Modular detection platform and chip detection method

Through the automated detection method of the modular detection platform, the problem of cumbersome and unstable chip height detection operation in the existing technology is solved, efficient and accurate detection results are achieved, and labor burden is reduced.

CN119936629APending Publication Date: 2025-05-06SHANGHAI XINWEI SEMICON CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202510182825.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-02-19
Publication Date
2025-05-06

AI Technical Summary

Technical Problem

The existing chip rubber climbing height detection methods rely on manual operation, which are cumbersome, time-consuming and labor-intensive, and it is difficult to ensure the sustainability, accuracy and stability of the detection in a continuous production environment.

Method used

It provides a modular inspection platform, including a base, support, connector, displacement table and fixture. By adjusting the length and angle of the support and connector, the height and rotation angle of the displacement table are controlled to achieve automated inspection.

Benefits of technology

It improves the efficiency, accuracy and consistency of chip rubber climbing height detection, reduces operation difficulty, reduces errors caused by human factors, and reduces manual burden.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN119936629A_ABST
    Figure CN119936629A_ABST
Patent Text Reader

Abstract

The invention provides a modular detection platform and a chip detection method. The modularized detection platform comprises a base, a supporting piece, a connecting piece, a displacement table and a clamp. The clamp is mounted on the displacement table; a plurality of stations are arranged on the clamp, and one device can be placed on each station; the bottom end of the supporting piece is fixed on the base, and the top end is rotationally connected with the displacement table; the two ends of the connecting piece are rotationally connected with the displacement table and the supporting piece correspondingly. The supporting piece and the connecting piece are both of a length-adjustable structure and can be locked at the current position. During detection, the modular detection platform is placed under a microscope; the height of the displacement table is controlled by adjusting the length of the supporting piece; and the rotation angle of the displacement table is controlled by adjusting the length of the connecting piece, so that the glue climbing height of the chip can be observed from multiple angles and multiple directions. Through the configuration, the efficiency, the accuracy and the consistency of chip glue climbing height detection are greatly improved, meanwhile, the operation difficulty is reduced, errors caused by human factors are reduced, and the labor burden is relieved.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The present invention belongs to the technical field of chip detection, and in particular relates to a modular detection platform for detecting chip glue creeping height and a chip detection method. Background Art

[0002] After the chip is manufactured, it is usually necessary to place the chip under a microscope to visually inspect the chip's glue creepage height during the packaging process. The chip's glue creepage height is detected to determine whether the glue output of the packaging machine can be mass-produced. However, the current chip glue creepage height detection method still remains at the manual operation level, that is, the operator needs to hold the packaged chip shell with tweezers, place it under a microscope, and manually rotate the wrist to observe and record the glue creepage height at different positions. This method is not only cumbersome and labor-intensive, but also in a continuous production environment, it is necessary to quantitatively detect the glue creepage of each batch of chips, and the continuity, accuracy and stability of manual operation are difficult to guarantee. In addition, long-term visual inspection and manual operation can easily cause device position displacement, affecting the accuracy of the test results. Summary of the invention

[0003] In response to the above technical problems, the present invention provides a modular detection platform and a chip detection method, which aims to significantly improve the efficiency, accuracy and consistency of chip glue creepage height detection, while reducing the difficulty of operation, reducing errors caused by human factors, and alleviating the manual burden.

[0004] To achieve the above-mentioned purpose, the present invention provides a modular detection platform, comprising: a base, a support member, a connecting member, a translation stage and a fixture;

[0005] The fixture is detachably mounted on the translation platform; and a plurality of workstations are arranged on the fixture, each of which can hold a device;

[0006] The bottom end of the support member is fixed on the base, and the top end of the support member is rotatably connected to the displacement platform; the two ends of the connecting member are rotatably connected to the displacement platform and the support member respectively;

[0007] The supporting member and the connecting member are both structures with adjustable lengths, and the supporting member and the connecting member can also be locked in current positions.

[0008] Optionally, the translation stage comprises a translation stage base, a translation stage body and a thread fine-tuning device; the translation stage body is mounted on the translation stage base; the thread fine-tuning device is connected to the translation stage base and the translation stage body respectively; the thread fine-tuning device can adjust the relative position of the translation stage body and the translation stage base in a first direction and a second direction, the first direction being perpendicular to the second direction;

[0009] The clamp is installed on a side of the translation stage body away from the translation stage base; the top end of the support member and one end of the connecting member are both rotatably connected to the translation stage base.

