High-entropy alloy nano dot matrix modified metal mirror surface material and preparation method thereof

Abstract

The invention discloses a high-entropy alloy nano dot matrix modified metal mirror surface material and a preparation method thereof.The preparation method comprises the steps that a high-entropy alloy block material is prepared from a high-entropy alloy powder material through a selective laser melting technology, and the microstructure of the material is regulated and controlled through heat treatment to obtain the high-entropy alloy nano dot matrix modified metal mirror surface material. And the high-entropy alloy block obtained after heat treatment is subjected to ultra-precision cutting machining, and the metal mirror surface material with the precision optical mirror surface quality is obtained. According to the preparation method, machining of the high-entropy alloy with the mirror surface quality can be achieved, precise control over the nano lattice structure can be achieved through the heat treatment technology, a new technical path is provided for enhancement and application of the plasmon resonance effect, and the preparation method has wide application prospects in the fields of optics, electricity, energy and the like.

Description

Technical Field

[0001] The invention relates to a metal mirror material modified by a high entropy alloy nano-lattice, and also relates to a preparation method of the metal mirror material modified by the high entropy alloy nano-lattice. Background Art

[0002] With the continuous deepening of nano-optics and plasmon research, metal nanostructures have shown important application potential in the fields of advanced optical materials, sensing technology and energy conversion. When incident light hits the metal nanostructure, the light couples with the free electrons in the metal, inducing the generation of localized surface plasmon resonance (LSPR). This resonance effect can significantly enhance the electromagnetic field intensity near the metal surface, which can be enhanced by more than 1000 times compared with the incident light field, forming a localized strong light field distribution. By adding a mirror substrate or nano-lattice structure to the metal surface, the plasmon resonance effect can be further regulated to enhance the electromagnetic field energy and distribute it more evenly. Based on this phenomenon, mirror materials with regularized metal nano-lattices are widely used in the preparation of surface enhanced Raman scattering (SERS) sensors, high-efficiency solar photovoltaic materials, high-sensitivity detection equipment and nonlinear optical devices. The realization of these functions depends on the precise control of the size and shape of the nano-lattice, as well as the ultra-low roughness of the mirror surface, so as to ensure that the resonance effect of the plasmon is optimized.

[0003] At present, the processing methods commonly used to prepare metal mirror nanostructures mainly include the following: Etching method: by covering the metal film on the substrate, a regular nanostructure is etched out by chemical or physical etching methods. However, it is limited by the etching accuracy, it is difficult to achieve a large-area, high-uniformity nano-dot array, and the process is complex and the cost is high. Template method: using the prepared template structure, the metal is deposited into the corresponding nanostructure by thermal evaporation or electrochemical deposition technology. This method is limited by the resolution and reusability of the template, the production efficiency is low, and it is difficult to achieve three-dimensional nano-dot array design. Nanoimprint technology (NIL): an arrayed nanostructure is imprinted on the metal surface through a micro-nano mold, but this method has the problem of mold wear, and high pressure is required when used on the surface of hard materials, which increases the difficulty of manufacturing. Focused ion beam etching (FIB): using a focused ion beam to scratch the nanostructure on the metal surface, it has high processing accuracy, but low processing efficiency. It is only suitable for the preparation of small-area nanostructures and is not suitable for mass production.

[0004] The above methods generally face the following problems when realizing the preparation of metal mirror nano-lattice structures: Insufficient surface quality: Insufficient processing accuracy or process damage leads to high surface roughness, which affects the mirror effect and plasmon resonance performance. Complex process and high cost: Most traditional methods require multi-step manufacturing, low efficiency, and are difficult to apply to high-strength metals or heterogeneous structural materials. Inflexible size and structure control: Many processes have difficulty in controlling the adjustability of nano-lattice size, shape and distribution, which limits the application scenarios of the finished product. Therefore, it is urgent to develop a method for preparing metal mirror materials with stronger size control capabilities, lower nano-scale surface roughness and suitable for large-scale industrial production. Summary of the invention

[0005] Purpose of the invention: The purpose of the present invention is to address the deficiencies in the preparation of metal mirror nano-lattice structures in the prior art, and to provide a method for preparing a metal mirror material modified with a high-entropy alloy nano-lattice based on a combination of "additive manufacturing" and "subtractive manufacturing" and utilizing laser selective melting and ultra-precision cutting technology, as well as the prepared metal mirror material.

