An active adsorption-type water-guided laser jet splash suppression device

Abstract

The present invention belongs to the field of water-guided laser technology and relates to an active adsorption-type water-guided laser jet splash suppression device. The present invention uses a water-guided laser jet splash suppression device during water-guided laser equipment processing operations. By using a negative pressure adsorption disk in conjunction with a vacuum generator to generate negative pressure, the device can actively and effectively absorb the sputtering recoil after the high-pressure jet contacts the workpiece, preventing the sputtering water droplets from gathering at the lower end of the nozzle and secondary ejection. At the same time, it continuously absorbs the water mist generated in the processing area, protecting the morphological stability of the water beam optical fiber from multiple aspects and significantly improving processing accuracy and material removal consistency. The present invention uses a radial straightening ring to replace the multi-symmetrical column flow channel structure of a traditional coupling device, which can meet the requirements of stable water flow inside the cavity of the water-guided laser coupling device and uniform distribution of the water layer above the nozzle, achieving uniform water flow rate and pressure inside the cavity, and reducing the processing difficulty and cost of manufacturing the coupling device.

Description

Technical Field

[0001] The invention belongs to the technical field of water-guided lasers and relates to an active adsorption-type water-guided laser jet splash suppression device. Background Art

[0002] Water-guided laser processing technology utilizes the principle of total reflection of laser light at the interface between a water jet and air. It couples a focused laser beam of a specific wavelength into a high-speed, fine water beam to process the workpiece. Compared to traditional laser processing, workpieces processed using water-guided lasers exhibit a smaller heat-affected zone and higher precision. However, the stability of the water jet limits its processing capabilities, and the splashing of high-pressure water in the groove structure is a key factor affecting water jet stability.

[0003] An authorized invention patent (CN116727844) is titled: A Water-guided Laser Water Jet Stabilization and Enhancement Coupling Device. This patent provides a water-guided laser water jet stabilization and enhancement coupling device, comprising an upper shell, a lower shell, an intermediate shell, a sealing cover, and light-transmitting glass. The lower shell of the coupling device is provided with a jet chamber and an annular air gap, which enhance the stability of the water jet by creating a protective atmosphere. This device can, to a certain extent, reduce the friction between the high-speed water jet and the air, thereby increasing the stable length of the water jet. However, in practical applications, the design of a reasonable annular air gap structure is difficult, and the device does not fully consider the impact of the jet's sputtering recoil after contact with the workpiece.

[0004] An authorized invention patent (CN105817760) is titled: A nozzle splash-proof device for a water-guided laser processing system. This patent provides a nozzle splash-proof device for a water-guided laser processing system, comprising a baffle, a rotor, a stator, an intermediate housing, and a nozzle. The baffle blocks the splashing of water generated during the processing process, and by driving the baffle with the rotor, water droplets are thrown away from the water jet under the action of gravity and centrifugal force. This ensures the stability of the water jet. However, this device does not fully consider that the water mist environment during water-guided laser processing will also affect the jet stability. The device's ability to handle water mist is insufficient, and the target distance is significantly increased, sacrificing processing efficiency to a certain extent. Summary of the Invention

[0005] In order to solve the problems existing in the above-mentioned prior art, the purpose of the present invention is to provide an active adsorption-type water-guided laser jet splash suppression device with a high degree of integration, a strong anti-splashing effect and a simple structure.

[0006] The technical means adopted in the present invention are as follows:

[0007] An active adsorption-type water-guided laser jet splash suppression device includes a coupling cavity upper shell, a coupling cavity base is installed below the coupling cavity upper shell, radial rectification modules are assembled inside the coupling cavity upper shell and the coupling cavity base, and a negative pressure adsorption disk is installed below the coupling cavity base.

[0008] The coupling cavity upper shell is provided with a high-pressure water inlet, symmetrically distributed on both sides to ensure uniform high-pressure water entry into the coupling cavity. A light inlet is provided in the center of the coupling cavity upper shell for laser light to pass through. A first water outlet is provided in the center of the coupling cavity base for the passage of jets. A straightening ring retaining groove is provided in the center of the upper end face of the coupling cavity base to position the radial straightening ring. The upper end face of the coupling cavity base is provided with an outer ring sealing groove and an inner ring sealing groove for the sealing ring. The coupling cavity base is positioned relative to the coupling cavity upper shell via a positioning step on the upper end face and is connected to the coupling cavity upper shell via threads. The coupling cavity base and the coupling cavity upper shell are clamped together to form a sealed high-pressure water chamber. The radial straightening module includes a window pressure block, which is positioned via a step below the light inlet. A radial straightening ring is installed between the window pressure block and the coupling cavity base.

