Micro through hole one-step manufacturing device and method based on laser-induced microjet

Abstract

The invention discloses a micro-through-hole one-step manufacturing device and method based on laser-induced micro-jet, and relates to the technical field of laser precision machining, the micro-through-hole one-step manufacturing device comprises a laser machining assembly, and the laser output end of the laser machining assembly corresponds to a to-be-machined area of a sample; and the paraxial water jet mechanism is used for forming a uniform water film on the surface of the to-be-machined area, when the laser machining assembly emits laser beams to the to-be-machined area, an annular hole is formed in the to-be-machined area, and the water film forms laser-induced micro jet at the laser focus in the annular hole. Based on the characteristics of high speed, high pressure and stability of laser-induced microjet, ablated products such as suspended bubbles and chippings in the micro-through-hole machining process are discharged in real time, the defects such as recast layers and micro cracks existing on the side wall and an inlet of a hole are overcome, the micro-through-hole machining quality, the laser energy utilization rate and the machining efficiency are improved, and the machining cost is reduced. The technical effect of one-step efficient and high-quality machining of the micro through holes in the brittle and hard materials through the laser method is achieved.

Description

Technical Field

[0001] The invention relates to the technical field of laser precision machining, and in particular to a one-step manufacturing device and method for micro-through holes based on laser-induced micro-jet. Background Art

[0002] Transparent, brittle and hard materials represented by silicon and glass are widely used in integrated circuits, micro-electromechanical systems and other fields. Precision, extreme and microscopic application scenarios pose great challenges to the high-quality micro-nano processing of such materials. Taking integrated circuits as an example, forming through-hole structures (through silicon vias TSV and through glass vias TGV) on silicon substrates and glass substrates to connect stacked chips can increase the chip interconnection density, reduce communication time and reduce power consumption.

[0003] In the prior art, the mainstream through-hole processing processes mainly include deep reactive ion etching, laser induced etching and laser drilling. Among them, the silicon through-hole formed by deep reactive ion etching often forms a scallop-shaped uneven etching morphology due to the alternation of etching and passivation, while laser induced etching has the disadvantages of high equipment cost and complex process flow. Laser drilling is widely used in the processing of through-holes of brittle and hard materials due to its advantages of high precision, simple process and wide material applicability. However, the existing laser drilling technology still has many shortcomings. For example, the material in the laser irradiation area melts and solidifies to form a recast layer, which will reduce the surface processing quality and the accuracy of the hole, and easily induce the generation of microcracks; the debris deposition is difficult to discharge from the processing area, and absorbs the laser energy under the action of subsequent pulses, reducing the laser energy utilization rate and processing efficiency. In order to achieve high-quality micro-hole processing, Dong Xia and others from Xi'an Jiaotong University used femtosecond laser prefabrication in the air, and then used the cavitation effect to trim the hole wall, so that the surface quality of the through hole was significantly improved (two-step method). Although the two-step method improves the processing quality of the hole wall, the complex steps greatly reduce the processing efficiency.

[0004] In view of this, how to provide an efficient and high-quality micro-hole processing method is an urgent problem that technical personnel in this field need to solve. Summary of the invention

[0005] The purpose of the present invention is to provide a one-step manufacturing device and method for micro-through holes based on laser-induced micro-jet, so as to solve the problems existing in the prior art.

[0006] To achieve the above object, the present invention provides a one-step micro-through hole manufacturing device based on laser-induced microfluidics, comprising:

[0007] A laser processing component, wherein the laser output end thereof corresponds to the area to be processed of the sample;

[0008] The paraxial water jet mechanism is used to form a uniform water film on the surface of the area to be processed. When the laser processing component emits a laser beam to the area to be processed, an annular hole is formed in the area to be processed, and the water film forms a laser-induced microjet at the laser focus in the annular hole.

