An air path inner surface detection device and a gallium nitride production system

Abstract

The present invention relates to the technical field of gas path detection, and particularly relates to an inner surface detection device for a gas path and a gallium nitride production system. In the detection device, a first vision module is used to obtain global image data of the inner surface of the gas path in front of the inner surface detection device for the gas path. A control end is used to determine the defect position according to the global image data, and is used to control an adjustment mechanism to fit a cover body to the inner surface of the gas path so that the cover body covers the defect position. A second vision module is used to obtain close-range image data of the defect position. A compression mechanism is used to compress the gas in the cover body, and a gas pressure detection module is used to detect the gas pressure in the cover body. The control end is further used to determine the defect volume of the defect position according to the compression ratio of the compression mechanism and the gas pressure in the cover body after compression. It can perform preventive evaluation on the quality risk of gas transmission, and helps to reduce the adverse impact of gas path problems on the gas transmission quality.

Description

Technical Field

[0001] The present invention relates to the technical field of gas path detection, and more particularly, to an inner surface detection device for a gas path and a gallium nitride production system. Background Art

[0002] In gas transportation, the integrity of the inner surface of the gas path is very important, which is directly related to the quality of gas transportation. Although existing detection means can help determine whether there are damages in the gas path, such as cracking and defects. However, when problems such as cracking and defects are detected, the gas transported before has already been affected. Currently, in gas transportation, there is a lack of preventive detection means.

[0003] In view of this, the present application is specifically proposed. Summary of the Invention

[0004] The first object of the present invention is to provide an inner surface detection device for a gas path, which can perform preventive assessment on the quality risk of gas transportation and help reduce the adverse impact of gas path problems on gas transportation quality.

[0005] The second object of the present invention is to provide a gallium nitride production system, which can perform preventive assessment on the quality risk of the transportation of raw material gas during the production process, can reduce the adverse impact of the transportation process on the purity of the raw material gas, and is conducive to ensuring the high-quality production of gallium nitride.

[0006] The embodiments of the present invention are implemented as follows:

[0007] An inner surface detection device for a gas path includes: a frame, a first vision module, an adjustment mechanism, a cover, a compression mechanism, a second vision module, a pressure detection module, and a control terminal.

[0008] The frame has a traveling mechanism. The first vision module is installed on the frame to obtain global image data of the inner surface of the gas path in front of the inner surface detection device for the gas path.

[0009] The adjustment mechanism is provided on the frame, the cover is installed on the adjustment mechanism, and the compression mechanism, the second vision module, and the pressure detection module are all provided inside the cover.

[0010] The control terminal is used to determine the defect position according to the global image data, and is used to control the adjustment mechanism to fit the cover to the inner surface of the gas path so that the cover covers the defect position. The second vision module is used to obtain close-range image data of the defect position. The compression mechanism is used to compress the gas inside the cover, and the pressure detection module is used to detect the air pressure inside the cover.

[0011] The control terminal is further used to determine the defect volume of the defect position according to the compression ratio of the compression mechanism and the air pressure inside the cover after compression.

[0012] Furthermore, the frame includes a front frame body and a rear frame body. The front frame body has a first reference rod extending toward the rear frame body on one side close to the rear frame body, and the rear frame body has a second reference rod extending toward the front frame body on one side close to the front frame body. The first reference rod and the second reference rod are coaxially spaced.

[0013] The adjusting mechanism comprises: a rotating member, an adjusting rod, a first driver and a second driver.

[0014] The rotating member is arranged between the first reference rod and the second reference rod, and the first reference rod and the second reference rod are both rotationally matched with the rotating member. Along the axial direction of the first reference rod, the first reference rod and the second reference rod are both fixedly matched with the rotating member.

[0015] The adjusting rod is arranged perpendicular to the first reference rod and penetrates the rotating member, and the adjusting rod is slidably matched with the rotating member.

[0016] The first driver is arranged on the first reference rod or the second reference rod to drive the rotating member. The second driver is arranged on the rotating member to drive the adjusting rod to slide. The cover is arranged on the end of the adjusting rod.

[0017] Furthermore, the traveling mechanism includes: walking wheels, a first transmission shaft, a second transmission shaft and a power mechanism.

[0018] Both the front frame and the rear frame are provided with running wheels, and the power mechanism is arranged on the rear frame.

[0019] The first reference rod and the second reference rod are both tubular. The first transmission shaft is rotatably accommodated in the first reference rod, and the second transmission shaft is rotatably accommodated in the second reference rod. The first transmission shaft is in transmission cooperation with the walking wheel of the front frame body, and the second transmission shaft is in transmission cooperation with the power mechanism.

[0020] A first blind hole is provided on one end surface of the first transmission shaft close to the second transmission shaft, the first blind hole is eccentrically arranged on the first transmission shaft, and a first magnetic part is slidably fitted in the first blind hole. A second blind hole is provided on one end surface of the second transmission shaft close to the first transmission shaft, the second blind hole is eccentrically arranged on the second transmission shaft, and a second magnetic part is slidably fitted in the second blind hole.

[0021] The rotating member is provided with a clearance through hole, which extends along the axial direction of the first reference rod and penetrates the rotating member.

[0022] A rotating core is rotatably matched in the yielding through hole, and the rotating core has a first inner cavity. A first opening for connecting the outside with the first inner cavity is opened on the side of the rotating core close to the first transmission shaft, and a second opening for connecting the outside with the first inner cavity is opened on the side of the rotating core close to the second transmission shaft.

[0023] A third magnetic member is provided in the first inner cavity. Along the circumferential direction of the rotating core, the third magnetic member is rotatably fitted within the rotating core, and the third magnetic member has an N-pole magnetic region and an S-pole magnetic region. The third magnetic member is driven by a third driver.

