Control parameter calculation device, control parameter calculation method, and storage medium

Abstract

A control parameter calculation device that calculates a control parameter of a fluid control device that controls a fluid includes: a correlation data storage unit that stores correlation data indicating a correlation between a reference control parameter of the fluid control device as a reference and a reference response signal output using the reference control parameter; a target response signal acquisition unit that acquires a target response signal that is output using a target control parameter of the fluid control device that is different from the reference fluid control device; a correlation control parameter calculation unit that acquires the correlation data and the target response signal, and calculates a correlation control parameter corresponding to the target response signal in the fluid control device as a reference by using the correlation data; and a target control parameter adjustment amount calculation unit that calculates an adjustment amount of the target control parameter on the basis of the correlation control parameter and the reference control parameter.

Description

Technical Field

[0001] The present invention relates to a control parameter calculation device, a control parameter calculation method and a control parameter calculation program. Background Art

[0002] In the past, a fluid control device for controlling a fluid flowing in a flow channel has been proposed. Such a fluid control device, for example, as shown in Patent Document 1, includes: a control valve disposed in the flow channel; a flow sensor for measuring the flow rate of the fluid flowing in the flow channel; and a valve controller for controlling the valve based on the measured flow rate measured by the flow sensor.

[0003] In the above-mentioned fluid control device, the set flow rate of the fluid flowing in the flow channel is input to the valve controller, and the valve controller compares the set flow rate with the measured flow rate to perform PID control on the opening of the control valve. Here, in general, in PID control, control parameters such as proportional gain, integral gain and differential gain are used, and the valve controller performs PID control on the opening of the control valve based on the control parameters.

[0004] Patent Document 1: Japanese Patent Application Publication No. 2022-84110

[0005] Here, in order to make the above-mentioned fluid control device show a good response, it is necessary to set appropriate control parameters. However, since the above-mentioned fluid control device has instrument errors, even if a control parameter shows a good response in a certain fluid control device, when the same control parameter is used in other fluid control devices, there is a possibility that a good response may not be shown, for example, if overshoot or slow rise occurs. As a result, it is necessary to adjust the control parameters so that the fluid control device shows a good response. In the past, the adjustment of the control parameters was performed based on the user's experience.

[0006] However, if the control parameters are adjusted based on the user's experience, the user may adjust the control parameters multiple times depending on the user's ability, and setting the control parameters takes time. Summary of the invention

[0007] Therefore, the present invention has been made in view of the above-mentioned problems, and a main object of the present invention is to adjust the control parameters in a short time in a control parameter calculation device for calculating the control parameters of a fluid control device without relying on the user's experience.

[0008] That is, the control parameter calculation device of the present invention calculates the control parameters of the fluid control device that controls the fluid, and includes: a related data storage unit that stores related data, wherein the related data represents the correlation between a reference control parameter of a reference device and a reference response signal output using the reference control parameter, wherein the reference device is a fluid control device serving as a reference; an object response signal acquisition unit that acquires an object response signal output using the object control parameter of an object device, wherein the object device is a fluid control device different from the reference device; a related control parameter calculation unit that acquires the related data and the object response signal, and calculates the related control parameter corresponding to the object response signal in the reference device by using the related data; and an object control parameter adjustment amount calculation unit that calculates the adjustment amount of the object control parameter based on the related control parameter and the reference control parameter.

[0009] According to such a control parameter calculation device, the relevant control parameter is calculated using the relevant data, and the adjustment amount of the target control parameter is calculated based on the relevant control parameter and the reference control parameter, so that the target control parameter can be adjusted without relying on the user's experience. In addition, in the fluid control device as the target, the target control parameter is adjusted based on the calculated adjustment amount of the target control parameter, so that the target control parameter does not need to be adjusted multiple times, and the target control parameter can be adjusted more efficiently. In addition, since the adjustment amount of the object control parameter is calculated based on the relevant control parameter and the reference control parameter, it is less susceptible to the influence of the instrument errors of the reference fluid control device and the object fluid control device compared to the structure of calculating the control parameter of the object fluid control device itself. Furthermore, since the target control parameter is calculated using the data on the reference fluid control device, the data on the target fluid control device may not be required when calculating the target control parameter.

