Layout processing method, device and medium

Abstract

The embodiment of the invention provides a layout processing method, layout processing equipment and a medium. The method comprises the following steps: firstly, determining a plurality of initial graph segments in a target layout; and on the basis of the change degree of the simulation light intensity at each initial graphic segment and the position relationship between the initial graphic segments, the plurality of initial graphic segments with relatively small behavior differences are combined into a target graphic segment, so that fragmentation of the target layout is realized. Therefore, the fragmentation efficiency and accuracy of the layout image are improved. Furthermore, as the behavior of the target graphic segment is consistent with the behavior of the plurality of initial graphic segments forming the target graphic segment, the accuracy of the corrected layout image can be ensured by correcting the target layout by using the target graphic segment.

Description

Technical Field

[0001] Embodiments of the present disclosure generally relate to the field of integrated circuits, and more particularly, to methods, devices, and media for layout processing. Background Art

[0002] The circuit layout (also referred to as the layout) is a series of graphics converted from the designed and simulated optimized circuit, which contains physical information data related to the device, such as the size of the integrated circuit, the topology definition of each layer, etc. The integrated circuit manufacturer manufactures the mask based on this data. The layout pattern on the mask determines the size of the device or the physical layer of the connection on the chip.

[0003] As the technology nodes of integrated circuit manufacturing processes decrease, the distance between target patterns in integrated circuits decreases, and the density of layout patterns corresponding to the target patterns on the mask increases. Since light waves diffract at the layout pattern of the mask, the actual pattern formed is distorted compared to the layout pattern. For this reason, optical proximity correction (OPC) has been proposed to adjust the layout pattern of the mask so as to form the desired target pattern. OPC changes the light intensity distribution on the wafer surface during the photolithography process by changing the pattern in the mask layout, thereby compensating for the pattern transfer distortion caused by the optical proximity effect. In the process of correcting the layout pattern of the mask using OPC technology, the layout pattern needs to be fragmented. Summary of the invention

[0004] In a first aspect of the present disclosure, a method for layout processing is provided. The method includes: determining a signal change metric corresponding to each of a plurality of initial graphic segments corresponding to a target layout to be corrected, the signal change metric indicating the degree of change of the simulated light intensity of the initial graphic segment; determining at least one target graphic segment based on the positional relationship between the plurality of initial graphic segments and the signal change metric determined for the plurality of initial graphic segments, wherein the target graphic segment in the at least one target graphic segment is obtained by merging at least two of the plurality of initial graphic segments; and determining a correction result for the target layout based on the at least one target graphic segment.

[0005] In a second aspect of the present disclosure, an electronic device is provided. The electronic device includes a processor and a memory coupled to the processor. The memory has instructions stored therein, and when the instructions are executed by the processor, the electronic device executes the method according to the first aspect of the present disclosure.

[0006] In a third aspect of the present disclosure, a computer-readable storage medium is provided. The computer-readable storage medium stores a computer program. When the computer program is executed by a processor, the method according to the first aspect of the present disclosure is implemented.

[0007] It will be understood from the following description that according to the embodiments of the present disclosure, based on the degree of change of the simulated light intensity and the positional relationship of the initial graphic segments, multiple initial graphic segments with small behavior differences are merged into target graphic segments, thereby achieving the fragmentation of the target layout. Thus, the efficiency and accuracy of the layout image fragmentation are improved. Furthermore, since the behavior of the target graphic segment is consistent with the behavior of the multiple initial graphic segments constituting the target graphic segment, the target layout can be corrected using the target graphic segment to ensure the accuracy of the corrected layout image.

[0008] It should be understood that the contents described in the summary of the present invention are not intended to limit the key features or important features of the embodiments of the present disclosure, nor are they intended to limit the scope of the present disclosure. Other features of the present disclosure will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] The above and other features, advantages and aspects of the embodiments of the present disclosure will become more apparent with reference to the following detailed description in conjunction with the accompanying drawings. In the accompanying drawings, the same or similar reference numerals represent the same or similar elements, wherein: Figure 1 A schematic diagram showing an example environment in which various embodiments of the present disclosure can be implemented; Figure 2 A schematic diagram showing an initial graphics segment according to some embodiments of the present disclosure; Figure 3 A schematic diagram showing a change trend diagram provided by some embodiments of the present disclosure; Figure 4 A schematic diagram showing a target graphics segment according to some embodiments of the present disclosure is shown; Figure 5 A schematic diagram showing a target point according to some embodiments of the present disclosure; Figure 6 A flowchart showing an example layout processing process according to some embodiments of the present disclosure; and Figure 7 A block diagram of an electronic device is shown in which one or more embodiments of the present disclosure may be implemented. DETAILED DESCRIPTION

[0010] Embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although certain embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be construed as being limited to the embodiments described herein, which are instead provided for a more thorough and complete understanding of the present disclosure. It should be understood that the drawings and embodiments of the present disclosure are only for exemplary purposes and are not intended to limit the scope of protection of the present disclosure.