[0006] Technical solution: The present invention discloses a method for preparing a metal mirror material modified by a high entropy alloy nano-lattice. The preparation method comprises taking a high entropy alloy powder material, preparing a high entropy alloy block material by laser selective melting technology, regulating the material microstructure by a heat treatment process, and performing ultra-precision cutting on the heat-treated high entropy alloy block to obtain a metal mirror material with a precision optical mirror surface quality modified by a nano-lattice. The precision optical mirror surface quality refers to a roughness range of Ra≈0.01 to 0.1 μm, and its surface quality is suitable for medium and high precision optical components.

[0007] Wherein, the preparation method comprises the following steps:

[0008] (1) Laser selective melting: Take powdered high entropy alloy powder material and use laser selective melting technology to manufacture high entropy alloy block material with regularly distributed cellular structure;

[0009] (2) Heat treatment to control microstructure: The high entropy alloy bulk material obtained in step (1) is subjected to a heat treatment process, and annealing, aging quenching and tempering are performed in sequence to induce the generation of a large number of nanoparticles at the edge and inside of the cellular array. The size and distribution of the nanoparticles are controlled by controlling the heat treatment temperature, time, environment and cooling method, while improving the mechanical properties of the material and providing a basis for controlling the localized surface plasmon effect, so that the double-precipitated nanoparticles are regularly embedded in the cellular structure, thereby obtaining a high entropy alloy bulk modified by a regular nano-precipitated phase array.

[0010] (3) Ultra-precision cutting: The high-entropy alloy block obtained in step (1) is subjected to ultra-precision cutting with a cutting depth of 1-3 μm and multiple cutting processes are performed until the surface is flat.

[0011] Wherein, in step (1), the high entropy alloy powder material is: Fe: 28-30%; Co: 28-30%; Ni: 28-30%; Al: 6-8%; Ti: 6-8% (atomic percentage).

[0012] Among them, in step (1), the laser selective melting technology is to place the above-mentioned high entropy alloy powder in a powder cylinder, spread the powder layer by layer into the molding bin and print it layer by layer, and the printing parameters are: laser power is 150-210W, laser spot diameter is 60μm, layer thickness is 25-50μm, and scanning speed is 700-1200mm / s.

[0013] Wherein, in step (2), the annealing is carried out at a temperature of 500-600°C for 2-6 hours; the aging quenching is carried out at a temperature of 720-880°C for 3-4 hours; and the tempering is carried out at a temperature of 200-300°C for 2-4 hours.

[0014] Wherein, in step (2), the particle size of the precipitation strengthening particles after heat treatment is controlled between 30-300nm and 150-1000nm.

[0015] Among them, in step (3), the cutting process has the following process parameters: spindle speed 800-1200rpm, feed speed 1.5-3.5mm / min, cutting environment is oil mist environment, and the cutting tool is cubic boron nitride (CBN) tool.

[0016] The high entropy alloy nano-lattice modified metal mirror material prepared by the above preparation method has a surface roughness Ra of 69-327nm.

[0017] Principle of the invention: The preparation method of the metal mirror material modified by the high entropy alloy nano-lattice of the present invention adopts the combination of additive manufacturing and subtractive manufacturing technology, reduces the complex links in the traditional multi-step process, and directly generates a regularly distributed cellular square matrix structure material through the SLM process, and then supplemented by heat treatment and cutting, without the need for subsequent template addition, reducing production costs and improving processing efficiency. First, a regular cellular square matrix structure is generated by laser selective melting, laying the foundation for the formation of a natural nano-lattice; then, heat treatment is performed to induce the formation of a nanoparticle lattice; finally, the manufacturing process is precisely controlled by ultra-precision cutting technology to obtain a metal mirror material with a precise optical mirror surface quality.

