Control method and system of semiconductor production equipment, equipment and medium

Abstract

The invention belongs to the technical field of equipment automation control and monitoring, and particularly relates to a semiconductor production equipment control method and system, equipment and a medium, and the method comprises the steps: building a communication connection with semiconductor production equipment; acquiring data information of the semiconductor production equipment in real time based on the communication connection; when any data information is abnormal data, adjusting the abnormal data according to a preset processing measure, and then performing program control on the semiconductor production equipment; and if the data information is not abnormal, performing program control on the semiconductor production equipment according to the data information. Communication connection with the semiconductor production equipment is established, and efficient and intelligent automatic production control is performed on the semiconductor production equipment in real time through the communication connection, so that the production efficiency of the semiconductor production equipment is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of equipment automation control and monitoring, and in particular to a control method, system, equipment and medium for semiconductor production equipment. Background Art

[0002] As the core driving force of scientific and technological progress, the semiconductor industry has been developing rapidly driven by trends such as electrification, digitalization, artificial intelligence and the accelerated deployment of the Internet of Things. As development needs increase, the performance and efficiency of semiconductor production equipment are also improving accordingly.

[0003] However, at present, the intelligence level of semiconductor production equipment is low, and its existing information cannot be obtained in a timely manner, resulting in information asynchrony and slow equipment response. When equipment malfunctions, continuous human intervention and shutdown are required.

[0004] Therefore, how to efficiently and intelligently realize intelligent control of semiconductor production equipment is a problem that needs to be solved at present. Summary of the invention

[0005] The present invention provides a control method, system, device and medium for semiconductor production equipment, aiming to solve the current problem that semiconductor production equipment cannot be intelligently controlled efficiently and intelligently.

[0006] In order to achieve the above-mentioned object of the invention, the first aspect of the present invention provides a control method for semiconductor production equipment, the method comprising:

[0007] Establish communication links with semiconductor production equipment;

[0008] Acquiring data information of the semiconductor production equipment in real time based on the communication connection;

[0009] When any of the data information is abnormal data, the abnormal data is adjusted according to a preset processing measure, and then the semiconductor production equipment is program-controlled;

[0010] If the data information is normal, program control is performed on the semiconductor production equipment according to the data information.

[0011] Furthermore, the establishing of a communication connection with the semiconductor production equipment includes:

[0012] Configure IP and ports for semiconductor production equipment;

[0013] A communication protocol of the semiconductor production equipment is constructed based on the IP and the port, and the communication protocol includes a message header, a data structure, and data items.

[0014] Furthermore, the establishing of a communication connection with the semiconductor production equipment includes:

[0015] A custom link is read, the custom link is configured on a semiconductor production device, and a communication connection with the semiconductor production device is established, wherein the custom link includes a custom control parameter and a custom processing state.

[0016] Furthermore, before acquiring the data information of the semiconductor production equipment in real time based on the communication connection, the method further includes:

[0017] Reading the operation flow of the semiconductor production equipment;

[0018] Obtaining the real-time operating status of the semiconductor production equipment;

[0019] Comparing the operating status with the operation process to determine the production status of the semiconductor production equipment;

[0020] If the production status is normal, an operation instruction is sent to the semiconductor production equipment to control the semiconductor production equipment to start operation.

[0021] Furthermore, the real-time acquisition of data information of the semiconductor production equipment based on the communication connection includes:

[0022] Acquire an operation identifier when the semiconductor production equipment performs an operation based on the operation instruction;

[0023] Comparing the operation identification with the process identification to determine the working status of the semiconductor production equipment;

[0024] If the semiconductor manufacturing equipment is in a first state, selecting a control parameter for the first state and performing a control operation based on the control parameter; and

[0025] If the semiconductor production equipment changes from the first state to the second state, program control of the semiconductor production equipment is stopped.

[0026] Furthermore, the abnormal data is adjusted according to a preset processing measure, and then the semiconductor production equipment is program-controlled, including:

[0027] adjusting the semiconductor production equipment to a third state according to the abnormal data;

[0028] Tracing the abnormal link based on the abnormal data to determine the abnormal factor;

[0029] The preset processing measures are read according to the abnormal factors to adjust the abnormal data, and then the semiconductor production equipment is program-controlled.

