Double-polishing machine disc repairing wheel control system and method for repairing polishing cloth

Abstract

The invention discloses a double-polishing machine disc repairing wheel control system and method for polishing cloth repairing, relates to the technical field of data processing, and aims to evaluate the state of disc repairing wheel polishing cloth based on the surface data of the disc repairing wheel polishing cloth and evaluate the flatness of the disc repairing wheel of the double-polishing machine based on the appearance data of the disc repairing wheel of the double-polishing machine. And performing double-polishing machine operation pressure adjustment evaluation based on the disc repairing wheel polishing cloth state evaluation result, the double-polishing machine disc repairing wheel flatness evaluation result and the historical polishing pressure data, and performing operation pressure adjustment control on the double-polishing machine disc repairing wheel according to the double-polishing machine operation pressure adjustment evaluation result. The control accuracy of the disc repairing wheel of the double-polishing machine is improved, a better repairing effect on polishing cloth is achieved, the service life of the polishing cloth is prolonged, and better stability is achieved for the production process.

Description

Technical Field

[0001] The present application belongs to the field of data processing, and more specifically relates to a control system and method for a double-polishing machine repairing wheel used for repairing polishing cloths. Background Art

[0002] Sapphire is a crystal with high hardness and stable chemical properties. After being cut, the surface of the wafer may have scratches, depressions or microscopic uneven areas. With the continuous improvement of the quality of sapphire wafer-related products, the requirements for its surface quality are becoming increasingly stringent. These defects need to be removed by polishing to make the surface of the sapphire wafer reach nano-level smoothness to ensure its subsequent light transmission efficiency and performance stability in optical devices. In terms of polishing technology, the main methods are single-sided polishing and double-sided polishing. For the flatness and curvature indicators required for sapphire wafers, sapphire wafers processed by double-sided polishing equipment usually perform better. This is because during the double-sided polishing process, the wafer can rotate and revolve over a large range, thereby ensuring The flatness of the polished surface of the sapphire wafer. At the same time, double-sided polishing of the sapphire wafer also achieves balanced force on the front and back sides and synchronous polishing, further optimizing the curvature index of the sapphire. The polishing cloth is the core element of surface quality control in the sapphire wafer polishing process. The uniformity of the polishing cloth is very important for maintaining the flatness and curvature of the sapphire wafer surface. In the current sapphire wafer production process, the double-polishing machine repair wheel is inaccurate during pressure control due to the presence of the polishing cloth, which reduces the service life of the polishing cloth and the stability of the sapphire wafer production process. In order to solve the problems raised by this background technology, the present application designs a double-polishing machine repair wheel control system and method for polishing cloth repair. Summary of the invention

[0003] In view of the above-mentioned technical deficiencies, the present application proposes a control system and method for a double-polishing machine repair wheel for repairing polishing cloth.

[0004] In order to solve the above technical problems, the present invention adopts the following technical solution: The present application provides a control method for a double-polishing machine repairing wheel for polishing cloth repair, which comprises the following specific steps: S1, obtaining the surface data of the polishing cloth of the repairing wheel, the appearance data of the repairing wheel of the double polishing machine and the historical polishing pressure data; S2, evaluating the state of the repairing wheel polishing cloth based on the surface data of the repairing wheel polishing cloth, judging the qualified state of the repairing wheel polishing cloth according to the evaluation result of the state of the repairing wheel polishing cloth, if it is judged to be qualified, then ending, if it is judged to be unqualified, then proceeding to S3; S3, evaluating the flatness of the double-polishing machine repair wheel based on the double-polishing machine repair wheel appearance data, judging the qualified state of the double-polishing machine repair wheel flatness through the evaluation result of the double-polishing machine repair wheel flatness, if it is judged to be qualified, then end, if it is judged to be unqualified, then proceed to S4; S4. Based on the evaluation results of the polishing cloth state of the repair wheel, the flatness evaluation results of the repair wheel of the double-polishing machine and the historical polishing pressure data, an evaluation is performed on the operating pressure adjustment of the double-polishing machine, and the operating pressure adjustment control of the repair wheel of the double-polishing machine is performed according to the evaluation results of the operating pressure adjustment of the double-polishing machine.

[0005] It should be noted that, as a preferred technical solution of a control system and method for a double-polishing machine repairing wheel for repairing a polishing cloth, the specific steps of S1 are: S11, acquiring surface data of the repairing wheel polishing cloth by a 3D scanner, wherein the surface data of the repairing wheel polishing cloth includes data on the number of wrinkles on the surface of the repairing wheel polishing cloth and data on the curvature radius of each wrinkle; S12, obtaining the appearance data of the double-polishing machine repair wheel by using a laser scanner and a laser thickness gauge, wherein the appearance data of the double-polishing machine repair wheel includes the thickness data of the double-polishing machine repair wheel, the surface measurement area data of the double-polishing machine repair wheel and the position height data of each measurement point; S13, obtaining historical polishing pressure data through a storage component; S14. Storing the collected data in a storage component for use in the analysis process.

