Fault positioning method and device, equipment and storage medium

Abstract

The embodiment of the invention provides a fault positioning method and device, equipment and a storage medium. The method comprises the steps that fault alarm information of target equipment is acquired; obtaining a corresponding target hardware combination identifier and a target control signal combination according to the fault alarm information; wherein the target hardware combination identifier is an identifier of a communication module, a control cable and a functional component related to the fault alarm information, and the target control signal combination is a combination of control signals of the communication module related to the fault alarm information; suspicious fault hardware is determined according to the signal value of the target control signal combination, and the suspicious fault hardware comprises the communication module or the functional component; and obtaining a signal value of the target control signal combination after the suspicious fault hardware is replaced, and determining the fault hardware according to the signal value of the target control signal combination after replacement.

Description

Technical Field

[0001] The present application relates to the field of fault handling, and in particular to a fault locating method, device, equipment and storage medium. Background Art

[0002] If a hardware device such as semiconductor equipment fails during operation, an alarm will be thrown. In order to ensure the normal operation of semiconductor equipment, etc., it is necessary to locate the fault point according to the alarm content and handle the fault. Usually, the alarm information mainly describes the abnormality of the component or process, which includes basic information such as the fault name and troubleshooting items. Semiconductor equipment involves many hardware modules, and usually one alarm involves three or more hardware modules, such as communication modules, functional component modules, control cables, etc. Operators cannot directly locate the fault point based on the alarm information alone, and can only check each hardware module one by one. This method is difficult to locate the fault point at one time, and the troubleshooting time is relatively long. Summary of the invention

[0003] The embodiment of the present application provides a fault location method to automatically locate the fault point in a hardware device such as a semiconductor device, thereby improving the efficiency of troubleshooting.

[0004] In a first aspect, an embodiment of the present application provides a fault location method, the method comprising:

[0005] Obtain fault alarm information of the target device;

[0006] Obtaining a corresponding target hardware combination identifier and a target control signal combination according to the fault alarm information; wherein the target hardware combination identifier is an identifier of a communication module, a control cable, and a functional component involved in the fault alarm information, and the target control signal combination is a combination of control signals of the communication module involved in the fault alarm information;

[0007] Determining suspected faulty hardware according to a signal value of the target control signal combination, wherein the suspected faulty hardware includes the communication module or the functional component;

[0008] The signal value of the target control signal combination after the suspected faulty hardware is replaced is obtained, and the faulty hardware is determined according to the signal value of the target control signal combination after the replacement.

[0009] In a second aspect, an embodiment of the present application provides a computer device, the device comprising:

[0010] processor;

[0011] and a memory arranged to store computer executable instructions, wherein the executable instructions are configured to be executed by the processor, and the executable instructions include instructions for executing the steps in the fault location method provided in the first aspect of the embodiment of the present application.

[0012] In a third aspect, an embodiment of the present application provides a storage medium, wherein the storage medium is used to store computer-executable instructions, wherein the executable instructions enable a computer to execute the fault location method provided in the first aspect of the embodiment of the present application.

[0013] In a fourth aspect, an embodiment of the present application provides a semiconductor process equipment, comprising at least one communication module, at least one functional component, and at least one control cable connecting the corresponding communication module and the functional component;

[0014] The semiconductor process equipment further includes a controller, the controller includes at least one processor and at least one memory, the memory stores a correspondence between fault alarm information and a target hardware combination identifier and a target control signal combination, as well as identifiers of each of the communication modules, each of the control cables and each of the functional components; wherein the target hardware combination identifier is an identifier of the communication module, control cable and functional component involved in the fault alarm information, and the target control signal combination is a combination of control signals of the communication module involved in the fault alarm information;

[0015] The memory also stores a computer program, which, when executed by the processor, implements the fault location method provided in the first aspect of the embodiment of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0017] Figure 1 It is a flowchart of a fault location method provided in an embodiment of the present application;

[0018] Figure 2 yes Figure 1 A schematic diagram of a hardware combination in the fault location method shown;

[0019] Figure 3 yes Figure 1 An example of the overall location process of the fault location method shown;

[0020] Figure 4It is a structural diagram of a computer device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0021] In order to enable those skilled in the art to better understand the technical solutions in the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of this specification. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of this specification.

[0022] When a hardware failure occurs in a hardware device such as a semiconductor device, an alarm message will be issued to indicate that the component or process is abnormal. However, hardware devices such as semiconductor devices contain multiple hardware modules, and any hardware module failure may generate an alarm, making the alarm causes of hardware devices such as semiconductor devices complex, and there are many troubleshooting directions, making it difficult to directly locate the fault point based on the alarm information. When an alarm occurs in a semiconductor device, the module that fails is not necessarily a functional component, but may also be a communication module, control cable, etc. This requires operators to check each module one by one to locate the fault point. This method is difficult to locate the accurate fault point at one time, and the troubleshooting time is long, which affects the equipment's production capacity. For example, when the alarm message "Tank1levelSensorFault" appears, it can be determined that the liquid level sensor signal is abnormal. However, there are many reasons for the abnormal liquid level sensor signal, such as sensor cable disconnection, communication module abnormality, sensor abnormality, etc. In actual troubleshooting, operators are required to check all the hardware involved one by one to locate the fault point, which takes a lot of time and affects production efficiency.

[0023] In this regard, an embodiment of the present application provides a fault location method, apparatus, device and storage medium. In the fault location method provided in this embodiment, when a fault occurs, the fault alarm information of the target device is obtained; the corresponding target hardware combination identifier and target control signal combination are obtained according to the fault alarm information; wherein the target hardware combination identifier is the identifier of the communication module, control cable and functional component involved in the fault alarm information, and the target control signal combination is the combination of control signals of the communication module involved in the fault alarm information; according to the signal value of the target control signal combination, the suspected faulty hardware is determined, and the suspected faulty hardware includes the communication module or the functional component; the signal value of the target control signal combination after the suspected faulty hardware is replaced is obtained, and the faulty hardware is determined according to the signal value of the target control signal combination after the replacement.

