Transparent object thickness measurement refraction compensation factor fusion calibration method and system

Abstract

The invention belongs to the field of spectral confocal precision detection, and particularly relates to a transparent object thickness measurement refraction compensation factor fusion calibration method and system, and the method comprises the following steps: placing a transparent object with a known thickness, and recording the focusing wavelengths of the upper surface and the lower surface of the transparent object at an initial position; continuously moving the transparent object, and recording the focusing wavelengths of the upper surface and the lower surface of the transparent object at each position until the final position; calculating the displacement data of the upper surface and the lower surface of the transparent object at each position by combining the relationship between the displacement and the focusing wavelength; calculating and calibrating a refraction compensation factor according to known thickness and displacement data; fusing and calibrating a plurality of transparent objects with different thicknesses to obtain a comprehensive refraction compensation factor; in actual measurement, the comprehensive refraction compensation factor is used for calculating the actual thickness of the transparent object with the unknown thickness; the method is simple and convenient in calculation, high in calibration precision, good in environmental interference resistance, remarkable in practical value and wide in application prospect.

Description

Technical Field

[0001] The present invention relates to the field of spectral confocal precision detection, and in particular to a transparent object thickness measurement refraction compensation factor fusion calibration method and system. Background Art

[0002] Spectral confocal measurement technology is widely used in the field of high-precision detection due to its advantages of non-contact, high precision, good repeatability and easy operation. At present, some technicians in the field and relevant scholars have proposed many methods for calculating the refraction compensation factor of transparent object thickness measurement, such as the compensation factor calculation method based on optical mechanism, which is based on the optical properties of transparent objects, combined with variables such as wavelength, geometric optical path parameters and refractive index, and the compensation factor of thickness measurement is derived through optical principles. This method has high theoretical accuracy, but it has strict requirements on the accurate calculation of optical parameters. Due to the deviation between theoretical parameters and actual values, the accuracy is often limited in actual thickness measurement. For example, the compensation factor calibration method based on single-thickness multi-point measurement experiment measures the focused wavelength of transparent standard parts of known thickness at different range positions to calibrate the mapping relationship between compensation factor and wavelength. This method does not require complex optical modeling and parameter calculation, but the influence of environmental interference will cause the mapping relationship to deviate from the ideal curve. High-order polynomial fitting is usually used to improve the fitting accuracy, which is easy to cause overfitting. In addition, calibration with only one thickness standard may introduce accidental errors. Summary of the invention

[0003] In order to solve the problems of complex calculation of compensation factors and insufficient calibration accuracy in the prior art, the present invention provides a transparent object thickness measurement refraction compensation factor fusion calibration method and system which has a simple calculation method, can achieve high-precision refraction compensation, and has good anti-environmental interference ability.

[0004] The present invention provides the following technical solutions: On the one hand, the present application provides a transparent object thickness measurement refraction compensation factor fusion calibration method, comprising the following steps: Step S1, using a transparent object of known thickness as the object to be measured, moving its upper surface to the starting position of the measurement area, making the focusing wavelength of its upper surface equal to the minimum wavelength in the measurement range, and recording the focusing wavelengths of its upper and lower surfaces at this time; Step S2, continuously moving the object to be measured so that it gradually passes through the measurement area, and recording the focusing wavelengths of its upper surface and lower surface at different positions, until its lower surface moves to the end position of the measurement area, at which time its lower surface focusing wavelength is equal to the maximum wavelength in the measurement range; Step S3, obtaining displacement data of the upper surface and the lower surface of the measured object at each position according to the recorded focusing wavelengths of the upper surface and the lower surface of the measured object at each position and in combination with the mapping relationship between the displacement and the focusing wavelength; Step S4, calculating and calibrating the refraction compensation factor according to the known thickness of the object to be measured and using the acquired displacement data of the upper surface and the lower surface of the object to be measured at each position; Step S5, repeatedly performing steps S1 to S4 using multiple transparent objects of the same material and different known thicknesses, thereby obtaining multiple refraction compensation factors, fusing and calibrating these refraction compensation factors, and obtaining a comprehensive refraction compensation factor suitable for thickness measurement of transparent objects of the same material and different thicknesses; Step S6, in the actual thickness measurement, a transparent object of the same material and unknown thickness is placed in the measurement area as the actual measured object, and the focusing wavelengths of its upper and lower surfaces are measured. The corresponding displacement data of the upper and lower surfaces are obtained by using the mapping relationship between the displacement and the focusing wavelength, and the actual thickness of the actual measured object is calculated in combination with the comprehensive refraction compensation factor.