[0010] Optionally, the thread fine-tuning device includes a first spiral displacement rod and a second spiral displacement rod; the first spiral displacement rod and the second spiral displacement rod can be rotatably mounted on the base of the translation platform; the first spiral displacement rod is arranged along the first direction; the second spiral displacement rod is arranged along the second direction; the first spiral displacement rod is used to drive the translation platform body to move along the first direction; the second spiral displacement rod is used to drive the translation platform body to move along the second direction.

[0011] Optionally, the modular detection platform includes a plurality of the fixtures, and the plurality of the fixtures correspond one-to-one to the plurality of the devices, so that a corresponding device can be installed through a corresponding one of the fixtures, and the plurality of the devices are packaged in different ways.

[0012] Optionally, among the multiple clamps, the placement angles of the multiple workstations on at least one of the clamps are different, and adjacent workstations are staggered at 90°.

[0013] Optionally, both the support member and the connecting member include a multi-section sleeve; a height adjustment device is provided at the connection between adjacent sleeves of the support member, and the height adjustment device can selectively lock and unlock adjacent sleeves in the support member, and a plurality of locking holes are provided on the adjustable sleeve in the support member, and the height adjustment device is selectively inserted into a corresponding one of the locking holes; and / or, an angle adjustment device is provided at the connection between adjacent sleeves of the connecting member, and the angle adjustment device can selectively lock and unlock adjacent sleeves in the connecting member, and the angle adjustment device cooperates with the connecting member to achieve stepless adjustment of the angle.

[0014] Optionally, the height adjustment device adopts one of a height adjustment knob and a height adjustment button, and the angle adjustment device adopts one of an angle adjustment knob and an angle adjustment button.

[0015] Based on the same inventive concept, the present invention also provides a chip detection method, which is performed based on the aforementioned modular detection platform and includes:

[0016] Placing the modular inspection platform under a microscope, and then placing a plurality of devices to be inspected on the fixture;

[0017] By adjusting the length of the support member, the height of the translation platform is controlled;

[0018] By adjusting the length of the connecting piece, the rotation angle of the translation stage is controlled;

[0019] The creepage height of the device is observed through the microscope.

[0020] Optionally, the chip detection method further includes:

[0021] By adjusting a threaded fine-tuning device connected to a translation stage base and a translation stage body of the translation stage, the relative positions of the translation stage body and the translation stage base in a first direction and a second direction are controlled, wherein the first direction is perpendicular to the second direction;

[0022] The translation stage body is installed on the translation stage base, the fixture is installed on a side of the translation stage body away from the translation stage base, and the top of the support member and one end of the connecting member are both rotatably connected to the translation stage base.

[0023] Optionally, the chip detection method further includes:

[0024] Providing a plurality of the clamps, wherein the plurality of the clamps correspond one to one to the plurality of the devices, and the plurality of the devices are packaged in different ways;

[0025] Select a corresponding one of the fixtures to install a corresponding one of the devices.

[0026] Compared with the prior art, the technical solution provided by the present invention has at least the following beneficial effects:

[0027] In the aforementioned modular detection platform and detection method, the height and rotation angle of the translation stage can be controlled by the support and the connector respectively, so that the operation is continuous, accurate and stable, and the detection efficiency of chip glue creeping height is greatly improved, while reducing the difficulty of operation, reducing errors caused by human factors, and reducing the labor burden. In addition, the fixture can place multiple devices at the same time, increasing the number of single tests and significantly improving the detection efficiency.

[0028] In the aforementioned modular detection platform and detection method, the relative positions of the translation stage body and the translation stage base in the first direction and the second direction can be adjusted by the threaded fine-tuning device to achieve precise adjustment of the displacement in two directions perpendicular to each other. This not only enables simultaneous measurement of multiple chips without adjusting the positions of the support, connector and base during the detection process, but also facilitates observation of the chips at multiple positions, thereby ensuring the detection accuracy of the chips.

[0029] In the aforementioned modular detection platform and detection method, multiple fixtures are provided, and the multiple fixtures correspond one-to-one to the multiple devices, so that a corresponding device can be installed through a corresponding fixture. The packaging methods of the multiple devices are different. In this way, each fixture is not only easy to disassemble and replace, which improves the replacement speed, but also increases the types of detectable packages, expands the detection range, makes it more applicable, and makes detection more convenient and flexible.

[0030] In the aforementioned modular detection platform and detection method, the placement angles of multiple workstations on at least one fixture are different, that is, multi-position and multi-angle workstations are set on the fixture, which can detect the device at different angles and positions, further ensuring the accuracy and efficiency of the detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The accompanying drawings are used to better understand the present invention and do not constitute an improper limitation of the present invention.

