An anti-pollution vacuum ultraviolet ionization coating method

Abstract

The present invention discloses an anti-pollution vacuum ultraviolet ionization coating method and device, which includes the following steps: installing a target and a mirror column in a cavity, and adjusting the slit size of a slit baffle between the mirror column and a part rack; evacuating the cavity, turning on an ultraviolet light source, introducing it into a vacuum coating chamber through a specific optical path, photoionizing gas-phase particles in the coating chamber into ions, improving the ionization rate, and realizing a vacuum coating process with adjustable ionization rate; by reflecting ultraviolet light into the cavity of the vacuum coating through a mirror, the present invention isolates the ultraviolet light source from the vacuum coating working area, effectively solves the problem that optical path components such as ultraviolet mirrors are contaminated during vacuum coating work, resulting in a reduction in the ultraviolet light reflection efficiency, and at the same time increases the bombardment area of the ultraviolet light beam on the surface of gas-phase particles or solid-phase targets through convex reflection, improving the efficiency of photoionization and vacuum coating.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor devices, relates to vacuum plating of metal materials, and specifically relates to a pollution-proof vacuum ultraviolet ionization plating method and device. Background Art

[0002] In the process of preparing thin films by vapor deposition, a high ionization rate is an important prerequisite for achieving effective control over the energy, direction, density, and distribution state of the ion beam. Furthermore, achieving relatively independent control over the ionization rates of different particles is an extremely difficult but extremely important technical requirement in the process of preparing thin films by vapor deposition. All currently used technical means to increase the ionization rate of particles in vapor deposition are to indiscriminately increase the ionization rate of all gas phase particles by introducing high energy. It is impossible to adjust the ionization rate ratio for different structures and optimize the control scheme, thus failing to achieve more precise targeted control, which greatly limits the development of a new generation of thin films with increasingly complex structures and compositions.

[0003] The vacuum ultraviolet ionization device is based on the principle of photoelectric effect. It selects a vacuum ultraviolet light source with a certain wavelength of light to selectively ionize gas phase particles with specific ionization energy or atoms on the surface of solid target materials during vapor deposition, thereby selectively improving the ionization rate of a certain gas phase / solid phase particle. However, in the process of using vacuum ultraviolet light to photoionize different gas phase particles or solid surface atoms, the surface of the vacuum ultraviolet ionization device will be contaminated. Long-term accumulation will affect the emission of vacuum ultraviolet light, and then affect the particle ionization rate. The vacuum ultraviolet ionization device is expensive and difficult to replace later, which has a great impact on the efficiency and cost of vacuum ultraviolet ionization coating. Summary of the invention

[0004] The purpose of the present invention is to solve the problem of how to reduce the pollution of vacuum coating equipment by ultraviolet light, and to provide a pollution-proof vacuum ultraviolet ionization coating method and device.

[0005] The purpose of the present invention can be achieved through the following technical solutions:

[0006] A pollution-proof vacuum ultraviolet ionization coating method comprises the following steps:

[0007] Step 1: Place the parts rack into the chamber of the vacuum coating equipment, install the target material at the front of the chamber, install the ion source on the left, install the reflector column on the right, and adjust the slit size of the slit baffle between the reflector column and the parts rack according to the size of the parts on the parts rack.

[0008] Step 2: Evacuate the cavity, turn on the ion source and introduce a rare gas, turn on the magneto so that the part rack rotates, set the wavelength of the ultraviolet light source according to the ionization energy of different target material elements, turn on the ultraviolet light source so that the ultraviolet light passes through the transparent glass and irradiates the mirror on the mirror column, and the ultraviolet light reflected by the mirror diffuses into the cavity through the slit of the slit baffle.

[0009] Step 3: Turn on the cathode plate and anode plate in the vacuum coating equipment. Under the action of the electric field, the sputtered gas-phase particles in the target material are introduced into the cavity through the ion source, and after being photoionized by the ultraviolet light, they bombard the surface of the parts on the part rack to deposit a film, and the parts are vacuum coated.

