Bipolar high-voltage pulse generator

Abstract

A bipolar high voltage bipolar pulsed power supply is disclosed that can generate a high voltage bipolar pulse having a positive high voltage pulse greater than about 2 kV, followed by a negative high voltage pulse less than about-2 kV, with a positive to negative dwell period between the positive and negative high voltage pulses. For example, a high voltage bipolar pulsed power supply may reproduce high voltage pulses having a pulse repetition rate greater than about 10 kHz.

Description

Background Art

[0001] High voltage pulse power supplies are used in many fields. However, due to various technical limitations, it is not possible to obtain power supplies that can generate high voltage pulses at high pulse repetition frequencies. Summary of the invention

[0002] A bipolar high-voltage pulse power supply is disclosed, which can generate a high-voltage bipolar pulse having a positive high-voltage pulse greater than about 200V, followed by a negative high-voltage pulse less than about -200V, with a positive to negative dwell period between the positive high-voltage pulse and the negative high-voltage pulse. For example, the high-voltage bipolar pulse power supply can reproduce a high-voltage pulse with a high pulse repetition rate greater than about 10kHz.

[0003] For example, a bipolar high voltage bipolar pulse power supply is disclosed, which can generate a high voltage bipolar pulse having a positive high voltage pulse greater than about 2 kV, followed by a negative high voltage pulse less than about -2 kV, with a positive to negative dwell period between the positive high voltage pulse and the negative high voltage pulse. For example, the high voltage bipolar pulse power supply can reproduce a high voltage pulse having a high pulse repetition rate greater than about 10 kHz.

[0004] For example, a high-voltage bipolar pulse power supply is disclosed, which includes: a DC power supply; an energy storage capacitor coupled to the DC power supply; a first high-voltage switch electrically coupled to the DC power supply and the energy storage capacitor; a first diode arranged across the first high-voltage switch; a second high-voltage switch electrically coupled to the DC power supply and the energy storage capacitor; a second diode arranged across the second high-voltage switch; a third high-voltage switch arranged in series between the first high-voltage switch and a ground line; a third diode arranged across the third high-voltage switch; a fourth high-voltage switch arranged in series between the second high-voltage switch and a ground line; a fourth diode arranged across the fourth high-voltage switch; and an output terminal having a first lead electrically coupled between the first high-voltage switch and the third high-voltage switch and a second lead electrically coupled between the second high-voltage switch and the fourth high-voltage switch.

[0005] In some embodiments, the first high voltage switch, the second high voltage switch, the third high voltage switch, and / or the fourth high voltage switch each have a capacitance less than approximately 10 nF.

[0006] In some embodiments, the first high-voltage switch includes a first plurality of solid-state switches arranged in parallel, the second high-voltage switch includes a second plurality of solid-state switches arranged in parallel, the third high-voltage switch includes a third plurality of solid-state switches arranged in parallel, and / or the fourth high-voltage switch includes a fourth plurality of solid-state switches arranged in parallel.

[0007] In some embodiments, the first high-voltage switch, the second high-voltage switch, the third high-voltage switch and / or the fourth high-voltage switch are each selected from one or more of IGBT, MOSFET, SiC MOSFET, SiC junction transistor, FET, SiC switch, GaN switch and photoconductive switch.

[0008] In some embodiments, the circuit including both the DC power source and the energy storage capacitor has an inductance of less than about 10 nH.

[0009] In some embodiments, a circuit including both the first high voltage bipolar pulse power supply and the second high voltage switch has an inductance of less than about 10 nH.

[0010] In some embodiments, a first lead of the output is coupled to a first lead of the electrode, and a second lead of the output is coupled to a second lead of the electrode.

[0011] For example, the high-voltage bipolar pulse power supply may also include a first tail sweeper switch and a first tail sweeper resistor arranged in series across the first high-voltage switch; a second tail sweeper switch and a second tail sweeper resistor arranged in series across the first high-voltage switch; a third tail sweeper switch and a third tail sweeper resistor arranged in series across the first high-voltage switch; and a fourth tail sweeper switch and a fourth tail sweeper resistor arranged in series across the first high-voltage switch.

[0012] For example, a high-voltage multi-level bipolar pulse power supply is disclosed, which includes: a first DC power supply; a first energy storage capacitor coupled to the first DC power supply; a first diode having an anode and a cathode, the anode being electrically coupled to the first DC power supply and the first energy storage capacitor; a first high-voltage switch electrically coupled to the cathode of the first diode; a first diode arranged across the first high-voltage switch; a second high-voltage switch electrically coupled to the cathode of the first diode; a second diode arranged across the second high-voltage switch; a third high-voltage switch arranged in series between the first high-voltage switch and a ground line; a third diode arranged across the third high-voltage switch; a fourth high-voltage switch arranged in series between the second high-voltage switch and the ground line; a fourth diode arranged across the fourth high-voltage switch; a second DC power supply; a second energy storage capacitor coupled to the second DC power supply; a fifth high-voltage switch electrically coupled to the second DC power supply and the second energy storage capacitor; a fifth diode arranged across the fifth high-voltage switch; a sixth high-voltage switch electrically coupled to the cathode of the second DC power supply and the second energy storage capacitor; a sixth diode arranged across the sixth high-voltage switch; and an output terminal having a first lead electrically coupled between the first high-voltage switch and the third high-voltage switch and a second lead electrically coupled between the second high-voltage switch and the fourth high-voltage switch.

[0013] In some embodiments, the second DC power source generates a voltage greater than the first DC power source.