[0011] In the description of the embodiments of the present disclosure, the term "including" and similar terms should be understood as open inclusion, that is, "including but not limited to". The term "based on" should be understood as "based at least in part on". The term "one embodiment" or "the embodiment" should be understood as "at least one embodiment". The terms "first", "second", etc. may refer to different or the same objects. Other explicit and implicit definitions may also be included below.

[0012] As used herein, a "correction amount" or similar expressions of a graphic segment may indicate at least the magnitude of the movement of the graphic segment in the layout, and may additionally refer to the direction of the movement. That is, the "correction amount" may be a scalar, a scalar with directional information, or a vector.

[0013] Figure 1 A schematic diagram of an example environment 100 is shown in which embodiments of the present disclosure can be implemented. The example environment 100 may generally include an electronic device 120.

[0014] The electronic device 120 obtains the target layout 110 (also called "mask layout") to be processed as input. The target layout 110 to be processed includes one or more graphics to be processed (for example, target graphics 112). It is expected that after photolithography, a graphic corresponding to the target graphics 122 can be obtained on the wafer. In order to prevent the image on the wafer from being distorted due to the diffraction of light waves, it is necessary to determine the placement or size of each graphic in the target layout 110 to be processed through simulation signals. It should be understood that Figure 1 The layout, mask, shape, size and number of target pattern segments shown in the figure are merely exemplary and not restrictive. The scope of the present disclosure is not limited in this respect.

[0015] The electronic device 120 processes the target layout 110 to be processed to obtain a processed target layout 130. The processed target layout 130 includes a processed target graphic 122 (also referred to as a processed target graphic), that is, the target graphic 122 is corrected. Compared with the target graphic 112 in the target layout 110 to be processed, the size and / or position of the processed target graphic 132 in the processed target layout 130 has changed. For example, in the processed target layout 130, the processed target graphic 132 is an output graphic after OPC, which can also be referred to as a "graphic after OPC". The above-mentioned size and / or position changes of the processed target graphic 132 compared to the target graphic 112 before processing can be determined by the electronic device 120. In other words, the adjustment method in the OPC process can be determined by the electronic device 120.

[0016] In order to modify the target pattern 112, the target pattern 112 may be divided into different pattern segments. The target pattern 112 may be modified by adjusting the pattern segments to obtain a processed target pattern 132. Specifically, each pattern segment may be provided with a sampling point. The adjustment of the corresponding pattern segment may be determined by a lithography simulation related to the sampling point.

[0017] In the example environment 100, the electronic device 120 can be any type of device with computing capabilities, including a terminal device or a server device. The terminal device can be any type of mobile terminal, fixed terminal or portable terminal, including a mobile phone, a desktop computer, a laptop computer, a notebook computer, a netbook computer, a tablet computer, a media computer, a multimedia tablet, a personal communication system (PCS) device, a personal navigation device, a personal digital assistant (PDA), an audio / video player, a digital camera / camcorder, a positioning device, a television receiver, a radio broadcast receiver, an e-book device, a gaming device, or any combination of the foregoing, including accessories and peripherals of these devices or any combination thereof. The server device can include, for example, a computing system / server, such as a mainframe, an edge computing node, a computing device in a cloud environment, and the like.

[0018] It should be understood that the structure and functionality of environment 100 are described for exemplary purposes only and do not imply any limitation on the scope of the present disclosure. Figure 1 The target layout 110 to be processed, the processed target layout 130 and the graphics therein shown in the figure are only exemplary and are not intended to limit the scope of the present disclosure.

[0019] As briefly mentioned above, in the process of correcting the layout pattern of the mask using the OPC technology, it is necessary to divide the layout pattern into multiple segments and adjust the layout pattern based on the multiple segments. Therefore, the way the layout pattern is fragmented has a great influence on the adjustment process of the layout pattern.