[0010] Step 4: When the reflectivity of the mirror in the mirror column decreases due to vacuum coating and is about to fail, rotate the mirror column to rotate the new mirror area to the position of the failed mirror, so that the vacuum coating equipment continues to coat until the coating is completed.

[0011] Further, the optical path of the ultraviolet light emitted by the ultraviolet light source and totally reflected by the mirror column passes through the slit of the slit baffle.

[0012] Further, the rare gas is one of argon, neon and krypton.

[0013] An anti-pollution vacuum ultraviolet ionization coating device includes a cavity, a part rack, an ultraviolet light source, an ion source and a target material, and also includes a mirror column and a slit baffle.

[0014] The part rack is rotatably arranged in the center of the cavity, the target material is arranged on the front side of the cavity, the ion source is arranged on the left side, the mirror column is arranged on the right side, and the slit baffle is slidably arranged on the inner wall of the cavity on one side of the mirror column.

[0015] An ultraviolet light source is arranged on one side of the mirror column. The ultraviolet light source is arranged outside the cavity. A transparent glass is arranged on the cavity between the ultraviolet light source and the mirror column. A rotating device is fixedly connected below the mirror column, and a moving rod is arranged below the slit baffle.

[0016] Further, the mirror column is semi-circular, rectangular mirrors are equiangularly distributed on the arc surface of the mirror column, and an anti-ultraviolet film is arranged on the mirror.

[0017] Further, a baffle slider is arranged on the slit baffle, and a chute is arranged on the outer side wall of the cavity. The baffle slider is slidably engaged in the chute.

[0018] Further, the angle between the ultraviolet light emitted by the ultraviolet light source and the mirror on the mirror column is the same as the angle between the slit of the slit baffle and the mirror.

[0019] Further, a moving gear is arranged at the position where the lower part of the slit baffle contacts the moving rod, and tooth threads are arranged at the lower end of the slit baffle, and the tooth threads are matched with the moving gear.

[0020] Further, the gear turntable of the rotating device is rotatably arranged inside the vacuum coating equipment. A clamping pin is clamped inside the tooth pattern of the gear turntable. The clamping pin is slidably arranged in a U-shaped groove. A spring is arranged at the tail end of the clamping pin. The tail end of the clamping pin is rotatably arranged on a fixed clamping plate. A fixed groove is arranged on the side wall of the U-shaped groove.

[0021] Further, the included angle between adjacent tooth patterns of the gear turntable is the same as the included angle between adjacent reflectors of the reflector column.

[0022] Advantages of the present invention:

[0023] (1) In the vacuum coating method of the present invention, ultraviolet light is reflected into the cavity of the vacuum coating equipment through a reflector, isolating the ultraviolet light source from the working area of the vacuum coating, effectively solving the problem that the ultraviolet light source is contaminated by the vacuum coating during work, resulting in a reduction in the ultraviolet light reflection efficiency, maintaining the emission intensity of the ultraviolet light, and dispersing and refracting the ultraviolet light through the slit baffle, increasing the photoionization area of the ultraviolet light beam on the gas-phase ions of the target material, and improving the efficiency of photoionization and vacuum coating.

[0024] (2) In the vacuum coating device of the present invention, by adjusting the size and position of the slit to adapt to parts of different volumes and ultraviolet light of different wavelengths; by arranging a rotating device below the reflector column and fixing the rotation angle, so that a new reflector replaces the position of the old reflector, only the anti-ultraviolet film on the surface of the new reflector needs to be removed, and the new reflector can continue to work, reducing the time for manual mirror replacement. When all the reflectors on the reflector column fail, a new reflector column can be replaced together with the gear turntable, greatly improving the work efficiency and saving manpower. Description of the drawings

[0025] The present invention will be further described below with reference to the drawings.