[0024] By obtaining the target hardware combination identifier and the target control signal combination corresponding to the alarm information, the suspected faulty hardware is determined in the target hardware combination identifier according to the signal value of the target control signal combination, and then, the signal value of the target control signal combination after the suspected faulty hardware is replaced is obtained, and the faulty hardware is determined according to the signal value of the target control signal combination after the replacement. This can achieve automatic location of hardware faults when multiple hardware are involved, thereby improving the efficiency of troubleshooting.

[0025] Embodiment 1

[0026] This embodiment provides a fault location method, which can be used to locate a fault point in a hardware device such as a semiconductor device, thereby improving the efficiency of fault location. Figure 1 is a flowchart of a fault location method provided by an embodiment of the present application, such as Figure 1 As shown, the fault location method provided in this embodiment includes:

[0027] S102, obtaining fault alarm information of the target device.

[0028] The target device may be a device with a hardware failure, and the failure alarm information may be an alarm information thrown by the target device when a hardware failure occurs, which may include an alarm identifier. The alarm identifier uniquely identifies the alarm, which may be an alarm name, an alarm number, and the like.

[0029] S104: Obtain a corresponding target hardware combination identifier and a target control signal combination according to the fault alarm information.

[0030] The target hardware combination identifier is the identifier of the communication module, control cable and functional component involved in the fault alarm information, and the target control signal combination is the combination of control signals of the communication module involved in the fault alarm information.

[0031] In one implementation, the corresponding target hardware combination identifier and target control signal combination may be acquired from a fault information combination library according to the fault alarm information.

[0032] The fault information combination library stores the corresponding relationship between fault alarm information such as fault alarm identification and hardware combination identification and control signal combination. The target hardware combination identification and target control signal combination can be obtained based on the corresponding relationship between the alarm information and the hardware combination identification and control signal combination in the fault information combination library.

[0033] Specifically, the fault information combination library can store the corresponding relationship between each alarm identifier and each hardware combination identifier and each control signal combination, and there is a one-to-one correspondence between the alarm identifier, the hardware combination identifier, and the control signal combination. When a hardware fault occurs, an alarm message will be thrown, and the alarm message includes an alarm identifier, which uniquely identifies the alarm, which can be an alarm name, an alarm number, etc. The alarm identifier of the hardware fault can be obtained from the alarm message, and the target hardware combination identifier and the target control signal combination corresponding to the alarm identifier can be obtained according to the corresponding relationship between the alarm identifier, the hardware combination identifier, and the control signal combination in the fault information combination library.

[0034] For example, when a semiconductor device fails to load radio frequency power normally, an alarm message with an alarm identifier of "RFNotOn" will be thrown. At this time, the fault information combination library can be queried according to the alarm identifier to obtain the hardware combination identifier corresponding to the alarm identifier and the control signal combination corresponding to the hardware combination identifier. The hardware combination identifier corresponding to the alarm identifier is the target hardware combination identifier, and the control signal combination corresponding to the hardware combination identifier is the target control signal combination. For example, for the alarm identifier "RFNotOn", its corresponding target hardware combination identifier may include: communication module identifier A, control cable identifier B and functional component identifier C, and the corresponding target control signal combination may include: control signal 1, control signal 2 and control signal 3.

[0035] In one implementation, the fault information combination library may be pre-built.

[0036] In one implementation, a fault information combination library can be pre-constructed by the following method: determining the hardware combination corresponding to each alarm identifier based on the hardware involved in each alarm identifier in the historical alarm information, wherein the hardware involved in each alarm identifier includes: a communication module, a control cable, and a functional component; constructing a hardware combination identifier of the hardware combination based on the identifiers of each hardware in the hardware combination; wherein each hardware identifier in the hardware combination identifier is associated with the physical location of the corresponding hardware; obtaining all control signals related to the communication module and the functional component in the hardware combination, and constructing a control signal combination corresponding to the hardware combination based on all the control signals; constructing the fault information combination library based on the correspondence between the alarm identifier and the hardware combination, the hardware combination identifier, and the control signal combination.

[0037] In addition to the hardware identification, the hardware combination identification may also include the identification of the docking points between the hardware, for example, the identification of the docking points between the communication module and the control cable and the identification of the corresponding points between the functional component and the control cable, so as to quickly locate the detection point for fault detection.

[0038] Specifically, the hardware such as communication modules, control cables, and functional components involved in each alarm mark can be determined based on historical alarm information, and the hardware involved in each alarm mark can be constructed as a hardware combination of communication module + control cable + functional component. Among them, the functional component is a component that plays a certain operating function in the hardware device, such as a radio frequency power supply, a sensor, etc. The communication module is a component used for communication between the functional component and the main control device, and the control cable is the hardware connecting the functional component and the communication module.

[0039] Then, the unique identifier of each hardware and each docking point in the hardware combination can be obtained, and a hardware combination identifier is constructed for the hardware combination according to the unique identifier of each hardware and each docking point in the hardware combination, and a corresponding relationship between the alarm identifier and the hardware combination identifier is established. The hardware combination identifier uniquely identifies the hardware combination, which may include: a communication module identifier, a control cable identifier, a functional component identifier, and a first docking point identifier where the control cable is connected to the communication module and a second docking point identifier where the control cable is connected to the functional component.

[0040] Among them, the identifier of each hardware and each docking point uniquely identifies the corresponding hardware or docking point, and is associated with the physical position of the corresponding hardware or docking point, and the physical position of the corresponding hardware or docking point can be located according to each identifier in the hardware combination identifier. For example, the communication module identifier is associated with the physical position of the communication module indicated by the communication module identifier, and the physical position of the communication module indicated by it can be located according to the communication module identifier; the control cable identifier is associated with the physical position of the control cable indicated by the control cable identifier, and the physical position of the control cable indicated by it can be located according to the control cable identifier; the functional component identifier is associated with the physical position of the control cable indicated by the functional component identifier, and the physical position of the functional component indicated by it can be located according to the functional component identifier; the first docking point identifier of the control cable and the communication module is associated with the physical position of the docking point indicated by the docking point identifier, and the physical position of the docking point indicated by it can be located according to the docking point identifier; the second docking point identifier of the control cable and the functional component is associated with the physical position of the docking point indicated by the docking point identifier, and the physical position of the docking point indicated by it can be located according to the docking point identifier.

