Cleaning head position correcting device

Abstract

The invention relates to the technical field of semiconductors, and provides a cleaning head position correcting device which comprises a correcting unit and a positioning unit. The positioning unit is arranged on the correction unit, and the positioning unit is used for positioning the correction unit relative to a reference object; a correction cavity is formed in the correction unit, and the shape of the correction cavity is matched with the outer contour of at least one part of the cleaning head; the correction cavity is used for accommodating the cleaning head when the correction unit is positioned relative to the reference object, so that at least one part of the outer contour of the cleaning head is in conformal fit with the inner wall of the correction cavity, and the position of the cleaning head is corrected. The correction device is installed on the reference object, the correction cavity structure is arranged and used for adjusting the position of the cleaning head, the correction mode is simple, and the correction precision is high.

Description

Technical Field

[0001] The invention relates to the field of semiconductor technology, and in particular to a cleaning head position correction device. Background Art

[0002] The cleanliness of the wafer surface is crucial to the semiconductor manufacturing process. The cleanliness of the wafer surface directly affects the smooth progress of subsequent semiconductor processes and the qualified rate of products.

[0003] During the semiconductor processing, due to the process itself or the transfer of wafers between adjacent processes, tiny particle contaminants often adhere to the surface of the wafer, such as metal particles, organic particles, dust particles, etc.

[0004] Therefore, the wafer surface usually needs to be cleaned according to actual needs, such as by immersion cleaning, spray cleaning, wet etching cleaning, brush cleaning, etc. For the spray or brush cleaning method, a cleaning head is usually required.

[0005] Based on the requirements of the cleaning process, some cleaning heads have high position accuracy requirements. When the cleaning head is working, it first moves from the original position to the top of the wafer, and returns to the original position after cleaning the wafer surface. However, when the machine is running for a long time, the cleaning head may cause position deviation due to factors such as vibration, which leads to position offset when returning to the original position.

[0006] The existing correction method is usually to observe the relative position of the actual cleaning head and the reference object with the naked eye, and then manually judge the position of the cleaning head for correction. This method has high uncertainty and poor accuracy in cleaning head position detection and position adjustment.

[0007] Therefore, based on the above technical problems, a cleaning head position correction device is needed to correct the position of the cleaning head. Summary of the invention

[0008] The object of the present invention is to provide a cleaning head position correction device, which is installed on a reference object and is provided with a correction cavity for correcting the position of the cleaning head. The correction method is simple and the correction accuracy is high.

[0009] The present invention provides a cleaning head position correction device, comprising: a correction unit and a positioning unit;

[0010] The positioning unit is arranged on the correction unit, and the positioning unit is used to position the correction unit relative to a reference object;

[0011] The correction unit is provided with a correction cavity, the shape of which is adapted to at least a part of the outer contour of the cleaning head;

[0012] The correction cavity is used to accommodate the cleaning head when the correction unit is positioned relative to the reference object, so that at least a portion of the outer contour of the cleaning head conforms to the inner wall of the correction cavity to correct the position of the cleaning head.

[0013] Optionally, the positioning unit includes a first positioning member and a second positioning member which are arranged on the correction unit, and a slot for inserting and cooperating with the reference object is formed between the first positioning member and the second positioning member.

[0014] Optionally, the first positioning member has a first positioning surface in the form of an arc surface, the second positioning member has a second positioning surface in the form of an arc surface, the first positioning surface and the second positioning surface are opposite and coaxially arranged, and the slot is formed between the first positioning surface and the second positioning surface.

[0015] Optionally, the inner circumference of the correction cavity is an arc surface, and the central axes of the first positioning surface and the second positioning surface are collinear with the central axis of the inner circumference of the correction cavity.

[0016] Optionally, the correction unit further includes a guide portion, which is connected to the correction cavity and is used to guide the cleaning head into the correction cavity.

[0017] Optionally, the correction cavity passes through at least one end of the correction unit along its axial direction, and the correction unit has a notch;

[0018] Along the axial direction perpendicular to the correction cavity, one end of the notch is communicated with the correction cavity, and the other end passes through the outer peripheral wall of the correction unit.

[0019] Optionally, when the correction unit includes a guide portion, the guide portion is arranged on both sides of the notch along the circumferential direction of the correction cavity.

[0020] Optionally, the guide portion includes a guide wall and a rotating member, the guide wall is connected to the edge of the correction cavity, the rotating member is rotatably mounted on the guide wall, and the rotation axis of the rotating member is parallel to the axial direction of the correction cavity.

[0021] Optionally, the positioning unit further includes a limiting structure;

[0022] When the positioning unit includes a first positioning member and a second positioning member, the limiting structure is arranged on the first positioning member and / or the second positioning member;

[0023] The limiting structure is used to limit the direction of the notch relative to the reference object after the reference object is inserted and matched with the slot.