[0010] Preferably, the object response signal acquisition unit acquires a plurality of the object response signals, and the relevant control parameter calculation unit calculates one or a group of relevant control parameters based on the plurality of the object response signals.

[0011] With such a structure, since the relevant control parameter calculation unit calculates one or a group of relevant control parameters based on multiple object response signals, the accuracy of calculating the relevant control parameters can be improved compared to the case where a group of relevant control parameters is calculated based on one object response signal.

[0012] Preferably, the target control parameter adjustment amount calculation unit obtains a difference between the relevant control parameter and the reference control parameter, and sets the obtained difference as the adjustment amount of the target control parameter.

[0013] With such a configuration, since the difference between the relevant control parameter and the reference control parameter becomes the adjustment amount of the target control parameter, the target control parameter can be adjusted simply by changing the target control parameter based on the difference, and the target control parameter can be adjusted simply.

[0014] As a specific method of calculating the relevant control parameters, it can be cited that the relevant control parameter calculation unit uses a Gaussian mixture regression model to calculate the relevant control parameters according to the object response signal.

[0015] With such a structure, particularly when calculating one or a group of related control parameters based on a plurality of object response signals, the related control parameters can be calculated with high accuracy by using a Gaussian mixture regression model.

[0016] Here, since the object device has not deteriorated during the initial setting of the object control parameter, it can be considered that the change of the control parameter caused by the degradation is small. Therefore, in the object device during the initial setting, it can be considered that the difference in the control parameter between the object device and the reference device mainly depends on the instrument error between the object device and the reference device. Therefore, preferably, the object response signal acquisition unit acquires the object response signal output using the object control parameters of the object device during initial setting, and the relevant control parameter calculation unit calculates the relevant control parameters based on the object response signal of the object device during initial setting.

[0017] With such a configuration, since the difference between the correlation control parameter and the reference control parameter can be considered to depend on the instrument error between the reference device and the target device, the adjustment amount of the target control parameter can be calculated with high accuracy.

[0018] The correlation data storage unit may store the correlation data generated using machine learning.

[0019] With such a structure, the accuracy of the relevant data can be improved by storing the relevant data generated using machine learning.

[0020] In addition, a control parameter calculation method calculates control parameters of a fluid control device that controls a fluid, wherein correlation data is stored, the correlation data indicating correlation between a baseline control parameter of a baseline device and a baseline response signal output using the baseline control parameter, the baseline device being a fluid control device serving as a baseline, an object response signal output using an object control parameter of an object device being a fluid control device different from the baseline device, the correlation data and the object response signal are obtained, and a correlation control parameter corresponding to the object response signal in the baseline device is calculated by using the correlation data, and an adjustment amount of the object control parameter is calculated based on the correlation control parameter and the baseline control parameter.

[0021] With such a structure, the same effects as those of the above-mentioned control parameter calculation device can be obtained.

[0022] Furthermore, the storage medium stores a control parameter calculation program, the control parameter calculation program being used for a fluid control device that controls a fluid, and calculating a control parameter of the fluid control device, the control parameter calculation program causing the computer to function as a correlation data storage unit, an object response signal acquisition unit, a correlation control parameter calculation unit, and an object control parameter adjustment amount calculation unit, the correlation data storage unit storing correlation data, the correlation data indicating correlation between a reference control parameter of a reference device and a reference response signal output using the reference control parameter, the reference device being a reference fluid control device, the object response signal acquisition unit acquiring an object response signal output using an object control parameter of an object device, the object device being a fluid control device different from the reference device, the correlation control parameter calculation unit acquiring the correlation data and the object response signal, and calculating a correlation control parameter corresponding to the object response signal in the reference device by using the correlation data, and the object control parameter adjustment amount calculation unit calculating an adjustment amount of the object control parameter based on the correlation control parameter and the reference control parameter.