[0030] Furthermore, before performing program control on the semiconductor production equipment, the method further includes:

[0031] Obtaining parameter values ​​of the current semiconductor production equipment;

[0032] Comparing the parameter value with a preset value range, and if the parameter value is within the preset value range, performing program control on the semiconductor production equipment;

[0033] If the parameter value is not within the preset value range, the semiconductor production equipment is shut down.

[0034] The present application also provides a control system for semiconductor production equipment, the system comprising:

[0035] A connection module for establishing a communication connection with semiconductor production equipment;

[0036] An acquisition module, used for acquiring data information of the semiconductor production equipment in real time based on the communication connection;

[0037] A first control module, used for adjusting the abnormal data according to a preset processing measure when any of the data information is abnormal data, and then performing program control on the semiconductor production equipment;

[0038] The second control module is used to perform program control on the semiconductor production equipment according to the data information if there is no abnormality in the data information.

[0039] The present application also provides a computer device, including a memory and a processor, wherein the memory stores a computer program, and the processor implements the steps of any of the above-mentioned control methods for semiconductor production equipment when executing the computer program.

[0040] The present application also provides a computer-readable storage medium having a computer program stored thereon, and when the computer program is executed by a processor, the steps of the control method for semiconductor production equipment described in any one of the above items are implemented.

[0041] Beneficial effect: In the present application, a communication connection with semiconductor production equipment is established, and data information of the semiconductor production equipment is obtained in real time based on the communication connection. When any data information is abnormal data, the abnormal data is adjusted according to preset processing measures and then the semiconductor production equipment is program-controlled; if the data information is normal, the semiconductor production equipment is program-controlled according to the data information, thereby realizing efficient and intelligent real-time automatic control of the conductor production equipment, which is beneficial to improving the production efficiency of the semiconductor production equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1A schematic flow chart of an embodiment of a control method for semiconductor production equipment of the present application;

[0043] Figure 2 This is a schematic diagram of the structure of an embodiment of a control system for semiconductor production equipment of the present application;

[0044] Figure 3 This is a schematic block diagram of the structure of an embodiment of a computer device of the present application.

[0045] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0046] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0047] It will be understood by those skilled in the art that, unless expressly stated, the singular forms "a", "an", "above", and "the" used herein may also include plural forms. It should be further understood that the term "comprising" used in the specification of the present invention refers to the presence of features, integers, steps, operations, elements, modules, and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, modules, components, and / or groups thereof. It should be understood that when we refer to an element as being "connected" or "coupled" to another element, it may be directly connected or coupled to the other element, or there may be an intermediate element. In addition, the "connection" or "coupling" used herein may include wireless connection or wireless coupling. The term "and / or" used herein includes all or any module and all combinations of one or more associated listed items.

[0048] It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as generally understood by those skilled in the art in the art to which the present invention belongs. It should also be understood that terms such as those defined in general dictionaries should be understood to have meanings consistent with the meanings in the context of the prior art, and will not be interpreted with idealized or overly formal meanings unless specifically defined as herein.

[0049] Reference Figure 1 , an embodiment of the present invention provides a control method for semiconductor production equipment, comprising the following steps S1-S4:

[0050] S1: Establish communication connection with semiconductor production equipment.

[0051] In this embodiment, in order to realize the intelligent control of semiconductor production equipment, it is necessary to establish a communication connection between the equipment automation system EAP (Equipment Automation Program) and the semiconductor production equipment, and the equipment automation system then realizes the intelligent control of the semiconductor production equipment based on the communication connection. Among them, the equipment automation system is a system for controlling semiconductor manufacturing equipment for automated production. It is a communication bridge between upper-level systems such as MES, RMS, APC, FDC and the equipment layer. It is an indispensable system in automated production. The advantage of EAP is that it can reduce human operating errors, improve production efficiency, and improve product yield. Building a communication connection between the equipment automation system and semiconductor production equipment includes standardized communication connections and customized communication connections.

[0052] S2: Acquire data information of the semiconductor production equipment in real time based on the communication connection.