[0006] It should be noted that, as a preferred technical solution of a control system and method for a double-polishing machine repairing wheel for repairing a polishing cloth, the specific steps of S2 are: S21, obtaining data on the number of wrinkles on the surface of the polishing cloth of the repairing wheel and data on the curvature radius of each wrinkle; S22, importing the data of the number of wrinkles on the surface of the repairing wheel polishing cloth and the data of the curvature radius of each wrinkle into the repairing wheel polishing cloth state evaluation value calculation formula to calculate the repairing wheel polishing cloth state evaluation value, wherein the repairing wheel polishing cloth state evaluation value calculation formula is: , where i is the number of wrinkles on the polishing cloth surface, i is any one of 1 to N, F is the pressure generated by the reference wrinkle, Ri is the radius of curvature at the i-th wrinkle of the polishing cloth, v is the Poisson's ratio of the polishing cloth, and E is the elastic modulus of the polishing cloth. It should be noted that in this formula The state of the repairing wheel polishing cloth is evaluated by analyzing the number of wrinkles on the polishing cloth surface, the reference wrinkle pressure, the wrinkle curvature radius, the Poisson's ratio and the elastic modulus. The number of wrinkles reflects the deformation ability and durability of the polishing cloth, the wrinkle curvature radius reveals the degree of bending of the polishing cloth surface, and the Poisson's ratio is used to infer the deformation characteristics of the polishing cloth under different stress conditions. A comprehensive analysis of the number of wrinkles on the polishing cloth surface, the reference wrinkle pressure, the wrinkle curvature radius, the Poisson's ratio and the elastic modulus can be used to more comprehensively analyze the state of the repairing wheel polishing cloth in actual application. In this formula, the data on the number of wrinkles on the surface of the repairing wheel polishing cloth and the data on the curvature radius of each wrinkle are obtained as follows: the surface of the polishing cloth is scanned by a 3D scanner to obtain the surface data of the polishing cloth, the surface data of the polishing cloth is used for three-dimensional modeling, the number of wrinkles on the surface of the polishing cloth is identified, and the fold curvature radius is obtained by fitting a surface with the polishing cloth surface data.

[0007] It should be noted that, as the preferred technical solution of the control system and method of the repairing wheel of a double-polishing machine for repairing polishing cloth, the method of judging the qualified state of the repairing wheel polishing cloth through the repairing wheel polishing cloth state evaluation result includes the following steps: comparing the repairing wheel polishing cloth state evaluation value with the set repairing wheel polishing cloth state evaluation value threshold; if the repairing wheel polishing cloth state evaluation value is greater than the repairing wheel polishing cloth state evaluation value threshold, then the repairing wheel polishing cloth is judged to be qualified; if the repairing wheel polishing cloth state evaluation value is less than or equal to the repairing wheel polishing cloth state evaluation value threshold, then the repairing wheel polishing cloth is judged to be unqualified.

[0008] It should be noted that, as a preferred technical solution of a control system and method for a double-polishing machine repairing wheel for repairing a polishing cloth, S3 includes the following specific steps: S31, obtaining the thickness data of the double polishing machine repair wheel, the measurement area data and the height data of each measurement point; S32, importing the thickness data of the double-polishing machine repair wheel, the measurement area data and the height data of each measurement point into the double-polishing machine repair wheel flatness evaluation value calculation formula to calculate the double-polishing machine repair wheel flatness evaluation value, wherein the flatness evaluation value calculation formula is: , where S is the measured area data of the double polishing machine repair wheel, P h (x) is the height change of each measuring point of the double polishing machine repair wheel, P H is the thickness of the double polishing machine repair wheel. It should be noted that in this formula The average value of the height change at each measuring point on the surface of the double-polished machine repair wheel is used to represent the flatness of the double-polished machine repair wheel surface. At the same time, the influence of the thickness of the double-polished machine repair wheel on the flatness evaluation value of the double-polished machine repair wheel is also integrated. The double-polished machine repair wheel thickness data, measurement area data and height data of each measuring point in this formula are obtained as follows: a laser scanner is used to emit a laser beam to illuminate the surface of the double-polished machine repair wheel to obtain a double-polished machine repair wheel surface height change diagram, and the double-polished machine repair wheel surface measurement area data and height data of each measuring point are obtained from the double-polished machine repair wheel surface height change diagram. The double-polished machine repair wheel thickness data is obtained by a laser thickness gauge.

[0009] It should be noted that, as the preferred technical solution of the double-polishing machine repair wheel control system and method for polishing cloth repair, the method of judging the qualified flatness status of the double-polishing machine repair wheel through the double-polishing machine repair wheel flatness evaluation result includes the following steps: comparing the double-polishing machine repair wheel flatness evaluation value with the set double-polishing machine repair wheel flatness evaluation value threshold; if the double-polishing machine repair wheel flatness evaluation value is greater than the set double-polishing machine repair wheel flatness evaluation value threshold, then the double-polishing machine repair wheel flatness is judged to be qualified; if the double-polishing machine repair wheel flatness evaluation value is less than or equal to the set double-polishing machine repair wheel flatness evaluation value threshold, then the double-polishing machine repair wheel flatness is judged to be unqualified.

