Deposition equipment

Abstract

The invention provides deposition equipment which comprises a furnace tube body, a gas inlet system located at the gas inlet end of the furnace tube body, a gas outlet system located at the gas outlet end of the furnace tube body and a protection system located on the inner wall of the furnace tube body, the gas inlet system is used for introducing process gas into the furnace tube body, and the gas outlet system is used for extracting gas in the furnace tube body. The gas inlet system is used for providing process gas required by deposition, and the gas outlet system is used for extracting gas to ensure the purity of the process gas and the pressure of the reaction cavity. The protection system comprises a gas inlet pipeline and a gas extraction pipeline, the gas inlet pipeline is used for outputting protection gas, the gas extraction pipeline is used for extracting gas of the furnace tube body from the gas inlet pipeline side, the protection gas flows from the gas inlet pipeline to the gas extraction pipeline, and the gas inlet pipeline and the gas extraction pipeline are arranged on the inner wall of the furnace tube body. Therefore, the protective gas forms an isolation air curtain on the inner wall of the furnace tube main body to isolate the process gas from the inner wall of the furnace tube main body, thereby avoiding the fragmentation problem caused by coating of the inner wall of the furnace tube main body.

Description

Technical Field

[0001] The present invention relates to the field of photovoltaic or semiconductor manufacturing, and in particular to a deposition device. Background Art

[0002] Deposition equipment is a device used to perform a deposition process. The deposition equipment may include a furnace tube body, which is a tubular structure. The interior of the tubular structure is hollow and serves as a reaction chamber. A substrate can be placed in the reaction chamber to perform a deposition process on the substrate. Deposition equipment includes low-pressure chemical vapor deposition (LPCVD) equipment, atmospheric pressure chemical vapor deposition (APCVD) equipment, and plasma-enhanced chemical vapor deposition (PECVD).

[0003] However, in this structure, a thin film is easily formed on the inner wall of the furnace tube body, which makes it easy to break. In particular, when a heating device is provided on the outer periphery of the furnace tube body, the heating device is used to heat the inside of the furnace tube body during the deposition process, so that the reaction chamber inside the furnace tube body reaches the reaction temperature, thereby achieving deposition. Figure 1 As shown, it is a schematic diagram of the relative positions of the furnace tube body and the substrate inside. The cross section of the furnace tube body 11 is circular, and the substrate 100 can be placed parallel to the cross section (refer to Figure 1 1A in), or it can be set perpendicular to the section (refer to Figure 1 1B in). However, in this structure, heat is gradually transferred from the outside of the furnace tube body 11 to the substrate 100 in the middle of the furnace tube body 11. Figure 1 As shown by the arrow from the outside to the inside of the circle, the temperature of the furnace tube body 11 is much higher than the temperature of the substrate 100, resulting in a higher deposition rate of the film layer on the inner wall of the furnace tube body 11 than on the substrate 100. A large amount of deposition of the film layer can easily lead to the problem of fragmentation of the furnace tube body 11.

[0004] Currently, the service life of the furnace tube body 11 is extended by disposing an inner tube inside the furnace tube body 11 to form a double-tube structure or coating the furnace tube body 11 . However, the effect is not ideal. Summary of the Invention

[0005] In view of this, the purpose of the present disclosure is to provide a deposition device that forms a gas barrier on the inner wall of the furnace tube body, thereby isolating the process gas and the inner wall of the furnace tube body, avoiding the problem of fragmentation caused by the coating on the inner wall of the furnace tube body.

[0006] Some embodiments of the present disclosure provide a deposition device, comprising:

[0007] Furnace tube body;

[0008] The furnace tube body is located at the air inlet end of the furnace tube body and is used to introduce process gas into the interior of the furnace tube body;

[0009] An air outlet system located at the air outlet end of the furnace tube body, used for extracting the gas inside the furnace tube body;

[0010] The protection system is arranged on the inner wall of the furnace tube body, and the protection system includes an air inlet pipeline and an air exhaust pipeline. The air inlet pipeline is used to output the protective gas, and the air exhaust pipeline is used to extract the gas from the furnace tube body from the air inlet pipeline side.

[0011] Optionally, the air intake pipeline extends along the inner wall of the furnace tube body, and includes an air intake main pipeline and a plurality of air intake branch pipelines, wherein the air intake main pipeline extends along the axial direction of the furnace tube body, and the plurality of air intake branch pipelines extend along the circumferential direction of the furnace tube body and are respectively connected to different positions of the air intake main pipeline;

[0012] The exhaust pipeline extends along the inner wall of the furnace tube body, and includes an exhaust main pipeline and a plurality of exhaust branch pipelines. The exhaust main pipeline extends along the axial direction of the furnace tube body, and the plurality of exhaust branch pipelines extend along the circumferential direction of the furnace tube body and are respectively connected to different positions of the exhaust main pipeline.

[0013] The air intake branch pipeline and the air extraction branch pipeline are spaced apart in the axial direction of the furnace tube body.

[0014] Optionally, the angle between the extension plane of the air intake branch pipe and the axial direction of the furnace tube body is greater than 80°, and the angle between the extension plane of the air exhaust branch pipe and the axial direction of the furnace tube body is greater than 80°.

[0015] Optionally, if the first pipeline among the multiple air intake branch pipelines has air extraction branch pipelines on both the air intake end side and the air extraction end side, the first pipeline has first air holes on both the air intake end side and the air extraction end side; if the second pipeline among the multiple air extraction branch pipelines has air intake branch pipelines on both the air intake end side and the air extraction end side, the second pipeline has second air holes on both the air intake end side and the air extraction end side.

[0016] Optionally, the interval between the air intake sub-pipeline and the adjacent air extraction sub-pipeline is in the range of 100-500 mm, and the gas flow rate between the air intake sub-pipeline and the adjacent air extraction sub-pipeline is in the range of 5 L / min to 50 L / min.

[0017] Optionally, the air inlet pipeline and the air exhaust pipeline both extend spirally along the inner wall of the furnace tube body and are spaced apart in the axial direction of the furnace tube body.

[0018] Optionally, the air inlet pipeline has a first air hole on both the air inlet end side and the air extraction end side; the air extraction pipeline has a second air hole on both the air inlet end side and the air extraction end side.

[0019] Optionally, the size range of the first pores and the second pores is 0.5-3 mm, the distance between two adjacent first pores is 10-100 mm, and the distance between two adjacent second pores is 10-100 mm.

[0020] Optionally, the air inlet pipeline is connected to the protective gas passage of the furnace mouth flange at the air inlet end; the air exhaust pipeline is connected to the air exhaust passage of the furnace tail flange at the air outlet end.

[0021] Optionally, the furnace tube body is a quartz tube, and a heating device 1 is provided on the periphery of the quartz tube for heating the interior of the furnace tube body during the deposition process.

[0022] The present disclosure provides a deposition device, wherein the protection system includes an air intake pipeline and an air exhaust pipeline, wherein the air intake pipeline is used to output the protective gas, and the air exhaust pipeline is used to extract the gas from the furnace tube body from the air intake pipeline side, so that the protective gas flows from the air intake pipeline to the air exhaust pipeline. Since the air intake pipeline and the air exhaust pipeline are arranged on the inner wall of the furnace tube body, the protective gas constitutes an isolation gas curtain on the inner wall of the furnace tube body, thereby isolating the process gas from the inner wall of the furnace tube body, and avoiding the problem of fragmentation caused by the coating on the inner wall of the furnace tube body.

[0023] The present disclosure provides a deposition device, comprising:

[0024] Furnace tube body;

[0025] The furnace tube body includes an air intake system located at the air intake end of the furnace tube body, and is used to introduce process gas into the interior of the furnace tube body; the air intake system includes an air intake plate and a furnace door, the furnace door is connected to the air intake end of the furnace tube body via a furnace opening flange, and the air intake plate is located on a side of the furnace door away from the furnace tube body; the air intake plate includes a plurality of air intake connectors, and a plurality of first air paths that are respectively connected to the plurality of air intake connectors and are independent of each other; the furnace door includes a plurality of second air paths corresponding to the first air paths, the first ends of the plurality of second air paths are respectively connected to the plurality of first air paths, and the second ends lead to the interior of the furnace tube body;

[0026] The gas outlet system located at the gas outlet end of the furnace tube body is used to extract the gas inside the furnace tube body.

[0027] Optionally, the furnace door includes a plurality of first air inlet holes located at the first end and a plurality of air outlet slots located at the second end; the plurality of first air inlet holes are respectively connected to the plurality of first air passages;

[0028] The furnace door also includes multiple air distribution passages between the multiple first air inlet holes and the multiple air outlet grooves; the multiple air distribution passages are correspondingly connected to the first air inlet holes on the side facing the first air inlet holes, and the multiple air distribution passages are correspondingly connected to the air outlet grooves on the side facing the air outlet grooves, and the area of ​​the air distribution passages in the plane parallel to the surface of the furnace door is larger than the area of ​​the air outlet grooves in the plane parallel to the surface of the furnace door.

[0029] Optionally, the multiple air outlet grooves extend radially with the first center point as the center of the circle in a plane parallel to the surface of the furnace door, and are arranged circumferentially; the multiple air distribution passages extend radially with the second center point as the center of the circle in a plane parallel to the surface of the furnace door, and are distributed circumferentially.

[0030] Optionally, the multiple air outlet grooves include multiple groups of air outlet grooves, and the air outlet grooves in the same group are arranged radially at intervals with the first center point as the center in a plane parallel to the surface of the furnace door, and the air outlet grooves in the same group are connected to the same air distribution passage.

[0031] Optionally, the air distribution passage forms a fan-shaped area with the second center point as the center in a plane parallel to the surface of the furnace door.