[0032] Figure 1 It is a left view of the overall structure of a modular detection platform provided by an embodiment of the present invention;

[0033] Figure 2 This is a front view of the overall structure of a modular detection platform provided by an embodiment of the present invention;

[0034] Figure 3 is a top view of a translation stage provided according to an embodiment of the present invention;

[0035] Figure 4 is a top view of a fixture for a TO package provided by an embodiment of the present invention;

[0036] Figure 5 is a top view of a fixture for a DIP package provided by an embodiment of the present invention;

[0037] Figure 6 FIG. 1 is a top view of a fixture for a flange package provided according to an embodiment of the present invention.

[0038] [Description of reference numerals is as follows]:

[0039] 1-base, 2-support member, 21-locking hole, 3-height adjustment device, 4-angle adjustment device, 5-first rotating shaft, 6-second rotating shaft, 7-first spiral displacement rod, 8-second spiral displacement rod, 9-connecting member, 10-translation platform, 11-translation platform base, 12-clamp, 121-work station, 122-edge, 13-translation platform body, 131-positioning groove, 132-blocking wall, 14-third rotating shaft. DETAILED DESCRIPTION

[0040] In order to make the purpose, advantages and features of the present invention more clear, the present invention is further described in detail below with reference to the accompanying drawings. It should be noted that the accompanying drawings are all in a very simplified form and are not in precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.

[0041] The following is an explanation of the embodiments of the present invention by specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the illustrations provided in the present embodiment only illustrate the basic concept of the present invention in a schematic manner, and only the components related to the present invention are shown in the figure instead of being drawn according to the number, shape and size of the components in the actual implementation. The type, quantity and proportion of each component in the actual implementation can be a random change, and the component layout type may also be more complicated.

[0042] In addition, each embodiment of the following description has one or more technical features, but this does not mean that the user of the present invention must implement all the technical features in any embodiment at the same time, or can only implement part or all of the technical features in different embodiments separately. In other words, under the premise that implementation is possible, those skilled in the art can selectively implement part or all of the technical features in any embodiment according to the disclosure of the present invention and according to the design specifications or implementation requirements, or selectively implement a combination of part or all of the technical features in multiple embodiments, thereby increasing the flexibility of the implementation of the present invention.

[0043] As used in this specification, the singular forms "one", "an", and "the" include plural objects, and the plural form "a plurality" includes more than two objects, unless the content clearly indicates otherwise. As used in this specification, the term "or" is generally used in a sense that includes "and / or", unless the content clearly indicates otherwise, and the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium, and it can be a connection between two elements or an interactive relationship between two elements. Relational terms such as the terms "first", "second", etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor do they indicate or imply relative importance or implicitly indicate the number of technical features indicated. It should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. The implementation method of the rotational connection described herein may be a hinge or other various common rotational connection methods, which are not limited by the present invention.

[0044] First, the research background is explained. In the chip packaging process, conductive silver glue plays a key role in firmly sticking the chip to the tube shell, and the height of the chip glue must strictly comply with the packaging standards to ensure the reliability and stability of the package. In the past, the detection of chip glue height was highly dependent on manual operation. Tweezers were used to clamp the tube shell of the packaged device, and the tube shell was placed under a microscope to manually rotate the tube shell to achieve the purpose of visually inspecting the chip glue height. This method is not only cumbersome, time-consuming and labor-intensive, but also before the silver glue is completely cured, manually rotating the chip can easily cause the chip position to shift, which in turn causes chip packaging quality problems.

[0045] To this end, one of the purposes of the present invention is to provide a modular detection platform for detecting chip glue creeping height, so as to solve the problem of inconvenient detection of glue creeping height in the chip packaging process in the prior art. The detection platform is intended to detect the packaged chip package (or device). During the detection, it replaces the traditional step of manually detecting the glue creeping height, and can fundamentally solve the many disadvantages of the traditional detection method of manually using a clamp to clamp the tube shell and relying on the operator to rotate his wrist to visually check the chip glue creeping height. These disadvantages include but are not limited to the difficulty of operation, low detection efficiency, and the chip is easily displaced due to human factors during the detection process, thereby affecting the accuracy of the detection results. For example, there are also problems such as cumbersome operation and labor consumption.