[0014] In some embodiments, the first high-voltage switch, the fourth high-voltage switch, and the fifth high-voltage switch are closed to generate a voltage equal to the voltage of the second DC power supply at the output terminal; the second high-voltage switch, the third high-voltage switch, and the sixth high-voltage switch are closed to generate a voltage equal to the negative voltage of the second DC power supply at the output terminal; the first high-voltage switch and the fourth high-voltage switch are closed to generate a voltage equal to the voltage of the first DC power supply at the output terminal; and the second high-voltage switch and the third high-voltage switch are closed to generate a voltage equal to the negative voltage of the first DC power supply at the output terminal.

[0015] In some embodiments, the first high voltage switch, the second high voltage switch, the third high voltage switch, the fourth high voltage switch, the fifth high voltage switch, and the sixth high voltage switch each have a capacitance less than about 500 pF.

[0016] For example, the high-voltage bipolar pulse power supply may also include a first sweep switch and a first sweep resistor arranged in series across the first high-voltage switch; a second sweep switch and a second sweep resistor arranged in series across the first high-voltage switch; a third sweep switch and a third sweep resistor arranged in series across the first high-voltage switch; a fourth sweep switch and a fourth sweep resistor arranged in series across the first high-voltage switch; a fifth sweep switch and a fifth sweep resistor arranged in series across the fifth high-voltage switch; and a sixth sweep switch and a sixth sweep resistor arranged in series across the sixth high-voltage switch.

[0017] For example, a high-voltage multi-level bipolar pulse power supply is disclosed, which includes: a direct current power supply; an energy storage capacitor coupled to the direct current power supply; a diode having an anode and a cathode, the anode being electrically coupled to the direct current power supply and the energy storage capacitor; a first high-voltage switch electrically coupled to the cathode of the diode; a first diode arranged across the first high-voltage switch; a first sweep switch and a first sweep resistor arranged in series across the first high-voltage switch; a second high-voltage switch electrically coupled to the cathode of the diode; a second diode arranged across the second high-voltage switch; a second sweep switch and a second sweep resistor arranged in series across the first high-voltage switch; a third high-voltage switch arranged in series between the first high-voltage switch and a ground line; a third diode arranged across the third high-voltage switch; a third sweep switch and a third sweep resistor arranged in series across the first high-voltage switch; a fourth high-voltage switch arranged in series between the second high-voltage switch and the ground line; a fourth diode arranged across the fourth high-voltage switch; a fourth sweep switch and a fourth sweep resistor arranged in series across the first high-voltage switch; and an output terminal having a first lead electrically coupled between the first high-voltage switch and the third high-voltage switch and a second lead electrically coupled between the second high-voltage switch and the fourth high-voltage switch.

[0018] In some embodiments, the first sweep switch is closed before the first high-voltage switch is closed; the second sweep switch is closed before the second high-voltage switch is closed; the third sweep switch is closed before the third high-voltage switch is closed; and the fourth sweep switch is closed before the fourth high-voltage switch is closed.

[0019] In some embodiments, the first high voltage switch, the second high voltage switch, the third high voltage switch and the fourth high voltage switch are each selected from one or more of IGBT, MOSFET, SiC MOSFET, SiC junction transistor, FET, SiC switch, GaN switch and photoconductive switch.

[0020] In some embodiments, the first sweep switch, the second sweep switch, the third sweep switch, and the fourth sweep switch are each selected from one or more of an IGBT, a MOSFET, a SiC MOSFET, a SiC junction transistor, a FET, a SiC switch, a GaN switch, and a photoconductive switch.

[0021] In some embodiments, the circuit including both the DC power source and the storage capacitor has an inductance of less than about 10 nH.

[0022] In some embodiments, the circuit between the diode and the first high-voltage bipolar pulse power supply and the second high-voltage switch has an inductance of less than about 10 nH.

[0023] In some embodiments, a first lead of the output is coupled to a first lead of the electrode, and a second lead of the output is coupled to a second lead of the electrode.

[0024] The various embodiments and examples described in this summary and this document are not intended to limit or define the scope of the disclosure or the claims. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 is an example diagram of a high voltage bipolar pulse power supply driving a load.

[0026] Figure 2A The output waveform at the load from a bipolar pulse power supply is shown.

[0027] Figure 2B Shows Figure 1 The bipolar pulse power supply shown in the figure has a switch opening and closing logic to generate Figure 2A The waveform shown.

[0028] Figure 3A The output waveform at the load from a bipolar pulse power supply is shown.

[0029] Figure 3B Shows Figure 1 The bipolar pulse power supply shown in the figure has a switch opening and closing logic to generate Figure 3A The waveform shown.

[0030] Figure 4A The output waveform at the load from a bipolar pulse power supply is shown.

[0031] Figure 4B Shows Figure 1 The bipolar pulse power supply shown in the figure has a switch opening and closing logic to generate Figure 4A The waveform shown.

[0032] Figure 5 The output burst waveform from a bipolar pulse power supply is shown.

[0033] Figure 6 is an example illustration of a high voltage bipolar multi-level bipolar pulse power supply driving a load.

[0034] Fig. 7A The output waveform at the load from a bipolar multi-level pulse power supply is shown.

[0035] Figure 7B Shows Figure 6 The bipolar multi-level pulse power supply shown in the figure is used to generate the open and close switching logic of the switch to generate Fig. 7A The waveform shown.

[0036] Fig. 8A The output waveform at the load from a bipolar multi-level pulse power supply is shown.

[0037] Figure 8B Shows Figure 6 The bipolar multi-level pulse power supply shown in the figure is used to generate the open and close switching logic of the switch to generate Fig. 8A The waveform shown.