[0009] Furthermore, it also includes:

[0010] A pneumatic platform, on which a three-axis mobile platform is arranged;

[0011] An operating room, arranged on the three-axis movable platform, in which the sample can be clamped;

[0012] A circulation mechanism has one end connected to the operating chamber and the other end connected to the paraxial water jet mechanism.

[0013] Furthermore, the paraxial water jet mechanism comprises:

[0014] A water jet nozzle is connected to the nozzle fixing rod through a nozzle positioning nut, and a water inlet end of the water jet nozzle is connected to the other end of the circulation mechanism;

[0015] A pipe clamp, wherein the nozzle fixing rod is connected to the side wall of the operating chamber through the pipe clamp, and the pipe clamp is used to adjust the height and angle of the water jet nozzle relative to the sample.

[0016] Furthermore, the circulation mechanism comprises:

[0017] A filter tank is arranged on the pneumatic platform and communicated with the operating room, a first drain valve is arranged at the communication point, and a filter element is arranged in the filter tank;

[0018] A water reservoir is connected to the filter tank, a second drain valve is provided at the connection point, the water reservoir is connected to the water inlet end of the water jet nozzle, and a circulation pump is provided in the water reservoir.

[0019] Furthermore, the water reservoir is filled with a microfluidic solution, wherein the microfluidic solution uses distilled water as a solvent and one or more of glycerol, n-butanol or acetone as a solute, and the concentration of the microfluidic solution is 0.5-1 mol / L.

[0020] Furthermore, it also includes:

[0021] Two workpiece clamping heads are connected to the inner wall of the operating chamber through a fixture electric control rotating head, and the two workpiece clamping heads can clamp the sample;

[0022] The lighting lamp is arranged at the bottom of the operating room and corresponds to the sample.

[0023] Furthermore, the laser processing assembly includes:

[0024] A femtosecond laser, wherein a laser beam is emitted from the femtosecond laser, and sequentially passes through a beam expander, a semi-transparent and semi-reflective mirror, a positioning light hole, a first reflector, an optical spatial modulator, a second reflector, and a plano-convex lens to enter a focusing objective lens. The top of the operating chamber is open, and the focusing objective lens is located at the top of the operating chamber and faces the area to be processed;

[0025] CCD industrial camera, the laser beam reflects part of the laser beam through a semi-transparent and semi-reflective mirror, and enters the CCD industrial camera through an imaging lens, and the CCD industrial camera corresponds to the area to be processed.

[0026] Furthermore, the focusing objective lens is perpendicularly oriented toward the sample, and the water jet nozzle is paraxially arranged on one side of the focusing objective lens.

[0027] Furthermore, it also includes:

[0028] A vacuum cleaner is arranged on the pneumatic platform, and a suction end of the vacuum cleaner is arranged on the other side of the focusing objective lens.

[0029] The present invention also provides a one-step manufacturing method for micro-through holes based on laser-induced micro-jet, and the one-step manufacturing device for micro-through holes based on laser-induced micro-jet is applied, comprising the following steps:

[0030] The laser output end of the laser processing component emits a laser beam to the area to be processed of the sample, forming an annular hole in the area to be processed. The paraxial water jet mechanism forms a uniform water film on the surface of the area to be processed. The water film forms a laser-induced microjet at the laser focus in the annular hole. The laser-induced microjet discharges the ablation products and bubbles in the annular hole.

[0031] The present invention discloses the following technical effects:

[0032] 1. Based on the high-speed, high-pressure and stable characteristics of laser-induced microjet, suspended bubbles, debris and other ablation products in the micro-through-hole processing process are discharged in real time, avoiding defects such as recast layer and microcracks on the side walls and entrances of the holes, improving the micro-through-hole processing quality, laser energy utilization and processing efficiency, and achieving the technical effect of high-efficiency and high-quality laser processing of micro-through-holes of brittle and hard materials in one step.