[0046] The second purpose of the present invention is to provide a chip detection method based on the modular detection platform, which aims to improve the efficiency, accuracy and consistency of chip glue creep height detection, while reducing the difficulty of operation, reducing errors caused by human factors, and alleviating the manual burden.

[0047] The following description is given in conjunction with the accompanying drawings.

[0048] Figure 1 It is a left view of the overall structure of the modular detection platform provided by the preferred embodiment of the present invention. Figure 2 This is a front view of the overall structure of the modular detection platform provided by the preferred embodiment of the present invention. Figure 3 is a top view of the translation stage provided in the preferred embodiment of the present invention.

[0049] Please refer to Figures 1 to 3 As shown, the embodiment of the present invention provides a modular detection platform, which includes: a base 1, a support member 2, a connecting member 9, a displacement stage 10 and a fixture 12; wherein the fixture 12 is detachably mounted on the displacement stage 10; a plurality of workstations 121 (see Figures 4 to 6 ), each of the workstations 121 can place a chip package (not shown); in an embodiment of the present invention, the workstation 121 is a groove, and the shape of the groove is consistent with or different from the shape of the chip package; the bottom end of the support member 2 is fixed on the base 1, and the top end of the support member 2 is rotatably connected to the displacement stage 10; the two ends of the connecting member 9 are rotatably connected to the displacement stage 10 and the support member 2 respectively; and the support member 2 and the connecting member 9 are both structures with adjustable lengths. In addition, the support member 2 and the connecting member 9 can also be locked in the current position.

[0050] Accordingly, an embodiment of the present invention further provides a chip detection method, which is performed based on the modular detection platform provided by the embodiment of the present invention. The chip detection method includes the following steps:

[0051] Place the modular inspection platform under a microscope, and then place multiple chip packages to be inspected on the fixture 12; control the height of the translation stage 10 by adjusting the length of the support rod 2; control the rotation angle of the translation stage 10 by adjusting the length of the connector 9; and observe the glue creepage height of the chip package through a microscope.

[0052] It should be noted that the step of adjusting the length of the supporting member 2 may be performed before or after the step of adjusting the length of the connecting member 9, or may be performed simultaneously.

[0053] The above chip detection method is simple to operate and does not require the operator to manually rotate the wrist for adjustment, which reduces the workload of the operator and improves work efficiency. In addition, in a continuous production environment, it can ensure the continuity, accuracy and stability of the detection operation, and also greatly improve the chip creep height detection efficiency. On the other hand, the fixture 12 is also provided with multiple stations 121, which can place multiple devices for measurement at one time, increase the number of single detections, and further improve the detection efficiency.

[0054] The base 1 can be made into various stable structures, which not only ensures the stability and durability of the entire detection platform, but also provides a solid foundation for the subsequent modular assembly and the realization of a rotatable structure. The base 1 is generally made into a solid structure to ensure its stability. The base 1 will further integrate key components such as a precise rotating structure, an adjustment device, and a modular fixture designed specifically for chip detection, together forming an efficient, accurate and easy-to-operate detection platform.

[0055] Optionally, a concave mounting groove is provided on the upper surface of the base 1, such as at the center position or other positions, for accommodating the bottom end of the support member 2. The shape and size of the mounting groove usually match the shape and size of the bottom end of the support member 2 to achieve a stable connection. For example, in this embodiment, the cross-section of the support member 2 is rectangular, and correspondingly, the mounting groove is a rectangular groove. Of course, in other examples, the support member 2 may also be cylindrical or other regular or special shapes. In the embodiment of the present invention, by embedding the bottom end of the support member 2 into the mounting groove of the base 1, the connection between the support member 2 and the base 1 is more stable, and the support member 2 is easy to disassemble and assemble.

[0056] The fixing method between the base 1 and the support member 2 is not limited. For example, screw fixing, welding fixing, crimping fixing, riveting fixing or other suitable mechanical structure fixing can be selected, and one or a combination of multiple thereof can be adopted. More conveniently, the bottom end of the support member 2 is embedded in the mounting groove of the base 1, and then the base 1 and the bottom end of the support member 2 are fixed by screws. It should also be understood that the connection between the support member 2 and the base 1 can be a detachable connection or a non-detachable connection. To ensure the stability of the connection, preferably, the depth of the mounting groove is 1 / 2 of the height of the base 1.

[0057] Therefore, the support member 2 is fixed relative to the base 1. When the top end of the support member 2 is rotatably connected to the translation stage 10, the top end of the support member 2 is rotatably connected to the bottom of the translation stage 10 via the first rotation axis 5, so that the translation stage 10 as a whole can rotate around the first rotation axis 5. In the embodiment of the present invention, the top end of the support member 2 is directly rotatably connected to the translation stage base 11 in the translation stage 10. The first rotation axis 5 is generally arranged horizontally so that the translation stage 10 can rotate in a vertical plane.