[0038] Fig. 9A The output waveform at the load from a bipolar multi-level pulse power supply is shown.

[0039] Fig. 9B Shows Figure 6 The bipolar multi-level pulse power supply shown in the figure is used to generate the open and close switching logic of the switch to generate Fig. 8A The waveform shown.

[0040] Fig.10 is an example illustration of a high voltage bipolar multi-level bipolar pulse power supply driving a load.

[0041] Fig.11 is an example diagram of a high voltage bipolar pulse power supply driving a load.

[0042] Fig. 12A Shown from Fig.11 The output waveform of the bipolar pulse power supply at the load is shown.

[0043] Fig. 12B Shows Fig.11 The bipolar pulse power supply shown in the figure has a switch opening and closing logic to generate Fig. 12A The waveform shown.

[0044] Fig.13 is a block diagram of a computing system that can be used with or perform some embodiments described in this document. DETAILED DESCRIPTION

[0045] A bipolar high voltage bipolar pulse power supply is disclosed. A bipolar high voltage, multi-level bipolar pulse power supply is also disclosed. The high voltage bipolar pulse power supply can generate high voltage bipolar pulses, which include positive high voltage pulses greater than about 100V, 200V, 500V, 1kV, 2kV, 5kV, 10kV, etc., followed by negative high voltage pulses less than about -100V, -200V, -500V, -1kV, -2kV, -5kV, 10kV, etc., with a positive to negative dwell between the positive high voltage pulse and the negative high voltage pulse. The high voltage bipolar pulse power supply can reproduce these high voltage pulses with a high pulse repetition rate greater than about 10kHz.

[0046] Figure 1 is an exemplary illustration of a high voltage bipolar pulse power supply 105 driving a load 150 .

[0047] The high-voltage bipolar pulse power supply 105 may include a first DC power supply 110 and an energy storage capacitor 111. The first DC power supply 110 may, for example, include a high-voltage bipolar pulse power supply that charges the energy storage capacitor 111. The energy storage capacitor 111 may, for example, include a capacitor having a capacitance of about 80nF to about 250nF or about 2𝜇F to 100𝜇F.

[0048] For example, the high voltage bipolar pulse power supply 105 may include a first switch circuit 121, a second switch circuit 122, a third switch circuit 123, and a fourth switch circuit 124. Each of the switch circuits 121, 122, 123, or 124 may include, for example, a plurality of switches connected in series or in parallel, such as four switches, eight switches, twelve switches, etc., arranged in parallel.

[0049] The first switch circuit 121 may be coupled to the first DC power source 110 and the first side of the load 150. The third switch circuit 123 may be coupled to the ground, the first side of the load 150, and the first switch circuit 121. The second switch circuit 122 may be coupled to the first DC power source 110 and the second side of the load 150. The fourth switch circuit 124 may be coupled to the ground, the second side of the load 150, and the second switch circuit 122.

[0050] Each of the switching circuits 121, 122, 123, and 124 may, for example, include one or more of any type of solid-state switches, such as IGBTs, MOSFETs, SiC MOSFETs, SiC junction transistors, FETs, SiC switches, GaN switches, photoconductive switches, etc. Each of the switching circuits 121, 122, 123, and 124 may switch at high frequencies and / or may generate high voltage pulses. These frequencies may, for example, include frequencies of about 1 kHz, 5 kHz, 10 kHz, 25 kHz, 50 kHz, 100 kHz, etc.

[0051] Each switch in the switch circuits 121, 122, 123, and 124 may be coupled in parallel with a corresponding bridge diode, may have a stray capacitance, and / or may have a stray inductance. The stray inductance of each of the switch circuits 121, 122, 123, and 124 may be substantially equal. The stray inductance of each of the switch circuits 121, 122, 123, and 124 may be, for example, less than about 5nH, 10nH, 50nH, 100nH, 150nH, etc. The stray capacitance of each of the switch circuits 121, 122, 123, and 124 may be, for example, low, such as less than about 400nF, 200nF, 100nF, 50nF, 25nF, 10nF, etc. If each switch of the switching circuits 121 , 122 , 123 , and 124 may include multiple individual switches, the combination of the multiple individual switches may have a capacitance less than approximately 150 nF, 100 nF, 50 nF, 25 n10 nF, 5 nF, etc.

[0052] The combination of a switch (e.g., one of switch circuits 121, 122, 123, or 124), a corresponding diode (e.g., one of diodes 131, 132, 133, and 134), and associated circuitry may have a stray inductance of less than about 5nH, 10nH, 50nH, 100nH, 150nH, etc. The high voltage bipolar pulse power supply 105 may include low stray inductance throughout the circuit, such as an inductance of less than about 5nH, 10nH, 50nH, 100nH, 150nH, 200nH, etc.

[0053] The load 150 may include any type of load. For example, the load 150 may have an output resistance of less than about 250 ohms, 100 ohms, 50 ohms, 25 ohms, 10 ohms, 5 ohms, 2 ohms, 1 ohm, etc. The load 150 may include, for example, an electromagnetic coil, one or two lead electrodes, a transformer, etc. The load 150 may be, for example, part of a metal 3D printing process, an electrode for ablation, an electrode for electroporation, water purification, etc. The load 150 may include a transformer, which may be used to increase the power generated by the high voltage bipolar pulse power supply 105.