[0023] With such a structure, the same effects as those of the above-mentioned control parameter calculation device can be obtained.

[0024] According to the present invention thus constituted, in the control parameter calculation device for calculating the control parameter of the fluid control device, the control parameter can be adjusted in a short time without relying on the user's experience. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram showing a control parameter calculation device and a fluid control device according to one embodiment of the present invention. Figure 2 It is a functional block diagram of a control parameter calculation device according to the same embodiment. Figure 3 (a) is a coordinate diagram showing the correlation between the control parameter and the response signal in the reference device of the same embodiment. Figure 3 (b) is a coordinate diagram showing the correlation between the control parameter and the response signal in the target device according to the same embodiment. DETAILED DESCRIPTION

[0026] Hereinafter, an embodiment of a control parameter calculation device for calculating control parameters of a fluid control device of the present invention will be described with reference to the accompanying drawings. In addition, for ease of understanding, the various figures shown below are sometimes appropriately omitted or exaggerated in schematic depiction. The same components are marked with the same reference numerals and the description is appropriately omitted.

[0027] like Figure 1 As shown, the control parameter calculation device 200 of the present embodiment calculates the control parameters of the fluid control device 100 that controls the fluid flowing in the flow channel.

[0028] Here, the fluid control device 100 as the object of the control parameter calculation device 200 is a so-called differential pressure mass flow controller (differential pressure MFC), such as Figure 1 As shown, it comprises: a flow channel block 110 having a plurality of internal flow channels 1R formed therein; a fluid control device 120 provided in the flow channel block 110; and a control unit 130 for controlling the fluid control device 120. Hereinafter, each part of the fluid control device 100 to which the control parameter calculation device 200 is applied will be described.

[0029] The flow channel block 110 is provided with an inlet 111 for introducing a fluid into the internal flow channel 1R and a derivation port 112 for derivation of the fluid from the internal flow channel 1R. The inlet 111 is connected to an upstream pipe H1, and an upstream pneumatic valve V1 is provided on the upstream pipe H1. In addition, the derivation port 112 is connected to a downstream pipe H2, and a downstream pneumatic valve V2 is provided on the downstream pipe H2.

[0030] The fluid control device 120 controls the fluid in the internal flow channel 1R, and includes a flow sensor 121 for measuring the flow rate of the fluid flowing in the internal flow channel 1R, and a fluid control valve 122 provided on the upstream side of the flow sensor 121. The fluid control valve 122 performs PID control on the flow rate of the fluid flowing in the internal flow channel 1R through a control unit 130 described later.

[0031] The flow sensor 121 is a differential pressure flow sensor, and includes an upstream pressure sensor 121a provided on the upstream side of a flow resistance element 123, which is a restrictor or orifice or the like provided in the internal flow passage 1R, and a downstream pressure sensor 121b provided on the downstream side of the flow resistance element 123. The flow resistance element 123 is a restrictor or orifice or the like provided in the internal flow passage 1R. The flow calculation unit 131 of the control unit 130 described later calculates the flow rate of the fluid flowing in the internal flow passage 1R using the upstream pressure P1 of the flow resistance element 123 detected by the upstream pressure sensor 121a and the downstream pressure P2 of the flow resistance element 123 detected by the downstream pressure sensor 121b.

[0032] The fluid control valve 122 is provided on the upstream side of the flow sensor 121. Specifically, the fluid control valve 122 controls the flow rate by moving the valve element forward and backward relative to the valve seat using a piezoelectric actuator. The fluid control valve 122 is controlled by the valve control unit 132 of the control unit 130.

[0033] The control unit 130 includes a flow rate calculation unit 131 that calculates the flow rate of the fluid flowing in the internal flow path 1R based on the upstream pressure P1 and the downstream pressure P2, and a valve control unit 132 that controls the fluid control valve 122 based on the flow rate calculated by the flow rate calculation unit 131. The control unit 130 is a so-called computer including a CPU, a memory, an A / D and D / A converter, and an input / output unit, and functions as the flow rate calculation unit 131, the valve control unit 132, and the like by executing a flow rate control program stored in the memory to make various devices cooperate.