[0024] Optionally, a side wall of the slot and / or a bottom of the slot is provided with an anti-slip layer;

[0025] And / or, the first positioning member and / or the second positioning member are provided in plurality, and form a plurality of the slots;

[0026] And / or, a hollow area is provided on the first positioning member and / or the second positioning member;

[0027] And / or, the first positioning member and / or the second positioning member are both in a fan-shaped ring shape.

[0028] In summary, the cleaning head position correction device includes: a correction unit and a positioning unit; the positioning unit is arranged on the correction unit, and the positioning unit is used to position the correction unit relative to a reference object; a correction cavity is arranged on the correction unit, and the shape of the correction cavity is adapted to at least a part of the outer contour of the cleaning head; the correction cavity is used to accommodate the cleaning head when the correction unit is positioned relative to the reference object, so that at least a part of the outer contour of the cleaning head is conformally fitted with the inner wall of the correction cavity, so as to correct the position of the cleaning head.

[0029] With such configuration, the cleaning head position correction device uses the reference object as a reference, and uses the positioning unit to position the correction unit relative to the reference object, so that the correction cavity calibrates the standard position of the cleaning head, and then the cleaning head is placed in the correction cavity, and the cleaning head and the correction cavity are conformally fitted to achieve position correction of the cleaning head. The device has a simple structure and is easy to use, which is conducive to achieving standardization of cleaning head position correction, helps to improve the accuracy of cleaning head position correction, and improves the efficiency of position correction.

[0030] The above-mentioned cleaning head position correction device calibrates the standard position of the cleaning head through the correction chamber, and realizes the position correction of the cleaning head by cooperating between the correction chamber and the cleaning head. The correction structure does not need to rely on complex detection tools, so that the structure of the entire correction device is simplified, the correction process is simplified, the correction efficiency is effectively improved, and the cost of the correction device is relatively low. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 The structure of the cleaning head position correction device according to one embodiment of the present invention is shown in FIG. Figure 1 ;

[0032] Figure 2 The structure of the cleaning head position correction device according to one embodiment of the present invention is shown in FIG. Figure 2 ;

[0033] Figure 3 The structure of the cleaning head position correction device according to one embodiment of the present invention is shown in FIG. Figure 3 ;

[0034] Figure 4It is a schematic diagram of the structure of the cleaning head position correction device according to one embodiment of the present invention after cooperating with a reference object;

[0035] Figure 5 The structure diagram of the cleaning head position correction device according to one embodiment of the present invention is as follows: Figure 1 ;

[0036] Figure 6 The structure diagram of the cleaning head position correction device according to one embodiment of the present invention is as follows: Figure 2 ;

[0037] Figure 7 for Figure 6 Schematic diagram of the local enlarged structure.

[0038] Among them, in the attached drawings:

[0039] 10-Correction unit;

[0040] 11-Correction cavity;

[0041] 12-guide portion; 121-guide wall; 122-rotating member;

[0042] 13-Gap;

[0043] 20-positioning unit; 21-first positioning member; 211-first positioning surface; 212-thick wall portion; 213-thin wall portion; 22-second positioning member; 221-second positioning surface; 23-slot; 24-limiting structure; 25-opening; 26-groove;

[0044] 30-reference object; 31-fixator;

[0045] 40-Cleaning head. DETAILED DESCRIPTION

[0046] The cleaning head position correction device proposed by the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer according to the following description. It should be noted that the accompanying drawings are all in a very simplified form and are not in precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.

[0047] As used in the present invention, the singular forms "one", "an" and "the" include plural objects, the term "or" is usually used to include the meaning of "and / or", the term "several" is usually used to include the meaning of "at least one", and the terms "at least two" or "multiple" are usually used to include the meaning of "two or more". In addition, the terms "first", "second" and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second" and "third" can explicitly or implicitly include one or at least two of the features. In addition, as used in the present invention, "installed", "connected", "connected", and one element "set" on another element should be understood in a broad sense, usually only indicating that there is a connection, coupling, matching or transmission relationship between the two elements, and the connection, coupling, matching or transmission between the two elements can be direct or indirect through an intermediate element, and cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, one element can be in any orientation such as inside, outside, above, below or on one side of another element, unless the content clearly indicates otherwise. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. In addition, directional terms such as above, below, up, down, upward, downward, left, right, etc. are used with respect to the exemplary embodiments as they are shown in the figures, with the upward or upper direction toward the top of the corresponding figure, and the downward or lower direction toward the bottom of the corresponding figure.

[0048] In this embodiment, the use of the correction device is explained by taking the brush of a disc brushing machine as a cleaning head as an example.