[0054] Figure 2A An output waveform at a load 150 from a high voltage bipolar pulse power supply 105 is shown. Figure 2B The opening and closing switching logic of the switch circuits 121, 122, 123 and 124 is shown to generate Figure 2A The output waveform includes a positive pulse 171 and a negative pulse 172. When the first switch circuit 121 and the fourth switch circuit 124 are closed and the second switch circuit 122 and the third switch circuit 123 are opened, the positive pulse 171 is formed. When the second switch circuit 122 and the third switch circuit 123 are closed and the first switch circuit 121 and the fourth switch circuit 124 are opened, the negative pulse 172 is formed.

[0055] Figure 2A Each positive pulse 171 in has a voltage of V1, and Figure 2A Each negative pulse 172 in has a negative voltage of -V1. The voltage V1 is the voltage V1 from the energy storage capacitor 111 and / or the first DC power supply 110. The time between the positive pulses 171 and 172 is the dwell. The time between each consecutive positive pulse 171 is the inverse of the pulse repetition frequency (1 / PRF). The time between the end of the first negative pulse 172 and the beginning of the first positive pulse is the pulse to pulse dwell. The pulse width of the positive pulse is PWpos, and the pulse width of the negative pulse is PWneg.

[0056] Figure 3A An output waveform at the load 150 from the high voltage bipolar pulse power supply 105 is shown, wherein a plurality of positive pulses 305 are followed by negative pulses 306 . Figure 3B The opening and closing switching logic of the switch circuits 121, 122, 123 and 124 is shown to generate Figure 3A The output waveform includes a plurality of positive pulses 305 and a longer negative pulse 306. Each of the plurality of positive pulses 305 is formed when the first switch circuit 121 and the fourth switch circuit 124 are closed and the second switch circuit 122 and the third switch circuit 123 are opened. The negative pulse 306 is formed when the second switch circuit 122 and the third switch circuit 123 are closed and the first switch circuit 121 and the fourth switch circuit 124 are opened.

[0057] Figure 3A Each of the plurality of positive pulses 305 has a voltage of V1, and Figure 3AEach negative pulse 306 in the plurality of positive pulses 305 has a negative voltage of -V1. The voltage V1 is the voltage V1 from the energy storage capacitor 111 and / or the first DC power supply 110. Each pulse in the plurality of pulses 305 may have a pulse width of PWpos, and the pulse width of the negative pulse is PWneg. The time between the first pulse in the plurality of positive pulses 305 and the next first pulse in the plurality of pulses 305 is the pulse repetition frequency (1 / PRF).

[0058] Figure 4A An output waveform at the load 150 from the bipolar pulse power supply 105 is shown, including a long first positive pulse 410 , a plurality of positive pulses 405 , followed by a negative pulse 406 . Figure 3B The opening and closing switching logic of the switch circuits 121, 122, 123 and 124 is shown to generate Figure 4A When the first switch circuit 121 and the fourth switch circuit 124 are closed and the second switch circuit 122 and the third switch circuit 123 are opened, the first positive pulse 410 and each of the plurality of positive pulses 405 are formed. When the second switch circuit 122 and the third switch circuit 123 are closed and the first switch circuit 121 and the fourth switch circuit 124 are opened, the negative pulse 406 is formed.

[0059] Figure 4A Each of the plurality of positive pulses 405 and the long pulse 410 has a voltage of V1, and Figure 4A Each negative pulse 406 in has a negative voltage of -V1. Voltage V1 is the voltage V1 from the energy storage capacitor 111 and / or the first DC power supply 110. Each pulse in the plurality of pulses 405 may have a pulse width of PWpos2, the long positive pulse 410 may have a pulse width of PWpos1, and the pulse width of the negative pulse is PWneg. The pulse width PWpos1 of the long pulse may be longer than the pulse width PWpos2 of each of the plurality of positive pulses 405, such as, for example, substantially greater than two times, three times, four times, five times, ten times, twenty times, fifty times, one hundred times, five hundred times, etc.

[0060] The time between a first pulse in the plurality of positive pulses 305 and a next first pulse in the plurality of pulses 305 is the pulse repetition frequency (1 / PRF).

[0061] like Figure 5 As shown, the high voltage bipolar pulse power supply 105 can generate a burst pulse 305 including a plurality of bipolar pulses. The time between consecutive bursts is the burst to burst dwell, and the time between the start of the first burst and the start of the second burst is the inverse of the burst frequency (1 / burst frequency).

[0062] The controller (e.g., computing system 1300) may be coupled to each switch (e.g., first switch circuit 121, second switch circuit 122, third switch circuit 123, and fourth switch circuit 124) and may control the opening and closing of these switch circuits. The controller may control the switch circuits by opening and closing the switch circuits to generate Figure 2A The waveform shown is Figure 2B The controller can control the timing of the switching circuit to generate the waveform shown in FIG3 .

[0063] The controller may control the switch circuit to generate a long pulse width with a low pulse repetition frequency (PRF). For example, the controller may close the first switch circuit 121 and the fourth switch circuit 124 for a long time (e.g., 5ms, 2.5ms, 1ms, 500ns, etc.), then disconnect the first switch circuit 121 and the fourth switch circuit 124, and close the second switch circuit 122 and the third switch circuit 123 for a long time (e.g., 5ms, 2.5ms, 1ms, 500ns, etc.), then disconnect the second switch circuit 122 and the third switch circuit 123. The controller may repeat the process after any time period, for example, at a pulse repetition frequency of 1kHz, 10kHz, 100kHz, etc.