[0009] The radial straightening ring is provided with an upper positioning groove and a lower positioning groove. The diameter φ of the upper positioning groove can be set to 24mm-30mm, and multiple specifications of optical windows with a thickness h1 of 4mm-6mm can be installed inside. The unsupported pressure area of ​​the optical window is 12.56mm. 2 -28.26mm 2 , can withstand a maximum internal pressure of 40Mpa, meeting the working conditions of water-guided laser high-pressure jet. A sealing sheet is provided between the optical window and the window block. A water jet nozzle is installed in the lower positioning groove, and the center of the water jet nozzle can open a multi-specification fine cylindrical spray hole with a diameter of 50μm-200μm to meet the needs of different processing scenarios. Radial rectification channels are evenly arranged on the circumference of the radial rectification ring. The diameter of the radial rectification channel D1 can be set to 1.5mm-3mm, and the number can be set to 6-8, which suppresses the vortex above the water jet nozzle and the uneven velocity distribution, thereby achieving effective rectification and generating a high-pressure jet with a stable interface and strong bunching.

[0010] The negative pressure adsorption plate is threadedly connected to the coupling chamber base. A second water outlet is located in the center of the negative pressure adsorption plate, and a cluster of structural adsorption holes is provided on its lower end. Each hole in the adsorption hole cluster has an equal diameter (D2) that can be set to 1mm-1.5mm. An adsorption chamber is located above to collect splashing water droplets and process mist, which are then transported to the adsorption pipeline. The height h2 of the adsorption chamber can be set to 2mm-4mm to ensure sufficient liquid absorption flow. The adsorption pipeline has a diameter of 2mm-4mm and is located around the circumference of the negative pressure adsorption plate, connecting to the vacuum generator.

[0011] The structural adsorption holes on the lower end surface of the negative pressure adsorption disk are radially distributed with the second water outlet as the center. The angle θ between two adjacent radial paths can be set to 18°-24°, and the distance d between adjacent adsorption holes within each radial path can be set to 2.4mm-4.8mm. Because the area of ​​concentrated water droplet splashing in the water-guided laser is close to the center, the adsorption hole cluster exhibits a dense inner circle and sparse outer circle structure. The inner circle has approximately 9 holes per square centimeter, while the outer circle has approximately 4 holes per square centimeter. Therefore, the radial distribution of the adsorption hole cluster improves the adsorption effect of the inner circle under the same adsorption force, greatly ensuring the negative pressure adsorption disk's splash suppression capability.

[0012] A method for using an active adsorption-type water-guided laser jet splash suppression device, comprising the following steps:

[0013] Step 1: Connect the high-pressure water pipe to the high-pressure water inlets on both sides of the coupling chamber upper shell to ensure that the water chamber is well sealed. Connect the vacuum generator to the adsorption pipeline of the negative pressure adsorption plate to ensure that the pipeline connection is reliable.

[0014] Step 2: Open the water pipe valve and continuously flow high-pressure water at a stable pressure. Check for leaks at the interface. Wait until the high-pressure water completely fills the coupling chamber upper shell and the coupling chamber base. Observe from the underside of the coupling chamber base to see if a water jet is ejected from the water jet nozzle. If the water jet surface is smooth, the jet is stable, tight, and has strong convergence, it means that the fine jet meets the conditions for water-light coupling and you can proceed to the next step.

[0015] Step 3: Turn on the vacuum generator and wait for the pressure pointer on the vacuum generator to remain stable.

[0016] Step 4: After ensuring the laser can enter the water jet nozzle through the light inlet and completely penetrate the interior, turn on the laser at the set power. The device will generate a fine, energetic water beam that can be used to process the workpiece. At this point, the splash and water mist generated by the processing will be continuously extracted by the negative pressure suction plate.