[0018] Specifically, the present invention firstly manufactures a high entropy alloy block of a specific chemical composition by laser selective melting technology. The SLM process forms a uniform regular cellular matrix (length and width of about 500nm) inside the high entropy alloy, which provides a basis for generating the required regular nano-lattice structure and avoids the additional template design and preparation links in the traditional method. The high entropy alloy block is subjected to a heat treatment process with specific parameters, which can induce the generation of a large number of nanoparticles at the edge and inside of the cellular matrix. By regulating the heat treatment temperature and time, the size and distribution of the nanoparticles can be accurately controlled to achieve the precise design of the mirror nano-lattice structure. For example, the printed high entropy alloy block is first annealed at a temperature of 500-600℃ for 2-6 hours and then cooled with the furnace. This process effectively eliminates the residual stress in the printing process without changing the microstructure of the material. Subsequently, the high entropy alloy is subjected to aging quenching treatment at a temperature of 720-880℃ for 3-4 hours of water cooling. This process can cause nanoparticles of different sizes to precipitate inside the material along the inside and boundary of the cellular structure. Finally, the high entropy alloy is tempered at 200-300°C for 2-4 hours and then cooled in the furnace. This process can eliminate the residual stress generated during the quenching process and facilitate the subsequent ultra-precision cutting process. Compared with chemical etching and mold stamping, this method is more flexible and efficient, and has a strong ability to control size.

[0019] Therefore, through precision heat treatment and subtractive manufacturing processes, the present invention can significantly reduce the surface roughness of the mirror surface to reach the level of precision optical mirroring (nanoscale surface roughness); compared with traditional etching or physical imprinting methods, it can better meet the requirements of high surface quality of optical devices.

[0020] Beneficial effects: Compared with the prior art, the present invention has the following significant advantages: (1) Based on the excellent properties of high-entropy alloy materials, the present invention processes nanostructures on high-hardness, high-entropy materials, breaking through the limitations of traditional processing methods on material strength, greatly expanding the scope of technical application, and greatly reducing material costs; (2) The preparation method of the present invention can not only achieve high-entropy alloy metal mirror processing with excellent surface mirror quality, but also use heat treatment to achieve precise control of the nano-lattice structure, providing a new technical path for the enhancement and application of plasmon resonance effects, and has broad application prospects in the fields of optics, electricity, and energy. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 Schematic diagram of the preparation method of the present invention, wherein Figure (a) is a schematic diagram of step 1, and Figure (b) is a schematic diagram of step 3;

[0022] Figure 2Figure 2 is a microstructure diagram of a high entropy alloy bulk, where (a) shows a regularly distributed cellular matrix of a high entropy alloy bulk sample that has not been heat treated, and (b-f) shows double precipitated nanoparticles of different morphologies of high entropy alloy bulk samples that have been aging-quenched at 720°C, 760°C, 800°C, 840°C, and 880°C, respectively.

[0023] Figure 3 The microstructure diagram of the material after aging treatment at 760℃ and its tensile stress-strain diagram (optimal tensile performance state);

[0024] Figure 4 Figure 2 shows the particle size distribution of double-precipitated nanoparticles after aging treatment at 760°C, where (a) is particle L1. 2 Phase, Figure (b) is particle L2 1 Mutually;

[0025] Figure 5 The surface roughness of the printed high entropy alloy block, where (a) is the three-dimensional surface morphology and (b) is the cross-sectional profile of the surface roughness;