[0034] The flow rate calculation unit 131 calculates the flow rate of the fluid flowing in the internal flow path 1R using an existing flow rate calculation formula. The existing flow rate calculation formula may be, for example, a flow rate calculation formula that calculates the flow rate by multiplying the difference between the square of the upstream pressure P1 and the square of the downstream pressure P2 by a predetermined coefficient, but other flow rate calculation formulas may also be used.

[0035] The valve control unit 132 obtains a set flow rate, and performs PID control based on a deviation between the calculated flow rate and the set flow rate, thereby controlling the flow rate of the fluid flowing in the internal flow channel 1R. The valve control unit 132 stores control parameters such as proportional gain, integral gain, or differential gain, and performs PID control using the control parameters.

[0036] Next, the structure of the control parameter calculation device 200 will be described.

[0037] The control parameter calculation device 200 calculates the control parameters used by the valve control unit 132, and is a so-called computer having a CPU, a memory, an A / D and D / A converter, and an input / output unit. By executing the flow control program stored in the memory, various devices cooperate to achieve the desired flow control. Figure 2 As shown, the EMBODIMENT 1 at least functions as a correlation data storage unit 210 , a target response signal acquisition unit 240 , a correlation control parameter calculation unit 250 , and a target control parameter adjustment amount calculation unit 260 .

[0038] The correlation data storage unit 210 stores correlation data indicating the correlation between the reference control parameters of the fluid control device (hereinafter referred to as the reference device) as a reference and the reference response signal outputted using the reference control parameters. In the present embodiment, the reference device refers to a fluid control device whose control parameters have not changed or whose changes are within the allowable range compared to the control parameters at the time of initial setting. Here, the reference control parameters are control parameters for the valve control unit 132 of the reference device to perform PID control. The reference response signal corresponds to the reference control parameters through the correlation data. Specifically, it is a response signal such as the response time until the flow rate measured by the flow sensor 121 reaches a predetermined flow rate, the overshoot amount of the flow rate measured by the flow sensor 121 exceeding the set flow rate, or the time required until the flow rate measured by the flow sensor 121 stabilizes, that is, the hunting amount, when the valve control unit 132 of the reference device performs PID control using the reference control parameters. In addition, in the present embodiment, the correlation data makes the reference control parameters correspond to the reference response signal one by one. In other words, if the reference control parameters are determined, the reference response signal is determined based on the correlation data.

[0039] Here, the valve control unit 132 of the reference device performs PID control on the flow rate of the fluid flowing in the internal flow channel 1R using the reference control parameter, and the reference control parameter in this case is correlated with the reference response signal, thereby producing correlation data. Specifically, the valve control unit 132 of the reference device performs PID control using the reference control parameter. In addition, the control parameter calculation device 200 obtains a response waveform based on the flow rate measured by the flow sensor 121, obtains a reference response signal based on the response waveform, and correlates the reference control parameter at this time with the reference response signal. By performing the above-mentioned operation on all the reference control parameters within the predetermined range, all the control parameters within the predetermined range are correlated with the reference response signal, thereby producing correlation data. The produced correlation data is stored in the correlation data storage unit 210.

[0040] The object response signal acquisition unit 240 acquires an object response signal outputted using an object control parameter of a fluid control device (hereinafter referred to as an object device) different from the reference device. Here, the object control parameter is a control parameter for the valve control unit 132 of the object device to perform PID control. The object response signal is a response signal such as a response time, an overshoot, or an oscillation amount when the valve control unit 132 of the object device performs PID control using the object control parameter.

[0041] In this embodiment, in order for the object response signal acquisition unit 240 to acquire the object response signal, the object control parameter acquisition unit 220 acquires the object control parameter, the valve control unit 132 of the object device performs PID control based on the object control parameter, and the object response signal calculation unit 230 acquires a response waveform based on the flow rate measured by the flow sensor 121 at this time, and calculates the object response signal under the response waveform. In addition, the object response signal acquisition unit 240 acquires the object response signal calculated by the object response signal calculation unit 230.