[0032] Optionally, the furnace door further includes the plurality of guide grooves and the plurality of first air vents; one side of the plurality of guide grooves facing the plurality of first air inlet holes is connected to the plurality of first air inlet holes respectively, one side of the plurality of guide grooves facing the plurality of first air vents is connected to the inlets of the plurality of first air vents, and the outlets of the plurality of first air vents are connected to the air inlets of the plurality of gas distribution passages;

[0033] The multiple guide grooves extend radially with the third center point as the center in a plane parallel to the surface of the furnace door and are distributed circumferentially; the multiple first ventilation holes form a circular trajectory with the fourth center point as the center in a plane parallel to the surface of the furnace door.

[0034] Optionally, at least one of the second air paths includes multiple third sub-channels, the number of first air inlet holes, air distribution passages, guide grooves and first air vents in each third sub-channel is 1, and the number of air outlet grooves in each third sub-channel is greater than or equal to 1.

[0035] Optionally, the plurality of first air inlet holes belonging to the same second air path channel form a circular trajectory with the fifth center point as the center in a plane parallel to the surface of the furnace door, and the first air inlet holes of different second air paths are at different distances from the fifth center point;

[0036] In a plane parallel to the surface of the furnace door, the guide grooves belonging to the same second gas path channel have the same radial size, and the guide grooves in different second gas paths have different radial sizes.

[0037] Optionally, the first center point, the second center point, the third center point and the fourth center point are located on the center line of the furnace door, and the center line is perpendicular to the surface of the furnace door and passes through the center point of the surface of the furnace door.

[0038] Optionally, the first air inlet, the air distribution passage, the guide groove, the first air vent and the air outlet groove are arranged at periodic intervals according to the second air path channels to which they belong.

[0039] Optionally, the air inlet disk includes a plurality of second air inlet holes located at the first end and a plurality of first air outlet holes located at the second end; the plurality of second air inlet holes are respectively connected to the plurality of air inlet connectors, and the plurality of first air outlet holes are connected to the second air path channel;

[0040] The air inlet disk also includes a plurality of air dividing grooves, and the plurality of air dividing grooves have a third air inlet hole on the side facing the second air inlet hole, which is used to be connected correspondingly to the second air inlet hole, and the plurality of air dividing grooves have a second air outlet hole on the side facing the first air outlet hole, which is used to be connected correspondingly to the first air outlet hole; there is at least one target air dividing groove among the plurality of air dividing grooves, and the number of second air outlet holes connected to the target air dividing groove is greater than the number of third air inlet holes, so that the number of first air outlet holes is greater than the number of second air inlet holes.

[0041] Optionally, at least one of the first air path channels includes multiple first sub-channels and multiple second sub-channels, the number of the second air inlet holes in each first sub-channel is 1, the number of the first air outlet holes in each second sub-channel is 1, and the multiple first sub-channels and multiple second sub-channels belonging to the same first air path channel are all connected to the same air distribution groove.

[0042] Optionally, the plurality of second air inlet holes belonging to the same first air path channel form a circular trajectory with the sixth center point as the center in a plane parallel to the surface of the furnace door, and the second air inlet holes of different first air paths are at different distances from the sixth center point;

[0043] The plurality of first air outlet holes belonging to the same first air path channel form a circular trajectory with the seventh center point as the center in a plane parallel to the surface of the furnace door, and the first air outlet holes of different first air paths are at different distances from the seventh center point;

[0044] The multiple air dividing grooves extend radially with the eighth center point as the center in a plane parallel to the surface of the furnace door, and are distributed circumferentially; in a plane parallel to the surface of the furnace door, the air dividing grooves belonging to the same first air path channel have the same radial size, and the air dividing grooves in different first air paths have different radial sizes.

[0045] Optionally, the air inlet disk further includes a heating groove, in which a heating wire is provided, and the heating groove is located at the periphery of the plurality of first air passages.

[0046] Optionally, the heating groove is located outside the plurality of first air inlet holes.

[0047] Optionally, the air intake system further comprises a flow equalizer on the side of the furnace door away from the air intake disk, the flow equalizer comprises a stacked multi-layer flow equalizer structure, and the flow equalizer structure comprises air vents.

[0048] The present disclosure provides a deposition device, wherein the air intake system may include an air intake plate and a furnace door, the furnace door being connected to the air intake end of the furnace tube body through a furnace mouth flange, and the air intake plate being located on the side of the furnace door away from the furnace tube body; the air intake plate includes a plurality of air intake joints, and a plurality of first air paths which are respectively connected to the plurality of air intake joints and are independent of each other, the furnace door includes a plurality of second air paths corresponding to the first air paths, the first ends of the plurality of second air paths are respectively connected to the plurality of first air paths, and the second ends pass into the interior of the furnace tube body, so that the air intake plate and the furnace door can be independently set, which is convenient for maintenance, the plurality of first air paths are independently set, the plurality of second air paths are independently set, and different air paths can be used to circulate different process gases, isolating the gas paths of different process gases to avoid cross-contamination of various process gases.

[0049] The present disclosure provides a deposition device, comprising:

[0050] Furnace tube body;

[0051] The furnace tube body includes an air intake system at the air intake end of the furnace tube body, which is used to introduce process gas into the interior of the furnace tube body; the air intake system includes an air passage and a heating structure, the heating structure is located outside the air passage, and is used to heat the gas in the air passage;

[0052] The gas outlet system located at the gas outlet end of the furnace tube body is used to extract the gas inside the furnace tube body.

[0053] Optionally, the air intake system includes an air intake plate and a furnace door, the furnace door is connected to the air intake end of the furnace tube body through a furnace flange, and the air intake plate is located on a side of the furnace door away from the furnace tube body; the air intake plate includes a plurality of air intake connectors, and a plurality of first air paths that are respectively connected to the plurality of air intake connectors and are independent of each other; the furnace door includes a plurality of second air paths corresponding one to one with the first air paths, the first ends of the plurality of second air paths are respectively connected to the plurality of first air paths, and the second ends lead to the interior of the furnace tube body;

[0054] The air inlet disk further includes a heating groove in which a heating wire is provided. The heating groove is located at the periphery of the plurality of first air passages.

[0055] Some embodiments of the present disclosure provide a deposition device, wherein the air intake system may include an air channel and a heating structure. The heating structure is located outside the air channel and is used to heat the gas in the air channel to avoid powder discharge blockage in the first air channel.

[0056] In summary, some embodiments of the present disclosure have the following beneficial effects:

[0057] 1. Set up a protection system: Make the protective gas form an isolation gas curtain on the inner wall of the furnace tube body, thereby isolating the process gas and the inner wall of the furnace tube body, avoiding the problem of fragmentation caused by the coating on the inner wall of the furnace tube body; at the same time, improve the utilization rate of the process gas, so that the process gas is mainly concentrated in the coating area inside the cavity.

[0058] 2. Set up an air intake system including an air intake plate and a furnace door: the air intake plate and the furnace door can be set up independently, which is convenient for disassembly and maintenance; the multiple first air paths in the air intake plate are set up independently, and the multiple second air paths in the furnace door are set up independently. Different air paths can be used to circulate different process gases, and the gas paths of different process gases are isolated to avoid cross contamination of various process gases.

[0059] 3. An air intake system including an air channel and a heating structure is provided to heat the gas in the air channel to avoid gas blockage in the first air channel during powder discharge. BRIEF DESCRIPTION OF THE DRAWINGS

[0060] In order to more clearly illustrate the technical solutions in some embodiments of the present disclosure, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0061] Figure 1 Schematic diagram of the relative positions of the furnace tube body and the substrate inside;

[0062] Figure 2 and Figure 3 A schematic structural diagram of a deposition device provided in some embodiments of the present disclosure;

[0063] Figure 4 A schematic structural diagram of another deposition device provided by some embodiments of the present disclosure is shown;

[0064] Figure 5 A schematic structural diagram of an air intake system in a deposition device provided in some embodiments of the present disclosure;

[0065] Figure 6 and Figure 7 A schematic structural diagram of an air intake disk provided in some embodiments of the present disclosure;

[0066] Figure 8 and Figure 9 A schematic cross-sectional view of a furnace door provided in some embodiments of the present disclosure;

[0067] Figure 10 A schematic structural diagram of a flow homogenizer provided in some embodiments of the present disclosure. DETAILED DESCRIPTION

[0068] To help those skilled in the art better understand the solutions of the present disclosure, the following will provide a clear and complete description of the technical solutions in some embodiments of the present disclosure, in conjunction with the accompanying drawings of some embodiments of the present disclosure. Obviously, the described embodiments are only some of the embodiments of the present disclosure, not all of them. All other embodiments obtained by those skilled in the art based on some embodiments of the present disclosure without creative work shall fall within the scope of protection of the present disclosure.

[0069] In the following description, many specific details are set forth to facilitate a full understanding of the present disclosure. However, the present disclosure may also be implemented in other ways different from those described herein. Those skilled in the art may make similar generalizations without violating the connotation of the present disclosure. Therefore, the present disclosure is not limited to the specific embodiments disclosed below.

[0070] This disclosure is described in detail with reference to schematic diagrams. For ease of illustration, when describing the embodiments of this disclosure, cross-sectional views of device structures may be partially enlarged and not to scale. Furthermore, these schematic diagrams are merely illustrative and should not limit the scope of this disclosure. Furthermore, in actual production, three-dimensional dimensions, including length, width, and depth, should be included.

[0071] In order to better understand the technical solutions and technical effects of the present disclosure, specific embodiments will be described in detail below with reference to the accompanying drawings.

[0072] In some embodiments of the present disclosure, see Figure 2 and Figure 3 As shown, this figure is a structural schematic diagram of a deposition device provided by some embodiments of the present disclosure, wherein Figure 2 is a three-dimensional schematic diagram, Figure 3 It is a side view schematic diagram.