[0049] The cleaning head can be used to clean the surface, back side and edge of the wafer. The main body of the cleaning head is cylindrical, the end of the main body is provided with bristles made of special materials, and a high-pressure spray structure is integrated on the main body to scrub and clean the wafer.

[0050] A mechanical swing arm is installed in the film brushing machine, and the cleaning head is installed on the mechanical swing arm, and the swing arm is driven by a motor. When the machine is idle, the cleaning head will move to the top of the drain cylinder and drain the dripping liquid into the drain cylinder. The existing drain cylinder has a fixed position, so the position of the cleaning head during drainage is used as its original position. When the cleaning head is displaced due to factors such as vibration, its position will deviate relative to the drain cylinder when the cleaning head is draining. Therefore, in this embodiment, the drainage cylinder is used as a reference to correct the position of the cleaning head.

[0051] This embodiment provides a cleaning head position correction device, including: a correction unit 10 and a positioning unit 20.

[0052] The positioning unit 20 is disposed on the correction unit 10 , and the positioning unit 20 is used to position the correction unit 10 relative to a reference object 30 .

[0053] The correction unit 10 is provided with a correction cavity 11 , and the shape of the correction cavity 11 is adapted to at least a portion of the outer contour of the cleaning head 40 .

[0054] The correction cavity 11 is used to accommodate the cleaning head 40 when the correction unit 10 is positioned relative to the reference object 30, so that at least a portion of the outer contour of the cleaning head 40 conforms to the inner wall of the correction cavity 11 to correct the position of the cleaning head 40.

[0055] In this embodiment, the reference object 30 is the drainage cylinder described above, and the reference object 30 is a cylindrical thin-walled structure (the structure of the reference object 30 is detailed in Figure 4 Therefore, the positioning unit 20 can be set to adapt to the shape of the reference object 30.

[0056] In other alternative embodiments, corresponding components may be flexibly selected as references based on the actual cleaning system.

[0057] The cleaning head position correction device uses the reference object 30 as a reference, and uses the positioning unit 20 to position the correction unit 10 relative to the reference object 30, so that the correction cavity 11 calibrates the standard position of the cleaning head 40, and then the cleaning head 40 is accommodated in the correction cavity 11, and the cleaning head 40 is conformably fitted with the correction cavity 11 to achieve position correction of the cleaning head 40. The device has a simple structure and is easy to use, which is conducive to achieving standardization of cleaning head position correction, helping to improve the accuracy of cleaning head position correction, and improving the efficiency of position correction.

[0058] The above-mentioned cleaning head position correction device calibrates the standard position of the cleaning head 40 through the correction chamber 11, and realizes the position correction of the cleaning head 40 by cooperating with the correction chamber 11 and the cleaning head 40. The correction structure does not need to rely on complex detection tools, so that the structure of the entire correction device is simplified, the correction process is simplified, the correction efficiency is effectively improved, and the cost of the correction device is relatively low.

[0059] In this embodiment, the cleaning head 40 is cylindrical in shape. Therefore, the inner circumference of the correction cavity 11 is an arc surface, and the inner diameter of the inner circumference of the correction cavity 11 is the same as the outer diameter of the cleaning head 40. After the correction unit 10 is positioned, the position of the correction cavity 11 is determined, and the correction cavity 11 is used to calibrate the standard position of the cleaning head 40, that is, the position of the central axis of the correction cavity 11 is the standard position of the central axis of the cleaning head 40. When the cleaning head 40 is accommodated in the correction cavity 11, the outer circumference of the cleaning head 40 and the inner circumference of the correction cavity 11 are conformally fitted, so that the central axis of the cleaning head 40 is naturally collinear with the central axis of the correction cavity 11, and the position of the cleaning head 40 can be corrected. The correction structure is relatively simple, which helps to reduce the cost of the correction device and helps to improve the correction efficiency.

[0060] In other alternative embodiments, the shape of the correction cavity 11 can be adjusted based on the outer contour of the cleaning head 40. For example, when the cleaning head 40 is partially a rectangular parallelepiped structure, the correction cavity 11 can be set as a rectangular parallelepiped to conform to the local shape of the cleaning head 40 to achieve the purpose of position correction.

[0061] In other alternative embodiments, the correction unit 10 may also realize the positioning of the cleaning head 40 through a protruding structure thereon. For example, when the cleaning head 40 has a recessed structure, the protruding structure on the correction unit 10 conforms to the recessed structure on the cleaning head 40 to realize the position correction of the cleaning head 40. Of course, the correction unit 10 may also realize the position correction of the cleaning head 40 through other technical means, such as realizing automatic position correction through technical means such as position sensors.