[0017] Compared with the prior art, the present invention has the following advantages:

[0018] 1. During the water-guided laser processing operation, a water-guided laser jet splash suppression device is used. The negative pressure is generated by the negative pressure adsorption plate and the vacuum generator. It can actively and effectively absorb the sputtering recoil after the high-pressure jet contacts the workpiece, preventing the sputtering water droplets from gathering at the lower end of the nozzle and secondary ejection. At the same time, it continuously absorbs the water mist generated in the processing area, protecting the morphology of the water beam fiber from multiple aspects, and significantly improving the processing accuracy and material removal consistency.

[0019] 2. The coupling cavity upper shell, coupling cavity base, radial rectifier module, negative pressure adsorption disk, etc. are used to achieve stable and efficient water-guided laser processing. The device has the characteristics of low design difficulty, low manufacturing cost, and significant jet protection capability.

[0020] 3. The use of radial straightening rings to replace the multi-symmetrical column flow channel structure of the traditional coupling device can meet the requirements of stable water flow inside the cavity of the water-guided laser coupling device and uniform distribution of the water layer above the nozzle, thereby achieving uniformity of water flow rate and pressure inside the cavity and reducing the processing difficulty and cost of manufacturing the coupling device.

[0021] Based on the above reasons, the present invention can be widely promoted in the field of water-guided laser high-efficiency precision machining. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 This is a schematic exploded assembly diagram of the components of an active adsorption-type water-guided laser jet splash suppression device according to a specific embodiment of the present invention;

[0024] Figure 2 2. It is a cross-sectional view of an active adsorption-type water-guided laser jet splash suppression device according to a specific embodiment of the present invention;

[0025] Figure 3 This is a schematic structural diagram of a radial straightening ring in an active adsorption-type water-guided laser jet splash suppression device according to a specific embodiment of the present invention;

[0026] Figure 4 Schematic diagram of the cross-sectional structure of a negative pressure adsorption disk in an active adsorption-type water-guided laser jet splash suppression device according to a specific embodiment of the present invention;

[0027] Figure 5 Schematic diagram of the adsorption hole distribution of a negative pressure adsorption disk in an active adsorption type water-guided laser jet splash suppression device in a specific embodiment of the present invention;

[0028] In the figure: 101, coupling cavity upper shell; 102, high-pressure water inlet; 103, light inlet; 2, radial rectification module; 201, window pressure block; 202, radial rectification ring; 203, water jet nozzle; 204, optical window; 205, sealing plate; 206, upper positioning groove; 207, lower positioning groove; 208, radial rectification channel; 301, coupling cavity base; 302, first water outlet; 303, rectification ring retaining groove; 304, outer ring sealing groove; 305, inner ring sealing groove; 401, negative pressure adsorption disk; 402, second water outlet; 403, adsorption hole group; 404, adsorption chamber; 405, adsorption pipeline. DETAILED DESCRIPTION

[0029] The specific embodiments of the present invention are further described below with reference to the accompanying drawings.

[0030] Example 1:

[0031] like Figure 1 As shown, an active adsorption-type water-guided laser jet splash suppression device includes a coupling cavity upper shell 101, a coupling cavity base 301 is installed below the coupling cavity upper shell 101, a radial rectification module 2 is assembled inside the coupling cavity upper shell 101 and the coupling cavity base 301, and a negative pressure adsorption disk 401 is installed below the coupling cavity base 301.

[0032] like Figure 2 As shown, the coupling cavity upper shell 101 is provided with a high-pressure water inlet 102 for admitting high-pressure water into the coupling cavity. The high-pressure water inlet 102 is symmetrically distributed on both sides to maintain a uniform flow field within the cavity. A light inlet 103 is centrally defined in the coupling cavity upper shell 101 for allowing laser light to pass through. A first water outlet 302 is centrally defined in the coupling cavity base 301 for the passage of jet fluid. A straightening ring retaining groove 303 is centrally defined on the upper end surface of the coupling cavity base 301 to position the radial straightening ring 202. An outer ring sealing groove 304 and an inner ring sealing groove 305 are also defined on the upper end surface of the coupling cavity base 301 for accommodating the sealing ring. The coupling cavity base 301 is positioned relative to the coupling cavity upper shell 101 via a positioning step on its upper end surface. The coupling cavity base 301 is connected to the coupling cavity upper shell 101 via threads, clamping the coupling cavity base 301 and the coupling cavity upper shell 101 together to form a sealed high-pressure water chamber. The radial rectification module 2 includes a window pressing block 201 , which is positioned by a step below the light inlet 103 ; a radial rectification ring 202 is installed between the window pressing block 201 and the coupling cavity base 301 .