[0042] The relevant control parameter calculation unit 250 calculates the relevant control parameter by using the relevant data, and the relevant control parameter is the control parameter of the reference device corresponding to the object response signal. Specifically, the relevant control parameter is the reference control parameter assuming that the reference device outputs the object response signal, and the relevant control parameter calculation unit 250 calculates the relevant control parameter according to the object response signal by using the relevant data. In this embodiment, the relevant data used by the relevant control parameter calculation unit 250 is, for example, a Gaussian mixture regression model, but is not limited thereto.

[0043] In this embodiment, the relevant control parameter calculation unit 250 calculates a set of relevant control parameters based on multiple object response signals. Specifically, the object response signal acquisition unit 240 acquires multiple object response signals. Here, the multiple object response signals are, for example, at least two of the response time, overshoot, and oscillation amount. Moreover, the relevant control parameter calculation unit 250 acquires the above multiple object response signals and calculates a set of relevant control parameters including proportional gain P and integral gain I using relevant data.

[0044] In addition, in the present embodiment, the relevant control parameter calculated by the relevant control parameter calculation unit 250 is calculated based on the object response signal of the object device at the initial setting when the object control parameter is initially set. In the present embodiment, the initial setting refers to setting the object control parameter from the time when the object device is manufactured to the time when it is first set in the flow channel. Specifically, the object response signal acquisition unit 240 acquires the object response signal of the object device at the initial setting. Furthermore, the relevant control parameter calculation unit 250 acquires the object response signal of the object device at the initial setting and calculates the relevant control parameter using the relevant data.

[0045] The target control parameter adjustment amount calculation unit 260 calculates the target control parameter adjustment amount based on the relevant control parameter and the reference control parameter. Specifically, the target control parameter adjustment amount calculation unit 260 obtains the difference between the relevant control parameter and the reference control parameter and sets the difference as the target control parameter adjustment amount.

[0046] (Calculation method of control parameters) Next, refer to Figure 3A control parameter calculation method for calculating a control parameter using the control parameter calculation device 200 of the present embodiment will be described.

[0047] Figure 3 (a) is a coordinate diagram showing the correlation between the reference control parameter and the reference response signal in the reference device. Figure 3 (a) is a coordinate diagram of control parameters with the horizontal axis being the proportional gain P and the vertical axis being the integral gain I. Figure 3 In (a), the index of the reference response signal is represented by a contour line in which the region of the reference control parameter that outputs the same reference response signal is represented by the same line.

[0048] Here, the index of the reference response signal is, for example, a value evaluated by assigning a score to a combination of an overshoot amount and a response time, and the more ideal the index of the reference response signal is, the higher the evaluation value is. Figure 3 In (a), the more areas are surrounded by contour lines, the more ideal the reference response signal is, and the reference control parameter corresponding to the most ideal reference response signal becomes the optimal value of the reference control parameter. The optimal value of the reference control parameter referred to here is, for example, the reference control parameter when the physical quantity of the reference response signal such as response time, overshoot or oscillation amount is the minimum value.

[0049] also, Figure 3 (b) is a coordinate diagram showing an example of the correlation between the object control parameter and the object response signal in the object device. Figure 3 (b) and Figure 3 (a) is a coordinate diagram of control parameters with the horizontal axis being the proportional gain P and the vertical axis being the integral gain I. Figure 3 In (b), Figure 3 (a) Similarly, the index of the object response signal is represented by a contour line in which the region of the object control parameter that outputs the same object response signal is represented by the same line.