[0005] In a possible implementation, in step S3, the displacement-focusing wavelength conversion curve calculation formula of the mapping relationship between the displacement and the focusing wavelength is:

[0006] In the formula, l represents the focusing wavelength, d represents the displacement value after conversion, p 0. p 1. p 2 is a set of parameters corresponding to the conversion curve of the measuring instrument, and the parameters are obtained by fitting the experimental data.

[0007] In a possible implementation, in step S4, calculating and calibrating the refraction compensation factor includes: calculating the refraction compensation factor at each position in the measurement area according to the known thickness of the measured object and using the acquired displacement data of the upper surface and the lower surface of the measured object at each position:

[0008] In the formula, l 1,k Indicated in k The focusing wavelength of the upper surface of the position, l 2,k Indicated in k The focusing wavelength of the lower surface of the position, c k The focusing wavelength of the lower surface is l 2,k is the refraction compensation factor when , and H represents the known thickness of the transparent object.

[0009] In a possible implementation, the relationship between the refraction compensation factor at different positions of the measurement area and the corresponding lower surface focusing wavelength is analyzed, and the mapping relationship between the refraction compensation factor and the lower surface focusing wavelength is calibrated:

[0010] Where α, β, and γ are the fitting coefficients obtained by data calibration fitting. l 2 is the focusing wavelength of the lower surface.

[0011] In a possible implementation manner, in step S5, the fusing and calibrating of the refraction compensation factors includes: m ( m ≥2) transparent objects of the same material and different known thickness, the mapping relationship between their refraction compensation factor and the focusing wavelength of the lower surface is:

[0012] In the formula, α k , β k , c k For the k The fitting coefficient of the refraction compensation factor of transparent objects of the same material and different known thicknesses obtained by data calibration fitting is: C k ( l 2) Indicates the k The mapping relationship between the refraction compensation factor and the focusing wavelength of the lower surface obtained by calibrating transparent objects of the same material and different known thicknesses, and k ∈(1, 2 ,..., m ).

[0013] In a possible implementation, m ( m ≥2) The mapping relationship between the refraction compensation factor of transparent objects of the same material and different known thicknesses and the focusing wavelength of the lower surface is fused and calibrated to obtain a comprehensive refraction compensation factor suitable for thickness measurement of transparent objects of the same material and different thicknesses:

[0014] Where Ψ α (·),Ψ β (·),Ψ γ (·) are general fusion operators for different fitting parameters, which are used to realize parameter fusion calibration.

[0015] In a possible implementation manner, in step S6, calculating the actual thickness of the actual measured object in combination with the comprehensive refraction compensation factor includes:

[0016] In the formula H 待测 is the thickness of the transparent object to be measured, l 1 indicates the focused wavelength of the surface at the current measurement position, l 2 indicates the focused wavelength of the lower surface at the current measurement position.

[0017] The present application also provides a transparent object thickness measurement refraction compensation factor fusion calibration system, comprising: The sample positioning and displacement control module is used to accurately position a transparent object of known thickness at the starting position of the measurement area and control the smooth and continuous movement of the sample within the measurement area; A focused wavelength measurement data acquisition module is used to record the focused wavelength data of the upper and lower surfaces of the transparent object in real time during movement; A displacement-focus wavelength conversion module is used to convert the focus wavelength data recorded during the measurement process into a corresponding displacement value and establish a mapping relationship between the displacement and the focus wavelength; A refraction compensation factor calculation and calibration module is used to calculate and calibrate the refraction compensation factor based on the displacement data of a sample of known thickness, and establish a mapping relationship between the refraction compensation factor and the focusing wavelength; A refraction compensation factor fusion calibration module is used to fuse the refraction compensation factors from multiple samples of the same material and different known thicknesses to generate a comprehensive refraction compensation factor; The transparent object thickness measurement module is used to calculate the actual thickness of the transparent object to be measured according to the fused refraction compensation factor and the measured focusing wavelength in actual measurement.

[0018] On the other hand, the present application provides a computer device comprising a memory and a processor, wherein the memory pre-stores a computer program comprising a transparent object thickness measurement refraction compensation factor fusion calibration system, and when the processor runs the computer program, it executes the steps of the transparent object thickness measurement refraction compensation factor fusion calibration method.

[0019] It is to be understood that the foregoing general description and the following detailed description are exemplary only and are not restrictive of the invention.