[0041] Figure 2 A schematic diagram of a hardware combination is shown, such as Figure 2As shown, the hardware combination includes a communication module 101, a control cable 102, and a functional component 103. The hardware combination identifier of the hardware combination can be: a combination of a communication module identifier 101, a control cable identifier 102, a functional component identifier 103, a first docking point identifier 121 at which the control cable 102 is connected to the communication module 101, and a second docking point identifier 123 at which the control cable 102 is connected to the functional component 103, wherein the hardware combination identifier can uniquely identify the hardware combination, the communication module identifier 101 can uniquely identify the communication module, the control cable identifier 102 can uniquely identify the control cable, the functional component identifier 103 can uniquely identify the functional component, the first docking point identifier 121 can uniquely identify the docking point at which the control cable 102 is connected to the communication module 101, the second docking point identifier 123 can uniquely identify the docking point at which the control cable 102 is connected to the functional component 103, each hardware identifier is associated with the physical position of the hardware it identifies, and each docking point identifier is associated with the physical position of the docking point it identifies.

[0042] After constructing a hardware combination based on the hardware involved in the alarm identifier, all control signals related to the functional components of the communication module in the hardware combination can be obtained, and a control signal combination can be constructed based on all the control signals of the functional components. A correspondence between the hardware combination identifier and the control signal combination is established, and a fault information combination library is constructed based on the correspondence between the alarm identifier and the hardware combination identifier and the control signal combination.

[0043] S106, determining suspected faulty hardware according to the signal value of the target control signal combination.

[0044] Among them, the suspected faulty hardware includes the communication module or functional component involved in the fault alarm information.

[0045] The target control signal combination is a combination of all control signals involved in the fault alarm information. If the communication of all control signals in the target control signal combination is normal, it means that the communication module involved in the fault alarm information is normal, and there may be an abnormality in the functional component. If the communication of some control signals in the target control signal combination is abnormal, it means that there may be an abnormality in the communication module involved in the fault alarm information.

[0046] Therefore, in one implementation, when the communication of at least some control signals in the target control signal combination is abnormal, it can be determined that the communication module involved in the fault alarm information is suspected faulty hardware; or, when the communication of all control signals in the target control signal combination is normal, it can be determined that the functional component involved in the fault alarm information is suspected faulty hardware.

[0047] For example, for the "RFNotOn" alarm, the functional component involved is the RF power supply BRFPower, and the control signals corresponding to the component include: DI (digital input) control signal, DO (digital output) control signal, AI (analog input) control signal, and AO (analog output) control signal. The signal values ​​of the DI control signal, DO control signal, AI control signal, and AO control signal can be obtained, and whether the control signal has communication abnormalities can be determined based on the signal values ​​of the control signals. Among them, the signal value can be the point status value of the control signal. For example, if the point status signal value of the control signal is "8", it means that the control signal is online and can be refreshed normally, and the communication of the control signal is normal. If the point status signal value of the control signal is "0", it means that the control signal is not online, cannot be refreshed normally, and the communication of the control signal is abnormal.

[0048] If the communication of some control signals in the target control signal combination is abnormal, it indicates that the communication module in the target hardware combination, that is, the communication module involved in the fault alarm information, may have an abnormality. At this time, the communication module involved in the fault alarm information can be determined as suspected faulty hardware.

[0049] If the communication of all target control signals in the target control signal combination is normal, it indicates that the communication module in the target hardware combination, that is, the communication module involved in the fault alarm information, is normal, and the fault may occur in the functional component in the target hardware combination. At this time, the functional component involved in the fault alarm information can be identified as suspected faulty hardware.

[0050] S108, obtaining a signal value of a target control signal combination after a replacement process is performed on the suspected faulty hardware, and determining the faulty hardware according to the signal value of the target control signal combination after the replacement.

[0051] The replacement of the suspected faulty hardware may include: replacing the suspected faulty hardware with corresponding normal hardware, wherein the normal hardware corresponding to the suspected faulty hardware is hardware that has the same functions as the suspected faulty hardware but is fault-free.

[0052] In implementation, the input and output of the suspected faulty hardware may be transferred to normal hardware corresponding to the suspected faulty hardware to complete the replacement of the suspected faulty hardware.

[0053] After the suspected faulty hardware is replaced, the faulty hardware can be determined based on the signal value of the target control signal combination.

[0054] Specifically, when the suspected faulty hardware is the communication module involved in the fault alarm information, the communication module can be replaced. If the signal value of the abnormal signal in the target control signal combination changes from abnormal to normal after the replacement, the communication module involved in the fault alarm information can be determined as faulty hardware; if the signal values ​​of each signal in the target control signal combination remain unchanged after the replacement, the control cables and functional components involved in the fault alarm information can be determined as faulty hardware; if the signal values ​​of all signals in the target control signal combination become abnormal after the replacement, the communication module, control cables and functional components involved in the fault alarm information can all be determined as faulty hardware; wherein, the abnormal signal is a signal with an abnormal signal value.

[0055] When the suspected faulty hardware is the functional component involved in the fault alarm information, the functional component can be replaced to obtain the signal value of the target control signal combination after the functional component is replaced. If the signal value of the abnormal signal in the target control signal combination changes from abnormal to normal after replacement, the functional component can be determined as faulty hardware; if the signal values ​​of each signal in the target control signal combination remain unchanged after replacement, the control cable involved in the fault alarm information can be determined as faulty hardware; if the signal values ​​of all signals in the target control signal combination become abnormal after replacement, the functional component and the control cable involved in the fault alarm information can be determined as faulty hardware.

[0056] Furthermore, when the faulty hardware is the control cable and functional component involved in the fault alarm information, the functional component can be determined as suspected faulty hardware, the functional component can be replaced, and the signal value of the target control signal combination after the functional component is replaced can be obtained; the fault can be further located according to the signal value of the target control signal combination after replacement. Among them, if the signal value of the abnormal signal in the target control signal combination after replacement changes from abnormal to normal, the functional component can be determined as faulty hardware; if the signal value of each signal in the target control signal combination after replacement remains unchanged, the control cable can be determined as faulty hardware; if the signal values ​​of all signals in the target control signal combination after replacement become abnormal, the functional component and the control cable can be determined as faulty hardware.