[0062] Please continue to refer to Figures 1 to 4 As shown, in this embodiment, the correction cavity 11 passes through both ends of the correction unit 10 along its axial direction; the correction unit 10 has a notch 13;

[0063] Along the axial direction perpendicular to the correction cavity 11, one end of the notch 13 is connected to the correction cavity 11, and the other end passes through the outer peripheral wall of the correction unit 10. The notch 13 is arranged so that the correction unit 10 is approximately "V"-shaped or approximately "U"-shaped.

[0064] The correction chamber 11 is connected to the correction unit 10 at both axial ends in order to avoid the cleaning head 40 and other components (such as a mechanical swing arm) connected to the cleaning head 40, so as to facilitate the use of the cleaning head 40. At the same time, the through structure also provides a variety of possibilities for the cleaning head 40 to enter and exit the correction chamber 11, for example, the cleaning head 40 can enter the correction chamber 11 along the axial direction. In addition, the correction chamber 11 is provided with a notch 13 in the circumferential direction, which also provides an entrance and exit for the cleaning head 40 to enter and exit the correction chamber 11. At this time, the cleaning head 40 can enter the correction chamber 11 along the radial direction, and the correction chamber 11 forces the cleaning head 40 to conform to its inner wall, thereby achieving natural correction of the position of the cleaning head 40.

[0065] The through structures at both ends of the correction chamber 11 in the axial direction cooperate with the setting of the notch 13, so that there are multiple paths for the cleaning head 40 to enter and exit the correction chamber 11, such as entering and exiting the correction chamber 11 in the radial direction of the correction chamber 11, or entering and exiting the correction chamber 11 in the axial direction of the correction chamber 11, or entering the correction chamber 11 in the radial direction of the correction chamber 11 and exiting the correction chamber 11 in the axial direction of the correction chamber 11, or entering the correction chamber 11 in the axial direction of the correction chamber 11 and exiting the correction chamber 11 in the radial direction of the correction chamber 11. Therefore, the path for the cleaning head 40 to enter and exit the correction chamber 11 can be flexibly arranged based on actual needs to shorten the movement stroke of the cleaning head 40 and improve the position correction efficiency of the cleaning head 40.

[0066] In this embodiment, the notch 13 is provided so that a portion of the outer peripheral wall of the cleaning head 40 conforms to the inner wall of the correction cavity 11. In other alternative embodiments, the correction cavity 11 may not be provided with the notch 13, and the correction cavity 11 is a complete chamber closed along the circumferential direction, and the entire outer peripheral surface of the cleaning head 40 conforms to the inner peripheral surface of the correction cavity 11.

[0067] In this embodiment, the correction cavity 11 is provided on the correction unit 10 at both ends of the axial direction. In other alternative embodiments, the correction cavity 11 only penetrates one end of the correction unit 10 along its axial direction. The specific penetration method of the correction cavity 11 can be adaptively adjusted based on actual use requirements and interference with other components.

[0068] Please continue to refer to Figures 1 to 3 As shown, the correction unit 10 further includes a guide portion 12 , which is connected to the correction chamber 11 and is used to guide the cleaning head 40 to enter the correction chamber 11 .

[0069] In this embodiment, the guide portion 12 is adapted to the notch 13 of the correction cavity 11 and is disposed on both sides of the notch 13. Specifically, the guide portion 12 is disposed on both sides of the notch 13 along the circumferential direction of the correction cavity 11.

[0070] The function of the guide portion 12 is to guide the cleaning head 40 into the correction cavity 11 to facilitate the correction of the cleaning head 40 and reduce the friction force on the outer peripheral surface of the cleaning head 40, thereby reducing the wear of the outer peripheral surface of the cleaning head 40.

[0071] Please continue to refer to Figures 1 to 3 As shown, the guide portion 12 includes a guide wall 121 and a rotating member 122 , the guide wall 121 is connected to the edge of the correction cavity 11 , the rotating member 122 is rotatably installed on the guide wall 121 , and the rotation axis of the rotating member 122 is parallel to the axial direction of the correction cavity 11 .

[0072] In this embodiment, the rotating member 122 is a cylindrical roller structure. The rotating member 122 is installed on the guide wall 121 to rotate around its own axis. Since the rotation axis of the rotating member 122 is parallel to the axial direction of the correction cavity 11, when the cleaning head 40 passes through the notch 13 and enters the correction cavity 11, if the position of the cleaning head 40 is deviated, it will fit on the rotating member 122. As the cleaning head 40 continues to move into the correction cavity 11, the rotating member 122 adaptively rotates, so that rolling friction is formed between the outer peripheral surface of the cleaning head 40 and the rotating member 122, thereby reducing the friction force of the outer peripheral surface of the cleaning head 40, which not only guides the movement direction of the cleaning head 40, but also protects the outer peripheral surface of the cleaning head 40.