[0020] In the present invention, a transparent object with known thickness is used to record and analyze the focusing wavelength data at different positions within the measurement range, and the wavelength data are converted into corresponding displacement values, thereby calculating and calibrating the refraction compensation factor.

[0021] By calibrating multiple transparent objects of the same material and with different known thicknesses and fusing the resulting refraction compensation factors, high-precision refraction compensation and thickness measurement are achieved, significantly improving the accuracy and reliability of the measurement.

[0022] The present invention effectively overcomes the problems in the prior art such as complex calculation of refraction compensation factors, insufficient calibration accuracy, and adverse effects of environmental interference on measurement results. The system has a simple design, an efficient calculation process, and the advantages of strong real-time performance and low resource consumption, and has broad practical application value. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A flowchart of the method for fusion calibration of refraction compensation factors for transparent object thickness measurement provided by the present invention; Figure 2 A schematic diagram of calibrating the refraction compensation factor of a transparent object of known thickness in the transparent object thickness measurement refraction compensation factor fusion calibration method provided by the present invention; Figure 3 A schematic diagram of the fusion calibration refraction compensation factors of two transparent objects with known thicknesses in the fusion calibration method for refraction compensation factors of transparent object thickness measurement provided by the present invention; Figure 4 It is a module schematic diagram of the transparent object thickness measurement refraction compensation factor fusion calibration system of the present invention; Figure 5 A schematic diagram showing the conversion of the focused wavelength of the transparent object to be measured into an actual displacement value via a conversion curve; Figure 6 This is a schematic diagram of the thickness measurement results of the transparent object to be measured at different measuring points within the measurement range. DETAILED DESCRIPTION

[0024] The embodiments of the present invention are described below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0025] The present invention provides a method and system for fusion calibration of refraction compensation factors for transparent object thickness measurement, which can be directly applied to the thickness measurement process of transparent objects, and uses multiple transparent objects of the same material but with different known thicknesses to perform fusion calibration of refraction compensation factors.

[0026] The present invention effectively overcomes the shortcomings of traditional optical mechanism-based methods that require high precision calculation of optical parameters, and single thickness calibration methods that are susceptible to environmental interference and accidental errors, and significantly improves the accuracy and reliability of transparent object thickness measurement.

[0027] See also Figure 1-Figure 3 The specific implementation steps of the transparent object thickness measurement refraction compensation factor fusion calibration method proposed in this embodiment are as follows: Step S1, select a transparent object with known thickness and uniform material as the object to be measured. Ensure that the surface of the object is smooth and has no obvious defects to reduce measurement errors. Fix the object to be measured on a precision displacement platform that can achieve micron-level displacement control. Move its upper surface to the starting position of the measurement area so that the focusing wavelength of the upper surface is equal to the minimum wavelength in the range, and record the focusing wavelengths of the upper and lower surfaces of the object to be measured at this time; Step S2, according to the range of the measurement area and the required resolution, set the moving step length of the transparent object. For example, each step is 10 microns. Slowly move the transparent object according to the set step length, so that it gradually passes through the measurement area, and record the corresponding upper surface focus wavelength at different positions l 1,k and the focusing wavelength of the lower surface l 2,k , until the lower surface of the object under test moves to the end position of the measurement area, at which time the focusing wavelength of the lower surface is equal to the maximum wavelength in the measurement range; Step S3, during the movement process, the actual displacement value corresponding to each position is calculated using the moving step length and total moving distance of the precision displacement platform. According to the recorded focusing wavelengths of the upper and lower surfaces at each position, since there is a nonlinear mapping relationship between the displacement value and the focusing wavelength, a curve fitting method is used to fit the experimental data to obtain the displacement-focusing wavelength conversion curve calculation formula:

[0028] In the formula, l represents the focusing wavelength of the current measurement position, d represents the displacement value after conversion, p 0. p 1. p 2 is a set of parameters of the conversion curve. The parameters are obtained by fitting the experimental data. The conversion curve parameters used in this embodiment are p 0 = -4536.15, p 1 = 10.47, p 2= ​​0.00178.

[0029] Step S4, based on the known thickness of the transparent object H , using the upper and lower surface displacement data obtained at each position, calculate and calibrate the refraction compensation factor, including the following process: The refraction compensation factor is calculated for each position in the measurement area as follows:

[0030] In the formula, l 1,k Indicates that the object being measured is k The focusing wavelength of the upper surface of the position, l2,k Indicates that the object being measured is k The focusing wavelength of the lower surface of the position, c k The focusing wavelength of the lower surface is l 2,k The refraction compensation factor when H Indicates the known thickness of a transparent object.