[0057] Furthermore, after the faulty hardware is determined, the identification of the faulty hardware can be output so that the operator can handle it accordingly. For example, the identification of the faulty hardware can be displayed on the user interaction interface to prompt the operator of the specific hardware that has failed. Since the identification of each hardware is associated with its physical location, the operator can easily find the corresponding faulty hardware for processing based on the identification of the faulty hardware. Of course, in the process of determining the faulty hardware, the intermediate results can also be output so that the operator can handle it accordingly. For example, when a functional component is determined to be suspected faulty hardware, the identification of the functional component and the identification of the docking point between the functional component and the control cable can be output, so that the operator can determine the detection point and replace the functional component.

[0058] The fault location method provided in the embodiment of the present application is further explained below with reference to the overall process example of fault location. Figure 3 yes Figure 1 As shown in Figure 3, the overall process of the fault location method provided in the embodiment of the present application may include the following steps:

[0059] S202: Acquire an alarm identifier from fault alarm information of a target device.

[0060] S204, acquiring a target hardware combination identifier and a target control signal combination corresponding to the alarm identifier from a fault information combination library according to the alarm identifier; the target hardware combination identifier includes identifiers of a communication module, a control cable, and a functional component involved in the alarm identifier.

[0061] S206, obtain the signal value of each target control signal in the target control signal combination, and determine the communication status of each target control signal according to the signal value of each target control signal; wherein the communication status of the control signal is, for example: online, offline. If the communication status of some target control signals in the target control signal combination is abnormal (for example, the communication status of a control signal is offline), proceed to step S208; if the signal values ​​of all target control signals in the target control signal combination are normal, such as the communication status of all target control signals is "online", proceed to step S214.

[0062] S208: Determine the communication module involved in the alarm mark as suspected faulty hardware, and locate the fault detection point to the connection point between the communication module involved in the alarm mark and the control cable.

[0063] S210, obtain the signal value of the target control signal combination after the communication module is replaced. If the signal values ​​of all signals in the target control signal combination have become abnormal, that is, they are all abnormal, then go to step 211; if the signal value of the abnormal signal in the target control signal has changed from abnormal to normal, that is, an abnormal state transfer has occurred, then go to S212; if the signal value of each signal in the target control signal remains unchanged, that is, the abnormal state has not been transferred, then go to step S213.

[0064] S211: The communication module, control cable, and functional component involved in the alarm mark are all determined as faulty hardware.

[0065] S212: Determine the communication module involved in the alarm identification as faulty hardware.

[0066] S213, determining the control cables and functional components involved in the alarm mark as faulty hardware, and going to step S214;

[0067] S214: determine the functional component involved in the alarm mark as suspected faulty hardware, and locate the fault detection point to the connection point between the functional component involved in the alarm mark and the control cable.

[0068] S215, obtain the signal value of the target control signal combination after the functional component is replaced. If the signal values ​​of all signals in the target control signal combination have become abnormal, that is, they are all abnormal, then go to step 216; if the signal value of the abnormal signal in the target control signal has changed from abnormal to normal, that is, an abnormal state transfer has occurred, then go to S217; if the signal value of each signal in the target control signal remains unchanged, that is, the abnormal state has not been transferred, then go to step S218.

[0069] S216: Determine the functional components and control cables involved in the alarm mark as faulty hardware.

[0070] S217: Determine the functional component involved in the alarm identification as faulty hardware.

[0071] S218: Determine the control cable involved in the alarm mark as faulty hardware.

[0072] Embodiment 2

[0073] Corresponding to the fault location method provided in the above embodiment, based on the same technical concept, the embodiment of the present application also provides a computer device, which is used to execute the above fault location method, such as Figure 4 shown.

[0074] Computer devices may vary greatly due to different configurations or performances, and may include one or more processors and memories, in which one or more stored applications or data may be stored. The memory may be a temporary storage or a permanent storage. The application stored in the memory may include one or more modules, each of which may include a series of computer executable instructions in the computer device. Furthermore, the processor may be configured to communicate with the memory to execute a series of computer executable instructions in the memory on the computer device. The computer device may also include one or more power supplies, one or more wired or wireless network interfaces, one or more input and output interfaces, one or more keyboards, etc.

[0075] In a specific embodiment, a computer device includes a memory and one or more programs, wherein the one or more programs are stored in the memory, and the one or more programs may include one or more modules, and each module may include a series of computer executable instructions in the computer device, and the one or more programs configured to be executed by one or more processors include computer executable instructions for performing the following:

[0076] Obtain fault alarm information of the target device;

[0077] Obtaining a corresponding target hardware combination identifier and a target control signal combination according to the fault alarm information; wherein the target hardware combination identifier is an identifier of a communication module, a control cable, and a functional component involved in the fault alarm information, and the target control signal combination is a combination of control signals of the communication module involved in the fault alarm information;

[0078] Determining suspected faulty hardware according to a signal value of the target control signal combination, wherein the suspected faulty hardware includes the communication module or the functional component;

[0079] The signal value of the target control signal combination after the suspected faulty hardware is replaced is obtained, and the faulty hardware is determined according to the signal value of the target control signal combination after the replacement.

[0080] In one implementation, determining suspected faulty hardware according to the signal value of the target control signal combination includes:

[0081] When communication of at least part of the control signals in the target control signal combination is abnormal, determining that the communication module involved in the fault alarm information is suspected faulty hardware; or

[0082] When the communications of all control signals in the target control signal combination are normal, it is determined that the functional component involved in the fault alarm information is suspected faulty hardware.

[0083] In one implementation, the step of acquiring a corresponding target hardware combination identifier and a target control signal combination signal according to the fault alarm information includes:

[0084] Obtaining a fault alarm identifier from the fault alarm information;

[0085] According to the alarm identifier, the corresponding target hardware combination identifier and target control signal combination are obtained from the fault information combination library; wherein the fault information combination library stores the corresponding relationship between the fault alarm identifier and the hardware combination identifier and the control signal combination.