[0024] The third magnetic member has a first working position and a second working position. When the third magnetic member is in the first working position, the first opening and the second opening respectively correspond to any one of the N-pole magnetic region and the S-pole magnetic region. The first magnetic member is attracted by the magnetic force of the third magnetic member and extends into the first opening, and the second magnetic member is attracted by the magnetic force of the third magnetic member and extends into the second opening, so that the first transmission shaft and the second transmission shaft are in transmission cooperation.

[0025] When the third magnetic member is in the second working position, the first opening and the second opening respectively correspond to the other one of the N-pole magnetic region and the S-pole magnetic region. The first magnetic member is repelled by the magnetic force of the third magnetic member and withdraws from the first opening, and the second magnetic member is repelled by the magnetic force of the third magnetic member and withdraws from the second opening, so that the power between the first transmission shaft and the second transmission shaft is disconnected.

[0026] When the inner surface detection device of the gas path travels, the control end controls the third magnetic member to be in the first working position. When it is necessary to detect the defect volume at the defect position, the control end controls the third magnetic member to be in the second working position.

[0027] Further, the relief through-hole, the rotating core and the first reference rod are coaxially arranged.

[0028] On both sides of the rotating member close to the first reference rod and the second reference rod, fitting grooves are provided. The relief through-hole is opened at the bottom of the fitting groove and communicates the fitting grooves on both sides. The first reference rod and the second reference rod respectively extend into the fitting grooves on both sides of the rotating member and are rotatably fitted in the fitting grooves.

[0029] The adjusting rod is arranged along the radial direction of the first reference rod, and the adjusting rod passes through the relief through-hole. The adjusting rod is provided with a communication hole extending along the axial direction of the relief through-hole, and the rotating core is rotatably fitted in the communication hole.

[0030] The adjusting rod has a first sliding stop point and a second sliding stop point. When the adjusting rod is located at the first sliding stop point, the communication hole is coaxially arranged with the relief through-hole, and the cover body is separated from the inner surface of the gas path. When the adjusting rod is located at the second sliding stop point, the communication hole is offset from the relief through-hole, and the cover body covers the inner surface of the gas path.

[0031] Further, a relief groove is provided on the pore wall of the communication hole, and the relief groove continuously extends circumferentially along the relief groove to form a ring. The adjusting rod further has a second inner cavity, and the second inner cavity communicates with the relief groove.

[0032] The rotating core has an external gear ring, and the external gear ring is located in the relief groove.

[0033] A rotating ring is arranged in the second inner cavity. The rotating ring also has an external toothed ring, and the rotating ring meshes with the rotating core.

[0034] The rotating ring is provided with a radial through hole, and a groove is arranged on the hole wall of the radial through hole. The groove continuously extends along the circumferential direction of the radial through hole to form a ring shape.

[0035] A limiting column is slidably fitted in the radial through hole. The limiting column has a flange, and the flange is slidably fitted in the groove. An elastic member is abutted between one side of the flange away from the inner ring wall of the rotating ring and one side of the groove away from the inner ring wall of the rotating ring, so that the end portion of the limiting column extends into the interior of the rotating ring.

[0036] A torsion spring is further arranged in the second inner cavity, and the torsion spring is located inside the rotating ring.

[0037] One end of the limiting column close to the torsion spring is wedge-shaped, and the free end of the torsion spring abuts against the wedge-shaped surface of the limiting column.

[0038] When the first transmission shaft drives the second transmission shaft through the rotating core, the limiting column pushes the free end of the torsion spring against the elastic force of the torsion spring.

[0039] Wherein, the relationship between the torsion spring and the elastic member is that when the limiting column pushes the free end of the torsion spring to move at least two turns, the free end of the torsion spring can push the limiting column towards the outside of the rotating ring against the elastic force of the elastic member, so that the free end of the torsion spring crosses the wedge-shaped surface of the limiting column.

[0040] The rotating ring is also provided with a ratchet mechanism, so that the rotating ring can only rotate in the direction driven by the rotating core.

[0041] A separating mechanism for separating the ratchet and the pawl of the ratchet mechanism is further arranged in the second inner cavity.

[0042] A gallium nitride production system includes: a gallium nitride production reaction furnace, a first gas pipeline, a second gas pipeline, and the above-mentioned inner surface detection device of the gas pipeline.

[0043] The first gas pipeline and the second gas pipeline are used to alternately supply raw material gas to the gallium nitride production reaction furnace.

[0044] The inner surface detection device of the gas pipeline is used to detect the inner surface condition of the one of the first gas pipeline and the second gas pipeline that is idle.

[0045] The beneficial effects of the technical solution of the embodiment of the present invention include:

[0046] The inner surface detection device of the gas pipeline provided by the embodiment of the present invention can effectively check the problems of the inner surface of the gas pipeline, especially can screen the defective parts in the early stage of damage (for example: the early stage of corrosion), can warn of the future risks of gas transmission, and play a preventive role.

[0047] Generally speaking, the air path inner surface detection device provided by the embodiments of the present invention can perform preventive evaluation on the quality risk of gas transportation, which helps to reduce the adverse impact of air path problems on the gas transportation quality.

[0048] The gallium nitride production system provided by the embodiments of the present invention can perform preventive evaluation on the quality risk of raw material gas transportation during the production process, which can reduce the adverse impact of the transportation process on the purity of the raw material gas and is beneficial to ensuring the high-quality production of gallium nitride. Brief Description of the Drawings

[0049] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required for the embodiments. It should be understood that the following drawings only show some embodiments of the present invention, so they should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other relevant drawings can also be obtained based on these drawings.

