Anhydrous hydrogen fluoride production tail gas absorption device

Abstract

The invention belongs to the technical field of tail gas absorption, and particularly relates to an anhydrous hydrogen fluoride production tail gas absorption device which is characterized in that the top of a fixing frame is fixedly connected with a gas storage cylinder body; an air inlet pipe is arranged in the middle of the top plate; two first sliding grooves which are symmetrically arranged are formed in the middle of the air cylinder body. The middle of the first sliding groove is detachably connected with a sliding plate. The bottom of the sliding plate is fixedly connected with a supporting grid. A buckle is fixedly connected to the middle, close to the supporting grid, of the sliding plate. The top, away from the supporting grid, of the sliding plate is provided with two symmetrically-arranged second sliding grooves. The middle of the second sliding groove is slidably connected with a fixing ring. The middle part of the fixing ring is detachably connected with a buckle; according to the step, through the structural design that the supporting grating and the fixing ring are installed to adsorb and purify the tail gas, harmful substances in the tail gas can be effectively removed, efficient adsorption of harmful ingredients such as anhydrous hydrogen fluoride is guaranteed through the high adsorption performance of activated carbon, and the tail gas purification quality is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of tail gas absorption, in particular to a tail gas absorption device for producing anhydrous hydrogen fluoride. Background Art

[0002] The production process of anhydrous hydrogen fluoride will produce exhaust gas containing a variety of harmful components, among which hydrogen fluoride is one of the main harmful components. It can irritate the human respiratory tract, eyes and skin. Even long-term exposure to low concentrations may lead to chronic diseases such as fluorosis. In addition, the exhaust gas may also contain small amounts of sulfur dioxide, dust and other pollutants.

[0003] Traditional tail gas absorption methods include simple water washing methods, etc., but this method has limited absorption efficiency for anhydrous hydrogen fluoride tail gas. Although HF has a high solubility in water, if there is no good gas distribution and liquid distribution system, the gas-liquid mixing will be uneven, which will greatly reduce the absorption efficiency. In addition, the small gas-liquid contact area and short contact time will also cause some hydrogen fluoride to not be fully absorbed and discharged into the atmosphere.

[0004] To this end, the present invention provides a tail gas absorption device for producing anhydrous hydrogen fluoride. Summary of the invention

[0005] In order to make up for the deficiencies of the prior art and solve at least one problem raised in the background technology, a tail gas absorption device for anhydrous hydrogen fluoride production is proposed.

[0006] The technical solution adopted by the present invention to solve its technical problems is as follows: the tail gas absorption device for the production of anhydrous hydrogen fluoride described in the present invention comprises a fixing frame; a gas cylinder body is fixedly connected to the top of the fixing frame; a top plate is detachably connected to the top of the gas cylinder body; an air inlet pipe is provided in the middle of the top plate; an exhaust port is provided on the top of the top plate; two first chute grooves are symmetrically arranged in the middle of the gas cylinder body; a slide plate is detachably connected to the middle of the first chute; a supporting grille is fixedly connected to the bottom of the slide plate; a buckle is fixedly connected to the middle of the slide plate near the supporting grille; an air outlet assembly is fixedly connected to the middle of the slide plate near the supporting grille; a top of the slide plate away from the supporting grille is provided There are two symmetrically arranged second slide grooves; a fixing ring is slidably connected to the middle part of the second slide groove; a buckle is detachably connected to the middle part of the fixing ring; a liquid outlet is opened at the bottom of the gas storage cylinder body; a water discharge assembly is installed on the top of the top plate; a collecting assembly is detachably connected to the bottom of the liquid outlet; this step is designed to effectively remove harmful substances in the exhaust gas by installing a supporting grid and a fixing ring to adsorb and purify the exhaust gas, and the detachable design of the slide plate and the first slide groove facilitates the movement and replacement of internal components. Timely replacement of activated carbon sheets can improve the efficient adsorption of harmful components such as anhydrous hydrogen fluoride, ensure the quality of exhaust gas purification, and make the discharged exhaust gas meet environmental protection standards.