[0033] like Figure 3As shown, the radial straightening ring 202 is provided with an upper positioning groove 206 and a lower positioning groove 207. The upper positioning groove 206 has a diameter of φ = 30 mm, and an optical window 204 with a maximum thickness of h1 = 5 mm is installed inside. The unsupported pressure area of ​​the optical window 204 is 28.26 mm 2 , can withstand an internal pressure greater than 30Mpa, meeting the working conditions of the water-guided laser high-pressure jet. A sealing sheet 205 is provided between the optical window 204 and the window pressing block 201. A water jet nozzle 203 is installed in the lower positioning groove 207. The center of the water jet nozzle 203 is provided with a multi-specification fine cylindrical nozzle hole with a diameter of 50μm to meet the needs of different processing scenarios. Radial rectifying channels 208 are evenly arranged on the circumference of the radial rectifying ring 202. The diameter of the radial rectifying channel 208 is D1=2mm, and the number is 8. This distribution method can balance the distribution of high-pressure water streamlines inside the cavity, suppress the occurrence of vortices and uneven velocity distribution above the water jet nozzle 203, and the high-pressure water can be effectively rectified to generate a high-pressure jet with a stable interface and strong bundling.

[0034] like Figure 4 As shown, the negative pressure adsorption plate 401 is threadedly connected to the coupling chamber base 301. A second water outlet 402 is defined in the center of the negative pressure adsorption plate 401, and a structural adsorption hole cluster 403 is provided on its lower end surface. Each hole in the adsorption hole cluster 403 has a diameter D2 of 1 mm. Above this, an adsorption chamber 404 is located to collect splashing water droplets and process mist, which are then transported to an adsorption pipeline 405. The adsorption chamber has a height h2 of 2 mm, ensuring sufficient liquid flow. The adsorption pipeline 405, with a diameter of 2 mm, is located around the circumference of the negative pressure adsorption plate and is connected to the vacuum generator.

[0035] like Figure 5 As shown, the structural adsorption hole cluster 403 on the lower end surface of the negative pressure adsorption disk 401 is radially distributed with the second water outlet 402 as the center. The angle θ between two adjacent radial paths is 18°, and the distance d between adjacent adsorption holes within each radial path is 2.4 mm. Because the area of ​​concentrated water droplet splashing in the water-guided laser is close to the center, the adsorption hole cluster 403 exhibits a dense inner circle and sparse outer circle structure. The inner circle has approximately 9 holes per square centimeter, while the outer circle has approximately 4 holes per square centimeter. Therefore, the radial distribution of adsorption hole cluster 403 improves the adsorption effect of the inner circle under the same adsorption force, greatly ensuring the splash suppression capability of the negative pressure adsorption disk 401.

[0036] Example 2:

[0037] like Figure 3As shown, the radial straightening ring 202 is provided with an upper positioning groove 206 and a lower positioning groove 207. The diameter φ of the upper positioning groove 206 can be set to 24mm, and a multi-specification optical window 204 with a thickness h1 of 4mm can be installed inside. The unsupported pressure area of ​​the optical window 204 is 12.56mm 2 , can withstand a maximum internal pressure of 40Mpa, meeting the working conditions of water-guided laser high-pressure jet. A sealing sheet 205 is provided between the optical window 204 and the window pressing block 201. A water jet nozzle 203 is installed in the lower positioning groove 207. The center of the water jet nozzle 203 can open a multi-specification fine cylindrical spray hole with a diameter of 200μm to meet the needs of different processing scenarios. Radial rectifying channels 208 are evenly arranged on the circumference of the radial rectifying ring 202. The diameter D1 of the radial rectifying channel 208 can be set to 1.5mm, and the number can be set to 6, which suppresses the vortex and uneven velocity distribution above the water jet nozzle 203, thereby achieving effective rectification and generating a high-pressure jet with a stable interface and strong bunching.