[0053] After establishing a communication connection with the semiconductor production equipment, data information of the semiconductor production equipment can be obtained in real time based on the communication connection. Specifically, the EAP system obtains the operating data of the semiconductor production equipment in real time through the communication connection, wherein the operating data includes data on the operating status of the semiconductor production equipment at each stage. The EAP system can convert and integrate the acquired data, thereby gaining real-time insight into the upstream and downstream conditions of the semiconductor production equipment, eliminating the impact of abnormalities in the upper system, accurately controlling the downstream equipment, and thereby improving the production efficiency of the semiconductor production equipment.

[0054] At the same time, EAP will periodically send device information to the GMONITOR EAP monitoring system. The GMONITOR EAP monitoring system monitors the information sent by the corresponding device EAP and updates the status of EAP in real time. The system can see the real-time operating status of the machine, the control status and the environment to which EAP is connected.

[0055] S3: When any of the data information is abnormal data, the abnormal data is adjusted according to a preset processing measure, and then the semiconductor production equipment is program-controlled.

[0056] For the data information of semiconductor production equipment acquired in real time, the data information may be one data or multiple data, that is, the data information may be the data information of each stage and each node of a semiconductor production equipment, or it may be the data information of the operation of multiple semiconductor production equipment; if there is abnormal data in the data information (data deviating from the standard operation data range), it is necessary to correct the abnormal data, and then perform operation control based on the corrected data. Specifically, when there is abnormal data in the data acquired from the semiconductor production equipment, the semiconductor production equipment is adjusted to a pause state, and then the abnormal data is traced to find the factors causing the abnormality, and then corrective measures are taken according to the abnormal factors, and the abnormal data is corrected based on the corrective measures. Finally, the semiconductor production equipment is program-controlled according to the corrected data to realize intelligent control of the semiconductor production equipment.

[0057] S4: If the data information is normal, program control is performed on the semiconductor production equipment according to the data information.

[0058] For the data information of semiconductor production equipment obtained in real time, if there is no abnormality in the data information, automated production control of the semiconductor production equipment can be performed based on the data obtained in real time, that is, the data information is parsed to determine the equipment operation control node and equipment operation parameters corresponding to the data information, and the equipment is started according to the operation parameters and enters the corresponding control node to realize automated production control of the semiconductor production equipment.

[0059] The present embodiment provides a control method for semiconductor production equipment, by establishing a communication connection with the semiconductor production equipment, and then acquiring data information of the semiconductor production equipment in real time based on the communication connection. When any data information is abnormal data, the abnormal data is adjusted according to preset processing measures and then program control is performed on the semiconductor production equipment; if the data information is normal, the semiconductor production equipment is program controlled according to the data information, thereby realizing efficient and intelligent real-time automatic control of the conductor production equipment, which is beneficial to improving the production efficiency of the semiconductor production equipment.

[0060] In one embodiment, the above-mentioned establishment of a communication connection with a semiconductor production equipment includes:

[0061] S11. Configure IP and port for semiconductor production equipment;

[0062] S12. Construct a communication protocol of the semiconductor production equipment based on the IP and the port, wherein the communication protocol includes a message header, a data structure, and data items.

[0063] As mentioned above, IP and port are configured for semiconductor production equipment, and then a communication protocol with semiconductor production equipment is constructed based on the IP and port. The communication protocol is SECE / GEM. SECS / GEM is a connectivity standard constructed by members of the International Semiconductor Equipment and Materials Association (SEMI). The standard is applied to the communication standard between equipment and factory management systems. SECS / GEM is a semiconductor device interface protocol used for data communication from equipment to host. The communication protocol includes a message header, a data structure, and a data item, wherein the message header (Message Header): contains control information of the message, such as message type, message length, etc.; the data structure (Data Structure): contains actual data content, which can be a simple value, a string, or a complex nested structure; data items (Data Items): specific data units, each of which has a specific type and format. Establishing a communication connection with semiconductor production equipment provides a basis for subsequent automated production control of semiconductor production equipment. Send some basic SECS instructions, such as sending S1F3 to obtain the basic information on the machine including machine model, software version information, sending S7F19 to obtain the reicpeList on the machine, i.e. the process recipe list, and sending S1F11 to obtain the SVIDList on the machine, i.e. the subsystem manufacturer identification code list.