[0033] 2. A uniform thin water film is formed on the surface of the sample through the paraxial water jet mechanism to achieve the conditions for the asymmetric collapse of laser-induced cavitation bubbles, effectively reduce the thermal effect and prevent the loss and scattering of the laser by the liquid, ensuring the stable occurrence of laser microjet.

[0034] 3. The present invention combines the method of spatial shaping of laser beams and adopts a light spatial modulator to realize functions such as shaping, beam splitting, and free shape customization, thereby realizing parallel microhole processing and free microhole pattern design, effectively improving the processing efficiency of through-hole arrays, and solving the problems of low degree of freedom and single pattern in microhole processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0036] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0037] Figure 2 Schematic diagram of sample processing;

[0038] Figure 3 This is the working principle diagram of water jet;

[0039] Figure 4 This is an electron microscope photo of a cross-shaped micro-through hole;

[0040] Figure 5 This is an electron microscope photo of a triangular micro-through hole;

[0041] Figure 6 This is an electron microscope photo of a square micro-through hole;

[0042] Figure 7 This is an electron microscope photo of a circular micro-through hole;

[0043] Figure 8 This is an electron microscope photo of the micro-through hole entrance of Example 2;

[0044] Fig. 9 This is an electron microscope photo of the micro-through hole outlet of Example 2;

[0045] Fig.10 This is an electron microscope photograph of a cross section of a micro-through hole in Example 2;

[0046] Fig.11 for Fig.10 A local magnified electron microscope photo;

[0047] Among them, 1. femtosecond laser; 2. CCD industrial camera; 3. beam expander; 4. imaging lens; 5. semi-transparent and semi-reflective mirror; 6. positioning light hole; 7. focusing objective lens; 8. plano-convex lens; 9. second reflector; 10. laser beam; 11. first reflector; 12. optical spatial modulator; 13. nozzle fixing rod; 14. nozzle positioning nut; 15. water jet nozzle; 16. pipe clamp; 17. water pipe; 18. workpiece clamping head; 19. electric control rotating head of fixture; 2 0. First drain valve; 21. Filter tank; 22. Second drain valve; 23. Circulation pump; 24. Water reservoir; 25. Filter element; 26. Pneumatic platform; 27. X-direction crawler; 28. Y-direction crawler; 29. ​​Z-direction translation stage; 30. Lighting; 31. Operating room; 32. Sample; 33. Vacuum cleaner; 34. Computer; 35. Water jet; 36. Annular hole; 37. Water film; 38. Suspended bubbles; 39. Debris; 40. Laser-induced microjet. DETAILED DESCRIPTION

[0048] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0049] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0050] The embodiment of the present invention provides a one-step micro-through hole manufacturing device based on laser-induced microfluidics, comprising:

[0051] A laser processing assembly, wherein the laser output end thereof corresponds to the area to be processed of the sample 32;

[0052] The paraxial water jet mechanism is used to form a uniform water film 37 on the surface of the area to be processed. When the laser processing component emits a laser beam 10 to the area to be processed, an annular hole 36 is formed in the area to be processed, and the water film 37 forms a laser-induced microjet 40 at the laser focus in the annular hole 36.

[0053] In this embodiment, it also includes:

[0054] Pneumatic platform 26, a three-axis mobile platform is arranged on the pneumatic platform 26, and the three-axis mobile platform includes an X-direction crawler 27, a Y-direction crawler 28 and a Z-direction displacement stage 29, which are used for movement in the X, Y and Z directions respectively; the travel of the X-direction crawler 27 and the Y-direction crawler 28 is 0cm-35cm, and the positioning accuracy is 5nm-50nm; the travel of the Z-direction displacement stage 29 is 0mm-40mm, and the positioning accuracy is 1nm-15nm;

[0055] The operating room 31 is arranged on a three-axis mobile platform. The sample 32 can be clamped in the operating room 31. The three-axis mobile platform is used to drive the sample 32 to move along a preset processing path. The moving speed is 1 μm / s-10 mm / s. The scanning diameter of the round hole processing is preferably more than 20 μm, and the minimum unit shape of the special-shaped hole is more than 2 μm.