[0058] In addition, the support member 2 itself can directly adjust the height of the translation stage 10 by changing its length, so that the position of the translation stage 10 relative to the microscope is adjustable, so that the translation stage 10 is at a suitable observation height during the detection process. Moreover, the support member 2 is preferably adjusted through the height adjustment device 3 to achieve telescopic adjustment, so that the operator can freely adjust the length of the support member 2 as needed to meet the needs of different height detection.

[0059] Preferably, the support member 2 is a multi-stage telescopic sleeve structure, generally a two-stage telescopic sleeve structure, and the adjacent sleeves are telescoped by a suitable connection mechanism, such as a spring, a buckle, a thread, etc. This structure is simple, easy to operate, and can achieve the purpose of fine adjustment. Before adjustment, first unlock the connection mechanism between the sleeves, and then perform the telescopic operation; if extension is required, just pull the inner sleeve outward; if shortening is required, just push the inner sleeve inward; and then after completing the telescopic operation, re-lock the connection mechanism between the sleeves to ensure the stability and safety of the support member 2. Compared with other various telescopic mechanisms, the sleeve-type support member 2 used in the figure has a simple structure, is convenient for operators to operate and use, and is simple and convenient.

[0060] Figure 1 and Figure 2In the embodiment, the support member 2 is composed of a first sleeve and a second sleeve nested together; the cross-sectional dimension of the second sleeve is smaller than that of the first sleeve, so that the second sleeve is nested in the first sleeve; and a height adjustment device 3 is provided at the connection between adjacent sleeves, and the height adjustment device 3 can selectively lock and unlock adjacent sleeves in the support member 2, thereby indirectly achieving the purpose of manually adjusting the support member 2 for telescopic movement. Specifically, a plurality of lock holes 21 are provided on the adjustable sleeve (i.e., a thinner sleeve) in the support member 2, and the height adjustment device 3 is selectively inserted into a corresponding lock hole 21. In this way, the length of the support member 2 can be adjusted by adjusting the insertion position of the height adjustment device 3, thereby indirectly adjusting the height of the displacement stage 10. This structure is simple and convenient to operate, and is suitable for occasions where the telescopic length needs to be adjusted frequently. The height adjustment device 3 can be operated electrically, remotely or manually.

[0061] In this embodiment, the height adjustment device 3 is a height adjustment knob having an external thread, which can cooperate with the lock hole 21 to lock the adjacent sleeve in the support member 2, and can also unlock the sleeve, and telescopic movement can be achieved by adjusting the insertion position of the height adjustment knob.

[0062] Alternatively, in other examples, the height adjustment device 3 can be replaced by a height adjustment button, and the extension and retraction can be controlled by pushing the height adjustment button inward or outward.

[0063] In addition, when the support member 2 and the translation stage 10 are connected by the connecting member 9, the connecting member 9 can be extended and retracted following the rotation of the translation stage 10. Preferably, the connecting member 9 adopts a multi-section retractable sleeve structure, and an angle adjustment device 4 is provided at the connection of adjacent sleeves of the connecting member 9, and the angle adjustment device 4 can selectively lock and unlock adjacent sleeves in the connecting member 9. The angle adjustment device 4 can limit the rotation angle of the translation stage 10, so that the translation stage 10 can stably stay at a certain rotation angle and remain motionless. By controlling the angle adjustment device 4 manually, electrically or remotely, the operator can freely adjust the angle of the translation stage 10 as needed to meet the needs of multi-angle detection.

[0064] The structure of the connecting member 9 is substantially the same as that of the supporting member 2, but the length adjustment method is different, specifically: the supporting member 2 is used for coarse adjustment, while the connecting member 9 is used for fine adjustment, that is, the displacement accuracy of the connecting member 9 is higher and more precise, and it can almost achieve stepless adjustment, and can be adjusted to a finer angle. Therefore, it is not necessary to set a plurality of lock holes 21 on the connecting member 9, but directly realize the stepless adjustment of the angle through the cooperation of the angle adjustment device 4 and the connecting member 9. The most convenient way is to set an angle adjustment knob / angle adjustment button at the connection of the adjacent sleeves of the connecting member 9, and prevent the extension and retraction of the connecting member 9 by abutting the surface of the adjustable sleeve in the connecting member 9 with the knob / button, so as to realize stepless adjustment. Therefore, this structure can adjust the length of the connecting member 9 by adjusting the tightness of the knob / button, and the structure is relatively simple, and it is more convenient to manufacture and operate, and it is not easy to be damaged, so it is convenient for long-term use.