[0064] In one embodiment, the above-mentioned establishment of a communication connection with a semiconductor production equipment includes:

[0065] A custom link is read, the custom link is configured on a semiconductor production device, and a communication connection with the semiconductor production device is established, wherein the custom link includes a custom control parameter and a custom processing state.

[0066] As described above, in addition to standardized production control of semiconductor production equipment, special customized automated production equipment control is required for semiconductor production equipment to meet different production requirements. In one embodiment, special nodes of semiconductor production equipment need to be controlled. For example, the equipment reports a control instruction, which is to directly transport the material to the material station of the fifth production process of the machine for replenishment, without transporting the material through the initial production process. Based on this, this special transportation requirement is different from conventional material transportation, so special settings are required, that is, special control parameters and special processing control status are written into the control code, and then a custom link is generated according to the control code. Finally, the custom link is configured on the semiconductor production equipment, and the semiconductor production equipment can be specially controlled according to the custom link.

[0067] As an example, the wafer end event reported by the machine can be linked to WaferState, i.e., the wafer state, and SlotId, i.e., the wafer placement position. The wafer end event can indicate which wafer has been processed through SlotId, and the actual processing status of the wafer can be determined through WaferState. SlotID determines the physical slot information of the processed wafer, such as whether the physical slot is slot 1 or slot 25, to achieve accurate monitoring of the wafer processed by the machine, and avoid the machine entering the next station when there is actually no wafer being processed.

[0068] In one embodiment, before the real-time acquisition of the data information of the semiconductor production equipment based on the communication connection, the method further includes:

[0069] S21, reading the operation flow of the semiconductor production equipment;

[0070] S22, obtaining the real-time operating status of the semiconductor production equipment;

[0071] S23, comparing the operating status with the operation process to determine the production status of the semiconductor production equipment;

[0072] S24. If the production status is normal, an operation instruction is sent to the semiconductor production equipment to control the semiconductor production equipment to start operation.

[0073] As described above, the operation flow of the semiconductor production equipment is read, and the operation flow refers to all the process flows included when the semiconductor production equipment starts production; the real-time operation status of the semiconductor production equipment is obtained, and the operation status is compared with the operation flow to determine the operation status of the semiconductor production equipment. In one embodiment, the machine is started and the operation is performed according to the automated operation flow of the machine. During this period, by observing the action of the machine, the action is compared with the process flow of the equipment to determine the corresponding event reported by the machine, and then confirm that the control state of the machine is Remote, and send an operation instruction to the machine to control the machine to start automated operation. When the CarrierArrive event reported by the machine is identified, that is, the arrival event of the transport equipment, it means that there is a Carrier on the machine, that is, the transport equipment is placed on the machine. At this time, the PPSELECT instruction is sent to select the recipe of the machine operation, that is, automatically select the equipment menu. After receiving the PPSELECTOK event, the next step is started, and the START instruction is sent to start the machine operation. At this time, the machine will report the corresponding events in the order of the machine operation, such as the machine starts operation, the single wafer starts operation, the single wafer ends operation, and the machine ends operation.

[0074] When the arrival event of the transport equipment on the machine is received, the CarrierID, i.e. the transport equipment ID, is compared with the ID of the current site on the MES, and the transport equipment status on the MES changes to the JobIn status. EAP sends the PPSELECT instruction to select the recipe for the job based on the PPID configured on the MES account. The PPID is the process recipe version, and the PPSELECT instruction is the process recipe version selection instruction. When EAP receives the PPSELECTOK event reported by the machine, it sends the START instruction to the machine, and the machine starts working. After receiving the ProcessEnd event, EAP believes that the machine has completed processing, and sends the JobOut message to the MES, and the MES automatically leaves the station.

[0075] In one embodiment, the real-time acquisition of data information of the semiconductor production equipment based on the communication connection includes:

[0076] S25, obtaining an operation identifier when the semiconductor production equipment performs an operation based on the operation instruction;

[0077] S26, comparing the operation identifier with the process identifier to determine the working status of the semiconductor production equipment;

[0078] S27, if the semiconductor production equipment is in a first state, selecting control parameters for the first state, and performing a control operation based on the control parameters; and

[0079] S28. If the semiconductor production equipment changes from the first state to the second state, then the program control of the semiconductor production equipment is stopped.