[0026] Figure 6 The surface roughness diagram of the high entropy alloy block after ultra-precision cutting after aging treatment at 760℃ (cutting feed rate: 1.5mm / min), where Figure (a) is the surface optical microscope image, Figure (b) is the surface three-dimensional morphology image, and Figure (c) is the cross-sectional profile of the surface roughness;

[0027] Figure 7 The surface roughness diagram of the high entropy alloy block after ultra-precision cutting after aging treatment at 840℃ (cutting feed rate: 1.5mm / min), where Figure (a) is the three-dimensional surface morphology diagram, and Figure (b) is the optical microscope diagram and the cross-sectional profile diagram of the surface roughness;

[0028] Figure 8 The surface roughness diagram of the high entropy alloy block after ultra-precision cutting after aging treatment at 760℃ (cutting feed rate: 2.5mm / min), where Figure (a) is the three-dimensional surface morphology diagram, and Figure (b) is the optical microscope diagram and the cross-sectional profile diagram of the surface roughness;

[0029] Fig. 9 This is the surface roughness diagram of the high entropy alloy block after ultra-precision cutting after aging treatment at 760℃ (cutting feed speed: 3.5mm / min), where Figure (a) is the three-dimensional surface morphology diagram, and Figure (b) is the optical microscope image and the cross-sectional profile diagram of its surface roughness. DETAILED DESCRIPTION

[0030] The technical scheme of the present invention is further described below in conjunction with the examples. The test materials used in the examples can all be purchased through conventional channels.

[0031] Example 1

[0032] The method for preparing the metal mirror material modified by the high entropy alloy nano-lattice of the present invention comprises the following steps:

[0033] (1) Laser selective melting molding: Take powdered high entropy alloy material, the high entropy alloy powder composition is Fe29.32, Co28.72, Ni28.64, Al6.78, Ti6.56 (at.%), and use laser selective melting technology to manufacture high entropy alloy block material with regularly distributed cellular structure modification. First, place the high entropy alloy powder in the powder cylinder, spread the powder layer by layer into the molding bin and print it layer by layer. The printing parameters are: laser power of 180W, laser spot diameter of 60μm, layer thickness of 30μm, scanning speed of 800mm / s;

[0034] (2) Heat treatment to regulate microstructure: The high entropy alloy block material obtained in step (1) is subjected to a heat treatment process, and annealing, aging quenching and tempering are performed in sequence, annealing at 500°C, furnace cooling for 4 hours; aging quenching: 760°C, water cooling for 4 hours; tempering: 250°C, furnace cooling for 4 hours, so that the double-precipitated nanoparticles are regularly embedded in the cellular structure, and a high entropy alloy block is obtained, whose microstructure is as follows Figure 2 As shown in (c), the original cellular organization gradually degenerates to form a regularly distributed nanolattice structure modified by double nanoparticles, in which the larger particle is L1 2 Phase, smaller particles are L2 1 phase; among them, the double precipitated nanoparticles are nearly spherical in structure, with average diameters of 31.5nm and 187.2nm, respectively. Figure 4 ; The alloy has excellent mechanical properties, and its tensile properties are Figure 3 As shown, its tensile strength is as high as 1.6GPa and its plasticity is about 11%;

[0035] (3) Ultra-precision cutting: The high entropy alloy block obtained in step (2) is subjected to ultra-precision cutting, with a spindle speed of 1200 rpm, a feed rate of 1.5 mm / min, a cutting depth of 3 μm, and multiple cuttings until the surface is flat. The cutting tool is a cubic boron nitride tool, and the cutting environment is an oil mist environment. The mirror roughness is as follows: Figure 6 , the roughness Ra is 69nm, where Figure 6 (a) is the surface light microscope image. Figure 6 (b) is the three-dimensional surface morphology. Figure 6 (c) Cross-sectional profile of surface roughness.