[0010] It should be noted that, as a preferred technical solution of a control system and method for a double-polishing machine repairing wheel for repairing a polishing cloth, S4 specifically includes the following steps: S41, obtaining the polishing cloth state evaluation value data of the repairing wheel, the flatness evaluation value data of the repairing wheel of the double polishing machine, and the historical polishing pressure data including the historical polishing initial pressure data and the historical polishing time data; S42, importing the polishing cloth state evaluation value data of the repairing wheel, the flatness evaluation value data of the repairing wheel of the double polishing machine, and the historical polishing pressure data into the double polishing machine operation pressure adjustment value calculation formula to calculate the double polishing machine operation pressure adjustment value, wherein the double polishing machine operation pressure adjustment value calculation formula is: ,in, is the historical polishing initial pressure data, For reference, the polishing cloth condition evaluation value of the repairing wheel is To evaluate the fluctuation value of the polishing cloth condition of the reference repairing wheel, For reference to the evaluation value of the flatness of the double polishing machine repair wheel, is the reference value of the fluctuation of the flatness evaluation of the repair wheel of the double polishing machine, a is the weight of the evaluation value of the polishing cloth state of the repair wheel, and it should be noted that in this formula The comprehensive evaluation data of the polishing cloth state of the repair wheel and the flatness evaluation data of the repair wheel of the double-polishing machine are used to analyze the influence of the polishing cloth state of the repair wheel and the flatness of the repair wheel on the operating pressure adjustment value of the double-polishing machine repair wheel.

[0011] A double-polishing machine repair wheel control system for polishing cloth repair, which is implemented based on the above-mentioned double-polishing machine repair wheel control method for polishing cloth repair, and specifically includes a double-polishing machine information acquisition module, a polishing cloth state analysis module, a repair wheel state analysis module and an operation pressure adjustment module, wherein the double-polishing machine information acquisition module is used to obtain the repair wheel polishing cloth surface data, the double-polishing machine repair wheel appearance data and the historical polishing pressure data; The polishing cloth state analysis module is used to evaluate the state of the repairing wheel polishing cloth based on the surface data of the repairing wheel polishing cloth, and to judge the qualified state of the repairing wheel polishing cloth according to the evaluation result of the state of the repairing wheel polishing cloth; The repair wheel state analysis module is used to evaluate the flatness of the double polishing machine repair wheel based on the double polishing machine repair wheel appearance data, and judge the qualified state of the double polishing machine repair wheel flatness through the double polishing machine repair wheel flatness evaluation result; The operating pressure adjustment module is used to evaluate the operating pressure adjustment of the double-polishing machine according to the polishing cloth status evaluation result of the repair wheel, the flatness evaluation result of the double-polishing machine repair wheel and the historical polishing pressure data, and to adjust and control the operating pressure of the double-polishing machine repair wheel according to the operating pressure adjustment evaluation result of the double-polishing machine.

[0012] An electronic device comprises: a processor and a memory, wherein the memory stores a computer program that can be called by the processor; The processor executes the above-mentioned double-polishing machine repair wheel control method for polishing cloth repair by calling the computer program stored in the memory.

[0013] A computer-readable storage medium stores instructions. When the instructions are executed on a computer, the computer is enabled to execute the above-mentioned control method for the repairing wheel of a double-polishing machine for repairing a polishing cloth.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows: the present invention obtains the surface data of the repair wheel polishing cloth, the appearance data of the repair wheel of the double-polishing machine, and the historical polishing pressure data, evaluates the state of the repair wheel polishing cloth based on the surface data of the repair wheel polishing cloth, judges the qualified state of the repair wheel polishing cloth according to the evaluation result of the state of the repair wheel polishing cloth, evaluates the flatness of the repair wheel of the double-polishing machine based on the appearance data of the repair wheel of the double-polishing machine, judges the qualified state of the flatness of the repair wheel of the double-polishing machine according to the evaluation result of the flatness of the repair wheel of the double-polishing machine, evaluates the adjustment of the operating pressure of the double-polishing machine based on the evaluation result of the polishing cloth state of the repair wheel, the evaluation result of the flatness of the repair wheel of the double-polishing machine, and the historical polishing pressure data, and controls the operating pressure of the repair wheel of the double-polishing machine according to the evaluation result of the operating pressure adjustment of the double-polishing machine, and improves the accuracy of the pressure control of the repair wheel of the double-polishing machine by adjusting and controlling the operating pressure of the double-polishing machine, thereby achieving a better repair effect on the polishing cloth, extending the service life of the polishing cloth, and achieving better stability for the production process. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Other features, objects and advantages of the present application will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings; Figure 1 This is a schematic diagram of the overall process of the double-polishing machine repair wheel control method used for polishing cloth repair in this application.

[0016] Figure 2 This is a schematic flow chart of step S1 of the double-polishing machine repair wheel control method for repairing the polishing cloth in this application.

[0017] Figure 3 This is a schematic diagram of the overall framework of a control system for a double-polishing machine repairing wheel used for polishing cloth repair in this application.