[0073] The deposition equipment includes a furnace tube main body 11, an air intake system 20 located at the air intake end of the furnace tube main body 11, and an air outlet system located at the air outlet end of the furnace tube main body 11. The air intake system 20 is used to introduce process gas into the interior of the furnace tube main body 11, and the air outlet system is used to extract gas from the interior of the furnace tube main body 11. In this way, the air intake system 20 is used to provide the process gas required for deposition, and the air outlet system is used to extract gas to ensure the purity of the process gas and the pressure of the reaction chamber, so that the reaction chamber meets the deposition requirements.

[0074] The deposition equipment can be a horizontal closed tube structure. The air intake system includes a furnace door 21, which is attached to the furnace mouth flange 14, which is located at the air intake end of the furnace tube body 11. The exhaust system also includes a rear sealing plate with an exhaust port, which is attached to the furnace tail flange 15, which is located at the air outlet end of the furnace tube body 11. The furnace door 21 at the air intake end and the rear sealing plate at the air outlet end provide a vacuum environment for the cavity within the furnace tube body 11. Both the furnace door and the rear sealing plate can be made of metal. The air intake system 20 can be located at the furnace door of the furnace mouth flange 14; the protection system 10 can be located on the inner wall of the furnace tube body 11.

[0075] A substrate fixing device may be provided inside the furnace tube body 11 for placing a substrate, such as a paddle rod 18 and a carrier 19. The paddle rod 18 is connected to the furnace door at the air inlet end. During the process, the carrier 19 is placed on the paddle rod 18 for placing a substrate. The paddle rod 18 carries the carrier 19 and the substrate on the carrier 19 into the cavity to participate in the deposition process. The paddle rod 18 is fixed and sealed by the paddle barrel 17 to ensure the vacuum environment of the cavity. The material of the paddle rod 18 can be SiC, quartz glass, alumina ceramics, silicon nitride ceramics, high-temperature alloys, etc., such as nickel, chromium, molybdenum and other alloy elements. The carrier 19 may include a first carrier 192 and a second carrier 191 on the first carrier 192, and the second carrier 191 is used to place a substrate.

[0076] Process gases are gases required during the process, and may include thin film deposition gases, doping gases, purge gases, etc. Thin film deposition gases include SiH4, O2, etc., doping gases include BCl3, PH3, etc., and purge gases include N2, etc.

[0077] In the first embodiment, the deposition apparatus further includes a protection system 10 located on the inner wall of the furnace tube body 11 . The protection system 10 in some embodiments of the present disclosure is introduced below.

[0078] The protection system 10 includes an air inlet pipe 12 and an air extraction pipe 13. The air inlet pipe 12 is used to output the protective gas, and the air extraction pipe 13 is used to extract the gas from the furnace tube body 11 from the side of the air inlet pipe 12. In this way, the protective gas flows from the air inlet pipe 12 to the air extraction pipe 13. Since the air inlet pipe 12 and the air extraction pipe 13 are arranged on the inner wall of the furnace tube body 11, the protective gas forms an isolation gas curtain on the inner wall of the furnace tube body 11, thereby isolating the process gas from the inner wall of the furnace tube body 11 and avoiding the problem of fragmentation caused by the coating on the inner wall of the furnace tube body 11. In addition, the existence of this isolation gas curtain concentrates the process gas in the middle area inside the furnace tube body 11, which is mainly used to deposit a film layer on the substrate inside the furnace tube body 11, thereby improving the utilization rate of the process gas. The protective gas can be a gas that does not participate in the reaction, such as helium, nitrogen, etc.

[0079] In some embodiments of the present disclosure, reference Figure 2 As shown, the air intake conduit 12 extends along the inner wall of the furnace tube body 11 and includes a main air intake conduit 121 and multiple branch air intake conduits 122. The main air intake conduit 121 extends axially along the furnace tube body 11, while the multiple branch air intake conduits 122 extend circumferentially along the furnace tube body 11 and are respectively connected to different locations of the main air intake conduit 121. That is, the multiple branch air intake conduits 122 can each have an annular structure. In this way, the protective gas in the main air intake conduit 121 can be directed to each branch air intake conduit 122 through different connection locations. Thus, the protective gas can be output from at least one of the main air intake conduit 121 and the branch air intake conduits 122, thereby extending the protective gas output range and enhancing the protective effect on the inner wall of the furnace tube body 11.

[0080] refer to Figure 2 As shown, the exhaust pipe 13 extends along the inner wall of the furnace tube body 11 and includes a main exhaust pipe 131 and multiple branch exhaust pipes 132. The main exhaust pipe 131 extends axially of the furnace tube body 11, and the multiple branch exhaust pipes 132 extend circumferentially of the furnace tube body 11 and are respectively connected to different positions of the main exhaust pipe 131. That is, the multiple branch exhaust pipes 132 can each be annular. The axial direction of the furnace tube body 11 is the direction between the air inlet and outlet ends of the furnace tube body 11, and the circumferential direction refers to the circumferential direction within a plane that forms a certain angle with the cross section of the furnace tube body 11 perpendicular to the airflow direction, and the angle is greater than or equal to 0°. In this way, the gas extracted by each exhaust branch pipe 132 can be led to the exhaust main pipe 131 through different connection positions, so that the protective gas is extracted by using at least one of the exhaust main pipe 131 and the exhaust branch pipe 132, so that the extraction range of the protective gas is wider, and the protective gas is prevented from diffusing in large quantities into the interior of the furnace tube main body 11 and affecting the reaction, while the protective effect on the inner wall of the furnace tube main body 11 is stronger.

[0081] The air intake sub-pipeline 122 and the air extraction sub-pipeline 132 are spaced apart in the axial direction of the furnace tube body 11. Thus, an isolation air curtain is formed between the air intake sub-pipeline 122 and the adjacent air extraction sub-pipeline 132. When there are a large number of air intake sub-pipelines 122 and air extraction sub-pipelines 132, a large number of isolation air curtains can be formed on the inner wall of the furnace tube body 11, thereby achieving regional isolation of the inner wall of the furnace tube body 11, achieving a good isolation effect, and preventing the inner wall of the furnace tube body 11 from being broken due to film formation.

[0082] Specifically, the extension plane of the air inlet branch pipe 122 and the axial direction of the furnace tube body 11 may be perpendicular or non-perpendicular, for example, the angle between the two may be greater than 80°, that is, they are in a nearly perpendicular state. The extension plane of the air exhaust branch pipe 132 and the axial direction of the furnace tube body 11 may be perpendicular or non-perpendicular, for example, the angle between the two may be greater than 80°, that is, they are in a nearly perpendicular state. This allows the flow direction of the protective gas in the isolation gas curtain to be close to the axial direction of the furnace tube body 11, reducing excessive diffusion of the protective gas into the central area of ​​the furnace tube body 11 caused by the circumferential circulation, facilitating the entry and extraction of the protective gas, and forming an air curtain close to the inner wall of the furnace tube body 11.

[0083] If a first pipeline is present among the multiple air inlet sub-pipelines 122, and the first pipeline has an air extraction sub-pipeline 132 on both the air inlet end and the air extraction end, the first pipeline has first air holes on both the air inlet end and the air extraction end, allowing the first pipeline to output protective gas to both the air inlet end and the air extraction end, thereby facilitating the formation of a continuous air curtain within the entire cavity and extending the protective gas coverage. Conversely, if the first pipeline has an air extraction sub-pipeline 132 only on either the air inlet end or the air extraction end, indicating that the first pipeline is located at the end of the furnace tube body 11, the first pipeline can be provided with first air holes on the side provided with the air extraction sub-pipeline 132 to avoid waste of protective gas. The first air holes can be evenly distributed on the air inlet sub-pipeline 122.

[0084] If a second pipe among the multiple gas extraction sub-pipelines 132 has a gas intake sub-pipeline 122 on both the gas intake end side and the gas extraction end side, the second pipe has second air holes on both the gas intake end side and the gas extraction end side, so that the second pipe can extract gas from both the gas intake end side and the gas extraction end side, and the gas extraction range is wider. Conversely, if the second pipe has a gas intake sub-pipeline 122 only on the gas intake end side or the gas extraction end side, indicating that the second pipe is located at the end of the furnace tube body 11, the second pipe can be provided with second air holes on the side provided with the gas intake sub-pipeline 122 to avoid unnecessary gas extraction. The second air holes can be evenly distributed on the gas extraction sub-pipeline 132.

[0085] The first air holes and the second air holes can be arranged opposite to each other or evenly distributed. The protective gas is uniformly ejected from the first air holes of the plurality of annular air inlet pipes 122 and is extracted through the second air holes of the plurality of annular air extraction pipes 132, forming an annular isolation air curtain between the adjacent air inlet pipes 122 and the air extraction pipes 132 (refer to the protective gas flow direction). Figure 2 The process gas in the cavity is isolated from the inner wall of the furnace tube body 11, thereby reducing the thin film deposition on the inner wall of the furnace tube body 11 and avoiding the breakage of the furnace tube body.

[0086] In a specific implementation, the size of the first and second air holes ranges from 0.5 to 3 mm. When the first and second air holes are circular, the size is the diameter of the circle; when the first and second air holes are polygonal, the size is the side length of the polygon. The depth of the first and second air holes is determined by the thickness of the air inlet sub-pipeline 122 and the air extraction sub-pipeline 132. This avoids the problem of excessive air flow caused by overly large air holes, which leads to gas waste and affects the deposition effect after diffusion, and the problem of insufficient air flow and insufficient protection caused by overly small air holes, thereby facilitating the formation of a uniform air curtain.

[0087] The spacing between two adjacent first air holes is in the range of 10-100 mm, and the spacing between two adjacent second air holes is in the range of 10-100 mm. This avoids the problem of gas waste caused by excessive air flow due to too dense air holes and the impact on deposition effect after diffusion, as well as the problem of insufficient air flow due to too sparse air holes and insufficient protection, which is conducive to forming a uniform air curtain.