[0031] By analyzing the relationship between the refraction compensation factor at different positions and the focusing wavelength of the lower surface, a mapping relationship between the refraction compensation factor and the focusing wavelength of the lower surface can be calibrated. Specifically, it is expressed as:

[0032] In the formula α , β , c is the fitting coefficient, l 2 represents the focusing wavelength of the lower surface at the current measurement position, which is obtained through data calibration fitting.

[0033] Step S5, in this embodiment, without loss of generality, two transparent objects of the same material and known thicknesses of 505.50 μm and 1986.81 μm are used to repeat steps S1 to S4, thereby obtaining two refraction compensation factors. The two refraction compensation factors are fused and calibrated to obtain a comprehensive refraction compensation factor suitable for thickness measurement of transparent objects of the material, including the following process: For the two transparent objects of the same material and different known thickness, the mapping relationship between their refraction compensation factor and the focusing wavelength of the lower surface can be obtained by calculation and calibration:

[0034] In the formula α k , β k , c k For the k The fitting coefficient of the refraction compensation factor is obtained by fitting the data of transparent objects of the same material and different known thicknesses. α 1 = -2.936 × 10 -7 , β 1=3.354×10 -4 , c 1 = 1.361, α 2 = -3.393 × 10 -7 , β 2 = 4.254 × 10 -4 , c 2 =1.321.

[0035] By integrating the calibration formula, the comprehensive refraction compensation factor suitable for thickness measurement of transparent objects of this material is obtained:

[0036] Where Ψ α (·),Ψ β (·),Ψ γ (·) are respectively universal fusion operators for different fitting parameters, which are used to realize parameter fusion calibration. In this embodiment, without loss of generality, the arithmetic mean is selected to realize the parameter fusion calibration operator, that is,

[0037] Therefore, the comprehensive refraction compensation factor is:

[0038] In the formula, ( α 1+ α 2) / 2 = -3.165×10 -7 , ( β 1+ β 2) / 2=3.804×10 -4 , ( c 1+ c 2) / 2=1.341.

[0039] Step S6, in the actual thickness measurement, a transparent object of the same material and unknown thickness is placed in the measurement area, and the focusing wavelengths of the upper and lower surfaces are measured. The displacement data of the corresponding upper and lower surfaces are obtained by using the relationship between displacement and focusing wavelength, and the actual thickness of the transparent object is calculated in combination with the comprehensive refraction compensation factor of the fusion calibration. The formula for calculating the actual thickness of the transparent object in combination with the comprehensive refraction compensation factor of the fusion calibration is:

[0040] In the formula H 待测 is the thickness of the transparent object to be measured, l 1 indicates the focused wavelength of the surface at the current measurement position, l 2 indicates the focused wavelength of the lower surface at the current measurement position.

[0041] See also Figure 4 The embodiment of the present invention also provides a transparent object thickness measurement refraction compensation factor fusion calibration system, which specifically includes the following modules: The sample positioning and displacement control module is used to accurately position a transparent object of known thickness at the starting position of the measurement area and control the smooth and continuous movement of the sample within the measurement area; A focused wavelength measurement data acquisition module is used to record the focused wavelength data of the upper and lower surfaces of the transparent object in real time during movement; A displacement-focus wavelength conversion module is used to convert the focus wavelength data recorded during the measurement process into a corresponding displacement value and establish a mapping relationship between the displacement and the focus wavelength; A refraction compensation factor calculation and calibration module is used to calculate and calibrate the refraction compensation factor based on the displacement data of a sample of known thickness, and establish a mapping relationship between the refraction compensation factor and the focusing wavelength; A refraction compensation factor fusion calibration module is used to fuse the refraction compensation factors from multiple samples of the same material and different known thicknesses to generate a comprehensive refraction compensation factor; The transparent object thickness measurement module is used to calculate the actual thickness of the transparent object to be measured according to the fused refraction compensation factor and the measured focusing wavelength in actual measurement.

[0042] Among them, the processing process of the displacement-focused wavelength conversion module includes: receiving the focused wavelength data of the upper and lower surfaces at each position from the focused wavelength measurement data acquisition module, and using the displacement-focused wavelength conversion curve formula to calculate the corresponding displacement value, and then output the result to the refraction compensation factor calculation and calibration module. The processing process of the refraction compensation factor calculation and calibration module includes: analyzing the relationship between the refraction compensation factor and the focused wavelength of the lower surface, calibrating the mapping relationship between the two, and transmitting it to the refraction compensation factor fusion calibration module. The processing process of the refraction compensation factor fusion calibration module includes: receiving the mapping relationship between the refraction compensation factor and the focused wavelength of transparent objects of different thicknesses from the refraction compensation factor calculation and calibration module, and after fusion calibration, outputting the mapping relationship between the comprehensive refraction compensation factor and the focused wavelength to the transparent object thickness measurement module. The specific implementation method of the above modules is similar to the aforementioned transparent object thickness measurement refraction compensation factor fusion calibration method.