[0018] Figure 4 Implement a scene graph for this application. DETAILED DESCRIPTION

[0019] In order to better understand the present application, various aspects of the present application will be described in more detail with reference to the accompanying drawings. It should be understood that these detailed descriptions are only descriptions of exemplary embodiments of the present application and do not limit the scope of the present application in any way. Throughout the specification, the same reference numerals refer to the same elements. The expression "and / or" includes any and all combinations of one or more of the associated listed items.

[0020] In the accompanying drawings, the size, dimensions and shape of the elements have been slightly adjusted for ease of explanation. The accompanying drawings are only examples and are not strictly drawn to scale. As used herein, the terms "substantially", "approximately" and similar terms are used as terms to indicate approximation, not as terms to indicate degree, and are intended to illustrate the inherent deviations in measured or calculated values ​​that will be recognized by those of ordinary skill in the art. In addition, in the present application, the order in which the steps are processed does not necessarily represent the order in which these processes occur in actual operation, unless otherwise clearly defined or can be derived from the context. It should also be understood that expressions such as "including", "including", "having", "including" and / or "including" are open rather than closed expressions in this specification, which indicate the presence of the stated features, elements and / or components, but do not exclude the presence of one or more other features, elements, components and / or combinations thereof. In addition, when expressions such as "at least one of..." appear after a list of listed features, they modify the entire list of features, rather than just modifying the individual elements in the list. In addition, when describing the embodiments of the present application, "may" is used to represent "one or more embodiments of the present application". Furthermore, the term "exemplary" is intended to refer to an example or illustration. Unless otherwise specified, all words used herein (including engineering terms and scientific and technological terms) have the same meaning as those commonly understood by those of ordinary skill in the art to which this application belongs. It should also be understood that, unless otherwise clearly stated in this application, words defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an idealized or overly formal sense.

[0021] In order to solve the technical problems raised in the background technology, this application provides a preferred embodiment: please refer to Figure 4 As shown, the implementation scenario of this embodiment is demonstrated. The implementation scenario is: data is collected from the information collection terminal, the data is transmitted to the data processing terminal, and the data processing terminal performs analysis and calculation to obtain the double-throwing machine operating pressure adjustment value.

[0022] The specific contents of this embodiment are: like Figure 1 As shown, a control system and method for a double polishing machine repairing wheel for repairing a polishing cloth includes the following specific steps: S1, obtaining the surface data of the polishing cloth of the repairing wheel, the appearance data of the repairing wheel of the double polishing machine and the historical polishing pressure data; like Figure 2 As shown, in this embodiment, the specific steps of S1 are: S11, acquiring surface data of the repairing wheel polishing cloth by a 3D scanner, wherein the surface data of the repairing wheel polishing cloth includes data on the number of wrinkles on the surface of the repairing wheel polishing cloth and data on the curvature radius of each wrinkle; S12, obtaining the appearance data of the double-polishing machine repair wheel by using a laser scanner and a laser thickness gauge, wherein the appearance data of the double-polishing machine repair wheel includes the thickness data of the double-polishing machine repair wheel, the surface measurement area data of the double-polishing machine repair wheel and the position height data of each measurement point; S13, obtaining historical polishing pressure data through a storage component; S14. Storing the collected data in a storage component for use in the analysis process.

[0023] S2, evaluating the state of the repairing wheel polishing cloth based on the surface data of the repairing wheel polishing cloth, judging the qualified state of the repairing wheel polishing cloth according to the evaluation result of the state of the repairing wheel polishing cloth, if it is judged to be qualified, then ending, if it is judged to be unqualified, then proceeding to S3; The specific steps of S2 are: S21, obtaining data on the number of wrinkles on the surface of the polishing cloth of the repairing wheel and data on the curvature radius of each wrinkle; S22, importing the data of the number of wrinkles on the surface of the repairing wheel polishing cloth and the data of the curvature radius of each wrinkle into the repairing wheel polishing cloth state evaluation value calculation formula to calculate the repairing wheel polishing cloth state evaluation value, wherein the repairing wheel polishing cloth state evaluation value calculation formula is: , where i is the number of wrinkles on the polishing cloth surface, i is any one of 1 to N, F is the pressure generated by the reference wrinkle, Ri is the radius of curvature at the i-th wrinkle of the polishing cloth, v is the Poisson's ratio of the polishing cloth, and E is the elastic modulus of the polishing cloth. It should be noted that in this formula The state of the repairing wheel polishing cloth is evaluated by analyzing the number of wrinkles on the polishing cloth surface, the reference wrinkle pressure, the wrinkle curvature radius, the Poisson's ratio and the elastic modulus. The number of wrinkles reflects the deformation ability and durability of the polishing cloth, the wrinkle curvature radius reveals the degree of bending of the polishing cloth surface, and the Poisson's ratio is used to infer the deformation characteristics of the polishing cloth under different stress conditions. A comprehensive analysis of the number of wrinkles on the polishing cloth surface, the reference wrinkle pressure, the wrinkle curvature radius, the Poisson's ratio and the elastic modulus can be used to more comprehensively analyze the state of the repairing wheel polishing cloth in actual application. In this formula, the data on the number of wrinkles on the surface of the repairing wheel polishing cloth and the data on the curvature radius of each wrinkle are obtained as follows: the surface of the polishing cloth is scanned by a 3D scanner to obtain the surface data of the polishing cloth, the surface data of the polishing cloth is used for three-dimensional modeling, the number of wrinkles on the surface of the polishing cloth is identified, and the fold curvature radius is obtained by fitting a surface with the polishing cloth surface data.