[0020] Usually, the rules for fragmenting layout patterns are determined based on the experience of designers (for example, the layout pattern can be fragmented based on a fixed length), and the rules are continuously optimized in the process of correcting the mask pattern based on the rules. However, the fragmentation rules corresponding to different layout patterns are different. In the process of determining the design rules corresponding to each layout pattern, the above rule optimization process needs to be repeated many times. This makes it impossible for designers to efficiently determine the optimization rules for different layout patterns, resulting in the inability to fragment the layout pattern in a reasonable way, affecting the layout correction effect. Therefore, how to fragment the layout pattern is a problem that technicians in this field urgently need to solve.

[0021] To this end, an embodiment of the present disclosure provides a method for layout processing to solve or at least partially solve the above-mentioned problems and / or other potential problems in traditional methods. According to an embodiment of the present disclosure, for a target layout to be corrected, a signal change metric corresponding to a plurality of initial graphic segments in the target layout is first determined. The signal change metric indicates the degree of change in the simulated light intensity of the corresponding initial graphic segment. Subsequently, based on the positional relationship between the initial graphic segments and the corresponding signal change metric, the plurality of initial graphic segments are merged into at least one target graphic segment. Based on the at least one target graphic segment, a correction result for the target layout is determined.

[0022] In this way, based on the degree of change of the simulated light intensity and the positional relationship of the initial graphic segments, multiple initial graphic segments with small behavior differences are merged into target graphic segments, thereby achieving the fragmentation of the target layout. As a result, the efficiency and accuracy of the layout image fragmentation are improved. Furthermore, since the behavior of the target graphic segment is consistent with the behavior of the multiple initial graphic segments constituting the target graphic segment, the target layout can be corrected using the target graphic segment to ensure the accuracy of the corrected layout image.

[0023] The exemplary embodiments of the present disclosure are described in detail below with continued reference to the accompanying drawings.

[0024] Figure 2 FIG. 2 shows a schematic diagram of an initial graphic segment 200 according to some embodiments of the present disclosure. Figure 2 As shown, there are multiple target graphics in the target layout 110 to be corrected. The electronic device 120 can divide the multiple target graphics in the target layout 110 to be processed into multiple initial graphic segments based on a predetermined segment division rule. In some embodiments, the segment division rule corresponding to the target layout 110 to be processed can be determined based on the type of the target layout 110 to be processed and the process parameters of the target layout 110 to be processed. Exemplarily, if the target layout 110 to be processed is a layout with a precision of 30nm, half of the minimum design feature size of the target layout is used as the length of the initial graphic segment, thereby dividing the target layout 110 to be processed into multiple initial graphic segments. If the target layout 110 to be processed is a layout with a precision of 10nm, the minimum design feature size of the target layout is used as the length of the initial graphic segment, thereby dividing the target layout 110 to be processed into multiple initial graphic segments. Within a certain range, the greater the number of divided initial graphic segments (that is, the smaller the length of the initial graphic segment), the higher the accuracy of the target graphic segment finally determined. However, as the number of initial graphics segments increases, the amount of calculation also increases. Figure 2 As shown, the “X” symbol represents the division point of the target layout 110 to be processed, and the portion between two “X” symbols is used as an initial graphic segment.

[0025] In some embodiments, the target layout 110 to be processed that has been processed (for example, auxiliary exposure processing, graphic insertion processing, etc.) is provided to the electronic device 120 to correct the target layout 110 to be processed. For an initial graphic segment among multiple initial graphic segments corresponding to the target layout to be corrected, the electronic device 120 first determines the signal change metric corresponding to the initial graphic segment. In some embodiments, the signal change metric for an initial graphic segment can be a signal change metric of a point on the initial graphic segment, or it can be an average change metric of the initial graphic segment. The signal change metric indicates the degree of change in the simulated light intensity of the initial graphic segment, that is, the behavior habits of the signal at a point on the initial graphic segment.

[0026] In some embodiments, the signal change measure of a certain sampling point on the initial graphic segment can be used as the signal change measure corresponding to the initial graphic segment. For a certain initial graphic segment among multiple initial graphic segments, the sampling point corresponding to the initial graphic segment can be first determined based on the sampling rule. Exemplarily, the sampling rule can be the endpoint or center point of the initial graphic segment, or it can be the point in the initial graphic segment where the simulated light intensity changes the most. Based on the change of the simulated light intensity at the sampling point, the logarithmic change rate of the light intensity corresponding to the sampling point is determined. Subsequently, based on the logarithmic change rate of the light intensity and the width of the initial graphic segment at the sampling point, the signal change measure at the sampling point is determined. In some embodiments, the normalized logarithmic slope of the light intensity signal can be used as the signal change measure. The calculation formula for the signal change measure can be: (1) in is the normalized logarithmic slope (i.e., a measure of signal variation), is the width of the initial graphics segment at the sampling point, To simulate the light intensity signal, is the logarithmic rate of change of light intensity, It shows that the normalized logarithmic slope is obtained on the edge, is the logarithmic slope.