[0056] The circulation mechanism has one end connected to the operating chamber 31 and the other end connected to the side-axis water jet mechanism.

[0057] In this embodiment, the pneumatic platform 26 is used to prevent the influence of small vibration on the optical path and the paraxial water jet. The pneumatic platform 26 is composed of a cylinder, a valve and other parts. By adjusting the motion trajectory of the cylinder, it can isolate external vibrations and provide stable and accurate motion control for processing.

[0058] In this embodiment, the paraxial water jet mechanism includes:

[0059] The water jet nozzle 15 is connected to the nozzle fixing rod 13 through the nozzle positioning nut 14. The water inlet end of the water jet nozzle 15 is connected to the other end of the circulation mechanism. The diameter of the water jet nozzle 15 is 0.05-0.5 mm, the flow rate is 100-1000 L / h, the vertical distance between the water jet nozzle 15 and the upper surface of the sample 32 is 5-20 mm, and the angle between the nozzle and the upper surface of the sample 3232 is 20-60°;

[0060] The nozzle fixing rod 13 is connected to the side wall of the operating room 31 through the pipe clamp 16. The pipe clamp 16 is used to adjust the height and angle of the water jet nozzle 15 relative to the sample 32. The pipe clamp 16 is composed of bolts and a pipe support. The two sections of the nozzle fixing rod 13 are fastened by bolts at both ends, so as to adjust and fix the height of the nozzle fixing rod 13. The pipe support can be rotatably set, so the angle of the nozzle fixing rod 13 can be adjusted. The model of the pipe clamp 16 can be flexibly selected according to needs, and its specific structure belongs to the prior art and will not be repeated here.

[0061] In this embodiment, the circulation mechanism includes:

[0062] The filter pool 21 is arranged on the pneumatic platform 26 and communicated with the operating room 31. A first drain valve 20 is arranged at the communicating place. A filter element 25 is arranged in the filter pool 21. The filter element 25 is replaced once every working hour.

[0063] The water reservoir 24 is connected to the filter tank 21 , and a second drain valve 22 is provided at the connection point. The water reservoir 24 is connected to the water inlet end of the water jet nozzle 15 through the water pipe 17 , and a circulation pump 23 is provided in the water reservoir 24 .

[0064] The liquid in the operating chamber 31 can flow from the operating chamber 31 into the filter tank 21 through the height difference, and then flow back to the water reservoir 24 after being filtered by the filter element 25, and then be supplied to the water jet nozzle 15 again. The flow rate of the circulation pump 23 can be adjusted steplessly and displayed on the dial of the pump body.

[0065] In this embodiment, the water reservoir 24 is filled with a microjet solution, the microjet solution uses distilled water as a solvent, and one or more of glycerol, n-butanol or acetone as a solute, and the concentration of the microjet solution is 0.5-1 mol / L.

[0066] In this embodiment, it also includes:

[0067] Two workpiece clamping heads 18 are connected to the inner wall of the operating room 31 through the clamp electric control rotating head 19. The two workpiece clamping heads 18 can clamp 4-10 inch thin, brittle and hard sheet samples 32. The sample 32 can be glass, ceramics, or crystals. Before micro-through hole processing, the surface of the sample 32 is polished to control its surface roughness to be less than 1 μm and its thickness to be less than 2 mm. Before and after micro-through hole processing, the sample 32 is ultrasonically cleaned and dried in ethanol and deionized water; one end of the clamp electric control rotating head 19 is connected to the workpiece clamping head 18, and the other end is installed on the inner wall of the operating room 31 through a bearing. The clamp electric control rotating head 19 and the workpiece clamping head 18 are driven to rotate by a motor, so that the sample 32 can be processed in a certain curved surface range. The clamp electric control rotating head 19 can adjust the angle range to -15° to 15°. In this embodiment, the processing angle is 0°.