[0065] Figure 1 and Figure 2 In the embodiment, the connecting member 9 is composed of a first sleeve and a second sleeve nested together; the cross-sectional dimension of the second sleeve of the connecting member 9 is smaller than the cross-sectional dimension of the first sleeve, so that the second sleeve is nested in the first sleeve; and an angle adjustment device 4 is provided at the connection between the first sleeve and the second sleeve. Compared with the supporting member 2, the length of the connecting member 9 does not need to be adjusted by adjusting the insertion position of the knob / button when adjusting.

[0066] Furthermore, the translation stage 10 is rotatably connected to one end of the connecting member 9 via the second rotating shaft 6. Thus, the first rotating shaft 5 serves as the rotation center of the translation stage 10, and the second rotating shaft 6 is away from the first rotating shaft 5 to form a force arm. In addition, the other end of the connecting member 9 is rotatably connected to the supporting member 2 via the third rotating shaft 14.

[0067] It should also be known that, in other embodiments, the translation stage 10 may be an integrated or monolithic structure, and does not need to be split into the translation stage base 11 and the translation stage body 13 shown in the figure.

[0068] In the embodiment of the present invention, in order to achieve simultaneous measurement of multiple devices without adjusting the positions of the support member 2, the connecting member 9 and the base 1 during the detection process, the translation stage 10 is made into two parts, including: a translation stage base 11 and a translation stage body 13; the translation stage body 13 is installed on the translation stage base 11; the clamp 12 is installed on the side of the translation stage body 13 away from the translation stage base 11; and the top end of the support member 2 and one end of the connecting member 9 are rotatably connected to the translation stage base 11.

[0069] The translation stage base 11 is connected to the connecting member 9 and the supporting member 2 to play a supporting role. The translation stage body 13 and the translation stage base 11 are slidably connected in the length direction (first direction) and the width direction (second direction) of the translation stage 10, so that the translation stage body 13 can adjust the relative position in the length direction and the width direction relative to the translation stage base 11. The thickness direction of the translation stage 10 corresponds to the height direction or the telescopic direction.

[0070] In order to achieve more precise adjustment, the translation stage 10 further includes a threaded adjustment device, and the threaded fine adjustment device is respectively connected to the translation stage base 11 and the translation stage body 13. The relative positions of the translation stage body 13 and the translation stage base 11 in the length direction and the width direction of the translation stage 10 are precisely adjusted by the threaded adjustment device. In this way, precise adjustment of displacement in two directions perpendicular to each other can be achieved, which can not only achieve simultaneous measurement of multiple devices without adjusting the positions of the support member 2, the connecting member 9 and the base 1 during the detection process, but also facilitate observation of devices at multiple positions to ensure detection accuracy, and also facilitate adjustment of the chip to be observed to the center position of the microscope.

[0071] Preferably, the thread adjustment device includes a first spiral displacement rod 7 and a second spiral displacement rod 8; the first spiral displacement rod 7 and the second spiral displacement rod 8 are both rotatably mounted on the translation stage base 11; the first spiral displacement rod 7 is arranged along the first direction; the second spiral displacement rod 8 is arranged along the second direction; so that the first spiral displacement rod 7 can drive the translation stage body 13 to move along the length direction (i.e., the first direction) of the translation stage 10, and the second spiral displacement rod 8 can drive the translation stage body 13 to move along the width direction (the second direction) of the translation stage 10. It should be understood that the first spiral displacement rod 7 and the second spiral displacement rod 8 can only rotate but not move, so when any one of the spiral displacement rods rotates, it can drive the translation stage body 13 to move along the extension direction of the spiral displacement rod. It should be noted that the first spiral displacement rod 7 and the second spiral displacement rod 8 both have external threads, and in addition, the length and width of the translation stage can be the same or different.

[0072] Furthermore, in order to expand the detection range of the package, in some embodiments, the modular detection platform is equipped with multiple fixtures 12, at least two types of fixtures 12, and more preferably three or more types. Moreover, the multiple fixtures 12 correspond to multiple chip packages (or devices) one by one, so that a corresponding chip package is installed through a corresponding fixture 12, and the packaging methods of the multiple chip packages are different. The following is an exemplary description.