[0050] exist Figure 3 In (b), the distribution shape of the coordinate graph of the target device representing the region of the target control parameter and the index of the target response signal mainly depends on the degradation of the target device. In particular, if it is a target device at the time of initial setting, it can be considered that the distribution shape of the coordinate graph of the target device is roughly the same between devices. That is, in the case of the target device at the time of initial setting, if Figure 3 As shown in (b), the distribution shape of the coordinate diagram of the object is Figure 3 The distribution shapes of the coordinate diagram of the reference device shown in (a) are roughly the same, but due to the instrument error between the target device and the reference device, the proportional gain P and integral gain I of the target device are misaligned with the proportional gain P and integral gain I of the reference device.

[0051] Regarding the control parameter calculation device 200 of this embodiment, in particular, in the target device during initial setting, the adjustment amount of the target control parameter is calculated by using only the relevant data in the reference device without creating the relevant data of the target device, by utilizing the difference between the coordinate diagram of the target device and the coordinate diagram of the reference device caused only by the instrument error. Specifically, the calculation of the adjustment amount of the target control parameter is as follows.

[0052] The object control parameter acquisition unit 220 acquires the object control parameter of the object device. The object device for which the object control parameter is acquired is the object device at the time of initial setting. In addition, the object control parameter acquired by the object control parameter acquisition unit 220 is the optimal value of the reference control parameter. In addition, the object control parameter acquired by the object control parameter acquisition unit 220 is not limited to the optimal value of the reference control parameter, and may be other values.

[0053] The valve control unit 132 of the object performs PID control based on the object control parameter, and the object response signal calculation unit 230 obtains a response waveform according to the flow rate measured by the flow sensor 121 at this time and calculates the object response signal. Figure 3 As shown in (b), the object response signal is a response signal of the object when the valve control unit 132 of the object performs PID control based on the optimal value of the reference control parameter. In addition, the object response signal acquisition unit 240 acquires the object response signal calculated by the object response signal calculation unit 230. Here, the object response signal acquisition unit 240 acquires a plurality of object response signals such as the response time and the overshoot amount.

[0054] The relevant control parameter calculation unit 250 uses the relevant data stored in the relevant data storage unit 210 to calculate the relevant control parameters according to the object response signal obtained by the object response signal acquisition unit 240. In this embodiment, the relevant control parameter calculation unit 250 obtains multiple object response signals and uses a Gaussian mixture regression model, such as Figure 3 As shown in (a), a set of related control parameters consisting of proportional gain P and integral gain I are calculated.

[0055] The object control parameter adjustment amount calculation unit 260 obtains the relevant data from the relevant data storage unit 210, obtains the optimal value of the reference control parameter, and obtains the relevant control parameter from the relevant control parameter calculation unit 250. Figure 3 As shown in (a) of FIG. 1 , the target control parameter adjustment amount calculation unit 260 obtains a difference between the optimal value of the relevant control parameter and the reference control parameter, and sets the obtained difference as the adjustment amount of the target control parameter.

[0056] If the adjustment amount of the object control parameter is calculated, the control parameter calculation device 200 is as follows: Figure 3As shown in (b), based on the calculated adjustment amount of the target control parameter, the optimal value of the target control parameter is calculated. Specifically, the control parameter calculation device 200 sets the value obtained by adding the adjustment amount of the target control parameter to the optimal value of the reference control parameter as the optimal value of the target control parameter. That is, Figure 3 The difference between the optimal value of the relevant control parameter in (a) and the reference control parameter corresponds to Figure 3 The difference between the optimal value of the reference control parameter in (b) and the optimal value of the target control parameter. In the present embodiment, the control parameter calculation device 200 calculates the optimal value of the target control parameter, but the optimal value of the target control parameter may be calculated by a user.

[0057] Furthermore, the optimal value of the target control parameter can be output to a display unit D such as a display. Furthermore, when the valve control unit 132 performs PID control based on the optimal value of the target control parameter, an ideal response such as a minimum value of the response time, overshoot, or oscillation is displayed. In addition to the optimal value of the target control parameter, other parameters such as the adjustment amount of the target control parameter can also be displayed on the display unit D.

