Vertical cavity surface emitting laser chip and coding structure light detection device

Abstract

The invention provides a vertical cavity surface emitting laser chip and a coding structure light detection device, and relates to the technical field of three-dimensional detection. According to the vertical-cavity surface-emitting laser chip, the row array laser emitting group is arranged on the light-emitting side surface of the vertical-cavity surface-emitting laser chip, the light-emitting holes included in the row array laser emitting group are used for emitting laser beams, and particularly, when multiple laser beams are needed, the light-emitting holes meeting the number requirement can be formed for emitting the laser beams, so that the vertical-cavity surface-emitting laser chip serves as a light source, and the light-emitting efficiency is improved. On the basis that a plurality of laser beams can be provided as required to construct the stripe-structured light pattern, the light source is higher in integration level, smaller in size, easier to use, and particularly easier to use on a large scale. In addition, the vertical-cavity surface-emitting laser chip can be produced in batches through a conventional semiconductor process, and is high in stability and good in consistency.

Description

Technical Field

[0001] The present application relates to the field of three-dimensional detection technology, and in particular to a vertical cavity surface emitting laser chip and a coded structured light detection device. Background Art

[0002] In three-dimensional detection technology, a structured light pattern can be actively projected onto the surface of the object to be detected, and then the three-dimensional information of the object to be detected can be obtained by decoding the deformed pattern after being reflected by the object to be detected.

[0003] Among them, the projection of structured light patterns usually requires a coded structured light emitting device. Currently, there are two types of coded structured light emitting devices, one is a projector, and the other is a digital light processing (DLP) device. However, of these two devices, the projector is large and difficult to use, and the DLP device is more expensive.

[0004] In order to optimize the above two devices for projecting structured light patterns, a new coded structured light emitting device has gradually been developed: using a laser light source and an optical structure to project a stripe structured light pattern. Among them, the laser light source is usually set as multiple independent lasers, so it is large in size and difficult to use. Summary of the invention

[0005] The purpose of the present application is to provide a vertical cavity surface emitting laser chip and a coded structure light detection device to address the deficiencies in the above-mentioned prior art, so as to solve the problem that the light source in the existing coded structure light emitting device is large in size and difficult to use.

[0006] To achieve the above purpose, the technical solution adopted in the embodiment of the present application is as follows:

[0007] According to one aspect of an embodiment of the present application, a vertical cavity surface emitting laser chip is provided, comprising: a row array laser emission group, the row array laser emission group is arranged on the light emitting side surface of the vertical cavity surface emitting laser chip, the row array laser emission group comprises at least one light emitting hole located on the light emitting side surface, the at least one light emitting hole is arranged at intervals along the row direction of the row array laser emission group, the laser beam emitted by the light emitting hole is used to form a linear light spot, and the linear light spots corresponding to the row array laser emission group are combined to form a stripe structure light pattern alternating between light and dark.

[0008] In some embodiments, the VCSEL chip includes multiple parallel rows of laser emitting groups, the light emitting holes in the same row of laser emitting groups emit laser beams simultaneously, and the multiple rows of laser emitting components emit laser beams simultaneously.

[0009] In some embodiments, at least one of the following parameters of any two rows of the row array laser emission groups is different: the spacing between adjacent light-emitting holes, the size of the light-emitting holes, and the number of light-emitting holes.

[0010] In some embodiments, the vertical cavity surface emitting laser chip further includes a control circuit, which is electrically connected to the plurality of row array laser emitting groups respectively and is used to control the row array laser emitting groups to emit lasers respectively.

[0011] In some embodiments, at least part of the row array laser emission groups include a plurality of light emitting holes arranged at intervals along the row direction, and the light emitting holes in the same row array laser emission group have the same size and shape.

[0012] In some embodiments, the extension direction of the linear light spot is perpendicular to the row direction of the row array laser emission group.

[0013] In some embodiments, the light-emitting hole is a rectangular hole, and the length of the rectangular hole corresponds to the width of the linear light spot.

[0014] In some embodiments, the corners of the rectangular hole include rounded transitions, which is beneficial to improving the reliability of the vertical cavity surface emitting laser chip.

[0015] In some embodiments, the light-emitting hole is a strip hole, the length of the strip hole corresponds to the width of the linear light spot, the strip hole includes a plurality of sub-areas distributed in sequence along the length direction, and the widths of at least two sub-areas are unequal.