[0027] In some embodiments, the electronic device 120 performs a simulation verification operation on the entire target layout 110 to be processed to obtain the signal change metrics corresponding to each initial graphic segment. Subsequently, the electronic device 120 determines at least one target graphic segment based on the positional relationship between the multiple initial graphic segments and the signal change metrics determined for the multiple initial graphic segments. The target graphic segment in at least one target graphic segment is obtained by merging at least two initial graphic segments from the multiple initial graphic segments. Exemplarily, the initial graphic segments with similar and adjacent signal change metrics can be merged into one target graphic segment. In some embodiments, if the signal change metrics corresponding to different initial graphic segments are close, it means that the behavior differences between these initial graphic segments are small. In the process of correcting the target layout 110 to be processed, the correction methods used for the initial graphic segments with smaller behavior differences are relatively close. Therefore, they can be merged into the same target graphic segment to facilitate the correction of the target layout 110 to be processed.

[0028] Based on the positional relationship between the multiple initial graphic segments and the signal change metrics respectively determined for the multiple initial graphic segments, at least one segment group is determined from the multiple initial graphic segments. The multiple initial graphic segments included in the segment group in the at least one segment group are adjacent to each other, and the difference between the signal change metrics respectively corresponding to the multiple initial graphic segments is lower than the difference threshold. In some embodiments, for a certain initial graphic segment among the multiple initial graphic segments, the signal change metrics of the initial graphic segments adjacent to it are determined. If the difference between the signal change metric of the initial graphic segment adjacent to the initial graphic segment and the signal change metric of the initial graphic segment is lower than the difference threshold, the graphic segments are divided into the same group of graphic segments. In this way, the multiple initial graphic segments of the target layout to be processed are divided into multiple initial graphic segments. In some embodiments, if the difference between a certain initial graphic segment and the adjacent initial graphic segments is greater than the threshold, the initial graphic segment is taken as a group separately. In some embodiments, the difference threshold can be a value specified by the designer, or can be determined based on the process parameters of the target layout. Exemplarily, the difference threshold can be determined based on the average value of the signal change metrics respectively determined for the multiple initial graphic segments. In some embodiments, the higher the accuracy of the target layout 110 to be processed, the smaller the difference threshold.

[0029] In some embodiments, the fragment group determined by the electronic device 120 may include at least two initial graphic segments. By merging at least two initial graphic segments included in a certain fragment group, a target graphic segment may be determined. It should be understood that the number of initial graphic segments included in each fragment group is less than the total number of initial graphic segments. In addition, the initial graphic segments included in different fragment groups may not overlap with each other. In some embodiments, an initial graphic segment whose difference with adjacent initial graphic segments is greater than a difference threshold may be determined as a target graphic segment. That is, such an initial graphic segment may not be merged with other initial graphic segments. Subsequently, the electronic device 120 determines at least one target graphic segment corresponding to at least one fragment group by merging the corresponding initial graphic segments included in at least one fragment group.

[0030] In some embodiments, based on the signal change metrics generated for each initial graphic segment, a change trend graph of the signal change metrics of the target layout 110 to be processed can be generated. The change trend graph presents the signal change metrics determined for the multiple initial graphic segments according to the positional relationship between the multiple initial graphic segments. Figure 3 FIG. 3 is a schematic diagram of a variation trend diagram 300 provided by some embodiments of the present disclosure. Figure 3 As shown, the horizontal axis of the change trend diagram 300 is the serial number of each initial graphic segment, and the vertical axis is the value of the signal change metric. Each point in the change trend diagram 300 represents a set of (initial graphic segment, signal change metric) data.

[0031] In the process of generating a change trend graph, the presentation order can be determined according to the positional relationship between multiple initial graphic segments, so that the data group corresponding to each initial graphic segment is presented in the change trend graph. Exemplarily, for a certain graphic in the target layout 110 to be processed, the presentation order of the initial graphic segments can be determined in a counterclockwise or clockwise order. Exemplarily, an initial graphic segment is taken as initial graphic segment 01, and the initial graphic segment adjacent to the initial graphic segment in the counterclockwise direction of the initial graphic segment is initial graphic segment 02. Subsequently, the data groups corresponding to the initial graphic segments are connected in sequence to generate a change trend curve 310.