[0086] In one implementation, the method for constructing the fault information combination library includes:

[0087] Determine the hardware combination corresponding to each alarm information according to the hardware involved in each alarm identification in the historical alarm information, wherein the hardware involved in each alarm identification includes: a communication module, a control cable and a functional component;

[0088] Constructing a hardware combination identification of the hardware combination according to the identification of each hardware in the hardware combination; wherein each hardware identification in the hardware combination identification is associated with a physical location of the corresponding hardware;

[0089] Acquire all control signals of the communication module in the hardware combination related to the functional component, and construct a control signal combination corresponding to the hardware combination according to all the control signals;

[0090] The fault information combination library is constructed according to the corresponding relationship between the alarm identifier, the hardware combination identifier, and the control signal combination.

[0091] In one implementation, the replacing of the suspected faulty hardware includes: replacing the suspected faulty hardware with normal hardware corresponding to the suspected faulty hardware; wherein the normal hardware is fault-free hardware having the same function as the suspected faulty hardware.

[0092] In one implementation, when the suspected faulty hardware is the communication module, determining the faulty hardware according to the signal value of the target control signal combination after replacement includes:

[0093] If the signal value of the abnormal signal in the target control signal combination changes from abnormal to normal after the replacement, the suspected faulty hardware is determined to be faulty hardware; or

[0094] If the signal value of each signal in the target control signal combination remains unchanged after the replacement, the control cable and functional component involved in the fault alarm information are determined to be faulty hardware; or

[0095] If the signal values ​​of all signals in the target control signal combination become abnormal after replacement, the communication module, control cable and functional components involved in the fault alarm information are all determined to be faulty hardware; wherein the abnormal signal is a signal with an abnormal signal value.

[0096] In one implementation, when the faulty hardware is a control cable and a functional component involved in the fault alarm information, the method further includes:

[0097] The functional component is determined as suspected faulty hardware.

[0098] In one implementation, when the suspected faulty hardware is the functional component, determining the faulty hardware according to the signal value of the target control signal combination after replacement includes:

[0099] If the signal value of the abnormal signal in the target control signal combination changes from abnormal to normal after the replacement, the suspected faulty hardware is determined to be the faulty hardware; or

[0100] If the signal value of each signal in the target control signal combination remains unchanged after the replacement, the control cable involved in the fault alarm information is determined to be faulty hardware; or

[0101] If the signal values ​​of all signals in the target control signal combination become abnormal after replacement, the functional components and control cables involved in the fault alarm information are determined to be faulty hardware; wherein the abnormal signal is a signal with an abnormal signal value.

[0102] In one implementation, the replacing the suspected faulty hardware includes:

[0103] The input and output signals of the suspected faulty hardware are transferred to normal hardware corresponding to the suspected faulty hardware, so as to replace the suspected faulty hardware module with the corresponding normal hardware.

[0104] It should be noted that the embodiment of the computer device in the present application and the fault location method provided in the embodiment of the present application are based on the same inventive concept, so the specific implementation of this embodiment can refer to the specific implementation of the aforementioned fault location method, and the repeated parts will not be repeated.

[0105] Embodiment 3

[0106] Corresponding to the fault location method provided in the embodiment of the present application, based on the same technical concept, the embodiment of the present application also provides a storage medium for storing computer executable instructions;

[0107] In a specific embodiment, the storage medium may be a USB flash drive, an optical disk, a hard disk, etc. When the computer executable instructions stored in the storage medium are executed by the processor, the following process can be implemented:

[0108] Obtain fault alarm information of the target device;

[0109] Obtaining a corresponding target hardware combination identifier and a target control signal combination according to the fault alarm information; wherein the target hardware combination identifier is an identifier of a communication module, a control cable, and a functional component involved in the fault alarm information, and the target control signal combination is a combination of control signals of the communication module involved in the fault alarm information;

[0110] Determining suspected faulty hardware according to a signal value of the target control signal combination, wherein the suspected faulty hardware includes the communication module or the functional component;

[0111] The signal value of the target control signal combination after the suspected faulty hardware is replaced is obtained, and the faulty hardware is determined according to the signal value of the target control signal combination after the replacement.

[0112] In one implementation, determining suspected faulty hardware according to the signal value of the target control signal combination includes:

[0113] When communication of at least part of the control signals in the target control signal combination is abnormal, determining that the communication module involved in the fault alarm information is suspected faulty hardware; or

[0114] When the communications of all control signals in the target control signal combination are normal, it is determined that the functional component involved in the fault alarm information is suspected faulty hardware.

[0115] In one implementation, the step of acquiring a corresponding target hardware combination identifier and a target control signal combination signal according to the fault alarm information includes:

[0116] Obtaining a fault alarm identifier from the fault alarm information;

[0117] According to the alarm identifier, the corresponding target hardware combination identifier and target control signal combination are obtained from the fault information combination library; wherein the fault information combination library stores the corresponding relationship between the fault alarm identifier and the hardware combination identifier and the control signal combination.

[0118] In one implementation, the method for constructing the fault information combination library includes:

[0119] Determine the hardware combination corresponding to each alarm information according to the hardware involved in each alarm identification in the historical alarm information, wherein the hardware involved in each alarm identification includes: a communication module, a control cable and a functional component;

[0120] Constructing a hardware combination identification of the hardware combination according to the identification of each hardware in the hardware combination; wherein each hardware identification in the hardware combination identification is associated with a physical location of the corresponding hardware;

[0121] Acquire all control signals of the communication module in the hardware combination related to the functional component, and construct a control signal combination corresponding to the hardware combination according to all the control signals;

[0122] The fault information combination library is constructed according to the corresponding relationship between the alarm identifier, the hardware combination identifier, and the control signal combination.

[0123] In one implementation, the replacing of the suspected faulty hardware includes: replacing the suspected faulty hardware with normal hardware corresponding to the suspected faulty hardware; wherein the normal hardware is fault-free hardware having the same function as the suspected faulty hardware.

[0124] In one implementation, when the suspected faulty hardware is the communication module, determining the faulty hardware according to the signal value of the target control signal combination after replacement includes:

[0125] If the signal value of the abnormal signal in the target control signal combination changes from abnormal to normal after the replacement, the suspected faulty hardware is determined to be faulty hardware; or

[0126] If the signal value of each signal in the target control signal combination remains unchanged after the replacement, the control cable and functional component involved in the fault alarm information are determined to be faulty hardware; or

[0127] If the signal values ​​of all signals in the target control signal combination become abnormal after replacement, the communication module, control cable and functional components involved in the fault alarm information are all determined to be faulty hardware; wherein the abnormal signal is a signal with an abnormal signal value.