[0024] In this embodiment, judging the qualified state of the repairing wheel polishing cloth through the repairing wheel polishing cloth state evaluation result in S2 includes the following steps: comparing the repairing wheel polishing cloth state evaluation value with the set repairing wheel polishing cloth state evaluation value threshold; if the repairing wheel polishing cloth state evaluation value is greater than the repairing wheel polishing cloth state evaluation value threshold, then the repairing wheel polishing cloth is judged to be qualified; if the repairing wheel polishing cloth state evaluation value is less than or equal to the repairing wheel polishing cloth state evaluation value threshold, then the repairing wheel polishing cloth is judged to be unqualified.

[0025] S3, evaluating the flatness of the double-polishing machine repair wheel based on the double-polishing machine repair wheel appearance data, judging the qualified state of the double-polishing machine repair wheel flatness through the evaluation result of the double-polishing machine repair wheel flatness, if it is judged to be qualified, then end, if it is judged to be unqualified, then proceed to S4; In this embodiment, S3 includes the following specific steps: S31, obtaining the thickness data of the double polishing machine repair wheel, the measurement area data and the height data of each measurement point; S32, importing the thickness data of the double-polishing machine repair wheel, the measurement area data and the height data of each measurement point into the double-polishing machine repair wheel flatness evaluation value calculation formula to calculate the double-polishing machine repair wheel flatness evaluation value, wherein the flatness evaluation value calculation formula is: , where S is the measured area data of the double polishing machine repair wheel, P h (x) is the height change of each measuring point of the double polishing machine repair wheel, P H is the thickness of the double polishing machine repair wheel. It should be noted that in this formula The average value of the height change at each measuring point on the surface of the double-polished machine repair wheel is used to represent the flatness of the double-polished machine repair wheel surface. At the same time, the influence of the thickness of the double-polished machine repair wheel on the flatness evaluation value of the double-polished machine repair wheel is also integrated. The double-polished machine repair wheel thickness data, measurement area data and height data of each measuring point in this formula are obtained as follows: a laser scanner is used to emit a laser beam to illuminate the surface of the double-polished machine repair wheel to obtain a double-polished machine repair wheel surface height change diagram, and the double-polished machine repair wheel surface measurement area data and height data of each measuring point are obtained from the double-polished machine repair wheel surface height change diagram. The double-polished machine repair wheel thickness data is obtained by a laser thickness gauge.

[0026] In this embodiment, judging the qualified state of the double-polishing machine repair wheel flatness through the double-polishing machine repair wheel flatness evaluation result in S2 includes the following steps: comparing the double-polishing machine repair wheel flatness evaluation value with the set double-polishing machine repair wheel flatness evaluation value threshold; if the double-polishing machine repair wheel flatness evaluation value is greater than the set double-polishing machine repair wheel flatness evaluation value threshold, then the double-polishing machine repair wheel flatness is judged to be qualified; if the double-polishing machine repair wheel flatness evaluation value is less than or equal to the set double-polishing machine repair wheel flatness evaluation value threshold, then the double-polishing machine repair wheel flatness is judged to be unqualified.

[0027] S4. Based on the evaluation results of the polishing cloth state of the repair wheel, the flatness evaluation results of the repair wheel of the double-polishing machine and the historical polishing pressure data, an evaluation is performed on the operating pressure adjustment of the double-polishing machine, and the operating pressure adjustment control of the repair wheel of the double-polishing machine is performed according to the evaluation results of the operating pressure adjustment of the double-polishing machine.

[0028] In this embodiment, S4 specifically includes the following steps: S41, obtaining the polishing cloth state evaluation value data of the repairing wheel, the flatness evaluation value data of the repairing wheel of the double polishing machine, and the historical polishing pressure data including the historical polishing initial pressure data and the historical polishing time data; S42, importing the polishing cloth state evaluation value data of the repairing wheel, the flatness evaluation value data of the repairing wheel of the double polishing machine, and the historical polishing pressure data into the double polishing machine operation pressure adjustment value calculation formula to calculate the double polishing machine operation pressure adjustment value, wherein the double polishing machine operation pressure adjustment value calculation formula is: ,in, is the historical polishing initial pressure data, For reference, the polishing cloth condition evaluation value of the repairing wheel is To evaluate the fluctuation value of the polishing cloth condition of the reference repairing wheel, For reference to the evaluation value of the flatness of the double polishing machine repair wheel, is the reference value of the fluctuation of the flatness evaluation of the repair wheel of the double polishing machine, a is the weight of the evaluation value of the polishing cloth state of the repair wheel, and it should be noted that in this formula The comprehensive evaluation data of the polishing cloth state of the repair wheel and the flatness evaluation data of the repair wheel of the double-polishing machine are used to analyze the influence of the polishing cloth state of the repair wheel and the flatness of the repair wheel on the operating pressure adjustment value of the repair wheel of the double-polishing machine. In this formula, an example is given to illustrate the value of F. For example, when polishing the workpiece, F is 11N, and the pressure setting value before adjustment is 10N, then the pressure setting value after adjustment should be 11N.