[0064] The controller can control the switching circuit to generate multiple short pulses (e.g., 250ns, 500ns, 1ms, 5ms, etc.) with a high pulse repetition frequency (e.g., 1kHz, 5kHz, 10kHz, 25kHz, etc.) within a burst, and repeat the burst after a period of time (e.g., 250ms, 500ms, 1s, 3s, 5s, etc.), for example, as shown in Figure 3. The controller can repeat these bursts, for example, hundreds or thousands of times.

[0065] Figure 6 An exemplary high-voltage multi-level bipolar pulse power supply 605 driving a load 150 is shown. The high-voltage multi-level bipolar pulse power supply 605 includes a high-voltage bipolar pulse power supply 105, a fifth switching circuit 125 having a corresponding diode 135, a sixth switching circuit 126 having a corresponding diode 136, a second DC power supply 108, and a second energy storage capacitor 109. The fifth switching circuit 125 is coupled between the second DC power supply 108 and the first switching circuit 121. The sixth switching circuit 126 is coupled between the second DC power supply 108 and the second switching circuit 122. Diodes may be included between the second DC power supply 108 and the fifth switching circuit 125, and between the second DC power supply 108 and the sixth switching circuit 126.

[0066] The second DC power source 108 may generate a voltage greater than that of the first DC power source 110 .

[0067] The diode 115 ensures that the charge flows from the energy storage capacitor 111 to the load 150 through the closed switch circuit, the first switch circuit 121 and the fourth switch circuit 124 or the second switch circuit 122 and the third switch circuit 123. The high voltage multi-level bipolar pulse power supply 605 can generate: 1) having Fig. 7A high voltage bipolar pulse as shown, or, 2) as Fig. 8A The bipolar and multi-level pulses shown. Fig. 7A , the first pulse 191 has a voltage V1 , which is the voltage of the first DC power source 110 , and the second pulse 192 has a voltage V2 , which is the voltage of the second DC power source 108 .

[0068] Figure 7B The opening and closing switching logic of switches 121, 122, 123, 124, 125 and 126 is shown to generate Fig. 7A The bipolar waveform shown. When the fifth switch circuit 125, the first switch circuit 121 and the fourth switch circuit 124 are closed and the sixth switch circuit 126, the second switch circuit 122 and the third switch circuit 123 are opened, the positive part of the first pulse 191 is formed, and the voltage is V2. When the sixth switch circuit 126, the second switch circuit 122 and the third switch circuit 123 are closed and the fifth switch circuit 125, the first switch circuit 121 and the fourth switch circuit 124 are opened, the negative part of the first pulse 191 is formed, and the voltage is V2. When the first switch circuit 121 and the fourth switch circuit 124 are closed and the sixth switch circuit 126, the second switch circuit 122, the fifth switch circuit 125 and the third switch circuit 123 are opened, the positive part of the second pulse 192 is formed, and the voltage is V1. When the second switch circuit 122 and the third switch circuit 123 are closed and the fifth switch circuit 125, the sixth switch circuit 126, the first switch circuit 121 and the fourth switch circuit 124 are opened, the negative portion of the second pulse 192 is formed with a voltage of V2.

[0069] Figure 8B The opening and closing switching logic of the switch circuits 121, 122, 123, 124, 125 and 126 is shown to generate Fig. 8AThe multi-level bipolar waveform shown. When the first switch circuit 121 and the fourth switch circuit 124 are closed and the fifth switch circuit 125, the sixth switch circuit 126, the second switch circuit 122 and the third switch circuit 123 are opened, a first level positive pulse 185 is formed at the voltage V1. When the switch 125, the first switch circuit 121 and the fourth switch circuit 124 are closed and the sixth switch circuit 126, the second switch circuit 122 and the third switch circuit 123 are opened, a second level positive pulse 186 is formed at the voltage V2. The combination of the first level positive pulse 185 and the second level positive pulse 186 forms a multi-level positive pulse. When the second switch circuit 122 and the third switch circuit 123 are closed and the fifth switch circuit 125, the sixth switch circuit 126, the first switch circuit 121 and the fourth switch circuit 124 are opened, a first level negative pulse 187 is formed at the voltage -V1. When the switch 126, the second switch circuit 122 and the third switch circuit 123 are closed and the fifth switch circuit 125, the first switch circuit 121 and the fourth switch circuit 124 are opened, a second level negative pulse 188 is formed at a voltage of -V2. The combination of the first level negative pulse 187 and the second level negative pulse 188 forms a multi-level negative pulse. V2 is the voltage of the second DC power supply 108.

[0070] Fig. 9B The opening and closing switching logic of the switch circuits 121, 122, 123, 124, 125 and 126 is shown to generate Fig. 9A Multi-level bipolar waveforms are shown. Fig. 9A A first burst of pulses 905 having a voltage V2, a second burst of pulses 906 having a negative voltage V2, a third burst of pulses 907 having a voltage V1, and a fourth burst of pulses 908 having a negative voltage V1 are shown. The first burst of pulses 905 may include any number of pulses; the second burst of pulses 906 may include any number of pulses; the third burst of pulses 907 may include any number of pulses; and / or the fourth burst of pulses 908 may include any number of pulses. The pulse bursts may occur in any order or sequence. The first pulse train 905, the second plurality of pulses 906, the third plurality of pulses 907, and / or the fourth plurality of pulses 908 may have any pulse repetition frequency and / or each pulse in the plurality of pulses may have any pulse width.