[0050] Figure 1 It is a schematic diagram of the cooperation of the air path inner surface detection device provided by the embodiments of the present invention in the air path;

[0051] Figure 2 It is a schematic diagram of the cooperation of the cover body of the air path inner surface detection device provided by the embodiments of the present invention;

[0052] Figure 3 It is a schematic diagram of the end face structure of the first transmission shaft;

[0053] Figure 4 It is a schematic diagram of the end face structure of the second transmission shaft;

[0054] Figure 5 It is a schematic diagram of the end face structure of the rotating core;

[0055] Figure 6 It is a schematic diagram of the internal structure of the rotating core from the end face perspective;

[0056] Figure 7 It is a schematic diagram of the internal structure of the rotating core from the side perspective;

[0057] Figure 8 It is a schematic diagram of the cooperation of the first reference rod, the rotating member and the second reference rod (when the third magnetic member is in the first working position);

[0058] Figure 9 It is a schematic diagram of the cooperation of the first reference rod, the rotating member and the second reference rod (when the third magnetic member is in the second working position);

[0059] Figure 10 It is a schematic diagram of the end face structure of the rotating member;

[0060] Figure 11 Schematic diagram of the internal structure of the rotating part;

[0061] Figure 12 Schematic diagram of the internal structure of the adjusting rod;

[0062] Figure 13 Schematic diagram of the fit of the rotating ring.

[0063] Explanation of reference numerals:

[0064] Frame 100; front frame body 110; first reference rod 111; rear frame body 120; second reference rod 121; traveling wheel 210; first transmission shaft 220; first blind hole 221; first magnetic member 222; second transmission shaft 230; second blind hole 231; second magnetic member 232; first vision module 300; adjusting mechanism 400; rotating part 410; relief through hole 411; mating groove 412; adjusting rod 420; communication hole 421; relief groove 422; second inner cavity 423; rotating ring 424; limiting post 425; elastic member 426; coil spring 427; cover body 500; compression mechanism 600; rotating core 700; first inner cavity 710; first opening 720; second opening 730; third magnetic member 740. Detailed implementation manners

[0065] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Apparently, the described embodiments are some but not all of the embodiments of the present invention. Generally, the components of the embodiments of the present invention described and illustrated herein can be arranged and designed in various different configurations.

[0066] Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed present invention, but merely represents selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the scope of protection of the present invention.

[0067] It should be noted that: similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0068] The terms "first", "second", "third", etc. are only used for distinguishing descriptions and cannot be construed as indicating or implying relative importance.

[0069] In addition, terms such as "parallel" and "perpendicular" do not mean that the components are required to be absolutely parallel or perpendicular, but can be slightly inclined. For example, "parallel" only means that its direction is more parallel relative to "perpendicular", rather than indicating that the structure must be completely parallel, but can be slightly inclined.

[0070] In the description of the present invention, it should also be noted that, unless otherwise clearly specified and limited, the terms "arrangement", "installation", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, and can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0071] The inventors of the present application have found through research that: during the gas transportation process, although existing detection means can help detect damage to the gas path, such as defects (depressions) on the inner surface, however, when the defects (depressions) appear, it means that the pipeline materials originally present at these defect (depression) positions are likely to have been carried away by the transported gas or have reacted with the transported gas. These will directly affect the quality of the previously transported gas, and moreover, the detection of defects (depressions) on the inner surface lags behind the impact on gas quality, which is not conducive to the preventive control of the gas transportation quality.

[0072] To overcome the deficiencies in the prior art, please refer to Figure 1 and Figure 2 , this embodiment provides an inner surface detection device for a gas path. The inner surface detection device for a gas path includes: a frame 100, a first vision module 300, an adjustment mechanism 400, a cover 500, a compression mechanism 600, a second vision module (not shown in the figure), a pressure detection module (not shown in the figure), and a control terminal (not shown in the figure).

[0073] The inner surface detection device for a gas path is used to detect the inner surface of the gas path. During detection, the inner surface detection device for a gas path is placed inside the gas path. It should be noted that the gas path in this application includes, but is not limited to, gas pipelines.

[0074] The frame 100 is equipped with a traveling mechanism, which is used to drive the entire inner surface detection device of the gas path to move along the gas path to achieve a complete detection of the inner surface of the gas path. Optionally, the traveling mechanism includes traveling wheels 210. Traveling wheels 210 are provided at both the bottom and the top of the frame 100, and the traveling wheels 210 are in contact with the inner surface of the gas path, so that the entire inner surface detection device of the gas path can move smoothly along the gas path. In addition, traveling wheels 210 can also be provided on both sides of the frame 100, which can further improve the stability during the traveling process, and this is not limited thereto. Specifically, the number and position of the traveling wheels 210 can be flexibly set according to actual needs, and the present application does not make specific restrictions, as long as the inner surface detection device of the gas path can be kept stable during the movement along the gas path.

[0075] The first vision module 300 is installed on the frame 100 to obtain global image data of the inner surface of the gas path in front of the inner surface detection device of the gas path. During the movement of the inner surface detection device of the gas path, the first vision module 300 can continuously collect image data of the inner surface of the gas path in front of the inner surface detection device of the gas path, so as to form global image data of the inner surface of the gas path.

[0076] The adjustment mechanism 400 is provided on the frame 100, the cover body 500 is installed on the adjustment mechanism 400, and the compression mechanism 600, the second vision module and the air pressure detection module are all provided within the cover body 500. It can be understood that both the first vision module 300 and the second vision module include lenses, light sources and other necessary components, which will not be elaborated in the present application.

[0077] The control end is used to perform image analysis based on the global image data to determine the defect position. Among them, an image of a brand-new or qualified inner surface of the gas path can be used as a standard image. During the detection process, the global image data is compared with the standard image to determine the defect position.

[0078] It should be noted that by using image comparison, not only can the defective parts with defects be found, but also the positions where defects may occur subsequently can be found. For example, currently it is found that although the structural integrity of a certain area is consistent with the standard image, the color at this place has changed (including but not limited to: the appearance of corrosion spots and corrosion patterns in the early stage of corrosion). By finding the positions that are different from the standard image as the defect positions, the preventive analysis of the gas transportation risk and the pollution risk can be effectively carried out in advance. If the identified defect positions actually have subsequent risks, such as there are already preliminary corrosion marks at present, the gas path needs to be maintained correspondingly.