[0007] Preferably, the water discharge assembly includes a liquid storage tank body; a plurality of support legs are fixedly connected to the top of the top plate near the exhaust port and are equidistantly distributed and located at the center of a circle; the top of the support legs is fixedly connected to the liquid storage tank body; a water outlet pipe is fixedly connected to the bottom of the liquid storage tank body and passes through the top plate; a water injection port is provided on the top of the liquid storage tank body; a prompt port is provided on the top of the liquid storage tank body near the water injection port and is located at the center of the water injection port; two symmetrically arranged elastic ropes are fixedly connected to the bottom of the prompt port; a buoyancy ball is fixedly connected to the end of the elastic rope; and a buoyancy ball is fixedly connected to the middle of the elastic rope. A prompt rod is connected and passes through the liquid storage tank body; the end of the water outlet pipe away from the liquid storage tank body is fixedly connected with a nozzle; this step is designed by installing the liquid storage tank body and using a buoyancy ball to prompt it. Compared with simple liquid immersion or water flushing, the spray form can make the harmful components and impurities in the exhaust gas contact with water more fully and separate them. For gas such as hydrogen fluoride that is easily soluble in water, large-area contact helps to remove it from the exhaust gas more quickly and thoroughly, thereby effectively reducing the concentration of harmful components in the exhaust gas and improving the exhaust gas purification effect.

[0008] Preferably, the collecting assembly includes a collecting box body; a water outlet is provided in the middle of the collecting box body; a filter is fixedly connected to the middle of the supporting leg; a filter plate is slidably connected to the middle of the collecting box body near the liquid outlet; this step adopts the structural design of installing the filter plate and the filter to filter the wastewater, which can more effectively remove various impurities and pollutants in the wastewater, greatly improve the degree of purification of the wastewater, and is conducive to the subsequent further treatment of the wastewater or discharge up to standard.

[0009] Preferably, the gas outlet assembly includes a support plate; the slide plate is fixedly connected to a support plate near the middle of the support grid and is located between the support grid and the fixed ring; a plurality of equidistantly distributed exhaust holes are opened in the middle of the support plate; this step greatly increases the contact area and contact time between the tail gas and the activated carbon sheet by installing the structural design of the support plate and the exhaust holes, allowing the absorption reaction to proceed more fully, thereby improving the removal efficiency of harmful substances such as anhydrous hydrogen fluoride, and improving the treatment effect of the entire tail gas absorption device. It is conducive to the uniform distribution of tail gas and the stable progress of the treatment process, reducing problems such as insufficient local absorption that may be caused by uneven distribution, and improving the reliability and stability of the device operation.

[0010] Preferably, the air inlet pipe is fixedly connected with a distribution plate near the middle of the support grid; a plurality of equally spaced holes are provided in the middle of the distribution plate; this step can effectively intercept some solid particle impurities that may be contained in the exhaust gas through the structural design of installing the distribution plate, prevent them from entering the interior of the device, and avoid these impurities from causing adverse effects such as blockage, wear or pollution on the components inside the absorption device.

[0011] Preferably, a sealing cover is detachably connected to the top of the exhaust port; the sealing cover is made of rubber; this step, through the structural design of installing the sealing cover, can prevent rainwater, dust, debris and other foreign substances from entering the exhaust port, avoid these substances from mixing with the exhaust gas to produce new pollutants or cause corrosion, blockage and other problems inside the exhaust port, thereby ensuring the normal operation of the exhaust emission system.

[0012] The beneficial effects of the present invention are as follows:

[0013] 1. The exhaust gas absorption device for anhydrous hydrogen fluoride production described in the present invention can effectively remove harmful substances in the exhaust gas by installing a supporting grid and a fixing ring to adsorb and purify the exhaust gas. The high adsorption performance of activated carbon ensures the efficient adsorption of harmful components such as anhydrous hydrogen fluoride, improves the exhaust gas purification quality, and makes the discharged exhaust gas meet environmental protection standards. The design of the slide plate and the first slide groove facilitates the movement of internal components.

[0014] 2. The anhydrous hydrogen fluoride production tail gas absorption device described in the present invention has a structural design that installs a liquid storage tank body and uses a buoyancy ball to prompt it. Compared with simple liquid immersion or water flushing, the spray form can make the harmful components and impurities in the tail gas more fully contact with water and separate them. Moreover, for hydrogen fluoride, a gas that is easily soluble in water, large-area contact helps to remove it from the tail gas more quickly and thoroughly, thereby effectively reducing the concentration of harmful components in the tail gas and improving the tail gas purification effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The present invention will be further described below in conjunction with the accompanying drawings.