[0088] During specific implementation, the interval range between the air intake branch pipe 122 and the adjacent air exhaust branch pipe 132 is 100-500mm, and the number of the air intake branch pipe 122 and the air exhaust branch pipe 132 can be determined according to the interval range and the axial size of the furnace tube body 11, so as to ensure the uniformity of the gas flow rate, avoid the low efficiency of protective gas extraction caused by too large an interval, which in turn leads to the inability to form a continuous and uniform gas curtain on the inner wall of the furnace tube body 11, or the problem of gas diffusion affecting the deposition process in the cavity, and avoid the gas waste caused by too small an interval; the gas flow rate range between the air intake branch pipe 122 and the adjacent air exhaust branch pipe 132 is 5L / min~50L / min, so as to ensure a suitable gas flow rate, avoid the gas waste caused by too large a gas flow rate, the inability to form a continuous and uniform gas curtain on the inner wall of the furnace tube body 11, and the problem of affecting the deposition effect after diffusion, and the problem of insufficient gas flow leading to the inability to form a continuous and uniform gas curtain on the inner wall of the furnace tube body 11 and the resulting insufficient protection.

[0089] In a specific implementation, the number of main air intake lines 121 and main air extraction lines 131 can be determined based on actual conditions. The number of main air intake lines 121 can be one or more, for example, two or more, and the number of main air extraction lines 131 can be one or more, for example, two or more. Multiple main air intake lines 121 and multiple main air extraction lines 131 are arranged in parallel. One branch air intake line 122 can connect multiple main air intake lines 121, so that the air flow at different positions of the branch air intake line 122 is more uniform. One branch air extraction line 132 can connect multiple main air extraction lines 131, so that the air flow at different positions of the branch air extraction line 132 is more uniform.

[0090] When there are multiple main air intake lines 121 and multiple main air exhaust lines 131, they can be spaced apart in the circumferential direction of the furnace tube body 11 to balance the air flow rates at various positions of the air intake branch lines 122 and the air exhaust branch lines 132. For example, the two main air intake lines 121 can be located at the upper and lower sides of the furnace tube body 11, respectively, and the two main air exhaust lines 131 can be located at the side walls on different sides of the furnace tube body 11, respectively. The side walls here refer to the side walls between the air intake end and the air outlet end.

[0091] When the air intake pipeline 12 includes an air intake main pipeline 121 and an air intake branch pipeline 122, the air intake main pipeline 121 is connected to the protective gas passage, which is equivalent to the air intake main pipeline 121 serving as a passage between the protective gas passage and the air intake branch pipeline 122. The air intake main pipeline 121 may be provided with air holes or may not be provided with air holes. The size range of the air holes on the air intake main pipeline 121 is 0.5-3mm, and the spacing range between two adjacent air holes is 10-100mm; when the exhaust pipeline 13 includes an exhaust main pipeline 131 and an exhaust branch pipeline 132, the exhaust main pipeline 131 is connected to the exhaust passage, which is equivalent to the exhaust main pipeline 131 serving as a passage between the exhaust passage and the exhaust branch pipeline 132. The exhaust main pipeline 131 may be provided with air holes or may not be provided with air holes. The size range of the air holes on the exhaust main pipeline 131 is 0.5-3mm, and the spacing range between two adjacent air holes is 10-100mm.

[0092] In some embodiments of the present disclosure, reference Figure 4 Figure 1 is a schematic diagram of another deposition apparatus according to some embodiments of the present disclosure. Both the air intake line 12 and the air exhaust line 13 extend spirally along the inner wall of the furnace tube body 11 and are spaced apart axially from each other. This double-helix structure extends parallel to each other and is spaced a certain distance apart, similarly forming a segmented isolation air curtain. In this structure, both the air intake line 12 and the air exhaust line 13 are integral, resulting in a simple structure.

[0093] Specifically, the air inlet pipe 12 has first air holes on both the air inlet side and the air extraction side; the air extraction pipe 13 has second air holes on both the air inlet side and the air extraction side. The first and second air holes can be evenly distributed, thereby ensuring good gas output and extraction performance, facilitating the formation of a continuous air curtain on the inner wall of the furnace tube body 11, and achieving a good isolation effect.

[0094] Alternatively, the portion of the air inlet pipe 12 located at the end of the furnace tube body 11 can be provided with a first air hole on the side facing the interior of the cavity to avoid wasting the protective gas. The portion of the air exhaust pipe 13 located at the end of the furnace tube body 11 can be provided with a second air hole on the side facing the interior of the cavity to avoid wasting the protective gas. The size range of the first air hole and the second air hole is 0.5-3 mm, wherein when the shape of the first air hole and the second air hole is circular, the size is the diameter of the circle, and when the shape of the first air hole and the second air hole is polygonal, the size is the side length of the polygon. The depth of the first air hole and the second air hole is determined according to the thickness of the air inlet branch pipe 122 and the air exhaust branch pipe 132. The spacing between two adjacent first air holes ranges from 10 to 100 mm, and the spacing between two adjacent second air holes ranges from 10 to 100 mm, which is conducive to forming a uniform air curtain. The spacing between the air inlet sub-pipeline 122 and the adjacent air extraction sub-pipeline 132 is in the range of 100-500 mm, and the gas flow rate between the air inlet sub-pipeline 122 and the adjacent air extraction sub-pipeline 132 is in the range of 5 L / min to 50 L / min, which is conducive to forming a uniform air curtain. The effect of this device can be referred to the above description.

[0095] In some embodiments of the present disclosure, the air inlet pipe 12 can be connected to the protective gas passage of the furnace mouth flange 14 at the air inlet end, so that the air inlet pipe 12 is connected to the outside world through the furnace mouth flange, and the output of the protective gas to the air inlet pipe 12 can be achieved; the exhaust pipe 13 can be connected to the exhaust passage of the furnace tail flange 15 at the air outlet end, so that the exhaust pipe 13 is connected to the outside world through the furnace tail flange, and the gas can be extracted without adding additional extraction equipment. The protective gas passage on the furnace mouth flange 14 may include a welded joint provided on the outer ring of the furnace mouth flange 14, and the protective gas passage may not pass through the furnace door on the air inlet side. The exhaust passage of the furnace tail flange 15 is finally connected to the pump pipe 16, and the pump pipe 16 is connected to the exhaust system on the air outlet side, so that the protective gas and the cavity exhaust gas are extracted together.

[0096] In some embodiments of the present disclosure, the furnace tube body 11 may be a quartz tube. A heating device 111 may be provided around the periphery of the quartz tube to heat the interior of the furnace tube body 11 during the deposition process, forming a heating chamber, thereby providing a high-temperature reaction environment for the deposition process. During the deposition process, an isolation gas curtain is formed to isolate the process gas from the inner wall of the furnace tube body 11. Even if the temperature of the furnace tube body 11 is high, a film layer is not easily formed on the inner wall of the furnace tube body 11, thereby preventing the furnace tube body 11 from being easily broken due to the deposition of the film layer on the inner wall. For example, the deposition process of polycrystalline silicon thin film is a purely thermal reaction, which requires heating by the heating device 111.

[0097] The present disclosure provides a deposition device, wherein the protection system includes an air intake pipeline and an air exhaust pipeline, wherein the air intake pipeline is used to output the protective gas, and the air exhaust pipeline is used to extract the gas from the furnace tube body from the air intake pipeline side, so that the protective gas flows from the air intake pipeline to the air exhaust pipeline. Since the air intake pipeline and the air exhaust pipeline are arranged on the inner wall of the furnace tube body, the protective gas constitutes an isolation gas curtain on the inner wall of the furnace tube body, thereby isolating the process gas from the inner wall of the furnace tube body, and avoiding the problem of fragmentation caused by the coating on the inner wall of the furnace tube body.

[0098] In the second embodiment, the air intake system 20 includes an air intake plate 22 and a furnace door 21 . An air intake system 20 in some embodiments of the present disclosure is introduced below.

[0099] refer to Figure 5 2 is a schematic diagram of the structure of the air intake system in the deposition equipment provided by some embodiments of the present disclosure. The air intake system 20 is located at the air intake end of the furnace tube body 11 and is used to introduce process gas into the interior of the furnace tube body 11. The furnace door 21 is connected to the air intake end of the furnace tube body 11 through the furnace mouth flange 14. The air intake plate 22 is located on the side of the furnace door 21 away from the furnace tube body 11. The air intake plate 22 includes a plurality of air intake connectors 220 and a plurality of first air paths that are respectively connected to the plurality of air intake connectors 220 and are independent of each other. The furnace door 21 includes a plurality of second air paths corresponding to the first air paths. The first ends of the plurality of second air paths are respectively connected to the plurality of first air paths, and the second ends of the plurality of second air paths are introduced into the interior of the furnace tube body 11.

[0100] In this way, multiple first gas channels can be used to circulate different process gases, isolating the gas paths of different process gases and preventing cross-contamination. The air intake system is divided into an air intake tray 22 and a furnace door 21. The air intake tray 22 and the furnace door 21 can be installed independently and fixed with screws, making them easy to disassemble and maintain. During later maintenance, the air intake tray 22 and the furnace door 21 can be separated and purged separately, which is convenient and quick.

[0101] refer to Figure 6 and Figure 7As shown, it is a structural schematic diagram of an air intake disk provided in some embodiments of the present disclosure. The air intake disk 22 is an integrated structure, and has a first air path channel inside it. The gas flows in the thickness direction of the air intake disk 22. The air intake disk 22 has a cavity in the thickness direction, thereby forming the first air path channel. Figure 7 The schematic diagram of the cross section of the overall structure of the air intake disk 22 in the thickness direction is shown. The gas entering the air intake disk 22 flows from one side of the air intake disk 22 (the left side in the figure) to the other side of the air intake disk 22 (the right side in the figure) in the direction of the arrow. The gas in the air intake disk 22 passes through the Figure 6 The channels in the plane of the positions of AA, BB, CC, DD and EE of the air inlet disk 22 flow to the other side of the air inlet disk 22. The plane structure diagrams at various positions refer to Figure 7 7A, 7B, 7C, 7D and 7E in FIG are respectively denoted as AA view, BB view, CC view, DD view and EE view.