[0068] The lighting lamp 30 is disposed at the bottom of the operating room 31 and corresponds to the sample 32 .

[0069] In this embodiment, the laser processing assembly includes:

[0070] A femtosecond laser 1, wherein the wavelength of the femtosecond laser 1 is 1030nm in the infrared band, or 515nm in the visible band with its double frequency, or 343nm in the ultraviolet band with its triple frequency, the pulse width is preferably within 300fs, the single pulse energy required for processing is preferably above 5μJ, and the laser repetition frequency is 1kHz-100kHz; a laser beam 10 is emitted from the femtosecond laser 1, and passes through a beam expander 3, a semi-transparent and semi-reflective mirror 5, a positioning light hole 6, a first reflector 11, an optical spatial modulator 12, a second reflector 9, and a plano-convex lens 8 in sequence to enter a focusing objective lens 7, the top of an operating chamber 31 is open, and the focusing objective lens 7 is located at the top of the operating chamber 31 and faces the area to be processed; wherein the optical spatial light modulator is a reflective phase-type digitally driven liquid crystal modulator, with a resolution of 2048×2048 or more, a refresh frequency of 60Hz or more, a phase correction and a gamma correction function, and a water cooling device. The magnification of the focusing objective lens 7 is preferably 4-100 times, and the numerical aperture is 0.1-1.45.

[0071] CCD industrial camera 2, the laser beam 10 reflects part of the laser through the semi-transparent and semi-reflective mirror 5, and enters the CCD industrial camera 2 through the imaging lens 4. The CCD industrial camera 2 corresponds to the area to be processed.

[0072] The optical spatial modulator 12 can realize customizable phase modulation and beam shaping. The CCD industrial camera 2 can observe the beam distribution diagram loaded by the optical spatial modulator 12 and the real-time processing status of the sample 32. Each lens component and the focusing objective lens 7 can be switched according to the processing requirements. The laser energy, wavelength, repetition frequency, pulse width, and pulse sequence can all be set.

[0073] In this embodiment, the focusing lens 7 is perpendicularly oriented toward the sample 32 , and the water jet nozzle 15 is disposed paraxially on one side of the focusing lens 7 .

[0074] In this embodiment, it also includes:

[0075] The vacuum cleaner 33 is disposed on the pneumatic platform 26 , and the suction end of the vacuum cleaner 33 is disposed on the other side of the focusing lens 7 .

[0076] In this embodiment, a computer 34 is also included, and the computer 34 is electrically connected to the femtosecond laser 1, the vacuum cleaner 33, the three-axis mobile platform and the fixture electric control rotating head 19. The computer 34 can control the start and stop of each device and control parameters.

[0077] The present invention also provides a one-step manufacturing method for micro-through holes based on laser-induced micro-jet, using a one-step manufacturing device for micro-through holes based on laser-induced micro-jet, comprising the following steps:

[0078] S1: Install each device according to the above embodiment, debug the device, inject distilled water into the water reservoir 24, turn on the vacuum cleaner 33, turn on the lighting lamp 30, install the focusing lens 7, and prepare to start processing;

[0079] S2: Take the sample 32 and install it horizontally in the two workpiece clamping heads 18, write a program for the three-axis mobile platform and execute it to determine the focus position. The specific implementation path is: control the three-axis mobile platform to move at a constant speed at a certain distance, and change the vertical height each time it moves, so that a series of micro-groove arrays can be ablated on the surface of the sample 32; use a CCD camera to shoot each laser direct writing process, and determine the narrowest position of the ablation width through measurement as the experimental focus height;

[0080] S3: Take the sample 32 and install it horizontally in the two workpiece clamping heads 18, open the first drain valve 20, the second drain valve 22, and the water jet nozzle 15, and form a uniform water film 37 on the upper surface of the to-be-processed area of ​​the sample 32;