[0073] Figures 4 to 6In the embodiment, each fixture 12 is provided with a plurality of workstations 121, each workstation 121 is used to place a chip package, and the number of workstations 121 on each fixture 12 can be adjusted as needed, and the present invention does not limit this. It is worth noting that corresponding fixtures 12 are provided for different chip packaging forms, and the detection of different package creeping heights can be achieved by replacing the fixtures 12.

[0074] Figure 4 In the described fixture 12 , each station 121 is substantially circular in shape, so as to be suitable for detecting the creeping height of the TO package. Figure 5 In the described fixture 12, each station 121 is substantially rectangular and is suitable for detecting the glue creeping height of a DIP package. Figure 6 In the described fixture 12, each workstation 121 is still rectangular, but is suitable for detecting the glue creeping height of the flange package.

[0075] Those skilled in the art should know that the Flange package has no pins, while the DIP package has pins. Figure 6 The shape of the station 121 in Figure 5 The shape of the station 121 is different. Figure 5 The station 121 has an edge 122 for placing chip pins. Of course, there are many packaging methods, including but not limited to the three packaging methods mentioned above, that is, the types of the fixture 12 can be increased as needed to adapt to more packaging methods.

[0076] In addition, the placement angles of the multiple stations 121 on each fixture 12 can be the same or different. For example, for TO packages, there is no difference in the placement direction of the stations 121. However, for DIP packages and Flange packages, the placement directions of the stations 121 on the fixture 12 are different. Generally, adjacent stations 121 are staggered at 90°. The different placement directions of the stations 121 can meet the operator's needs to detect the glue creeping height of the device in different directions, and multiple stations 121 ensure that multiple chips can be tested at the same time, greatly improving the detection efficiency. In addition, during the test, each fixture 12 can be flipped 180° and tested again, so that the glue creeping height of the chip can be observed in all directions.

[0077] Then return to the reference Figure 3, a positioning groove 131 is provided on the side of the displacement stage body 13 away from the displacement stage base 11, and the positioning groove 131 is used to accommodate the clamp 12 and limit the position of the clamp 12, and also prevent the clamp 12 from slipping off. In order to facilitate the replacement of the clamp 12, the positioning groove 131 is preferably set to a semi-open structure, and only two oppositely arranged retaining walls 132 are retained to clamp the clamp 12. However, in fact, the displacement stage body 13 can limit and fix the clamp 12 by various measures, as long as it is convenient for the operator to observe the device and convenient for the disassembly and assembly of the clamp 12. Optionally, the height of the retaining wall 132 is 1 / 2 to 2 / 3 of the height of the clamp 12, so that the clamp 12 can be firmly fixed to prevent it from falling out, and the observation is not affected.

[0078] The shape of the clamp 12 matches the shape of the positioning groove 131, but the two can be made into various shapes and sizes. However, from the perspective of convenient processing, the positioning groove 131 is preferably a rectangular groove, and accordingly, the clamp 12 is also a rectangular clamp. When there are multiple types of clamps 12, the length and width of each type of clamp 12 are consistent with the length and width of the positioning groove 131, which is convenient for subsequent replacement of different types of clamps 12. In addition, the length and width of the displacement stage base 11 are consistent with the length of the displacement stage body 13, the length of the clamp 12 is consistent with the length of the displacement stage body 13 and the displacement stage base 11, and the width of the clamp 12 is the width of the displacement stage minus the width of the retaining walls 132 on both sides.

[0079] For easier understanding, the working principle of the modular detection platform is further described in detail below.

[0080] In a preferred embodiment, the chip detection process performed based on the modular detection platform is as follows:

[0081] (1) Place the modular testing platform as a whole under a microscope, and then place the device to be tested in the fixture 12;

[0082] (2) Then, manually adjust the height adjustment knob (3) on the support member 2 to adjust the displacement stage 10 to a suitable height;

[0083] (3) After reaching the appropriate height, adjust the first spiral displacement rod 7 and the second spiral displacement rod 8 to adjust the device to be inspected to the center of the microscope;

[0084] (4) Finally, manually adjust the angle adjustment knob (4) on the connector 9 to control the rotation angle of the translation stage 10, thereby observing the glue creepage height of the device to determine whether the package meets the requirements.

[0085] In summary, the present invention proposes a modular detection platform, which adopts a modular design and integrates multiple functions such as rotation, telescopic, and manual adjustment, and can achieve multi-angle and multi-position adjustment, thereby replacing the traditional manual detection method, greatly improving the detection efficiency, and significantly reducing the difficulty of operation. By adopting this modular detection platform, operators can complete the chip glue climbing height detection work more conveniently and accurately, effectively avoiding the device offset problem caused by improper human operation, and improving the overall quality and production efficiency of chip packaging.