[0071] A first pulse burst 905 having a voltage V2 may be generated by closing the first switch circuit 121, the fourth switch circuit 124, and the fifth switch circuit 125; and by opening the second switch circuit 122, the third switch circuit 123, and the sixth switch circuit 126. A second pulse burst 906 having a negative voltage V2 may be generated by closing the second switch circuit 122, the third switch circuit 123, and the sixth switch circuit 126; and by opening the first switch circuit 121, the fourth switch circuit 124, and the fifth switch circuit 125. A third pulse burst 907 having a voltage V1 may be generated by closing the first switch circuit 121 and the fourth switch circuit 124; and by opening the second switch circuit 122, the third switch circuit 123, the fifth switch 125, and the sixth switch 126. The fourth pulse burst 908 having the negative voltage V1 may be generated by closing the second switch circuit 122 and the third switch circuit 123 ; and by opening the first switch circuit 121 , the fourth switch circuit 124 , the fifth switch 125 , and the sixth switch 126 .

[0072] The bipolar pulse power supply 605 may include additional switching circuits to generate additional multi-level pulses. Fig.10 An example high voltage multi-level bipolar pulse power supply 1005 is shown having a seventh switch circuit 127 and an eighth switch circuit 128 coupled to a third DC power supply 112 and a third energy storage capacitor 113. The seventh switch circuit 127 may include a corresponding diode 137, and the eighth switch circuit 128 may include a corresponding diode 138. An additional diode 116 may also be included between the second DC power supply 108 and the second energy storage capacitor 109 and the fifth switch circuit 125 and the sixth switch circuit 126. The third DC power supply 112 may have a voltage greater than the first DC power supply 110 and / or the second DC power supply 108. The high voltage bipolar pulse power supply 1005 may generate a multi-level pulse having three voltage levels.

[0073] Additional DC power supplies and switching circuits may be added to generate additional multi-level pulses at any number of voltage levels.

[0074] Fig.11 An example high voltage bipolar pulse power supply 1005 is shown driving a load 150. In this example, the high voltage bipolar pulse power supply 1005 includes four sweep switches (eg, switches 163, 164, 165, 166) and corresponding sweep resistors (eg, resistors 173, 174, 175, and 176).

[0075] Alternatively, the sweep resistor may be replaced by an inductor or a capacitor.

[0076] A first sweep switch 163 and a first sweep resistor 173 are coupled across the first switch circuit 121, a second sweep switch 164 and a second sweep resistor 174 are coupled across the second switch circuit 122, a third sweep switch 165 and a third sweep resistor 175 are coupled across the third switch circuit 123, and a fourth sweep switch 166 and a fourth sweep resistor 176 are coupled across the fourth switch circuit 124. Each sweep switch may be closed before the corresponding switch circuit to dissipate any tail current in the circuit into the sweep resistor, such as Fig. 12B shown.

[0077] Fig. 12A Bipolar pulses generated using a high voltage bipolar pulse power supply 1005 are shown. Fig. 12B The opening and closing switching logic of the switch circuits 121, 122, 123, 124, 125 and 126 and / or the sweep switches 163, 164, 165 and 166 are shown to generate Fig. 12A For example, before closing the first switch circuit 121 and the fourth switch circuit 124, the sweep switch 163 and the sweep switch 166 are closed. And before closing the second switch circuit 122 and the third switch circuit 123, the sweep switch 164 and the sweep switch 165 are closed. By closing the sweep switch 164 and the sweep switch 165 before closing the second switch circuit 122 and the third switch circuit 123, the dwell between the positive pulse 191 and the negative pulse 192 can be substantially eliminated or completely eliminated.

[0078] Fig.13 The computing system 1300 shown can be used to perform any embodiment of the present invention. For example, the computing system 1300 can be used to control the switching of various switching circuits described in this document. As another example, the computing system 1300 can perform any calculation, identification and / or determination described herein. The computing system 1300 may include hardware elements that can be electrically coupled via a bus 1305 (or can communicate in other ways when appropriate). The hardware elements may include one or more processors 1310, including but not limited to one or more general-purpose processors and / or one or more special-purpose processors (such as digital signal processing chips, graphics acceleration chips, etc.); one or more input devices 1315, which may include but are not limited to a mouse, a keyboard, etc.; and one or more output devices 1320, which may include but are not limited to a display device, a printer, etc.

[0079] The computing system 1300 may further include (and / or communicate with) one or more storage devices 1325, which may include, but are not limited to, local and / or network accessible storage devices, and / or may include, but are not limited to, disk drives, drive arrays, optical storage devices, solid-state storage devices, such as random access memory ("RAM") and / or read-only memory ("ROM"), which may be programmable, flash-updatable, and / or the like. The computing system 1300 may also include a communication subsystem 1330, which may include, but is not limited to, a modem, a network card (wireless or wired), an infrared communication device, a wireless communication device and / or a chipset (such as a Bluetooth device, an 802.6 device, a Wi-Fi device, a WiMax device, a cellular communication facility, etc.), and / or the like. The communication subsystem 1330 may allow data to be exchanged with a network (such as the network described below, to name just one example) and / or any other device described in this document. In many embodiments, the computing system 1300 will also include a working memory 1335, which may include a RAM or ROM device, as described above.

[0080] The computing system 1300 may also include software elements, shown as currently located within the working memory 1335, including an operating system 1340 and / or other code, such as one or more application programs 1345, which may include the computer program of the present invention, and / or which may be designed to implement the method of the present invention and / or configure the system of the present invention, as described herein. For example, one or more processes described with respect to the above-described method may be implemented as code and / or instructions that can be executed by a computer (and / or a processor within a computer). A collection of these instructions and / or codes may be stored on a computer-readable storage medium, such as the storage device 1325 described above.