[0016] In some embodiments, the plurality of sub-regions include a central region and edge regions distributed along a length direction on opposite sides of the central region, and a width of the central region is greater than or less than a width of the edge region.

[0017] Another aspect of an embodiment of the present application provides a coded structure light emitting device, comprising: any one of the above-mentioned vertical cavity surface emitting laser chips; and also comprising a lens group, which is located on the light-emitting side of the vertical cavity surface emitting laser chip; wherein the laser beam emitted from the light-emitting hole is shaped into a linear light spot by the lens group.

[0018] In some embodiments, the lens group includes a collimating lens and a cylindrical lens arranged in sequence along the light path. The laser beam emitted from the light hole is collimated by the collimating lens and then enters the cylindrical lens. The laser beam entering the cylindrical lens is modulated by the cylindrical lens to form a linear light spot.

[0019] In some embodiments, the lens group includes a collimating lens and a wave lens arranged in sequence along the optical path. The laser beam emitted from the light hole is collimated by the collimating lens and then incident on the wave lens. The laser beam incident on the wave lens is modulated by the wave lens to form a linear light spot.

[0020] In some embodiments, the lens assembly is made of resin.

[0021] According to another aspect of the embodiments of the present application, a coded structured light detection device is provided, comprising a detection station, an image sensor, and any one of the above-mentioned vertical cavity surface emitting laser chips, wherein the detection station is used to place the object to be detected, and the vertical cavity surface emitting laser chip is used to emit a laser beam toward the detection station, and the laser beam is reflected by the object to be detected and then incident on the image sensor.

[0022] On the other hand, an embodiment of the present application provides a coded structured light detection device, comprising a detection station, an image sensor, and any one of the above-mentioned coded structured light emitting devices, wherein the detection station is used to place the object to be detected, and the coded structured light emitting device is used to emit a stripe structured light pattern toward the detection station, and the stripe structured light pattern is incident on the image sensor after being reflected by the object to be detected.

[0023] The beneficial effects of this application include:

[0024] The present application provides a vertical cavity surface emitting laser chip and a coded structured light detection device. By setting a row array laser emission group on the light-emitting side surface of the vertical cavity surface emitting laser chip, the emission of the laser beam is realized by using the light-emitting holes included therein. Especially when multiple laser beams are required, light-emitting holes that meet the quantity requirements can be set to achieve it. Therefore, the vertical cavity surface emitting laser chip of the present application is used as a light source. On the basis of providing a number of laser beams for constructing a stripe structured light pattern according to the requirements, the light source has a higher degree of integration, a smaller volume, and is easier to use, especially easier to use on a large scale. In addition, the vertical cavity surface emitting laser chip can be mass-produced through conventional semiconductor processes, with high stability and good consistency. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 One of the structural schematic diagrams of a coded structured light emitting device provided in an embodiment of the present application;

[0027] Figure 2 A second structural diagram of a coded structured light emitting device provided in an embodiment of the present application;

[0028] Figure 3 A third structural diagram of a coded structured light emitting device provided in an embodiment of the present application;

[0029] Figure 4One of the structural schematic diagrams of a vertical cavity surface emitting laser chip provided in an embodiment of the present application;

[0030] Figure 5 The second structural schematic diagram of a vertical cavity surface emitting laser chip provided in an embodiment of the present application;

[0031] Figure 6 A schematic diagram of the shape of a light-emitting hole provided in an embodiment of the present application;

[0032] Figure 7 A schematic diagram of the shape of a light-emitting hole in a single row array laser emission group provided in an embodiment of the present application;

[0033] Figure 8 A schematic diagram of the shape of another light-emitting hole in a single row array laser emission group provided in an embodiment of the present application.

[0034] Icon: 110-vertical cavity surface emitting laser chip; 111-light-emitting hole; 1111-central area; 1112-edge area; 1113-sub-area; 112-control circuit; 113-light-emitting side surface; 120-lens group; 121-collimating lens; 122-cylindrical lens; 123-wave lens; 130-row array laser emission group. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. It should be noted that, in the absence of conflict, the various features in the embodiments of the present application can be combined with each other, and the combined embodiments are still within the scope of protection of the present application.