[0102] In some embodiments of the present disclosure, taking the example that the number of first gas channels and second gas channels are both 3, the same first gas channel is used to circulate the same gas, and different first gas channels are used to circulate different gases. In some other embodiments, depending on the type of gas required by the process, the number of first gas channels and second gas channels can be more than 3, and more first gas channels and second gas channels have the same structure as the existing gas channels, so no further examples are given.

[0103] The three first gas channels are used to circulate different process gases, and the corresponding three second gas channels are also used to circulate corresponding process gases. Process gases are gases required during the process and can include thin film deposition gas, dopant gas, purge gas, etc. Different gas channels are represented by lines or areas of different grayscale in the figure. For example, the first first gas channel is used to circulate the thin film deposition gas SiH4, the second first gas channel is used to circulate the thin film deposition gas O2, and the third first gas channel is used to circulate the purge gas N2. The same applies to the second gas channels.

[0104] The air inlet disk 22 includes a plurality of second air inlet holes 221 at a first end and a plurality of first air outlet holes 226 at a second end. The plurality of second air inlet holes 221 are respectively connected to the plurality of air inlet connectors 220, and the plurality of first air outlet holes 226 are connected to the second air passage. The first end is the air inlet end (i.e., the front end) of the air inlet disk 22, and the second end is the air outlet end (i.e., the back end) of the air inlet disk 22.

[0105] The structural reference of the plane where the first end of the air inlet disk 22 is located Figure 7In view AA in A, the gas flows from the multiple inlet joints 220 through the 1 / 4 pipe into the multiple second inlet holes 221, and then flows into the interior of the inlet disk 22. The inlet joints 220 may include a face seal fitting, such as a VCR joint.

[0106] The same first air path channel can correspond to multiple second air inlet holes 221, which improves the air intake efficiency and uniformity. The multiple second air inlet holes 221 can be symmetrically arranged in the plane where the first end is located, so that the same gas can be symmetrically introduced through the multiple second air inlet holes 221 of the same first air path channel. The same first air path channel can include multiple first sub-channels, and the number of second air inlet holes 221 in each first sub-channel is 1, that is, the multiple second air inlet holes 221 of the same air path channel can belong to different first sub-channels, and the number of first sub-channels is recorded as m, that is, the number of second air inlet holes 221 belonging to the same first air path channel is m, so that the passage of the same gas has more freedom in setting, which is conducive to improving the air intake uniformity. The size of the second air inlet hole 221 can be set according to actual conditions, for example, the diameter is 4mm; the number of second air inlet holes 221 in the same air path channel can be set according to actual conditions, for example, m can be 2, refer to Figure 7 In Figures 7A and 7B, the two arrows point to the second air inlet holes 221 in the two first sub-channels in the same first air path channel.

[0107] Specifically, refer to Figure 7 As shown in Figure A, multiple second air inlet holes 221 belonging to the same first air passage form a circular trajectory with the sixth center point as the center in a plane parallel to the surface of the furnace door 21. The second air inlet holes 221 in different first air passages are at different distances from the sixth center point, thereby forming multiple circular trajectories corresponding to different first air passages. This achieves a staggered arrangement of the second air inlet holes 221 in space, utilizing radial space.

[0108] The structural reference of the plane where the second end of the air inlet disk 22 is located Figure 7 In view EE in E, gas flows out of the plurality of first gas outlet holes 226 and then enters the furnace door 21. The plurality of first gas outlet holes 226 can be provided with a sealing ring groove, which, together with the sealing ring on the outer ring of the gas inlet plate 22, is used to seal between the gas inlet plate 22 and the furnace door 21 to prevent gas from escaping at the connection surface.

[0109] The same gas path can correspond to multiple first air outlets 226, which improves the air intake efficiency and uniformity. The multiple first air outlets 226 can be symmetrically arranged in the plane where the second end is located, so that the same gas can be symmetrically introduced into the furnace door 21 through the multiple first air outlets 226 of the same gas path. The same gas path may include multiple second sub-channels, and the number of first air outlets 226 in each second sub-channel is 1, that is, the multiple first air outlets 226 in the same gas path can belong to different second sub-channels, and the number of second sub-channels is recorded as n, that is, the number of first air outlets 226 belonging to the same first gas path is n, so that the channels of the same gas have more freedom in setting, such as improving the air intake uniformity. The size of the first air outlet 226 can be set according to actual conditions, such as a diameter of 4 mm; the number of first air outlets 226 in the same gas path can be set according to actual conditions, and the number of first air outlets 226 is usually greater than the number of second air inlets 221, for example, n can be 10, for reference Figure 7 In FIG. 7E , ten arrows respectively point to the ten first air outlet holes 226 in the ten second sub-channels in the same first air path channel.

[0110] Specifically, refer to Figure 7 As shown in FIG. E, a plurality of first air outlet holes 226 belonging to the same first air path channel form a circular trajectory with the seventh center point as the center in a plane parallel to the surface of the furnace door 21. The first air outlet holes 226 of different first air paths are at different distances from the seventh center point, thereby forming a plurality of circular trajectories corresponding to different first air paths respectively.

[0111] In some embodiments of the present disclosure, the air inlet disk 22 further includes a plurality of air dividing slots 223, wherein the plurality of air dividing slots 223 have a third air inlet hole 224 on the side facing the second air inlet hole 221, for correspondingly connecting to the second air inlet hole 221, and the plurality of air dividing slots 223 have a second air outlet hole 225 on the side facing the first air outlet hole 226, for correspondingly connecting to the first air outlet hole 226; there is at least one target air dividing slot among the plurality of air dividing slots 223, and the number of second air outlet holes 225 connected to the target air dividing slot is greater than the number of third air inlet holes 224, so that the number of first air outlet holes 226 is greater than the number of second air inlet holes 221. In other words, gas can be obtained from the second air inlet holes 221, which have a smaller number, through the air dividing slots 223, and the gas can be passed into the first air outlet holes 226, which has a larger number, thereby increasing the number of air holes in the passage. The first air outlet holes 226 are located at different positions, which is conducive to improving the uniformity of the gas.

[0112] The plurality of gas distribution grooves 223 are directed toward the side of the second gas inlet 221. Figure 7In the CC view in C, there are multiple third air inlet holes 224 in the plane, which are connected to the second air inlet holes 221, and then the gas is gathered in the gas separation groove 223. The size and number of the third air inlet holes 224 are the same as the size and number of the first air outlet holes 226. Of course, the correspondingly connected third air inlet holes 224 and the second air inlet holes 221 can actually constitute the same air hole, and there may be no obvious dividing line between the two. The third air inlet hole 224 can be a part of the structure of the second air inlet hole 221 near the gas separation groove 223. In other words, one first sub-channel can include one third air inlet hole 224, refer to Figure 7 As shown in FIG7C , the two third air inlet holes 224 corresponding to the two first sub-channels are indicated by two arrows respectively.

[0113] The plurality of gas distribution grooves 223 are directed toward the first gas outlet 226. Figure 7 In the DD view in 7D, there are multiple second air outlets 225 in the plane, which are correspondingly connected to the first air outlet 226, and can divert the gas in the gas separation groove 223 to each second air outlet 225, and then transmit it to the first air outlet 226, so as to flow out from the first air outlet 226. The size and number of the first air outlet 226 are the same as the size and number of the second air outlet 225. Of course, the correspondingly connected second air outlet 225 and the first air outlet 226 can actually constitute the same air hole, and there can be no obvious dividing line between the two. The second air outlet 225 can be a partial structure of the first air outlet 226 close to the side of the gas separation groove 223. In other words, one second sub-channel can include one second air outlet 225, refer to Figure 7 As shown in FIG7D , the ten second air outlet holes 225 corresponding to the ten second sub-channels are indicated by ten arrows respectively.

[0114] The same gas path channel can correspond to one or more gas separation grooves 223. Taking the case where the same gas path channel includes one gas separation groove 223 as an example, at least one of the first gas path channels includes multiple first sub-channels (for example, m) and multiple second sub-channels (for example, n). The number of the second air inlet holes 221 in each first sub-channel is 1, and the number of the first air outlet holes 226 in each second sub-channel is 1. The multiple first sub-channels and multiple second sub-channels belonging to the same first gas path channel are all connected to the same gas separation groove 223, that is, the gas in the multiple first sub-channels (for example, m) converges into the gas separation groove 223 and is diverted to the multiple second sub-channels (for example, n). In this way, when n is greater than m, the gas separation groove is connected to the gas separation groove, which plays a role in changing from a small hole to a large hole. In a plane parallel to the surface of the furnace door 21, the width of the gas separation groove 223 can be, for example, 5 mm, and the length ranges from 300 to 400 mm; the depth of the gas separation groove 223 in the direction perpendicular to the surface of the furnace door 21 is, for example, 6 mm.

[0115] Specifically, the plurality of gas dividing grooves 223 extend radially with the eighth center point as the center in a plane parallel to the surface of the furnace door 21 and are distributed circumferentially. In the plane parallel to the surface of the furnace door 21, the gas dividing grooves 223 belonging to the same first gas channel have the same radial dimensions, forming the same annular gas dividing grooves. The gas dividing grooves 223 in different first gas channels have different radial dimensions and are arranged radially. In this way, the radial dimensions are utilized as much as possible, so that the plurality of gas dividing grooves 223 in different first gas channels are independently arranged and do not affect each other, allowing each first gas channel to be independently arranged.

