Combined heat exchanger suitable for plasma gun

Abstract

The invention provides a combined heat exchanger suitable for a plasma gun, and relates to the field of plasma guns. The combined heat exchanger suitable for the plasma gun comprises a first inner electrode heat exchanger, a second inner electrode heat exchanger and an outer electrode heat exchanger. The first inner electrode heat exchanger is in a spiral shape and used for being installed in an inner cavity of the inner electrode, and the pipe wall of the first inner electrode heat exchanger makes contact with the inner wall of the inner electrode. The second inner electrode heat exchanger is vortex-shaped and is mounted in the end part of the inner electrode; the outer electrode heat exchanger is spiral and used for being installed in the extending direction of the outer electrode, and the pipe wall of the outer electrode heat exchanger makes contact with the outer wall of the outer electrode. The cooling function of the plasma gun in the normal emission and electrode glow treatment process can be achieved, and therefore the performance of the plasma gun in the normal use process can meet the requirement.

Description

Technical Field

[0001] The invention relates to the field of plasma guns, in particular to a combined heat exchanger suitable for plasma guns. Background Art

[0002] In the field of magneto-inertial fusion, a plasma gun used to launch dense plasma clusters needs to launch plasma at a very high frequency to compress the magnetized target and achieve fusion ignition conditions.

[0003] The plasma mass emission process requires a strong Lorentz force provided by a pulse discharge of large current, so a large current (MA level) will continuously pass through the inner and outer electrodes of the plasma gun. Since the electrodes themselves have a certain resistance, heat will be continuously generated on the electrodes. The electrodes of the plasma gun are divided into inner and outer electrodes, both of which will continuously generate heat, so the heat will continue to accumulate. Moreover, the emission of the plasma gun is carried out in a vacuum environment, so the area around the electrodes is in a vacuum environment, and it becomes very difficult to extract the heat.

[0004] In addition, before the plasma gun is officially put into use, the electrode needs to be treated with glow discharge plasma to remove burrs and impurities on the surface, etc., so as to provide basic conditions for the normal and stable operation of the plasma gun. In this process, it is often necessary to continuously apply voltage (about several hundred volts) to the electrode, so heat will continue to be generated on the electrode, causing the electrode temperature to continue to rise.

[0005] If the above heat cannot be discharged in time, the temperature of the parts in contact with the electrode will rise, and then thermal expansion will occur. Thermal expansion will cause the assembly gap of the parts installed on the electrode to change, especially the ultra-fast gas valve will cause the sealing gap to change after thermal expansion, and the stability and jitter of the intake will continue to change, which will affect the stability of the pre-ionization triggering moment of the plasma gun.

[0006] The plasma gun has a compact structure and is connected to a high voltage of several hundred volts or even several thousand volts. In order to solve the problem of timely heat extraction mentioned above, a heat exchanger needs to be specially developed, which needs to consider the structural size, high voltage resistance and good heat transfer performance to meet the requirements of size, pressure resistance and cooling. Summary of the invention

[0007] In order to solve the many problems existing in the plasma gun mentioned above, the first aspect of the present invention provides a combined heat exchanger suitable for the plasma gun, which can realize the cooling function of the plasma gun during normal emission and electrode glow treatment, so that the performance of the plasma gun during normal use meets the requirements.

[0008] A combined heat exchanger suitable for a plasma gun provided in a first aspect of the present invention comprises a first inner electrode heat exchanger, a second inner electrode heat exchanger and an outer electrode heat exchanger; the first inner electrode heat exchanger is in a spiral shape and is used to be installed in the inner cavity of the inner electrode, the tube wall of the first inner electrode heat exchanger is in contact with the inner wall of the inner electrode, and the two ends of the first inner electrode heat exchanger respectively pass through the bottom of the inner electrode and are used for the inlet and outlet pipes of an external cooling mechanism; the second inner electrode heat exchanger is in a vortex shape and is used to be installed in the end of the inner electrode, and the two ends of the second inner electrode heat exchanger respectively pass through the bottom of the end of the inner electrode and are used for the inlet and outlet pipes of an external cooling mechanism; the outer electrode heat exchanger is in a spiral shape and is used to be installed along the extension direction of the outer electrode, the tube wall of the outer electrode heat exchanger is in contact with the outer wall of the outer electrode, and the two ends of the outer electrode heat exchanger are respectively used for the inlet and outlet pipes of the external cooling mechanism.