[0036] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the application is usually placed when in use. They are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0037] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0038] In one aspect of the embodiment of the present application, referring to Figure 1 A vertical cavity surface emitting laser chip 110 is provided, comprising: a row array laser emission group, the row array laser emission group is arranged on a light emitting side surface 113 of the vertical cavity surface emitting laser chip 110, the row array laser emission group comprises at least one light emitting hole 111 located on the light emitting side surface 113, at least one light emitting hole 111 is arranged at intervals along a row direction of the row array laser emission group, laser beams emitted from the light emitting holes 111 are used to form linear light spots, and the linear light spots corresponding to the row array laser emission group are combined to form a stripe structure light pattern with alternating light and dark.

[0039] Among them, the vertical cavity surface emitting laser chip 110 can be a chip circuit including multiple light-emitting holes 111 formed on a substrate using vertical cavity surface emitting technology. Through the vertical cavity surface emitting laser chip 110, multiple or one light-emitting hole 111 thereon can be used to emit laser beams at the same time. The laser beam emitted by each light-emitting hole 111 can be used to project a stripe structured light pattern. For example, the laser beam emitted by the light-emitting hole 111 can eventually be used to form a linear light spot in the target area, and because the light-emitting holes 111 are spaced apart from each other, the dark area beside the linear light spot can be used as a dark stripe. For the row array laser emission group, a stripe structured light pattern with alternating light and dark can be formed through the combination of the corresponding linear light spot and dark stripes. The bright stripes in the stripe structured light pattern are the linear light spots formed by the corresponding laser beams, and the dark stripes are the dark areas beside the linear light spots corresponding to each laser beam. For example Figure 2 The interval area between the two linear light spots is a dark area.

[0040] By setting a row array laser emission group on the light-emitting side surface of the vertical cavity surface emitting laser chip 110, the emission of the laser beam is realized by using the light-emitting hole 111 included therein, especially when multiple laser beams are needed, the light-emitting holes that meet the quantity requirements can be set to achieve it. Therefore, the vertical cavity surface emitting laser chip 110 of the present application is used as a light source. On the basis of being able to provide a number of laser beams for constructing a stripe structured light pattern according to demand, the light source has a higher degree of integration, a smaller volume, and is easier to use, especially easier to use on a large scale. In addition, the vertical cavity surface emitting laser chip can be mass-produced through conventional semiconductor processes, with high stability and good consistency.

[0041] As mentioned above, the vertical cavity surface emitting laser chip 110 can be used as a light source to construct a coded structure light emitting device. For details, please continue to refer to Figure 1 The coded structured light emitting device may further include a lens group 120, which is located at the light emitting side of the vertical cavity surface emitting laser chip 110; the lens group 120 is used to shape the laser beam emitted from the light emitting hole 111 into a linear light spot, so as to emit a stripe structured light pattern.

[0042] by Figure 1 Taking the figure as an example, in the coded structure light emitting device provided in the embodiment of the present application, one or more light-emitting holes 111 arranged in a row array can be provided on the vertical cavity surface emitting laser chip 110 (two light-emitting holes are provided as an example in the figure), forming a row array laser emission group. Thus, the coded structure light emitting device can emit a laser beam arranged along the row direction of the row array through a row array laser emission group in the vertical cavity surface emitting laser chip 110. Furthermore, the coded structure light emitting device can stretch and shape the laser beams arranged in the row array respectively through the lens group 120, so as to obtain a linear light spot corresponding to each laser beam. In this way, a stripe structure light pattern composed of at least one linear light spot can be obtained. The bright stripes in the stripe structure light pattern are the linear light spots of the corresponding laser beams, and the dark stripes are the areas beside the linear light spots corresponding to each laser beam, such as Figure 2 The coding structured light emitting device can realize the projection of structured light patterns through the vertical cavity surface emitting laser chip 110 and the lens group 120. Compared with DLP devices, the cost is lower, and compared with projectors, the size is smaller and easier to use, especially easier to use on a large scale.

[0043] In some embodiments, the extension direction of the linear light spot is perpendicular to the row direction of the row array laser emission group, which can facilitate the mutual combination of the linear light spots.