[0081] S4: Turn on the femtosecond laser 1, and the laser beam 10 is emitted to the area to be processed. The three-axis moving platform drives the sample 32 to move along the preset path, and an annular hole 36 is formed in the area to be processed. Under the action of the water film 37, the laser-induced microjet 40 occurs inside the annular hole 36; specifically, due to the use of energy exceeding the cavitation generation threshold, the laser-induced cavitation bubble is generated at the focus of the laser after refraction through the liquid surface in the hole. Under the constraint of the wall, the cavitation bubble collapses asymmetrically under the action of the pressure difference and forms a laser-induced microjet 40 oblique to the hole wall. The force of the laser-induced microjet 40 causes the liquid to form a local rapid flow. The water flow moves tangentially under the action of the processing path and discharges the ablation products such as suspended bubbles 38 and debris 39 in the annular hole 36. The laser-induced microjet 40 moves synchronously with the laser focus position; the laser-induced microjet 40 vacuum cleaner 33 discharges the water mist generated by the processing.

[0082] Example 1

[0083] The above-mentioned embodiment is applied to realize the processing of special-shaped through holes with customizable free entrance shapes on single-crystal silicon wafers.

[0084] The sample 32 is a 6-inch silicon wafer with a thickness of 500 microns. The wafer is polished on both sides, wiped with alcohol and blown dry before being placed horizontally in two workpiece clamping heads 18;

[0085] The flow rate of the circulation pump 23 is set to 600L / h, the angle between the water jet nozzle 15 and the surface of the sample 32 is about 45°, a 0.1mm diameter nozzle opening is used, and the distance between the nozzle opening and the upper surface of the sample 32 is about 10mm. The water film 37 formed by the water jet 35 is controlled to cover the laser focus area in a stable area.

[0086] The three-axis mobile platform and laser processing components are used to scan and process the micro-through holes in the shapes of cross, triangle, square and circle in sequence. The scanning speed is 1mm / s, and the acceleration during the start and stop of the scanning process is 50mm / s. 2 , set the rounded corner transition at the turning point of the pattern and set the number of scans to 150 times.

[0087] According to the images taken by the CCD camera, the ablation products such as suspended bubbles 38 and debris 39 during the entire processing process can be discharged in real time, and the side walls and entrances of the finally formed holes do not have defects such as recast layers and microcracks.

[0088] Example 2

[0089] The difference between this embodiment and embodiment 1 is that a preset computational hologram is loaded through the spatial light modulator software to split a single Gaussian beam into 9 identical Gaussian beams, which are arranged in an array with the same spacing, and the light field distribution is detected by a CCD camera and parameters are adjusted as needed.

[0090] According to the images taken by the CCD camera, the ablation products such as suspended bubbles 38 and debris 39 during the entire processing process can be discharged in real time, and the side walls and entrances of the finally formed holes do not have defects such as recast layers and microcracks.

[0091] In the description of the present invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0092] The embodiments described above are only descriptions of the preferred modes of the present invention, and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary technicians in this field should all fall within the protection scope determined by the claims of the present invention.

Claims

1. A one-step micro-through hole manufacturing device based on laser-induced microfluidics, characterized in that: include: A laser processing component, the laser output end of which corresponds to the area to be processed of the sample (32); The paraxial water jet mechanism is used to form a uniform water film (37) on the surface of the area to be processed. When the laser processing component emits a laser beam (10) to the area to be processed, an annular hole (36) is formed in the area to be processed, and the water film (37) forms a laser-induced microjet (40) at the laser focus in the annular hole (36).

2. The one-step micro-through hole manufacturing device based on laser-induced microfluidics according to claim 1 is characterized in that: Also includes: A pneumatic platform (26), on which a three-axis movable platform is disposed; An operating chamber (31) is disposed on the three-axis movable platform, and the sample (32) can be clamped in the operating chamber (31); A circulation mechanism has one end connected to the operating chamber (31) and the other end connected to the side-axis water jet mechanism.