[0043] This embodiment also provides a computer device, including a memory and a processor, wherein a computer program is pre-stored in the memory, and when the processor runs the computer program, the steps of the transparent object thickness measurement refraction compensation factor fusion calibration method are executed.

[0044] In order to better demonstrate the implementation effect of this method, in this embodiment, a transparent object with a true value of the thickness of the object to be tested of 1006.33 μm is selected as the test object. Figure 5 As shown in the figure, the focus wavelength is converted from the conversion curve to the displacement value at the 150th measurement point within the measurement range for a 1006.33μm transparent object. Figure 6 As shown, the measured value and true value of the thickness of a 1006.33μm transparent object at different measuring points within the measuring range are compared.

[0045] In order to better demonstrate the implementation effect of the method of the present invention, in this embodiment, the performance of different refraction compensation factor calibration methods is compared, and the relevant results are shown in Table 1. It can be seen from the table that the fitting effect of the quadratic fitting calibration is general; when the polynomial order is increased to five times, the measurement accuracy is improved. However, when the polynomial fitting order is further increased to eight times, an obvious overfitting phenomenon occurs. This result verifies the view mentioned above, that is, although the use of high-order polynomial fitting can improve the fitting accuracy, it is also easy to cause overfitting problems. In addition, the analysis shows that for the same refraction compensation factor calibration method, the selection of transparent objects of different thicknesses for calibration will lead to differences in the measurement accuracy of the object to be measured. This further verifies the problem mentioned above that only using a single thickness of transparent standard parts for calibration may introduce accidental errors. The refraction compensation factor fusion calibration method proposed in the present invention significantly improves the measurement accuracy by optimizing the calibration strategy. Its measurement mean absolute error (MAE) is 0.78 and the measurement standard deviation (STD) is 0.87, both of which are better than other calibration methods. This result fully demonstrates the superiority of the method of the present invention and effectively improves the accuracy and reliability of thickness measurement of transparent objects.

[0046] Table 1 Comparison of different refraction compensation factor calibration methods

[0047] The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention; the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A method for fusion calibration of refraction compensation factor for transparent object thickness measurement, characterized in that: The steps include: Step S1, using a transparent object of known thickness as the object to be measured, moving its upper surface to the starting position of the measurement area, making the focusing wavelength of its upper surface equal to the minimum wavelength in the measurement range, and recording the focusing wavelengths of its upper and lower surfaces at this time; Step S2, continuously moving the object to be measured so that it gradually passes through the measurement area, and recording the focusing wavelengths of its upper surface and lower surface at different positions, until its lower surface moves to the end position of the measurement area, at which time its lower surface focusing wavelength is equal to the maximum wavelength in the measurement range; Step S3, obtaining displacement data of the upper surface and the lower surface of the measured object at each position according to the recorded focusing wavelengths of the upper surface and the lower surface of the measured object at each position and in combination with the mapping relationship between the displacement and the focusing wavelength; Step S4, calculating and calibrating the refraction compensation factor according to the known thickness of the object to be measured and using the acquired displacement data of the upper surface and the lower surface of the object to be measured at each position; Step S5, repeatedly performing steps S1 to S4 using multiple transparent objects of the same material and different known thicknesses, thereby obtaining multiple refraction compensation factors, fusing and calibrating these refraction compensation factors, and obtaining a comprehensive refraction compensation factor suitable for thickness measurement of transparent objects of the same material and different thicknesses; Step S6, in the actual thickness measurement, a transparent object of the same material and unknown thickness is placed in the measurement area as the actual measured object, and the focusing wavelengths of its upper and lower surfaces are measured. The corresponding displacement data of the upper and lower surfaces are obtained by using the mapping relationship between the displacement and the focusing wavelength, and the actual thickness of the actual measured object is calculated in combination with the comprehensive refraction compensation factor.