[0080] As described above, when the equipment starts to start running, in order to achieve accurate control of the equipment, it is necessary to obtain the data information of the semiconductor production equipment in real time, and then control the production operation of the semiconductor production equipment in real time based on the data information, wherein the real-time acquisition of the data information of the semiconductor production equipment includes: when the semiconductor production equipment performs an operation based on an operation instruction, obtain the operation identifier under the operation state, and compare the operation identifier with the process identifier to determine whether the semiconductor production equipment is in a working state that can be controlled normally. If the semiconductor production equipment is in a working state that can be controlled normally, select process parameters for process control for the semiconductor production equipment, and control the semiconductor production equipment to perform process production based on the process reference; if the semiconductor production equipment sends a fault or shuts down during normal operation, that is, the semiconductor production equipment changes from a working state that can be controlled normally to a state that cannot work, then disconnect the control of the semiconductor production equipment. In one embodiment, the equipment starts to start running, obtains the carrier ID of the equipment, and compares the carrier ID with the MES account data. When the comparison is successful, the next step is performed, that is, the control parameters of the process are selected for the equipment, and the control operation is performed based on the control parameters; but if the comparison between the carrier ID and the MES account data fails, it will be prompted that it does not match the account data on the MES. At this time, EAP will not perform the next step, and manual confirmation is required to confirm whether the input carrier ID is consistent with the MES account. Only after all job information is correct, EAP will control the machine to start the operation.

[0081] In one embodiment, the above-mentioned adjusting the abnormal data according to the preset processing measures and then performing program control on the semiconductor production equipment includes:

[0082] S31, adjusting the semiconductor production equipment to a third state according to the abnormal data;

[0083] S32, tracing the abnormal link based on the abnormal data to determine the abnormal factor;

[0084] S33, reading preset processing measures according to the abnormal factors to adjust the abnormal data, and then performing program control on the semiconductor production equipment.

[0085] As described above, when an abnormality exists in the equipment, the equipment state is corrected before program control is performed on the semiconductor production equipment. Specifically, when an abnormality exists in the equipment, the semiconductor production equipment is adjusted to a shutdown state, and reverse data tracing is performed based on the abnormal data in the shutdown state to determine the factors of the data abnormality, and data correction is performed based on the factors to obtain equipment parameters that can enable the normal operation of the equipment, and the equipment is controlled to perform production operations based on the equipment parameters. In one embodiment, when the machine is processing, it is essential to select the process parameters to be processed to determine the processing control operation of the current machine, but if the selected process parameters are abnormal parameters, such as the completion information of the selected machine ID is a combination of A+B+C, but the actual selected information is only A, based on this, the storage path of the information A is reversely traced according to the information A, and information related to the information A is searched in the storage path to improve the information A and then the machine is controlled based on the improvement.

[0086] In one embodiment, before the program control of the semiconductor production equipment is performed, the method further includes:

[0087] S331, obtaining parameter values ​​of the current semiconductor production equipment;

[0088] S332, comparing the parameter value with a preset value range, and if the parameter value is within the preset value range, performing program control on the semiconductor production equipment;

[0089] S333. If the parameter value is not within the preset value range, the semiconductor production equipment is shut down.

[0090] As described above, in order to ensure the normal operation of the equipment, the equipment needs to be calibrated before controlling the equipment after data correction to ensure the correctness of the equipment control parameters. In one embodiment, the parameter values ​​on the machine, such as the air pressure and flow rate of the machine, are obtained in real time, and the preset value range is read at the same time. The real-time parameter value is compared with the data range. When a value exceeds the set range, it is considered that the machine has an abnormal situation and the machine can be shut down or terminated.

[0091] Reference Figure 2 , an embodiment of the present invention further provides a control system for a semiconductor production device, comprising:

[0092] A connection module 10, used to establish a communication connection with semiconductor production equipment;

[0093] An acquisition module 20, configured to acquire data information of the semiconductor production equipment in real time based on the communication connection;

[0094] A first control module 30, for adjusting the abnormal data according to a preset processing measure when any of the data information is abnormal data, and then performing program control on the semiconductor production equipment;

[0095] The second control module 40 is used to perform program control on the semiconductor production equipment according to the data information if there is no abnormality in the data information.