[0009] In some feasible embodiments, the height of the first inner electrode heat exchanger is 150-250 mm, the tube diameter is 4-6 mm, the pitch is 4-12 mm, and the number of turns is 10-30; and / or, the material of the first inner electrode heat exchanger is a material with good thermal conductivity, and the pressure resistance of the first inner electrode heat exchanger is greater than 1.0 MPa.

[0010] In some feasible embodiments, the outer diameter of the second inner electrode heat exchanger is 180-220 mm, the inner diameter is 120-160 mm, the tube diameter is 6-10 mm, the pitch is 6-10 mm, and the number of turns is 4-8; and / or, the material of the second inner electrode heat exchanger is a material with good thermal conductivity, and the pressure resistance of the second inner electrode heat exchanger is greater than 1.0 MPa.

[0011] In some feasible embodiments, the height of the outer electrode heat exchanger is 200-300 mm, the tube diameter is 6-10 mm, the pitch is 10-20 mm, and the number of turns is 10-20; and / or the pressure resistance performance of the second inner electrode heat exchanger is greater than 1.0 MPa.

[0012] In some feasible embodiments, the tube wall of the first inner electrode heat exchanger is connected to the inner wall of the inner electrode by means of thermally conductive adhesive, and the two ends of the first inner electrode heat exchanger are connected to the inlet and outlet pipes of the cooling mechanism by means of vacuum-specific joints; and / or, the two ends of the second inner electrode heat exchanger are connected to the inlet and outlet pipes of the cooling mechanism by means of vacuum-specific joints; and / or, the tube wall of the outer electrode heat exchanger is connected to the outer wall of the outer electrode by means of thermally conductive adhesive, and the two ends of the outer electrode heat exchanger are connected to the inlet and outlet pipes of the cooling mechanism by means of vacuum-specific joints.

[0013] In some feasible embodiments, the second inner electrode heat exchanger is provided with fins, the fins have a height of 1 to 3 mm, a thickness of 0.3 to 0.8 mm, and a spacing of 0.3 to 0.8 mm.

[0014] The second aspect of the present invention provides a plasma gun with high heat dissipation, comprising a combined heat exchanger suitable for a plasma gun as provided in the first aspect of the present invention, and also comprising an inner electrode and an outer electrode, wherein a plasma channel is provided between the outer wall of the inner electrode and the inner wall of the outer electrode; the inner electrode comprises an inner electrode extension and an inner electrode end, wherein the inner electrode end is located at the bottom of the inner electrode extension and extends in a direction away from the inner electrode extension; the first inner electrode heat exchanger is arranged in the inner cavity of the inner electrode extension, and the tube wall of the first inner electrode heat exchanger is in contact with the inner wall of the inner electrode; an end groove is provided at the bottom of the inner electrode end, and the second inner electrode heat exchanger is arranged in the end groove.

[0015] In some feasible embodiments, a heat dissipation plate is further included, and the second inner electrode heat exchanger is arranged in the heat dissipation plate, and the heat dissipation plate is arranged in the end groove.

[0016] In some feasible implementations, the heat dissipation plate is connected to the inner wall of the end groove by heat dissipation glue;

[0017] In some feasible implementations, the heat sink has an outer diameter of 180 to 220 mm and an inner diameter of 120 to 160 mm.

[0018] The combined heat exchanger suitable for a plasma gun provided by the present invention has the following beneficial effects: the present invention can realize the cooling function of the plasma gun during normal emission and electrode glow treatment, thereby enabling the performance of the plasma gun to meet the requirements during normal use. Furthermore, during the high-frequency emission and electrode glow discharge cleaning process of the plasma gun, the present invention can timely and effectively take away the heat continuously generated on the plasma gun electrode, thereby controlling the temperature of the inner and outer electrodes of the plasma gun within the required range, avoiding deformation and accelerated oxidation caused by the continuous increase in electrode temperature. In addition, the present invention can also avoid deformation or extrusion of parts in contact with the electrode due to thermal expansion, thereby avoiding affecting the normal use function. For example, the air valve installed inside the inner electrode can avoid being deformed by extrusion, thereby preventing the gap between the flying disc and the liner in the air intake assembly from being affected, thereby ensuring the quality of the intake and the pre-ionization of the plasma gun. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0020] Figure 2 It is a schematic diagram of the structure of the fin in the present invention.

[0021] Figure 3 It is a schematic structural diagram of the second inner electrode heat exchanger in the present invention.