[0086] Although the present invention is disclosed as above, it is not limited thereto. Those skilled in the art may make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the present invention specification and its equivalent technology, the present invention is also intended to include these modifications and variations.

Claims

1. A modular detection platform, characterized in that: include: Bases, supports, connectors, stages and fixtures; The fixture is detachably mounted on the translation platform; and a plurality of workstations are arranged on the fixture, each of which can hold a device; The bottom end of the support member is fixed on the base, and the top end of the support member is rotatably connected to the displacement platform; the two ends of the connecting member are rotatably connected to the displacement platform and the support member respectively; The supporting member and the connecting member are both structures with adjustable lengths, and the supporting member and the connecting member can also be locked in current positions.

2. The modular detection platform according to claim 1, characterized in that: The translation stage comprises a translation stage base, a translation stage body and a thread fine-tuning device; the translation stage body is mounted on the translation stage base; the thread fine-tuning device is connected to the translation stage base and the translation stage body respectively; the thread fine-tuning device can adjust the relative position of the translation stage body and the translation stage base in a first direction and a second direction, the first direction being perpendicular to the second direction; The clamp is installed on a side of the translation stage body away from the translation stage base; the top end of the support member and one end of the connecting member are both rotatably connected to the translation stage base.

3. The modular detection platform according to claim 2, characterized in that: The thread fine-tuning device includes a first spiral displacement rod and a second spiral displacement rod; the first spiral displacement rod and the second spiral displacement rod are both rotatably mounted on the base of the translation platform; the first spiral displacement rod is arranged along the first direction; the second spiral displacement rod is arranged along the second direction; the first spiral displacement rod is used to drive the translation platform body to move along the first direction; the second spiral displacement rod is used to drive the translation platform body to move along the second direction.

4. The modular detection platform according to claim 1, characterized in that: The modular detection platform includes a plurality of the fixtures, and the plurality of the fixtures correspond one-to-one to the plurality of the devices, so that a corresponding device can be installed through a corresponding fixture, and the packaging methods of the plurality of the devices are different.

5. The modular detection platform according to claim 4, characterized in that: Among the multiple clamps, the placement angles of the multiple workstations on at least one of the clamps are different, and adjacent workstations are staggered at 90°.

6. The modular detection platform according to claim 1, characterized in that: The support member and the connecting member both include a multi-section sleeve; a height adjustment device is provided at the connection between adjacent sleeves of the support member, and the height adjustment device can selectively lock and unlock adjacent sleeves in the support member, and a plurality of locking holes are provided on the adjustable sleeve in the support member, and the height adjustment device is selectively inserted into a corresponding one of the locking holes; and / or, an angle adjustment device is provided at the connection between adjacent sleeves of the connecting member, and the angle adjustment device can selectively lock and unlock adjacent sleeves in the connecting member, and the angle adjustment device cooperates with the connecting member to achieve stepless adjustment of the angle.

7. The modular detection platform according to claim 6, characterized in that: The height adjustment device adopts one of a height adjustment knob and a height adjustment button, and the angle adjustment device adopts one of an angle adjustment knob and an angle adjustment button.

8. A chip detection method, performed based on the modular detection platform according to claim 1, characterized in that: include: Placing the modular inspection platform under a microscope, and then placing a plurality of devices to be inspected on the fixture; By adjusting the length of the support member, the height of the translation platform is controlled; By adjusting the length of the connecting piece, the rotation angle of the translation stage is controlled; The creepage height of the device is observed through the microscope.

9. The chip detection method according to claim 8, characterized in that: Also includes: By adjusting a threaded fine-tuning device connected to a translation stage base and a translation stage body of the translation stage, the relative positions of the translation stage body and the translation stage base in a first direction and a second direction are controlled, wherein the first direction is perpendicular to the second direction; The translation stage body is installed on the translation stage base, the fixture is installed on a side of the translation stage body away from the translation stage base, and the top of the support member and one end of the connecting member are both rotatably connected to the translation stage base.

10. The chip detection method according to claim 8, characterized in that: Also includes: Providing a plurality of the clamps, wherein the plurality of the clamps correspond one to one to the plurality of the devices, and the plurality of the devices are packaged in different ways; Select a corresponding one of the fixtures to install a corresponding one of the devices.