[0016] Figure 1 is a stereogram of the present invention;

[0017] Figure 2 It is a schematic diagram of the structure of the fixing ring and the buckle in the present invention;

[0018] Figure 3 It is a schematic diagram of the structure of the collection box body and the filter plate in the present invention;

[0019] Figure 4 It is a schematic diagram of the structure of the prompt port and the buoyancy ball in the present invention.

[0020] Legend:

[0021] 1. Fixed frame; 11. Air cylinder body; 12. Top plate; 13. Air inlet pipe; 14. Slide plate; 15. First slide groove; 16. Support grille; 17. Buckle; 18. Liquid outlet; 19. Fixed ring; 110. Second slide groove; 111. Exhaust port; 2. Liquid storage tank body; 21. Support leg; 23. Water inlet; 24. Water outlet pipe; 25. Prompt port; 26. Prompt rod; 27. Buoyancy ball; 28. Nozzle; 29. ​​Elastic rope; 3. Collection box body; 31. Water outlet; 32. Filter plate; 33. Filter; 4. Support plate; 41. Exhaust hole; 5. Distribution plate; 6. Sealing cover; 7. Anti-slip mat. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] Specific examples are given below.

[0024] like Figures 1 to 3As shown, an anhydrous hydrogen fluoride production tail gas absorption device according to an embodiment of the present invention comprises a fixing frame 1; a gas storage cylinder body 11 is fixedly connected to the top of the fixing frame 1; a top plate 12 is detachably connected to the top of the gas storage cylinder body 11; an air inlet pipe 13 is provided in the middle of the top plate 12; an exhaust port 111 is provided at the top of the top plate 12; two symmetrically arranged first slide grooves 15 are provided in the middle of the gas storage cylinder body 11; a slide plate 14 is detachably connected to the middle of the first slide groove 15; a supporting grid 16 is fixedly connected to the bottom of the slide plate 14; the slide plate 14 is close to the A buckle 17 is fixedly connected to the middle of the support grid 16; a gas outlet assembly is fixedly connected to the middle of the slide plate 14 near the support grid 16; two symmetrically arranged second slide grooves 110 are provided at the top of the slide plate 14 away from the support grid 16; a fixing ring 19 is slidably connected to the middle of the second slide groove 110; a buckle 17 is detachably connected to the middle of the fixing ring 19; a liquid outlet 18 is provided at the bottom of the gas storage cylinder body 11; a water discharge assembly is installed on the top of the top plate 12; a collecting assembly is detachably connected to the bottom of the liquid outlet 18; during operation, anhydrous hydrogen fluoride The production tail gas enters the interior of the top plate 12 through the intake pipe 13, and the activated carbon sheet is placed on the top of the fixing ring 19 in the space below the support grille 16 and the support plate 4, and then clamped with the buckle 17. The support grille 16 can ensure that the activated carbon sheet will not shake or shift due to the impact of the tail gas or other factors during the adsorption process. After adsorption, it is discharged from the exhaust port 111 on the top of the top plate 12 to achieve tail gas purification, and the slide plate 14 is slidably connected to the two first slide grooves 15 in the middle of the top plate 12, so that its position in the box can be easily adjusted. When the activated carbon sheet needs to be replaced or maintained, it can be taken out and replaced by sliding the slide plate 14. This step is designed to effectively remove harmful substances in the tail gas by installing the support grille 16 and the fixing ring 19 to adsorb and purify the tail gas, and the detachable design of the slide plate 14 and the first slide groove 15 facilitates the movement and replacement of internal components. The timely replacement of the activated carbon sheet can improve the efficient adsorption of harmful components such as anhydrous hydrogen fluoride, ensure the quality of tail gas purification, and make the discharged tail gas meet environmental protection standards.