[0058] (Effects of this embodiment) According to the control parameter calculation device 200 of the present embodiment, since the relevant control parameter calculation unit 250 calculates the relevant control parameter using the relevant data, and the object control parameter adjustment amount calculation unit 260 calculates the adjustment amount of the object control parameter based on the relevant control parameter and the reference control parameter, the object control parameter can be adjusted without relying on the user's experience. Moreover, in the object device, the object control parameter is adjusted based on the calculated adjustment amount of the object control parameter, so that the object control parameter does not need to be adjusted multiple times, and the object control parameter can be adjusted more efficiently. Furthermore, since the adjustment amount of the target control parameter is calculated based on the correlation control parameter and the reference control parameter, it is less susceptible to the influence of instrument errors of the reference device and the target device compared to a configuration in which the control parameter of the target device itself is calculated. Furthermore, since the object control parameter is calculated using the correlation data of the reference device, the correlation data of the target device may not be required when calculating the object control parameter.

[0059] Furthermore, since the object control parameter adjustment amount calculation unit 260 obtains the difference between the relevant control parameter and the reference control parameter and sets the obtained difference as the adjustment amount of the object control parameter, the object control parameter can be adjusted simply by changing the object control parameter based on the difference, thereby making it possible to simply adjust the object control parameter.

[0060] In addition, since the relevant control parameter calculation unit 250 in this embodiment calculates a set of relevant control parameters based on multiple object response signals, the accuracy of calculating the relevant control parameters can be improved compared to the case where a set of relevant control parameters is calculated based on one object response signal. In particular, since the relevant control parameter calculation unit 250 uses a Gaussian mixture regression model, the relevant control parameters can be calculated with high accuracy when a set of relevant control parameters is calculated based on multiple object response signals.

[0061] Moreover, since the object response signal acquisition unit 240 and the related control parameter calculation unit 250 use the object response signal of the object device during the initial setting, it can be considered that the difference between the related control parameters and the reference control parameters is the difference caused by the instrument error between the reference device and the object device, and the adjustment amount of the object control parameter can be calculated with high precision.

[0062] (Other embodiments) In addition, the present invention is not limited to the above-mentioned embodiment.

[0063] In the present embodiment, the fluid control device 100 as the target of the control parameter calculation device 200 is a differential pressure MFC, but is not limited thereto and may be a so-called thermal mass flow controller, a pressure control device, or other fluid control devices.

[0064] The correlation data storage unit 210 may also store the correlation data generated by machine learning. Specifically, the control parameter calculation device 200 or a computing device different from the control parameter calculation device 200 calculates the reference response signal using the reference control parameter within a predetermined range, and calculates the correlation data by machine learning. Furthermore, the correlation data storage unit 210 stores the correlation data generated by machine learning. Thus, the accuracy of the correlation data can be improved.

[0065] In this embodiment, the object response signal acquisition unit 240 and the related control parameter calculation unit 250 use a plurality of object response signals, but a single object response signal may be used. In addition, the related control parameter calculation unit 250 calculates a set of related control parameters consisting of a proportional gain P and an integral gain I, but only at least one of the proportional gain P, the integral gain I, and the differential gain D needs to be calculated, and other control parameters may also be calculated.

[0066] In this embodiment, the object control parameter adjustment amount calculation unit 260 adjusts the control parameters of the object device when it is initially set, but it is not limited to this. For example, the object control parameter adjustment amount calculation unit 260 can also adjust the control parameters of the object device that is set in the flow channel and used for a predetermined time based on the reference control parameters and the related control parameters. In this way, the object control parameter adjustment amount calculation unit 260 can adjust the control parameters that deteriorate and change due to the use of the object device.

[0067] In this embodiment, the object control parameter adjustment amount calculation unit 260 obtains the difference between the optimal value of the relevant control parameter and the reference control parameter, and sets the difference as the adjustment amount of the object control parameter, but the present invention is not limited thereto. For example, the object control parameter adjustment amount calculation unit 260 may obtain a reference control parameter other than the optimal value of the reference control parameter, obtain the difference between the relevant control parameter and the reference control parameter, and set the difference as the adjustment amount of the object control parameter.