[0116] In some embodiments of the present disclosure, the air inlet disk 22 further includes a heating groove 222, in which a heating wire is provided. The heating groove 222 is located at the periphery of the plurality of first gas channels. It is not necessarily located at the periphery of the overall structure composed of the first gas channels. For example, it can be located at the periphery of each of the plurality of first gas channels, at least partially surrounding the first gas channels, for heating the gas passing through the plurality of first gas channels. The heating temperature can be set as required to avoid the phenomenon of gas powder discharge and blockage in the first gas channels, and the heating groove 222 is independently provided with the gas channel and does not affect each other. For example, SiH4 is prone to blockage problems, so the heating wire and the heating groove 222 can be provided at the periphery of the first gas channel corresponding to SiH4, or at the periphery of each first gas channel, so that the heating groove 222 is independently provided with the gas channel and does not affect each other. The temperature range of the heating wire can be 20-250°C.

[0117] Specifically, the heating groove 222 is located at the periphery of the plurality of first air inlet holes 211. Figure 7 In the BB view in 7B, the plane is located between the AA view and the CC view. The heating groove 222 can be a ring structure, and the cross section in the extension direction of the ring constitutes a rectangular structure.

[0118] refer to Figure 8 and Figure 9 As shown, it is a schematic diagram of the cross-sectional structure of a furnace door provided in some embodiments of the present disclosure. The furnace door 21 is an integrated structure, and has a second gas path channel inside it. The gas flows in the thickness direction of the furnace door 21. The structure of the furnace door 21 at different positions in the thickness direction can be different, thereby forming a second gas path channel. Figure 8 The cross-sectional view of the overall structure of the furnace door 21 in the thickness direction shows that the gas entering the furnace door 21 flows from one side of the gas inlet plate 22 (the left side in the figure) to the other side of the gas inlet plate 22 (the right side in the figure) in the direction of the arrow. The gas in the furnace door 21 passes through the Figure 8The channel in the plane where AA, BB, CC, DD and EE of the furnace door 21 are located flows to the other side of the furnace door 21. The plane structure diagram at each position refers to Figure 9 9A, 9B, 9C, 9D and 9E in the figure are respectively recorded as AA view, BB view, CC view, DD view and EE view.

[0119] The oven door 21 may include a plurality of first air inlet holes 211 at a first end and a plurality of air outlet slots 215 at a second end. The plurality of first air inlet holes 211 are respectively connected to the plurality of first air passages. The first end is the air inlet end (i.e., the front end) of the oven door 21, and the second end is the air outlet end (i.e., the back end) of the oven door 21.

[0120] The structural reference of the plane where the first end of the furnace door 21 is located Figure 9 In view AA in A, the gas flowing out from the first air outlet 226 passes through the multiple first air inlet holes 211 and enters the interior of the furnace door 21. The multiple first air outlet holes 226 and the multiple first air inlet holes 211 are arranged in a one-to-one correspondence. The multiple first air inlet holes 211 can be symmetrically arranged in the plane where the first end is located, so that the same gas can be symmetrically introduced through the multiple first air inlet holes 211 of the same second air path. The same second air path may include multiple third sub-channels (for example, n), and the number of first air inlet holes 211 in each third sub-channel is 1, then the number of first air inlet holes 211 is n, so that the same second sub-channel can correspond to one third sub-channel, so that the passage of the same gas has more freedom in setting, which is conducive to improving the uniformity of air intake. The size of the first air inlet hole 211 can be 3 mm, for example, and the number can be 10, for example, refer to Figure 9 As shown in FIG9A , the ten third sub-channels in the same second gas path channel include ten first air inlet holes 211 forming a circular trajectory, and different circular trajectories indicate different second gas paths.

[0121] Specifically, refer to Figure 9 As shown in A, multiple first air inlet holes 211 belonging to the same second air path channel form a circular trajectory with the fifth center point as the center in a plane parallel to the surface of the furnace door 21. The first air inlet holes 211 of different second air paths are at different distances from the fifth center point, thereby forming multiple circular trajectories, which correspond to different second air paths respectively. In this way, they can be staggered in space and radial space can be utilized.

[0122] The structural reference of the plane where the second end of the furnace door 21 is located Figure 9In view EE of Figure E, gas flows out through multiple gas outlet slots 215. These multiple gas outlet slots 215 can be symmetrically arranged within the plane of the second end. This allows the same gas to enter symmetrically through the multiple gas outlet slots 215 of the same second gas channel. The same second gas channel can include multiple third sub-channels. The number of gas outlet slots 215 in each third sub-channel can be one or more, allowing for more flexibility in the design of the gas passages, thereby improving air intake uniformity. The width of the gas outlet slots 215 in a plane parallel to the surface of the furnace door 21 can be, for example, 2 mm, and the length can range from 10 to 30 mm.

[0123] Specifically, the multiple gas outlet slots 215 extend radially with the first center point as the center in a plane parallel to the surface of the furnace door 21 and are arranged circumferentially. The multiple gas outlet slots 215 also extend radially with the second center point as the center in a plane parallel to the surface of the furnace door 21 and are distributed circumferentially. This allows gas to flow out within the circumferential plane, increasing the outflow area and uniformity.

[0124] In some embodiments of the present disclosure, the furnace door 21 further includes a plurality of air distribution passages 214 between the plurality of first air inlet holes 211 and the plurality of air outlet grooves 215; the plurality of air distribution passages 214 are connected to the first air inlet holes 211 on one side thereof, and are connected to the air outlet grooves 215 on one side thereof, and the area of ​​the air distribution passages 214 in a plane parallel to the surface of the furnace door 21 is larger than that of the air outlet grooves 215 in a plane parallel to the surface of the furnace door 21. The area of ​​the surface of the furnace door 21 in the plane, specifically, the length of the air distribution passage 214 in the plane parallel to the surface of the furnace door 21 may be greater than or equal to the length of the air outlet groove 215 in the plane parallel to the surface of the furnace door 21, the width of the air distribution passage 214 in the plane parallel to the surface of the furnace door 21 is greater than the width of the air outlet groove 215 in the plane parallel to the surface of the furnace door 21, and when the width of the air distribution passage 214 is uneven, its average width is greater than the average width of the air outlet groove 215.

[0125] Reference to the gas distribution passage 214 Figure 9 In the DD view of Figure D, each gas distribution channel 214 is independently configured to isolate the process gases from each other, preventing cross-contamination. This allows gas entering through the first air inlet 211 through the furnace door 21 to be transferred via the gas distribution channel 214 to the gas outlet slot 215, effectively expanding the gas outlet area and improving gas flow uniformity. The metal furnace door 21 not only seals the cavity, but also provides gas distribution and flow uniformity in this system.

[0126] In a specific implementation, the plurality of gas outlet grooves 215 include a plurality of groups of gas outlet grooves. The gas outlet grooves of the same group are arranged radially and spaced apart in a plane parallel to the surface of the furnace door 21, with the first center point as the center of the circle. The gas outlet grooves of the same group are connected to the same gas distribution passage 214, so that the number of gas outlet grooves in each third sub-channel is greater than 1. The plurality of gas outlet grooves arranged radially can increase the air intake range and make the air intake more uniform. Figure 9 E. A group of air outlet slots may include three air outlet slots, which are arranged radially. In the radial outward direction, the lengths of the three air outlet slots increase successively, so that the air flow flows out in a spray shape and enters the cavity more evenly, which is equivalent to the total number of air outlet slots being 3n.

[0127] Specifically, the gas distribution passage 214 forms a fan-shaped area with the second center point as the center in a plane parallel to the surface of the furnace door 21. The gas distribution passage 214 can also be called a fan-shaped gas distribution plate, so that the area of ​​the periphery is larger than the area of ​​the inner side. There is more gas in the periphery, providing a larger retention space for the gas, thereby increasing the airflow in the periphery and improving the uniformity of the gas in each area. Multiple gas distribution passages 214 can be symmetrically arranged in a plane parallel to the surface of the furnace door 21. The number of gas outlet slots 215 in each third sub-channel can be 1 or greater than 1, so that the passages of the same gas have more degrees of freedom in setting, which is conducive to improving the uniformity of air intake. The gas distribution passages 214 can be arranged in a one-to-one correspondence with the gas outlet slots 215, or one gas distribution passage 214 can correspond to multiple gas outlet slots 215.

[0128] In some embodiments of the present disclosure, the furnace door 21 also includes the multiple guide grooves 212 and the multiple first air vents 213; the side of the multiple guide grooves 212 facing the multiple first air inlet holes 211 is respectively connected to the multiple first air inlet holes 211, and the side of the multiple guide grooves 212 facing the multiple first air vents 213 is connected to the inlet of the multiple first air vents 213, and the outlet of the multiple first air vents 213 is connected to the air inlet of the multiple air distribution passages 214.

[0129] Multiple guide grooves 212 reference Figure 9 In the BB view of B, the plurality of guide grooves 212 are connected to the plurality of first air inlet holes 211 in a one-to-one correspondence, so that the plurality of first air inlet holes 211 can pass gas into the plurality of guide grooves 212. Figure 9In the CC view in Figure C, the multiple first air inlet holes 211 are connected to the multiple guide grooves 212 in a one-to-one correspondence, allowing gas from the multiple guide grooves 212 to flow into the multiple first vent holes 213. The number of guide grooves 212 and first vent holes 213 in each third sub-channel can be 1, i.e., the total number of guide grooves 212 and first vent holes 213 is n. This allows for more flexibility in the design of the paths for the same gas, which helps improve air intake uniformity.

[0130] Specifically, the plurality of guide grooves 212 extend radially with the third center point as the center in a plane parallel to the surface of the furnace door 21 and are distributed circumferentially; the plurality of first air vents 213 form a circular trajectory with the fourth center point as the center in a plane parallel to the surface of the furnace door 21. This allows the air intake pipeline to be arranged within the thickness space of the furnace door 21. The distances between the plurality of first air vents 213 and the fourth center point can be the same, that is, all the first air vents 213 can form a circular trajectory. In this way, different gases located on different circular trajectories admitted by the first air inlet 211 can be introduced into the first air vents 213 on the same circular trajectory, so that the different gases have approximately the same distribution, thereby improving other uniformity.