[0025] like Figure 1 and Figure 4As shown, the water discharge assembly includes a liquid storage tank body 2; a plurality of support legs 21 are fixedly connected to the top of the top plate 12 near the exhaust port 111 and are equidistantly distributed and located at the center of a circle; the liquid storage tank body 2 is fixedly connected to the top of the support legs 21; a water outlet pipe 24 is fixedly connected to the bottom of the liquid storage tank body 2 and passes through the top plate 12; a water injection port 23 is opened at the top of the liquid storage tank body 2; a prompt port 25 is opened at the top of the liquid storage tank body 2 near the water injection port 23 and is located at the center of the circle of the water injection port 23. The bottom of the prompt port 25 is fixedly connected with two symmetrically arranged elastic ropes 29; the ends of the elastic ropes 29 are fixedly connected with buoyancy balls 27; the middle of the elastic rope 29 is fixedly connected with a prompt rod 26, which passes through the liquid storage tank body 2; the end of the water outlet pipe 24 away from the liquid storage tank body 2 is fixedly connected with a nozzle 28; when working, the water is pumped out by the water pump in the liquid storage tank body 2, and the water is transported to the middle of the nozzle 28 through the supporting legs 21 connected to the bottom, and the nozzle 28 sprays the water in the form of a spray. Water mist is formed inside the top plate 12. When the tail gas from the production of anhydrous hydrogen fluoride enters the top plate 12, the harmful components and dust impurities in the tail gas are fully in contact with the water mist. As the tail gas absorption process proceeds, the buoyancy ball 27 inside the liquid storage tank body 2 is connected to the prompt port 25 on the liquid storage tank body 2 through the elastic rope 29. During the rising process of the buoyancy ball 27, the prompt rod 26 also rises to remind the operator to pay attention to the water level change inside the liquid storage tank body 2. This step is achieved by installing the liquid storage tank body 2 and using the buoyancy ball 27 to prompt the structural design. Compared with simple liquid immersion or water flushing, the spray form can make the harmful components and impurities in the tail gas more fully contact with water and separate them. For hydrogen fluoride, a gas that is easily soluble in water, large-area contact helps to remove it from the tail gas more quickly and thoroughly, thereby effectively reducing the concentration of harmful components in the tail gas and improving the tail gas purification effect.

[0026] like Figures 2 to 3 As shown, the collecting assembly includes a collecting box body 3; a water outlet 31 is provided in the middle of the collecting box body 3; a filter 33 is fixedly connected to the middle of the supporting leg 21; a filter plate 32 is slidably connected to the middle of the collecting box body 3 near the liquid outlet 18; during operation, after the tail gas from the production of anhydrous hydrogen fluoride enters the absorption device, the wastewater generated by the reaction or physical adsorption with the absorption liquid and other substances flows to the middle of the collecting box body 3 at the bottom of the liquid outlet 18 under the action of gravity, and the filter plate 32 can intercept larger particles of impurities, suspended solids, etc. in the wastewater, so that the wastewater is initially filtered. When it needs to be discharged, the filter 33 installed at the water outlet 31 further filters the wastewater, so that the discharged wastewater meets certain discharge standards or meets the requirements of subsequent treatment. In this step, the structural design of installing the filter plate 32 and the filter 33 to filter the wastewater can more effectively remove various impurities and pollutants in the wastewater, greatly improve the purification degree of the wastewater, and is conducive to the subsequent further treatment of the wastewater or the discharge of the wastewater up to the standard.

[0027] like Figure 2 As shown, the gas outlet assembly includes a support plate 4; the slide plate 14 is fixedly connected to the support plate 4 near the middle of the support grid 16, and is located between the support grid 16 and the fixing ring 19; a plurality of exhaust holes 41 are provided in the middle of the support plate 4 and are evenly distributed; when working, the exhaust holes 41 provided on the top of the support plate 4 can disperse the exhaust gas entering the middle of the top plate 12 into a plurality of fine airflows, so that it flows more evenly in all directions of the box, increasing the contact area and contact opportunity with the activated carbon sheet. This step greatly increases the contact area and contact time between the exhaust gas and the activated carbon sheet by installing the structural design of the support plate 4 and the exhaust holes 41, allowing the absorption reaction to proceed more fully, thereby improving the removal efficiency of harmful substances such as anhydrous hydrogen fluoride, and improving the treatment effect of the entire exhaust gas absorption device. It is conducive to the uniform distribution of exhaust gas and the stable progress of the treatment process, reducing problems such as insufficient local absorption that may be caused by uneven distribution, and improving the reliability and stability of the device operation.