[0036] Example 2

[0037] Compared with Example 1, the aging quenching temperature is adjusted to 840° C. The preparation method of the metal mirror material modified by the high entropy alloy nano-lattice of the present invention comprises the following steps:

[0038] (1) Laser selective melting molding: Take powdered high entropy alloy material, the high entropy alloy powder composition is Fe29.32, Co28.72, Ni28.64, Al6.78, Ti6.56 (at.%), and use laser selective melting technology to manufacture high entropy alloy block material with regularly distributed cellular structure modification. First, place the high entropy alloy powder in the powder cylinder, spread the powder layer by layer into the molding bin and print it layer by layer. The printing parameters are: laser power of 180W, laser spot diameter of 60μm, layer thickness of 30μm, scanning speed of 800mm / s;

[0039] (2) Heat treatment to regulate microstructure: The high entropy alloy block material obtained in step (1) is subjected to a heat treatment process, and annealing, aging quenching and tempering are performed in sequence, annealing at 500°C, furnace cooling for 4 hours; aging quenching: 840°C, water cooling for 4 hours; tempering: 250°C, furnace cooling for 4 hours, so that the double-precipitated nanoparticles are regularly embedded in the cellular structure to obtain a high entropy alloy block; its microstructure is as follows Figure 2 In (e), the original cellular structure degenerates to form a regularly distributed nanolattice structure modified by double nanoparticles, and the distributed nanoparticles are larger than the microstructure of 840℃ aging quenching;

[0040] (3) Ultra-precision cutting: The high entropy alloy block obtained in step (2) is subjected to ultra-precision cutting, with a spindle speed of 1200 rpm, a feed rate of 1.5 mm / min, a cutting depth of 3 μm, and multiple cuttings until the surface is flat. The cutting tool is a cubic boron nitride tool, and the cutting environment is an oil mist environment. The mirror roughness is as follows: Figure 7 , the roughness Ra is 124nm, where Figure 7 (a) is the three-dimensional surface morphology. Figure 7 (b) is a light microscope image and a cross-sectional profile of its surface roughness.

[0041] Example 3

[0042] Compared with Example 1, the feed speed is adjusted to 2.5 mm / min. The preparation method of the metal mirror material modified by the high entropy alloy nano-lattice of the present invention comprises the following steps:

[0043] (1) Laser selective melting molding: Take powdered high entropy alloy material, the high entropy alloy powder composition is Fe29.32, Co28.72, Ni28.64, Al6.78, Ti6.56 (at.%), and use laser selective melting technology to manufacture high entropy alloy block material with regularly distributed cellular structure modification. First, place the high entropy alloy powder in the powder cylinder, spread the powder layer by layer into the molding bin and print it layer by layer. The printing parameters are: laser power of 180W, laser spot diameter of 60μm, layer thickness of 30μm, scanning speed of 800mm / s;

[0044] (2) Heat treatment to regulate microstructure: The high entropy alloy block material obtained in step (1) is subjected to a heat treatment process, and annealing, aging quenching and tempering are performed in sequence, annealing at 500°C, furnace cooling for 4 hours; aging quenching: 760°C, water cooling for 4 hours; tempering: 250°C, furnace cooling for 4 hours, so that the double-precipitated nanoparticles are regularly embedded in the cellular structure, and a high entropy alloy block is obtained, whose microstructure is as follows Figure 2 As shown in (c), the original cellular organization gradually degenerates to form a regularly distributed nanolattice structure modified by double nanoparticles, in which the larger particle is L1 2 Phase, smaller particles are L2 1 phase; among them, the double precipitated nanoparticles are nearly spherical in structure, with average diameters of 31.5nm and 187.2nm, respectively. Figure 4 ; The alloy has excellent mechanical properties, and its tensile properties are Figure 3 As shown, its tensile strength is as high as 1.6GPa and its plasticity is about 11%;

[0045] (3) Ultra-precision cutting: The high entropy alloy block obtained in step (2) is subjected to ultra-precision cutting, with a spindle speed of 1200 rpm, a feed rate of 2.5 mm / min, a cutting depth of 3 μm, and multiple cuttings until the surface is flat. The cutting tool is a cubic boron nitride tool, and the cutting environment is an oil mist environment. The mirror roughness is as follows: Figure 8 , the roughness Ra is 176nm, where Figure 8 (a) is the three-dimensional surface morphology. Figure 8 (b) is a light microscope image and a cross-sectional profile of its surface roughness.

