structure stretching method of any one of the above embodiments.

[0105] For example, in some embodiments, the first support 21 and the second support 22 are fixedly installed on one side of the mask frame 10, the mask unit 30 is fixedly installed on the side of the first support 21 and the second support 22 away from the mask frame 10, and the auxiliary sub-device 200 adsorbs at least two of the mask unit 30, the first support 21 and the second support 22 on the side of the support 20 away from the mask unit 30, so as to realize the mask structure stretching method of any one of the above embodiments.

[0106] Based on the same application concept, the application further provides a display panel, which can be manufactured by using the mask structure stretching device of any one of the above embodiments.

[0107] Any combination of the technical features in the above-described embodiments can be made, and for the sake of brevity, not all possible combinations are described, however, as long as there is no conflict, any combination of the technical features should be considered within the scope of the present disclosure.

[0108] The above-described embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the patent scope of the present application. It should be pointed out that, for ordinary skilled persons in the art, several modifications and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. A web stretching device for a mask structure, characterized by The mask structure comprises a mask frame, a plurality of support members and a plurality of mask units, and the tensioning device comprises: a tensioning machine sub-device for fixedly mounting the plurality of support members and the plurality of mask units on the mask frame, the mask units being located on one side of the plurality of support members, the plurality of support members comprising a plurality of first support members arranged at intervals along a first direction and a plurality of second support members arranged at intervals along a second direction; an auxiliary sub-device for adsorbing at least two of the mask units, the first support members and the second support members and bringing the at least two of the mask units, the first support members and the second support members into contact; a welding sub-device for welding the at least two of the mask units, the first support members and the second support members brought into contact; wherein the auxiliary sub-device comprises a contact member, a magnetic adsorption plate and a magnetic force generator, the contact member being used to contact the support members or the mask units, the magnetic adsorption plate being arranged on one side of the contact member and used to magnetically adsorb the at least two of the mask units, the first support members and the second support members, and the magnetic force generator being arranged on one side of the magnetic adsorption plate away from the contact member and used to control the magnetic force in the magnetic adsorption plate.

2. The masking structure stretching device according to claim 1, wherein, The auxiliary sub-device further comprises: a moving member arranged on one side of the contact member, the moving member being used to control the auxiliary sub-device to move in a direction parallel to the plane in which the mask units are located; a lifting member arranged on one side of the contact member, the lifting member being used to control the auxiliary sub-device to move in a direction perpendicular to the plane in which the mask units are located; a distance sensor arranged on one side of the contact member, the distance sensor being used to detect and judge the relative positional relationship between the auxiliary sub-device and the at least two of the mask units, the first support members and the second support members.

3. The masking structure stretching device of claim 1, wherein, The auxiliary sub-device further comprises: a calculation member for determining the coordinates of the welding position of the at least two of the mask units, the first support members and the second support members according to the sizes of the at least two of the mask units, the first support members and the second support members and a preset relative positional relationship.

4. A method of stretching a mask structure, characterized by, The tensioning device using the mask structure according to any one of claims 1 to 3, and a mask structure tensioning method comprising: providing a mask frame, a plurality of support members and a plurality of mask units; providing a tensioning machine sub-device; providing an auxiliary sub-device; providing a welding sub-device; fixedly mounting the plurality of support members on the mask frame by the tensioning machine sub-device, the plurality of support members comprising a plurality of first support members arranged at intervals along a first direction and a plurality of second support members arranged at intervals along a second direction; fixedly mounting the plurality of mask units on the mask frame by the tensioning machine sub-device, the mask units being located on one side of the plurality of support members; Sucking and contacting at least two of the mask unit, the first support and the second support by the auxiliary sub-device; Welding the at least two of the mask unit, the first support and the second support contacted by the welding sub-device.

5. The method of claim 4, wherein, Before the sucking and contacting at least two of the mask unit, the first support and the second support by the auxiliary sub-device, further comprising: Determining the coordinates of the welding position of the at least two of the mask unit, the first support and the second support by the operation component in the auxiliary sub-device according to the size and the preset relative position relationship of the at least two of the mask unit, the first support and the second support; Controlling the auxiliary sub-device to move in the direction parallel to the plane where the mask unit is located by the moving component in the auxiliary sub-device, so that the contacting component in the auxiliary sub-device moves to one side of the welding position; Controlling the auxiliary sub-device to move in the direction vertical to the plane where the mask unit is located by the lifting component in the auxiliary sub-device, so that the contacting component in the auxiliary sub-device reaches the preset position corresponding to the welding position.

6. The method of claim 5, wherein, Before controlling the auxiliary sub-device to move by the moving component and the lifting component, comprising: turning off the magnetic force in the magnetic suction plate in the auxiliary sub-device by the magnetic force generator in the auxiliary sub-device; The sucking and contacting at least two of the mask unit, the first support and the second support by the auxiliary sub-device, comprising: turning on the magnetic force in the magnetic suction plate by the magnetic force generator, and the magnetic suction plate sucks and contacts at least two of the mask unit, the first support and the second support.

7. The method of claim 4, wherein, The sucking and contacting at least two of the mask unit, the first support and the second support by the auxiliary sub-device, comprising: sucking and contacting the second support and the mask unit, and stacking and contacting the second support and the mask unit, and the second support is located on the side of the first support close to the mask unit; The welding the at least two of the mask unit, the first support and the second support contacted by the welding sub-device, comprising: welding the stacked and contacted second support and the mask unit.

8. The method of claim 4, wherein, The sucking and contacting at least two of the mask unit, the first support and the second support by the auxiliary sub-device, comprising: sucking and contacting the first support and the second support, and stacking and contacting the first support and the second support; The welding the at least two of the mask unit, the first support and the second support contacted by the welding sub-device, comprising: welding the stacked and contacted first support and the second support.

9. The method of claim 4, wherein, The at least two of the mask unit, the first support and the second support are adsorbed by the auxiliary sub-device, including: The auxiliary sub-device adsorbs at least two of the mask unit, the first support and the second support on a side of the support away from the mask unit.

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