[0079] In actual detection, in order to accurately compare with the standard image, when using the first vision module 300 to obtain the image of the inner surface of the gas path in front of the gas path inner surface detection device, it is necessary to synchronously obtain the images in the entire circumferential direction within a certain axial range, that is, to simultaneously obtain the images of an annular area with a certain length in front of the gas path inner surface detection device. In addition, during the detection process, while collecting the images of the annular area, these images can be synchronously compared with the standard image to improve the detection efficiency.

[0080] In order to more accurately determine the actual situation of the defect position, after finding the defect position through image comparison, the control end is also used to control the adjustment mechanism 400 to fit the cover 500 to the inner surface of the gas path so that the cover 500 covers the defect position and makes the cover 500 fully fit the inner surface of the gas path.

[0081] Since the second vision module is arranged in the cover 500, when the cover 500 covers the defect position, the light source of the second vision module can better illuminate the defect position, so as to facilitate the second vision module to collect the close-range image data closer to the true appearance of the defect position, as the basis for rechecking the actual condition of the defect position.

[0082] The compression mechanism 600 is used to compress the gas in the cover 500, and the air pressure detection module is used to detect the air pressure in the cover 500.

[0083] The control end is also used to determine the defect volume of the defect position according to the compression ratio of the compression mechanism 600 and the air pressure in the cover 500 after compression.

[0084] Among them, we take the state when the cover 500 is covered at the corresponding position of the qualified inner surface of the gas path as the standard state. In the standard state, the air pressure in the cover 500 detected after the compression mechanism 600 compresses the gas in the cover 500 is used as the standard reference air pressure.

[0085] During actual detection, after the cover 500 covers the defect position, the compression mechanism 600 is used to compress the gas in the cover 500 at the same compression ratio. If it is determined from the image that only the color of this defect position has changed and the structural integrity is temporarily qualified (that is, the structure is temporarily intact), and the air pressure after compression is the same as the standard reference air pressure, it means that the structural integrity of this defect position is indeed still qualified, and this position is very likely to be only in the early stage of damage. In this case, relevant technical personnel need to further judge the necessity of maintaining this defect position according to the image data.

[0086] If there is a defect (depression) in the position of this flaw determined from the image, and the compressed air pressure is less than the standard reference air pressure, it indicates that there is indeed a defect (depression) in the position of this flaw. At this time, the size of the depression can be calculated based on the difference between the compressed air pressure and the standard reference air pressure, so as to help judge the degree of damage.

[0087] If there is a protrusion in the position of this flaw determined from the image, and the compressed air pressure is greater than the standard reference air pressure, it indicates that there is indeed a protrusion in the position of this flaw. At this time, the size of the protrusion can be calculated based on the difference between the compressed air pressure and the standard reference air pressure, so as to help judge the degree of damage.

[0088] Through this design, problems on the inner surface of the air path can be effectively detected. In particular, it can screen flaw parts in the early stage of damage (for example, in the early stage of corrosion), and can warn of future risks in gas transmission, playing a preventive role.

[0089] Generally speaking, the inner surface detection device provided in this embodiment can perform preventive assessment on the quality risks of gas transmission, and helps to reduce the adverse effects of air path problems on the quality of gas transmission.

[0090] In this embodiment, the frame 100 includes a front frame body 110 and a rear frame body 120. One side of the front frame body 110 close to the rear frame body 120 has a first reference rod 111 extending towards the rear frame body 120, and one side of the rear frame body 120 close to the front frame body 110 has a second reference rod 121 extending towards the front frame body 110. The first reference rod 111 and the second reference rod 121 are arranged coaxially at intervals.

[0091] The adjusting mechanism 400 includes: a rotating member 410, an adjusting rod 420, a first driver (not shown in the figure) and a second driver (not shown in the figure).

[0092] The rotating member 410 is arranged between the first reference rod 111 and the second reference rod 121. Along the circumferential direction of the first reference rod 111 and the second reference rod 121, both the first reference rod 111 and the second reference rod 121 are rotationally engaged with the rotating member 410. Along the axial direction of the first reference rod 111, both the first reference rod 111 and the second reference rod 121 are fixedly engaged with the rotating member 410.

[0093] The adjusting rod 420 is arranged perpendicular to the first reference rod 111 and penetrates through the rotating member 410. Along the length direction of the adjusting rod 420, the adjusting rod 420 is slidably engaged with the rotating member 410.

[0094] The first driver is disposed on the first reference rod 111 or the second reference rod 121 for driving the rotating member 410 to rotate relative to the first reference rod 111 and the second reference rod 121. The second driver is disposed on the rotating member 410 for driving the adjusting rod 420 to slide relative to the rotating member 410. The cover 500 is disposed at the end of the adjusting rod 420.

[0095] Both the first driver and the second driver are controlled by the control end.

[0096] With this design, the first driver can drive the rotating member 410 to rotate, thereby adjusting the orientation of the cover 500. The second driver drives the adjusting rod 420 to control the fitting and separation of the cover 500 from the inner surface of the gas path. With the cooperation of the first driver and the second driver, the position of the cover 500 can be flexibly changed, so as to cover different defect positions.

[0097] Specifically, during the detection process, according to the image obtained by the first vision module 300 and combined with the optical parameters of the first vision module 300, the relative position relationship between the corresponding defect position and the inner surface detection device of the gas path can be determined. In this case, by controlling the traveling distance of the inner surface detection device of the gas path and driving the rotating member 410, the cover 500 can be smoothly aligned with the defect position to be covered. Finally, the second driver can smoothly cover the defect position and release the covering state.

[0098] Further, please refer to Figures 3 - 11 , the traveling mechanism includes: traveling wheels 210, a first transmission shaft 220, a second transmission shaft 230, and a power mechanism (not shown in the figure).

[0099] The front frame body 110 and the rear frame body 120 are both provided with traveling wheels 210, and the power mechanism is disposed on the rear frame body 120.