[0073] Figures 1 to 3 The structure of the rotating member 122 is clearly shown in the figure, and the installation structure of the rotating member 122 is not shown. The rotating member 122 can be set as a hollow structure, and a rotating shaft is installed inside it. The rotating shaft is rotatably installed on the guide wall 121 through an external bracket. The rotating installation structure of the rotating member 122 can adopt the existing technology, which will not be repeated here.

[0074] In other alternative embodiments, the rotating member 122 may also be in the shape of a ball, a needle roller, or a spherical roller. The specific shape of the rotating member 122 may be flexibly adjusted based on its use requirements.

[0075] In this embodiment, the guide wall 121 is a planar structure, and a groove is provided on the guide wall 121. The rotating member 122 is rotatably installed in the groove, and a part of the rotating member 122 is located outside the groove, so that the outer peripheral surface of the rotating member 122 first contacts the cleaning head 40, and does not contact the surface of the guide wall 121. In other alternative embodiments, the groove may not be provided, and the rotating member 122 may be directly installed on the surface of the guide wall 121 through a bracket.

[0076] In this embodiment, two guide walls 121 are provided, and they are connected to the notch 13 on both sides of the circumferential direction of the correction cavity 11 in a smooth transition. Seven rotating members 122 are arranged on each guide wall 121 from the direction close to the correction cavity 11 to the direction away from the correction cavity 11. The seven rotating members 122 together constitute a guide path for guiding the cleaning head 40 to enter the correction cavity 11. In other alternative embodiments, the number of rotating members 122 on each guide wall 121 can be flexibly adjusted based on its guidance requirements and arrangement density requirements. For example, the rotating members 122 can be set to three, four, five, six, etc., which are less than seven, or can be set to eight, nine, ten, etc., which are greater than seven.

[0077] In this embodiment, it is preferred that the guide path formed by each rotating member 122 on each guide wall 121 is tangent to the inner circumference of the correction chamber 11 to ensure that the rotating member 122 smoothly guides the cleaning head 40 into the correction chamber 11 .

[0078] In this embodiment, the guide wall 121 is configured as a planar structure. In other alternative embodiments, the guide wall 121 may be configured as a curved structure.

[0079] In this embodiment, the guide portion 12 is a structure in which a guide wall 121 cooperates with a rotating member 122. In other alternative embodiments, the guide portion 12 may only include the guide wall 121 (without the rotating member 122), the guide wall 121 is smoothly connected to the inner circumference of the correction cavity 11, and the guide wall 121 guides the cleaning head 40 through its smooth surface.

[0080] In this embodiment, the guide portions 12 are only provided on both sides of the notch 13 along the circumferential direction of the correction cavity 11. In other alternative embodiments, guide portions 12 may be provided at both ends of the correction cavity 11 in the axial direction, and the newly added guide portions 12 may be used to guide the cleaning head 40 to enter the correction cavity 11 in the axial direction, so that the cleaning head 40 may have multiple paths to enter the correction cavity 11.

[0081] In addition, in other alternative embodiments, the location of the guide portion 12 can also be adjusted based on the actual structure of the correction chamber 11. For example, when the correction chamber 11 is not provided with the notch 13, the correction chamber 11 is a circular structure that is closed along the circumferential direction, and the axial opening of the correction chamber 11 is a passage for the cleaning head 40 to enter and exit, so the guide portion 12 can be provided at the axial opening of the correction chamber 11, and the guide portion 12 is also provided with a tapered opening structure that expands outward, and the guide portion 12 can also include a plurality of rotating parts installed on the surface of the tapered opening.

[0082] Combine the following Figures 1 to 7 The structure of the positioning unit 20 will be described.

[0083] like Figures 1 to 3 As shown, the positioning unit 20 includes a first positioning member 21 and a second positioning member 22 which are arranged on the correction unit 10 , and a slot 23 for plugging and matching with the reference object 30 is formed between the first positioning member 21 and the second positioning member 22 .

[0084] Combination Figure 4 As shown, in this embodiment, the slot 23 is adapted to be used with a thin-walled cylindrical reference object 30. When the position correction device is installed on the reference object 30, the upper end of the reference object 30 is inserted into the slot 23 along the axial direction, so that a part of the outer wall of the reference object 30 is located inside the slot 23. Therefore, in this embodiment, the slot 23 is conformally configured as an arc-shaped groove structure adapted to the side wall of the reference object 30.

[0085] The positioning unit 20 is provided with a slot 23, so that the entire position correction device is matched with the reference object 30 by plug-in method, which is simple to use, easy to disassemble and assemble, and plug-and-play; and this matching method does not need to change the structure of the reference object 30 and does not affect the normal cleaning process.

[0086] Combination Figure 3 As shown, the first positioning member 21 has a first positioning surface 211 in the form of an arc surface, and the second positioning member 22 has a second positioning surface 221 in the form of an arc surface. The first positioning surface 211 and the second positioning surface 221 are opposite and coaxially arranged, and the slot 23 is formed between the first positioning surface 211 and the second positioning surface 221.