[0068] In addition, various modifications and combinations of the embodiments are possible within the scope not departing from the gist of the present invention. Description of Reference Numerals

[0069] 100 Fluid Control Devices 121 Flow sensor 122 Flow Control Valve 132 Valve control unit 200 Control parameter calculation device 210 Related Data Storage Department 220 Object control parameter acquisition unit 230 Object response signal calculation unit 240 Object response signal acquisition unit 250 Related control parameter calculation unit 260 object control parameter adjustment amount calculation unit.

Claims

1. A control parameter calculation device for calculating control parameters of a fluid control device for controlling a fluid, characterized in that: include: A correlation data storage unit storing correlation data indicating correlation between a reference control parameter of a reference device and a reference response signal output using the reference control parameter, the reference device being a fluid control device serving as a reference; an object response signal acquisition unit that acquires an object response signal output using an object control parameter of an object device, the object device being a fluid control device different from the reference device; a correlation control parameter calculation unit that obtains the correlation data and the object response signal, and calculates a correlation control parameter corresponding to the object response signal in the reference device by using the correlation data; as well as The target control parameter adjustment amount calculation unit calculates the adjustment amount of the target control parameter based on the correlation control parameter and the reference control parameter.

2. The control parameter calculation device according to claim 1, characterized in that: The object response signal acquisition unit acquires a plurality of the object response signals. The relevant control parameter calculation unit calculates one or a group of relevant control parameters according to a plurality of the object response signals.

3. The control parameter calculation device according to claim 1 or 2, characterized in that: The target control parameter adjustment amount calculation unit obtains a difference between the relevant control parameter and the reference control parameter, and sets the obtained difference as the adjustment amount of the target control parameter.

4. The control parameter calculation device according to any one of claims 1 to 3, characterized in that: The relevant control parameter calculation unit calculates the relevant control parameter according to the object response signal using a Gaussian mixture regression model.

5. The control parameter calculation device according to any one of claims 1 to 4, characterized in that: The object response signal acquisition unit acquires the object response signal outputted by the object control parameter of the object device at the time of initial setting in which the object control parameter is initially set. The relevant control parameter calculation unit calculates the relevant control parameter based on the object response signal of the object device during the initial setting.

6. The control parameter calculation device according to any one of claims 1 to 5, characterized in that: The correlation data storage unit stores the correlation data generated using machine learning.

7. A control parameter calculation method for calculating a control parameter of a fluid control device for controlling a fluid, characterized in that: storing correlation data, the correlation data indicating correlation between a reference control parameter of a reference device and a reference response signal outputted using the reference control parameter, the reference device being the fluid control device serving as a reference, obtaining an object response signal outputted using an object control parameter of an object device, the object device being a fluid control device different from the reference device, acquiring the correlation data and the object response signal, and calculating the correlation control parameter corresponding to the object response signal in the reference device by using the correlation data, Based on the relevant control parameter and the reference control parameter, an adjustment amount of the object control parameter is calculated.

8. A storage medium, characterized in that: A control parameter calculation program is stored, the control parameter calculation program is used for a fluid control device for controlling a fluid, and calculates control parameters of the fluid control device, the control parameter calculation program enables the computer to function as a relevant data storage unit, an object response signal acquisition unit, a relevant control parameter calculation unit, and an object control parameter adjustment amount calculation unit, The correlation data storage unit stores correlation data indicating correlation between a reference control parameter of a reference device and a reference response signal output using the reference control parameter, wherein the reference device is a fluid control device serving as a reference. The object response signal acquisition unit acquires an object response signal output using an object control parameter of an object device, wherein the object device is a fluid control device different from the reference device. The correlation control parameter calculation unit obtains the correlation data and the object response signal, and calculates the correlation control parameter corresponding to the object response signal in the reference device by using the correlation data. The target control parameter adjustment amount calculation unit calculates an adjustment amount of the target control parameter based on the correlation control parameter and the reference control parameter.

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