[0100] In this embodiment, the gas path to be detected can be selected as a circular pipe. During the detection process, when the inner surface detection device of the gas path travels along the gas path, the traveling wheels 210 at the top, bottom, and both sides of the inner surface detection device of the gas path are all in contact with the inner surface of the gas path to ensure the stability of the inner surface detection device of the gas path during the traveling process. In this state, both the first reference rod 111 and the second reference rod 121 are coaxially arranged with the gas path.

[0101] Specifically, both the first reference rod 111 and the second reference rod 121 are tubular. The outer diameter of the first transmission shaft 220 is adapted to the inner diameter of the first reference rod 111, and the outer diameter of the second transmission shaft 230 is adapted to the inner diameter of the second reference rod 121. The first transmission shaft 220 is rotatably received in the first reference rod 111, and the second transmission shaft 230 is rotatably received in the second reference rod 121. The first transmission shaft 220 is coaxially arranged with the first reference rod 111, and the second transmission shaft 230 is coaxially arranged with the second reference rod 121.

[0102] Wherein, the first transmission shaft 220 is in transmission cooperation with the traveling wheels 210 of the front frame body 110, and the second transmission shaft 230 is in transmission cooperation with the power mechanism.

[0103] One end face of the first transmission shaft 220 close to the second transmission shaft 230 is provided with a first blind hole 221. The first blind hole 221 is arranged along the axial direction of the first transmission shaft 220. The first blind hole 221 is eccentrically arranged on the first transmission shaft 220. A first magnetic member 222 is slidably engaged in the first blind hole 221.

[0104] One end face of the second transmission shaft 230 close to the first transmission shaft 220 is provided with a second blind hole 231. The second blind hole 231 is arranged along the axial direction of the second transmission shaft 230. The second blind hole 231 is eccentrically arranged on the second transmission shaft 230. A second magnetic member 232 is slidably engaged in the second blind hole 231.

[0105] In this embodiment, both sides of the end face of the first transmission shaft 220 are provided with the first blind hole 221 and the first magnetic member 222, and both sides of the end face of the second transmission shaft 230 are provided with the second blind hole 231 and the second magnetic member 232. Both the first magnetic member 222 and the second magnetic member 232 are cylindrical.

[0106] The rotating member 410 is provided with a relief through hole 411. The relief through hole 411 extends along the axial direction of the first reference rod 111 and penetrates through the rotating member 410. The relief through hole 411 is coaxially arranged with the first reference rod 111.

[0107] A rotating core 700 is rotatably engaged in the relief through hole 411. Specifically, the rotating core 700 is cylindrical. The rotating core 700 is coaxially arranged with the relief through hole 411. The rotating core 700 has a first inner cavity 710. The first inner cavity 710 extends along the axial direction of the rotating core 700.

[0108] One side of the rotating core 700 close to the first transmission shaft 220 is provided with a first opening 720 that communicates the outside with the first inner cavity 710. The inner diameter of the first opening 720 is adapted to the outer diameter of the first magnetic member 222. The position of the first opening 720 corresponds to that of the first magnetic member 222.

[0109] On one side of the rotating core 700 close to the second transmission shaft 230, a second opening 730 is provided to communicate the outside with the first inner cavity 710. The inner diameter of the second opening 730 is adapted to the outer diameter of the second magnetic member 232. The position of the second opening 730 corresponds to that of the second magnetic member 232.

[0110] A third magnetic member 740 is provided in the first inner cavity 710. Along the circumferential direction of the rotating core 700, the third magnetic member 740 is rotationally fitted in the rotating core 700, and the third magnetic member 740 has an N - pole magnetic region and an S - pole magnetic region. The third magnetic member 740 is driven by a third driver.

[0111] Optionally, the third magnetic member 740 is annular, and the third magnetic member 740 is coaxially arranged with the rotating core 700 and is rotatably fitted in the rotating core 700. Along the circumferential direction of the third magnetic member 740, the third magnetic member 740 has N - pole magnetic regions and S - pole magnetic regions arranged alternately in sequence.

[0112] In this embodiment, third magnetic members 740 are provided at both ends of the first inner cavity 710 close to the first opening 720 and both ends of the first inner cavity 710 close to the second opening 730.

[0113] The third magnetic member 740 has a first working position and a second working position.

[0114] When the third magnetic member 740 is in the first working position, the first opening 720 and the second opening 730 respectively correspond to any one of the N - pole magnetic region and the S - pole magnetic region. Exemplarily, assume that at this time, both the first opening 720 and the second opening 730 are facing the N - pole magnetic region of the third magnetic member 740. In this state, the first magnetic member 222 (the end of the first magnetic member 222 facing the first opening 720 is the S - pole) is attracted by the magnetic force of the third magnetic member 740 and extends into the first opening 720, and the second magnetic member 232 (the end of the second magnetic member 232 facing the second opening 730 is the S - pole) is attracted by the magnetic force of the third magnetic member 740 and extends into the second opening 730. At this time, if the first transmission shaft 220 rotates, it can drive the rotating core 700 through the first magnetic member 222, and the rotating core 700 can drive the second transmission shaft 230 to rotate by driving the second magnetic member 232, thus realizing the transmission cooperation between the first transmission shaft 220 and the second transmission shaft 230.

[0115] When the third magnetic member 740 is in the second working position, the first opening 720 and the second opening 730 respectively correspond to the other one of the N - pole magnetic region and the S - pole magnetic region. Exemplarily, at this time, both the first opening 720 and the second opening 730 are facing the S - pole magnetic region of the third magnetic member 740. The first magnetic member 222 (the end of the first magnetic member 222 facing the first opening 720 is an S - pole) is repelled by the magnetic force of the third magnetic member 740 and exits from the first opening 720, and the second magnetic member 232 (the end of the second magnetic member 232 facing the second opening 730 is an S - pole) is repelled by the magnetic force of the third magnetic member 740 and exits from the second opening 730, so as to disconnect the power between the first transmission shaft 220 and the second transmission shaft 230, and the first transmission shaft 220 cannot continue to drive the second transmission shaft 230.