[0032] In some embodiments, multiple initial graphic segments may be divided into at least one segment group based on the rate of change of the change trend graph. Exemplarily, for a curve segment between two points in the change trend curve 310, if the rate of change of the curve segment (i.e., the curve slope) is lower than a rate of change threshold, it indicates that the initial graphic segments corresponding to the two points may be divided into the same segment group. If the rate of change of the curve segment exceeds the rate of change threshold, the initial graphic segments corresponding to the two points are divided into different segment groups. In some embodiments, the rate of change threshold may be determined based on a difference threshold. Figure 3As shown, the difference threshold is 0.15, and the initial graphic segments (including graphic segments 02, 03, 04, 05, and 06) with information change metrics within the range of 1.4±0.15 can be used as the first group of graphic segments, and the initial graphic segments (including graphic segments 07, 08, 09, and 10) with information change metrics within the range of 1.5±0.15 can be used as the second group of graphic segments. Exemplarily, the initial graphic segments in the first group of graphic segments can be merged in order to obtain the first target graphic segment. The initial graphic segments in the second group of graphic segments can be merged in order to obtain the second target graphic segment.

[0033] Figure 4 FIG. 4 is a schematic diagram of a target graphic segment 400 according to some embodiments of the present disclosure. Figure 4 As shown, after merging adjacent initial graphic segments with similar signal change metrics in the target layout 110 to be processed, multiple target graphic segments 410 can be obtained. For a certain target graphic segment in the multiple target graphic segments 410, its behavior information is consistent with the behavior information of the multiple initial graphic segments it includes.

[0034] In some embodiments, the electronic device 120 determines the correction result for the target layout based on at least one target graphic segment. In some embodiments, the electronic device 120 may provide the obtained multiple target graphic segments to the OPC model to implement the correction for the target layout using the OPC model. Exemplarily, for a certain target graphic segment among the obtained multiple target graphic segments, information related to the target graphic segment (such as coordinate information and design dimensions, etc.) may be provided to the OPC model. The OPC model determines the measurement information corresponding to the target graphic segment based on the difference between the size of the target graphic segment and the design size of the target layout. Exemplarily, the electronic device 120 may determine the measurement information based on the distance between the target graphic segment and other graphic segments. In this way, by embedding the determination process of the target graphic segment into the correction process for the target layout to be processed, seamless switching for the end user is achieved without the need for additional training of the OPC model.

[0035] In some embodiments, if it is detected that the difference between a certain measurement data and the design size in at least one measurement data exceeds the first size threshold, the target graphic segment corresponding to the measurement data needs to be adjusted to correct the target layout 110 to be processed. In some embodiments, if it is detected that the distance between a certain graphic segment and other graphic segments is too small to affect the imaging of the target layout 110 to be processed, it is determined that the graphic segment needs to be adjusted.

[0036] In some embodiments, the electronic device 120 may adjust the corresponding target graphic segment based on the target point corresponding to the target graphic segment. Figure 5FIG. 5 shows a schematic diagram of a target point 500 according to some embodiments of the present disclosure. Figure 5 As shown, the selected sampling points include a first target point 510-1, a second target point 510-2, a third target point 510-3, a fourth target point 510-4, a fifth target point 510-5, and a sixth target point 510-6. The first target point 510-1, the second target point 510-2, the third target point 510-3, the fourth target point 510-4, the fifth target point 510-5, and the sixth target point 510-6 may also be collectively or individually referred to as target points 510. Figure 5 In the example of FIG. 1 , a first target graphic segment 520-1, a second target graphic segment 520-2, a third target graphic segment 520-3, and a fourth target graphic segment 520-4 are shown, which are also collectively or individually referred to as target graphic segments 520. There is a large gap between the target graphic segment (dashed line) and the actual layout graphic (solid line), that is, the difference between the measured data and the design size exceeds the first size threshold, and the target graphic segment needs to be adjusted. Figure 5 The number of target graphic segments and target points shown in is merely exemplary and is not intended to be limiting.

[0037] In some embodiments, the electronic device 120 may determine a target point for adjusting the given target graphic segment from the given target graphic segment based on at least one sampling point corresponding to the given target graphic segment. The at least one sampling point is a sampling point corresponding to a plurality of initial graphic segments included in the target graphic segment. Exemplarily, a sampling point at the center of the target graphic segment may be used as the target point.