[0044] For example, in some possible embodiments, the light-emitting hole 111 provided on the vertical cavity surface emitting laser chip 110 may be a rectangular hole, which can make the edge of the laser beam emitted from the light-emitting hole 111 sharper, and help to make the linear light spot after stretching and shaping more uniform and the edge clearer, so that the transition boundary between the bright and dark stripes of the stripe structured light pattern is clearer, and the clarity of the stripe structured light pattern finally obtained is improved. Optionally, the length of the rectangular hole corresponds to the width of the linear light spot, so that linear light spots of different widths can be achieved by directly adjusting the length of the rectangular hole. The length direction of the rectangular hole can be parallel to the row direction of the row array laser emission group in which it is located. Optionally, the shape of the rectangular hole can be a square hole or a rectangular hole. Optionally, at least one of the four corner positions of the rectangular hole can include a rounded transition, which can be beneficial to improving the reliability of the vertical cavity surface emitting laser chip.

[0045] In some embodiments, the light-emitting hole is a strip hole, and the length of the strip hole corresponds to the width of the linear light spot. That is, when the length of the strip hole is adjusted, the width of the corresponding linear light spot will also change synchronously, and the change relationship between the two is positively correlated.

[0046] Furthermore, the strip hole can be optimized according to the actual spot distribution requirements, and the optimization method can adjust the width of the strip hole at any position along the length direction of the strip hole. In other words, by adjusting the width of the strip hole at any position along the length direction of the strip hole, the energy distribution of the linear spot along the width direction can be changed. The adjustment rule follows: the wider the width of the strip hole at any position along its length direction, the more light is emitted from this position, so the more energy distribution of the position corresponding to this position in the linear spot, and vice versa. In other words, the strip hole includes multiple sub-areas distributed in sequence along the length direction, and the width of each sub-area can be adjusted to adjust the energy distribution of the sub-area at the corresponding position in the linear spot. Of course, the more sub-areas there are, the more refined the adjustment will be.

[0047] For example, when the energy distribution of a certain position in the linear spot corresponding to the strip hole is different from that of other positions, the width of the sub-area corresponding to the position can be controlled to increase or decrease compared with other positions, that is, the widths of two sub-areas are not equal among multiple sub-areas. Of course, if the number of sub-areas to be adjusted increases, there may be three or four sub-areas whose widths are not equal to each other.

[0048] In summary, the energy distribution of the laser beam emitted by the strip hole can be adjusted by optimizing the local width of the strip hole. When in the application scenario of coded structured light, it may be necessary to make the energy distribution of the linear light spot along its width direction more uniform, such as presenting a flat-top distribution. At this time, the width of at least one of the multiple sub-areas included in the strip hole can be adjusted to achieve the purpose of more uniform energy distribution of the linear light spot along its width direction.

[0049] Optionally, when the multiple sub-areas are three sub-areas, they may include a central area and edge areas distributed on opposite sides of the central area, that is, there is an edge area on the left and right of the central area. When optimizing the energy distribution, the following different optimization schemes may be used: Scheme 1, if the energy distribution of the laser beam emitted from the strip hole before optimization is brighter at the center than at the edge after stretching, the width of the edge area of ​​the strip hole may be increased or the width of the central area may be reduced, that is, the width of the central area of ​​the optimized strip hole may be smaller than the width of the edge area, forming a shape similar to a mallet; Scheme 2, if the energy distribution of the laser beam emitted from the strip hole is brighter at the edge than at the center after stretching, the width of the edge area of ​​the strip hole may be reduced or the width of the central area may be increased, that is, the width of the central area of ​​the optimized strip hole may be larger than the width of the edge area.

[0050] It should also be known that the width change from the central area to the edge area can be a continuous gradual change or a step-like mutation, such as Figure 6 As shown in , when the multiple sub-areas are three sub-areas, they may include a central area 1111 and edge areas 1112 distributed on opposite sides of the central area 1111, wherein the width of the central area 1111 to the width of the edge area 1112 is a step-like mutation; for another example: Figure 7 As shown in , when the multiple sub-areas are three sub-areas, they may include a central area 1111 and edge areas 1112 distributed on opposite sides of the central area 1111, wherein the width of the central area 1111 to the width of the edge area 1112 is a continuous gradient, or, Figure 8 As shown in , when the plurality of sub-areas are five sub-areas 1113, the widths of adjacent sub-areas 1113 may be continuously gradient. Of course, in other embodiments, Figure 7 and Figure 8 The shape of the light-emitting hole shown in FIG. 1 can also be divided into any other number of sub-areas according to requirements. It should be understood that the change of any two adjacent sub-areas can be a continuous gradual change or a step-like mutation.