[0116] The switching of the third magnetic member 740 between the first working position and the second working position is realized by driving the third magnetic member 740 to rotate by a third driver. The third magnetic member 740 is controlled by a control end.

[0117] When the inner surface detection device of the air passage travels, the control end controls the third magnetic member 740 to be in the first working position. When it is necessary to detect the flaw volume of the flaw position, the control end controls the third magnetic member 740 to be in the second working position, so as to ensure that the inner surface detection device of the air passage does not move when using the cover 500 to recheck the flaw position, and at the same time avoid scratching the inner surface of the air passage by the cover 500 due to the accidental movement of the inner surface detection device of the air passage.

[0118] In this embodiment, on both the side of the rotating member 410 close to the first reference rod 111 and the side close to the second reference rod 121, there are mating grooves 412 opened. The relief through - hole 411 is opened at the bottom of the mating groove 412 and communicates the mating grooves 412 on both sides. The first reference rod 111 and the second reference rod 121 respectively extend into the mating grooves 412 on both sides of the rotating member 410 and are rotatably fitted in the mating grooves 412.

[0119] The adjusting rod 420 is arranged along the radial direction of the first reference rod 111, and the adjusting rod 420 passes through the relief through - hole 411. The adjusting rod 420 is provided with a communication hole 421 extending along the axial direction of the relief through - hole 411, and the rotating core 700 is rotatably fitted in the communication hole 421. The rotating core 700 is coaxially arranged with the communication hole 421.

[0120] The adjusting rod 420 has a first sliding stop point and a second sliding stop point.

[0121] When the adjusting rod 420 is at the first sliding stop point, the communication hole 421 is coaxially arranged with the relief through - hole 411, and the cover 500 is separated from the inner surface of the air passage.

[0122] When the adjusting rod 420 is located at the second sliding dead point, the communication hole 421 is offset from the relief through hole 411, and the cover body 500 covers the inner surface of the air passage.

[0123] With this design, when the adjusting rod 420 drives the cover body 500 to cover the inner surface of the air passage, the adjusting rod 420 is located at the second sliding dead point. At this time, the adjusting rod 420 drives the rotating core 700 to deviate from the first transmission shaft 220 and the second transmission shaft 230. Even if the first magnetic member 222 and the second magnetic member 232 accidentally protrude and the power mechanism accidentally starts, the air passage inner surface detection device will not move, ensuring the safety and reliability of the cover body 500 when rechecking the defective position.

[0124] Furthermore, please refer to Figures 12 - 13 , a relief groove 422 is formed on the hole wall of the communication hole 421, and the relief groove 422 continuously extends circumferentially along the relief groove 422 to form a ring. The adjusting rod 420 also has a second inner cavity 423, and the second inner cavity 423 communicates with the relief groove 422.

[0125] The rotating core 700 has an external gear ring, and the external gear ring is located in the relief groove 422.

[0126] A rotating ring 424 is arranged in the second inner cavity 423. The rotating ring 424 also has an external gear ring, and the rotating ring 424 meshes with the rotating core 700.

[0127] The rotating ring 424 is provided with a radial through hole, and a groove is formed on the hole wall of the radial through hole. The groove continuously extends circumferentially along the radial through hole to form a ring.

[0128] A limiting column 425 is slidably fitted in the radial through hole. The limiting column 425 has a flange, and the flange is slidably fitted in the groove. An elastic member 426 is abutted between one side of the flange away from the inner ring wall of the rotating ring 424 and one side of the groove away from the inner ring wall of the rotating ring 424, so that the end of the limiting column 425 extends into the interior of the rotating ring 424, that is, the elastic member 426 is used to drive the limiting column 425 to move towards the central axis of the rotating ring 424.

[0129] A torsion spring 427 is also arranged in the second inner cavity 423. The torsion spring 427 is located within the rotating ring 424, and the fixed end of the torsion spring 427 is fixedly connected to the inner wall of the second inner cavity 423.

[0130] One end of the limiting column 425 close to the torsion spring 427 is wedge-shaped, and the free end of the torsion spring 427 abuts against the wedge surface of the limiting column 425.

[0131] When the first transmission shaft 220 drives the second transmission shaft 230 through the rotating core 700, the limiting column 425 uses its wedge surface to overcome the elastic force of the torsion spring 427 and push the free end of the torsion spring 427, so that energy is stored in the torsion spring 427.

[0132] Among them, the relationship between the coil spring 427 and the elastic member 426 is: after the limiting column 425 pushes the free end of the coil spring 427 to move at least two circles, the free end of the coil spring 427 can overcome the elastic force of the elastic member 426 to push the limiting column 425 toward the outside of the rotating ring 424, so that the free end of the coil spring 427 passes over the wedge surface of the limiting column 425.

[0133] The rotating ring 424 is also equipped with a ratchet mechanism (not shown in the figure). The rotating ring 424 cooperates with the ratchet transmission of the ratchet mechanism. The pawl of the ratchet mechanism is used to limit the ratchet to rotate in one direction, that is, the ratchet cannot rotate in the opposite direction, so that the rotating ring 424 can only rotate in the direction driven by the rotating core 700, that is, when the first transmission shaft 220 drives the second transmission shaft 230 through the rotating core 700, the rotating core 700 can smoothly drive the rotating ring 424, and when the third magnetic member 740 is in the second working position, the rotating ring 424 will not reverse under the restriction of the ratchet mechanism.

[0134] The second inner cavity 423 is also provided with a separation mechanism (not shown in the figure) for separating the ratchet wheel and the pawl of the ratchet mechanism. The separation mechanism is controlled by the control end, and the separation mechanism may include a toggle arm and a fourth driver, and the fourth driver is used to drive the toggle arm, so that the toggle arm pushes the pawl to separate the pawl from the ratchet wheel, but is not limited thereto. When the toggle arm pushes the pawl to separate the pawl from the ratchet wheel, the restriction of the pawl on the ratchet wheel is released, and the ratchet wheel can rotate in the reverse direction, so that the rotating ring 424 can rotate in the reverse direction.