[0038] In some embodiments, the electronic device 120 may determine the moving distance of the target graphic segment based on the difference. For example, the moving distance may be half of the difference. In some embodiments, in order to prevent the correction amplitude from being too large and affecting the accuracy of the target layout 110 to be processed, the target graphic segment may be moved based on the difference only when the difference between the measured data and the design size is less than the second size threshold.

[0039] Figure 6 FIG. 6 is a flow chart showing an example layout processing process 600 according to some embodiments of the present disclosure. The process 600 may be implemented at the electronic device 120. Figure 1 600 is described below.

[0040] like Figure 6 As shown, in box 610, the electronic device 120 determines a signal change metric corresponding to each initial graphic segment for multiple initial graphic segments corresponding to the target layout to be corrected, and the signal change metric indicates the degree of change of the simulated light intensity of the initial graphic segment.

[0041] In some embodiments, determining the signal change metric corresponding to the initial graphic segment includes: determining a sampling point on the initial graphic segment based on a sampling rule; determining the logarithmic change rate of the light intensity corresponding to the sampling point based on the change of the simulated light intensity at the sampling point; and determining the signal change metric based on the logarithmic change rate of the light intensity and the width of the initial graphic segment at the sampling point.

[0042] In some embodiments, the multiple initial graphic segments are determined in the following manner: based on the target layout and the process parameters corresponding to the target layout, determining a fragment division rule corresponding to the target layout; and based on the fragment division rule, dividing the target layout into multiple initial graphic segments.

[0043] In some embodiments, the length of the plurality of initial pattern segments is half of the minimum design feature size of the target layout.

[0044] In box 620, the electronic device 120 determines at least one target graphic segment based on the positional relationship between the multiple initial graphic segments and the signal change metrics determined for the multiple initial graphic segments respectively, and the target graphic segment in the at least one target graphic segment is obtained by merging at least two initial graphic segments among the multiple initial graphic segments.

[0045] In some embodiments, determining at least one target graphic segment includes: determining at least one segment group from the multiple initial graphic segments based on the positional relationship between the multiple initial graphic segments and the signal change metrics respectively determined for the multiple initial graphic segments, wherein the multiple initial graphic segments included in the segment group of at least one segment group are adjacent to each other, and the differences between the signal change metrics respectively corresponding to the multiple initial graphic segments are lower than a difference threshold; and determining at least one target graphic segment respectively corresponding to the at least one segment group by merging the corresponding initial graphic segments included in the at least one segment group.

[0046] In some embodiments, determining at least one fragment group includes: generating a change trend graph based on signal change metrics determined respectively for multiple initial graphic fragments, the change trend graph presenting the signal change metrics determined respectively for multiple initial graphic fragments according to the positional relationship between the multiple initial graphic segments; and dividing the multiple initial graphic segments into at least one fragment group based on the change rate of the change trend graph.

[0047] In some embodiments, the difference threshold is determined based on an average of signal change metrics determined for a plurality of initial graph segments, respectively.

[0048] In block 630 , the electronic device 120 determines a correction result for the target layout based on the at least one target graphic segment.

[0049] In some embodiments, determining a correction result for a target layout includes: determining at least one measurement information corresponding to at least one target graphic segment in the target layout, the measurement information in the at least one measurement information indicating a difference between a size of the corresponding target graphic segment and a design size of the target layout; and in response to detecting from the at least one measurement information that a difference with the design size exceeds a first size threshold, adjusting a given target graphic segment corresponding to the target measurement information based on the difference.

[0050] In some embodiments, process 600 further includes: determining a target point for adjusting the given target graphic segment from the given target graphic segment based on at least one sampling point corresponding to the given target graphic segment, the at least one sampling point corresponding to at least one initial graphic segment included in the given target graphic segment, respectively, and wherein adjusting the given target graphic segment based on the difference includes: in response to determining that the difference is lower than a second size threshold, determining a moving distance based on the difference; and moving a position of the target point in the target layout based on the moving distance to adjust the given target graphic segment.

[0051] Figure 7 1 is a block diagram of an electronic device 700 in which one or more embodiments of the present disclosure may be implemented. The electronic device 700 may be used to implement, for example, Figure 1 The electronic device 120 shown. It should be understood that Figure 7 The electronic device 700 shown is merely exemplary and should not constitute any limitation on the functionality and scope of the embodiments described herein.