[0051] Figure 7 The shape of the light-emitting hole in a single row array laser emission group is shown. Figure 8 Another shape of the light-emitting holes in a single row array laser emission group is shown.

[0052] Of course, in some other possible implementations of the embodiments of the present application, the light-emitting hole 111 may also be set to other shapes, such as circular, elliptical, etc., which are not limited here.

[0053] In some possible embodiments, the wavelength of the laser beam emitted by the light-emitting hole 111 on the vertical cavity surface emitting laser chip 110 can be set to a wavelength within the wavelength range of 650nm-1200nm, and can be reasonably selected according to actual needs. For example, the light-emitting hole 111 can be set to a light-emitting hole 111 that can emit a laser beam with a wavelength of 650nm. For another example, the light-emitting hole 111 can be set to a light-emitting hole 111 that can emit a laser beam with a wavelength of 710nm. For another example, the light-emitting hole 111 can also be set to a light-emitting hole 111 that can emit a laser beam with a wavelength of 1200nm, etc.

[0054] Of course, in some other possible implementations of the present application, the wavelength of the laser beam emitted by the light-emitting hole 111 can also be set to a wavelength within other wavelength ranges. There is no limitation here and it can be set according to actual needs in practical applications.

[0055] In some possible embodiments, the lens group 120 in the coded structure light emitting device provided in the embodiment of the present application is made of resin material, thereby reducing the weight of the lens group 120, improving the portability of the coded structure light emitting device, and making the coded structure light emitting device easier to use.

[0056] As a possible example, Figure 2 As shown, the lens group 120 in the coding structure light emitting device provided in the embodiment of the present application may include a collimating lens 121 and a cylindrical lens 122. The collimating lens 121 is used to collimate the laser beam emitted from the light-emitting hole 111 into a parallel beam, and the cylindrical lens 122 is used to shape the parallel beam emitted from the collimating lens 121 into a linear light spot.

[0057] In this way, the laser beam emitted by the light-emitting hole 111 can be collimated by the collimating lens 121, so that the laser beam with a certain divergence angle is shaped into a parallel beam, so that it can be stretched and shaped better later to obtain a more uniform and bright linear light spot. And through the cylindrical lens 122, the stretching and shaping of the laser beam along the corresponding direction can be realized simply and conveniently, so that the overall structure of the lens group 120 has a lower complexity, improves the ease of assembly, and thus reduces the cost.

[0058] For example, Figure 2As shown in the figure, when the laser beams emitted from the light-emitting holes 111 in the row array laser emission group on the vertical cavity surface emitting laser chip 110 pass through the collimating lens 121, the collimating lens 121 can shape them into parallel beams. Therefore, the corresponding parallel beams can be stretched and shaped into linear light spots perpendicular to the row array arrangement direction of the row array laser emission group through the cylindrical lens 122, and the two linear light spots and the dark stripes therebetween are combined to obtain the corresponding stripe structure light pattern.

[0059] It should be noted that Figure 2 The forms of the collimating lens 121 and the cylindrical lens 122 shown in the figure are only examples. In practical applications, the cylindrical lens 122 can be various cylindrical lenses such as cylindrical lenses and plano-convex cylindrical lenses, and the collimating lens 121 can also be various lenses with collimating functions, which are not limited here.

[0060] As another possible example, Figure 3 As shown, the lens group 120 in the coding structure light emitting device provided in the embodiment of the present application includes a collimating lens 121 and a wave lens 123. Among them, the collimating lens 121 is used to shape the laser beam emitted from the light-emitting hole 111 into a parallel beam, and the wave lens 123 is used to shape the parallel beam emitted from the collimating lens 121 into a linear light spot.

[0061] In this way, the laser beam emitted from the light-emitting hole 111 can be collimated by the collimating lens 121, so that the laser beam with a certain divergence angle is shaped into a parallel beam, so that it can be stretched and shaped better later to obtain a more uniform and bright linear light spot. The wave lens 123 can better achieve stretching and shaping of the laser beam along the corresponding direction, so that the linear light spot finally shaped by the lens group 120 is brighter and has clearer edges.