[0128] In one implementation, when the faulty hardware is a control cable and a functional component involved in the fault alarm information, the method further includes:

[0129] The functional component is determined as suspected faulty hardware.

[0130] In one implementation, when the suspected faulty hardware is the functional component, determining the faulty hardware according to the signal value of the target control signal combination after replacement includes:

[0131] If the signal value of the abnormal signal in the target control signal combination changes from abnormal to normal after the replacement, the suspected faulty hardware is determined to be the faulty hardware; or

[0132] If the signal value of each signal in the target control signal combination remains unchanged after the replacement, the control cable involved in the fault alarm information is determined to be faulty hardware; or

[0133] If the signal values ​​of all signals in the target control signal combination become abnormal after replacement, the functional components and control cables involved in the fault alarm information are determined to be faulty hardware; wherein the abnormal signal is a signal with an abnormal signal value.

[0134] In one implementation, the replacing the suspected faulty hardware includes:

[0135] The input and output signals of the suspected faulty hardware are transferred to normal hardware corresponding to the suspected faulty hardware, so as to replace the suspected faulty hardware module with the corresponding normal hardware.

[0136] It should be noted that the embodiment of the storage medium in the present application and the fault location method provided in the embodiment of the present application are based on the same inventive concept, so the specific implementation of this embodiment can refer to the specific implementation of the aforementioned fault location method, and the repeated parts will not be repeated.

[0137] Embodiment 4

[0138] Corresponding to the fault location method provided in the embodiment of the present application, based on the same technical concept, the embodiment of the present application also provides a semiconductor process equipment, including at least one communication module, at least one functional component and at least one control cable connecting the corresponding communication module and the functional component;

[0139] The semiconductor process equipment further includes a controller, the controller includes at least one processor and at least one memory, the memory stores a correspondence between fault alarm information and a target hardware combination identifier and a target control signal combination, as well as identifiers of each of the communication modules, each of the control cables and each of the functional components; wherein the target hardware combination identifier is an identifier of the communication module, control cable and functional component involved in the fault alarm information, and the target control signal combination is a combination of control signals of the communication module involved in the fault alarm information;

[0140] The memory also stores a computer program, which, when executed by the processor, implements the steps of the following method:

[0141] Obtain fault alarm information of the target device;

[0142] Obtaining a corresponding target hardware combination identifier and a target control signal combination according to the fault alarm information; wherein the target hardware combination identifier is an identifier of a communication module, a control cable, and a functional component involved in the fault alarm information, and the target control signal combination is a combination of control signals of the communication module involved in the fault alarm information;

[0143] Determining suspected faulty hardware according to a signal value of the target control signal combination, wherein the suspected faulty hardware includes the communication module or the functional component;

[0144] The signal value of the target control signal combination after the suspected faulty hardware is replaced is obtained, and the faulty hardware is determined according to the signal value of the target control signal combination after the replacement.

[0145] In one implementation, determining suspected faulty hardware according to the signal value of the target control signal combination includes:

[0146] When communication of at least part of the control signals in the target control signal combination is abnormal, determining that the communication module involved in the fault alarm information is suspected faulty hardware; or

[0147] When the communications of all control signals in the target control signal combination are normal, it is determined that the functional component involved in the fault alarm information is suspected faulty hardware.

[0148] In one implementation, the step of acquiring a corresponding target hardware combination identifier and a target control signal combination signal according to the fault alarm information includes:

[0149] Obtaining a fault alarm identifier from the fault alarm information;

[0150] According to the alarm identifier, the corresponding target hardware combination identifier and target control signal combination are obtained from the fault information combination library; wherein the fault information combination library stores the corresponding relationship between the fault alarm identifier and the hardware combination identifier and the control signal combination.

[0151] In one implementation, the method for constructing the fault information combination library includes:

[0152] Determine the hardware combination corresponding to each alarm information according to the hardware involved in each alarm identification in the historical alarm information, wherein the hardware involved in each alarm identification includes: a communication module, a control cable and a functional component;

[0153] Constructing a hardware combination identification of the hardware combination according to the identification of each hardware in the hardware combination; wherein each hardware identification in the hardware combination identification is associated with a physical location of the corresponding hardware;

[0154] Acquire all control signals of the communication module in the hardware combination related to the functional component, and construct a control signal combination corresponding to the hardware combination according to all the control signals;

[0155] The fault information combination library is constructed according to the corresponding relationship between the alarm identifier, the hardware combination identifier, and the control signal combination.

[0156] In one implementation, the replacing of the suspected faulty hardware includes: replacing the suspected faulty hardware with normal hardware corresponding to the suspected faulty hardware; wherein the normal hardware is fault-free hardware having the same function as the suspected faulty hardware.

[0157] In one implementation, when the suspected faulty hardware is the communication module, determining the faulty hardware according to the signal value of the target control signal combination after replacement includes:

[0158] If the signal value of the abnormal signal in the target control signal combination changes from abnormal to normal after the replacement, the suspected faulty hardware is determined to be faulty hardware; or

[0159] If the signal value of each signal in the target control signal combination remains unchanged after the replacement, the control cable and functional component involved in the fault alarm information are determined to be faulty hardware; or

[0160] If the signal values ​​of all signals in the target control signal combination become abnormal after replacement, the communication module, control cable and functional components involved in the fault alarm information are all determined to be faulty hardware; wherein the abnormal signal is a signal with an abnormal signal value.

[0161] In one implementation, when the faulty hardware is a control cable and a functional component involved in the fault alarm information, the method further includes:

[0162] The functional component is determined as suspected faulty hardware.

[0163] In one implementation, when the suspected faulty hardware is the functional component, determining the faulty hardware according to the signal value of the target control signal combination after replacement includes:

[0164] If the signal value of the abnormal signal in the target control signal combination changes from abnormal to normal after the replacement, the suspected faulty hardware is determined to be the faulty hardware; or

[0165] If the signal value of each signal in the target control signal combination remains unchanged after the replacement, the control cable involved in the fault alarm information is determined to be faulty hardware; or

[0166] If the signal values ​​of all signals in the target control signal combination become abnormal after replacement, the functional components and control cables involved in the fault alarm information are determined to be faulty hardware; wherein the abnormal signal is a signal with an abnormal signal value.