[0046] Example 4

[0047] Compared with Example 1, the feed speed is adjusted to 3.5 mm / min. The preparation method of the metal mirror material modified by the high entropy alloy nano-lattice of the present invention comprises the following steps:

[0048] (1) Laser selective melting molding: Take powdered high entropy alloy material, the high entropy alloy powder composition is Fe29.32, Co28.72, Ni28.64, Al6.78, Ti6.56 (at.%), and use laser selective melting technology to manufacture high entropy alloy block material with regularly distributed cellular structure modification. First, place the high entropy alloy powder in the powder cylinder, spread the powder layer by layer into the molding bin and print it layer by layer. The printing parameters are: laser power of 180W, laser spot diameter of 60μm, layer thickness of 30μm, scanning speed of 800mm / s;

[0049] (2) Heat treatment to regulate microstructure: The high entropy alloy block material obtained in step (1) is subjected to a heat treatment process, and annealing, aging quenching and tempering are performed in sequence, annealing at 500°C, furnace cooling for 4 hours; aging quenching: 760°C, water cooling for 4 hours; tempering: 250°C, furnace cooling for 4 hours, so that the double-precipitated nanoparticles are regularly embedded in the cellular structure, and a high entropy alloy block is obtained, whose microstructure is as follows Figure 2 As shown in (c), the original cellular organization gradually degenerates to form a regularly distributed nanolattice structure modified by double nanoparticles, in which the larger particle is L1 2 Phase, smaller particles are L2 1 phase; among them, the double precipitated nanoparticles are nearly spherical in structure, with average diameters of 31.5nm and 187.2nm, respectively. Figure 4 ; The alloy has excellent mechanical properties, and its tensile properties are Figure 3 As shown, its tensile strength is as high as 1.6GPa and its plasticity is about 11%;

[0050] (3) Ultra-precision cutting: The high entropy alloy block obtained in step (2) is subjected to ultra-precision cutting, with a spindle speed of 1200 rpm, a feed rate of 3.5 mm / min, a cutting depth of 3 μm, and multiple cuttings until the surface is flat. The cutting tool is a cubic boron nitride tool, and the cutting environment is an oil mist environment. The mirror roughness is as follows: Fig. 9 , the roughness Ra is 327nm, where Fig. 9 (a) is the three-dimensional surface morphology. Fig. 9 (b) is a light microscope image and a cross-sectional profile of its surface roughness.

[0051] Comparative Example 1

[0052] Compared with Example 1, the uncut operation steps are:

[0053] (1) Laser selective melting molding: Take powdered high entropy alloy material, the high entropy alloy powder composition is Fe29.32, Co28.72, Ni28.64, Al6.78, Ti6.56 (at.%), and use laser selective melting technology to manufacture high entropy alloy block material with regularly distributed cellular structure modification. First, place the high entropy alloy powder in the powder cylinder, spread the powder layer by layer into the molding bin and print it layer by layer. The printing parameters are: laser power of 180W, laser spot diameter of 60μm, layer thickness of 30μm, scanning speed of 800mm / s;