[0087] The diameter of the first positioning surface 211 is larger than the diameter of the second positioning surface 221. The diameter of the first positioning surface 211 matches the outer diameter of the reference object 30, and the diameter of the second positioning surface 221 matches the inner diameter of the reference object 30. The slot 23 between the first positioning surface 211 and the second positioning surface 221 is a fan ring structure, and the slot 23 matches the inner and outer diameters of the reference object 30, and also matches the wall thickness of the reference object 30. When the positioning unit 20 is matched with the reference object 30, a part of the reference object 30 is located in the slot 23, and the outer circumference of the reference object 30 conforms to the first positioning surface 211, the inner circumference of the reference object 30 conforms to the second positioning surface 221, and the axial end of the reference object 30 is against the bottom of the slot 23. At this time, the positioning unit 20 is axially and radially positioned relative to the reference object 30, that is, the correction cavity 11 is positioned relative to the reference object 30, so that the correction cavity 11 calibrates the standard position of the cleaning head 40.

[0088] In other alternative embodiments, the specific shapes of the first positioning surface 211 and the second positioning surface 221 can be adjusted based on the actual structure of the reference object 30 and the matching relationship with the reference object 30 .

[0089] Please continue to refer to Figure 3As shown, in this embodiment, the axial projection of the first positioning member 21 and the second positioning member 22 is a fan-ring structure. The axial direction of the first positioning member 21 and the second positioning member 22 is parallel to the axial direction of the correction cavity 11. Therefore, a fan-ring-shaped groove structure is formed between the first positioning member 21 and the second positioning member 22. The first positioning member 21 and the second positioning member 22 are configured as a fan-ring structure, which is adapted to the notch 13 structure of the correction cavity 11. The first positioning member 21 and the second positioning member 22 are also hollowed out corresponding to the notch 13 of the correction cavity 11. Therefore, the entire position correction device has no physical structure at the position of the notch 13, thereby effectively preventing interference with the cleaning head 40.

[0090] In this embodiment, the central axis of the first positioning surface 211 and the second positioning surface 221 are collinear with the central axis of the inner circumference of the correction cavity 11. Figure 4 As shown, when the upper end of the reference object 30 is inserted into the slot 23, the central axis of the first positioning surface 211 and the second positioning surface 221 are collinear with the central axis of the reference object 30. Since the central axis of the first positioning surface 211 and the second positioning surface 221 are coaxially arranged with the inner circumference of the correction cavity 11, the central axis of the inner circumference of the correction cavity 11 is collinear with the central axis of the reference object 30. Figure 5 and Figure 6 As shown, when the outer circumference of the cleaning head 40 is conformably fitted with the inner circumference of the correction cavity 11, the central axis of the cleaning head 40 is collinear with the central axis of the correction cavity 11 and the central axis of the reference object 30, and the position of the cleaning head 40 is corrected.

[0091] Combination Figure 2 and Figure 3 As shown, in this embodiment, the outer circumference of the correction unit 10 is an arc surface, and the outer circumference of the correction unit 10 is coaxially arranged with the inner circumference of the correction cavity 11. Specifically, the second positioning member 22 is connected to one axial end of the correction unit 10, and the wall thickness of the second positioning member 22 is less than the wall thickness of the correction unit 10, and the outer circumference of the second positioning member 22 is coplanar with the outer circumference of the correction unit 10. In order to make the overall consistency of the entire correction device better, it is preferred that the first positioning member 21 and the correction unit 10 are integrally formed.

[0092] Please continue to refer to Figures 1 to 3 As shown, the slot 23 and the correction unit 10 are offset in the axial direction. Figure 4As shown, when the position correction device is installed on the reference object 30, the reference object 30 is in direct contact with the first positioning member 21 and the second positioning member 22. The correction unit 10 is located above the upper port of the reference object 30, that is, the correction unit 10 is located outside the reference object 30. This matching method makes the shape of the correction unit 10 not limited by the inner cavity of the reference object 30. Therefore, in other alternative embodiments, the shape of the correction unit 10 can be set to other structures, such as a polygonal structure, and the shape of the correction unit 10 can be adaptively adjusted based on actual needs.

[0093] Please continue to refer to Figures 1 to 3 As shown, in this embodiment, two first positioning members 21 are provided, and one second positioning member 22 is provided. The two first positioning members 21 are provided at the periphery of the second positioning member 22 and are provided around the second positioning member 22. The first positioning member 21 is connected to the outer peripheral surface of the correction unit 10.