[0026] Figure 1 is a schematic structural diagram of the present invention;

[0027] Figure 2 is a top view of the present invention;

[0028] Figure 3 is a schematic structural diagram of the slit baffle and the moving rod of the present invention;

[0029] Figure 4 is a schematic structural diagram of the rotating device of the present invention;

[0030] In the figure: 1, cavity; 101, chute; 102, light-transmitting glass; 2, part rack; 3, target; 4, ultraviolet light source; 5, mirror column; 6, slit baffle; 601, baffle slider; 7, moving rod; 701, moving gear; 8, rotating device; 801, gear turntable; 802, pin; 803, fixed clamping plate; 804, spring; 805, U-shaped groove; 806, fixed groove; 9, ion source. Specific implementation mode

[0031] Next, in combination with the embodiments of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.

[0032] An anti-pollution vacuum ultraviolet ionization coating method, characterized by including the following steps:

[0033] Step 1: Place the part rack 2 into the cavity 1 of the vacuum coating equipment. Install the target 3 on the front side of the cavity 1, install the ion source 9 on the left side, and install the mirror column 5 on the right side. Adjust the slit size of the slit baffle 6 between the mirror column 5 and the part rack 2 according to the volume of the parts on the part rack 2.

[0034] Step 2: Evacuate the cavity 1, turn on the ion source 9 and introduce rare gas, turn on the magnetic motor to rotate the part rack 2, set the wavelength of the ultraviolet light source 4 according to the ionization energy of different target elements, turn on the ultraviolet light source 4 so that the ultraviolet light passes through the light-transmitting glass 102 and irradiates the mirror on the mirror column 5, remove the anti-ultraviolet film on the irradiated mirror, and the ultraviolet light reflected by the mirror diffuses into the cavity 1 through the slit of the slit baffle 6.

[0035] Step 3: Turn on the cathode plate and anode plate in the vacuum coating equipment. Under the action of the electric field, the gaseous particles sputtered from the target 3 are introduced into the cavity 1 through the ion source 9, and after being photoionized by ultraviolet light, they bombard the surface of the parts on the part rack 2 to deposit a film, and the parts are coated.

[0036] Step 4: When the reflectivity of the mirror in the mirror column 5 decreases due to vacuum coating and is about to fail, rotate the mirror column 5 to rotate the new mirror area to the position of the failed mirror, so that the vacuum coating equipment continues to coat until the coating is completed.

[0037] An anti-pollution vacuum ultraviolet ionization coating device includes a cavity 1, an ultraviolet light source 4, an ion source 9, and a target 3.

[0038] Please refer to Figure 1 - Figure 2As shown in the figure, a part rack 2 is rotatably arranged in the center of the cavity 1. A target 3 is arranged on the front side of the cavity 1, an ion source 9 is arranged on the left side, and a mirror column 5 is arranged on the right side. A slit baffle 6 is slidably arranged on the inner wall of the cavity 1 on one side of the mirror column 5. A baffle slider 601 is arranged on the slit baffle 6, and a chute 101 is arranged on the outer wall of the cavity 1. The baffle slider 601 is slidably engaged in the chute 101.

[0039] The mirror column 5 is semi-circular, and rectangular mirrors are equally angularly distributed on the arc surface of the mirror column 5. An anti-ultraviolet film is arranged on the mirror.

[0040] An ultraviolet light source 4 is arranged on one side of the mirror column 5. The ultraviolet light source 4 is arranged outside the cavity 1. A light-transmitting glass 102 is arranged on the cavity 1 between the ultraviolet light source 4 and the mirror column 5, so that the ultraviolet light emitted by the ultraviolet light source 4 passes through the light-transmitting glass 102 and irradiates onto the mirror column 5. The mirrors on the mirror column 5 reflect the ultraviolet light emitted by the ultraviolet light source 4, so that the reflected ultraviolet light enters the cavity 1 after the irradiation area is enlarged by the slit of the slit baffle 6. A rotating device 8 is fixedly connected below the mirror column 5, and a moving rod 7 is arranged below the slit baffle 6.

[0041] The light-transmitting glass 102 is fluoride glass.