[0052] like Figure 7 As shown, the electronic device 700 is in the form of a general electronic device. The components of the electronic device 700 may include, but are not limited to, one or more processors 710 or processing units, a memory 720, a storage device 730, one or more communication units 740, one or more input devices 750, and one or more output devices 760. The processing unit may be an actual or virtual processor and is capable of performing various processes according to a program stored in the memory 720. In a multi-processor system, multiple processing units execute computer executable instructions in parallel to improve the parallel processing capability of the electronic device 700.

[0053] The electronic device 700 typically includes a plurality of computer storage media. Such media may be any available media accessible to the electronic device 700, including but not limited to volatile and non-volatile media, removable and non-removable media. The memory 720 may be a volatile memory (e.g., a register, a cache, a random access memory (RAM)), a non-volatile memory (e.g., a read-only memory (ROM), an electrically erasable programmable read-only memory (EEPROM), flash memory), or some combination thereof. The storage device 730 may be a removable or non-removable medium, and may include a machine-readable medium, such as a flash drive, a disk, or any other medium, which may be capable of being used to store information and / or data (e.g., training data for training) and may be accessed within the electronic device 700.

[0054] The electronic device 700 may further include additional removable / non-removable, volatile / non-volatile storage media. Figure 7 As shown in , a disk drive for reading or writing from a removable, non-volatile disk (e.g., a "floppy disk") and an optical drive for reading or writing from a removable, non-volatile optical disk may be provided. In these cases, each drive may be connected to the bus (not shown) by one or more data media interfaces. The memory 720 may include a computer program product 725 having one or more program modules that are configured to perform various methods or actions of various embodiments of the present disclosure.

[0055] The communication unit 740 enables communication with other electronic devices via a communication medium. Additionally, the functions of the components of the electronic device 700 can be implemented in a single computing cluster or multiple computing machines that can communicate via a communication connection. Therefore, the electronic device 700 can operate in a networked environment using a logical connection with one or more other servers, a network personal computer (PC), or another network node.

[0056] The input device 750 may be one or more input devices, such as a mouse, a keyboard, a tracking ball, etc. The output device 760 may be one or more output devices, such as a display, a speaker, a printer, etc. The electronic device 700 may also communicate with one or more external devices (not shown) through the communication unit 740 as needed, such as a storage device, a display device, etc., communicate with one or more devices that allow a user to interact with the electronic device 700, or communicate with any device (e.g., a network card, a modem, etc.) that allows the electronic device 700 to communicate with one or more other electronic devices. Such communication may be performed via an input / output (I / O) interface (not shown).

[0057] According to an exemplary implementation of the present disclosure, a computer-readable storage medium is provided, on which one or more computer instructions are stored, wherein the one or more computer instructions are executed by a processor to implement the method described above.

[0058] Various aspects of the present disclosure are described herein with reference to flowcharts and / or block diagrams of methods, devices (systems) and computer program products implemented according to the present disclosure. It should be understood that each box in the flowchart and / or block diagram and the combination of boxes in the flowchart and / or block diagram can be implemented by computer-readable program instructions.

[0059] These computer-readable program instructions can be provided to a processing unit of a general-purpose computer, a special-purpose computer, or other programmable data processing device, thereby producing a machine, so that when these instructions are executed by the processing unit of the computer or other programmable data processing device, a device that implements the functions / actions specified in one or more boxes in the flowchart and / or block diagram is generated. These computer-readable program instructions can also be stored in a computer-readable storage medium, and these instructions cause the computer, programmable data processing device, and / or other equipment to work in a specific manner, so that the computer-readable medium storing the instructions includes a manufactured product, which includes instructions for implementing various aspects of the functions / actions specified in one or more boxes in the flowchart and / or block diagram.

[0060] Computer-readable program instructions may also be loaded onto a computer, other programmable data processing apparatus, or other device so that a series of operating steps are performed on the computer, other programmable data processing apparatus, or other device to produce a computer-implemented process, thereby causing the instructions executed on the computer, other programmable data processing apparatus, or other device to implement the functions / actions specified in one or more boxes in the flowchart and / or block diagram.

[0061] The flow chart and block diagram in the accompanying drawings show the possible architecture, function and operation of the system, method and computer program product according to multiple implementations of the present disclosure. In this regard, each square box in the flow chart or block diagram can represent a part of a module, program segment or instruction, and a part of a module, program segment or instruction includes one or more executable instructions for realizing the logical function of the specification. In some implementations as replacements, the function marked in the square box can also occur in a sequence different from that marked in the accompanying drawings. For example, two continuous square boxes can actually be executed substantially in parallel, and they can sometimes be executed in reverse order, depending on the functions involved. It should also be noted that each square box in the block diagram and / or flow chart, and the combination of the square boxes in the block diagram and / or flow chart can be realized by a special hardware-based system that performs the function or action of the specification, or can be realized by a combination of special hardware and computer instructions.