[0094] Specific, combined Figure 1 As shown, the first positioning member 21 is divided into a thick-walled portion 212 and a thin-walled portion 213 along the axial direction, wherein the wall thickness of the thick-walled portion 212 is greater than that of the thin-walled portion 213, and the thick-walled portion 212 is conformably connected to the outer peripheral surface of the correction unit 10. The thick-walled portion 212 and the thin-walled portion 213 are integrally formed, the outer peripheral surface of the thick-walled portion 212 is coplanar with the outer peripheral surface of the thin-walled portion 213, and the inner peripheral surface of the thick-walled portion 212 and the inner peripheral surface of the thin-walled portion 213 have a height difference, and the height difference determines the slot width of the slot 23.

[0095] Two first positioning members 21 cooperate with a second positioning member 22 to form two slots 23. This arrangement can reduce the material used in the positioning unit 20 and reduce its material cost on the one hand. On the other hand, the two slots 23 can enable the entire position correction device to form a stable fit with the reference object 30 and also form a high-precision fit.

[0096] In other alternative embodiments, one first positioning member 21 may be provided, and multiple second positioning members 22 may be provided; or one first positioning member 21 and one second positioning member 22 may be provided, or multiple first positioning members 21 and second positioning members 22 may be provided. The specific number of the first positioning member 21 and the second positioning member 22 may be flexibly adjusted based on usage requirements.

[0097] Furthermore, the positioning unit 20 also includes a limiting structure 24, which is arranged on the first positioning member 21 and / or the second positioning member 22, and the limiting structure 24 is used to limit the orientation of the notch 13 relative to the reference object 30 after the reference object 30 is inserted into the slot 23.

[0098] Please refer to Figures 1 to 3As shown, there are two limiting structures 24, and the two limiting structures 24 are respectively arranged on the two first positioning members 21. The limiting structure 24 is arranged at one end of the first positioning member 21 away from the correction unit 10 along its axial direction, and the two limiting structures 24 are respectively arranged on the side of the two first positioning members 21 where the ends are away from each other along the circumferential direction. The limiting structure 24 is a right-angled triangular plate structure, one of which is in contact with and connected to the axial end of the first positioning member 21, and the other right-angled side extends along the axial direction of the first positioning member 21. The right-angled side is used as a positioning side to cooperate with the structural member on the reference object 30 to achieve the effect of positioning the entire position correction device.

[0099] Combination Figures 4 to 7 As shown, in this embodiment, the reference object 30 is a drainage cylinder, and two fixtures 31 are provided on its outer circumferential surface. The positioning edges of the two limiting structures 24 are respectively fitted with the edges of the two fixtures 31, so that the cooperation of the two limiting structures 24 and the two fixtures 31 is used to circumferentially position the position correction device, thereby limiting the direction of the notch 13, so that the direction in which the cleaning head 40 enters the correction cavity 11 along the radial direction is determined. The direction of the notch 13 can be set to adapt to the moving path of the cleaning head 40, so that when the cleaning head 40 moves along its original moving path, it will pass through the notch 13 and enter the correction cavity 11 to achieve position correction, so that the cleaning process is not affected during the position correction process, which helps to further optimize the position correction process and improve the position correction efficiency.

[0100] In other alternative embodiments, the limiting structure 24 can adjust its structural shape and setting position based on the actual structure of the reference object 30. For example, when the inner wall of the reference object 30 has a corresponding structural member, the limiting structure 24 can be set on the second positioning member 22. Or the limiting structure 24 can also be set on both the first positioning member 21 and the second positioning member 22. Or in other alternative embodiments, the limiting structure 24 can also be set on the correction unit 10.

[0101] Combination Figures 4 to 6 As shown, in this embodiment, when the entire position correction device is matched with the reference object 30, the correction unit 10 is located outside the reference object 30. Therefore, the side wall of the reference object 30 will not hinder the notch 13. Therefore, in other alternative embodiments, the first positioning member 21 and the second positioning member 22 can also be set as an inner and outer nested ring structure, that is, the first positioning member 21 and the second positioning member 22 are not configured with a hollow structure adapted to the notch 13. At this time, the first positioning member 21 and the second positioning member 22 are surrounded to form a circular slot 23, and the slot 23 can form a complete plug-in fit with the upper end of the reference object 30.

[0102] Furthermore, the side wall of the slot 23 and the bottom of the slot 23 are provided with an anti-skid layer. The anti-skid layer is preferably an elastic cushion layer that fits the side wall and the bottom of the slot 23, and the elastic cushion layer is, for example, an elastic material such as polyurethane rubber and polytetrafluoroethylene. The provision of the anti-skid layer can prevent the relative sliding of the position correction device and the reference object 30 after they are matched, thereby improving the matching stability of the two. At the same time, the anti-skid layer is made of elastic material, which also avoids rigid contact between the correction device and the reference object 30.