[0022] Reference numerals

[0023] First inner electrode heat exchanger 1

[0024] Second inner electrode heat exchanger 2

[0025] External electrode heat exchanger 3

[0026] Inner electrode 4

[0027] Inner electrode extension 41

[0028] Inner electrode end 42

[0029] End slot 42.1

[0030] External electrode 5

[0031] Heat sink 6 DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in the field without creative work belong to the scope of protection of the present invention. In the description of the present invention, it should be noted that the orientation or position relationship indicated by the terms "left side", "right side", "upper side", "lower side", "above", "below" and the like is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0033] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] Furthermore, in the description of the present invention, unless otherwise specified, “plurality” means two or more.

[0035] Embodiment 1

[0036] The embodiment of the present invention provides a combined heat exchanger suitable for a plasma gun, referring to Figure 1 , comprising a first inner electrode heat exchanger 1, a second inner electrode heat exchanger 2 and an outer electrode heat exchanger 3, wherein the first inner electrode heat exchanger 1 is spirally arranged in the inner cavity of the inner electrode 4, and the tube wall of the first inner electrode heat exchanger 1 is in contact with the inner wall of the inner electrode 4, and the two ends of the first inner electrode heat exchanger 1 are respectively passed through the bottom of the inner electrode 4 and are used for the inlet and outlet pipelines of the external cooling mechanism; the second inner electrode heat exchanger 2 is spirally arranged in the inner electrode end 42 (such as Figure 3 As shown in the figure, the two ends of the second inner electrode heat exchanger 2 are respectively passed through the bottom of the inner electrode end 42 and are used for the inlet and outlet pipes of the external cooling mechanism; the outer electrode heat exchanger 3 is spirally arranged along the extension direction of the outer electrode 5, and the tube wall of the outer electrode heat exchanger 3 is in contact with the outer wall of the outer electrode 5. The two ends of the outer electrode heat exchanger 3 are respectively used for the inlet and outlet pipes of the external cooling mechanism. It can be understood that the first inner electrode heat exchanger 1 is used to conduct the heat generated by the inner electrode extension 41, and the second inner electrode heat exchanger 1 is used to conduct the heat generated by the inner electrode end 42. The outer electrode heat exchanger 3 is used to extract the heat generated on the outer electrode 5. When the present invention is in use, there is a flowing cooling medium in the inner cavity of the first inner electrode heat exchanger 1, the second inner electrode heat exchanger 2 and the outer electrode heat exchanger 3. The cooling medium needs to be insulating to avoid the high voltage and high current being extracted through the cooling medium or the tube wall of each heat exchanger at the moment of plasma gun emission, so as to prevent damage to external equipment. Therefore, the cooling medium can be high-purity water or transformer oil. The cooling medium can take out the absorbed heat in time, thereby reducing the temperature of the inner electrode 4 and the outer electrode 5. The present invention can realize the cooling function of the plasma gun during normal emission and electrode glow treatment, so that the performance of the plasma gun during normal use meets the requirements. Furthermore, during the high-frequency emission of the plasma gun and the electrode glow discharge cleaning process, the present invention can timely and effectively take away the heat continuously generated on the plasma gun electrode, thereby controlling the temperature of the inner and outer electrodes 5 of the plasma gun within the required range, avoiding deformation and accelerated oxidation caused by the continuous increase of the electrode temperature. In addition, the present invention can also prevent the parts in contact with the electrode from being deformed or squeezed due to thermal expansion, thereby avoiding affecting the normal use function. For example, the air valve installed inside the inner electrode 4 can be prevented from being squeezed and deformed, thereby preventing the gap between the flying disc and the liner in the air intake assembly from being affected, thereby ensuring the quality of the intake and the pre-ionization of the plasma gun.

[0037] Regarding the first inner electrode heat exchanger 1: The tube wall of the first inner electrode heat exchanger 1 is connected to the inner wall of the inner electrode 4 by a heat conductive adhesive, and can also be fixed by other effective connection methods. The heat on the inner electrode 4 can be effectively and timely transferred to the cooling medium in the inner cavity of the first inner electrode heat exchanger 1 through the tube wall of the first inner electrode heat exchanger 1, so that the cooling medium can quickly take away the heat and reduce the temperature of the inner electrode extension 41. The two ends of the first inner electrode heat exchanger 1 and the inlet and outlet pipes of the cooling mechanism are connected by vacuum-specific joints. The material of the first inner electrode heat exchanger 1 is a material with good thermal conductivity, such as pure copper or pure aluminum. The pressure resistance of the first inner electrode heat exchanger 1 is greater than 1.0Mpa, the height of the first inner electrode heat exchanger 1 is 150-250mm, the tube diameter is 4-6mm, the pitch is 4-12mm, the number of turns is 10-30, and the first inner electrode heat exchanger 1 can be a left-handed or right-handed structure.