[0042] Please refer to Figure 3 As shown in the figure, a moving gear 701 is arranged at the position where the lower part of the slit baffle 6 contacts the moving rod 7. Tooth patterns are arranged at the lower end of the slit baffle 6, and the tooth patterns are matched with the moving gear 701. The position and size of the slit baffle 6 are adjusted by rotating the moving rod 7. The base of the moving rod 7 is rotatably connected to the moving rod 7, and a rotating damping is arranged at the connection to stably position the adjusted slit baffle.

[0043] Please refer to Figure 4 As shown in the figure, the gear turntable 801 of the rotating device 8 is rotatably arranged in the vacuum coating equipment. A clamping pin 802 is clamped in the tooth pattern of the gear turntable 801. The clamping pin 802 is slidably arranged in a U-shaped groove 805. A fixed clamping plate 803 is rotatably arranged at the tail end of the clamping pin 802. A spring 804 is arranged at the tail end of the fixed clamping plate 803. Fixed grooves 806 are arranged on the side walls of the U-shaped groove 805.

[0044] The included angle between adjacent tooth patterns of the gear turntable 801 is the same as the included angle between adjacent mirrors of the mirror column 5.

[0045] Principle of the invention:

[0046] In the present invention, the ultraviolet light emitted by the ultraviolet light source 4 is reflected into the cavity 1 by the reflectors of the reflector column 5, and a light-transmitting glass 102 is arranged between the reflector column 5 and the ultraviolet light source 4 to isolate the ultraviolet light source 4 from the vacuum coating working area, effectively solving the problem that the ultraviolet light emission intensity of the ultraviolet light source 4 is reduced due to vacuum coating by the ion source 9 during operation. The ultraviolet light refracted and dispersed by the slit baffle 6 increases the illumination divergence angle of the ultraviolet light beam on the gas-phase particles (from the solid-phase target 3) in the coating chamber, improving the efficiency of photoionization; the size and position of the slit are adjusted by the moving rod 7 arranged below the slit baffle 6 to adapt to parts of different volumes and ultraviolet light of different wavelengths; by arranging a rotating device 8 below the reflector column 5, the fixing card plate 803 at the tail of the clamping pin 802 is pulled to the fixing groove 806 and rotated into the fixing groove 806 to fix the clamping pin 802. At this time, the gear turntable 801 can rotate, driving the reflector column 5 to rotate, and the rotation angle is fixed, so that a new reflector replaces the position of the old reflector. Then, the fixing card plate 803 is rotated, and the clamping pin 802 is clamped in the tooth pattern of the gear turntable 801 under the action of the spring 804 to fix the reflector column 5, so that the device can continue to work, reducing the time for manual mirror replacement. When all the reflectors on the reflector column 5 fail, only the reflector column 5 together with the gear turntable 801 needs to be replaced with a new one, greatly improving the work efficiency and saving manpower.

[0047] It should be noted that in this article, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device.

[0048] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A pollution-proof vacuum ultraviolet ionization coating method, characterized in that, It includes the following steps: Step 1: Place the part rack (2) into the cavity (1) of the vacuum coating equipment. Install the target (3) on the front side of the cavity (1), install the ion source (9) on the left side, and install the mirror column (5) on the right side. Adjust the slit size of the slit baffle (6) between the mirror column (5) and the part rack (2) according to the volume of the parts on the part rack (2). Step 2: Evacuate the cavity (1), turn on the ion source (9) and introduce a noble gas, turn on the magnetic motor to rotate the part rack (2), set the wavelength of the ultraviolet light source (4) according to the ionization energy of different target (3) elements, turn on the ultraviolet light source (4) to make the ultraviolet light pass through the light-transmitting glass (102) and irradiate the mirrors on the mirror column (5), remove the ultraviolet-proof film on the irradiated mirrors, and the ultraviolet light reflected by the mirrors is diffused into the cavity (1) through the slit of the slit baffle (6). Step 3: Turn on the cathode plate and anode plate in the vacuum coating equipment. Under the action of the electric field, the sputtered gas-phase particles in the target (3) are introduced into the cavity (1) through the ion source (9), and after being photoionized by the ultraviolet light, they bombard the surface of the parts on the part rack (2) and deposit a film to perform vacuum coating on the parts. Step 4: When the reflectivity of the mirrors in the mirror column (5) decreases due to vacuum coating and is about to fail, rotate the mirror column (5) to rotate the new mirror area to the position of the failed mirror, so that the vacuum coating equipment continues to coat until the coating is completed. One side of the mirror column (5) is provided with an ultraviolet light source (4), and the ultraviolet light source (4) is arranged outside the cavity (1).