[0028] like Figure 3 As shown, a distribution plate 5 is fixedly connected to the middle of the air inlet pipe 13 near the supporting grid 16; a plurality of equally spaced holes are provided in the middle of the distribution plate 5; during operation, when the tail gas from the production of anhydrous hydrogen fluoride enters the interior of the top plate 12 through the air inlet pipe 13, the tail gas will first pass through the distribution plate 5, so that the tail gas is preliminarily purified before entering the subsequent absorption treatment link. This step can effectively intercept some solid particle impurities that may be contained in the tail gas through the structural design of installing the distribution plate 5, prevent them from entering the interior of the device, and avoid these impurities from causing adverse effects such as blockage, wear or pollution on the components inside the absorption device.

[0029] like Figure 1 As shown, a sealing cover 6 is detachably connected to the top of the exhaust port 111; the sealing cover 6 is made of rubber; when working, the sealing structure between the sealing cover 6 and the exhaust port 111 can prevent the exhaust gas from leaking from the top of the exhaust port 111, so that the exhaust gas treated by the absorption device can only be discharged according to the prescribed discharge path. This step can prevent rainwater, dust, debris and other foreign substances from entering the exhaust port 111 through the structural design of installing the sealing cover 6, avoid these substances mixing with the exhaust gas to generate new pollutants or cause corrosion, blockage and other problems inside the exhaust port 111, and ensure the normal operation of the exhaust emission system.

[0030] like Figure 1As shown, a plurality of anti-skid pads 7 are fixed to the bottom of the fixing frame 1 and are distributed at equal intervals. When the fixing frame 1 is in operation, the anti-skid pads 7 will also fit tightly with the ground. This step can effectively increase the friction between the device and the ground by installing the structural design of the anti-skid pads 7, prevent the device from sliding under the action of these external forces, ensure the position stability of the device, and ensure that the exhaust gas absorption process can be carried out continuously and stably.

[0031] During operation, the tail gas produced by the anhydrous hydrogen fluoride enters the interior of the top plate 12 through the air inlet pipe 13, and the activated carbon sheet is placed on the top of the fixing ring 19 in the space below the support grid 16 and the support plate 4, and then clamped with the buckle 17. The support grid 16 can ensure that the activated carbon sheet will not shake or shift due to the impact of the tail gas or other factors during the adsorption process. After adsorption, it is discharged from the exhaust port 111 at the top of the top plate 12 to achieve the purification of the tail gas. The slide plate 14 is slidably connected to the two first slide grooves 15 in the middle of the top plate 12, and its position in the box can be easily adjusted. When the activated carbon sheet is When the carbon sheet needs to be replaced or maintained, it can be taken out for replacement by sliding the slide plate 14, and the water is pumped out by the water pump in the liquid storage tank body 2, and transported to the middle of the nozzle 28 through the support leg 21 connected at the bottom. The nozzle 28 sprays the water in a spray form to form water mist inside the top plate 12. When the tail gas of anhydrous hydrogen fluoride production enters the inside of the top plate 12, the harmful components and dust impurities in the tail gas are fully in contact with the water mist. As the tail gas absorption process proceeds, the buoyancy ball 27 inside the liquid storage tank body 2 is connected to the prompt port 25 on the liquid storage tank body 2 through the elastic rope 29. During the rising process of the buoyancy ball 27, the water mist is lifted. The indicator rod 26 also rises accordingly, reminding the operator to pay attention to the water level change inside the liquid storage tank body 2. After the tail gas of anhydrous hydrogen fluoride production enters the absorption device, the wastewater generated by the reaction or physical adsorption with the absorption liquid and other substances flows to the middle of the collection box body 3 at the bottom of the liquid outlet 18 under the action of gravity. The filter plate 32 can intercept larger particles of impurities, suspended solids, etc. in the wastewater, so that the wastewater is initially filtered. When it needs to be discharged, the filter 33 installed at the outlet 31 further filters the wastewater, so that the discharged wastewater meets certain discharge standards or meets the requirements of subsequent treatment, supporting The exhaust hole 41 opened on the top of the plate 4 can disperse the exhaust gas entering the middle of the top plate 12 into multiple fine air flows, so that it can flow more evenly in all directions of the box, increasing the contact area and contact opportunity with the activated carbon sheet. When the exhaust gas from the production of anhydrous hydrogen fluoride enters the interior of the top plate 12 through the air inlet pipe 13, the exhaust gas will first pass through the distribution plate 5, so that the exhaust gas can be preliminarily purified before entering the subsequent absorption treatment link. The sealing structure between the sealing cover 6 and the exhaust port 111 can prevent the exhaust gas from leaking from the top of the exhaust port 111, so that the exhaust gas treated by the absorption device can only be discharged according to the prescribed emission path.