[0038] Regarding the second inner electrode heat exchanger 2: the outer diameter of the second inner electrode heat exchanger 2 is 180-220 mm, the inner diameter is 120-160 mm, the tube diameter is 6-10 mm, the pitch is 6-10 mm, and the number of turns is 4-8; and / or, the material of the second inner electrode heat exchanger 2 is a material with good thermal conductivity, and the pressure resistance of the second inner electrode heat exchanger 2 is >1.0 MPa.

[0039] About the external electrode heat exchanger 3: The external electrode heat exchanger 3 can be in the form of a jacket or a coil. If it is a coil, the coil can be a left-handed or right-handed structure, and the cross section can be a semicircular cross section or a semi-elliptical cross section, etc. If it is in the form of a jacket, a baffle structure is generally required to be designed in the jacket to avoid short circuit of the cooling medium. Since most of the external electrode 5 is inside the vacuum cavity, the two ends of the external electrode heat exchanger 3 and the inlet and outlet pipes of the cooling mechanism are connected through vacuum-specific joints. The material of the external electrode heat exchanger 3 is generally the same as that of the external electrode 5, such as titanium alloy, so as to ensure its connection performance with the external electrode 5, such as welding performance. The pressure resistance of the external electrode heat exchanger 3 is greater than 1.0MPa. The height of the external electrode heat exchanger 3 is 200-300mm, the tube diameter is 6-10mm, the pitch is 10-20mm, and the number of turns is 10-20.

[0040] In the combined heat exchanger suitable for a plasma gun provided in an embodiment of the present invention, refer to Figure 2 If it is manufactured by machining, the second inner electrode heat exchanger 2 is provided with fins, the height of the fins is 1 to 3 mm, the thickness is 0.3 to 0.8 mm, and the spacing is 0.3 to 0.8 mm.

[0041] Embodiment 2

[0042] This embodiment provides a specific solution of a combined heat exchanger suitable for a plasma gun, wherein the first inner electrode heat exchanger 1 has a height of 230 mm, a tube diameter of 4 mm, and a total of 20 turns. Figure 1 As shown, from top to bottom, the pitch of the first 10 circles is 10mm, and the pitch of the last 10 circles is 12mm.

[0043] The second inner electrode heat exchanger 2 has an outer diameter of 210 mm, an inner diameter of 160 mm, a tube diameter of 6 mm, and a total of 4 turns. Figure 1 As shown, from inside to outside, the pitch of the inner 2 circles is 6mm, and the pitch of the outer 2 circles is 8mm;

[0044] The outer electrode heat exchanger 3 has a height of 290 mm and a tube diameter of 6 mm, with a total of 15 turns. Figure 1 As shown, from top to bottom, the pitch of the first 5 circles is 15mm, and the pitch of the last 10 circles is 20mm.

[0045] In this embodiment, the pitches of the first inner electrode heat exchanger 1, the second inner electrode heat exchanger 2 and the outer electrode heat exchanger 3 are adjusted according to different positions on the inner electrode and the outer electrode. In areas where heat is more concentrated, the pitch of the coil is smaller and the heat dissipation capacity is stronger.

[0046] Embodiment 3

[0047] This embodiment provides a specific solution of a combined heat exchanger suitable for a plasma gun, wherein the first inner electrode heat exchanger 1 has a height of 230 mm, a tube diameter of 4 mm, and a total of 25 turns. Figure 1 As shown, from top to bottom, the pitch of the first 15 circles is 8mm, and the pitch of the last 10 circles is 10mm.

[0048] The second inner electrode heat exchanger 2 has an outer diameter of 220 mm, an inner diameter of 160 mm, a tube diameter of 6 mm, and a total of 5 turns. Figure 1 As shown, from inside to outside, the pitch of the inner 3 circles is 6mm, and the pitch of the outer 2 circles is 8mm;

[0049] The outer electrode heat exchanger 3 has a height of 300 mm and a tube diameter of 6 mm, with a total of 18 turns. Figure 1 As shown, from top to bottom, the pitch of the first 8 circles is 12mm, and the pitch of the last 10 circles is 18mm.