2. The anti-pollution vacuum ultraviolet ionization coating method according to claim 1, characterized in that, The optical path of the ultraviolet light emitted by the ultraviolet light source (4) and totally reflected by the mirror column (5) passes through the slit of the slit baffle (6).

3. A method for anti-pollution vacuum ultraviolet ionization coating according to claim 1, characterized in that, The noble gas is one of argon, neon, and krypton.

4. A pollution-proof vacuum ultraviolet ionization coating device, comprising a cavity (1), a part rack (2), an ultraviolet light source (4), an ion source (9) and a target (3), characterized in that, It also includes a mirror column (5) and a slit baffle (6). The part rack (2) is rotatably arranged in the center of the cavity (1), the target (3) is arranged on the front side of the cavity (1), the ion source (9) is arranged on the left side, the mirror column (5) is arranged on the right side, and the slit baffle (6) is slidably arranged on the inner wall of the cavity (1) on one side of the mirror column (5). One side of the mirror column (5) is provided with an ultraviolet light source (4), the ultraviolet light source (4) is arranged outside the cavity (1), a light-transmitting glass (102) is arranged on the cavity (1) between the ultraviolet light source (4) and the mirror column (5), a rotating device (8) is fixedly connected below the mirror column (5), and a moving rod (7) is arranged below the slit baffle (6).

5. A pollution-proof vacuum ultraviolet ionization coating device according to claim 4, characterized in that, The mirror column (5) is semi-circular, rectangular mirrors are equally angularly distributed on the arc surface of the mirror column (5), and an ultraviolet-proof film is arranged on the mirrors.

6. A pollution-proof vacuum ultraviolet ionization coating device according to claim 4, characterized in that, The slit baffle (6) is provided with a baffle slider (601), and the outer side wall of the cavity (1) is provided with a chute (101), and the baffle slider (601) is slidably engaged in the chute (101).

7. A pollution-proof vacuum ultraviolet ionization coating device according to claim 4, characterized in that, The angle between the ultraviolet light emitted by the ultraviolet light source (4) and the mirrors on the mirror column (5) is the same as the angle between the slit of the slit baffle and the mirrors.

8. A contamination-proof vacuum ultraviolet ionization coating device according to claim 4, characterized in that, A moving gear (701) is arranged at the position where the lower part of the slit baffle (6) contacts the moving rod (7). The lower end of the slit baffle (6) is provided with tooth threads, which are matched with the moving gear (701).

9. The anti-pollution vacuum ultraviolet ionization coating device according to claim 4, characterized in that, The gear turntable (801) of the rotating device (8) is rotatably arranged in the vacuum coating equipment. A clamping pin (802) is clamped in the tooth threads of the gear turntable (801). The clamping pin (802) is slidably arranged in the U-shaped groove (805), and a spring (804) is arranged at the tail end of the clamping pin (802). The tail end of the clamping pin (802) is rotatably provided with a fixed clamping plate (803), and a fixed groove (806) is arranged on the side wall of the U-shaped groove (805).

10. A vacuum ultraviolet ionization coating device for anti-pollution according to claim 9, characterized in that, The included angle between adjacent tooth threads of the gear turntable (801) is the same as the included angle between adjacent reflectors of the mirror column (5).

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