[0096] As described above, the control system of the semiconductor production equipment can realize the control method of the semiconductor production equipment.

[0097] In one embodiment, the connection module 10 further includes:

[0098] Configure IP and ports for semiconductor production equipment;

[0099] A communication protocol of the semiconductor production equipment is constructed based on the IP and the port, and the communication protocol includes a message header, a data structure, and data items.

[0100] In one embodiment, the connection module 10 further includes:

[0101] A custom link is read, the custom link is configured on a semiconductor production device, and a communication connection with the semiconductor production device is established, wherein the custom link includes a custom control parameter and a custom processing state.

[0102] In one embodiment, the acquisition module 20 further includes:

[0103] Reading the operation flow of the semiconductor production equipment;

[0104] Obtaining the real-time operating status of the semiconductor production equipment;

[0105] Comparing the operating status with the operation process to determine the production status of the semiconductor production equipment;

[0106] If the production status is normal, an operation instruction is sent to the semiconductor production equipment to control the semiconductor production equipment to start operation.

[0107] In one embodiment, the acquisition module 20 further includes:

[0108] Acquire an operation identifier when the semiconductor production equipment performs an operation based on the operation instruction;

[0109] Comparing the operation identification with the process identification to determine the working status of the semiconductor production equipment;

[0110] If the semiconductor manufacturing equipment is in a first state, selecting a control parameter for the first state and performing a control operation based on the control parameter; and

[0111] If the semiconductor production equipment changes from the first state to the second state, program control of the semiconductor production equipment is stopped.

[0112] In one embodiment, the first control module 30 further includes:

[0113] adjusting the semiconductor production equipment to a third state according to the abnormal data;

[0114] Tracing the abnormal link based on the abnormal data to determine the abnormal factor;

[0115] The preset processing measures are read according to the abnormal factors to adjust the abnormal data, and then the semiconductor production equipment is program-controlled.

[0116] In one embodiment, the first control module 30 further includes:

[0117] Obtaining parameter values ​​of the current semiconductor production equipment;

[0118] Comparing the parameter value with a preset value range, and if the parameter value is within the preset value range, performing program control on the semiconductor production equipment;

[0119] If the parameter value is not within the preset value range, the semiconductor production equipment is shut down.

[0120] Reference Figure 3 The embodiment of the present invention further provides a computer device, the internal structure of which can be as follows Figure 3As shown. The computer device includes a processor, a memory, a network interface and a database connected via a system bus. Among them, the processor designed for the computer device is used to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating device, a computer program and a database. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The database of the computer device is used to store relevant data of the control method of the semiconductor production equipment, etc. The network interface of the computer device is used to communicate with an external terminal through a network connection. Furthermore, the above-mentioned computer device can also be provided with an input device and a display screen, etc. When the above-mentioned computer program is executed by the processor to implement the control method of the semiconductor production equipment, it includes the following steps: establishing a communication connection with the semiconductor production equipment; obtaining the data information of the semiconductor production equipment in real time based on the communication connection; when any of the data information is abnormal data, the abnormal data is adjusted according to the preset processing measures, and then the semiconductor production equipment is program-controlled; if the data information is normal, the semiconductor production equipment is program-controlled according to the data information. Those skilled in the art can understand that Figure 3 The structure shown in is merely a block diagram of a portion of the structure related to the present application solution, and does not constitute a limitation on the computer device on which the present application solution is photographed.

[0121] An embodiment of the present application also provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, a control method for semiconductor production equipment is implemented, including the following steps: establishing a communication connection with the semiconductor production equipment; obtaining data information of the semiconductor production equipment in real time based on the communication connection; when any of the data information is abnormal data, adjusting the abnormal data according to a preset processing measure, and then program-controlling the semiconductor production equipment; if the data information is normal, program-controlling the semiconductor production equipment according to the data information. It can be understood that the computer-readable storage medium in this embodiment can be a volatile readable storage medium or a non-volatile readable storage medium.