[0062] For example, Figure 3 As shown in the figure, when the laser beams emitted from the light-emitting holes 111 in the row array laser emission group on the vertical cavity surface emitting laser chip 110 pass through the collimating lens 121, the collimating lens 121 can shape them into parallel beams. Therefore, the corresponding parallel beams can be stretched and shaped into linear light spots perpendicular to the row array arrangement direction of the row array laser emission group through the wave lens 123, thereby obtaining the corresponding stripe structure light pattern.

[0063] It should be noted that Figure 3 The forms of the collimating lens 121 and the wave lens 123 shown in the figure are only examples. In practical applications, the wave lens 123 can be a single-sided wave lens, a double-sided wave lens, etc., and the collimating lens 121 can also be various lenses with collimating function, which are not limited here.

[0064] In some other possible implementations of the present application, the lens group 120 is as follows: Figure 2 and Figure 3 The cylindrical lens 122 and the wave lens 123 shown respectively can also be set as other lenses or emitting mirrors having the function of stretching the light beam in a certain direction, which is not limited here.

[0065] In the embodiments of the present application, the number of row array laser emission groups included in the vertical cavity surface emitting laser chip can be selected according to the requirements, for example, the vertical cavity surface emitting laser chip includes a single row array laser emission group, for example Figures 1 to 3 As shown; or, multiple (two or more) row array laser emission groups, such as Figure 4 and Figure 5 For easy understanding, they will be explained separately as follows:

[0066] In some possible embodiments, the vertical cavity surface emitting laser chip includes a single row array laser emission group, which can be divided into the following two cases according to the number of light-emitting holes included in the single row array laser emission group: Example 1, the number of light-emitting holes included in the single row array laser emission group is single, at this time, the number of single light-emitting holes constitutes the entire row array laser emission group, that is, the row array laser emission group emits a laser beam and after being shaped and modulated by the lens group, it is emitted as a single linear light spot. At this time, the dark area beside the single linear light spot (left or right side) can be used as a dark stripe (the extension direction of the dark stripe is in the same direction as the linear light spot), and the dark stripe and the linear light spot are combined and spliced ​​to form a striped structured light pattern with one bright and one dark. Example 2: A single row array laser emitting group includes multiple (two or more) light-emitting holes. In this case, the row array laser emitting group emits multiple laser beams and they are all shaped and modulated by the lens group to emit multiple linear light spots. Because there is a certain distance between adjacent light-emitting holes, the area occupied by the distance can form dark stripes between adjacent linear light spots. The dark stripes and linear light spots are combined and spliced ​​to form a striped structured light pattern with alternating bright and dark spots.

[0067] It should be known that in the embodiment of the present application, when the number of light-emitting holes included in the row array laser emission group is greater, the number of light and dark stripes in the stripe structured light pattern can be increased, that is, the pattern density is increased, so that the coded structured light detection device can collect and identify more subtle three-dimensional information. Of course, when the number of light-emitting holes included in the row array laser emission group is greater, the width of the linear light spot can be appropriately reduced (for example, when the light-emitting hole is a rectangular hole, it can be achieved by reducing the length of the rectangular hole), so that denser light and dark stripes can be formed in a limited space, and higher-density three-dimensional information collection and recognition can be achieved.

[0068] In some possible embodiments, combined with Figure 4 As shown, the vertical cavity surface emitting laser chip 110 provided in the embodiment of the present application may include a plurality of parallel rows of row array laser emission groups 130. It should be known that the number of light-emitting holes in each row array laser emission group 130 can be reasonably set with reference to the above-mentioned single row array laser emission group 130, and will not be repeated here. Figure 4 , three rows of row array laser emitting groups 130 are shown, and the three rows of row array laser emitting groups 130 are arranged in sequence and spaced apart along the vertical direction, and the vertical direction is a direction perpendicular to the row direction of the row array laser emitting groups 130.