[0167] In one implementation, the replacing the suspected faulty hardware includes:

[0168] The input and output signals of the suspected faulty hardware are transferred to normal hardware corresponding to the suspected faulty hardware, so as to replace the suspected faulty hardware module with the corresponding normal hardware.

[0169] It should be noted that the embodiments of the semiconductor process equipment in the present application and the fault location method provided in the embodiments of the present application are based on the same inventive concept, so the specific implementation of this embodiment can refer to the specific implementation of the aforementioned fault location method, and the repeated parts will not be repeated.

[0170] The above is a description of a specific embodiment of the specification. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recorded in the claims can be performed in an order different from that in the embodiments and still achieve the desired results. In addition, the processes depicted in the drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0171] In the 1990s, improvements to a technology could be clearly distinguished as hardware improvements (for example, improvements to the circuit structure of diodes, transistors, switches, etc.) or software improvements (improvements to the method flow). However, with the development of technology, many improvements to the method flow today can be regarded as direct improvements to the hardware circuit structure. Designers almost always obtain the corresponding hardware circuit structure by programming the improved method flow into the hardware circuit. Therefore, it cannot be said that an improvement in a method flow cannot be implemented using a hardware entity module. For example, a programmable logic device (PLD) (such as a field programmable gate array (FPGA)) is such an integrated circuit whose logical function is determined by the user's programming of the device. Designers can "integrate" a digital system on a PLD by programming it themselves, without having to ask a chip manufacturer to design and produce a dedicated integrated circuit chip. Moreover, nowadays, instead of manually making integrated circuit chips, this kind of programming is mostly implemented by "logic compiler" software, which is similar to the software compiler used when developing and writing programs, and the original code before compilation must also be written in a specific programming language, which is called hardware description language (HDL). There is not only one HDL, but many kinds, such as ABEL (Advanced Boolean Expression Language), AHDL (Altera Hardware Description Language), Confluence, CUPL (Cornell University Programming Language), HDCal, JHDL (Java Hardware Description Language), Lava, Lola, MyHDL, PALASM, RHDL (Ruby Hardware Description Language), etc. The most commonly used ones are VHDL (Very-High-Speed ​​Integrated Circuit Hardware Description Language) and Verilog. Those skilled in the art should also know that it is only necessary to program the method flow slightly in the above-mentioned hardware description languages ​​and program it into the integrated circuit, and then it is easy to obtain the hardware circuit that implements the logic method flow.

[0172] The controller can be implemented in any appropriate manner, for example, the controller can take the form of a microprocessor or processor and a computer-readable medium storing a computer-readable program code (such as software or firmware) that can be executed by the (micro)processor, a logic gate, a switch, an application-specific integrated circuit (ASIC), a programmable logic controller, and an embedded microcontroller. Examples of controllers include, but are not limited to, the following microcontrollers: ARC 625D, Atmel AT91SAM, Microchip PIC18F26K20, and Silicone Labs C8051F320. The memory controller can also be implemented as part of the control logic of the memory. Those skilled in the art also know that in addition to implementing the controller in a purely computer-readable program code manner, the controller can be implemented in the form of a logic gate, a switch, an application-specific integrated circuit, a programmable logic controller, and an embedded microcontroller by logically programming the method steps. Therefore, this controller can be considered as a hardware component, and the devices included therein for implementing various functions can also be regarded as structures within the hardware component. Or even, the devices for implementing various functions can be regarded as both software modules for implementing the method and structures within the hardware component.

[0173] The systems, devices, modules or units described in the above embodiments may be implemented by computer chips or entities, or by products with certain functions. A typical implementation device is a computer. Specifically, the computer may be, for example, a personal computer, a laptop computer, a cellular phone, a camera phone, a smart phone, a personal digital assistant, a media player, a navigation device, an email device, a game console, a tablet computer, a wearable device, or a combination of any of these devices.

[0174] For the convenience of description, the above devices are described in terms of functions and are divided into various units. Of course, when implementing one or more embodiments of this specification, the functions of each unit can be implemented in the same or multiple software and / or hardware.

[0175] Those skilled in the art will appreciate that the embodiments of this specification may be provided as methods, systems, or computer program products. Therefore, one or more embodiments of this specification may take the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware. Moreover, one or more embodiments of this specification may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) that contain computer-usable program code.

[0176] The embodiments of this specification are described with reference to the flowcharts and / or block diagrams of the methods, devices (systems), and computer program products according to the embodiments of this specification. It should be understood that each process and / or box in the flowchart and / or block diagram, as well as the combination of the processes and / or boxes in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable fraud case serial and parallel device to produce a machine, so that the instructions executed by the processor of the computer or other programmable fraud case serial and parallel device generate instructions for implementing the process in the process. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0177] These computer program instructions may also be stored in a computer readable memory capable of directing a computer or other programmable fraud case serial and parallel device to operate in a specific manner, so that the instructions stored in the computer readable memory produce an article of manufacture including an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1 A function specified in one or more boxes.

[0178] These computer program instructions may also be loaded onto a computer or other programmable device so that a series of operating steps are executed on the computer or other programmable device to produce a computer-implemented process, whereby the instructions executed on the computer or other programmable device provide for implementing the process. Figure 1 A process or multiple processes and / or boxes Figure 1 A step that specifies a function in one or more boxes.

[0179] In a typical configuration, a computing device includes one or more processors (CPU), input / output interfaces, network interfaces, and memory.

[0180] The memory may include non-permanent storage in a computer-readable medium, random access memory (RAM) and / or non-volatile memory in the form of read-only memory (ROM) or flash RAM. The memory is an example of a computer-readable medium.

[0181] Computer readable media include permanent and non-permanent, removable and non-removable media that can be implemented by any method or technology to store information. Information can be computer readable instructions, data structures, program modules or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, compact disk read-only memory (CD-ROM), digital versatile disk (DVD) or other optical storage, magnetic cassettes, magnetic tape magnetic disk storage or other magnetic storage devices or any other non-transmission media that can be used to store information that can be accessed by a computing device. As defined herein, computer readable media does not include temporary computer readable media (transitory media), such as modulated data signals and carrier waves.

[0182] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, commodity or device including the elements.