[0081] In some cases, the storage medium may be incorporated into or in communication with the computing system 1300. In other embodiments, the storage medium may be separate from the computing system 1300 (e.g., removable media such as an optical disk, etc.), and / or provided in an installation package such that the storage medium may be used to program a general purpose computer using the instructions / code stored thereon. These instructions may take the form of executable code that may be executed by the computing system 1300, and / or may take the form of source code and / or installable code that, when compiled and / or installed on the computing system 1300 (e.g., using any of a variety of commonly available compilers, installers, compression / decompression utilities, etc.), takes the form of executable code.

[0082] Unless otherwise stated, the term "substantially" means within 5% or 10% of the referenced value or within a manufacturing tolerance. Unless otherwise stated, the term "approximately" means within 5% or 10% of the referenced value or within a manufacturing tolerance.

[0083] The conjunction "or" is inclusive.

[0084] Unless otherwise stated or required, the terms "first", "second", "third", etc. are used to distinguish corresponding elements and are not used to indicate a particular order of those elements.

[0085] Numerous specific details are set forth to provide a thorough understanding of the claimed subject matter. However, those skilled in the art will appreciate that the claimed subject matter can be practiced without these specific details. In other cases, methods, devices, or systems known to those skilled in the art are not described in detail in order to avoid obscuring the claimed subject matter.

[0086] Although the subject matter has been described in detail with respect to its specific embodiments, it should be understood that those skilled in the art, after obtaining an understanding of the foregoing, can easily produce changes, modifications and equivalents to these embodiments. Therefore, it should be understood that the present disclosure has been presented for the purpose of illustration and not limitation, and the present disclosure does not exclude the inclusion of such modifications, changes and / or additions to the subject matter, which will be apparent to those of ordinary skill in the art.

Claims

1. A high voltage bipolar pulse power supply, comprising: DC power supply; an energy storage capacitor coupled to the DC power source; a first high-voltage switch electrically coupled to the DC power supply and the energy storage capacitor; a first diode disposed across the first high voltage switch; a second high voltage switch electrically coupled to the DC power supply and the energy storage capacitor; a second diode disposed across the second high voltage switch; a third high-voltage switch, which is arranged in series between the first high-voltage switch and the ground line; a third diode disposed across the third high voltage switch; a fourth high-voltage switch, which is arranged in series between the second high-voltage switch and the ground line; a fourth diode disposed across the fourth high-voltage switch; as well as An output terminal having a first lead electrically coupled between the first high-voltage switch and the third high-voltage switch and a second lead electrically coupled between the second high-voltage switch and the fourth high-voltage switch, wherein the output terminal provides a plurality of high-voltage pulses, wherein each of the plurality of pulses includes a positive pulse having a voltage greater than approximately 500 volts and a negative pulse having a negative voltage less than approximately -500 volts.

2. The high voltage bipolar pulse power supply of claim 1, wherein the high voltage pulses at the output end have a pulse repetition rate greater than about 10 kHz.

3. A high-voltage bipolar pulse power supply as described in claim 1, wherein the first high-voltage switch includes a first plurality of solid-state switches arranged in parallel, the second high-voltage switch includes a second plurality of solid-state switches arranged in parallel, the third high-voltage switch includes a third plurality of solid-state switches arranged in parallel, and the fourth high-voltage switch includes a fourth plurality of solid-state switches arranged in parallel.

4. The high-voltage bipolar pulse power supply as described in claim 1, wherein the first high-voltage switch, the second high-voltage switch, the third high-voltage switch and the fourth high-voltage switch are each selected from one or more of IGBT, MOSFET, SiC MOSFET, SiC junction transistor, FET, SiC switch, GaN switch and photoconductive switch.

5. The high voltage bipolar pulse power supply of claim 1, wherein the circuit including both the DC power supply and the energy storage capacitor has an inductance of less than about 10 nH.

6. The high voltage bipolar pulse power supply of claim 1, wherein a circuit including both the first high voltage bipolar pulse power supply and the second high voltage switch has an inductance of less than about 10 nH.

7. The high voltage bipolar pulse power supply of claim 1, wherein the first lead of the output end is coupled to a first lead of an electrode, and the second lead of the output end is coupled to a second lead of the electrode.

8. The high voltage bipolar pulse power supply according to claim 1, further comprising: a first sweep switch and a first sweep resistor arranged in series across the first high voltage switch; a second sweep switch and a second sweep resistor arranged in series across the first high voltage switch; a third sweep switch and a third sweep resistor arranged in series across the first high voltage switch; and A fourth sweep switch and a fourth sweep resistor are arranged in series across the first high voltage switch.

9. A high voltage multi-level bipolar pulse power supply, comprising: a first DC power supply; a first energy storage capacitor coupled to the first DC power source; a first diode having an anode and a cathode, the anode being electrically coupled to the first DC power source and the first energy storage capacitor; a first high voltage switch electrically coupled to a cathode of the first diode; a first diode disposed across the first high voltage switch; a second high voltage switch electrically coupled to a cathode of the first diode; a second diode disposed across the second high voltage switch; a third high-voltage switch, which is arranged in series between the first high-voltage switch and the ground line; a third diode disposed across the third high voltage switch; a fourth high-voltage switch, which is arranged in series between the second high-voltage switch and the ground line; a fourth diode disposed across the fourth high-voltage switch; A second DC power supply; a second energy storage capacitor coupled to the second DC power source; a fifth high-voltage switch electrically coupled to the second DC power supply and the second energy storage capacitor; a fifth diode disposed across the fifth high-voltage switch; a sixth high-voltage switch electrically coupled to a cathode of the second DC power source and the second energy storage capacitor; a sixth diode disposed across the sixth high-voltage switch; as well as The output end has a first lead electrically coupled between the first high-voltage switch and the third high-voltage switch and a second lead electrically coupled between the second high-voltage switch and the fourth high-voltage switch.