[0032] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A tail gas absorption device for anhydrous hydrogen fluoride production, comprising a fixing frame (1); characterized in that: The top of the fixing frame (1) is fixedly connected to a gas cylinder body (11); the top of the gas cylinder body (11) is detachably connected to a top plate (12); an air inlet pipe (13) is provided in the middle of the top plate (12); an exhaust port (111) is provided in the top of the top plate (12); two first chute grooves (15) are symmetrically arranged in the middle of the gas cylinder body (11); a slide plate (14) is detachably connected to the middle of the first slide groove (15); a support grille (16) is fixedly connected to the bottom of the slide plate (14); a middle portion of the slide plate (14) near the support grille (16) is fixedly connected to the support grille (16); A buckle (17) is connected; an air outlet assembly is fixedly connected to the middle of the slide plate (14) near the supporting grille (16); two second slide grooves (110) are symmetrically arranged at the top of the slide plate (14) away from the supporting grille (16); a fixing ring (19) is slidably connected to the middle of the second slide groove (110); a buckle (17) is detachably connected to the middle of the fixing ring (19); a liquid outlet (18) is provided at the bottom of the gas storage cylinder body (11); a water discharge assembly is installed on the top of the top plate (12); and a collecting assembly is detachably connected to the bottom of the liquid outlet (18).

2. The tail gas absorption device for anhydrous hydrogen fluoride production according to claim 1, characterized in that: The water discharge assembly comprises a liquid storage tank body (2); a plurality of support legs (21) are fixedly connected to the top of the top plate (12) near the exhaust port (111) and are equidistantly distributed and located at the center of a circle; the top of the support legs (21) is fixedly connected to the liquid storage tank body (2); a water outlet pipe (24) is fixedly connected to the bottom of the liquid storage tank body (2) and passes through the top plate (12); a water injection port (23) is opened on the top of the liquid storage tank body (2); A prompt port (25) is provided near the top of the water injection port (23) and is located at the center of the water injection port (23); two symmetrically arranged elastic ropes (29) are fixedly connected to the bottom of the prompt port (25); a buoyancy ball (27) is fixedly connected to the end of the elastic rope (29); a prompt rod (26) is fixedly connected to the middle of the elastic rope (29) and passes through the liquid storage tank body (2); and a nozzle (28) is fixedly connected to the end of the water outlet pipe (24) away from the liquid storage tank body (2).

3. The tail gas absorption device for anhydrous hydrogen fluoride production according to claim 2, characterized in that: The collecting assembly comprises a collecting box body (3); a water outlet (31) is provided in the middle of the collecting box body (3); a filter (33) is fixedly connected in the middle of the supporting leg (21); and a filter plate (32) is slidably connected in the middle of the collecting box body (3) near the liquid outlet (18).

4. The tail gas absorption device for anhydrous hydrogen fluoride production according to claim 3, characterized in that: The air outlet assembly comprises a support plate (4); the support plate (4) is fixedly connected to the slide plate (14) near the middle of the support grille (16) and is located between the support grille (16) and the fixing ring (19); and a plurality of exhaust holes (41) are provided in the middle of the support plate (4) at equal intervals.

5. The tail gas absorption device for anhydrous hydrogen fluoride production according to claim 4, characterized in that: A distribution plate (5) is fixedly connected to the middle of the air inlet pipe (13) near the support grid (16); a plurality of equidistantly distributed leak holes are provided in the middle of the distribution plate (5).

6. The tail gas absorption device for anhydrous hydrogen fluoride production according to claim 5, characterized in that: The top of the exhaust port (111) is detachably connected to a sealing cover (6); the sealing cover (6) is made of rubber.

7. The tail gas absorption device for anhydrous hydrogen fluoride production according to claim 6, characterized in that: A plurality of anti-slip pads (7) distributed at equal distances are fixedly connected to the bottom of the fixing frame (1).

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