[0183] It should be understood by those skilled in the art that the embodiments of this specification may be provided as methods, systems or computer program products. Therefore, one or more embodiments of this specification may take the form of a complete hardware embodiment, a complete software embodiment or an embodiment combining software and hardware. Moreover, one or more embodiments of this specification may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program codes.

[0184] One or more embodiments of the present specification may be described in the general context of computer-executable instructions executed by a computer, such as program modules. Generally, program modules include routines, programs, objects, components, data structures, etc. that perform specific tasks or implement specific abstract data types. One or more embodiments of the present specification may also be practiced in distributed computing environments where tasks are performed by remote processing devices connected through a communication network. In a distributed computing environment, program modules may be located in local and remote computer storage media, including storage devices.

[0185] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0186] The above description is only an embodiment of the present invention and is not intended to limit the present application. For those skilled in the art, the present invention may have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the scope of the claims of the present invention.

Claims

1. A fault location method, the method comprising: Obtain fault alarm information of the target device; Obtaining a corresponding target hardware combination identifier and a target control signal combination according to the fault alarm information; wherein the target hardware combination identifier is an identifier of a communication module, a control cable, and a functional component involved in the fault alarm information, and the target control signal combination is a combination of control signals of the communication module involved in the fault alarm information; Determining suspected faulty hardware according to a signal value of the target control signal combination, wherein the suspected faulty hardware includes the communication module or the functional component; The signal value of the target control signal combination after the suspected faulty hardware is replaced is obtained, and the faulty hardware is determined according to the signal value of the target control signal combination after the replacement.

2. The fault location method according to claim 1, wherein determining the suspected faulty hardware according to the signal value of the target control signal combination comprises: When communication of at least part of the control signals in the target control signal combination is abnormal, determining that the communication module involved in the fault alarm information is suspected faulty hardware; or When the communications of all control signals in the target control signal combination are normal, it is determined that the functional component involved in the fault alarm information is suspected faulty hardware.

3. The fault location method according to claim 1, wherein the step of obtaining a corresponding target hardware combination identifier and a target control signal combination signal according to the fault alarm information comprises: Obtaining a fault alarm identifier from the fault alarm information; According to the alarm identifier, the corresponding target hardware combination identifier and target control signal combination are obtained from the fault information combination library; wherein the fault information combination library stores the corresponding relationship between the fault alarm identifier and the hardware combination identifier and the control signal combination.

4. According to the fault location method of claim 3, the method of constructing the fault information combination library comprises: Determine the hardware combination corresponding to each alarm information according to the hardware involved in each alarm identification in the historical alarm information, wherein the hardware involved in each alarm identification includes: a communication module, a control cable and a functional component; Constructing a hardware combination identification of the hardware combination according to the identification of each hardware in the hardware combination; wherein each hardware identification in the hardware combination identification is associated with a physical location of the corresponding hardware; Acquire all control signals of the communication module in the hardware combination related to the functional component, and construct a control signal combination corresponding to the hardware combination according to all the control signals; The fault information combination library is constructed according to the corresponding relationship between the alarm identifier, the hardware combination identifier, and the control signal combination.

5. The fault location method according to claim 1, wherein: The replacing process of the suspected faulty hardware includes: The suspected faulty hardware is replaced with normal hardware corresponding to the suspected faulty hardware; wherein the normal hardware is fault-free hardware and has the same function as the suspected faulty hardware.

6. The fault location method according to claim 1, when the suspected faulty hardware is the communication module, determining the faulty hardware according to the signal value of the target control signal combination after replacement comprises: If the signal value of the abnormal signal in the target control signal combination changes from abnormal to normal after the replacement, the communication module is determined to be faulty hardware; or If the signal value of each signal in the target control signal combination remains unchanged after the replacement, the functional component and the control cable involved in the fault alarm information are determined to be faulty hardware; or If the signal values ​​of all signals in the target control signal combination become abnormal after replacement, the communication module, functional components and control cables involved in the fault alarm information are all determined to be faulty hardware; wherein the abnormal signal is a signal with an abnormal signal value.

7. The fault location method according to claim 6, when the faulty hardware is a functional component and a control cable involved in the fault alarm information, the method further comprises: The functional component is determined as suspected faulty hardware.

8. The fault location method according to claim 1 or 7, when the suspected faulty hardware is the functional component, determining the faulty hardware according to the signal value of the target control signal combination after replacement comprises: If the signal value of the abnormal signal in the target control signal combination changes from abnormal to normal after the replacement, the functional component is determined to be faulty hardware; or If the signal value of each signal in the target control signal combination remains unchanged after the replacement, the control cable involved in the fault alarm information is determined to be faulty hardware; or If the signal values ​​of all signals in the target control signal combination become abnormal after replacement, the functional components and control cables involved in the fault alarm information are determined to be faulty hardware; wherein the abnormal signal is a signal with an abnormal signal value.

9. The fault location method according to claim 1, wherein the replacing the suspected faulty hardware comprises: The input and output signals of the suspected faulty hardware are transferred to normal hardware corresponding to the suspected faulty hardware, so as to replace the suspected faulty hardware module with the corresponding normal hardware.

10. A computer device, characterized in that: The device comprises: Processor; and A memory arranged to store computer executable instructions, the executable instructions being configured to be executed by the processor, the executable instructions comprising instructions for executing the steps in the method according to any one of claims 1 to 9.

11. A storage medium, characterized in that: The storage medium is used to store computer-executable instructions, and the executable instructions enable a computer to execute the method according to any one of claims 1 to 9.

12. A semiconductor process equipment, comprising at least one communication module, at least one functional component and at least one control cable connecting the corresponding communication module and the functional component; The semiconductor process equipment further includes a controller, the controller includes at least one processor and at least one memory, the memory stores the corresponding relationship between the fault alarm information and the target hardware combination identifier and the target control signal combination, as well as the identifiers of each of the communication modules, each of the control cables and each of the functional components; wherein, The target hardware combination identifier is the identifier of the communication module, control cable and functional component involved in the fault alarm information, and the target control signal combination is the combination of control signals of the communication module involved in the fault alarm information; The memory also stores a computer program, which, when executed by the processor, implements the fault location method according to any one of claims 1 to 9.

Images