[0135] Through the above design, a certain amount of mechanical energy can be stored in the coil spring 427 during the process of the first transmission shaft 220 driving the second transmission shaft 230 through the rotating core 700. Under normal circumstances, due to the limiting effect of the ratchet mechanism, this part of energy will always be stored in the coil spring 427.

[0136] However, when the third magnetic member 740 is in the second working position, if the power mechanism is accidentally started and drives the second transmission shaft 230 to rotate a certain angle, then the second magnetic member 232 and the second opening 730 are no longer directly opposite each other. Even if the third magnetic member 740 is switched back to the first working position, the second magnetic member 232 cannot be smoothly inserted into the second opening 730.

[0137] At this time, after adjusting the adjustment rod 420 back to the first sliding stop point and switching the third magnetic member 740 back to the first working position, the first magnetic member 222 is re-engaged with the first opening 720 , and the second magnetic member 232 cannot be engaged with the second opening 730 .

[0138] At this time, the control terminal is used to control the separation mechanism, so that the separation mechanism pushes the pawl of the ratchet mechanism, separating the pawl from the ratchet. The restriction of the pawl on the ratchet is released, and the ratchet can rotate reversely. As a result, the rotating ring 424 can rotate reversely. In this way, the mechanical energy in the coil spring 427 can be released. The coil spring 427 can drive the rotating ring 424 by pushing the limit post 425, and the rotating ring 424 then drives the rotating core 700 to rotate, thereby changing the position of the second opening 730 until the second magnetic member 232 is re-fitted to the second opening 730.

[0139] It should be noted that when selecting the coil spring 427, it is necessary to ensure that the mechanical energy stored in the coil spring 427 can smoothly drive the rotating core 700 (during this process, the inner surface detection device of the air path will move reversely). After the second magnetic member 232 is re-fitted to the second opening 730, the reverse movement distance can be determined according to the image data of the first vision module 300 and used to correct the position of the inner surface detection device of the air path.

[0140] Optionally, in this embodiment, the compression mechanism 600 can be in the form of a fifth driver and a piston, and is not limited thereto. Correspondingly, the adjusting rod 420 can be provided with a piston cavity that penetrates to the inner surface of the cover 500. The fifth driver is arranged at one end of the piston cavity away from the cover 500. The piston is slidably fitted in the piston cavity and is slidably sealed with the piston cavity. The piston is driven by the fifth driver. The fifth driver is controlled by the control terminal. During compression, the fifth driver drives the piston from one end of the piston cavity away from the cover 500 to the end close to the cover 500 to compress the gas in the cover 500. The compression ratio can be calculated according to the distance that the fifth driver drives the piston to move. After the air pressure detection is completed, the fifth driver is used to drive the piston to reset.

[0141] This embodiment also provides a gallium nitride production system, which includes: a gallium nitride production reactor, a first gas pipeline, a second gas pipeline, and the above-mentioned inner surface detection device of the air path.

[0142] The first gas pipeline and the second gas pipeline are used to alternately supply raw material gas to the gallium nitride production reactor.

[0143] The inner surface detection device of the air path is used to detect the inner surface condition of the one of the first gas pipeline and the second gas pipeline that is idle, that is, during the alternating operation of the first gas pipeline and the second gas pipeline, at the same time, only one of the first gas pipeline and the second gas pipeline is in the working state. At this time, the inner surface detection device of the air path can be used to detect the inner surface of the other one.

[0144] In summary, the air path inner surface detection device provided by the embodiments of the present invention can perform preventive assessment on the quality risk of gas transportation, which helps to reduce the adverse impact of air path problems on the gas transportation quality.

[0145] The gallium nitride production system provided by the embodiments of the present invention can perform preventive assessment on the quality risk of the raw material gas transportation during the production process, which can reduce the adverse impact of the transportation process on the purity of the raw material gas and is beneficial to ensuring the high-quality production of gallium nitride.