[0122] Those of ordinary skill in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, storage, database or other media provided in this application and used in the embodiments may include non-volatile and / or volatile memory. Non-volatile memory may include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM) or flash memory. Volatile memory may include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in a variety of forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (SSRSDRAM), enhanced SDRAM (ESDRAM), synchronous link (Synchlink) DRAM (SLDRAM), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM), etc.

[0123] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, device, article or method including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, device, article or method. In the absence of further restrictions, an element defined by the sentence "includes a ..." does not exclude the presence of other identical elements in the process, device, article or method including the element.

[0124] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A control method for semiconductor production equipment, characterized in that: The method comprises: Establish communication links with semiconductor production equipment; Acquiring data information of the semiconductor production equipment in real time based on the communication connection; When any of the data information is abnormal data, the abnormal data is adjusted according to a preset processing measure, and then the semiconductor production equipment is program-controlled; If the data information is normal, program control is performed on the semiconductor production equipment according to the data information.

2. The control method of semiconductor production equipment according to claim 1, characterized in that: The establishing of a communication connection with semiconductor production equipment includes: Configure IP and ports for semiconductor production equipment; A communication protocol of the semiconductor production equipment is constructed based on the IP and the port, and the communication protocol includes a message header, a data structure, and data items.

3. The control method of semiconductor production equipment according to claim 1, characterized in that: The establishing of a communication connection with semiconductor production equipment includes: A custom link is read, the custom link is configured on a semiconductor production device, and a communication connection with the semiconductor production device is established, wherein the custom link includes a custom control parameter and a custom processing state.

4. The control method of semiconductor production equipment according to claim 1, characterized in that: Before acquiring the data information of the semiconductor production equipment in real time based on the communication connection, the method further includes: Reading the operation flow of the semiconductor production equipment; Obtaining the real-time operating status of the semiconductor production equipment; Comparing the operating status with the operation process to determine the production status of the semiconductor production equipment; If the production status is normal, an operation instruction is sent to the semiconductor production equipment to control the semiconductor production equipment to start operation.

5. The control method of semiconductor production equipment according to claim 4, characterized in that: The real-time acquisition of data information of the semiconductor production equipment based on the communication connection includes: Acquire an operation identifier when the semiconductor production equipment performs an operation based on the operation instruction; Comparing the operation identification with the process identification to determine the working status of the semiconductor production equipment; If the semiconductor manufacturing equipment is in a first state, selecting a control parameter for the first state and performing a control operation based on the control parameter; and If the semiconductor production equipment changes from the first state to the second state, program control of the semiconductor production equipment is stopped.

6. The control method of semiconductor production equipment according to claim 1, characterized in that: The adjusting the abnormal data according to the preset processing measures and then performing program control on the semiconductor production equipment includes: adjusting the semiconductor production equipment to a third state according to the abnormal data; Tracing the abnormal link based on the abnormal data to determine the abnormal factor; The preset processing measures are read according to the abnormal factors to adjust the abnormal data, and then the semiconductor production equipment is program-controlled.

7. The control method of semiconductor production equipment according to claim 6, characterized in that: Before the semiconductor production equipment is program-controlled, the method further includes: Obtaining parameter values ​​of the current semiconductor production equipment; Comparing the parameter value with a preset value range, and if the parameter value is within the preset value range, performing program control on the semiconductor production equipment; If the parameter value is not within the preset value range, the semiconductor production equipment is shut down.

8. A control system for semiconductor production equipment, characterized in that: The system comprises: A connection module for establishing a communication connection with semiconductor production equipment; An acquisition module, used for acquiring data information of the semiconductor production equipment in real time based on the communication connection; A first control module, used for adjusting the abnormal data according to a preset processing measure when any of the data information is abnormal data, and then performing program control on the semiconductor production equipment; The second control module is used to perform program control on the semiconductor production equipment according to the data information if there is no abnormality in the data information.

9. A computer device comprising a memory and a processor, wherein a computer program is stored in the memory, wherein: When the processor executes the computer program, the steps of the method for controlling semiconductor production equipment according to any one of claims 1 to 7 are implemented.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the control method of the semiconductor production equipment according to any one of claims 1 to 7 are implemented.

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