[0029] It should be noted here that the setting parameters in this embodiment (such as weights, thresholds, Poisson's ratio and elastic modulus, etc.) need to be set by technical personnel in this field according to relevant experiments. The specific experimental method is: obtaining the surface data of the polishing cloth of the repair wheel, and bringing it into each step of this embodiment to evaluate the state of the polishing cloth of the repair wheel. At the same time, obtaining the appearance data of the repair wheel of the double-polishing machine, and bringing it into each step of this embodiment to evaluate the flatness of the repair wheel of the double-polishing machine. The evaluation results of the state of the polishing cloth of the repair wheel, the flatness evaluation results of the repair wheel of the double-polishing machine, and the historical polishing pressure data are imported into the fitting software for continuous fitting, and the values ​​of the parameters of the operating pressure adjustment value of the double-polishing machine (such as weights, thresholds, Poisson's ratio and elastic modulus, etc.) with the highest degree of conformity are output.

[0030] According to the above implementation content, this embodiment has the following advantages over the prior art: this embodiment obtains surface data of the repair wheel polishing cloth, appearance data of the repair wheel of the double-polishing machine, and historical polishing pressure data, and evaluates the state of the repair wheel polishing cloth based on the surface data of the repair wheel polishing cloth, and judges the qualified state of the repair wheel polishing cloth according to the evaluation result of the state of the repair wheel polishing cloth, and evaluates the flatness of the repair wheel of the double-polishing machine based on the appearance data of the repair wheel of the double-polishing machine, and judges the qualified state of the flatness of the repair wheel of the double-polishing machine according to the evaluation result of the flatness of the repair wheel of the double-polishing machine, and evaluates the adjustment of the operating pressure of the double-polishing machine based on the evaluation result of the polishing cloth state of the repair wheel, the evaluation result of the flatness of the repair wheel of the double-polishing machine, and historical polishing pressure data, and controls the operating pressure of the repair wheel of the double-polishing machine according to the evaluation result of the operating pressure adjustment of the double-polishing machine, and improves the accuracy of the pressure control of the repair wheel of the double-polishing machine by adjusting and controlling the operating pressure of the double-polishing machine, thereby achieving a better repair effect on the polishing cloth, extending the service life of the polishing cloth, and achieving better stability for the production process.

[0031] like Figure 3 As shown, the present embodiment also provides a double-polishing machine repair wheel control system for polishing cloth repair, which is implemented based on the above double-polishing machine repair wheel control method for polishing cloth repair, and specifically includes a double-polishing machine information acquisition module, a polishing cloth state analysis module, a repair wheel state analysis module and an operation pressure adjustment module, wherein the double-polishing machine information acquisition module is used to acquire the surface data of the repair wheel polishing cloth, the appearance data of the double-polishing machine repair wheel and the historical polishing pressure data; the polishing cloth state analysis module is used to evaluate the state of the repair wheel polishing cloth based on the surface data of the repair wheel polishing cloth, and through the repair wheel polishing cloth surface data, the repair wheel state analysis module is used to evaluate the state of the repair wheel polishing cloth The polishing cloth state evaluation result of the disc wheel is used to judge the qualified state of the repair wheel polishing cloth; the repair wheel state analysis module is used to evaluate the flatness of the double-polishing machine repair wheel based on the double-polishing machine repair wheel appearance data, and judge the qualified state of the double-polishing machine repair wheel flatness evaluation result through the double-polishing machine repair wheel flatness evaluation result; the operating pressure adjustment module is used to evaluate the double-polishing machine operating pressure adjustment according to the polishing cloth state evaluation result of the disc wheel, the double-polishing machine repair wheel flatness evaluation result and the historical polishing pressure data, and adjust the operating pressure of the double-polishing machine repair wheel according to the double-polishing machine operating pressure adjustment evaluation result.

[0032] The specific steps for realizing corresponding functions of each unit module in the control system of the double-polishing machine repairing wheel for repairing polishing cloth of the present application can be referred to the steps in the embodiment of the control method of the double-polishing machine repairing wheel for repairing polishing cloth mentioned above, and will not be repeated here.

[0033] This embodiment further provides an electronic device, comprising: a processor and a memory, wherein the memory stores a computer program that can be called by the processor; The processor executes the above-mentioned double-polishing machine repair wheel control method for polishing cloth repair by calling the computer program stored in the memory.