2. The method for fusion calibration of refraction compensation factor for transparent object thickness measurement according to claim 1, characterized in that: In step S3, the displacement-focusing wavelength conversion curve calculation formula of the mapping relationship between the displacement and the focusing wavelength is: In the formula, λ represents the focusing wavelength, d represents the displacement value after conversion, p 0. p 1. p 2 is a set of parameters corresponding to the conversion curve of the measuring instrument, and the parameters are obtained by fitting the experimental data.

3. The method for fusion calibration of refraction compensation factor for transparent object thickness measurement according to claim 2, characterized in that: In step S4, the calculation and calibration of the refraction compensation factor includes: calculating the refraction compensation factor at each position of the measurement area according to the known thickness of the measured object and using the obtained displacement data of the upper surface and the lower surface of the measured object at each position: In the formula, λ 1,k Indicated in k The focusing wavelength of the upper surface at position, λ 2,k Indicated in k The focusing wavelength of the lower surface of the position, c k Indicates that the focusing wavelength of the lower surface is λ 2,k is the refraction compensation factor when , and H represents the known thickness of the transparent object.

4. The method for fusion calibration of refraction compensation factor for transparent object thickness measurement according to claim 3, characterized in that: The relationship between the refraction compensation factor at different positions in the measurement area and the corresponding lower surface focusing wavelength is analyzed, and the mapping relationship between the refraction compensation factor and the lower surface focusing wavelength is calibrated: Where α, β, and γ are the fitting coefficients obtained by data calibration fitting. λ 2 is the focusing wavelength of the lower surface.

5. The method for fusion calibration of refraction compensation factor for transparent object thickness measurement according to claim 1, characterized in that: In step S5, the fusion calibration of the refraction compensation factors includes: m ( m ≥2) transparent objects of the same material and different known thickness, the mapping relationship between their refraction compensation factor and the focusing wavelength of the lower surface is: In the formula, α k , β k , γ k For the k The fitting coefficient of the refraction compensation factor of transparent objects of the same material and different known thicknesses obtained by data calibration fitting is: C k ( λ 2) Indicates the k The mapping relationship between the refraction compensation factor and the focusing wavelength of the lower surface obtained by calibrating transparent objects of the same material and different known thicknesses, and k ∈(1, 2 ,..., m ).

6. A transparent object thickness measurement refraction compensation factor fusion calibration method according to claim 5, characterized in that: The mapping relationship between the refraction compensation factor and the focusing wavelength of the lower surface is fused and calibrated to obtain a comprehensive refraction compensation factor suitable for thickness measurement of transparent objects of the same material but different thicknesses: Where Ψ α (·),Ψ β (·),Ψ γ (·) are general fusion operators for different fitting parameters, which are used to realize parameter fusion calibration.

7. The method for fusion calibration of refraction compensation factor for transparent object thickness measurement according to claim 1, characterized in that: In step S6, the actual thickness of the object under test is calculated by combining the comprehensive refraction compensation factor, including: In the formula H 待测 is the thickness of the transparent object to be measured, λ 1 indicates the focused wavelength of the surface at the current measurement position, λ 2 indicates the focused wavelength of the lower surface at the current measurement position.

8. A transparent object thickness measurement refraction compensation factor fusion calibration system, characterized in that: The steps for executing the transparent object thickness measurement refraction compensation factor fusion calibration method according to any one of claims 1 to 7 include: The sample positioning and displacement control module is used to accurately position a transparent object of known thickness at the starting position of the measurement area and control the smooth and continuous movement of the sample within the measurement area; A focused wavelength measurement data acquisition module is used to record the focused wavelength data of the upper and lower surfaces of the transparent object in real time during movement; A displacement-focus wavelength conversion module is used to convert the focus wavelength data recorded during the measurement process into a corresponding displacement value and establish a mapping relationship between the displacement and the focus wavelength; A refraction compensation factor calculation and calibration module is used to calculate and calibrate the refraction compensation factor based on the displacement data of a sample of known thickness, and establish a mapping relationship between the refraction compensation factor and the focusing wavelength; A refraction compensation factor fusion calibration module is used to fuse the refraction compensation factors from multiple samples of the same material and different known thicknesses to generate a comprehensive refraction compensation factor; The transparent object thickness measurement module is used to calculate the actual thickness of the transparent object to be measured according to the fused refraction compensation factor and the measured focusing wavelength in actual measurement.

9. A computer device comprising a memory and a processor, characterized in that: The memory pre-stores a computer program including the transparent object thickness measurement refraction compensation factor fusion calibration system as described in claim 8. When the processor runs the computer program, it executes the steps of the transparent object thickness measurement refraction compensation factor fusion calibration method as described in any one of claims 1-7.

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