[0062] The above descriptions of various implementations of the present disclosure are exemplary, non-exhaustive, and not limited to the disclosed implementations. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described implementations. The selection of terms used herein is intended to best explain the principles of the implementations, practical applications, or improvements to the technology in the marketplace, or to enable other persons of ordinary skill in the art to understand the implementations disclosed herein.

Claims

1. A method for layout processing, comprising: For a plurality of initial graphic segments corresponding to a target layout to be corrected, determining a signal change metric corresponding to each initial graphic segment, wherein the signal change metric indicates a degree of change in a simulated light intensity of the initial graphic segment; Determine at least one target graph segment based on the positional relationship between the multiple initial graph segments and the signal change metrics respectively determined for the multiple initial graph segments, wherein the target graph segment in the at least one target graph segment is obtained by merging at least two initial graph segments in the multiple initial graph segments; as well as Based on the at least one target graphic segment, a correction result for the target layout is determined.

2. The method of claim 1 , wherein determining a signal change metric corresponding to the initial graph segment comprises: Determine a sampling point on the initial graphic segment based on a sampling rule; Determine a logarithmic change rate of light intensity corresponding to the sampling point based on a change of the simulated light intensity at the sampling point; as well as The signal change metric is determined based on the rate of change of the logarithmic intensity and the width of the initial pattern segment at the sampling point.

3. The method of claim 1 , wherein determining the at least one target graphics segment comprises: Based on the positional relationship between the multiple initial graphic segments and the signal change metrics respectively determined for the multiple initial graphic segments, determining at least one segment group from the multiple initial graphic segments, wherein the multiple initial graphic segments included in the segment group in the at least one segment group are adjacent to each other, and differences between the signal change metrics respectively corresponding to the multiple initial graphic segments are lower than a difference threshold; as well as The at least one target graphic segment respectively corresponding to the at least one fragment group is determined by merging the corresponding initial graphic segments included in the at least one fragment group.

4. The method of claim 3, wherein determining the at least one segment group comprises: generating a change trend graph based on the signal change metrics respectively determined for the plurality of initial graphic segments, the change trend graph presenting the signal change metrics respectively determined for the plurality of initial graphic segments according to the positional relationship between the plurality of initial graphic segments; as well as Based on the change rate of the change trend graph, the plurality of initial graphic segments are divided into the at least one segment group.

5. The method according to claim 1, wherein the plurality of initial graphic segments are determined by: Determining a fragment partitioning rule corresponding to the target layout based on the target layout and the process parameters corresponding to the target layout; and Based on the fragment division rule, the target layout is divided into the multiple initial graphic segments. 6 . The method according to claim 1 , wherein the lengths of the plurality of initial pattern segments are half of a minimum design feature size of the target layout.

7. The method according to claim 1, wherein determining the correction result for the target layout comprises: Determine at least one item of measurement information corresponding to at least one target graphic segment in the target layout, wherein the measurement information in the at least one item of measurement information indicates a difference between a size of the corresponding target graphic segment and a design size of the target layout; as well as In response to detecting, from the at least one item of measurement information, target measurement information whose difference with the design size exceeds a first size threshold, adjusting a given target graphic segment corresponding to the target measurement information based on the difference.

8. The method according to claim 7, further comprising: determining a target point for adjusting the given target graphic segment from the given target graphic segment based on at least one sampling point corresponding to the given target graphic segment, wherein the at least one sampling point corresponds to at least one initial graphic segment included in the given target graphic segment, respectively; and Wherein adjusting the given target graphics segment based on the difference comprises: In response to determining that the difference is below a second size threshold, determining a movement distance based on the difference; and The position of the target point is moved in the target layout based on the moving distance to adjust the given target graphic segment.

9. The method of claim 3, wherein the difference threshold is determined based on an average of the signal change metrics respectively determined for the plurality of initial graphic segments.

10. An electronic device, characterized in that: include: at least one processing unit; as well as At least one memory, the at least one memory being coupled to the at least one processing unit and storing instructions for execution by the at least one processing unit, the instructions causing the electronic device to perform the method according to any one of claims 1 to 9 when executed by the at least one processing unit.

11. A computer-readable storage medium, characterized in that: A computer program is stored thereon, characterized in that the computer program can be executed by a processor to implement the method according to any one of claims 1 to 9.

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