[0034] The memory can be used to store instructions, programs, codes, code sets or instruction sets. The memory 310 may include a program storage area and a data storage area, wherein the program storage area may store instructions for implementing an operating system, instructions for at least one function, and instructions for implementing the double-polishing machine repair wheel control method for polishing cloth repair provided in the above embodiment, etc.; the data storage area may store data involved in the double-polishing machine repair wheel control method for polishing cloth repair provided in the above embodiment, etc.

[0035] The processor may include one or more processing cores. The processor executes various functions and processes data of the present application by running or executing instructions, programs, code sets or instruction sets stored in the memory, calling data stored in the memory. The processor may be at least one of an application-specific integrated circuit (ASIC), a digital signal processor (DSP), a digital signal processing device (DSPD), a programmable logic device (PLD), a field programmable gate array (FPGA), a central processing unit (CPU), a controller, a microcontroller and a microprocessor. It is understandable that for different devices, the electronic device used to implement the above-mentioned processor function may also be other, and the embodiments of the present application are not specifically limited.

[0036] A communication bus may also be included, and the communication bus may include a path to transmit information between the above components. The communication bus may be a PCI (Peripheral Component Interconnect) bus or an EISA (Extended Industry Standard Architecture) bus, etc. The communication bus may be divided into an address bus, a data bus, a control bus, etc.

[0037] This embodiment also provides a computer-readable storage medium storing instructions. When the instructions are executed on a computer, the computer executes the above-mentioned double-polishing machine repair wheel control method for repairing a polishing cloth.

[0038] For example, the computer readable storage medium can be a read-only memory, a random access memory, a read-only CD-ROM, a magnetic tape, a floppy disk, an optical data storage device, and the like.

[0039] The above embodiments can be implemented in whole or in part by software, hardware, firmware or any other combination. When implemented by software, the above embodiments can be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions or computer programs. When a computer instruction or computer program is loaded or executed on a computer, a process or function according to an embodiment of the present application is generated in whole or in part. The computer can be a general-purpose computer, a special-purpose computer, a computer network or other programmable device. Computer instructions can be stored in a computer-readable storage medium, or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, computer instructions can be transmitted from one website site, computer, server or data center to another website site, computer, server or data center through a wired network or / and a wireless network. The computer-readable storage medium can be any available medium that a computer can access or a data storage device such as a server or data center that contains one or more available media sets. The available medium can be a magnetic medium (e.g., a floppy disk, a hard disk, a tape), an optical medium (e.g., a DVD), or a semiconductor medium. The semiconductor medium can be a solid-state hard disk.

[0040] The terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not expressly listed, or also includes elements inherent to such process, method, article, or apparatus.

[0041] The above description is only a preferred embodiment of the present application and an explanation of the technical principles used. Those skilled in the art should understand that the scope of application involved in the present application is not limited to the technical solution formed by a specific combination of the above technical features, but should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the aforementioned application concept. For example, the above features are replaced with (but not limited to) technical features with similar functions applied in the present application.

Claims

1. A control method for a double polishing machine repairing wheel for repairing polishing cloth, characterized in that: include: S1, obtaining the surface data of the polishing cloth of the repairing wheel, the appearance data of the repairing wheel of the double polishing machine and the historical polishing pressure data; S2, evaluating the state of the repairing wheel polishing cloth based on the surface data of the repairing wheel polishing cloth, judging the qualified state of the repairing wheel polishing cloth according to the evaluation result of the state of the repairing wheel polishing cloth, if it is judged to be qualified, then ending, if it is judged to be unqualified, then proceeding to S3; S3, evaluating the flatness of the double-polishing machine repair wheel based on the double-polishing machine repair wheel appearance data, judging the qualified state of the double-polishing machine repair wheel flatness through the evaluation result of the double-polishing machine repair wheel flatness, if it is judged to be qualified, then end, if it is judged to be unqualified, then proceed to S4; S4. According to the evaluation results of the polishing cloth state of the repair wheel, the flatness evaluation results of the repair wheel of the double-polishing machine and the historical polishing pressure data, an evaluation is performed on the operating pressure adjustment of the double-polishing machine, and the operating pressure adjustment control of the repair wheel of the double-polishing machine is performed according to the evaluation results of the operating pressure adjustment of the double-polishing machine.

2. The control method for the repairing wheel of a double polishing machine for repairing polishing cloth according to claim 1, characterized in that: The specific steps of S2 are: S21, obtaining data on the number of wrinkles on the surface of the polishing cloth of the repairing wheel and data on the curvature radius of each wrinkle; S22, importing the data of the number of wrinkles on the surface of the repairing wheel polishing cloth and the data of the curvature radius of each wrinkle into the repairing wheel polishing cloth state evaluation value calculation formula to calculate the repairing wheel polishing cloth state evaluation value, wherein the repairing wheel polishing cloth state evaluation value calculation formula is: , where i is the number of wrinkles on the surface of the polishing cloth, i is any item from 1 to N, F is the pressure generated by the reference wrinkle, Ri is the radius of curvature at the i-th wrinkle of the polishing cloth, v is the Poisson's ratio of the polishing cloth, and E is the elastic modulus of the polishing cloth.