[0038] like Figure 4 As shown, the negative pressure adsorption plate 401 is threadedly connected to the coupling chamber base 301. A second water outlet 402 is defined in the center of the negative pressure adsorption plate 401, and a structural adsorption hole cluster 403 is provided on its lower end surface. Each hole in the adsorption hole cluster 403 has an equal diameter (D2) that can be set to 1.5 mm. An adsorption chamber 404 is located above the plate to collect splashed water droplets and process mist, which are then transported to an adsorption pipeline 405. The height h2 of the adsorption chamber can be set to 4 mm to ensure sufficient liquid absorption flow. The adsorption pipeline 405, with a diameter of 4 mm, is located around the circumference of the negative pressure adsorption plate and is connected to the vacuum generator.

[0039] like Figure 5 As shown, the structural adsorption hole cluster 403 on the lower end surface of the negative pressure adsorption disk 401 is radially distributed with the second water outlet 402 as the center. The angle θ between two adjacent radial paths can be set to 18°-24°, and the distance d between adjacent adsorption holes within each radial path can be set to 4.8mm. Because the area of ​​concentrated water droplet splashing in the water-guided laser is close to the center, the adsorption hole cluster 403 exhibits a dense inner circle and sparse outer circle structure. The inner circle has approximately 9 holes per square centimeter, while the outer circle has approximately 4 holes per square centimeter. Therefore, the radial distribution of the adsorption hole cluster 403 improves the adsorption effect of the inner circle under the same adsorption force, greatly ensuring the splash suppression capability of the negative pressure adsorption disk 401.

[0040] Example 3:

[0041] For an active adsorption-type water-guided laser jet splash suppression device, the operating steps for suppressing water droplet splashing during the water-guided laser processing are as follows:

[0042] The following steps are involved:

[0043] 1) Connect the high-pressure water pipe to the high-pressure water inlets 102 on both sides of the coupling chamber upper shell 101 to ensure good sealing inside the water chamber. Connect the vacuum generator to the adsorption pipeline 405 of the negative pressure adsorption disk 401 to ensure the pipeline connection is reliable.

[0044] 2) Open the water pipe valve and continuously introduce high-pressure water at a stable pressure. Check the interface for leaks. Wait until the high-pressure water completely fills the coupling chamber upper shell 101 and the coupling chamber base 301. Observe from the underside of the coupling chamber base 301 to see if a water jet is ejected from the water jet nozzle 203. If the water jet surface is smooth, the jet is stable, tight, and has strong convergence, it indicates that the fine jet meets the conditions for water-light coupling and you can proceed to the next step.

[0045] 3) Turn on the vacuum generator and wait for the pressure pointer on the vacuum generator to remain stable.

[0046] 4) After ensuring that the laser can enter through the light inlet 103 and completely penetrate the water jet nozzle 203, turn on the laser at the set power. The device will generate a fine, energetic water beam for machining the workpiece. The splash and water mist generated by the machining process will be continuously removed by the negative pressure suction plate 401.

Claims

1. An active adsorption type water-guided laser jet splash suppression device, characterized in that: It comprises a coupling cavity upper shell (101), a coupling cavity base (301) is installed below the coupling cavity upper shell (101), a radial rectification module (2) is assembled inside the coupling cavity upper shell (101) and the coupling cavity base (301), and a negative pressure adsorption disk (401) is installed below the coupling cavity base (301); The coupling cavity upper shell (101) is provided with a high-pressure water inlet (102), which is symmetrically distributed on both sides. A light inlet (103) is provided at the center of the coupling cavity upper shell (101) for allowing laser to pass through. A first water outlet (302) is provided at the center of the coupling cavity base (301) for allowing jet to pass through. A rectifying ring retaining groove (303) is provided at the center of the upper end surface of the coupling cavity base (301) for positioning the radial rectifying ring (202). An outer ring sealing groove (304) and an inner ring sealing groove (305) are provided at the upper end surface of the coupling cavity base (301) for placing a sealing ring. The coupling cavity base (301) is positioned relative to the coupling cavity upper shell (101) through a positioning step on the upper end surface and is connected to the coupling cavity upper shell (101) through a thread. The coupling cavity base (301) and the coupling cavity upper shell (101) are clamped to form a sealed high-pressure water cavity. The radial rectification module (2) comprises a window pressing block (201), and the window pressing block (201) is positioned by a step below the light inlet (103); a radial rectification ring (202) is installed between the window pressing block (201) and the coupling cavity base (301); The negative pressure adsorption disc (401) is connected to the coupling cavity base (301) via a threaded connection; a second water outlet (402) is provided at the center of the negative pressure adsorption disc (401), and a structural adsorption hole group (403) is provided on the lower end surface; the structural adsorption hole group (403) on the lower end surface of the negative pressure adsorption disc (401) is radially distributed with the second water outlet (402) as the center, the angle θ between two adjacent radial paths is set to 18° to 24°, and the distance d between adjacent adsorption holes in each radial path is set to 2.4 mm to 4.8 mm; The diameters of the adsorption hole group (403) are equal, and each hole is set to 1 mm to 1.5 mm. An adsorption chamber (404) is provided above the adsorption hole group (403) for collecting splashed water droplets and processing water mist and transporting them to the adsorption pipeline (405). The height h2 of the adsorption chamber is set to 2mm-4mm; the diameter of the adsorption pipeline (405) is 2mm-4mm, and it is set on the circumference of the negative pressure adsorption disk and connected to the vacuum generator.