[0131] In addition, the distance between the multiple first air vents 213 and the fourth center point can be smaller than the distance between the multiple first air inlet holes 211 and the fifth center point. This is because considering the hardware size of the processing and the joint, the first air inlet holes 211 are farther away from the geometric center of the furnace door 21. Through the guide groove 212 and the multiple first air vents 213, the gas can be guided to a position closer to the geometric center of the furnace door 21 and diverge outward in a uniform manner, so that the gas flow area is increased, which is beneficial to the uniformity of the air flow.

[0132] In a plane parallel to the surface of the furnace door 21, the guide grooves 212 belonging to the same second air passageway have the same radial dimensions, while the guide grooves 212 in different second air passageways have different radial dimensions. The radial dimensions of the guide grooves 212 are correlated with the positions of the corresponding first air inlet holes 211, ensuring that the guide grooves 212 are at least connected to the corresponding first air inlet holes 211. The guide grooves 212 have a width of 3 mm in a plane parallel to the surface of the furnace door 21, a length ranging from 20 to 40 mm, and a depth of 5 mm in a direction perpendicular to the surface of the furnace door 21. The first air vents 213 have a size of 3 mm.

[0133] In a specific implementation, the first, second, third, and fourth center points are located on the centerline of the furnace door 21. The centerline is perpendicular to the surface of the furnace door 21 and passes through the center point of the surface of the furnace door 21. That is, each center point is located on the geometric centerline of the furnace door 21. This allows gas to flow out within a circular plane, increasing the outflow area and uniformity. The fact that multiple center points are located on the centerline facilitates unified benchmarking and facilitates processing.

[0134] In a specific implementation, the first air inlet 211, the gas distribution passage 214, the guide groove 212, the first air hole 213 and the gas outlet groove 215 are arranged periodically at intervals according to the second air path to which they belong, so that the arrangement of each gas is more uniform.

[0135] In summary, at least one of the second air passages includes multiple third sub-channels. The number of first air inlet holes 211, air distribution passages 214, guide grooves 212, and first air vents 213 in each third sub-channel is 1, so the total number of each can be recorded as n. The number of air outlet grooves 215 in each third sub-channel is greater than or equal to 1, making the air intake more uniform in the circumferential direction. The first air inlet holes 211, air distribution passages 214, guide grooves 212, first air vents 213, and air outlet grooves belonging to the same third sub-channel can have the same circumferential position, so that these components are arranged in sequence and directly opposite each other. According to the above description, the air inlet plate includes multiple first air paths (for example, 3). In each first air path, the gas enters from m first sub-channels (including correspondingly connected m second air inlet holes 221 and m third air inlet holes 224), is mixed in the air separation groove 223, and then is diverted to n second sub-channels (including correspondingly connected n second air outlet holes 225 and n first air outlet holes 226), and flows out of the air inlet plate from the n first air outlet holes 226 of the second sub-channel to enter the furnace door. n is usually greater than m, and the conversion from a few holes to a large number of holes is achieved through the air inlet plate.

[0136] The furnace door 21 includes multiple second air passages (e.g., three), each of which includes n third sub-channels. The n second sub-channels correspond one-to-one to the n third sub-channels, and each third sub-channel includes one first air inlet 211, one air distribution passage 214, one guide groove 212, one first air vent 213, and one or more air outlet grooves 215. In this way, the gas flowing out of the n first air outlet holes 226 of the second sub-channel passes through the first air inlet holes 211 corresponding one-to-one to the n first air outlet holes 226, enters each third sub-channel, then circulates independently in each third sub-channel, and finally flows out of the furnace door through the air outlet grooves 215 in each third sub-channel.

[0137] In some embodiments of the present disclosure, the air intake system 20 also includes a flow equalizer 23 on the side of the furnace door 21 away from the air intake plate 22, so that the gas passes through the air intake plate 22, the furnace door 21 and the flow equalizer 23 in sequence, and finally flows to the surface of the substrate that needs to be processed inside the cavity, which is conducive to the gas coming out of the furnace door 21 being more evenly dispersed in the cavity after passing through the flow equalizer 23.

[0138] refer to Figure 10 Figure 2 shows a schematic diagram of a flow equalizer provided in some embodiments of the present disclosure. The flow equalizer 23 includes a stacked multi-layer flow equalizer structure, each including vents. The gas passes through the multi-layer flow equalizer structure, which is equivalent to a multi-stage flow equalizer process. The gas flows from the side of the flow equalizer 23 away from the furnace door 21 into the cavity in a uniform and stable airflow state. The vents can be, for example, 5 mm in size, and the spacing between the vents can range from 10 to 30 mm.

[0139] The present disclosure provides a deposition device, wherein the air intake system may include an air intake plate and a furnace door, the furnace door being connected to the air intake end of the furnace tube body through a furnace mouth flange, and the air intake plate being located on the side of the furnace door away from the furnace tube body; the air intake plate includes a plurality of air intake joints, and a plurality of first air paths which are respectively connected to the plurality of air intake joints and are independent of each other, the furnace door includes a plurality of second air paths corresponding to the first air paths, the first ends of the plurality of second air paths are respectively connected to the plurality of first air paths, and the second ends pass into the interior of the furnace tube body, so that the air intake plate and the furnace door can be independently set, which is convenient for maintenance, the plurality of first air paths are independently set, the plurality of second air paths are independently set, and different air paths can be used to circulate different process gases, isolating the gas paths of different process gases to avoid cross-contamination of various process gases.

[0140] In the third embodiment, the air intake system 20 may include an air passage and a heating structure. Another air intake system 20 in some embodiments of the present disclosure is introduced below.

[0141] The air intake system 20 includes an air passage and a heating structure, wherein the heating structure is located outside the air passage and is used to heat the gas in the air passage;

[0142] In some embodiments of the present disclosure, the air intake system 20 includes an air intake plate 22 and a furnace door 21, the furnace door 21 is connected to the air intake end of the furnace tube body 11 through a furnace mouth flange 14, and the air intake plate 22 is located on the side of the furnace door 21 away from the furnace tube body 11; the air intake plate 22 includes a plurality of air intake connectors 220, and a plurality of first air paths that are respectively connected to the plurality of air intake connectors 220 and are independent of each other, the furnace door 21 includes a plurality of second air paths corresponding one to one to the first air paths, the first ends of the plurality of second air paths are respectively connected to the plurality of first air paths, and the second ends pass into the interior of the furnace tube body 11.

[0143] The air inlet disk 22 also includes a heating groove 222, in which a heating wire is disposed. The heating groove 222 is located on the periphery of the plurality of first air channels. It is not necessarily located on the periphery of the overall structure formed by the first air channels. For example, it can be located on the periphery of each of the plurality of first air channels, at least partially surrounding the first air channels, and is used to heat the gas passing through the plurality of first air channels. The heating temperature can be set as required to avoid the phenomenon of gas powder blockage in the first air channels. For example, Si H4 is prone to blockage, so the heating wire and heating groove 222 can be located on the periphery of the first air channel corresponding to Si H4, or on the periphery of each first air channel. The temperature range of the heating wire can be 20-250°C. Specifically, the heating groove 222 is located on the periphery of the plurality of first air inlet holes 211.

[0144] Some embodiments of the present disclosure provide a deposition device, wherein the air intake system may include an air channel and a heating structure. The heating structure is located outside the air channel and is used to heat the gas in the air channel to avoid powder discharge blockage in the first air channel.

[0145] Each embodiment in this specification is described in a progressive manner. Similar parts between the various embodiments can be referred to in conjunction with each other. Each embodiment focuses on the differences from other embodiments. In particular, for the structural embodiments, each embodiment focuses on a portion of the structure, so the description of other structures is relatively simple. For relevant parts, refer to the partial description of the corresponding embodiment of the other structure. Persons of ordinary skill in the art can understand and implement the present invention without expending any creative effort.

[0146] The above is only a preferred embodiment of the present disclosure. Although the present disclosure has been disclosed as a preferred embodiment as above, it is not intended to limit the present disclosure. Any technician familiar with the art can use the above-disclosed methods and technical contents to make many possible changes and modifications to the technical solution of the present disclosure without departing from the scope of the technical solution of the present disclosure, or modify it into an equivalent embodiment with equivalent changes. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present disclosure without departing from the content of the technical solution of the present disclosure are still within the scope of protection of the technical solution of the present disclosure.

Claims

1. A deposition device, characterized in that: include: Furnace tube body; The furnace tube body is located at the air inlet end of the furnace tube body and is used to introduce process gas into the furnace tube body; A gas outlet system located at the gas outlet end of the furnace tube body, used for extracting gas inside the furnace tube body; The protection system is arranged on the inner wall of the furnace tube body, and the protection system comprises an air intake pipeline and an air exhaust pipeline. The air intake pipeline is used to output the protection gas, and the air exhaust pipeline is used to extract the gas of the furnace tube body from the air intake pipeline side.

2. The deposition device according to claim 1, characterized in that: The air intake pipeline extends along the inner wall of the furnace tube body, and includes an air intake main pipeline and a plurality of air intake branch pipelines, wherein the air intake main pipeline extends along the axial direction of the furnace tube body, and the plurality of air intake branch pipelines extend along the circumferential direction of the furnace tube body and are respectively connected to different positions of the air intake main pipeline; The exhaust pipeline extends along the inner wall of the furnace tube body, and includes an exhaust main pipeline and a plurality of exhaust branch pipelines, wherein the exhaust main pipeline extends along the axial direction of the furnace tube body, and the plurality of exhaust branch pipelines extend along the circumferential direction of the furnace tube body and are respectively connected to different positions of the exhaust main pipeline; The air intake branch pipeline and the air exhaust branch pipeline are arranged at intervals in the axial direction of the furnace tube body.