[0146] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A gas path inner surface detection device, characterized in that: include: A frame, a first visual module, an adjustment mechanism, a cover, a compression mechanism, a second visual module, an air pressure detection module and a control terminal; The frame has a traveling mechanism; the first visual module is installed on the frame to obtain global image data of the inner surface of the gas path in front of the gas path inner surface detection device; The adjusting mechanism is arranged on the frame, the cover is installed on the adjusting mechanism, and the compression mechanism, the second visual module and the air pressure detection module are all arranged inside the cover; The control end is used to determine the defect position according to the global image data, and to control the adjustment mechanism to make the cover body fit the inner surface of the gas path so that the cover body covers the defect position; the second visual module is used to obtain the close-range image data of the defect position; the compression mechanism is used to compress the gas in the cover body, and the air pressure detection module is used to detect the air pressure in the cover body; The control end is also used to determine the defect volume of the defect position according to the compression ratio of the compression mechanism and the air pressure in the cover body after compression; The frame comprises a front frame body and a rear frame body; the front frame body has a first reference rod extending toward the rear frame body on one side close to the rear frame body, and the rear frame body has a second reference rod extending toward the front frame body on one side close to the front frame body; The first reference rod and the second reference rod are coaxially arranged with a spacing; The adjusting mechanism comprises: a rotating member, an adjusting rod, a first driver and a second driver; The rotating member is disposed between the first reference rod and the second reference rod, and the first reference rod and the second reference rod are both rotationally matched with the rotating member; along the axial direction of the first reference rod, the first reference rod and the second reference rod are both fixedly matched with the rotating member; The adjusting rod is arranged perpendicular to the first reference rod and passes through the rotating member, and the adjusting rod is slidably matched with the rotating member; The first driver is provided on the first reference rod or the second reference rod to drive the rotating member; the second driver is provided on the rotating member to drive the adjusting rod to slide; the cover is provided on the end of the adjusting rod; The traveling mechanism comprises: a traveling wheel, a first transmission shaft, a second transmission shaft and a power mechanism; The front frame and the rear frame are both provided with the walking wheels, and the power mechanism is provided on the rear frame; The first reference rod and the second reference rod are both tubular; the first transmission shaft is rotatably accommodated in the first reference rod, and the second transmission shaft is rotatably accommodated in the second reference rod; the first transmission shaft is in transmission cooperation with the walking wheel of the front frame body, and the second transmission shaft is in transmission cooperation with the power mechanism; A first blind hole is formed on an end surface of the first transmission shaft close to the second transmission shaft, the first blind hole is eccentrically arranged on the first transmission shaft, and a first magnetic member is slidably fitted in the first blind hole; a second blind hole is formed on an end surface of the second transmission shaft close to the first transmission shaft, the second blind hole is eccentrically arranged on the second transmission shaft, and a second magnetic member is slidably fitted in the second blind hole; The rotating member is provided with a clearance through hole, and the clearance through hole extends along the axial direction of the first reference rod and passes through the rotating member; A rotating core is rotatably fitted in the said yielding through hole, and the said rotating core has a first inner cavity; a first opening for connecting the outside with the first inner cavity is provided on a side of the said rotating core close to the first transmission shaft, and a second opening for connecting the outside with the first inner cavity is provided on a side of the said rotating core close to the second transmission shaft; A third magnetic member is provided in the first inner cavity; along the circumference of the rotating core, the third magnetic member is rotatably fitted in the rotating core, and the third magnetic member has an N-pole magnetic region and an S-pole magnetic region; the third magnetic member is driven by a third driver; The third magnetic member has a first working position and a second working position; when the third magnetic member is in the first working position, the first opening and the second opening correspond to any one of the N-pole magnetic region and the S-pole magnetic region respectively, the first magnetic member is attracted by the magnetic force of the third magnetic member and extends into the first opening, and the second magnetic member is attracted by the magnetic force of the third magnetic member and extends into the second opening, so that the first transmission shaft and the second transmission shaft are in transmission cooperation; When the third magnetic member is in the second working position, the first opening and the second opening correspond to the other of the N-pole magnetic region and the S-pole magnetic region, respectively, the first magnetic member is repelled by the magnetic force of the third magnetic member and withdraws from the first opening, and the second magnetic member is repelled by the magnetic force of the third magnetic member and withdraws from the second opening, so that the power between the first transmission shaft and the second transmission shaft is disconnected; When the gas path inner surface detection device is moving, the control end controls the third magnetic component to be in the first working position; when it is necessary to detect the defect volume of the defect position, the control end controls the third magnetic component to be in the second working position.

2. The gas path inner surface detection device according to claim 1, characterized in that: The clearance through hole, the rotating core and the first reference rod are coaxially arranged; The rotating member has a side close to the first reference rod and a side close to the second reference rod, both of which are provided with matching grooves, and the clearance through hole is provided at the groove bottom of the matching grooves and connects the matching grooves on both sides; the first reference rod and the second reference rod extend into the matching grooves on both sides of the rotating member respectively and are rotatably matched with the matching grooves; The adjusting rod is arranged along the radial direction of the first reference rod, and the adjusting rod passes through the clearance through hole; the adjusting rod is provided with a connecting hole extending along the axial direction of the clearance through hole, and the rotating core is rotatably fitted in the connecting hole; The adjusting rod has a first sliding stop point and a second sliding stop point; when the adjusting rod is located at the first sliding stop point, the connecting hole and the giving way hole are coaxially arranged, and the cover body is separated from the inner surface of the air path; when the adjusting rod is located at the second sliding stop point, the connecting hole and the giving way hole are staggered, and the cover body is arranged on the inner surface of the air path.

3. The gas path inner surface detection device according to claim 2, characterized in that: The hole wall of the communicating hole is provided with a clearance groove, and the clearance groove continuously extends in a ring shape along the circumference of the clearance groove; the adjusting rod also has a second inner cavity, and the second inner cavity is connected with the clearance groove; The rotating core has an outer gear ring, and the outer gear ring is located in the clearance groove; A rotating ring is arranged in the second inner cavity, the rotating ring also has an outer gear ring, and the rotating ring is meshed with the rotating core; The rotating ring is provided with a radial through hole, the hole wall of the radial through hole is provided with a groove, and the groove continuously extends in a ring shape along the circumference of the radial through hole; A limiting column is slidably fitted in the radial through hole, the limiting column has a flange, the flange is slidably fitted in the groove, and an elastic member is abutted between a side of the flange away from the inner ring wall of the rotating ring and a side of the groove away from the inner ring wall of the rotating ring, so that the end of the limiting column extends into the interior of the rotating ring; A coil spring is also disposed in the second inner cavity, and the coil spring is located inside the rotating ring; The end of the limiting column close to the coil spring is wedge-shaped, and the free end of the coil spring abuts against the wedge-shaped surface of the limiting column; When the first transmission shaft drives the second transmission shaft through the rotating core, the limiting column overcomes the elastic force of the coil spring to push the free end of the coil spring; The relationship between the coil spring and the elastic member is as follows: when the limiting column pushes the free end of the coil spring to move at least two circles, the free end of the coil spring can overcome the elastic force of the elastic member to push the limiting column toward the outside of the rotating ring, so that the free end of the coil spring passes over the wedge surface of the limiting column; The rotating ring is also equipped with a ratchet mechanism so that the rotating ring can only rotate in the direction driven by the rotating core; The second inner cavity is also provided with a separation mechanism for separating the ratchet and the pawl of the ratchet mechanism.

4. A gallium nitride production system, characterized in that: include: A gallium nitride production reactor, a first gas pipeline, a second gas pipeline, and a gas path inner surface detection device as described in any one of claims 1 to 3; The first gas pipeline and the second gas pipeline are used to alternately transport raw material gas to the gallium nitride production reactor; The gas line inner surface detection device is used to detect the inner surface condition of the idle one of the first gas pipeline and the second gas pipeline.

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