[0069] A plurality of different row array laser emission groups 130 are arranged, and each row array laser emission group 130 is controlled to emit laser beams in staggered time periods, so as to obtain a plurality of stripe structured light patterns in different time periods, thereby avoiding interference between the stripe structured light patterns. Figure 4 For example, each row array laser emission group 130 can be controlled to emit laser beams according to the preset time. For example, in the first time period, the middle and bottom row array laser emission groups 130 are kept closed, and the top row array laser emission group 130 is controlled to emit laser beams, which are shaped and modulated by the lens group to form a stripe structure light pattern; then in the second time period, the top and bottom row array laser emission groups 130 are kept closed, and the middle row array laser emission group 130 is controlled to emit laser beams, which are shaped and modulated by the lens group to form a stripe structure light pattern; then in the third time period, the top and middle row array laser emission groups 130 are kept closed, and the bottom row array laser emission group 130 is controlled to emit laser beams, which are shaped and modulated by the lens group to form a stripe structure light pattern. The chip width is effectively controlled, and the distortion effect of the edge area is effectively alleviated.

[0070] The time when the light holes in the same row array laser emission group emit laser beams can be the same, for example, the time when the light holes in the same row array laser emission group start emitting laser beams and the time when the light holes end emitting laser beams are equal. Of course, considering the difference in signal transmission in actual circuit control, a slight time difference can be allowed.

[0071] In some embodiments, at least some row array laser emission groups include a plurality of light-emitting holes arranged at intervals along the row direction, and the light-emitting holes in the same row array laser emission group have the same size and shape. This can reduce the difference between the bright stripes in the same stripe structured light pattern and facilitate data processing.

[0072] As an example, at least one of the following parameters is different between each row of the array laser emission groups 130 : the spacing between adjacent light-emitting holes 111 , the size of the light-emitting holes 111 , and the number of the light-emitting holes 111 .

[0073] Thus, the width of the dark stripes of the stripe structured light pattern can be designed by designing the spacing between the light-emitting holes 111. For example, by increasing the spacing between the light-emitting holes 111 in the row array laser emission group 130, the width of the dark stripes in the obtained stripe structured light pattern can be increased. For another example, by reducing the spacing between the light-emitting holes 111 in the row array laser emission group 130, the width of the dark stripes in the obtained stripe structured light pattern can be reduced. Optionally, the width of the dark stripes in the same stripe structured light pattern can be equal to or slightly different from the width of the bright stripes.

[0074] The width of the bright stripes of the stripe structured light pattern can be designed by designing the size of the emission holes of the light-emitting holes 111 (such as the size of the emission holes in the row array arrangement direction). For example, by increasing the size length of the emission holes of the light-emitting holes 111 in the row array laser emission group 130 in the row array arrangement direction, the width of the bright stripes in the obtained stripe structured light pattern can be increased. For another example, by reducing the size length of the emission holes of the light-emitting holes 111 in the row array laser emission group 130 in the row array arrangement direction, the width of the bright stripes in the obtained stripe structured light pattern can be reduced.

[0075] The number of bright and dark stripes in the stripe structured light pattern can also be designed by designing the number of light-emitting holes 111. For example, by increasing the number of light-emitting holes 111 in the row array laser emission group 130, the number of bright and dark stripes in the obtained stripe structured light pattern can be increased. For another example, by reducing the number of light-emitting holes 111 in the row array laser emission group 130, the number of bright and dark stripes in the obtained stripe structured light pattern can be reduced.

[0076] In this way, by setting the row array laser emission groups 130 with different parameters, the coded structured light emission device provided in the embodiment of the present application can be realized, and the function of projecting different stripe structured light patterns can be achieved by lighting up different row array laser emission groups 130 in a time-sharing manner.

[0077] In some possible embodiments, combined with Figure 5 As shown, the vertical cavity surface emitting laser chip 110 may further include a control circuit 112, and the control circuit 112 may be electrically connected to each light emitting hole 111, so that different row array laser emission groups 130 are controlled to emit lasers respectively through the control circuit 112, thereby obtaining stripe structured light patterns corresponding to different row array laser emission groups 130. As another possible implementation, the control circuit 112 may also be independently provided outside the vertical cavity surface emitting laser chip 110, which is not limited here.

[0078] Of course, in some other possible implementations of the present application, the control circuit 112 may not be provided, but different row array laser emission groups 130 may be connected to the power supply through different power supply circuits, so as to control the lighting of the light-emitting holes 111 of different row array laser emission groups 130 by manually controlling the on and off of different power supply circuits.