[0050] In this embodiment, the pitches of the first inner electrode heat exchanger 1, the second inner electrode heat exchanger 2 and the outer electrode heat exchanger 3 are adjusted according to different positions on the inner electrode and the outer electrode. In areas where heat is more concentrated, the pitch of the coil is smaller and the heat dissipation capacity is stronger.

[0051] Embodiment 4

[0052] This embodiment provides a specific solution of a combined heat exchanger suitable for a plasma gun, wherein the first inner electrode heat exchanger 1 has a height of 200 mm, a tube diameter of 6 mm, and a total of 18 turns. Figure 1 As shown, from top to bottom, the pitch of the first 8 circles is 8mm, and the pitch of the last 10 circles is 10mm.

[0053] The second inner electrode heat exchanger 2 has an outer diameter of 200 mm, an inner diameter of 140 mm, a tube diameter of 8 mm, and a total of 4 turns. Figure 1 As shown, from inside to outside, the pitch of the inner 2 circles is 8mm, and the pitch of the outer 2 circles is 10mm;

[0054] The outer electrode heat exchanger 3 has a height of 290 mm and a tube diameter of 8 mm, with a total of 20 turns. Figure 1 As shown, from top to bottom, the pitch of the first 10 circles is 10mm, and the pitch of the last 10 circles is 16mm.

[0055] In this embodiment, the pitches of the first inner electrode heat exchanger 1, the second inner electrode heat exchanger 2 and the outer electrode heat exchanger 3 are adjusted according to different positions on the inner electrode and the outer electrode. In areas where heat is more concentrated, the pitch of the coil is smaller and the heat dissipation capacity is stronger.

[0056] Embodiment 5

[0057] The present invention also provides a plasma gun with high heat dissipation performance, see Figure 1 , including a combined heat exchanger suitable for a plasma gun as provided in Example 1, and also including an inner electrode 4 and an outer electrode 5, wherein a plasma channel is provided between the outer wall of the inner electrode 4 and the inner wall of the outer electrode 5; the inner electrode 4 includes an inner electrode extension 41 and an inner electrode end 42, wherein the inner electrode end 42 is located at the bottom of the inner electrode extension 41 and extends in a direction away from the inner electrode extension 41; the first inner electrode heat exchanger 1 is arranged in the inner cavity of the inner electrode extension 41, and the tube wall of the first inner electrode heat exchanger 1 is in contact with the inner wall of the inner electrode 4; an end groove 42.1 is provided at the bottom of the inner electrode end 42, and the second inner electrode heat exchanger 2 is arranged in the end groove 42.1.

[0058] In the plasma gun with high heat dissipation provided by the present invention, refer to Figure 1, further comprising a heat sink 6, wherein the second inner electrode heat exchanger 2 is arranged in the heat sink 6, wherein the heat sink 6 is arranged in the end slot 42.1, wherein the surfaces of the heat sink 6 in contact with the inner wall of the end slot 42.1 all form heat sink surfaces, wherein the heat sink surfaces are connected to the inner wall of the end slot 42.1 by a heat conductive adhesive. In a specific embodiment, the size of the end slot 42.1 matches the shape of the heat sink 6, wherein the outer diameter of the heat sink 6 is 180 to 220 mm, preferably 200 mm, the inner diameter is 120 to 160 mm, preferably 140 mm, and the thickness is 8 to 12 mm, preferably 10 mm. The heat sink 6 is made of pure copper.

[0059] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be regarded as the scope of protection of the present invention.

Claims

1. A combined heat exchanger suitable for a plasma gun, characterized in that: It comprises a first inner electrode heat exchanger (1), a second inner electrode heat exchanger (2) and an outer electrode heat exchanger (3); The first inner electrode heat exchanger (1) is spiral-shaped and is used to be installed in the inner cavity of the inner electrode. The tube wall of the first inner electrode heat exchanger (1) contacts the inner wall of the inner electrode. The two ends of the first inner electrode heat exchanger (1) respectively pass through the bottom of the inner electrode and are used to connect the inlet and outlet pipes of the external cooling mechanism. The second inner electrode heat exchanger (2) is in a spiral shape and is used to be installed in the end of the inner electrode. The two ends of the second inner electrode heat exchanger (2) respectively pass through the bottom of the end of the inner electrode and are used to connect the inlet and outlet pipes of the external cooling mechanism. The external electrode heat exchanger (3) is spiral-shaped and is used for installation along the extension direction of the external electrode. The tube wall of the external electrode heat exchanger (3) is in contact with the outer wall of the external electrode. The two ends of the external electrode heat exchanger (3) are respectively used for the inlet and outlet pipes of the external cooling mechanism.