3. The method for controlling the repairing wheel of a double polishing machine for repairing polishing cloth according to claim 2, characterized in that: The method of judging the qualified state of the repairing wheel polishing cloth by the repairing wheel polishing cloth state evaluation result comprises the following steps: comparing the repairing wheel polishing cloth state evaluation value with the set repairing wheel polishing cloth state evaluation value threshold; if the repairing wheel polishing cloth state evaluation value is greater than the repairing wheel polishing cloth state evaluation value threshold, then the repairing wheel polishing cloth is judged to be qualified; if the repairing wheel polishing cloth state evaluation value is less than or equal to the repairing wheel polishing cloth state evaluation value threshold, then the repairing wheel polishing cloth is judged to be unqualified.

4. The method for controlling the repairing wheel of a double polishing machine for repairing polishing cloth according to claim 3, characterized in that: The S3 includes the following specific steps: S31, obtaining the thickness data of the double polishing machine repair wheel, the measurement area data and the height data of each measurement point; S32, obtaining a flatness evaluation value of the double-polishing machine repair wheel from the double-polishing machine repair wheel thickness data, the measurement area data and the position height data of each measurement point.

5. The method for controlling the repairing wheel of a double polishing machine for repairing polishing cloth according to claim 4, characterized in that: The method of judging the qualified state of the double-polishing machine repair wheel flatness through the double-polishing machine repair wheel flatness evaluation result includes the following steps: comparing the double-polishing machine repair wheel flatness evaluation value with the set double-polishing machine repair wheel flatness evaluation value threshold; if the double-polishing machine repair wheel flatness evaluation value is greater than the set double-polishing machine repair wheel flatness evaluation value threshold, then the double-polishing machine repair wheel flatness is judged to be qualified; if the double-polishing machine repair wheel flatness evaluation value is less than or equal to the set double-polishing machine repair wheel flatness evaluation value threshold, then the double-polishing machine repair wheel flatness is judged to be unqualified.

6. The method for controlling the repairing wheel of a double polishing machine for repairing polishing cloth according to claim 5, characterized in that: The S4 specifically comprises the following steps: S41, obtaining the polishing cloth state evaluation value data of the repairing wheel, the flatness evaluation value data of the repairing wheel of the double polishing machine, and the historical polishing pressure data including the historical polishing initial pressure data and the historical polishing time data; S42, importing the polishing cloth state evaluation value data of the repairing wheel, the flatness evaluation value data of the repairing wheel of the double polishing machine, and the historical polishing pressure data into the double polishing machine operation pressure adjustment value calculation formula to calculate the double polishing machine operation pressure adjustment value, wherein the double polishing machine operation pressure adjustment value calculation formula is: ,in, is the historical polishing initial pressure data, For reference, the polishing cloth condition evaluation value of the repairing wheel is To evaluate the fluctuation value of the polishing cloth condition of the reference repairing wheel, For reference to the evaluation value of the flatness of the double polishing machine repair wheel, It is the fluctuation value of the flatness assessment of the repair wheel of the double-polishing machine for reference, and a is the weight of the proportion of the assessment value of the polishing cloth state of the repair wheel.

7. A control system for a double-polishing machine repairing wheel for repairing a polishing cloth, which is implemented based on the control method for a double-polishing machine repairing wheel for repairing a polishing cloth according to any one of claims 1 to 6, characterized in that: It specifically includes a double polishing machine information acquisition module, a polishing cloth state analysis module, a repair wheel state analysis module and an operation pressure adjustment module, wherein the double polishing machine information acquisition module is used to obtain the surface data of the repair wheel polishing cloth, the double polishing machine repair wheel appearance data and the historical polishing pressure data; The polishing cloth state analysis module is used to evaluate the state of the repairing wheel polishing cloth based on the surface data of the repairing wheel polishing cloth, and to judge the qualified state of the repairing wheel polishing cloth according to the evaluation result of the state of the repairing wheel polishing cloth; The repair wheel state analysis module is used to evaluate the flatness of the double polishing machine repair wheel based on the double polishing machine repair wheel appearance data, and judge the qualified state of the double polishing machine repair wheel flatness through the double polishing machine repair wheel flatness evaluation result; The operating pressure adjustment module is used to evaluate the operating pressure adjustment of the double-polishing machine according to the polishing cloth status evaluation result of the repair wheel, the flatness evaluation result of the double-polishing machine repair wheel and the historical polishing pressure data, and to adjust and control the operating pressure of the double-polishing machine repair wheel according to the operating pressure adjustment evaluation result of the double-polishing machine.

8. An electronic device, comprising: A processor and a memory, wherein the memory stores a computer program that can be called by the processor; It is characterized in that the processor executes the double-polishing machine repair wheel control method for polishing cloth repair as described in any one of claims 1 to 6 by calling the computer program stored in the memory.

9. A computer-readable storage medium, characterized in that: Instructions are stored, and when the instructions are run on a computer, the computer is caused to execute the double-polishing machine repair wheel control method for polishing cloth repair as described in any one of claims 1 to 6.

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