[0079] Another aspect of the embodiments of the present invention provides a coded structured light detection device, including a detection station, an image sensor, and any of the above-mentioned coded structured light emitting devices, wherein the detection station is used to place the part to be detected, and the coded structured light emitting device is used to emit a stripe structured light pattern toward the detection station, and the stripe structured light pattern is incident on the image sensor after being reflected by the part to be detected. The stripe structured light pattern can be projected onto the part to be detected by the coded structured light emitting device, so that the image of the stripe structured light pattern after being reflected by the part to be detected can be obtained by the image sensor. Then, after data analysis and processing, the three-dimensional information of the part to be detected can be obtained by decoding and calculating based on the image obtained by the image sensor.

[0080] According to another aspect of the embodiments of the present application, a coded structured light detection device is provided, comprising a detection station, an image sensor, and any one of the above-mentioned vertical cavity surface emitting laser chips, wherein the detection station is used to place the object to be detected, and the vertical cavity surface emitting laser chip is used to emit a laser beam toward the detection station, and the laser beam is reflected by the object to be detected and then incident on the image sensor.

[0081] The implementation methods and beneficial effects of the vertical cavity surface emitting laser chip in the above-mentioned coded structured light detection device can also be found in the above description of the vertical cavity surface emitting laser chip, which will not be repeated here.

[0082] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A vertical cavity surface emitting laser chip, characterized in that: include: A row array laser emission group, wherein the row array laser emission group is arranged on the light-emitting side surface of the vertical cavity surface emitting laser chip, and the row array laser emission group includes at least one light-emitting hole located on the light-emitting side surface, and the at least one light-emitting hole is arranged at intervals along the row direction of the row array laser emission group, and the laser beams emitted by the light-emitting holes are used to form linear light spots, and the linear light spots corresponding to the row array laser emission group are combined to form a striped structured light pattern with alternating light and dark.

2. The vertical cavity surface emitting laser chip according to claim 1, characterized in that: A plurality of parallel rows of the row array laser emitting groups are arranged on the light emitting side, and the light emitting holes in a row of the row array laser emitting groups emit laser beams simultaneously, and the plurality of row array laser emitting groups emit or combine laser beams simultaneously.

3. The vertical cavity surface emitting laser chip according to claim 2, characterized in that: At least one of the following parameters of any two rows of the row array laser emission groups is different: the spacing between adjacent light-emitting holes, the size of the light-emitting holes, and the number of the light-emitting holes.

4. The vertical cavity surface emitting laser chip according to claim 2, characterized in that: The vertical cavity surface emitting laser chip further comprises a control circuit, which is electrically connected to a plurality of rows of the row array laser emitting groups respectively and is used for controlling the row array laser emitting groups to emit lasers respectively.

5. The vertical cavity surface emitting laser chip according to claim 2, characterized in that: At least part of the row array laser emission groups include a plurality of light emitting holes arranged at intervals along the row direction, and the light emitting holes in the same row array laser emission group have the same size and shape.

6. The vertical cavity surface emitting laser chip according to any one of claims 1 to 5, characterized in that: The extension direction of the linear light spot is perpendicular to the row direction of the row array laser emission group.

7. The vertical cavity surface emitting laser chip according to any one of claims 1 to 5, characterized in that: The light-emitting hole is a rectangular hole, and the length of the rectangular hole corresponds to the width of the linear light spot.

8. The vertical cavity surface emitting laser chip according to claim 7, characterized in that: The corner positions of the rectangular hole include rounded corner transitions.

9. The vertical cavity surface emitting laser chip according to any one of claims 1 to 5, characterized in that: The light-emitting hole is a strip hole, the length of the strip hole corresponds to the width of the linear light spot, the strip hole includes a plurality of sub-areas distributed in sequence along the length direction, and the widths of at least two of the sub-areas are unequal.

10. The vertical cavity surface emitting laser chip according to claim 9, characterized in that: The plurality of sub-regions include a central region and edge regions distributed on opposite sides of the central region, and a width of the central region is greater than or less than a width of the edge region.

11. A coded structured light detection device, characterized in that: It comprises a detection station, an image sensor and a vertical cavity surface emitting laser chip as claimed in any one of claims 1 to 10, wherein the detection station is used to place a piece to be detected, the vertical cavity surface emitting laser chip is used to emit a laser beam toward the detection station, and the laser beam is incident on the image sensor after being reflected by the piece to be detected.

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