2. The combined heat exchanger suitable for a plasma gun according to claim 1, characterized in that: The height of the first inner electrode heat exchanger (1) is 150-250 mm, the tube diameter is 4-6 mm, the pitch is 4-12 mm, and the number of turns is 10-30; and / or the material of the first inner electrode heat exchanger (1) is pure aluminum or pure copper, and the pressure resistance performance of the first inner electrode heat exchanger (1) is greater than 1.0 MPa.

3. The combined heat exchanger suitable for a plasma gun according to claim 1, characterized in that: If the second inner electrode heat exchanger (2) is wound by a round tube, the outer diameter is 180-220 mm, the inner diameter is 120-160 mm, the tube diameter is 6-10 mm, the pitch is 6-10 mm, and the number of turns is 4-8; and / or the material of the second inner electrode heat exchanger (2) is pure aluminum or pure copper, and the pressure resistance performance of the second inner electrode heat exchanger (2) is greater than 1.0 MPa.

4. The combined heat exchanger suitable for a plasma gun according to claim 1, characterized in that: The height of the outer electrode heat exchanger (3) is 200-300 mm, the tube diameter is 6-10 mm, the pitch is 10-20 mm, and the number of turns is 10-20; and / or the pressure resistance performance of the outer electrode heat exchanger (3) is greater than 1.0 MPa.

5. The combined heat exchanger suitable for a plasma gun according to claim 1, characterized in that: The tube wall of the first inner electrode heat exchanger (1) is connected to the inner wall of the inner electrode via a heat-conducting adhesive, and the two ends of the first inner electrode heat exchanger (1) are connected to the inlet and outlet pipes of the cooling mechanism via vacuum-specific joints; and / or, the two ends of the second inner electrode heat exchanger (2) are connected to the inlet and outlet pipes of the cooling mechanism via vacuum-specific joints; And / or, the tube wall of the external electrode heat exchanger (3) is connected to the outer wall of the external electrode via a heat-conducting adhesive, and the two ends of the external electrode heat exchanger (3) are connected to the inlet and outlet pipes of the cooling mechanism via vacuum-specific joints.

6. The combined heat exchanger suitable for a plasma gun according to claim 1, characterized in that: The second inner electrode heat exchanger (2) is provided with fins, the fins have a height of 1 to 3 mm, a thickness of 0.3 to 0.8 mm, and a spacing of 0.3 to 0.8 mm.

7. A plasma gun with high heat dissipation, comprising the combined heat exchanger suitable for a plasma gun as claimed in any one of claims 1 to 6, characterized in that: It also includes an inner electrode (4) and an outer electrode (5), wherein a plasma channel is formed between the outer wall of the inner electrode (4) and the inner wall of the outer electrode (5); the inner electrode (4) includes an inner electrode extension portion (41) and an inner electrode end portion (42), wherein the inner electrode end portion (42) is located at the bottom of the inner electrode extension portion (41) and extends in a direction away from the inner electrode extension portion (41); The first inner electrode heat exchanger (1) is arranged in the inner cavity of the inner electrode extension (41), and the tube wall of the first inner electrode heat exchanger (1) is in contact with the inner wall of the inner electrode (4); the bottom of the inner electrode end (42) is provided with an end groove (42.1), and the second inner electrode heat exchanger (2) is arranged in the end groove (42.1).

8. The plasma gun with high heat dissipation according to claim 7, characterized in that: It also comprises a heat dissipation plate (6), wherein the second inner electrode heat exchanger (2) is arranged in the heat dissipation plate (6), and the heat dissipation plate (6) is arranged in the end slot (42.1).

9. The plasma gun with high heat dissipation according to claim 8, characterized in that: The heat dissipation plate (6) is connected to the inner wall of the end slot (42.1) via heat dissipation glue.

10. The plasma gun with high heat dissipation according to claim 8 or 9, characterized in that: The heat dissipation plate (6) has an outer diameter of 180 to 220 mm and an inner diameter of 120 to 160 mm.

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