[0103] In other alternative embodiments, the anti-skid layer may be provided only on the sidewall or the bottom of the slot 23. The anti-skid layer may also be formed on the sidewall and the bottom of the slot 23 to form a surface with a relatively large roughness, for example, the sidewall and the bottom of the slot 23 may be processed to form an uneven surface or a grid structure to form the above-mentioned anti-skid layer.

[0104] Furthermore, a hollow area is provided on the second positioning member 22 .

[0105] Please continue to refer to Figures 1 to 3 As shown, the hollow area includes three groups of openings 25 provided on the second positioning member 22, and two grooves 26 provided on the second positioning member 22, wherein the two grooves 26 extend along the axial direction of the second positioning member 22 to the end of the second positioning member 22 away from the correction unit 10, and the two grooves 26 are respectively opposite to the two first positioning members 21 in the radial direction. Among the three groups of openings 25, each group includes two openings 25 arranged along the axial direction, and the three groups of openings 25 and the two grooves 26 are staggered and arranged at equal intervals along the circumferential direction of the second positioning member 22. Through this arrangement, on the one hand, the second positioning member 22 can be ensured to have better structural strength and rigidity as a whole through the better layout of the hollow area, and it is also beneficial to the lightweight design of the second positioning member 22, reducing the material cost, and at the same time, it can also reduce the contact area with the reference object 30, which is convenient for the disassembly and assembly of the position correction fixture.

[0106] In other alternative embodiments, the corresponding hollow area may be provided only on the first positioning member 21 , or the corresponding hollow area may be provided on both the first positioning member 21 and the second positioning member 22 .

[0107] In other alternative embodiments, the specific shape and setting position of the hollow area can be flexibly adjusted based on actual usage requirements.

[0108] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0109] The above description is only a description of the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention. Any changes or modifications made by a person skilled in the art in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A cleaning head position correction device, characterized in that: include: Correction unit and positioning unit; The positioning unit is arranged on the correction unit, and the positioning unit is used to position the correction unit relative to a reference object; The correction unit is provided with a correction cavity, the shape of which is adapted to at least a part of the outer contour of the cleaning head; The correction cavity is used to accommodate the cleaning head when the correction unit is positioned relative to the reference object, so that at least a portion of the outer contour of the cleaning head conforms to the inner wall of the correction cavity to correct the position of the cleaning head.

2. The cleaning head position correction device according to claim 1, characterized in that: The positioning unit includes a first positioning member and a second positioning member which are arranged on the correction unit, and a slot for inserting and matching with the reference object is formed between the first positioning member and the second positioning member.

3. The cleaning head position correction device according to claim 2, characterized in that: The first positioning member has a first positioning surface in the form of an arc surface, the second positioning member has a second positioning surface in the form of an arc surface, the first positioning surface and the second positioning surface are opposite and coaxially arranged, and the slot is formed between the first positioning surface and the second positioning surface.

4. The cleaning head position correction device according to claim 3, characterized in that: The inner circumference of the correction cavity is an arc surface, and the central axes of the first positioning surface and the second positioning surface are collinear with the central axis of the inner circumference of the correction cavity.

5. The cleaning head position correction device according to claim 1, characterized in that: The correction unit further includes a guide portion, which is connected to the correction cavity and is used to guide the cleaning head into the correction cavity.

6. The cleaning head position correction device according to any one of claims 1 to 5, characterized in that: The correction cavity passes through at least one end of the correction unit along its axial direction, and the correction unit has a notch; Along the axial direction perpendicular to the correction cavity, one end of the notch is communicated with the correction cavity, and the other end passes through the outer peripheral wall of the correction unit.

7. The cleaning head position correction device according to claim 6, characterized in that: When the correction unit includes a guide portion, the guide portion is arranged on both sides of the notch along the circumferential direction of the correction cavity.

8. The cleaning head position correction device according to claim 7, characterized in that: The guide portion includes a guide wall and a rotating member, the guide wall is connected to the edge of the correction cavity, the rotating member is rotatably installed on the guide wall, and the rotation axis of the rotating member is parallel to the axial direction of the correction cavity.

9. The cleaning head position correction device according to claim 6, characterized in that: The positioning unit also includes a limiting structure; When the positioning unit includes a first positioning member and a second positioning member, the limiting structure is arranged on the first positioning member and / or the second positioning member; The limiting structure is used to limit the direction of the notch relative to the reference object after the reference object is inserted and matched with the slot.

10. The cleaning head position correction device according to claim 2, characterized in that: The side wall of the slot and / or the bottom of the slot are provided with an anti-slip layer; And / or, the first positioning member and / or the second positioning member are provided in plurality, and form a plurality of the slots; And / or, a hollow area is provided on the first positioning member and / or the second positioning member; And / or, the first positioning member and / or the second positioning member are both in a fan-shaped ring shape.

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