2. The active adsorption type water-guided laser jet splash suppression device according to claim 1 is characterized in that: The adsorption pore group (403) as a whole presents a structural feature of dense inner circle and sparse outer circle; the inner circle has 9 pore positions per square centimeter, and the outer circle has 4 pore positions per square centimeter.

3. The active adsorption type water-guided laser jet splash suppression device according to claim 1, characterized in that: The radial rectification ring (202) is provided with an upper positioning groove (206) and a lower positioning groove (207); an optical window (204) is installed inside the upper positioning groove (206); a sealing sheet (205) is provided between the optical window (204) and the window pressing block (201); a water jet nozzle (203) is installed in the lower positioning groove (207), a thin cylindrical spray hole is provided at the center of the water jet nozzle (203), and radial rectification channels (208) are evenly provided on the circumference of the radial rectification ring (202).

4. The active adsorption type water-guided laser jet splash suppression device according to claim 3, characterized in that: The diameter φ of the upper positioning groove (206) is set to 24 mm-30 mm, and a multi-specification optical window (204) with a thickness h1 of 4 mm-6 mm is installed inside it; the unsupported pressure area of ​​the optical window (204) is 12.56 mm²-28.26 mm², and can withstand a maximum internal pressure of 40 MPa.

5. The active adsorption type water-guided laser jet splash suppression device according to claim 3, characterized in that: A water jet nozzle (203) is installed in the lower positioning groove (207), and a fine cylindrical spray hole with a diameter of 50 μm-200 μm and multiple specifications is opened at the center of the water jet nozzle (203).

6. The active adsorption type water-guided laser jet splash suppression device according to claim 3, characterized in that: The diameter D1 of the radial rectification channel (208) is set to 1.5 mm-3 mm, and the number is set to 6-8, which suppresses the vortex and uneven velocity distribution above the water jet nozzle (203), thereby achieving effective rectification.

7. A method for using the active adsorption-type water-guided laser jet splash suppression device according to claim 3, characterized in that: Here are the steps: Step 1: Connect the high-pressure water pipe to the high-pressure water inlets (102) on both sides of the coupling chamber upper shell (101) to ensure that the water chamber is well sealed; connect the vacuum generator to the adsorption pipeline (405) of the negative pressure adsorption disk (401) to ensure that the pipeline connection is reliable; Step 2: Open the water pipe valve, continuously introduce high-pressure water with stable pressure, and check whether there is any water leakage at the interface. Wait until the high-pressure water completely fills the coupling chamber upper shell (101) and the coupling chamber base (301). Observe from the bottom side of the coupling chamber base (301) that a water jet is ejected from the water jet nozzle (203); when the surface of the water jet is smooth, the jet is stable and tight, and the bundle is strong, it means that the fine jet has met the conditions for water-light coupling, and the next step is carried out; Step 3: Turn on the vacuum generator and wait for the pressure pointer on the vacuum generator to remain stable; Step 4: After ensuring that the laser enters the interior through the light inlet (103) and completely enters the water jet nozzle (203), turn on the set power laser. The device will generate a fine water beam with energy for processing the workpiece. At this time, the splash and water mist generated by the processing will be continuously extracted by the negative pressure adsorption disk (401).

Images