10. A high-voltage multi-level bipolar pulse power supply as described in claim 9, wherein the output terminal provides a plurality of high-voltage pulses, each of the plurality of high-voltage pulses having a first positive pulse with a voltage greater than 500 volts, a second high pulse with a positive voltage greater than the voltage of the first positive pulse, and a negative pulse with a voltage less than -500 volts.

11. The high voltage multi-level bipolar pulse power supply of claim 9, wherein the second DC power supply generates a voltage greater than that of the first DC power supply.

12. The high voltage multi-level bipolar pulse power supply according to claim 9, wherein: The first high-voltage switch, the fourth high-voltage switch, and the fifth high-voltage switch are closed to generate a voltage at the output terminal that is equal to the voltage of the second DC power supply; The second high-voltage switch, the third high-voltage switch, and the sixth high-voltage switch are closed to generate a voltage at the output terminal that is equal to the negative voltage of the second DC power supply; The first high-voltage switch and the fourth high-voltage switch are closed to generate a voltage at the output terminal that is equal to the voltage of the first DC power supply; and The second high-voltage switch and the third high-voltage switch are closed to generate a voltage at the output terminal that is equal to the negative voltage of the first DC power supply.

13. The high voltage bipolar pulse power supply of claim 9, wherein the first high voltage switch, the second high voltage switch, the third high voltage switch, the fourth high voltage switch, the fifth high voltage switch and the sixth high voltage switch each have a capacitance less than about 500 pF.

14. The high voltage bipolar pulse power supply according to claim 9, further comprising: a first sweep switch and a first sweep resistor arranged in series across the first high voltage switch; a second sweep switch and a second sweep resistor arranged in series across the first high voltage switch; a third sweep switch and a third sweep resistor arranged in series across the first high voltage switch; a fourth sweep switch and a fourth sweep resistor arranged in series across the first high voltage switch; a fifth sweep switch and a fifth sweep resistor arranged in series across the fifth high-voltage switch; as well as A sixth sweep switch and a sixth sweep resistor are arranged in series across the sixth high-voltage switch.

15. A high voltage bipolar pulse power supply, comprising: DC power supply; an energy storage capacitor coupled to the DC power source; a diode having an anode and a cathode, the anode being electrically coupled to the DC power source and the energy storage capacitor; a first high voltage switch electrically coupled to a cathode of the diode; a first diode disposed across the first high voltage switch; a first sweep switch and a first sweep resistor, wherein the first sweep switch and the first sweep resistor are arranged in series across the first high-voltage switch; a second high voltage switch electrically coupled to the cathode of the diode; a second diode disposed across the second high voltage switch; a second sweep switch and a second sweep resistor, the second sweep switch and the second sweep resistor being arranged in series across the first high-voltage switch; a third high-voltage switch, which is arranged in series between the first high-voltage switch and the ground line; a third diode disposed across the third high voltage switch; a third sweep switch and a third sweep resistor, wherein the third sweep switch and the third sweep resistor are arranged in series across the first high-voltage switch; a fourth high-voltage switch, which is arranged in series between the second high-voltage switch and the ground line; a fourth diode disposed across the fourth high-voltage switch; a fourth sweep switch and a fourth sweep resistor, wherein the fourth sweep switch and the fourth sweep resistor are arranged in series across the first high-voltage switch; as well as An output terminal having a first lead electrically coupled between the first high-voltage switch and the third high-voltage switch and a second lead electrically coupled between the second high-voltage switch and the fourth high-voltage switch, wherein the output terminal provides a plurality of high-voltage pulses, wherein each of the plurality of pulses includes a positive pulse having a voltage greater than approximately 500 volts and a negative pulse having a negative voltage less than approximately -500 volts.

16. The high voltage bipolar pulse power supply according to claim 15, wherein: The first sweep switch is closed before the first high-voltage switch is closed; The second sweep switch is closed before the second high-voltage switch is closed; The third sweep switch is closed before the third high-voltage switch is closed; and The fourth sweep switch is closed before the fourth high-voltage switch is closed.

17. A high-voltage bipolar pulse power supply as described in claim 15, wherein the first high-voltage switch, the second high-voltage switch, the third high-voltage switch and the fourth high-voltage switch are each selected from one or more of IGBT, MOSFET, SiC MOSFET, SiC junction transistor, FET, SiC switch, GaN switch and photoconductive switch.

18. The high-voltage bipolar pulse power supply of claim 15, wherein the first sweep switch, the second sweep switch, the third sweep switch and the fourth sweep switch are each selected from one or more of an IGBT, a MOSFET, a SiC MOSFET, a SiC junction transistor, a FET, a SiC switch, a GaN switch and a photoconductive switch.

19. The high voltage bipolar pulse power supply of claim 15, wherein the circuit between the diode and both of the DC power supply and the energy storage capacitor has an inductance of less than about 10 nH.

20. The high voltage bipolar pulse power supply of claim 15, wherein the diode and a circuit between the first high voltage bipolar pulse power supply and the second high voltage switch have an inductance of less than about 10 nH.

21. The high voltage bipolar pulse power supply of claim 15, wherein the first lead of the output end is coupled to a first lead of an electrode, and the second lead of the output end is coupled to a second lead of the electrode.

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