[0054] (2) Heat treatment to regulate microstructure: The high entropy alloy block material obtained in step (1) is subjected to a heat treatment process, and annealing, aging quenching and tempering are performed in sequence, annealing at 500°C, furnace cooling for 4 hours; aging quenching: 760°C, water cooling for 4 hours; tempering: 250°C, furnace cooling for 4 hours, so that the double-precipitated nanoparticles are regularly embedded in the cellular structure, and a high entropy alloy block is obtained, whose microstructure is as follows Figure 2 As shown in (c), the original cellular organization gradually degenerates to form a regularly distributed nanolattice structure modified by double nanoparticles, in which the larger particle is L1 2 Phase, smaller particles are L2 1 phase; among them, the double precipitated nanoparticles are nearly spherical in structure, with average diameters of 31.5nm and 187.2nm, respectively. Figure 4 ; The alloy has excellent mechanical properties, and its tensile properties are Figure 3 As shown, its tensile strength is as high as 1.6GPa and its plasticity is about 11%;

[0055] (3) Without ultra-precision cutting, the surface roughness is Figure 5 , the roughness Ra is 13.4μm, where Figure 5 (a) is the three-dimensional surface morphology and (b) is the cross-sectional profile of the surface roughness.

[0056] Therefore, the preparation method of the present invention breaks through the limitation of traditional processing methods on material strength, greatly expands the scope of technical application, and greatly reduces the material cost; based on the excellent performance of high entropy alloy materials, nanostructures are processed on high hardness and high entropy materials, which not only realizes high entropy alloy metal mirror processing with excellent surface mirror quality, but also can use heat treatment to achieve precise control of nano lattice structure, which provides a new technical path for the enhancement and application of plasmon resonance effect, and has broad application prospects in optics, electricity, energy and other fields.

Claims

1. A method for preparing a metal mirror material modified by a high entropy alloy nano-lattice, characterized in that: The preparation method comprises the following steps: taking a high entropy alloy powder material, preparing a high entropy alloy block material by laser selective melting technology, regulating the material microstructure by heat treatment, and performing ultra-precision cutting on the heat-treated high entropy alloy block to obtain a metal mirror material with a precise optical mirror surface quality.

2. The preparation method according to claim 1, characterized in that: The preparation method comprises the following steps: (1) Laser selective melting: Take high entropy alloy powder material and use laser selective melting technology to prepare high entropy alloy block material with regular cellular arrays evenly distributed inside; (2) heat treatment to control microstructure: the high entropy alloy bulk material obtained in step (1) is subjected to annealing, aging quenching and tempering in sequence to obtain a high entropy alloy bulk modified with regular nano-precipitate phase arrays; (3) Ultra-precision cutting: The high-entropy alloy block obtained in step (2) is subjected to ultra-precision cutting by multiple cutting operations until the surface is smooth.

3. The preparation method according to claim 2, characterized in that: In step (1), the atomic percentages of the high entropy alloy powder material are: Fe: 28-30%; Co: 28-30%; Ni: 28-30%; Al: 6-8%; Ti: 6-8%.

4. The preparation method according to claim 2, characterized in that: In step (1), the laser selective melting technology is to place the above-mentioned high entropy alloy powder in a powder cylinder, spread the powder layer by layer into the molding bin and print it layer by layer, and the printing parameters are: laser power is 150-210W, laser spot diameter is 60μm, layer thickness is 25-50μm, and scanning speed is 700-1200mm / s.

5. The preparation method according to claim 1, characterized in that: In step (2), the annealing is performed at a temperature of 500-600°C for 2-6 hours; the aging quenching is performed at a temperature of 740-880°C for 3-4 hours; and the tempering is performed at a temperature of 200-300°C for 2-4 hours.

6. The preparation method according to claim 1, characterized in that: In step (2), the particle size of the precipitation strengthening particles after heat treatment is controlled between 30-300nm and 150-1000nm.

7. The preparation method according to claim 1, characterized in that: In step (3), the cutting process has the following process parameters: spindle speed 800-1200 rpm, feed speed 1.5-3.5 mm / min, cutting environment is oil mist environment, and the cutting tool is a cubic boron nitride tool.

8. A metal mirror material modified with a high entropy alloy nano-lattice prepared by the preparation method according to any one of claims 1 to 7, characterized in that: The surface roughness Ra of the metal mirror material is 69-327 nm.

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