3. The deposition device according to claim 2, characterized in that: The angle between the extension plane of the air intake branch pipeline and the axial direction of the furnace tube body is greater than 80°, and the angle between the extension plane of the air exhaust branch pipeline and the axial direction of the furnace tube body is greater than 80°.

4. The deposition device according to claim 2, characterized in that: If the first pipeline among the multiple air intake branch pipelines has air extraction branch pipelines on both the air intake end side and the air extraction end side, the first pipeline has first air holes on both the air intake end side and the air extraction end side; if the second pipeline among the multiple air extraction branch pipelines has air intake branch pipelines on both the air intake end side and the air extraction end side, the second pipeline has second air holes on both the air intake end side and the air extraction end side.

5. The deposition device according to claim 2, characterized in that: The interval between the air intake sub-pipeline and the adjacent air extraction sub-pipeline is in the range of 100-500 mm, and the gas flow rate between the air intake sub-pipeline and the adjacent air extraction sub-pipeline is in the range of 5 L / min to 50 L / min.

6. The deposition device according to claim 1, characterized in that: The air inlet pipeline and the air exhaust pipeline both extend spirally along the inner wall of the furnace tube body and are arranged at intervals in the axial direction of the furnace tube body.

7. The deposition device according to claim 6, characterized in that The air inlet pipeline has a first air hole on one side of the air inlet end and on one side of the air extraction end; the air extraction pipeline has a second air hole on one side of the air inlet end and on one side of the air extraction end.

8. The deposition device according to claim 4 or 7, characterized in that: The size range of the first pores and the second pores is 0.5-3 mm, the distance between two adjacent first pores is 10-100 mm, and the distance between two adjacent second pores is 10-100 mm.

9. The deposition device according to any one of claims 1 to 7, characterized in that: The air inlet pipeline is connected to the protective gas passage of the furnace mouth flange at the air inlet end; the air exhaust pipeline is connected to the air exhaust passage of the furnace tail flange at the air outlet end.

10. The deposition device according to any one of claims 1 to 7, characterized in that: The furnace tube body is a quartz tube, and a heating device is arranged on the periphery of the quartz tube for heating the inside of the furnace tube body during the deposition process.

11. A deposition device, characterized in that: include: Furnace tube body; The furnace tube body is located at the air inlet end of the furnace tube body and is used to introduce process gas into the furnace tube body; The air intake system includes an air intake plate and a furnace door, wherein the furnace door is connected to the air intake end of the furnace tube body through a furnace flange, and the air intake plate is located on a side of the furnace door away from the furnace tube body; the air intake plate includes a plurality of air intake joints, and a plurality of first air paths that are respectively connected to the plurality of air intake joints and are independent of each other, and the furnace door includes a plurality of second air paths corresponding to the first air paths, wherein the first ends of the plurality of second air paths are respectively connected to the plurality of first air paths, and the second ends are connected to the interior of the furnace tube body; The gas outlet system located at the gas outlet end of the furnace tube body is used to extract the gas inside the furnace tube body.

12. The deposition device according to claim 11, characterized in that The furnace door comprises a plurality of first air inlet holes located at a first end and a plurality of air outlet slots located at a second end; the plurality of first air inlet holes are respectively connected to the plurality of first air passages; The furnace door also includes multiple air distribution passages between the multiple first air inlet holes and the multiple air outlet grooves; the multiple air distribution passages are correspondingly connected to the first air inlet holes on one side facing the first air inlet holes, and the multiple air distribution passages are correspondingly connected to the air outlet grooves on one side facing the air outlet grooves, and the area of ​​the air distribution passages in a plane parallel to the surface of the furnace door is larger than the area of ​​the air outlet grooves in a plane parallel to the surface of the furnace door.

13. The deposition device according to claim 12, characterized in that The multiple air outlet grooves extend radially with the first center point as the center in a plane parallel to the surface of the furnace door, and are arranged circumferentially; the multiple air distribution passages extend radially with the second center point as the center in a plane parallel to the surface of the furnace door, and are distributed circumferentially.

14. The deposition device according to claim 13, characterized in that The multiple air outlet grooves include multiple groups of air outlet grooves. The air outlet grooves in the same group are arranged radially with the first center point as the center in a plane parallel to the surface of the furnace door, and are connected to the same air distribution passage.

15. The deposition device according to claim 13, characterized in that The air distribution passage forms a fan-shaped area with the second center point as the center in a plane parallel to the surface of the furnace door.

16. The deposition device according to claim 13, characterized in that The furnace door further comprises the plurality of guide grooves and the plurality of first vents; one side of the plurality of guide grooves facing the plurality of first vents is connected to the plurality of first vents respectively, one side of the plurality of guide grooves facing the plurality of first vents is connected to the inlet of the plurality of first vents, and the outlet of the plurality of first vents is connected to the air inlet of the plurality of air distribution passages; The multiple guide grooves extend radially with the third center point as the center in a plane parallel to the surface of the furnace door and are distributed circumferentially; the multiple first ventilation holes form a circular trajectory with the fourth center point as the center in a plane parallel to the surface of the furnace door.

17. The deposition device according to claim 16, characterized in that At least one of the second air path channels includes multiple third sub-channels, the number of first air inlet holes, air distribution passages, guide grooves and first air holes in each third sub-channel is 1, and the number of air outlet grooves in each third sub-channel is greater than or equal to 1.

18. The deposition device according to claim 17, characterized in that The plurality of first air inlet holes belonging to the same second air path channel form a circular trajectory with the fifth center point as the center in a plane parallel to the surface of the furnace door, and the first air inlet holes of different second air paths have different distances from the fifth center point; In a plane parallel to the surface of the furnace door, the guide grooves belonging to the same second gas path channel have the same radial size, and the guide grooves in different second gas path channels have different radial sizes.

19. The deposition apparatus according to claim 17, characterized in that The first center point, the second center point, the third center point and the fourth center point are located on a center line of the furnace door, and the center line is perpendicular to the surface of the furnace door and passes through the center point of the surface of the furnace door.

20. The deposition apparatus according to claim 17, characterized in that The first air inlet hole, the air distribution passage, the guide groove, the first air vent hole and the air outlet groove are arranged at periodic intervals according to the second air path channels to which they belong.

21. The deposition device according to any one of claims 11 to 20, characterized in that: The air inlet plate includes a plurality of second air inlet holes located at the first end and a plurality of first air outlet holes located at the second end; the plurality of second air inlet holes are respectively connected to the plurality of air inlet joints, and the plurality of first air outlet holes are connected to the second air path channel; The air inlet disk also includes a plurality of air dividing grooves, and the plurality of air dividing grooves have a third air inlet hole on the side facing the second air inlet hole for corresponding connection with the second air inlet hole, and the plurality of air dividing grooves have a second air outlet hole on the side facing the first air outlet hole for corresponding connection with the first air outlet hole; there is at least one target air dividing groove among the plurality of air dividing grooves, and the number of second air outlet holes connected to the target air dividing groove is greater than the number of third air inlet holes, so that the number of the first air outlet holes is greater than the number of the second air inlet holes.

22. The deposition apparatus according to claim 21, characterized in that At least one of the first air path channels includes multiple first sub-channels and multiple second sub-channels, the number of the second air inlet holes in each first sub-channel is 1, the number of the first air outlet holes in each second sub-channel is 1, and the multiple first sub-channels and multiple second sub-channels belonging to the same first air path channel are all connected to the same air distribution groove.

23. The deposition apparatus according to claim 22, characterized in that A plurality of second air inlet holes belonging to the same first air path channel form a circular trajectory with the sixth center point as the center in a plane parallel to the surface of the furnace door, and the second air inlet holes of different first air paths have different distances from the sixth center point; A plurality of first air outlets belonging to the same first air path channel form a circular trajectory with the seventh center point as the center in a plane parallel to the surface of the furnace door, and the first air outlets of different first air paths have different distances from the seventh center point; The multiple air dividing grooves extend radially with the eighth center point as the center in a plane parallel to the surface of the furnace door, and are distributed circumferentially; in a plane parallel to the surface of the furnace door, the air dividing grooves belonging to the same first air path channel have the same radial size, and the air dividing grooves in different first air paths have different radial sizes.

24. The deposition device according to any one of claims 11 to 20, characterized in that: The air inlet disk further comprises a heating groove in which a heating wire is arranged, and the heating groove is located at the periphery of the plurality of first air passages.

25. The deposition apparatus according to claim 24, characterized in that The heating groove is located at the periphery of the plurality of first air inlet holes.

26. The deposition device according to any one of claims 11 to 20, characterized in that: The air intake system further comprises a flow equalizer tube on the side of the furnace door away from the air intake plate, the flow equalizer tube comprises a multi-layer flow equalizer structure arranged in a stacked manner, and the flow equalizer structure comprises air vents.

27. A deposition device, characterized in that: include: Furnace tube body; The furnace tube body is located at the air inlet end of the furnace tube body and is used to introduce process gas into the furnace tube body; The air intake system comprises an air passage and a heating structure, wherein the heating structure is located at the periphery of the air passage and is used to heat the gas in the air passage; The gas outlet system located at the gas outlet end of the furnace tube body is used to extract the gas inside the furnace tube body.

28. The deposition apparatus according to claim 27, characterized in that The air intake system includes an air intake plate and a furnace door, wherein the furnace door is connected to the air intake end of the furnace tube body through a furnace flange, and the air intake plate is located on a side of the furnace door away from the furnace tube body; the air intake plate includes a plurality of air intake joints, and a plurality of first air paths that are respectively connected to the plurality of air intake joints and are independent of each other, the furnace door includes a plurality of second air paths that correspond to the first air paths one by one, the first ends of the plurality of second air paths are respectively connected to the plurality of first air paths, and the second ends are connected to the interior of the furnace tube body; The air inlet disk further comprises a heating groove in which a heating wire is arranged, and the heating groove is located at the periphery of the plurality of first air passages.

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