3. The one-step micro-through hole manufacturing device based on laser-induced microfluidics according to claim 2 is characterized in that: The paraxial water jet mechanism comprises: A water jet nozzle (15) is connected to the nozzle fixing rod (13) via a nozzle positioning nut (14), and a water inlet end of the water jet nozzle (15) is connected to the other end of the circulation mechanism; A pipe clamp (16), wherein the nozzle fixing rod (13) is connected to the side wall of the operating chamber (31) via the pipe clamp (16), and the pipe clamp (16) is used to adjust the height and angle of the water jet nozzle (15) relative to the sample (32).

4. The one-step micro-through hole manufacturing device based on laser-induced microfluidics according to claim 3 is characterized in that: The circulation mechanism comprises: A filter tank (21) is arranged on the pneumatic platform (26) and is connected to the operating room (31), a first drain valve (20) is arranged at the connection point, and a filter element (25) is arranged in the filter tank (21); A water reservoir (24) is connected to the filter tank (21), a second drain valve (22) is provided at the connection point, the water reservoir (24) is connected to the water inlet end of the water jet nozzle (15), and a circulation pump (23) is provided in the water reservoir (24).

5. The one-step micro-through hole manufacturing device based on laser-induced microfluidics according to claim 4, characterized in that: The water reservoir (24) is filled with a microjet solution, wherein the microjet solution uses distilled water as a solvent and one or more of glycerol, n-butanol or acetone as a solute, and the concentration of the microjet solution is 0.5-1 mol / L.

6. The one-step micro-through hole manufacturing device based on laser-induced microfluidics according to claim 3, characterized in that: Also includes: Two workpiece clamping heads (18) are connected to the inner wall of the operating chamber (31) via a fixture electric control rotating head (19), and the two workpiece clamping heads (18) are capable of clamping the sample (32); An illuminating lamp (30) is arranged at the bottom of the operating room (31) and corresponds to the sample (32).

7. The one-step micro-through hole manufacturing device based on laser-induced microfluidics according to claim 6, characterized in that: The laser processing assembly comprises: A femtosecond laser (1), a laser beam (10) is emitted from the femtosecond laser (1), passes through a beam expander (3), a semi-transparent semi-reflecting mirror (5), a positioning light hole (6), a first reflector (11), an optical spatial modulator (12), a second reflector (9), and a plano-convex lens (8), and enters a focusing lens (7); the top of the operating chamber (31) is open, and the focusing lens (7) is located at the top of the operating chamber (31) and faces the area to be processed; A CCD industrial camera (2), wherein a laser beam (10) reflects part of the laser beam through a semi-transparent and semi-reflective mirror (5) and enters the CCD industrial camera (2) through an imaging lens (4), and the CCD industrial camera (2) corresponds to the area to be processed.

8. The one-step micro-through-hole manufacturing device based on laser-induced microfluidics according to claim 7, characterized in that: The focusing objective lens (7) is vertically oriented toward the sample (32), and the water jet nozzle (15) is arranged paraxially on one side of the focusing objective lens (7).

9. The one-step micro-through hole manufacturing device based on laser-induced microfluidics according to claim 8, characterized in that: Also includes: A dust collector (33) is arranged on the pneumatic platform (26), and a suction end of the dust collector (33) is arranged on the other side of the focusing objective lens (7).

10. A one-step method for manufacturing micro-through holes based on laser-induced microfluidics, characterized in that: The one-step micro-through hole manufacturing device based on laser-induced microfluidics according to any one of claims 1 to 9 comprises the following steps: The laser output end of the laser processing component emits a laser beam (10) toward a region to be processed of a sample (32), forming an annular hole (36) in the region to be processed. A paraxial water jet mechanism forms a uniform water film (37) on the surface of the region to be processed. The water film (37) forms a laser-induced microjet (40) at a laser focus in the annular hole (36). The laser-induced microjet (40) discharges ablation products and bubbles in the annular hole (36).

Images